| Entries |
| Document | Title | Date |
|---|
| 20080197383 | METHOD OF MANUFACTURING A SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR ELEMENT - A method of manufacturing a semiconductor element. A dislocation region is formed between a first layer and a second layer, the dislocation region including a plurality of dislocations. First interstitials in the first layer are at least partially eliminated using the dislocations in the dislocation region. Vacancies are formed in the second layer. Second interstitials in the second layer are at least partially eliminated using the vacancies in the second layer. | 08-21-2008 |
| 20080197384 | Field Effect Transistor Arrangement - A field effect transistor arrangement includes an electrically insulating layer, a source region, a drain region and a channel region arranged between source region and drain region, wherein the source region, the drain region and the channel region are in each case arranged on or above the electrically insulating layer, and also a gate region having an electrically insulating gate layer and an electrically conductive gate layer, which adjoins the channel region or is arranged at a distance from the latter and which extends at least partly along the channel region, wherein the source region and the drain region are in each case produced from electrically conductive carbon, and wherein the channel region is produced from strained silicon. | 08-21-2008 |
| 20080203447 | LOW-TEMPERATURE ELECTRICALLY ACTIVATED GATE ELECTRODE AND METHOD OF FABRICATING SAME - A gate electrode structure is provided, which includes, from bottom to top, an optional, yet preferred metallic layer, a Ge rich-containing layer and a Si rich-containing layer. The sidewalls of the Ge rich-containing layer include a surface passivation layer. The inventive gate electrode structure serves as a low-temperature electrically activated gate electrode of a MOSFET in which the materials thereof as well as the method of fabricating the same are compatible with existing MOSFET fabrication techniques. The inventive gate electrode structure is electrically activated at low processing temperatures (on the order of less than 750° C.). Additionally, the inventive gate electrode structure also minimizes gate-depletion effects, does not contaminate a standard MOS fabrication facility and has sufficiently low reactivity of the exposed surfaces that renders such a gate electrode structure compatible with conventional MOSFET processing steps. | 08-28-2008 |
| 20080203448 | STRESSED DIELECTRIC DEVICES AND METHODS OF FABRICATING SAME - A structure and a method of making the structure. The structure includes a field effect transistor including: a first and a second source/drain formed in a silicon substrate, the first and second source/drains spaced apart and separated by a channel region in the substrate; a gate dielectric on a top surface of the substrate over the channel region; and an electrically conductive gate on a top surface of the gate dielectric; and a dielectric pillar of a first dielectric material over the gate; and a dielectric layer of a second dielectric material over the first and second source/drains, sidewalls of the dielectric pillar in direct physical contact with the dielectric layer, the dielectric pillar having no internal stress or an internal stress different from an internal stress of the dielectric layer. | 08-28-2008 |
| 20080203449 | SOURCE/DRAIN STRESSOR AND METHOD THEREFOR - A method for forming a semiconductor device is provided. The method includes forming a gate structure overlying a substrate. The method further includes forming a sidewall spacer adjacent to the gate structure. The method further includes performing an angled implant in a direction of a source side of the semiconductor device. The method further includes annealing the semiconductor device. The method further includes forming recesses adjacent opposite ends of the sidewall spacer in the substrate to expose a first type of semiconductor material. The method further includes epitaxially growing a second type of semiconductor material in the recesses, wherein the second type of semiconductor material has a lattice constant different from a lattice constant of the first type of semiconductor material to create stress in a channel region of the semiconductor device. | 08-28-2008 |
| 20080217665 | SEMICONDUCTOR DEVICE STRUCTURE HAVING ENHANCED PERFORMANCE FET DEVICE - A method for making a semiconductor device structure, includes: providing a substrate; forming on the substrate: a first layer below and second layers on a gate with spacers, source and drain regions adjacent to the gate, silicides on the gate and source and drain regions; disposing a stress layer over the structure resulting from the forming step; disposing an insulating layer over the stress layer; removing portions of the insulating layer to expose a top surface of the stress layer; removing the top surface and other portions of the stress layer and portions of the spacers to form a trench, and then disposing a suitable stress material into the trench. | 09-11-2008 |
| 20080224184 | Transistor Manufacture - A method of making a source-gated transistor is described, in which a gate ( | 09-18-2008 |
| 20080224185 | SEMICONDUCTOR DEVICE HAVING A METAL CARBIDE GATE WITH AN ELECTROPOSITIVE ELEMENT AND A METHOD OF MAKING THE SAME - A semiconductor device structure is formed over a semiconductor substrate and has a gate dielectric over the semiconductor substrate and a gate over the gate dielectric. The gate, at an interface with the gate dielectric, comprises a transition metal, carbon, and an electropositive element. The transition metal comprises one of group consisting of tantalum, titanium, hafnium, zirconium, molybdenum, and tungsten. The electropositive element comprises one of a group consisting of a Group IIA element, a Group IIIB element, and lanthanide series element. | 09-18-2008 |
| 20080230814 | Methods for fabricating a semiconductor device - A method for fabricating a semiconductor device comprises providing a silicon-containing substrate with first, second, and third regions. First, second, and third gate stacks respectively overlie a portion of the silicon-containing substrate in the first, second, and third regions. A spacer is formed on opposing sidewalls of each of the first, second, and third gate stacks, the spacer overlying a portion of the silicon-containing substrate in the first, second, and third regions, respectively. A source/drain region is formed in a portion of the silicon-containing substrate in the first, second, and third regions, with the source/drain region adjacent to the first, second, and third gate stacks, respectively. The first, second, and third gate stacks have first, second, and third gate dielectric layers of various thicknesses and at least one thereof with a relatively thin thickness is treated by NH | 09-25-2008 |
| 20080230815 | Mitigation of gate to contact capacitance in CMOS flow - Sidewall spacers that are primarily oxide, instead of nitride, are formed adjacent to a gate stack of a CMOS transistor. Individual sidewall spacers are situated between a conductive gate electrode of the gate stack and a conductive contact of the transistor. As such, a capacitance can develop between the gate electrode and the contact, depending on the dielectric constant of the interposed sidewall spacer. Accordingly, forming sidewall spacers out of oxide, which has a lower dielectric constant than nitride, mitigates capacitance that can otherwise develop between these features. Such capacitance is undesirable, at least, because it can inhibit transistor switching speeds. Accordingly, fashioning sidewall spacers as described herein can mitigate yield loss by reducing the number of devices that have unsatisfactory switching speeds and/or other undesirable performance characteristics. | 09-25-2008 |
| 20080230816 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A method of manufacturing a semiconductor device has forming a first silicon film over the first insulating film, forming a second silicon film over the first silicon film, a first etching the second silicon film in a depth, which the first silicon film is not exposed, in first condition, a second etching a remaining portion of the second silicon film and the first silicon film in a depth, which the first insulating film is not exposed, in second condition which gives a higher vertical etching component ratio than the first condition; and a third etching a remaining portion of the first silicon film in third condition which an etching rate for the first silicon film is larger than an etching rate for the first insulating film as compared to the second condition, wherein an impurity concentration of a first conductivity type of the first silicon film is higher than an impurity concentration of first conductivity type of the second silicon film. | 09-25-2008 |
| 20080237658 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device is provided. A MOS transistor is formed on a substrate, and then a contact etching stop layer (CESL) is formed over the substrate. A first UV-curing process is performed to increase the stress of the CESL. A dielectric layer is formed on the CESL, and then a second UV-curing process is performed to increase the stress of the dielectric layer. A CMP process is conducted, and then a cap layer is formed on the dielectric layer. | 10-02-2008 |
| 20080237659 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device is provided. Devices are formed on a core region and a non-core region in a substrate. A strain process is performed to the device on the core region but is not performed to the device on the non-core region. | 10-02-2008 |
| 20080237660 | METHOD TO DEPOSIT SILICON FILM ON A SUBSTRATE - A semiconductor device and a method to fabricate a semiconductor device on a silicon substrate are illustrated. The semiconductor may comprise an amorphous silicon film, in the source/drain region of a semiconductor, having low amount of hydrogen and high concentration of carbon and phosphorous, which enhances performance of the semiconductor device. | 10-02-2008 |
| 20080237661 | ULTRA-ABRUPT SEMICONDUCTOR JUNCTION PROFILE - The present invention discloses a method including: providing a substrate; forming recessed regions adjacent to both sides of a gate on the substrate; performing an angled co-implant of a species in two steps with two different energies and two different doses into the recessed regions; forming Silicon-Germanium in the recessed regions; forming source/drain extensions adjacent to both sides of the gate with a dopant; and performing an anneal to activate the dopant. | 10-02-2008 |
| 20080237662 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device is provided. A MOS transistor is formed on a substrate, and then a contact etching stop layer (CESL) is formed over the substrate. A first UV-curing process is performed to increase the stress of the CESL. A dielectric layer is formed on the CESL, and then a second UV-curing process is performed to increase the stress of the dielectric layer. A CMP process is conducted, and then a cap layer is formed on the dielectric layer. | 10-02-2008 |
| 20080246061 | STRESS LAYER STRUCTURE - A stress layer structure disposed on a substrate including a device region and a non-device region is provided. The device region includes active regions and a non-active region. The stress layer structure has stress patterns, at least one partition line, and at least one dummy stress pattern. Each of the stress patterns is disposed on the substrate of each of the active regions, respectively. The partition line exposes a portion of the substrate and divides the two adjacent stress patterns. The dummy stress pattern is disposed on the substrate in the partition line. | 10-09-2008 |
| 20080246062 | Semiconductor based controllable high resistance device - The field of invention is in the area of MOS integrated circuits operating with very low currents in the weak inversion region or sub threshold. The method aims at providing linear resistor with a value in the multi-mega ohm range. | 10-09-2008 |
| 20080251819 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device may include a semiconductor substrate, a diffusion layer provided over the semiconductor substrate, source and drain diffusion regions provided in upper regions of the diffusion layer, a gate insulating film provided over the source and drain diffusion regions and the diffusion layer, a gate electrode provided on the gate insulating film and positioned over the diffusion layer, a passivation film provided over the gate insulating film and the gate electrode, an insulating film that covers the passivation film, and contact plugs that penetrate the insulating film, the passivation film, and the gate insulating film, so that the contact plugs reach the source and drain diffusion regions. The contact plugs are positioned near side walls of the gate electrode. Fluorine is implanted to the passivation film. Fluorine is diffused to a silicon-insulator interface between the gate insulating film and the diffusion layer under the gate electrode. | 10-16-2008 |
| 20080258185 | Semiconductor structure with dielectric-sealed doped region - Leakage current can be substantially reduced by the formation of a seal dielectric in place of the conventional junction between source/drain region(s) and the substrate material. Trenches are formed in the substrate and lined with a seal dielectric prior to filling the trenches with semiconductor material. Preferably, the trenches are overfilled and a CMP process planarizes the overfill material. An epitaxial layer can be grown atop the trenches after planarization, if desired. | 10-23-2008 |
| 20080258186 | Source and Drain Formation in Silicon on Insulator Device - A silicon on insulator device has a silicon layer ( | 10-23-2008 |
| 20080265290 | DOUBLE MESH FINFET - A multiple gate field-effect transistor is built from an overlapping mesh assembly. The assembly comprises a first layer comprising a semiconductor material formed into at least one fin, a least one source, and at least one drain. The first layer comprises a portion of a first mesh, electrically separated from the rest of the mesh. Similarly, a second layer is formed over the first layer and electrically isolated from the first layer, the second layer being electrically conductive and comprising a gate for the at least one fin of the transistor. The second layer comprises a portion of a second mesh offset from the first mesh and overlapping the first mesh, the second layer of the MuGFET device electrically separated from the rest of the second mesh. | 10-30-2008 |
| 20080265291 | MOSFET DEVICE INCLUDING A SOURCE WITH ALTERNATING P-TYPE AND N-TYPE REGIONS - Apparatus and methods are provided for fabricating semiconductor devices with reduced bipolar effects. One apparatus includes a semiconductor body ( | 10-30-2008 |
| 20080265292 | Novel HVNMOS structure for reducing on-resistance and preventing BJT triggering - A high-voltage metal-oxide-semiconductor (HVMOS) device and methods for forming the same are provided. The HVMOS device includes a substrate; a first high-voltage n-well (HVNW) region buried in the substrate; a p-type buried layer (PBL) horizontally adjoining the first HVNW region; a second HVNW region on the first HVNW region; a high-voltage p-well (HVPW) region over the PBL; an insulating region at a top surface of the second HVNW region; a gate dielectric extending from over the HVPW region to over the second HVNW region, wherein the gate dielectric has a portion over the insulating region; and a gate electrode on the gate dielectric. | 10-30-2008 |
| 20080265293 | Thin film transistor and method for fabricating the same, and liquid crystal display device and method for manufacturing the same - A thin film transistor (TFT) including a nanowire semiconductor layer having nanowires aligned in one direction in a channel region is disclosed. The nanowire semiconductor layer is selectively formed in the channel region. A method for fabricating the TFT, a liquid crystal display (LCD) device using the TFT, and a method for manufacturing the LCD device are also disclosed. The TFT fabricating method includes forming alignment electrodes on the insulating film such that the alignment electrodes face each other, to define a channel region, forming an organic film, to expose the channel region, coating a nanowire-dispersed solution on an entire surface of a substrate including the organic film, forming a nanowire semiconductor layer in the channel region by generating an electric field between the alignment electrodes such that nanowires of the nanowire semiconductor layer are aligned in a direction, and removing the organic film. | 10-30-2008 |
| 20080265294 | Semiconductor device manufacturing method including forming a metal silicide layer on an indium-containing layer - The present invention provides a semiconductor device manufacturing method of a semiconductor device having a contact plug, in which a contact hole formed by a surface portion of a high-concentration N-type diffusion layer formed on a semiconductor silicon substrate surface and an interlayer insulating film is implanted with indium ions at an energy ranging from 30 to 120 keV and an implantation amount ranging from 1.0×10 | 10-30-2008 |
| 20080272410 | Self-Aligned Spacer Contact - A metal-oxide-semiconductor field-effect transistor (MOSFET) having self-aligned spacer contacts is provided. In accordance with embodiments of the present invention, a transistor, having a gate electrode and source/drain regions formed on opposing sides of the gate electrode, is covered with a first dielectric layer. A first contact opening is formed in the first dielectric layer to expose at least a portion of one of the source/drain regions. A second dielectric layer is formed over the first dielectric layer. Thereafter, an inter-layer dielectric layer is formed over the second dielectric layer and a second contact opening is formed through the inter-layer dielectric layer. In an embodiment, an etch-back process may be performed on the second dielectric layer prior to forming the inter-layer dielectric layer. | 11-06-2008 |
| 20080272411 | SEMICONDUCTOR DEVICE WITH MULTIPLE TENSILE STRESSOR LAYERS AND METHOD - A semiconductor device has at least two tensile stressor layers that are cured with UV radiation. A second tensile stressor layer is formed after a first stressor layer. In some examples, the tensile stressor layers include silicon nitride and hydrogen. In some examples, the second tensile stressor layer has a greater shrinkage percentage due to the curing than the first tensile stressor layer. In one form, the second tensile stressor layer after the curing exerts a greater tensile stress than the first tensile stressor layer. The tensile stressors layers are utilized to improve carrier mobility in an N-channel transistor and thus enhance transistor performance. In one form a single group of overlying tensile stressor layers is provided with each layer being increasingly thicker and having increasingly more hydrogen prior to being cured. In other embodiments multiple overlying groups are formed, each group having a similar repeating depth and hydrogen profile. | 11-06-2008 |
| 20080272412 | METHOD AND STRUCTURE TO REDUCE CONTACT RESISTANCE ON THIN SILICON-ON-INSULATOR DEVICE - A method (and system) of reducing contact resistance on a silicon-on-insulator device, including controlling a silicide depth in a source-drain region of the device. | 11-06-2008 |
| 20080283878 | Method and Apparatus for Monitoring Endcap Pullback - Various apparatus and methods of monitoring endcap pullback are disclosed. In one aspect, an apparatus is provided that includes a substrate that has a plurality of semiconductor regions. Each of the plurality of semiconductor regions has a border with an insulating structure. A transistor is positioned in each of the plurality of semiconductor regions. Each of the transistors includes a gate that has a first lateral dimension and an end that has a position relative to its border. A voltage source is electrically coupled to the transistors whereby levels of currents flowing through the transistors are indicative of the positions of the ends of the gates relative to their borders. | 11-20-2008 |
| 20080283879 | TRANSISTOR HAVING GATE DIELECTRIC LAYER OF PARTIAL THICKNESS DIFFERENCE AND METHOD OF FABRICATING THE SAME - A transistor having a gate dielectric layer of partial thickness difference and a method of fabricating the same are provided. The method includes forming a gate dielectric layer having a main portion with a relatively thin thickness formed on a semiconductor substrate, and a sidewall portion with a relatively thick thickness formed on both sides of the main portion. A first gate is formed overlapping the main portion of the gate dielectric layer, and forming a second gate layer covering the sidewall portion of the gate dielectric layer and covering the first gate. The second gate layer is etched, thereby forming second gates patterned with a spacer shape on sidewalls of the first gate. The exposed sidewall portion of the gate dielectric layer is selectively etched using the second gates as a mask, thereby forming a pattern of the gate dielectric layer to be aligned with the second gates. A source/drain is formed in a portion of the semiconductor substrate exposed by the second gates. | 11-20-2008 |
| 20080290380 | SEMICONDUCTOR DEVICE WITH RAISED SPACERS - A semiconductor device includes a substrate and a gate formed on the substrate. A gate spacer is formed next to the gate. The gate spacer has a height greater than the height of the gate. A method of forming a semiconductor device includes providing a substrate with a gate layer. A hard mask layer is formed over the gate layer, and both layers are then etched using a pattern, forming a gate and a hard mask. A spacer layer is then deposited over the substrate, gate, and hard mask. The spacer layer is etched to form a gate spacer next to the gate. The hard mask is then removed. | 11-27-2008 |
| 20080296637 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes first gate structures, second gate structures, a first capping layer pattern, a second capping layer pattern, first spacers, second spacers, third spacers, and a substrate having first impurity regions and second impurity regions. The first gate structures are arranged on the substrate at a first pitch. The second gate structures are arranged on the substrate at a second pitch greater than the first pitch. The first capping layer pattern has segments extending along side faces of the first gate structures and segments extending along the substrate. The second capping layer pattern has segments extending along the second gate structures and segments extending along the substrate. The first spacers and the second spacers are stacked on the second capping layer pattern. The third spacers are formed on the first capping layer pattern. | 12-04-2008 |
| 20080296638 | Semiconductor device and method of manufacturing the same - A semiconductor device includes an active pattern on a substrate, the active pattern including a protrusion with a lower surface on the substrate and an upper surface opposite the lower surface, a width of the protrusion gradually decreasing from the lower surface to the upper surface, the upper surface of the protrusion being sharp and defining a first active region of the active pattern along a first direction, isolation layer patterns on the substrate in recesses at both sides of the active pattern, the isolation layer patterns exposing the first active region, a gate structure on the first active region and on the isolation layer patterns, the gate structure extending along a second direction, the first and second directions being perpendicular to each other, and source/drain regions under the first active region at both sides of the gate structure. | 12-04-2008 |
| 20080303067 | SPLIT GATE MEMORY CELL USING SIDEWALL SPACERS - A self-aligned split gate bitcell includes first and second regions of charge storage material separated by a gap devoid of charge storage material. Spacers are formed along sidewalls of sacrificial layer extending above and on opposite sides of the bitcell stack, wherein the spacers are separated from one another by at least a gap length. Etching the bitcell stack, selective to the spacers, forms a gap that splits the bitcell stack into first and second gates which together form the split gate bitcell stack. A storage portion of bitcell stack is also etched, wherein etching extends the gap and separates the corresponding layer into first and second separate regions, the extended gap being devoid of charge storage material. Dielectric material is deposited over the gap and etched back to expose a top surface of the sacrificial layer, which is thereafter removed to expose sidewalls of the split gate bitcell stack. | 12-11-2008 |
| 20080303068 | FIELD EFFECT TRANSISTOR USING CARBON BASED STRESS LINER - A stress liner for use within a semiconductor structure that includes a field effect device has a dielectric constant less than about 7 and a compressive stress greater than about 5 GPa. The stress liner may be formed of a carbon based material, preferably a tetrahedral amorphous carbon (ta-C) material including at least about 60 atomic percent carbon and no greater than C about 40 atomic percent hydrogen. The carbon based material may be either a dielectric material, or given appropriate additional dielectric isolation structures, a semiconductor material. In particular, a ta-C stress liner may be formed using a filtered cathodic vacuum arc (FCVA) physical vapor deposition (PVD) method. | 12-11-2008 |
| 20080303069 | TWO STEP PHOTORESIST STRIPPING METHOD SEQUENTIALLY USING ION ACTIVATED AND NON-ION ACTIVATED NITROGEN CONTAINING PLASMAS - A two-step nitrogen plasma method is used for stripping a photoresist layer from over a substrate. A first step within the two-step nitrogen plasma method uses a nitrogen plasma with ion activation to form from the photoresist layer over the substrate a treated photoresist layer over the substrate. A second step within the two-step nitrogen plasma method uses a second nitrogen plasma without ion activation to remove the treated photoresist layer from over the substrate. The method is particularly useful for stripping a patterned photoresist layer that is used for forming a gate electrode from a gate electrode material layer. | 12-11-2008 |
| 20080303070 | PREVENTING CAVITATION IN HIGH ASPECT RATIO DIELECTRIC REGIONS OF SEMICONDUCTOR DEVICE - Methods for preventing cavitation in high aspect ratio dielectric regions in a semiconductor device, and the device so formed, are disclosed. The invention includes depositing a first dielectric in the high aspect ratio dielectric region between a pair of structures, and then removing the first dielectric to form a bearing surface adjacent each structure. The bearing surface prevents cavitation of the interlayer dielectric that subsequently fills the high aspect ratio region. | 12-11-2008 |
| 20080308850 | TRANSISTOR WITH REDUCED CHARGE CARRIER MOBILITY AND ASSOCIATED METHODS - A device includes a first transistor including a fin and a second transistor including a fin, the fin of the first transistor having a lower charge carrier mobility than the fin of the second transistor. In a method, the fin of the first transistor is treated to have a lower charge carrier mobility than the fin of the second transistor. | 12-18-2008 |
| 20080315267 | Device Performance Improvement Using FlowFill as Material for Isolation Structures - A trench is formed in the surface of a provided semiconductor body. An oxide is deposited in the trench and a cap is deposited on the oxide, wherein the combination of the cap and the oxide impart a mechanical stress on the semiconductor body. | 12-25-2008 |
| 20080315268 | Methods and Apparatus for Semiconductor Memory Devices Manufacturable Using Bulk CMOS Process Manufacturing - The present invention discloses semiconductor devices that can be manufactured utilizing standard process of manufacturing and that can hold information. In accordance with a presently preferred embodiment of the present invention, one or more semiconductor devices can be formed in a well on a substrate where isolation trenches surround one or more devices to create storage regions (floating wells) that is capable of holding a charge. Depending on the charge in the storage region (floating well), it can represent information. The semiconductor devices of the present invention can be manufactured using the standard process of manufacturing (bulk cmos processing). | 12-25-2008 |
| 20090001430 | ELIMINATE NOTCHING IN SI POST SI-RECESS RIE TO IMPROVE EMBEDDED DOPED AND INSTRINSIC SI EPITAZIAL PROCESS - A dielectric element, and method of manufacturing the same, is disclosed for a semiconductor structure which comprises a substrate having a gate formed on a top surface of the substrate. The substrate and gate define a gap in a region between the gate and the substrate. A specified amount of dielectric on the substrate, at least a portion of which is in the gap, forms the dielectric element which substantially prevents unwanted electrical connectivity between the gate and the substrate. | 01-01-2009 |
| 20090001431 | Method for forming semiconductor contacts - In one embodiment of the invention, contact patterning may be divided into two or more passes which may allow designers to control the gate height critical dimension relatively independent from the contact top critical dimension. | 01-01-2009 |
| 20090001432 | Channel layer for a thin film transistor, thin film transistor including the same, and methods of manufacturing the same - Provided is a channel layer for a thin film transistor, a thin film transistor and methods of forming the same. A channel layer for a thin film transistor may include IZO (indium zinc oxide) doped with a transition metal. A thin film transistor may include a gate electrode and the channel layer formed on a substrate, a gate insulating layer formed between the gate electrode and channel layer, and a source electrode and a drain electrode which contact ends of the channel layer. | 01-01-2009 |
| 20090020791 | PROCESS METHOD TO FABRICATE CMOS CIRCUITS WITH DUAL STRESS CONTACT ETCH-STOP LINER LAYERS - Exemplary embodiments provide IC CMOS devices having dual stress layers and methods for their manufacture using a buffer layer stack between the two types of the stress layers. The buffer layer stack can include multiple buffer layers formed between a first type stress layer (e.g., a tensile stress layer) and a second type stress layer (e.g., a compressive stress layer) during the CMOS fabrication. Specifically, the buffer layer stack can be formed after the etching process of the first type stress layer but prior to the etching process of the second type stress layer, and thus to protect the etched first type stress layer during the subsequent etching process of the overlaid second type stress layer. In addition, a portion of the buffer layer stack can be formed between, for example, the compressive stress layer and the underlying PMOS device to enhance their adhesion. | 01-22-2009 |
| 20090020792 | ISOLATED TRI-GATE TRANSISTOR FABRICATED ON BULK SUBSTRATE - A method of forming an isolated tri-gate semiconductor body comprises patterning a bulk substrate to form a fin structure, depositing an insulating material around the fin structure, recessing the insulating material to expose a portion of the fin structure that will be used for the tri-gate semiconductor body, depositing a nitride cap over the exposed portion of the fin structure to protect the exposed portion of the fin structure, and carrying out a thermal oxidation process to oxidize an unprotected portion of the fin structure below the nitride cap. The oxidized portion of the fin isolates the semiconductor body that is being protected by the nitride cap. The nitride cap may then be removed. The thermal oxidation process may comprise annealing the substrate at a temperature between around 900° C. and around 1100° C. for a time duration between around 0.5 hours and around 3 hours. | 01-22-2009 |
| 20090020793 | FIELD EFFECT TRANSISTOR - A transistor comprising
| 01-22-2009 |
| 20090026507 | Semiconductor device and method of fabricating same - There are disclosed TFTs that have excellent characteristics and can be fabricated with a high yield. The TFTs are fabricated, using an active layer crystallized by making use of nickel. Gate electrodes are comprising tantalum. Phosphorus is introduced into source/drain regions. Then, a heat treatment is performed to getter nickel element in the active layer and to drive it into the source/drain regions. At the same time, the source/drain regions can be annealed out. The gate electrodes of tantalum can withstand this heat treatment. | 01-29-2009 |
| 20090032850 | N-channel MOS Transistor Fabricated Using A Reduced Cost CMOS Process - An NMOS transistor includes a semiconductor substrate of a first conductivity type, first and second well regions of a second conductivity type formed spaced apart in the substrate, a conductive gate formed over the region between the spaced apart first and second well regions where the region of the substrate between the spaced apart first and second well regions forms the channel region, dielectric spacers formed on the sidewalls of the conductive gate, first and second heavily doped source and drain regions of the second conductivity type formed in the semiconductor substrate and being self-aligned to the edges of the dielectric spacers. The first and second well regions extend from the respective heavily doped regions through an area under the spacers to the third well region. The first and second well regions bridge the source and drain regions to the channel region of the transistor formed by the third well. | 02-05-2009 |
| 20090032851 | Method for Producing a Semiconductor Body Having a Recombination Zone, Semiconductor Component Having a Recombination Zone, and Method for Producing Such a Semiconductor Component - In a method for producing a semiconductor body, impurities which act as recombination centers in the semiconductor body and form a recombination zone are introduced into the semiconductor body during the process of producing the semiconductor body. In a semiconductor component, comprising a semiconductor body having a front surface and an opposite rear surface, and also a recombination zone formed by impurities between the front and rear surfaces, wherein the impurities act as recombination centres, the surface state density at the front and rear surfaces of the semiconductor body is just as high as the surface state density at a front and rear surface of an identical semiconductor body without a recombination zone. | 02-05-2009 |
| 20090039399 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD OF THE SAME - A semiconductor device in which semiconductor epitaxial layers are embedded in the source/drain regions includes an element formation region formed in the major surface of a semiconductor substrate, a gate electrode formed on a part of the element formation region, the semiconductor epitaxial layers formed in the source/drain regions of the element formation region so as to sandwich the channel region below the gate electrode, and silicide layers formed on the gate electrode and semiconductor epitaxial layers. Each semiconductor epitaxial layer has a three-layered structure in which first semiconductor films different in material or composition from the semiconductor substrate sandwich a second semiconductor film having a silicidation reactivity higher than that of the first semiconductor films. Each silicide layer extends to the second semiconductor film along the interface between the semiconductor substrate and semiconductor epitaxial layer. | 02-12-2009 |
| 20090045440 | METHOD OF FORMING AN MOS TRANSISTOR AND STRUCTURE THEREFOR - In one embodiment, an MOS transistor is formed with trench gates. The gate structure of the trench gates generally has a first insulator that has a first thickness in one region of the gate and a second thickness in a second region of the gate. | 02-19-2009 |
| 20090050942 | SELF-ALIGNED SUPER STRESSED PFET - The embodiments of the invention comprise a self-aligned super stressed p-type field effect transistor (PFET). More specifically, a field effect transistor comprises a channel region comprising N-doped material and a gate above the channel region. The field effect transistor also includes a source region on a first side of the channel region and a drain region on a second side of the channel region opposite the first side. The source and drain regions each comprise silicon germanium, wherein the silicon germanium has structural indicia of epitaxial growth. | 02-26-2009 |
| 20090057729 | SEMICONDUCTOR DEVICE AND METHODS FOR FABRICATING SAME - A semiconductor device is provided which includes a substrate including an inactive region and an active region, a gate electrode structure having portions overlying the active region, a compressive layer overlying the active region, and a tensile layer overlying the inactive region and located outside the active region. The active region has a lateral edge which defines a width of the active region, and a transverse edge which defines a length of the active region. The gate electrode structure includes: a common portion spaced apart from the active region; a plurality of gate electrode finger portions integral with the common portion, and a plurality of fillet portions integral with the common portion and the gate electrode finger portions. A portion of each gate electrode finger portion overlies the active region. The fillet portions are disposed between the common portion and the gate electrode finger portions, and do not overlie the active region. The compressive layer also overlies the gate electrode finger portions, and the tensile layer is disposed adjacent the transverse edge of the active region. | 03-05-2009 |
| 20090057730 | METHODS FOR FORMING SELF-ALIGNED BORDERLESS CONTACTS FOR STRAIN ENGINEERED LOGIC DEVICES AND STRUCTURE THEREOF - A method for forming a borderless contact for a semiconductor FET (Field Effect Transistor) device, the method comprising, forming a gate conductor stack on a substrate, forming spacers on the substrate, such that the spacers and the gate conductor stack partially define a volume above the gate conductor stack, wherein the spacers are sized to define the volume such that a stress liner layer deposited on the gate conductor stack substantially fills the volume, depositing a liner layer on the substrate, the spacers, and the gate conductor stack, depositing a dielectric layer on the liner layer, etching to form a contact hole in the dielectric layer, etching to form the contact hole in the liner layer, such that a portion of a source/drain diffusion area formed in the substrate is exposed and depositing contact metal in the contact hole. | 03-05-2009 |
| 20090057731 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In a MOS transistor, a structure of trenches or fins arranged in parallel to a gate length direction is formed in a stepwise manner along a gate width direction to thereby reduce a step height of each step. Even if the MOS transistor includes a deep trench or a high fin in order to increase driving performance per unit area, a uniform impurity concentration in a channel region, a source diffusion layer, and a drain diffusion layer can be made by an ion implantation method. Accordingly, there can be obtained a stable characteristic that variation in the characteristic due to a surface on which the channel is formed does not appear, and a lateral MOS transistor with high driving performance having a reduced on-resistance per unit area can be provided. | 03-05-2009 |
| 20090065817 | DIELECTRIC SPACER REMOVAL - The present invention relates to semiconductor devices, and more particularly to a process and structure for removing a dielectric spacer selective to a surface of a semiconductor substrate with substantially no removal of the semiconductor substrate. The method of the present invention can be integrated into a conventional CMOS processing scheme or into a conventional BiCMOS processing scheme. The method includes forming a field effect transistor on a semiconductor substrate, the FET comprising a dielectric spacer and the gate structure, the dielectric spacer located adjacent a sidewall of the gate structure and over a source/drain region in the semiconductor substrate; depositing a first nitride layer over the FET; and removing the nitride layer and the dielectric spacer selective to the semiconductor substrate with substantially no removal of the semiconductor substrate. | 03-12-2009 |
| 20090072279 | Capacitor-less memory and abrupt switch based on hysteresis characteristics in punch-through impact ionization mos transistor (PI-MOS) - The present invention exploits the impact ionization induced by drain voltage increase and the onset of a bipolar parasitic in an Ω-gate field effect metal oxide insulator transistor (called PI-MOS), in order to obtain a memory effect and abrupt current switching. | 03-19-2009 |
| 20090072280 | PMOS TRANSISTOR WITH INCREASED EFFECTIVE CHANNEL LENGTH IN THE PERIPHERAL REGION AND METHOD OF MANUFACTURING THE SAME - In manufacturing a PMOS transistor, a semiconductor substrate having an active region and a field region is formed with a hard mask layer, which covers a center portion of the active region on the substrate in a lengthwise direction of a channel. The hard mask layer exposes the center portion of the active region in a widthwise direction of the channel and covers both edges of the substrate and the field region adjacent to the both edges. The substrate is etched to a predetermined depth using the hard mask layer as an etching barrier. The hard mask layer is then removed. A gate covering the center portion of the active region is formed on the lengthwise direction of the channel. Source and drain regions are formed at both edges of the gate. | 03-19-2009 |
| 20090085073 | MOSFET STRUCTURE AND METHOD OF MANUFACTURE - A method of forming a portion ( | 04-02-2009 |
| 20090085074 | TRENCH MOSFET AND METHOD OF MANUFACTURE UTILIZING FOUR MASKS - In accordance with the invention, a trench MOSFET semiconductor device is manufactured in accordance with a process comprising the steps of: providing a heavily doped N+ silicon substrate; utilizing a first mask to define openings for the trench gate and termination; utilizing a second mask as a source mask with openings determining the size and shape of a diffused source junction depth; utilizing a third mask as a contact mask to define contact hole openings; and utilizing a fourth mask as a metal mask, whereby only the first, second, third and fourth masks are utilized in the manufacture of the trench MOSFET semiconductor device. | 04-02-2009 |
| 20090085075 | METHOD OF FABRICATING MOS TRANSISTOR AND MOS TRANSISTOR FABRICATED THEREBY - A method of fabricating a MOS transistor, and a MOS transistor fabricated by the method. The method can include forming a gate pattern on a semiconductor substrate. The gate pattern can be formed by sequentially stacking a gate electrode and a capping layer pattern. The capping layer pattern is formed to have a lower capping layer pattern and an upper capping layer pattern. The lower capping layer pattern is formed to a smaller width than the upper capping layer pattern. | 04-02-2009 |
| 20090090938 | CHANNEL STRESS ENGINEERING USING LOCALIZED ION IMPLANTATION INDUCED GATE ELECTRODE VOLUMETRIC CHANGE - A method for fabricating a semiconductor structure uses a volumetric change ion implanted into a volumetric change portion of a gate electrode that is located over a channel region within a semiconductor substrate to form a volume changed portion of the gate electrode located over the channel region within the semiconductor substrate. The volume changed portion of the gate electrode is typically bidirectionally symmetrically graded in a vertical direction. The volume-changed portion of the gate electrode has a first stress that induces a second stress different than the first stress into the channel region of the semiconductor substrate. | 04-09-2009 |
| 20090090939 | SELF-ASSEMBLED SIDEWALL SPACER - A semiconductor structure is provided that includes a spacer directly abutting a topographic edge of at least one patterned material layer. The spacer is a non-removable polymeric block component of a self-assembled block copolymer. A method of forming such a semiconductor structure including the inventive spacer is also provided that utilizes self-assembled block copolymer technology. | 04-09-2009 |
| 20090090940 | SEMICONDUCTOR DEVICE - A semiconductor device is provided, which includes a first insulating layer over a first substrate, a transistor over the first insulating layer, a second insulating layer over the transistor, a first conductive layer connected to a source region or a drain region of the transistor through an opening provided in the second insulating layer, a third insulating layer over the first conductive layer, and a second substrate over the third insulating layer. The transistor comprises a semiconductor layer, a second conductive layer, and a fourth insulating layer provided between the semiconductor layer and the second conductive layer. One or plural layers selected from the first insulating layer, the second insulating layer, the third insulating layer, and the fourth insulating layer have a step portion which is provided so as not to overlap with the transistor. | 04-09-2009 |
| 20090090941 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - Aimed at providing a highly reliable semiconductor device appropriately increased in stress at the channel region so as to improve carrier injection rate, thereby dramatically improved in transistor characteristics, and made adaptable also to recent narrower channel width, and a method of manufacturing the same, and a method of manufacturing the same, a first sidewall composed of a stress film having expandability is formed on the side faces of a gate electrode, a second sidewall composed of a film having smaller stress is formed on the first sidewall, and a semiconductor, which is a SiC layer for example, is formed as being positioned apart from the first sidewall while placing the second sidewall in between. | 04-09-2009 |
| 20090090942 | Wiring structure, array substrate, display device having the same and method of manufacturing the same - A wiring structure includes a substrate, a copper oxide layer having 16˜39 at % oxygen on the substrate and a copper layer on the copper oxide layer. The copper oxide layer has a thickness of 10-1000 Å and the copper layer has a thickness of 300-8000 Å. The copper layer and the copper oxide layer further have an alloy element less than 10 wt % and the alloy element is selected from the group of Ag, Ni, Mg, Zr, N. | 04-09-2009 |
| 20090095990 | METAL-OXIDE-SEMICONDUCTOR TRANSISTOR AND METHOD OF FORMING THE SAME - A method of forming a metal-oxide-semiconductor (MOS) transistor device is provided. First, a semiconductor substrate is prepared. Subsequently, a gate structure is formed on the semiconductor substrate. The gate structure includes a first strip portion and a second strip portion that is not parallel to the first strip portion. The gate structure further includes a junction between the first strip portion and the second strip portion. Thereafter, a stressed cap layer is formed on the semiconductor substrate, and covers the gate structure. Next, a portion of the stressed cap layer is removed to expose the junction between the first strip portion and the second strip portion. | 04-16-2009 |
| 20090095991 | METHOD OF FORMING STRAINED MOSFET DEVICES USING PHASE TRANSFORMABLE MATERIALS - A method of forming a strained metal oxide semiconductor field effect transistor (MOSFET) device includes forming a gate conductor and gate insulator layer over a semiconductor substrate; forming source and drain regions in the semiconductor substrate, thereby defining the MOSFET device; forming a phase transformable material layer over the MOSFET device, wherein the phase transformable layer is in a first phase upon initial formation thereof, and following the initial formation of the phase transformable material layer, converting the phase transformable layer from the first phase to a second phase, wherein the second phase results in the phase transformable layer applying a longitudinal stress on a channel of the MOSFET device. | 04-16-2009 |
| 20090095992 | SEMICONDUCTOR DEVICE INCLUDING MOS FIELD EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR DEVICE - Element isolation regions are formed in a semiconductor substrate of a first conductivity type. A gate insulator is formed on the semiconductor substrate between the element isolation regions. A gate electrode is formed on the gate insulator. Sidewall insulating films are formed on side surfaces of the gate electrode. Trenches are formed on the semiconductor substrate between the element isolation regions and the gate electrode. A first epitaxial semiconductor layer of a second conductivity type is formed by the epitaxial growth method in each of the trenches. The first epitaxial semiconductor layer has a facet. A silicide film is formed on the first epitaxial semiconductor layer. A semiconductor region of the second conductivity type is formed in the semiconductor substrate under the first epitaxial semiconductor layer. | 04-16-2009 |
| 20090101942 | PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed is a transistor that incorporates epitaxially deposited source/drain semiconductor films and a method for forming the transistor. A crystallographic etch is used to form recesses between a channel region and trench isolation regions in a silicon substrate. Each recess has a first side, having a first profile, adjacent to the channel region and a second side, having a second profile, adjacent to a trench isolation region. The crystallographic etch ensures that the second profile is angled so that all of the exposed recess surfaces comprise silicon. Thus, the recesses can be filled by epitaxial deposition without divot formation. Additional process steps can be used to ensure that the first side of the recess is formed with a different profile that enhances the desired stress in the channel region. | 04-23-2009 |
| 20090101943 | Reversely Tapered Contact Structure Compatible With Dual Stress Liner Process - A semiconductor device having a silicon layer, a transistor having an electrical connection region in the silicon layer; and a conductive plug formed on and in electrical contact with the electrical connection region, the plug having side walls that taper inward away from the silicon layer. | 04-23-2009 |
| 20090101944 | ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME - It is made possible to form an interelectrode gap with high precision, without a decrease in the simplicity and convenience of the process to be carried out by an ink jet technique. A method for manufacturing an electronic device, includes: applying a water repellent agent onto a substrate by an ink jet technique to form a water repellent region on the substrate; dropping a solution containing a conductive ink material along edges of the water repellent region on the substrate by the ink jet technique to form a source electrode and a drain electrode; and forming a semiconductor layer to cover the water repellent region, the source electrode, and the drain electrode. | 04-23-2009 |
| 20090101945 | SEMICONDUCTOR DEVICE - A semiconductor device includes: a semiconductor substrate; an N-type MOSFET formed in a surface of the semiconductor substrate; a tensile stress film provided on the semiconductor substrate at least around a directly overlying region of a channel region of the N-type MOSFET and having tensile stress therein; and a compressive stress film provided in the directly overlying region of the channel region and having compressive stress therein. | 04-23-2009 |
| 20090108304 | PROTECTING SEMICONDUCTING OXIDES - In transistor structures such as thin film transistors (TFTs) in an array of cells, a layer of semiconducting oxide material that includes a channel is protected by a protective layer that includes low-temperature encapsulant material. The semiconducting oxide material can be a transition metal oxide material such as zinc oxide, and can be in an active layered substructure that also includes channel end electrodes. The low-temperature encapsulant can, for example, be an organic polymer such as poly(methyl methacrylate) or parylene, deposited on an exposed region of the oxide layer such as by spinning, spin-casting, evaporation, or vacuum deposition or an inorganic polymer deposited such as by spinning or liquid deposition. The protective layer can include a lower sublayer of low-temperature encapsulant on the exposed region and an upper sublayer of inorganic material on the lower sublayer. For roll-to-roll processing, a mechanically flexible, low-temperature substrate can be used. | 04-30-2009 |
| 20090108305 | SEMICONDUCTOR HAVING A CORNER COMPENSATION FEATURE AND METHOD - A semiconductor device includes an active semiconductor material. A transistor gate overlies a first portion of the active semiconductor material. A second portion intersects the first portion at a corner which is distorted during manufacture resulting in rounding of the corner. The active semiconductor material extends into the corner to create a concave corner. To reduce the corner rounding, a compensation feature extends from a first edge of the first portion by an amount less than needed to provide an electrical contact structure on the compensation feature. The feature is positioned laterally further away from the corner than the overlying transistor gate. The compensation feature is positioned from the corner by a dimension that is within 0.4 to 0.6 of the wavelength of light used to image features of the semiconductor device. Due to optical distortion the compensation feature itself has a nonlinear shape. | 04-30-2009 |
| 20090108306 | UNIFORM RECESS OF A MATERIAL IN A TRENCH INDEPENDENT OF INCOMING TOPOGRAPHY - Columnar elements which extend to varying heights above a major surface of a substrate, e.g., polysilicon studs within trenches in the substrate, are recessed to a uniform depth below the major surface. The columnar elements are etched selectively with respect to a material exposed at the surface in an at least partly lateral direction so that the columnar elements are recessed to a uniform depth below the major surface at walls of the trenches. | 04-30-2009 |
| 20090108307 | Coaxial Transistor Structure - The present invention discloses a coaxial transistor formed on a substrate, particularly a coaxial metal-oxide-semiconductor field-effect transistor (CMOSFET). The chips or substrates of the CMOSFETs can be stacked up and connected via through-holes to form a coaxial complementary metal-oxide-semiconductor field-effect transistor (CCMOSFET), which is both full-symmetric and full-complementarily, has a higher integration and is free of the latch-up problem. | 04-30-2009 |
| 20090108308 | TRANSISTOR AND METHOD OF FABRICATING THE SAME - A transistor and a method of fabricating the same are provided. The transistor includes a SiGe epitaxial layer formed in a recess region of a substrate at both side of a gate electrode and a SiGe capping layer formed on the SiGe epitaxial layer. The transistor further includes a SiGe seed layer formed under the SiGe epitaxial layer and a silicon capping layer formed on the SiGe capping layer. | 04-30-2009 |
| 20090114956 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a semiconductor substrate, a gate insulating film formed over the semiconductor substrate, a gate electrode formed on the gate insulating film, a first semiconductor layer which is embedded into a portion on both sides of the gate electrode in the semiconductor substrate, and which includes Si and a 4B group element other than Si, and a second semiconductor layer which is embedded into the portion on both sides of the gate electrode in the semiconductor substrate, so as to be superposed on the first semiconductor layer, and which includes Si and a 4B group element other than Si, wherein the gate electrode is more separated from an end of the first semiconductor layer than from an end of the second semiconductor layer. | 05-07-2009 |
| 20090114957 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device and a method thereof that maximizes DC and AC parameter properties of a MOS transistor having a buried channel. The device includes a semiconductor substrate having a device separation film, a gate pattern formed over the semiconductor substrate, a well region formed in the semiconductor substrate, the well region including a first doped region formed at a first predetermined depth, a second doped region formed at a second predetermined depth and a third doped region formed at a third predetermined depth, trenches formed at a source/drain region around the gate pattern, and a source/drain formed in the trenches. In accordance with embodiments, the first predetermined depth is lower than the second and third predetermined depths and the third predetermined depth is greater than the second predetermined depth. | 05-07-2009 |
| 20090114958 | Wiring Board and Method for manufacturing the Same - A wiring board with an electronic device comprising a plurality of trenches arranged in parallel on a substrate, a common trench communicating the plurality of trenches with each other at one of their ends on the substrate, a metal layer formed at the bottom of the plurality of trenches, and an electrode layer connected with the metal layer and formed on a bottom of the common trench, wherein the electrode layer on the bottom of the common trench constitutes a source electrode or a drain electrode of a field effect transistor, whereby the wiring board and an electronic circuit having a good fine wire pattern and a good narrow gap between the patterns using a coating material can be formed, and a reduction for a cost of an organic thin film electronic device and the electronic circuit can be attained since they can be realized through a development of a printing technique. | 05-07-2009 |
| 20090121261 | STRUCTURE AND METHOD FOR COMPACT LONG-CHANNEL FETs - A compact semiconductor structure including at least one FET located upon and within a surface of a semiconductor substrate in which the at least one FET includes a long channel length and/or a wide channel width and a method of fabricating the same are provided. In some embodiments, the ordered, nanosized pattern is oriented in a direction that is perpendicular to the current flow. In such an embodiment, the FET has a long channel length. In other embodiments, the ordered, nanosized pattern is oriented in a direction that is parallel to that of the current flow. In such an embodiment, the FET has a wide channel width. In yet another embodiment, one ordered, nanosized pattern is oriented in a direction perpendicular to the current flow, while another ordered, nanosized pattern is oriented in a direction parallel to the current flow. In such an embodiment, a FET having a long channel length and wide channel width is provided. | 05-14-2009 |
| 20090121262 | SEMICONDUCTOR DEVICE CAPABLE OF IMPROVING CONTACT RESISTANCE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes a gate formed over a semiconductor substrate; a junction region formed in a portion of the semiconductor substrate corresponding to both sides of the gate and including a projection, of which at least some portion thereof projects from the surface of the portion of the semiconductor substrate; and a contact plug formed so as to cover the projection. | 05-14-2009 |
| 20090121263 | SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD - A semiconductor device comprises a first conductive film formed downward, perpendicular to a substrate, penetrating through a first insulating film, a second conductive film formed downward along an outer wall of a second insulating film, a third insulating film formed from the bottom of the second conductive film to the top of the substrate in an area sandwiched between the first and second insulating films, contacting with at least the bottom of the second conductive film and an outer wall on a side which does not contact with the second insulating film, and a first impurity diffusion area of a first conductivity type, a second impurity diffusion area of a second conductivity type, a third impurity diffusion area of the first conductivity type and a fourth impurity diffusion area of the first conductivity type in a high concentration layered within the area sandwiched between the first and third insulating films. | 05-14-2009 |
| 20090127594 | MOS TRANSISTORS HAVING NiPtSi CONTACT LAYERS AND METHODS FOR FABRICATING THE SAME - MOS transistors and methods for fabricating MOS transistors are provided. One exemplary method comprises providing a silicon substrate having an impurity-doped region disposed at a surface of the silicon substrate. A first layer is sputter-deposited onto the impurity-doped region using a first sputtering target comprising nickel and a first concentration of platinum. A second layer is sputter-deposited onto the first layer using a second sputtering target comprising nickel and a second concentration of platinum, wherein the second concentration of platinum is less than the first. | 05-21-2009 |
| 20090127595 | SEMICONDUCTOR STRUCTURE WITH FIELD SHIELD AND METHOD OF FORMING THE STRUCTURE - Disclosed is semiconductor structure that incorporates a field shield below a semiconductor device (e.g., a field effect transistor (FET) or a diode). The field shield is sandwiched between upper and lower isolation layers on a wafer. A local interconnect extends through the upper isolation layer and connects the field shield to a selected doped semiconductor region of the device (e.g., a source/drain region of a FET or a cathode or anode of a diode). Current that passes into the device, for example, during back-end of the line charging, is shunted by the local interconnect away from the upper isolation layer and down into the field shield. Consequently, an electric charge is not allowed to build up in the upper isolation layer but rather bleeds from the field shield into the lower isolation layer and into the substrate below. This field shield further provides a protective barrier against any electric charge that becomes trapped within the lower isolation layer or substrate | 05-21-2009 |
| 20090127596 | PHOTOMASK, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A photomask includes a light-blocking section that blocks light and also includes a light intensity difference section that controls the intensity of light. The light-blocking section is disposed between the light intensity difference section and a light-transmissive region transmitting light. | 05-21-2009 |
| 20090140300 | ELECTRONIC TAG CHIP - In order to extend the communication distance of an electronic tag chip, it is required to reduce power consumption of the electronic tag chip. After having formed capacitors and diodes on an SOI (Silicon on Insulator), remove a silicon substrate of the SOI. It becomes possible to reduce the capacitors and diodes of the electronic tag chip in parasitic capacitance relative to the ground, which makes it possible to reduce the power consumption of the electronic tag chip, thereby enabling the electronic tag chip to increase in communication distance thereof. | 06-04-2009 |
| 20090140301 | REDUCING CONTACT RESISTANCE IN P-TYPE FIELD EFFECT TRANSISTORS - Reducing contact resistance in p-type field effect transistors is generally described. In one example, an apparatus includes a first semiconductor substrate, a first noble metal film including palladium (Pd) coupled with the first semiconductor substrate, a second noble metal film including platinum (Pt) coupled with the first noble metal film, and a third metal film including an electrically conductive metal coupled with the second noble metal film, wherein the first, second, and third metal films form one or more contacts having reduced specific contact resistance between the first semiconductor substrate and the one or more contacts. | 06-04-2009 |
| 20090140302 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device according to one embodiment of the invention includes: forming a gate electrode on a semiconductor substrate through a gate insulating film; forming offset spacers on side surfaces of the gate electrode, respectively; etching the semiconductor substrate with a channel region below the offset spacers and the gate electrode being left by using the offset spacers as a mask; forming a first epitaxial layer made of a crystal having a lattice constant different from that of a crystal constituting the semiconductor substrate on the semiconductor substrate thus etched; etching at least a portion of the first epitaxial layer adjacent to the channel region to a predetermined depth from a surface of the first epitaxial layer toward the semiconductor substrate side; and forming a second epitaxial layer containing therein a conductivity type impurity on the first epitaxial layer thus etched. | 06-04-2009 |
| 20090140303 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device and a method for manufacturing the same includes forming a via pattern having a matrix form in a dielectric layer. The via pattern includes a via slit provided at the center of the via pattern and a plurality of via holes provided at an outer periphery of the via pattern and surrounding the via slit. Metal plugs are formed in the via holes. | 06-04-2009 |
| 20090146192 | MOS transistor and method of forming the MOS transistor with a SiON etch stop layer that protects the transistor from PID and hot carrier degradation - A MOS transistor is formed with a dual-layer silicon oxynitride (SiON) etch stop film that protects the transistor from plasma induced damage (PID) and hot carrier degradation, thereby improving the reliability of the transistors. The first SiON layer is formed with SiH | 06-11-2009 |
| 20090146193 | Conductive Interconnects - A method of making a conductive interconnect structure includes the steps of: electrodepositing a metal on a conductive surface ( | 06-11-2009 |
| 20090146194 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE - The local bending of a silicon nanowire induces tensile strain in the wire due to the stretching of the silicon lattice. This in turn enhances the mobility of the free carriers (electrons) in the direction of transport along the wire. Thus, for example, when Gate-All-Around MOSFETs are fabricated along the nanowire, the mobility enhancement will translate into an improvement in the performance (current drive, speed) of the silicon nanowire MOSFETs. In summary, a semiconductor device comprises a substrate and a nanowire in connection with the substrate at a drain and at a source region, and the nanowire is bent to achieve enhanced mobility of charge carriers. | 06-11-2009 |
| 20090152599 | Silicon Germanium and Polysilicon Gate Structure for Strained Silicon Transistors - An integrated circuit semiconductor device, e.g., MOS, CMOS. The device has a semiconductor substrate. The device also has a dielectric layer overlying the semiconductor substrate and a gate structure overlying the dielectric layer. A dielectric layer forms sidewall spacers on edges of the gate structure. A recessed region is within a portion of the gate structure within the sidewall spacer structures. An epitaxial fill material is within the recessed region. The device has a source recessed region and a drain recessed region within the semiconductor substrate and coupled to the gate structure. The device has an epitaxial fill material within the source recessed region and within the drain recessed region. A channel region is between the source region and the drain region is in a strain characteristic from at least the fill material formed in the source region and the drain region. Depending upon the embodiment, the fill material can be any suitable species such as silicon germanium, silicon carbide, and others. | 06-18-2009 |
| 20090152600 | PROCESS FOR REMOVING ION-IMPLANTED PHOTORESIST - A method of manufacturing an IC that comprises fabricating a semiconductor device. Fabricating the device includes depositing a photoresist layer on a substrate surface and implanting one or more dopant species through openings in the photoresist layer into the substrate, and, into the photoresist layer, thereby forming an implanted photoresist layer. Fabricating the device also includes removing the implanted photoresist layer. Removing the implanted photoresist layer includes exposing the implanted photoresist layer to a mixture that includes sulfuric acid, hydrogen peroxide and ozone. The mixture is at a temperature of at least about 130°. | 06-18-2009 |
| 20090152601 | Strained NMOS transistor featuring deep carbon doped regions and raised donor doped source and drain - Some embodiments of the present invention include providing carbon doped regions and raised source/drain regions to provide tensile stress in NMOS transistor channels. | 06-18-2009 |
| 20090152602 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a semiconductor device having a low-k film including an interconnect layer and a highly-reliable through-substrate contact plug. The semiconductor device includes:
| 06-18-2009 |
| 20090159936 | DEVICE WITH ASYMMETRIC SPACERS - An asymmetrical spacer adjacent a gate is formed. This asymmetry is used to form offset regions in a device. | 06-25-2009 |
| 20090159937 | Simple Scatterometry Structure for Si Recess Etch Control - Dimensions of structures in integrated circuits are shrinking with each new fabrication technology generation. Maintaining control of profiles of structures in transistors and interconnects is becoming more important to sustaining profitable integrated circuit production facilities. Measuring profiles of structures with many elements in integrated circuits, such as MOS transistor gates with recessed regions for Si—Ge epitaxial layers, is not cost effective for the commonly used metrology techniques: SEM, TEM and AFM. Scatterometry is technically unfeasible due to the number of elements and optical constants. The instant invention is a simplified scatterometry structure which reproduces the profiles of a structure to be profiled in a simpler structure that is compatible with conventional scatterometric techniques. A method of fabricating a transistor and an integrated circuit using the inventive simplified scatterometry structure are also disclosed. | 06-25-2009 |
| 20090159938 | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE OBTAINED WITH SUCH A METHOD - The invention relates to a method of manufacturing a semiconductor device ( | 06-25-2009 |
| 20090159939 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME - A semiconductor device includes a first diffusion region including germanium atoms and first impurity atoms, provided on a surface layer of a semiconductor substrate, the first impurity atoms contributing to electric conductivity, and a second diffusion region including second impurity atoms, provided shallower than the first diffusion region from a surface of the first diffusion region, the second impurity atoms not contributing to the electric conductivity. | 06-25-2009 |
| 20090166685 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device according to one embodiment includes: a semiconductor substrate; a first impurity diffusion suppression layer formed on the semiconductor substrate for suppressing diffusion of a channel impurity; an impurity channel layer formed on the first impurity diffusion suppression layer and containing the channel impurity; a second impurity diffusion suppression layer formed on the impurity channel layer for suppressing diffusion of the channel impurity; a channel layer formed on the second impurity diffusion suppression layer; a gate insulating film formed on the channel layer; and a gate electrode formed on the gate insulating film. | 07-02-2009 |
| 20090166686 | Edge-Contacted Vertical Carbon Nanotube Transistor - A vertical device geometry for a carbon-nanotube-based field effect transistor has one or multiple carbon nanotubes formed in a trench. | 07-02-2009 |
| 20090179235 | SEMICONDUCTOR DEVICE, DC/DC CONVERTER AND POWER SUPPLY - A semiconductor device in which the self-turn-on phenomenon is prevented that can significantly improve power conversion efficiency. The semiconductor device is a system-in-package for power supply applications in which a high-side switch, a low-side switch, and two drivers are included in a single package. The device includes an auxiliary switch disposed between the gate and source of said low-side switch, and a low-side MOSFET | 07-16-2009 |
| 20090184346 | Nonvolatile memory and three-state FETs using cladded quantum dot gate structure - The present invention discloses structures and method of fabricating cladded quantum dot gate nonvolatile memory and three-state field-effect transistor devices that can be scaled down to sub-22 nm dimensions and embedded along side with other functional circuits. Another innovation is the design of transport channel, which comprises an asymmetric coupled well structure comprising two or more wells. This structure enhances the retention time in nonvolatile memory by increasing the effective separation between channel charge and the quantum dots located in the floating gate. The cladded quantum dot gate FETs can be designed in Si, InGaAs—InP and other material systems. The 3-state FET devices form the basis of novel digital circuits using multiple valued logic and advanced analog circuits. One or more layers of SiO | 07-23-2009 |
| 20090184347 | COATING LIQUID FOR GATE INSULATING FILM, GATE INSULATING FILM AND ORGANIC TRANSISTOR - To provide a coating fluid for a gate insulating film, which can be baked at a low temperature of at most 180° C.; a gate insulating film having excellent solvent resistance and further having good characteristics in e.g. specific resistance or semiconductor mobility; and an organic transistor employing the gate insulating film. | 07-23-2009 |
| 20090184348 | Slim Spacer Implementation to Improve Drive Current - Slim spacers are implemented in transistor fabrication. More particularly, wide sidewall spacers are initially formed and used to guide dopants into source/drain regions in a semiconductor substrate. The wide sidewall spacers are then removed and slim sidewall spacers are formed alongside a gate stack of the transistor. The slim spacers facilitate transferring stress from an overlying pre metal dielectric (PMD) liner to a channel of the transistor, and also facilitate reducing a resistance in the transistor by allowing silicide regions to be formed closer to the channel. This mitigates yield loss by facilitating predictable or otherwise desirable behavior of the transistor. | 07-23-2009 |
| 20090189201 | INWARD DIELECTRIC SPACERS FOR REPLACEMENT GATE INTEGRATION SCHEME - Inward dielectric spacers for a replacement gate integration scheme are described. A semiconductor device is fabricated by first providing a substrate having thereon a placeholder gate electrode disposed in a dielectric layer. The placeholder gate electrode is removed to from a trench in the dielectric layer. A pair of dielectric spacers is then formed adjacent to the sidewalls of the trench. Finally, a gate electrode is formed in the trench and adjacent to the pair of dielectric layers. | 07-30-2009 |
| 20090189202 | ELECTRONIC DEVICE INCLUDING A GATE ELECTRODE HAVING PORTIONS WITH DIFFERENT CONDUCTIVITY TYPES AND A PROCESS OF FORMING THE SAME - An electronic device can include a gate electrode having different portions with different conductivity types. In an embodiment, a process of forming the electronic device can include forming a semiconductor layer over a substrate, wherein the semiconductor layer has a particular conductivity type. The process can also include selectively doping a region of the semiconductor layer to form a first doped region having an opposite conductivity type. The process can further include patterning the semiconductor layer to form a gate electrode that includes a first portion and a second portion, wherein the first portion includes a portion of the first doped region, and the second region includes a portion of the semiconductor layer outside of the first doped region. In a particular embodiment, the electronic device can have a gate electrode having edge portions of one conductivity type and a central portion having an opposite conductivity type. | 07-30-2009 |
| 20090189203 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device according to an embodiment of the present invention includes a substrate, a gate insulation film formed on the substrate, a gate electrode formed on the gate insulation film, sidewall insulation films provided on side surfaces of the gate electrode, and stress application layers embedded in source and drain regions located, on a surface of the substrate, at a position which sandwiches the gate electrode, and applying stress to a channel region located under the gate insulation film in the substrate, a height of upper ends of interfaces between the substrate and the stress application layers being higher than a height of a lower end of an interface between the substrate and the gate insulation film. | 07-30-2009 |
| 20090189204 | SILICON THIN FILM TRANSISTORS, SYSTEMS, AND METHODS OF MAKING SAME - Systems and methods of fabricating silicon-based thin film transistors (TFTs) on flexible substrates. The systems and methods incorporate and combine deposition processes such as chemical vapor deposition and plasma-enhance vapor deposition, printing, coating, and other deposition processes, with laser annealing, etching techniques, and laser doping, all performed at low temperatures such that the precision, resolution, and registration is achieved to produce a high performing transistor. Such TFTs can be used in applications such as displays, packaging, labeling, and the like. | 07-30-2009 |
| 20090189205 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device having a source electrode and a drain electrode formed over a semiconductor substrate, a gate electrode formed over the semiconductor substrate and disposed between the source electrode and the drain electrode, a protection film made of an insulating material and formed between the source electrode and the gate electrode and between the drain electrode and the gate electrode, and a gate side opening formed at least in one of a portion of the protection film between the source electrode and the gate electrode and a portion of the protection film between the drain electrode and the gate electrode and disposed away from all of the gate electrode, the source electrode and the drain electrode. | 07-30-2009 |
| 20090194797 | INSULATING FILM AND SEMICONDUCTOR DEVICE INCLUDING THE SAME - It is made possible to provide an insulating film that can reduce the leakage current. An insulating film includes: an amorphous oxide dielectric film containing a metal, hydrogen, and nitrogen. The nitrogen amount [N] and the hydrogen amount [H] in the oxide dielectric film satisfy the following relationship: {[N]−[H]}/2≦1.0×10 | 08-06-2009 |
| 20090200583 | Feature Patterning Methods - Methods of patterning features of semiconductor devices and methods of processing and fabricating semiconductor devices are disclosed. In one embodiment, a method of processing a semiconductor device includes forming first sidewall spacers on a first hard mask, removing the first hard mask, and forming a first material layer over the first sidewall spacers. A second hard mask is formed over the first material layer and the first sidewall spacers. Second sidewall spacers are formed on the second hard mask, and the second hard mask is removed. At least the first sidewall spacers are patterned using the second sidewall spacers as a mask. | 08-13-2009 |
| 20090206376 | SEMICONDUCTOR DEVICE - A conventional semiconductor device has a problem that, when a vertical PNP transistor as a power semiconductor element is used in a saturation region, a leakage current into a substrate is generated. In a semiconductor device of the present invention, two P type diffusion layers as a collector region are formed around an N type diffusion layer as a base region. One of the P type diffusion layers is formed to have a lower impurity concentration and a narrower diffusion width than the other P type diffusion layer. In this structure, when a vertical PNP transistor is turned on, a region where the former P type diffusion layer is formed mainly serves as a parasite current path. Thus, a parasitic transistor constituted of a substrate, an N type buried layer and a P type buried layer is prevented from turning on, and a leakage current into the substrate is prevented. | 08-20-2009 |
| 20090212332 | FIELD EFFECT TRANSISTOR WITH REDUCED OVERLAP CAPACITANCE - In a first structure, a metal gate portion may be laterally recessed from a substantially vertical surface of a gate conductor thereabove. A cavity is formed between the metal gate portion and a gate spacer. In a second structure, a disposable gate portion is removed after laterally recessing a metal gate portion therebeneath and forming a dielectric layer having a surface coplanar with a top surface of the disposable gate portion. (We have to include the inner spacer without a metal recess). An inner gate spacer is formed over a periphery of the metal gate portion provide a reduced overlap capacitance. In a third structure, a thin dielectric layer is employed to form a cavity next to the metal gate portion in conjunction with the inner gate spacer to provide reduced overlap capacitance. | 08-27-2009 |
| 20090212333 | METHOD OF MANUFACTURING A BURIED-GATE SEMICONDUCTOR DEVICE AND CORRESPONDING INTEGRATED CIRCUIT - A semiconductor device includes a semiconductor channel region and a gate region, wherein the gate region includes at least one buried part extending under the channel region. The buried part of the gate region is formed from a cavity under the channel region. The cavity is filled with a first material. An opening is made to access the first material. In one implementation, aluminum is deposited in the opening in contact with the first material. An anneal is performed to cause the aluminum to be substituted for the first material in the cavity. In another implementation, a second material different from the first material is deposited in the opening. An anneal is performed to cause an alloy of the first and second materials to be formed in the cavity. | 08-27-2009 |
| 20090212334 | SEMICONDUCTOR DEVICE AND A METHOD FOR MANUFACTURING THE SAME - Disclosed are embodiments relating to a semiconductor device and a method of manufacturing a semiconductor device that may prevent an increase of a dielectric effective constant of the IMD. In embodiments, a semiconductor device may include a substrate having a source/drain area, a gate electrode formed on the semiconductor substrate, a first inter-metal dielectric layer formed on the semiconductor substrate and having a first damascene pattern, a first barrier layer formed on the damascene pattern, a first metal line formed on the first barrier layer, and a first metal capping layer formed in the first damascene pattern. | 08-27-2009 |
| 20090218604 | Semiconductor Device and Method for Manufacturing the Same - A semiconductor device includes a PMOS transistor of a peripheral circuit region. The PMOS transistor is formed over a silicon germanium layer to have a compressive strain structure, thereby increasing hole mobility of a channel region in operation of the device. The semiconductor device may include a second active region including a silicon layer connected to a first active region of a semiconductor substrate, a silicon germanium layer formed over the silicon layer expected to be a PMOS region, and a PMOS gate formed over the silicon germanium layer. | 09-03-2009 |
| 20090218605 | Methods of Enhancing Performance of Field-Effect Transistors and Field-Effect Transistors Made Thereby - Methods of enhancing the performance of a field-effect transistor (FET) by providing a percolating network of metallic islands to the inversion layer of the FET so as to effectively reduce the channel length of the FET. The metal islands can be provided in a number of ways, including Volmer-Weber metallic film growth, breaking apart continuous metallic film, patterning metallic coating, dispersing metallic particles in a semiconducting material, applying a layer of composite particles having metallic cores and semiconducting shells and co-sputtering metallic and semiconducting materials, among others. FETs made using disclosed methods have a novel channel structures that include metallic islands spaced apart by semiconducting material. | 09-03-2009 |
| 20090230438 | SELECTIVE NITRIDATION OF TRENCH ISOLATION SIDEWALL - A method is provided of forming a trench isolation region adjacent to a single-crystal semiconductor region for a transistor. Such method can include, for example, recessing a single-crystal semiconductor region to define a first wall of the semiconductor region, a second wall remote from the first wall and a plurality of third walls extending between the first and second walls, each of the first and second walls extending in a first direction. In one embodiment, the first direction may be a <110> crystallographic direction of a wafer such as a silicon direction, for example. Oxidation-inhibiting regions can be formed at the first and second walls of the semiconductor region selectively with respect to the third walls. A dielectric region can then be formed adjacent to the first, second and third walls of the semiconductor region for a trench isolation region. During the formation of the dielectric region, the oxidation-inhibiting regions reduce oxidation of the semiconductor region at the first and second walls relative to the plurality of third walls. A transistor formed in the semiconductor region can have a channel whose length is oriented in the first direction by processing including annealing, which at least partially oxidizes the semiconductor region at the third walls. | 09-17-2009 |
| 20090230439 | Strain Bars in Stressed Layers of MOS Devices - A semiconductor structure includes an active region; a gate strip overlying the active region; and a metal-oxide-semiconductor (MOS) device. A portion of the gate strip forms a gate of the MOS device. A portion of the active region forms a source/drain region of the MOS device. The semiconductor structure further includes a stressor region over the MOS device; and a stressor-free region inside the stressor region and outside the region over the active region. | 09-17-2009 |
| 20090230440 | SINGLE EVENT TRANSIENT HARDENED MAJORITY CARRIER FIELD EFFECT TRANSISTOR - Described herein is a majority carrier device. Specifically, an exemplary device may comprise source, channel, and drain regions in a thin semiconductor layer, and the source, channel, and drain region may all share a single doping type of varying concentrations. Further, the device may comprise an insulating layer above the channel region and a gate region above the insulating layer, such that the gate modulates the channel. The device described herein may eliminate the parasitic bipolar transistor and the sensitivity to excess minority carrier generation that results from single event effects (SEE) such as heavy ion hits. | 09-17-2009 |
| 20090230441 | Device and Method for Switching Electric Signals and Powers - A device for switching an electric signal having a first member having a p-doped area with a first terminal and an n-doped area with a second terminal and a second member coupled to the first member to cause a mechanical deformation of the first member in an area of a transition from the p-doped area into the n-doped area. | 09-17-2009 |
| 20090230442 | Semiconductor apparatus and manufacturing method of the same - Provided is a semiconductor apparatus including a substrate region, an active region on the substrate region, a gate pattern on the active region, and first and second impurities-doped regions along both edges of the active region that do not overlap the gate pattern. The length of the first and second impurities-doped regions in the horizontal direction may be shorter than in the vertical direction. The first and second impurities-doped regions may be formed to be narrow along both edges of the active region so as not to overlap the gate pattern. | 09-17-2009 |
| 20090236641 | Method of manufacturing semiconductor device for providing improved isolation between contact and cell gate electrode - A manufacture method is provided for forming a semiconductor device. The method includes: forming a plurality of gate electrodes through etching a conductive film deposited on a semiconductor substrate; forming a first nitride film to cover the gate electrodes; partially exposing the semiconductor substrate in a region between adjacent two of the gate electrodes through performing an etch-back process on the first nitride film; thermally oxidizing a residual of the gate electrode film remaining in the region between the adjacent two of the gate electrodes to change the residual into an thermal oxide film; and forming a contact in the region between the adjacent two of the gate electrodes. | 09-24-2009 |
| 20090236642 | TRANSISTOR AND CVD APPARATUS USED TO DEPOSIT GATE INSULATING FILM THEREOF - In a transistor adapted to suppress characteristic degradation resulting from fluorine contained in a deposited film, the concentration of fluorine contained in a gate insulating film is reduced to 1.0×10 | 09-24-2009 |
| 20090242944 | METHOD OF FORMING A SEMICONDUCTOR DEVICE USING STRESS MEMORIZATION - A stress memorization technique (SMT) film is deposited over a semiconductor device. The SMT film is annealed with a low thermal budget anneal that is sufficient to create and transfer the stress of the SMT film to the semiconductor device. The SMT film is then removed. After the SMT film is removed, a second anneal is applied to the semiconductor device sufficiently long and at a sufficiently high temperature to activate dopants implanted for forming device source/drains. The result of this approach is that there is minimal gate dielectric growth in the channel along the border of the channel. | 10-01-2009 |
| 20090242945 | Semiconductor device and method of fabricating the same - In a method of fabricating a semiconductor device on a substrate having a pillar pattern, a gate electrode is formed on the pillar pattern without etching the latter. A conductive pattern is filled between adjacent pillar patterns, a spacer is formed above the conductive pattern and surrounding sidewalls of each pillar pattern, and the gate electrode is formed by etching the conductive pattern using the spacer as an etch barrier. | 10-01-2009 |
| 20090242946 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD FOR THE SEMICONDUCTOR DEVICE - A semiconductor device which could strengthen the mechanical strength of the protective film and with which packaging of the wafer level with electric high reliability is performed and a fabrication method for the semiconductor device are provided. The semiconductor device includes a semiconductor substrate; a field effect transistor including a gate electrode, a drain electrode, and a source electrode which are formed on the semiconductor substrate; a hollow protective film provided on the semiconductor substrate so that an inner surface bonds to the upper surface of the one or both of the drain electrode and the source electrode of the field effect transistor, wherein the hollow protective film includes a first cap layer contacting the upper surface of the one or both of the drain electrode and the source electrode, and a second cap layer placed on the first cap layer. | 10-01-2009 |
| 20090242947 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD FOR THE SEMICONDUCTOR DEVICE - A semiconductor device and a fabrication method for the semiconductor device which can remove the sacrifice layer deposited on the semiconductor device surface in a short time and whose manufacturing yield can be improved are provided. The semiconductor device and the fabrication method for the semiconductor device includes a field effect transistor | 10-01-2009 |
| 20090250731 | Field-effect transistor structure and fabrication method thereof - A field-effect transistor (FET) structure is provided. The FET structure includes a gate substrate, a dielectric layer, conductive electrodes, and a carbon nanotube (CNT). The gate substrate is made of a conductive material. The dielectric layer is disposed on the substrate. The conductive electrodes are disposed on the dielectric layer, and contain nickel and chromium. The CNT is disposed on the dielectric layer and electrically connects two conductive electrodes | 10-08-2009 |
| 20090250732 | Semiconductor device and method of fabricating the same - In a method of fabricating a semiconductor device on a substrate having thereon a conductive layer, the conductive layer is patterned to form a plurality of opened regions. A gate insulation layer is formed on a sidewall of each of the opened regions. A pillar pattern is formed in each opened region. On each pillar pattern, a gate electrode, which encloses the pillar pattern, is formed by removing the conductive layer between the pillar patterns. | 10-08-2009 |
| 20090256178 | SEMICONDUCTOR DEVICE HAVING MISFETS AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a dielectric film and gate electrode that are stacked on a substrate, sidewalls formed to cover the side surfaces of the electrode and dielectric film, and SiGe films formed to sandwich the sidewalls, electrode and dielectric film, filled in portions separated from the sidewalls, having upper portions higher than the surface of the substrate and having silicide layers formed on regions of exposed from the substrate. The lower portion of the SiGe film that faces the electrode is formed to extend in a direction perpendicular to the surface of the substrate and the upper portion is inclined and separated farther apart from the gate electrode as the upper portion is separated away from the surface of the substrate. The surface of the silicide layer of the SiGe film that faces the gate electrode is higher than the channel region. | 10-15-2009 |
| 20090261388 | DICE BY GRIND FOR BACK SURFACE METALLIZED DIES - Semiconductor device processing and methods for dicing a semiconductor wafer into a plurality of individual dies that can have back surface metallization are described. The methods comprise providing a wafer with pre-diced streets in the wafer's front surface, applying a sidewall masking mechanism to the front surface of the wafer so as to substantially fill the pre-diced streets, thinning the back surface of the wafer so as to dice the wafer (e.g., by grinding, etching, or both) and expose a portion of the sidewall masking mechanism from the back surface of the wafer, and applying a material, such as metal, to the back surface of the diced wafer. These methods can prevent the metal from being deposited on die sidewalls and may allow the separation of individual dies without causing the metal to peel from the back surface of one or more adjacent dies. Other embodiments are also described. | 10-22-2009 |
| 20090261389 | COMPOSITION FOR OXIDE SEMICONDUCTOR THIN FILM, FIELD EFFECT TRANSISTOR USING THE COMPOSITION, AND METHOD OF FABRICATING THE TRANSISTOR - A composition for an oxide semiconductor thin film, a field effect transistor (FET) using the composition, and a method of fabricating the FET are provided. The composition includes an aluminum oxide, a zinc oxide, and a tin oxide. The thin film formed of the composition remains in amorphous phase at a temperature of 400° C or less. The FET using an active layer formed of the composition has improved electrical characteristics and can be fabricated using a low-temperature process without expensive raw materials, such as In and Ga. | 10-22-2009 |
| 20090261390 | SEMICONDUCTOR MEMORY DEVICE AND A METHOD OF MANUFACTURING THE SAME - A memory cell of an SRAM has two drive MISFETs and two vertical MISFETs. The p channel vertical MISFETs are formed above the n channel drive MISFETs. The vertical MISFETs respectively mainly include a laminate formed of a lower semiconductor layer, intermediate semiconductor layer and upper semiconductor layer laminated in this sequence, a gate insulating film of silicon oxide formed on the surface of the side wall of the laminate, and a gate electrode formed so as to cover the side wall of the laminate. The vertical MISFETs are perfect depletion type MISFETs. | 10-22-2009 |
| 20090261391 | Complementary Metal Oxide Semiconductor Integrated Circuit Using Raised Source Drain and Replacement Metal Gate - A complementary metal oxide semiconductor integrated circuit may be formed with a PMOS device formed using a replacement metal gate and a raised source drain. The raised source drain may be formed of epitaxially deposited silicon germanium material that is doped p-type. The replacement metal gate process results in a metal gate electrode and may involve the removal of a nitride etch stop layer. | 10-22-2009 |
| 20090267117 | ENHANCED STRESS FOR TRANSISTORS - A transistor disposed on a substrate includes a gate, spacers on gate sidewalls, and diffusion regions adjacent to the gate. Silicide contacts on the diffusion regions are displaced from the spacers by a distance G. Stressors may be provided in the diffusion region to induce a first stress in the channel region of the transistor. | 10-29-2009 |
| 20090267118 | METHOD FOR FORMING CARBON SILICON ALLOY (CSA) AND STRUCTURES THEREOF - Methods for forming carbon silicon alloy (CSA) and structures thereof are disclosed. The method provides improvement in substitutionality and deposition rate of carbon in epitaxially grown carbon silicon alloy layers (i.e., substituted carbon in Si lattice). In one embodiment of the disclosed method, a carbon silicon alloy layer is epitaxially grown on a substrate at an intermediate temperature with a silicon precursor, a carbon (C) precursor in the presence of an etchant and a trace amount of germanium material (e.g., germane (GeH | 10-29-2009 |
| 20090267119 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - The semiconductor device includes a silicon substrate having a channel region, a gate electrode formed over the channel region, buried semiconductor regions formed in a surface of the silicon substrate on both sides of the gate electrode, for applying to the surface of the silicon substrate a first stress in a first direction parallel to the surface of the silicon substrate, and stressor films formed on the silicon substrate between the channel region and the buried semiconductor regions in contact with the silicon substrate, for applying to the silicon substrate a second stress in a second direction which is opposite to the first direction. | 10-29-2009 |
| 20090273010 | REMOVAL OF IMPURITIES FROM SEMICONDUCTOR DEVICE LAYERS - A method for removing impurities from at least one semiconductor device layer during manufacturing of a semiconductor device is disclosed. The semiconductor device layer has a compound semiconductor material and/or germanium. Each heating process performed during the manufacturing of the semiconductor device after provision of the semiconductor device layer has a low thermal budget determined by temperatures equal to or lower than about 900° C. and time periods equal to or lower than about 5 minutes. In one aspect, the method includes providing a germanium gettering layer with a higher solubility for the impurities than the semiconductor device layer. The germanium gettering layer is provided at least partly in direct or indirect contact with the at least one semiconductor device layer, such that impurities can diffuse from the at least one semiconductor device layer to the germanium gettering layer. | 11-05-2009 |
| 20090273011 | Metal-Oxide-Semiconductor Device Including an Energy Filter - A MOS device includes first and second source/drains spaced apart relative to one another. A channel is formed in the device between the first and second source/drains. A gate is formed in the device between the first and second source/drains and proximate the channel, the gate being electrically isolated from the first and second source/drains and the channel. The gate is configured to control a conduction of the channel as a function of a potential applied to the gate. The MOS device further includes an energy filter formed between the first source/drain and the channel. The energy filter includes an impurity band operative to control an injection of carriers from the first source/drain into the channel. | 11-05-2009 |
| 20090278178 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - Disclosed is a semiconductor device which includes a MIS FET on a surface of a substrate, an insulating film on the substrate to cover the MIS FET, an opening that gets to an impurity diffusing region formed in the insulating film, another opening that gets to a gate electrode or to an extension part of the gate electrode formed in the insulating film, and an electrically conductive member including mainly copper filled in each of the openings. The insulating film includes a layer including, as main components, silicon, oxygen, carbon and hydrogen (FIG. | 11-12-2009 |
| 20090278179 | CHIP SCALE SURFACE MOUNT PACKAGE FOR SEMICONDUCTOR DEVICE AND PROCESS OF FABRICATING THE SAME - A semiconductor package has contacts on both sides of the dice on a wafer scale. The back side of the wafer is attached to a metal plate. The scribe lines separating the dice expose the metal plate without extending through the metal plate. A metal layer may be formed on the front side of the dice, covering the exposed portions of the metal plate and extending to side edges of the dice. The metal layer may cover connection pads on the front side of the dice. A second set of scribe lines are made coincident with the first set. Therefore, the metal layer remains on the side edges of the dice coupling the front and the back. As a result, the package is rugged and provides a low-resistance electrical connection between the back and front sides of the dice. | 11-12-2009 |
| 20090283806 | MOSFET WITH ASYMMETRICAL EXTENSION IMPLANT - A method for fabricating a MOSFET (e.g., a PMOS FET) includes providing a semiconductor substrate having surface characterized by a (110) surface orientation or (110) sidewall surfaces, forming a gate structure on the surface, and forming a source extension and a drain extension in the semiconductor substrate asymmetrically positioned with respect to the gate structure. An ion implantation process is performed at a non-zero tilt angle. At least one spacer and the gate electrode mask a portion of the surface during the ion implantation process such that the source extension and drain extension are asymmetrically positioned with respect to the gate structure by an asymmetry measure. | 11-19-2009 |
| 20090289284 | High shrinkage stress silicon nitride (SiN) layer for NFET improvement - A method (and semiconductor device) of forming a high shrinkage stressed silicon nitride layer for use as a contact etch stop layer (CESL) or capping layer in a stress management technique (SMT) provides increased tensile stress to a channel of an nFET device to enhance carrier mobility. A spin-on polysilazane-based dielectric material is applied to a semiconductor substrate and baked to form a film layer. The film layer is cured to remove hydrogen from the film which causes shrinkage in the film when it recrystallizes into silicon nitride. The resulting silicon nitride stressed layer introduces an increased level of tensile stress to the transistor channel region. | 11-26-2009 |
| 20090289285 | Semiconductor device and method of fabricating the same - Provided is a semiconductor device including a transistor that has a silicide layer formed over a semiconductor substrate. The gate electrode of each transistor is composed of a polysilicon electrode and the silicide layer formed thereon. Each transistor further has source/drain impurity-diffused layers composed of low-concentration doped regions and high-concentration doped regions, and silicide layers formed over the source/drain impurity-diffused layers. The surface of each silicide layer is positioned above the surface of the semiconductor substrate. The silicide layers contain a silicidation-suppressive metal, and have a concentration profile of the silicidation-suppressive metal over a region of the silicide layers ranging from the surface to a predetermined depth, such as increasing the concentration from the surface of each silicide layer in the depth-wise direction of the semiconductor substrate. | 11-26-2009 |
| 20090294806 | Method of Improving Minority Lifetime in Silicon Channel and Products Thereof - Performance of field effect transistors and other channel dependent devices formed on a monocrystalline substrate is improved by carrying out a high temperature anneal in a nitrogen releasing atmosphere while the substrate is coated by a sacrificial oxide coating containing easily diffusible atoms that can form negatively charged ions and can diffuse deep into the substrate. In one embodiment, the easily diffusible atoms comprise at least 5% by atomic concentration of chlorine atoms in the sacrificial oxide coating and the nitrogen releasing atmosphere includes NO. The high temperature anneal is carried out for less than 10 hours at a temperature less than 1100° C. | 12-03-2009 |
| 20090294807 | Methods of Fabricating Transistors and Structures Thereof - Methods of fabricating transistors, semiconductor devices, and structures thereof are disclosed. In one embodiment, a method of fabricating a transistor includes forming a gate dielectric over a workpiece, and forming a gate over the gate dielectric. Sidewall spacers are formed over the gate dielectric and the gate, the sidewall spacers comprising germanium oxide (GeO or GeO | 12-03-2009 |
| 20090294808 | Thin Film Transistor, Method for Manufacturing the Same and Film Formation Apparatus - One embodiment of the present invention is a method for manufacturing a bottom gate type thin film transistor having a gate electrode, a gate insulating film, an oxide semiconductor active layer, a source electrode and a drain electrode on a flexible plastic substrate of a supporting substrate, the method including continuously forming the gate insulating film and the oxide semiconductor active layer on the flexible plastic substrate with the gate electrode inside a vacuum film formation chamber of a film formation apparatus, the apparatus being a type of winding up continuously the roll-shaped substrate, and the gate insulating film and the oxide semiconductor active layer formed without being exposed to air. | 12-03-2009 |
| 20090294809 | REDUCTION OF METAL SILICIDE DIFFUSION IN A SEMICONDUCTOR DEVICE BY PROTECTING SIDEWALLS OF AN ACTIVE REGION - By protecting sidewall portions of active semiconductor regions during a silicidation process, the probability of creating nickel silicide pipes may be reduced. Consequently, yield losses caused by the shorting of PN junctions in sophisticated semiconductor devices may be reduced. | 12-03-2009 |
| 20090294810 | MICROSTRUCTURE DEVICE INCLUDING A COMPRESSIVELY STRESSED LOW-K MATERIAL LAYER - A nitrogen-containing silicon carbide material may be deposited on the basis of a single frequency or mixed frequency deposition recipe with a high internal compressive stress level up to 1.6 GPa or higher. Thus, this dielectric material may be advantageously used in the contact level of sophisticated integrated circuits, thereby providing high strain levels while not unduly contributing to signal propagation delay. | 12-03-2009 |
| 20090302357 | AMPLIFIERS USING GATED DIODES - A circuit comprises a control line and a two terminal semiconductor device having first and second terminals. The first terminal is coupled to a signal line, and the second terminal is coupled to the control line. The two terminal semiconductor device is adapted to have a capacitance when a voltage on the first terminal relative to the second terminal is above a threshold voltage and to have a smaller capacitance when a voltage on the first terminal relative to the second terminal is below the threshold voltage. The control line is coupled to a control signal and the signal line is coupled to a signal and is output of the circuit. A signal is placed on the signal line and voltage on the control line is modified (e.g., raised in the case of n-type devices, or lowered for a p-type devices). When the signal falls below the threshold voltage, the two terminal semiconductor device acts as a very small capacitor and the output of the circuit will be a small value. When the signal is above the threshold voltage, the two terminal semiconductor device acts as a large capacitor and the output of the circuit will be influenced by both the value of the signal and the value of the modified voltage on the control line and therefore the signal will be amplified. | 12-10-2009 |
| 20090309139 | ASYMMETRIC GATE ELECTRODE AND METHOD OF MANUFACTURE - The invention relates to an asymmetric gate electrode and method of manufacturing an asymmetric gate electrode. The method includes: forming a source region and drain region in a substrate; forming a symmetrical gate structure over a channel formed between the source region and the drain region; depositing a material on the substrate and planarizing the material to a top of the symmetrical gate structure; recessing the symmetrical gate structure to below a surface of the material; forming spacers in the recess; protecting one edge of the spacer while etching another edge of the spacer to remove a portion thereof; and recessing the symmetrical gate structure on a side closest to the source region while the another edge of the spacer protects the symmetrical gate structure on a side closest to the drain region to form an asymmetrical gate electrode. | 12-17-2009 |
| 20090309140 | IN-SITU CARBON DOPED e-SiGeCB STACK FOR MOS TRANSISTOR - An integrated circuit containing a PMOS transistor with p-channel source/drain (PSD) regions which include a three layer PSD stack containing Si—Ge, carbon and boron. The first PSD layer is Si—Ge and includes carbon at a density between 5×10 | 12-17-2009 |
| 20090309141 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - A disclosed semiconductor device includes multiple gate electrodes disposed on a semiconductor substrate; and multiple sidewall spacers disposed on sidewalls of the gate electrodes. The thickness of the sidewall spacers is larger on the sidewalls along longer sides of the gate electrodes than on the sidewalls along shorter sides of the gate electrodes. | 12-17-2009 |
| 20090315084 | SEMICONDUCTOR DEVICE AND SEMICONDUCTOR SUBSTRATE - A semiconductor device includes a semiconductor substrate, a gate pattern disposed on the semiconductor substrate, a body region disposed on the gate pattern and a first impurity doping region and a second impurity doping region. The gate pattern is disposed below the body region and the first impurity doping region and the second impurity doping region. | 12-24-2009 |
| 20090315085 | SEMICONDUCTOR DEVICE - In order to realize a higher reliability TFT and a high reliability semiconductor device, an NTFT of the present invention has a channel forming region, n-type first, second, and third impurity regions in a semiconductor layer. The second impurity region is a low concentration impurity region that overlaps a tapered potion of a gate electrode with a gate insulating film interposed therebetween, and the impurity concentration of the second impurity region increases gradually from the channel forming region to the first impurity region. And, the third impurity region is a low concentration impurity region that does not overlap the gate electrode. | 12-24-2009 |
| 20090321795 | SELECTIVE FORMATION OF DIELECTRIC ETCH STOP LAYERS - Methods to selectively form a dielectric etch stop layer over a patterned metal feature. Embodiments include a transistor incorporating such an etch stop layer over a gate electrode. In accordance with certain embodiments of the present invention, a metal is selectively formed on the surface of the gate electrode which is then converted to a silicide or germanicide. In other embodiments, the metal selectively formed on the gate electrode surface enables a catalytic growth of a silicon or germanium mesa over the gate electrode. At least a portion of the silicide, germanicide, silicon mesa or germanium mesa is then oxidized, nitridized, or carbonized to form a dielectric etch stop layer over the gate electrode only. | 12-31-2009 |
| 20090321796 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device according to one embodiment includes: a substrate having an element region where a semiconductor element is formed; a via hole formed in a portion of the substrate adjacent to the element region; a conducting portion provided in the via hole via an insulating layer; and a buffer layer provided between the substrate and the insulating layer, wherein the buffer layer is made of a material in which a difference in thermal expansion coefficient between the substrate and the buffer layer is smaller than that between the substrate and the insulating layer. | 12-31-2009 |
| 20090321797 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device including at least one step of: forming a transistor on and/or over a semiconductor substrate; forming silicide on and/or over a gate electrode and a source/drain region of the transistor; removing an uppermost oxide film from a spacer of the transistor; and forming a contact stop layer on and/or over the entire surface of the substrate including the gate electrode. | 12-31-2009 |
| 20100001323 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - Provided is a semiconductor device manufacturing method by which sufficient stress can be applied to a channel region within allowable ranges of concentrations of Ge and C in a mixed crystal layer. A semiconductor device is also provided. A dummy gate electrode | 01-07-2010 |
| 20100006907 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In a FET using a SiGe film as a channel region, dispersion of the Ge concentration in the SiGe film and dispersion of the film thickness of the SiGe film are suppressed. | 01-14-2010 |
| 20100012988 | METAL OXIDE SEMICONDUCTOR DEVICES HAVING IMPLANTED CARBON DIFFUSION RETARDATION LAYERS AND METHODS FOR FABRICATING THE SAME - Semiconductor devices and methods for fabricating semiconductor devices are provided. One exemplary method comprises providing a silicon-comprising substrate having a first surface, etching a recess into the first surface, the recess having a side surface and a bottom surface, implanting carbon ions into the side surface and the bottom surface, and forming an impurity-doped, silicon-comprising region overlying the side surface and the bottom surface. | 01-21-2010 |
| 20100012989 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device, and a method of fabricating the semiconductor device, which is able to prevent a leaning phenomenon from occurring between the adjacent storage nodes. The method includes forming a plurality of multi-layered pillar type storage nodes each of which is buried in a plurality of mold layers, wherein the uppermost layers of the multi-layered pillar type storage nodes are fixed by a support layer, etching a portion of the support layer to form an opening, and supplying an etch solution through the opening to remove the multiple mold layers. A process of depositing and etching the mold layer by performing the process 2 or more times to form the multi-layered pillar type storage node. Thus, the desired capacitance is sufficiently secured and the leaning phenomenon is avoided between adjacent storage nodes. | 01-21-2010 |
| 20100012990 | MOSFETS INCLUDING CRYSTALLINE SACRIFICIAL STRUCTURES - A sub-micron channel length MOSFET includes a seamless epitaxial channel region in a substrate of the MOSFET and a buried device isolation layer beneath the seamless epitaxial channel region. In some embodiments according to the invention, a buried device isolation layer includes the buried device isolation layer beneath a central portion of the seamless epitaxial channel and absent from sidewalls of source/drain regions of the MOSFET. | 01-21-2010 |
| 20100012991 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device, comprising: forming n-channel field-effect transistors on a silicon substrate; forming a first insulating film covering the field-effect transistors; shrinking the first insulating film; forming a second insulating film over the first insulating film; and shrinking the second insulating film, wherein the forming an insulating film covering the field-effect transistors and the shrinking the insulating film are repeated a plurality of time. | 01-21-2010 |
| 20100012992 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device includes forming a Metal Insulator Semiconductor (MIS) transistor over a semiconductor substrate, forming a nickel silicide layer on a surface of source/drain region of the MIS transistor, the nickel silicide layer containing platinum or tungsten, forming a stress film over the surface of the MIS transistor, and selectively removing the stress film so as to expose at least a part of the nickel silicide layer on the surface of source/drain region. | 01-21-2010 |
| 20100019292 | Transistor having a metal nitride layer pattern, etchant and methods of forming the same - A transistor having a metal nitride layer pattern, etchant and methods of forming the same is provided. A gate insulating layer and/or a metal nitride layer may be formed on a semiconductor substrate. A mask layer may be formed on the metal nitride layer. Using the mask layer as an etching mask, an etching process may be performed on the metal nitride layer, forming the metal nitride layer pattern. An etchant, which may have an oxidizing agent, a chelate agent and/or a pH adjusting mixture, may perform the etching. The methods may reduce etching damage to a gate insulating layer under the metal nitride layer pattern during the formation of a transistor. | 01-28-2010 |
| 20100025740 | Semiconductor Device and Method for Fabricating the Same - A method for fabricating a semiconductor device comprises forming a partial-insulated substrate comprising an insulating region located below both a channel region of a cell transistor and one of a storage node contact region and a bit line contact region, and forming a cell transistor comprising a fin region on the partial-insulated substrate. | 02-04-2010 |
| 20100025741 | SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME - The present invention discloses a method of fabricating a semiconductor memory device including forming sequentially a gate insulating layer and a first conductive pattern on a semiconductor substrate; forming a protective layer on surfaces of the first conductive pattern and the gate insulating layer; performing an etching process to form a trench, the etching process being performed such that the protective layer remains on side walls of the first conductive pattern to form a protective pattern; forming an isolation layer in the trench; etching the isolation layer; removing the protective pattern above a surface of the isolation layer; and forming sequentially a dielectric layer and a second conductive layer on surfaces of the isolation layer, the protective pattern and the first conductive pattern. | 02-04-2010 |
| 20100025742 | TRANSISTOR HAVING A STRAINED CHANNEL REGION CAUSED BY HYDROGEN-INDUCED LATTICE DEFORMATION - A lattice distortion may be achieved by incorporating a hydrogen species into a semiconductor material, such as silicon, without destroying the lattice structure. For example, by incorporating the hydrogen species on the basis of an electron shower, a tensile strain component may be obtained in the channel of N-channel transistors. | 02-04-2010 |
| 20100025743 | TRANSISTOR WITH EMBEDDED SI/GE MATERIAL HAVING ENHANCED BORON CONFINEMENT - By incorporating a diffusion hindering species at the vicinity of PN junctions of P-channel transistors comprising a silicon/germanium alloy, diffusion related non-uniformities of the PN junctions may be reduced, thereby contributing to enhanced device stability and increased overall transistor performance. The diffusion hindering species may be provided in the form of carbon, nitrogen and the like. | 02-04-2010 |
| 20100025744 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - A semiconductor device includes a gate electrode over a semiconductor substrate, a channel region provided in the semiconductor substrate below the gate electrode, and a strain generation layer configured to apply stress to the channel region, the strain generation layer being configured to apply greater stress in absolute value to the source edge of the channel region than to the drain edge of the channel region. | 02-04-2010 |
| 20100025745 | METHOD OF FORMING A LOW CAPACITANCE SEMICONDUCTOR DEVICE AND STRUCTURE THEREFOR - In one embodiment a transistor is formed with a gate structure having an opening in the gate structure. An insulator is formed on at least sidewalls of the opening and a conductor is formed on the insulator. | 02-04-2010 |
| 20100032732 | ELECTRICAL ANTIFUSE HAVING A MULTI-THICKNESS DIELECTRIC LAYER - An electrical antifuse comprising a field effect transistor includes a gate dielectric having two gate dielectric portions. Upon application of electric field across the gate dielectric, the magnitude of the electrical field is locally enhanced at the boundary between the thick and thin gate dielectric portions due to the geometry, thereby allowing programming of the electrical antifuse at a lower supply voltage between the two electrodes, i.e., the body and the gate electrode of the transistor, across the gate dielectric. | 02-11-2010 |
| 20100032733 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes: a semiconductor substrate having an element formation region containing impurities of a first conductivity type; a gate electrode formed on the element formation region with a gate insulating film interposed therebetween; and a silicon alloy layer formed on a lateral side of the gate electrode in the element formation region, and containing impurities of a second conductivity type. A boundary layer containing impurities of the second conductivity type is formed between the silicon alloy layer and the element formation region. | 02-11-2010 |
| 20100038685 | ENHANCED DISLOCATION STRESS TRANSISTOR - A device is provided. The device includes a transistor formed on a semiconductor substrate, the transistor having a conduction channel. The device includes at least one edge dislocation formed adjacent to the conduction channel on the semiconductor substrate. The device also includes at least one free surface introduced above the conduction channel and the at least one edge dislocation. | 02-18-2010 |
| 20100038686 | SOI SUBSTRATES AND DEVICES ON SOI SUBSTRATES HAVING A SILICON NITRIDE DIFFUSION INHIBITION LAYER AND METHODS FOR FABRICATING - Semiconductor-on-insulator substrates and methods for fabricating semiconductor-on-insulator substrates are provided. One exemplary method comprises providing a first silicon-comprising substrate, providing a second silicon-comprising substrate, forming a first silicon nitride layer overlying the second silicon-comprising substrate, and coupling the first silicon-comprising substrate to the second silicon-comprising substrate such that the first silicon nitride layer is interposed between the two substrates. | 02-18-2010 |
| 20100038687 | Selective deposition of amorphous silicon films on metal gates - A microelectronic device includes a metal gate with a metal gate upper surface. The metal gate is disposed in an interlayer dielectric first layer. The interlayer dielectric first layer also has an upper surface that is coplanar with the metal gate upper surface. A dielectric etch stop layer is disposed on the metal gate upper surface but not on the interlayer dielectric first layer upper surface. | 02-18-2010 |
| 20100044760 | SELF-ALIGNED IMPACT-IONIZATION FIELD EFFECT TRANSISTOR - An impact ionisation MOSFET is formed with the offset from the gate to one of the source/drain regions disposed vertically within the device structure rather than horizontally. The semiconductor device comprises a first source/drain region having a first doping level; a second source/drain region having a second doping level and of opposite dopant type to the first source/drain region, the first and second source/drain regions being laterally separated by an intermediate region having a doping level less than either of the first and second doping levels; a gate electrode electrically insulated from, and disposed over, the intermediate region, the first and second source/drain regions being laterally aligned with the gate electrode; where the entire portion of the first source/drain region that forms a boundary with the intermediate region is separated vertically from the top of the intermediate region. | 02-25-2010 |
| 20100044761 | SEMICONDUCTOR DEVICE AND METHODS FOR FABRICATING SAME - A semiconductor device is provided which includes a substrate including an inactive region and an active region, a gate electrode structure having portions overlying the active region, a compressive layer overlying the active region, and a tensile layer overlying the inactive region and located outside the active region. The active region has a lateral edge which defines a width of the active region, and a transverse edge which defines a length of the active region. The gate electrode structure includes: a common portion spaced apart from the active region; a plurality of gate electrode finger portions integral with the common portion, and a plurality of fillet portions integral with the common portion and the gate electrode finger portions. A portion of each gate electrode finger portion overlies the active region. The fillet portions are disposed between the common portion and the gate electrode finger portions, and do not overlie the active region. The compressive layer also overlies the gate electrode finger portions, and the tensile layer is disposed adjacent the transverse edge of the active region. | 02-25-2010 |
| 20100044762 | METHOD FOR FORMING A SEMICONDUCTOR DEVICE AND STRUCTURE THEREOF - A non-planar semiconductor device ( | 02-25-2010 |
| 20100052018 | CONTINUOUS METAL SEMICONDUCTOR ALLOY VIA FOR INTERCONNECTS - A contact structure is disclosed in which a continuous metal semiconductor alloy is located within a via contained within a dielectric material. The continuous semiconductor metal alloy is in direct contact with an upper metal line of a first metal level located atop the continuous semiconductor metal alloy and at least a surface of each source and drain diffusion region located beneath the continuous metal semiconductor alloy. The continuous metal semiconductor alloy can be derived from either a semiconductor nanowire or an epitaxial grown semiconductor material. The continuous metal semiconductor alloy includes a lower portion that is contained within an upper surface of each source and drain region, and a vertical pillar portion extending upward from the lower portion. The lower portion of the continuous metal semiconductor alloy and the vertical pillar portion are not separated by a material interface. Instead, the two portions of the continuous metal semiconductor alloy are of unitary construction, i.e., a single piece. | 03-04-2010 |
| 20100052019 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - Provided are a semiconductor device and a fabricating method thereof. The semiconductor device includes a substrate having a trench that defines an active region, an isolation layer that buries the trench, a pro-oxidant region formed at an upper corner portion of the trench to enhance oxidation at the upper corner portion of the trench when a gate insulation layer is grown on the active region, and a gate conductive layer formed on the gate insulation layer. | 03-04-2010 |
| 20100059799 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - The present invention relates to a method for manufacturing a semiconductor device, and provides to reduce a contact resistance of a landing plug by forming the landing plug in such a manner that a polysilicon layer is deposited only on the surface of a landing plug contact hole, and a metal layer is buried in the rest of the landing plug contact hole in the process of forming a storage node contact or a bit line contact. | 03-11-2010 |
| 20100059800 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE - A semiconductor device including: a SiC substrate; an AlGaN layer formed on the SiC substrate; a source electrode and a drain electrode formed on the AlGaN layer so as to be spaced from each other; an insulation film formed between the source electrode and the drain electrode and having a band-like opening in parallel to the source electrode and the drain electrode; a gate electrode formed at the opening in the insulation film; and a drain-side field plate electrode formed integrally with the gate electrode on the drain electrode side of the gate electrode and having a drain electrode side end portion spaced from the insulation film, thus restraining degradation in performance. | 03-11-2010 |
| 20100059801 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a gate insulating film formed on a semiconductor region of a first conductivity type; a gate electrode formed on the gate insulating film; an offset spacer formed on a side surface of the gate electrode; an inner sidewall formed on the side surface of the gate electrode with the offset spacer interposed therebetween, and having an L-shaped cross section; and an insulating film formed to cover the gate electrode, the offset spacer, the inner sidewall, and a part of the semiconductor region located laterally outward from the inner sidewall. The offset spacer includes an inner offset spacer formed on the side surface of the gate electrode and an outer offset spacer formed to cover the side surface of the gate electrode and the inner offset spacer. The outer offset spacer is in contact with a top end and outer side surface of the inner offset spacer. | 03-11-2010 |
| 20100065895 | Method for producing at least one porous layer - A method for producing at least one porous layer on a substrate, whereby a suspension, which contains particles from a layer-forming material or molecular precursors of the layer-forming material, as well as at least one organic component, is applied to the substrate, the precursors of the layer-forming material are subsequently reacted to produce the layer-forming material following application to the substrate, in a next step, the particles from the layer-forming material are sintered, and the at least one organic component is subsequently removed. Also, a field-effect transistor having at least one gate electrode, the gate electrode having an electrically conductive, porous coating which was applied in accordance with the method. | 03-18-2010 |
| 20100072521 | METHOD FOR FORMING SILICIDE OF SEMICONDUCTOR DEVICE - A silicide forming method for a semiconductor device. A silicide forming method may include forming a gate electrode by depositing a gate oxide film and/or polysilicon over a silicon substrate and patterning. A silicide forming method may include forming a nitride film spacer over sidewalls of a gate electrode and simultaneously performing source/drain implant and amophization implant over a silicon substrate. A silicide forming method may include depositing an insulating film after performing source/drain and amophization implants. A silicide forming method may include partially and/or entirely exposing a source/drain and/or gate electrode disposed under an insulating film by etching an insulating film. A silicide forming method may include applying a metal film over a silicon substrate and forming silicide over regions etched by performing heat treatment over a source/drain and/or gate electrode. | 03-25-2010 |
| 20100072522 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A semiconductor device fabrication method includes the steps of (a) forming a dielectric film on a semiconductor substrate; (b) etching the dielectric film by a dry process; and (c) supplying thermally decomposed atomic hydrogen onto the semiconductor substrate under a prescribed temperature condition, to remove a damaged layer produced in the semiconductor substrate due to the dry process. | 03-25-2010 |
| 20100078688 | NITRIDE SEMICONDUCTOR DEVICE, NITRIDE SEMICONDUCTOR PACKAGE, AND METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR DEVICE - A nitride semiconductor device of the present invention includes: a nitride semiconductor laminated structure including an n-type first layer, a second layer that is laminated on the first layer and contains a p-type impurity, and an n-type third layer laminated on the second layer, each layer of the nitride semiconductor laminated structure being made of a Group III nitride semiconductor, and having a wall surface extending from the first, second, to third layers; a fourth layer that is formed on the wall surface in the second layer and that has a different conductive characteristic from that of the second layer; a gate insulating film formed to contact the fourth layer; and a gate electrode formed as facing the fourth layer with the gate insulating film being sandwiched between the gate electrode and the fourth layer. | 04-01-2010 |
| 20100078689 | TRANSISTOR WITH EMBEDDED SI/GE MATERIAL HAVING REDUCED OFFSET TO THE CHANNEL REGION - A strain-inducing semiconductor alloy may be formed on the basis of cavities which may have a non-rectangular shape, which may be maintained even during corresponding high temperature treatments by providing an appropriate protection layer, such as a silicon dioxide material. Consequently, a lateral offset of the strain-inducing semiconductor material may be reduced, while nevertheless providing a sufficient thickness of corresponding offset spacers during the cavity etch process, thereby preserving gate electrode integrity. For instance, P-channel transistors may have a silicon/germanium alloy with a hexagonal shape, thereby significantly enhancing the overall strain transfer efficiency. | 04-01-2010 |
| 20100078690 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE - As a method for constituting a pre-metal interlayer insulating film, such method is considered as forming a CVD silicon oxide-based insulating film having good filling properties of a silicon oxide film by ozone TEOS, reflowing the film at high temperatures to planarize it, then stacking a silicon oxide film having good CMP scratch resistance by plasma TEOS, and, further, planarizing it by CMP. However, it was made clear that, in a process for forming a contact hole, crack in the pre-metal interlayer insulating film is exposed in the contact hole, into which barrier metal intrudes to cause short-circuit defects. | 04-01-2010 |
| 20100078691 | TRANSISTOR WITH EMBEDDED SI/GE MATERIAL HAVING ENHANCED ACROSS-SUBSTRATE UNIFORMITY - In sophisticated semiconductor devices, a strain-inducing semiconductor alloy may be positioned close to the channel region by forming cavities on the basis of a wet chemical etch process, which may have an anisotropic etch behavior with respect to different crystallographic orientations. In one embodiment, TMAH may be used which exhibits, in addition to the anisotropic etch behavior, a high etch selectivity with respect to silicon dioxide, thereby enabling extremely thin etch stop layers which additionally provide the possibility of further reducing the offset from the channel region while not unduly contributing to overall process variability. | 04-01-2010 |
| 20100096673 | SEMICONDUCTOR DEVICE STRUCTURE HAVING ENHANCED PERFORMANCE FET DEVICE - A method for making a semiconductor device structure, includes: providing a substrate; forming on the substrate: a first layer below and second layers on a gate with spacers, source and drain regions adjacent to the gate, silicides on the gate and source and drain regions; disposing a stress layer over the structure resulting from the forming step; disposing an insulating layer over the stress layer; removing portions of the insulating layer to expose a top surface of the stress layer; removing the top surface and other portions of the stress layer and portions of the spacers to form a trench, and then disposing a suitable stress material into the trench. | 04-22-2010 |
| 20100102363 | AIR GAP SPACER FORMATION - Miniaturized complex transistor devices are formed with reduced leakage and reduced miller capacitance. Embodiments include transistors having reduced capacitance between the gate electrode and source/drain contact, as by utilizing a low-K dielectric constant sidewall spacer material. An embodiment includes forming a gate electrode on a semiconductor substrate, forming a sidewall spacer on the side surfaces of the gate electrode, forming source/drain regions by ion implantation, forming an interlayer dielectric over the gate electrode, sidewall spacers, and substrate, and forming a source/drain contact through the interlayer dielectric. The sidewall spacers and interlayer dielectric are then removed. A dielectric material, such as a low-K dielectric material, is then deposited in the gap between the gate electrode and the source/drain contact so that an air gap is formed, thereby reducing the parasitic “miller” capacitance. | 04-29-2010 |
| 20100102364 | Method for Providing a Self-Aligned Conductive Structure - An embodiment according to the present invention comprises a method for providing a self-aligned conductive structure comprising providing a first structure on a surface, wherein the first structure comprises a first and a second layer, and providing an intermediate structure on the surface, wherein the intermediate structure at least partially abuts the first structure laterally at a first lateral edge of the first structure. The method further comprises removing at least a part of the second layer, the part being adjacent to the first lateral edge, and providing the conductive structure such that the conductive structure replaces at least the removed part of the second layer and abuts the first lateral edge. | 04-29-2010 |
| 20100102365 | SEMICONDUCTOR DEVICE - A semiconductor device includes a silicon substrate having a protrusion, a gate insulating film formed over an upper surface of the protrusion of the silicon substrate, a gate electrode formed over the gate insulating film, a source/drain region formed in the silicon substrate on the side of the gate electrode, a first side wall formed over the side surface of the protrusion of the silicon substrate, the first side wall containing an insulating material. a second side wall formed over the first side wall, the second side wall having a bottom portion formed below the upper surface of the protrusion of the silicon substrate, the second side wall containing a material having a Young's modulus greater than that of the silicon substrate, and a stress film formed over the gate electrode and the second side wall. | 04-29-2010 |
| 20100109056 | METHODS FOR PROTECTING GATE STACKS DURING FABRICATION OF SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEVICES FABRICATED FROM SUCH METHODS - Methods for protecting gate stacks during fabrication of semiconductor devices and semiconductor devices fabricated from such methods are provided. In an embodiment, a method for fabricating a semiconductor device comprises forming a gate stack comprising a first gate stack-forming layer overlying a semiconductor substrate and forming first sidewall spacers about sidewalls of the gate stack. After the step of forming the first sidewall spacers, a portion of the first gate stack-forming layer is exposed. The exposed portion is anisotropically etched using the gate stack and the first sidewall spacers as an etch mask. Second sidewall spacers are formed adjacent the first sidewall spacers after the step of anisotropically etching. | 05-06-2010 |
| 20100109057 | Fin field effect transistor and method of fabricating the same - A fin field effect transistor includes a fin protruding from a semiconductor substrate, a gate insulating layer formed so as to cover upper and lateral surfaces of the fin, and a gate electrode formed across the fin so as to cover the gate insulating layer. An upper edge of the fin is rounded so that an electric field concentratedly applied to the upper edge of the fin through the gate electrode is dispersed. A thickness of a portion of the gate insulating layer formed on an upper surface of the fin is greater than a thickness of a portion of the gate insulating layer formed on a lateral surface of the fin, in order to reduce an electric field applied through the gate electrode. | 05-06-2010 |
| 20100109058 | CONDUCTIVE OXYNITRIDE AND METHOD FOR MANUFACTURING CONDUCTIVE OXYNITRIDE FILM - An electrode formed using a transparent conductive oxide is likely to be crystallized by heat treatment performed in the manufacturing process of a semiconductor device. In the case of a thin film element using an electrode having a significantly uneven surface due to crystallization, a short circuit is likely to occur and thus reliability of the element is degraded. An object is to provide a light-transmitting conductive oxynitride which is not crystallized even if subjected to heat treatment and a manufacturing method thereof. It is found that an oxynitride containing indium, gallium, and zinc, to which hydrogen atoms are added as impurities, is a light-transmitting conductive film which is not crystallized even if heated at 350° C. and the object is achieved. | 05-06-2010 |
| 20100123173 | Semiconductor device and method of manufacturing the same - A semiconductor device includes a three-dimensional structure that extends in a channel direction, a stress film having residual stress acting on a first side surface of the three-dimensional structure, a gate insulating film that is formed over a second side surface of the three-dimensional structure, and a gate electrode that covers the three-dimensional structure with the gate insulating film interposed therebetween and extends in a direction in which the first and second side surfaces are opposite to each other. The three-dimensional structure has a channel region between a source electrode and a drain electrode. | 05-20-2010 |
| 20100127310 | Semiconductor device and method for producing the same - A semiconductor device comprising at least two wiring layers on a substrate or a surface layer of the substrate, wherein a lower wiring layer of the two wiring layers contains silicon, and a silicon carbide layer is placed between the lower wiring layer and an upper wiring layer. | 05-27-2010 |
| 20100127311 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device and a method of manufacturing a semiconductor device. A method of manufacturing a semiconductor device may include forming a gate electrode over a semiconductor substrate, a second conductive type ion implantation region at opposite sides of a gate electrode, a second conductive type ion implantation region as a first conductive type second ion implantation region by implanting a first conductive type impurity over opposite sides of said gate electrode, and/or forming a first conductive type first ion implantation region that substantially surrounds a first conductive type second ion implantation region. A method of manufacturing a semiconductor device may form an N type MOSFET and/or a P type MOSFET using a single photolithography process for each N+ source/drain photolithography process and/or P+ source/drain photolithography process. | 05-27-2010 |
| 20100127312 | GRAPHENE DEPOSITION AND GRAPHENATED SUBSTRATES - Methods, devices, systems and/or articles related to techniques for forming a graphene film on a substrate, and the resulting graphene layers and graphenated substrates are generally disclosed. Some example techniques may be embodied as methods or processes for forming graphene. Some other example techniques may be embodied as devices employed to manipulate, treat, or otherwise process substrates, graphite, graphene and/or graphenated substrates as described herein. Graphene layers and graphenated substrates produced by the various techniques and devices provided herein are also disclosed. | 05-27-2010 |
| 20100133594 | SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING THE SAME - A semiconductor structure including a substrate, a gate dielectric layer, a gate, a source region and a drain region is provided. The gate dielectric layer is disposed on the substrate. At least one recess is disposed in the substrate. The gate is disposed on the gate dielectric layer and in the recess. The source and drain regions are respectively disposed in the substrate beside the gate. | 06-03-2010 |
| 20100133595 | FIELD EFFECT TRANSISTOR STRUCTURE WITH ABRUPT SOURCE/DRAIN JUNCTIONS - Microelectronic structures embodying the present invention include a field effect transistor (FET) having highly conductive source/drain extensions. Formation of such highly conductive source/drain extensions includes forming a passivated recess which is back filled by epitaxial deposition of doped material to form the source/drain junctions. The recesses include a laterally extending region that underlies a portion of the gate structure. Such a lateral extension may underlie a sidewall spacer adjacent to the vertical sidewalls of the gate electrode, or may extend further into the channel portion of a FET such that the lateral recess underlies the gate electrode portion of the gate structure. In one embodiment the recess is back filled by an in-situ epitaxial deposition of a bilayer of oppositely doped material. In this way, a very abrupt junction is achieved that provides a relatively low resistance source/drain extension and further provides good off-state subthreshold leakage characteristics. Alternative embodiments can be implemented with a back filled recess of a single conductivity type. | 06-03-2010 |
| 20100140673 | PRINTING SHIELDED CONNECTIONS AND CIRCUITS - An embodiment is a method and apparatus to construct a shielded cable, wire, or circuit. A first insulator layer is deposited on a first conductor or semiconductor layer. A second conductor or semiconductor layer is deposited on the first insulator layer. A second insulator layer is deposited on the first insulator layer. The second insulator layer covers the second conductor or semiconductor layer and defines a shielded region. A third conductor or semiconductor layer is deposited on the first conductor or semiconductor layer. The third conductor or semiconductor layer covers the first and second insulator layers. At least one of the first, second, and third conductor or semiconductor layers, and the first and second insulator layers is deposited by printing. | 06-10-2010 |
| 20100140674 | MOSFET WITH MULTIPLE FULLY SILICIDED GATE AND METHOD FOR MAKING THE SAME - A field-effect transistor is provided. The field-effect transistor includes a gate structure including a fully silicided gate material overlying a gate dielectric disposed on a substrate, the fully silicided gate material having an upper region and a lower region, wherein the lower region has a first lateral dimension in accordance with a lateral dimension of the gate dielectric, and the upper region has a second lateral dimension different from the first lateral dimension. | 06-10-2010 |
| 20100148227 | ELECTRONIC DEVICE INCLUDING AN INSULATING LAYER HAVING DIFFERENT THICKNESSES AND A CONDUCTIVE ELECTRODE AND A PROCESS OF FORMING THE SAME - An electronic device includes a transistor, wherein the electronic device can include a semiconductor layer having a primary surface, a channel region, a gate electrode, a source region, a conductive electrode, and an insulating layer lying between the primary surface of the semiconductor layer and the conductive electrode. The insulating layer has a first region and a second region, wherein the first region is thinner than the second region. The channel region, gate electrode, source region, or any combination thereof can lie closer to the first region than the second region. The thinner portion can allow for faster switch of the transistor, and the thicker portion can allow a relatively large voltage difference to be placed across the insulating layer. Alternative shapes for the transitions between the different regions of the insulating layer and exemplary methods to achieve such shapes are also described. | 06-17-2010 |
| 20100148228 | SEMICONDUCTOR AND MANUFACTURING METHOD OF THE SAME - A semiconductor device includes a gate formed on a semiconductor substrate. A first junction region is formed on a first side of the gate and a second junction region formed on a second side of the gate. A bit line is formed over the gate to be electrically coupled with the first junction region. A first metal plug is formed electrically coupling the second junction region. A bit line contact plug is provided between the first junction region and the bit line, and electrically couples the first junction region and the bit line. A second metal plug is formed over the first metal plug and electrically couples the first metal plug. The junction region of a gate in a core or peripheral region is connected to the metal line using a metal plug so that bit lines formed in the core and peripheral area can have a pattern similar to that formed in a cell region. | 06-17-2010 |
| 20100148229 | INSULATING RESIN COMPOSITION - An insulating resin composition is provided. The insulating resin composition includes (A) a silicon-based polymer having either primary or secondary amine groups or both, (B) an organometallic compound, and (C) a solvent. The physicochemical properties of the insulating resin composition are maintained during processing steps for the fabrication of a semiconductor device. Therefore, the use of the insulating resin composition prevents deterioration of the characteristics of the semiconductor device arising from defects, spots, aggregates, and the like, in an insulating film and reduces the hysteresis of the semiconductor device to improve the characteristics of the semiconductor device. | 06-17-2010 |
| 20100155790 | N-FET with a Highly Doped Source/Drain and Strain Booster - A structure and method of making an N-FET with a highly doped source/drain and strain booster are presented. The method provides a substrate with a Ge channel region. A gate dielectric is formed over the Ge channel and a gate electrode is formed over the gate dielectric. Sacrificial gate spacers are disposed on the sidewalls of the gate dielectric and gate electrode. Cavities are etched into the substrate extending under the sacrificial gate spacers. Si | 06-24-2010 |
| 20100155791 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device includes forming trench-like recesses in a semiconductor substrate, the recesses including one or more recesses each of which has an opening width of not more than a predetermined value, forming a first insulating film above the substrate after the recesses have been formed, so that one or a plurality of voids are formed in the one or more recesses whose opening widths are not more than the predetermined value, removing part of the first insulating film so that a beam is left which spans the openings so that the beam passes over upper surfaces of the one or more recesses and so that at least the voids are exposed in a portion of the substrate except the beam, and filling the voids in the recesses with a material with fluidity, thereby forming second insulating films in the recesses. | 06-24-2010 |
| 20100155792 | TRANSPARENT TRANSISTOR AND METHOD OF MANUFACTURING THE SAME - Provided is a transparent transistor including a substrate, source and drain electrodes formed on the substrate, each having a multi-layered structure of a lower transparent layer, a metal layer and an upper transparent layer, a channel formed between the source and drain electrodes, and a gate electrode aligned with the channel. Here, the lower transparent layer or the upper transparent layer is formed of a transparent semiconductor layer, which is the same as the channel. Thus, the use of the multi-layered transparent conductive layer can ensure transparency and conductivity, overcome a problem of contact resistance between the source and drain electrodes and a semiconductor, and improve processibility by patterning the multi-layered transparent conductive layer all at once, while deposition is performed layer by layer. | 06-24-2010 |
| 20100155793 | SELF ALIGNED FIELD EFFECT TRANSISTOR STRUCTURE - Provided is a self aligned filed effect transistor structure. The self aligned field effect transistor structure includes: an active region on a substrate; a U-shaped gate insulation pattern on the active region; and a gate electrode self-aligned by the gate insulation pattern and disposed in an inner space of the gate insulation pattern. | 06-24-2010 |
| 20100155794 | REWORK METHOD OF METAL STRUCTURE OF SEMICONDUCTOR DEVICE - A rework method of a metal structure and devices thereof. A rework method may include forming a first metal layer over an insulating layer having a contact plug, a metal interconnection layer over a first metal layer and/or a second metal layer over a metal interconnection layer. A rework method may include performing a first wet etch process to remove first and/or second metal layers, except for a portion below a metal interconnection layer, removing a metal interconnection layer through a second wet etch process and/or planarizing a remaining portion of a first metal layer and/or a surface of an insulating layer through a first planarization process. An increase of a size of a contact hole, for example due to an over exposure of a contact hole, may be minimized. | 06-24-2010 |
| 20100155795 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device according to an embodiment includes: a substrate on which a source/drain region is formed; a gate oxide that includes a first oxide formed on the substrate and implanted with fluorine impurity, and a second oxide formed on the first oxide; a gate electrode that is formed on the gate oxide; and a spacer that is formed on a side of the gate electrode. | 06-24-2010 |
| 20100163937 | METHODS OF FORMING NICKEL SULFIDE FILM ON A SEMICONDUCTOR DEVICE - Embodiments of the present invention describe a method of forming nickel sulfide layer on a semiconductor device. A nickel sulfide layer is formed on a substrate by alternatingly exposing the substrate to a nickel-containing precursor and a sulfur-containing precursor. | 07-01-2010 |
| 20100163938 | METHOD FOR FORMING SILICIDE IN SEMICONDUCTOR DEVICE - A method of forming a silicide in a semiconductor device includes: forming a poly gate on and/or over the upper portion of a silicon substrate having an active area and an STI formed therein; forming a spacer wall on and/or over both sidewalls of the poly gate; forming source/drain by performing high-concentration ion implantation; forming a silicide blocking pattern on and/or over both sidewalls of the spacer wall and on the STI; forming a multilayer silicide material on and/or over substantially the entire surface of the silicon substrate having the silicide blocking pattern formed thereover; and performing an RTA process on the multilayer silicide material to form a silicide by reaction between the poly gate and the source/drain electrode. | 07-01-2010 |
| 20100163939 | TRANSISTOR DEVICE COMPRISING AN EMBEDDED SEMICONDUCTOR ALLOY HAVING AN ASYMMETRIC CONFIGURATION - In sophisticated semiconductor devices, an asymmetric transistor configuration may be obtained on the basis of a strain-inducing semiconductor alloy. To this end, strain relaxation implantation processes may be performed at the drain side according to some illustrative embodiments, while, in other cases, the deposition of the strain-inducing alloy may be performed in an asymmetric manner with respect to the drain side and the source side of the transistor. | 07-01-2010 |
| 20100171156 | Method for Forming Semiconductor Contacts - In one embodiment of the invention, contact patterning may be divided into two or more passes which may allow designers to control the gate height critical dimension relatively independent from the contact top critical dimension. | 07-08-2010 |
| 20100176425 | TRANSISTOR WITH WIRE SOURCE AND DRAIN - Field-effect transistor that includes at least a gate, a layer of insulator, a drain, a source, a semi-conductor material connecting the source to the drain, the gate and the layer of insulator each surrounding the assembly constituted by the source, the drain and the semi-conductor material, the layer of insulator being arranged between the gate and said assembly. | 07-15-2010 |
| 20100176426 | TRANSISTOR AND METHOD OF MANUFACTURING THE SAME - A method of manufacturing a transistor ( | 07-15-2010 |
| 20100187578 | STRESS ENHANCED TRANSISTOR DEVICES AND METHODS OF MAKING - Stress enhanced transistor devices and methods of fabricating the same are disclosed. In one embodiment, a transistor device comprises: a gate conductor spaced above a semiconductor substrate by a gate dielectric, wherein the semiconductor substrate comprises a channel region underneath the gate conductor and recessed regions on opposite sides of the channel region, wherein the channel region comprises undercut areas under the gate conductor; a stressed material embedded in the undercut areas of the channel region under the gate conductor; and epitaxially grown source and drain regions disposed in the recessed regions of the semiconductor substrate laterally adjacent to the stressed material. | 07-29-2010 |
| 20100187579 | TRANSISTOR DEVICES AND METHODS OF MAKING - In an embodiment, a method of fabricating a transistor device comprises: providing a semiconductor topography comprising a gate conductor disposed above a semiconductor substrate between a pair of dielectric spacers; anisotropically etching exposed regions of the semiconductor substrate on opposite sides of the dielectric spacers to form recessed regions in the substrate; oxidizing exposed surfaces of the substrate in the recessed regions to form an oxide thereon; removing the oxide from bottoms of the recessed regions while retaining the oxide upon sidewalls of the recessed regions; and isotropically etching the substrate such that the recessed regions undercut the pair of dielectric spacers. | 07-29-2010 |
| 20100193847 | METAL GATE TRANSISTOR WITH BARRIER LAYER - A semiconductor fabrication process for forming a gate electrode for a metal-oxide-semiconductor (MOS) transistor includes forming a gate electrode layer of an electrically conductive ceramic, e.g., titanium nitride, overlying a gate dielectric layer, e.g., a high K dielectric. A gate barrier layer is then formed overlying the gate electrode layer. The gate barrier layer may be a metal or transition metal material including, as an example, titanium. Portions of the gate electrode layer and the gate barrier layer are then etched or otherwise removed to form the gate electrode. | 08-05-2010 |
| 20100200897 | TRANSISTOR AND METHOD OF MANUFACTURING THE SAME - A method of manufacturing a transistor ( | 08-12-2010 |
| 20100207175 | SEMICONDUCTOR TRANSISTOR DEVICE HAVING AN ASYMMETRIC EMBEDDED STRESSOR CONFIGURATION, AND RELATED MANUFACTURING METHOD - A semiconductor transistor device is provided. The transistor device includes a layer of semiconductor material, a gate structure overlying the layer of semiconductor material, a source region in the layer of semiconductor material, and a drain region in the layer of semiconductor material. The source region has a stress-inducing semiconductor material located therein, while the drain region is free of any stress-inducing semiconductor material. This asymmetric arrangement of stress-inducing elements results in relatively high source-body leakage, and relatively low drain-body leakage, which is beneficial in analog circuit applications. | 08-19-2010 |
| 20100207176 | Metal oxide semiconductor devices having doped silicon-compromising capping layers and methods for fabricating the same - Methods are provided for forming a semiconductor device comprising a semiconductor substrate. In accordance with an exemplary embodiment, a method comprises the steps of forming a high-k dielectric layer overlying the semiconductor substrate, forming a metal-comprising gate layer overlying the high-k dielectric layer, forming a doped silicon-comprising capping layer overlying the metal-comprising gate layer, and depositing a silicon-comprising gate layer overlying the doped silicon-comprising capping layer. | 08-19-2010 |
| 20100207177 | METHOD FOR PRODUCING A COPPER CONTACT - A method for producing a contact through the pre-metal dielectric (PMD) layer of an integrated circuit, between the front end of line and the back end of line, and the device produced thereby are disclosed. The PMD layer includes oxygen. In one aspect, the method includes producing a hole in the PMD, depositing a conductive barrier layer at the bottom of the hole, depositing a CuMn alloy on the bottom and side walls of the hole, filling the remaining portion of the hole with Cu. The method further includes performing an anneal process to form a barrier on the side walls of the hole, wherein the barrier has an oxide including Mn. The method further includes performing a CMP process. | 08-19-2010 |
| 20100213517 | HIGH VOLTAGE SEMICONDUCTOR DEVICE - This invention describes implementation of medium/high voltage semiconductor devices with a better voltage-blocking capability versus specific on-resistanσe trade off. This approach can be implemented in baseline and submicron CMOS without any additional process steps. Said devices comprise dielectric regions and semiconductor regions formed between them. Conductive extentions are formed on the dielectric regions, said extentions interacting capacitively with the semiconducter regions. | 08-26-2010 |
| 20100213518 | Impurity Doped UV Protection Layer - An ultra-violet (UV) protection layer is formed over a semiconductor workpiece before depositing a UV curable dielectric layer. The UV protection layer prevents UV light from reaching and damaging underlying material layers and electrical devices. The UV protection layer comprises a layer of silicon doped with an impurity, wherein the impurity comprises O, C, H, N, or combinations thereof. The UV protection layer may comprise SiOC:H, SiON, SiN, SiCO:H, combinations thereof, or multiple layers thereof, as examples. | 08-26-2010 |
| 20100219455 | III-NITRIDE SEMICONDUCTOR FIELD EFFECT TRANSISTOR - An active layer of a first conductive-type includes a channel area. A first contact area and a second contact area of a second conductive-type are formed at positions across the channel area. A source electrode is formed on the first contact area. A drain electrode is formed on the second contact area. A gate electrode is formed above the channel area via a gate insulating layer. A reduced surface field zone of the second conductive-type is formed in the channel area at a position close to the second contact area. Thickness of the reduced surface field zone is 30 nanometers to 100 nanometers. | 09-02-2010 |
| 20100219456 | FORMING INTEGRATED CIRCUITS WITH REPLACEMENT METAL GATE ELECTRODES - In a metal gate replacement process, a stack of at least two polysilicon layers or other materials may be formed. Sidewall spacers may be formed on the stack. The stack may then be planarized. Next, the upper layer of the stack may be selectively removed. Then, the exposed portions of the sidewall spacers may be selectively removed. Finally, the lower portion of the stack may be removed to form a T-shaped trench which may be filled with the metal replacement. | 09-02-2010 |
| 20100224915 | METHOD FOR PRODUCING SEMICONDUCTOR CHIP, AND FIELD EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING SAME - According to a method of the present invention for manufacturing a semiconductor piece, at least two semiconductor layers ( | 09-09-2010 |
| 20100224916 | SEMICONDUCTOR DEVICE - It is made possible to optimize the effective work function of the metal for a junction and suppress the resistance as far as possible at the interface between a semiconductor or a dielectric material and a metal. A semiconductor device includes: a semiconductor film; a Ti oxide film formed on the semiconductor film, and including at least one element selected from the group consisting of V, Cr, Mn, Fe, Co, Ni, Nb, Mo, Tc, Ru, Rh, Pd, Ta, W, Re, Os, Ir, and Pt; and a metal film formed on the Ti oxide film. | 09-09-2010 |
| 20100230732 | FIELD EFFECT TRANSISTOR WITH AIR GAP DIELECTRIC - A field effect transistor (FET) that includes a drain formed in a first plane, a source formed in the first plane, a channel formed in the first plane and between the drain and the source and a gate formed in the first plane. The gate is separated from at least a portion of the body by an air gap. The air gap is also in the first plane. | 09-16-2010 |
| 20100237391 | PROCESS FOR MANUFACTURING A LARGE-SCALE INTEGRATION MOS DEVICE AND CORRESPONDING MOS DEVICE - A process for manufacturing a MOS device and the MOS device manufactured thereby are disclosed. The process includes in a semiconductor layer forming a gate structure above the semiconductor layer; forming a first doped region within a first surface portion of the semiconductor layer; and irradiating the first doped region with electromagnetic radiation, to carry out annealing thereof. Prior to the irradiating step, a dielectric mirror is formed above a second surface portion of the semiconductor layer. The dielectric mirror, which may be of the Bragg-reflector type, reflects at least in part the electromagnetic radiation, and protects underlying regions from the electromagnetic radiation. | 09-23-2010 |
| 20100244106 | Fabrication and structure of asymmetric field-effect transistors using L-shaped spacers - Fabrication of an asymmetric field-effect transistor ( | 09-30-2010 |
| 20100244107 | REDUCING SILICIDE RESISTANCE IN SILICON/GERMANIUM-CONTAINING DRAIN/SOURCE REGIONS OF TRANSISTORS - In sophisticated P-channel transistors, a high germanium concentration may be used in a silicon/germanium alloy, wherein an additional semiconductor cap layer may provide enhanced process conditions during the formation of a metal silicide. For example, a silicon layer may be formed on the silicon/germanium alloy, possibly including a further strain-inducing atomic species other than germanium, in order to provide a high strain component while also providing superior conditions during the silicidation process. | 09-30-2010 |
| 20100252868 | ENHANCED FIELD EFFECT TRANSISTOR - An enhanced FET capable of controlling current above and below a gate of the FET. The FET is formed on a semiconductor substrate. A source and drain are formed in the substrate (or in a well in the substrate). A first epitaxial layer of similar doping to the source and drain are grown on the source and drain, the first epitaxial layer is thicker than the gate, but not so thick as to cover the top of the gate. A second epitaxial layer of opposite doping is grown on the first epitaxial layer thick enough to cover the top of the gate. The portion of the second epitaxial layer above the gate serves as a body through which the gate controls current flow between portions of the first epitaxial layer over the drain and the source. | 10-07-2010 |
| 20100252869 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device according to one embodiment includes: a gate electrode formed on a semiconductor substrate via a gate insulating film; Si:C layers formed on the semiconductor substrate in sides of the gate electrode; p-type source/drain regions formed in sides of the gate electrode in the semiconductor substrate, and a part of the p-type source/drain regions being formed in the Si:C layers; and silicide layers formed on the Si:C layers. | 10-07-2010 |
| 20100258848 | COMPENSATED GATE MISFET AND METHOD FOR FABRICATING THE SAME - A MISFET, such as a GaN transistor, with low gate leakage. In one embodiment, the gate leakage is reduced with a compensated GaN layer below the gate contact and above the barrier layer. In another embodiment, the gate leakage is reduced by employing a semi-insulating layer below the gate contact and above the barrier layer. | 10-14-2010 |
| 20100264468 | Method Of Fabrication Of A FinFET Element - The present disclosure provides a FinFET element and method of fabricating a FinFET element. The FinFET element includes a germanium-FinFET element (e.g., a multi-gate device including a Ge-fin). In one embodiment, the method of fabrication the Ge-FinFET element includes forming silicon fins on a substrate and selectively growing an epitaxial layer including germanium on the silicon fins. A Ge-condensation process may then be used to selectively oxidize the silicon of the Si-fin and transform the Si-fin to a Ge-fin. The method of fabrication provided may allow use of SOI substrate or bulk silicon substrates, and CMOS-compatible processes to form the Ge-FinFET element. | 10-21-2010 |
| 20100264469 | MOSFET INCLUDING EPITAXIAL HALO REGION - A metal oxide semiconductor field effect transistor structure and a method for fabricating the metal oxide semiconductor field effect transistor structure provide for a halo region that is physically separated from a gate dielectric. The structure and the method also provide for a halo region aperture formed horizontally and crystallographically specifically within a channel region pedestal within the metal oxide semiconductor field effect transistor structure. The halo region aperture is filled with a halo region formed using an epitaxial method, thus the halo region may be formed physically separated from the gate dielectric. As a result, performance of the metal oxide semiconductor field effect transistor is enhanced. | 10-21-2010 |
| 20100264470 | NMOS TRANSISTOR DEVICES AND METHODS FOR FABRICATING SAME - NMOS transistors having controlled channel strain and junction resistance and methods for the fabrication of same are provided herein. In some embodiments, a method for forming an NMOS transistor may include providing a substrate having a p-type silicon region and a gate stack disposed thereon, the gate stack partially defining a source and a drain region; depositing an undoped first silicon layer having a lattice adjusting element atop the p-type silicon region and within the source and the drain regions; and depositing a second silicon layer having a lattice adjusting element and an n-type dopant atop the undoped first silicon layer. | 10-21-2010 |
| 20100264471 | Enhancing MOSFET performance with stressed wedges - The present invention relates to improved metal-oxide-semiconductor field effect transistor (MOSFET) devices with stress-inducing structures located above the gate structure or at or near the source and drain regions. Specifically, a dielectric layer in on the MOSFET and at least one stress-inducing wedge is pressed into the dielectric layer to induce a stress in the channel of the MOSFET. The at least one stress-inducing wedge is located above the gate of an n-channel MOSFET (nMOSFET) and the at least one stress-inducing wedge is located in or near the source and drain regions, but not above the gate of a p-channel MOSFET (pMOSFET). The former creates tensile stress in the channel of an nMOSFET and then enhance the performance of the nMOSFET. The latter produces compressive stress in the channel of a pMOSFET and then enhance the performance of the pMOSFET. | 10-21-2010 |
| 20100264472 | PATTERNING METHOD, AND FIELD EFFECT TRANSISTORS - A patterning method with a filling material with a T-shaped cross section is used as a mask during patterning to produce structures having sublithographic dimensions, such as a double-fin field effect transistor. | 10-21-2010 |
| 20100270598 | METHOD FOR FORMING HIGHLY STRAINED SOURCE/DRAIN TRENCHES - A multi-step etching process produces trench openings in a silicon substrate that are immediately adjacent transistor structures formed over the substrate surface. The multi-step etching process is a Br-based etching operation with one step including nitrogen and a further step deficient of nitrogen. The etching process does not attack the transistor structure and forms an opening bounded by upper surfaces that extend downwardly from the substrate surface and are substantially vertical, and lower surfaces that bulge outwardly from the upper vertical sections and undercut the transistor structure. The aggressive undercut produces a desirable stress in the etched silicon surface. The openings are then filled with a suitable source/drain material and SSD transistors with desirable I | 10-28-2010 |
| 20100270599 | TRANSISTOR STRUCTURE WITH HIGH RELIABILITY AND METHOD FOR MANUFACTURING THE SAME - A transistor structure with high reliability includes a substrate unit, a solid ozone boundary layer, a gate oxide layer and a gate electrode. In addition, the substrate unit has a substrate body, a source electrode exposed on a top surface of the substrate body, and a drain electrode exposed on the top surface of the substrate body and separated from the source electrode by a predetermined distance. The solid ozone boundary layer is gradually grown on the top surface of the substrate body by continually mixing gaseous ozone into deionized water under 40˜95□, and the solid ozone boundary layer is formed between the source electrode and the drain electrode and formed on the substrate body. The gate oxide layer is formed on a top surface of the solid ozone boundary layer. The gate electrode is formed on a top surface of the gate oxide layer. | 10-28-2010 |
| 20100270600 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND METHOD OF DESIGNING THE SAME - A method of designing a semiconductor integrated circuit device includes: arranging standard cells constituting a MISFET; analyzing an operation timing and/or power consumption of the arranged standard cells; identifying one of the standard cells that is desired to have improved properties as a cell of interest based on the obtained analysis result; optimizing an arrangement and a shape of blank areas around the cell of interest taking into account an influence of a well proximity effect; and replacing the blank area and/or the cell of interest with a WPE-reduced or WPE-enhancing cell. | 10-28-2010 |
| 20100289068 | Thin Film Transistor Structure - A thin film transistor structure is provided. The thin film transistor structure includes a source and a drain. The corresponding opposite surfaces of the source and the drain are at least partially complementary and continuous convex-concave surfaces so that the charging ability of the thin film transistor would be increased due to an extending length of the continuous convex-concave surfaces. | 11-18-2010 |
| 20100295103 | GATE ETCH OPTIMIZATION THROUGH SILICON DOPANT PROFILE CHANGE - Improved semiconductor devices comprising metal gate electrodes are formed with reduced performance variability by reducing the initial high dopant concentration at the top portion of the silicon layer overlying the metal layer. Embodiments include reducing the dopant concentration in the upper portion of the silicon layer, by implanting a counter-dopant into the upper portion of the silicon layer, removing the high dopant concentration portion and replacing it with undoped or lightly doped silicon, and applying a gettering agent to the upper surface of the silicon layer to form a thin layer with the gettered dopant, which layer can be removed or retained. | 11-25-2010 |
| 20100295104 | SEMICONDUCTOR STRUCTURES HAVING BOTH ELEMENTAL AND COMPOUND SEMICONDUCTOR DEVICES ON A COMMON SUBSTRATE - A semiconductor structure comprising: a substrate; a seed layer supported by the substrate; an elemental semiconductor layer disposed over a first portion of the seed layer; and a compound semiconductor layer disposed on a second portion of the seed layer. The first portion of the seed layer is electrically insulated from the second portion of the seed layer. A first semiconductor device is formed in the elemental semiconductor layer. A second semiconductor device is formed in the compound semiconductor layer. The second semiconductor device includes: a first electrode in contact with a first region of the compound semiconductor layer; a second electrode in contact with a second region of the compound semiconductor layer; and a third electrode. The third electrode controls carriers passing in a third region of the compound semiconductor layer disposed between the first region and the second region. A fourth electrode is in electrical contact with the second portion of the seed layer. | 11-25-2010 |
| 20100295105 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A method for manufacturing a semiconductor device includes: an element portion formation step of forming an element portion on a base layer; a delaminating layer formation step of forming a delaminating layer in the base layer; a bonding step of bonding the base layer having the element portion to a substrate; and a separation step of separating and removing a portion of the base layer in the depth direction along the delaminating layer by heating the base layer bonded to the substrate. The method further includes, after the separation step, an ion implantation step of ion-implanting a p-type impurity element in the base layer for adjusting the impurity concentration of a p-type region of the element. | 11-25-2010 |
| 20100295106 | TRANSISTOR STRUCTURE AND DYNAMIC RANDOM ACCESS MEMORY STRUCTURE INCLUDING THE SAME - A dynamic random access memory structure is disclosed, in which, the active area is a donut-type pillar at which a novel vertical transistor is disposed and has a gate filled in the central cavity of the pillar and upper and lower sources/drains located in the upper and the lower portions of the pillar respectively. A buried bit line is formed in the substrate beneath the transistor. A word line is horizontally disposed above the gate. A capacitor is disposed above the word line as well as the gate and electrically connected to the upper source/drain through a node contact. The node contact has a reverse-trench shape with the top surface electrically connected to the capacitor and with the bottom of the sidewalls electrically connected to the upper source/drain. The word line passes through the space confined by the reverse-trench shape. | 11-25-2010 |
| 20100301401 | SEMICONDUCTOR DEVICE AND RELATED FABRICATION METHODS THAT USE COMPRESSIVE MATERIAL WITH A REPLACEMENT GATE TECHNIQUE - A semiconductor device and related method of fabricating it are provided. An exemplary fabrication process begins by forming a gate structure overlying a layer of semiconductor material, the gate structure comprising a gate insulator overlying the layer of semiconductor material and comprising a temporary gate element overlying the gate insulator. The process continues by forming a layer of compressive material overlying the gate structure, and by removing a first portion of the compressive material to expose an upper surface of the temporary gate element, while leaving a second portion of the compressive material intact and external to sidewalls of the temporary gate element. Thereafter, at least a portion of the temporary gate element is removed, while leaving the second portion of the compressive material intact, resulting in a gate recess. The process continues by at least partially filling the gate recess with a gate electrode material. | 12-02-2010 |
| 20100301402 | SEMICONDUCTOR DEVICE - Provided is a semiconductor device which is capable of preventing an increase in power consumption of an SGT, i.e., a three-dimensional semiconductor transistor, due to an increase in off-leak current. The semiconductor device comprises: a first-conductive type first silicon pillar: a first dielectric surrounding a side surface of the first silicon pillar; a gate surrounding the dielectric; a second silicon pillar provided underneath the first silicon pillar; and a third silicon pillar provided on a top of the first silicon pillar. The second silicon pillar has a second-conductive type high-concentration impurity region formed in a surface thereof except at least a part of a contact surface region with the first silicon pillar, and a first-conductive type impurity region formed therein and surrounded by the second-conductive type high-concentration impurity region. The third silicon pillar has a second-conductive type high-concentration impurity region formed in a surface thereof except at least a part of a contact surface region with the first silicon pillar, and a first-conductive type impurity region formed therein and surrounded by the second-conductive type high-concentration impurity region of the third silicon pillar. The first-conductive type impurity region of each of the second silicon pillar and the third silicon pillar has a length greater than that of a depletion layer extending from a base portion of the second-conductive type high-concentration impurity region of a respective one of the second silicon pillar and the third silicon pillar. | 12-02-2010 |
| 20100308379 | METHODS FOR FORMING A TRANSISTOR WITH A STRAINED CHANNEL - A semiconductor device and method for fabricating a semiconductor device providing reduced short channel effects is disclosed. The method comprises providing a substrate comprising a first material; forming at least one gate stack over the substrate; forming one or more recesses in the substrate, wherein the one or more recesses define at least one source region and at least one drain region; and forming a pocket, a first layer comprising a second material, and a second layer comprising a third material in the one or more recesses, the pocket being disposed between the first layer and the substrate. | 12-09-2010 |
| 20100308380 | DUAL DAMASCENE PROCESSING FOR GATE CONDUCTOR AND ACTIVE AREA TO FIRST METAL LEVEL INTERCONNECT STRUCTURES - A method of forming a semiconductor device includes forming a first interlevel dielectric (ILD) layer over one or more transistor structures formed on a substrate, the one or more transistor structures including an active area, source/drain contact and a gate conductor formed over the substrate; forming a first metal (M1) level trench in an upper portion of the first ILD layer, followed by forming vias in a lower portion of the first ILD layer, down to the source/drain contact and down to the gate conductor; and filling both the trench and vias with a conductive material, thereby resulting in a dual damascene metal process at and below the M1 level of the semiconductor device. | 12-09-2010 |
| 20100308381 | FINFET STRUCTURES WITH STRESS-INDUCING SOURCE/DRAIN-FORMING SPACERS AND METHODS FOR FABRICATING THE SAME - Methods for fabricating FinFET structures with stress-inducing source/drain-forming spacers and FinFET structures having such spacers are provided herein. In one embodiment, a method for fabricating a FinFET structure comprises fabricating a plurality of parallel fins overlying a semiconductor substrate. Each of the fins has sidewalls. A gate structure is fabricated overlying a portion of each of the fins. The gate structure has sidewalls and overlies channels within the fins. Stress-inducing sidewall spacers are formed about the sidewalls of the fins and the sidewalls of the gate structure. The stress-inducing sidewall spacers induce a stress within the channels. First conductivity-determining ions are implanted into the fins using the stress-inducing sidewall spacers and the gate structure as an implantation mask to form source and drain regions within the fins. | 12-09-2010 |
| 20100308382 | SEMICONDUCTOR STRUCTURES AND METHODS FOR REDUCING SILICON OXIDE UNDERCUTS IN A SEMICONDUCTOR SUBSTRATE - Methods are provided for fabricating semiconductor structures with an etch resistant layer that reduces undercuts in a silicon oxide layer of a semiconductor substrate. The semiconductor substrate is provided having the silicon oxide layer. The etch resistant layer is formed which uses at least a portion of the silicon oxide layer. A silicon-comprising material layer is formed overlying the etch resistant layer. The silicon-comprising material layer has an etch rate greater than an etch rate of the etch resistant layer when subjected to an etchant. The silicon-comprising material layer is etched with an etchant to form a fin structure on the silicon oxide layer. The etch resistant layer may be formed by ion implantation, diffusing nitrogen-supplying species into the silicon oxide layer, or forming an insulator material layer overlying the silicon oxide layer. | 12-09-2010 |
| 20100308383 | SEMICONDUCTOR DEVICE HAVING A POROUS INSULATION LAYER WITH A PERMEATION PREVENTION LAYER COATING THE PORES AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device having a porous insulation layer with a permeation prevention layer coating the pores for use in protecting against hydrogen permeation into source and drain areas is presented. The semiconductor device includes a conductive pattern, an insulation layer, and a permeation prevention layer. The conductive pattern is formed on a semiconductor substrate. The insulation layer is formed on a surface of the conductive pattern and includes a porous layer having a plurality of pores. The permeation prevention layer is formed on exposed surfaces of the pores in the porous layer. | 12-09-2010 |
| 20100320509 | Method for forming and integrating metal gate transistors having self-aligned contacts and related structure - According to one exemplary embodiment, a method for forming at least one metal gate transistor with a self-aligned source/drain contact includes forming a metal gate over a substrate. The method further includes forming a source/drain region in the substrate adjacent to the metal gate. The method also includes forming a conformal etch stop layer over the metal gate and the source/drain region. The method further includes forming a source/drain contact over the source/drain region, where the conformal etch stop layer imposes a pre-determined distance between the source/drain contact and the metal gate, thereby causing the source/drain contact to be self-aligned to the metal gate. | 12-23-2010 |
| 20100320510 | Interfacial Barrier for Work Function Modification of High Performance CMOS Devices - A semiconductor structure may include a semiconductor bulk region with a gate stack on the semiconductor bulk region. The source region and the drain region in the semiconductor bulk region may be located on opposing sides of a channel region below the gate stack. An interfacial layer coupled to the channel region may modify a workfunction of a metal-semiconductor contact. In a MOSFET, the metal-semiconductor contact may be between a metal contact and the source region and the drain region. In a Schottky barrier-MOSFET, the metal-semiconductor contact may be between a silicide region in the source region and/or the drain region and the channel region. The interfacial layer may use a dielectric-dipole mitigated scheme and may include a conducting layer and a dielectric layer. The dielectric layer may include lanthanum oxide or aluminum oxide used to tune the workfunction of the metal-semiconductor contact. | 12-23-2010 |
| 20100320511 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device is fabricated by forming a semiconductor substrate as a convex shape to increase a effective channel of a transistor and by stacking a first silicon germanium layer and a first silicon layer on the semiconductor substrate to form a first layer and stacking a second silicon germanium layer and a second silicon layer on the first layer to form a second layer such that the current reduced due to the increased effective channel is ensured, thereby being capable of high speed performance. | 12-23-2010 |
| 20100320512 | Semiconductor device manufacturing method and semiconductor device - Disclosed is a semiconductor device manufacturing method in which a silicon nitride film is formed to cover an n-channel transistor formed on a semiconductor substrate and to apply a tensile stress in a channel length direction to a channel of the n-channel transistor, the method includes: forming a first-layer silicon nitride film above the n-channel transistor; irradiating the first-layer silicon nitride film with ultraviolet radiation; and after the ultraviolet irradiation, forming at least one silicon nitride film thinner than the first-layer silicon nitride film above the first-layer silicon nitride film. Silicon nitride films formed to apply the tensile stress is formed by respective steps. | 12-23-2010 |
| 20100320513 | SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME - A method of manufacturing a semiconductor device ( | 12-23-2010 |
| 20100327331 | SEMICONDUCTOR DEVICE - The present invention proposes a dummy metal fill structure which makes it possible to reduce variations in transistor characteristics as much as possible even if mask misalignment occurs, as well as to ensure the intended planarizing effect of the metal CMP process. The dummy metal fill formed above the gate electrode extends in the gate length direction with both ends thereof protruding from a region corresponding to the gate electrode. Even if a mask for forming a wiring layer is misaligned and the position of the dummy metal fill is misaligned from an intended position, the shape of the dummy metal fill within a region of the gate electrode is kept symmetric with respect to the center of the gate electrode. | 12-30-2010 |
| 20110001171 | POWER CONVERTER INTEGRATED CIRCUIT FLOOR PLAN AND PACKAGE - For a DC to DC converter circuit integrated on a packaged die, the relative positions of various die pads and power MOSFETs on the die for a small outline integrated circuit package are described. | 01-06-2011 |
| 20110001172 | THREE-DIMENSIONAL INTEGRATED CIRCUIT STRUCTURE - A semiconductor structure includes an interconnect region and a semiconductor stack bonded to the interconnect region through a bonding region. The stack includes two semiconductor layers having different electrical properties. The stack also includes single crystalline semiconductor material. The stack can be processed to form a mesa structure and the mesa structure can be processed to from a vertically oriented semiconductor device. | 01-06-2011 |
| 20110006349 | FIELD EFFECT TRANSISTOR HAVING CHANNEL SILICON GERMANIUM - Field effect transistors and methods of making field effect transistors are provided. The field effect transistor can contain a semiconductor substrate containing shallow trench isolations; a silicon germanium layer in a trench at an upper surface of the semiconductor substrate between the shallow trench isolations; a gate feature on the silicon germanium layer; and metal silicides on the upper potions of silicon germanium layer and semiconductor substrate that are not covered by the gate feature. The silicon germanium layer has a bottom surface and a top surface having a (100) plane and side surfaces having two or more planes. | 01-13-2011 |
| 20110012177 | Nanostructure For Changing Electric Mobility - A structure and a method for a semiconductor including a nanostructure semiconductor channel. The semiconductor may include a dielectric and an electrode, the electrode attached to the dielectric, a semiconductor channel may be disposed proximate to the dielectric, wherein the semiconductor channel has an electric mobility and is configured to have at least one dimension, and wherein the dielectric may be configured to apply a force at the at least one dimension. | 01-20-2011 |
| 20110012178 | SEMICONDUCTOR WAFER, METHOD OF MANUFACTURING A SEMICONDUCTOR WAFER, AND SEMICONDUCTOR DEVICE - Provided is a semiconductor wafer having decreased interface state density at the semiconductor-insulator interface, a method of manufacturing this semiconductor wafer, and a semiconductor device. | 01-20-2011 |
| 20110018040 | METHODS OF FABRICATING TRANSISTORS INCLUDING SELF-ALIGNED GATE ELECTRODES AND SOURCE/DRAIN REGIONS - Methods of forming Group III-nitride transistor device include forming a protective layer on a Group III-nitride semiconductor layer, forming a via hole through the protective layer to expose a portion of the Group III-nitride semiconductor layer, and forming a masking gate on the protective layer. The masking gate includes an upper portion having a width that is larger than a width of the via hole and having a lower portion extending into the via hole. The methods further include implanting source/drain regions in the Group III-nitride semiconductor layer using the masking gate as an implant mask. | 01-27-2011 |
| 20110024803 | SEMICONDUCTOR DEVICE WITH INTEGRATED CHANNEL STOP AND BODY CONTACT - A channel stop is provided for a semiconductor device that includes at least one active region. The channel stop is configured to surround the semiconductor device, to abut the at least one active region at a periphery of the semiconductor device, and to share an electrical connection with the at least one active region. | 02-03-2011 |
| 20110024804 | METHOD FOR FORMING HIGH GERMANIUM CONCENTRATION SIGE STRESSOR - A method for producing a SiGe stressor with high Ge concentration is provided. The method includes providing a semiconductor substrate with a source area, a drain area, and a channel in between; depositing the first SiGe film layer on the source area and/or the drain area; performing a low temperature thermal oxidation, e.g., a high water vapor pressure wet oxidation, to form an oxide layer at the top of the first SiGe layer and to form the second SiGe film layer with high Ge percentage at the bottom of the first SiGe film layer without Ge diffusion into the semiconductor substrate; performing a thermal diffusion to form the SiGe stressor from the second SiGe film layer, wherein the SiGe stressor provides uniaxial compressive strain on the channel; and removing the oxide layer. A Si cap layer can be deposited on the first SiGe film layer prior to performing oxidation. | 02-03-2011 |
| 20110024805 | USING HIGH-K DIELECTRICS AS HIGHLY SELECTIVE ETCH STOP MATERIALS IN SEMICONDUCTOR DEVICES - A spacer structure in sophisticated semiconductor devices is formed on the basis of a high-k dielectric material, which provides superior etch resistivity compared to conventionally used silicon dioxide liners. Consequently, a reduced thickness of the etch stop material may nevertheless provide superior etch resistivity, thereby reducing negative effects, such as dopant loss in the drain and source extension regions, creating a pronounced surface topography and the like, as are typically associated with conventional spacer material systems. | 02-03-2011 |
| 20110024806 | SEMICONDUCTOR DEVICES WITH ENCLOSED VOID CAVITIES - Field effect devices and ICs with very low gate-drain capacitance Cgd are provided by forming a substantially empty void between the gate and the drain regions. For vertical FETS a cavity is etched in the semiconductor (SC) and provided with a gate dielectric liner. A poly-SC gate deposited in the cavity has a central fissure (empty pipe) extending through to the underlying SC. This fissure is used to etch the void in the SC beneath the poly-gate. The fissure is then closed by a dielectric plug formed by deposition or oxidation without significantly filling the etched void. Conventional process steps are used to provide the source and body regions around the cavity containing the gate, and to provide a drift space and drain region below the body region. The etched void between the gate and drain provides lower Cgd and Ron*Qg than can be achieved using low k dielectrics. | 02-03-2011 |
| 20110031538 | CMOS STRUCTURE WITH MULTIPLE SPACERS - A semiconductor device includes a substrate having shallow trench isolation and source/drain regions located therein, a gate stack located on the substrate between the source/drain regions, a first gate spacer on the sidewall of the gate stack, and a second gate spacer on the sidewall of the first gate spacer. | 02-10-2011 |
| 20110031539 | SEMICONDUCTOR DEVICES HAVING LINE TYPE ACTIVE REGIONS AND METHODS OF FABRICATING THE SAME - In a semiconductor device having line type active regions and a method of fabricating the semiconductor device, the semiconductor device includes a device isolation layer which defines the line type active regions in a in a semiconductor substrate. Gate electrodes which are parallel to each other and intersect the line type active regions are disposed over the semiconductor substrate. Here, the gate electrodes include both a device gate electrode and a recessed device isolation gate electrode. Alternatively, each of the gate electrodes is constituted of a device gate electrode and a plan type device isolation gate electrode, and a width of the plan type device isolation gate electrode greater than a width of the device gate electrode. | 02-10-2011 |
| 20110031540 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a field effect transistor and a strain generating layer to apply a stress to a channel region of the field effect transistor. The strain generating layer contains at least one of oxygen and nitrogen of 1.0×10 | 02-10-2011 |
| 20110031541 | Two-Step STI Formation Process - A method of forming an integrated circuit structure includes providing a semiconductor substrate; forming a first isolation region in the semiconductor substrate; after the step of forming the first isolation region, forming a metal-oxide-semiconductor (MOS) device at a surface of the semiconductor substrate, wherein the step of forming the MOS device comprises forming a source/drain region; and after the step of forming the MOS device, forming a second isolation region in the semiconductor substrate. | 02-10-2011 |
| 20110037105 | SELF-ALIGNED SELECTIVE METAL CONTACT TO SOURCE/DRAIN DIFFUSION REGION - A transistor structure includes a semiconductor substrate with a first surface, a diffusion region at the first surface of the substrate, a sacrificial gate formed on the diffusion region, and insulating side walls formed adjacent to the sacrificial gate. A metal gate is formed by etching out the sacrificial gate and filling in the space between the insulating side walls with gate metals. Silicided source and drain contacts are formed over the diffusion region between the side walls of two adjacent aluminum gates. One or more oxide layers are formed over the substrate. Vias are formed in the oxide layers by plasma etching to expose the silicided source and drain contacts, which simultaneously oxidizes the aluminum gate metal. A first metal is selectively formed over the silicided contact by electroless deposition, but does not deposit on the oxidized aluminum gate. | 02-17-2011 |
| 20110037106 | SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME - A semiconductor device improves a Schottky-barrier field-effect transistor. In a semiconductor device including a gate electrode formed with interposition of a gate insulating film on a channel formed on a semiconductor substrate, and a Schottky source/drain formed within a top surface of the substrate to be positioned on both sides of the gate insulating film so that end portions of the Schottky source and the Schottky drain do not cover a lower end portion of the gate insulating film and so as to form Schottky junctions with the semiconductor substrate, a Schottky barrier height at an interface between the end portion of the Schottky source and the semiconductor substrate and a Schottky barrier height at an interface between the end portion of the Schottky drain and the semiconductor substrate are different from Schottky barrier heights at interfaces between portions except the end portions of the Schottky source/drain and the substrate. | 02-17-2011 |
| 20110042728 | SEMICONDUCTOR DEVICE WITH ENHANCED STRESS BY GATES STRESS LINER - In one embodiment, a method is provided for forming stress in a semiconductor device. The semiconductor device may include a gate structure on a substrate, wherein the gate structure includes at least one dummy material that is present on a gate conductor. A conformal dielectric layer is formed atop the semiconductor device, and an interlevel dielectric layer is formed on the conformal dielectric layer. The interlevel dielectric layer may be planarized to expose at least a portion of the conformal dielectric layer that is atop the gate structure, in which the exposed portion of the conformal dielectric layer may be removed to expose an upper surface of the gate structure. The upper surface of the gate structure may be removed to expose the gate conductor. A stress inducing material may then be formed atop the at least one gate conductor. | 02-24-2011 |
| 20110042729 | METHOD FOR IMPROVING SELECTIVITY OF EPI PROCESS - The present disclosure provides a method of fabricating a semiconductor device that includes providing a semiconductor substrate, forming a gate structure over the substrate, forming a material layer over the substrate and the gate structure, implanting Ge, C, P, F, or B in the material layer, removing portions of the material layer overlying the substrate at either side of the gate structure, forming recesses in the substrate at either side of the gate structure, and depositing a semiconductor material in the recesses by an expitaxy process. | 02-24-2011 |
| 20110042730 | Semiconductor device manufacturing method and semiconductor device - A formation method of an element isolation film according to which a high-voltage transistor with an excellent characteristic can be formed is provided. On a substrate, a gate oxide film is previously formed. A CMP stopper film is formed thereon, and thereafter, a gate oxide film and a CMP stopper film are etched. The semiconductor substrate is etched to form a trench. Further, before the trench is filled with a field insulating film, an liner insulating film is formed at a trench interior wall, and a concave portion at the side surface of the gate oxide film under the CMP stopper film is filled with the liner insulating film. In this manner, formation of void in the element isolation film laterally positioned with respect to the gate oxide film can be prevented. | 02-24-2011 |
| 20110049582 | ASYMMETRIC SOURCE AND DRAIN STRESSOR REGIONS - A method forms a structure has a substrate having at least one semiconductor channel region, a gate dielectric on the upper surface of the substrate over the semiconductor channel region, and a gate conductor on the gate dielectric. Asymmetric sidewall spacers are located on the sidewalls of the gate conductor and asymmetric source and drain regions are located within the substrate adjacent the semiconductor channel region. One source/drain region is positioned closer to the midpoint of the gate conductor than is the other source/drain region. The source and drain regions comprise a material that induces physical stress upon the semiconductor channel region. | 03-03-2011 |
| 20110049583 | Recessed contact for multi-gate FET optimizing series resistance - A transistor, which can be referred to as a multi-gate transistor or as a FinFET, includes a gate structure having a length, a width and a height. The transistor further includes at least one electrically conductive channel or fin between a source region and a drain region that passes through the width of the gate structure. The channel has a first height (h | 03-03-2011 |
| 20110049584 | SEMICONDUCTOR DEVICE - According to one embodiment, a semiconductor device, may include a semiconductor substrate including a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type different from the first conductivity type, the first semiconductor having a resistance value in a range from 100 Ω·cm to 10000 Ω·cm, the second semiconductor layer having a resistance value in a range from 100 Ω·cm to 10000 Ω·cm, the second semiconductor layer provided on the first semiconductor layer, a first region being formed in the second semiconductor layer and including a first conductivity type of well region and a second conductivity type of well region, a first insulating layer formed on the second semiconductor layer; and a wiring layer located in a second region different from the first region and constituting a passive device insulated by the first insulating layer, wherein no well region is formed in the second semiconductor layer located in the second region. | 03-03-2011 |
| 20110049585 | MAINTAINING INTEGRITY OF A HIGH-K GATE STACK BY PASSIVATION USING AN OXYGEN PLASMA - In semiconductor devices, integrity of a titanium nitride material may be increased by exposing the material to an oxygen plasma after forming a thin silicon nitride-based material. The oxygen plasma may result in an additional passivation of any minute surface portions which may not be appropriately covered by the silicon nitride-based material. Consequently, efficient cleaning recipes, such as cleaning processes based on SPM, may be performed after the additional passivation without undue material loss of the titanium nitride material. In this manner, sophisticated high-k metal gate stacks may be formed with a very thin protective liner material on the basis of efficient cleaning processes without unduly contributing to a pronounced yield loss in an early manufacturing stage. | 03-03-2011 |
| 20110049586 | Device to Detect and Measure Static Electric Charge | 03-03-2011 |
| 20110049587 | Method of forming a germanium silicide layer, semiconductor device including the germanium silicide layer, and method of manufacturing the semiconductor device - Example embodiments relate to a method of forming a germanium (Ge) silicide layer, a semiconductor device including the Ge silicide layer, and a method of manufacturing the semiconductor device. A method of forming a Ge silicide layer according to example embodiments may include forming a metal layer including vanadium (V) on a silicon germanium (SiGe) layer. The metal layer may have a multiple-layer structure and may further include at least one of platinum (Pt) and nickel (Ni). The metal layer may be annealed to form the germanium silicide layer. The annealing may be performed using a laser spike annealing (LSA) method. | 03-03-2011 |
| 20110057237 | SEMICONDUCTOR DEVICES AND METHODS OF FORMING THEREOF - Provided is a semiconductor device. The semiconductor device includes: a substrate; an active layer on the substrate; a capping layer on the active layer; source/drain electrodes on the capping layer; a gate electrode on the active layer; and a first void region on a first sidewall of the gate electrode and a second void region on a second sidewall facing the first sidewall. | 03-10-2011 |
| 20110062501 | METHOD FOR SELF-ALIGNING A STOP LAYER TO A REPLACEMENT GATE FOR SELF-ALIGNED CONTACT INTEGRATION - Semiconductor devices with replacement gate electrodes and integrated self aligned contacts are formed with enhanced gate dielectric layers and improved electrical isolation properties between the gate line and a contact. Embodiments include forming a removable gate electrode on a substrate, forming a self aligned contact stop layer over the removable gate electrode and the substrate, removing a portion of the self aligned contact stop layer over the removable gate electrode and the electrode itself leaving an opening, forming a replacement gate electrode of metal, in the opening, transforming an upper portion of the metal into a dielectric layer, and forming a self aligned contact. Embodiments include forming the contact stop layer of a dielectric material, e.g., a hafnium oxide, an aluminum oxide, or a silicon carbide and transforming the upper portion of the metal into a dielectric layer by oxidation, fluorination, or nitridation. Embodiments also include forming a hardmask layer over the removable gate electrode to protect the electrode during silicidation in source/drain regions of the semiconductor device. | 03-17-2011 |
| 20110062502 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present invention proposes a method of forming a dual contact hole, comprising steps of: forming a source/drain region and a replacement gate structure on a semiconductor substrate, the replacement gate structure including a replacement gate; depositing a first inter-layer dielectric layer; planarizing the first inter-layer dielectric layer to expose the replacement gate in the replacement gate structure; removing the replacement gate and depositing to form a metal gate; etching to form a first source/drain contact opening in the first inter-layer dielectric layer; sequentially depositing a liner and filling conductive metal in the first source/drain contact opening to form a first source/drain contact hole; depositing a second inter-layer dielectric layer on the first inter-layer dielectric layer; etching to form a second source/drain contact opening and a gate contact opening in the second inter-layer dielectric layer; and sequentially depositing a liner and filling conductive metal in the second source/drain contact opening and the gate contact opening to form a second source/drain contact hole and a gate contact hole. The present invention also proposes a semiconductor device manufactured by the above process. | 03-17-2011 |
| 20110068378 | SEMICONDUCTOR DEVICES AND METHODS OF FORMING SEMICONDUCTOR DEVICES HAVING DIFFUSION REGIONS OF REDUCED WIDTH - Semiconductor devices and methods for forming semiconductor devices are provided, including semiconductor devices that comprise one or more diffusion region in a semiconductor, the one or more diffusion regions being adjacent to a gate formed adjacent to a surface of the semiconductor (e.g., a semiconductor substrate). The one or more diffusion regions comprise a first width at a depth below the surface of the semiconductor and a second width near the surface of the semiconductor, the second width of at the one or more diffusion regions being less than about 40% greater than the first width. | 03-24-2011 |
| 20110068379 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A gate pattern is formed on a semiconductor substrate. An interlayer insulating layer is formed on the semiconductor substrate and then etched by using a SEG mask to form a SEG contact formation region. An exposed portion of the semiconductor substrate in the SEG contact formation region is uniformly grown and a source/drain region is formed in a grown portion of the semiconductor substrate through an ion implantation process. | 03-24-2011 |
| 20110068380 | SEMICONDUCTOR DEVICE WITH BULB-TYPE RECESSED CHANNEL AND METHOD FOR FABRICATING THE SAME - A method for fabricating a semiconductor device includes providing a substrate having a bulb-type recessed region, forming a gate insulating layer over the bulb-type recessed region and the substrate, and forming a gate conductive layer over the gate insulating layer. The gate conductive layer fills the bulb-type recessed region. The gate conductive layer includes two or more conductive layers and a discontinuous interface between the conductive layers. | 03-24-2011 |
| 20110073919 | METHOD OF FABRICATING FINFET DEVICE - The present disclosure provides a FinFET device and method of fabricating a FinFET device. The method includes providing a substrate, forming a fin structure on the substrate, forming a gate structure including a gate dielectric and gate electrode, the gate structure overlying a portion of the fin structure, forming a protection layer over another portion of the fin structure, and thereafter performing an implantation process to form source and drain regions. | 03-31-2011 |
| 20110073920 | SUPERIOR FILL CONDITIONS IN A REPLACEMENT GATE APPROACH BY CORNER ROUNDING BASED ON A SACRIFICIAL FILL MATERIAL - In a replacement gate approach, a top area of a gate opening may receive a superior cross-sectional shape on the basis of a material erosion process, wherein a sacrificial material may protect sensitive materials, such as a high-k dielectric material, in the gate opening. In one illustrative embodiment, the sacrificial material may be applied after depositing a work function adjusting species in the gate opening. | 03-31-2011 |
| 20110073921 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - The bonding time of a metallic ribbon is shortened in the semiconductor device which connects a lead frame with the bonding pad of a semiconductor chip with a metallic ribbon. The bottom of the wedge tool is divided into two by the V-groove at the first branch and the second branch. In order to do bonding of the Al ribbon to the source pad of the silicon chip, and the source post of the lead frame, first, the first branch and second branch of the wedge tool are contacted by pressure to Al ribbon on the source pad, and supersonic vibration is applied to it. Subsequently, the first branch is contacted by pressure to Al ribbon on the source post, and supersonic vibration is applied to it. Here, since the width of the first branch is narrower than the width of the source post, Al ribbon is not joined at the end surface of the width direction of the source post. | 03-31-2011 |
| 20110073922 | CONTACT FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE - A semiconductor device manufacturing method includes the steps of ion-implanting a p-type or an n-type impurity into a Si layer portion to become a p-type or an n-type contact region of a semiconductor device, forming a metal film for a contact on a surface of the contact region without performing heat treatment for activating implanted ions after the ion-implanting step, and forming a silicide of a metal of the metal film by causing the metal to react with the Si layer portion by heating. It is desired to simultaneously perform the step of forming the silicide and the step of activating the implanted ions by heat treatment after the metal film is formed. | 03-31-2011 |
| 20110079826 | SEMICONDUCTOR DEVICE, METHOD FOR FABRICATING THE SAME AND APPARATUS FOR FABRICATING THE SAME - A method for fabricating a semiconductor device includes forming a gate electrode on a surface of a substrate via a gate insulating film, forming an insulating film on a side surface of the gate electrode, and exposing an oxygen plasma onto the surface of the substrate. An electron temperature of the oxygen plasma in a vicinity of the surface of the substrate is equal to or less than about 1.5 eV. | 04-07-2011 |
| 20110079827 | STRUCTURE AND METHOD TO CREATE A DAMASCENE LOCAL INTERCONNECT DURING METAL GATE DEPOSITION - A method and structure to create damascene local interconnect during metal gate deposition. A method includes: forming a gate dielectric on an upper surface of a substrate; forming a mandrel on the gate dielectric; forming an interlevel dielectric (ILD) layer on a same level as the mandrel; forming a trench in the ILD layer; removing the mandrel; and forming a metal layer on the gate dielectric and in the trench. | 04-07-2011 |
| 20110079828 | METAL GATE FET HAVING REDUCED THRESHOLD VOLTAGE ROLL-OFF - A structure and method to create a metal gate having reduced threshold voltage roll-off. A method includes: forming a gate dielectric material on a substrate; forming a gate electrode material on the gate dielectric material; and altering a first portion of the gate electrode material. The altering causes the first portion of the gate electrode material to have a first work function that is different than a second work function associated with a second portion of the gate electrode material. | 04-07-2011 |
| 20110079829 | FINFETS AND METHODS FOR FORMING THE SAME - A Fin field effect transistor (FinFET) includes a fin-channel body over a substrate. A gate electrode is disposed over the fin-channel body. At least one source/drain (S/D) region is disposed adjacent to the fin-channel body. The at least one S/D region is substantially free from including any fin structure. | 04-07-2011 |
| 20110079830 | METAL GATE STRUCTURE AND METHOD OF MANUFACTURING SAME - A method of manufacturing a metal gate structure includes providing a substrate ( | 04-07-2011 |
| 20110079831 | Metal Oxide Semiconductor Field Effect Transistors (MOSFETS) Including Recessed Channel Regions - Unit cells of metal oxide semiconductor (MOS) transistors are provided having an integrated circuit substrate and a MOS transistor on the integrated circuit substrate. The MOS transistor includes a source region, a drain region and a gate. The gate is between the source region and the drain region. A channel region is provided between the source and drain regions. The channel region has a recessed region that is lower than bottom surfaces of the source and drain regions. Related methods of fabricating transistors are also provided. | 04-07-2011 |
| 20110084319 | Method of fabricating a silicon tunneling field effect transistor (TFET) with high drive current - A method (and semiconductor device) of fabricating a TFET device provides a source region having at least a portion thereof positioned underneath a gate dielectric. In one embodiment, the TFET includes an N+ drain region and a P+ source region in a silicon substrate, where the N+ drain region is silicon and the P+ source region is silicon germanium (SiGe). The source region includes a first region of a first type (e.g., P+ SiGe) and a second region of a second type (undoped SiGe), where at least a portion of the source region is positioned below the gate dielectric. This structure decreases the tunneling barrier width and increases drive current (Id). | 04-14-2011 |
| 20110084320 | SEMICONDUCTOR DEVICE INCLUDING METAL SILICIDE LAYER AND METHOD FOR MANUFACTURING THE SAME - A device formed from a method of fabricating a fine metal silicide layer having a uniform thickness regardless of substrate doping. A planar vacancy is created by the separation of an amorphousized surface layer of a silicon substrate from an insulating layer, a metal source enters the vacancy through a contact hole through the insulating later connecting with the vacancy, and a heat treatment converts the metal in the vacancy into metal silicide. The separation is induced by converting the amorphous silicon into crystalline silicon. | 04-14-2011 |
| 20110084321 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - It is an object of the present invention to provide a semiconductor device where, even in a case of stacking a plurality of semiconductor elements provided over a substrate, the stacked semiconductor elements can be electrically connected through the substrate, and a manufacturing method thereof. According to one feature of the present invention, a method for manufacturing a semiconductor device includes the steps of selectively forming a depression in an upper surface of a substrate or forming an opening which penetrates the upper surface through a back surface; forming an element group having a transistor so as to cover the upper surface of the substrate and the depression, or the opening; and exposing the element group formed in the depression or the opening by thinning the substrate from the back surface. A means for thinning the substrate can be performed by partially removing the substrate by performing grinding treatment, polishing treatment, etching by chemical treatment, or the like from the back surface of the substrate. | 04-14-2011 |
| 20110089474 | SEMICONDUCTOR DEVICE INCLUDING MISFET AND ITS MANUFACTURE METHOD - An active region made of Si or SiGe is formed in a surface part of a substrate. A gate electrode is disposed over the active region. A gate insulating film is disposed between the gate electrode and the substrate. A source and a drain are formed in the surface part of the substrate on sides of the gate electrode. A surface of the active region under the gate electrode includes a slope surface being upward from a border of the active region toward an inner side of the active region. The slope surface has a crystal plane equivalent to ( | 04-21-2011 |
| 20110095339 | Semiconductor device and method for manufacturing the same - A semiconductor device has at least two main carbon-rich regions and two additional carbon-rich regions. The main carbon-rich regions are separately located in a substrate so that a channel region is located between them. The additional carbon-rich regions are respectively located underneath the main carbon-rich regions. The carbon concentrations is higher in the main carbon-rich regions and lower in the additional carbon-rich regions, and optionally, the absolute value of a gradient of the carbon concentration of the bottom portion of the main carbon-rich regions is higher than the absolute value of a gradient of the carbon concentration of the additional carbon-rich regions. Therefore, the leakage current induced by a lattice mismatch effect at the carbon-rich and the carbon-free interface can be minimized. | 04-28-2011 |
| 20110095340 | Soft error reduction circuit and method - In some embodiments, complementary charge-collecting diffusions (transistor diffusions, e.g., drain or source areas) are disposed close to each other. In some embodiments, dummy (“off”) transistors are incorporated to bring complementary diffusions (diffusions of the same charge type and having complementary digital logic levels) closer to each other than otherwise might be possible and thus, to enhance common-mode charge collection for the complementary diffusion areas. | 04-28-2011 |
| 20110095341 | METHODS FOR PROTECTING GATE STACKS DURING FABRICATION OF SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEVICES FABRICATED FROM SUCH METHODS - Methods for protecting gate stacks during fabrication of semiconductor devices and semiconductor devices fabricated from such methods are provided. Methods for fabricating a semiconductor device include providing a semiconductor substrate having an active region and a shallow trench isolation (STI) region. Epitaxial layer is formed on the active region to define a lateral overhang portion in a divot at the active region/STI region interface. A gate stack is formed having a first gate stack-forming layer overlying the semiconductor substrate. First gate stack-forming layer includes a non-conformal layer of metal gate-forming material which is directionally deposited to form a thinned break portion just below the lateral overhang portion. After the step of forming the gate stack, a first portion of the non-conformal layer is in the gate stack and a second portion is exposed. The thinned break portion at least partially isolates the first and second portions during subsequent etch chemistries. | 04-28-2011 |
| 20110095342 | Printed Material Constrained By Well Structures And Devices Including Same - A first patterned contact layer, for example a gate electrode, is formed over an insulative substrate. Insulating and functional layers are formed at least over the first patterned contact layer. A second patterned contact layer, for example source/drain electrodes, is formed over the functional layer. Insulative material is then selectively deposited over at least a portion of the second patterned contact layer to form first and second wall structures such that at least a portion of the second patterned contact layer is exposed, the first and second wall structures defining a well therebetween. Electrically conductive or semiconductive material is deposited within the well, for example by jet-printing, such that the first and second wall structures confine the conductive or semiconductive material and prevent spreading and electrical shorting to adjacent devices. The conductive or semiconductive material is in electrical contact with the exposed portion of the second patterned contact layer to form, e.g., an operative transistor. | 04-28-2011 |
| 20110095343 | BI-LAYER nFET EMBEDDED STRESSOR ELEMENT AND INTEGRATION TO ENHANCE DRIVE CURRENT - A semiconductor structure including a bi-layer nFET embedded stressor element is disclosed. The bi-layer nFET embedded stressor element can be integrated into any CMOS process flow. The bi-layer nFET embedded stressor element includes an implant damaged free first layer of a first epitaxy semiconductor material having a lattice constant that is different from a lattice constant of a semiconductor substrate and imparts a tensile strain in a device channel of an nFET gate stack. Typically, and when the semiconductor is composed of silicon, the first layer of the bi-layer nFET embedded stressor element is composed of Si:C. The bi-layer nFET embedded stressor element further includes a second layer of a second epitaxy semiconductor material that has a lower resistance to dopant diffusion than the first epitaxy semiconductor material. Typically, and when the semiconductor is composed of silicon, the second layer of the bi-layer nFET embedded stressor element is composed of silicon. Only the second layer of the bi-layer nFET embedded stressor element includes the implanted source/drain regions. | 04-28-2011 |
| 20110095344 | Method of Improving Minority Lifetime in Silicon Channel and Products Thereof - Performance of field effect transistors and other channel dependent devices formed on a monocrystalline substrate is improved by carrying out a high temperature anneal in a nitrogen releasing atmosphere while the substrate is coated by a sacrificial oxide coating containing easily diffusible atoms that can form negatively charged ions and can diffuse deep into the substrate. In one embodiment, the easily diffusible atoms comprise at least 5% by atomic concentration of chlorine atoms in the sacrificial oxide coating and the nitrogen releasing atmosphere includes NO. The high temperature anneal is carried out for less than 10 hours at a temperature less than 1100° C. | 04-28-2011 |
| 20110095345 | Methods of Fabricating Field Effect Transistors Having Protruded Active Regions - Provided are a field effect transistor, a method of manufacturing the same, and an electronic device including the field effect transistor. The field effect transistor may have a structure in which a double gate field effect transistor and a recess channel array transistor are formed in a single transistor in order to improve a short channel effect which occurs as field effect transistors become more highly integrated, a method of manufacturing the same, and an electronic device including the field effect transistor. The field effect transistor can exhibit stable device characteristics even when more highly integrated in such a manner that both the length and width of a channel increase and particularly the channel can be significantly long, and can be manufactured simply. | 04-28-2011 |
| 20110095346 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING SAME - There are disclosed TFTs that have excellent characteristics and can be fabricated with a high yield. The TFTs are fabricated, using an active layer crystallized by making use of nickel. Gate electrodes are comprising tantalum. Phosphorus is introduced into source/drain regions. Then, a heat treatment is performed to getter nickel element in the active layer and to drive it into the source/drain regions. At the same time, the source/drain regions can be annealed out. The gate electrodes of tantalum can withstand this heat treatment. | 04-28-2011 |
| 20110095347 | VERTICAL DIODE USING SILICON FORMED BY SELECTIVE EPITAXIAL GROWTH - Some embodiments relate to an apparatus that exhibits vertical diode activity to occur between a semiconductive body and an epitaxial film that is disposed over a doping region of the semiconductive body. Some embodiments include an apparatus that causes both vertical and lateral diode activity. Some embodiments include a gated vertical diode for a finned semiconductor apparatus. Process embodiments include the formation of vertical-diode apparatus. | 04-28-2011 |
| 20110101425 | SEMICONDUCTOR DEVICE WITH INCREASED SNAPBACK VOLTAGE - Methods and apparatus are provided for fabricating a semiconductor device structure. The semiconductor device structure comprises a buried region having a first conductivity type, a first region having a second conductivity type overlying the buried region, a source region having the first conductivity type overlying the first region, and a drain region having the first conductivity type overlying the first region. The semiconductor device structure further comprises a second region having the first conductivity type overlying the buried region, the second region abutting the buried region to form an electrical contact with the buried region, and a first resistance configured electrically in series with the second region and the buried region. The combined series resistance of the first resistance and the second region is greater than a resistance of the buried region. | 05-05-2011 |
| 20110101426 | SEMICONDUCTOR DEVICE COMPRISING REPLACEMENT GATE ELECTRODE STRUCTURES WITH AN ENHANCED DIFFUSION BARRIER - In sophisticated semiconductor devices, the integrity of the device level may be enhanced after applying a replacement gate approach by providing an additional diffusion barrier layer, such as a silicon nitride layer, thereby obtaining a similar degree of diffusion blocking capabilities as in semiconductor devices without performing a replacement gate approach. | 05-05-2011 |
| 20110101427 | TRANSISTOR INCLUDING A HIGH-K METAL GATE ELECTRODE STRUCTURE FORMED PRIOR TO DRAIN/SOURCE REGIONS ON THE BASIS OF A SUPERIOR IMPLANTATION MASKING EFFECT - When forming a sophisticated high-k metal gate stack in an early manufacturing stage, the dielectric cap layer may be efficiently removed without unduly affecting the drain and source extension regions. To this end, a specifically designed sidewall spacer structure may be used, such as a silicon dioxide spacer element in combination with a silicon nitride etch stop liner. The spacer structure may thus enable the removal of the dielectric cap layer while still maintaining the functions of an implantation mask and a silicidation mask during the further processing. | 05-05-2011 |
| 20110101428 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - According to an aspect of an embodiment, a semiconductor device has a semiconductor substrate, a gate insulating film on the semiconductor substrate, a gate electrode formed on the gate insulating film, an impurity diffusion region formed in an area of the semiconductor substrate adjacent to the gate electrode to a first depth to the semiconductor substrate, the impurity diffusion region containing impurity, an inert substance containing region formed in the area of the semiconductor substrate to a second depth deeper than the first depth, the inert substance containing region containing an inert substance, and a diffusion suppressing region formed in the area of the semiconductor substrate to a third depth deeper than the second depth, the diffusion suppressing region containing a diffusion suppressing substance suppressing diffusion of the impurity. | 05-05-2011 |
| 20110101429 | SEMICONDUCTOR DEVICE STRUCTURES WITH DUAL FIN STRUCTURES AND ELECTRONIC DEVICE - Fin-FET devices and methods of fabrication are disclosed. The Fin-FET devices include dual fins that may be used to provide a trench region between a source region and a drain region. In some embodiments, the dual fins may be formed by forming a trench with fin structures on opposite sides in a protruding region of a substrate. The dual fins may be useful in forming single-gate, double-gate or triple-gate fin-PET devices. Electronic systems including such fin-FET devices are also disclosed. | 05-05-2011 |
| 20110108894 | METHOD OF FORMING STRAINED STRUCTURES IN SEMICONDUCTOR DEVICES - The present disclosure provides a method of fabricating that includes providing a semiconductor substrate; forming a gate structure on the substrate; performing an implantation process to form a doped region in the substrate; forming spacers on sidewalls of the gate structure; performing an first etching to form a recess in the substrate, where the first etching removes a portion of the doped region; performing a second etching to expand the recess in the substrate, where the second etching includes an etchant and a catalyst that enhances an etching rate at a remaining portion of the doped region; and filling the recess with a semiconductor material. | 05-12-2011 |
| 20110108895 | METHOD OF FORMING ASYMMETRIC SPACERS AND METHODS OF FABRICATING SEMICONDUCTOR DEVICE USING ASYMMETRIC SPACERS - A method of fabricating asymmetrical spacers, structures fabricated using asymmetrical spacers and an apparatus for fabricating asymmetrical spacers. The method includes: forming on a substrate, a structure having a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to the sidewalls; forming a conformal layer on the top surface of the substrate, the top surface of the structure and the sidewalls of the structure; tilting the substrate about a longitudinal axis relative to a flux of reactive ions, the flux of reactive ions striking the conformal layer at acute angle; and exposing the conformal layer to the flux of reactive ions until the conformal layer is removed from the top surface of the structure and the top surface of the substrate leaving a first spacer on the first sidewall and a second spacer on the second sidewall, the first spacer thinner than the second spacer. | 05-12-2011 |
| 20110108896 | WAFER LEVEL CHIP SCALE PACKAGE AND PROCESS OF MANUFACTURE - Power wafer level chip scale package (CSP) and process of manufacture are enclosed. The power wafer level chip scale package includes all source, gate and drain electrodes located on one side of the device, which is convenient for mounting to a printed circuit board (PCB) with solder paste. | 05-12-2011 |
| 20110115000 | Semiconductor Device having Strain Material - A semiconductor device having strain material is disclosed. In a particular embodiment, the semiconductor device includes a first cell including a first gate between a first drain and a first source. The semiconductor device also includes a second cell adjacent to the first cell. The second cell includes a second gate between a second drain and a second source. The semiconductor device further includes a shallow trench isolation area between the first source and the second source. A first amount of strain material over the first source and over the second source is greater than a second amount of strain material over the first drain and over the second drain. | 05-19-2011 |
| 20110115001 | ELECTRONIC CONTROL DEVICE - An electronic control device controls a control object. An electronic component configured to control the control object is mounted on an electronic substrate. An electrical signal line is formed on the electronic substrate. The electrical signal line transmits an electrical signal. A metal is press-fitted into the electronic substrate and passes through the electronic substrate to be exposed to both surfaces of the electronic substrate. An electronic element has a contact surface portion which comes into contact with a surface of the electronic substrate when the electronic element is mounted on the electronic substrate. The electronic element is connected to the electrical signal line. The electronic element is mounted on the electronic substrate such that the contact surface portion comes into contact with the metal exposed to the both surfaces of the electronic substrate and the electrical signal line connected to the contact surface portion does not come into contact with the metal. | 05-19-2011 |
| 20110121370 | EMBEDDED STRESSOR FOR SEMICONDUCTOR STRUCTURES - A method of fabricating an embedded stressor within a semiconductor structure and a semiconductor structure including the embedded stressor includes forming forming a dummy gate stack over a substrate of stressor material, anistropically etching sidewall portions of the substrate subjacent to the dummy gate stack to form the embedded stressor having angled sidewall portions, forming conductive material onto the angled sidewall portions of the embedded stressor, removing the dummy gate stack, planarizing the conductive material, and forming a gate stack on the conductive material. | 05-26-2011 |
| 20110127588 | ENHANCING MOSFET PERFORMANCE BY OPTIMIZING STRESS PROPERTIES - A device and method for improving performance of a transistor includes gate structures formed on a substrate having a spacing therebetween. The gate structures are formed in an operative relationship with active areas fainted in the substrate. A stress liner is formed on the gate structures. An angled ion implantation is applied to the stress liner such that ions are directed at vertical surfaces of the stress liner wherein portions of the stress liner in contact with the active areas are shielded from the ions due to a shadowing effect provided by a height and spacing between adjacent structures. | 06-02-2011 |
| 20110127589 | SEMICONDUCTOR STRUCTURE HAIVNG A METAL GATE AND METHOD OF FORMING THE SAME - A method of forming a semiconductor structure having a metal gate. Firstly, a semiconductor substrate is provided. Subsequently, at least a gate structure is formed on the semiconductor substrate. Afterwards, a spacer structure is formed to surround the gate structure. Then, an interlayer dielectric is formed. Afterwards, a planarization process is performed for the interlayer dielectric. Then, a portion of the sacrificial layer is removed to form an initial etching depth, such that an opening is formed to expose a portion of the spacer structure. The portion of the spacer structure exposed to the opening is removed so as to broaden the opening. Afterwards, remove the sacrificial layer completely via the opening. Finally, a gate conductive layer is formed to fill the opening. | 06-02-2011 |
| 20110127590 | INCREASING STABILITY OF A HIGH-K GATE DIELECTRIC OF A HIGH-K GATE STACK BY AN OXYGEN RICH TITANIUM NITRIDE CAP LAYER - In a replacement gate approach, the oxygen contents of a cap material may be increased, thereby providing more stable characteristics of the cap material itself and of the high-k dielectric material. Consequently, upon providing a work function adjusting metal species at a very advanced manufacturing stage, corresponding additional treatments may be reduced in number or may even be completely avoided, while at the same time threshold voltage variations may be reduced. | 06-02-2011 |
| 20110127591 | METHOD FOR PROGRAMMING AN ANTI-FUSE ELEMENT, AND SEMICONDUCTOR DEVICE - A method for programming an anti-fuse element in which the ratio between current values before and after writing is increased to ensure accuracy in making a judgment about how writing has been performed on the anti-fuse element. The method for programming the anti-fuse element as a transistor includes the steps of applying a prescribed gate voltage to a gate electrode to break down a gate dielectric film, and moving the silicide material of a silicide layer formed on a surface of at least one of a first impurity diffusion region and a second impurity diffusion region, into the gate dielectric film in order to couple the gate electrode with at least the one of the first impurity diffusion region and the second impurity diffusion region electrically through the silicide material. | 06-02-2011 |
| 20110133258 | SHIELDED GATE TRENCH MOSFET WITH INCREASED SOURCE-METAL CONTACT - A semiconductor device formed on a semiconductor substrate having a substrate top surface, includes: a gate trench extending from the substrate top surface into the semiconductor substrate; a gate electrode in the gate trench; a dielectric material disposed over the gate electrode; a body region adjacent to the gate trench; a source region embedded in the body region, at least a portion of the source region extending above the dielectric material; a contact trench that allows contact such as electrical contact between the source region and the body region; and a metal layer disposed over at least a portion of a gate trench opening, at least a portion of the source region, and at least a portion of the contact trench. | 06-09-2011 |
| 20110133259 | STRESSED BARRIER PLUG SLOT CONTACT STRUCTURE FOR TRANSISTOR PERFORMANCE ENHANCEMENT - A method for forming a slot contact structure for transistor performance enhancement. A contact opening is formed to expose a contact region, and a slot contact is disposed within the contact opening in order to induce a stress on an adjacent channel region. In an embodiment, a stress inducing barrier plug is disposed within a portion of the contact opening and the remainder of the contact opening is filled with a lower resistivity contact metal. By selecting the proper materials and deposition parameters, the slot contact can be tuned to induce a tensile or compressive stress on the adjacent channel region, thus being applicable for both p-type and n-type devices. | 06-09-2011 |
| 20110140181 | Removal of Masking Material - Methods for removing a masking material, for example, a photoresist, and electronic devices formed by removing a masking material are presented. For example, a method for removing a masking material includes contacting the masking material with a solution comprising cerium. The cerium may be comprised in a salt. The salt may be cerium ammonium nitrate. | 06-16-2011 |
| 20110147809 | FORMING A CARBON CONTAINING LAYER TO FACILITATE SILICIDE STABILITY IN A SILICON GERMANIUM MATERIAL - A method includes forming a silicon germanium layer, forming a layer comprising carbon and silicon on a top surface of the silicon germanium layer, forming a metal layer above the layer comprising carbon and silicon, and performing a thermal treatment to convert at least the layer comprising carbon and silicon to form a metal silicide layer. | 06-23-2011 |
| 20110147810 | METHOD OF FABRICATING STRAINED STRUCTURE IN SEMICONDUCTOR DEVICE - The present disclosure provides a semiconductor device that includes a semiconductor substrate, a gate structure disposed on a portion of the substrate, and strained structures disposed at either side of the portion of the substrate and formed of a semiconductor material different from the semiconductor substrate. The portion of the substrate is T shaped having a horizontal region and a vertical region that extends from the horizontal region in a direction away from a surface of the substrate. | 06-23-2011 |
| 20110147811 | TWO-DIMENSIONAL CONDENSATION FOR UNIAXIALLY STRAINED SEMICONDUCTOR FINS - Techniques are disclosed for enabling multi-sided condensation of semiconductor fins. The techniques can be employed, for instance, in fabricating fin-based transistors. In one example case, a strain layer is provided on a bulk substrate. The strain layer is associated with a critical thickness that is dependent on a component of the strain layer, and the strain layer has a thickness lower than or equal to the critical thickness. A fin is formed in the substrate and strain layer, such that the fin includes a substrate portion and a strain layer portion. The fin is oxidized to condense the strain layer portion of the fin, so that a concentration of the component in the strain layer changes from a pre-condensation concentration to a higher post-condensation concentration, thereby causing the critical thickness to be exceeded. | 06-23-2011 |
| 20110147812 | POLISH TO REMOVE TOPOGRAPHY IN SACRIFICIAL GATE LAYER PRIOR TO GATE PATTERNING - Techniques are disclosed for fabricating FinFET transistors (e.g., double-gate, trigate, etc). A sacrificial gate material (such as polysilicon or other suitable material) is deposited on fin structure, and polished to remove topography in the sacrificial gate material layer prior to gate patterning. A flat, topography-free surface (e.g., flatness of 50 nm or better, depending on size of minimum feature being formed) enables subsequent gate patterning and sacrificial gate material opening (via polishing) in a FinFET process flow. Use of the techniques described herein may manifest in structural ways. For instance, a top gate surface is relatively flat (e.g., flatness of 5 to 50 nm, depending on minimum gate height or other minimum feature size) as the gate travels over the fin. Also, a top down inspection of gate lines will generally show no or minimal line edge deviation or perturbation as the line runs over a fin. | 06-23-2011 |
| 20110147813 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating a semiconductor device includes: forming a fin-type semiconductor region on a substrate; and introducing an n-type impurity into at least a side of the fin-type semiconductor region by a plasma doping process, thereby forming an n-type impurity region in the side of the fin-type semiconductor region. In the introducing the n-type impurity, when a source power in the plasma doping process is denoted by a character Y [W], the supply of a gas containing the n-type impurity per unit time and per unit volume is set greater than or equal to 5.1×10 | 06-23-2011 |
| 20110147814 | SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE - A semiconductor device includes a vertical type semiconductor element formed by using a silicon substrate, a P type impurity diffusion layer being formed at a back surface of the silicon substrate. The surface of the P type impurity diffusion layer is wet etched to expose a single silicon crystal surface of the P type impurity diffusion layer, and a metal layer having a work function of 4.5 eV or more is disposed to the single silicon crystal surface so that an ohmic contact is made between the single silicon crystal surface of the P type impurity diffusion layer and the metal layer without making a silicon-metal alloy layer between the P type impurity diffusion layer and the metal layer. | 06-23-2011 |
| 20110147815 | SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREOF - Disclosed is a semiconductor device wherein device characteristics are improved by applying a strong stress to a channel region. The semiconductor device includes a semiconductor substrate, a gate insulating film formed over a first plane of the semiconductor substrate, a gate electrode formed over the gate insulating film, a gate sidewall insulating film formed over the sidewall of the gate electrode, source/drain diffusion layer regions into which impurities are implanted, the source/drain diffusion layer regions being adjacent to a channel region formed in the semiconductor substrate below the gate electrode, and a stress applying film formed over the source/drain diffusion layer regions except over the upper part of the gate electrode; and recesses or protrusions are formed in the region where the source/drain diffusion layer regions are formed over the first plane of the semiconductor substrate. | 06-23-2011 |
| 20110156107 | Self-aligned contacts - A transistor comprises a substrate, a pair of spacers on the substrate, a gate dielectric layer on the substrate and between the pair of spacers, a gate electrode layer on the gate dielectric layer and between the pair of spacers, an insulating cap layer on the gate electrode layer and between the pair of spacers, and a pair of diffusion regions adjacent to the pair of spacers. The insulating cap layer forms an etch stop structure that is self aligned to the gate and prevents the contact etch from exposing the gate electrode, thereby preventing a short between the gate and contact. The insulator-cap layer enables self-aligned contacts, allowing initial patterning of wider contacts that are more robust to patterning limitations. | 06-30-2011 |
| 20110156108 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - An insulating cover film is formed over at least a portion of a gate electrode in the direction of the channel width. A diffusion layer is formed to a portion of a substrate situating at a device forming region, thereby forming a source and a drain of a transistor. An insulating layer is formed over the device forming region, over the gate electrode, and over the insulating cover film. A contact is formed to the insulating layer and connected to the diffusion layer. A silicide layer is formed over the gate electrode. A side wall is formed higher than the gate electrode in a region in which the insulating cover film is formed. Then, the contact faces a region of the gate electrode in which the insulating cover film is formed. | 06-30-2011 |
| 20110156109 | METHOD AND SYSTEM FOR MANIPULATING ORGANIC NANOSTRUCTURES - A method of manipulating an organic nanostructure is disclosed. The method comprises: contacting a liquid sample having the organic nanostructure therein with an arrangement of electrodes, and applying voltage to the arrangement of electrodes to manipulate and immobilize the organic nanostructure over the electrodes by electrokinetics. | 06-30-2011 |
| 20110156110 | Field Effect Transistors Having Gate Electrode Silicide Layers with Reduced Surface Damage - Methods of forming integrated circuit devices include forming a field effect transistor having a gate electrode, a sacrificial spacer on a sidewall of the gate electrode and silicided source/drain regions. The sacrificial spacer is used as an implantation mask when forming highly doped portions of the source/drain regions. The sacrificial spacer is then removed from the sidewall of the gate electrode. A stress-inducing electrically insulating layer, which is configured to induce a net tensile stress (for NMOS transistors) or compressive stress (for PMOS transistors) in a channel region of the field effect transistor, is then formed on the sidewall of the gate electrode. | 06-30-2011 |
| 20110163356 | HYBRID TRANSISTOR - A method of forming a device is disclosed. The method includes providing a substrate having an active area. A gate is formed on the substrate. First and second current paths through the gate are formed. The first current path serves a first purpose and the second current path serves a second purpose. The gate controls selection of the current paths. | 07-07-2011 |
| 20110163357 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICES USING STRESS ENGINEERING - A method for fabricating a semiconductor device is presented. The method comprises providing a gate stack including a gate dielectric and gate electrode over a substrate. Stressor regions comprising stressor material incorporated into substitutional sites of the substrate are formed within the substrate on opposed sides of the gate stack. A first stressor layer having a first stress value is formed over the semiconductor device after forming the stressor regions followed by an anneal to memorize at least a portion of the first stress value in the semiconductor device, wherein the anneal is conducted at a low temperature. | 07-07-2011 |
| 20110163358 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating a semiconductor device includes forming a trench in a substrate, forming a gate electrode buried over the trench to form a buried gate pattern, etching portions of the substrate on both sides of the buried gate pattern to a certain depth, performing an ion implantation process on the substrate to form source/drain junctions, and forming metal patterns over the source/drain junctions. | 07-07-2011 |
| 20110163359 | LITHOGRAPHY FOR PRINTING CONSTANT LINE WIDTH FEATURES - An anisotropic wet etch of a semiconductor layer generates facets joined by a ridge running along the center of a pattern in a dielectric hardmask layer on the semiconductor layer. The dielectric hardmask layer is removed and a conformal masking material layer is deposited. Angled ion implantation of Ge, B, Ga, In, As, P, Sb, or inert atoms is performed parallel to each of the two facets joined by the ridge causing damage to implanted portions of the masking material layer, which are removed selective to undamaged portions of the masking material layer along the ridge and having a constant width. The semiconductor layer and a dielectric oxide layer underneath are etched selective to the remaining portions of the dielectric nitride. Employing remaining portions of the dielectric oxide layer as an etch mask, the gate conductor layer is patterned to form gate conductor lines having a constant width. | 07-07-2011 |
| 20110163360 | METHOD FOR FORMING A TRANSISTOR HAVING GATE DIELECTRIC PROTECTION AND STRUCTURE - A transistor structure is formed by providing a semiconductor substrate and providing a gate above the semiconductor substrate. The gate is separated from the semiconductor substrate by a gate insulating layer. A source and a drain are provided adjacent the gate to define a transistor channel underlying the gate and separated from the gate by the gate insulating layer. A barrier layer is formed by applying nitrogen or carbon on opposing outer vertical sides of the transistor channel between the transistor channel and each of the source and the drain. In each of the nitrogen and the carbon embodiments, the vertical channel barrier retards diffusion of the source/drain dopant species into the transistor channel. There are methods for forming the transistor structure. | 07-07-2011 |
| 20110169058 | NICKEL-SILICIDE FORMATION WITH DIFFERENTIAL PT COMPOSITION - Embodiments of the invention provide a method of forming nickel-silicide. The method may include depositing first and second metal layers over at least one of a gate, a source, and a drain region of a field-effect-transistor (FET) through a physical vapor deposition (PVD) process, wherein the first metal layer is deposited using a first nickel target material containing platinum (Pt), and the second metal layer is deposited on top of the first metal layer using a second nickel target material containing no or less platinum than that in the first nickel target material; and annealing the first and second metal layers covering the FET to form a platinum-containing nickel-silicide layer at a top surface of the gate, source, and drain regions. | 07-14-2011 |
| 20110169059 | METHODS OF FORMING NICKEL SULPHIDE FILM ON A SEMICONDUCTOR DEVICE - Embodiments of the present invention describe a method of forming nickel sulfide layer on a semiconductor device. A nickel sulfide layer is formed on a substrate by alternatingly exposing the substrate to a nickel-containing precursor and a sulfur-containing precursor. | 07-14-2011 |
| 20110169060 | WIRE STRUCTURE, METHOD FOR FABRICATING WIRE, THIN FILM TRANSISTOR SUBSTRATE, AND METHOD FOR FABRICATING THE THIN FILM TRANSISTOR SUBSTRATE - Provided are a wire structure, a method for fabricating a wire, a thin film transistor (TFT) substrate and a method for fabricating a TFT substrate. The wire structure includes a barrier layer formed on a substrate and including a copper layer and a copper solid solution layer. | 07-14-2011 |
| 20110175147 | FIELD-EFFECT TRANSISTOR DEVICE HAVING A METAL GATE STACK WITH AN OXYGEN BARRIER LAYER - A field effect transistor device and method which includes a semiconductor substrate, a dielectric gate layer, preferably a high dielectric constant gate layer, overlaying the semiconductor substrate and an electrically conductive oxygen barrier layer overlaying the gate dielectric layer. In one embodiment, there is a conductive layer between the gate dielectric layer and the oxygen barrier layer. In another embodiment, there is a low resistivity metal layer on the oxygen barrier layer. | 07-21-2011 |
| 20110175148 | Methods of Forming Conductive Features and Structures Thereof - Methods of forming features and structures thereof are disclosed. In one embodiment, a method of forming a feature includes forming a first material over a workpiece, forming a first pattern for a lower portion of the feature in the first material, and filling the first pattern with a sacrificial material. A second material is formed over the first material and the sacrificial material, and a second pattern for an upper portion of the feature is formed in the second material. The sacrificial material is removed. The first pattern and the second pattern are filled with a third material. | 07-21-2011 |
| 20110175149 | Semiconductor Device and Method of Fabricating the Same - A semiconductor device includes an isolation layer defining an active region formed in a semiconductor substrate. A first recessing process is performed on the isolation layer to expose edge portions of the active region. A first rounding process is performed to round the edge portions of the active region. A second recessing process is performed on the isolation layer. A second rounding process is performed to round the edge portions of the active region. | 07-21-2011 |
| 20110186914 | FIELD EFFECT TRANSISTOR (FET) AND METHOD OF FORMING THE FET WITHOUT DAMAGING THE WAFER SURFACE - Disclosed are a field effect transistor structure and a method of forming the structure. A gate stack is formed on the wafer above a designated channel region. Spacer material is deposited and anisotropically etched until just prior to exposing any horizontal surfaces of the wafer or gate stack, thereby leaving relatively thin horizontal portions of spacer material on the wafer surface and relatively thick vertical portions of spacer material on the gate sidewalls. The remaining spacer material is selectively and isotropically etched just until the horizontal portions of spacer material are completely removed, thereby leaving only the vertical portions of the spacer material on the gate sidewalls. This selective isotropic etch removes the horizontal portions of spacer material without damaging the wafer surface. Raised epitaxial source/drain regions can be formed on the undamaged wafer surface adjacent to the gate sidewall spacers in order to tailor source/drain resistance values. | 08-04-2011 |
| 20110186915 | REPLACEMENT GATE APPROACH BASED ON A REVERSE OFFSET SPACER APPLIED PRIOR TO WORK FUNCTION METAL DEPOSITION - In a replacement gate approach, a spacer may be formed in the gate opening after the removal of the placeholder material, thereby providing a superior cross-sectional shape upon forming any electrode metals in the gate opening. Moreover, the spacer may be used for reducing the gate length, while not requiring more complex gate patterning strategies. | 08-04-2011 |
| 20110186916 | SEMICONDUCTOR RESISTORS FORMED IN A SEMICONDUCTOR DEVICE COMPRISING METAL GATES BY REDUCING CONDUCTIVITY OF A METAL-CONTAINING CAP MATERIAL - In semiconductor devices comprising sophisticated high-k metal gate electrode structures, resistors may be formed on the basis of a semiconductor material by increasing the sheet resistance of a conductive metal-containing cap material on the basis of an implantation process. Consequently, any complex etch techniques for removing the conductive cap material may be avoided. | 08-04-2011 |
| 20110193143 | ELECTRONIC DEVICE INCLUDING DOPED REGIONS BETWEEN CHANNEL AND DRAIN REGIONS AND A PROCESS OF FORMING THE SAME - An electronic device can include a drain region of a transistor, wherein the drain region has a first conductivity type. The electronic device can also include a channel region of the transistor, wherein the channel region has a second conductivity type opposite the first conductivity type. The electronic device can further include a first doped region having the first conductivity type, wherein the first doped region extends from the drain region towards the channel region. The electronic device can still further include a second doped region having the first conductivity type, wherein the second doped region is disposed between the first doped region and the channel region. | 08-11-2011 |
| 20110193144 | SEMICONDUCTOR DEVICE HAVING ELEVATED STRUCTURE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a semiconductor substrate; a gate stack overlying the substrate, a spacer formed on sidewalls of the gate stack, and a protection layer overlying the gate stack for filling at least a portion of a space surrounded by the spacer and the top surface of the gate stack. A top surface of the spacer is higher than a top surface of the gate stack. | 08-11-2011 |
| 20110193145 | CRYSTAL PHASE STABILIZING STRUCTURE - It is possible to achieve the above interface structure stabilization by forming a structure in which a fraction of Ni atoms are substituted with Pt atoms only in the first interface layer, thereby lowering the interface energy while suppressing the variation of the characteristics of NiSi and NiSi/Si interface to the minimum extent. Therefore, it is possible to contribute to the improvement of the yield ratio of elements or the improvement of reliability through the stabilization of the crystal phase of NiSi. The NiSi is formed, for example, on the surface layer of a source drain in a transistor. | 08-11-2011 |
| 20110198675 | SPACER STRUCTURE OF A FIELD EFFECT TRANSISTOR - This disclosure relates to a spacer structure of a field effect transistor. An exemplary structure for a field effect transistor includes a substrate; a gate structure that has a sidewall overlying the substrate; a silicide region in the substrate on one side of the gate structure having an inner edge closest to the gate structure; a first oxygen-sealing layer adjoining the sidewall of the gate structure; an oxygen-containing layer adjoining the first oxygen-sealing layer on the sidewall and further including a portion extending over the substrate; and a second oxygen-sealing layer adjoining the oxygen-containing layer and extending over the portion of the oxygen-containing layer over the substrate, wherein an outer edge of the second oxygen-sealing layer is offset from the inner edge of the silicide region. | 08-18-2011 |
| 20110198676 | FIN TRANSISTOR STRUCTURE AND METHOD OF FABRICATING THE SAME - A fin transistor structure and a method of fabricating the same are disclosed. In one aspect the method comprises providing a bulk semiconductor substrate, patterning the semiconductor substrate to form a fin with it body directly tied to the semiconductor substrate, patterning the fin so that gaps are formed on the bottom of the fin at source/drain regions of the transistor structure to be formed. This is performed wherein a portion of the fin corresponding to the channel region of the transistor structure to be formed is directly tied to t he semiconductor substrate, while other portions of the fin at the source/drain regions are separated from the surface of the semiconductor substrate by the gaps. Also, filling an insulation material into the gaps, and fabricating the transistor structure based on the semiconductor substrate with the fin formed thereon are disclosed. Thereby, it is possible to reduce the leakage current while maintaining the advantages of body-tied structures. | 08-18-2011 |
| 20110204423 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - Disclosed is a semiconductor device that comprises a first semiconductor layer of one conductivity type provided on a substrate; a second semiconductor layer of the one conductivity type provided on the first semiconductor layer and having a lower impurity concentration than the first semiconductor layer; an isolation region extending from one principal face of the second semiconductor layer to reach the substrate; a first region in an element region of the second semiconductor layer isolated by the isolation region and having an opposite conductivity type; a second region of the one conductivity type provided in the element region extending from the one principal face to reach the first semiconductor layer and having an impurity concentration higher than the second semiconductor layer; and an insulation region extending from the one principal face to the first semiconductor layer, kept away from the substrate, and provided between the first and the second regions. | 08-25-2011 |
| 20110204424 | SEMICONDUCTOR DEVICE - An object is to provide a semiconductor device in which damages of an element such as a transistor are reduced even when physical force such as bending is externally applied to generate stress in the semiconductor device. A semiconductor device includes a semiconductor film including a channel formation region and an impurity region, which is provided over a substrate, a first conductive film provided over the channel formation region with a gate insulating film interposed therebetween, a first interlayer insulating film provided to cover the first conductive film, a second conductive film provided over the first interlayer insulating film so as to overlap with at least part of the impurity region, a second interlayer insulating film provided over the second conductive film, and a third conductive film provided over the second interlayer insulating film so as to be electrically connected to the impurity region through an opening. | 08-25-2011 |
| 20110210380 | CONTACT BARS WITH REDUCED FRINGING CAPACITANCE IN A SEMICONDUCTOR DEVICE - In sophisticated semiconductor devices, the contact structure may be formed on the basis of contact bars formed in a lower portion of an interlayer dielectric material, which may then be contacted by contact elements having reduced lateral dimensions so as to preserve a desired low overall fringing capacitance. The concept of contact bars of reduced height level may be efficiently combined with sophisticated replacement gate approaches. | 09-01-2011 |
| 20110215384 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In manufacturing processes of a semiconductor device including a shallow trench element isolation region and an interlayer insulating film of a multilayer structure, it is necessary to repeatedly use CMP, but since the CMP itself is costly, the repeated use of the CMP is a cause to increase the manufacturing cost. | 09-08-2011 |
| 20110215385 | SEMICONDUCTOR DEVICE - An object is to provide a semiconductor device which achieves miniaturization as well as suppressing a defect. Further, another object is to provide a semiconductor device which achieves miniaturization as well as keeping favorable characteristics. Is provided a semiconductor device including: a source wiring and a drain wiring each of which include a first conductive layer and a second conductive layer having a smaller thickness than the first conductive layer; an insulating layer which has an opening portion and is provided over the source wiring and the drain wiring; an oxide semiconductor layer which is in contact with part of the second conductive layer of the source wiring or the drain wiring in the opening portion; a gate insulating layer provided over the oxide semiconductor layer; and a gate electrode provided over the gate insulating layer. | 09-08-2011 |
| 20110215386 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE - Unintended full siliciding of a polysilicon gate electrode is prevented. | 09-08-2011 |
| 20110215387 | Semiconductor Constructions - The invention includes semiconductor constructions containing optically saturable absorption layers. An optically saturable absorption layer can be between photoresist and a topography, with the topography having two or more surfaces of differing reflectivity relative to one another. The invention also includes methods of patterning photoresist in which a saturable absorption layer is provided between the photoresist and a topography with surfaces of differing reflectivity, and in which the differences in reflectivity are utilized to enhance the accuracy with which an image is photolithographically formed in the photoresist. | 09-08-2011 |
| 20110220974 | SEMICONDUCTOR DEVICE - According to an embodiment, the present invention provides a semiconductor device that is easily integrated with other electronic circuits and functions as an oscillator with high frequency accuracy. The semiconductor device includes: a semiconductor substrate; an element region; an element isolation region that surrounds the element region; a field effect transistor including a gate electrode that is formed on the element region, source and drain regions, and a channel region that is interposed between the source region and the drain region; gate, source, and drain terminals that are used to apply a voltage to the gate electrode, the source region, and the drain region, respectively; and an output terminal that is electrically connected to the channel region. When the threshold voltage of the field effect transistor is V | 09-15-2011 |
| 20110220975 | METHOD OF FORMING A SEMICONDUCTOR DEVICE FEATURING A GATE STRESSOR AND SEMICONDUCTOR DEVICE - A semiconductor device is formed in a semiconductor layer. A gate stack is formed over the semiconductor layer and comprises a first conductive layer and a second layer over the first layer. The first layer is more conductive and provides more stopping power to an implant than the second layer. A species is implanted into the second layer. Source/drain regions are formed in the semiconductor layer on opposing sides of the gate stack. The gate stack is heated after the step of implanting to cause the gate stack to exert stress in the semiconductor layer in a region under the gate stack. | 09-15-2011 |
| 20110227136 | SPACER PROTECTION AND ELECTRICAL CONNECTION FOR ARRAY DEVICE - The present disclosure provides a method of forming an electrical device. The method may begin with forming a gate structure on a substrate, in which a spacer is present in direct contact with a sidewall of the gate structure. A source region and a drain region is formed in the substrate. A metal semiconductor alloy is formed on the gate structure, an outer sidewall of the spacer and one of the source region and the drain region. An interlevel dielectric layer is formed over the metal semiconductor alloy. A via is formed through the interlevel dielectric stopping on the metal semiconductor alloy. An interconnect is formed to the metal semiconductor alloy in the via. The present disclosure also includes the structure produced by the method described above. | 09-22-2011 |
| 20110233622 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - According to one embodiment, a semiconductor device comprises an active area extending in a first direction, a contact plug located on a first portion of the active area, and a transistor located on a second portion adjacent to the first portion of the active area in the first direction. A width of a top surface area of the first portion in a second direction perpendicular to the first direction is smaller than that of a top surface area of the second portion in the second direction. | 09-29-2011 |
| 20110233623 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - There is provided a semiconductor device and a method of manufacturing the same. The semiconductor device includes a base substrate; a semiconductor layer having a receiving groove, a protrusion part, a first carrier injection layer, at least two insulating patterns, and a second carrier injection layer provided on the base substrate, the insulating patterns being disposed to traverse the first carrier injection layer and the second carrier injection layer being spaced apart from the first carrier injection layer and disposed on a lower portion of the protrusion part; a source electrode and a drain electrode disposed to be spaced apart from each other on the semiconductor layer; and a gate electrode insulated from the source electrode and the drain electrode and having a recess part recessed into the receiving groove, wherein a lowest portion of the receiving groove contacts an uppermost layer of the first carrier injection layer or is disposed above the uppermost layer thereof, and an insulating pattern, disposed at an innermost portion of the semiconductor layer among the insulating patterns, traverses the first carrier injection layer and is disposed at the outside of both sides of the receiving groove in a thickness direction thereof. | 09-29-2011 |
| 20110233624 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - One aspect of the present invention is a semiconductor device includes: source and drain regions; a gate electrode formed on the source and drain regions; a sidewall formed on a side surface of the gate electrode; a first silicide film formed on the source and drain regions a predetermined distance away from the sidewall; and a second silicide film formed on the gate electrode a predetermined distance away from the sidewall. | 09-29-2011 |
| 20110233625 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes a semiconductor chip; and a scribe line disposed in an adjacent way to and around the semiconductor chip. The scribe line comprises an interlayer insulating film and an accessory. The accessory comprises a first portion with a layer shape formed on the interlayer insulating film and a second portion extending downward from the first portion into the interlayer insulating film in a thickness direction thereof. | 09-29-2011 |
| 20110233626 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - A semiconductor device capable of improving the driving power and a manufacturing method therefor are provided. In a semiconductor device, a gate structure formed by successively stacking a gate oxide film and a silicon layer is arranged over a semiconductor substrate. An oxide film is arranged long the lateral side of the gate structure and another oxide film is arranged along the lateral side of the oxide film and the upper surface of the substrate. In the side wall oxide film comprising these oxide films, the minimum value of the thickness of the first layer along the lateral side of the gate structure is less than the thickness of the second layer along the upper surface of the substrate. | 09-29-2011 |
| 20110233627 | MOS STRUCTURES THAT EXHIBIT LOWER CONTACT RESISTANCE AND METHODS FOR FABRICATING THE SAME - MOS structures that exhibit lower contact resistance and methods for fabricating such MOS structures are provided. In one method, a semiconductor substrate is provided and a gate stack is fabricated on the semiconductor substrate. With the gate stack serving as a mask, impurity dopants are implanted into a semiconductor material having a first surface and disposed proximate to the gate stack. A trench is etched into the semiconductor material such that the semiconductor material has a trench surface within the trench. Further, a metal silicide layer is formed on the first surface of the semiconductor material and on the trench surface. Also, a contact to at least a portion of the metal silicide layer on the first surface and at least a portion of the metal silicide layer on the trench surface is fabricated. | 09-29-2011 |
| 20110241084 | Semiconductor Device with a Buried Stressor - A semiconductor device, such as a PMOS or NMOS device, having localized stressors is provided. Recesses are formed on opposing sides of a gate electrode. A stress-inducing region is formed along a bottom of the recess, and a stressed layer is formed over the stress-inducing region. By having a stress-inducing region with a larger lattice structure than the stressed layer, a tensile strain may be created in a channel region of the semiconductor device and may be suitable for an NMOS device. By having a stress-inducing region with a smaller lattice structure than the stressed layer, a compressive strain may be created in the channel region of the semiconductor device and may be suitable for a PMOS device. Embodiments may be applied to various types of substrates and semiconductor devices, such as planar transistors and finFETs. | 10-06-2011 |
| 20110241085 | DUAL SIDEWALL SPACER FOR SEAM PROTECTION OF A PATTERNED STRUCTURE - A semiconducting device with a dual sidewall spacer and method of forming are provided. The method includes: depositing a first spacer layer over a patterned structure, the first spacer layer having a seam propagating through a thickness of the first spacer layer near an interface region of a surface of the substrate and a sidewall of the patterned structure, etching the first spacer layer to form a residual spacer at the interface region, where the residual spacer coats less than the entirety of the sidewall of the patterned structure, depositing a second spacer layer on the residual spacer and on the sidewall of the patterned structure not coated by the residual spacer, the second spacer layer being seam-free on the seam of the residual spacer, and etching the second spacer layer to form a second spacer coating the residual spacer and coating the sidewall of the patterned structure not coated by the residual spacer. | 10-06-2011 |
| 20110241086 | ALUMINUM FUSES IN A SEMICONDUCTOR DEVICE COMPRISING METAL GATE ELECTRODE STRUCTURES - In sophisticated semiconductor devices, electronic fuses may be provided on the basis of a replacement gate approach by using the aluminum material as an efficient metal for inducing electromigration in the electronic fuses. The electronic fuse may be formed on an isolation structure, thereby providing an efficient thermal decoupling of the electronic fuse from the semiconductor material and the substrate material, thereby enabling the provision of efficient electronic fuses in a bulk configuration, while avoiding incorporation of fuses into the metallization system. | 10-06-2011 |
| 20110241087 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE - A gate insulating film is formed on a substrate. Next, a gate electrode film is formed on the gate insulating film. A mask film is formed on a portion of the gate electrode film. The gate electrode film is selectively removed by etching using the mask film as a mask. A gate sidewall film is formed so as to be in contact with the lateral surfaces of the mask film and the gate electrode film. The mask film is formed of a laminated film in which at least a first film, a second film and a third film are laminated in this order. The second film has a higher etching selectivity ratio than that of the third film with respect to the gate sidewall film. The third film has a higher etching selectivity ratio than that of the second film with respect to the gate electrode film. | 10-06-2011 |
| 20110241088 | FIELD EFFECT TRANSISTOR, METHOD OF MANUFACTURING FIELD EFFECT TRANSISTOR, AND METHOD OF FORMING GROOVE - A field effect transistor includes a high resistance layer on a substrate, a semiconductor operation layer that is formed on the high resistance layer and includes a channel layer that has the carbon concentration of not more than 1×10 | 10-06-2011 |
| 20110248321 | Self-Aligned Contacts for Field Effect Transistor Devices - A method for forming a field effect transistor includes forming a gate stack, a spacer adjacent to opposing sides of the gate stack, a silicide source region and a silicide drain region on opposing sides of the spacer, epitaxially growing silicon on the source region and the drain region; forming a liner layer on the gate stack and the spacer, removing a portion of the liner layer to expose a portion of the hardmask layer, removing the exposed portions of the hardmask layer to expose a silicon layer of the gate stack, removing exposed silicon to expose a portion of a metal layer of the gate stack, the source region, and the drain region; and depositing a conductive material on the metal layer of the gate stack, the silicide source region, and the silicide drain region. | 10-13-2011 |
| 20110248322 | Piezoelectric Gate-Induced Strain - An embodiment is a semiconductor device. The semiconductor device comprises a substrate, an electrode over the substrate, and a piezoelectric layer disposed between the substrate and the electrode. The piezoelectric layer causes a strain in the substrate when an electric field is generated by the electrode. | 10-13-2011 |
| 20110248323 | ION IMPLANTATION APPARATUS, ION IMPLANTATION METHOD, AND SEMICONDUCTOR DEVICE - In the plasma-based ion implantation for accelerating positive ions of a plasma and implanting the positive ions into a substrate to be processed on a holding stage in a processing chamber where the plasma has been excited, ion implantation is achieved in the following manner: an RF power having a frequency of 4 MHz or greater is applied to the holding stage to cause a self-bias voltage to generate on the surface of the substrate. The RF power is applied a plurality of times in the form of pulses. | 10-13-2011 |
| 20110254060 | Metal Gate Structure and Fabricating Method thereof - A method of fabricating a metal gate structure is provided. Firstly, a high-K gate dielectric layer is formed on a semiconductor substrate. Then, a first metal-containing layer having a surface away from the gate dielectric layer is formed on the gate dielectric layer. After that, the surface of the first metal-containing layer is treated to improve the nitrogen content thereof of the surface. Subsequently, a silicon layer is formed on the first metal-containing layer. Because the silicon layer is formed on the surface having high nitrogen content, the catalyzing effect to the silicon layer resulted from the metal material in the first metal-containing layer can be prevented. As a result, the process yield is improved. | 10-20-2011 |
| 20110254061 | TRANSISTOR AND METHOD OF FABRICATING THE SAME - A transistor including a gate, an active stacked structure, a dielectric layer, a source and a drain. The gate is located over a first surface of the dielectric layer. The active stacked structure, including a first active layer and a second active layer, is located over a second surface of the dielectric layer. The source and the drain are located over the second surface of the dielectric layer and at two sides of the active stacked structure and extend between the first active layer and the second active layer of the active stacked structure. | 10-20-2011 |
| 20110254062 | FIELD EFFECT TRANSISTOR AND METHOD OF MANUFACTURING THE SAME - A field effect transistor which can operate at a low threshold value includes: an n-type semiconductor region; a source region and a drain region separately formed in the n-type semiconductor region; a first insulating film formed in the semiconductor region between the source region and the drain region and containing silicon and oxygen; a second insulating film formed on the first insulating film and containing at least one material selected from Hf, Zr, and Ti and oxygen; and a gate electrode formed on the second insulating film. Ge is doped in an interface region including an interface between the first insulating film and the second insulating film, and an area density of the Ge has a peak on a first insulating film side in the interface region. | 10-20-2011 |
| 20110254063 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a MOS device, which comprises: a substrate; an interface layer thin film formed on the substrate; a high k gate dielectric layer formed on the interface layer thin film; and a metal gate formed on the high k gate dielectric layer. The metal gate comprises, upwardly in order, a metal gate work function layer, an oxygen absorption element barrier layer, a metal gate oxygen absorbing layer, a metal gate barrier layer and a polysilicon layer. A metal gate oxygen absorbing layer is introduced into the metal gate for the purpose of preventing the outside oxygen from coming into the interface layer and absorbing the oxygen in the interface layer during a annealing process, such that the interface layer is reduced to be thinner and the EOT of MOS devices are effectively reduced; meanwhile, by adding an oxygen absorption element barrier layer, the “oxygen absorption element” is prevented from diffusing into the high k gate dielectric layer and giving rise to unfavorable impact thereon; in this way, the high k/metal gate system can be more easily integrated, and the performance of the device can be further improved accordingly. | 10-20-2011 |
| 20110254064 | SEMICONDUCTOR DEVICE WITH CARBON ATOMS IMPLANTED UNDER GATE STRUCTURE - An exemplary semiconductor device includes a substrate, a spacer, a metal silicide layer and carbon atoms. The substrate has a gate structure formed thereon. The spacer is formed on the sidewall of the gate structure. The spacer has a first side adjacent to the gate structure and a second side away from the gate structure. The metal silicide layer is formed on the substrate and adjacent to the second side of the spacer but away from the first side of the spacer. The carbon atoms are formed into the substrate and adjacent to the first side of the spacer but away from the second side of the spacer. | 10-20-2011 |
| 20110260220 | SEMICONDUCTOR DEVICE AND FABRICATION THEREOF - A method for forming a semiconductor device is disclosed. A substrate including a gate dielectric layer and a gate electrode layer sequentially formed thereon is provided. An offset spacer is formed on sidewalls of the gate dielectric layer and the gate electrode layer. A carbon spacer is formed on a sidewall of the offset spacer, and the carbon spacer is then removed. The substrate is implanted to form a lightly doped region using the gate electrode layer and the offset spacer as a mask. The method may also include providing a substrate having a gate dielectric layer and a gate electrode layer sequentially formed thereon. A liner layer is formed on sidewalls of the gate electrode layer and on the substrate. A carbon spacer is formed on a portion of the liner layer adjacent the sidewall of the gate electrode layer. A main spacer is formed on a sidewall of the carbon spacer. The carbon spacer is removed to form an opening between the liner layer and the main spacer. The opening is sealed by a sealing layer to form an air gap. | 10-27-2011 |
| 20110266596 | Semiconductor device and method of making the same - In a method of the present invention during a salicide process, before a second thermal process, a dopant is implanted at a place located in a region ranging from a Ni | 11-03-2011 |
| 20110266597 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes an isolation layer formed on a semiconductor substrate; an active region defined by the isolation layer; at least one gate line formed to overlap with the active region; at least one first active tab formed on a first interface of the active region which overlaps with the gate line; and a first gate tab formed on a second interface facing away from the first interface in such a way as to project from the gate line. | 11-03-2011 |
| 20110278650 | POWER SEMICONDUCTOR DEVICE - A problem associated with n-channel power MOSFETs and the like that the following is caused even by relatively slight fluctuation in various process parameters is solved: source-drain breakdown voltage is reduced by breakdown at an end of a p-type body region in proximity to a portion in the vicinity of an annular intermediate region between an active cell region and a chip peripheral portion, arising from electric field concentration in that area. To solve this problem, the following measure is taken in a power semiconductor device having a superjunction structure in the respective drift regions of a first conductivity type of an active cell region, a chip peripheral region, and an intermediate region located therebetween: the width of at least one of column regions of a second conductivity type comprising the superjunction structure in the intermediate region is made larger than the width of the other regions. | 11-17-2011 |
| 20110278651 | NMOS TRANSISTOR DEVICES AND METHODS FOR FABRICATING SAME - NMOS transistors having controlled channel strain and junction resistance and methods for the fabrication of same are provided herein. In some embodiments, an NMOS transistor may include a transistor stack comprising a gate dielectric and a gate electrode formed atop a p-type silicon region; and a source/drain region disposed on both sides of the transistor stack and defining a channel region therebetween and beneath the transistor stack, the source drain region including a first silicon layer having a lattice adjusting element and one or more second silicon layers having a lattice adjusting element and an n-type dopant disposed atop the first silicon layer. | 11-17-2011 |
| 20110284932 | BODY CONTACT STRUCTURES AND METHODS OF MANUFACTURING THE SAME - A body contact structure which reduce parasitic capacitance and improves body resistance of a device and methods of manufacture. The method includes forming a gate insulator material and gate electrode material on a substrate. The method further includes patterning the gate insulator material and the gate electrode material to form a gate structure having a shape with a first portion isolated from a second portion. The method further includes forming source and drain regions on sides of the first portion and a body contact at a side and under an area of the second portion, and forming an interlevel dielectric within a space that isolates the first portion from the second portion of the gate structure, and over the gate structure, source and drain regions and the body contact. | 11-24-2011 |
| 20110284933 | ELECTRIC CONTACTING OF SEMICONDUCTOR COMPONENTS HAVING LOW CONTACT RESISTANCE - The present invention relates to a semiconductor component which comprises at least one electric contact surface for the electric contacting of a semiconductor region ( | 11-24-2011 |
| 20110284934 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - There are provided a semiconductor device and a method of fabricating the same. The semiconductor device comprises: a semiconductor substrate of a first conductive type; a gate formed on the semiconductor substrate; and a heavily doped region of the first conductive type and a heavily doped region of a second conductive type formed respectively in the semiconductor substrate at either side of the gate, wherein the heavily doped region of the second conductive type is separated from the channel region under the gate and partially separated from the semiconductor substrate by a dielectric layer. By means of this semiconductor device, it is possible to provide excellent switching behavior. | 11-24-2011 |
| 20110284935 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes: a semiconductor substrate; a gate electrode formed on the semiconductor substrate with a gate insulating film interposed therebetween; a side wall spacer formed on a side wall of the gate electrode; source/drain regions formed in opposing portions of the semiconductor substrate with the gate electrode and the side wall spacer interposed therebetween; and a stress-applying insulating film covering the gate electrode, the side wall spacer, and an upper surface of the semiconductor substrate. A gate-length-direction thickness of an upper portion of the side wall spacer is at least larger than a gate-length-direction thickness of a middle portion thereof. | 11-24-2011 |
| 20110284936 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device and a method of fabricating a semiconductor device. The semiconductor device includes an interlayer insulation layer pattern, a metal wire pattern exposed by a passage formed by a via hole formed in the interlayer insulation layer pattern to input and output an electrical signal, and a plated layer pattern directly contacting the metal wire pattern and filling the via hole. The method includes forming an interlayer insulation layer having a metal wire pattern to input and output an electrical signal formed therein, forming a via hole to define a passage that extends through the interlayer insulation layer until at least a part of the metal wire pattern is exposed, and forming a plated layer pattern to fill the via hole and to directly contact the metal wire pattern by using the metal wire pattern exposed through the via hole as a seed metal layer. | 11-24-2011 |
| 20110291163 | Reduction of Defect Rates in PFET Transistors Comprising a Si/Ge Semiconductor Material Formed by Epitaxial Growth - In sophisticated semiconductor devices, the defect rate that may typically be associated with the provision of a silicon/germanium material in the active region of P-channel transistors may be significantly decreased by incorporating a carbon species prior to or during the selective epitaxial growth of the silicon/germanium material. In some embodiments, the carbon species may be incorporated during the selective growth process, while in other cases an ion implantation process may be used. In this case, superior strain conditions may also be obtained in N-channel transistors. | 12-01-2011 |
| 20110298017 | REPLACEMENT GATE MOSFET WITH SELF-ALIGNED DIFFUSION CONTACT - A replacement gate field effect transistor includes at least one self-aligned contact that overlies a portion of a dielectric gate cap. A replacement gate stack is formed in a cavity formed by removal of a disposable gate stack. The replacement gate stack is subsequently recessed, and a dielectric gate cap having sidewalls that are vertically coincident with outer sidewalls of the gate spacer is formed by filling the recess over the replacement gate stack. An anisotropic etch removes the dielectric material of the planarization layer selective to the material of the dielectric gate cap, thereby forming at least one via cavity having sidewalls that coincide with a portion of the sidewalls of the gate spacer. A portion of each diffusion contact formed by filling the at least one via cavity overlies a portion of the gate spacer and protrudes into the dielectric gate cap. | 12-08-2011 |
| 20110298018 | TRANSISTOR AND MANUFACTURING METHOD OF THE SAME - The invention provides a transistor, including: a substrate having a channel region; a source region and a drain region on two ends of the channel region of the substrate respectively; a gate high-K dielectric layer on a top surface of the substrate above the channel region between the source region and the drain region; an interfacial layer under the gate high-K dielectric layer, including a first portion near the source region and a second portion near the drain region, wherein an equivalent oxide thickness of the first portion is larger than that of the second portion. An asymmetric replacement metal gate forms an asymmetric interfacial layer, which is thin at the drain region side and thick at the source region side. At the thin drain region side, the short channel effect is significant and the asymmetric interfacial layer advantageously suppresses the short channel effect. At the thick source region side, the carrier mobility has a large influence on the device, and the asymmetric interfacial layer prevents the carrier mobility from decreasing. Further, the asymmetric replacement metal gate implements an asymmetric metal work function. | 12-08-2011 |
| 20110298019 | COMPACT FIELD EFFECT TRANSISTOR WITH COUNTER-ELECTRODE AND FABRICATION METHOD - An etching mask, comprising the delineation pattern of the gate electrode, of a source contact, a drain contact and a counter-electrode contact, is formed on a substrate of semi-conductor on insulator type. The substrate is covered by a layer of dielectric material and a gate material. The counter-electrode contact is located in the pattern of the gate electrode. The gate material is etched to define the gate electrode, the source contact and drain contacts and the counter-electrode contact. A part of the support substrate is released through the pattern of the counter-electrode contact area. An electrically conductive material is deposited on the free part of the support substrate to form the counter-electrode contact. | 12-08-2011 |
| 20110298020 | SEMICONDUCTOR DEVICE - A semiconductor device, wherein a first metallic member is bonded to a first electrode of a semiconductor element via a first metallic body containing a first precious metal, and a second metallic member is bonded to a second electrode via a second metallic body containing a second precious metal. | 12-08-2011 |
| 20110298021 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A method for manufacturing a semiconductor device, includes: forming an insulating film containing silicon, oxygen and carbon on at least one of a first substrate and a second substrate; and bonding the first substrate and the second substrate together, with the insulating film interposed therebetween. There can be provided a method capable of manufacturing a semiconductor device having high element density, high performance and high reliability, with high yield. | 12-08-2011 |
| 20110309416 | STRUCTURE AND METHOD TO REDUCE FRINGE CAPACITANCE IN SEMICONDUCTOR DEVICES - A method of forming a semiconductor device is provided that includes providing a gate structure on a semiconductor substrate that includes at a gate conductor. Forming a sacrificial material layer on at least the sidewall surfaces of the gate conductor, and forming a raised source region and a raised drain region on the semiconductor substrate, wherein the raised source region and the raised drain are separated from the gate conductor by the sacrificial material layer. The sacrificial material layer is removed to provide a void separating the gate structure from the raised source and drain regions. An encapsulating material layer is formed bridging the gate structure to each of the raised source region and the raised drain region to provide an air gap separating the gate structure from the raised source regions and the raised drain regions. | 12-22-2011 |
| 20110309417 | Method for Reshaping Silicon Surfaces with Shallow Trench Isolation - A method for making a semiconductor device by reshaping a silicon surface with a sacrificial layer is presented. In the present invention the steps of forming a sacrificial dielectric layer and removing the sacrificial dielectric layer are repeated multiple times in order to remove sharp edges from the silicon surface near the field oxides. Another aspect of the present invention includes making a MOSFET transistor that incorporates the forming and removing of multiple sacrificial layers into the process. | 12-22-2011 |
| 20110316056 | Semiconductor device and method of manufacturing the same - The present invention relates to a method of manufacturing a semiconductor device having a shared contact for connection between a source/drain region and a gate electrode. After formation of a gate electrode via a gate insulating film on a semiconductor substrate, a top surface of the substrate is covered with a cover film. After removal of the cover film from at least one of sidewall surface of the gate electrode and a part of the top surface of the substrate adjacent to the sidewall surface, a semiconductor layer is epitaxially grown on a top surface of an exposed substrate to electrically connect the substrate and the at least one sidewall surface of the gate electrode. Then, a source/drain region is formed in a top surface part of the substrate or the semiconductor layer using the gate electrode as a mask. | 12-29-2011 |
| 20110316057 | WIRING BOARD, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHODS THEREOF - It is an object to reduce defective conduction in a wiring board or a semiconductor device whose integration degree is increased. It is another object to manufacture a highly reliable wiring board or semiconductor device with high yield. In a wiring board or a semiconductor device having a multilayer wiring structure, a conductive layer having a curved surface is used in connection between conductive layers used for the wirings. The top of a conductive layer in a lower layer exposed by removal of an insulating layer therearound has a curved surface, so that coverage of the conductive layer in the lower layer with a conductive layer in an upper layer stacked thereover can be favorable. A conductive layer is etched using a resist mask having a curved surface, so that a conductive layer having a curved surface is formed. | 12-29-2011 |
| 20120007154 | TSV Formation Processes Using TSV-Last Approach - A device includes a semiconductor substrate having a front surface and a back surface opposite the front surface. An insulation region extends from the front surface into the semiconductor substrate. An inter-layer dielectric (ILD) is over the insulation region. A landing pad extends from a top surface of the ILD into the insulation region. A through-substrate via (TSV) extends from the back surface of the semiconductor substrate to the landing pad. | 01-12-2012 |
| 20120007155 | SEMICONDUCTOR DEVICES WITH EXTENDED ACTIVE REGIONS - A method of making a semiconductor device is achieved in and over a semiconductor layer. A trench is formed adjacent to a first active area. The trench is filled with insulating material. A masking feature is formed over a center portion of the trench to expose a first side of the trench between a first side of the masking feature and the first active area. A step of etching into the first side of the trench leaves a first recess in the trench. A first epitaxial region is grown in the first recess to extend the first active area to include the first recess and thereby form an extended first active region. | 01-12-2012 |
| 20120012903 | METHOD FOR MAKING A DISILICIDE - Methods for fabricating a semiconductor device are disclosed. A metal-rich silicide and/or a mono-silicide is formed on source/drain (S/D) regions. A millisecond anneal is provided to the metal-rich silicide and/or the mono-silicide to form a di-silicide with limited spikes at the interface between the silicide and substrate. The di-silicide has an additive which can lower the electron Schottky barrier height. | 01-19-2012 |
| 20120012904 | METAL-OXIDE SEMICONDUCTOR TRANSISTOR AND METHOD FOR FABRICATING THE SAME - A method for fabricating a metal-oxide semiconductor (MOS) transistor is disclosed. The method includes the steps of: providing a semiconductor substrate; forming a silicon layer on the semiconductor substrate; performing a first photo-etching process on the silicon layer for forming a gate pattern; forming an epitaxial layer in the semiconductor substrate adjacent to two sides of the gate pattern; and performing a second photo-etching process on the gate pattern to form a slot in the gate pattern while using the gate pattern to physically separate the gate pattern into two gates. | 01-19-2012 |
| 20120012905 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device is disclosed which includes a silicide substrate, a nitride layer, two STIs, and a strain nitride. The silicide substrate has two doping areas. The nitride layer is deposited on the silicide substrate. The silicide substrate and the nitride layer have a recess running through. The two doping areas are at two sides of the recess. The end of the recess has an etching space bigger than the recess. The top of the silicide substrate has a fin-shaped structure. The two STIs are at the two opposite sides of the silicide substrate (recess). The strain nitride is spacer-formed in the recess and attached to the side wall of the silicide substrate, nitride layer, two STIs. The two doping areas cover the strain nitride. As a result, the efficiency of semiconductor is improved, and the drive current is increased. | 01-19-2012 |
| 20120012906 | Si-Ge-Si SEMICONDUCTOR STRUCTURE HAVING DOUBLE GRADED JUNCTIONS AND METHOD FOR FORMING THE SAME - A Si—Ge—Si semiconductor structure having double compositionally-graded hetero-structures is provided, comprising: a substrate; a buffer layer or an insulation layer formed on the substrate; a strained SiGe layer formed on the buffer layer or the insulation layer, wherein a Ge content in a central portion of the strained SiGe layer is higher than the Ge content in an upper surface or in a lower surface of the strained SiGe layer, and the Ge content presents a compositionally-graded distribution from the central portion to the upper surface and to the lower surface respectively. According to the present disclosure, a compositionally-graded hetero-structure replaces an abrupt hetero-structure so as to form a triangular hole carrier potential well, so that most of hole carriers may be distributed in the strained SiGe layer with high Ge content and a reduction of the carrier mobility caused by interface scattering may be avoided, thus further improving a performance of a device. | 01-19-2012 |
| 20120018783 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME - According to one embodiment, a method is disclosed for manufacturing a semiconductor device. A side face parallel to a channel direction of a plurality of gate electrodes provided above a semiconductor substrate is included as a part of an inner wall of an isolation groove provided between the adjacent gate electrodes. The method can include forming a first isolation groove penetrating through a conductive film serving as the gate electrode to reach the semiconductor substrate. The method can include forming a protection film covering a side wall of the first isolation groove including a side face of the gate electrode. The method can include forming a second isolation groove by etching the semiconductor substrate exposed to a bottom surface of the first isolation groove. The method can include oxidizing an inner surface of the second isolation groove provided on each of both sides of the gate electrode to form first insulating films, which are connected to each other under the gate electrode. In addition, the method can include filling an inside of the first isolation groove and an inside of the second isolation groove with a second insulating film. | 01-26-2012 |
| 20120018784 | Method for Forming a Nickelsilicide FUSI Gate | 01-26-2012 |
| 20120018785 | FINFET SEMICONDUCTOR DEVICE - The present disclosure provides a FinFET element. The FinFET element includes a germanium-FinFET element (e.g., a multi-gate device including a Ge-fin). In one embodiment, device includes a fin having a first portion including Ge and a second portion, underlying the first portion and including an insulating material (e.g., silicon dioxide). A gate structure may be formed on the fin. | 01-26-2012 |
| 20120018786 | HIGHLY STRAINED SOURCE/DRAIN TRENCHES IN SEMICONDUCTOR DEVICES - A semiconductor device is formed by a multi-step etching process that produces trench openings in a silicon substrate immediately adjacent transistor gate structures formed over the substrate surface. The multi-step etching process is a Br-based etching operation with one step including nitrogen and a further step deficient of nitrogen. The etching process does not attack the transistor structure and forms the openings. The openings are bounded by upper surfaces that extend downwardly from the substrate surface and are substantially vertical, and lower surfaces that bulge outwardly from the upper vertical sections and undercut the transistor structure. The openings may be filled with a suitable source/drain material to produce SSD transistors with desirable I | 01-26-2012 |
| 20120032238 | CONTACT ETCH STOP LAYERS OF A FIELD EFFECT TRANSISTOR - An exemplary structure for a field effect transistor according to at least one embodiment comprises a substrate comprising a surface; a gate structure comprising sidewalls and a top surface over the substrate; a spacer adjacent to the sidewalls of the gate structure; a first contact etch stop layer over the spacer and extending along the surface of the substrate; an interlayer dielectric layer adjacent to the first contact etch stop layer, wherein a top surface of the interlayer dielectric layer is coplanar with the top surface of the gate structure; and a second contact etch stop layer over the top surface of the gate structure. | 02-09-2012 |
| 20120032239 | METHOD FOR INTRODUCING CHANNEL STRESS AND FIELD EFFECT TRANSISTOR FABRICATED BY THE SAME - The present invention relates to CMOS ultra large scale integrated circuits, and provides a method for introducing channel stress and a field effect transistor fabricated by the same. According to the present invention, a strained dielectric layer is interposed between source/drain regions and a substrate of a field effect transistor, and a strain is induced in a channel by the strained dielectric layer which directly contacts the substrate, so as to improve a carrier mobility of the channel and a performance of the device. The specific effects of the invention include: a tensile strain may be induced in the channel by using the strained dielectric layer having a tensile strain in order to increase an electron mobility of the channel; a compressive strain may be induced in the channel by using the strained dielectric layer having a compressive strain in order to increase a hole mobility of the channel. According to the invention, not only an effectiveness of the introduction of channel stress is ensued, but the device structure of the field effect transistor is also improved fundamentally, so that a capability for suppressing a short channel effect of the device is increased. | 02-09-2012 |
| 20120032240 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a field effect transistor including: a semiconductor substrate including a channel forming region; a gate insulating film formed at the channel forming region on the semiconductor substrate; a gate electrode formed over the gate insulating film; a first stress application layer formed over the gate electrode and applying stress to the channel forming region; a source/drain region formed on a surface layer portion of the semiconductor substrate at both sides of the gate electrode and the first stress application layer; and a second stress application layer formed over the source/drain region in a region other than at least a region of the first stress application layer and applying stress different from the first stress application layer to the channel forming region. | 02-09-2012 |
| 20120037962 | SEMICONDUCTOR STRUCTURE HAVING A CONTACT-LEVEL AIR GAP WITHIN THE INTERLAYER DIELECTRICS ABOVE A SEMICONDUCTOR DEVICE AND A METHOD OF FORMING THE SEMICONDUCTOR STRUCTURE USING A SELF-ASSEMBLY APPROACH - Disclosed are embodiments of a semiconductor structure having a contact-level air gap within the interlayer dielectrics above a semiconductor device in order to minimize parasitic capacitances (e.g., contact-to-contact capacitance, contact-to-diffusion region capacitance, gate-to-contact capacitance, gate-to-diffusion region capacitance, etc.). Specifically, the structure can comprise a semiconductor device on a substrate and at least three dielectric layers stacked above the semiconductor device. An air gap is positioned with the second dielectric layer aligned above the semiconductor device and extending vertically from the first dielectric layer to the third dielectric layer. Also disclosed are embodiments of a method of forming such a semiconductor structure using a self-assembly approach. | 02-16-2012 |
| 20120037963 | SEMICONDUCTOR DEVICE WITH PROTECTIVE FILMS AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a semiconductor substrate having a drain region, a source region and an impurity diffusion region; an oxide film formed on the impurity diffusion region; a first protective film including a SiN film as a principle component and being formed on the oxide film; and a second protective film containing carbon and being formed on the first protective film. A method of manufacturing the semiconductor device, includes doping an impurity into a semiconductor substrate, thereby forming a drain region, a source region and an impurity diffusion region; forming an oxide film on the impurity diffusion region; forming a first protective film including a SiN film as a principle component on the oxide film; and forming a second protective film containing carbon on the first protective film. | 02-16-2012 |
| 20120037964 | ILLUMINATION APPARATUS - A point light source is converted into a plane light source having a satisfactory uniformity. The point light source is converted into a line light source by means of a linear light guiding plate, and further into the plane light source by means of a plane-like light guiding plate. Light from the point light source is reflected at a lamp reflector to be incident on at least two side surfaces of the plane-like light guiding plate. | 02-16-2012 |
| 20120037965 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In an LCD driver, in a high voltage resistant MISFET, end portions of a gate electrode run onto electric field relaxing insulation regions. Wires to become source wires or drain wires are formed on an interlayer insulation film of the first layer over the high voltage resistant MISFET. At this moment, when a distance from an interface between a semiconductor substrate and a gate insulation film to an upper portion of the gate electrode is defined as “a”, and a distance from the upper portion of the gate electrode to an upper portion of the interlayer insulation film on which the wires are formed is defined as “b”, a relation of a>b is established. In such a high voltage resistant MISFET structured in this manner, the wires are arranged so as not to be overlapped planarly with the gate electrode of the high voltage resistant MISFET. | 02-16-2012 |
| 20120037966 | MINUTE STRUCTURE, MICROMACHINE, ORGANIC TRANSISTOR, ELECTRIC APPLIANCE, AND MANUFACTURING METHOD THEREOF - A micromachine is generally formed using a semiconductor substrate such as a silicon wafer. One of the objects of the present invention is to realize further reduction in cost by integrating a minute structure and a semiconductor element controlling the minute structure over one insulating surface in one step. A minute structure has a structure in which a first layer formed into a frame-shape are provided over an insulating surface, a space is formed inside the frame, and a second layer is formed to cross over the first layer. Such a minute structure and a thin film transistor can be integrated over one insulating surface in one step. | 02-16-2012 |
| 20120043590 | Linear-Cap Varactor Structures for High-Linearity Applications - A device includes a well region over a substrate, and a heavily doped well region over the well region, wherein the well region and the heavily doped well region are of a same conductivity type. A gate dielectric is formed on a top surface of the heavily doped well region. A gate electrode is formed over the gate dielectric. A source region and a drain region are formed on opposite sides of the heavily doped well region. The source region and the drain region have bottom surfaces contacting the well region, and wherein the source region and the drain region are of opposite conductivity types. | 02-23-2012 |
| 20120043591 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a substrate, a semiconductor, a first surface passivation film including nitride, a second passivation film, a gate electrode, and a source electrode and a drain electrode. The semiconductor layer is provided on the substrate. The first surface passivation film including nitride is provided on the semiconductor layer and has at least two openings. The second surface passivation film covers an upper surface and a side surface of the first surface passivation film. The gate electrode is provided on a part of the second surface passivation film. The source electrode and the drain electrode are respectively provided on the two openings. In addition, the second surface passivation film includes a material of which melting point is higher than the melting points of the gate electrode, the source electrode, and the drain electrode. | 02-23-2012 |
| 20120043592 | SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME - The present invention provides a semiconductor device. The semiconductor device comprises contact plugs that comprise a first contact plug formed by a first barrier layer arranged on the source and drain regions and a tungsten layer arranged on the first barrier layer; and second contact plugs comprising a second barrier layer arranged on both of the metal gate and the first contact plug and a conductive layer arranged on the second barrier layer. The conductivity of the conductive layer is higher than that of the tungsten layer. A method for forming the semiconductor device is also provided. The present invention provides the advantage of enhancing the reliability of the device when using the copper contact technique. | 02-23-2012 |
| 20120043593 | Semiconductor Device Structure and Method for Manufacturing the same - The present invention presents a method for manufacturing a semiconductor device structure as well as the semiconductor device structure. Said method comprises: providing a semiconductor substrate; forming a first insulating layer on the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a channel region embedded in the semiconductor substrate; and forming a gate stack stripe on the channel region. Said method further comprises, before forming the channel region, performing a source/drain implantation on the semiconductor substrate. By means of forming the source/drain regions in a self-aligned manner before forming the channel region and the gate stack, said method achieves the advantageous effects of the replacement gate process without using a dummy gate, thereby simplifying the process and reducing the cost. | 02-23-2012 |
| 20120043594 | Micro-Electro-Mechanical Device And Manufacturing Method For The Same - It is an object of the present invention to provide a micro-electro-mechanical-device having a microstructure and a semiconductor element over one surface. In particular, it is an object of the present invention to provide a method for simplifying the process of forming the microstructure and the semiconductor element over one surface. A space in which the microstructure is moved, that is, a movable space for the microstructure is formed by procecssing an insulating layer which is formed in a process of forming the semiconductor element. The movable space can be formed by forming the insulating layer having a plurality of openings and making the openings face each other to be overlapped each other. | 02-23-2012 |
| 20120056249 | INTERLAYER FOR ELECTRONIC DEVICES - Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as interlayers applied to fluoropolymer layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin interlayers and processes for preparing such polycycloolefin interlayers and electronic devices. | 03-08-2012 |
| 20120056250 | DYNAMIC SCHOTTKY BARRIER MOSFET DEVICE AND METHOD OF MANUFACTURE - A device for regulating a flow of electric current and its manufacturing method are provided. The device includes metal-insulator-semiconductor source-drain contacts forming Schottky barrier or Schottky-like junctions to the semiconductor substrate. The device includes an interfacial layer between the semiconductor substrate and a metal source and/or drain electrode, thereby dynamically adjusting a Schottky barrier height by applying different bias conditions. The dynamic Schottky barrier modulation provides increased electric current for low drain bias conditions, reducing the sub-linear turn-on characteristic of Schottky barrier MOSFET devices and improving device performance. | 03-08-2012 |
| 20120061736 | Transistor and Method for Forming the Same - The present invention relates to a stress-enhanced transistor and a method for forming the same. The method for forming the transistor according to the present invention comprises the steps of forming a mask layer on a semiconductor substrate on which a gate has been formed, so that the mask layer covers the gate and the semiconductor substrate; patterning the mask layer so as to expose at least a portion of each of a source region and a drain region; amorphorizing the exposed portions of the source region and the drain region; removing the mask layer; and annealing the semiconductor substrate so that a dislocation is formed in the exposed portion of each of the source region and the drain region. | 03-15-2012 |
| 20120061737 | SEMICONDUCTOR DEVICE, METHOD OF FABRICATING THE SAME, AND PATTERNING MASK UTILIZIED BY THE METHOD - A semiconductor device. The device comprises an active region isolated by an isolation structure on a substrate. The device further comprises a gate electrode extending across the active area and overlying the substrate, a pair of source region and drain region, disposed on either side of the gate electrode on the substrate in the active area, and a gate dielectric layer disposed between the substrate and the gate electrode. The gate dielectric layer comprises a relatively-thicker high voltage (HV) dielectric portion and a relatively-thinner low voltage (LV) dielectric portion, wherein the HV dielectric portion occupies a first intersection among the drain region, the isolation structure, and the gate electrode, and a second intersection among the source region, the isolation structure, and the gate electrode. | 03-15-2012 |
| 20120061738 | Gate Stack Structure, Semiconductor Device and Method for Manufacturing the Same - A gate stack structure comprises an isolation dielectric layer formed on and embedded into a gate. A sidewall spacer covers opposite side faces of the isolation dielectric layer, and the isolation dielectric layer located on an active region is thicker than the isolation dielectric layer located on a connection region. A method for manufacturing the gate stack structure comprises removing part of the gate in thickness, the thickness of the removed part of the gate on the active region is greater than the thickness of the removed part of the gate on the connection region so as to expose opposite inner walls of the sidewall spacer; forming an isolation dielectric layer on the gate to cover the exposed inner walls. There is also provided a semiconductor device and a method for manufacturing the same. The methods can reduce the possibility of short-circuit occurring between the gate and the second contact hole and can be compatible with the dual-contact-hole process. | 03-15-2012 |
| 20120068233 | TRANSISTORS HAVING STRESSED CHANNEL REGIONS AND METHODS OF FORMING TRANSISTORS HAVING STRESSED CHANNEL REGIONS - A method of forming a field effect transistor and a field effect transistor. The method includes (a) forming gate stack on a silicon layer of a substrate; (b) forming two or more SiGe filled trenches in the silicon layer on at least one side of the gate stack, adjacent pairs of the two or more SiGe filled trenches separated by respective silicon regions of the silicon layer; and (c) forming source/drains in the silicon layer on opposite sides of the gate stack, the source/drains abutting a channel region of the silicon layer under the gate stack. | 03-22-2012 |
| 20120068234 | METHOD FOR SELF-ALIGNING A STOP LAYER TO A REPLACEMENT GATE FOR SELF-ALIGNED CONTACT INTEGRATION - Semiconductor devices with replacement gate electrodes and integrated self aligned contacts are formed with enhanced gate dielectric layers and improved electrical isolation properties between the gate line and a contact. Embodiments include forming a removable gate electrode on a substrate, forming a self aligned contact stop layer over the electrode and the substrate, removing a portion of the self aligned contact stop layer over the electrode and the electrode itself leaving an opening, forming a replacement gate electrode of metal, in the opening, transforming an upper portion of the metal into a dielectric layer, and forming a self aligned contact. Embodiments include forming the contact stop layer of a dielectric material, and transforming the upper portion of the metal into a dielectric layer. Embodiments also include forming a hardmask layer over the removable gate electrode to protect the electrode during silicidation in source/drain regions of the semiconductor device. | 03-22-2012 |
| 20120074471 | Transistor Structure for Improved Static Control During Formation of the Transistor - A method of forming a shadow mask vapor deposited transistor includes shadow mask vapor depositing a semiconductor segment. An electrically conductive drain contact is shadow mask vapor deposited on a first part of the semiconductor segment and a first insulator is shadow mask vapor deposited on the drain contact. An electrically conductive source contact is shadow mask vapor deposited on a second part of the semiconductor segment spaced from the drain contact and a second insulator is shadow mask vapor deposited on the source contact. A third insulator is shadow mask vapor deposited over at least part of each of the first and second insulators and the semiconductor segment between the drain contact and the source contact. An electrically conductive gate contact is shadow mask vapor deposited on the third insulator and in spaced relation to the semiconductor segment between the drain contact and the source contact. | 03-29-2012 |
| 20120074472 | Power Semiconductor Device Having Gate Electrode Coupling Portions for Etchant Control - A general insulated gate power semiconductor active element with many gate electrodes arranged in parallel has a laminated structure including a barrier metal film and a thick aluminum electrode film formed over the gate electrodes via an interlayer insulating film. When the aluminum electrode film is embedded in between the gate electrodes in parallel, voids may be generated with the electrodes. Such voids allow the etchant to penetrate in wet etching, which may promote the etching up to a part of the electrode film in an active cell region which is to be left. Thus, an insulated gate power semiconductor device is provided to include gate electrodes protruding outward from the inside of the active cell region, and a gate electrode coupling portion for coupling the gate electrodes outside the active cell region. The gate electrode coupling portion is covered with a metal electrode covering the active cell region. | 03-29-2012 |
| 20120074473 | Semiconductor Device - A method for fabricating a semiconductor device comprises forming a partial-insulated substrate comprising an insulating region located below both a channel region of a cell transistor and one of a storage node contact region and a bit line contact region, and forming a cell transistor comprising a fin region on the partial-insulated substrate. | 03-29-2012 |
| 20120080729 | FIELD EFFECT TRANSISTOR - A lateral field-effect transistor capable of improving switching speed and reducing operationally defective products is provided. A gate wiring has a base, a plurality of fingers protruding from the base, and a connection connecting tips of adjacent fingers. The finger of the gate wiring is arranged between the finger of a source wiring and the finger of a drain wiring. The base of the gate wiring is arranged between the base of the source wiring and the fingers of the drain wiring and intersects with the fingers of the source wiring, with an insulating film interposed between the base of the gate wiring and the fingers. | 04-05-2012 |
| 20120086052 | HIGH VOLTAGE MOS DEVICE AND METHOD FOR MAKING THE SAME - A high-voltage metal-oxide-semiconductor (HVMOS) device may include a source, a drain, a gate positioned proximate to the source, a drift region disposed substantially between the drain and a region of the gate and the source, and a self shielding region disposed proximate to the drain. A corresponding method is also provided. | 04-12-2012 |
| 20120086053 | TRANSISTOR HAVING NOTCHED FIN STRUCTURE AND METHOD OF MAKING THE SAME - A transistor includes a notched fin covered under a shallow trench isolation layer. One or more notch may be used, the size of which may vary along a lateral direction of the fin. In some embodiments, The notch is formed using anisotropic wet etching that is selective according to silicon orientation. Example wet etchants are tetramethylammonium hydroxide (TMAH) or potassium hydroxide (KOH). | 04-12-2012 |
| 20120086054 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MAKING THE SAME - A semiconductor structure is disclosed. The semiconductor structure includes a gate structure disposed on a substrate, a source and a drain respectively disposed in the substrate at two sides of the gate structure, a source contact plug disposed above the source and electrically connected to the source and a drain contact plug disposed above the drain and electrically connected to the drain. The source contact plug and the drain contact plug have relatively asymmetric element properties. | 04-12-2012 |
| 20120086055 | DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE - Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of trenches in a pad film to form raised portions. The method further includes depositing a hard mask in the trenches and over the upper pad film. The method further includes forming a plurality of fins including the raised portions and a second plurality of fins including the hard mask deposited in the trenches, each of which are separated by a deep trench. The method further includes removing the hard mask on the plurality of fins including the raised portions and the second plurality of fins resulting in a dual height fin array. The method further includes forming gate electrodes within each deep trench between each fin of the dual height fin array, burying the second plurality of fins and abutting sides of the plurality of fins including the raised portions. The plurality of fins including the raised portions electrically and physically isolate adjacent gate electrode of the gate electrodes. | 04-12-2012 |
| 20120086056 | Superior Integrity of a High-K Gate Stack by Forming a Controlled Undercut on the Basis of a Wet Chemistry - In sophisticated semiconductor devices, the encapsulation of sensitive gate materials, such as a high-k dielectric material and a metal-containing electrode material, which are provided in an early manufacturing stage may be achieved by forming an undercut gate configuration. To this end, a wet chemical etch sequence is applied after the basic patterning of the gate layer stack, wherein at least ozone-based and hydrofluoric acid-based process steps are performed in an alternating manner, thereby achieving a substantially self-limiting removal behavior. | 04-12-2012 |
| 20120086057 | NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor memory device includes a gate insulating layer formed over a semiconductor substrate; a first conductive layer pattern for select transistors and memory cells formed on the gate insulating layer; a dielectric layer formed on the first conductive layer pattern; a second conductive layer pattern formed on the dielectric layer on the first conductive layer pattern for the memory cells; and select lines made of material having lower resistance than the second conductive layer pattern and coupled to the first conductive layer pattern for the select transistors. | 04-12-2012 |
| 20120086058 | TUNNEL FIELD EFFECT TRANSISTOR - A tunnel field effect transistor and a method of making the same. The transistor includes a semiconductor substrate. The transistor also includes a gate located on a major surface of the substrate. The transistor further includes a drain of a first conductivity type. The transistor also includes a source of a second conductivity type extending beneath the gate. The source is separated from the gate by a channel region and a gate dielectric. The transistor is operable to allow charge carrier tunnelling from an inversion layer through an upper surface of the source. | 04-12-2012 |
| 20120098041 | SELF-ALIGNED BODY FULLY ISOLATED DEVICE - A device having a self-aligned body on a first side of a gate is disclosed. The self-aligned body helps to achieve very low channel length for low Rdson. The self-aligned body is isolated, enabling to bias the body at different bias potentials. The device may be configured into a finger architecture having a plurality of transistors with commonly coupled, sources, commonly coupled gates, and commonly coupled drains to achieve high drive current outputs. | 04-26-2012 |
| 20120098042 | SEMICONDUCTOR DEVICE WITH REDUCED JUNCTION LEAKAGE AND AN ASSOCIATED METHOD OF FORMING SUCH A SEMICONDUCTOR DEVICE - Disclosed is a semiconductor device having a p-n junction with reduced junction leakage in the presence of metal silicide defects that extend to the junction and a method of forming the device. Specifically, a semiconductor layer having a p-n junction is formed. A metal silicide layer is formed on the semiconductor layer and a dopant is implanted into the metal silicide layer. An anneal process is performed causing the dopant to migrate toward the metal silicide-semiconductor layer interface such that the peak concentration of the dopant will be within a portion of the metal silicide layer bordering the metal silicide-semiconductor layer interface and encompassing the defects. As a result, the silicide to silicon contact is effectively engineered to increase the Schottky barrier height at the defect, which in turn drastically reduces any leakage that would otherwise occur, when the p-n junction is in reverse polarity. | 04-26-2012 |
| 20120098043 | SEMICONDUCTOR DEVICE HAVING METAL GATE AND MANUFACTURING METHOD THEREOF - A method of manufacturing a semiconductor device having metal gate includes providing a substrate having a semiconductor device and a contact etch stop layer (CESL) and a dielectric layer covering the semiconductor device formed thereon, wherein the semiconductor device having at least a dummy gate, performing a dummy gate removal step to form at least an opening in the semiconductor device and to simultaneously remove a portion of the CESL such that a top surface of the CESL is lower than the semiconductor device and the dielectric layer and a plurality of recesses is obtained, and performing a recess elimination step to form a substantially even surface of the dielectric layer. | 04-26-2012 |
| 20120104469 | REPLACEMENT GATE MOSFET WITH A HIGH PERFORMANCE GATE ELECTRODE - In a replacement gate scheme, a continuous material layer is deposited on a bottom surface and a sidewall surface in a gate cavity. A vertical portion of the continuous material layer is removed to form a gate component of which a vertical portion does not extend to a top of the gate cavity. The gate component can be employed as a gate dielectric or a work function metal portion to form a gate structure that enhances performance of a replacement gate field effect transistor. | 05-03-2012 |
| 20120104470 | REPLACEMENT GATE MOSFET WITH RAISED SOURCE AND DRAIN - A disposable dielectric spacer is formed on sidewalls of a disposable material stack. Raised source/drain regions are formed on planar source/drain regions by selective epitaxy. The disposable dielectric spacer is removed to expose portions of a semiconductor layer between the disposable material stack and the source/drain regions including the raised source/drain regions. Dopant ions are implanted to form source/drain extension regions in the exposed portions of the semiconductor layer. A gate-level dielectric layer is deposited and planarized. The disposable material stack is removed and a gate stack including a gate dielectric and a gate electrode fill a cavity formed by removal of the disposable material stack. Optionally, an inner dielectric spacer may be formed on sidewalls of the gate-level dielectric layer within the cavity prior to formation of the gate stack to tailor a gate length of a field effect transistor. | 05-03-2012 |
| 20120104471 | CONTACT STRUCTURE FOR REDUCING GATE RESISTANCE AND METHOD OF MAKING THE SAME - A semiconductor device having a gate on a substrate with source/drain (S/D) regions adjacent to the gate. A first dielectric layer overlays the gate and the S/D regions, the first dielectric layer having first contact holes over the S/D regions with first contact plugs formed of a first material and the first contact plugs coupled to respective S/D regions. A second dielectric layer overlays the first dielectric layer and the first contact plugs. A second contact hole formed in the first and second dielectric layers is filled with a second contact plug formed of a second material. The second contact plug is coupled to the gate and interconnect structures formed in the second dielectric layer, the interconnect structures coupled to the first contact plugs. The second material is different from the first material, and the second material has an electrical resistance lower than that of the first material. | 05-03-2012 |
| 20120104472 | FIN-LIKE FIELD EFFECT TRANSISTOR (FINFET) DEVICE AND METHOD OF MANUFACTURING SAME - A FinFET device and method for fabricating a FinFET device is disclosed. An exemplary method includes providing a semiconductor substrate; forming a first fin structure and a second fin structure over the semiconductor substrate; forming a gate structure over a portion of the first and second fin structures, such that the gate structure traverses the first and second fin structures; epitaxially growing a first semiconductor material on exposed portions of the first and second fin structures, such that the exposed portions of the first and second fin structures are merged together; and epitaxially growing a second semiconductor material over the first semiconductor material. | 05-03-2012 |
| 20120104473 | TRANSISTOR AND METHOD FOR FORMING THE SAME - The present invention relates to a transistor and the method for forming the same. The transistor of the present invention comprises a semiconductor substrate; a gate dielectric layer formed on the semiconductor substrate; a gate formed on the gate dielectric layer; a channel region under the gate dielectric layer; and a source region and a drain region located in the semiconductor substrate and on respective sides of the channel region, wherein at least one of the source and drain regions comprises a set of dislocations that are adjacent to the channel region and arranged in the direction perpendicular to a top surface of the semiconductor substrate, and the set of dislocations comprises at least two dislocations. | 05-03-2012 |
| 20120104474 | TRANSISTOR AND METHOD FOR FORMING THE SAME - The present invention relates to a transistor and the method for forming the same. The transistor of the present invention comprises a semiconductor substrate; a gate dielectric layer formed on the semiconductor substrate; a gate formed on the gate dielectric layer; a source region and a drain region located in the semiconductor substrate and on respective sides of the gate, wherein at least one of the source region and the drain region comprises at least one dislocation; an epitaxial semiconductor layer containing silicon located on the source region and the drain region; and a metal silicide layer on the epitaxial semiconductor layer. | 05-03-2012 |
| 20120104475 | FIELD EFFECT TRANSISTORS (FETS) AND METHODS OF MANUFACTURE - An improved field effect transistors (FETs) and methods of manufacturing the field effect transistors (FETs) are provided. The method of manufacturing a zero capacitance random access memory cell (ZRAM) includes comprises forming a finFET on a substrate and enhancing a storage capacitance of the finFET. The enhancement can be by either adding a storage capacity to the finFET or altering a portion of the finFET after formation of a fin body of the finFET. | 05-03-2012 |
| 20120104476 | ELECTRONIC DEVICE WITH ASYMMETRIC GATE STRAIN - The use of strained gate electrodes in integrated circuits results in a transistor having improved carrier mobility, improved drive characteristics, and reduced source drain junction leakage. The gate electrode strain can be obtained through non symmetric placement of stress inducing structures as part of the gate electrode. | 05-03-2012 |
| 20120104477 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A semiconductor device fabrication method includes the steps of (a) forming a dielectric film on a semiconductor substrate; (b) etching the dielectric film by a dry process; and (c) supplying thermally decomposed atomic hydrogen onto the semiconductor substrate under a prescribed temperature condition, to remove a damaged layer produced in the semiconductor substrate due to the dry process. | 05-03-2012 |
| 20120112249 | HIGH PERFORMANCE SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method for fabricating a semiconductor device employs the way of first performing thermal annealing to the source/drain regions and then forming an ion-implanted region, such as a retrograde well. The method comprises the steps of: removing said dummy gate so as to expose said dummy gate dielectric layer and form an opening; performing ion implantation on the substrate from the opening to form an ion-implanted region; removing the dummy gate dielectric layer; performing thermal annealing to activate the dopants of the ion-implanted region; and depositing a new gate dielectric layer and a new metal gate in the opening in sequence, wherein the formed new gate dielectric layer covers the substrate and the inner walls of the sidewall spacers. By means of the present invention, it is possible to avoid inappropriately introducing the dopants of the ion-implanted region into the source region and the drain region, such that the profile of the ion-implanted region does not overlap with the dopants of the source/drain regions, thereby avoiding increasing the band-to-band leakage current in a MOSFET device. As a result, the performance of the device is improved. | 05-10-2012 |
| 20120112250 | Semiconductor Device Including Graphene And Method Of Manufacturing The Semiconductor Device - In a semiconductor device including graphene, a gate insulating layer may be formed between a gate electrode and a graphene layer, and an interlayer insulating layer may be formed under a portion of the graphene layer under which the gate insulating layer is not formed. The gate insulating layer may include a material that has higher dielectric permittivity than the interlayer insulating layer. | 05-10-2012 |
| 20120112251 | Reduction of random telegraph signal (RTS) and 1/f noise in silicon MOS devices, circuits, and sensors - The effects of random telegraph noise signal (RTS) or equivalently l/f noise on MOS devices, circuits, and sensors is described. Techniques are disclosed for minimizing this RTS and low frequency noise by minimizing the number of ionized impurity atoms in the wafer, substrate, well, pillar, or fin behind the channel of the MOS transistors. This noise reduction serves to reduce the errors in devices, sensors, and analog integrated circuits and error rates in digital integrated circuits and memories. | 05-10-2012 |
| 20120112252 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a method for manufacturing a semiconductor structure, which lies in covering a first dielectric layer with a second dielectric layer, forming a first contact hole with a small inner diameter within the second dielectric layer first, then etching the first dielectric layer to form a second contact hole with a much great inner diameter, and finally filling a conductive material into the first contact hole and the second contact hole to form contact plugs. Accordingly, the present invention further provides a semiconductor structure favorable for reducing contact resistance. | 05-10-2012 |
| 20120119265 | SOURCE TIP OPTIMIZATION FOR HIGH VOLTAGE TRANSISTOR DEVICES - The present disclosure provides a method for fabricating a high-voltage semiconductor device. The method includes designating first, second, and third regions in a substrate. The first and second regions are regions where a source and a drain of the semiconductor device will be formed, respectively. The third region separates the first and second regions. The method further includes forming a slotted implant mask layer at least partially over the third region. The method also includes implanting dopants into the first, second, and third regions. The slotted implant mask layer protects portions of the third region therebelow during the implanting. The method further includes annealing the substrate in a manner to cause diffusion of the dopants in the third region. | 05-17-2012 |
| 20120119266 | Stressor in Planar Field Effect Transistor Device - A field effect transistor device includes a gate stack portion disposed on a substrate, and a channel region in the substrate having a depth partially defined by the gate stack portion and a silicon region of the substrate, the silicon region having a sloped profile such that a distal regions of the channel region have greater depth than a medial region of the channel region. | 05-17-2012 |
| 20120119267 | SEMICONDUCTOR DEVICE PRODUCTION METHOD AND SEMICONDUCTOR DEVICE - A semiconductor device production method includes: forming a semiconductor region including a first region, a second region connecting with the first region and having a width smaller than that of the first region, and a third region connecting with the second region and having a width smaller than that of the second region; forming a gate electrode including a first part crossing the third region and a second part extending from the first part across the first region; forming a side wall insulation film on the gate electrode to cover part of the second region while exposing the remaining part of the second region; implanting a second conductivity type impurity into the first region and the remaining part of the second region; performing heat treatment; removing part of the side wall insulation film, and forming a silicide layer on the first region and the remaining part of the second region. | 05-17-2012 |
| 20120119268 | Mixed Junction Source/Drain Field-Effect-Transistor and Method of Making the Same - The present invention is related to microelectronic technologies, and discloses specifically a mixed junction source/drain field-effect-transistor and methods of making the same. The field-effect-transistor with mixed junction source/drain comprises a semiconductor substrate, a gate structure, sidewalls, and source and drain regions having mixed junction structures, which are combinations of Schottky and P-N junctions. Compared with Schottky junction field-effect-transistors, the mixed junction source/drain field-effect-transistor described in the present invention has the characteristics of relatively low source/drain leakage. At the same time, this field-effect-transistor has lower source/drain series resistances than that associated with P-N junction field-effect-transistors. | 05-17-2012 |
| 20120119269 | METHOD FOR PRODUCING ELECTRONIC DEVICE, ELECTRONIC DEVICE, SEMICONDUCTOR DEVICE, AND TRANSISTOR - A technique is provided which prevents an increase in the resistivity of a conductive wiring film. A conductive layer containing Ca in a content rate of 0.3 atom % or more is provided on the surfaces of each of conductive wiring films which are to be exposed to a gas containing a Si atom in a chemical structure at a high temperature. When a gate insulating layer or a protection film containing Si is formed on the surface of the conductive layer, the Si atoms do not diffuse into the conductive layer and a resistance value does not increase, even if the conductive layer is exposed to the raw material gas containing Si in a chemical structure . Further, a CuCaO layer can be formed as an adhesive layer for preventing Si diffusion from a glass substrate or a silicon semiconductor. | 05-17-2012 |
| 20120126294 | WAFER FILL PATTERNS AND USES - A method of forming a semiconductor device having a substrate, an active region and an inactive region includes: forming a hardmask layer over the substrate; transferring a first pattern into the hardmask layer in the active region of the semiconductor device; forming one or more fills in the inactive region; forming a cut-away hole within, covering, or partially covering, the one or more fills to expose a portion of the hardmask layer, the exposed portion being within the one or more fills; and exposing the hardmask layer to an etchant to divide the first pattern into a second pattern including at least two separate elements. | 05-24-2012 |
| 20120126295 | BORDERLESS CONTACT FOR REPLACEMENT GATE EMPLOYING SELECTIVE DEPOSITION - A self-aligned gate cap dielectric can be employed to form a self-aligned contact to a diffusion region, while preventing electrical short with a gate conductor due to overlay variations. In one embodiment, an electroplatable or electrolessly platable metal is selectively deposited on conductive materials in a gate electrode, while the metal is not deposited on dielectric surfaces. The metal portion on top of the gate electrode is converted into a gate cap dielectric including the metal and oxygen. In another embodiment, a self-assembling monolayer is formed on dielectric surfaces, while exposing metallic top surfaces of a gate electrode. A gate cap dielectric including a dielectric oxide is formed on areas not covered by the self-assembling monolayer. The gate cap dielectric functions as an etch-stop structure during formation of a via hole, so that electrical shorting between a contact via structure formed therein and the gate electrode is avoided. | 05-24-2012 |
| 20120126296 | INTEGRATED CIRCUITS AND FABRICATION METHODS THEREOF - A method of forming an integrated circuit includes forming a gate structure over a substrate. Portions of the substrate are removed to form recesses adjacent to the gate structure. A silicon-containing material structure is formed in each of the recesses. The silicon-containing material structure has a first region and a second region, the second region is closer to the gate structure than the first region, and the first region is thicker than the second region | 05-24-2012 |
| 20120126297 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device in which a metal silicide layer is formed by a salicide process is improved in reliability. By a salicide process according to a partial reaction method, metal silicide layers are formed over respective surfaces of gate electrodes, n | 05-24-2012 |
| 20120132966 | SEMICONDUCTOR STRUCTURES HAVING IMPROVED CONTACT RESISTANCE - Self-assembled polymer technology is used to form at least one ordered nanosized pattern within material that is present in a conductive contact region of a semiconductor structure. The material having the ordered, nanosized pattern is a conductive material of an interconnect structure or semiconductor source and drain diffusion regions of a field effect transistor. The presence of the ordered, nanosized pattern material within the contact region increases the overall area (i.e., interface area) for subsequent contact formation which, in turn, reduces the contact resistance of the structure. The reduction in contact resistance in turn improves the flow of current through the structure. In addition to the above, the inventive methods and structures do not affect the junction capacitance of the structure since the junction area remains unchanged. | 05-31-2012 |
| 20120132967 | THROUGH SILICON VIA AND METHOD OF FABRICATING SAME - A through silicon via structure and a method of fabricating the through silicon via. The method includes: (a) forming a trench in a silicon substrate, the trench open to a top surface of the substrate; (b) forming a silicon dioxide layer on sidewalls of the trench, the silicon dioxide layer not filling the trench; (c) filling remaining space in the trench with polysilicon; after (c), (d) fabricating at least a portion of a CMOS device in the substrate; (e) removing the polysilicon from the trench, the dielectric layer remaining on the sidewalls of the trench; (f) re-filling the trench with an electrically conductive core; and after (f), (g) forming one or more wiring layers over the top surface of the substrate, a wire of a wiring level of the one or more wiring levels closet to the substrate contacting a top surface of the conductive core. | 05-31-2012 |
| 20120139014 | STRUCTURE AND METHOD FOR LOW TEMPERATURE GATE STACK FOR ADVANCED SUBSTRATES - A low-temperature metal gate stack for a field-effect transistor that is electrically activated at temperatures below 1000° C. The metal gate stack is composed of low melting materials that can be deposited by physical vapor deposition (PVD) onto a substrate. | 06-07-2012 |
| 20120139015 | METAL SEMICONDUCTOR ALLOY CONTACT WITH LOW RESISTANCE - A method of forming a semiconductor device is provided that includes forming a gate structure on a channel portion of a semiconductor substrate, forming an interlevel dielectric layer over the gate structure, and forming a opening through the interlevel dielectric layer to an exposed surface of the semiconductor substrate containing at least one of the source region and the drain region. A metal semiconductor alloy contact is formed on the exposed surface of the semiconductor substrate. At least one dielectric sidewall spacer is formed on sidewalls of the opening. An interconnect is formed within the opening in direct contact with the metal semiconductor alloy contact. | 06-07-2012 |
| 20120139016 | SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME - A semiconductor device and a method for forming the same are provided. The method includes: providing a substrate having a gate structure and first spacers on both sidewalls of the gate structure formed on a top surface of the substrate; forming first openings in the substrate by using the first spacers as a mask, wherein the first openings are located on both sides of the gate structure; forming second openings by etching the first openings with an etching gas, wherein each of the second openings is an expansion of a corresponding one of the first openings toward the gate structure and extends to underneath an adjacent first spacer; and forming epitaxial layers in the first openings and the second openings. | 06-07-2012 |
| 20120139017 | WIRELESS CHIP - The invention provides a wireless chip which can secure the safety of consumers while being small in size, favorable in communication property, and inexpensive, and the invention also provides an application thereof. Further, the invention provides a wireless chip which can be recycled after being used for managing the manufacture, circulation, and retail. A wireless chip includes a layer including a semiconductor element, and an antenna. The antenna includes a first conductive layer, a second conductive layer, and a dielectric layer sandwiched between the first conductive layer and the second conductive layer, and has a spherical shape, an ovoid shape, an oval spherical shape like a go stone, an oval spherical shape like a rugby ball, or a disc shape, or has a cylindrical shape or a polygonal prism shape in which an outer edge portion thereof has a curved surface. | 06-07-2012 |
| 20120146106 | SEMICONDUCTOR DEVICES HAVING THROUGH-CONTACTS AND RELATED FABRICATION METHODS - Apparatus for semiconductor device structures and related fabrication methods are provided. One method for fabricating a semiconductor device structure involves forming a layer of dielectric material overlying a doped region formed in a semiconductor substrate adjacent to a gate structure and forming a conductive contact in the layer of dielectric material. The conductive contact overlies and electrically connects to the doped region. The method continues by forming a second layer of dielectric material overlying the conductive contact, forming a voided region in the second layer overlying the conductive contact, forming a third layer of dielectric material overlying the voided region, and forming another voided region in the third layer overlying at least a portion of the voided region in the second layer. The method continues by forming a conductive material that fills both voided regions to contact the conductive contact. | 06-14-2012 |
| 20120146107 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - Disclosed are a semiconductor device and a method of manufacturing the same. In the semiconductor device according to an exemplary embodiment of the present disclosure, at the time of forming a source electrode, a drain electrode, a field plate electrode, and a gate electrode on a substrate having a heterojunction structure such as AlGaN/GaN, the field plate electrode made of the same metal as the gate electrode is formed on the side surface of a second support part positioned below a head part of the gate electrode so as to prevent the gate electrode from collapsing and improve high-frequency and high-voltage characteristic of the semiconductor device. | 06-14-2012 |
| 20120146108 | CHIP PACKAGE AND METHOD FOR FORMING THE SAME - An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and an opposite second surface; a drain region located in the semiconductor substrate; a source region located in the semiconductor substrate; a gate located on the semiconductor substrate or at least partially buried in the semiconductor substrate, wherein a gate dielectric layer is between the gate and the semiconductor substrate; a drain conducting structure disposed on the first surface of the semiconductor substrate and electrically connected to the drain region; a source conducting structure disposed on the second surface of the semiconductor substrate and electrically connected to the source region; and a gate conducting structure disposed on the first surface of the semiconductor substrate and electrically connected to the gate. | 06-14-2012 |
| 20120146109 | SEMICONDUCOR DEVICE - A semiconductor device such as a transistor with an excellent OFF characteristic even when a channel is short is provided. A periphery of a source is surrounded by an extension region and a halo region, a periphery of a drain is surrounded by an extension region and a halo region, and a substrate with low impurity concentration is not in contact with the source or the drain. Moreover, a high-work-function electrode is provided via a gate insulator, and electrons entering the vicinity of a surface of the substrate from the extension regions are eliminated. With such a structure, the impurity concentration of the channel region can be decreased even when the channel is short, and a favorable transistor characteristic can be obtained. | 06-14-2012 |
| 20120146110 | SEMICONDUCTOR DEVICE AND FORMING METHOD OF THE SAME - A semiconductor device includes contact structures and conductive wires formed over the contact structures and coupled to the respective contact structures. Part of each of the conductive wires crosses the contact structure. | 06-14-2012 |
| 20120146111 | CHIP PACKAGE AND MANUFACTURING METHOD THEREOF - An embodiment of the invention provides a chip package including a semiconductor substrate, a drain electrode, a source electrode and a gate electrode. The semiconductor substrate has a first surface and an opposite second surface wherein the second surface has a recess. The drain electrode is disposed on the first surface and covers the recess. The source electrode is disposed on the second surface in a position corresponding to the drain electrode covering the recess. The gate electrode is disposed on the second surface. An embodiment of the invention further provides a manufacturing method of a chip package. | 06-14-2012 |
| 20120146112 | FINFET WITH REDUCED GATE TO FIN OVERLAY SENSITIVITY - Embodiments of the invention provide a relatively uniform width fin in a Fin Field Effect Transistors (FinFETs) and apparatus and methods for forming the same. A fin structure may be formed such that the surface of a sidewall portion of the fin structure is normal to a first crystallographic direction. Tapered regions at the end of the fin structure may be normal to a second crystal direction. A crystallographic dependent etch may be performed on the fin structure. The crystallographic dependent etch may remove material from portions of the fin normal to the second crystal direction relatively faster, thereby resulting in a relatively uniform width fin structure. | 06-14-2012 |
| 20120146113 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating a semiconductor device, the method comprising: forming a metal containing film on a substrate; exposing the metal containing film to an ammonia radical in a reaction chamber; evacuating gas generated in the exposing by supplying an inert gas into the reaction chamber; and after repeating the exposing and the supplying a predetermined number of times, forming a silicon nitride film covering the metal containing film in the reaction chamber without atmospheric exposure. | 06-14-2012 |
| 20120146114 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A method of manufacturing a semiconductor device according to an embodiment includes: forming a plurality of semiconductor layers located at a distance from one another on a first insulating film; forming a gate insulating film that covers both side faces and an upper face of each of the semiconductor layers; forming a gate electrode of a polysilicon film to cover the gate insulating film of each of the semiconductor layers; forming a second insulating film on an entire surface; exposing an upper face of the gate electrode by performing selective etching on a portion of the second insulating film; siliciding the gate electrode; and forming a stress applying film that applies a stress in a direction perpendicular to the extending direction of each of the semiconductor layers and parallel to an upper face of the first insulating film. | 06-14-2012 |
| 20120153362 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A method comprising, introducing a dopant type into a semiconductor layer to define a well region of the semiconductor layer, the well region comprising a channel region, and introducing a dopant type into the well region to define a multiple implant region substantially coinciding with the well region but excluding the channel region. | 06-21-2012 |
| 20120153363 | SEMICONDUCTOR DEVICE WITH BURIED GATES AND FABRICATION METHOD THEREOF - A semiconductor device includes a substrate having a cell region and a peripheral region, a buried gate formed over the substrate of the cell region, a peripheral gate formed over the substrate of the peripheral region and comprising a conductive layer, an inter-layer dielectric layer that covers the substrate, and a peripheral bit line formed inside the inter-layer dielectric layer and contacting the conductive layer. | 06-21-2012 |
| 20120153364 | OXIDE MATERIAL AND SEMICONDUCTOR DEVICE - An object is to provide a material suitably used for a semiconductor included in a transistor, a diode, or the like. Another object is to provide a semiconductor device including a transistor in which the condition of an electron state at an interface between an oxide semiconductor film and a gate insulating film in contact with the oxide semiconductor film is favorable. Further, another object is to manufacture a highly reliable semiconductor device by giving stable electric characteristics to a transistor in which an oxide semiconductor film is used for a channel. A semiconductor device is formed using an oxide material which includes crystal with c-axis alignment, which has a triangular or hexagonal atomic arrangement when seen from the direction of a surface or an interface and rotates around the c-axis. | 06-21-2012 |
| 20120153365 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a first buried bit line ( | 06-21-2012 |
| 20120153366 | Semiconductor Device Comprising Self-Aligned Contact Bars and Metal Lines With Increased Via Landing Regions - When forming metal lines of the metal zero level, a reduced bottom width and an increased top width may be achieved by using appropriate patterning regimes, for instance using a spacer structure after forming an upper trench portion with a top width, or forming the lower portion of the trenches and subsequently applying a further mask and etch regime in which the top width is implemented. In this manner, metal lines connecting to self-aligned contact bars may be provided so as to exhibit a bottom width of 20 nm and less, while the top width may allow reliable contact to any vias of the metallization system. | 06-21-2012 |
| 20120161209 | ELECTRONIC INTERCONNECTS AND DEVICES WITH TOPOLOGICAL SURFACE STATES AND METHODS FOR FABRICATING SAME - An interconnect is disclosed with enhanced immunity of electrical conductivity to defects. The interconnect includes a material with charge carriers having topological surface states. Also disclosed is a method for fabricating such interconnects. Also disclosed is an integrated circuit including such interconnects. Also disclosed is a gated electronic device including a material with charge carriers having topological surface states. | 06-28-2012 |
| 20120161210 | Embedding Metal Silicide Contact Regions Reliably Into Highly Doped Drain and Source Regions by a Stop Implantation - When forming metal silicide regions, such as nickel silicide regions, in sophisticated transistors requiring a shallow drain and source dopant profile, superior controllability may be achieved by incorporating a silicide stop layer. To this end, in some illustrative embodiments, a carbon species may be incorporated on the basis of an implantation process in order to significantly modify the metal diffusion during the silicidation process. Consequently, an increased thickness of the metal silicide may be provided, while not unduly increasing the probability of creating contact failures. | 06-28-2012 |
| 20120161211 | SEMICONDUCTOR DEVICE - A semiconductor device includes an isolation pattern disposed on a substrate, the isolation pattern defining an active part, a gate pattern crossing the active part on the substrate, the gate pattern including a dielectric pattern and a first conductive pattern, and the dielectric pattern being between the active part and the first conductive pattern, a pair of doping regions in the active part adjacent to side walls of the gate pattern, the gate pattern being between the pair of doping regions, and a diffusion barrier element injection region disposed in an upper region of the active part. | 06-28-2012 |
| 20120161212 | CONTINUOUS METAL SEMICONDUCTOR ALLOY VIA FOR INTERCONNECTS - A contact structure is disclosed in which a continuous metal semiconductor alloy is located within a via contained within a dielectric material. The continuous semiconductor metal alloy is in direct contact with an upper metal line of a first metal level located atop the continuous semiconductor metal alloy and at least a surface of each source and drain diffusion region located beneath the continuous metal semiconductor alloy. The continuous metal semiconductor alloy includes a lower portion that is contained within an upper surface of each source and drain region, and a vertical pillar portion extending upward from the lower portion. | 06-28-2012 |
| 20120168829 | MOS TRANSISTOR AND METHOD FOR FORMING THE SAME - The invention provides a MOS transistor and a method for forming the MOS transistor. The MOS transistor includes a semiconductor substrate; a gate stack on the semiconductor substrate, and including a gate dielectric layer and a gate electrode on the semiconductor substrate in sequence; a source region and a drain region, respectively at sidewalls of the gate stack sidewalls of the gate stack and in the semiconductor; sacrificial metal spacers on sidewalls of the gate stack sidewalls of the gate stack, and having tensile stress or compressive stress. This invention scales down the equivalent oxide thickness, improves uniformity of device performance, raises carrier mobility and promotes device performance. | 07-05-2012 |
| 20120168830 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device according to an embodiment includes: a substrate; a first semiconductor layer formed on the substrate and having a strain; a second and a third semiconductor layers formed at a distance from each other on the first semiconductor layer, and having a different lattice constant from a lattice constant of the first semiconductor layer; a gate insulating film formed on a first portion of the first semiconductor layer, the first portion being located between the second semiconductor layer and the third semiconductor layer; and a gate electrode formed on the gate insulating film. At least one of outer surface regions of the second semiconductor layer and a second portion of the first semiconductor layer is a first silicide region, and at least one of outer surface regions of the third semiconductor layer and a third portion of the first semiconductor layer is a second silicide region, the second and third portions being located immediately below the second and third semiconductor layers respectively. | 07-05-2012 |
| 20120168831 | NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating a non-volatile memory device includes: providing a substrate which includes a cell region where a plurality of memory cells are to be formed and a peripheral circuit region where a plurality of peripheral circuit devices are to be formed; forming the memory cells that are stacked perpendicularly to the substrate of the cell region; and forming a first conductive layer for forming a gate electrode of a selection transistor over the memory cells while forming the first conductive layer in the peripheral circuit region simultaneously, wherein the first conductive layer of the peripheral circuit region functions as a resistor body of at least one peripheral circuit device of the peripheral circuit devices. | 07-05-2012 |
| 20120168832 | ASYMMETRIC FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (R | 07-05-2012 |
| 20120168833 | FORMATION OF FINFET GATE SPACER - Gate spacers are formed in FinFETS having a bottom portion of a first material extending to the height of the fins, and a top portion of a second material extending above the fins. An embodiment includes forming a fin structure on a substrate, the fin structure having a height and having a top surface and side surfaces, forming a gate substantially perpendicular to the fin structure over a portion of the top and side surfaces, for example over a center portion, forming a planarizing layer over the gate, the fin structure, and the substrate, removing the planarizing layer from the substrate, gate, and fin structure down to the height of the fin structure, and forming spacers on the fin structure and on the planarizing layer, adjacent the gate. | 07-05-2012 |
| 20120168834 | FIELD EFFECT TRANSISTOR (FET) AND METHOD OF FORMING THE FET WITHOUT DAMAGING THE WAFER SURFACE - Disclosed are a field effect transistor structure and a method of forming the structure. A gate stack is formed on the wafer above a designated channel region. Spacer material is deposited and anisotropically etched until just prior to exposing any horizontal surfaces of the wafer or gate stack, thereby leaving relatively thin horizontal portions of spacer material on the wafer surface and relatively thick vertical portions of spacer material on the gate sidewalls. The remaining spacer material is selectively and isotropically etched just until the horizontal portions of spacer material are completely removed, thereby leaving only the vertical portions of the spacer material on the gate sidewalls. This selective isotropic etch removes the horizontal portions of spacer material without damaging the wafer surface. Raised epitaxial source/drain regions can be formed on the undamaged wafer surface adjacent to the gate sidewall spacers in order to tailor source/drain resistance values. | 07-05-2012 |
| 20120175688 | Semiconductor Package with Reduced On-Resistance and Top Metal Spreading Resistance with Application to Power Transistor Packaging - Some exemplary embodiments of a semiconductor package including a semiconductor device having electrodes on opposite major surfaces connectable to a planar support surface without a bondwire and a control electrode disposed in a corner position for reducing top-metal spreading resistance and device on-resistance have been disclosed. One exemplary structure comprises a semiconductor device having a first major surface including a first electrode and a second major surface including a second electrode and a control electrode, wherein the control electrode is disposed in a corner of the second major surface, and wherein the first electrode, the second electrode, and the control electrode are electrically connectable to a planar support surface without a bondwire. The pads of the device may be arranged in a balanced grid to maintain device stability during integration. A minimum gap distance between die pads allows the placement of vias in the planar support surface. | 07-12-2012 |
| 20120175689 | HYDROGEN PASSIVATION OF INTEGRATED CIRCUITS - An integrated circuit with a passivation trapping layer. An integrated circuit with a hydrogen or deuterium releasing layer underlying a passivation trapping layer. Method for forming an integrated circuit having a hydrogen or deuterium releasing layer. Method for forming an integrated circuit having a passivation trapping layer. | 07-12-2012 |
| 20120181584 | Resistive Field Effect Transistor Having an Ultra-Steep Subthreshold Slope and Method for Fabricating the Same - The invention discloses a resistive field effect transistor (ReFET) having an ultra-steep subthreshold slope, which relates to a field of field-effect-transistor logic device and circuit in CMOS ultra-large-scale-integrated circuit (ULSI). The resistive field effect transistor comprises a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a doped source region and a doped drain region, wherein the control gate is configured to adopt a stacked gate structure in which a bottom layer or a bottom electrode layer, a middle layer or a resistive material layer, and a top layer or a top electrode layer are sequentially formed. Compared with the existing methods for breaking the conventional subthreshold slope limititation, the device of the invention has a larger on-current, a lower operation voltage, and a better subthreshold feature. | 07-19-2012 |
| 20120181585 | Combined-source Mos Transistor with Comb-shaped Gate, and Method for Manufacturing the Same - The present invention discloses a combined-source MOS transistor with a Schottky Barrier and a comb-shaped gate structure, and a method for manufacturing the same. The combined-source MOS transistor includes: a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a highly-doped source region and a highly-doped drain region, wherein a Schottky source region is connected to a side of the highly-doped source region which is far from a channel, one end of the control gate extends to the highly-doped source region, the extended gate region is an extension gate in a form of a comb-shaped and the original control gate region is a main gate; an active region covered by the extension gate is also a channel region, and is a substrate material; the highly-doped source region which is formed by highly doping is located on both sides of each comb finger of the extension gate; and a Schottky junction is formed at a location where the Schottky source region and the channel under the extension gate are located. As compared with an existing MOSFET, in the invention, a higher turn-on current, a lower leakage current and a steeper subthreshold slope may be obtained under the same process condition and the same active region size. | 07-19-2012 |
| 20120181586 | Semiconductor device and manufacturing method thereof - The invention discloses a novel MOSFET device fabricated by a gate last process and its implementation method, the device comprising: a substrate; a gate stack structure located on a channel region in the substrate, on either side of which is eliminated the conventional isolation spacer; an epitaxially grown ultrathin metal silicide constituting a source/drain region. Wherein the device eliminates the high resistance region below the conventional isolation spacer; a dopant segregation region with imlanted ions is formed between the source/drain and the channel region, which decreases the Schottky barrier height between the metal silicide source/drain and the channel. At the same time, the epitaxially grown metal silicide can withstand a second high-temperature annealing used for improving the performance of a high-k gate dielectric material, which further improves the performance of the device. The MOSFET according to the invention reduces the parasitic resistance and capacitance greatly and thereby decreases the RC delay, thus improving the switching performance of the MOSFET device significantly. | 07-19-2012 |
| 20120181587 | SEMICONDUCTOR DEVICE - A semiconductor device includes a MISFET. The semiconductor device also includes a silicon nitride film | 07-19-2012 |
| 20120187459 | SEMICONDUCTOR DEVICE INCLUDING AN EPITAXY REGION - A method is described which includes providing a substrate and forming a first spacer material layer abutting a gate structure on the substrate. A second spacer material layer is formed adjacent and abutting the gate structure and overlying the first spacer material layer. The first spacer material layer and the second spacer material layer are then etched concurrently to form first and second spacers, respectively. An epitaxy region is formed (e.g., grown) on the substrate which includes an interface with each of the first and second spacers. The second spacer may be subsequently removed and the first spacer remain on the device decreases the aspect ratio for an ILD gap fill. An example composition of the first spacer is SiCN. | 07-26-2012 |
| 20120187460 | METHOD FOR FORMING METAL SEMICONDUCTOR ALLOYS IN CONTACT HOLES AND TRENCHES - A method of forming a semiconductor device is provided that includes forming a first metal semiconductor alloy on a semiconductor containing surface, forming a dielectric layer over the first metal semiconductor alloy, forming an opening in the dielectric layer to provide an exposed surface the first metal semiconductor alloy, and forming a second metal semiconductor alloy on the exposed surface of the first metal semiconductor alloy. In another embodiment, the method includes forming a gate structure on a channel region of a semiconductor substrate, forming a dielectric layer over at least a source region and a drain region, forming an opening in the dielectric layer to provide an exposed surface the semiconductor substrate, forming a first metal semiconductor alloy on the exposed surface of the semiconductor substrate, and forming a second metal semiconductor alloy on the first metal semiconductor alloy. | 07-26-2012 |
| 20120193686 | SEMICONDUCTOR DEVICES HAVING ENCAPSULATED STRESSOR REGIONS AND RELATED FABRICATION METHODS - Apparatus and related fabrication methods are provided for semiconductor device structures having silicon-encapsulated stressor regions. One method for fabricating a semiconductor device structure involves the steps of forming a gate structure overlying the semiconductor substrate, forming recesses in the semiconductor substrate about the gate structure, forming a stress-inducing semiconductor material in the recesses, and forming a silicon material in the recesses overlying the stress-inducing semiconductor material. In an exemplary embodiment, the silicon material formed in the recesses is epitaxially-grown on the stress-inducing semiconductor material. | 08-02-2012 |
| 20120193687 | REDUCED S/D CONTACT RESISTANCE OF III-V MOSFET USING LOW TEMPERATURE METAL-INDUCED CRYSTALLIZATION OF n+ Ge - Embodiments of this invention provide a method to fabricate an electrical contact. The method includes providing a substrate of a compound Group III-V semiconductor material having at least one electrically conducting doped region adjacent to a surface of the substrate. The method further includes fabricating the electrical contact to the at least one electrically conducting doped region by depositing a single crystal layer of germanium over the surface of the substrate so as to at least partially overlie the at least one electrically conducting doped region, converting the single crystal layer of germanium into a layer of amorphous germanium by implanting a dopant, forming a metal layer over exposed surfaces of the amorphous germanium layer, and performing a metal-induced crystallization (MIC) process on the amorphous germanium layer having the overlying metal layer to convert the amorphous germanium layer to a crystalline germanium layer and to activate the implanted dopant. The electrical contact can be a source or a drain contact of a transistor. | 08-02-2012 |
| 20120193688 | ION IMPLANTED AND SELF ALIGNED GATE STRUCTURE FOR GaN TRANSISTORS - A self-aligned transistor gate structure that includes an ion-implanted portion of gate material surrounded by non-implanted gate material on each side. The gate structure may be formed, for example, by applying a layer of GaN material over an AlGaN barrier layer and implanting a portion of the GaN layer to create the gate structure that is laterally surrounded by the GaN layer. | 08-02-2012 |
| 20120199886 | SEALED AIR GAP FOR SEMICONDUCTOR CHIP - A semiconductor chip, including a substrate; a dielectric layer over the substrate; a gate within the dielectric layer, the gate including a sidewall; a source and a drain in the substrate adjacent to the gate; a tapered contact contacting a portion of one of the source or the drain; and a sealed air gap between the sidewall and the contact. | 08-09-2012 |
| 20120199887 | METHODS OF CONTROLLING TUNGSTEN FILM PROPERTIES - Methods, apparatus, and systems for depositing tungsten having tailored stress levels are provided. According to various embodiments, the methods involve depositing high stress or low stress tungsten films. In certain embodiments depositing high stress tungsten involves a multi-stage chemical vapor deposition (CVD) process including a low temperature deposition followed by a high temperature deposition. In certain embodiments depositing low stress tungsten involves a CVD process using a relatively low tungsten precursor flow. Also provided are new classes of high and low stress tungsten films, which may also have low resistivity and/or high reflectivity. Also provided are integration methods involving depositing high or low stress tungsten, for example as contacts and/or metal gates, and semiconductor devices incorporating the tungsten films. | 08-09-2012 |
| 20120199888 | FIN FIELD-EFFECT TRANSISTOR STRUCTURE - A fin field-effect transistor structure includes a silicon substrate, a fin channel, a gate insulator layer and a gate conductor layer. The fin channel is formed on a surface of the silicon substrate, wherein the fin channel has at least one slant surface. The gate insulator layer formed on the slant surface of the fin channel. The gate conductor layer formed on the gate insulator layer. | 08-09-2012 |
| 20120199889 | SEMICONDUCTOR DEVICE AND FIELD EFFECT TRANSISTOR - Provided is a semiconductor device in which the trade-off between the withstand voltage and the on-resistance is improved and the performance is increased. | 08-09-2012 |
| 20120199890 | TRANSISTOR STRUCTURE - A transistor structure is provided in the present invention. The transistor structure includes: a substrate comprising a P-type well, a gate disposed on the P-type well, a first spacer disposed on the gate, an N-type source/drain region disposed in the substrate at two sides of the gate, a silicon cap layer covering the N-type source/drain region, a second spacer around the first spacer and the second spacer directly on and covering a portion of the silicon cap layer and a silicide layer disposed on the silicon cap layer. | 08-09-2012 |
| 20120199891 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME - A semiconductor device includes: a gate electrode ( | 08-09-2012 |
| 20120205727 | SEMICONDUCTOR DEVICE INCLUDING MULTIPLE METAL SEMICONDUCTOR ALLOY REGION AND A GATE STRUCTURE COVERED BY A CONTINUOUS ENCAPSULATING LAYER - A method of forming a semiconductor device is provided that in some embodiments encapsulates a gate silicide in a continuous encapsulating material. By encapsulating the gate silicide in the encapsulating material, the present disclosure substantially eliminates shorting between the gate structure and the interconnects to the source and drain regions of the semiconductor device. | 08-16-2012 |
| 20120205728 | Semiconductor Structure and Method for Manufacturing the Same - The present invention provides a method for manufacturing a semiconductor structure, comprising: providing a substrate, and forming a dummy gate stack on the substrate, sidewall spacers on sidewalls of the dummy gate stack, and source/drain regions at both sides of the dummy gate stack, wherein the dummy gate stack comprising a dummy gate; forming a first contact layer on surfaces of the source/drain regions; forming an interlayer dielectric layer to cover the first contact layer; removing the dummy gate or the dummy gate stack material to form an opening, filling the opening with a first conductive material or with a gate dielectric layer and a first conductive material to form a gate stack structure; forming through holes within the interlayer dielectric layer, so that a portion of the first contact layer or a portion of the first contact layer and the source/drain regions are exposed in the through holes; forming a second contact layer on the exposed portions of the regions; filling the through holes with a second conductive material to form contact vias. Besides, the present invention further provides a semiconductor structure, which is favorable for reducing the contact resistance. | 08-16-2012 |
| 20120205729 | FIELD EFFECT TRANSISTOR WITH NARROW BANDGAP SOURCE AND DRAIN REGIONS AND METHOD OF FABRICATION - A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode. | 08-16-2012 |
| 20120211807 | System and Method for Source/Drain Contact Processing - System and method for reducing contact resistance and prevent variations due to misalignment of contacts is disclosed. A preferred embodiment comprises a non-planar transistor with source/drain regions located within a fin. An inter-layer dielectric overlies the non-planar transistor, and contacts are formed to the source/drain region through the inter-layer dielectric. The contacts preferably come into contact with multiple surfaces of the fin so as to increase the contact area between the contacts and the fin. | 08-23-2012 |
| 20120211808 | FIN-TRANSISTOR FORMED ON A PATTERNED STI REGION BY LATE FIN ETCH - When forming sophisticated semiconductor devices, three-dimensional transistors in combination with planar transistors may be formed on the basis of a replacement gate approach and self-aligned contact elements by forming the semiconductor fins in an early manufacturing stage, i.e., upon forming shallow trench isolations, wherein the final electrically effective height of the semiconductor fins may be adjusted after the provision of self-aligned contact elements and during the replacement gate approach. | 08-23-2012 |
| 20120211809 | SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPLIANCE - Provided are a semiconductor device with less leakage current is reduced, a semiconductor device with both of high field effect mobility and low leakage current, an electronic appliance with low power consumption, and a manufacturing method of a semiconductor device in which leakage current can be reduced without an increase in the number of masks. The side surface of a semiconductor layer formed of a semiconductor film having high carrier mobility is not in contact with any of a source electrode and a drain electrode. Further, such a transistor structure is formed without an increase in the number of photomasks and can be applied to an electronic appliance. | 08-23-2012 |
| 20120211810 | TRANSISTOR WITH EMBEDDED SI/GE MATERIAL HAVING ENHANCED ACROSS-SUBSTRATE UNIFORMITY - In sophisticated semiconductor devices, a strain-inducing semiconductor alloy may be positioned close to the channel region by forming cavities on the basis of a wet chemical etch process, which may have an anisotropic etch behavior with respect to different crystallographic orientations. In one embodiment, TMAH may be used which exhibits, in addition to the anisotropic etch behavior, a high etch selectivity with respect to silicon dioxide, thereby enabling extremely thin etch stop layers which additionally provide the possibility of further reducing the offset from the channel region while not unduly contributing to overall process variability. | 08-23-2012 |
| 20120217552 | METAL LINE STRUCTURE AND MANUFACTURING METHOD FOR TRENCH - Exemplary metal line structure and manufacturing method for a trench are provided. In particular, the metal line structure includes a substrate, a target layer, a trench and a conductor line. The target layer is formed on the substrate. The trench is formed in the target layer and has a micro-trench formed at the bottom thereof. A depth of the micro-trench is not more than 50 angstroms. The conductor line is inlaid into the trench. | 08-30-2012 |
| 20120217553 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - The present invention provides a semiconductor structure, comprising: a substrate; a gate formed on the substrate, and a source and drain formed in the substrate and disposed at two sides of the gate; raised portions formed on the source and the drain, respectively, a height of the raised portions being approximate to a height of the gate; and a metal silicide layer and contact holes formed on the raised portions and on the gate. By virtue of the raised portions added to the source/drain in an embodiment of the present invention, the height difference between the gate and the source/drain may be decreased, such that the formation of the contact holes becomes much easier. | 08-30-2012 |
| 20120217554 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device and a method for fabricating the same are provided which can increase the effective channel area and maintain a transistor characteristic. Since the semiconductor device comprises a recess filled with a gate spacer, a gate threshold voltage can be maintained even though the ion-implanting concentration of the active region is not uniform. The semiconductor device comprises: a device isolation film that defines an active region formed over a semiconductor substrate; a line-type recess with a given depth formed to be extended along a first direction to intersect at the active region; and a gate formed to be extended along a second direction to intersect at the active region, wherein a spacer including a high K material is disposed at sidewalls. | 08-30-2012 |
| 20120217555 | SEMICONDUCTOR DEVICE - A first semiconductor device of an embodiment includes a first semiconductor layer of a first conductivity type, a first control electrode, an extraction electrode, a second control electrode, and a third control electrode. The first control electrode faces a second semiconductor layer of the first conductivity type, a third semiconductor layer of a second conductivity type, and a fourth semiconductor layer of a first conductivity type, via a first insulating film. The second control electrode and the third control electrode are electrically connected to the extraction electrode, and face the second semiconductor layer under the extraction electrode, via the second insulating film. At least a part of the second control electrode and the whole of the third control electrode are provided under the extraction electrode. The electrical resistance of the second control electrode is higher than the electrical resistance of the third control electrode. | 08-30-2012 |
| 20120217556 | SEMICONDUCTOR DEVICE - A semiconductor device featuring a semiconductor chip having a first main surface and a second, opposing main surface and including a MOSFET having source and gate electrodes formed on the first main surface and a drain electrode thereof formed on the second main surface, first and second conductive members acting as lead terminals for the source and gate electrodes, respectively, are disposed over the first main surface, each of the first and second conductive members has a part overlapped with the chip in a plan view, a sealing body sealing the chip and parts of the first and second conductive members such that a part of the first conductive member is projected outwardly from a first side surface of the sealing body and parts of the first and second conductive members are projected outwardly from the opposing second side surface of the sealing body in a plan view. | 08-30-2012 |
| 20120217557 | SEMICONDUCTOR DEVICE - A semiconductor device includes: a semiconductor substrate of a compound semiconductor material; a buffer layer, a channel layer, and a Schottky junction forming layer sequentially disposed on the semiconductor substrate, the buffer layer, the channel layer, and the Schottky junction forming layer each being compound semiconductor materials; a source electrode and a drain electrode located on the Schottky junction forming layer; and a gate electrode disposed between the source and drain electrodes and forming a Schottky junction with the Schottky junction forming layer. The carrier density in the channel layer varies with distance from a top surface of the channel layer and is inversely proportional to the third power of depth into the channel layer from the top surface of the channel layer. The buffer layer has a lower electron affinity than the channel layer and is a different compound semiconductor material from the channel layer. | 08-30-2012 |
| 20120223372 | TWO-STEP SILICIDE FORMATION - An aspect of the invention includes a method for forming a semiconductor device with a two-step silicide formation. First, a silicide intermix layer is formed over a source/drain region and a portion of an adjacent extension region. Any spacers removed to accomplish this may be replaced. Dielectric material covers the silicide intermix layer over the source/drain region. A contact opening for a via is etched into the dielectric material. A second silicide contact is formed on the silicide intermix layer, or may be formed within the source/drain region as long as the second silicide contact still contacts the silicide intermix layer. | 09-06-2012 |
| 20120223373 | SEMICONDUCTOR DEVICE INCLUDING A CRYSTAL SEMICONDUCTOR LAYER, ITS FABRICATION AND ITS OPERATION - In one embodiment, a method of fabricating a semiconductor device having a crystalline semiconductor layer includes preparing a semiconductor substrate and forming a preliminary active pattern on the semiconductor substrate. The preliminary active pattern includes a barrier pattern and a non-single crystal semiconductor pattern. A sacrificial non-single crystal semiconductor layer covers the preliminary active pattern and the semiconductor substrate. By crystallizing the sacrificial non-single crystal semiconductor layer and the non-single crystal semiconductor pattern, using the semiconductor substrate as a seed layer, the sacrificial non-single crystal semiconductor layer and the non-single crystal semiconductor pattern are changed to a sacrificial crystalline semiconductor layer and a crystalline semiconductor pattern, respectively. The crystalline semiconductor pattern and the barrier pattern constitute an active pattern. The sacrificial crystalline semiconductor layer is removed. | 09-06-2012 |
| 20120228678 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - According to an embodiment of a semiconductor device and a method of manufacturing the same, buried gates are formed in a semiconductor substrate including a cell region and a peripheral region, with the cell region and the peripheral region formed to have a step therebetween. Next, a spacer is formed in a region between the cell region and the peripheral region to block an oxidation path between a gate oxide layer and another insulating layer. Embodiments may reduce damage to active regions and prevent IDD failure because a gate pattern is formed on a guard region provided at a periphery of the cell region. | 09-13-2012 |
| 20120228679 | METHOD FOR PROTECTING A GATE STRUCTURE DURING CONTACT FORMATION - Various methods for protecting a gate structure during contact formation are disclosed. An exemplary method includes: forming a gate structure over a substrate, wherein the gate structure includes a gate and the gate structure interposes a source region and a drain region disposed in the substrate; patterning a first etch stop layer such that the first etch stop layer is disposed on the source region and the drain region; patterning a second etch stop layer such that the second etch stop layer is disposed on the gate structure; and forming a source contact, a drain contact, and a gate contact, wherein the source contact and the drain contact extend through the first etch stop layer and the gate contact extends through the second etch stop layer, wherein the forming the source contact, the drain contact, and the gate contact includes simultaneously removing the first etch stop layer and the second etch stop layer to expose the gate, source region, and drain region. | 09-13-2012 |
| 20120228680 | FIELD EFFECT TRANSISTOR AND SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SAME - Current drive efficiency is deteriorated in the conventional FET. The FET | 09-13-2012 |
| 20120235213 | SEMICONDUCTOR STRUCTURE WITH A STRESSED LAYER IN THE CHANNEL AND METHOD FOR FORMING THE SAME - The present invention provides a semiconductor structure with a stressed layer in the channel and method for forming the same. The semiconductor structure comprises a substrate; a gate stack, including a gate dielectric layer formed over the substrate, gate layer formed over the gate dielectric layer, a source region and a drain region formed in the substrate by both sides of the gate stack; one or more spacers formed on both sides of the gate stack; and an embedded stressed layer formed under the gate stack in the substrate. In the embodiments of the present invention, the carrier mobility can be effectively increased by the embedded stressed layer added in the channel under the gate stack, so that the driving current of transistors is improved. Moreover, the technological process for forming this embedded stressed layer in the present invention has a lower thermal budget, which therefore assists in maintaining a higher stress level in the channel region. Besides, apart from the advantage in the aspect of stress, the embedded stressed layer in the channel can further decrease the diffusion/invasion of B (boron) from the heavily doped source and drain regions. | 09-20-2012 |
| 20120235214 | LOCALLY 2 SIDED CHC DRAM ACCESS TRANSISTOR STRUCTURE - A method for forming a DRAM memory with a two-sided transistor includes: providing a silicon finFET structure having at least two fins, and a trench between the fins; forming high ohmic gates on either side of the fins; forming a hole between each pair of high ohmic gates to enable connection between the pair of high ohmic gates; forming a gate on one side of the trench and underneath one of the pair of high ohmic gate; forming a layer of oxide over the gate; and depositing tungsten in the trench to form a thick layer of metal at the bottom to form a word line. | 09-20-2012 |
| 20120235215 | PERFORMANCE ENHANCEMENT IN TRANSISTORS BY REDUCING THE RECESSING OF ACTIVE REGIONS AND REMOVING SPACERS - Sophisticated transistors for semiconductor devices may be formed on the basis of a superior process sequence in which an increased space between closely spaced gate electrode structures may be obtained in combination with a reduced material loss in the active regions. To this end, an offset spacer conventionally used for laterally profiling the drain and source extension regions is omitted and the spacer for the deep drain and source areas may be completely removed. | 09-20-2012 |
| 20120241823 | POWER SEMICONDUCTOR DEVICE - A power semiconductor device includes a first semiconductor layer of a first conductivity type, a second semiconductor layer provided thereon, mutually separated columnar third semiconductor layers of a second conductivity type extending within the second semiconductor layer, island-like fourth semiconductor layers of the second conductivity type provided on the third semiconductor layers, fifth semiconductor layers of the first conductivity type, sixth semiconductor layers of the second conductivity type, a gate electrode, a first electrode, and a second electrode. The fifth semiconductor layers are selectively provided on the fourth semiconductor layers. The sixth semiconductor layer electrically connects two adjacent fourth semiconductor layers. The first electrode is in electrical connection with the first semiconductor. The second electrode is in electrical connection with the fourth semiconductor layers and the fifth semiconductor layers via the openings in the gate electrode. | 09-27-2012 |
| 20120241824 | SPACER STRUCTURE WHEREIN CARBON-CONTAINING OXIDE FILM FORMED WITHIN - A spacer structure contains a carbon-containing oxide film positioned on a gate sidewall and a nitride film covering the carbon-containing oxide film. The carbon-containing oxide film has low etch rate so that the spacer structure can have a good profile during etching the carbon-containing oxide film. | 09-27-2012 |
| 20120248507 | METAL GATE STRUCTURE AND MANUFACTURING METHOD THEREOF - A manufacturing method of a metal gate structure includes providing a substrate having at least a first metal oxide layer formed thereon, and transferring the surface of the first metal oxide layer into a second metal oxide layer. The first metal oxide layer includes a metal oxide (M | 10-04-2012 |
| 20120248508 | FORMING BORDERLESS CONTACT FOR TRANSISTORS IN A REPLACEMENT METAL GATE PROCESS - Embodiments of the present invention provide a method of forming a semiconductor structure. The method includes creating an opening inside a dielectric layer, the dielectric layer being formed on top of a substrate and the opening exposing a channel region of a transistor in the substrate; depositing a work-function layer lining the opening and covering the channel region; forming a gate conductor covering a first portion of the work-function layer, the first portion of the work-function layer being on top of the channel region; and removing a second portion of the work-function layer, the second portion of the work-function layer surrounding the first portion of the work-function layer, wherein the removal of the second portion of the work-function layer insulates the first portion of the work-function layer from rest of the work-function layer. | 10-04-2012 |
| 20120248509 | STRUCTURE AND PROCESS FOR METAL FILL IN REPLACEMENT METAL GATE INTEGRATION - Processes for metal fill in replacement metal gate integration schemes and resultant devices are provided herein. The method includes forming a dummy gate on a semiconductor substrate. The dummy gate includes forming a metal layer between a first material and a second material. The method further includes partially removing the dummy gate to form an opening bounded by a spacer material. The method further includes forming a recess in the spacer material to widen a portion of the opening. The method further includes removing a remaining portion of the dummy gate through the opening to form a trench having the recess forming an upper portion thereof. The method further includes filling the trench and the recess with a replacement metal gate stack. | 10-04-2012 |
| 20120248510 | BACKSIDE BEVEL PROTECTION - The disclosure provides methods and structures for preventing exposing polysilicon layer and silicon substrate on the substrate backside to polysilicon etching chemistry during removal of the dummy polysilicon layer in replacement gate structures. A thermal deposition process or processes are used to deposit a dielectric layer for offset spacers and/or a contact etch stop layer (CESL) to cover the polysilicon layer on the substrate backside. Such mechanisms reduce or eliminate particles originated at bevel of substrate backside, due to complete removal of the polysilicon layer at the backside bevel and the resultant etching of silicon substrate. | 10-04-2012 |
| 20120248511 | SEMICONDUCTOR STRUCTURE AND METHOD FOR SLIMMING SPACER - A semiconductor structure including a substrate and a gate structure disposed on the substrate is disclosed. The gate structure includes a gate dielectric layer disposed on the substrate, a gate material layer disposed on the gate dielectric layer and an outer spacer with a rectangular cross section. The top surface of the outer spacer is lower than the top surface of the gate material layer. | 10-04-2012 |
| 20120248512 | ON-GATE CONTACTS IN A MOS DEVICE - A MOS device, ( | 10-04-2012 |
| 20120248513 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A space is provided under part of a semiconductor layer. Specifically, a structure in which an eaves portion (a projecting portion, an overhang portion) is formed in the semiconductor layer. The eaves portion is formed as follows: a stacked-layer structure in which a conductive layer, an insulating layer, and a semiconductor layer are stacked in this order is etched collectively to determine a pattern of a gate electrode; and a pattern of the semiconductor layer is formed while side-etching is performed. | 10-04-2012 |
| 20120256239 | Ultra-Thin Power Transistor and Synchronous Buck Converter Having Customized Footprint - A packaged power transistor device ( | 10-11-2012 |
| 20120256240 | METHOD FOR INCREASING PENETRATION DEPTH OF DRAIN AND SOURCE IMPLANTATION SPECIES FOR A GIVEN GATE HEIGHT - The thickness of drain and source areas may be reduced by a cavity etch used for refilling the cavities with an appropriate semiconductor material, wherein, prior to the epitaxial growth, an implantation process may be performed so as to allow the formation of deep drain and source areas without contributing to unwanted channel doping for a given critical gate height. In other cases, the effective ion blocking length of the gate electrode structure may be enhanced by performing a tilted implantation step for incorporating deep drain and source regions. | 10-11-2012 |
| 20120261725 | Stabilized Metal Silicides in Silicon-Germanium Regions of Transistor Elements - Generally, the present disclosure is directed to methods of stabilizing metal silicide contact regions formed in a silicon-germanium active area of a semiconductor device, and devices comprising stabilized metal silicides. One illustrative method disclosed herein includes performing an activation anneal to activate dopants implanted in an active area of a semiconductor device, wherein the active area comprises germanium. Additionally, the method includes, among other things, performing an ion implantation process to implant ions into the active area after performing the activation anneal, forming a metal silicide contact region in the active area, and forming a conductive contact element to the metal silicide contact region. | 10-18-2012 |
| 20120261726 | DIVOT ENGINEERING FOR ENHANCED DEVICE PERFORMANCE - An integrated circuit device and method for manufacturing the same are disclosed. An exemplary device includes a semiconductor substrate having a substrate surface; a trench isolation structure disposed in the semiconductor substrate, the trench isolation structure having a trench isolation structure surface that is substantially planar to the substrate surface; and a gate feature disposed over the semiconductor substrate, wherein the gate feature includes a portion that extends from the substrate surface to a depth in the trench isolation structure, the portion being defined by a trench isolation structure sidewall and a semiconductor substrate sidewall, such that the portion tapers from a first width at the substrate surface to a second width at the depth, the first width being greater than the second width. | 10-18-2012 |
| 20120261727 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING LOCAL INTERCONNECT STRUCTURE THEREOF - A semiconductor device and a method for manufacturing a local interconnect structure for a semiconductor device is provided. The method includes forming removable sacrificial sidewall spacers between sidewall spacers and outer sidewall spacers on two sides of a gate on a semiconductor substrate, and forming contact through-holes at source/drain regions in the local interconnect structure between the sidewall spacer and the outer sidewall spacer on the same side of the gate immediately after removing the sacrificial sidewall spacers. Once the source/drain through-holes are filled with a conductive material to form contact vias, the height of the contact vias shall be same as the height of the gate. The contact through-holes, which establish the electrical connection between a subsequent first layer of metal wiring and the source/drain regions or the gate region at a lower level in the local interconnect structure, shall be made in the same depth. | 10-18-2012 |
| 20120261728 | EMBEDDED STRESSOR FOR SEMICONDUCTOR STRUCTURES - A semiconductor structure includes a semiconductor substrate; a gate stack on the semiconductor substrate; a plurality of spacers disposed on laterally opposing sides of the gate stack; source and drain regions proximate to the spacers, and a channel region subjacent to the gate stack and disposed between the source and drain regions; and a stressor subjacent to the channel region, and embedded within the semiconductor substrate, the embedded stressor being formed of a triangular-shape. | 10-18-2012 |
| 20120273848 | BORDERLESS CONTACT STRUCTURE EMPLOYING DUAL ETCH STOP LAYERS - Each gate structure formed on the substrate includes a gate dielectric, a gate conductor, a first etch stop layer, and a gate cap dielectric. A second etch stop layer is formed over the gate structures, gate spacers, and source and drain regions. A first contact-level dielectric layer and a second contact-level dielectric layer are formed over the second etch stop layer. Gate contact via holes extending at least to the top surface of the gate cap dielectrics are formed. Source/drain contact via holes extending to the interface between the first and second contact-level dielectric layers are subsequently formed. The various contact via holes are vertically extended by simultaneously etching exposed gate cap dielectrics and exposed portions of the first contact-level dielectric layer, then by simultaneously etching the first and second etch stop layers. Source/drain contact vias self-aligned to the outer surfaces gate spacers are thereby formed. | 11-01-2012 |
| 20120273849 | Electronic Module Metalization System, Apparatus, and Methods of Forming Same - Embodiments of electronic module metallization systems and apparatus and methods for forming same are described generally herein. Other embodiments may be described and claimed. | 11-01-2012 |
| 20120273850 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device and a method for fabricating the same are disclosed. A fin of the semiconductor device including a fin-shaped channel region is configured in the form of a non-uniform structure, and a leakage current caused by the electric field effect generated in the semiconductor device is prevented from being generated, resulting in an increased operation stability of the semiconductor device. | 11-01-2012 |
| 20120273851 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A manufacturing method of a semiconductor device includes forming a structure comprising an interlayer dielectric layer on a substrate, an ultra-low-k material layer on the interlayer dielectric layer and a plug. The plug passes through the interlayer dielectric layer and the ultra-low-k material layer, and is formed of a first metal material. The method further includes removing an upper portion of the plug by etching to form a recessed portion, and filling the recessed portion with a second metal material. According to the method, contact-hole photolithography is performed only once, and thus avoids alignment issues that may occur when contact-hole photolithography needs to be performed twice. | 11-01-2012 |
| 20120273852 | TRANSISTORS HAVING TEMPERATURE STABLE SCHOTTKY CONTACT METALS - A semiconductor structure having: a semiconductor comprising a indium gallium phosphide and molybdenum metal in Schottky contact with the semiconductor. | 11-01-2012 |
| 20120273853 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - A semiconductor device includes a first transistor including a first source/drain region and a first sidewall spacer, and a second transistor including a second source/drain region and a second sidewall spacer, the first sidewall spacer has a first width and the second sidewall spacer has a second width wider than the first width, and the first source/drain region has a first area and the second source/drain region has a second area larger than the first area. | 11-01-2012 |
| 20120280287 | Integrated Circuit Layouts with Power Rails under Bottom Metal Layer - A circuit includes a semiconductor substrate; a bottom metal layer over the semiconductor substrate, wherein no additional metal layer is between the semiconductor substrate and the bottom metal layer; and a cell including a plug-level power rail under the bottom metal layer. | 11-08-2012 |
| 20120280288 | INVERSION THICKNESS REDUCTION IN HIGH-K GATE STACKS FORMED BY REPLACEMENT GATE PROCESSES - A method of forming a transistor device includes forming an interfacial layer on a semiconductor substrate, corresponding to a region between formed doped source and drain regions in the substrate; forming a high dielectric constant (high-k) layer on the interfacial layer, the high-k layer having a dielectric constant greater than about 7.5; forming a doped metal layer on the high-k layer; performing a thermal process so as to cause the doped metal layer to scavenge oxygen atoms diffused from the interfacial layer such that a final thickness of the interfacial layer is less than about 5 angstroms (Å); and forming a metal gate material over the high-k dielectric layer. | 11-08-2012 |
| 20120280289 | Method of Increasing the Germanium Concentration in a Silicon-Germanium Layer and Semiconductor Device Comprising Same - Disclosed herein is a method of forming a semiconductor device. In one example, the method comprises forming layer of silicon germanium on a P-active region of a semiconducting substrate wherein the layer of silicon germanium has a first concentration of germanium, and performing an oxidation process on the layer of silicon germanium to increase a concentration of germanium in at least a portion of the layer of silicon germanium to a second concentration that is greater than the first concentration of germanium. | 11-08-2012 |
| 20120280290 | LOCAL INTERCONNECT STRUCTURE SELF-ALIGNED TO GATE STRUCTURE - A common cut mask is employed to define a gate pattern and a local interconnect pattern so that local interconnect structures and gate structures are formed with zero overlay variation relative to one another. A local interconnect structure may be laterally spaced from a gate structure in a first horizontal direction, and contact another gate structure in a second horizontal direction that is different from the first horizontal direction. Further, a gate structure may be formed to be collinear with a local interconnect structure that adjoins the gate structure. The local interconnect structures and the gate structures are formed by a common damascene processing step so that the top surfaces of the gate structures and the local interconnect structures are coplanar with each other. | 11-08-2012 |
| 20120280291 | SEMICONDUCTOR DEVICE INCLUDING GATE OPENINGS - According to example embodiments, a semiconductor device includes a substrate, a device isolation layer over the substrate that defines an active region of the substrate, a gate electrode crossing over the active region in between a source region and a drain region of the active region. The gate electrode defines at least one gate opening. The at least one gate opening may expose a portion of a boundary between the active region and the device isolation layer. | 11-08-2012 |
| 20120280292 | SEMICONDUCTOR DEVICES WITH SCREENING COATING TO INHIBIT DOPANT DEACTIVATION - A semiconductor device and a method for fabricating the semiconductor device. The device includes: a doped semiconductor having a source region, a drain region, a channel between the source and drain regions, and an extension region between the channel and each of the source and drain regions; a gate formed on the channel; and a screening coating on each of the extension regions. The screening coating includes: (i) an insulating layer that has a dielectric constant that is no greater than about half that of the extension regions and is formed directly on the extension regions, and (ii) a screening layer on the insulating layer, where the screening layer screens the dopant ionization potential in the extension regions to inhibit dopant deactivation. | 11-08-2012 |
| 20120280293 | STRUCTURES AND METHODS FOR REDUCING DOPANT OUT-DIFFUSION FROM IMPLANT REGIONS IN POWER DEVICES - In accordance with an embodiment, a method of forming a semiconductor structure can include forming a source region of a first conductivity type in a well region of a second conductivity type within a semiconductor region, and forming a first diffusion barrier region disposed between the source region and the well region. The method can include forming a heavy body region of the second conductivity type in the well region and forming a second diffusion bather region having a portion on a side of the heavy body region with a thickness different than a thickness of a portion on a bottom portion of the heavy body region. The method can also include forming a gate electrode, and forming a dielectric insulating the gate electrode from the semiconductor region. | 11-08-2012 |
| 20120280294 | METHOD FOR DEPINNING THE FERMI LEVEL OF A SEMICONDUCTOR AT AN ELECTRICAL JUNCTION AND DEVICES INCORPORATING SUCH JUNCTIONS - An electrical device in which an interface layer comprising arsenic is disposed between and in contact with a conductor and a semiconductor. In some cases, the interface layer may be a monolayer of arsenic. | 11-08-2012 |
| 20120286335 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device and a manufacturing method thereof are disclosed. The method comprises: providing a substrate with a first dielectric layer and a gate, wherein the gate is embedded in the first dielectric layer and an upper portion of the gate is an exposed first metal; and covering only the exposed first metal with a conductive material that is harder to be oxidized than the first metal by a selective deposition. An advantage of the present invention is that the metal of the upper surface of the gate is prevented from being oxidized by covering the metal gate with the conductive material that is relatively harder to be oxidized, thereby facilitating the formation of an effective electrical connection to the gate. | 11-15-2012 |
| 20120286336 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - Disclosed is a semiconductor device and a method for fabricating the semiconductor device. The method for fabricating the semiconductor device comprises steps of: forming a side cliff in a substrate in accordance with a gate mask pattern, the side cliff being substantially vertical to a substrate surface; forming a dielectric layer on the substrate that comprises the side cliff; etching the dielectric layer to have the dielectric layer left only on the side cliff, as a dielectric wall; and burying the side cliff by a substrate growth, the burying is performed up to a level higher than the upper end of the dielectric wall. | 11-15-2012 |
| 20120286337 | FIN FIELD-EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME - Embodiments of the present invention disclose a method for manufacturing a Fin Field-Effect Transistor. When a fin is formed, a dummy gate across the fin is formed on the fin, a spacer is formed on sidewalls of the dummy gate, and a cover layer is formed on the first dielectric layer and on the fin outside the dummy gate and the spacer, then, an self-aligned and elevated source/drain region is formed at both sides of the dummy gate by the spacer, wherein the upper surfaces of the gate and the source/drain region are in the same plane. The upper surfaces of the gate and the source/drain region are in the same plane, making alignment of the contact plug easier; and the gate and the source/drain region are separated by the spacer, thereby improving alignment accuracy, solving inaccurate alignment of the contact plug, and improving device AC performance. | 11-15-2012 |
| 20120286338 | CONTROL OF FLATBAND VOLTAGES AND THRESHOLD VOLTAGES IN HIGH-K METAL GATE STACKS AND STRUCTURES FOR CMOS DEVICES - A high-k metal gate stack and structures for CMOS devices and a method for forming the devices. The gate stack includes a high-k dielectric having a high dielectric constant greater than approximately 3.9, a germanium (Ge) material layer interfacing with the high-k dielectric, and a conductive electrode layer disposed above the high-k dielectric or the Ge material layer. The gate stack optimizes a shift of the flatband voltage or the threshold voltage to obtain high performance in p-FET devices. | 11-15-2012 |
| 20120292670 | Post-Silicide Process and Structure For Stressed Liner Integration - A method of fabricating a semiconductor device and a corresponding semiconductor device are provided. The method can include implanting a species into a silicide region, the silicide region contacting a semiconductor region of a substrate. A stressed liner may then be formed overlying the silicide region having the implanted species therein. In a particular example, prior to forming the stressed liner, a step of annealing can be performed within an interval less than one second to elevate at least a portion of the silicide region to a peak temperature ranging from 800 to 950° C. The method may reduce the chance of deterioration in the silicide region, e.g., the risk of void formation, due to processing used to form the stressed liner. | 11-22-2012 |
| 20120292671 | Method of Forming Spacers That Provide Enhanced Protection for Gate Electrode Structures - Disclosed herein is a method of forming a semiconductor device. In one example, the method comprises forming a gate electrode structure above a semiconducting substrate and forming a plurality of spacers proximate the gate electrode structures, wherein the plurality of spacers comprises a first silicon nitride spacer positioned adjacent a sidewall of the gate electrode structure, a generally L-shaped silicon nitride spacer positioned adjacent the first silicon nitride spacer, and a silicon dioxide spacer positioned adjacent the generally L-shaped silicon nitride spacer. | 11-22-2012 |
| 20120292672 | FINFET INTEGRATED CIRCUITS AND METHODS FOR THEIR FABRICATION - FINFET ICs and methods for their fabrication are provided. In accordance with one embodiment a FINFET IC is fabricated by forming in a substrate a region doped with an impurity of a first doping type. The substrate region is etched to form a recess defining a fin having a height and sidewalls and the recess adjacent the fin is filled with an insulator having a thickness less than the height. Spacers are formed on the sidewalls and a portion of the insulator is etched to expose a portion of the sidewalls. The exposed portion of the sidewalls is doped with an impurity of the first doping type, the exposed sidewalls are oxidized, and the sidewall spacers are removed. A gate insulator and gate electrode are formed overlying the fin, and end portions of the fin are doped with an impurity of a second doping type to form source and drain regions. | 11-22-2012 |
| 20120292673 | Semiconductor Device and Manufacturing Method Thereof - A semiconductor device and manufacture method thereof is disclosed. The method includes: forming a gate on a substrate; forming a stack including a first material layer, a second material layer, and a third material layer from inner to outer in sequence; etching the stack to form sidewall spacers on opposite sidewalls of the gate; performing ion implantation to form a source region and a drain region; partially or completely removing the remaining portion of the third material layer; performing a pre-cleaning process, wherein all or a portion of the remaining portion of the second material layer is removed; forming silicide on top of the source region, the drain region, and the gate; depositing a stress film to cover the silicide and the remaining portion of the first material layer. According to the above method, the stress proximity technique (SPT) can be realized while avoiding silicide loss. | 11-22-2012 |
| 20120292674 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device and method for manufacturing the same are provided. A substrate with an active area and a first interlayer dielectric formed over the substrate is provided. The first interlayer dielectric has a first opening exposing a portion of a surface of the active area, the first opening being filled with a fill material. A second interlayer dielectric is formed over the first interlayer dielectric with a second opening substantially exposing an upper portion of the fill material in the corresponding first opening. The fill material is then removed and the first opening and the second opening are filled with a conductive material to form a contact. | 11-22-2012 |
| 20120299068 | SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME - It is an object to provide an SGT production method capable of obtaining a structure for reducing a resistance of a gate, a desired gate length, desired source and drain configurations and a desired diameter of a pillar-shaped semiconductor. The object is achieved by a semiconductor device production method which comprises the steps of: forming a pillar-shaped first-conductive-type semiconductor layer; forming a second-conductive-type semiconductor layer underneath the pillar-shaped first-conductive-type semiconductor layer; forming a gate dielectric film and a gate electrode around the pillar-shaped first-conductive-type semiconductor layer; forming a sidewall-shaped dielectric film on an upper region of a sidewall of the pillar-shaped first-conductive-type semiconductor layer and in contact with a top of the gate; forming a sidewall-shaped dielectric film on a sidewall of the gate; and forming a second-conductive-type semiconductor layer in an upper portion of the pillar-shaped first-conductive-type semiconductor layer and on the second-conductive-type semiconductor layer formed underneath the pillar-shaped first-conductive-type semiconductor layer. | 11-29-2012 |
| 20120299069 | COPPER-FILLED TRENCH CONTACT FOR TRANSISTOR PERFORMANCE IMPROVEMENT - Methods of fabricating a first contact to a semiconductor device, which fundamentally comprises providing a semiconductor device formed on a substrate. The substrate further includes a conductive surface. A dielectric layer is formed over the substrate and has an opening exposing the conductive surface. The opening extends an entire length of the semiconductor device, partway down the entire length of the device, extending from the device onto adjacent field of the device, or and a combination thereof. A barrier layer is formed within the opening. A copper containing material fills the opening to form a first contact to the semiconductor device. | 11-29-2012 |
| 20120305995 | PERFORMANCE ENHANCEMENT IN TRANSISTORS BY PROVIDING AN EMBEDDED STRAIN-INDUCING SEMICONDUCTOR MATERIAL ON THE BASIS OF A SEED LAYER - In sophisticated semiconductor devices, transistors may be formed on the basis of a high-k metal gate electrode structure provided in an early manufacturing phase, wherein an efficient strain-inducing mechanism may be implemented by using an embedded strain-inducing semiconductor alloy. In order to reduce the number of lattice defects and provide enhanced etch resistivity in a critical zone, i.e., in a zone in which a threshold voltage adjusting semiconductor alloy and the strain-inducing semiconductor material are positioned in close proximity, an efficient buffer material or seed material, such as a silicon material, is incorporated, which may be accomplished during the selective epitaxial growth process. | 12-06-2012 |
| 20120313148 | SELF-ALIGNED TRENCH CONTACT AND LOCAL INTERCONNECT WITH REPLACEMENT GATE PROCESS - A semiconductor device fabrication process includes forming insulating mandrels over one or more replacement metal gates on a semiconductor substrate. The mandrels include a first insulating material. Each mandrel has approximately the same width as its underlying gate with each mandrel being at least as wide as its underlying gate. Mandrel spacers are formed around each insulating mandrel. The mandrel spacers include the first insulating material. Each mandrel spacer has a profile that slopes from being wider at the bottom to narrower at the top. A second insulating layer of the second insulating material is formed over the transistor. Trenches to the sources and drains of the gates are formed by removing the second insulating material from portions of the transistor between the mandrels. Trench contacts to the sources and drains of the gates are formed by depositing conductive material in the first trenches. | 12-13-2012 |
| 20120313149 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a semiconductor structure and a method for manufacturing the same. The method comprises the following steps: providing a semiconductor substrate, forming sequentially a gate dielectric layer, a metal gate, a CMP stop layer, and a poly silicon layer on the semiconductor substrate; etching the gate dielectric layer, the metal gate, the CMP stop layer and the poly silicon layer to form a gate stack; forming a first interlayer dielectric layer on the semiconductor substrate to cover the gate stack on the semiconductor substrate and the portions on both sides of the gate stack; performing a planarization process, such that the CMP stop layer is exposed and flushed with the upper surface of the first interlayer dielectric layer. Accordingly, the present invention further provides a semiconductor structure. Through adding the CMP stop layer, the present invention is able to effectively shorten the height of a metal gate, thus effectively reduces the capacitance between the metal gate and contact regions, and therefore optimizes the subsequent process for etching through holes. | 12-13-2012 |
| 20120313150 | THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS - A thin film transistor includes: an organic semiconductor layer which is formed from a metal-containing material containing at least one of a metallic element and a semi-metallic element capable of reacting with an etching gas; a source electrode and a drain electrode spaced apart from each other; and an organic conductive layer which is inserted between the organic semiconductor layer and the source and drain electrodes in the regions where the organic semiconductor layer overlaps with the source and drain electrodes and which is formed from a non-metal-containing material not containing at least one of a metallic element and a semi-metallic element capable of reacting with the etching gas. | 12-13-2012 |
| 20120313151 | SEMICONDUCTOR DEVICE INCLUDING CONTACT STRUCTURE, METHOD OF FABRICATING THE SAME, AND ELECTRONIC SYSTEM INCLUDING THE SAME - A semiconductor device includes a gate structure on a semiconductor substrate, an impurity region at a side of the gate structure and the impurity region is within the semiconductor substrate, an interlayer insulating layer covering the gate structure and the impurity region, a contact structure extending through the interlayer insulating layer and connected to the impurity region, and an insulating region. The contact structure includes a first contact structure that has a side surface surrounded by the interlayer insulating layer and a second contact structure that has a side surface surrounded by the impurity region. The insulating region is under the second contact structure. | 12-13-2012 |
| 20120313152 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A transistor which includes an oxide semiconductor and is capable of high-speed operation and a method of manufacturing the transistor. In addition, a highly reliable semiconductor device including the transistor and a method of manufacturing the semiconductor device. The semiconductor device includes an oxide semiconductor layer including a channel formation region, and a source and drain regions which are provided so that the channel formation region is interposed therebetween and have lower resistance than the channel formation region. The channel formation region and the source and drain regions each include a crystalline region. | 12-13-2012 |
| 20120313153 | SYSTEM AND METHOD OF PLATING CONDUCTIVE GATE CONTACTS ON METAL GATES FOR SELF-ALIGNED CONTACT INTERCONNECTIONS - According to one embodiment of the invention, the gate contact is formed by a selective deposition on the gate electrode. One acceptable technique for the selective deposition is by plating. Plating is one process by which a metal structure, such as a gate contact, may be formed directly on the gate electrode. The plating is carried out by immersing the semiconductor die in a plating solution with the gate electrode exposed. The gate contact is plated onto the gate electrode and thus is ensured of being fully aligned exactly to the gate electrode. After this, the appropriate dielectric layers are formed adjacent the gate contact and over the source and drain to ensure that the gate electrode is electrically isolated from other components of the transistor. | 12-13-2012 |
| 20120313154 | MOS Transistor Having Combined-Source Structure With Low Power Consumption and Method for Fabricating the Same - The present invention discloses a MOS transistor having a combined-source structure with low power consumption, which relates to a field of field effect transistor logic devices and circuits in CMOS ultra-large-scaled integrated circuits. The MOS transistor includes a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a Schottky source region, a highly-doped source region and a highly-doped drain region. An end of the control gate extends to the highly-doped source region to form a T shape, wherein the extending region of the control gate is an extending gate and the remaining region of the control gate is a main gate. The active region covered by the extending gate is a channel region, and material thereof is the substrate material. A Schottky junction is formed between the Schottky source region and the channel under the extending gate. The combined-source structure according to the invention combines a Schottky barrier and a T-shaped gate, improves the performance of the device, and the fabrication method thereof is simple. Thus, a higher turn-on current, a lower leakage current, and a steeper subthreshold slope can be obtained, and the present application can be applied in the field of low power consumption and have a higher practical value. | 12-13-2012 |
| 20120319179 | METAL GATE AND FABRICATION METHOD THEREOF - A metal gate includes a substrate, a gate dielectric layer, a work function metal layer, an aluminum nitride layer and a stop layer. The gate dielectric layer is located on the substrate. The work function metal layer is located on the gate dielectric layer. The aluminum nitride layer is located on the work function metal layer. The stop layer is located on the aluminum nitride layer. | 12-20-2012 |
| 20120319180 | LARGE DIMENSION DEVICE AND METHOD OF MANUFACTURING SAME IN GATE LAST PROCESS - An integrated circuit device and methods of manufacturing the same are disclosed. In an example, integrated circuit device includes a gate structure disposed over a substrate; a source region and a drain region disposed in the substrate, wherein the gate structure interposes the source region and the drain region; and at least one post feature embedded in the gate structure. | 12-20-2012 |
| 20120319181 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a semiconductor structure, which comprises a substrate, a semiconductor base, a cavity, a gate stack, sidewall spacers, source/drain regions and a contact layer; wherein, the gate stack is located on the semiconductor base, the sidewall spacers are located on sidewalls of the gate stack, the source/drain regions are embedded within the semiconductor base and located on both sides of the gate stack, the cavity is embedded within the substrate, and the semiconductor base is suspended over the cavity, the thickness in the middle portion of the semiconductor base is greater than the thicknesses at both ends of the semiconductor base in a direction along the gate length, and both ends of the semiconductor base are connected with the substrate in a direction along the gate width; the contact layer covers exposed surfaces of the source/drain regions. Accordingly, the present invention further provides a method for manufacturing a semiconductor structure, which is favorable for reducing the contact resistance at the source/drain regions, enhancing the device performance, lowering the cost and simplifying the manufacturing process. | 12-20-2012 |
| 20120319182 | SEMICONDUCTOR DEVICE PRODUCTION METHOD AND SEMICONDUCTOR DEVICE - A semiconductor device production method includes: forming in a silicon substrate first and second region of first and second conductivity type in contact with each other; forming a gate electrode above the first and the second region; forming an insulation film covering part of the gate electrode and part of the second region; forming a source region and a drain region of the second conductivity type; forming interlayer insulation film covering the gate electrode and the insulation film; and forming in the interlayer insulation film first, second and third contact hole reaching the source region, the drain region, and the gate electrode, respectively, and at least one additional hole reaching the insulation film, and forming a conductive film in the first, the second, and the third contact hole and the additional hole to form first, second and third electrically conductive via and electrically conductive member. | 12-20-2012 |
| 20120319183 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - One object of the present invention is to provide a structure of a transistor including an oxide semiconductor in a channel formation region in which the threshold voltage of electric characteristics of the transistor can be positive, which is a so-called normally-off switching element, and a manufacturing method thereof. A second oxide semiconductor layer which has greater electron affinity and a smaller energy gap than a first oxide semiconductor layer is formed over the first oxide semiconductor layer. Further, a third oxide semiconductor layer is formed to cover side surfaces and a top surface of the second oxide semiconductor layer, that is, the third oxide semiconductor layer covers the second oxide semiconductor layer. | 12-20-2012 |
| 20120319184 | METHODS AND DEVICES FOR SHIELDING A SIGNAL LINE OVER AN ACTIVE REGION - A multi-path transistor includes an active region including a channel region and an impurity region. A gate is dielectrically separated from the channel region. A signal line is dielectrically separated from the impurity region. A conductive shield is disposed between, and dielectrically separated from, the signal line and the channel region. In some multi-path transistors, the channel region includes an extension-channel region under the conductive shield and the multi-path transistor includes different conduction paths, at least one of the different conduction paths being in the extension-channel region to conduct substantially independent of a voltage on the signal line. In other multi-path transistors, the conductive shield is operably coupled to the impurity region and the multi-path transistor includes different conduction paths, at least one of the different conduction paths being under the conductive shield to conduct substantially independent of a voltage on the signal line. | 12-20-2012 |
| 20120326214 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes: a semiconductor substrate including an active region defined by an isolation layer; a gate line defining a bit line contact region in the active region and extending in one direction; a dielectric layer covering the semiconductor substrate and the gate line formed in the semiconductor substrate; a bit line contact hole formed in the dielectric layer and exposing the bit line contact region; and a bit line contact spaced apart from a sidewall of the bit line contact hole and formed in the bit line contact hole. | 12-27-2012 |
| 20120326215 | METHOD FOR FABRICATION OF III-NITRIDE DEVICE AND THE III-NITRIDE DEVICE THEREOF - A III-nitride device is provided comprising a semiconductor substrate; a stack of active layers on the substrate, each layer comprising a III-nitride material; a gate, a source and a drain contact on the stack, wherein a gate, a source and a drain region of the substrate are projections of respectively the gate, the source and the drain contact in the substrate; and a trench in the substrate extending from a backside of the substrate (side opposite to the one in contact with the stack of active layers) to an underlayer of the stack of active layers in contact with the substrate, the trench completely surrounding the drain region, being positioned in between an edge of the gate region towards the drain and an edge of the drain region towards the gate and having a width such that the drain region of the substrate is substantially made of the semiconductor material. | 12-27-2012 |
| 20120326216 | DEVICES AND METHODS TO OPTIMIZE MATERIALS AND PROPERTIES FOR REPLACEMENT METAL GATE STRUCTURES - Devices and methods for device fabrication include forming a gate structure with a sacrificial material. Silicided regions are formed on source/drain regions adjacent to the gate structure or formed at the bottom of trench contacts within source/drain areas. The source/drain regions or the silicided regions are processed to build resistance to subsequent thermal processing and adjust Schottky barrier height and thus reduce contact resistance. Metal contacts are formed in contact with the silicided regions. The sacrificial material is removed and replaced with a replacement conductor. | 12-27-2012 |
| 20120326217 | SEMICONDUCTOR DEVICE INCLUDING MULTIPLE METAL SEMICONDUCTOR ALLOY REGION AND A GATE STRUCTURE COVERED BY A CONTINUOUS ENCAPSULATING LAYER - A method of forming a semiconductor device is provided that in some embodiments encapsulates a gate silicide in a continuous encapsulating material. By encapsulating the gate silicide in the encapsulating material, the present disclosure substantially eliminates shorting between the gate structure and the interconnects to the source and drain regions of the semiconductor device. | 12-27-2012 |
| 20130001657 | SELF-ALIGNED III-V MOSFET DIFFUSION REGIONS AND SILICIDE-LIKE ALLOY CONTACT - A metal oxide semiconductor field effect transistor and method for forming the same include exposing portions on a substrate adjacent to a gate stack, forming a dopant layer over the gate stack and in contact with the substrate in the portions exposed and annealing the dopant layer to drive dopants into the substrate to form self-aligned dopant regions in the substrate. The dopant layer is removed. A metal containing layer is deposited over the gate stack and in contact with the substrate in the exposed portions. The metal containing layer is annealed to drive metal into the substrate to form self-aligned contact regions in a metal alloy formed in the substrate within the dopant regions. The metal layer is then removed. | 01-03-2013 |
| 20130001658 | CORNER TRANSISTOR AND METHOD OF FABRICATING THE SAME - A method of fabricating a corner transistor is described. An isolation structure is formed in a substrate to define an active region. A treating process is performed to make the substrate in the active region have sharp corners at top edges thereof. The substrate in the active region is covered by a gate dielectric layer. A gate conductor is formed over the gate dielectric layer. A source region and a drain region are formed in the substrate beside the gate conductor. | 01-03-2013 |
| 20130001659 | SELF-ALIGNED III-V MOSFET DIFFUSION REGIONS AND SILICIDE-LIKE ALLOY CONTACT - A metal oxide semiconductor field effect transistor and method for forming the same include exposing portions on a substrate adjacent to a gate stack, forming a dopant layer over the gate stack and in contact with the substrate in the portions exposed and annealing the dopant layer to drive dopants into the substrate to form self-aligned dopant regions in the substrate. The dopant layer is removed. A metal containing layer is deposited over the gate stack and in contact with the substrate in the exposed portions. The metal containing layer is annealed to drive metal into the substrate to form self-aligned contact regions in a metal alloy formed in the substrate within the dopant regions. The metal layer is then removed. | 01-03-2013 |
| 20130001660 | PLANAR FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD - Disclosed is a transistor that incorporates epitaxially deposited source/drain semiconductor films and a method for forming the transistor. A crystallographic etch is used to form recesses between a channel region and trench isolation regions in a silicon substrate. Each recess has a first side, having a first profile, adjacent to the channel region and a second side, having a second profile, adjacent to a trench isolation region. The crystallographic etch ensures that the second profile is angled so that all of the exposed recess surfaces comprise silicon. Thus, the recesses can be filled by epitaxial deposition without divot formation. Additional process steps can be used to ensure that the first side of the recess is formed with a different profile that enhances the desired stress in the channel region. | 01-03-2013 |
| 20130009216 | Semiconductor Device With a Dislocation Structure and Method of Forming the Same - A semiconductor device with bi-layer dislocation and method of fabricating the semiconductor device is disclosed. The exemplary semiconductor device and method for fabricating the semiconductor device enhance carrier mobility. The method includes providing a substrate having a gate stack. The method further includes performing a first pre-amorphous implantation process on the substrate and forming a first stress film over the substrate. The method also includes performing a first annealing process on the substrate and the first stress film. The method further includes performing a second pre-amorphous implantation process on the annealed substrate, forming a second stress film over the substrate and performing a second annealing process on the substrate and the second stress film. | 01-10-2013 |
| 20130009217 | Transistor, Method for Manufacturing Transistor, and Semiconductor Chip Comprising the Transistor - It is provided a transistor, a method for manufacturing the transistor, and a semiconductor chip comprising the transistor. A method for manufacturing a transistor may comprise: defining an active area on a semiconductor substrate, and forming on the active area a gate stack, a primary spacer, and source/drain regions, wherein the primary spacer surrounds the gate stack, and the source/drain regions are embedded in the active area and self-aligned with opposite sides of the primary spacer; forming a semiconductor spacer surrounding the primary spacer, and cutting off the ends of the semiconductor spacer in the width direction of the gate stack so as to isolate the source/drain regions from each other; and covering the surfaces of the source/drain regions and the semiconductor spacer with a layer of metal or alloy, and annealing the resulting structure, so that a metal silicide is formed on the surfaces of the source/drain regions, and so that the semiconductor spacer is transformed into a silicide spacer simultaneously. As such, the risk of transistor failure due to atoms or ions of Ni entering the channel region through the source/drain extension regions is reduced. | 01-10-2013 |
| 20130009218 | METAL OXIDE SEMICONDUCTOR FIELD TRANSISTOR - A metal oxide semiconductor field transistor including a source region, a drain region, a gate and a gate dielectric layer is provided. The drain region is located in a substrate. The drain region has an elliptical spiral shape and a starting portion of the drain region is strip or water drop or has a curvature of 0.02 to 0.0025 [1/um]. The source region located in the substrate is around the drain region. The gate is located above the substrate and between the source region and the drain region. The gate dielectric layer is located between the gate and the substrate. | 01-10-2013 |
| 20130009219 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - Provided are a transistor which has electrical characteristics requisite for its purpose and uses an oxide semiconductor layer and a semiconductor device including the transistor. In the bottom-gate transistor in which at least a gate electrode layer, a gate insulating film, and the semiconductor layer are stacked in this order, an oxide semiconductor stacked layer including at least two oxide semiconductor layers whose energy gaps are different from each other is used as the semiconductor layer. Oxygen and/or a dopant may be added to the oxide semiconductor stacked layer. | 01-10-2013 |
| 20130009220 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A transistor which is formed using an oxide semiconductor layer and has electric characteristics needed for the intended use, and a semiconductor device including the transistor are provided. The transistor is formed using an oxide semiconductor stack including at least a first oxide semiconductor layer in contact with a source electrode layer and a drain electrode layer and a second oxide semiconductor layer which is provided over the first oxide semiconductor layer and has an energy gap different from that of the first oxide semiconductor layer. There is no limitation on the stacking order of the first oxide semiconductor layer and the second oxide semiconductor layer as long as their energy gaps are different from each other. | 01-10-2013 |
| 20130009221 | SEMICONDUCTOR DEVICES INCLUDING EPITAXIAL LAYERS AND RELATED METHODS - A semiconductor device may include a semiconductor layer having a first conductivity type, a well region of a second conductivity type in the semiconductor layer wherein the first and second conductivity types are different, and a terminal region of the first conductivity type in the well region. An epitaxial semiconductor layer may be on the surface of the semiconductor layer including the well region and the terminal region with the epitaxial semiconductor layer having the first conductivity type across the well and terminal regions. A gate electrode may be on the epitaxial semiconductor layer so that the epitaxial semiconductor layer is between the gate electrode and portions of the well region surrounding the terminal region at the surface of the semiconductor layer. | 01-10-2013 |
| 20130009222 | TRANSISTORS WITH IMMERSED CONTACTS - Embodiments of a semiconductor structure include a first current electrode region, a second current electrode region, and a channel region. The channel region is located between the first current electrode region and the second current electrode region, and the channel region is located in a fin structure of the semiconductor structure. A carrier transport in the channel region is generally in a horizontal direction between the first current electrode region and the second current electrode region. A contact extends into the first current electrode region and is electrically coupled to the first current electrode region. | 01-10-2013 |
| 20130009223 | PATTERNING METHOD, METHOD OF MANUFACTURING ORGANIC FIELD EFFECT TRANSISTOR, AND METHOD OF MANUFACTURING FLEXIBLE PRINTED CIRCUIT BOARD - In the condition where a nozzle for applying a coating liquid is disposed on the lower side of a substrate and a substrate surface controlled in wettability is faced down, the nozzle and the substrate are moved relative to each other, whereby the coating liquid is applied to a desired region of the substrate, and then the coating liquid is dried, to obtain a pattern included a dried coating layer. | 01-10-2013 |
| 20130015509 | LOW RESISTANCE SOURCE AND DRAIN EXTENSIONS FOR ETSOIAANM Haran; Balasubramanian S.AACI WatervlietAAST NYAACO USAAGP Haran; Balasubramanian S. Watervliet NY USAANM Jagannathan; HemanthAACI GuilderlandAAST NYAACO USAAGP Jagannathan; Hemanth Guilderland NY USAANM Kanakasabapathy; Sivananda K.AACI NiskayunaAAST NYAACO USAAGP Kanakasabapathy; Sivananda K. Niskayuna NY USAANM Mehta; SanjayAACI NiskayunaAAST NYAACO USAAGP Mehta; Sanjay Niskayuna NY US - A gate dielectric is patterned after formation of a first gate spacer by anisotropic etch of a conformal dielectric layer to minimize overetching into a semiconductor layer. In one embodiment, selective epitaxy is performed to sequentially form raised epitaxial semiconductor portions, a disposable gate spacer, and raised source and drain regions. The disposable gate spacer is removed and ion implantation is performed into exposed portions of the raised epitaxial semiconductor portions to form source and drain extension regions. In another embodiment, ion implantation for source and drain extension formation is performed through the conformal dielectric layer prior to an anisotropic etch that forms the first gate spacer. The presence of the raised epitaxial semiconductor portions or the conformation dielectric layer prevents complete amorphization of the semiconductor material in the source and drain extension regions, thereby enabling regrowth of crystalline source and drain extension regions. | 01-17-2013 |
| 20130015510 | Transistor, Semiconductor Device, and Method for Manufacturing the SameAANM Yan; JiangAACI NewburghAAST NYAACO USAAGP Yan; Jiang Newburgh NY USAANM Zhao; LichuanAACI BeijingAACO CNAAGP Zhao; Lichuan Beijing CN - The invention provides a transistor, a semiconductor device and a method for manufacturing the same. The method for manufacturing a transistor comprises: defining an active area on a semiconductor substrate, forming a dummy gate stack on the active area, primary spacers surrounding said dummy gate stack, and an insulating layer surrounding said primary spacers, and forming source/drain regions embedded in said active area; removing the dummy gate in said dummy gate stack to form a first recessed portion surrounded by the primary spacers; filling Cu simultaneously in said first recessed portion and in the source/drain contact holes penetrating said insulating layer to form a gate and source/drain contacts. By filling the gate and the source/drain contact holes with the metal Cu simultaneously in the Gate Last structure, the gate serial resistance and the source/drain contact holes resistance in the Gate Last process are decreased. Besides, the effect of metal filling is improved in small scale, and the process complexity and difficulty is efficiently decreased. | 01-17-2013 |
| 20130015511 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICEAANM MIYATA; ToshitakaAACI KanagawaAACO JPAAGP MIYATA; Toshitaka Kanagawa JPAANM AOKI; NobutoshiAACI KanagawaAACO JPAAGP AOKI; Nobutoshi Kanagawa JP - According to one embodiment, a semiconductor device includes a fin-type semiconductor layer formed on a semiconductor substrate, a source layer connected to one end of the fin-type semiconductor layer, a drain layer connected to the other end of the fin-type semiconductor layer, and a gate electrode that includes a first sub electrode that is arranged on the source layer side of the fin-type semiconductor layer to extend toward the drain layer side on the base side of the fin-type semiconductor layer and has a first work function and a second sub electrode that is arranged on the drain layer side of the fin-type semiconductor layer and has a second work function different from the first work function. | 01-17-2013 |
| 20130015512 | LOW RESISTANCE SOURCE AND DRAIN EXTENSIONS FOR ETSOI - A gate dielectric is patterned after formation of a first gate spacer by anisotropic etch of a conformal dielectric layer to minimize overetching into a semiconductor layer. In one embodiment, selective epitaxy is performed to sequentially form raised epitaxial semiconductor portions, a disposable gate spacer, and raised source and drain regions. The disposable gate spacer is removed and ion implantation is performed into exposed portions of the raised epitaxial semiconductor portions to form source and drain extension regions. In another embodiment, ion implantation for source and drain extension formation is performed through the conformal dielectric layer prior to an anisotropic etch that forms the first gate spacer. The presence of the raised epitaxial semiconductor portions or the conformation dielectric layer prevents complete amorphization of the semiconductor material in the source and drain extension regions, thereby enabling regrowth of crystalline source and drain extension regions. | 01-17-2013 |
| 20130020616 | SILICIDED DEVICE WITH SHALLOW IMPURITY REGIONS AT INTERFACE BETWEEN SILICIDE AND STRESSED LINER - A method of forming a semiconductor device includes forming a silicide contact region of a field effect transistor (FET); forming a shallow impurity region in a top surface of the silicide contact region; and forming a stressed liner over the FET such that the shallow impurity region is located at an interface between the silicide contact region and the stressed liner, wherein the shallow impurity region comprises one or more impurities, and is configured to hinder diffusion of silicon within the silicide contact region and prevent morphological degradation of the silicide contact region. | 01-24-2013 |
| 20130020617 | Nickel Alloy Target Including a Secondary Metal - A target includes nickel and a secondary metal. The secondary metal has a volume percentage between about 1 percent and about 10 percent. The secondary metal has a density between about 5,000 kg/m | 01-24-2013 |
| 20130020618 | SEMICONDUCTOR DEVICE, FORMATION METHOD THEREOF, AND PACKAGE STRUCTURE - A semiconductor device, a formation method thereof, and a package structure are provided. The semiconductor device comprises: a semiconductor substrate in which a metal-oxide-semiconductor field-effect transistor (MOSFET) is formed; a dielectric layer, provided on the semiconductor substrate and covering the MOSFET, wherein a plurality of interconnection structures are formed in the dielectric layer; and at least one heat dissipation path, embedded in the dielectric layer between the interconnection structures, for liquid or gas to circulate in the heat dissipation path, wherein openings of the heat dissipation path are exposed on the surface of the dielectric layer. The present invention can improve heat dissipation efficiency, and prevent chips from overheating. | 01-24-2013 |
| 20130020619 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device is disclosed, which reduces a step difference between a peripheral region and a cell region. In the semiconductor device, a metal contact of the peripheral region is configured in a multi-layered structure. Prior to forming a bit line and a storage node contact in the cell region, a contact and a line are formed in the peripheral region, such that a step difference between the cell region and the peripheral region is reduced, resulting in a reduction in parasitic capacitance between lines. | 01-24-2013 |
| 20130026545 | MULTIPLE WELL DRAIN ENGINEERING FOR HV MOS DEVICES - At least one N-well implant having a different doping level is formed in a silicon substrate by first etching the substrate with an alignment target for aligning future process masks thereto. This alignment target is outside of any active device area. By using at least one N-well implant having a different doping level in combination with the substrate, a graded junction in the drift area of a metal oxide semiconductor (MOS) field effect transistor (FET) can be created and a pseudo Ldd structure may be realized thereby. | 01-31-2013 |
| 20130026546 | INTEGRATED CIRCUIT COMPRISING AN ISOLATING TRENCH AND CORRESPONDING METHOD - An integrated circuit including at least one isolating trench that delimits an active area made of a monocrystalline semiconductor material, the or each trench including an upper portion including an insulating layer that encapsulates a lower portion of the trench, the lower portion being at least partly buried in the active area and the encapsulation layer including nitrogen or carbon. | 01-31-2013 |
| 20130032864 | TRANSISTOR WITH BOOT SHAPED SOURCE/DRAIN REGIONS - Devices are formed with boot shaped source/drain regions formed by isotropic etching followed by anisotropic etching. Embodiments include forming a gate on a substrate, forming a first spacer on each side of the gate, forming a source/drain region in the substrate on each side of the gate, wherein each source/drain region extends under a first spacer, but is separated therefrom by a portion of the substrate, and has a substantially horizontal bottom surface. Embodiments also include forming each source/drain region by forming a cavity to a first depth adjacent the first spacer and forming a second cavity to a second depth below the first cavity and extending laterally underneath the first spacers. | 02-07-2013 |
| 20130032865 | FABRICATION OF FIELD-EFFECT TRANSISTORS WITH ATOMIC LAYER DOPING - Field effect transistors fabricated using atomic layer doping processes are disclosed. In accordance with an embodiment of an atomic layer doping method, a semiconducting surface and a dopant gas mixture are prepared. Further, a dopant layer is grown on the semiconducting surface by applying the dopant gas mixture to the semiconducting surface under a pressure that is less than 500 Torr and a temperature that is between 300° C. and 750° C. The dopant layer includes at least 4×10 | 02-07-2013 |
| 20130032866 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A transistor includes an island-like semiconductor film over a substrate, and a conductive film forming a gate electrode over the island-like semiconductor film with a gate insulating film interposed therebetween. The semiconductor film includes a channel forming region, a first impurity region forming a source or drain region, and a second impurity region. The channel forming region is overlapped with the gate electrode crossing the island-like semiconductor film. The first impurity region is adjacent to the channel forming region. The second impurity region is adjacent to the channel forming region and the first impurity region. The first impurity region and the second impurity region have different conductivity. The second impurity region and the channel forming region have different conductivity or have different concentration of an impurity element contained in the second impurity region and the channel forming region in a case of having the same conductivity. | 02-07-2013 |
| 20130037865 | SEMICONDUCTOR STRUCTURE HAVING A WETTING LAYER - A semiconductor structure which includes a semiconductor substrate and a metal gate structure formed in a trench or via on the semiconductor substrate. The metal gate structure includes a gate dielectric; a wetting layer selected from the group consisting of cobalt and nickel on the gate dielectric lining the trench or via and having an oxygen content of no more than about 200 ppm (parts per million) oxygen; and an aluminum layer to fill the remainder of the trench or via. There is also disclosed a method of forming a semiconductor structure in which a wetting layer is formed from cobalt amidinate or nickel amidinate deposited by a chemical vapor deposition process. | 02-14-2013 |
| 20130037866 | METHOD OF FORMING A SEMICONDUCTOR DEVICE - A method for forming a semiconductor device includes providing a substrate and depositing a gate stack having a side periphery on the substrate. A first liner dielectric layer is deposited on the substrate and the gate stack. A first spacer dielectric layer is deposited on the first liner dielectric layer. The first spacer dielectric layer is selectively etched such that the first spacer dielectric layer remains adjacent at least a portion of the side periphery of the gate stack. A first resist mask is disposed on a first portion of the first spacer dielectric layer such that the first portion of the first spacer dielectric layer is protected by the resist mask and a second portion of the first spacer dielectric layer is not protected by the resist mask. The first spacer dielectric layer is etched such that the second portion is removed and the first portion remains. | 02-14-2013 |
| 20130037867 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - According to one embodiment, a semiconductor device includes a substrate, a gate electrode, a channel region, a source region and a drain region. The source region forms a first boundary with the channel region, and the drain region forms a second boundary with the channel region. A side of the gate electrode at the side of the source region has a plurality of convex portions extending along a gate length direction, a side of the gate electrode at the side of the drain region is parallel to a gate width direction, the first boundary and the second boundary have shapes corresponding to the side of the gate electrode at the side of the source region and the side of the gate electrode at the side of the drain region, and the length of the first boundary is more than the length of the second boundary. | 02-14-2013 |
| 20130037868 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes: a first nitride semiconductor layer; a second nitride semiconductor layer formed over the first nitride semiconductor layer; and a gate electrode facing the second nitride semiconductor layer via a gate insulating film. Because the second nitride semiconductor layer is formed by stacking plural semiconductor layers with their Al composition ratios different from each other, the Al composition ratio of the second nitride semiconductor layer changes stepwise. The semiconductor layers forming the second nitride semiconductor layer are polarized in the same direction so that, among the semiconductor layers, a semiconductor layer nearer to the gate electrode has higher (or lower) intensity of polarization. In other words, the intensities of polarization of the semiconductor layers change with an inclination based on their distances from the gate electrode so that, at each interface between two semiconductor layers, the amount of negative charge becomes larger than that of positive charge. | 02-14-2013 |
| 20130037869 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - According to one embodiment, a manufacturing method of a semiconductor device includes a step of forming a dummy-fin semiconductor on a semiconductor substrate; a step of forming an insulating layer, into which a lower part of the dummy-fin semiconductor is buried, on the semiconductor substrate; a step of forming a fin semiconductor, which is bonded to a side face at an upper part of the dummy-fin semiconductor, on the insulating layer; and a step of removing the dummy-fin semiconductor on the insulating layer with the fin semiconductor being left on the insulating layer. | 02-14-2013 |
| 20130037870 | SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD FOR SAME - Disclosed is a manufacturing method for a semiconductor device that prevents excessive etching of a conductive layer, even if the section where a conductive layer contact hole is formed is etched a plurality of times. A light-shielding film | 02-14-2013 |
| 20130043511 | INTEGRATED CIRCUITS AND METHODS OF FORMING INTEGRATED CIRCUITS - An integrated circuit includes a gate electrode disposed over a substrate. A source/drain (S/D) region is disposed adjacent to the gate electrode. The S/D region includes a diffusion barrier structure disposed in a recess of the substrate. The diffusion barrier structure includes a first portion and a second portion. The first portion is adjacent to the gate electrode. The second portion is distant from the gate electrode. An N-type doped silicon-containing structure is disposed over the diffusion barrier structure. The first portion of the diffusion barrier structure is configured to partially prevent N-type dopants of the N-type doped silicon-containing structure from diffusing into the substrate. The second portion of the diffusion barrier structure is configured to substantially completely prevent N-type dopants of the N-type doped silicon-containing structure from diffusing into the substrate. | 02-21-2013 |
| 20130043512 | Semiconductor Device Manufacturing Methods and Methods of Forming Insulating Material Layers - Semiconductor device manufacturing methods and methods of forming insulating material layers are disclosed. In one embodiment, a method of forming a composite insulating material layer of a semiconductor device includes providing a workpiece and forming a first sub-layer of the insulating material layer over the workpiece using a first plasma power level. A second sub-layer of the insulating material layer is formed over the first sub-layer of the insulating material layer using a second plasma power level, and the workpiece is annealed. | 02-21-2013 |
| 20130043513 | SHALLOW TRENCH ISOLATION STRUCTURE AND FABRICATING METHOD THEREOF - A fabricating method of a shallow trench isolation structure includes the following steps. Firstly, a substrate is provided, wherein a high voltage device area is defined in the substrate. Then, a first etching process is performed to partially remove the substrate, thereby forming a preliminary shallow trench in the high voltage device area. Then, a second etching process is performed to further remove the substrate corresponding to the preliminary shallow trench, thereby forming a first shallow trench in the high voltage device area. Afterwards, a dielectric material is filled in the first shallow trench, thereby forming a first shallow trench isolation structure. | 02-21-2013 |
| 20130043514 | MULTIPHASE ULTRA LOW K DIELECTRIC MATERIAL - A multiphase ultra low k dielectric process incorporating an organo-silicon precursor including an organic porogen, high frequency radio frequency power just above plasma initiation in a PECVD chamber and energy post treatment. A porous SiCOH dielectric material having a k less than 2.7 and a modulus of elasticity greater than 7 GPa. A graded carbon adhesion layer of SiO | 02-21-2013 |
| 20130043515 | Strained Channel Field Effect Transistor and the Method for Fabricating the Same - The present invention discloses a strained channel field effect transistor and a method for fabricating the same. The field effect transistor comprises a substrate, a source/drain, a gate dielectric layer, and a gate, characterized in that, an “L” shaped composite isolation layer, which envelops a part of a side face of the source/drain adjacent to a channel and the bottom of the source/drain, is arranged between the source/drain and the substrate; the composite isolation layer is divided into two layers, that is, an “L” shaped insulation thin layer contacting directly with the substrate and an “L” shaped high stress layer contacting directly with the source and the drain. The field effect transistor of such a structure improves the mobility of charge carriers by introducing stress into the channel by means of the high stress layer, while fundamentally improving the device structure of the field effect transistor and improving the short channel effect suppressing ability of the device. | 02-21-2013 |
| 20130043516 | Semiconductor Device and Manufacturing Method Thereof - A method for manufacturing a semiconductor device includes forming a contact etch stop layer on an active area of a substrate that has a gate stack formed thereon. The gate stack includes a metal gate and a metal oxide. The contact etch stop layer includes a silicon oxide layer sandwiched between a first and a silicon nitride layers, the second silicon nitride layer is disposed on the active area. The method further includes forming a contact hole extending through an interlayer dielectric layer on the first silicon nitride layer using the first silicon nitride layer as a protection for the active area, removing a portion the first silicon nitride layer disposed at the bottom of the contact hole using the silicon oxide layer as a protection for the active area, and removing the metal oxide using the second silicon nitride layer as a protection for the active area. | 02-21-2013 |
| 20130043517 | Semiconductor Structure And Method For Manufacturing The Same - The present invention provides a method for manufacturing a semiconductor structure, which comprises: providing a substrate, and forming a dielectric layer and a dummy gate layer on the substrate; performing doping and annealing to the dummy gate layer; patterning the dummy gate layer to form a dummy gate, wherein the top cross section of the dummy gate is larger than the bottom cross section of the dummy gate; forming sidewall spacers and source/drain regions; depositing an interlayer dielectric layer and planarizing the same; removing the dummy gate to form an opening within the sidewall spacers; and forming a gate in the opening. Accordingly, the present invention further provides a semiconductor structure. The present invention proposes to form a dummy gate in the shape of a reverse taper, which is capable of alleviating processing difficulty of removing the dummy gate and filling gate material at subsequent steps, and thereby favorably avoiding occurrence of voids or the like and enhancing reliability of devices. | 02-21-2013 |
| 20130043518 | Semiconductor Device And Method Of Fabricating The Same - A method of fabricating a semiconductor device includes forming an interlayer dielectric on a substrate, the interlayer dielectric including first and second openings respectively disposed in first and second regions formed separately in the substrate; forming a first conductive layer filling the first and second openings; etching the first conductive layer such that a bottom surface of the first opening is exposed and a portion of the first conductive layer in the second opening remains; and forming a second conductive layer filling the first opening and a portion of the second opening. | 02-21-2013 |
| 20130049077 | High Performance Power Transistor Having Ultra-Thin Package - A field-effect transistor package includes a leadframe with a first linear thickness ( | 02-28-2013 |
| 20130049078 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device and a manufacturing method thereof is provided. The method comprises: providing a substrate for the semiconductor device with a gate structure and a first dielectric interlayer being formed thereon, said gate structure comprising a metal gate and an upper surface of said first dielectric interlayer being substantially flush with an upper surface of said gate; forming an interface layer to cover at least the upper surface of said gate such that the upper surface of said gate is protected from being oxidized; and forming a second dielectric interlayer on said interface layer. | 02-28-2013 |
| 20130049079 | Small-Outline Package for a Power Transistor - According to an exemplary embodiment, a small-outline package includes a power transistor having a source and a drain, the power transistor situated on a paddle of a leadframe of the small-outline package. The source of the power transistor is electrically connected to a plurality of source leads. The drain of the power transistor is electrically and thermally connected to a top side of the paddle of the leadframe, the paddle of the leadframe being exposed from a bottom surface of the small-outline package, thereby providing a direct electrical contact to the drain from a bottom side of the paddle of the leadframe. | 02-28-2013 |
| 20130049080 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - According to one embodiment, a semiconductor device includes a fin-type semiconductor, a gate electrode that is formed on a side surface of the fin-type semiconductor with a gate dielectric film therebetween in a state where both end portions of the fin-type semiconductor are exposed, source/drain formed in both end portions of the fin-type semiconductor, an offset spacer and a sidewall spacer that are formed on a side surface of the source/drain and a side surface of the gate electrode in a state where a surface of an upper portion of the fin-type semiconductor is exposed, and a silicide layer that is formed on a surface of the source/drain in the upper portion of the fin-type semiconductor. | 02-28-2013 |
| 20130056802 | IMPLANT FREE EXTREMELY THIN SEMICONDUCTOR DEVICES - A semiconductor device and a method of fabricating a semiconductor device are disclosed. In one embodiment, the method comprises providing a semiconductor substrate, epitaxially growing a Ge layer on the substrate, and epitaxially growing a semiconductor layer on the Ge layer, where the semiconductor layer has a thickness of | 03-07-2013 |
| 20130056803 | SEMICONDUCTOR DEVICE - Power supply plugs, which couple a power supply active region to a power supply metal interconnect, include a plurality of first plugs, which are arranged at first pitches of a predetermined length, and a second plug, which is spaced apart from the closest one of the first plugs by a center-to-center distance different from an integral multiple of the predetermined length. Among the power supply plugs, the second plug is closest to a third plug, which is an interconnect plug closest to the power supply active region and the power supply metal interconnect. | 03-07-2013 |
| 20130056804 | SEMICONDUCTOR DEVICE - A semiconductor device includes a MIS transistor. The MIS transistor includes an active region surrounded by an isolation region in a semiconductor substrate, a gate insulating film formed on the active region and the isolation region, and having a high dielectric constant film, and a gate electrode formed on the gate insulating film. A nitrided region is formed in at least part of a portion of the gate insulating film that is located on the isolation region. A concentration of nitrogen contained in the nitrided region is nx, and a concentration of nitrogen contained in a portion of the gate insulating film that is located on the active region is n, wherein a relationship of nx>n is satisfied. | 03-07-2013 |
| 20130056805 | TRANSISTORS HAVING STRESSED CHANNEL REGIONS AND METHODS OF FORMING TRANSISTORS HAVING STRESSED CHANNEL REGIONS - A method of forming a field effect transistor and a field effect transistor. The method includes (a) forming gate stack on a silicon layer of a substrate; (b) forming two or more SiGe filled trenches in the silicon layer on at least one side of the gate stack, adjacent pairs of the two or more SiGe filled trenches separated by respective silicon regions of the silicon layer; and (c) forming source/drains in the silicon layer on opposite sides of the gate stack, the source/drains abutting a channel region of the silicon layer under the gate stack. | 03-07-2013 |
| 20130062669 | SILICIDE FORMATION AND ASSOCIATED DEVICES - Improved silicide formation and associated devices are disclosed. An exemplary method includes providing a semiconductor material having spaced source and drain regions therein, forming a gate structure interposed between the source and drain regions, performing a gate replacement process on the gate structure to form a metal gate electrode therein, forming a hard mask layer over the metal gate electrode, forming silicide layers on the respective source and drain regions in the semiconductor material, removing the hard mask layer to expose the metal gate electrode, and forming source and drain contacts, each source and drain contact being conductively coupled to a respective one of the silicide layers. | 03-14-2013 |
| 20130062670 | Device with Engineered Epitaxial Region and Methods of Making Same - An engineered epitaxial region compensates for short channel effects of a MOS device by providing a blocking layer to reduce or prevent dopant diffusion while at the same time reducing or eliminating the side effects of the blocking layer such as increased leakage current of a BJT device and/or decreased breakdown voltage of a rectifier. These side effects are reduced or eliminated by a non-conformal dopant-rich layer between the blocking layer and the substrate, which lessens the abruptness of the junction, thus lower the electric field at the junction region. Such a scheme is particularly advantageous for system on chip applications where it is desirable to manufacture MOS, BJT, and rectifier devices simultaneously with common process steps. | 03-14-2013 |
| 20130062671 | NITRIDE SEMICONDUCTOR DEVICE - A nitride semiconductor device includes a first semiconductor layer, a second semiconductor layer, a conductive substrate, a first electrode, a second electrode, and a control electrode. The second semiconductor layer is directly bonded to the first semiconductor layer. The conductive substrate is provided on and electrically connected to the first semiconductor layer. The first electrode and the second electrode are provided on and electrically connected to a surface of the second semiconductor layer on a side opposite to the first semiconductor layer. The control electrode is provided on the surface of the second semiconductor layer between the first electrode and the second electrode. The first electrode is electrically connected to a drain electrode of a MOSFET formed of Si. The control electrode is electrically connected to a source electrode of the MOSFET. The conductive substrate is electrically connected to a gate electrode of the MOSFET. | 03-14-2013 |
| 20130062672 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present disclosure provides a semiconductor device and a method for manufacturing the same. The semiconductor device comprises: a semiconductor layer comprising a plurality of semiconductor sub-layers; and a plurality of fins formed in the semiconductor layer and adjoining the semiconductor layer, wherein at least two of the plurality of fins comprise different numbers of the semiconductor sub-layers and have different heights. According to the present disclosure, a plurality of semiconductor devices with different dimensions and different driving abilities can be integrated on a single wafer. | 03-14-2013 |
| 20130069123 | CMOS SEMICONDUCTOR DEVICES HAVING STRESSOR REGIONS AND RELATED FABRICATION METHODS - Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming first doped stressor regions in a first region of semiconductor material, forming second doped stressor regions in a second region of semiconductor material after forming the first doped stressor regions, and after forming the second doped stressor regions, annealing the semiconductor device structure to activate ions of the first and second doped stressor regions concurrently. The amount of time for the annealing is chosen to inhibit diffusion of the ions of the first and second doped stressor regions. | 03-21-2013 |
| 20130069124 | MOSFET INTEGRATED CIRCUIT WITH UNIFORMLY THIN SILICIDE LAYER AND METHODS FOR ITS MANUFACTURE - An MOSFET device having a Silicide layer of uniform thickness, and methods for its fabrication, are provided. One such method involves depositing a metal layer over wide and narrow contact trenches on the surface of a silicon semiconductor substrate. Upon formation of a uniformly thin amorphous intermixed alloy layer at the metal/silicon interface, the excess (unreacted) metal is removed. The device is annealed to facilitate the formation of a thin silicide layer on the substrate surface which exhibits uniform thickness at the bottoms of both wide and narrow contact trenches. | 03-21-2013 |
| 20130069125 | SEMICONDUCTOR DEVICE, ELECTROSTATIC DISCHARGE PROTECTION DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device, an electrostatic discharge protection device and manufacturing method thereof are provided. The electrostatic discharge protection device includes a gate, a gate dielectric layer, an N-type source region, an N-type drain region, an N-type doped region and a P-type doped region. The gate dielectric layer is disposed on a substrate. The gate is disposed on the gate dielectric layer. The N-type source region and the N-type drain region are disposed in the substrate at two sides of the gate, respectively. The N-type doped region is disposed in the N-type drain region and connects to the top of the N-type drain region. The P-type doped region is disposed under the N-type drain region and connects to the bottom of the N-type drain region. | 03-21-2013 |
| 20130069126 | GERMANIUM-BASED NMOS DEVICE AND METHOD FOR FABRICATING THE SAME - An embodiment of the invention provides a germanium-based NMOS device and a method for fabricating the same, which relates to fabrication process technology of an ultra-large-scale-integrated (ULSI) circuit. The germanium-based NMOS device has two dielectric layer interposed between a metal source/drain and a substrate. The bottom dielectric layer includes a dielectric material having a high pinning coefficient S such as hafnium oxide, silicon nitride, hafnium silicon oxide or the like, and the top dielectric layer includes a dielectric material having a low conduction band offset ΔE | 03-21-2013 |
| 20130069127 | FIELD EFFECT TRANSISTOR AND FABRICATION METHOD THEREOF - A method for fabricating a field effect transistor according to an exemplary embodiment of the present disclosure includes: forming an active layer, a cap layer, an ohmic metal layer and an insulating layer on a substrate; forming multilayered photoresists on the insulating layer; patterning the multilayered photoresists to form a photoresist pattern including a first opening for gate electrode and a second opening for field electrode; etching the insulating layer by using the photoresist pattern as an etching mask so that the insulating layer in the first opening is etched more deeply and the cap layer is exposed through the first opening; etching the cap layer exposed by etching the insulating layer through the first opening to form a gate recess region; and depositing a metal on the gate recess region and the etched insulating layer to form a gate-field electrode layer. | 03-21-2013 |
| 20130069128 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - According to the embodiments, a semiconductor device includes a first semiconductor layer which has a projection extending along a surface of the first semiconductor layer. A gate electrode is over a surface of the projection with an intervening gate insulator. A second semiconductor layer on a portion of the side surface of the projection other than a portion covered with the gate electrode has a trench. A source/drain area is formed in the second semiconductor layer. A silicide film is over a surface of the second semiconductor layer including a surface in the trench. A conductive plug contacts the silicide film. | 03-21-2013 |
| 20130069129 | COMPOUND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - Disclosed is a compound semiconductor device in which a first protective film, which is homogeneous and composed of a single material (SiN, in this case) and therefore has a uniform dielectric constant, continuously covers a compound semiconductor layer; an oxygen-containing protective component, which is a second protective film composed of an oxide film, is formed so as to cover one edge portion of an opening formed in the first protective film; and a gate electrode is formed so as to fill the opening and so as to embrace therein the second protective film. | 03-21-2013 |
| 20130075795 | Aerogel dielectric layer - A circuit board assembly includes a circuit board, a chip attached to the circuit board and a dielectric layer. The chip has a circuit facing the circuit board and spaced from it. The dielectric layer includes an aerogel. In one embodiment, the aerogel has a dielectric constant of approximately 2.0 or less and a compression strength of at least approximately 100 psi. | 03-28-2013 |
| 20130075796 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A method of fabricating a semiconductor device is disclosed. A dummy gate feature is formed between two active gate features over a substrate. An isolation structure is in the substrate and the dummy gate feature is over the isolation structure. In at least one embodiment, a non-conductive material is used for forming the dummy gate feature to replace a sacrificial gate electrode. | 03-28-2013 |
| 20130075797 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In one embodiment, a semiconductor device includes a semiconductor substrate, and a fin disposed on a surface of the semiconductor substrate and having a side surface of a (110) plane. The device further includes a gate insulator disposed on the side surface of the fin, and a gate electrode disposed on the side surface and an upper surface of the fin via the gate insulator. The device further includes a plurality of epitaxial layers disposed on the side surface of the fin in order along a height direction of the fin. | 03-28-2013 |
| 20130082308 | SEMICONDUCTOR DEVICES WITH RAISED EXTENSIONS - Transistor devices and methods of their fabrication are disclosed. In one method, a dummy gate structure is formed on a substrate. Bottom portions of the dummy gate structure are undercut. In addition, stair-shaped, raised source and drain regions are formed on the substrate and within at least one undercut formed by the undercutting. The dummy gate structure is removed and a replacement gate is formed on the substrate. | 04-04-2013 |
| 20130082309 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A method for fabricating a semiconductor device is disclosed. A strained material is formed in a cavity of a substrate and adjacent to an isolation structure in the substrate. The strained material has a corner above the surface of the substrate. The disclosed method provides an improved method for forming the strained material adjacent to the isolation structure with an increased portion in the cavity of the substrate to enhance carrier mobility and upgrade the device performance. The improved formation method is achieved by providing a treatment to redistribute at least a portion of the corner in the cavity. | 04-04-2013 |
| 20130082310 | Semiconductor Structure and Method for Manufacturing the Same - The invention provides a semiconductor structure, comprising a substrate, a semiconductor fin, a gate stack, source/drain regions and a semiconductor body, wherein: the semiconductor fin is located on the semiconductor body, and is connected with the semiconductor body, and both ends of the semiconductor body are connected with the substrate; the gate stack covers the central portion of the semiconductor fin, and extends to the surface of the substrate; and the source/drain regions are located at the end portions of the semiconductor fin; and wherein, cavities are formed in the substrate at both sides of the semiconductor fin, and an insulating material is filled into the cavities. Correspondingly, the invention further provides a method for manufacturing a semiconductor structure. By isolating the semiconductor body under the semiconductor fin from the substrate under the semiconductor body, not only the substrate region under the semiconductor fin is effectively reduced, but also the leakage current between the semiconductor device and the substrate is reduced, and the performance of the semiconductor device is improved. | 04-04-2013 |
| 20130082311 | SEMICONDUCTOR DEVICES WITH RAISED EXTENSIONS - Transistor devices and methods of their fabrication are disclosed. In one method, a dummy gate structure is formed on a substrate. Bottom portions of the dummy gate structure are undercut. In addition, stair-shaped, raised source and drain regions are formed on the substrate and within at least one undercut formed by the undercutting. The dummy gate structure is removed and a replacement gate is formed on the substrate. | 04-04-2013 |
| 20130087837 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a gate structure thereon; forming a first cap layer on a surface of the substrate and sidewall of the gate structure; forming a second cap layer on the first cap layer; forming a third cap layer on the second cap layer; performing an etching process to partially remove the third cap layer, the second cap layer, and the first cap layer to form a first spacer and a second spacer on the sidewall of the gate structure; and forming a contact etch stop layer (CESL) on the substrate to cover the second spacer, wherein the third cap layer and the CESL comprise same deposition condition. | 04-11-2013 |
| 20130092984 | FINFET DEVICE AND METHOD OF MANUFACTURING SAME - A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure including one or more fins disposed on the substrate. The semiconductor device further includes a dielectric layer disposed on a central portion of the fin structure and traversing each of the one or more fins. The semiconductor device further includes a work function metal disposed on the dielectric layer and traversing each of the one or more fins. The semiconductor device further includes a strained material disposed on the work function metal and interposed between each of the one or more fins. The semiconductor device further includes a signal metal disposed on the work function metal and on the strained material and traversing each of the one or more fins. | 04-18-2013 |
| 20130092985 | Spacer for Semiconductor Structure Contact - An embodiment is a semiconductor structure. The semiconductor structure comprises an epitaxial region, a gate structure, a contact spacer, and an etch stop layer. The epitaxial region is in a substrate. A top surface of the epitaxial region is elevated from a top surface of the substrate, and the epitaxial region has a facet between the top surface of the substrate and the top surface of the epitaxial region. The gate structure is on the substrate. The contact spacer is laterally between the facet of the epitaxial region and the gate structure. The etch stop layer is over and adjoins each of the contact spacer and the top surface of the epitaxial region. A ratio of an etch selectivity of the contact spacer to an etch selectivity of the etch stop layer is equal to or less than 3:1. | 04-18-2013 |
| 20130092986 | SEMICONDUCOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device and a method for manufacturing the same, the method comprising: providing a semiconductor substrate; forming a dummy gate area on the substrate, forming spacers on sidewalls of the gate area, and forming source and drain areas in the semiconductor substrate on both sides of the dummy gate area, the dummy gate area comprising an interface layer and a dummy gate electrode; forming a dielectric cap layer on the dummy gate area and source and drain areas; planarizing the device with the dielectric cap layer on the source and drain areas as a stop layer; further removing the dummy gate electrode to expose the interface layer; and forming replacement gate area on the interface layer. The thickness of the gate groove may be controlled by the thickness of the dielectric cap layer, and the replacement gates of desired thickness and width may be further formed upon requirements. Thus, the aspect ratio of the gate groove is reduced and a sufficient low gate resistance is ensured. | 04-18-2013 |
| 20130092987 | MOS TRANSISTOR WITH NO HUMP EFFECT - A MOS transistor formed in an active area of a semiconductor substrate and having a polysilicon gate doped according to a first conductivity type, the gate including two lateral regions of the second conductivity type. | 04-18-2013 |
| 20130092988 | SELF-ALIGNED SILICIDE FORMATION ON SOURCE/DRAIN THROUGH CONTACT VIA - According to certain embodiments, a silicide layer is formed after the fabrication of a functional gate electrode using a gate-last scheme. An initial semiconductor structure has at least one impurity regions formed on a semiconductor substrate, a sacrifice film formed over the impurity region, an isolation layer formed over the sacrifice film and a dielectric layer formed over the isolation film. A via is patterned into the dielectric layer of the initial semiconductor structure and through the thickness of the isolation layer such that a contact opening is formed in the isolation layer. The sacrifice film underlying the isolation layer is then removed leaving a void space underlying the isolation layer. Then, a metal silicide precursor is placed within the void space, and the metal silicide precursor is converted to a silicide layer through an annealing process. | 04-18-2013 |
| 20130099294 | MOSFETs with Multiple Dislocation Planes - A method includes forming a metal-oxide-semiconductor field-effect transistor (MOSFET), which includes forming a first dislocation plane adjacent to a gate electrode of the MOSFET, and forming a second dislocation plane adjacent to the gate electrode of the MOSFET. The first and the second dislocation planes are on a same side of the gate electrode, and extend into source/drain regions of the MOSFET. | 04-25-2013 |
| 20130099295 | REPLACEMENT GATE FABRICATION METHODS - Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming a pair of gate structures having a dielectric region disposed between a first gate structure of the pair and a second gate structure of the pair, and forming a voided region in the dielectric region between the first gate structure and the second gate structure. The first and second gate structures each include a first gate electrode material, wherein the method continues by removing the first gate electrode material to provide second and third voided regions corresponding to the gate structures and forming a second gate electrode material in the first voided region, the second voided region, and the third voided region. | 04-25-2013 |
| 20130105867 | Method of fabricating field effect transistor with fin structure and field effect transistor with fin structure fabricated therefrom | 05-02-2013 |
| 20130105868 | CMOS COMPATIBLE BIOFET | 05-02-2013 |
| 20130105869 | METHOD OF FORMING GROUP III-V MATERIAL LAYER, SEMICONDUCTOR DEVICE INCLUDING THE GROUP III-V MATERIAL LAYER, AND METHOD OF MANUFACTURING THE SEMICONDUCTOR LAYER | 05-02-2013 |
| 20130113025 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention provides a semiconductor device structure and a method for manufacturing the same. The method comprises: providing a semiconductor substrate, forming a first insulating layer on the surface of the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a stripe-type trench embedded in the first insulating layer and the semiconductor substrate; forming a channel region in the trench; forming a gate stack line on the channel region and source/drain regions on opposite sides of the channel region. Embodiments of the present invention are applicable to manufacture of semiconductor devices. | 05-09-2013 |
| 20130113026 | FIN FIELD EFFECT TRANSISTOR GATE OXIDE - The present disclosure provides for methods of fabricating a semiconductor device and such a device. A method includes providing a substrate including at least two isolation features, forming a fin substrate above the substrate and between the at least two isolation features, forming a silicon liner over the fin substrate, and oxidizing the silicon liner to form a silicon oxide liner over the fin substrate. | 05-09-2013 |
| 20130113027 | Metal Oxide Semiconductor Transistor and Manufacturing Method Thereof - The present invention provides a MOS transistor, including a substrate, a gate oxide, a gate, a source/drain region and a silicide layer. The gate oxide is disposed on the substrate and the gate is disposed on the gate oxide. The source/drain region is disposed in the substrate at two sides of the gate. The silicide layer is disposed on the source/drain region, wherein the silicide layer includes a curved bottom surface. The present invention further provides a manufacturing method of the MOS transistor. | 05-09-2013 |
| 20130113028 | SEMICONDUCTOR DEVICE AND FIELD EFFECT TRANSISTOR - A semiconductor device comprises a substrate | 05-09-2013 |
| 20130119444 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - An integrated circuit device and method for manufacturing the integrated circuit device are disclosed. The disclosed method comprises forming a wedge-shaped recess with an initial bottom surface in the substrate; transforming the wedge-shaped recess into an enlarged recess with a height greater than the height of the wedge-shaped recess; and epitaxially growing a strained material in the enlarged recess. | 05-16-2013 |
| 20130119445 | CMOS DEVICE FOR REDUCING RADIATION-INDUCED CHARGE COLLECTION AND METHOD FOR FABRICATING THE SAME - A CMOS device for reducing a radiation-induced charge collection and a method for fabricating the same. In the CMOS device, a heavily doped charge collection-suppressed region is disposed directly under the source region and the drain region. The region has a doping type opposite that of the source region and the drain region, and has a doping concentration not less than that of the source region and the drain region. The charge collection-suppressed region has a lateral part slightly less than or equal to that of the source region and the drain region, and has a lateral range toward to the channel not exceed the edges of the source region and the drain region. The CMOS device may greatly reduce a range of the funnel that appears under the action of a single particle, so that charges collected instantaneously under a force of an electric field may be reduced. | 05-16-2013 |
| 20130119446 | METHOD FOR DEPINNING THE FERMI LEVEL OF A SEMICONDUCTOR AT AN ELECTRICAL JUNCTION AND DEVICES INCORPORATING SUCH JUNCTIONS - An electrical device in which an interface layer comprising arsenic is disposed between and in contact with a conductor and a semiconductor. In some cases, the interface layer may be a monolayer of arsenic. | 05-16-2013 |
| 20130126949 | MOS DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating a metal oxide semiconductor (MOS) device is described, including following steps. Two recesses are formed in a substrate. A first epitaxy growth process is performed, so as to form a first semiconductor compound layer in each of the recesses. A second epitaxy growth process is performed with an epitaxial temperature lower than 700° C., so as to form a cap layer on each of the first semiconductor compound layers. Each of the cap layers includes a second semiconductor compound layer protruding from a surface of the substrate. The first and the second semiconductor compound layers are composed of a first Group IV element and a second Group IV element, wherein the second Group IV element is a nonsilicon element. The content of the second Group IV element in the second semiconductor compound layers is less than that in the first semiconductor compound layers. | 05-23-2013 |
| 20130126950 | Semiconductor Device and Method of Formation - A system and method for forming a semiconductor device is provided. An embodiment comprises forming a silicide region on a substrate along with a transition region between the silicide region and the substrate. The thickness of the silicide precursor material layer along with the annealing conditions are controlled such that there is a larger ratio of one atomic species within the transition region than another atomic species, thereby increasing the hole mobility within the transition region. | 05-23-2013 |
| 20130126951 | Method of Fabricating FinFET Device and Structure Thereof - The present disclosure provides a FinFET device and method of fabricating a FinFET device. The method includes providing a substrate, forming a fin structure on the substrate, forming a gate structure including a gate dielectric and gate electrode, the gate structure overlying a portion of the fin structure, forming a protection layer over another portion of the fin structure, and thereafter performing an implantation process to form source and drain regions. | 05-23-2013 |
| 20130134486 | Methods of Patterning Features in a Structure Using Multiple Sidewall Image Transfer Technique - Disclosed herein are methods of patterning features in a structure, such as a layer of material used in forming integrated circuit devices or in a semiconducting substrate, using a multiple sidewall image transfer technique. In one example, the method includes forming a first mandrel above a structure, forming a plurality of first spacers adjacent the first mandrel, forming a plurality of second mandrels adjacent one of the first spacers, and forming a plurality of second spacers adjacent one of the second mandrels. The method also includes performing at least one etching process to selectively remove the first mandrel and the second mandrels relative to the first spacers and the second spacers and thereby define an etch mask comprised of the first spacers and the second spacer and performing at least one etching process through the etch mask on the structure to define a plurality of features in the structure. | 05-30-2013 |
| 20130134487 | POWER TRANSISTOR DEVICE WITH SUPER JUNCTION AND MANUFACTURING METHOD THEREOF - The present invention provides a power transistor device with a super junction including a substrate, a first epitaxial layer, a second epitaxial layer, and a third epitaxial layer. The first epitaxial layer is disposed on the substrate, and has a plurality of trenches. The trenches are filled up with the second epitaxial layer, and a top surface of the second epitaxial layer is higher than a top surface of the first epitaxial layer. The second epitaxial layer has a plurality of through holes penetrating through the second epitaxial layer and disposed on the first epitaxial layer. The second epitaxial layer and the first epitaxial layer have different conductivity types. The through holes are filled up with the third epitaxial layer, and the third epitaxial layer is in contact with the first epitaxial layer. The third epitaxial layer and the first epitaxial layer have the same conductivity type. | 05-30-2013 |
| 20130134488 | Semiconductor Device and Manufacturing Method thereof - A semiconductor device and a manufacturing method thereof are provided. The fin semiconductor device includes a fin formed on a substrate and an insulating material layer formed on the substrate and surrounding the fin. The fin has a semiconductor layer that has a source region portion and a drain region portion. The fin includes a first channel control region, a second channel control region, and a channel region between the two channel control regions, all of which are positioned between the source region portion and the drain region portion. The two channel control regions may have the same conductivity type, different from the channel region. | 05-30-2013 |
| 20130134489 | PIXEL STRUCTURE AND FABRICATING METHOD THEREOF - A fabrication method of a pixel structure and a pixel structure are provided. A first patterned metal layer including scan lines and a gate is formed on a substrate. A first insulation layer, a semiconductor layer, an etching stop pattern and a metal layer are formed sequentially on the first patterned metal layer. The metal layer and the semiconductor layer are patterned to form a second patterned metal layer and a patterned semiconductor layer. The second patterned metal layer includes data lines, a source and a drain. The patterned semiconductor layer includes a first semiconductor pattern completely overlapping the second patterned metal layer and a second semiconductor pattern without overlapping the second patterned metal layer, wherein the second semiconductor pattern includes a channel pattern and a marginal pattern. The channel pattern is between the source and the drain and the marginal pattern surrounds the first semiconductor pattern. | 05-30-2013 |
| 20130140612 | FIELD-EFFECT TRANSISTOR HAVING BACK GATE AND METHOD OF FABRICATING THE SAME - A back-bias region is disposed on a substrate. A buried insulating layer covers the substrate and the back-bias region. A body is formed on the buried insulating layer and partially overlaps the back-bias region. A drain is in contact with the body. A gate electrode covers top and lateral surfaces of the body. | 06-06-2013 |
| 20130146949 | MECHANISMS FOR FORMING STRESSOR REGIONS IN A SEMICONDUCTOR DEVICE - The embodiments of processes and structures described above provide mechanisms for improving mobility of carriers. The dislocations in the source and drain regions and the strain created by the doped epitaxial materials next to the channel region of a transistor both contribute to the strain in the channel region. As a result, the device performance is improved. | 06-13-2013 |
| 20130146950 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device and manufacture method thereof include a silicide material formed on a source region and a drain region on opposite sides of a gate, wherein the gate having sidewalls on both side surfaces is formed on a substrate. The gate has a first sidewall spacer and a second sidewall spacer on each sidewall, the first spacer has a horizontal portion and a vertical portion, the horizontal portion is located between the second sidewall spacer and the substrate, the vertical portion is located between the second sidewall spacer and the sidewalls. A protecting layer is selectively deposited on the silicide material. | 06-13-2013 |
| 20130146951 | CROSS-HAIR CELL WORDLINE FORMATION - Methods and devices depicting fabrication of non-planar access devices having fins and narrow trenches, among which is a method that includes wet etching a conductor to form a recessed region and subsequently etching the conductor to form gates on the fins. The wet etching may include formation of recesses which are may be backfilled with a fill material to form spacers on the conductor. Portions of a plug may be removed during the wet etch to form overhanging spacers to provide further protection of the conductor during the dry etch. | 06-13-2013 |
| 20130153974 | TWO-STEP SILICIDE FORMATION - One embodiment of the present invention comprises a transistor having a source/drain region within a substrate, an extension region within the substrate adjoining the source/drain region and extending toward a gate on the substrate, and a dielectric spacer against the gate wherein the dielectric spacer covers at least part of the extension region. A silicide intermix layer is formed over both the source/drain region and a portion of the extension region. A silicide contact is formed through the silicide intermix layer over the source/drain region. | 06-20-2013 |
| 20130161707 | Resistive Memory and Methods for Forming the Same - A device includes an active region formed of a semiconductor material, a gate dielectric at a surface of the active region, and a gate electrode over the gate dielectric. A first source/drain region and a second source/drain region are on opposite sides of the gate electrode. A Contact Etch Stop Layer (CESL) is over the first and the second source/drain regions. An Inter-Layer Dielectric (ILD) includes a top surface substantially level with a top surface of the gate electrode. A first contact plug is over and electrically connected to the first source/drain region. A second contact plug is over and aligned to the second source/drain region. The second contact plug and the second source/drain region are spaced apart from each other by a portion of the first CESL to form a capacitor. | 06-27-2013 |
| 20130161708 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure includes a substrate, a die and a medium. The substrate has an upper substrate surface. The substrate has a trench extended downward from the upper substrate surface. The trench has a side trench surface. The die is in the trench. The die has a lower die surface and a side die surface. The lower die surface is below the upper substrate surface. A part of the trench between the side trench surface and the side die surface is filled with the medium. | 06-27-2013 |
| 20130161709 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a carrier transit layer above a substrate, a carrier supply layer above the carrier transit layer, an etching stopper layer above the carrier supply layer, the etching stopper layer being coupled to a gate electrode, and a cap layer above the etching stopper layer, the cap layer being coupled to each of a source electrode and a drain electrode and having a conduction band energy lower than that of the etching stopper layer, wherein a portion of the etching stopper layer on the cap layer includes Silicon. | 06-27-2013 |
| 20130168742 | INTEGRATED CIRCUIT CONFIGURATION AND FABRICATING METHOD THEREOF - An integrated circuit configuration includes a substrate, a diffusion region, a gate structure, an extension conductor structure, a dielectric layer, a contact structure, and a metal conductor line. The diffusion region is formed in the substrate. The gate structure is formed over the substrate and spanned across the diffusion region. The extension conductor structure is formed over the semiconductor substrate and contacted with the diffusion region. The extension conductor structure is extended externally to a first position along a surface of the substrate, wherein the first position is outside the diffusion region. The dielectric layer is formed over the substrate, the gate structure and the extension conductor structure. The contact structure is penetrated through the dielectric layer to be contacted with the first position of the extension conductor structure. The metal conductor line is formed on the dielectric layer and contacted with the contact structure. | 07-04-2013 |
| 20130168743 | STRAINED TRANSISTOR STRUCTURE - A strain enhanced transistor is provided having a strain inducing layer overlying a gate electrode. The gate electrode has sloped sidewalls over the channel region of the transistor. | 07-04-2013 |
| 20130168744 | Semiconductor Device Having a Metal Gate and Fabricating Method Thereof - The present invention provides a method of forming a semiconductor device having a metal gate. A substrate is provided and a gate dielectric and a work function metal layer are formed thereon, wherein the work function metal layer is on the gate dielectric layer. Then, a top barrier layer is formed on the work function metal layer. The step of forming the top barrier layer includes increasing a concentration of a boundary protection material in the top barrier layer. Lastly, a metal layer is formed on the top barrier layer. The present invention further provides a semiconductor device having a metal gate. | 07-04-2013 |
| 20130168745 | NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME - A nonvolatile memory device includes a gate structure in which a plurality of interlayer dielectric layers and a plurality of gate electrodes are alternately stacked; a pass gate electrode lying under the gate structure; a sub channel hole defined in the pass gate electrode; a pair of main channel holes defined through the gate structure and communicating with the sub channel hole; a channel layer formed on inner walls of the pair of main channel holes and the sub channel hole; and a metallic substance layer contacting the channel layer in the sub channel hole. | 07-04-2013 |
| 20130168746 | SEMICONDUCTOR DEVICE AND RELATED MANUFACTURING METHOD - A semiconductor device manufacturing method includes providing a mask on a semiconductor member. The method further includes providing a dummy element to cover a portion of the mask that overlaps a first portion of the semiconductor member and to cover a second portion of the semiconductor member. The method further includes removing a third portion of the semiconductor member, which has not been covered by the mask or the dummy element. The method further includes providing a silicon compound that contacts the first portion of the semiconductor member. The method further includes removing the dummy element to expose and to remove the second portion of the semiconductor member. The method further includes forming a gate structure that overlaps the first portion of the semiconductor member. The first portion of the semiconductor member is used as a channel region and is supported by the silicon compound. | 07-04-2013 |
| 20130168747 | Semiconductor Device and Method for Manufacturing A Semiconductor Device - The present invention discloses a method for manufacturing a semiconductor device. According to the method provided by the present disclosure, a dummy gate is formed on a substrate, removing the dummy gate to form an opening having side walls and a bottom gate, a dielectric material is formed on at least a portion of the sidewalls of the opening and the bottom surface of the opening, and a pre-treatment is performed to a portion of the dielectric material layer on the sidewalls of the opening, and thus the properties of the dielectric material is changed, and then the pre-treated dielectric material on the sidewalls of the opening is removed by a selective process. The semiconductor device manufactured by using the method of the present disclosure is capable of effectively reducing parasitic capacitance. | 07-04-2013 |
| 20130168748 | FIN FET STRUCTURE WITH DUAL-STRESS SPACERS AND METHOD FOR FORMING THE SAME - This application discloses a Fin FET structure and a method for forming the same. In the Fin FET structure, there are lower stress spacers disposed over the lower portion of the fin's opposite sidewalls, asserting one stress type to suppress the carrier mobility; there are also upper stress spacers disposed over the upper portion of the fin's opposite sidewalls, asserting an opposite stress type to increase the carrier mobility. Therefore, the leakage current in the fin FET is reduced and the device performance is improved. In the method, the stress spacers are formed by depositing stress layers and etching back the stress layers, where stress types and magnitudes are controllable, resulting in a simple process. | 07-04-2013 |
| 20130168749 | BORDERLESS CONTACT STRUCTURE EMPLOYING DUAL ETCH STOP LAYERS - Each gate structure formed on the substrate includes a gate dielectric, a gate conductor, a first etch stop layer, and a gate cap dielectric. A second etch stop layer is formed over the gate structures, gate spacers, and source and drain regions. A first contact-level dielectric layer and a second contact-level dielectric layer are formed over the second etch stop layer. Gate contact via holes extending at least to the top surface of the gate cap dielectrics are formed. Source/drain contact via holes extending to the interface between the first and second contact-level dielectric layers are subsequently formed. The various contact via holes are vertically extended by simultaneously etching exposed gate cap dielectrics and exposed portions of the first contact-level dielectric layer, then by simultaneously etching the first and second etch stop layers. Source/drain contact vias self-aligned to the outer surfaces gate spacers are thereby formed. | 07-04-2013 |
| 20130175583 | SEMICONDUCTOR DEVICES HAVING DIELECTRIC CAPS ON CONTACTS AND RELATED FABRICATION METHODS - Fabrication methods for semiconductor device structures are provided. One method for fabricating a semiconductor device structure involves forming a first layer of a first dielectric material overlying a doped region formed in a semiconductor substrate, forming a first conductive contact electrically connected to the doped region within the first layer, forming a dielectric cap on the first conductive contact, forming a second layer of a second dielectric material overlying the dielectric cap and a gate structure overlying the semiconductor substrate, and forming a second conductive contact electrically connected to the gate structure within the second layer. | 07-11-2013 |
| 20130175584 | FinFETs and the Methods for Forming the Same - A method includes providing a plurality of semiconductor fins parallel to each other, and includes two edge fins and a center fin between the two edge fins. A middle portion of each of the two edge fins is etched, and the center fin is not etched. A gate dielectric is formed on a top surface and sidewalls of the center fin. A gate electrode is formed over the gate dielectric. The end portions of the two edge fins and end portions of the center fin are recessed. An epitaxy is performed to form an epitaxy region, wherein an epitaxy material grown from spaces left by the end portions of the two edge fins are merged with an epitaxy material grown from a space left by the end portions of the center fin to form the epitaxy region. A source/drain region is formed in the epitaxy region. | 07-11-2013 |
| 20130175585 | Methods of Forming Faceted Stress-Inducing Stressors Proximate the Gate Structure of a Transistor - Disclosed herein are various methods of forming faceted stress-inducing stressors proximate the gate structure of a transistor. In one example, a method includes forming a first recess in an active region of a semiconducting substrate, forming a first semiconductor material in the first recess and forming a gate structure above the first semiconductor material. In this example, the method includes the additional steps of performing a crystalline orientation-dependent etching process on the first semiconductor material to define a plurality of second recesses proximate the gate structure, wherein each of the second recesses has a faceted edge, and forming a first region of stress-inducing semiconductor material in each of the second recesses, wherein each of the first regions of stress-inducing semiconductor material has a faceted edge that engages a corresponding faceted edge in one of the second recesses. | 07-11-2013 |
| 20130175586 | SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device includes: forming a fin-type semiconductor region on a substrate; and introducing an n-type impurity into at least a side of the fin-type semiconductor region by a plasma doping process, thereby forming an n-type impurity region in the side of the fin-type semiconductor region. In the introducing the n-type impurity, when a source power in the plasma doping process is denoted by a character Y [W], the supply of a gas containing the n-type impurity per unit time and per unit volume is set greater than or equal to 5.1×10 | 07-11-2013 |
| 20130175587 | SELF-ALIGNED CONTACT FOR REPLACEMENT GATE DEVICES - A conductive top surface of a replacement gate stack is recessed relative to a top surface of a planarization dielectric layer by at least one etch. A dielectric capping layer is deposited over the planarization dielectric layer and the top surface of the replacement gate stack so that the top surface of a portion of the dielectric capping layer over the replacement gate stack is vertically recessed relative to another portion of the dielectric layer above the planarization dielectric layer. The vertical offset of the dielectric capping layer can be employed in conjunction with selective via etch processes to form a self-aligned contact structure. | 07-11-2013 |
| 20130181259 | STEP-LIKE SPACER PROFILE - Interlayer dielectric gap fill processes are enhanced by forming gate spacers with a step-like or tapered profile. Embodiments include forming a gate electrode on a substrate, depositing a spacer material over the gate electrode, etching the spacer material to form a first spacer on each side of the gate electrode, and pulling back the first spacers to form second spacers which have a step-like profile. Embodiments further include depositing a second spacer material over the gate electrode and the second spacers, and etching the second spacer material to form a third spacer on each second spacer, the second and third spacers forming an outwardly tapered composite spacer. | 07-18-2013 |
| 20130181260 | METHOD FOR FORMING N-SHAPED BOTTOM STRESS LINER - Semiconductor devices with n-shaped bottom stress liners are formed. Embodiments include forming a protuberance on a substrate, conformally forming a sacrificial material layer over the protuberance, forming a gate stack above the sacrificial material layer on a silicon layer, removing the sacrificial material layer to form a tunnel, and forming a stress liner in the tunnel conforming to the shape of the protuberance. Embodiments further include forming a silicon layer over the sacrificial material layer and lining the tunnel with a passivation layer prior to forming the stress liner. | 07-18-2013 |
| 20130181261 | BORDERLESS CONTACT STRUCTURE - A borderless contact structure or partially borderless contact structure and methods of manufacture are disclosed. The method includes forming a gate structure and a space within the gate structure, defined by spacers. The method further includes blanket depositing a sealing material in the space, over the gate structure and on a semiconductor material. The method further includes removing the sealing material from over the gate structure and on the semiconductor material, leaving the sealing material within the space. The method further includes forming an interlevel dielectric material over the gate structure. The method further includes patterning the interlevel dielectric material to form an opening exposing the semiconductor material and a portion of the gate structure. The method further includes forming a contact in the opening formed in the interlevel dielectric material. | 07-18-2013 |
| 20130181262 | Performing Treatment on Stressors - A method includes forming a gate stack over a semiconductor substrate, wherein the gate stack includes a gate dielectric and a gate electrode over the gate dielectric. A portion of the semiconductor substrate adjacent to the gate stack is recessed to form a recess. A semiconductor region is epitaxially grown in the recess. The semiconductor region is implanted with a p-type impurity or an n-type impurity. A dry treatment is performed on the semiconductor region. | 07-18-2013 |
| 20130181263 | Methods of Forming a Dielectric Cap Layer on a Metal Gate Structure - Disclosed herein are various methods of forming isolation structures on FinFETs and other semiconductor devices, and the resulting devices that have such isolation structures. In one example, the method includes forming a plurality of spaced-apart trenches in a semiconducting substrate, wherein the trenches define a fin for a FinFET device, forming a layer of insulating material in the trenches, wherein the layer of insulating material covers a lower portion of the fin but not an upper portion of the fin, forming a protective material on the upper portion of the fin, and performing a heating process in an oxidizing ambient to form a thermal oxide region on the covered lower portion of the fin. | 07-18-2013 |
| 20130181264 | SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF - A semiconductor structure includes at least a fin-shaped structure, a gate, a source/drain region, an interdielectric layer and an epitaxial structure. At least a fin-shaped structure is located on a bottom substrate. The gate covers the fin-shaped structure. The source/drain region is located in the fin-shaped structure next to the gate. The interdielectric layer covers the gate and the fin-shaped structure, wherein the interdielectric layer has a plurality of contact holes, respectively exposing at least a part of the source/drain region. The epitaxial structure is located in each of the contact holes, directly contacts and is only located on the source/drain region. Additionally, a semiconductor process formed said semiconductor structure is also provided. | 07-18-2013 |
| 20130181265 | Methods of Forming a Gate Cap Layer Above a Replacement Gate Structure and a Semiconductor Device That Includes Such a Gate Structure and Cap Layer - Disclosed herein are various methods of forming a gate cap layer above a replacement gate structure, and a device having such a cap layer. In one example, a device disclosed herein includes a replacement gate structure having a dished upper surface, sidewall spacers positioned proximate the replacement gate structure and a gate cap layer positioned above the replacement gate structure, wherein the gate cap layer has a bottom surface that corresponds to the dished upper surface of the replacement gate structure. | 07-18-2013 |
| 20130181266 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - In a method of fabricating a semiconductor device on a substrate having thereon a conductive layer, the conductive layer is patterned to form a plurality of opened regions. A gate insulation layer is formed on a side wall of each of the opened regions. A pillar pattern is formed in each opened region. On each pillar pattern, a gate electrode, which encloses the pillar pattern, is formed by removing the conductive layer between the pillar patterns. | 07-18-2013 |
| 20130181267 | WAFER FILL PATTERNS AND USES - A semiconductor device includes an active region including an element formed in a double etch, double exposure method and an inactive region including one or more fills, at least one of the one or more fills including a cut-away hole formed therein, where the cut-away holes expose a layer in the inactive region used for an endpoint detection. | 07-18-2013 |
| 20130187202 | SPACER PROFILE ENGINEERING USING FILMS WITH CONTINUOUSLY INCREASED ETCH RATE FROM INNER TO OUTER SURFACE - Interlayer dielectric gap fill processes are enhanced by forming gate spacers with a tapered profile. Embodiments include forming a gate electrode on a substrate, depositing a spacer material over the gate electrode and substrate, the spacer layer having a first surface nearest the gate electrode and substrate, a second surface furthest from the gate electrode and substrate, and a continuously increasing etch rate from the first surface to the second surface, and etching the spacer layer to form a spacer on each side of the gate electrode. Embodiments further include forming the spacer layer by depositing a spacer material and continuously decreasing the density of the spacer material during deposition or depositing a carbon-containing spacer material and causing a gradient of carbon content in the spacer layer. | 07-25-2013 |
| 20130187203 | FORMATION OF THE DIELECTRIC CAP LAYER FOR A REPLACEMENT GATE STRUCTURE - Gate to contact shorts are reduced by forming dielectric caps in replaced gate structures. Embodiments include forming a replaced gate structure on a substrate, the replaced gate structure including an ILD having a cavity, a first metal on a top surface of the ILD and lining the cavity, and a second metal on the first metal and filling the cavity, planarizing the first and second metals, forming an oxide on the second metal, removing the oxide, recessing the first and second metals in the cavity, forming a recess, and filling the recess with a dielectric material. Embodiments further include dielectric caps having vertical sidewalls, a trapezoidal shape, a T-shape, or a Y-shape. | 07-25-2013 |
| 20130187204 | HIGH FREQUENCY SEMICONDUCTOR SWITCH - There is provided a high frequency semiconductor switch for improving insertion loss characteristics and harmonic characteristics by providing good voltage distribution in a gate wiring. The field effect transistor includes a source wiring electrically connected to a source region formed on a substrate and extending unidirectionally; a drain wiring electrically connected to a drain region formed on the substrate and extending in parallel with the source wiring; a gate having a parallel portion extending between the source wiring and the drain wiring in approximately parallel with the source wiring and the drain wiring; a gate wiring applying voltage to the gate; and a gate via electrically connecting the gate to the gate wiring, the parallel portion including two ends and formed with a path applying voltage to each of the two ends from the gate via. | 07-25-2013 |
| 20130187205 | EPITAXIAL REPLACEMENT OF A RAISED SOURCE/DRAIN - Disclosed is a semiconductor article which includes a semiconductor substrate; a gate structure having a spacer adjacent to a conducting material of the gate structure wherein a corner of the spacer is faceted to create a faceted space between the faceted spacer and the semiconductor substrate; and a raised source/drain adjacent to the gate structure, the raised source/drain filling the faceted space and having a surface parallel to the semiconductor substrate. Also disclosed is a method of making the semiconductor article. | 07-25-2013 |
| 20130187206 | FinFETs and Methods for Forming the Same - A device includes a semiconductor fin, a gate dielectric on sidewalls of the semiconductor fin, a gate electrode over the gate dielectric, and isolation regions. The isolation regions include a first portion on a side of the semiconductor fin, wherein the first portion is underlying and aligned to a portion of the gate electrode. The semiconductor fin is over a first top surface of the first portion of the isolation regions. The isolation regions further include second portions on opposite sides of the portion of the gate electrode. The second top surfaces of the second portions of the isolation regions are higher than the first top surface of the isolation regions. | 07-25-2013 |
| 20130187207 | REPLACEMENT SOURCE/DRAIN FINFET FABRICATION - A finFET is formed having a fin with a source region, a drain region, and a channel region between the source and drain regions. The fin is etched on a semiconductor wafer. A gate stack is formed having an insulating layer in direct contact with the channel region and a conductive gate material in direct contact with the insulating layer. The source and drain regions are etched to expose a first region of the fin. A portion of the first region is then doped with a dopant. | 07-25-2013 |
| 20130187208 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - According to one embodiment, a semiconductor device comprises an active area extending in a first direction, a contact plug located on a first portion of the active area, and a transistor located on a second portion adjacent to the first portion of the active area in the first direction. A width of a top surface area of the first portion in a second direction perpendicular to the first direction is smaller than that of a top surface area of the second portion in the second direction. | 07-25-2013 |
| 20130187209 | SEMICONDUCTOR DEVICES HAVING ENCAPSULATED STRESSOR REGIONS AND RELATED FABRICATION METHODS - Apparatus and related fabrication methods are provided for semiconductor device structures having silicon-encapsulated stressor regions. One semiconductor device includes a semiconductor substrate, a gate structure overlying the semiconductor substrate, stressor regions formed in the semiconductor substrate proximate the gate structure, and a silicon material overlying the stressor regions, the silicon material encapsulating the stressor regions. | 07-25-2013 |
| 20130193492 | SILICON CARBON FILM STRUCTURE AND METHOD - An improved silicon carbon film structure is disclosed. The film structure comprises multiple layers of silicon carbon and silicon. The multiple layers form stress film structures that have increased substitutional carbon content, and serve to induce stresses that improve carrier mobility for certain types of field effect transistors. | 08-01-2013 |
| 20130193493 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THEREOF - In a semiconductor device including a transistor using an oxide semiconductor film, stable electric characteristics can be provided and high reliability can be achieved. A structure of the semiconductor device, which achieves high-speed response and high-speed operation, is provided. In a semiconductor device including a transistor in which an oxide semiconductor film, a gate insulating film, and a gate electrode layer are stacked in order and a sidewall insulating layer is provided on the side surface of the gate electrode layer, the sidewall insulating layer has an oxygen-excess regions, which is formed in such a manner that a first insulating film is formed and then is subjected to oxygen doping treatment, a second insulating is formed over the first insulating film, and a stacked layer of the first insulating film and the second insulating film are etched. | 08-01-2013 |
| 20130193494 | TRANSISTOR WITH COUNTER-ELECTRODE CONNECTION AMALGAMATED WITH THE SOURCE/DRAIN CONTACT - The field effect device includes an active area made from semi-conducting material and a gate electrode separated from the active area by a dielectric gate material. A counter-electrode is separated from the active area by a layer of electrically insulating material. Two source/drain contacts are arranged on the active area on each side of the gate electrode. One of the source/drain contacts is made from a single material, overspills from the active area and connects the active area with the counter-electrode. The counter-electrode contact is delineated by a closed peripheral insulating pattern. | 08-01-2013 |
| 20130200441 | INTEGRATED CIRCUIT CONTACT STRUCTURE AND METHOD - An integrated circuit having a mis-alignment tolerant electrical contact is formed by providing a semiconductor containing substrate over which is a first FET gate laterally bounded by a first dielectric region, replacing an upper portion of the first FET gate with a second dielectric region, applying a mask having an opening extending partly over an adjacent source or drain contact region of the substrate and over a part of the second dielectric region above the first FET gate, forming an opening through the first dielectric region extending to the contact region and the part of the second dielectric region, and filling the opening with a conductor making electrical connection with the contact region but electrically insulated from the first FET gate by the second dielectric region. A further FET gate may also be provided having an electrical contact thereto formed separately from the source-drain contact. | 08-08-2013 |
| 20130200442 | SALICIDE FORMATION USING A CAP LAYER - A semiconductor device having a source feature and a drain feature formed in a substrate. The semiconductor device having a gate stack over a portion of the source feature and over a portion of the drain feature. The semiconductor device further having a first cap layer formed over substantially the entire source feature not covered by the gate stack, and a second cap layer formed over substantially the entire drain feature not covered by the gate stack. A method of forming a semiconductor device including forming a source feature and drain feature in a substrate. The method further includes forming a gate stack over a portion of the source feature and over a portion of the drain feature. The method further includes depositing a first cap layer over substantially the entire source feature not covered by the gate stack and a second cap layer over substantially the entire drain feature not covered by the gate stack. | 08-08-2013 |
| 20130200443 | Interface Engineering to Optimize Metal-III-V Contacts - Techniques for fabricating self-aligned contacts in III-V FET devices are provided. In one aspect, a method for fabricating a self-aligned contact to III-V materials includes the following steps. At least one metal is deposited on a surface of the III-V material. The at least one metal is reacted with an upper portion of the III-V material to form a metal-III-V alloy layer which is the self-aligned contact. An etch is used to remove any unreacted portions of the at least one metal. At least one impurity is implanted into the metal-III-V alloy layer. The at least one impurity implanted into the metal-III-V alloy layer is diffused to an interface between the metal-III-V alloy layer and the III-V material thereunder to reduce a contact resistance of the self-aligned contact. | 08-08-2013 |
| 20130200444 | SCHOTTKY BARRIER FIELD EFFECT TRANSISTOR WITH CARBON-CONTAINING INSULATION LAYER AND METHOD FOR FABRICATING THE SAME - A Schottky barrier field effect transistor with a carbon-containing insulation layer and a method for fabricating the same are provided. The Schottky barrier field effect transistor comprises: a substrate; a gate stack formed on the substrate; a metal source and a metal drain formed in the substrate on both sides of the gate stack respectively; and the carbon-containing insulation layer formed between the substrate and the metal source and between the substrate and the metal drain respectively, in which a material of the carbon-containing insulation layer is organic molecular chains containing an alkyl group. | 08-08-2013 |
| 20130200445 | HVMOS TRANSISTOR STRUCTURE HAVING OFFSET DISTANCE AND METHOD FOR FABRICATING THE SAME - An HVMOS transistor structure includes: a first ion well of a first conductivity type and a second ion well of a second conductivity type different from the first conductivity type formed over a substrate, wherein the first ion well and the second ion well have a junction at their interface; a gate overlying the first ion well and the second ion well; a drain region of the first conductivity type, in the first ion well, spaced apart from a first sidewall of the gate by an offset distance; and a source region of the first conductivity type in the second ion well. In addition, a method for fabricating the HVMOS transistor structure described above is also provided. | 08-08-2013 |
| 20130207166 | Methods and Apparatus for Doped SiGe Source/Drain Stressor Deposition - A semiconductor device system, structure and method of manufacture of a source/drain with SiGe stressor material to address effects due to dopant out-diffusion are disclosed. In an embodiment, a semiconductor substrate is provided with a gate structure, and recesses for source and drain are formed on opposing sides of the gate structure. Doped stressors are embedded into the recessed source and drain regions, and a plurality of layers of undoped stressor, lightly doped stressor, highly doped stressor, and a cap layer are formed in an in-situ epitaxial process. In another embodiment the doped stressor material is boron doped epitaxial SiGe. In an alternative embodiment an additional layer of undoped stressor material is formed. | 08-15-2013 |
| 20130207167 | TUNNELING FIELD EFFECT TRANSISTOR AND METHOD FOR FABRICATING THE SAME - A tunneling field effect transistor and a method for fabricating the same are provided. The tunneling field effect transistor comprises: a semiconductor substrate; a channel region formed in the semiconductor substrate, with one or more isolation structures formed in the channel region; a first buried layer and a second buried layer formed in the semiconductor substrate and located at both sides of the channel region respectively, the first buried layer being first type non-heavily-doped, and the second buried layer being second type non-heavily-doped; a source region and a drain region formed in the semiconductor substrate and located on the first buried layer and the second buried layer respectively; and a gate dielectric layer formed on the one or more isolation structures, and a gate formed on the gate dielectric layer. | 08-15-2013 |
| 20130214335 | Replacement Gate Approach for High-K Metal Gate Stacks by Using a Multi-Layer Contact Level - In a replacement gate approach, the dielectric material for laterally encapsulating the gate electrode structures may be provided in the form of a first interlayer dielectric material having superior gap filling capabilities and a second interlayer dielectric material that provides high etch resistivity and robustness during a planarization process. In this manner, undue material erosion upon replacing the placeholder material may be avoided, which results in reduced yield loss and superior device uniformity. | 08-22-2013 |
| 20130214336 | METHOD FOR FILLING TRENCH WITH METAL LAYER AND SEMICONDUCTOR STRUCTURE FORMED BY USING THE SAME - A method for filling a trench with a metal layer is disclosed. A deposition apparatus having a plurality of supporting pins is provided. A substrate and a dielectric layer disposed thereon are provided. The dielectric layer has a trench. A first deposition process is performed immediately after the substrate is placed on the supporting pins to form a metal layer in the trench, wherein during the first deposition process a temperature of the substrate is gradually increased to reach a predetermined temperature. When the temperature of the substrate reaches the predetermined temperature, a second deposition process is performed to completely fill the trench with the metal layer. | 08-22-2013 |
| 20130221413 | DIVOT-FREE PLANARIZATION DIELECTRIC LAYER FOR REPLACEMENT GATE - After formation of a silicon nitride gate spacer and a silicon nitride liner overlying a disposable gate structure, a dielectric material layer is deposited, which includes a dielectric material that is not prone to material loss during subsequent exposure to wet or dry etch chemicals employed to remove disposable gate materials in the disposable gate structure. The dielectric material can be a spin-on dielectric material or can be a dielectric metal oxide material. The dielectric material layer and the silicon nitride liner are planarized to provide a planarized dielectric surface in which the disposable gate materials are physically exposed. Surfaces of the planarized dielectric layer is not recessed relative to surfaces of the silicon nitride layer during removal of the disposable gate materials and prior to formation of replacement gate structures, thereby preventing formation of metallic stringers. | 08-29-2013 |
| 20130221414 | Semiconductor FET and Method for Manufacturing the Same - The present invention provides a semiconductor FET and a method for manufacturing the same. The semiconductor FET may comprise: a gate wall; a fin outside the gate wall, both ends of the fin being connected with the source/drain regions on both ends of the fin; and a contact wall on both sides of the gate wall, the contact wall being connected with the source/drain regions via the underlying silicide layer, wherein an airgap is provided around the gate wall. Since an airgap is formed around the gate wall, and particularly the airgap is formed between the gate wall and the contact wall, it is possible to decrease the parasitic capacitance between the gate wall and the contact wall. As a result, the problem of excessive parasitic capacitance resulting from use of the contact wall can be effectively alleviated. | 08-29-2013 |
| 20130221415 | Field-Effect P-N Junction - This disclosure provides systems, methods, and apparatus related to field-effect p-n junctions. In one aspect, a device includes an ohmic contact, a semiconductor layer disposed on the ohmic contact, at least one rectifying contact disposed on the semiconductor layer, a gate including a layer disposed on the at least one rectifying contact and the semiconductor layer and a gate contact disposed on the layer. A lateral width of the rectifying contact is less than a semiconductor depletion width of the semiconductor layer. The gate contact is electrically connected to the ohmic contact to create a self-gating feedback loop that is configured to maintain a gate electric field of the gate. | 08-29-2013 |
| 20130228830 | GATE STRUCTURE FOR SEMICONDUCTOR DEVICE - A semiconductor device and method of fabricating thereof is described that includes a substrate having a fin with a top surface and a first and second lateral sidewall. A hard mask layer may be formed on the top surface of the fin (e.g., providing a dual-gate device). A gate dielectric layer and work function metal layer are formed on the first and second lateral sidewalls of the fin. A silicide layer is formed on the work function metal layer on the first and the second lateral sidewalls of the fin. The silicide layer may be a fully-silicided layer and may provide a stress to the channel region of the device disposed in the fin. | 09-05-2013 |
| 20130228831 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING PROCESS THEREOF - A semiconductor structure includes a substrate having a first conductive type, a well having a second conductive type formed in the substrate, a first doped region and a second doped region formed in the well, a field oxide, a first dielectric layer and a second dielectric layer. The field oxide is formed on a surface region of the well and between the first doped region and the second doped region. The first dielectric layer is formed on the surface region of the well and covers an edge portion of the field oxide. The first dielectric layer has a first thickness. The second dielectric layer is formed on the surface region of the well. The second dielectric layer has a second thickness smaller than the first thickness. | 09-05-2013 |
| 20130228832 | FIN FIELD EFFECT TRANSISTOR AND FABRICATION METHOD - A fin field effect transistor and a method for forming the fin field effect transistor are provided. In an exemplary method, the Fin FET can be formed by forming a dielectric layer and a fin on a semiconductor substrate. The fin can be formed throughout an entire thickness of the dielectric layer and a top surface of the fin is higher than a top surface of the dielectric layer. The fin can be annealed using a hydrogen-containing gas and a repairing gas containing at least an element corresponding to a material of the fin. A gate structure can be formed on the top surface of the dielectric layer and at least on sidewalls of a length portion of the fin after the annealing process. | 09-05-2013 |
| 20130228833 | SYSTEM AND METHOD FOR INTEGRATED CIRCUITS WITH CYLINDRICAL GATE STRUCTURES - A device and method for integrated circuits with surrounding gate structures are disclosed. The device includes a semiconductor substrate and a fin structure on the semiconductor substrate. The fin structure is doped with a first conductivity type and includes a source region at one distal end and a drain region at the opposite distal end. The device further includes a gate structure overlying a channel region disposed between the source and drain regions of the fin structure. The fin structure has a rectangular cross-sectional bottom portion and an arched cross-sectional top portion. The arched cross-sectional top portion is semi-circular shaped and has a radius that is equal to or smaller than the height of the rectangular cross-sectional bottom portion. The source, drain, and the channel regions each are doped with dopants of the same polarity and the same concentration. | 09-05-2013 |
| 20130228834 | CONTACT ETCH STOP LAYERS OF A FIELD EFFECT TRANSISTOR - A field effect transistor, the field effect transistor includes a substrate including a surface and a gate structure including sidewalls and a top surface, the gate structure being positioned over the substrate. The field effect transistor further includes a spacer adjacent to the sidewalls of the gate structure and a first contact etch stop layer over the spacer and extending along the surface of the substrate. The field effect transistor further includes an interlayer dielectric layer adjacent to the first contact etch stop layer, wherein a top surface of the interlayer dielectric layer is coplanar with the top surface of the gate structure. The field effect transistor further includes a second contact etch stop layer over at least a portion of the top surface of the gate structure. | 09-05-2013 |
| 20130228835 | SEMICONDUCTOR STRUCTURES USING REPLACEMENT GATE AND METHODS OF MANUFACTURE - An improved semiconductor device manufactured using, for example, replacement gate technologies. The method includes forming a dummy gate structure having a gate stack and spacers. The method further includes forming a dielectric material adjacent to the dummy gate structure. The method further includes removing the spacers to form gaps, and implanting a halo extension through the gaps and into an underlying diffusion region. | 09-05-2013 |
| 20130228836 | NON-PLANAR SEMICONDUCTOR STRUCTURE - A non-planar semiconductor structure includes a substrate, at least two fin-shaped structures, at least an isolation structure, and a plurality of epitaxial layers. The fin-shaped structures are located on the substrate. The isolation structure is located between the fin-shaped structures, and the isolation structure has a nitrogen-containing layer. The epitaxial layers respectively cover a part of the fin-shaped structures and are located on the nitrogen-containing layer. Anon-planar semiconductor process is also provided for forming the semiconductor structure. | 09-05-2013 |
| 20130234216 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PMOS DEVICE FABRICATED BY THE METHOD - A method for fabricating a semiconductor device is described. A gate layer, a C-doped first protective layer and a hard mask layer are formed on a substrate and then patterned to form a first stack in a first area and a second stack in a second area. A second protective layer is formed on the sidewalls of the first and the second stacks. A blocking layer is formed in the first area and a first spacer formed on the sidewall of the second protective layers on the sidewall of the second stack in the second area. A semiconductor compound is formed in the substrate beside the first spacer. The blocking layer and the first spacer are removed. The hard mask layer in the first stack and the second stack is removed. | 09-12-2013 |
| 20130234217 | MOS Devices Having Non-Uniform Stressor Doping - A device includes a semiconductor substrate, a gate stack over the semiconductor substrate, and a stressor region having at least a portion in the semiconductor substrate and adjacent to the gate stack. The stressor region includes a first stressor region having a first p-type impurity concentration, a second stressor region over the first stressor region, wherein the second stressor region has a second p-type impurity concentration, and a third stressor region over the second stressor region. The third stressor region has a third p-type impurity concentration. The second p-type impurity concentration is lower than the first and the third p-type impurity concentrations. | 09-12-2013 |
| 20130234218 | METAL OXIDE SEMICONDUCTOR (MOS) DEVICE WITH LOCALLY THICKENED GATE OXIDE - A method of fabricating a semiconductor device including providing a gate structure on a channel portion of a semiconductor substrate, wherein the gate structure includes at least one gate dielectric on the channel portion of the semiconductor substrate and at least one gate conductor on the at least one gate dielectric. An edge portion of the at least one gate dielectric is removed on each side of the gate structure, wherein the removing of the edge portion of the gate dielectric provides an exposed base edge of the at least one gate conductor and an exposed channel surface of the semiconductor substrate underlying the gate structure. The sidewall of the gate structure is oxidized, which also oxidizes at least one of the exposed base edge of the at least one gate conductor and the exposed channel surface of the semiconductor substrate that is underlying the gate structure. | 09-12-2013 |
| 20130240956 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device including a substrate, a plurality of isolation structures, at least a gate structure, a plurality of dummy gate structures and a plurality of epitaxial structures is provided. The substrate has an active area defined by the isolation structures disposed within the substrate. That is, the active area is defined between the isolation structures. The gate structure is disposed on the substrate and located within the active area. The dummy gate structures are disposed on the substrate and located out of the active area. The edge of each dummy gate structure is separated from the boundary of the active area with a distance smaller than 135 angstroms. The epitaxial structures are disposed within the active area and in a portion of the substrate on two sides of the gate structure. The invention also provided a method for fabricating semiconductor device. | 09-19-2013 |
| 20130240957 | METHOD OF FORMING GATE DIELECTRIC LAYER AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device includes ion-implanting germanium into a monocrystalline silicon-containing substrate; forming a gate oxide layer over a surface of the monocrystalline silicon-containing substrate and forming, under the gate oxide layer, a germanium-rich region in which the germanium is concentrated, by performing a plasma oxidation process; and crystallizing the germanium-rich region by performing an annealing process. | 09-19-2013 |
| 20130240958 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises: a semiconductor substrate; an active region formed in the semiconductor substrate, in which the active region comprises: a channel region, and a source region and a drain region formed on both sides of the channel region respectively; and a first isolation trench formed in the semiconductor substrate and on both sides of the active region, in which a first rare earth oxide layer is formed in each first isolation trench to produce a stress in the channel region in a channel length direction. | 09-19-2013 |
| 20130240959 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device may include a substrate including an active pattern delimited by a device isolation pattern, a gate electrode crossing the active pattern, a first impurity region and a second impurity region in the active pattern on both sides of the gate electrode, a bit line crossing the gate electrode, a first contact electrically connecting the first impurity region with the bit line, and a first nitride pattern on a lower side surface of the first contact. A width of the first contact measured perpendicular to an extending direction of the bit line may be substantially equal to that of the bit line. | 09-19-2013 |
| 20130248948 | Source/Drain Profile for FinFET - An embodiment is a FinFET device. The FinFET device comprises a fin, a first source/drain region, a second source/drain region, and a channel region. The fin is raised above a substrate. The first source/drain region and the second source/drain region are in the fin. The channel region is laterally between the first and second source/drain regions. The channel region has facets that are not parallel and not perpendicular to a top surface of the substrate. | 09-26-2013 |
| 20130248949 | INTEGRATED CIRCUIT HAVING CHEMICALLY MODIFIED SPACER SURFACE - A method of fabricating an integrated circuit includes depositing a first dielectric material onto a semiconductor surface of a substrate having a gate stack thereon including a gate electrode on a gate dielectric. The first dielectric material is etched to form sidewall spacers on sidewalls of the gate stack. A top surface of the first dielectric material is chemically converted to a second dielectric material by adding at least one element to provide surface converted sidewall spacers. The second dielectric material is chemically bonded across a transition region to the first dielectric material. | 09-26-2013 |
| 20130248950 | SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING THE SAME - Semiconductor devices, and a method of manufacturing the same, include a gate insulating film pattern over a semiconductor substrate. A gate electrode is formed over the gate insulating film pattern. A spacer structure is formed on at least one side of the gate electrode and the gate insulating film pattern. The spacer structure includes a first insulating film spacer contacting the gate insulating film pattern, and a second insulating film spacer on an outer side of the first insulating film spacer. The semiconductor device has an air gap between the first insulating film spacer and the second insulating film spacer. | 09-26-2013 |
| 20130248951 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device is disclosed. The semiconductor device includes: a substrate; a gate structure disposed on the substrate, wherein the gate structure has a high-k dielectric layer; a first seal layer disposed on a sidewall of the gate structure, wherein the first seal layer is an oxygen-free seal layer and is non-L-shaped; and a second seal layer disposed on a sidewall of the first seal layer, wherein the second seal layer is an L-shaped seal layer. | 09-26-2013 |
| 20130248952 | CAPPING DIELECTRIC STRUCTURE FOR TRANSISTOR GATES - The present description relates to the field of fabricating microelectronic transistors, including non-planar transistors, for microelectronic devices. Embodiments of the present description relate to the formation a recessed gate electrode capped by a substantially void-free dielectric capping dielectric structure which may be formed with a high density plasma process. | 09-26-2013 |
| 20130256763 | LOW EXTENSION DOSE IMPLANTS IN SRAM FABRICATION - A static random access memory fabrication array includes at least one p-type field effect transistor, including a gate stack and isolating spacers forming a gate having a gate length Lgate and an effective gate length, Leff and a source and drain region adjacent the gate stack, wherein the source and drain regions are formed from a low extension dose implant that decreases a difference between Lgate and Leff. | 10-03-2013 |
| 20130256764 | GATE STACK OF FIN FIELD EFFECT TRANSISTOR - The description relates to a gate stack of a fin field effect transistor (FinFET). An exemplary structure for a FinFET includes a substrate including a first surface and an insulation region covering a portion of the first surface, where a top of the insulation region defines a second surface. The FinFET further includes a fin disposed through an opening in the insulation region to a first height above the second surface, where a base of an upper portion of the fin is broader than a top of the upper portion, wherein the upper portion has first tapered sidewalls and a third surface. The FinFET further includes a gate dielectric covering the first tapered sidewalls and the third surface and a conductive gate strip traversing over the gate dielectric, where the conductive gate strip has second tapered sidewalls along a longitudinal direction of the fin. | 10-03-2013 |
| 20130256765 | SEMICONDUCTOR DEVICE - A semiconductor device is disclosed. The semiconductor device includes: a substrate; a gate structure disposed on the substrate; a first spacer disposed on a sidewall of the gate structure; a second spacer disposed around the first spacer, wherein the second spacer comprises a L-shaped cap layer and a cap layer on the L-shaped cap layer; a source/drain disposed in the substrate adjacent to two sides of the second spacer; and a CESL disposed on the substrate to cover the gate structure, wherein at least part of the second spacer and the CESL comprise same chemical composition and/or physical property. | 10-03-2013 |
| 20130256766 | SPACER AND PROCESS TO ENHANCE THE STRAIN IN THE CHANNEL WITH STRESS LINER - Process for enhancing strain in a channel with a stress liner, spacer, process for forming integrated circuit and integrated circuit. A first spacer composed of a first oxide and first nitride layer is applied to a gate electrode on a substrate, and a second spacer composed of a second oxide and second nitride layer is applied. Deep implanting of source and drain in the substrate occurs, and removal of the second nitride, second oxide, and first nitride layers. | 10-03-2013 |
| 20130256767 | SOURCE/DRAIN CONTACTS FOR NON-PLANAR TRANSISTORS - The present description relates to the field of fabricating microelectronic devices having non-planar transistors. Embodiments of the present description relate to the formation of source/drain contacts within non-planar transistors, wherein a titanium-containing contact interface may be used in the formation of the source/drain contact with a discreet titanium silicide formed between the titanium-containing interface and a silicon-containing source/drain structure. | 10-03-2013 |
| 20130264612 | DEVICE AND METHOD FOR FORMING SHARP EXTENSION REGION WITH CONTROLLABLE JUNCTION DEPTH AND LATERAL OVERLAP - A method for forming a semiconductor device includes forming a gate stack on a monocrystalline substrate. A surface of the substrate adjacent to the gate stack and below a portion of the gate stack is amorphorized. The surface is etched to selectively remove a thickness of amorphorized portions to form undercuts below the gate stack. A layer is epitaxially grown in the thickness and the undercuts to form an extension region for the semiconductor device. Devices are also provided. | 10-10-2013 |
| 20130264613 | SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF - A semiconductor structure includes agate structure, an epitaxial layer and a carbon-containing silicon germanium cap layer. The gate structure is located on a substrate. The epitaxial layer is located in the substrate beside the gate structure. The carbon-containing silicon germanium cap layer is located on the epitaxial layer. Otherwise, semiconductor processes for forming said semiconductor structure are also provided. | 10-10-2013 |
| 20130264614 | DEVICE AND METHOD FOR FORMING SHARP EXTENSION REGION WITH CONTROLLABLE JUNCTION DEPTH AND LATERAL OVERLAP - A method for forming a semiconductor device includes forming a gate stack on a monocrystalline substrate. A surface of the substrate adjacent to the gate stack and below a portion of the gate stack is amorphorized. The surface is etched to selectively remove a thickness of amorphorized portions to form undercuts below the gate stack. A layer is epitaxially grown in the thickness and the undercuts to form an extension region for the semiconductor device. Devices are also provided. | 10-10-2013 |
| 20130264615 | Semiconductor Device and Method of Formation - A system and method for forming a semiconductor device is provided. An embodiment comprises forming a silicide region on a substrate along with a transition region between the silicide region and the substrate. The thickness of the silicide precursor material layer along with the annealing conditions are controlled such that there is a larger ratio of one atomic species within the transition region than another atomic species, thereby increasing the hole mobility within the transition region. | 10-10-2013 |
| 20130264616 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device and a manufacturing method thereof is provided. The method comprises: providing a substrate for the semiconductor device with a gate structure and a first dielectric interlayer being formed thereon, said gate structure comprising a metal gate and an upper surface of said first dielectric interlayer being substantially flush with an upper surface of said gate; forming an interface layer to cover at least the upper surface of said gate such that the upper surface of said gate is protected from being oxidized; and forming a second dielectric interlayer on said interface layer. | 10-10-2013 |
| 20130264617 | NON-PLANAR TRANSISTORS AND METHODS OF FABRICATION THEREOF - The present description relates to the formation source/drain structures within non-planar transistors, wherein fin spacers are removed from the non-planar transistors in order to form the source/drain structures from the non-planar transistor fins or to replace the non-planar transistor fins with appropriate materials to form the source/drain structures. | 10-10-2013 |
| 20130270611 | SEMICONDUCTOR STRUCTURE HAVING A SOURCE AND A DRAIN WITH REVERSE FACETS - A semiconductor structure including a semiconductor wafer. The semiconductor wafer includes a gate structure, a first trench in the semiconductor wafer adjacent to a first side of the gate structure and a second trench adjacent to a second side of the gate structure, the first and second trenches filled with a doped epitaxial silicon to form a source in the filled first trench and a drain in the filled second trench such that each of the source and drain are recessed and have an inverted facet. In a preferred exemplary embodiment, the epitaxial silicon is doped with boron. | 10-17-2013 |
| 20130270612 | Non-Planar FET and Manufacturing Method Thereof - The present invention provides a non-planar FET which includes a substrate, a fin structure, a gate and a gate dielectric layer. The fin structure is disposed on the substrate. The fin structure includes a first portion adjacent to the substrate wherein the first portion shrinks towards a side of the substrate. The gate is disposed on the fin structure. The gate dielectric layer is disposed between the fin structure and the gate. The present invention further provides a method of manufacturing the non-planar FET. | 10-17-2013 |
| 20130270613 | METHOD OF TRIMMING SPACERS AND SEMICONDUCTOR STRUCTURE THEREOF - A method of trimming spacers includes etching a silicon oxide spacer when forming an outmost spacer, so that a silicon carbon nitride spacer contacting the gate electrode exposes an area. The exposure area of the silicon carbon nitride spacer can then be partly removed by phosphate acid. At the end of the semiconductor process, at least part of the top surface of the silicon carbon nitride spacer will be lower than the top surface of a gate electrode. | 10-17-2013 |
| 20130270614 | FORMATION OF A TRENCH SILICIDE - Systems and methods are presented for controlling formation of a silicide region. A selective etch layer is utilized to control formation of a trench opening, and further can be utilized to open up a trench to facilitate correct exposure of an active Si region to subsequently form a silicide. Issues regarding over-dimension, under-dimension, and misalignment of a trench are addressed. The selective etch material is chosen to facilitate control of the trench formation and also to enable removal of the selective etch layer without affecting any adjacent structures/material. The selective etch layer can be an oxide, for example aluminum oxide, Al | 10-17-2013 |
| 20130270615 | METHOD FOR MAKING TRANSISTORS - A method of making a transistor, comprising: providing a semiconductor substrate; forming a gate stack over the semiconductor substrate; forming an insulating layer over the semiconductor substrate; forming a depleting layer over the insulating layer; etching the depleting layer and the insulating layer; forming a metal layer over the semiconductor substrate; performing thermal annealing; and removing the metal layer. As advantages of the present invention, an upper outside part of each of the sidewalls include a material that can react with the metal layer, so that metal on two sides of the sidewalls is absorbed during the annealing process, preventing the metal from diffusing toward the semiconductor layer, and ensuring that the formed Schottky junctions can be ultra-thin and uniform, and have controllable and suppressed lateral growth. | 10-17-2013 |
| 20130270616 | SEMICONDUCTOR DEVICE - A semiconductor device preventing a defect in manufacturing process, such as disconnection of a film to be formed. Further, a semiconductor device with favorable electric characteristics and high performance can be provided. In a top-gate semiconductor device in which a source electrode and a drain electrode are provided in contact with an oxide semiconductor film, a sidewall insulating film is provided to fill a recessed portion between the source electrode and a gate electrode and a recessed portion between the drain electrode and the gate electrode, which cause disconnection of a film to be formed on and in contact with the gate electrode. Further, the sidewall insulating film is provided so that a recessed portion is not formed between the sidewall insulating film and another film included in the semiconductor device. | 10-17-2013 |
| 20130270617 | INTEGRATION OF BOTTOM-UP METAL FILM DEPOSITION - A gate structure including a substrate and a gate dielectric layer formed over the substrate. The gate structure further includes a workfunction layer over the gate dielectric layer and spacers enclosing the gate dielectric layer and the workfunction layer. A top surface of a portion of the workfunction layer in contact with sidewalls of the spacer is a same distance from the gate dielectric layer as a top surface of a center portion of the work function layer. | 10-17-2013 |
| 20130277719 | Gate Electrodes with Notches and Methods for Forming the Same - A device includes a semiconductor substrate, and a Device Isolation (DI) region extending from a top surface of the semiconductor substrate into the semiconductor substrate. A gate dielectric is disposed over an active region of the semiconductor substrate, wherein the gate dielectric extends over the DI region. A gate electrode is disposed over the gate dielectric, wherein a notch of the gate electrode overlaps a portion of the DI region. | 10-24-2013 |
| 20130277720 | FIN FIELD EFFECT TRANSISTORS - Field effect transistors include a source region and a drain region on a substrate, a fin base protruding from a top surface of the substrate, a plurality of fin portions extending upward from the fin base and connecting the source region with the drain region, a gate electrode on the fin portions, and a gate dielectric between the fin portions and the gate electrode. | 10-24-2013 |
| 20130277721 | METHODS FOR DESIGNING SEMICONDUCTOR DEVICE STRUCTURES AND RELATED SEMICONDUCTOR STRUCTURES INCLUDING DAMASCENE STRUCTURES - A method and apparatus for providing a conductive structure adjacent to a damascene conductive structure in a semiconductor device structure. The semiconductor device structure includes an insulation layer with at least one damascene conductive structure formed therein, wherein the at least one damascene conductive structure includes an insulative, protective layer disposed thereon. The insulative material of the protective layer is able to resist removal by at least some suitable etchants for the insulative material of the insulation layer adjacent to the at least one damascene conductive structure. A self-aligned opening is formed by removing a portion of an insulation layer adjacent the at least one damascene conductive structure. The self-aligned opening is then filled with a conductive material to thereby provide another conductive structure adjacent to the at least one damascene conductive structure. | 10-24-2013 |
| 20130285125 | Through-Substrate Vias and Methods for Forming the Same - A device includes a semiconductor substrate and a Metal-Oxide-Semiconductor (MOS) transistor. The MOS transistor includes a gate electrode over the semiconductor substrate, and a source/drain region on a side of the gate electrode. A source/drain contact plug includes a lower portion and an upper portion over the lower portion, wherein the source/drain contact plug is disposed over and electrically connected to the source/drain region. A gate contact plug is disposed over and electrically connected to the gate electrode, wherein a top surface of the gate contact plug is level with a top surface of the top portion of the source/drain contact plug. A Through-Substrate Via (TSV) extends into the semiconductor substrate. A top surface of the TSV is substantially level with an interface between the gate contact plug and the gate electrode. | 10-31-2013 |
| 20130285126 | NARROW BODY FIELD-EFFECT TRANSISTOR STRUCTURES WITH FREE-STANDING EXTENSION REGIONS - Narrow-body FETs, such as, FinFETs and trigates, exhibit superior short-channel characteristics compared to thick-body devices, such as planar bulk Si FETs and planar partially-depleted SOI (PDSOI) FETs. A common problem, however, with narrow-body devices is high series resistance that often negates the short-channel benefits. The high series resistance is due to either dopant pile-up at the SOI/BOX interface or dopant diffusion into the BOX. This disclosure describes a novel narrow-body device geometry that is expected to overcome the high series resistance problem. | 10-31-2013 |
| 20130285127 | semiconductor structure and method of manufacturing the same - The present application discloses a method for manufacturing a semiconductor structure, comprises the following steps: providing a substrate and forming a gate stack on the substrate; forming an offset spacer surround the gate stack and a dummy spacer surround the offset spacer; forming the S/D region on both sides of the dummy spacer; removing the dummy spacer and portions of the offset spacer on the surface of the substrate; forming a doped spacer on the sidewall of the offset spacer; forming the S/D extension region by allowing the dopants in doped spacer into the substrate; removing the doped spacer. Accordingly, the present application also discloses a semiconductor structure. In the present disclosure the S/D extension region with high doping concentration and shallow junction depth is formed by the formation of a heavily doped doped spacer, which can be removed in the subsequent procedures, in order to efficiently improve the performance of the semiconductor structure. | 10-31-2013 |
| 20130285128 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device and a method for fabricating the same are disclosed. A fin of the semiconductor device including a fin-shaped channel region is configured in the form of a non-uniform structure, and a leakage current caused by the electric field effect generated in the semiconductor device is prevented from being generated, resulting in an increased operation stability of the semiconductor device. | 10-31-2013 |
| 20130285129 | PULSED LASER ANNEAL PROCESS FOR TRANSISTORS WITH PARTIAL MELT OF A RAISED SOURCE-DRAIN - A non-planar transistor including partially melted raised semiconductor source/drains disposed on opposite ends of a semiconductor fin with the gate stack disposed there between. The raised semiconductor source/drains comprise a super-activated dopant region above a melt depth and an activated dopant region below the melt depth. The super-activated dopant region has a higher activated dopant concentration than the activated dopant region and/or has an activated dopant concentration that is constant throughout the melt region. A fin is formed on a substrate and a semiconductor material or a semiconductor material stack is deposited on regions of the fin disposed on opposite sides of a channel region to form raised source/drains. A pulsed laser anneal is performed to melt only a portion of the deposited semiconductor material above a melt depth. | 10-31-2013 |
| 20130292744 | INTEGRATED CIRCUIT AND METHOD FOR FABRICATING THE SAME HAVING A REPLACEMENT GATE STRUCTURE - An integrated circuit includes a first replacement gate structure. The first replacement gate structure includes a layer of a first barrier material that is less than 20 Å in thickness and a layer of a p-type workfunction material. The replacement gate structure is less than about 50 nm in width. | 11-07-2013 |
| 20130292745 | FINFET COMPATIBLE PC-BOUNDED ESD DIODE - A semiconductor device is formed having compatibility with FINFET process flow, while having a large enough junction area of to reduce the discharge ESD current density. Embodiments include forming a removable gate over an N− doped fin on a substrate, forming P+ doped SiGe or Si on an anode side of the fin, and forming N+ doped Si on a cathode side of the fin. The area efficiency of the semiconductor device layout is greatly improved, and, thereby, discharge of ESD current density is mitigated. | 11-07-2013 |
| 20130292746 | DIVOT-FREE PLANARIZATION DIELECTRIC LAYER FOR REPLACEMENT GATE - After formation of a silicon nitride gate spacer and a silicon nitride liner overlying a disposable gate structure, a dielectric material layer is deposited, which includes a dielectric material that is not prone to material loss during subsequent exposure to wet or dry etch chemicals employed to remove disposable gate materials in the disposable gate structure. The dielectric material can be a spin-on dielectric material or can be a dielectric metal oxide material. The dielectric material layer and the silicon nitride liner are planarized to provide a planarized dielectric surface in which the disposable gate materials are physically exposed. Surfaces of the planarized dielectric layer is not recessed relative to surfaces of the silicon nitride layer during removal of the disposable gate materials and prior to formation of replacement gate structures, thereby preventing formation of metallic stringers. | 11-07-2013 |
| 20130292747 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor memory device and a method for fabricating the sane are disclosed. In the semiconductor device, an insulation film of a drain region is formed to have a thick thickness in a local region such that it improves Hot Carrier Degradation (HCD) characteristics. The semiconductor device includes a first insulation film formed over a semiconductor substrate, a gate formed over the first insulation film, and a second insulation film located at a specific region between the first insulation film and the gate. | 11-07-2013 |
| 20130292748 | METHOD FOR MANUFACTURING INSULATED GATE FIELD EFFECT TRANSISTOR - An insulated gate field effect transistor with (a) a base having source/drain regions, a channel forming region, a gate insulating film formed on the channel forming region, an insulating layer covering the source/drain regions, and a gate electrode formation opening provided in a partial portion of the insulating layer above the channel forming region; (b) a gate electrode formed by burying a conducive material layer in the gate electrode formation opening; (c) a first interlayer insulating layer formed on the insulating layer and the gate electrode and containing no oxygen atom as a constituent element; and (d) a second interlayer insulating layer configured to be formed on the first interlayer insulating layer. | 11-07-2013 |
| 20130292749 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - A semiconductor device includes a gate electrode formed over a semiconductor substrate, and a sidewall spacer formed on a sidewall of the gate electrode. The sidewall spacer formed along the sidewall parallel to a gate length direction of the gate electrode has a first thickness, and the sidewall spacer formed along the sidewall parallel to a gate width direction of the gate electrode has a second thickness that is greater than the first thickness. | 11-07-2013 |
| 20130299883 | PRINTED TRANSISTOR AND FABRICATION METHOD - A method for fabricating a thin film transistor includes printing source, drain and channel regions on a passivated transparent substrate, forming a gate dielectric over the channel region and forming a gate conductor over the gate dielectric. A permanent antireflective coating is deposited over the source region, drain region and gate electrode, and an interlevel dielectric layer is formed over the permanent antireflective coating. Openings in the permanent antireflective coating and the interlevel dielectric layer are formed to provide contact holes to the source region, drain region and gate electrode. A conductor is deposited in the contact holes to electrically connect to the source region, drain region and gate electrode. Thin film transistor devices and other methods are also disclosed. | 11-14-2013 |
| 20130299884 | MEMORY DEVICE AND METHOD FOR MANUFACTURING MEMORY DEVICE - A memory device includes a substrate, first and second trench isolations, a plurality of line-type isolations, a first word line, and a second word line. The substrate comprises an active area having source and drain regions. The first and second trench isolations extend parallel to each other. The line-type isolations define the active area together with the first and second trench isolations. The first word line extends across the active area and is formed in the substrate adjacent to the first trench isolation defining a first segment of the active area with the first trench isolation. The second word line extends across the active area and is formed in the substrate adjacent to the second trench isolation defining a second segment of the active area with the second trench isolation. The size of the first segment is substantially equal to the size of the second segment. | 11-14-2013 |
| 20130299885 | FINFET AND METHOD FOR MANUFACTURING THE SAME - A FinFET and a method for manufacturing the same are disclosed. The FinFET comprises an etching stop layer on a semiconductor substrate; a semiconductor fin on the etching stop layer; a gate conductor extending in a direction perpendicular to a length direction of the semiconductor fin and covering at least two side surfaces of the semiconductor fin; a gate dielectric layer between the gate conductor and the semiconductor fin; a source region and a drain region which are provided at two ends of the semiconductor fin respectively; and an interlayer insulating layer adjoining the etching stop layer below the gate dielectric layer, and separating the gate conductor from the etching stop layer and the semiconductor fin. A height of the fin of the FinFET is approximately equal to a thickness of a semiconductor layer for forming the semiconductor fin. | 11-14-2013 |
| 20130307031 | SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR DEVICE HAVING A SEMICONDUCTOR STRUCTURE, AND METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE - According to an embodiment, a semiconductor structure includes a first monocrystalline semiconductor portion having a first lattice constant in a reference direction; a second monocrystalline semiconductor portion having a second lattice constant in the reference direction, which is different to the first lattice constant, on the first monocrystalline semiconductor portion; and a metal layer formed on and in contact with the second monocrystalline semiconductor portion. | 11-21-2013 |
| 20130307032 | METHODS OF FORMING CONDUCTIVE CONTACTS FOR A SEMICONDUCTOR DEVICE - One illustrative method disclosed herein involves forming a contact opening in a layer of insulating material, forming a layer of conductive material above the layer of insulating material that overfills the contact opening, performing at least one chemical mechanical polishing process to remove portions of the conductive material positioned outside of the contact opening and thereby define a conductive contact positioned in the contact opening and, after performing the chemical mechanical polishing process, performing a selective metal deposition process to selectively form additional metal material on an upper surface of the conductive contact. | 11-21-2013 |
| 20130307033 | Borderless Contact For An Aluminum-Containing Gate - An aluminum-containing material is employed to form replacement gate electrodes. A contact-level dielectric material layer is formed above a planarization dielectric layer in which the replacement gate electrodes are embedded. At least one contact via cavity is formed through the contact-level dielectric layer. Any portion of the replacement gate electrodes that is physically exposed at a bottom of the at least one contact via cavity is vertically recessed. Physically exposed portions of the aluminum-containing material within the replacement gate electrodes are oxidized to form dielectric aluminum compound portions. Subsequently, each of the at least one active via cavity is further extended to an underlying active region, which can be a source region or a drain region. A contact via structure formed within each of the at least one active via cavity can be electrically isolated from the replacement gate electrodes by the dielectric aluminum compound portions. | 11-21-2013 |
| 20130307034 | Semiconductor Structure and Method for Manufacturing the Same - A method of manufacturing a semiconductor structure, which comprises the steps of: providing a substrate, forming a fin on the substrate, which comprises a central portion for forming a channel and an end portion for forming a source/drain region and a source/drain extension region; forming a gate stack to cover the central portion of the fin; performing light doping to form a source/drain extension region in the end portion of the fin; forming a spacer on sidewalls of the gate stack; performing heavy doping to form a source/drain region in the end portion of the fin; removing at least a part of the spacer to expose at least a part of the source/drain extension region; forming a contact layer on an upper surface of the source/drain region and an exposed area of the source/drain extension region. Correspondingly, the present invention also provides a semiconductor structure. By forming a thin contact layer in the source/drain extension region, the present invention can not only effectively reduce the contact resistance of the source/drain extension region, but also effectively control the junction depth of the source/drain extension region by controlling the thickness of the contact layer, thereby suppressing the short channel effect. | 11-21-2013 |
| 20130307035 | IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME - A method for fabricating an image sensor includes at least one of: (1) Forming a gate on a semiconductor substrate; (2) Forming spacers on both side walls of the gate and forming a dummy pattern on an upper portion of the semiconductor substrate; and (3) Forming a metal pad for an electrical connection on an upper portion of the dummy pattern. The method may include at least one of: (1) Forming an interlayer dielectric layer covering the entire semiconductor substrate, (2) Etching portions of the interlayer dielectric layer and the semiconductor substrate to form a super-contact hole; and (3) forming an insulation film on the entire surface of the interlayer dielectric layer. The method may include forming normal contact holes such that a portion of an upper portion of the gate and a partial region of the metal pad for an electrical connection are exposed and filling up the normal contact holes with a conductive material to form normal contacts. | 11-21-2013 |
| 20130307036 | SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME - In a semiconductor chip constituting an LCD driver, a mark is formed in an alignment mark formation region over a semiconductor substrate. The mark is formed in the same layer as that of an uppermost layer wiring (third layer wiring) in an integrated circuit formation region. Then, in the lower layer of the mark and a background region surrounding the mark, patterns are formed. At this time, the pattern Pla is formed in the same layer as that of a second layer wiring and the pattern Pib is formed in the same layer as that of a first layer wiring. Further, the pattern P | 11-21-2013 |
| 20130307037 | METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - A method for producing a semiconductor device includes a step of forming a first insulating film around a fin-shaped silicon layer and forming a pillar-shaped silicon layer in an upper portion of the fin-shaped silicon layer; a step of implanting an impurity into upper portions of the pillar-shaped silicon layer and fin-shaped silicon layer and a lower portion of the pillar-shaped silicon layer to form diffusion layers; and a step of forming a polysilicon gate electrode, a polysilicon gate line, and a polysilicon gate pad. The polysilicon gate electrode and the polysilicon gate pad have a larger width than the polysilicon gate line. After these steps follow a step of depositing an interlayer insulating film, exposing and etching the polysilicon gate electrode and the polysilicon gate line, and depositing a metal layer to form a metal gate electrode and a metal gate line, and a step of forming a contact. | 11-21-2013 |
| 20130307038 | FINFET WITH STRESSORS - A fin type transistor includes a dielectric layer on a substrate surface which serves to isolate the gate of the transistor from the substrate. The dielectric layer includes a non-selectively etched surface to produce top portions of fin structures which have reduced height variations across the wafer. The fin type transistor may also include a buried stressor and/or raised or embedded raised S/D stressors to cause a strain in the channel to improve carrier mobility. | 11-21-2013 |
| 20130313619 | FIN FIELD-EFFECT-TRANSISTOR (FET) STRUCTURE AND MANUFACTURING METHOD - A method for fabricating a semiconductor structure includes providing a semiconductor substrate having a first region and a second region, and doping top of the semiconductor substrate to form a doped layer at top surface of the semiconductor substrate over the first region and the second region. The method also includes etching the doped layer to form a first sub-fin in the first region and a first sub-fin in the second region, and forming an insulating layer over the semiconductor substrate including the first sub-fin in the first region and the first sub-fin in the second region. Further, the method includes removing top portions of the first sub-fin in the first region and the first sub-fin in the second region and forming corresponding second sub-fins. | 11-28-2013 |
| 20130313620 | METHOD AND STRUCTURE FOR RADIATION HARDENING A SEMICONDUCTOR DEVICE - Semiconductor devices can be fabricated using conventional designs and process but including specialized structures to reduce or eliminate detrimental effects caused by various forms of radiation. Such semiconductor devices can include the one or more parasitic isolation devices and/or buried guard ring structures disclosed in the present application. The introduction of design and/or process steps to accommodate these novel structures is compatible with conventional CMOS fabrication processes, and can therefore be accomplished at relatively low cost and with relative simplicity. | 11-28-2013 |
| 20130320408 | SEMICONDUCTOR STRUCTURE AND FABRICATING METHOD THEREOF - A semiconductor device comprises a substrate, a metal-semiconductor compound layer and at least one kind of metal dopant. The substrate has a surface. The metal-semiconductor compound layer extends downwards into the substrate from the surface. The metal dopant which is made by one of a group of metal elements with atomic numbers ranging from 57 to 78 or the arbitrary combinations thereof and doped in the metal-semiconductor compound layer and the substrate with at least one peak concentration formed adjacent to the interface of the metal-semiconductor compound layer and the substrate. | 12-05-2013 |
| 20130320409 | SOURCE AND DRAIN ARCHITECTURE IN AN ACTIVE REGION OF A P-CHANNEL TRANSISTOR BY TILTED IMPLANTATION - In sophisticated P-channel transistors, which may frequently suffer from a pronounced surface topography of the active regions with respect to the surrounding isolation regions, superior performance may be achieved by using a tilted implantation upon forming the deep drain and source regions, preferably with the tilt angle of 20 degrees or less, thereby substantially avoiding undue lateral dopant penetration into sensitive channel areas. | 12-05-2013 |
| 20130320410 | METAL GATE ELECTRODE OF A SEMICONDUCTOR DEVICE - The invention relates to integrated circuit fabrication, and more particularly to a metal gate electrode. An exemplary structure for a semiconductor device comprises a substrate comprising a major surface; a first rectangular gate electrode on the major surface comprising a first layer of multi-layer material; a first dielectric material adjacent to one side of the first rectangular gate electrode; and a second dielectric material adjacent to the other 3 sides of the first rectangular gate electrode, wherein the first dielectric material and the second dielectric material collectively surround the first rectangular gate electrode. | 12-05-2013 |
| 20130320411 | BORDERLESS CONTACTS FOR METAL GATES THROUGH SELECTIVE CAP DEPOSITION - A semiconductor device including a gate structure present on a channel portion of a substrate, in which the gate structure includes at least one high-k gate dielectric layer and at least one metal gate conductor. A source region and a drain region is present on opposing sides of the channel portion of the substrate. A metal oxide gate cap is present on an upper surface of the metal gate conductor. The metal oxide composition of the metal oxide gate cap may be zirconium oxide, aluminum oxide, magnesium oxide, hafnium oxide or a combination thereof. Contacts may extend through an intralevel dielectric layer into contact with at least one of the source region and the drain region. | 12-05-2013 |
| 20130320412 | ISOLATED INSULATING GATE STRUCTURE - Systems and methods are presented for forming a gate structure comprising an insulative portion, whereby the insulative portion is utilized to electrically isolate an electrically conductive portion of the gate structure from a conductive element located in the vicinity of the gate structure. The insulative portion is formed by chemically modifying a conductive portion of the gate. Chemical modification is an oxidation process, converting aluminum conductor to aluminum oxide insulator material. Utilizing a chemically modified gate structure enables self aligning contact technique(s) to be utilized with semiconductor devices comprising a replacement metal gate(s). The chemical modification process can be performed prior or after forming a contact opening. | 12-05-2013 |
| 20130320413 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises: a semiconductor substrate; a trench formed in the semiconductor substrate, in which a rare earth oxide layer is formed in the trench; a channel region partly or entirely formed on the rare earth oxide layer; and a source region and a drain region formed at both sides of the channel region, respectively. A relationship between a lattice constant a of the rare earth oxide layer and a lattice constant b of a semiconductor material of the channel region and/or the source region and the drain region is a=(n±c)b, where n is an integer, c is a mismatch ratio of lattice constants, and 0| 12-05-2013 | |
| 20130320414 | BORDERLESS CONTACTS FOR METAL GATES THROUGH SELECTIVE CAP DEPOSITION - A semiconductor device including a gate structure present on a channel portion of a substrate, in which the gate structure includes at least one high-k gate dielectric layer and at least one metal gate conductor. A source region and a drain region is present on opposing sides of the channel portion of the substrate. A metal oxide gate cap is present on an upper surface of the metal gate conductor. The metal oxide composition of the metal oxide gate cap may be zirconium oxide, aluminum oxide, magnesium oxide, hafnium oxide or a combination thereof. Contacts may extend through an intralevel dielectric layer into contact with at least one of the source region and the drain region. | 12-05-2013 |
| 20130320415 | FULL SILICIDATION PREVENTION VIA DUAL NICKEL DEPOSITION APPROACH - Semiconductor devices are formed without full silicidation of the gates and with independent adjustment of silicides in the gates and source/drain regions. Embodiments include forming a gate on a substrate, forming a nitride cap on the gate, forming a source/drain region on each side of the gate, forming a first silicide in each source/drain region, removing the nitride cap subsequent to the formation of the first silicide, and forming a second silicide in the source/drain regions and in the gate, subsequent to removing the nitride cap. Embodiments include forming the first silicide by forming a first metal layer on the source/drain regions and performing a first RTA, and forming the second silicide by forming a second metal layer on the source/drain regions and on the gate and performing a second RTA. | 12-05-2013 |
| 20130320416 | SEMICONDUCTOR DEVICE - A semiconductor device and a method for forming the same are provided. The method includes: providing a substrate having a gate structure and first spacers on both sidewalls of the gate structure formed on a top surface of the substrate; forming first openings in the substrate by using the first spacers as a mask, wherein the first openings are located on both sides of the gate structure; forming second openings by etching the first openings with an etching gas, wherein each of the second openings is an expansion of a corresponding one of the first openings toward the gate structure and extends to underneath an adjacent first spacer; and forming epitaxial layers in the first openings and the second openings. | 12-05-2013 |
| 20130320417 | METHODS TO ENHANCE DOPING CONCENTRATION IN NEAR-SURFACE LAYERS OF SEMICONDUCTORS AND METHODS OF MAKING SAME - A die includes a semiconductive prominence and a surface-doped structure on the prominence. The surface-doped structure makes contact with contact metallization. The prominence may be a source- or drain contact for a transistor. Processes of making the surface-doped structure include wet- vapor- and implantation techniques, and include annealing techniques to drive in the surface doping to only near-surface depths in the semiconductive prominence. | 12-05-2013 |
| 20130328111 | RECESSING AND CAPPING OF GATE STRUCTURES WITH VARYING METAL COMPOSITIONS - A method for recessing and capping metal gate structures is disclosed. Embodiments include: forming a dummy gate electrode on a substrate; forming a hard mask over the dummy gate electrode; forming spacers on opposite sides of the dummy gate electrode and the hard mask; forming an interlayer dielectric (ILD) over the substrate adjacent the spacers; forming a first trench in the ILD down to the dummy gate electrode; removing the dummy gate electrode to form a second trench below the first trench; forming a metal gate structure in the first and second trenches; and forming a gate cap over the metal gate structure. | 12-12-2013 |
| 20130328112 | SEMICONDUCTOR DEVICES HAVING IMPROVED GATE HEIGHT UNIFORMITY AND METHODS FOR FABRICATING SAME - Semiconductor devices and methods for fabricating semiconductor devices are provided. In an embodiment, a method for fabricating a semiconductor device includes forming on a semiconductor surface a temporary gate structure including a polysilicon gate and a cap. A spacer is formed around the temporary gate structure. The cap and a portion of the spacer are removed. A uniform liner is deposited overlying the polysilicon gate. The method removes a portion of the uniform liner overlying the polysilicon gate and the polysilicon gate to form a gate trench. Then, a replacement metal gate is formed in the gate trench. | 12-12-2013 |
| 20130328113 | REGENERATIVE BUILDING BLOCK AND DIODE BRIDGE RECTIFIER AND METHODS - A rectifier building block has four electrodes: source, drain, gate and probe. The main current flows between the source and drain electrodes. The gate voltage controls the conductivity of a narrow channel under a MOS gate and can switch the RBB between OFF and ON states. Used in pairs, the RBB can be configured as a three terminal half-bridge rectifier which exhibits better than ideal diode performance, similar to synchronous rectifiers but without the need for control circuits. N-type and P-type pairs can be configured as a full bridge rectifier. Other combinations are possible to create a variety of devices. | 12-12-2013 |
| 20130328114 | Integrated Transistor and Anti-Fuse as Programming Element for a High-Voltage Integrated Circuit - A semiconductor device includes an N type well region in a P type substrate. A source region of a MOSFET is laterally separated from a boundary of the well region, which includes the drain of the MOSFET. An insulated gate of the MOSFET extends laterally from the source region to at least just past the boundary of the well region. A polysilicon layer, which forms a first plate of a capacitive anti-fuse, is insulated from an area of the well region, which forms the second plate of the anti-fuse. The anti-fuse is programmed by application of a voltage across the first and second capacitive plates sufficient to destroy at least a portion of the second dielectric layer, thereby electrically shorting the polysilicon layer to the drain of the HVFET. | 12-12-2013 |
| 20130328115 | Contact for High-K Metal Gate Device - An integrated circuit includes a semiconductor substrate including a source region and a drain region and a gate dielectric over the semiconductor substrate. A metal gate structure is over the semiconductor substrate and the gate dielectric and between the source and drain regions. The integrated circuit further includes an interlayer dielectric (ILD) over the semiconductor substrate. First and second contacts extend through the ILD and adjacent the source and drain regions, respectively, and a third contact extends through the ILD and adjacent a top surface of the metal gate structure. The third contact further extends into an undercut region of the metal gate structure. | 12-12-2013 |
| 20130334580 | REPLACEMENT METAL GATE PROCESSING WITH REDUCED INTERLEVEL DIELECTRIC LAYER ETCH RATE - A semiconductor structure includes an interlevel dielectric (ILD) layer disposed over a semiconductor substrate and a transistor gate structure formed on the substrate; and a shallow gas cluster ion beam (GCIB) layer infused in a top portion of the ILD layer; wherein the GCIB layer has a slower etch rate with respect to the ILD layer. | 12-19-2013 |
| 20130334581 | Device with MOS Device Including a Secondary Metal and PVD Tool with Target for Making Same - A device includes a substrate and a metal-oxide-semiconductor (MOS) device. The MOS device includes a gate dielectric over the substrate, a gate electrode over the gate dielectric, a source/drain region adjacent the gate dielectric, and a source/drain silicide over and contacting the source/drain region. The source/drain silicide comprises silicon, nickel, and a secondary metal. A ratio of a volume percentage of the secondary metal to a volume percentage of the silicon in the source/drain silicide is between about 0.005 and about 0.1. The secondary metal has a density between about 5,000 kg/m | 12-19-2013 |
| 20130341685 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A manufacturing method for a semiconductor device includes providing a substrate having at least a gate structure formed thereon and a first spacer formed on sidewalls of the gate structure, performing an ion implantation to implant dopants into the substrate, forming a disposal spacer having at least a carbon-containing layer on the sidewalls of the gate structure, the carbon-containing layer contacting the first spacer, and performing a thermal treatment to form a protecting layer between the carbon-containing layer and the first spacer. | 12-26-2013 |
| 20130341686 | Semiconductor Devices, Transistors, and Methods of Manufacture Thereof - Semiconductor devices, transistors, and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device includes a gate dielectric disposed over a workpiece, a gate disposed over the gate dielectric, and a spacer disposed over sidewalls of the gate and the gate dielectric. A source region is disposed proximate the spacer on a first side of the gate, and a drain region is disposed proximate the spacer on a second side of the gate. A metal layer is disposed over the source region and the drain region. The metal layer extends beneath the spacers by about 25% or greater than a width of the spacers. | 12-26-2013 |
| 20130341687 | METAL SILICIDE LAYER, NMOS TRANSISTOR, AND FABRICATION METHOD - Exemplary embodiments provide materials and methods for forming a metal silicide layer and/or an NMOS transistor. The metal silicide layer can be formed by heating a metal layer containing at least a tellurium element on a semiconductor substrate. The metal silicide layer can thus contain at least the tellurium element on the semiconductor substrate. The metal silicide layer can be formed in an NMOS transistor. With the addition of tellurium element in the metal silicide layer, Schottky barrier height between the metal silicide layer and the underling semiconductor substrate can be reduced. Contact resistance of the NMOS transistor can also be reduced. | 12-26-2013 |
| 20130341688 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - Disclosed is a semiconductor device and a method for fabricating the semiconductor device. The method for fabricating the semiconductor device comprises steps of: forming a side cliff in a substrate in accordance with a gate mask pattern, the side cliff being substantially vertical to a substrate surface; forming a dielectric layer on the substrate that comprises the side cliff; etching the dielectric layer to have the dielectric layer left only on the side cliff, as a dielectric wall; and burying the side cliff by a substrate growth, the burying is performed up to a level higher than the upper end of the dielectric wall. | 12-26-2013 |
| 20130341689 | METHOD OF FORMING A SELF-ALIGNED CHARGE BALANCED POWER DMOS - Self-aligned charge balanced semiconductor devices and methods for forming such devices are disclosed. One or more planar gates are formed over a semiconductor substrate of a first conductivity type. One or more deep trenches are etched in the semiconductor self-aligned to the planar gates. The trenches are filled with a semiconductor material of a second conductivity type such that the deep trenches are charge balanced with the adjacent regions of the semiconductor substrate Source and body regions are formed by implanting dopants onto the filled trenches. This process can form self-aligned charge balanced devices with a cell pitch less than 12 microns. | 12-26-2013 |
| 20140001519 | PREVENTING ISOLATION LEAKAGE IN III-V DEVICES | 01-02-2014 |
| 20140001520 | CONTACT RESISTANCE REDUCED P-MOS TRANSISTORS EMPLOYING GE-RICH CONTACT LAYER | 01-02-2014 |
| 20140008706 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME - According to one embodiment, a method for manufacturing a semiconductor device includes forming a fin in an upper surface of a semiconductor substrate to extend in a first direction, forming a mask film, making a plurality of first trenches in the mask film to extend in a second direction to reach the fin, filling sidewall members into the first trenches, making a second trench by removing the mask film from a portion of a space between the sidewall members, forming a gate insulating film and a gate electrode on a surface of a first portion of the fin disposed inside the second trench, making a third trench by removing the mask film from the remaining space between the sidewall members, and causing a second portion of the fin disposed inside the third trench to become a conductor. | 01-09-2014 |
| 20140015014 | FIELD EFFECT TRANSISTORS WITH VARYING THRESHOLD VOLTAGES - A method including providing a semiconductor substrate including a first semiconductor device and a second semiconductor device, the first and second semiconductor devices including dummy spacers, dummy gates, and extension regions; protecting the second semiconductor device with a mask; removing the dummy spacers from the first semiconductor device; and depositing in-situ doped epitaxial regions on top of the extension regions of the first semiconductor device. | 01-16-2014 |
| 20140015015 | FINFET DEVICE WITH A GRAPHENE GATE ELECTRODE AND METHODS OF FORMING SAME - One illustrative device disclosed herein includes at least one fin comprised of a semiconducting material, a layer of gate insulation material positioned adjacent an outer surface of the fin, a gate electrode comprised of graphene positioned on the layer of gate insulation material around at least a portion of the fin, and an insulating material formed on the gate electrode. | 01-16-2014 |
| 20140015016 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a bulk, a gate, a source, a drain and a bulk contact region. The gate is on the bulk. The source and the drain are in the bulk on opposing sides of the gate respectively. The bulk contact region is only in a region of the bulk adjacent to the source. The bulk contact region is electrically connected to the bulk. | 01-16-2014 |
| 20140015017 | HIGH VOLTAGE SEMICONDUCTOR DEVICE AND THE ASSOCIATED METHOD OF MANUFACTURING - The present disclosure discloses a high voltage semiconductor device and the associated methods of manufacturing. In one embodiment, the high voltage semiconductor device comprises: an epitaxial layer, a first low voltage well formed in the epitaxial layer; a second low voltage well formed in the epitaxial layer; a high voltage well formed in the epitaxial layer, wherein the second low voltage well is surrounded by the high voltage well; a first highly doping region formed in the first low voltage well; a second highly doping region and a third highly doping region formed in the second low voltage well, wherein the third highly doping region is adjacent to the second highly doping region; a field oxide formed in the epitaxial layer as a shallow-trench isolation structure; and a gate region formed on the epitaxial layer. | 01-16-2014 |
| 20140015018 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device having a dummy active region for metal ion gathering, which is capable of preventing device failure due to metal ion contamination, and a method of fabricating the same are provided. The semiconductor device includes active regions defined by an isolation layer in a semiconductor substrate and ion-implanted with an impurity, and a dummy active region ion-implanted with an impurity having a concentration higher than that of the impurity in the active region and configured to gather metal ions. | 01-16-2014 |
| 20140015019 | SEMICONDUCTOR DEVICE - The reliability of a field effect transistor made of a nitride semiconductor material is improved. An ohmic electrode includes a plurality of unit electrodes isolated to be separated from each other. With this configuration, an on-state current can be prevented from flowing in the unit electrodes in a y-axial direction (negative direction). Further, in the respective unit electrodes, a current density of the on-state current flowing in the y-axial direction (negative direction) can be prevented from increasing. As a result, an electromigration resistance of the ohmic electrode can be improved. | 01-16-2014 |
| 20140015020 | METHOD FOR FORMING N-SHAPED BOTTOM STRESS LINER - Semiconductor devices with n-shaped bottom stress liners are formed. Embodiments include forming a protuberance on a substrate, conformally forming a sacrificial material layer over the protuberance, forming a gate stack above the sacrificial material layer on a silicon layer, removing the sacrificial material layer to form a tunnel, and forming a stress liner in the tunnel conforming to the shape of the protuberance. Embodiments further include forming a silicon layer over the sacrificial material layer and lining the tunnel with a passivation layer prior to forming the stress liner. | 01-16-2014 |
| 20140015021 | FLOATING BODY MEMORY CELL HAVING GATES FAVORING DIFFERENT CONDUCTIVITY TYPE REGIONS - A method for fabricating floating body memory cells (FBCs), and the resultant FBCs where gates favoring different conductivity type regions are used is described. In one embodiment, a p type back gate with a thicker insulation is used with a thinner insulated n type front gate. Processing, which compensates for misalignment, which allows the different oxide and gate materials to be fabricated is described. | 01-16-2014 |
| 20140015022 | SEMICONDUCTOR DEVICE HAVING RING-SHAPED GATE ELECTRODE, DESIGN APPARATUS, AND PROGRAM - A semiconductor device includes: a substrate; a transistor that has a ring-shaped gate electrode formed on the substrate; a plurality of external dummy electrodes that are arranged outside the gate electrode and are formed in the same layer as the gate electrode; and at least one internal dummy electrode that is arranged inside the gate electrode and is formed in the same layer as the gate electrode. | 01-16-2014 |
| 20140021517 | Semiconductor Device and Fabrication Method Thereof - A semiconductor device and a method for fabricating the semiconductor device are disclosed. An isolation structure is formed in a substrate and a gate stack is formed atop the isolation structure. A spacer is formed adjoining a sidewall of the gate stack and extends beyond an edge of the isolation structure. The disclosed method provides an improved method for protecting the isolation structure by using the spacer. The spacer can prevent the isolation structure from being damaged by chemicals, therefor, to enhance contact landing and upgrade the device performance. | 01-23-2014 |
| 20140027820 | FORMING FACET-LESS EPITAXY WITH SELF-ALIGNED ISOLATION - A method of forming a semiconductor structure may include preparing a continuous active layer in a region of the substrate and forming a plurality of adjacent gates on the continuous active layer. A first raised epitaxial layer may be deposited on a recessed region of the continuous active layer between a first and a second one of the plurality of gates, whereby the first and second gates are adjacent. A second raised epitaxial layer may be deposited on another recessed region of the continuous active layer between the second and a third one of the plurality of gates, whereby the second and third gates are adjacent. Using a cut mask, a trench structure is etched into the second gate structure and a region underneath the second gate in the continuous active layer. The trench is filled with isolation material for electrically isolating the first and second raised epitaxial layers. | 01-30-2014 |
| 20140027821 | DEVICE PERFORMANCE ENHANCEMENT - Among other things, one or more techniques for enhancing device (e.g., transistor) performance are provided herein. In one embodiment, device performance is enhanced by forming an extended dummy region at an edge of a region of a device and forming an active region at a non-edge of the region. Limitations associated with semiconductor fabrication processing present in the extended dummy region more so than in non-edge regions. Accordingly, a device exhibiting enhanced performance is formed by connecting a gate to the active region, where the active region has a desired profile because it is comprised within a non-edge of the region. A dummy device (e.g., that may be less responsive) may be formed to include the extended dummy region, where the extended dummy region has a less than desired profile due to limitations associated with semiconductor fabrication processing, for example. | 01-30-2014 |
| 20140027822 | Copper Contact Plugs with Barrier Layers - A device includes a conductive layer including a bottom portion, and a sidewall portion over the bottom portion, wherein the sidewall portion is connected to an end of the bottom portion. An aluminum-containing layer overlaps the bottom portion of the conductive layer, wherein a top surface of the aluminum-containing layer is substantially level with a top edge of the sidewall portion of the conductive layer. An aluminum oxide layer is overlying the aluminum-containing layer. A copper-containing region is over the aluminum oxide layer, and is spaced apart from the aluminum-containing layer by the aluminum oxide layer. The copper-containing region is electrically coupled to the aluminum-containing layer through the top edge of the sidewall portion of the conductive layer. | 01-30-2014 |
| 20140027823 | METHOD FOR FORMING THIN METAL COMPOUND FILM AND SEMICONDUCTOR STRUCTURE WITH THIN METAL COMPOUND FILM - A method for forming a metal compound film includes: providing a substrate structure; forming a first metal layer on the substrate structure; performing a first microwave annealing process to conduct a reaction between the first metal layer and the substrate structure so as to form a first polycrystalline film of a metal compound; and performing a second microwave annealing process to transform the first polycrystalline film into a second polycrystalline film of the metal compound with an enlarged grain size, wherein a microwave power output used in the second microwave annealing process is higher than that used in the first microwave annealing process. | 01-30-2014 |
| 20140027824 | SEMICONDUCTOR DEVICES (as amended) - In a semiconductor device and a method of manufacturing the same, the semiconductor device includes a gate structure crossing an active region of a silicon substrate. Spacers are provided on both sides of the gate structure, respectively. Silicon patterns fill up recessed portions of the silicon substrate and on both sides of the spacers and has a shape protruding higher than a bottom surface of the gate structure, a lower edge of the protruded portion partially makes contact with a top surface of the isolation region, a first side and a second side of each of the silicon patterns, which are opposite to each other in a channel width direction in the gate structure, are inclined toward an inside of the active region. A highly doped impurity region is provided in the silicon patterns and doped with an N type impurity. The semiconductor device represents superior threshold voltage characteristics. | 01-30-2014 |
| 20140027825 | THRESHOLD VOLTAGE ADJUSTMENT IN A FIN TRANSISTOR BY CORNER IMPLANTATION - When forming sophisticated multiple gate transistors and planar transistors in a common manufacturing sequence, the threshold voltage characteristics of the multiple gate transistors may be intentionally “degraded” by selectively incorporating a dopant species into corner areas of the semiconductor fins, thereby obtaining a superior adaptation of the threshold voltage characteristics of multiple gate transistors and planar transistors. In advantageous embodiments, the incorporation of the dopant species may be accomplished by using the hard mask, which is also used for patterning the self-aligned semiconductor fins. | 01-30-2014 |
| 20140035010 | INTEGRATED CIRCUIT HAVING A REPLACEMENT GATE STRUCTURE AND METHOD FOR FABRICATING THE SAME - A method for fabricating an integrated circuit includes forming a temporary gate structure on a semiconductor substrate. The temporary gate structure includes a temporary gate material disposed between two spacer structures. The method further includes forming a first directional silicon nitride liner overlying the temporary gate structure and the semiconductor substrate, etching the first directional silicon nitride liner overlying the temporary gate structure and the temporary gate material to form a trench between the spacer structures, while leaving the directional silicon nitride liner overlying the semiconductor substrate in place, and forming a replacement metal gate structure in the trench. An integrated circuit includes a replacement metal gate structure overlying a semiconductor substrate, a silicide region overlying the semiconductor substrate and positioned adjacent the replacement gate structure; a directional silicon nitride liner overlying a portion of the replacement gate structure; and a contact plug in electrical communication with the silicide region. | 02-06-2014 |
| 20140035011 | METHODS AND DEVICES FOR FORMING NANOSTRUCTURE MONOLAYERS AND DEVICES INCLUDING SUCH MONOLAYERS - Methods for forming or patterning nanostructure arrays are provided. The methods involve formation of arrays on coatings comprising nanostructure association groups, formation of arrays in spin-on-dielectrics, solvent annealing after nanostructure deposition, patterning using resist, and/or use of devices that facilitate array formation. Related devices for forming nanostructure arrays are also provided, as are devices including nanostructure arrays (e.g., memory devices). Methods for protecting nanostructures from fusion during high temperature processing also are provided. | 02-06-2014 |
| 20140042499 | STRESS ENHANCED HIGH VOLTAGE DEVICE - A method of forming a device is disclosed. A substrate having a device region is provided. The device region comprises a source region, a gate region and a drain region defined thereon. A gate is formed in the gate region, a source is formed in the source region and drain is formed in the drain region. A trench is formed in an isolation region in the device region. The isolation region underlaps a portion of the gate. An etch stop (ES) stressor layer is formed over the substrate. The ES stressor layer lines the trench. | 02-13-2014 |
| 20140042500 | CONTACT STRUCTURE OF SEMICONDUCTOR DEVICE - The disclosure relates to a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a cavity below the major surface; a strained material in the cavity, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; a Ge-containing dielectric layer over the strained material; and a metal layer over the Ge-containing dielectric layer. | 02-13-2014 |
| 20140042501 | MOS TRANSISTOR AND PROCESS THEREOF - A MOS transistor includes a gate structure and a spacer. The gate structure is located on a substrate. The spacer is located on the substrate beside the gate structure, and the spacer includes an L-shaped inner spacer and an outer spacer, wherein the outer spacer is located on the L-shaped inner spacer, and the two ends of the L-shaped inner spacer protrude from the outer spacer. Moreover, the present invention also provides a MOS transistor process for forming the MOS transistor. | 02-13-2014 |
| 20140042502 | SEMICONDUCTOR DEVICES WITH SELF-ALIGNED CONTACTS AND LOW-K SPACERS - One illustrative method disclosed herein includes removing a portion of a sacrificial sidewall spacer to thereby expose at least a portion of the sidewalls of a sacrificial gate electrode and forming a liner layer on the exposed sidewalls of the sacrificial gate electrode. In this example, the method also includes forming a sacrificial gap fill material above the liner layer, exposing and removing the sacrificial gate electrode to thereby define a gate cavity that is laterally defined by the liner layer, forming a replacement gate structure, removing the sacrificial gap fill material and forming a low-k sidewall spacer adjacent the liner layer. A device is also disclosed that includes a gate cap layer, a layer of silicon nitride or silicon oxynitride positioned on each of two upstanding portions of a gate insulation layer and a low-k sidewall spacer positioned on the layer of silicon nitride or silicon oxynitride. | 02-13-2014 |
| 20140042503 | SEMICONDUCTOR MEMORY DEVICE HAVING AN ELECTRICALLY FLOATING BODY TRANSISTOR - A method for performing a holding operation to a semiconductor memory array having rows and columns of memory cells, includes: applying an electrical signal to buried regions of the memory cells, wherein each of the memory cells comprises a floating body region defining at least a portion of a surface of the memory cell, the floating body region having a first conductivity type; and wherein the buried region of each memory cell is located within the memory cell and located adjacent to the floating body region, the buried region having a second conductivity type. | 02-13-2014 |
| 20140042504 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - A manufacturing method includes forming a fin-shaped silicon layer on a silicon substrate, forming a first insulating film around the fin-shaped silicon layer, and forming a pillar-shaped silicon layer on the fin-shaped silicon layer; forming diffusion layers in an upper portion of the pillar-shaped silicon layer, an upper portion of the fin-shaped silicon layer, and a lower portion of the pillar-shaped silicon layer; forming a gate insulating film, a polysilicon gate electrode, and a polysilicon gate wiring; forming a silicide in an upper portion of the diffusion layer in the upper portion of the fin-shaped silicon layer; depositing an interlayer insulating film, exposing the polysilicon gate electrode and the polysilicon gate wiring, etching the polysilicon gate electrode and the polysilicon gate wiring, and then depositing a metal to form a metal gate electrode and a metal gate wiring; and forming a contact. | 02-13-2014 |
| 20140042505 | DEVICE ACTIVE CHANNEL LENGTH/WIDTH GREATER THAN CHANNEL LENGTH/WIDTH - A device including a drain, a channel, and a gate. The channel surrounds the drain and has a channel length to width ratio. The gate is situated over the channel to provide an active channel region that has an active channel region length to width ratio that is greater than the channel length to width ratio. | 02-13-2014 |
| 20140048855 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A semiconductor device and a method for fabricating the semiconductor device are disclosed. A gate stack is formed over a substrate. A spacer is formed adjoining a sidewall of the gate stack. A recess is formed between the spacer and the substrate. Then, a strained feature is formed in the recess. The disclosed method provides an improved method by providing a space between the spacer and the substrate for forming the strained feature, therefor, to enhance carrier mobility and upgrade the device performance. | 02-20-2014 |
| 20140048856 | SEMICONDUCTOR DEVICE INCLUDING TRANSISTORS - A semiconductor device includes an active area defined by a device isolation layer and including a plurality of source/drain regions, a gate structure disposed on the active area and extending in a first direction, a stress layer contacting a side surface of each of the plurality of source/drain regions and a plurality of source/drain contacts disposed in the active area and connected to the plurality of source/drain regions. | 02-20-2014 |
| 20140048857 | BULK FIN-FIELD EFFECT TRANSISTORS WITH WELL DEFINED ISOLATION - A process fabricates a fin field-effect-transistor by implanting a dopant into an exposed portion of a semiconductor substrate within a cavity. The cavity is formed in a dielectric layer on the semiconductor substrate. The cavity exposes the portion of the semiconductor substrate within the cavity. A semiconductor layer is epitaxially grown within the cavity atop the dopant implanted exposed portion of the semiconductor substrate. A height of the cavity defines a height of the epitaxially grown semiconductor. | 02-20-2014 |
| 20140048858 | SEMICONDUCTOR DEVICE - A semiconductor device including a silicon substrate including a first region and a second region; a gate electrode above the first region and the second region; an insulation film extending from the gate electrode to the second region to cover part of the gate electrode and part of the second region; a source region and a drain region formed in the silicon substrate, silicide formed on the source region, on the drain region, and on the gate electrode; an interlayer insulation film formed above the gate electrode and the insulation film; a first electrically conductive via formed in the interlayer insulation film, a second electrically conductive via formed in the interlayer insulation, and a third electrically conductive via formed in the interlayer insulation and electrically connecting to the gate electrode; and at least one electrically conductive member formed on the insulation film in the interlayer insulation film. | 02-20-2014 |
| 20140054654 | MOS TRANSISTOR AND PROCESS THEREOF - A MOS transistor includes a gate structure on a substrate, and the gate structure includes a wetting layer, a transitional layer and a low resistivity material from bottom to top, wherein the transitional layer has the properties of a work function layer, and the gate structure does not have any work function layers. Moreover, the present invention provides a MOS transistor process forming said MOS transistor. | 02-27-2014 |
| 20140054655 | SEMICONDUCTOR GATE STRUCTURE AND METHOD OF FABRICATING THEREOF - A semiconductor gate structure is provided having a trench, the trench assembled by a dielectric structure and a stack structure. A first conductive layer may be conformally applied to the dielectric structure and the stack structure. An oxide layer is formed along the first conductive layer and may then be substantially removed from the first conductive layer. In certain gate structures, a conductive fill structure having the first conductive layer and a second conductive layer may be disposed on the stack structure and the dielectric structure. | 02-27-2014 |
| 20140054656 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises a substrate, a device region, a first doped region and a gate structure. The first doped region is formed in the substrate adjacent to the device region. The gate structure is on the first doped region. The first doped region is overlapped the gate structure. | 02-27-2014 |
| 20140054657 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - In one embodiment, a semiconductor device includes a substrate, a gate insulator on the substrate, and a gate electrode on the gate insulator. The device further includes a source diffusion layer of a first conductivity type and a drain diffusion layer of a second conductivity type disposed on a surface of the substrate so as to sandwich the gate electrode. The device further includes a junction forming region disposed between the source diffusion layer and the drain diffusion layer so as to contact the source diffusion layer. The junction forming region includes a source extension layer of the first conductivity type, a pocket layer of the second conductivity type above the source extension layer, and a diffusion suppressing layer disposed between the source extension layer and the pocket layer and containing carbon so as to suppress diffusion of impurities between the source extension layer and the pocket layer. | 02-27-2014 |
| 20140054658 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present invention discloses a semiconductor device, comprising: a substrate, a gate stack structure on the substrate, source and drain regions in the substrate on both sides of the gate stack structure, and a channel region between the source and drain regions in the substrate, characterized in that at least one of the source and drain regions comprises a GeSn alloy. In accordance with the semiconductor device and method for manufacturing the same of the present invention, GeSn stressed source and drain regions with high concentration of Sn is formed by implanting precursors and performing a laser rapid annealing, thus the device carrier mobility of the channel region is effectively enhanced and the device drive capability is further improved. | 02-27-2014 |
| 20140054659 | SEMICONDUCTOR DEVICES AND METHODS FABRICATING SAME - Disclosed are semiconductor devices and methods of forming the same. According to the semiconductor device, gate structures are provided to be buried in a substrate and first dopant regions and second dopant regions are provided at both ends of the gate structures. Conductive lines cross the gate structures and are connected to the first dopant regions. Contact structures are respectively provided in contact holes which are provided between the conductive lines and expose the second dopant regions. The contact structures are in contact with the second dopant regions, respectively. Each of the contact structures includes a pad pattern extending along a sidewall of the contact hole. | 02-27-2014 |
| 20140054660 | FILM FORMATION METHOD AND NONVOLATILE MEMORY DEVICE - According to one embodiment, a film formation method can include irradiating a layer to be processed provided on an underlayer with an ionized gas cluster containing any one of oxygen and nitrogen to modify at least part of the layer. | 02-27-2014 |
| 20140061732 | METHOD AND DEVICE TO ACHIEVE SELF-STOP AND PRECISE GATE HEIGHT - A method for enabling fabrication of RMG devices having a low gate height variation and a substantially planar topography and resulting device are disclosed. Embodiments include: providing on a substrate two dummy gate electrodes, each between a pair of spacers; providing a source/drain region between the two dummy gate electrodes; and forming a first nitride layer over the two dummy gate electrodes and the source/drain region, wherein the first nitride layer comprises a first portion over the dummy gate electrodes and a second portion over the source/drain region, and the second portion has an upper surface substantially coplanar with an upper surface of the dummy gate electrodes. | 03-06-2014 |
| 20140061733 | Semiconductor Device with a Passivation Layer - A semiconductor device includes a semiconductor body with a first surface, a contact electrode arranged on the first surface, and a passivation layer on the first surface adjacent the contact electrode. The passivation layer includes a layer stack with an amorphous semi-insulating layer on the first surface, a first nitride layer on the amorphous semi-insulating layer, and a second nitride layer on the first nitride layer. | 03-06-2014 |
| 20140061734 | FINFET WITH REDUCED PARASITIC CAPACITANCE - A gate dielectric and a gate electrode are formed over a plurality of semiconductor fins. An inner gate spacer is formed and source/drain extension regions are epitaxially formed on physically exposed surface of the semiconductor fins as discrete components that are not merged. An outer gate spacer is subsequently formed. A merged source region and a merged drain region are formed on the source extension regions and the drain extension regions, respectively. The increased lateral spacing between the merged source/drain regions and the gate electrode through the outer gate spacer reduces parasitic capacitance for the fin field effect transistor. | 03-06-2014 |
| 20140061735 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF - A method for manufacturing a transistor device is provided, the transistor device comprising a germanium based channel layer, the method comprising providing a gate structure on the germanium comprising channel layer provided on a substrate, the gate structure being provided between a germanium based source area and a germanium based drain area at opposite sides of the germanium comprising channel layer; providing a capping layer on the germanium based source and the germanium based drain area, the capping layer comprising Si and Ge; depositing a metal layer on the capping layer; performing a temperature step, thereby transforming at least part of the capping layer into a metal germano-silicide which is not soluble in a predetermined etchant adapted for dissolving the metal; selectively removing non-consumed metal from the substrate by means of the predetermined etchant; and providing a premetal dielectric layer. | 03-06-2014 |
| 20140061736 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a stack structure of a conductive line and an insulating capping line extending in a first direction on a substrate, a plurality of contact plugs arranged in a row along the first direction and having sidewall surfaces facing the conductive line with air spaces between the sidewall surfaces and the conductive line, and a support interposed between the insulating capping line and the contact plugs to limit the height of the air spaces. The width of the support varies or the support is present only intermittently in the first direction. In a method of manufacturing the semiconductor devices, a sacrificial spacer is formed on the side of the stack structure, the spacer is recessed, a support layer is formed in the recess, the support layer is etched to form the support, and then the remainder of the spacer is removed to provide the air spaces. | 03-06-2014 |
| 20140070282 | SELF-ALIGNED CONTACTS - Self-aligned contacts in a metal gate structure and methods of manufacture are disclosed herein. The method includes forming a metal gate structure having a sidewall structure. The method further includes recessing the metal gate structure and forming a masking material within the recess. The method further includes forming a borderless contact adjacent to the metal gate structure, overlapping the masking material and the sidewall structure. | 03-13-2014 |
| 20140070283 | FIELD EFFECT TRANSISTOR AND METHOD OF FABRICATION - An improved field effect transistor and method of fabrication are disclosed. A barrier layer stack is formed in the base and sidewalls of a gate cavity. The barrier layer stack has a first metal layer and a second metal layer. A gate electrode metal is deposited in the cavity. The barrier layer stack is thinned or removed on the sidewalls of the gate cavity, to more precisely control the voltage threshold of the field effect transistor. | 03-13-2014 |
| 20140070284 | SELF-ALIGNED CARBON NANOSTRUCTURE FIELD EFFECT TRANSISTORS USING SELECTIVE DIELECTRIC DEPOSITION - Self-aligned carbon nanostructure field effect transistor structures are provided, which are formed using selective dielectric deposition techniques. For example, a transistor device includes an insulating substrate and a gate electrode embedded in the insulating substrate. A dielectric deposition-prohibiting layer is formed on a surface of the insulating substrate surrounding the gate electrode. A gate dielectric is selectively formed on the gate electrode. A channel structure (such as a carbon nanostructure) is disposed on the gate dielectric A passivation layer is selectively formed on the gate dielectric. Source and drain contacts are formed on opposing sides of the passivation layer in contact with the channel structure. The dielectric deposition-prohibiting layer prevents deposition of dielectric material on a surface of the insulating layer surrounding the gate electrode when selectively forming the gate dielectric and passivation layer. | 03-13-2014 |
| 20140070285 | METHODS OF FORMING SEMICONDUCTOR DEVICES WITH SELF-ALIGNED CONTACTS AND THE RESULTING DEVICES - One method includes forming a sacrificial gate structure above a substrate, forming a first sidewall spacer adjacent a sacrificial gate electrode, removing a portion of the first sidewall spacer to expose a portion of the sidewalls of the sacrificial gate electrode, and forming a liner layer on the exposed sidewalls of the sacrificial gate electrode and above a residual portion of the first sidewall spacer. The method further includes forming a first layer of insulating material above the liner layer, forming a second sidewall spacer above the first layer of insulating material and adjacent the liner layer, performing an etching process to remove the second sidewall spacer and sacrificial gate cap layer to expose an upper surface of the sacrificial gate electrode, removing the sacrificial gate electrode to define a gate cavity at least partially defined laterally by the liner layer, and forming a replacement gate structure in the cavity. | 03-13-2014 |
| 20140070286 | NANO-PILLAR TRANSISTOR FABRICATION AND USE - A field effect nano-pillar transistor has a pillar shaped gate element incorporating a biomimitec portion that provides various advantages over prior art devices. The small size of the nano-pillar transistor allows for advantageous insertion into cellular membranes, and the biomimitec character of the gate element operates as an advantageous interface for sensing small amplitude voltages such as transmembrane cell potentials. The nano-pillar transistor can be used in various embodiments to stimulate cells, to measure cell response, or to perform a combination of both actions. | 03-13-2014 |
| 20140070287 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - To provide a semiconductor device and a manufacturing method thereof achieving both reduction in ON resistance and increase in breakdown voltage and suppressing a short circuit. The semiconductor device has, in its semiconductor substrate having a main surface, a p | 03-13-2014 |
| 20140077274 | INTEGRATED CIRCUITS WITH IMPROVED GATE UNIFORMITY AND METHODS FOR FABRICATING SAME - Integrated circuits with improved gate uniformity and methods for fabricating such integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a structure including a first region and a second region and a structure surface formed by the first region and the second region. The first region is formed by a first material and the second region is formed by a second material. In the method, the structure surface is exposed to a gas cluster ion beam (GCIB) and an irradiated layer is formed in the structure in both the first region and the second region. The irradiated layer is etched to form a recess. | 03-20-2014 |
| 20140077275 | Semiconductor Device and Method With Greater Epitaxial Growth on 110 Crystal Plane - A semiconductor processing method is provided which promotes greater growth on <110> crystallographic planes than on other crystallographic planes. Growth rates with the process can be reversed compared to typical epitaxial growth processes such that the highest rate of growth occurs on <110> crystallographic planes and the least amount of growth occurs on <100> crystallographic planes. The process can be applied to form embedded stressor regions in planar field effect transistors, and the process can be used to grow semiconductor layers on exposed wall surfaces of adjacent fins in source-drain regions of finFETs to fill spaces between the fins. | 03-20-2014 |
| 20140077276 | MIDDLE-OF-LINE BORDERLESS CONTACT STRUCTURE AND METHOD OF FORMING - Various embodiments disclosed include semiconductor structures and methods of forming such structures. In one embodiment, a method includes: providing a semiconductor structure including: a substrate; at least one gate structure overlying the substrate; and an interlayer dielectric overlying the substrate and the at least one gate structure; removing the ILD overlying the substrate to expose the substrate; forming a silicide layer over the substrate; forming a conductor over the silicide layer and the at least one gate structure; forming an opening in the conductor to expose a portion of a gate region of the at least one gate structure; and forming a dielectric in the opening in the conductor. | 03-20-2014 |
| 20140077277 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a substrate that has a surface. The semiconductor further includes a fin disposed on the surface and including a semiconductor member. The semiconductor further includes a spacer disposed on the surface, having a type of stress, and overlapping the semiconductor member in a direction parallel to the surface. A thickness of the spacer in a direction perpendicular to the surface is less than a height of the semiconductor member in the direction perpendicular to the surface. | 03-20-2014 |
| 20140077278 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - The performance of power semiconductor device of partial gate type structure may be improved by providing the source region only adjacent the gate electrodes in the structure, and providing the contact spaced from the gate by the source. The device includes a plurality of field plate electrodes which extend inwardly of the drift layer, a second field plate electrode disposed between the contact and one of the first field plate electrodes, and a gate electrode located between the source and a second one of the first field plate electrode. | 03-20-2014 |
| 20140077279 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR - A semiconductor device and a manufacturing method therefor are provided. The semiconductor device includes a semiconductor substrate including a trench used for a source/drain region; and a SiGe seed layer formed simultaneously on the sidewall and bottom of the trench, and the SiGe seed layer on the sidewall of the trench has an uneven thickness with a maximum thickness at a location corresponding to the channel region in the semiconductor substrate. The semiconductor device and the manufacturing method therefor according to the present disclosure enable the SiGe seed layer to block diffusion of elements such as boron more effectively. | 03-20-2014 |
| 20140077280 | SEMICONDUCTOR DEVICE - A semiconductor device includes: a substrate; a semiconductor element on the substrate; an interconnection on the substrate and electrically connected to the semiconductor element; a window frame member on the substrate, surrounding the semiconductor element, and in contact with the interconnection; and a sealing window bonded to the window frame member and encapsulating the semiconductor element. The window frame member is a low melting glass and has a sheet resistance of 10 | 03-20-2014 |
| 20140077281 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device includes an interlayer insulating film on a substrate, the interlayer insulating film including a trench, a gate insulating film in the trench, a diffusion film on the gate insulating film, the diffusion film including a first diffusion material, a gate metal structure on the diffusion film, the gate metal structure including a second diffusion material, and a diffusion prevention film between the gate metal structure and the diffusion film, the diffusion prevention film being configured to prevent diffusion of the second diffusion material from the gate metal structure, the first diffusion material diffused from the diffusion film exists in the gate insulating film. | 03-20-2014 |
| 20140084351 | REPLACEMENT CHANNELS FOR SEMICONDUCTOR DEVICES AND METHODS FOR FORMING THE SAME USING DOPANT CONCENTRATION BOOST - A replacement channel and a method for forming the same in a semiconductor device are provided. A channel area is defined in a substrate which is a surface of a semiconductor wafer or a structure such as a fin formed over the wafer. Portions of the channel region are removed and are replaced with a replacement channel material formed by an epitaxial growth/deposition process to include a first dopant concentration level less than a first dopant concentration level. A subsequent doping operation or operations is then used to boost the average dopant concentration to a level greater than the first dopant concentration level. The replacement channel material is formed to include a gradient in which the upper portion of the replacement channel material has a greater dopant concentration than the lower portion of replacement channel material. | 03-27-2014 |
| 20140091369 | HIGH VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICE - A HV MOS transistor device is provided. The HV MOS transistor device includes a substrate comprising at least an insulating region formed thereon, a gate positioned on the substrate and covering a portion of the insulating region, a drain region and a source region formed at respective sides of the gate in the substrate, and a first implant region formed under the insulating region. The substrate comprises a first conductivity type, the drain, the source, and the first implant region comprise a second conductivity type, and the first conductivity type and the second conductivity type are complementary to each other. | 04-03-2014 |
| 20140091370 | TRANSISTOR FORMATION USING COLD WELDING - A device and method for fabrication includes providing a first substrate assembly including a first substrate and a first metal layer formed on the first substrate and a second substrate assembly including a second substrate and a second metal layer formed on the second substrate. The first metal layer is joined to the second metal layer using a cold welding process wherein one of the first substrate and the second substrate includes a semiconductor channel layer for forming a transistor device. | 04-03-2014 |
| 20140091371 | SEMICONDUCTOR DEVICE - A semiconductor device including: a substrate having a channel region and first and second recesses disposed on opposite sides of the channel region; a gate insulating layer disposed on the channel region; a gate structure disposed on the gate insulating layer; and a source region disposed in the first recess and a drain region disposed in the second recess, wherein the source region includes a first layer disposed on a surface of the first recess and a second layer disposed on the first layer and the drain region includes a third layer disposed on a surface of the second recess and a fourth layer disposed on the third layer; and a distance between the gate structure and the second layer of the source region is greater or less than a distance between the gate structure and the fourth layer of the drain region. | 04-03-2014 |
| 20140091372 | METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - In a first step, a planar silicon layer is formed on a silicon substrate and first and second pillar-shaped silicon layers are formed on the planar silicon layer; a second step includes forming an oxide film hard mask on the first and second pillar-shaped silicon layers, and forming a second oxide film on the planar silicon layer, the second oxide film being thicker than a gate insulating film; and a third step includes forming the gate insulating film around each of the first pillar-shaped silicon layer and the second pillar-shaped silicon layer, forming a metal film and a polysilicon film around the gate insulating film, the polysilicon film having a thickness that is smaller than one half a distance between the first pillar-shaped silicon layer and the second pillar-shaped silicon layer, forming a third resist for forming a gate line, and performing anisotropic etching to form the gate line. | 04-03-2014 |
| 20140091373 | Semiconductor Device with Breakdown Preventing Layer - A semiconductor device with a breakdown preventing layer is provided. The breakdown preventing layer can be located in a high-voltage surface region of the device. The breakdown preventing layer can include an insulating film with conducting elements embedded therein. The conducting elements can be arranged along a lateral length of the insulating film. The conducting elements can be configured to split a high electric field spike otherwise present in the high-voltage surface region during operation of the device into multiple much smaller spikes. | 04-03-2014 |
| 20140103402 | Semiconductor Structure Having Contact Plug and Metal Gate Transistor and Method of Making the Same - The present invention provides a semiconductor structure including at least a contact plug. The structure includes a substrate, a transistor, a first ILD layer, a second ILD layer and a first contact plug. The transistor is disposed on the substrate and includes a gate and a source/drain region. The first ILD layer is disposed on the transistor and levels with a top surface of the gate. The second ILD layer is disposed on the first ILD layer. The first contact plug is disposed in the first ILD layer and the second ILD layer and includes a first trench portion and a first via portion, wherein a boundary of the first trench portion and a first via portion is higher than the top surface of the gate. The present invention further provides a method of making the same. | 04-17-2014 |
| 20140103403 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device is provided. The method includes forming an insulation film including a trench on a substrate, forming a first metal gate film pattern along side and bottom surfaces of the trench, forming a second metal gate film on the first metal gate film pattern and the insulation film, and forming a second metal gate film pattern positioned on the first metal gate film pattern by removing the second metal gate film to expose at least a portion of the insulation film and forming a blocking layer pattern on the second metal gate film pattern by oxidizing an exposed surface of the second metal gate film pattern. | 04-17-2014 |
| 20140103404 | REPLACEMENT GATE WITH AN INNER DIELECTRIC SPACER - After formation of source and drain regions and a planarization dielectric layer, a disposable gate structure is removed to form a gate cavity. A gate dielectric and a lower gate electrode are formed within the gate cavity. The lower gate electrode is vertically recessed relative to the planarization dielectric layer to form a recessed region. An inner dielectric spacer is formed within the recessed region by depositing a conformal dielectric layer and removing horizontal portions thereof by an anisotropic etch. An upper gate electrode is formed by depositing another conductive material within a remaining portion of the recessed region. A contact level dielectric layer is formed and contact structures are formed to the source and drain regions. The inner dielectric spacer prevents an electrical short between the gate electrode and a contact structure that partially overlies the gate electrode by overlay variations during lithographic processes. | 04-17-2014 |
| 20140103405 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method is provided for fabricating a semiconductor device that includes: forming a gate pattern on a substrate; forming a source/drain in the vicinity of the gate pattern; forming an etch stop film, which covers the gate pattern and the source/drain, on the substrate; forming an interlayer insulating film on the etch stop film; forming a shared contact hole that exposes the gate pattern and the source/drain by etching the interlayer insulating film, wherein a polymer is generated in the shared contact hole a process of etching the interlayer insulating film; removing the polymer by performing etching using hydrogen gas, nitrogen gas or a mixture of hydrogen and nitrogen before etching the etch stop film; and etching the etch stop film. | 04-17-2014 |
| 20140103406 | SEMICONDUCTOR STRUCTURE WITH REDUCED JUNCTION LEAKAGE AND METHOD OF FABRICATION THEREOF - A semiconductor structure is formed with a NFET device and a PFET device. The NFET device is formed by masking the PFET device regions of a substrate, forming a screen layer through epitaxial growth and in-situ doping, and forming an undoped channel layer on the screen layer through epitaxial growth. The PFET device is similarly formed by masking the NFET regions of a substrate, forming a screen layer through epitaxial growth and in-situ doping, and forming an undoped channel layer on the screen layer through epitaxial growth. An isolation region is formed between the NFET and the PFET device areas to remove any facets occurring during the separate epitaxial growth phases. By forming the screen layer through in-situ doped epitaxial growth, a reduction in junction leakage is achieved versus forming the screen layer using ion implantation. | 04-17-2014 |
| 20140103407 | Method For Protecting a Gate Structure During Contact Formation - Various semiconductor devices are disclosed. An exemplary device includes: a substrate; a gate structure disposed over the substrate, wherein the gate structure includes a source region and a drain region; a first etch stop layer disposed over the gate structure, a second etch stop layer disposed over the source region and the drain region; a dielectric layer disposed over the substrate; and a gate contact, a source contact, and a drain contact. The dielectric layer is disposed over both etch stop layers. The gate contact extends through the dielectric layer and the first etch stop layer to the gate structure. The source contact and the drain contact extend through the dielectric layer and the second etch stop layer respectively to the source region and the drain region. | 04-17-2014 |
| 20140110764 | Method to control amorphous oxide layer formation at interfaces of thin film stacks for memory and logic components - Methods and apparatuses for combinatorial processing are disclosed. Methods of the present disclosure providing a substrate, the substrate comprising a plurality of site-isolated regions. Methods include forming a first capping layer on the surface of a first site-isolated region of the substrate. The methods further include forming a second capping layer on the surface of a second site-isolated region of the substrate. In some embodiments, forming the first and second capping layers include exposing the first and second site-isolated regions to a plasma induced with H | 04-24-2014 |
| 20140110765 | FIELD EFFECT TRANSISTOR HAVING PHASE TRANSITION MATERIAL INCORPORATED INTO ONE OR MORE COMPONENTS FOR REDUCED LEAKAGE CURRENT - Disclosed is a metal oxide semiconductor field effect transistor (MOSFET) having phase transition material incorporated into one or more components and an associated method. The MOSFET can comprise an asymmetric gate electrode having a phase transition material section (e.g., a chromium or titanium-doped vanadium dioxide (VO | 04-24-2014 |
| 20140110766 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF - A semiconductor structure has a second portion with an appendage on one side of the second portion and extruding along the longitudinal direction of the second portion. Moreover the semiconductor structure also has a gate line longitudinally parallel to the second portion, wherein the length of the gate line equals to the longitudinal length of the second portion. | 04-24-2014 |
| 20140110767 | BULK FINFET WELL CONTACTS WITH FIN PATTERN UNIFORMITY - Bulk finFET well contacts with fin pattern uniformity and methods of manufacture. The method includes providing a substrate with a first region and a second region, the first region comprising a well with a first conductivity. The method further includes forming contiguous fins over the first region and the second region. The method further includes forming an epitaxial layer on at least one portion of the fins in the first region and at least one portion of the fins in the second region. The method further includes doping the epitaxial layer in the first region with a first type dopant to provide the first conductivity. The method further includes doping the epitaxial layer in the second region with a second type dopant to provide a second conductivity. | 04-24-2014 |
| 20140110768 | TRANSISTOR DEVICE - A transistor device includes a semiconductor substrate, a gate structure, and first and second metal layers. The semiconductor substrate includes a substrate body having a plurality of drain and source regions alternately arranged in a checkerboard pattern and spaced apart from each other. The first metal layer is disposed on the substrate body and includes a plurality of first pattern elements and a first patterned region. The second metal layer is disposed on top of the first metal layer and has a plurality of second pattern elements and a second patterned region. | 04-24-2014 |
| 20140110769 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A semiconductor device fabrication method is provided in which recesses are formed at source/drain positions in the substrate, removable sidewalls are formed on side walls of the recess, and the recesses then are etched to form Sigma shaped recesses. Selective epitaxial growth of substantially un-doped SiGe in the Sigma shaped recesses is performed, and the Sigma shaped recesses close to the surface of the substrate can be protected from epitaxial growth by the removable sidewalls. Epitaxial growth of SiGe doped with a P-type impurity can be performed in the Sigma shaped recesses after removing the sidewalls. | 04-24-2014 |
| 20140110770 | SADDLE TYPE MOS DEVICE - A MOS device includes a silicon substrate, a wall type silicon body protruding substantially perpendicular to the silicon substrate, a first insulating film formed on the top surface and the side surfaces of the wall type silicon body and a gate electrode formed on the channel region while having the first insulating film between the channel region and the gate electrode. A top surface of the channel region, along with the first insulating film formed thereon, is depressed toward the silicon substrate to form a recess region to thereby define a recessed channel region near the recess region, and the gate electrode extends into the recess region and further extend, beyond the entire recess region, toward the silicon substrate along the side surfaces of the recessed channel region to form side-surface portions of the gate electrode, thereby forming a saddle-like form of gate electrode at the recessed channel region. | 04-24-2014 |
| 20140117417 | PERFORMANCE ENHANCEMENT IN TRANSISTORS BY PROVIDING A GRADED EMBEDDED STRAIN-INDUCING SEMICONDUCTOR REGION WITH ADAPTED ANGLES WITH RESPECT TO THE SUBSTRATE SURFACE - In sophisticated semiconductor devices, transistors may be formed on the basis of an efficient strain-inducing mechanism by using an embedded strain-inducing semiconductor alloy. The strain-inducing semiconductor material may be provided as a graded material with a smooth strain transfer into the neighboring channel region in order to reduce the number of lattice defects and provide enhanced strain conditions, which in turn directly translate into superior transistor performance. The superior architecture of the graded strain-inducing semiconductor material may be accomplished by selecting appropriate process parameters during the selective epitaxial growth process without contributing to additional process complexity. | 05-01-2014 |
| 20140117418 | THREE-DIMENSIONAL SILICON-BASED TRANSISTOR COMPRISING A HIGH-MOBILITY CHANNEL FORMED BY NON-MASKED EPITAXY - Three-dimensional transistors may be formed on the basis of high mobility semiconductor materials, which may be provided locally restricted in the channel region by selective epitaxial growth processes without using a mask material for laterally confining the growing of the high mobility semiconductor material. That is, by controlling process parameters of the selective epitaxial growth process, the cross-sectional shape may be adjusted without requiring a mask material, thereby reducing overall process complexity and providing an additional degree of freedom for adjusting the transistor characteristics in terms of threshold voltage, drive current and electrostatic control of the channel region. | 05-01-2014 |
| 20140117419 | FIN ETCH AND FIN REPLACEMENT FOR FINFET INTEGRATION - A method and device are provided for etching and replacing silicon fins in connection with a FinFET integration process. Embodiments include providing a first plurality and a second plurality of silicon fins on a silicon wafer with an oxide between adjacent silicon fins; forming a first nitride liner on an upper surface of the first plurality of silicon fins and the oxide therebetween; etching the second plurality of silicon fins, forming trenches; removing the first nitride liner; depositing a second nitride liner on an upper surface of the first plurality of silicon fins and the oxide therebetween and in the trenches; removing the second nitride liner down to the upper surface of the first plurality of silicon fins; and recessing the oxide. | 05-01-2014 |
| 20140117420 | SEMICONDUCTOR STRUCTURE INCORPORATING A CONTACT SIDEWALL SPACER WITH A SELF-ALIGNED AIRGAP AND A METHOD OF FORMING THE SEMICONDUCTOR STRUCTURE - Disclosed is a semiconductor structure incorporating a contact sidewall spacer with a self-aligned airgap and a method of forming the semiconductor structure. The structure comprises a semiconductor device (e.g., a two-terminal device, such as a PN junction diode or Schottky diode, or a three-terminal device, such as a field effect transistor (FET), a bipolar junction transistor (BJT), etc.) and a dielectric layer that covers the semiconductor device. A contact extends vertically through the dielectric layer to a terminal of the semiconductor device (e.g., in the case of a FET, to a source/drain region of the FET). A contact sidewall spacer is positioned on the contact sidewall and incorporates an airgap. Since air has a lower dielectric constant than other typically used dielectric spacer or interlayer dielectric materials, the contact size can be increased for reduced parasitic resistance while minimizing corresponding increases in parasitic capacitance or the probability of shorts. | 05-01-2014 |
| 20140117421 | SELF-ALIGNED CONTACT STRUCTURE FOR REPLACEMENT METAL GATE - A metallic top surface of a replacement gate structure is oxidized to convert a top portion of the replacement gate structure into a dielectric oxide. After removal of a planarization dielectric layer, selective epitaxy is performed to form a raised source region and a raised drain region that extends higher than the topmost surface of the replacement gate structure. A gate level dielectric layer including a first dielectric material is deposited and subsequently planarized employing the raised source and drain regions as stopping structures. A contact level dielectric layer including a second dielectric material is formed over the gate level dielectric layer, and contact via holes are formed employing an etch chemistry that etches the second dielectric material selective to the first dielectric material. Raised source and drain regions are recessed. Self-aligned contact structures can be formed by filling the contact via holes with a conductive material. | 05-01-2014 |
| 20140117422 | FIN FIELD EFFECT TRANSISTORS HAVING A NITRIDE CONTAINING SPACER TO REDUCE LATERAL GROWTH OF EPITAXIALLY DEPOSITED SEMICONDUCTOR MATERIALS - A fin field effect transistor including a plurality of fin structures on a substrate, and a shared gate structure on a channel portion of the plurality of fin structures. The fin field effect transistor further includes an epitaxial semiconductor material having a first portion between adjacent fin structures in the plurality of fin structures and a second portion present on outermost sidewalls of end fin structures of the plurality of fin structures. The epitaxial semiconductor material provides a source region and at drain region to each fin structure of the plurality of fin structures. A nitride containing spacer is present on the outermost sidewalls of the second portion of the epitaxial semiconductor material. | 05-01-2014 |
| 20140117423 | INSULATIVE CAP FOR BORDERLESS SELF-ALIGNING CONTACT IN SEMICONDUCTOR DEVICE - An apparatus comprises: a semiconductor device on a base substrate, the semiconductor device having a core metal positioned proximate a source and a drain in the base substrate; a work function metal on a portion of the core metal; a dielectric liner on a portion of the work function metal; a metal gate in electrical communication with one of the source and the drain; and an insulator film implanted into the core metal, the insulator film forming an insulative barrier across the metal gate and between the core metal and the source or the drain. | 05-01-2014 |
| 20140117424 | SEMICONDUCTOR DEVICE - A semiconductor device is provided that includes a substrate including a device region and a peripheral region surrounding the device region, a first interconnection including one or more first conductive lines extending in a first direction, a second interconnection including one or more second conductive lines extending in the first direction, the second interconnection spaced apart from the first interconnection, a first conductive plate and a second conductive plate spaced apart from each other, the first conductive plate corresponding to the first interconnection and the second conductive plate corresponding to the second interconnection, one or more first vias connecting the first conductive lines to the first conductive plate and overlapping the device region and one or more second vias connecting the second conductive lines to the second conductive plate, the second vias overlapping the device region and arranged in a staggered, alternating configuration with the one or more first vias. | 05-01-2014 |
| 20140117425 | INTERLAYER DIELECTRIC FOR NON-PLANAR TRANSISTORS - The present description relates the formation of a first level interlayer dielectric material layer within a non-planar transistor, which may be formed by a spin-on coating technique followed by oxidation and annealing. The first level interlayer dielectric material layer may be substantially void free and may exert a tensile strain on the source/drain regions of the non-planar transistor. | 05-01-2014 |
| 20140117426 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device and a method for fabricating the same are provided. The semiconductor device comprising a substrate, a first fin formed on the substrate, and an isolation film formed on the substrate and coming in contact with a part of the first fin, wherein the first fin includes a first region that is in contact with the isolation film, a second region that is in non-contact with the isolation film, and a boundary line between the first region and the second region, the first region has a slope that is at right angles with respect to the boundary line, and the second region has a slope that is an acute angle with respect to the boundary line. | 05-01-2014 |
| 20140124840 | PREVENTION OF FIN EROSION FOR SEMICONDUCTOR DEVICES - A dielectric metal compound liner can be deposited on a semiconductor fin prior to formation of a disposable gate structure. The dielectric metal compound liner protects the semiconductor fin during the pattering of the disposable gate structure and a gate spacer. The dielectric metal compound liner can be removed prior to formation of source and drain regions and a replacement gate structure. Alternately, a dielectric metal compound liner can be deposited on a semiconductor fin and a gate stack, and can be removed after formation of a gate spacer. Further, a dielectric metal compound liner can be deposited on a semiconductor fin and a disposable gate structure, and can be removed after formation of a gate spacer and removal of the disposable gate structure. The dielectric metal compound liner can protect the semiconductor fin during formation of the gate spacer in each embodiment. | 05-08-2014 |
| 20140124841 | METHODS OF FORMING REPLACEMENT GATE STRUCTURES ON SEMICONDUCTOR DEVICES AND THE RESULTING DEVICE - One method includes forming first sidewall spacers adjacent opposite sides of a sacrificial gate structure and a gate cap layer, removing the gate cap layer and a portion of the first sidewall spacers to define reduced-height first sidewall spacers, forming second sidewall spacers, removing the sacrificial gate structure to thereby define a gate cavity, whereby a portion of the gate cavity is laterally defined by the second sidewall spacers, and forming a replacement gate structure in the gate cavity, wherein at least a first portion of the replacement gate structure is positioned between the second sidewall spacers. A device includes a gate structure positioned above the substrate between first and second spaced-apart portions of a layer of insulating material and a plurality of first sidewall spacers, each of which are positioned between the gate structure and on one of the first and second portions of the layer of insulating material. | 05-08-2014 |
| 20140124842 | Contact Structure of Semiconductor Device - The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a semiconductor layer on the sidewalls and bottom of the opening; a dielectric layer on the semiconductor layer; and a metal layer filling an opening of the dielectric layer. | 05-08-2014 |
| 20140131776 | Fin Recess Last Process for FinFET Fabrication - A method includes forming isolation regions extending from a top surface of a semiconductor substrate into the semiconductor substrate, and forming a hard mask strip over the isolation regions and a semiconductor strip, wherein the semiconductor strip is between two neighboring ones of the isolation regions. A dummy gate strip is formed over the hard mask strip, wherein a lengthwise direction of the dummy gate strip is perpendicular to a lengthwise direction of the semiconductor strip, and wherein a portion of the dummy gate strip is aligned to a portion of the semiconductor strip. The method further includes removing the dummy gate strip, removing the hard mask strip, and recessing first portions of the isolation regions that are overlapped by the removed hard mask strip. A portion of the semiconductor strip between and contacting the removed first portions of the isolation regions forms a semiconductor fin. | 05-15-2014 |
| 20140131777 | INTEGRATED CIRCUITS AND METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH SALICIDE CONTACTS ON NON-PLANAR SOURCE/DRAIN REGIONS - Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes forming a fin over a semiconductor substrate. The method further includes selectively epitaxially growing a silicon-containing material on the fin and providing the fin with a diamond-shaped cross-section and with an upper portion and a lower portion. The lower portion of the fin is covered with a masking layer. Further, a salicide layer is formed on the upper portion of the fin, and the masking layer prevents formation of the salicide layer on the lower portion of the fin. | 05-15-2014 |
| 20140138750 | Jog Design in Integrated Circuits - A device includes an active region in a semiconductor substrate, a gate strip over and crossing the active region, and a jog over the active region and connected to the gate strip to form a continuous region. The jog is on a side of the gate strip. A first contact plug is at a same level as the gate strip, wherein the first contact plug is on the side of the gate strip. A second contact plug is over the jog and the first contact plug. The second contact plug electrically interconnects the first contact plug and the jog. | 05-22-2014 |
| 20140138751 | METAL GATE STRUCTURES FOR CMOS TRANSISTOR DEVICES HAVING REDUCED PARASITIC CAPACITANCE - A method of forming a field effect transistor (FET) device includes forming a gate structure over a substrate, the gate structure including a wide bottom portion and a narrow portion formed on top of the bottom portion; the wide bottom portion comprising a metal material and having a first width that corresponds substantially to a transistor channel length, and the narrow portion also including a metal material having a second width smaller than the first width. | 05-22-2014 |
| 20140145247 | FIN ISOLATION IN MULTI-GATE FIELD EFFECT TRANSISTORS - A method for fabricating a field effect transistor (FET) device includes forming a plurality of semiconductor fins on a substrate, removing a semiconductor fin of the plurality of semiconductor fins from a portion of the substrate, forming an isolation fin that includes a dielectric material on the substrate on the portion of the substrate, and forming a gate stack over the plurality of semiconductor fins and the isolation fin. | 05-29-2014 |
| 20140145248 | DUMMY FIN FORMATION BY GAS CLUSTER ION BEAM - FinFET structures with dielectric fins and methods of fabrication are disclosed. A gas cluster ion beam (GCIB) tool is used to apply an ion beam to exposed fins, which converts the fins from a semiconductor material such as silicon, to a dielectric such as silicon nitride or silicon oxide. Unlike some prior art techniques, where some fins are removed prior to fin merging, in embodiments of the present invention, fins are not removed. Instead, semiconductor (silicon) fins are converted to dielectric (nitride/oxide) fins where it is desirable to have isolation between groups of fins that comprise various finFET devices on an integrated circuit (IC). | 05-29-2014 |
| 20140145249 | Diode Structure Compatible with FinFET Process - An embodiment integrated circuit (e.g., diode) and method of making the same. The embodiment integrated circuit includes a well having a first doping type formed over a substrate having the first doping type, the well including a fin, a source formed over the well on a first side of the fin, the source having a second doping type, a drain formed over the well on a second side of the fin, the drain having the first doping type, and a gate oxide formed over the fin, the gate oxide laterally spaced apart from the source by a back off region of the fin. The integrated circuit is compatible with a FinFET fabrication process. | 05-29-2014 |
| 20140151756 | FIN FIELD EFFECT TRANSISTORS INCLUDING COMPLIMENTARILY STRESSED CHANNELS - A stressed single crystalline epitaxial semiconductor layer having a first type stress is formed on a single crystalline substrate layer. First and second semiconductor fins are formed by patterning the stressed single crystalline epitaxial semiconductor layer. A center portion of each first semiconductor fin is undercut to form a recessed region, while the bottom surface of each second semiconductor fin maintains epitaxial registry with the single crystalline substrate layer. The center portion of each first semiconductor fin is under a second type of stress, which is the opposite of the first type of stress. A first field effect transistor formed on the first semiconductor fins can include first channels under the second type of stress along direction of current flow, and a second field effect transistor formed on the second semiconductor fins can include second channels under the first type of stress along the direction of current flow. | 06-05-2014 |
| 20140151757 | SUBSTRATE-TEMPLATED EPITAXIAL SOURCE/DRAIN CONTACT STRUCTURES - Single crystalline semiconductor fins are formed on a single crystalline buried insulator layer. After formation of a gate electrode straddling the single crystalline semiconductor fins, selective epitaxy can be performed with a semiconductor material that grows on the single crystalline buried insulator layer to form a contiguous semiconductor material portion. The thickness of the deposited semiconductor material in the contiguous semiconductor material portion can be selected such that sidewalls of the deposited semiconductor material portions do not merge, but are conductively connected to one another via horizontal portions of the deposited semiconductor material that grow directly on a horizontal surface of the single crystalline buried insulator layer. Simultaneous reduction in the contact resistance and parasitic capacitance for a fin field effect transistor can be provided through the contiguous semiconductor material portion and cylindrical contact via structures. | 06-05-2014 |
| 20140151758 | Semiconductor Device and Method of Manufacturing a Semiconductor Device - A semiconductor device includes a transistor, formed in a semiconductor substrate having a first main surface. The transistor includes a source region, a drain region, a channel region, a drift zone, and a gate electrode being adjacent to the channel region, the gate electrode configured to control a conductivity of a channel formed in the channel region. The channel region and the drift zone are disposed along a first direction between the source region and the drain region, the first direction being parallel to the first main surface. The channel region has a shape of a ridge extending along the first direction and the drift zone including a superjunction layer stack. | 06-05-2014 |
| 20140151759 | FACET-FREE STRAINED SILICON TRANSISTOR - The presence of a facet or a void in an epitaxially grown crystal indicates that crystal growth has been interrupted by defects or by certain material boundaries. Faceting can be suppressed during epitaxial growth of silicon compounds that form source and drain regions of strained silicon transistors. It has been observed that faceting can occur when epitaxial layers of certain silicon compounds are grown adjacent to an oxide boundary, but faceting does not occur when the epitaxial layer is grown adjacent to a silicon boundary or adjacent to a nitride boundary. Because epitaxial growth of silicon compounds is often necessary in the vicinity of isolation trenches that are filled with oxide, techniques for suppression of faceting in these areas are of particular interest. One such technique, presented herein, is to line the isolation trenches with SiN to provide a barrier between the oxide and the region in which epitaxial growth is intended. | 06-05-2014 |
| 20140151760 | DOPED FLOWABLE PRE-METAL DIELECTRIC - A method of filling gaps between gates with doped flowable pre-metal dielectric (PMD) and the resulting device are disclosed. Embodiments include forming at least two dummy gates on a substrate, each dummy gate being surrounded by spacers; filling a gap between adjacent spacers of the at least two dummy gates with a flowable PMD; implanting a dopant in the flowable PMD; and annealing the flowable PMD. Doping the flowable PMD prevents erosion of the PMD, thereby providing a voidless gap-fill. | 06-05-2014 |
| 20140151761 | Fin-Like Field Effect Transistor (FinFET) Channel Profile Engineering Method And Associated Device - A FinFET device and method for fabricating a FinFET device are disclosed. An exemplary method includes providing a substrate; forming a fin over the substrate; forming an isolation feature over substrate; forming a gate structure including a dummy gate over a portion of the fin, the gate structure traversing the fin, wherein the gate structure separates a source region and a drain region of the fin, a channel being defined in the portion of the fin between the source region and the drain region; and replacing the dummy gate of the gate structure with a metal gate, wherein during the replacing the dummy gate, a profile of the portion of the fin is modified. In an example, modifying the profile of the portion of the fin includes increasing a height of the portion of the fin and/or decreasing a width of the portion of the fin. | 06-05-2014 |
| 20140151762 | Semiconductor Device and Method of Forming the Same - A method of forming a semiconductor device includes forming a NMOS gate structure over a substrate. The method further includes forming an amorphized region in the substrate adjacent to the NMOS gate structure. The method also includes forming a lightly doped source/drain (LDD) region in the amorphized region. The method further includes depositing a stress film over the NMOS gate structure, performing an annealing process, and removing the stress film. | 06-05-2014 |
| 20140151763 | SEMICONDUCTOR STRUCTURE HAVING CONTACT PLUG AND METHOD OF MAKING THE SAME - The present invention provides a semiconductor structure including a substrate, a transistor, a first ILD layer, a second ILD layer, a first contact plug, second contact plug and a third contact plug. The transistor is disposed on the substrate and includes a gate and a source/drain region. The first ILD layer is disposed on the transistor. The first contact plug is disposed in the first ILD layer and a top surface of the first contact plug is higher than a top surface of the gate. The second ILD layer is disposed on the first ILD layer. The second contact plug is disposed in the second ILD layer and electrically connected to the first contact plug. The third contact plug is disposed in the first ILD layer and the second ILD layer and electrically connected to the gate. The present invention further provides a method of making the same. | 06-05-2014 |
| 20140151764 | SEMICONDUCTOR AND MANUFACTURING METHOD THEREOF - A semiconductor element and a manufacturing method thereof are provided. The semiconductor element includes a base, an epitaxy layer, a first well, a second well, a third well, a first heavily doping region, a second heavily doping region, a implanting region and a conductive layer. The epitaxy layer is disposed on the base. The first well, the second well and the third well are disposed in the epitaxy layer. The third well is located between the first well and the second well. A surface channel is formed between the first heavily doping region and the second heavily doping region. The implanting region is fully disposed between the surface channel and the base and disposed at a projection region of the first well, the second well and the third well. | 06-05-2014 |
| 20140151765 | GATE-ALL-AROUND CARBON NANOTUBE TRANSISTOR WITH SELECTIVELY DOPED SPACERS - A method of fabricating a semiconducting device is disclosed. A carbon nanotube is formed on a substrate. A portion of the substrate is removed to form a recess below a section of the carbon nanotube. A doped material is applied in the recess to fabricate the semiconducting device. The recess may be between one or more contacts formed on the substrate separated by a gap. | 06-05-2014 |
| 20140151766 | FinFET DEVICE WITH DUAL-STRAINED CHANNELS AND METHOD FOR MANUFACTURING THEREOF - A FinFET device and a method for manufacturing a FinFET device is provided. An example device may comprise a substrate including at least two fin structures. Each of the at least two fin structures may be in contact with a source and drain region and each of the at least two fin structures may include a strain relaxed buffer (SRB) overlying and in contact with the substrate and an upper layer overlying and in contact with the SRB. The composition of the upper layer and the SRB may be selected such that the upper layer of a first fin structure is subjected to a first mobility enhancing strain in the as-grown state, the first mobility enhancing strain being applied in a longitudinal direction from the source region to the drain region and where at least an upper part of the upper layer of a second fin structure is strain-relaxed. | 06-05-2014 |
| 20140151767 | METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - A method for producing a semiconductor device includes a step of forming a first insulating film around a fin-shaped silicon layer and forming a pillar-shaped silicon layer in an upper portion of the fin-shaped silicon layer; a step of implanting an impurity into upper portions of the pillar-shaped silicon layer and fin-shaped silicon layer and a lower portion of the pillar-shaped silicon layer to form diffusion layers; and a step of forming a polysilicon gate electrode, a polysilicon gate line, and a polysilicon gate pad. The polysilicon gate electrode and the polysilicon gate pad have a larger width than the polysilicon gate line. After these steps follow a step of depositing an interlayer insulating film, exposing and etching the polysilicon gate electrode and the polysilicon gate line, and depositing a metal layer to form a metal gate electrode and a metal gate line, and a step of forming a contact. | 06-05-2014 |
| 20140159123 | ETCH RESISTANT RAISED ISOLATION FOR SEMICONDUCTOR DEVICES - A method including providing fins etched from a semiconductor substrate, the fins covered by an oxide layer and a nitride layer, the oxide layer located between the fins and the nitride layer, removing a portion of the fins to form an opening, and forming a spacer on a sidewall of the opening. The method further including filling the opening above the semiconductor substrate with a first fill material, where a top surface of the fill material is substantially flush with a top surface of the nitride layer, removing the spacer to expose a vertical sidewall of the first fill material, and depositing an encapsulation layer conformally on top of the first fill material, where the encapsulation layer is resistant to wet etching techniques and protects from the unwanted removal of the first fill material during subsequent process techniques. | 06-12-2014 |
| 20140159124 | EPITAXIAL GROWN EXTREMELY SHALLOW EXTENSION REGION - A method to scale a MOSFET structure while maintaining gate control is disclosed. The extension regions of the MOSFET are formed by epitaxial growth and can be formed after the completion of high temperature processing. The extensions can be extremely shallow and have an abrupt interface with the channel. A dummy gate can establish the position of the abrupt interfaces and thereby define the channel length. The gate electrode can be formed to align perfectly with the channel, or to overlap the extension tip. | 06-12-2014 |
| 20140159125 | CONTACT LANDING PADS FOR A SEMICONDUCTOR DEVICE AND METHODS OF MAKING SAME - One device herein includes first and second spaced-apart active regions, a transistor formed in and above the first active region, wherein the transistor has a gate electrode, a conductive contact landing pad that is coupled to the second active region, wherein the contact landing pad is made of the same conductive material as the gate electrode, and a contact that is coupled to the contact landing pad. One method herein includes forming first and second spaced-apart active regions, forming a layer of gate insulation material on the active regions, performing an etching process to remove the gate insulation material formed on the second active region, performing a common process operation to form a gate electrode structure above the gate insulation material on the first active region and the contact landing pad that is conductively coupled to the second active region and forming a contact to the contact landing pad. | 06-12-2014 |
| 20140159126 | METHODS OF FORMING A FINFET SEMICONDUCTOR DEVICE WITH UNDOPED FINS - One method disclosed herein includes, prior to forming an isolation region in a semiconducting substrate for the device, forming a doped well region and a doped punch-stop region in the substrate, introducing a dopant material that is adapted to retard diffusion of boron or phosphorous into the substrate to form a dopant-containing layer proximate an upper surface of the substrate, performing an epitaxial deposition process to form an undoped semiconducting material above the dopant-containing layer, forming a plurality of spaced-apart trenches that extend at least partially into the substrate, wherein the trenches define a fin for the device comprised of at least the undoped semiconducting material, forming at least a local isolation insulating material in the trenches, and forming a gate structure around at least the undoped semiconducting material, wherein a bottom of a gate electrode is positioned approximately level with or below a bottom of the undoped semiconducting material. | 06-12-2014 |
| 20140159127 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device having reduced contact region area achieved at least in part by forming pad portions of the word lines using an asymmetric stair shape separately formed in first and second pad structures. Contact region area is reduced when compared with manufacturing processes known in the art. This leads to an increase in device integrity and a less complex manufacturing process. | 06-12-2014 |
| 20140167119 | METHODS OF FORMING A SIDEWALL SPACER HAVING A GENERALLY TRIANGULAR SHAPE AND A SEMICONDUCTOR DEVICE HAVING SUCH A SPACER - A method of forming a spacer is disclosed that involves forming a layer of spacer material above an etch stop layer, performing a first main etching process on the layer of spacer material to remove some of material, stopping the etching process prior to exposing the etch stop layer and performing a second over-etch process on the layer of spacer material, using the following parameters: an inert gas flow rate of about 50-200 sscm, a reactive gas flow rate of about 3-20 sscm, a passivating gas flow rate of about 3-20 sscm, a processing pressure about 5-15 mT, a power level of about 200-500 W for ion generation and a bias voltage of about 300-500 V. A device includes a gate structure positioned above a semiconducting substrate, a substantially triangular-shaped sidewall spacer positioned proximate the gate structure and an etch stop layer positioned between the spacer and the gate structure. | 06-19-2014 |
| 20140167120 | METHODS OF FORMING A FINFET SEMICONDUCTOR DEVICE BY PERFORMING AN EPITAXIAL GROWTH PROCESS - A method of forming a FinFET device involves performing an epitaxial growth process to form a layer of semiconducting material on a semiconducting substrate, wherein a first portion of the layer of semiconducting material will become a fin structure for the FinFET device and wherein a plurality of second portions of the layer of semiconducting material will become source/drain structures of the FinFET device, forming a gate insulation layer around at least a portion of the fin structure and forming a gate electrode above the gate insulation layer. | 06-19-2014 |
| 20140167121 | FILAMENT FREE SILICIDE FORMATION - A device and methods for forming the device are disclosed. The method includes providing a substrate. A gate having a gate electrode and sidewall spacers are formed adjacent to sidewalls of the gate. A height H | 06-19-2014 |
| 20140167122 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device and method of manufacturing the semiconductor device are disclosed. The semiconductor device includes: a substrate including an active region and at least one groove isolation region formed on the substrate, wherein the at least one groove isolation region is formed adjoining the active region, a gate structure formed on a first portion of the active region, and at least one local interconnection layer formed on a portion of the substrate, wherein the at least one local interconnection layer is located on a side of the gate structure, and covers at least a second portion of the active region and a portion of the groove isolation region adjoining the active region. | 06-19-2014 |
| 20140167123 | POWER SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - There is provided a power semiconductor device including: a body region having a first conductivity; a well formed in an upper portion of the body region and having a second conductivity; and a conductive via formed in the body region while traversing the well. | 06-19-2014 |
| 20140175526 | SEMICONDUCTOR DEVICE FOR CURRENT CONTROL AND METHOD THEREOF - A semiconductor device where at least one of a portion of the first metal layer that extends from the source contact, a portion of the second metal layer that extends from the source contact, a portion of the first metal layer that extends from the drain contact, and a portion of the second metal layer that extends from the drain contact is configured to lie above a portion of or even all of the gate. Methods of fabricating and using such a semiconductor device are also provided. | 06-26-2014 |
| 20140175527 | SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF - A semiconductor structure includes a gate, a dual spacer and two recesses. The gate is located on a substrate. The dual spacer is located on the substrate beside the gate. The recesses are located in the substrate and the dual spacers, wherein the sidewall of each of the recesses next to the gate has a lower tip and an upper tip, and the lower tip is located in the substrate while the upper tip is an acute angle located in the dual spacer and close to the substrate. The present invention also provides a semiconductor process formed said semiconductor structure. | 06-26-2014 |
| 20140183605 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device includes forming a plurality of fin structures on a substrate, the plurality of fin structures including a diffusion region, forming an epitaxial layer on the plurality of fin structures in an area of the diffusion region such that a height of the upper surface of the epitaxial layer over plurality of fin structures is substantially equal to the height of the upper surface of the epitaxial layer between the plurality of fin structures, and planarizing the upper surface of the epitaxial layer by one of etch back and reflow annealing. | 07-03-2014 |
| 20140191295 | DUMMY GATE INTERCONNECT FOR SEMICONDUCTOR DEVICE - A method of forming a semiconductor device comprising a dummy gate interconnect includes forming a dummy gate on a substrate, the dummy gate comprising a dummy gate metal layer located on the substrate, and a dummy gate polysilicon layer located on the dummy gate metal layer; forming an active gate on the substrate, the active gate comprising an active gate metal layer located on the substrate, and an active gate polysilicon layer located on the active gate metal layer; and etching the dummy gate polysilicon layer to remove at least a portion of the dummy gate polysilicon layer to form the dummy gate interconnect, wherein the active gate polysilicon layer is not etched during the etching of the dummy gate polysilicon layer. | 07-10-2014 |
| 20140191296 | SELF-ALIGNED DIELECTRIC ISOLATION FOR FINFET DEVICES - Embodiments of the present invention provide a method of forming semiconductor structure. The method includes forming a set of device features on top of a substrate; forming a first dielectric layer directly on top of the set of device features and on top of the substrate, thereby creating a height profile of the first dielectric layer measured from a top surface of the substrate, the height profile being associated with a pattern of an insulating structure that fully surrounds the set of device features; and forming a second dielectric layer in areas that are defined by the pattern to create the insulating structure. A structure formed by the method is also disclosed. | 07-10-2014 |
| 20140191297 | STRAINED FINFET WITH AN ELECTRICALLY ISOLATED CHANNEL - A fin structure includes an optional doped well, a disposable single crystalline semiconductor material portion, and a top semiconductor portion formed on a substrate. A disposable gate structure straddling the fin structure is formed, and end portions of the fin structure are removed to form end cavities. Doped semiconductor material portions are formed on sides of a stack of the disposable single crystalline semiconductor material portion and a channel region including the top semiconductor portion. The disposable single crystalline semiconductor material portion may be replaced with a dielectric material portion after removal of the disposable gate structure or after formation of the stack. The gate cavity is filled with a gate dielectric and a gate electrode. The channel region is stressed by the doped semiconductor material portions, and is electrically isolated from the substrate by the dielectric material portion. | 07-10-2014 |
| 20140191298 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - A semiconductor device includes a semiconductor substrate, a metal gate structure, at least an epitaxial layer, an interlayer dielectric, at least a contact hole, at least a metal silicide layer and a fluorine-containing layer. The semiconductor substrate has at least a gate region and at least a source/drain region adjoining the gate region. The gate structure is disposed on the semiconductor substrate within the gate region. The epitaxial layer is disposed on the semiconductor substrate within the source/drain region. The interlayer dielectric covers the semiconductor substrate, the gate structure and the epitaxial layer. The contact hole penetrates the interlayer dielectric to reach the epitaxial layer. The metal silicide layer is formed in the epitaxial layer and is located on the bottom of the contact hole. The fluorine-containing layer is disposed on or in the epitaxial layer and is around sides of the metal silicide layer. | 07-10-2014 |
| 20140191299 | Dual Damascene Metal Gate - A method for fabricating a dual damascene metal gate includes forming a dummy gate onto a substrate, disposing a protective layer on the substrate and the dummy gate, and growing an expanding layer on sides of the dummy gate. The method further includes removing the protective layer, forming a spacer around the dummy gate, and depositing and planarizing a dielectric layer. The method further includes selectively removing the expanding layer, and removing the dummy gate. | 07-10-2014 |
| 20140191300 | HARD MASK ETCH STOP FOR TALL FINS - A hard mask etch stop is formed on the top surface of tall fins to preserve the fin height and protect the top surface of the fin from damage during etching steps of the transistor fabrication process. In an embodiment, the hard mask etch stop is formed using a dual hard mask system, wherein a hard mask etch stop layer is formed over the surface of a substrate, and a second hard mask layer is used to pattern a fin with a hard mask etch stop layer on the top surface of the fin. The second hard mask layer is removed, while the hard mask etch stop layer remains to protect the top surface of the fin during subsequent fabrication steps. | 07-10-2014 |
| 20140191301 | TRANSISTOR AND FABRICATION METHOD - Transistors and fabrication methods are provided. A first sidewall can be formed on each sidewall of a gate structure. A second sidewall can be formed on the first sidewall. The first sidewall can be made of a doped material. After forming a source and a drain, a metal silicide layer can be formed on the source and the drain. The second sidewall can be removed to expose a surface portion of the semiconductor substrate between the metal silicide layer and the first silicide layer. A stress layer can be formed on the exposed surface portion of the semiconductor substrate, on the metal silicide layer, on the first sidewall, and on the gate. | 07-10-2014 |
| 20140197468 | METHODS OF FORMING SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT ELEMENTS AND THE RESULTING DEVICE - One method disclosed includes forming a final gate structure in a gate cavity that is laterally defined by sidewall spacers, removing a portion of the sidewall spacers to define recessed sidewall spacers, removing a portion of the final gate structure to define a recessed final gate structure and forming an etch stop on the recessed sidewall spacers and the recessed final gate structure. A transistor device disclosed herein includes a final gate structure that has an upper surface positioned at a first height level above a surface of a substrate, sidewall spacers positioned adjacent the final gate structure, the sidewall spacers having an upper surface that is positioned at a second, greater height level above the substrate, an etch stop layer formed on the upper surfaces of the sidewall spacers and the final gate structure, and a conductive contact that is conductively coupled to a contact region of the transistor. | 07-17-2014 |
| 20140203333 | SEMICONDUCTOR DEVICE HAVING MODIFIED PROFILE METAL GATE - In one embodiment, a method includes providing a semiconductor substrate having a trench disposed thereon and forming a plurality of layers in the trench. The plurality of layers formed in the trench is etched thereby providing at least one etched layer having a top surface that lies below a top surface of the trench. In a further embodiment, this may provide for a substantially v-shaped opening or entry to the trench for the formation of further layers. Further, a device having a modified profile metal gate for example having at least one layer of the metal. | 07-24-2014 |
| 20140203334 | METHOD FOR FABRICATING A FINFET DEVICE INCLUDING A STEM REGION OF A FIN ELEMENT - A method includes providing a substrate having a fin extending from a first (e.g., top) surface of the substrate. The fin has first region (a stem region) and a second region (an active region) each having a different composition. The first region of the fin is modified to decrease a width of semiconductor material for example by etching and/or oxidizing the first region of the fin. The method then continues to provide a gate structure on the second region of the fin. FinFET devices having stem regions with decreased widths of semiconductor material are also provided. | 07-24-2014 |
| 20140203335 | Semiconductor Devices and Methods for Fabricating the Same - A semiconductor device includes an insulating film on a substrate and including a trench, a gate insulating film in the trench, a DIT (Density of Interface Trap) improvement film on the gate insulating film to improve a DIT of the substrate, and a first conductivity type work function adjustment film on the DIT improvement film. Related methods of forming semiconductor devices are also disclosed. | 07-24-2014 |
| 20140203336 | ADHESION LAYER AND MULTIPHASE ULTRA-LOW k DIELECTRIC MATERIAL - A dielectric material incorporating a graded carbon adhesion layer whereby the content of C increases with layer thickness and a multiphase ultra low k dielectric comprising a porous SiCOH dielectric material having a k less than 2.7 and a modulus of elasticity greater than 7 GPa is described. A semiconductor integrated circuit incorporating the above dielectric material in interconnect wiring is described and a semiconductor integrated circuit incorporating the above multiphase ultra low k dielectric in a gate stack spacer of a FET is described. | 07-24-2014 |
| 20140203337 | METHOD OF FORMING GATE DIELECTRIC LAYER AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device includes ion-implanting germanium into a monocrystalline silicon-containing substrate; forming a gate oxide layer over a surface of the monocrystalline silicon-containing substrate and forming, under the gate oxide layer, a germanium-rich region in which the germanium is concentrated, by performing a plasma oxidation process; and crystallizing the germanium-rich region by performing an annealing process. | 07-24-2014 |
| 20140203338 | FinFET Device with Epitaxial Structure - A FinFET device includes a substrate, a fin, and isolation regions on either side of the fin. The device also includes sidewall spacers above the isolation regions and formed along the fin structure. A recessing trench is formed by the sidewall spacers and the fin, and an epitaxially-grown semiconductor material is formed in and above the recessing trench, forming an epitaxial structure. | 07-24-2014 |
| 20140203339 | SEMICONDUCTOR DEVICE COMPRISING SELF-ALIGNED CONTACT ELEMENTS AND A REPLACEMENT GATE ELECTRODE STRUCTURE - A semiconductor device includes a high-k metal gate electrode structure that is positioned above an active region, has a top surface that is positioned at a gate height level, and includes a high-k dielectric material and an electrode metal. Raised drain and source regions are positioned laterally adjacent to the high-k metal gate electrode structure and connect to the active region, and a top surface of each of the raised drain and source regions is positioned at a contact height level that is below the gate height level. An etch stop layer is positioned above the top surface of the raised drain and source regions and a contact element connects to one of the raised drain and source regions, the contact element extending through the etch stop layer and a dielectric material positioned above the high-k metal gate electrode structure and the raised drain and source regions. | 07-24-2014 |
| 20140209984 | Semiconductor Device With Multi Level Interconnects And Method Of Forming The Same - A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a gate structure separating source and drain (S/D) features. The semiconductor device further includes a first dielectric layer formed over the substrate, the first dielectric layer including a first interconnect structure in electrical contact with the S/D features. The semiconductor device further includes an intermediate layer formed over the first dielectric layer, the intermediate layer having a top surface that is substantially coplanar with a top surface of the first interconnect structure. The semiconductor device further includes a second dielectric layer formed over the intermediate layer, the second dielectric layer including a second interconnect structure in electrical contact with the first interconnect structure and a third interconnect structure in electrical contact with the gate structure. | 07-31-2014 |
| 20140217479 | FINFET WITH DUAL WORKFUNCTION GATE STRUCTURE - Disclosed are a method to fabricate a semiconductor device having a two-layered gate structure, and so fabricated a semiconductor. The gate threshold voltage can be tuned by using two metal layers with different workfunctions, disposed over a fin structure on a substrate and extending in parallel to the current flow direction in the fin structure, and by varying individual thicknesses of the layer so as to change the relative coverage of the fin structure by the layers. The method may comprise providing a substrate having a fin structure, depositing first and second gate metals, and forming a gate dielectric layer. The method may further comprise determining the workfunctions of the first and second gate metals and their thicknesses to achieve a desired gate threshold voltage. Forming the first and second gate metal layers and the dielectric layer may use processes such as deposition, epitaxial growth, CMP, or selective etching. | 08-07-2014 |
| 20140217480 | METHODS OF FORMING SILICON/GERMANIUM PROTECTION LAYER ABOVE SOURCE/DRAIN REGIONS OF A TRANSISTOR AND A DEVICE HAVING SUCH A PROTECTION LAYER - Disclosed herein are various methods of forming a silicon/germanium protection layer above source/drain regions of a transistor. One method disclosed herein includes forming a plurality of recesses in a substrate proximate the gate structure, forming a semiconductor material in the recesses, forming at least one layer of silicon above the semiconductor material, and forming a cap layer comprised of silicon germanium on the layer of silicon. One device disclosed herein includes a gate structure positioned above a substrate, a plurality of recesses formed in the substrate proximate the gate structure, at least one layer of semiconductor material positioned at least partially in the recesses, a layer of silicon positioned above the at least one layer of semiconductor material, and a cap layer comprised of silicon/germanium positioned on the layer of silicon. | 08-07-2014 |
| 20140217481 | PARTIAL SACRIFICIAL DUMMY GATE WITH CMOS DEVICE WITH HIGH-K METAL GATE - A gate structure in a semiconductor device includes: a gate stack formed on a substrate with three sections: a bottom portion, a top portion, and a sacrificial cap layer over the top portion; gate spacers; source and drain regions; a nitride encapsulation over top and sidewalls of the gate stack after removal of the sacrificial cap layer; an organic planarizing layer over the nitride encapsulation, planarizing the encapsulation; and silicidation performed over the source and drain regions and the bottom portion after removal of the nitride encapsulation, the organic planarizing layer, and the top portion of the gate stack. | 08-07-2014 |
| 20140217482 | INTEGRATED CIRCUITS HAVING REPLACEMENT GATE STRUCTURES AND METHODS FOR FABRICATING THE SAME - A method of fabricating an integrated circuit includes forming an interlayer dielectric (ILD) layer over a dummy gate stack. The dummy gate stack includes a dummy gate structure, a hardmask layer, and sidewall spacers formed over a semiconductor substrate. The method further includes removing at least an upper portion of the dummy gate stack to form a first opening within the ILD layer, extending the first opening to form a first extended opening by completely removing the dummy gate structure of the dummy gate stack, and depositing at least one workfunction material layer within the first opening and within the first extended opening. Still further, the method includes removing portions of the workfunction material within the first opening and depositing a low-resistance material over remaining portions of the workfunction material thereby forming a replacement metal gate structure that includes the remaining portion of the workfunction material and the low-resistance material. | 08-07-2014 |
| 20140217483 | SEMICONDUCTOR DEVICES INCLUDING GATE PATTERN, MULTI-CHANNEL ACTIVE PATTERN AND DIFFUSION LAYER - A semiconductor device includes a gate pattern on a substrate, a multi-channel active pattern under the gate pattern to cross the gate pattern and having a first region not overlapping the gate pattern and a second region overlapping the gate pattern, a diffusion layer in the multi-channel active pattern along the outer periphery of the first region and including an impurity having a concentration, and a liner on the multi-channel active pattern, the liner extending on lateral surfaces of the first region and not extending on a top surface of the first region. Related fabrication methods are also described. | 08-07-2014 |
| 20140217484 | ONE-TIME PROGRAMMABLE MEMORY AND METHOD FOR MAKING THE SAME - A one time programmable nonvolatile memory formed from metal-insulator-semiconductor cells. The cells are at the crosspoints of conductive gate lines and intersecting doped semiconductor lines formed in a semiconductor substrate. | 08-07-2014 |
| 20140231885 | INTEGRATED CIRCUITS AND METHODS FOR FABRICATING INTEGRATED CIRCUITS HAVING METAL GATE ELECTRODES - Integrated circuits and methods for fabricating integrated circuits are provided. In an exemplary embodiment, a method for fabricating integrated circuits includes providing a sacrificial gate structure over a semiconductor substrate. The sacrificial gate structure includes two spacers and sacrificial gate material between the two spacers. The method recesses a portion of the sacrificial gate material between the two spacers. Upper regions of the two spacers are etched while using the sacrificial gate material as a mask. The method includes removing a remaining portion of the sacrificial gate material and exposing lower regions of the two spacers. A first metal is deposited between the lower regions of the two spacers. A second metal is deposited between the upper regions of the two spacers. | 08-21-2014 |
| 20140239354 | FinFETs and Methods for Forming the Same - A finFET and methods for forming a finFET are disclosed. A structure comprises a substrate, a fin, a gate dielectric, and a gate electrode. The substrate comprises the fin. The fin has a major surface portion of a sidewall, and the major surface portion comprises at least one lattice shift. The at least one lattice shift comprises an inward or outward shift relative to a center of the fin. The gate dielectric is on the major surface portion of the sidewall. The gate electrode is on the gate dielectric. | 08-28-2014 |
| 20140239355 | FIN FIELD-EFFECT TRANSISTORS AND FABRICATION METHOD THEREOF - A method is provided for fabricating a fin field-effect transistor. The method includes providing a semiconductor substrate; and forming a plurality of fins on top of the semiconductor substrate. The method also includes forming isolation structures between adjacent fins; and forming doping sidewall spacers in top portions of the isolation structures near the fins. Further, the method includes forming a punch-through stop layer at the bottom of each of the fins by thermal annealing the doping sidewall spacers; and forming a high-K metal gate on each of the fins. | 08-28-2014 |
| 20140239356 | SEMICONDUCTOR DEVICE - A semiconductor device concerning an embodiment is provided with a semiconductor layer, an impurity-doped layer selectively formed on the semiconductor layer, and a drain electrode formed on the impurity-doped layer. The semiconductor device is further provided with a source electrode which is formed and isolated from the drain electrode, and a gate electrode which is formed between the source electrode and the drain electrode. The semiconductor device is provided with an insulating film which is formed between the gate electrode and the drain electrode, and a shielding plate which is formed on the insulating film and is electrically connected to the source electrode. At least a part of the shielding plate is formed above an extending portion of the impurity-doped layer which extends in the direction to the gate electrode from the drain electrode. | 08-28-2014 |
| 20140239357 | THIN FILM TRANSISTOR ON FIBER AND MANUFACTURING METHOD OF THE SAME - Provided is a thin film transistor on fiber and a method of manufacturing the same. The thin film transistor includes a fiber; a first electrode, a second electrode and a gate electrode formed on fiber; a channel formed between the first and second electrodes; an encapsulant encapsulating the fiber, the first, second, and gate electrodes, and an upper surface of the channel; and a gate insulating layer formed in a portion of the inner area of the encapsulant. | 08-28-2014 |
| 20140239358 | NONPLANAR DEVICE WITH THINNED LOWER BODY PORTION AND METHOD OF FABRICATION - A nonplanar semiconductor device having a semiconductor body formed on an insulating layer of a substrate. The semiconductor body has a top surface opposite a bottom surface formed on the insulating layer and a pair of laterally opposite sidewalls wherein the distance between the laterally opposite sidewalls at the top surface is greater than at the bottom surface. A gate dielectric layer is formed on the top surface of the semiconductor body and on the sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric layer on the top surface and sidewalls of the semiconductor body. A pair of source/drain regions are formed in the semiconductor body on opposite sides of the gate electrode. | 08-28-2014 |
| 20140239359 | SEMICONDUCTOR DEVICE - A gate electrode ( | 08-28-2014 |
| 20140246709 | SEMICONDUCTOR DEVICE HAVING A SPACER AND A LINER OVERLYING A SIDEWALL OF A GATE STRUCTURE AND METHOD OF FORMING THE SAME - A semiconductor device includes a gate structure over a substrate. The device further includes an isolation feature in the substrate and adjacent to an edge of the gate structure. The device also includes a spacer overlying a sidewall of the gate structure. The spacer has a bottom lower than a top surface of the substrate. | 09-04-2014 |
| 20140246710 | CYCLIC DEPOSITION ETCH CHEMICAL VAPOR DEPOSITION EPITAXY TO REDUCE EPI ABNORMALITY - A semiconductor substructure with an improved source/drain structure is described. The semiconductor substructure can include an upper surface; a gate structure formed over the substrate; a spacer formed along a sidewall of the gate structure; and a source/drain structure disposed adjacent the gate structure. The source/drain structure is disposed over or on a recess surface of a recess that extends below said upper surface. The source/drain structure includes a first epitaxial layer, having a first composition, over or on the interface surface, and a subsequent epitaxial layer, having a subsequent composition, over or on the first epitaxial layer. A dopant concentration of the subsequent composition is greater than a dopant concentration of the first composition, and a carbon concentration of the first composition ranges from 0 to 1.4 at.-%. Methods of making semiconductor substructures including improved source/drain structures are also described. | 09-04-2014 |
| 20140246711 | SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME, METHOD OF MANUFACTURING DISPLAY UNIT, AND METHOD OF MANUFACTURING ELECTRONIC APPARATUS - A semiconductor device includes: a gate electrode and a wiring; a first insulating film covering the gate electrode and the wiring; a semiconductor film opposed to the gate electrode with the first insulating film in between; a first concave section located in a position adjacent to the semiconductor film; a connection hole, the connection hole being provided in the first insulating film, and the connection hole reaching the wiring, and a first electrically-conductive film, the first electrically-conductive film being electrically connected to the wiring through the connection hole, and the first electrically-conductive film being buried in the first concave section. | 09-04-2014 |
| 20140246712 | INTEGRATED CIRCUIT METAL GATE STRUCTURE HAVING TAPERED PROFILE - A device having a gate where the profile of the gate provides a first width at a top region and a second width at a bottom region is described. The gate may include tapered sidewalls. The gate may be a metal gate structure. | 09-04-2014 |
| 20140252423 | SEMICONDUCTOR DEVICE HAVING METAL GATE AND MANUFACTURING METHOD THEREOF - A manufacturing method of semiconductor devices having metal gate includes following steps. A substrate having a first semiconductor device and a second semiconductor device formed thereon is provided. The first semiconductor device includes a first gate trench and the second semiconductor device includes a second gate trench. A first work function metal layer is formed in the first gate trench and the second gate trench. A portion of the first work function metal layer is removed from the second gate trench. A second work function metal layer is formed in the first gate trench and the second gate trench. The second work function metal layer and the first work function metal layer include the same metal material. A third work function metal layer and a gap-filling metal layer are sequentially formed in the first gate trench and the second gate trench. | 09-11-2014 |
| 20140252424 | METHODS OF FORMING SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT ELEMENTS AND THE RESULTING DEVICES - One method discloses performing an etching process to form a contact opening in a layer of insulating material above at least a portion of a source/drain, region wherein, after the completion of the etching process, a portion of a gate structure of the transistor is exposed, selectively forming an oxidizable material on the exposed gate structure, converting at least a portion of the oxidizable material to an oxide material, and forming a conductive contact in the contact opening that is conductively coupled to the source/drain region. A novel transistor device disclosed herein includes an oxide material positioned between a conductive contact and a gate structure of the transistor, wherein the oxide material contacts the conductive contact and contacts a portion, but not all, of the exterior surface of the gate structure. | 09-11-2014 |
| 20140252425 | METHODS OF FORMING SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT ELEMENTS AND THE RESULTING DEVICES - One method includes performing a first etching process to form a contact opening in a layer of insulating material that exposes a portion of a gate structure of the transistor, performing a second etching process on the exposed portion of the gate structure to thereby define a gate recess, selectively forming an oxidizable material in the gate recess, converting the oxidizable material to an oxide material, and forming a conductive contact in the contact opening that is conductively coupled to a source/drain region. A device includes an oxide material that is positioned at least partially in a recess formed in a gate structure, wherein the oxide material contacts a conductive contact and contacts a portion, but not all, of the exterior surface of the gate structure. | 09-11-2014 |
| 20140252426 | Semiconductor Structure with Dielectric-Sealed Doped Region - Leakage current can be substantially reduced by the formation of a seal dielectric in place of the conventional junction between source/drain region(s) and the substrate material. Trenches are formed in the substrate and lined with a seal dielectric prior to filling the trenches with semiconductor material. Preferably, the trenches are overfilled and a CMP process planarizes the overfill material. An epitaxial layer can be grown atop the trenches after planarization, if desired. | 09-11-2014 |
| 20140252427 | Self-aligned Contacts For Replacement Metal Gate Transistors - Embodiments of the invention include methods of forming gate caps. Embodiments may include providing a semiconductor device including a gate on a semiconductor substrate and a source/drain region on the semiconductor substrate adjacent to the gate, forming a blocking region, a top surface of which extends above a top surface of the gate, depositing an insulating layer above the semiconductor device, and planarizing the insulating layer using the blocking region as a planarization stop. Embodiments further include semiconductor devices having a semiconductor substrate, a gate above the semiconductor substrate, a source/drain region adjacent to the gate, a gate cap above the gate that cover the full width of the gate, and a contact adjacent to the source/drain region having a portion of its sidewall defined by the gate cap. | 09-11-2014 |
| 20140252428 | Semiconductor Fin Structures and Methods for Forming the Same - An integrated circuit structure includes a semiconductor substrate, an insulation region extending into the semiconductor substrate, and a semiconductor strip between two opposite portions of the insulation region. The semiconductor strip includes an upper portion higher than top surfaces of the insulation regions and a lower portion in the insulation region. The lower portion has a sidewall including a first sidewall portion having a first slope and a second sidewall portion over and connected to the first sidewall portion. The second sidewall portion has a second slope smaller than the first slope. | 09-11-2014 |
| 20140252429 | CONTACT GEOMETRY HAVING A GATE SILICON LENGTH DECOUPLED FROM A TRANSISTOR LENGTH - Methods for forming a semiconductor device are provided. In one embodiment, a gate structure having a gate insulating layer and a gate electrode structure formed on the gate insulating layer is provided. The methods provide reducing a dimension of the gate electrode structure relative to the gate insulating layer along a direction extending in parallel to a direction connecting the source and drain. A semiconductor device structure having a gate structure including a gate insulating layer and a gate electrode structure formed above the gate insulating layer is provided, wherein a dimension of the gate electrode structure extending along a direction which is substantially parallel to a direction being oriented from source to drain is reduced relative to a dimension of the gate insulating layer. According to some examples, gate structures are provided having a gate silicon length which is decoupled from the channel width induced by the gate structure. | 09-11-2014 |
| 20140252430 | Electronic Device Including a Dielectric Layer Having a Non-Uniform Thickness and a Process of Forming The Same - An electronic device can include a transistor having a drain region, a source region, a dielectric layer, and a gate electrode. The dielectric layer can have a first portion and a second portion, wherein the first portion is relatively thicker and closer to the drain region; the second portion is relatively thinner and closer to the source region. The gate electrode of the transistor can overlie the first and second portions of the dielectric layer. In another aspect, an electronic device can be formed using two different dielectric layers having different thicknesses. A gate electrode within the electronic device can be formed over portions of the two different dielectric layers. The process can eliminate masking and doping steps that may be otherwise used to keep the drain dopant concentration closer to the concentration as originally formed. | 09-11-2014 |
| 20140252431 | Semiconductor Device Structure and Method of Forming Same - An embodiment is a semiconductor device comprising a first gate structure over a semiconductor substrate, a first etch stop layer (ESL) over the semiconductor substrate and the first gate, the first ESL having a curved top surface, and a first inter-layer dielectric (ILD) on the first ESL, the first ILD having a curved top surface. The semiconductor device further comprises a second ESL on the first ILD, the second ESL having a curved top surface, and a second ILD on the second ESL. | 09-11-2014 |
| 20140252432 | Semiconductor Device and Method for Forming the Same - A semiconductor device includes a substrate and a gate structure formed over the substrate. The semiconductor device further includes an insulator feature formed in the substrate. The insulator feature includes an insulating layer and a capping layer over the insulating layer. | 09-11-2014 |
| 20140252433 | Multi-Layer Metal Contacts - A method for forming metal contacts within a semiconductor device includes forming a first-layer contact into a first dielectric layer that surrounds at least one gate electrode, the first-layer contact extending to a doped region of an underlying substrate. The method further includes forming a second dielectric layer over the first dielectric layer and forming a second-layer contact extending through the second dielectric layer to the first-layer contact. | 09-11-2014 |
| 20140252434 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A method of manufacturing a semiconductor device includes forming isolation layers in a first direction at trenches at isolation regions defined at a semiconductor substrate and forming gate lines in a second direction crossing the first direction over the isolation layers and active regions defined between the isolation layers, performing a dry-etch process to remove the isolation layers, and forming an insulating layer over the semiconductor substrate to form a first air gap extending in the first direction in the trenches and a second air gap extending in the second direction between the gate lines. | 09-11-2014 |
| 20140252435 | SEMICONDUCTOR DEVICE - A semiconductor device concerning an embodiment is provided with a plate-like semiconductor substrate, electrode pads, electrode connecting conductors, and a source electrode back pad. The semiconductor substrate has a first cutout section in a first side, and has a second cutout section and a third cutout section in a second side. A drain electrode connecting conductor is provided in the first cutout section, and one end thereof touches the drain electrode pad, and the other end thereof is exposed in a back surface of the semiconductor substrate. A gate electrode connecting conductor is provided in the third cutout section, and one end thereof touches the gate electrode pad, and the other end thereof is exposed in the back of the semiconductor substrate. A source electrode connecting conductor is provided in the second cutout section, and one end thereof touches the source electrode pad. | 09-11-2014 |
| 20140252436 | SEMICONDUCTOR DEVICE - There is provided a semiconductor device with basic electronic elements in a three-dimensional structure. The semiconductor device has a source region and a drain region each of which includes an electrode and a silicide region, and is formed with a plurality of different crystal planes. The silicide regions on different crystal planes of the source region and the drain region have different thicknesses. | 09-11-2014 |
| 20140264478 | INTERFACE FOR METAL GATE INTEGRATION - A metal oxide semiconductor field effect transistor (MOSFET) includes a semiconductor substrate and a interlayer dielectric (ILD) over the semiconductor substrate. A gate structure is formed within the ILD and disposed on the semiconductor substrate, wherein the gate structure includes a high-k dielectric material layer and a metal gate stack. One or more portions of a protection layer are formed over the gate stack, and a contact etch stop layer is formed over the ILD and over the one or more portions of the protection layer. The metal gate stack includes aluminum and the protection layer includes aluminum oxide. | 09-18-2014 |
| 20140264479 | METHODS OF INCREASING SPACE FOR CONTACT ELEMENTS BY USING A SACRIFICIAL LINER AND THE RESULTING DEVICE - One method includes forming a sidewall spacer adjacent a gate structure, forming a first liner layer on the sidewall spacer, forming a second liner layer on the first liner layer, forming a first layer of insulating material above the substrate and adjacent the second liner layer, selectively removing at least portions of the second liner layer relative to the first liner layer, forming a second layer of insulating material above the first layer of insulating material, performing at least one second etching process to remove at least portions of the first and second layers of insulating material and at least portions of the first liner layer so as to thereby expose an outer surface of the sidewall spacer, and forming a conductive contact that contacts the exposed outer surface of the sidewall spacer and a source/drain region of the transistor. | 09-18-2014 |
| 20140264480 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME - A method of forming a semiconductor device includes the following steps. At first, a semiconductor substrate is provided, and a metal gate structure and a first dielectric layer are disposed on the semiconductor substrate, wherein a top surface of the metal gate structure is aligned with a top surface of the first dielectric layer. Then, a patterned mask is formed on the metal gate structure, and the patterned mask does not overlap the first dielectric layer. Subsequently, a second dielectric layer covering the patterned mask is conformally formed on the semiconductor substrate. Furthermore, a part of the first dielectric layer and a part of the second dielectric layer are removed for forming at least a contact hole. | 09-18-2014 |
| 20140264481 | PLUG STRUCTURE AND PROCESS THEREOF - A plug structure including a first dielectric layer, a second dielectric layer, a barrier layer and a second plug is provided. The first dielectric layer having a first plug therein is located on a substrate, wherein the first plug physically contacts a source/drain in the substrate. The second dielectric layer having an opening exposing the first plug is located on the first dielectric layer. The barrier layer conformally covers the opening, wherein the barrier layer has a bottom part and a sidewall part, and the bottom part is a single layer and physically contacts the first plug while the sidewall part is a dual layer. The second plug fills the opening and on the barrier layer. Moreover, a process of forming a plug structure is also provided. | 09-18-2014 |
| 20140264482 | CARBON-DOPED CAP FOR A RAISED ACTIVE SEMICONDUCTOR REGION - After formation of a disposable gate structure, a raised active semiconductor region includes a vertical stack, from bottom to top, of an electrical-dopant-doped semiconductor material portion and a carbon-doped semiconductor material portion. A planarization dielectric layer is deposited over the raised active semiconductor region, and the disposable gate structure is replaced with a replacement gate structure. A contact via cavity is formed through the planarization dielectric material layer by an anisotropic etch process that employs a fluorocarbon gas as an etchant. The carbon in the carbon-doped semiconductor material portion retards the anisotropic etch process, and the carbon-doped semiconductor material portion functions as a stopping layer for the anisotropic etch process, thereby making the depth of the contact via cavity less dependent on variations on the thickness of the planarization dielectric layer or pattern factors. | 09-18-2014 |
| 20140264483 | Metal gate structures for field effect transistors and method of fabrication - The present invention relates to combinations of materials and fabrication techniques which are useful in the fabrication of filled, metal-comprising gates for use in planar and 3D Field Effect Transistor (FET) structures. The FET structures described are of the kind needed for improved performance in semiconductor device structures produced at manufacturing nodes which implement semiconductor feature sizes in the 15 nm range or lower. | 09-18-2014 |
| 20140264484 | FLUORINE-DOPED CHANNEL SILICON-GERMANIUM LAYER - Methods for forming P-type channel metal-oxide-semiconductor field effect transistors (PMOSFETs) with improved interface roughness at the channel silicon-germanium (cSiGe) layer and the resulting devices are disclosed. Embodiments may include designating a region in a substrate as a channel region, forming a cSiGe layer above the designated channel region, and implanting fluorine directly into the cSiGe layer. Embodiments may alternatively include implanting fluorine into a region in a silicon substrate designated a channel region, forming a cSiGe layer above the designated channel region, and heating the silicon substrate and the cSiGe layer to diffuse the fluorine into the cSiGe layer. | 09-18-2014 |
| 20140264485 | FIN-TYPE SEMICONDUCTOR DEVICE - An apparatus comprises a substrate and a fin-type semiconductor device extending from the substrate. The fin type semiconductor device comprises a fin that comprises a first region having a first doping concentration and a second region having a second doping concentration. The first doping concentration is greater than the second doping concentration. The fin type semiconductor device also comprises an oxide layer. Prior to source and drain formation of the fin-type semiconductor device, a doping concentration of the oxide layer is less than the first doping concentration. | 09-18-2014 |
| 20140264486 | METHODS OF FORMING A SEMICONDUCTOR DEVICE WITH A PROTECTED GATE CAP LAYER AND THE RESULTING DEVICE - One method includes forming a recessed gate/spacer structure that partially defines a spacer/gate cap recess, forming a gate cap layer in the spacer/gate cap recess, forming a gate cap protection layer on an upper surface of the gate cap layer, and removing portions of the gate cap protection layer, leaving a portion of the gate cap protection layer positioned on the upper surface of the gate cap layer. A device disclosed herein includes a gate/spacer structure positioned in a layer of insulating material, a gate cap layer positioned on the gate/spacer structure, wherein sidewalls of the gate cap layer contact the layer of insulating material, and a gate cap protection layer positioned on an upper surface of the gate cap layer, wherein the sidewalls of the gate cap protection layer also contact the layer of insulating material. | 09-18-2014 |
| 20140264487 | METHODS OF FORMING A SEMICONDUCTOR DEVICE WITH A PROTECTED GATE CAP LAYER AND THE RESULTING DEVICE - One method disclosed herein includes forming first and second gate cap protection layers that encapsulate and protect a gate cap layer. A novel transistor device disclosed herein includes a gate structure positioned above a semiconductor substrate, a spacer structure positioned adjacent the gate structure, a layer of insulating material positioned above the substrate and around the spacer structure, a gate cap layer positioned above the gate structure and the spacer structure, and a gate cap protection material that encapsulates the gate cap layer, wherein portions of the gate cap protection material are positioned between the gate cap layer and the gate structure, the spacer structure and the layer of insulating material. | 09-18-2014 |
| 20140264488 | METHODS OF FORMING LOW DEFECT REPLACEMENT FINS FOR A FINFET SEMICONDUCTOR DEVICE AND THE RESULTING DEVICES - One illustrative device disclosed herein includes a substrate fin formed in a substrate comprised of a first semiconductor material, wherein at least a sidewall of the substrate fin is positioned substantially in a <100> crystallographic direction of the crystalline structure of the substrate, a replacement fin structure positioned above the substrate fin, wherein the replacement fin structure is comprised of a semiconductor material that is different from the first semiconductor material, and a gate structure positioned around at least a portion of the replacement fin structure. | 09-18-2014 |
| 20140264489 | WRAP AROUND STRESSOR FORMATION - For the formation of a stressor on one or more of a source and drain defined on a fin of FINFET semiconductor structure, a method can be employed including performing selective epitaxial growth (SEG) on one or more of the source and drain defined on the fin, separating the fin from a bulk silicon substrate at one or more of the source and drain, and further performing SEG on one or more of the source and drain to form a wrap around epitaxial growth stressor that stresses a channel connecting the source and drain. The formed stressor can be formed so that the epitaxial growth material defining a wrap around configuration connects to the bulk substrate. The formed stressor can increase mobility in a channel connecting the defined source and drain. | 09-18-2014 |
| 20140264490 | REPLACEMENT GATE ELECTRODE WITH A SELF-ALIGNED DIELECTRIC SPACER - A dielectric disposable gate structure can be formed across a semiconductor material portion, and active semiconductor regions are formed within the semiconductor material portion. Raised active semiconductor regions are grown over the active semiconductor regions while the dielectric disposable gate structure limits the extent of the raised active semiconductor regions. A planarization dielectric layer is formed over the raised active semiconductor regions. In one embodiment, the dielectric disposable gate structure is removed, and a dielectric gate spacer can be formed by conversion of surface portions of the raised active semiconductor regions around a gate cavity. Alternately, an etch mask layer overlying peripheral portions of the disposable gate structure can be formed, and a gate cavity and a dielectric spacer can be formed by anisotropically etching an unmasked portion of the dielectric disposable gate structure. A replacement gate structure can be formed in the gate cavity. | 09-18-2014 |
| 20140264491 | Semiconductor Strips with Undercuts and Methods for Forming the Same - An integrated circuit device includes a semiconductor substrate, and a semiconductor strip extending into the semiconductor substrate. A first and a second dielectric region are on opposite sides of, and in contact with, the semiconductor strip. Each of the first dielectric region and the second dielectric region includes a first portion level with the semiconductor strip, and a second portion lower than the semiconductor strip. The second portion further includes a portion overlapped by the semiconductor strip. | 09-18-2014 |
| 20140264492 | COUNTER-DOPED LOW-POWER FINFET - FinFETs and methods for making FinFETs are disclosed. A fin is formed on a substrate, wherein the fin has a height greater than 2 to 6 times of its width, a length defining a channel between source and drain ends, and the fin comprises a lightly doped semiconductor. A conformally doped region of counter-doped semiconductor is formed on the fin using methods such as monolayer doping, sacrificial oxide doping, or low energy plasma doping. Halo-doped regions are formed by angled ion implantation. The halo-doped regions are disposed in the lower portion of the source and drain and adjacent to the fin. Energy band barrier regions can be formed at the edges of the halo-doped regions by angled ion implantation. | 09-18-2014 |
| 20140264493 | Semiconductor Device and Fabricating the Same - A semiconductor device includes a substrate, a gate stack having at least one gate vertex directed to an area in the substrate below the gate stack. The semiconductor device also includes a source structure having at least one vertex directed toward the area in the substrate and a drain structure having at least one vertex directed toward the area in the substrate. | 09-18-2014 |
| 20140264494 | Metal-Oxide-Semiconductor Field-Effect Transistor with Metal-Insulator Semiconductor Contact Structure to Reduce Schottky Barrier - A method includes depositing a first metal layer on a native SiO | 09-18-2014 |
| 20140264495 | SELF-ALIGNED LINER METHOD OF AVOIDING PL GATE DAMAGE - A self-align method of preparing semiconductor gates for formation of a silicide, such as a cobalt silicide (CoSi) layer, is disclosed. Deposition of silicon nitride (SiN) and low-temperature oxide (LTO) liner types, the SiN liner having an overhang structure, prevent damage to the gates while forming a self-aligned source. The undamaged gates are suitable for CoSi deposition. | 09-18-2014 |
| 20140264496 | STRESS ENHANCED FINFET DEVICES - A non-planar semiconductor with enhanced strain includes a substrate and at least one semiconducting fin formed on a surface of the substrate. A gate stack is formed on a portion of the at least one semiconducting fin. A stress liner is formed over at least each of a plurality of sidewalls of the at least one semiconducting fin and the gate stack. The stress liner imparts stress to at least a source region, a drain region, and a channel region of the at least one semiconducting fin. The channel region is located in at least one semiconducting fin beneath the gate stack. | 09-18-2014 |
| 20140264497 | SELF-ALIGNED APPROACH FOR DRAIN DIFFUSION IN FIELD EFFECT TRANSISTORS - A method for doping terminals of a field-effect transistor (FET), the FET including a drain region, a source region, and a surround gate surrounding a channel region, the method including depositing a dopant-containing layer, such that the surround gate prevents the dopant-containing layer from contacting the channel region of the FET, the dopant-containing layer including a dopant. The dopant then diffuses the dopant from the dopant-containing layer into at least one of the drain region and source region of the FET. | 09-18-2014 |
| 20140264498 | MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A memory device includes a gate structure, a contact plug, and a spacer. The gate structure includes first and second conductive layer patterns sequentially stacked on a substrate. The contact plug passes through the second conductive layer pattern, and a sidewall of the contact plug directly contacts at least a portion of the second conductive layer pattern. The spacer surrounds a portion of the sidewall of the contact plug and contacting the gate structure. | 09-18-2014 |
| 20140264499 | SEMICONDUCTOR DEVICES HAVING DIELECTRIC CAPS ON CONTACTS AND RELATED FABRICATION METHODS - Semiconductor device structures are provided. An exemplary semiconductor device structure includes a substrate of a semiconductor material and a gate structure overlying the substrate. The semiconductor substrate further includes a doped region formed in the substrate proximate the gate structure and a first dielectric material overlying the doped region. The semiconductor substrate also includes a conductive contact formed in the first dielectric material, the conductive contact being electrically connected to the doped region, and a dielectric cap overlying the conductive contact. | 09-18-2014 |
| 20140284667 | FINFET WITH REDUCED CAPACITANCE - An improved finFET structure, and method forming the same, including a plurality of fins etched from a semiconductor substrate, a plurality of gates above and perpendicular to the plurality of fins, each comprising a pair of spacers on opposing sides of the gates, and a gap fill material above the semiconductor substrate, below the gate, and between the plurality of fins, wherein the gate separates the gap fill material from each of the plurality of fins. | 09-25-2014 |
| 20140284668 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - An object of the present invention is to provide a semiconductor device having a conductive film, which sufficiently serves as an antenna, and a method for manufacturing thereof. The semiconductor device has an element formation layer including a transistor, which is provided over a substrate, an insulating film provided on the element formation layer, and a conductive film serving as an antenna, which is provided on the insulating film. The insulating film has a groove. The conductive film is provided along the surface of the insulating film and the groove. The groove of the insulating film may be provided to pass through the insulating film. Alternatively, a concave portion may be provided in the insulating film so as not to pass through the insulating film. A structure of the groove is not particularly limited, and for example, the groove can be provided to have a tapered shape, etc. | 09-25-2014 |
| 20140291734 | Thin Channel MOSFET with Silicide Local Interconnect - A semiconductor structure and method of manufacturing the same are provided. The semiconductor structure includes a semiconductor substrate having an isolated area comprising a first region and a second region. A first raised RSD region is formed in the first region and a second RSD region is formed in the second region. The first RSD region and second RSD region is separated laterally by a portion of the isolated area. A continuous silicide interconnect structure is formed overlying the first RSD region, the second RSD region and the portion of the isolated area situated between RSD regions. A contact may be formed on the surface of the silicide interconnect. | 10-02-2014 |
| 20140291735 | DOUBLE PATTERNING VIA TRIANGULAR SHAPED SIDEWALL SPACERS - An intermediate semiconductor structure in fabrication includes a silicon semiconductor substrate, a hard mask of silicon nitride (SiN) over the substrate and a sacrificial layer of polysilicon or amorphous silicon over the hard mask. The sacrificial layer is patterned into sidewall spacers for mandrels of a filler material substantially different in composition from the sidewall spacers, such as a flowable oxide. The mandrels are removed such that the sidewall spacers have vertically tapered inner and outer sidewalls providing a rough triangular shape. The rough triangular sidewall spacers are used as a hard mask to pattern the SiN hard mask below. | 10-02-2014 |
| 20140291736 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In one embodiment, a first main terminal region of a first conductivity type and a second main terminal region of a second conductivity type, which is an opposite conductivity type of the first conductivity type, formed in the semiconductor substrate so as to sandwich a gate electrode, a diffusion layer of the second conductivity type coming in contact with the first and second element isolation insulator films and having an upper surface in a position deeper than lower surfaces of the first and second main terminal regions, a first well region of the first conductivity type formed between the first main terminal region and the diffusion layer, and a second well region of the first conductivity type formed between the second main terminal region and the diffusion layer. The second well region has a impurity concentration higher than that of the first well region. | 10-02-2014 |
| 20140291737 | TRANSISTOR ARCHITECTURE HAVING EXTENDED RECESSED SPACER AND SOURCE/DRAIN REGIONS AND METHOD OF MAKING SAME - Techniques are disclosed for forming transistor architectures having extended recessed spacer and source/drain (S/D) regions. In some embodiments, a recess can be formed, for example, in the top of a fin of a fin-based field-effect transistor (finFET), such that the recess allows for forming extended recessed spacers and S/D regions in the finFET that are adjacent to the gate stack. In some instances, this configuration provides a higher resistance path in the top of the fin, which can reduce gate-induced drain leakage (GIDL) in the finFET. In some embodiments, precise tuning of the onset of GIDL can be provided. Some embodiments may provide a reduction in junction leakage (L | 10-02-2014 |
| 20140291738 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR - A semiconductor electronic device structure includes an active area array disposed in a substrate, an isolation structure, a plurality of recessed gate structures, a plurality of word lines, and a plurality of bit lines. The active area array a plurality of active area columns and a plurality of active area rows, defining an array of active areas. The substrate has two recesses formed at the central region thereof. Each recessed gate structure is respectively disposed in the recess. A protruding structure is formed on the substrate in each recess. A STI structure of the isolation structure is arranged between each pair of adjacent active area rows. Word lines are disposed in the substrate, each electrically connecting the gate structures there-under. Bit lines are disposed above the active areas, forming a crossing pattern with the word lines. | 10-02-2014 |
| 20140291739 | JUNCTION-LESS TRANSISTOR HAVING REVERSE POLARITY STRUCTURE - A junction-less transistor having an reverse polarity structure includes a substrate, a semiconductor body, a gate and a gate insulation layer. The substrate has a first polarity. The semiconductor body is disposed on the substrate, and includes a drain, a source and a channel section connected between the drain and the source. The gate covers one side of the channel section away from the substrate. The semiconductor body has a second polarity opposite to the first polarity. With the semiconductor body and the substrate respectively having the opposite second polarity and first polarity, a leakage current can be reduced while also lowering element production costs. | 10-02-2014 |
| 20140291740 | Perforated Channel Field Effect Transistor - A device including a plurality of perforations to a semiconductor channel is provided. The device includes a semiconductor structure forming the semiconductor channel. Additionally, the device includes a source contact, a drain contact, and a gate contact to the semiconductor channel. The plurality of perforations can be located in the semiconductor structure below the gate contact. Furthermore, a perforation in the plurality of perforations can extend into the semiconductor structure beyond a location of the semiconductor channel. | 10-02-2014 |
| 20140291741 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A method of fabricating a semiconductor device includes forming a first metal gate electrode over a substrate, forming a second metal gate electrode over the substrate, removing at least a part of the first metal gate electrode to form a first opening, and filling the first opening with a non-conductive material. | 10-02-2014 |
| 20140291742 | PIXEL STRUCTURE AND FABRICATING METHOD THEREOF - A fabrication method of a pixel structure and a pixel structure are provided. A first patterned metal layer including scan lines and a gate is formed on a substrate. A first insulation layer, a semiconductor layer, an etching stop pattern and a metal layer are formed sequentially on the first patterned metal layer. The metal layer and the semiconductor layer are patterned to form a second patterned metal layer and a patterned semiconductor layer. The second patterned metal layer includes data lines, a source and a drain. The patterned semiconductor layer includes a first semiconductor pattern completely overlapping the second patterned metal layer and a second semiconductor pattern without overlapping the second patterned metal layer, wherein the second semiconductor pattern includes a channel pattern and a marginal pattern. The channel pattern is between the source and the drain and the marginal pattern surrounds the first semiconductor pattern. | 10-02-2014 |
| 20140299923 | FIELD EFFECT TRANSISTOR - A field effect transistor includes a semiconductor substrate having a protrusion with at least one inclined surface, a gate insulator disposed at least on a portion of the inclined surface, and a gate conductor disposed on the gate insulator, wherein the semiconductor substrate comprises doped regions sandwiching a channel region, wherein the at least one inclined surface has a first crystal orientation in the channel region, and the inclined surface has an included angle to a vertical plane with a second crystal orientation. The hole mobility and the electron mobility are substantially the same in the channel region having a crystalline orientation off from the (110) crystal orientation. | 10-09-2014 |
| 20140299924 | FORMATION OF THE DIELECTRIC CAP LAYER FOR A REPLACEMENT GATE STRUCTURE - Gate to contact shorts are reduced by forming dielectric caps in replaced gate structures. Embodiments include forming a replaced gate structure on a substrate, the replaced gate structure including an ILD having a cavity, a first metal on a top surface of the ILD and lining the cavity, and a second metal on the first metal and filling the cavity, planarizing the first and second metals, forming an oxide on the second metal, removing the oxide, recessing the first and second metals in the cavity, forming a recess, and filling the recess with a dielectric material. Embodiments further include dielectric caps having vertical sidewalls, a trapezoidal shape, a T-shape, or a Y-shape. | 10-09-2014 |
| 20140306271 | Unltra-Shallow Junction Semiconductor Field-Effect Transistor and Method of Making - An ultra-shallow junction semiconductor field-effect transistor and its methods of making are disclosed. In the present disclosure, a mixture film is formed on a semiconductor substrate with a gate structure formed thereon using a physical vapor deposition (PVD) process, which employs a mixture of metal and semiconductor dopants as a target. The PVD process is followed by annealing, during which ultra-shallow junctions and ultra-thin metal silicide are formed. After removing the mixture film remaining on the semiconductor substrate, an ultra-shallow junction semiconductor field-effect transistor is formed. Because the mixture film comprises metal and semiconductor dopants, ultra-shallow junctions and ultra-thin metal silicide can be formed in a same annealing process. The ultra-shallow junction thus formed can be used in semiconductor field-effect transistors for the 14 nm, 11 nm, or even further technology node. | 10-16-2014 |
| 20140306272 | METHOD OF FORMING A FINFET STRUCTURE - A method of forming a fin structure is provided. First, a substrate is provided, wherein a first region, a second region encompassing the first region, and a third region encompassing the second region are defined on the substrate. Then, a plurality of first trenches having a first depth are formed in the first region and the second region, wherein each two first trenches defines a first fin structure. The first fin structure in the second region is removed. Lastly, the first trenches are deepened to form a plurality of second trenches having a second depth, wherein each two second trenches define a second fin structure. The present invention further provides a structure of a non-planar transistor. | 10-16-2014 |
| 20140306273 | STRUCTURE OF METAL GATE STRUCTURE AND MANUFACTURING METHOD OF THE SAME - A manufacturing method of a metal gate structure is provided. First, a substrate covered by an interlayer dielectric is provided. A gate trench is formed in the interlayer dielectric, wherein a gate dielectric layer is formed in the gate trench. A silicon-containing work function layer is formed on the gate dielectric layer in the gate trench. Finally, the gate trench is filled up with a conductive metal layer. | 10-16-2014 |
| 20140306274 | SELF-ALIGNED STRUCTURE FOR BULK FinFET - A FinFET structure which includes a bulk semiconductor substrate; semiconductor fins extending from the bulk semiconductor substrate, each of the semiconductor fins having a top portion and a bottom portion such that the bottom portion of the semiconductor fins is doped and the top portion of the semiconductor fins is undoped; a portion of the bulk semiconductor substrate directly underneath the plurality of semiconductor fins being doped to form an n+ or p+ well; and an oxide formed between the bottom portions of the fins. | 10-16-2014 |
| 20140306275 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A semiconductor device is disclosed. The semiconductor device includes an insulating layer formed selectively on a semiconductor layer; a lower electrode, formed on the insulating layer, having an end portion at a position spaced apart by a predetermined distance inward from a periphery of the insulating layer; a dielectric film formed on the lower electrode; an upper electrode, formed on the dielectric film, facing the lower electrode with the dielectric film interposed between the upper electrode and the lower electrode; and a passivation film, formed to cover the insulating layer, starting from the end portion of the lower electrode and extending toward the periphery of the insulating layer. The passivation film includes an insulating material having an etching selectivity with respect to the insulating layer. | 10-16-2014 |
| 20140312393 | FIN-FET TRANSISTOR WITH PUNCHTHROUGH BARRIER AND LEAKAGE PROTECTION REGIONS - A method of forming a field effect transistor includes forming a punchthrough region having a first conductivity type in a substrate, forming an epitaxial layer having the first conductivity type on the substrate, patterning the epitaxial layer to form a fin that protrudes from the substrate, forming a dummy gate and gate sidewall spacers on the fin defining preliminary source and drain regions of the fin on opposite sides of the dummy gate, removing the preliminary source and drain regions of the fin, implanting second conductivity type dopant atoms into exposed portions of the substrate and the punchthrough region, and forming source and drain regions having the second conductivity type on opposite sides of the dummy gate and the gate sidewall spacers. | 10-23-2014 |
| 20140312394 | Semiconductor Device Including a Material to Absorb Thermal Energy - A semiconductor device includes a semiconductor chip and a first material including molecules that are configured to absorb thermal energy by reversibly changing a spatial molecular structure of the molecules. | 10-23-2014 |
| 20140312395 | SELF-ALIGNED BORDERLESS CONTACTS USING A PHOTO-PATTERNABLE DIELECTRIC MATERIAL AS A REPLACEMENT CONTACT - A photo-patternable dielectric material is provided to a structure which includes a substrate having at least one gate structure. The photo-patternable dielectric material is then patterned forming a plurality of sacrificial contact structures adjacent the at least one gate structure. A planarized middle-of-the-line dielectric material is then provided in which an uppermost surface of each of the sacrificial contact structures is exposed. Each of the exposed sacrificial contact structures is then removed providing contact openings within the planarized middle-of-the-line dielectric material. A conductive metal-containing material is formed within each contact opening. | 10-23-2014 |
| 20140312396 | SPLIT MULTI-GATE FIELD-EFFECT TRANSISTOR - A semiconductor device based on split multi-gate field-effect transistor radio frequency devices is provided. The semiconductor device includes a substrate and a gate structure above the substrate and orthogonal to a channel axis. The semiconductor device also includes a semiconductor fin structure above the substrate along the channel axis. The semiconductor also includes a gate oxide region beneath the gate structure and in contact with the gate structure and the semiconductor fin structure. The gate oxide region has a first region with a first thickness and a first length. The gate oxide region also has a second region with a second thickness and a second length. The first thickness is greater than the second thickness. The first region and the second region are formed side-by-side along the channel axis. | 10-23-2014 |
| 20140312397 | SELF-ALIGNED BORDERLESS CONTACTS USING A PHOTO-PATTERNABLE DIELECTRIC MATERIAL AS A REPLACEMENT CONTACT - A photo-patternable dielectric material is provided to a structure which includes a substrate having at least one gate structure. The photo-patternable dielectric material is then patterned forming a plurality of sacrificial contact structures adjacent the at least one gate structure. A planarized middle-of-the-line dielectric material is then provided in which an uppermost surface of each of the sacrificial contact structures is exposed. Each of the exposed sacrificial contact structures is then removed providing contact openings within the planarized middle-of-the-line dielectric material. A conductive metal-containing material is formed within each contact opening. | 10-23-2014 |
| 20140312398 | RECESSING STI TO INCREASE FIN HEIGHT IN FIN-FIRST PROCESS - A method includes forming a gate stack over top surfaces of a semiconductor strip and insulation regions on opposite sides of the semiconductor strip. The insulation regions include first portions overlapped by the gate stack, and second portions misaligned from the gate stack. An end portion of the semiconductor strip is etched to form a recess, wherein the recess is located between the second portions of the insulation regions. An epitaxy is performed to grow a source/drain region from the recess. After the epitaxy, a recessing is performed to recess the second portions of the insulation regions, with the second portions of the insulation regions having first top surfaces after the first recessing. After the recessing, a dielectric mask layer is formed on the first top surfaces of the second portions of the insulation regions, wherein the dielectric mask layer further extends on a sidewall of the gate stack. | 10-23-2014 |
| 20140312399 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A gate insulating film of a conventional semiconductor device is subjected to dielectric breakdown at a low electric field strength and thus its service life is short. This is because since the size of the asperity of at least one of a semiconductor layer-side interface and an electrode-side interface is large and, an electric field applied to the gate insulating film is locally concentrated and has a variation in its strength. This problem is solved by specifying the sizes of the asperities of both interfaces of the gate insulating film. | 10-23-2014 |
| 20140319586 | PHOTOLITHOGRAPHIC, THICKNESS NON-UNIFORMITY, COMPENSATION FEATURES FOR OPTICAL PHOTOLITHOGRAPHIC SEMICONDUCTOR STRUCTURE FORMATION - A semiconductor structure having a substrate; an active device formed in an active semiconductor region of the substrate, the active device having a control electrode for controlling a flow of carriers through the active semiconductor region between a pair of electrical contacts; and a photolithographic, thickness non-uniformity, compensation feature, disposed on the surface substrate off of the active semiconductor region. In one embodiment the feature comprises pads on the surface of the substrate and off of the active semiconductor region. | 10-30-2014 |
| 20140319587 | Through-Substrate Vias and Methods for Forming the Same - A device includes a semiconductor substrate and a Metal-Oxide-Semiconductor (MOS) transistor. The MOS transistor includes a gate electrode over the semiconductor substrate, and a source/drain region on a side of the gate electrode. A source/drain contact plug includes a lower portion and an upper portion over the lower portion, wherein the source/drain contact plug is disposed over and electrically connected to the source/drain region. A gate contact plug is disposed over and electrically connected to the gate electrode, wherein a top surface of the gate contact plug is level with a top surface of the top portion of the source/drain contact plug. A Through-Substrate Via (TSV) extends into the semiconductor substrate. A top surface of the TSV is substantially level with an interface between the gate contact plug and the gate electrode. | 10-30-2014 |
| 20140327054 | Raised Source/Drain and Gate Portion with Dielectric Spacer or Air Gap Spacer - A semiconductor structure and method of manufacturing the same are provided. The semiconductor device includes epitaxial raised source/drain (RSD) regions formed on the surface of a semiconductor substrate through selective epitaxial growth. In one embodiment, the faceted side portions of the RSD regions are utilized to form cavity regions which may be filled with a dielectric material to form dielectric spacer regions. Spacers may be formed over the dielectric spacer regions. In another embodiment, the faceted side portions may be selectively grown to form air gap spacer regions in the cavity regions. A conformal spacer layer with interior and exterior surfaces may be formed in the cavity region, creating an air gap spacer defined by the interior surfaces of the conformal spacer layer. | 11-06-2014 |
| 20140327055 | REPLACEMENT GATE PROCESS AND DEVICE MANUFACTURED USING THE SAME - A replacement gate process is disclosed. A substrate and a dummy gate structure formed on the substrate is provided, wherein the dummy gate structure comprises a dummy layer on the substrate, a hard mask layer on the dummy layer, spacers at two sides of the dummy layer and the hard mask layer, and a contact etch stop layer (CESL) covering the substrate, the spacers and the hard mask layer. The spacers and the CESL are made of the same material. Then, a top portion of the CESL is removed to expose the hard mask layer. Next, the hard mask layer is removed. Afterward, the dummy layer is removed to form a trench. | 11-06-2014 |
| 20140327056 | SEMICONDUCTOR DEVICE HAVING CONTACT PLUG AND METHOD OF MANUFACTURING THE SAME - A semiconductor device having a contact plug is manufactured. The semiconductor device includes a substrate having a cell array region and a peripheral circuit region, a gate electrode on the substrate, and an interlayer dielectric layer on the substrate. The interlayer dielectric layer has an upper surface having a first height. | 11-06-2014 |
| 20140327057 | Power Semiconductor Device with a Double Metal Contact - A power semiconductor device that includes a stack of a thin metal layer and a thick metal layer over the active region thereof, and a method for the fabrication thereof. | 11-06-2014 |
| 20140327058 | SELF-ALIGNED CONTACTS FOR REPLACEMENT METAL GATE TRANSISTORS - Embodiments of the invention include methods of forming gate caps. Embodiments may include providing a semiconductor device including a gate on a semiconductor substrate and a source/drain region on the semiconductor substrate adjacent to the gate, forming a blocking region, a top surface of which extends above a top surface of the gate, depositing an insulating layer above the semiconductor device, and planarizing the insulating layer using the blocking region as a planarization stop. Embodiments further include semiconductor devices having a semiconductor substrate, a gate above the semiconductor substrate, a source/drain region adjacent to the gate, a gate cap above the gate that cover the full width of the gate, and a contact adjacent to the source/drain region having a portion of its sidewall defined by the gate cap. | 11-06-2014 |
| 20140332859 | Self-Aligned Wrapped-Around Structure - An embodiment vertical wrapped-around structure and method of making. An embodiment method of making a self-aligned vertical structure-all-around device including forming a spacer around an exposed portion of a semiconductor column projecting from a structure layer, forming a photoresist over a protected portion of the structure layer and a first portion of the spacer, etching away an unprotected portion of the structure layer disposed outside a periphery collectively defined by the spacer and the photoresist to form a structure having a footer portion and a non-footer portion, the non-footer portion and the footer portion collectively encircling the semiconductor column, and removing the photoresist and the spacer. | 11-13-2014 |
| 20140332860 | STACKED CARBON-BASED FETS - Methods and systems for forming stacked transistors. Such methods include forming a lower channel layer on a substrate; forming a pair of vertically aligned gate regions over the lower channel layer; forming a pair of vertically aligned source regions and a pair of vertically aligned drain regions on the lower channel material, each pair separated by an insulator; forming an upper channel material over the source regions, drain regions, and gate regions; and providing electrical access to the source, drain, and gate regions. | 11-13-2014 |
| 20140332861 | FIN STRUCTURE WITH VARYING ISOLATION THICKNESS - Semiconductor fins having isolation regions of different thicknesses on the same integrated circuit are disclosed. Nitride spacers protect the lower portion of some fins, while other fins do not have spacers on the lower portion. The exposed lower portion of the fins are oxidized to provide isolation regions of different thicknesses. | 11-13-2014 |
| 20140332862 | STACKED CARBON-BASED FETS - Stacked transistor devices include a lower channel layer formed on a substrate; a pair of vertically aligned source regions formed over the lower channel layer, where the pair of source regions are separated by an insulator; a pair of vertically aligned drain regions formed on the lower channel layer, where the pair of drain regions are separated by an insulator; a pair of vertically aligned gate regions formed on the lower gate dielectric layer; and an upper channel layer formed over the source regions, drain regions, and gate regions. | 11-13-2014 |
| 20140332863 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - Provided are a semiconductor device and a method of manufacturing the same. The method of manufacturing a semiconductor device includes forming an active fin on a substrate; oxidizing a portion of the active fin to form an insulating pattern between the active fin and the substrate; forming a first gate pattern on the substrate, wherein the first gate pattern crosses the active fin; exposing the substrate on both sides of the first gate pattern; and forming source/drain regions on the exposed substrate. | 11-13-2014 |
| 20140332864 | Method for Providing a Gate Metal Layer of a Transistor Device and Associated Transistor - A method includes providing a dummy gate structure on a substrate. The dummy gate structure includes a gate dielectric layer and a dummy gate electrode layer, and is laterally defined by inner sidewalls of a set of spacers. The method also includes laterally embedding the dummy gate structure, removing the dummy gate electrode, and providing a final gate electrode layer in between the inner sidewalls of the set of spacers. Providing the final gate electrode layer further includes providing a diffusion layer that extends on top of the gate dielectric layer, on inner sidewalls of the spacers, and on a portion of a front surface of embedding layers for the dummy gate structure. Providing the final gate electrode also includes providing a metal on top of the diffusion layer, applying an anneal step, and filling the area in between the inner sidewalls of the set of spacers with a final gate metal filling layer. The present disclosure also relates to an associated transistor. | 11-13-2014 |
| 20140332865 | SEMICONDUCTOR DEVICE - A semiconductor device includes a substrate having an edge, a semiconductor layer provided on a substrate, an electrode pad provided on the semiconductor layer, an inorganic insulating film having a first opening through which an upper surface of the electrode pad is exposed, and a resin film provided on the inorganic insulating film, the resin film having a second opening and a third opening separated from each other, where the upper surface of the electrode pad is exposed through the second opening, where the third opening is located between the second opening and the edge of the substrate, and where a bottom of the third opening is constituted by the resin film or the inorganic insulating film. | 11-13-2014 |
| 20140332866 | SEMICONDUCTOR DEVICE - A semiconductor device includes a header, a semiconductor chip fixed to the header constituting a MOSFET, and a sealing body of insulating resin which covers the semiconductor chip, the header and the like, and further includes a drain lead contiguously formed with the header and projects from one side surface of the sealing body, and a source lead and a gate lead which project in parallel from one side surface of the sealing body, and wires which are positioned in the inside of the sealing body and connect electrodes on an upper surface of the semiconductor chip and the source lead and the gate lead, with a gate electrode pad arranged at a position from the gate lead and the source lead farther than a source electrode pad. | 11-13-2014 |
| 20140332867 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - It is an object of the present invention to provide a method for preventing a breaking and poor contact, without increasing the number of steps, thereby forming an integrated circuit with high driving performance and reliability. The present invention applies a photo mask or a reticle each of which is provided with a diffraction grating pattern or with an auxiliary pattern formed of a semi-translucent film having a light intensity reducing function to a photolithography step for forming wires in an overlapping portion of wires. And a conductive film to serve as a lower wire of a two-layer structure is formed, and then, a resist pattern is formed so that a first layer of the lower wire and a second layer narrower than the first layer are formed for relieving a steep step. | 11-13-2014 |
| 20140339610 | FINFET DEVICE AND METHOD OF FABRICATION - Embodiments of the present invention provide a novel method and structure for forming finFET structures that comprise standard cells. An H-shaped cut mask is used to reduce the number of fins that need to be removed, hence increasing the fin efficiency. | 11-20-2014 |
| 20140339611 | STACKED SEMICONDUCTOR NANOWIRES WITH TUNNEL SPACERS - A structure is provided that includes at least one multilayered stacked semiconductor material structure located on a semiconductor substrate and at least one sacrificial gate material structure straddles a portion of the at least one multilayered stacked semiconductor structure. The at least one multilayered stacked semiconductor material structure includes alternating layers of sacrificial semiconductor material and semiconductor nanowire template material. End segments of each layer of sacrificial semiconductor material are then removed and filled with a dielectric spacer. Source/drain regions are formed from exposed sidewalls of each layer of semiconductor nanowire template material, and thereafter the at least one sacrificial gate material structure and remaining portions of the sacrificial semiconductor material are removed suspending each semiconductor material. A gate structure is formed within the areas previously occupied by the at least one sacrificial gate material structure and remaining portions of the sacrificial semiconductor material. | 11-20-2014 |
| 20140339612 | USING SACRIFICIAL OXIDE LAYER FOR GATE LENGTH TUNING AND RESULTING DEVICE - Methods for controlling the length of a replacement metal gate to a designed target gate length and the resulting device are disclosed. Embodiments may include removing a dummy gate from above a substrate forming a cavity, wherein side surfaces of the cavity are lined with an oxidized spacer layer and a bottom surface of the cavity is lined with a gate oxide layer, conformally forming a sacrificial oxide layer over the substrate and the cavity, and removing the sacrificial oxide layer from the bottom surface of the cavity and the substrate leaving sacrificial oxide spacers lining the side surfaces of the cavity. | 11-20-2014 |
| 20140339613 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - In one embodiment, a semiconductor device includes a semiconductor substrate, and a gate insulator arranged on the semiconductor substrate. The device further includes a gate electrode including a semiconductor layer and a metal layer which are sequentially arranged on the gate insulator. The device further includes a contact plug arranged on the gate electrode to penetrate the metal layer, and having a bottom surface at a level lower than an upper surface of the semiconductor layer. | 11-20-2014 |
| 20140346573 | SEMICONDUCTOR DEVICE INCLUDING EMBEDDED CRYSTALLINE BACK-GATE BIAS PLANES, RELATED DESIGN STRUCTURE AND METHOD OF FABRICATION - A method of forming a semiconductor device is disclosed. The method includes forming a first dielectric layer on a substrate; forming a set of bias lines on the first dielectric layer; covering the set of bias lines with a second dielectric layer; forming a semiconductor layer on the second dielectric layer; and forming a set of devices on the semiconductor layer above the set of bias lines. | 11-27-2014 |
| 20140346574 | ASYMMETRIC FINFET SEMICONDUCTOR DEVICES AND METHODS FOR FABRICATING THE SAME - Asymmetric FinFET devices and methods for fabricating such devices are provided. In one embodiment, a method includes providing a semiconductor substrate comprising a plurality of fin structures formed thereon and depositing a conformal liner over the fin structures. A first portion of the conformal liner is removed, leaving a first space between the fins structures and forming a first metal gate in the first space between the fin structures. A second portion of the conformal liner is removed, leaving a second space between the fin structures and forming a second metal gate in the second space between the fin structures. | 11-27-2014 |
| 20140346575 | SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT AND METHOD OF MANUFACTURING THE SAME - A semiconductor device with a self-aligned contact and a method of manufacturing the same, wherein the method comprises the step of forming a 1st dielectric layer on gate structures, form a self-aligned contact trench between two gate structures, forming an 2nd dielectric layer on the 1st dielectric layer and in the self-aligned contact trench; patterning the 2nd dielectric layer into a 1st portion on the 1st dielectric layer and a 2nd portion filling in the self-aligned contact trench, using the 2nd dielectric layer as a mask to etch the 1st dielectric layer, and forming a metal layer and a self-aligned contact simultaneously in the 1st dielectric layer and in the self-aligned contact trench. | 11-27-2014 |
| 20140346576 | MOSFETS WITH MULTIPLE DISLOCATION PLANES - A method includes forming a metal-oxide-semiconductor field-effect transistor (MOSFET). The Method includes performing an implantation to form a pre-amorphization implantation (PAI) region adjacent to a gate electrode of the MOSFET, forming a strained capping layer over the PAI region, and performing an annealing on the strained capping layer and the PAI region to form a dislocation plane. The dislocation plane is formed as a result of the annealing, with a tilt angle of the dislocation plane being smaller than about 65 degrees. | 11-27-2014 |
| 20140346577 | ELECTRONIC DEVICE WITH ASYMMETRIC GATE STRAIN - The use of strained gate electrodes in integrated circuits results in a transistor having improved carrier mobility, improved drive characteristics, and reduced source drain junction leakage. The gate electrode strain can be obtained through non symmetric placement of stress inducing structures as part of the gate electrode. | 11-27-2014 |
| 20140353728 | METHOD AND APPARATUS FOR A REDUCED CAPACITANCE MIDDLE-OF-THE-LINE (MOL) NITRIDE STACK - A method of capacitance reduction in a middle-of-the-line (MOL) nitride stack and a resulting device are disclosed. Embodiments include forming an oxide layer between one or more semiconductor devices on a wafer, the one or more semiconductor devices having source/drain junctions therebetween, forming a nitride layer over the one or more semiconductor devices and the oxide layer, forming a sacrificial oxide layer over the nitride layer, forming trenches through the oxide layer, the nitride layer, and the sacrificial oxide layer down to the source/drain junctions, forming a silicide in the trenches and on an upper surface of the sacrificial oxide layer, planarizing the silicide down to a point in the sacrificial oxide layer, and removing remaining sacrificial oxide to expose the nitride layer and a portion of the silicide protruding from an upper surface of the nitride layer. | 12-04-2014 |
| 20140353729 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the same are provided. The method comprises following steps. A gate material film is formed on a substrate in a first device region and a second device region. The gate material film in the first device region is patterned to form a first patterned gate. A first spacer material film containing a nitride material is formed on the first patterned gate in the first device region and the gate material film in the second device region. The first spacer material film and the gate material film are patterned in the second device region to form a second patterned gate. | 12-04-2014 |
| 20140353730 | LOW GATE-TO-DRAIN CAPACITANCE FULLY MERGED FINFET - A low gate-to-drain capacitance merged finFET and methods of manufacture are disclosed. The method includes forming a plurality of fins on a substrate. The method further includes forming at least one dummy gate structure intersecting the plurality of fins. The method further includes forming a gap between sidewalls of the fins and an insulator material, which exposes portions of the substrate. The method further includes merging the fins together with semiconductor material formed within the gaps and over the insulator material. | 12-04-2014 |
| 20140353731 | Tuning Strain in Semiconductor Devices - A Fin Field-Effect Transistor (FinFET) includes a semiconductor layer over a substrate, wherein the semiconductor layer forms a channel of the FinFET. A first silicon germanium oxide layer is over the substrate, wherein the first silicon germanium oxide layer has a first germanium percentage. A second silicon germanium oxide layer is over the first silicon germanium oxide layer. The second silicon germanium oxide layer has a second germanium percentage greater than the first germanium percentage. A gate dielectric is on sidewalls and a top surface of the semiconductor layer. A gate electrode is over the gate dielectric. | 12-04-2014 |
| 20140353732 | HALO REGION FORMATION BY EPITAXIAL GROWTH - A semiconductor device and method for manufacturing the same, wherein the method includes fabrication of field effect transistors (FET). The method includes growing a doped epitaxial halo region in a plurality of sigma-shaped source and drain recesses within a semiconductor substrate. An epitaxial stressor material is grown within the sigma-shaped source and drain recesses surrounded by the doped epitaxial halo forming source and drain regions with controlled current depletion towards the channel region to improve device performance. Selective growth of epitaxial regions allows for control of dopants profile and hence tailored and enhanced carrier mobility within the device. | 12-04-2014 |
| 20140353733 | PROTECTION OF THE GATE STACK ENCAPSULATION - Semiconductor device structures at advanced technologies are provided, wherein a reliable encapsulation of a gate dielectric is already formed during very early stages of fabrication. In illustrative embodiments, a gate stack is formed over a surface of a semiconductor substrate and a sidewall spacer is formed adjacent to the gate stack for covering sidewall surfaces of the gate stack. An additional thin layer is formed over the sidewall spacer, the gate stack and the surface of the semiconductor substrate, and thereafter source/drain extension regions are implanted through the additional thin layer into the substrate in alignment with the sidewall spacer. | 12-04-2014 |
| 20140353734 | SEMICONDUCTOR DEVICES AND METHODS OF FABRICATION WITH REDUCED GATE AND CONTACT RESISTANCES - Semiconductor structures with reduced gate and/or contact resistances and fabrication methods are provided. The method includes: providing a semiconductor device, which includes forming a transistor of the semiconductor device, where the transistor forming includes: forming a T-shaped gate for the transistor, the T-shaped gate being T-shaped in elevational cross-section; and forming an inverted-T-shaped contact to an active region of the transistor, the inverted-T-shaped contact including a conductive structure with an inverted T-shape in elevational cross-section. | 12-04-2014 |
| 20140353735 | LOCALIZED FIN WIDTH SCALING USING A HYDROGEN ANNEAL - Transistors and methods for fabricating the same include forming one or more semiconductor fins on a substrate; covering source and drain regions of the one or more semiconductor fins with a protective layer; annealing uncovered channel portions of the one or more semiconductor fins in a gaseous environment to reduce fin width and round corners of the one or more semiconductor fins; and forming a dielectric layer and gate over the thinned fins. | 12-04-2014 |
| 20140353736 | FIELD-EFFECT TRANSISTOR - A field-effect transistor includes a plurality of unit elements, an insulating film, and a wiring. The plurality of unit elements include a semiconductor layer having a first surface, a plurality of drain electrodes, gate electrodes, and a source electrode. The source electrode is electrically continuously provided across the plurality of unit elements outside the gate electrodes on the first surface and has narrow parts between the gate electrodes which are spaced apart from each other and which belong to adjacent unit elements among the plurality of unit elements. The narrow parts have a width narrower than a width of other parts of the source electrode. The insulating film has openings provided on the source electrode. The insulating film covers the source electrode across the plurality of unit elements. The openings are arranged at the other parts of the source electrode on both sides of each of the narrow parts. | 12-04-2014 |
| 20140361351 | GATE ELECTRODE WITH STABILIZED METAL SEMICONDUCTOR ALLOY-SEMICONDUCTOR STACK - A gate structure is provided on a channel portion of a semiconductor substrate. The gate structure may include an electrically conducting layer present on a gate dielectric layer, a semiconductor-containing layer present on the electrically conducting layer, a metal semiconductor alloy layer present on the semiconductor-containing layer, and a dielectric capping layer overlaying the metal semiconductor alloy layer. In some embodiments, carbon and/or nitrogen can be present within the semiconductor-containing layer, the metal semiconductor alloy layer or both the semiconductor-containing layer and the metal semiconductor alloy layer. The presence of carbon and/or nitrogen within the semiconductor-containing layer and/or the metal semiconductor alloy layer provides stability to the gate structure. In another embodiment, a layer of carbon and/or nitrogen can be formed between the semiconductor-containing layer and the metal semiconductor alloy layer. | 12-11-2014 |
| 20140361352 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - A method for fabricating a semiconductor device is provided herein and includes the following steps. First, a first interlayer dielectric is formed on a substrate. Then, a gate electrode is formed on the substrate, wherein a periphery of the gate electrode is surrounded by the first interlayer dielectric. Afterwards, a patterned mask layer is formed on the gate electrode, wherein a bottom surface of the patterned mask layer is leveled with a top surface of the first interlayer dielectric. A second interlayer dielectric is then formed to cover a top surface and each side surface of the patterned mask layer. Finally, a self-aligned contact structure is formed in the first interlayer dielectric and the second interlayer dielectric. | 12-11-2014 |
| 20140361353 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present application discloses a method for manufacturing a semiconductor device, comprising: forming a T-shape dummy gate structure on the substrate; removing the T-shape dummy gate structure and retaining a T-shape gate trench; filling successively a gate insulation layer and a metal layer in the T-shape gate trench, wherein the metal layer forms the T-shape metal gate structure. According to the semiconductor device manufacturing method disclosed in the present application, the overhang phenomenon and the formation of voids are avoided in the subsequent metal gate filling process by forming a T-shape dummy gate and a T-shape gate trench, and the device performance is improved. | 12-11-2014 |
| 20140361354 | Embedded Transistor - An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric. | 12-11-2014 |
| 20140367751 | FINFET SPACER ETCH FOR eSiGe IMPROVEMENT - A method for etching FinFET spacers by inserting a Si recess step directly after the traditional spacer ME step and the resulting device are provided. Embodiments include forming a gate on a substrate having a silicon fin, the gate having a nitride cap on an upper surface thereof and an oxide cap on an upper surface of the nitride cap; forming a dielectric layer over the silicon fin and the gate; removing the dielectric layer from an upper surface of the oxide cap and an upper surface of the silicon fin; recessing the silicon fin; and removing the dielectric layer from side surfaces of the silicon fin and the remaining silicon fin. | 12-18-2014 |
| 20140367752 | TRANSISTOR HAVING ALL-AROUND SOURCE/DRAIN METAL CONTACT CHANNEL STRESSOR AND METHOD TO FABRICATE SAME - An intermediate transistor structure includes a fin structure disposed on a surface of an insulating layer. The fin structure has a gate structure disposed thereon between first and second ends of the fin structure. A first portion of the fin structure is a first doped portion that is disposed over a first recess in the surface of the insulating layer and a second portion of the fin structure is a second doped portion disposed over a second recess in the surface of the insulating layer. The intermediate transistor structure further includes source and drain metal disposed around the first and second doped portions, each inducing one of compression strain or tensile strain in a portion of the fin structure that is disposed within the gate structure and that functions during operation of the transistor as a channel of the transistor. | 12-18-2014 |
| 20140367753 | CMOS DEVICE WITH DOUBLE-SIDED TERMINALS AND METHOD OF MAKING THE SAME - A transistor device includes a semiconductor substrate having a first surface and a second surface opposite the first surface, a gate structure disposed on the first surface and configured to form a channel region, and source and drain regions disposed on opposite sides of the channel region. The device also includes a source terminal and a drain terminal disposed on the second surface. The source and drain terminals are connected to the respective source and drain regions. The transistor device further include a body terminal disposed. on the second. surface and configured to connect the highest or lowest voltage supply to the semiconductor substrate. | 12-18-2014 |
| 20140367754 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device includes, forming, on a substrate, an element isolation insulating film which includes a protruding portion protruding above a level of a surface of the substrate, forming a first film on the substrate and on the element isolation insulating film, polishing the first film to expose the protruding portion, forming a first resist pattern which straddles the first film and the protruding portion after polishing the first film, patterning the first film using the first resist pattern as a mask to form a first pattern, and forming a sidewall film at side surfaces of the first pattern. | 12-18-2014 |
| 20140374805 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF - A manufacturing method for a semiconductor device first provides a substrate having at least a first transistor formed thereon. The first transistor includes a first conductivity type. The first transistor further includes a first metal gate and a protecting layer covering sidewalls of the first metal gate. A portion of the first metal gate is removed to form a first recess and followed by removing a portion of the protecting layer to form a second recess. Then, an etch stop layer is formed in the second recess. | 12-25-2014 |
| 20140374806 | FOUR TERMINAL TRANSISTOR - A transistor includes a substrate, a first electrically conductive material layer positioned on the substrate, and a first electrically insulating material layer is positioned on the first electrically conductive material layer. A gate includes a second electrically conductive material and a reentrant profile in which a first portion of the gate is sized and positioned to extend beyond a second portion of the gate. A second electrically insulating material layer conforms to the reentrant profile of the gate and in positioned on at least a portion of the first electrically insulating material layer. A semiconductor material layer conforms to and is in contact with the second electrically insulating material layer. | 12-25-2014 |
| 20140374807 | METHOD OF DEVICE ISOLATION IN CLADDING Si THROUGH IN SITU DOPING - Aspects of the present invention relate to an approach for forming an integrated circuit having a set of fins on a silicon substrate, with the set of fins being formed according to a predetermined pattern. In situ doping of the fins with an N-type dopant prior to deposition of an epitaxial layer minimizes punch through leakage whilst an epitaxial depositional process applies a cladding layer on the doped fins, the deposition resulting in a multigate device having improved device isolation. | 12-25-2014 |
| 20150008488 | UNIFORM HEIGHT REPLACEMENT METAL GATE - A method of manufacturing a semiconductor structure includes forming a raised source-drain region in a semiconductor substrate adjacent to a dummy gate and forming a chemical mechanical polish (CMP) stop layer over the gate structure and above a top surface of the semiconductor substrate. A first ILD layer is formed above the CMP stop layer. The first ILD layer is removed to a portion of the CMP stop layer located above the gate structure and a portion of the CMP stop layer located above the gate structure is also removed to expose the dummy gate. The dummy gate is replaced with a metal gate and the metal gate is polished until the CMP stop layer located above the raised source-drain region is reached. | 01-08-2015 |
| 20150008489 | FIN-TYPE FIELD EFFECT TRANSISTOR AND METHOD OF FABRICATING THE SAME - A fin-type field effect transistor includes a first fin including a first source, a first drain, and a first channel. The fin-type field effect transistor includes a second fin including a second source, a second drain, and a second channel. The fin-type field effect transistor includes a first semiconductor region under the first fin and a second semiconductor region under the second fin. A first reacted region is adjacent the first semiconductor region while a second reacted region is adjacent the second semiconductor region. The first reacted region has a first dimension causing a first strain in the first channel. The second reacted region has a second dimension causing a second strain in the second channel. The first strain and second strain are substantially equal to one another. A method of fabricating an example fin-type field effect transistor is provided. | 01-08-2015 |
| 20150008490 | Fluctuation Resistant FinFET - This improved, fluctuation resistant FinFET, with a doped core and lightly doped epitaxial channel region between that core and the gate structure, is confined to the active-gate span because it is based on a channel structure having a limited extent. The improved structure is capable of reducing FinFET random doping fluctuations when doping is used to control threshold voltage, and the channel structure reduces fluctuations attributable to doping-related variations in effective channel length. Further, the transistor design affords better source and drain conductance when compared to prior art FinFETs. Two representative embodiments of the key structure are described in detail. | 01-08-2015 |
| 20150008491 | Metal Gate Structure - A device comprises a metal gate structure in a trench and over a substrate, wherein the gate structure comprises a first metal sidewall in the trench, wherein the first metal sidewall becomes progressively thinner towards an upper portion of the first metal sidewall, a second metal sidewall in the trench, wherein the second metal sidewall becomes progressively thinner towards an upper portion of the second metal sidewall and a metal bottom layer on a bottom of the trench and between the first metal sidewall and the second metal sidewall. | 01-08-2015 |
| 20150008492 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - According to one embodiment, a semiconductor device of a junctionless structure includes a semiconductor layer of a first conductivity type. A pair of source/drain electrodes at a distance is on the semiconductor layer. A gate insulating film is on the semiconductor layer between the source/drain electrodes. A gate electrode is on the gate insulating film. The semiconductor layer has two or more kinds of impurities. One kind of the two or more kinds of impurities is an element selected from a group of chalcogens, and another kind of the two or more kinds of impurities is a first conductivity type impurity. | 01-08-2015 |
| 20150021670 | Charge Compensation Semiconductor Devices - A field-effect semiconductor device includes a semiconductor body having a first surface and an edge, an active area, and a peripheral area between the active area and the edge, a source metallization on the first surface and a drain metallization. In the active area, first conductivity type drift portions alternate with second conductivity type compensation regions. The drift portions contact the drain metallization and have a first maximum doping concentration. The compensation regions are in Ohmic contact with the source metallization. The peripheral area includes a first edge termination region and a second semiconductor region in Ohmic contact with the drift portions having a second maximum doping of the first conductivity type which lower than the first maximum doping concentration by a factor of ten. The first edge termination region of the second conductivity type adjoins the second semiconductor region and is in Ohmic contact with the source metallization. | 01-22-2015 |
| 20150021671 | FIELD-EFFECT TRANSISTOR AND METHOD OF MANUFACTURING THEREOF - According to this GaN-based HFET, resistivity ρ of a semi-insulating film forming a gate insulating film is 3.9×10 | 01-22-2015 |
| 20150021672 | CONTACT FOR HIGH-K METAL GATE DEVICE - An integrated circuit having an improved gate contact and a method of making the circuit are provided. In an exemplary embodiment, the method includes receiving a substrate. The substrate includes a gate stack disposed on the substrate and an interlayer dielectric disposed on the gate stack. The interlayer dielectric is first etched to expose a portion of the gate electrode, and then the exposed portion of the gate electrode is etched to form a cavity. The cavity is shaped such that a portion of the gate electrode overhangs the electrode. A conductive material is deposited within the cavity and in electrical contact with the gate electrode. In some such embodiments, the etching of the gate electrode forms a curvilinear surface of the gate electrode that defines the cavity. | 01-22-2015 |
| 20150021673 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a substrate that has a surface. The semiconductor further includes a fin disposed on the surface and including a semiconductor member. The semiconductor further includes a spacer disposed on the surface, having a type of stress, and overlapping the semiconductor member in a direction parallel to the surface. A thickness of the spacer in a direction perpendicular to the surface is less than a height of the semiconductor member in the direction perpendicular to the surface. | 01-22-2015 |
| 20150028397 | ZRAM HETEROCHANNEL MEMORY - Approaches for zero capacitance memory cells are provided. A method of manufacturing a semiconductor structure includes forming a channel region by doping a first material with a first type of impurity. The method includes forming source/drain regions by doping a second material with a second type of impurity different than the first type of impurity, wherein the second material has a smaller bandgap than the first material. The method includes forming lightly doped regions between the channel region and the source/drain regions, wherein the lightly doped regions include the second material. The method includes forming a gate over the channel region, wherein the second material extends under edges of the gate. | 01-29-2015 |
| 20150028398 | DIELECTRIC FILLER FINS FOR PLANAR TOPOGRAPHY IN GATE LEVEL - An array of stacks containing a semiconductor fins and an oxygen-impermeable cap is formed on a semiconductor substrate with a substantially uniform areal density. Oxygen-impermeable spacers are formed around each stack, and the semiconductor substrate is etched to vertically extend trenches. Semiconductor sidewalls are physically exposed from underneath the oxygen-impermeable spacers. The oxygen-impermeable spacers are removed in regions in which semiconductor fins are not needed. A dielectric oxide material is deposited to fill the trenches. Oxidation is performed to convert a top portion of the semiconductor substrate and semiconductor fins not protected by oxygen-impermeable spacers into dielectric material portions. Upon removal of the oxygen-impermeable caps and remaining oxygen-impermeable spacers, an array including semiconductor fins and dielectric fins is provided. The dielectric fins alleviate variations in the local density of protruding structures, thereby reducing topographical variations in the height of gate level structures to be subsequently formed. | 01-29-2015 |
| 20150028399 | Semiconductor Devices and Methods of Manufacturing the Same - Provided are semiconductor devices and methods of manufacturing the same. The methods include providing a substrate including a first region and a second region, forming first mask patterns in the first region, and forming second mask patterns having an etch selectivity with respect to the first mask patterns in the second region. The first mask patterns and the second mask patterns are formed at the same time. | 01-29-2015 |
| 20150028400 | SEMICONDUCTOR DEVICE - A semiconductor device includes a gate electrode GE electrically connected to a gate portion which is made of a polysilicon film provided in the inside of a plurality of grooves formed in a striped form along the direction of T of a chip region CA wherein the gate electrode GE is formed as a film at the same layer level as a source electrode SE electrically connected to a source region formed between adjacent stripe-shaped grooves and the gate electrode GE is constituted of a gate electrode portion G1 formed along a periphery of the chip region CA and a gate finger portion G2 arranged so that the chip region CA is divided into halves along the direction of X. The source electrode SE is constituted of an upper portion and a lower portion, both relative to the gate finger portion G2, and the gate electrode GE and the source electrode SE are connected to a lead frame via a bump electrode. | 01-29-2015 |
| 20150035016 | NITRIDE SPACER FOR PROTECTING A FIN-SHAPED FIELD EFFECT TRANSISTOR (FINFET) DEVICE - Approaches for protecting a semiconductor device (e.g., a fin field effect transistor device (FinFET)) using a nitride spacer are provided. Specifically, a nitride spacer is formed over an oxide and a set of fins of the FinFET device to mitigate damage during subsequent processing. The nitride spacer is deposited before the block layers to protect the oxide on top of a set of gates in an open area of the FinFET device uncovered by a photoresist. The oxide on top of each gate will be preserved throughout all of the block layers to provide hardmask protection during subsequent source/drain epitaxial layering. Furthermore, the fins that are open and uncovered by the photoresist or the set of gates remain protected by the nitride spacer. Accordingly, fin erosion caused by amorphization of the fins exposed to resist strip processes is prevented, resulting in improved device yield. | 02-05-2015 |
| 20150035017 | Contact Structure of Semiconductor Device - The disclosure relates to a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface; a fin structure extending upward from the substrate major surface, wherein the fin structure comprises a first fin, a second fin, and a third fin between the first fin and second fin; a first germanide over the first fin, wherein a first bottom surface of the first germanide has a first acute angle to the major surface; a second germanide over the second fin on a side of the third fin opposite to first germanide substantially mirror-symmetrical to each other; and a third germanide over the third fin, wherein a third bottom surface of the third germanide has a third acute angle to the major surface less than the first acute angle. | 02-05-2015 |
| 20150035018 | DEVICES AND METHODS OF FORMING BULK FINFETS WITH LATERAL SEG FOR SOURCE AND DRAIN ON DIELECTRICS - Devices and methods for forming semiconductor devices with FinFETs are provided. One intermediate semiconductor device includes, for instance: a substrate with at least one fin with at least one channel; at least one gate over the channel; at least one hard-mask over the gate; and at least one spacer disposed over the gate and hard-mask. One method includes, for instance: obtaining an intermediate semiconductor device; forming at least one recess into the substrate, the recess including a bottom and at least one sidewall exposing a portion of the at least one fin; depositing a dielectric layer into the at least one recess; removing at least a portion of the dielectric layer to form a barrier dielectric layer; and performing selective epitaxial growth in the at least one recess over the barrier dielectric layer. | 02-05-2015 |
| 20150035019 | METHOD OF FORMING FINS FROM DIFFERENT MATERIALS ON A SUBSTRATE - A method of forming fins of different materials includes providing a substrate with a layer of a first material having a top surface, masking a first portion of the substrate leaving a second portion of the substrate exposed, etching a first opening at the second portion, forming a body of a second material in the opening to a level of the top surface of the layer of the first material, removing the mask, and forming fins of the first material at the first portion and forming fins of the second material at the second portion. A finFET device having fins formed of at least two different materials is also disclosed. | 02-05-2015 |
| 20150035020 | Systems and Methods for Fabricating Semiconductor Devices at Different Levels - Systems and methods are provided for fabricating semiconductor device structures on a substrate. For example, a substrate including a first region and a second region is provided. One or more first semiconductor device structures are formed on the first region. One or more semiconductor fins are formed on the second region. One or more second semiconductor device structures are formed on the semiconductor fins. A top surface of the semiconductor fins is higher than a top surface of the first semiconductor device structures. | 02-05-2015 |
| 20150035021 | MISFET Device and Method of Forming the Same - Embodiments of the present disclosure include a method for forming a semiconductor device, a method for forming a MISFET device, and a MISFET device. An embodiment is a method for forming a semiconductor device, the method including forming a source/drain over a substrate, forming a first etch stop layer on the source/drain, and forming a gate dielectric layer on the first etch stop layer and along the substrate. The method further includes forming a gate electrode on the gate dielectric layer, forming a second etch stop layer on the gate electrode, and removing the gate dielectric layer from over the source/drain. | 02-05-2015 |
| 20150035022 | SEMICONDUCTOR DEVICE HAVING PASSING GATE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes passing gates. In the semiconductor device, a passing gate formed in a device isolation film is vertically positioned at a deeper and lower level than an operation gate formed in an active region defined by the device isolation film such that the passing gate does not overlap with a junction region. A step difference is formed in a storage node junction region, and thus a contact area between a storage node contact and the storage node junction region is increased, resulting in the improvement of operational characteristics of the semiconductor device. | 02-05-2015 |
| 20150035023 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device may include first and second fins formed side by side on a substrate, a first elevated doped region formed on the first fin and having a first doping concentration of impurities, a second elevated doped region formed on the second fin, and a first bridge connecting the first elevated doped region and the second elevated doped region to each other. Methods of manufacturing such a semiconductor device are also disclosed. | 02-05-2015 |
| 20150035024 | TRANSISTOR AND METHOD OF MANUFACTURING THE SAME - A transistor includes a substrate, a gate structure and impurity regions. The substrate is divided into a field region and an active region by an isolation layer pattern. The field region has the isolation layer pattern thereon, and the active region has no isolation layer pattern thereon. The gate structure includes a central portion and an edge portion. The central portion is on a middle portion of the active region along a first direction and has a first width in a second direction substantially perpendicular to the first direction. The edge portion is on at least one end portion of the active region in the first direction and connected to the central portion and has a second width smaller than the first width in the second direction. The impurity regions are at upper portions of the active region adjacent to both end portions of the gate structure in the second direction. | 02-05-2015 |
| 20150035025 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICES INCLUDING GATES HAVING CONNECTION LINES THEREON - Provided are semiconductor integrated circuit (IC) devices including gate patterns having a step difference therebetween and a connection line interposed between the gate patterns. The semiconductor IC device includes a semiconductor substrate including a peripheral active region, a cell active region, and a device isolation layer. Cell gate patterns are disposed on the cell active region and the device isolation layer. A peripheral gate pattern is disposed on the peripheral active region. A cell electrical node is disposed on the cell active region adjacent to the cell gate patterns. Peripheral electrical nodes are disposed on the peripheral active region adjacent to the peripheral gate pattern. Connection lines are disposed on the cell gate patterns disposed on the device isolation layer. The connection lines are connected between the cell gate patterns and the peripheral gate pattern. | 02-05-2015 |
| 20150035026 | MIDDLE-OF-LINE BORDERLESS CONTACT STRUCTURE AND METHOD OF FORMING - Various embodiments disclosed include semiconductor structures and methods of forming such structures. In one embodiment, a method includes: providing a semiconductor structure including: a substrate; at least one gate structure overlying the substrate; and an interlayer dielectric overlying the substrate and the at least one gate structure; removing the ILD overlying the substrate to expose the substrate; forming a silicide layer over the substrate; forming a conductor over the silicide layer and the at least one gate structure; forming an opening in the conductor to expose a portion of a gate region of the at least one gate structure; and forming a dielectric in the opening in the conductor. | 02-05-2015 |
| 20150041867 | FIN FIELD EFFECT TRANSISTOR AND METHOD FOR FORMING THE SAME - Various embodiments provide FinFETs and methods for forming the same. In an exemplary method, a semiconductor substrate having sacrificial layers formed thereon is provided. First sidewall spacers and second sidewall spacers are sequentially formed on both sides of each sacrificial layer. The sacrificial layers can be removed. A first width is measured as a distance between adjacent first sidewall spacers, and a second width is measured as a distance between adjacent second sidewall spacers. When the first width is not equal to the second width, the first sidewall spacers or the second sidewall spacers are correspondingly etched such that the first width is equal to the second width. The semiconductor substrate is etched using the first sidewall spacers and the second sidewall spacers as an etch mask, to form fins, such that a top of each fin has a symmetrical morphology. | 02-12-2015 |
| 20150041868 | SELF ALIGNED CONTACT WITH IMPROVED ROBUSTNESS - A semiconductor device is provided that includes a gate structure that is present on a channel portion of a semiconductor substrate that is present between a source region and a drain region. The gate structure includes at least a gate conductor and a gate sidewall spacer that is adjacent to the at least one gate conductor. An upper surface of the gate conductor is recessed relative to an upper surface of the gate sidewall spacer. A multi-layered cap is present on the upper surface of the gate conductor. The multi-layered cap includes a high-k dielectric material and a dielectric cap spacer that is present on a portion of the high-k dielectric material that is present on the sidewall of the gate sidewall spacer. | 02-12-2015 |
| 20150041869 | METHODS OF FORMING A SEMICONDUCTOR DEVICE WITH A PROTECTED GATE CAP LAYER AND THE RESULTING DEVICE - One method disclosed herein includes forming first and second gate cap protection layers that encapsulate and protect a gate cap layer. A novel transistor device disclosed herein includes a gate structure positioned above a semiconductor substrate, a spacer structure positioned adjacent the gate structure, a layer of insulating material positioned above the substrate and around the spacer structure, a gate cap layer positioned above the gate structure and the spacer structure, and a gate cap protection material that encapsulates the gate cap layer, wherein portions of the gate cap protection material are positioned between the gate cap layer and the gate structure, the spacer structure and the layer of insulating material. | 02-12-2015 |
| 20150048428 | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING SOURCE/DRAIN EPITAXIAL OVERGROWTH FOR FORMING SELF-ALIGNED CONTACTS WITHOUT SPACER LOSS AND A SEMICONDUCTOR DEVICE FORMED BY SAME - A method for manufacturing a semiconductor device comprises growing a source/drain epitaxy region over a plurality of gates on a substrate, wherein a top surface of the source/drain epitaxy region is at a height above a top surface of each of the plurality of gates, forming at least one opening in the source/drain epitaxy region over a top surface of at least one gate, forming a silicide layer on the source/drain epitaxy region, wherein the silicide layer lines lateral sides of the at least one opening, depositing a dielectric layer on the silicide layer, wherein the dielectric layer is deposited in the at least one opening between the silicide layer on lateral sides of the at least one opening, etching the dielectric layer to form a contact area, and depositing a conductor in the contact area. | 02-19-2015 |
| 20150048429 | SIDEWALL IMAGE TRANSFER WITH A SPIN-ON HARDMASK - Semiconductor devices and sidewall image transfer methods with a spin on hardmask. Methods for forming fins include forming a trench through a stack of layers that includes a top and bottom insulator layer, and a layer to be patterned on a substrate; isotropically etching the top and bottom insulator layers; forming a hardmask material in the trench to the level of the bottom insulator layer; isotropically etching the top insulator layer; and etching the bottom insulator layer and the layer to be patterned down to the substrate to form fins from the layer to be patterned. | 02-19-2015 |
| 20150048430 | SIDEWALL IMAGE TRANSFER WITH A SPIN-ON HARDMASK - Semiconductor devices include a first and a second set of parallel fins, each set of fins having a same number of fins and a pitch between adjacent fins below a minimum pitch of an associated lithography process, where a spacing between the first and second set of fins is greater than the pitch between adjacent fins; a gate structure over the first and second sets of fins; a merged source region that connects the first and second sets of fins on a first side of the gate structure; and a merged drain region that connects the first and second sets of fins on a second side of the gate structure. | 02-19-2015 |
| 20150048431 | METHOD FOR FORMING A CONTACT ON A SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR DEVICE - A method for forming a contact on a semiconductor substrate includes: applying a metal to an exposed partial area of an outer side of the semiconductor substrate and/or of a layer applied to the semiconductor substrate, the partial area being surrounded by at least one edge region of an insulating layer, and the at least one edge region of the insulating layer being at least partially covered by the metal; heating the semiconductor substrate, whereby the metal which is applied to the exposed partial area reacts with at least one semiconductor material of the partial area to form a semiconductor-metal material as the end material or a further processing material of the at least one contact; and etching using an etching material having a higher etching rate for the metal than for the semiconductor-metal material. | 02-19-2015 |
| 20150054039 | FinFet Device with Channel Epitaxial Region - The present disclosure relates to a Fin field effect transistor (FinFET) device having epitaxial enhancement structures, and an associated method of fabrication. In some embodiments, the FinFET device has a semiconductor substrate having a plurality of isolation regions overlying the semiconductor substrate. A plurality of three-dimensional fins protrude from a top surface of the semiconductor substrate at locations between the plurality of isolation regions. Respective three-dimensional fins have an epitaxial enhancement structure that introduces a strain into the three-dimensional fin. The epitaxial enhancement structures are disposed over a semiconductor material within the three-dimensional fin at a position that is more than 10 nanometers above a bottom of an adjacent isolation region. Forming the epitaxial enhancement structure at such a position provides for sufficient structural support to avoid isolation region collapse. | 02-26-2015 |
| 20150054040 | FINFETS WITH STRAINED WELL REGIONS - A device includes a substrate, insulation regions extending into the substrate, a first semiconductor region between the insulation regions and having a first valence band, and a second semiconductor region over and adjoining the first semiconductor region. The second semiconductor region has a compressive strain and a second valence band higher than the first valence band. The second semiconductor region includes an upper portion higher than top surfaces of the insulation regions to form a semiconductor fin, and a lower portion lower than the top surfaces of the insulation regions. The upper portion and the lower portion are intrinsic. A semiconductor cap adjoins a top surface and sidewalls of the semiconductor fin. The semiconductor cap has a third valence band lower than the second valence band. | 02-26-2015 |
| 20150060958 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - A semiconductor device and a manufacturing method of the same are provided. The semiconductor device includes a substrate and a stacked structure vertically formed on the substrate. The stacked structure includes a plurality of conductive layers and a plurality of insulating layers, and the conductive layers and the insulating layers are interlaced. At least one of the conductive layers has a first doping segment having a first doping property and a second doping segment having a second doping property, the second doping property being different from the first doping property. The interface between the first doping segment and the second doping segment has a grain boundary. | 03-05-2015 |
| 20150060959 | Eliminating Fin Mismatch Using Isolation Last - An embodiment fin field-effect transistor (FinFET) includes an inner fin, and outer fin spaced apart from the inner fin by a shallow trench isolation (STI) region, an isolation fin spaced apart from the outer fin by the STI region, the isolation fin including a body portion, an isolation oxide, and an etch stop layer, the etch stop layer interposed between the body portion and the isolation oxide and between the STI region and the isolation oxide, and a gate formed over the inner fin, the outer fin, and the isolation fin. | 03-05-2015 |
| 20150060960 | METHODS OF FORMING CONTACT STRUCTURES ON FINFET SEMICONDUCTOR DEVICES AND THE RESULTING DEVICES - A method includes forming a raised isolation structure with a recess above a substrate, forming a gate structure above the fin, forming a plurality of spaced-apart buried fin contact structures within the recess that have an outer perimeter surface that contacts at least a portion of an interior perimeter surface of the recess and forming at least one source/drain contact structure for each of the buried fin contact structures. One device includes a plurality of spaced-apart buried fin contact structures positioned within a recess in a raised isolation structure on opposite sides of a gate structure. The upper surface of each of the buried fin contact structures is positioned below an upper surface of the raised isolation structure and an outer perimeter surface of each of the buried fin contact structures contacts at least a portion of an interior perimeter surface of the recess. | 03-05-2015 |
| 20150060961 | FINFET DEVICE AND METHOD OF FORMING FIN IN THE SAME - A method for manufacturing a fin for a FinFET device includes providing a semiconductor substrate, forming a plurality of implanted regions in the semiconductor substrate, and epitaxially forming fins between two adjacent implanted regions. The method also includes forming an insulating structure between two adjacent fins. | 03-05-2015 |
| 20150069473 | TRANSISTOR FABRICATION TECHNIQUE INCLUDING SACRIFICIAL PROTECTIVE LAYER FOR SOURCE/DRAIN AT CONTACT LOCATION - Techniques are disclosed for transistor fabrication including a sacrificial protective layer for source/drain (S/D) regions to minimize contact resistance. The sacrificial protective layer may be selectively deposited on S/D regions after such regions have been formed, but prior to the deposition of an insulator layer on the S/D regions. Subsequently, after contact trench etch is performed, an additional etch process may be performed to remove the sacrificial protective layer and expose a clean S/D surface. Thus, the sacrificial protective layer can protect the contact locations of the S/D regions from contamination (e.g., oxidation or nitridation) caused by insulator layer deposition. The sacrificial protective layer can also protect the S/D regions from undesired insulator material remaining on the S/D contact surface, particularly for non-planar transistor structures (e.g., finned or nanowire/nanoribbon transistor structures). | 03-12-2015 |
| 20150069474 | Isolation Structure of Fin Field Effect Transistor - The disclosure relates to a fin field effect transistor (FinFET). An exemplary FinFET comprises a substrate comprising a major surface; a fin structure protruding from the major surface comprising a lower portion comprising a first semiconductor material having a first lattice constant; an upper portion comprising the first semiconductor material, wherein a bottom portion of the upper portion comprises a dopant with a first peak concentration; a middle portion between the lower portion and upper portion, wherein the middle portion comprises a second semiconductor material having a second lattice constant different from the first lattice constant; and an isolation structure surrounding the fin structure, wherein a portion of the isolation structure adjacent to the bottom portion of the upper portion comprises the dopant with a second peak concentration equal to or greater than the first peak concentration. | 03-12-2015 |
| 20150069475 | SEMICONDUCTOR DEVICE WITH REDUCED ELECTRICAL RESISTANCE AND CAPACITANCE - A semiconductor device includes a first type region including a first conductivity type. The semiconductor device includes a second type region including a second conductivity type. The semiconductor device includes a channel region extending between the first type region and the second type region. The channel region is separated a first distance from a first portion of the first type region. The semiconductor device includes a gate region surrounding the channel region. A first portion of the gate region is separated a second distance from the first portion of the first type region. The second distance is greater than the first distance. | 03-12-2015 |
| 20150076569 | SEMICONDUCTOR DEVICE - A semiconductor device is provided. The semiconductor device includes an active fin region, at least a gate strip, and a dummy fin region. The active fin region comprises at least an active fin. The gate strip is formed on the active fin region and extending across the active fin. The dummy fin region, comprising a plurality of dummy fins, is formed on two sides of the active fin region, and the dummy fins are formed on two sides of the gate strip. | 03-19-2015 |
| 20150076570 | Semiconductor Module and Method for Manufacturing the Same - There is provided a semiconductor module and a method for manufacturing the same which make it possible to joint the electrode of the bare-chip transistor and the wiring pattern on the substrate by solder mounting operation, in the same process of solder mounting operation for mounting the bare-chip transistor or other surface mounting devices on the wiring patterns on the substrate. A semiconductor module includes: a plurality of wiring patterns formed on an insulating layer; a bare-chip transistor mounted on one wiring pattern out of the plurality of wiring patterns via a solder; and a copper connector constituted of a copper plate for jointing an electrode formed on a top surface of the bare-chip transistor and another wiring pattern out of the plurality of wiring patterns via a solder. | 03-19-2015 |
| 20150076571 | METHOD OF FABRICATING METAL-INSULATOR-SEMICONDUCTOR TUNNELING CONTACTS USING CONFORMAL DEPOSITION AND THERMAL GROWTH PROCESSES - A contact to a source or drain region. The contact has a conductive material, but that conductive material is separated from the source or drain region by an insulator. | 03-19-2015 |
| 20150084101 | MULTI-FIN FINFETS WITH MERGED-FIN SOURCE/DRAINS AND REPLACEMENT GATES - A semiconductor structure including semiconductor fins, a gate over a middle portion of the semiconductor fins, and faceted semiconductor regions outside of the gate separated from gaps may be formed. The semiconductor structure may be formed by forming fins on a semiconductor substrate where each fin has a pair of sidewalls aligned parallel to the length of the fin, growing dummy semiconductor regions on the sidewalls of the fins, forming a sacrificial gate that covers a center portion of the fins and the dummy semiconductor regions, removing portions of the dummy semiconductor regions not covered by the sacrificial gate, and growing faceted semiconductor regions on the sidewalls of the portions of the fins not covered by the sacrificial gate. The faceted semiconductor regions may intersect to form gaps between the faceted semiconductor regions and the gate. | 03-26-2015 |
| 20150084102 | SEMICONDUCTOR DEVICE - The semiconductor device including: a semiconductor layer extending in a first direction, the semiconductor layer including a pair of source/drain regions and a channel region, a gate extending on the semiconductor layer to cover the channel region, and a gate dielectric layer interposed between the channel region and the gate, a corner insulating spacer having a first surface and a second surface, the first surface extending in the second direction along a side wall of the gate, the first surface covering from a side portion of the gate dielectric layer to at least a portion of the side wall of the gate, and the second surface covering a portion of the semiconductor layer, and an outer portion insulating spacer covering the side wall of the gate above the corner insulating spacer, the outer portion insulating spacer having a smaller dielectric constant than the corner insulating spacer, may be provided. | 03-26-2015 |
| 20150084103 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes: a Si substrate having first and second major surfaces facing in opposite directions; a buffer layer of Al | 03-26-2015 |
| 20150084104 | METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR DEVICE - Characteristics of a high electron mobility transistor are improved. A stack having an n-type contact layer (n-type AlGaN layer), an electron supply layer (undoped AlGaN layer), and a channel layer (undoped GaN layer) is formed in a growth mode over a Ga plane parallel with a [0001] crystal axis direction. Then, after turning the stack upside down so that the n-type contact layer (n-type AlGaN layer) is situated to the upper surface and forming a trench, a gate electrode is formed by way of a gate insulation film. By stacking the channel layer (undoped GaN layer) and the electron supply layer (undoped AlGaN layer) successively in a [000-1] direction, (1) normally off operation and (2) increase of withstanding voltage can easily be compatible with each other. | 03-26-2015 |
| 20150084105 | METHOD FOR MANUFACTURING INSULATED GATE FIELD EFFECT TRANSISTOR - An insulated gate field effect transistor with (a) a base having source/drain regions, a channel forming region, a gate insulating film formed on the channel forming region, an insulating layer covering the source/drain regions, and a gate electrode formation opening provided in a partial portion of the insulating layer above the channel forming region; (b) a gate electrode formed by burying a conducive material layer in the gate electrode formation opening; (c) a first interlayer insulating layer formed on the insulating layer and the gate electrode and containing no oxygen atom as a constituent element; and (d) a second interlayer insulating layer configured to be formed on the first interlayer insulating layer. | 03-26-2015 |
| 20150091067 | HYBRID PHASE FIELD EFFECT TRANSISTOR - An insulating layer is deposited over a transistor structure. The transistor structure comprises a gate electrode over a device layer on a substrate. The transistor structure comprises a first contact region and a second contact region on the device layer at opposite sides of the gate electrode. A trench is formed in the first insulating layer over the first contact region. A metal-insulator phase transition material layer with a S-shaped IV characteristic is deposited in the trench or in the via of the metallization layer above on the source side. | 04-02-2015 |
| 20150091068 | GATE ELECTRODE WITH A SHRINK SPACER - A method of forming a semiconductor device including forming a dielectric material layer on a semiconductor layer, forming a gate electrode material layer on the dielectric material layer, forming mask features on the gate electrode material layer, forming a spacer layer on and at sidewalls of the mask features and on the gate electrode material layer between the mask features, removing the spacer layer from the gate electrode material layer between the mask features, and etching the gate electrode material layer and dielectric material layer using the hard mask features as an etch mask to obtain gate electrode structures. A semiconductor device including first and second gate electrode structures, each covered by a cap layer that comprises a mask material surrounded at the sidewalls thereof by a spacer material different from the mask material, and the distance between the first and second electrode structures is at most 100 nm. | 04-02-2015 |
| 20150097217 | SEMICONDUCTOR ATTENUATED FINS - A semiconductor device includes a semiconductor substrate and attenuated semiconductor fins (e.g. FinFET fins) that include an outer portion that is a composite of a first material and a second material, an inner portion that is the second material, and an attenuation portion that is an attenuated composite of the first and second materials. The attenuation portion may be formed by diffusing the first material into a plurality of fins made of the second material. The attenuated composite attenuates from a first composite to a second composite, the first composite comprising a majority of the first material, the second composite comprising a majority of the second material. The outer portion may be located on the fin perimeter and the inner portion may be located central to the fin. The first material may be Germanium, the second material may be Silicon, and the attenuated composite may be attenuated Silicon Germanium. | 04-09-2015 |
| 20150097218 | SEMICONDUCTOR DEVICE WITH NON-LINEAR SURFACE - A semiconductor device includes a first channel having a first linear surface and a first non-linear surface. The semiconductor device includes a first dielectric region surrounding the first channel. The semiconductor device includes a second channel having a third linear surface and a third non-linear surface. The semiconductor device includes a second dielectric region surrounding the second channel. The semiconductor device includes a gate electrode surrounding the first dielectric region and the second dielectric region. | 04-09-2015 |
| 20150102392 | FinFETs and Methods for Forming the Same - A FinFET and methods for forming a FinFET are disclosed. A method includes forming a semiconductor fin on a substrate, implanting the semiconductor fin with dopants, and forming a capping layer on a top surface and sidewalls of the semiconductor fin. The method further includes forming a dielectric on the capping layer, and forming a gate electrode on the dielectric. | 04-16-2015 |
| 20150102393 | FIN-TYPE FIELD EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREOF - A FinFET device includes a gate dielectric layer on a substrate, a fin on the gate dielectric layer having a middle section and source and drain regions at opposite ends, and a gate structure on the middle section of the fin. The FinFET device also includes a trench in a portion of the source and drain regions and a multi-layered epitaxial structure in the trench. The multi-layered epitaxial structure includes a first epitaxial layer in direct contact with the bottom of the trench, a second epitaxial layer on the first epitaxial layer, and a third epitaxial layer on the second epitaxial layer. The first epitaxial layer is a carbon-doped silicon layer having a carbon dopant concentration of less than 4 percent by weight, the second epitaxial layer is a barrier metal layer, and the third epitaxial layer is a metal layer. | 04-16-2015 |
| 20150108550 | TRANSISTOR AND METHOD FOR FORMING THE SAME - A method for forming a transistor is provided. The method includes: forming a channel layer over a substrate; patterning the channel layer to form a recess; and forming a source layer in the recess, such that at least a portion of the channel layer protrudes to form the fin-type channel. | 04-23-2015 |
| 20150108551 | Method Of Making A FinFET Device - A method of fabricating a fin-like field-effect transistor (FinFET) device is disclosed. The method includes forming a mandrel features over a substrate, the mandrel feature and performing a coarse cut to remove one or more mandrel features to form a coarse space. After the coarse cut, the substrate is etched by using the mandrel features, with the coarse space as an etch mask, to form fins. A spacer layer is deposited to fully fill in a space between adjacent fins and cover sidewalls of the fins adjacent to the coarse space. The spacer layer is etched to form sidewall spacers on the fins adjacent to the coarse space. A fine cut is performed to remove a portion of one or more mandrel features to form an end-to-end space. An isolation trench is formed in the end-to-end space and the coarse space. | 04-23-2015 |
| 20150108552 | SEMICONDUCTOR DEVICE - In a cross section in a channel width direction, a semiconductor layer includes a first region of which one end portion is in contact with an insulating layer and which is positioned at one side portion of the semiconductor layer; a second region of which one end portion is in contact with the other end portion of the first region and which is positioned at an upper portion of the semiconductor layer; and a third region of which one end portion is in contact with the other end portion of the second region and the other end portion is in contact with the insulating layer and which is positioned at the other side portion of the semiconductor layer. In the second region, an interface with a gate insulating film is convex and has three regions respectively having curvature radii R1, R2, and R3 that are connected in this order from the one end portion side toward the other. R2 is larger than R1 and R3. | 04-23-2015 |
| 20150108553 | SEMICONDUCTOR DEVICE - A manufacturing method for a semiconductor device includes providing a substrate having at least agate structure formed thereon and a first spacer formed on sidewalls of the gate structure, performing an ion implantation to implant dopants into the substrate, forming a disposal spacer having at least a carbon-containing layer on the sidewalls of the gate structure, the carbon-containing layer contacting the first spacer, and performing a thermal treatment to form a protecting layer between the carbon-containing layer and the first spacer. | 04-23-2015 |
| 20150108554 | Advanced Forming Method and Structure of Local Mechanical Strained Transistor - Embodiments of the invention provide a semiconductor fabrication method and a structure for strained transistors. A method comprises forming a stressor layer over a MOS transistor. The stressor layer is selectively etched over the gate electrode, thereby affecting strain conditions within the MOSFET channel region. An NMOS transistor may have a tensile stressor layer, and a PMOS transistor may have compressive stressor layer. | 04-23-2015 |
| 20150115334 | Gate Device Over Strained Fin Structure - A method for forming a semiconductor device includes forming a fin structure on a substrate, forming a shallow trench isolation region adjacent the fin structure so that an upper portion of the fin structure is exposed, forming a dummy gate over the exposed fin structure, forming an interlayer dielectric layer around the dummy gate, removing the dummy gate to expose the fin structure, and after removing the dummy gate, introducing a strain into a crystalline structure of the exposed fin structure. | 04-30-2015 |
| 20150115335 | MECHANISM FOR FORMING METAL GATE STRUCTURE - Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a semiconductor substrate. A source region and a drain region are formed in the semiconductor substrate, and metal silicide regions are formed in the source region and the drain region, respectively. The semiconductor device further includes a metal gate stack formed over the semiconductor substrate and between the source region and the drain region. The semiconductor device also includes an insulating layer formed over the semiconductor substrate and surrounding the metal gate stack, wherein the insulating layer has contact openings exposing the metal silicide regions, respectively. The semiconductor device includes a dielectric spacer liner layer formed over inner walls of the contact openings, wherein the whole of the dielectric spacer liner layer is right above the metal silicide regions. The semiconductor device includes contact plugs formed in the contact openings. | 04-30-2015 |
| 20150123175 | MECHANISMS FOR SEMICONDUCTOR DEVICE STRUCTURE - Embodiments of mechanisms of a semiconductor device structure are provided. The semiconductor device structure includes a substrate and a metal gate structure formed over the substrate. The semiconductor device structure further includes a funnel shaped hard mask structure formed over the metal gate structure. In addition, a method for forming the semiconductor device structure is also provided. | 05-07-2015 |
| 20150123176 | SEMICONDUCTOR DEVICE HAVING EMBEDDED STRAIN-INDUCING PATTERN - A semiconductor device can include an active region having a fin portion providing a channel region between opposing source and drain regions. A gate electrode can cross over the channel region between the opposing source and drain regions and first and second strain inducing structures can be on opposing sides of the gate electrode and can be configured to induce strain on the channel region, where each of the first and second strain inducing structures including a respective facing side having a pair of {111} crystallographically oriented facets. | 05-07-2015 |
| 20150129938 | SEMICONDUCTOR DEVICE AND FORMATION THEREOF - A semiconductor devices and method of formation are provided herein. A semiconductor device includes a gate structure over a channel and an active region adjacent the channel. The active region includes a repaired doped region and a growth region over the repaired doped region. The repaired doped region includes a first dopant and a second dopant, where the second dopant is from the growth region. A method of forming a semiconductor device includes increasing a temperature during exposure to at least one of dopant(s) or agent(s) to form an active region adjacent a channel, where the active region includes a repaired doped region and a growth region over the repaired doped region. | 05-14-2015 |
| 20150129939 | METHOD AND STRUCTURE FOR FORMING CONTACTS - Embodiments of the present invention provide an improved structure and method for forming high aspect ratio contacts. A horizontally formed contact etch stop layer is deposited in a narrow area where a contact is to be formed. A gas cluster ion beam (GCIB) process is used in the deposition of the horizontally formed contact etch stop layer. | 05-14-2015 |
| 20150129940 | MECHANISM FOR FORMING GATE - Embodiments of mechanisms for forming a semiconductor device are provided. The semiconductor device includes a semiconductor substrate. The semiconductor device also includes an isolation structure in the semiconductor substrate and surrounding an active region of the semiconductor substrate. The semiconductor device includes a gate over the semiconductor substrate. The gate has an intermediate portion over the active region and two end portions connected to the intermediate portion. Each of the end portions has a first gate length longer than a second gate length of the intermediate portion and is located over the isolation structure. | 05-14-2015 |
| 20150129941 | DEVICE AND STRUCTURE AND METHOD FOR FORMING THE SAME - In various embodiments, a method for forming a device may be provided. The method may include forming a contact layer at least partially on a substrate. The method may also include forming a device structure adhered to the contact layer. In addition, the method may include depositing a transfer medium such that the device structure is at least partially covered by the transfer medium. The method may further include solidifying the transfer medium. The method may also include separating the contact layer, the device structure and the transfer medium from the substrate. The contact layer may have a greater adhesion to the device structure than to the substrate. | 05-14-2015 |
| 20150137193 | FINFET STRUCTURES WITH FINS RECESSED BENEATH THE GATE - A semiconductor structure may include a semiconductor fin, a gate over the semiconductor fin, a spacer on a sidewall of the gate, an angled recess region in an end of the semiconductor fin beneath the spacer, and a first semiconductor region filling the angled recess. The angled recess may be v-shaped or sigma shaped. The structure may further include a second semiconductor region in contact with the first semiconductor region and the substrate. The structure may be formed by forming a gate above a portion of the semiconductor fin on a substrate, forming a spacer on a sidewall of the gate; removing a portion of the semiconductor fin not covered by the spacer or the gate to expose a sidewall of the fin, etching the sidewall of the fin to form an angled recess region beneath the spacer, and filling the angled recess region with a first epitaxial semiconductor region. | 05-21-2015 |
| 20150137194 | INVERTED CONTACT AND METHODS OF FABRICATION - An inverted contact and methods of fabrication are provided. A sacrificial layer is patterned in an inverted trapezoid shape, and oxide is deposited around the pattern. The sacrificial layer is removed, and a metal contact material is deposited, taking an inverted-trapezoid shape. Embodiments of the present invention provide an inverted contact, having a wider base and a narrower top. The wider base provides improved electrical contact to the underlying active area. The narrower top allows for closer placement of adjacent contacts, serving to increase overall circuit density of an integrated circuit. | 05-21-2015 |
| 20150137195 | Gate Protection Caps and Method of Forming the Same - A structure includes a substrate, a gate structure over the substrate, a dielectric layer over the substrate, and a cap over a gate electrode of the gate structure. Top surfaces of the dielectric layer and gate electrode are co-planar. The gate structure extends a gate lateral distance between first and second gate structure sidewalls. The cap extends between first and second cap sidewalls. A first cap portion extends from a midline of the gate structure laterally towards the first gate structure sidewall and to the first cap sidewall a first cap lateral distance, and a second cap portion extends from the midline laterally towards the second gate structure sidewall and to the second cap sidewall a second cap lateral distance. The first cap lateral distance and the second cap lateral distance are at least half of the gate lateral distance. | 05-21-2015 |
| 20150137196 | Metal Oxide Semiconductor Transistor and Manufacturing Method Thereof - The present invention provides a MOS transistor, including a substrate, a gate oxide, a gate, a source/drain region and a silicide layer. The gate oxide is disposed on the substrate and the gate is disposed on the gate oxide. The source/drain region is disposed in the substrate at two sides of the gate. The silicide layer is disposed on the source/drain region, wherein the silicide layer includes a curved bottom surface and a curved top surface, both the curved top surface and the curved bottom surface bend toward the substrate and the curved top surface is sunken from two sides thereof, two ends of the silicide layer point tips raised up over the source/drain region and the silicide layer in the middle is thicker than the silicide layer in the peripheral, thereby forming a crescent structure. The present invention further provides a manufacturing method of the MOS transistor. | 05-21-2015 |
| 20150137197 | SEMICONDUCTOR STRUCTURE HAVING TRIMMING SPACERS - A semiconductor structure includes a substrate, a gate electrode disposed on the substrate, wherein the gate electrode has a first top surface. Agate dielectric layer is disposed between the substrate and the gate electrode. A silicon carbon nitride spacer surrounds the gate electrode, wherein the silicon carbon nitride spacer has a second top surface not higher than the first top surface. A silicon oxide spacer surrounds the silicon carbon nitride spacer. | 05-21-2015 |
| 20150137198 | In-Situ Doping of Arsenic for Source and Drain Epitaxy - A method includes forming a gate stack over a semiconductor region, and recessing the semiconductor region to form a recess adjacent the gate stack. A silicon-containing semiconductor region is epitaxially grown in the recess to form a source/drain stressor. Arsenic is in-situ doped during the step of epitaxially growing the silicon-containing semiconductor region. | 05-21-2015 |
| 20150294873 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - Provided is a method of fabricating a semiconductor device, including forming an interlayered insulating layer having an opening, on a substrate; sequentially forming a first conductive pattern, a barrier pattern, and a second conductive pattern on bottom and side surfaces of the opening; and nitrifying an upper portion of the second conductive pattern to form a metal nitride layer that is spaced apart from the first conductive pattern. | 10-15-2015 |
| 20150295064 | SEMICONDUCTOR DEVICE AND FORMATION THEREOF - A semiconductor device and methods of formation are provided. The semiconductor device includes a first active region having a first active region height and an active channel region having an active channel region height over a fin. The first active region height is greater than the active channel region height. The active channel region having the active channel region height has increased strain, such as increased tensile strain, as compared to an active channel region that has a height greater than the active channel region height. The increased strain increases or enhances at least one of hole mobility or electron mobility in at least one of the first active region or the active channel region. The active channel region having the active channel region height has decreased source drain leakage, as compared to an active channel region that has a height greater than the active channel region height. | 10-15-2015 |
| 20150303136 | HIGH EFFICIENCY MODULE | 10-22-2015 |
| 20150303278 | METHOD OF FABRICATING A MOSFET WITH AN UNDOPED CHANNEL - A method of fabricating a MOSFET with an undoped channel is disclosed. The method comprises fabricating on a substrate a semiconductor structure having a dummy poly gate, dummy interlayer (IL) oxide, and a doped channel. The method further comprises removing the dummy poly gate and the dummy IL oxide to expose the doped channel, removing the doped channel from an area on the substrate, forming an undoped channel for the semiconductor structure at the area on the substrate, and forming a metal gate for the semiconductor structure. Removing the dummy poly gate may comprise dry and wet etch operations. Removing the dummy IL oxide may comprise dry etch operations. Removing the doped channel may comprise anisotropic etch operations on the substrate. Forming an undoped channel may comprise applying an epitaxial process to grow the undoped channel. The method may further comprise growing IL oxide above the undoped channel. | 10-22-2015 |
| 20150303281 | FINFET DEVICE WITH VERTICAL SILICIDE ON RECESSED SOURCE/DRAIN EPITAXY REGIONS - A method of forming a semiconductor device that includes forming a fin structure from a semiconductor substrate, and forming a gate structure on a channel region portion of the fin structure. A source region and a drain region are formed on a source region portion and a drain region portion of the fin structure on opposing sides of the channel portion of the fin structure. At least one sidewall of the source region portion and the drain region portion of the fin structure is exposed. A metal semiconductor alloy is formed on the at least one sidewall of the source region portion and the drain region portion of the fin structure that is exposed. | 10-22-2015 |
| 20150303284 | PUNCH THROUGH STOPPER IN BULK FINFET DEVICE - A method of forming a semiconductor device that includes forming a fin structure from a bulk semiconductor substrate and forming an isolation region contacting a lower portion of a sidewall of the fin structure, wherein an upper portion of the sidewall of the fin structure is exposed. A sacrificial spacer is formed on the upper portion of the sidewall of the fin structure. The isolation regions are recessed to provide an exposed section of the sidewall of the fin structure. A doped semiconductor material is formed on the exposed section of the lower portion of the sidewall of the fin structure. Dopant is diffused from the doped semiconductor material to a base portion of the fin structure. | 10-22-2015 |
| 20150311082 | SELF-ALIGNED GATE CONTACT FORMATION - Provided are approaches for forming gate and source/drain (S/D) contacts. Specifically, a gate contact opening is formed over at least one of a set of gate structures, a set of S/D contact openings is formed over fins of the semiconductor device, and a metal material is deposited over the semiconductor device to form a gate contact within the gate contact opening and a set of S/D contacts within the set of S/D contact openings. In one approach, nitride remains between the gate contact and at least one of the S/D contacts. In another approach, the device includes merged gate and S/D contacts. This approach provides selective etching to partition areas where oxide will be further removed selectively to nitride to create cavities to metallize and create contact to the S/D, while isolation areas between contact areas are enclosed in nitride and do not get removed during the oxide etch. | 10-29-2015 |
| 20150311313 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A method of manufacturing a semiconductor device is provided. The method includes providing a substrate; forming a well region on the substrate; forming at least one first gate structure on the well region, wherein the first gate structure includes a gate insulating layer and a first gate electrode formed on the gate insulating layer, wherein the first gate electrode is formed having a first enclosed pattern on a surface of the well region; wherein an area inside the first enclosed pattern is defined as a first region, and an area outside the first enclosed pattern is defined as a second region; performing ion implantation on the first region such that the first region has a first conductivity type, and performing ion implantation on the second region such that the second region has a second conductivity type, wherein the first conductivity type and the second conductivity type are different. | 10-29-2015 |
| 20150318178 | METHODS OF FORMING A SEMICONDUCTOR DEVICE WITH A SPACER ETCH BLOCK CAP AND THE RESULTING DEVICE - One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, forming a sidewall spacer adjacent opposite sides of the sacrificial gate structure, removing the sacrificial gate structure and forming a replacement gate structure in its place, at some point after forming the replacement gate structure, performing an etching process to reduce the height of the spacers so as to thereby define recessed spacers having an upper surface that partially defines a spacer recess, and forming a spacer etch block cap on the upper surface of each recessed spacer structure and within the spacer recess. | 11-05-2015 |
| 20150318204 | SPACER TO PREVENT SOURCE-DRAIN CONTACT ENCROACHMENT - Aspects of the present invention relate to approaches for preventing contact encroachment in a semiconductor device. A first portion of a contact trench can be etched partway to a source-drain region of the semiconductor device. A dielectric liner can be deposited in this trench. A second etch can be performed on the lined trench to etch the contact trench channel the remainder of the way to the source-drain region. This leaves a portion of the dielectric liner remaining in the trench (e.g., covering the vertical walls of the trench) after the second etch. | 11-05-2015 |
| 20150318354 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR - A semiconductor device includes a fin extending on a substrate along a first direction; a gate extending along a second direction across the fin; and source/drain regions and a gate spacer on the fin at opposite sides of the gate, in which there is a surface layer on the top and/or sidewalls of the fin. | 11-05-2015 |
| 20150318391 | SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME - A semiconductor having an active layer; a gate insulating film in contact with the semiconductor; a gate electrode opposite to the active layer through the gate insulating film; a first nitride insulating film formed over the active layer; a photosensitive organic resin film formed on the first nitride insulating film; a second nitride insulating film formed on the photosensitive organic resin film; and a wiring provided on the second, nitride insulating film. A first opening portion is provided in the photosensitive organic resin film, an inner wall surface of the first opening portion is covered with the second nitride insulating film, a second opening portion is provided in a laminate including the gate insulating film, the first nitride insulating film, and the second nitride insulating film inside the first opening portion, and the semiconductor is connected with the wiring through the first opening portion and the second opening portion. | 11-05-2015 |
| 20150318395 | SELF-ALIGNED SILICIDE FORMATION ON SOURCE/DRAIN THROUGH CONTACT VIA - According to certain embodiments, a silicide layer is formed after the fabrication of a functional gate electrode using a gate-last scheme. An initial semiconductor structure has at least one impurity regions formed on a semiconductor substrate, a sacrifice film formed over the impurity region, an isolation layer formed over the sacrifice film and a dielectric layer formed over the isolation film. A via is patterned into the dielectric layer of the initial semiconductor structure and through the thickness of the isolation layer such that a contact opening is formed in the isolation layer. The sacrifice film underlying the isolation layer is then removed leaving a void space underlying the isolation layer. Then, a metal silicide precursor is placed within the void space, and the metal silicide precursor is converted to a silicide layer through an annealing process. | 11-05-2015 |
| 20150318398 | METHODS OF FORMING EPI SEMICONDUCTOR MATERIAL IN A TRENCH FORMED ABOVE A SEMICONDUCTOR DEVICE AND THE RESULTING DEVICES - One method disclosed includes, among other things, forming a gate structure above an active region of a semiconductor substrate, wherein a first portion of the gate structure is positioned above the active region and second portions of the gate structure are positioned above an isolation region formed in the substrate, forming a sidewall spacer adjacent opposite sides of the first portion of the gate structure so as to define first and second continuous epi formation trenches comprised of the spacer that extend for less than the axial length of the gate structure, and forming an epi semiconductor material on the active region within each of the first and second continuous epi formation trenches. | 11-05-2015 |
| 20150325609 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device including a MOS transistor comprising forming a gate electrode on a first insulating film formed on a substrate, performing ion implantation into the substrate and forming a diffusion region, and forming a second insulating film on the substrate, in that order. The performing ion implantation comprises forming a first resist pattern, performing the ion implantation using the first resist pattern as a mask and removing the first resist pattern, including removing, by asking, a part of the first resist pattern hardened by the ion implantation and then removing the remaining part. In forming the gate electrode, a gate electrode material layer is patterned and a protective film is formed. | 11-12-2015 |
| 20150325690 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure further includes a gate stack over the semiconductor substrate. The gate stack includes a gate dielectric layer, a metal gate over the gate dielectric layer, a first insulating layer over the metal gate and a second insulating layer over the first insulating layer. Materials of the first insulating layer and the second insulating layer are different. The semiconductor device structure also includes spacers over opposite sidewalls of the gate stack. The spacers and the metal gate surround a recess, and the first insulating layer and the second insulating layer are in the recess. | 11-12-2015 |
| 20150332934 | LITHOGRAPHIC STACK EXCLUDING SiARC AND METHOD OF USING SAME - A lithographic stack over a raised structure (e.g., fin) of a non-planar semiconductor structure, such as a FinFET, includes a bottom layer of spin-on amorphous carbon or spin-on organic planarizing material, a hard mask layer of a nitride and/or an oxide on the spin-on layer, a layer of a developable bottom anti-reflective coating (dBARC) on the hard mask layer, and a top layer of photoresist. The stack is etched to expose and recess the raised structure, and epitaxial structure(s) are grown on the recess. | 11-19-2015 |
| 20150332962 | Structure and Method for Semiconductor Device - Provided is a semiconductor device and methods of forming the same. The semiconductor device includes a substrate having source/drain regions and a channel region between the source/drain regions; a gate structure over the substrate and adjacent to the channel region; source/drain contacts over the source/drain regions and electrically connecting to the source/drain regions; and a contact protection layer over the source/drain contacts. The gate structure includes a gate stack and a spacer. A top surface of the source/drain contacts is lower than a top surface of the spacer, which is substantially co-planar with a top surface of the contact protection layer. The contact protection layer prevents accidental shorts between the gate stack and the source/drain regions when gate vias are formed over the gate stack. Therefore, gate vias may be formed over any portion of the gate stack, even in areas that overlap the channel region from a top view. | 11-19-2015 |
| 20150332964 | SELF-LIMITING SILICIDE IN HIGHLY SCALED FIN TECHNOLOGY - A method of forming a metal semiconductor alloy on a fin structure that includes forming a semiconductor material layer of a polycrystalline crystal structure material or amorphous crystal structure material on a fin structure of a single crystal semiconductor material, and forming a metal including layer on the semiconductor material layer. Metal elements from the metal including layer may then be intermixed metal elements with the semiconductor material layer to provide a metal semiconductor alloy contact on the fin structure. A core of the fin structure of the single crystal semiconductor material is substantially free of the metal elements from the metal including layer. | 11-19-2015 |
| 20150333148 | SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME - Semiconductor devices and methods of manufacturing the semiconductor devices are provided. The methods may include forming a sacrificial gate pattern on a substrate, forming a first spacer on a sidewall of the sacrificial gate pattern and forming a first interlayer dielectric (ILD) layer covering a sidewall of the first spacer and exposing a top surface of the first spacer. The first spacer may expose an upper portion of the sidewall of the sacrificial gate pattern. The methods may also include forming a capping insulating pattern covering top surfaces of the first spacer and the first ILD layer, replacing the sacrificial gate pattern with a gate electrode structure and patterning the capping insulating pattern to form a second spacer on the first spacer and between the gate electrode structure and the first ILD layer. The second spacer may be formed of a material having a dielectric constant higher than a dielectric constant of the first spacer. | 11-19-2015 |
| 20150340456 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A method for manufacturing a semiconductor device is disclosed. The method comprises: forming a T-shape dummy gate structure on the substrate; removing the T-shape dummy gate structure and retaining a T-shape gate trench; forming a T-shape metal gate structure by filling a metal layer in the T-shape gate trench. According to the semiconductor device manufacturing method disclosed in the present application, the overhang phenomenon and the formation of voids are avoided in the subsequent metal gate filling process by forming a T-shape dummy gate and a T-shape gate trench, and the device performance is improved. | 11-26-2015 |
| 20150340457 | METHODS OF FORMING CONDUCTIVE CONTACT STRUCTURES FOR A SEMICONDUCTOR DEVICE WITH A LARGER METAL SILICIDE CONTACT AREA AND THE RESULTING DEVICES - One illustrative method disclosed herein includes, among other things, forming a first epi semiconductor material in a source/drain region of a transistor device, the first epi semiconductor material having a first lateral width at an upper surface thereof, forming a second epi semiconductor material on the first epi semiconductor material and above at least a portion of one of a gate cap layer or one of the sidewall spacers of the device, wherein the second epi semiconductor material has a second lateral width at an upper surface thereof that is greater than the first lateral width, and forming a metal silicide region on the upper surface of the second epi semiconductor material. | 11-26-2015 |
| 20150349093 | FINFET WITH DIELECTRIC ISOLATION AFTER GATE MODULE FOR IMPROVED SOURCE AND DRAIN REGION EPITAXIAL GROWTH - A method forming a semiconductor device that in one embodiment includes forming a gate structure on a channel region of fin structures, and forming a flowable dielectric material on a source region portion and a drain region portion of the fin structures. The flowable dielectric material is present at least between adjacent fin structures of the plurality of fin structures filling a space between the adjacent fin structures. An upper surface of the source region portion and the drain region portion of fin structures is exposed. An epitaxial semiconductor material is formed on the upper surface of the source region portion and the drain region portion of the fin structures. | 12-03-2015 |
| 20150357467 | TUNABLE BREAKDOWN VOLTAGE RF FET DEVICES - A tunable breakdown voltage RF MESFET and/or MOSFET and methods of manufacture are disclosed. The method includes forming a first line and a second line on an underlying gate dielectric material. The second line has a width tuned to a breakdown voltage. The method further includes forming sidewall spacers on sidewalls of the first and second line such that the space between first and second line is pinched-off by the dielectric spacers. The method further includes forming source and drain regions adjacent outer edges of the first line and the second line, and removing at least the second line to form an opening between the sidewall spacers of the second line and to expose the underlying gate dielectric material. The method further includes depositing a layer of material on the underlying gate dielectric material within the opening, and forming contacts to a gate structure and the source and drain regions. | 12-10-2015 |
| 20150364326 | METHODS OF FORMING A PROTECTION LAYER ON A SEMICONDUCTOR DEVICE AND THE RESULTING DEVICE - One illustrative method disclosed herein includes, among other things, forming a first high-k protection layer on the source/drain regions and adjacent the sidewall spacers of a transistor device, removing a sacrificial gate structure positioned between the sidewall spacers so as to thereby define a replacement gate cavity, forming a replacement gate structure in the replacement gate cavity, forming a second high-k protection layer above an upper surface of the spacers, above an upper surface of the replacement gate structure and above the first high-k protection layer, and removing portions of the second high-k protection layer positioned above the first high-k protection layer. | 12-17-2015 |
| 20150364335 | METHODS FOR PROVIDING SPACED LITHOGRAPHY FEATURES ON A SUBSTRATE BY SELF-ASSEMBLY OF BLOCK COPOLYMERS - A method of forming a plurality of regularly spaced lithography features, the method including providing a self-assemblable block copolymer having first and second blocks in a plurality of trenches on a substrate, each trench including opposing side-walls and a base, with the side-walls having a width therebetween, wherein a first trench has a greater width than a second trench; causing the self-assemblable block copolymer to self-assemble into an ordered layer in each trench, the layer having a first domain of the first block alternating with a second domain of the second block, wherein the first and second trenches have the same number of each respective domain; and selectively removing the first domain to form regularly spaced rows of lithography features having the second domain along each trench, wherein the pitch of the features in the first trench is greater than the pitch of the features in the second trench. | 12-17-2015 |
| 20150364397 | METHOD FOR FORMING MOS DEVICE PASSIVATION LAYER AND MOS DEVICE - The present invention provides a method of forming a passivation layer of a MOS device, and a MOS device. The method of forming a passivation layer of a MOS device includes: forming a substrate; forming a dielectric on the substrate; patterning the dielectric to expose a part of the substrate; forming a metal on the exposed part of the substrate, and the dielectric; forming a TEOS on the metal; forming a PSG on the TEOS; and forming a nitrogen silicon compound on the PSG. Therefore, the cracks problem of the passivation can be alleviated. | 12-17-2015 |
| 20150364560 | SEMICONDUCTOR DEVICE AND METHOD OF FORMING VERTICAL STRUCTURE - According to an exemplary embodiment, a method of forming a vertical structure is provided. The method includes the following operations: providing a substrate; providing the vertical structure having a source, a channel, and a drain over the substrate; shrinking the source and the channel by oxidation; forming a metal layer over the drain of the vertical structure; and annealing the metal layer to form a silicide over the drain of the vertical structure. | 12-17-2015 |
| 20150372145 | HIGH DENSITY VERTICAL NANOWIRE STACK FOR FIELD EFFECT TRANSISTOR - An alternating stack of layers of a first epitaxial semiconductor material and a second epitaxial semiconductor material is formed on a substrate. A fin stack is formed by patterning the alternating stack into a shape of a fin having a parallel pair of vertical sidewalls. After formation of a disposable gate structure and an optional gate spacer, raised active regions can be formed on end portions of the fin stack. A planarization dielectric layer is formed, and the disposable gate structure is subsequently removed to form a gate cavity. A crystallographic etch is performed on the first epitaxial semiconductor material to form vertically separated pairs of an upright triangular semiconductor nanowire and an inverted triangular semiconductor nanowire. Portions of the epitaxial disposable material are subsequently removed. After an optional anneal, the gate cavity is filled with a gate dielectric and a gate electrode to form a field effect transistor. | 12-24-2015 |
| 20150380304 | TITANIUM SILICIDE FORMATION IN A NARROW SOURCE-DRAIN CONTACT - Aspects of the present invention relate to approaches for forming a narrow source-drain contact in a semiconductor device. A contact trench can be etched to a source-drain region of the semiconductor device. A titanium liner can be deposited in this contact trench such that it covers substantially an entirety of the bottom and walls of the contact trench. An x-metal layer can be deposited over the titanium liner on the bottom of the contact trench. A titanium nitride liner can then be formed on the walls of the contact trench. The x-metal layer prevents the nitriding of the titanium liner on the bottom of the contact trench during the formation of the nitride liner. | 12-31-2015 |
| 20150380558 | FINFET THERMAL PROTECTION METHODS AND RELATED STRUCTURES - A method and structure for protecting high-mobility materials from exposure to high temperature processes includes providing a substrate having at least one fin extending therefrom. The at least one fin includes a dummy channel and source/drain regions. A dummy gate stack is formed over the dummy channel. A first inter-layer dielectric (ILD) layer is formed on the substrate including the fin. The first ILD layer is planarized to expose the dummy gate stack. After planarizing the first ILD layer, the dummy gate stack and the dummy channel are removed to form a recess, and a high-mobility material channel region is formed in the recess. After forming the high-mobility material channel region, contact openings are formed within a second ILD layer overlying the source/drain regions, and a low Schottky barrier height (SBH) material is formed over the source/drain regions. | 12-31-2015 |
| 20160005650 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the same are provided. The method includes forming a gate structure over a substrate and forming source and drain regions adjacent to the gate structure. The method also includes forming a first ILD layer surrounding the gate structure over the source and drain regions and forming a contact modulation structure over the gate structure. The method also includes etching the first ILD layer and the contact modulation structure to form a first contact trench over the source and drain regions and a second contact trench over the gate structure. The method further includes forming a first contact in the first contact trench and a second contact in the second contact trench. In addition, the first ILD layer has a first etching rate and the contact modulation structure has a second etching rate that is less than the first etching rate. | 01-07-2016 |
| 20160005822 | SELF-ALIGNED VIA FOR GATE CONTACT OF SEMICONDUCTOR DEVICES - Systems and methods are directed to a three-terminal semiconductor device including a self-aligned via for connecting to a gate terminal Hardmasks and spacers formed over top portions and sidewall portions of a drain connection to a drain terminal and a source connection to a source terminal protect and insulate the drain connection and the source connection, such that short circuits are avoided between the source and drain connections and the self-aligned via. The self-aligned via provides a direct metal-gate connection path between the gate terminal and a metal line such as a M1 metal line while avoiding a separate gate connection layer. | 01-07-2016 |
| 20160005833 | FEOL LOW-K SPACERS - Transistors and their methods of formation are described. Low dielectric constant material (e.g. a void) is placed between an elongated gate and a contact to increase the attainable switching speed of the gate of the device. An elongated structural slab of silicon nitride is temporarily positioned on both sides of the gate. Silicon oxide is formed over the silicon nitride slabs and the gate. Contacts are formed through the silicon oxide. The silicon oxide is selectively etched back to expose the silicon nitride slab. A portion or all the silicon nitride slab is removed and replaced with low-K dielectric or any dielectric with an air-gap to enable higher switching speed of the transistor. The highly-selective silicon nitride etch uses remotely excited fluorine and a very low electron temperature in the substrate processing region. | 01-07-2016 |
| 20160013104 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE | 01-14-2016 |
| 20160013289 | SEMICONDUCTOR DEVICE, RELATED MANUFACTURING METHOD, AND RELATED ELECTRONIC DEVICE | 01-14-2016 |
| 20160013291 | METHODS OF FORMING ISOLATED CHANNEL REGIONS FOR A FINFET SEMICONDUCTOR DEVICE AND THE RESULTING DEVICE | 01-14-2016 |
| 20160020144 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having at least a device thereon; forming a dielectric layer on the device and the substrate; forming a first mask layer on the dielectric layer; removing part of the first mask layer and part of the dielectric layer for forming a patterned first mask layer on the dielectric layer; covering a hard mask on the patterned first mask layer and the dielectric layer; partially removing the hard mask for forming a spacer adjacent to the patterned first mask layer and the dielectric layer; forming a contact hole adjacent to the spacer; filling the contact hole with a metal layer; and planarizing the metal layer for forming a contact plug, wherein the contact plug contacts the dielectric layer and the spacer simultaneously. | 01-21-2016 |
| 20160020293 | SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device includes, forming, on a substrate, an element isolation insulating film which includes a protruding portion protruding above a level of a surface of the substrate, forming a first film on the substrate and on the element isolation insulating film, polishing the first film to expose the protruding portion, forming a first resist pattern which straddles the first film and the protruding portion after polishing the first film, patterning the first film using the first resist pattern as a mask to form a first pattern, and forming a sidewall film at side surfaces of the first pattern. | 01-21-2016 |
| 20160020294 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a substrate with an active pattern, a gate electrode provided at the active pattern, and a gate capping structure disposed above the gate electrode. The gate capping structure may include two or more gate capping patterns with different properties from each other, and the use of the gate capping structure makes it possible to form contact plugs in a self-aligned manner and improve operational speed and characteristics of the semiconductor device. | 01-21-2016 |
| 20160027735 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In an LCD driver, in a high voltage resistant MISFET, end portions of a gate electrode run onto electric field relaxing insulation regions. Wires to become source wires or drain wires are formed on an interlayer insulation film of the first layer over the high voltage resistant MISFET. At this moment, when a distance from an interface between a semiconductor substrate and a gate insulation film to an upper portion of the gate electrode is defined as “a”, and a distance from the upper portion of the gate electrode to an upper portion of the interlayer insulation film on which the wires are formed is defined as “b”, a relation of a>b is established. In such a high voltage resistant MISFET structured in this manner, the wires are arranged so as not to be overlapped planarly with the gate electrode of the high voltage resistant MISFET. | 01-28-2016 |
| 20160027901 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - Provided is a semiconductor device including a substrate with an active pattern, a gate electrode crossing the active pattern, and a gate capping pattern on the gate electrode. The gate capping pattern may have a width larger than that of the gate electrode, and the gate capping pattern may include extended portions extending toward the substrate and at least partially covering both sidewalls of the gate electrode. | 01-28-2016 |
| 20160035857 | EXTENDED CONTACT AREA USING UNDERCUT SILICIDE EXTENSIONS - The present invention relates generally to semiconductor devices and more particularly, to a structure and method of forming a contact silicide on a source-drain (S-D) region of a field effect transistor (FET) having extensions by using an undercut etch and a salicide process. A method of forming a contact silicide extension is disclosed. The method may include: forming an undercut region below a dielectric layer and above a source-drain region, the undercut region located directly below a bottom of a contact trench and extending below the dielectric layer to a gate spacer formed on a sidewall of a gate stack; and forming a contact silicide in the undercut region, the contact silicide in direct contact with the source-drain region. | 02-04-2016 |
| 20160035891 | STRESS IN N-CHANNEL FIELD EFFECT TRANSISTORS - A fin field-effect transistor (FinFET) includes a gate stack on a surface of a semiconductor fin. The semiconductor fin may include a capping material and a stressor material. The stressor material is confined by the capping material to a region proximate the gate stack. The stressor material provides stress on the semiconductor fin proximate the gate stack. | 02-04-2016 |
| 20160043033 | ELECTRONIC INTERCONNECTS AND DEVICES WITH TOPOLOGICAL SURFACE STATES AND METHODS FOR FABRICATING SAME - An interconnect is disclosed with enhanced immunity of electrical conductivity to defects. The interconnect includes a material with charge carriers having topological surface states. Also disclosed is a method for fabricating such interconnects. Also disclosed is an integrated circuit including such interconnects. Also disclosed is a gated electronic device including a material with charge carriers having topological surface states. | 02-11-2016 |
| 20160043191 | SEMICONDUCTOR DEVICE CONTACTS - Techniques are disclosed for forming contacts in silicon semiconductor devices. In some embodiments, a transition layer forms a non-reactive interface with the silicon semiconductor contact surface. In some such cases, a conductive material provides the contacts and the material forming a non-reactive interface with the silicon surface. In other cases, a thin semiconducting or insulating layer provides the non-reactive interface with the silicon surface and is coupled to conductive material of the contacts. The techniques can be embodied, for instance, in planar or non-planar (e.g., double-gate and tri-gate FinFETs) transistor devices. | 02-11-2016 |
| 20160043204 | DIODES AND METHODS OF MANUFACTURING DIODES - Diodes and methods of manufacturing diodes are disclosed. In some examples, the diodes may include a cathode assembly. The cathode assembly may include a cathode electrode and a N+ substrate layer on the cathode electrode. The cathode assembly may additionally include a N buffer layer on the N+ substrate layer, and a N− bulk layer on the N buffer layer. The N buffer layer may be disposed between the N+ substrate layer and the N− bulk layer. Additionally, the N buffer layer may include at least one damaged sublayer having crystal damage configured to provide recombination centers for charge carriers and at least one undamaged sublayer that excludes crystal damage. The diodes may additionally include an anode assembly adjacent to the N− bulk layer. | 02-11-2016 |
| 20160043233 | THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING OF THE SAME - Provided are a thin film transistor (TFT) and a method of manufacturing the TFT. The TFT includes a substrate; a first conductive type semiconductor layer on the substrate and having a recess; second conductive type spacers at opposite side walls in the recess; a main semiconductor layer covering the first conductive type semiconductor layer and the second conductive type spacers and comprising a channel region and source and drain regions; a gate insulating layer on the main semiconductor layer; and a gate electrode on the gate insulating layer and corresponding to the recess. | 02-11-2016 |
| 20160049332 | METHODS OF FORMING CONTACT STRUCTURES FOR SEMICONDUCTOR DEVICES AND THE RESULTING DEVICES - One method disclosed herein includes, among other things, a method of forming a contact structure to a source/drain region of a transistor device. The transistor device includes a gate structure and a gate cap layer positioned above the gate structure. The method includes forming an extended-height epi contact structure that is conductively coupled to the source/drain region. The extended-height epi contact structure includes an upper surface that is positioned at a height level that is above a height level of an upper surface of the gate cap layer. The method further includes performing an etching process to trim at least a lateral width of a portion of the extended-height epi contact structure, and, after performing the etching process, forming a metal silicide material on at least a portion of the trimmed extended-height epi contact structure and forming a conductive contact on the metal silicide material. | 02-18-2016 |
| 20160049482 | STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH GATE STACK - A structure and a formation method of a semiconductor device are provided. The semiconductor device includes a semiconductor substrate and a gate stack over the semiconductor substrate. The semiconductor device also includes a contact etch stop layer over the semiconductor substrate and sidewalls of the gate stack. The semiconductor device further includes a dielectric layer over the contact etch stop layer. In addition, the semiconductor device includes an interfacial layer between the contact etch stop layer and the dielectric layer. | 02-18-2016 |
| 20160049487 | DEVICE INCLUDING CAVITY AND SELF-ALIGNED CONTACT AND METHOD OF FABRICATING THE SAME - A device includes a first structure and a second structure. The second structure is separated from the first structure by a cavity. The device further includes a seal material, an etch stop material defining an etched region, and a self-aligned contact (SAC). The seal material is configured to seal the cavity, and the SAC is formed within the etched region. The SAC adjoins the seal material, the etch stop material, or a combination thereof. | 02-18-2016 |
| 20160049494 | FORMING TRANSISTORS WITHOUT SPACERS AND RESULTING DEVICES - Methods for forming gates without spacers and the resulting devices are disclosed. Embodiments may include forming a channel layer on a substrate; forming a dummy gate on the channel layer; forming an interlayer dielectric (ILD) on the channel layer and surrounding the dummy gate; forming a trench within the ILD and the channel layer by removing the dummy gate and the channel layer below the dummy gate; forming an un-doped channel region at the bottom of the trench; and forming a gate above the un-doped channel region within the trench. | 02-18-2016 |
| 20160049506 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device including a substrate, a plurality of isolation structures, at least a gate structure, a plurality of dummy gate structures and a plurality of epitaxial structures is provided. The substrate has an active area defined by the isolation structures disposed within the substrate. That is, the active area is defined between the isolation structures. The gate structure is disposed on the substrate and located within the active area. The dummy gate structures are disposed on the substrate and located out of the active area. The edge of each dummy gate structure is separated from the boundary of the active area with a distance smaller than 135 angstroms. The epitaxial structures are disposed within the active area and in a portion of the substrate on two sides of the gate structure. The invention also provided a method for fabricating semiconductor device. | 02-18-2016 |
| 20160056133 | HIGH EFFICIENCY MODULE | 02-25-2016 |
| 20160056261 | EMBEDDED SIGMA-SHAPED SEMICONDUCTOR ALLOYS FORMED IN TRANSISTORS - A method of forming a semiconductor device is disclosed wherein sigma-shaped cavities are formed in alignment with a gate structure such that a cavity tip of the sigma-shaped cavities has a small lateral distance to the channel region, while a lateral distance from the silicon-germanium material filled into the cavity and extending along the sidewall of the gate structure above the active region is at least maintained, if not increased. A semiconductor device is formed wherein the semiconductor device comprises a gate structure disposed over an active region of a semiconductor substrate. The gate structure has a gate electrode and a sidewall spacer structure with a first spacer of L-shape and a second spacer disposed on the first spacer. In alignment with the gate structure, sigma-shaped cavities are formed in the active region and embedded SiGe material is epitaxially grown in the sigma-shaped cavities. | 02-25-2016 |
| 20160056262 | METAL GATE AND MANUFUACTURING PROCESS THEREOF - Some embodiments of the present disclosure provide a semiconductor device including a semiconductive substrate, a metal gate including a metallic layer proximal to the semiconductive substrate. A dielectric layer surrounds the metal gate. The dielectric layer includes a first surface facing the semiconductive substrate and a second surface opposite to the first surface. A sidewall spacer surrounds the metallic layer with a greater longitudinal height. The sidewall spacer is disposed between the metallic layer and the dielectric layer. An etch stop layer over the metal gate comprises a surface substantially coplanar with the second surface of the dielectric layer. The etch stop layer has a higher resistance to etchant than the dielectric layer. A portion of the etch stop layer is over the sidewall spacer. | 02-25-2016 |
| 20160064509 | HYDROGEN-FREE SILICON-BASED DEPOSITED DIELECTRIC FILMS FOR NANO DEVICE FABRICATION - Embodiments of the present invention provide hydrogen-free dielectric films and methods of fabrication. A hydrogen-free precursor, such as tetraisocyanatosilane, and hydrogen-free reactants, such as nitrogen, oxygen (O2/O3) and nitrous oxide are used with chemical vapor deposition processes (PECVD, thermal CVD, SACVD, HDP CVD, and PE and Thermal ALD) to create hydrogen-free dielectric films. In some embodiments, there are multilayer dielectric films with sublayers of various materials such as silicon oxide, silicon nitride, and silicon oxynitride. In embodiments, the hydrogen-free reactants may include Tetra Isocyanato Silane, along with a hydrogen-free gas including, but not limited to, N2, O2, O3, N2O, CO2, CO and a combination thereof of these H-Free gases. Plasma may be used to enhance the reaction between the TICS and the other H-free gasses. The plasma may be controlled during film deposition to achieve variable density within each sublayer of the films. | 03-03-2016 |
| 20160064516 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a gate stack positioned over the semiconductor substrate. The semiconductor device structure includes spacers positioned over sidewalls of the gate stack. The semiconductor device structure includes a first protective layer positioned between the gate stack and the spacers and between the spacers and the semiconductor substrate. The semiconductor device structure includes a second protective layer positioned between the spacers and the first protective layer. The first protective layer and the second protective layer include different materials. | 03-03-2016 |
| 20160064527 | UNDER-SPACER DOPING IN FIN-BASED SEMICONDUCTOR DEVICES - A fin field effect transistor (FinFET) device and a method of fabricating the FinFET are described. The device includes a fin formed on a substrate, the fin including a channel region of the device and a spacer and a cap formed over a dummy gate line separating a source and drain of the device. The device also includes an epitaxial layer formed over portions of the fin, the epitaxial layer being included between the fin and the spacer. | 03-03-2016 |
| 20160064528 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a metal gate thereon and a hard mask atop the metal gate; and performing a high-density plasma (HDP) process to form a cap layer on the hard mask and the substrate. | 03-03-2016 |
| 20160064549 | Structure and Method of Forming Semiconductor Device - The present disclosure provides a method for fabricating semiconductor device. The method includes forming a first dielectric layer over a substrate, forming a gate structure over a first portion of the first dielectric layer, forming a sidewall spacer over a second portion of the first dielectric layer and on the gate structure, converting the second portion of the first dielectric layer and an exposed third portion of the first dielectric layer to a first portion of a second dielectric layer and a second portion of the second dielectric layer, respectively, removing the second portion of the second dielectric layer and a portion of the substrate to form a recess in the substrate adjacent the sidewall spacer, forming a source/drain (S/D) feature in the recess and removing the gate electrode and the first portion of the first dielectric layer to form a gate trench. | 03-03-2016 |
| 20160071731 | FINFET DOPING METHOD WITH CURVILINEAR TRAJECTORY IMPLANTATION BEAM PATH - A method to implant dopants onto fin-type field-effect-transistor (FINFET) fin surfaces with uniform concentration and depth levels of the dopants and the resulting device are disclosed. Embodiments include a method for pulsing a dopant perpendicular to an upper surface of a substrate, forming an implantation beam pulse; applying an electric or a magnetic field to the implantation beam pulse to effectuate a curvilinear trajectory path of the implantation beam pulse; and implanting the dopant onto a sidewall surface of a target FINFET fin on the upper surface of the substrate via the curvilinear trajectory path of the implantation beam pulse. | 03-10-2016 |
| 20160071799 | SEMICONDUCTOR STRUCTURE WITH CONTACT PLUG - The semiconductor device includes a substrate, an epi-layer, a first etch stop layer, an interlayer dielectric (ILD) layer, a second etch stop layer, a protective layer, a liner, a silicide cap and a contact plug. The substrate has a first portion and a second portion. The epi-layer is disposed in the first portion. The first etch stop layer is disposed on the second portion. The ILD layer is disposed on the first etch stop layer. The second etch stop layer is disposed on the ILD layer, in which the first etch stop layer, the ILD layer and the second etch stop layer form a sidewall surrounding the first portion. The protective layer is disposed on the sidewall. The liner is disposed on the protective layer. The silicide cap is disposed on the epi-layer. The contact plug is disposed on the silicide cap and surrounded by the liner. | 03-10-2016 |
| 20160071800 | SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF - A semiconductor structure including a dielectric layer, a titanium layer, a titanium nitride layer and a metal is provided. The dielectric layer is disposed on a substrate, wherein the dielectric layer has a via. The titanium layer covers the via, wherein the titanium layer has tensile stress lower than 1500 Mpa. The titanium nitride layer conformally covers the titanium layer. The metal fills the via. The present invention also provides a semiconductor process for forming said semiconductor structure. The semiconductor process includes the following steps. A dielectric layer is formed on a substrate, wherein the dielectric has a via. A titanium layer conformally covers the via, wherein the titanium layer has compressive stress lower than 500 Mpa. A titanium nitride layer is formed to conformally cover the titanium layer. A metal fills the via. | 03-10-2016 |
| 20160079086 | METHOD OF FORMING A SEMICONDUCTOR DEVICE AND ACCORDING SEMICONDUCTOR DEVICE - The present disclosure provides a method of forming a semiconductor device, including a shaping of a gate structure of the semiconductor device such that a spacer removal after silicide formation is avoided and silicide overhang is suppressed. In some aspects of the present disclosure, a method of forming a semiconductor device is provided wherein a gate structure is provided over an active region of a semiconductor substrate, the gate structure including a gate electrode material and sidewall spacers. At least one of the gate electrode material and the sidewall spacers are shaped by applying a shaping process to the gate structure and a silicide portion is formed on the shaped gate structure. | 03-17-2016 |
| 20160079162 | SEMICONDUCTOR DEVICE, LAYOUT OF SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A semiconductor device includes a substrate having an active area, a gate structure over the active area, a lower conductive layer over and electrically coupled to the active area, and an upper conductive layer over and electrically coupled to the lower conductive layer. The lower conductive layer is at least partially co-elevational with the gate structure. The lower conductive layer includes first and second conductive segments spaced from each other. The upper conductive layer includes a third conductive segment overlapping the first and second conductive segments. The third conductive segment is electrically coupled to the first conductive segment, and electrically isolated from the second conductive segment. | 03-17-2016 |
| 20160079418 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - According to one embodiment, a method is disclosed for manufacturing a semiconductor device. The method can include an ion implantation process of performing ion implantation of an ion species including at least one type of atom of boron, antimony, arsenic, phosphorus, or indium into a semiconductor region at low temperature, and an electrode formation process of forming a source region and a drain region at two mutually-separated locations on the semiconductor region and forming an electrode in a region directly above the semiconductor region between the source region and the drain regions of the two locations with an insulating film interposed between the electrode and the semiconductor region. | 03-17-2016 |
| 20160093649 | SEMICONDUCTOR DEVICE AND RELATED MANUFACTURING METHOD - A method for manufacturing a semiconductor device may include the following steps: preparing a substrate; providing a gate material layer that overlaps the substrate; providing a blocking layer that partially covers the gate material layer; removing a portion of the gate material layer that is not covered by the blocking layer for forming a gate electrode; providing a blocking material layer that covers both the blocking layer and the substrate; removing a portion of the blocking material layer for forming a blocking member that has an opening, wherein the opening partially exposes the blocking layer and partially exposes the substrate; and performing ion implantation through the opening to form a doped well region in the substrate. | 03-31-2016 |
| 20160093718 | SEMICONDUCTOR STRUCTURES AND FABRICATION METHOD THEREOF - A method is provided for fabricating transistors. The method includes providing a semiconductor substrate. The substrate has a gate film and a mask film formed on a top surface. The mask film contains implanted carbon ions. The method further includes forming a mask layer by etching the mask film and then forming a gate layer by etching through the gate film using the mask layer as a mask until the substrate is exposed. The method also includes forming a first sidewall containing implanted carbon ions on the side surface of the gate layer and the mask layer; forming a stress layer in the substrate on both sides of the gate layer and the first side-wall; and forming a source region on one side of the gate layer and the first sidewall and a drain region on the other side of the gate layer and the first side wall. | 03-31-2016 |
| 20160093727 | FINFET WITH REDUCED CAPACITANCE - A structure including a plurality of fins etched from a semiconductor substrate, a gate electrode above and perpendicular to the plurality of fins, a pair of sidewall spacers disposed on opposing sides of the gate electrode, a gap fill material above the semiconductor substrate and between the plurality of fins, the gap fill material is directly below the gate electrode and directly below the pair of sidewall spacers, wherein the gate electrode separates the gap fill material from each of the plurality of fins, and an epitaxially grown region above a portion of the plurality of fins not covered by the gate electrode, the EPI region separates the gap fill material from each of the plurality of fins. | 03-31-2016 |
| 20160093741 | SEMICONDUCTOR DEVICES HAVING SOURCE/DRAIN AND METHOD OF FABRICATING THE SAME - According to an exemplary embodiment of the present embodiment, a semiconductor device is provided as follows. An active fin protrudes from a substrate, extending in a direction. A gate structure crosses a first region of the active fin. A source/drain is disposed on a second region of the active fin. The source/drain includes upper surfaces and vertical side surfaces. The vertical side surfaces are in substantially parallel with side surfaces of the active fin. | 03-31-2016 |
| 20160104621 | SEMICONDUCTOR DEVICE HAVING COMMON CONTACT AND GATE PROPERTIES - In one aspect there is set forth herein a semiconductor device wherein a contact conductive layer and a gate conductive layer include a common conductive material. In one aspect a source/drain region contact conductive layer of an nFET, and a gate conductive layer of a gate of the nFET can be fabricated to include an n material. In one aspect a source/drain region contact conductive layer of a pFET, and a gate conductive layer of the pFET can be fabricated to include an p material. | 04-14-2016 |
| 20160104627 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a fin-shaped structure on the substrate; forming a cap layer on the fin-shaped structure; removing part of the cap layer on top of the fin-shaped structure; removing part of the fin-shaped structure; removing the remaining cap layer; and removing part of the remaining fin-shaped structure. | 04-14-2016 |
| 20160104673 | FIN-SHAPED FIELD-EFFECT TRANSISTOR WITH A GERMANIUM EPITAXIAL CAP AND A METHOD FOR FABRICATING THE SAME - A FinFET includes a fin-shaped structure, a gate structure, an epitaxial layer, an interlayer dielectric layer, an opening, a germanium cap and a contact plug. The fin-shaped structure is disposed on the substrate. The gate structure covers a portion of the fin-shaped structure. The epitaxial layer is disposed on the fin-shaped structure adjacent to the gate structure. The interlayer dielectric layer covers the gate structure and the epitaxial layer. The opening is in the interlayer dielectric layer. The germanium cap fills the bottom of the opening and has a germanium concentration in excess of 50 atomic %. The contact plug is disposed on the germanium cap in the opening. | 04-14-2016 |
| 20160111532 | SOURCE/DRAIN CONTACTS FOR NON-PLANAR TRANSISTORS - The present description relates to the field of fabricating microelectronic devices having non-planar transistors. Embodiments of the present description relate to the formation of source/drain contacts within non-planar transistors, wherein a titanium-containing contact interface may be used in the formation of the source/drain contact with a discreet titanium silicide formed between the titanium-containing interface and a silicon-containing source/drain structure. | 04-21-2016 |
| 20160111541 | GATE LAST SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a substrate and a metal gate structure formed over a fin structure of the substrate. The semiconductor structure further includes a spacer formed on a sidewall of the metal gate structure and a source/drain structure formed in the fin structure. In addition, the spacer is in direct contact with the fin structure. | 04-21-2016 |
| 20160118336 | SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes a first dielectric layer over the semiconductor substrate. The semiconductor device structure includes a first conductive line embedded in the first dielectric layer. The semiconductor device structure includes a second dielectric layer over the first dielectric layer and the first conductive line. The semiconductor device structure includes a second conductive line over the second dielectric layer. The second dielectric layer is between the first conductive line and the second conductive line. The semiconductor device structure includes conductive pillars passing through the second dielectric layer to electrically connect the first conductive line to the second conductive line. The conductive pillars are spaced apart from each other. | 04-28-2016 |
| 20160118481 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device comprises a substrate, a gate structure and a gate spacer. The substrate has a semiconductor fin protruding from a surface of the substrate. The gate structure is disposed on the semiconductor fin. The gate spacer is disposed on sidewalls of the gate structure, wherein the gate spacer comprises a first material layer and a second material layer stacked with each other and both of these two material layers are directly in contact with the gate structure. | 04-28-2016 |
| 20160133711 | METHOD OF FABRICATING SOURCE/DRAIN REGION AND SEMICONDUCTOR STRUCTURE HAVING SOURCE/DRAIN REGION FABRICATED BY THE SAME - A method of fabricating source/drain region in a substrate includes the steps of: introducing an ion beam-line of a first material to a surface of the substrate at a first energy and a first dosage to implant the substrate with dopants of a first conductive type; and subsequently, introducing a plasma of a second material to the surface. The ion beam-line is introduced, at a second energy and a second dosage to implant the substrate with dopants of the first conductive type. The second dosage is greater than the first dosage and the implant depth of the plasma is less than the implant depth of the ion beam-line. | 05-12-2016 |
| 20160133714 | Metal-Oxide-Semiconductor Field-Effect Transistor with Metal-Insulator-Semiconductor Contact Structure to Reduce Schottky Barrier - A method includes depositing a first metal layer on a native SiO | 05-12-2016 |
| 20160133727 | SEMICONDUCTOR JUNCTION FORMATION - A semiconductor structure, such as a FinFET, etc., includes a bi-portioned junction. The bi-portioned junction includes a doped outer portion and a doped inner portion. The dopant concentration of the outer portion is less than the dopant concentration of the inner portion. An electrical connection is formed by diffusion of the dopants within outer portion into a channel region and diffusion of the dopants within the outer portion into the inner region. A low contact resistance is achieved by a contact electrically contacting the relatively higher doped inner portion while device shorting is limited by the relatively lower doped outer portion. | 05-12-2016 |
| 20160141179 | Selective Growth for High-Aspect Ration Metal Fill - An improved conductive feature for a semiconductor device and a technique for forming the feature are provided. In an exemplary embodiment, the semiconductor device includes a substrate having a gate structure formed thereupon. The gate structure includes a gate dielectric layer disposed on the substrate, a growth control material disposed on a side surface of the gate structure, and a gate electrode fill material disposed on the growth control material. The gate electrode fill material is also disposed on a bottom surface of the gate structure that is free of the growth control material. In some such embodiments, the gate electrode fill material contacts a first surface and a second surface that are different in composition. | 05-19-2016 |
| 20160141381 | SEMICONDUCTOR DEVICES AND METHODS FOR FABRICATING THE SAME - Semiconductor devices and methods for fabricating the same are provided. The semiconductor devices include a fin active pattern formed to project from a substrate, a gate electrode formed to cross the fin active pattern on the substrate, a gate spacer formed on a side wall of the gate electrode and having a low dielectric constant and an elevated source/drain formed on both sides of the gate electrode on the fin active pattern. The gate spacer includes first, second and third spacers that sequentially come in contact with each other in a direction in which the gate spacer goes out from the gate electrode, and a carbon concentration of the second spacer is lower than carbon concentrations of the first and third spacers. | 05-19-2016 |
| 20160141391 | Method for Reducing Contact Resistance in MOS - A method for growing a III-V semiconductor structure on a Si | 05-19-2016 |
| 20160148897 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a corner constituted by a first side and a second side being perpendicular to the first side; and a plurality of pads including a first pad, arranged along the second side and formed over a semiconductor substrate. The first pad is arranged nearer the corner than other pads of the plurality of pads. The first pad includes a third side, a fourth side being perpendicular to the third side, a fifth side being parallel to the third side and a sixth side being perpendicular to a fifth side. The third side and the fourth side are nearer to the corner than the fifth side and sixth side. A first dummy wiring is formed along the first side. A second dummy wiring is formed along the second side. The first dummy wiring and the second dummy wiring are formed integrally with each other. | 05-26-2016 |
| 20160149017 | Gate Spacers and Methods of Forming - Methods and structures for forming devices, such as transistors, are discussed. A method embodiment includes forming a gate spacer along a sidewall of a gate stack on a substrate; passivating at least a portion of an exterior surface of the gate spacer; and epitaxially growing a material in the substrate proximate the gate spacer while the at least the portion of the exterior surface of the gate spacer remains passivated. The passivating can include using at least one of a thermal treatment, a plasma treatment, or a thermal treatment. | 05-26-2016 |
| 20160149041 | Semiconductor Devices and FinFETS - Semiconductor devices and fin field effect transistors (FinFETs) are disclosed. In some embodiments, a representative semiconductor device includes a group III material over a substrate, the group III material comprising a thickness of about 2 monolayers or less, and a group III-V material over the group III material. | 05-26-2016 |
| 20160155811 | Fin Field Effect Transistor (FinFET) | 06-02-2016 |
| 20160155814 | COPPER AND/OR COPPER OXIDE DISPERSION, AND ELECTROCONDUCTIVE FILM FORMED USING DISPERSION | 06-02-2016 |
| 20160155837 | METAL OXIDE SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME | 06-02-2016 |
| 20160163559 | METHOD FOR RECESSING A CARBON-DOPED LAYER OF A SEMICONDUCTOR STRUCTURE - Semiconductor structure and methods of fabrication thereof are provided which includes, for instance, providing a carbon-doped material layer within a recess of a semiconductor structure; removing, in part, carbon from the carbon-doped material layer to obtain, at least in part, a carbon-depleted region thereof, the carbon-depleted region having a modified etch property with an increased etch rate compared to an etch rate of the carbon-doped material layer; and recessing the carbon-depleted region of the carbon-doped material layer by an etching process, with the carbon-depleted region being recessed based upon, in part, the modified etch property of the carbon-depleted region. | 06-09-2016 |
| 20160163795 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A semiconductor device is disclosed. The semiconductor device includes an insulating layer formed selectively on a semiconductor layer; a lower electrode, formed on the insulating layer, having an end portion at a position spaced apart by a predetermined distance inward from a periphery of the insulating layer; a dielectric film formed on the lower electrode; an upper electrode, formed on the dielectric film, facing the lower electrode with the dielectric film interposed between the upper electrode and the lower electrode; and a passivation film, formed to cover the insulating layer, starting from the end portion of the lower electrode and extending toward the periphery of the insulating layer. The passivation film includes an insulating material having an etching selectivity with respect to the insulating layer. | 06-09-2016 |
| 20160163808 | SEMICONDUCTOR DEVICE WITH LOW-K GATE CAP AND SELF-ALIGNED CONTACT - A semiconductor device includes at least a gate formed upon a semiconductor substrate, a contact trench self aligned to the gate, and a multilayered gate caps comprising a first gate cap formed upon each gate and a low-k gate cap formed upon the first gate cap. The multilayered gate cap may electrically isolate the gate from a self aligned contact formed by filling the contact trench with electrically conductive material. The multilayered gate cap reduces parasitic capacitance formed between the source-drain region, gate, and multilayered gate cap that may adversely impact device performance and device power consumption. | 06-09-2016 |
| 20160163819 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a sacrificial mandrel on the substrate, wherein the sacrificial mandrel comprises an indentation; and forming a spacer adjacent to the sacrificial mandrel. | 06-09-2016 |
| 20160163847 | Semiconductor Device and Method for Forming the Same - A system and method for forming and using a liner is provided. An embodiment comprises forming an opening in an inter-layer dielectric over a substrate and forming the liner along the sidewalls of the opening. A portion of the liner is removed from a bottom of the opening, and a cleaning process may be performed through the liner. By using the liner, damage to the sidewalls of the opening from the cleaning process may be reduced or eliminated. Additionally, the liner may be used to help implantation of ions within the substrate. | 06-09-2016 |
| 20160172456 | HIGH RESISTANCE METAL ETCH-STOP PLATE FOR METAL FLYOVER LAYER | 06-16-2016 |
| 20160172460 | FINFET SPACER WITHOUT SUBSTRATE GOUGING OR SPACER FOOT | 06-16-2016 |
| 20160181238 | ELECTROSTATIC PROTECTIVE DEVICE | 06-23-2016 |
| 20160181363 | MOSFET STRUCTURE AND METHOD FOR MANUFACTURING SAME | 06-23-2016 |
| 20160181367 | FORMATION OF FINFET JUNCTION | 06-23-2016 |
| 20160181380 | Semiconductor Device Metal-Insulator-Semiconductor Contacts with Interface Layers and Methods for Forming the Same | 06-23-2016 |
| 20160181386 | SEMICONDUCTOR DEVICE WITH AN INTERCONNECT STRUCTURE AND METHOD FOR FORMING THE SAME | 06-23-2016 |
| 20160181392 | PARTIAL SPACER FOR INCREASING SELF ALIGNED CONTACT PROCESS MARGINS | 06-23-2016 |
| 20160190064 | SEMICONDUCTOR DEVICE WITH SELF-PROTECTING FUSE AND METHOD OF FABRICATING THE SAME - A semiconductor device with the metal fuse is provided. The metal fuse connects an electronic component (e.g., a transistor) and a existing dummy feature which is grounded. The protection of the metal fuse can be designed to start at the beginning of the metallization formation processes. The grounded dummy feature provides a path for the plasma charging to the ground during the entire back end of the line process. The metal fuse is a process level protection as opposed to the diode, which is a circuit level protection. As a process level protection, the metal fuse protects subsequently-formed circuitry. In addition, no additional active area is required for the metal fuse in the chip other than internal dummy patterns that are already implemented. | 06-30-2016 |
| 20160190251 | FINFET CONFORMAL JUNCTION AND HIGH EPI SURFACE DOPANT CONCENTRATION METHOD AND DEVICE - A method of forming a source/drain region with an abrupt, vertical and conformal junction and the resulting device are disclosed. Embodiments include forming a gate electrode over and perpendicular to a semiconductor fin; forming first spacers on opposite sides of the gate electrode; forming second spacers on opposite sides of the fin; forming a cavity in the fin adjacent the first spacers, between the second spacers; partially epitaxially growing source/drain regions in each cavity; implanting a first dopant into the partially grown source/drain regions with an optional RTA thereafter; epitaxially growing a remainder of the source/drain regions in the cavities, in situ doped with a second dopant; and implanting a third dopant in the source/drain regions. | 06-30-2016 |
| 20160190280 | STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE WITH GATE STACK - Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a semiconductor substrate and a gate electrode over the semiconductor substrate. The semiconductor device structure also includes a source/drain structure adjacent to the gate electrode. The semiconductor device structure further includes a spacer element over a sidewall of the gate electrode, and the spacer element has an upper portion having a first exterior surface and a lower portion having a second exterior surface. Lateral distances between the first exterior surface and the sidewall of the gate electrode are substantially the same. Lateral distances between the second exterior surface and the sidewall of the gate electrode increase along a direction from a top of the lower portion towards the semiconductor substrate. | 06-30-2016 |
| 20160196973 | REDUCED EXTERNAL RESISTANCE FINFET DEVICE | 07-07-2016 |
| 20160197023 | SEMICONDUCTOR DEVICE | 07-07-2016 |
| 20160197175 | Semiconductor Device Structure and Method of Forming Same | 07-07-2016 |
| 20160204211 | SELF-LIMITING SILICIDE IN HIGHLY SCALED FIN TECHNOLOGY | 07-14-2016 |
| 20160204218 | SEMICONDUCTOR STRUCTURE COMPRISING AN ALUMINUM GATE ELECTRODE PORTION AND METHOD FOR THE FORMATION THEREOF | 07-14-2016 |
| 20160204221 | BOTTOM-UP METAL GATE FORMATION ON REPLACEMENT METAL GATE FINFET DEVICES | 07-14-2016 |
| 20160204244 | SEMICONDUCTOR DEVICE AND METHOD OF MAKING SAME | 07-14-2016 |
| 20160204256 | METHODS OF FORMING DISLOCATION ENHANCED STRAIN IN NMOS STRUCTURES | 07-14-2016 |
| 20160254207 | Directional Heat Dissipation Assembly and Method | 09-01-2016 |
| 20160254348 | SEMICONDUCTOR DEVICES HAVING TAPERED ACTIVE REGIONS | 09-01-2016 |
| 20160254352 | REDUCED CURRENT LEAKAGE SEMICONDUCTOR DEVICE | 09-01-2016 |
| 20160379882 | PARTIAL SPACER FOR INCREASING SELF ALIGNED CONTACT PROCESS MARGINS - A semiconductor structure is provided. The semiconductor includes a gate stack on a substrate. The semiconductor includes a first set of sidewall spacers on opposite sidewalls of the gate stack. The semiconductor includes a flowable dielectric layer on the substrate, covering at least a portion of the first set of sidewall spacers. The semiconductor includes a second set of sidewall spacers next to the first set of sidewall spacers covering an upper portion thereof, the second set of sidewall spacers are directly on top of the flowable dielectric layer. The semiconductor includes a contact next to at least one of the second set of sidewall spacers. | 12-29-2016 |
| 20160379925 | STABLE CONTACT ON ONE-SIDED GATE TIE-DOWN STRUCTURE - After forming a first contact opening to expose a portion of a first source/drain contact located at one side of a functional gate structure followed by forming a second contact opening that intersects the first contact opening to expose the functional gate structure and a portion of a second source/drain contact located at an opposite side of the functional gate structure, the exposed portions of the first source/drain contact and the second-side source/drain contact are recessed. A dielectric cap is subsequently formed over the recessed portion of the second source/drain contact. A shared contact is formed in the first contact opening and the second contact opening to electrically connect a gate conductor of the functional gate structure to the first source/drain contact. The dielectric cap isolates the second source/drain contact from the shared contact, thus preventing contact shorts in a one-sided gate tie-down structure for 7 nm node and beyond. | 12-29-2016 |
| 20170237342 | SWITCHED-CAPACITOR DC-TO-DC CONVERTERS AND METHODS OF FABRICATING THE SAME | 08-17-2017 |
| 20190147948 | ENHANCED FDSOI PHYSICALLY UNCLONABLE FUNCTION | 05-16-2019 |
| 20190148152 | METHOD OF FORMING SEMICONDUCTOR DEVICE USING TITANIUM-CONTAINING LAYER AND DEVICE FORMED | 05-16-2019 |
| 20190148163 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | 05-16-2019 |
| 20190148231 | MOS TRANSISTOR FOR SUPPRESSING GENERATION OF PHOTO-INDUCED LEAKAGE CURRENT IN ACTIVE CHANNEL REGION AND APPLICATION THEREOF | 05-16-2019 |
| 20190148237 | METHOD OF FORMING MULTI-THRESHOLD VOLTAGE DEVICES USING DIPOLE-HIGH DIELECTRIC CONSTANT COMBINATIONS AND DEVICES SO FORMED | 05-16-2019 |
| 20190148487 | SEMICONDUCTOR DEVICE INCLUDING PARTITIONING LAYER EXTENDING BETWEEN GATE ELECTRODE AND SOURCE ELECTRODE | 05-16-2019 |
| 20190148499 | DEVICE WITH PHOSPHORENE AND FABRICATION THEREOF | 05-16-2019 |
| 20190148501 | Integrated Circuit with Sidewall Spacers for Gate Stacks | 05-16-2019 |
| 20190148512 | III-V FINFET TRANSISTOR WITH V-GROOVE S/D PROFILE FOR IMPROVED ACCESS RESISTANCE | 05-16-2019 |
| 20190148517 | TRANSISTORS WITH OXIDE LINER IN DRIFT REGION | 05-16-2019 |
| 20190148528 | Epitaxial Structures for Fin-Like Field Effect Transistors | 05-16-2019 |
| 20190148557 | SEMICONDUCTOR STRUCTURE INCLUDING LOW-K SPACER MATERIAL | 05-16-2019 |
| 20220139801 | SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF - A semiconductor structure is provided. The semiconductor structure includes: a fin heat-dissipation region on a substrate; a fin channel part on the fin heat-dissipation region, and an isolation structure on the substrate. A width of the fin channel part is smaller than a width of the fin heat-dissipation region. A top surface of the isolation structure is coplanar with a top surface of the fin heat-dissipation region. | 05-05-2022 |
| 20220139914 | Semiconductor Device with Gate Isolation Structure and Method for Forming the Same - Semiconductor structures and the manufacturing method thereof are disclosed. An exemplary manufacturing method includes providing a workpiece including a substrate, an isolation feature over the substrate, a first fin-shaped structure protruding through the isolation feature, and a second fin-shaped structure protruding through the isolation feature, forming a dielectric fin between the first and second fin-shaped structures, and forming first and second gate structures over the first and second fin-shaped structures, respectively. The exemplary manufacturing method also includes etching the isolation feature from the backside of the workpiece to from a trench exposing the dielectric fin, etching the dielectric fin from the backside of the workpiece to form an extended trench, and depositing a seal layer over the extended trench. The seal layer caps an air gap between the first and second gate structures. | 05-05-2022 |
| 20220140078 | Nano-Sheet-Based Devices with Asymmetric Source and Drain Configurations - A device includes a semiconductor substrate, a source feature and a drain feature over the semiconductor substrate, a stack of semiconductor layers interposed between the source feature and the drain feature, a gate portion, and an inner spacer of a dielectric material. The gate portion is between two vertically adjacent layers of the stack of semiconductor layers and between the source feature and the drain feature. Moreover, the gate portion has a first sidewall surface and a second sidewall surface opposing the first sidewall surface. The inner spacer is on the first sidewall surface and between the gate portion and the drain feature. The second sidewall surface is in direct contact with the source feature. | 05-05-2022 |
| 20220140083 | OXIDE SEMICONDUCTOR FILM AND SEMICONDUCTOR DEVICE - A first raw material solution containing at least aluminum is atomized to generate first atomized droplets and a second raw material solution containing at least gallium and a dopant is atomized to generate second atomized droplets, and subsequently, the first atomized droplets are carried into a film forming chamber using a first carrier gas and the second atomized droplets are carried into the film forming chamber using a second carrier gas, and then the first atomized droplets and the second atomized droplets are mixed in the film forming chamber, and the mixed atomized droplets are thermally reacted in the vicinity of a surface of the base to form an oxide semiconductor film on the base, the oxide semiconductor film including, as a major component, a metal oxide containing at least aluminum and gallium, wherein the oxide semiconductor film has a mobility of no less than 5 cm | 05-05-2022 |
| 20220140092 | FIELD-PLATE TRENCH FET AND ASSOCIATED METHOD FOR MANUFACTURING - A field-plate trench FET having a drain region, an epitaxial layer, a source region, a gate conductive layer formed in a trench, a field-plate dielectric layer formed on vertical sidewalls of the trench, a well region formed below the trench, a source contact and a gate contact. When the well region is in direct physical contact with the gate conductive layer, the field-plate trench FET can be used as a normally-on device working depletion mode, and when the well region is electrically isolated from the gate conductive layer by the field-plate layer, the field-plate trench FET can be used as a normally-off device working in an accumulation-depletion mode. | 05-05-2022 |
| 20220140093 | FIELD-PLATE TRENCH FET AND ASSOCIATED METHOD FOR MANUFACTURING - A field-plate trench FET having a drain region, an epitaxial layer, a source region, a gate conductive layer formed in a trench, a field-plate dielectric layer formed on vertical sidewalls of the trench, a well region formed below the trench, a source contact and a gate contact. When the well region is in direct physical contact with the gate conductive layer, the field-plate trench FET can be used as a normally-on device working depletion mode, and when the well region is electrically isolated from the gate conductive layer by the field-plate layer, the field-plate trench FET can be used as a normally-off device working in an accumulation-depletion mode. | 05-05-2022 |
| 20220140115 | Metal Gate Patterning Process and Devices Thereof - A method of fabricating a device includes providing a fin extending from a substrate, the fin having a plurality of semiconductor layers and a first distance between each adjacent semiconductor layers. The method further includes providing a dielectric fin extending from the substrate where the dielectric fin is adjacent to the plurality of semiconductor layers and there is a second distance between an end of each of the semiconductor layers and a first sidewall of the dielectric fin. The second distance is greater than the first distance. Depositing a dielectric layer over the semiconductor layers and over the first sidewall of the dielectric fin. Forming a first metal layer over the dielectric layer on the semiconductor layers and on the first sidewall of the dielectric fin, wherein portions of the first metal layer disposed on and interposing adjacent semiconductor layers are merged together. Finally removing the first metal layer. | 05-05-2022 |
| 20220140116 | JUNCTION FIELD EFFECT TRANSISTOR ON SILICON-ON-INSULATOR SUBSTRATE - A semiconductor device includes a junction field effect transistor (JFET) on a silicon-on-insulator (SOI) substrate. The JFET includes a gate with a first gate segment contacting the channel on a first lateral side of the channel, and a second gate segment contacting the channel on a second, opposite, lateral side of the channel. The first gate segment and the second gate segment extend deeper in the semiconductor layer than the channel. The JFET further includes a drift region contacting the channel, and may include a buried layer having the same conductivity type as the channel, extending at least partway under the drift region. | 05-05-2022 |
| 20220140137 | SEMICONDUCTOR DEVICE - According to one embodiment, a semiconductor device includes: a semiconductor layer including a first plane extending along a plane including a first axis and a second axis; a first electrode extending along the first axis; a second electrode extending along the second axis; and a third electrode above the first plane. The third electrode is electrically coupled to the first electrode and the second electrode, and includes a first portion, a second portion and a third portion. The first portion crosses the first electrode. The second portion crosses |
