| Entries |
| Document | Title | Date |
|---|
| 20080197494 | Semiconductor device including copper wiring and via wiring having length longer than width thereof and method of manufacturing the same - A semiconductor device has an interconnect and a via material. The via material is provided under the interconnect and is in contact with an end portion of the interconnect. The interconnect and the via are made of copper as one piece. The via material has a top surface coupled to a bottom surface of the interconnect. The top surface has a first portion parallel with a longitudinal direction of the interconnect and a second portion parallel with a direction perpendicular to the longitudinal direction, and the first portion is larger than the second portion. | 08-21-2008 |
| 20080197495 | STRUCTURE FOR REDUCING LATERAL FRINGE CAPACITANCE IN SEMICONDUCTOR DEVICES - A semiconductor structure includes a plurality of conductive lines formed within an interlevel dielectric (ILD) layer and a non-planar cap layer formed over the ILD layer and the conductive lines, wherein the cap layer is raised with respect to the conductive lines at locations between the conductive lines. | 08-21-2008 |
| 20080211094 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes an electrode pad formed on a pad forming surface of a semiconductor integrated circuit chip, and a step formed on the pad forming surface to surround the electrode pad. A method of manufacturing the semiconductor device is also disclosed. | 09-04-2008 |
| 20080224313 | Method for forming a seed layer for damascene copper wiring, and semiconductor wafer with damascene copper wiring formed using the method - A method for forming a seed layer for damascene copper wiring is provided. The method comprises the step of forming a seed layer, during damascene copper wiring formation, using an electroless plating solution comprising a water-soluble nitrogen-containing polymer and glyoxylic acid as a reducing agent, wherein the weight-average molecular weight (Mw) of the water-soluble nitrogen-containing polymer is 1,000 to less than 100,000. Preferably, the electroless plating solution further comprises phosphinic acid. | 09-18-2008 |
| 20080237857 | Semiconductor package - There is disclosed a method of making an electronic package ( | 10-02-2008 |
| 20080265414 | Electrically Conductive Composite - The present invention provides a conductive composite comprising: suspension matrix, metal nanoparticles suspended within the suspension matrix, wherein the conductive composite has a conductivity greater than 104 S cm | 10-30-2008 |
| 20080277787 | METHOD AND PAD DESIGN FOR THE REMOVAL OF BARRIER MATERIAL BY ELECTROCHEMICAL MECHANICAL PROCESSING - A method and apparatus for processing barrier and metals disposed on a substrate in an electrochemical mechanical planarizing system are provided. In certain embodiments a method for electroprocessing a substrate is provided. The method comprises contacting the substrate with the non-conductive surface of a polishing pad assembly, establishing a first electrically conductive path through an electrolyte between an exposed layer of barrier material and a first electrode, establishing a second electrically conductive path through the electrolyte between the exposed layer of barrier material and a second electrode, applying a voltage to the first electrode to cause a voltage drop between the substrate and the second electrode, and removing the barrier material from the substrate. | 11-13-2008 |
| 20080284019 | CONDUCTOR-DIELECTRIC STRUCTURE AND METHOD FOR FABRICATING - A conductor-dielectric interconnect structure is fabricated by providing a structure comprising a dielectric layer having a patterned feature therein; depositing a plating seed layer on the dielectric layer in the patterned feature; depositing a sacrificial seed layer on the plating seed layer in the via; reducing the thickness of the sacrificial seed layer by reverse plating; and plating a conductive metal on the sacrificial seed layer in the patterned feature. Also provided is a dielectric layer having a via therein; a plating seed layer on the dielectric layer in the patterned feature; and a discontinuous sacrificial seed layer located in the patterned feature. | 11-20-2008 |
| 20090020875 | Semiconductor Device and Manufacturing Method Thereof - A semiconductor device is provided. The semiconductor device includes a substrate in which a first interlayer insulation layer having a first via hole and a first trench is formed. The semiconductor device also includes a first via plug and a first metal line respectively formed by filling the first via hole and the first trench with a first metal, a predetermined scratch being formed on the first metal line; and a second via plug a second metal line respectively formed by filling a second via hole and a second trench with a second metal, the second metal lines being separated. | 01-22-2009 |
| 20090032949 | Method of depositing Tungsten using plasma-treated tungsten nitride - Devices structures utilizing, and methods of forming, tungsten interconnects in semiconductor fabrication are disclosed. Tungsten deposition is accomplished by a three-step process that does not require a resistive nucleation material to be deposited prior to bulk tungsten deposition. By treating a tungsten nitride material with a hydrogen plasma, thereby reducing the tungsten nitride to tungsten, the necessity of a resistive nucleation layer is eliminated. Other embodiments describe methods of tungsten deposition requiring a thinner resistive nucleation material (<10 angstroms) than currently known. | 02-05-2009 |
| 20090039511 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device and a method for fabricating the same that includes a drain contact that can prevent bridging between contact metals in metal contact line (M1C) processes. The method includes forming a contact hole extending through an interlayer dielectric film in a space between respective gate electrodes to expose an undercut region, filling the contact hole and the undercut region with a photosensitive material, removing the photosensitive material from the contact hole and then forming a drain contact in the contact hole. | 02-12-2009 |
| 20090057902 | METHOD AND STRUCTURE FOR INCREASED WIRE BOND DENSITY IN PACKAGES FOR SEMICONDUCTOR CHIPS - A semiconductor package provides an IC chip on at least one package substrate and including signal bond pads, ground bond pads and power bond pads. The package substrate includes signal contact pads, ground contact pads and power contact pads which are respectively coupled to signal bond pads, ground bond pads and power bond pads formed on the IC chip. The contact pads are coupled to the associated bond pads by a bonding wire. The bonding wires that connect the power and ground pads have a thickness that is greater than the thickness of the bonding wires that couple the signal pads. The various bond pads on the IC chip may be staggered to provide for enhanced compactness and integration. The package substrates may be a plurality of stacked package substrates. | 03-05-2009 |
| 20090057903 | Semiconductor module, method for manufacturing semiconductor modules, semiconductor apparatus, method for manufacturing semiconductor apparatuses, and portable device - Cost is suppressed and a semiconductor module is made thinner. The semiconductor is of a structure where a semiconductor element is embedded in a recess formed in a wiring substrate. A substrate electrode provided around the recess and an element electrode are electrically connected through a wiring formed integrally with bumps. | 03-05-2009 |
| 20090072398 | INTEGRATED CIRCUIT, CIRCUIT SYSTEM, AND METHOD OF MANUFACTURING - An integrated circuit, a circuit system and method of manufacturing such is disclosed. One embodiment provides a circuit chip including a first contact field on a chip surface; and an insulating layer on the chip surface. The insulating layer includes a flexible material. A contact pillar is coupled to the first contact field and extends from the chip surface through the insulating layer. The contact pillar includes a conductive material. | 03-19-2009 |
| 20090072399 | SEMICONDUCTOR MOUNTING BONDING WIRE - There is provided a bonding wire which does not cause a leaning failure or the like. A semiconductor mounting bonding wire has a breaking elongation of 7 to 20%, and stress at 1% elongation is greater than or equal to 90% of a tensile strength and is less than or equal to 100% thereof. | 03-19-2009 |
| 20090091033 | Fabrication of metal oxide films - A process of fabricating a metal oxide film includes depositing a multiphase, metal-based precursor film comprising the metal and an oxide of the metal on a substrate. The process further includes thermally growing a metal oxide film from the precursor film in a humid atmosphere for a predetermined period of time and at a predetermined temperature. | 04-09-2009 |
| 20090096100 | SEMICONDUCTOR APPARATUS, MANUFACTURING METHOD OF SEMICONDUCTOR APPARATUS, AND JOINT MATERIAL - A die bonding portion is metallically bonded by well-conductive Cu metal powders with a maximum particle diameter of about 15 μm to 200 μm and adhesive layers of Ag, and minute holes are evenly dispersed in a joint layer. With this structure, the reflow resistance of about 260° C. and reliability under thermal cycle test can be ensured without using lead. | 04-16-2009 |
| 20090096101 | BRIDGE FOR SEMICONDUCTOR INTERNAL NODE - A method and apparatus for forming connections within a semiconductor device is disclosed. The semiconductor device incorporates a contact bridge between transistor contacts in close proximity. The contact bridge comprises a plurality of metal pillars each having a lower end in electrical contact with first and second transistor elements, respectively; one or more intermediate metal pillars disposed between and in electrical contact with an upper end of the metal pillars; and one or more separation regions of dielectric disposed below the intermediate metal pillar and between the lower ends of the first and second metal pillars. | 04-16-2009 |
| 20090115059 | GOLD WIRE FOR SEMICONDUCTOR ELEMENT CONNECTION - A gold wire for semiconductor element connection having high strength and bondability. The connection has a limited amount of at least one element selected from calcium and rare earth elements, and a limited amount of at least one element selected from a group consisting of titanium, vanadium, chromium, hafnium, niobium, tungsten, and zirconium. The incorporation of a suitable amount of palladium or beryllium is preferred. The incorporation of calcium and rare earth element can improve the strength and young's modulus of a gold wire, and the incorporation of titanium and the like can reduce a deterioration in the roundness of press-bonded shape of press-bonded balls in the first bonding caused by the incorporation of calcium and rare earth elements. The bonding wire can simultaneously realize mechanical properties and bondability capable of meeting a demand for a size reduction in semiconductor and a reduction in electrode pad pitch. | 05-07-2009 |
| 20090140426 | FLIP CHIP PACKAGE AND METHOD FOR MANUFACTURING THE SAME - A flip chip package includes a substrate and a semiconductor chip. The substrate includes a substrate body, a metal wiring having a terminal part some of which is disposed in the substrate body, a solder resist pattern formed on the substrate body with an opening for exposing the terminal part, and an organic anti-oxidation layer for covering the terminal part. The semiconductor chip has a bump formed through (e.g., penetrates) the organic anti-oxidation layer and is electrically connected to the terminal part. The present invention prevents oxidation of the terminal part and allows easy coupling of a bump of a semiconductor chip and the terminal part of the substrate, since an anti-oxidation layer including an organic matter is formed over a surface of a terminal part including copper which is easily oxidized. | 06-04-2009 |
| 20090140427 | Metal foil interconnection of electrical devices - An electrical assembly ( | 06-04-2009 |
| 20090146302 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - Embodiments relate to a method for manufacturing a semiconductor device, and in particular to a method for manufacturing a semiconductor device capable of simplifying a silicide manufacturing process using a photo resist overhang structure. According to embodiments, a surface is subjected to a monochlorobenzene coating processing to cure the surface of the exposed photo resist so as not to react with developing solution and such a processed photo resist is developed to make the lower of the photo resist in the overhang structure so as to form an accurate pattern according to the clear removal of the oxide film, making it possible to simply manufacture the silicide and the non-silicide without performing an etching process by a subsequent cobalt deposition process. | 06-11-2009 |
| 20090146303 | Flip Chip Interconnection with double post - A packaged microelectronic assembly includes a microelectronic element having a front surface and a plurality of first solid metal posts extending away from the front surface. Each of the first posts has a width in a direction of the front surface and a height extending from the front surface, wherein the height is at least half of the width. There is also a substrate having a top surface and a plurality of second solid metal posts extending from the top surface and joined to the first solid metal posts. | 06-11-2009 |
| 20090184421 | SEMICONDUCTOR DEVICE WITH HIGH RELIABILITY AND MANUFACTURING METHOD THEREOF - A semiconductor device is provided, which includes a substrate, an insulator film formed over the substrate, and plural metal wirings with different widths containing copper as a main component and an impurity which is different from copper. The plural metal wirings includes a first metal wiring having a concentration profile where the concentration of the impurity metal increases from the center part of the stacking direction to the surface and the second metal wiring having a concentration profile where the concentration of the impurity metal decreases from the bottom surface of the stacking direction to the surface. Moreover, the width of the second metal wiring may be larger than the width of the first metal wiring. | 07-23-2009 |
| 20090189280 | Method of Forming a Non Volatile Memory Device - In one embodiment, a method of forming a semiconductor device is disclosed. A high-k dielectric is deposited of over a semiconductor body, and a portion of the high-k dielectric is wet etched an etchant selected from the group consisting of hot phos, piranha, and SC1. | 07-30-2009 |
| 20090189281 | SEMICONDUCTOR PACKAGE AND A METHOD FOR MANUFACTURING THE SAME - A semiconductor package and a method for manufacturing the same capable of supplying power easily without an increase in the number of pads for power supply. The semiconductor package includes a semiconductor chip having a plurality of pads including pads for power supply disposed in a center portion and an internal wiring disposed to be exposed to outside; an insulating film formed on the semiconductor to expose the pads for power supply and the internal wirings; and re-distribution lines formed on the insulating film to connect between the exposed portions of the pads for power supply and the internal wiring. | 07-30-2009 |
| 20090206482 | TOOLING METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICES FABRICATED THEREOF - A tooling method for fabricating semiconductor devices includes identifying two adjacent device lines having a device-to-device spacing width in an active region of a substrate, performing an operation to selectively define a first region as a region between the two adjacent device lines overlapping the active region, forming a first block pattern corresponding to the first region on a photomask when the device-to-device spacing width is equal to a predetermined value, and transferring the first block pattern to the substrate. | 08-20-2009 |
| 20090212430 | CARBON NANOTUBE-BASED CONDUCTIVE CONNECTIONS FOR INTEGRATED CIRCUIT DEVICES - Electrical connection in an integrated circuit arrangement is facilitated with carbon nanotubes. According to various example embodiments, a carbon nanotube material ( | 08-27-2009 |
| 20090236743 | Programmable Resistive RAM and Manufacturing Method - Programmable resistive RAM cells have a resistance that depends on the size of the contacts. Manufacturing methods and integrated circuits for lowered contact resistance are disclosed that have contacts of reduced size. | 09-24-2009 |
| 20090243101 | METHOD FOR FORMING INTERCONNECTION LEVELS OF AN INTEGRATED CIRCUIT - A method for forming interconnection levels of an integrated circuit, including the steps of: (a) forming an interconnection level comprising conductive tracks and vias separated by a porous dielectric material; (b) forming, on the interconnection level, a layer of a non-porous insulating material, said layer comprising openings above portions of porous dielectric material; (c) repeating steps (a) and (b) to obtain the adequate number of interconnection levels; and (d) annealing the structure. | 10-01-2009 |
| 20090243102 | METHOD OF ALIGNING DEPOSITED NANOTUBES ONTO AN ETCHED FEATURE USING A SPACER - A method of forming an aligned connection between a nanotube layer and a raised feature is disclosed. A substrate having a raised feature has spacers formed next to the side of the raised feature. The spacers are etched until the sidewalls of the raised feature are exposed forming a notched feature at the top of the spacers. A patterned nanotube layer is formed such that the nanotube layer overlies the top of the spacer and contacts a side portion of the raised feature in the notched feature. The nanotube layer is then covered with an insulating layer. Then a top portion of the insulating layer is removed to expose a top portion of the etched feature. | 10-01-2009 |
| 20090256258 | SEMICONDUCTOR CHIP WITH INTEGRATED VIA - An integrated circuit with a substrate with a lower and an upper surface is described. A via extends between the upper and the lower surface of the substrate. The via contains a conductive filling material that comprises carbon. | 10-15-2009 |
| 20090273083 | ELECTRICALLY CONDUCTIVE FLUID INTERCONNECTS FOR INTEGRATED CIRCUIT DEVICES - Disclosed are embodiments of an electrically conductive fluid interconnect for coupling an integrated circuit (IC) device to a substrate. The IC device may be coupled to the substrate in a socketless manner or using a socket. The electrically conductive fluid interconnect may include, for example, a metal, an electrically conductive paste, or an electrically conductive polymer material. The fluid may be in a liquid or paste state over at least part of an operating temperature range of the IC device, and in other embodiments the fluid may be in the liquid or paste state at room temperature. Other embodiments are described and claimed. | 11-05-2009 |
| 20090278257 | METHOD TO ASSEMBLE STRUCTURES FROM NANO-MATERIALS - Numerous embodiments of a method to assemble nano-materials on a platform are described. In one embodiment, a nano-material is functionalized with a first bondable group. The functionalized nano-material is disposed on an assembly platform having an electrode to form a first layer. Additional layers of the nano-material may be formed above the first layer to form a semiconductor device. In one embodiment, the nano-material may be a carbon nanotube. | 11-12-2009 |
| 20090294963 | MODULE INCLUDING A SINTERED JOINT - A method comprises applying a paste comprising metal grains, a solvent, and a sintering inhibitor to one of a die and a metal layer. The method comprises evaporating the solvent in the paste and placing the one of the die and the metal layer on the other of the die and the metal layer such that the paste contacts the die and the metal layer. The method comprises applying a force to the one of the die and the metal layer and decomposing the sintering inhibitors to form a sintered joint joining the die to the metal layer. | 12-03-2009 |
| 20090294964 | ELECTRICALLY-CONDUCTIVE INORGANIC COATING, METHOD FOR PRODUCING THE COATING, CIRCUIT BOARD, AND SEMICONDUCTOR APPARATUS - A method for producing an electrically-conductive inorganic coating includes depositing, on a substrate, a coating-precursor containing a plurality of inorganic particles and at least one kind of organic component by a liquid-phase method by using a material-liquid containing the inorganic particles and an organic solvent. The inorganic particles are coated with a dispersant binding to the surfaces of the inorganic particles by chemical bonds that can be broken by oxidation. Further, the method includes oxidizing the coating-precursor at a temperature exceeding 100° C., and that is less than or equal to the pyrolysis initiation temperature of an organic component that has the highest pyrolysis initiation temperature among the at least one kind of organic component and less than or equal to the heat-resistance temperature of the substrate, thereby breaking the chemical bonds to eliminate the dispersant from the surfaces, and decomposing the at least one kind of organic component. | 12-03-2009 |
| 20090294965 | Method of Manufacturing A Semiconductor Device - Chipping of semiconductor chips is to be prevented. A semiconductor device comprises a semiconductor chip having a main surface, a plurality of pads formed over the main surface, a rearrangement wiring formed over the main surface to alter an arrangement of the plurality of pads, and a protective film and an insulating film formed over the main surface, and a plurality of solder bumps each connected to the rearrangement wiring and arranged differently from the plurality of pads. The presence of a bevel cut surface obliquely continuous to the main surface and formed on a periphery of the main surface of the semiconductor chip prevents chipping. | 12-03-2009 |
| 20090309220 | ADHESIVE COMPOSITION, CIRCUIT CONNECTING MATERIAL, CONNECTION STRUCTURE OF CIRCUIT MEMBER, AND SEMICONDUCTOR DEVICE - The adhesive composition of the invention comprises a radical generator, a thermoplastic resin and a urethane (meth)acrylate having two or more radical-polymerizing groups in the molecule and a weight-average molecular weight of 3000-30,000. | 12-17-2009 |
| 20090309221 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR - A semiconductor device of this invention has a copper wiring layer, of which a layer, to which a composition including at least one substance selected from the group consisting of ammonia and organic bases is applied, and a silicon-containing insulating film are sequentially superimposed on the copper wiring layer. Accordingly, semiconductor devices having insulating layers which adheres well to the copper serving as the wiring material can be obtained. | 12-17-2009 |
| 20090321930 | SEMICONDUCTOR WITH BOTTOM-SIDE WRAP-AROUND FLANGE CONTACT - A packaging technique for electronic devices includes wafer fabrication of flexible contacts on the bottom surface of the substrate underneath the active circuit. Inherently reliable contacts suitable for a variety of devices can be formed via a simple fabrication process with good wafer packing density. For one embodiment, a trench is formed from the back of the substrate, exposing an upper conductive layer on the top surface. A standoff is formed on the bottom surface of the substrate. A lower conductive layer is formed that runs from and electrically connects with the exposed portion of the upper conductive layer onto the substrate standoff. The standoff is removed, releasing the formed conductors, resulting in a flexible contact. | 12-31-2009 |
| 20090321931 | Semiconductor device and method of manufacturing the same - A semiconductor device and a method of manufacturing the semiconductor device maintain an insulating distance between contact plugs and wiring lines formed on the contact plugs by using an etch mask pattern for forming contact holes. The device comprises a substrate comprising a plurality of conductive areas; an inter-layer insulating layer on the substrate having a plurality of contact holes through which the conductive areas are exposed; a first insulating layer covering the top surface of the inter-layer insulating layer; a plurality of contact plugs respectively connected to the plurality of conductive areas through the plurality of contact holes, the plurality of contact plugs having top surfaces a distance from each of which to a top surface of the substrate is less than a distance from the top surface of the inter-layer insulating layer to the top surface of the substrate; a plurality of ring-shaped insulating spacers covering inner sidewalls of the inter-layer insulating layer, inner sidewalls of the first insulating layer, and outer edge areas of top surfaces of the contact plugs so as to expose center areas of the top surfaces of the contact plugs in the contact holes; and a plurality of wiring lines above the first insulating layer and on the insulating spacers and respectively electrically connected to the plurality of contact plugs. | 12-31-2009 |
| 20100007020 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes: an insulating film including a porous insulating material and formed above a substrate; an interconnection wire including copper and buried in a groove formed at least in an obverse surface of the insulating film; and a barrier insulating film including an insulating material containing a nitrogen heterocyclic compound and formed over the insulating film and the interconnection wire. | 01-14-2010 |
| 20100013095 | SEMICONDUCTOR DEVICE, PRODUCTION METHOD FOR THE SAME, AND SUBSTRATE - A semiconductor device is provided in which a semiconductor chip is bonded to a substrate with a sufficiently increased bonding strength and cracking is assuredly prevented which may otherwise occur due to heat shock, heat cycle and the like. The semiconductor device includes a semiconductor chip and a substrate having a bonding area to which the semiconductor chip is bonded via a metal layer. The metal layer includes an Au—Sn—Ni alloy layer and a solder layer provided on the Au—Sn—Ni alloy layer. Undulations are formed in an interface between the Au—Sn—Ni alloy layer and the solder layer. | 01-21-2010 |
| 20100013096 | Cu-Mn Alloy Sputtering Target and Semiconductor Wiring - Proposed is a Cu—Mn alloy sputtering target, wherein the Mn content is 0.05 to 20 wt %, the total amount of Be, B, Mg, Al, Si, Ca, Ba, La, and Ce is 500 wtppm or less, and the remainder is Cu and unavoidable impurities. Specifically, provided are a copper alloy wiring for semiconductor application, a sputtering target for forming this wiring, and a manufacturing method of a copper alloy wiring for semiconductor application. The copper alloy wiring itself for semiconductor application is equipped with a self-diffusion suppression function for effectively preventing the contamination around the wiring caused by the diffusion of active Cu, improving electromigration (EM) resistance, corrosion resistance and the like, enabling and facilitating the arbitrary formation of a barrier layer, and simplifying the deposition process of the copper alloy wiring for semiconductor application. | 01-21-2010 |
| 20100019385 | Implementing Reduced Hot-Spot Thermal Effects for SOI Circuits - Methods and structures are provided for implementing reduced hot spot thermal effects for silicon-on-insulator (SOI) circuits. A silicon-on-insulator (SOI) structure includes a silicon substrate layer, a thin buried oxide (BOX) layer carried by the silicon substrate layer, an active layer carried by the thin BOX layer, and a pad oxide layer carried by the active layer. A thermal conductive path is built to reduce thermal effects of a hotspot area in the active layer and extends from the active layer to the backside of the SOI structure. A trench etched from the topside to the active layer, and is filled with a thermal connection material. A thermal connection from a backside of the SOI structure includes an opening etched into the silicon substrate layer from the backside and filled with a thermal connection material. | 01-28-2010 |
| 20100052166 | Sandwiched metal structure silicidation for enhanced contact - Embodiments of an apparatus and methods for forming enhanced contacts using sandwiched metal structures are generally described herein. Other embodiments may be described and claimed. | 03-04-2010 |
| 20100059887 | SEMICONDUCTOR DEVICE HAVING INSULATING FILM WITH SURFACE MODIFICATION LAYER AND METHOD FOR MANUFACTURING THE SAME - Provided is a semiconductor device, which includes an interlayer insulating film formed on a semiconductor substrate, a wiring layer filled in a recess formed in the interlayer insulating film, and a cap insulating film. The interlayer insulating film includes a first SiOCH film and a surface modification layer including an SiOCH film formed by modifying a surface layer of the first SiOCH film, the SiOCH film having a lower carbon concentration and a higher oxygen concentration than the first SiOCH film has. The cap insulating film contacts with surfaces of the metal wiring and the surface modification layer. | 03-11-2010 |
| 20100059888 | Mask ROM and method of fabricating the same - A mask read-only memory (ROM) includes a dielectric layer formed on a substrate and a plurality of first conductive lines formed on the dielectric layer. A plurality of diodes are formed in the first conductive lines, and a plurality of final vias are formed for a first set of the diodes each representing a first type of memory cell, with no final via being formed for a second set of diodes each representing a second type of memory cell. Each of a plurality of second conductive lines is formed over a column of the diodes. | 03-11-2010 |
| 20100078814 | SYSTEM AND METHOD FOR USING POROUS LOW DIELECTRIC FILMS - A system and method for manufacturing a semiconductor device including a low dielectric constant porous material layer. Ions are implanted into the low dielectric constant porous material layer which thereby provides the porous material layer with sufficient mechanical strength for withstanding semiconductor manufacturing processes. The ions implanted in the porous material layer further facilitate disposition of a conductive layer on the porous material layer. | 04-01-2010 |
| 20100078815 | Ruthenium interconnect with high aspect ratio and method of fabrication thereof - An electrically conductive interconnect is provided through an opening in a dielectric layer, electrically connecting two conductive layers. In one embodiment, the interconnect is formed by ruthenium entirely filling the opening in the dielectric layer. In another embodiment, an adhesion layer of titanium is provided in the opening prior to providing the ruthenium. In using this approach, an aspect ratio (i.e., the ratio of the length of the interconnect to the width thereof) of 20:1 or greater is achievable. | 04-01-2010 |
| 20100090340 | Drawn Dummy FeCAP, Via and Metal Structures - An integrated circuit containing hydrogen permeable dummy vias configured in a linear or rectangular array and symmetrically positioned over a component in the integrated circuit. An integrated circuit containing matching components with identical layouts and hydrogen permeable dummy vias in identical configurations over the matching components. A process of forming an integrated circuit containing matching components with identical layouts and hydrogen permeable dummy vias in identical configurations over the matching components. | 04-15-2010 |
| 20100123248 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes: an electrode pad; a wiring line electrically coupled to the electrode pad, the wiring line being formed by disposing and drying a droplet of a conductive ink in which metal fine particles are dispersed in a dispersion medium; an intermediate layer of an bonded layer of the metal fine particles on a surface of the electrode pad; and a liquid repellent layer that includes a liquid repellent material repelling the dispersion medium and is layered on the intermediate layer to cover the intermediate layer. In the device, the wiring line is physically coupled to the electrode pad with the liquid repellent layer and the intermediate layer interposed between the wiring line and the electrode pad. | 05-20-2010 |
| 20100133689 | COPPER (I) COMPOUNDS USEFUL AS DEPOSITION PRECURSORS OF COPPER THIN FILMS - Copper (I) amidinate precursors for forming copper thin films in the manufacture of semiconductor devices, and a method of depositing the copper (I) amidinate precursors on substrates using chemical vapor deposition or atomic layer deposition processes. | 06-03-2010 |
| 20100140802 | FILM FORMING METHOD AND FILM FORMING APPARATUS - On a surface of an object to be treated, a Mn-containing thin film or CuMn-containing alloy thin film is formed by heat treatment (CVD or ALD) by using a Mn-containing source gas (or Mn-containing source gas and a Cu-containing gas) and an oxygen-containing gas (for instance, water vapor) as a processing gas. The Mn-containing thin film or the CuMn-containing alloy thin film can be formed with high step coverage in a fine recess formed on the surface of the object to be treated. | 06-10-2010 |
| 20100155947 | SOLDER JOINTS WITH ENHANCED ELECTROMIGRATION RESISTANCE - Electronic assemblies and solders used in electronic assemblies are described. One embodiment includes a die and a substrate, with a solder material positioned between the die and the substrate, the solder comprising at least 91 weight percent Sn, 0.4 to 1.0 weight percent Cu and at least one dopant selected from the group consisting of Ag, Bi, P, and Co. Other embodiments are described and claimed. | 06-24-2010 |
| 20100155948 | TOOLING METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICES FABRICATED THEREOF - A tooling method for fabricating semiconductor devices includes identifying two adjacent device lines having a device-to-device spacing width in an active region of a substrate, performing an operation to selectively define a first region as a region between the two adjacent device lines overlapping the active region, forming a first block pattern corresponding to the first region on a photomask when the device-to-device spacing width is equal to a predetermined value, and transferring the first block pattern to the substrate. | 06-24-2010 |
| 20100164102 | Isolated germanium nanowire on silicon fin - The present invention describes a method of and an apparatus for providing a wafer, the wafer including Silicon; etching trenches in the wafer to form Silicon fins; filling Silicon Oxide in the trenches; planarizing the Silicon Oxide; recessing the Silicon Oxide to a first thickness to form exposed Silicon pedestals from the Silicon fins; depositing SiGe over the exposed Silicon pedestal; recessing the Silicon Oxide to a second thickness; undercutting the exposed Silicon pedestals to form necked-in Silicon pedestals; oxidizing thermally and annealing the SiGe; and forming Germanium nanowires. | 07-01-2010 |
| 20100171218 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a first substrate formed with a through silicon via reaching the back surface thereof, and a second substrate electrically connected to the first substrate via the through silicon via, and bonded to the back surface of the first substrate. A taper angle of a sidewall of a tip end portion of the through silicon via connected to the second substrate is larger than a taper angle of a sidewall of the other portion thereof. | 07-08-2010 |
| 20100193951 | METAL PRECURSORS FOR DEPOSITION OF METAL-CONTAINING FILMS - Compositions and methods for forming a metal-containing thin film on a substrate. A reactor and at least one substrate in the reactor are provided. A metal-containing bis-β-diketiminate precursor is introduced into the reactor. The reactor is maintained at a set temperature and pressure, and the precursor is contacted with the substrate to form a metal-containing film on the substrate. | 08-05-2010 |
| 20100200989 | LINER MATERIALS AND RELATED PROCESSES FOR 3-D INTEGRATION - In some embodiments, a low-k dielectric film liner, preferably comprising benzocyclobutene, is deposited on the sidewalls of through-silicon vias used in three-dimensional (3-D) integration of integrated circuits. A semiconductor workpiece having a via is provided. A dielectric film liner, preferably comprising benzocyclobutene, is deposited on the sidewalls of the via by chemical vapor deposition. Following the deposition of the dielectric film liner, conductive material is deposited into the via. The conductive material on the bottom of the via can be exposed by thinning the back of the semiconductor workpiece, thereby forming a through-silicon via. The semiconductor workpiece can form a stack with one or more additional semiconductor workpieces having vias filled with conductive material to form a 3-D integrated circuit. The conductive material electrically interconnects the integrated circuits at different levels of the stack. | 08-12-2010 |
| 20100200990 | MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCED THEREWITH - A semiconductor device (having an interlayer insulating film) which is sufficiently low in the dielectric constant and high in the mechanical strength is provided. | 08-12-2010 |
| 20100224994 | Low Temperature Metal to Silicon Diffusion and Silicide Wafer Bonding - A method of bonding two members includes forming a metal pad on a first member and a silicon pad on the second member, and coupling the pads at a temperature and pressure that will not damage features of the members, such as integrated circuitry or MEMS devices, but is sufficient to form a silicide bond. In various embodiments, the metal may be nickel and the silicon may be polysilicon. | 09-09-2010 |
| 20100230813 | Semiconductor Constructions and Methods of Forming Layers - The invention includes methods of forming layers conformally over undulating surface topographies associated with semiconductor substrates. The undulating surface topographies can first be exposed to one or more of titanium oxide, neodymium oxide, yttrium oxide, zirconium oxide and vanadium oxide to treat the surfaces, and can be subsequently exposed to a material that forms a layer conformally along the treated surfaces. The material can, for example, comprise one or both of aluminum silane and aluminum silazane. The invention also includes semiconductor constructions having conformal layers formed over liners containing one or more of titanium oxide, yttrium oxide, zirconium oxide and vanadium oxide. | 09-16-2010 |
| 20100237499 | SEMICONDUCTOR DEVICE, AND STACKED STRUCTURE, PACKAGE, MODULE, AND ELECTRONIC APPARATUS INCLUDING THE SAME, AND METHOD OF FABRICATING THE SAME - Semiconductor devices, as well as stacked structures, packages, modules, and electronic apparatus including the semiconductor device, and methods of fabricating the same. The semiconductor device includes a circuit layer on a substrate, a metal interconnection layer on the circuit layer, the metal interconnection layer having a copper interconnection and a protection layer, a first and a second through silicon via plugs vertically penetrating the circuit layer, a first via pad on the first through silicon via plug, and a second via pad on the second through silicon via plug, wherein the first via pad is electrically connected to the copper interconnection, and wherein the second via pad is electrically insulated from the copper interconnection. | 09-23-2010 |
| 20100244247 | VIA STRUCTURE AND VIA ETCHING PROCESS OF FORMING THE SAME - A via etching process forms a through-substrate via having a round corner and a tapered sidewall profile. A method includes providing a semiconductor substrate; forming a hard mask layer and a patterned photoresist layer on the semiconductor substrate; forming an opening in the hard mask and exposing a portion of the semiconductor substrate; forming a via passing through at least a part of the of semiconductor substrate using the patterned photoresist layer and hard mask layer as a masking element; performing a trimming process to round the top corner of the via; and removing the photoresist layer. | 09-30-2010 |
| 20100244248 | NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - A nonvolatile memory device, includes: a lower side electrode aligned in a first direction; an upper side electrode positioned above the lower side electrode and aligned in a second direction intersecting the first direction; and a memory unit provided between the lower side electrode and the upper side electrode. At least one selected from the lower side electrode and the upper side electrode includes a first electrode and a second electrode, the first electrode having a forward-tapered side wall, the second electrode having a reverse-tapered side wall and being adjacent to the first electrode via an insulating layer in substantially identical plane. | 09-30-2010 |
| 20100244249 | SEMICONDUCTOR PACKAGE - A semiconductor package includes a semiconductor die attached to a support having electrically conductive paths, the semiconductor die having a bond-pad electrically connected to the electrically a conductive path on the support by a wire-bond of a first metallic composition, the wire-bond and the bond-pad being coated with a protection layer of a second metallic composition. | 09-30-2010 |
| 20100244250 | SEMICONDUCTOR INTEGRATED CIRCUIT, MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE USING SEMICONDUCTOR INTEGRATED CIRCUIT - A step of forming a through hole in a semiconductor substrate, or a step of polishing the semiconductor substrate from its back surface requires a very long time and causes decrease of productivity. In addition, when semiconductor substrates are stacked, a semiconductor integrated circuit which is formed of the stack is thick and has poor mechanical flexibility. A release layer is formed over each of a plurality of substrates, layers each having a semiconductor element and an opening for forming a through wiring are formed over each of the release layers. Then, layers each having the semiconductor element are peeled off from the substrates, and then overlapped and stacked, a conductive layer is formed in the opening, and the through wiring is formed; thus, a semiconductor integrated circuit is formed. | 09-30-2010 |
| 20100244251 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a first semiconductor chip, an electrode pad formed in an upper surface portion of the first semiconductor chip, a second semiconductor chip formed on the first semiconductor chip, and a through-via formed in the second semiconductor chip. A hollowed portion is formed in the electrode pad, and a bottom portion of the through-via is embedded in the hollowed portion. | 09-30-2010 |
| 20100252927 | Pattern-Print Thin-Film Transistors with Top Gate Geometry - A self-aligned, thin-film, top-gate transistor and method of manufacturing same are disclosed. A first print-patterned mask is formed over a metal layer by digital lithography, for example by printing with a phase change material using a droplet ejector. The metal layer is then etched using the first print-patterned mask to form source and drain electrodes. A semiconductive layer and an insulative layer are formed thereover. A layer of photosensitive material is then deposited and exposed through the substrate, with the source and drain electrodes acting as masks for the exposure. Following development of the photosensitive material, a gate metal layer is deposited. A second print-patterned mask is then formed over the device, again by digital lithography. Etching and removal of the photosensitive material leaves the self-aligned top-gate electrode. | 10-07-2010 |
| 20100283152 | INTEGRATED CIRCUITS INCLUDING ILD STRUCTURE, SYSTEMS, AND FABRICATION METHODS THEREOF - An integrated circuit includes a gate of a transistor disposed over a substrate. A connecting line is disposed over the substrate. The connecting line is coupled with an active area of the transistor. A level difference between a top surface of the connecting line and a top surface of the gate is about 400 Å or less. A via structure is coupled with the gate and the connecting line. A metallic line structure is coupled with the via structure. | 11-11-2010 |
| 20100289143 | METHOD FOR PRODUCING LOW-k FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME - Hydrophobicity of a low dielectric constant film comprising a porous silica film is improved by applying a raw material for forming a porous silica film onto a substrate, and performing vapor-phase transport treatment to expose the substrate to an atmosphere of organic amine vapor to which no water is added. Simultaneously, reduction in a dielectric constant, reduction in leakage current, and improvement in mechanical strength are attained by controlling a pore diameter in a predetermined range. | 11-18-2010 |
| 20100301478 | Substrate Having a Coating Comprising Copper and Method for the Production Thereof by Means of Atomic Layer Deposition - A method can be used for the production of a coated substrate. The coating contains copper. A copper precursor and a substrate are provided. The copper precursor is a copper(I) complex which contains no fluorine. A copper-containing layer is deposited by means of atomic layer deposition (ALD) at least on partial regions of the substrate surface by using the precursor. Optionally, a reduction step is performed in which a reducing agent acts on the substrate obtained in the layer deposition step. In various embodiments, the precursor is a complex of the formula L | 12-02-2010 |
| 20100308462 | GLASS COMPOSITIONS USED IN CONDUCTORS FOR PHOTOVOLTAIC CELLS - The invention relates to glass compositions useful in conductive pastes for silicon semiconductor devices and photovoltaic cells. The thick film conductor compositions include one or more electrically functional powders and one or more glass frits dispersed in an organic medium. The thick film compositions may also include one or more additive(s). Exemplary additives may include metals, metal oxides or any compounds that can generate these metal oxides during firing. | 12-09-2010 |
| 20100314762 | Semiconductor Substrate with Through-Contact and Method for Production Thereof - The interlayer connection of the substrate is formed by a contact-hole filling ( | 12-16-2010 |
| 20100314763 | INTEGRATED CIRCUIT SYSTEM EMPLOYING LOW-K DIELECTRICS AND METHOD OF MANUFACTURE THEREOF - A method of manufacture of an integrated circuit system includes: fabricating a substrate having an integrated circuit; applying a low-K dielectric layer over the integrated circuit; forming a via and a trench, in the low-K dielectric layer, over the integrated circuit; forming a structure surface by a chemical-mechanical planarization (CMP) process; and applying a direct implant to the structure surface for forming an implant layer and a metal passivation layer including repairing damage, to the low-K dielectric layer, caused by the CMP process. | 12-16-2010 |
| 20100327443 | JOINING STRUCTURE AND A SUBSTRATE-JOINING METHOD USING THE SAME - The present invention concerns a joining structure and a substrate-joining method using the same. The joining structure comprises a substrate, and comprises a plurality of joining patterns which are located on the said substrate and which are spaced apart from each other. The substrate-joining method using the joining structure can comprise: a stage involving the formation of a plurality of joining patterns which are spaced apart from each other on a first substrate; and a stage of joining a second substrate on the plurality of joining patterns. When the said joining structure is employed, it is possible to reduce or prevent damage due to spreading of the joining substance during joining of the two substrates. | 12-30-2010 |
| 20110006424 | Method of manufacturing semiconductor device - A method of manufacturing a semiconductor device includes forming a plurality of dummy line patterns arranged at a first pitch on an underlying region, forming first mask patterns having predetermined mask portions formed on long sides of the dummy line patterns, each of the first mask patterns having a closed-loop shape and surrounding each of the dummy line patterns, removing the dummy line patterns, forming a second mask pattern having a first pattern portion which covers end portions of the first mask patterns and inter-end portions each located between adjacent ones of the end portions, etching the underlying region using the first mask patterns and the second mask pattern as a mask to form trenches each located between adjacent ones of the predetermined mask portions, and filling the trenches with a predetermined material. | 01-13-2011 |
| 20110012262 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device wherein a semiconductor element made of Si or Si group material mounted on a substrate, the semiconductor element is mounted on the substrate and the semiconductor element is bonded to a silver bonding material via a oxide film formed on the semiconductor element. The bonding material comprising silver oxide particles having an average particle size of 1 nm to 50 nm and an organic reducing agent is used for bonding in air, which gives a high bonding strength to the oxide on the semiconductor element. | 01-20-2011 |
| 20110018134 | Increasing reliability of copper-based metallization structures in a microstructure device by using aluminum nitride - By forming an aluminum nitride layer by a self-limiting process sequence, the interface characteristics of a copper-based metallization layer may be significantly enhanced while nevertheless maintaining the overall permittivity of the layer stack at a lower level. | 01-27-2011 |
| 20110042811 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a semiconductor substrate, electrodes separated from each other and extending from a first main surface in the direction of depth of the semiconductor substrate, and an interconnect portion coupling the electrodes to each other and extending from the first main surface in the direction of depth of the semiconductor substrate without passing through the semiconductor substrate. One of the electrodes is a through electrode passing through the semiconductor substrate to reach a second main surface. For semiconductor devices having through electrodes and vertically stacked on each other, the interconnect portion serves to enhance the degree of design freedom. | 02-24-2011 |
| 20110042812 | Electronic device and method of manufacturing the same - An electronic device includes a power element on a first substrate and an electronic component on a second substrate. The first and second substrates are stacked so that the power element and the electronic component can be located between the first and second substrates. A first end of a first wire is connected to the power element. A second end of the first wire is connected to the first substrate. A middle portion of the first wire projects toward the second substrate. A first end of a second wire is connected to the power element. A second end of the wire extends above a top of the middle portion of the first conductive member and is connected to the second substrate. | 02-24-2011 |
| 20110049713 | DUAL CONTACT METALLIZATION INCLUDING ELECTROLESS PLATING IN A SEMICONDUCTOR DEVICE - Contact elements of sophisticated semiconductor devices may be formed for gate electrode structures and for drain and source regions in separate process sequences in order to apply electroless plating techniques without causing undue overfill of one type of contact opening. Consequently, superior process uniformity in combination with a reduced overall contact resistance may be accomplished. In some illustrative embodiments, cobalt may be used as a contact metal without any additional conductive barrier materials. | 03-03-2011 |
| 20110057314 | CONDUCTORS FOR PHOTOVOLTAIC CELLS - The invention relates to conductive pastes including one or more acids, or acid-forming components for silicon semiconductor devices and photovoltaic cells. | 03-10-2011 |
| 20110068470 | Apparatus For Making Interconnect Seed Layers And Products - An apparatus for depositing seed layers over a substrate, which substrate includes a patterned insulating layer with at least one opening surrounded by a field, and which opening has sidewalls, bottom surfaces and top corners, includes: a CVD chamber adapted to deposit one or more CVD seed layers over the substrate; a PVD chamber adapted to deposit one or more PVD seed layers over the substrate; and a controller which includes recipe information. The recipe information includes deposition sequence and process parameters for operation of the deposition chambers. The controller, in response to the recipe information, causes the CVD chamber to deposit a continuous CVD seed layer over the substrate, and causes the PVD chamber to deposit a PVD seed layer over the substrate, wherein: (a) the continuous CVD seed layer is continuous over the sidewalls and bottom surfaces of the at least one opening, (b) the continuous CVD seed layer has a thickness from about 20 Å to about 250 Å over the field, and (c) the controller causes the stopping of the deposition of the seed layers so as to leave room for electroplating inside the at least one opening. | 03-24-2011 |
| 20110079906 | PRE-PACKAGED STRUCTURE - A pre-packaged structure includes a substrate with a substrate circuit, a die having a core circuit and disposed on the substrate, a passivation selectively covering the core circuit, a buffer metal layer electrically connected to the core circuit and completely covering the passivation and a copper wire bond electrically connected to the buffer metal layer and the substrate circuit. | 04-07-2011 |
| 20110115086 | METAL NONOPARTICLE COMPOSITIONS - Methods and compositions for preparing highly conductive electronic features are disclosed. When organoamine-stabilized silver nanoparticles are exposed to an alkaline composition, the resulting electronic feature is highly conductive. Such methods are particularly advantageous when applied to aged silver nanoparticle compositions. | 05-19-2011 |
| 20110115087 | SELF-ALIGNED LOWER BOTTOM ELECTRODE - A method of fabricating a lower bottom electrode for a memory element and a semiconductor structure having the same includes forming a dielectric layer over a semiconductor substrate having a plurality of conductive contacts formed therein to be connected to access circuitry, forming a dielectric cap layer over exposed portions of the dielectric layer and the conductive contacts, depositing a planarizing material over the dielectric cap layer, etching a via to an upper surface of each conductive contact, removing the planarizing material, depositing electrode material over the dielectric cap layer and within the vias, the electrode material contacting an upper surface of each conductive contact, and planarizing the electrode material to form a lower bottom electrode over each conductive contact. | 05-19-2011 |
| 20110115088 | INTERCONNECT WITH FLEXIBLE DIELECTRIC LAYER - An integrated circuit device has a dual damascene structure including a lower via portion and an upper line portion. The lower via portion is formed in a polyimide layer, and the upper line portion is formed in an inter-metal dielectric (IMD) layer formed of USG or polyimide. A passivation layer is formed on the IMD layer, and a bond pad is formed overlying the passivation layer to electrically connect the upper line portion. | 05-19-2011 |
| 20110115089 | Semiconductor device, production method for the same, and substrate - A semiconductor device is provided in which a semiconductor chip is bonded to a substrate with a sufficiently increased bonding strength and cracking is assuredly prevented which may otherwise occur due to heat shock, heat cycle and the like. The semiconductor device includes a semiconductor chip and a substrate having a bonding area to which the semiconductor chip is bonded via a metal layer. The metal layer includes an Au—Sn—Ni alloy layer and a solder layer provided on the Au—Sn—Ni alloy layer. Undulations are formed in an interface between the Au—Sn—Ni alloy layer and the solder layer. | 05-19-2011 |
| 20110121455 | Semiconductor Devices Having Interconnection Structures - An interconnection structure for a semiconductor device may include lower interconnection patterns disposed in a checker board shape and upper interconnection patterns disposed in a checker board shape and connecting two adjacent lower interconnection patterns to each other. | 05-26-2011 |
| 20110121456 | Techniques for Modular Chip Fabrication - Techniques for modular chip fabrication are provided. In one aspect, a modular chip structure is provided. The modular chip structure comprises a substrate; a carrier platform attached to the substrate, the carrier platform comprising a plurality of conductive vias extending through the carrier platform; and a wiring layer on the carrier platform in contact with one or more of the conductive vias, wherein the wiring layer comprises one or more wiring levels and is configured to divide the carrier platform into a plurality of voltage islands; and chips, chip macros or at least one chip in combination with at least one chip macro assembled on the carrier platform. | 05-26-2011 |
| 20110121457 | Process for Reversing Tone of Patterns on Integrated Circuit and Structural Process for Nanoscale Production - A process to produce an airgap on a substrate having a dielectric layer comprises defining lines by lithography where airgaps are required. The lines' dimensions are shrunk by a trimming process (isotropic etching). The tone of the patterns is reversed by applying a planarizing layer which is etched down to the top of the patterns. The photoresist is removed, leading to sub-lithographic trenches which are transferred into a cap layer and eventually into the dielectric between two metal lines. The exposed dielectric is eventually damaged, and is etched out, leading to airgaps between metal lines. The gap is sealed by the pinch-off occurring during the deposition of the subsequent dielectric. | 05-26-2011 |
| 20110147933 | MULTIPLE SURFACE FINISHES FOR MICROELECTRONIC PACKAGE SUBSTRATES - Multiple surface finishes are applied to a substrate for a microelectronics package by applying a first surface finish to connection pads of a first area of the substrate masking the first area of the substrate without masking a second area of the substrate, applying a second different surface finish to connection pads of the second area of the substrate, and removing the mask. | 06-23-2011 |
| 20110147934 | Metal Plugged Substrates with No Adhesive Between Metal and Polyimide - In a method and apparatus for fabricating a semiconductor device having a flexible tape substrate, a hole is punched in the flexible tape substrate. The flexible tape substrate includes a metal layer attached to a polyimide layer without an adhesive there between. A cover is placed on the metal layer to cap a base of the hole. A metal is deposited on the cover exposed at the base of the hole, the metal being used to form a bond with the metal layer. The metal being deposited causes the hole to be plugged up to a selective height. Upon removal of the cover, the metal may also be deposited on the metal layer to increase a thickness of the metal layer. | 06-23-2011 |
| 20110147935 | METHOD AND SYSTEM FOR BINDING HALIDE-BASED CONTAMINANTS - A method and apparatus are presented for reducing halide-based contamination within deposited titanium-based thin films. Halide adsorbing materials are utilized within the deposition chamber to remove halides, such as chlorine and chlorides, during the deposition process so that contamination of the titanium-based film is minimized. A method for regenerating the halide adsorbing material is also provided. | 06-23-2011 |
| 20110163446 | METHOD TO GENERATE AIRGAPS WITH A TEMPLATE FIRST SCHEME AND A SELF ALIGNED BLOCKOUT MASK AND STRUCTURE - A structure and method to produce an airgap on a substrate having a dielectric layer and copper interconnects with sublithographic perforations therein which are ordered throughout the wafer structure in a macro level and a micro level with no change in order orientation and the top layer of the copper interconnects are not exposed. | 07-07-2011 |
| 20110163447 | High-Purity Copper or High-Purity Copper Alloy Sputtering Target, Process for Manufacturing the Sputtering Target, and High-Purity Copper or High-Purity Copper Alloy Sputtered Film - Provided is a high-purity copper or high-purity copper alloy sputtering target of which the purity is 6N or higher and in which the content of the respective components of P, S, O and C is 1 ppm or less, wherein the number of nonmetal inclusions having a particle size of 0.5 μm or more and 20 μm or less is 30,000 inclusions/g or less. As a result of using high-purity copper or high-purity copper alloy from which harmful inclusions of P, S, C and O system have been reduced as the raw material and controlling the existence form of nonmetal inclusions, the present invention addresses a reduction in the percent defect of wirings of semiconductor device formed by sputtering a high-purity copper target so as to ensure favorable repeatability. | 07-07-2011 |
| 20110169165 | SEMICONDUCTOR DEVICE - A semiconductor device according to the present invention includes a substrate, an IC chip that is fixed over the substrate, a conductor that is disposed over a surface of the substrate, a solder resist that covers the surface of the substrate and the conductor and includes an opening that exposes the conductor in a section corresponding to a fixed surface of the IC chip, and an adhesive that contacts an exposed part of the conductor, in which the exposed part is made by the opening. | 07-14-2011 |
| 20110175224 | BONDED STRUCTURE AND MANUFACTURING METHOD FOR BONDED STRUCTURE - A manufacturing method for a bonded structure, in which a semiconductor device is bonded to an electrode by a bonding portion, the method including: first mounting a solder ball, in which a surface of a Bi ball is coated with Ni plating, on the electrode that is heated to a temperature equal to or more than a melting point of Bi; second pressing the solder ball against the heated electrode, cracking the Ni plating, spreading molten Bi on a surface of the heated electrode, and forming a bonding material containing Bi-based intermetallic compound of Bi and Ni; and third mounting the semiconductor device on the bonding material. | 07-21-2011 |
| 20110186999 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - Hardness of bonding end portions of an external connection terminal to be bonded to circuit patterns of an insulating substrate which is not lower than 90 in Vickers hardness is disclosed. An ultrasonic welding tool is used. In the external connection terminal in which the bonding end portions are provided integrally with a bar, one of the bonding end portion located substantially in the lengthwise center of the bar is first bonded, and the other bonding end portions are bonded alternately in order toward either end. The hardness of the bonding end portions is increased so that strength of the ultrasonic welding portions is increased. Since the external connection terminal including the bonding end portions is bonded in such a manner that the bonding end portion located substantially in the center is first bonded and the other bonding end portions are then bonded in order of increasing distance substantially from the central bonding end portion, displacement of the bonding end portion in either end from its regular position can be suppressed to keep bonding strength high. In this manner, the bonding strength of the ultrasonic welding portions between the external connection terminal and the circuit patterns of the insulating substrate can be increased so that long-term reliability can be secured in a semiconductor device. | 08-04-2011 |
| 20110193230 | FORMATION OF AIR GAP WITH PROTECTION OF METAL LINES - A method is provided for fabricating a microelectronic element having an air gap in a dielectric layer thereof. A dielectric cap layer can be formed which has a first portion overlying surfaces of metal lines, the first portion extending a first height above a height of a surface of the dielectric layer and a second portion overlying the dielectric layer surface and extending a second height above the height of the surface of the dielectric layer, the second height being greater than the first height. After forming the cap layer, a mask can be formed over the cap layer. The mask can have a multiplicity of randomly disposed holes. Each hole may expose a surface of only the second portion of the cap layer which has the greater height. The mask may fully cover a surface of the first portion of the cap layer having the lower height. Subsequently, an etchant can be directed towards the first and second portions of the cap layer to form holes in the cap layer aligned with the holes in the mask. Material can be removed from the dielectric layer where exposed to the etchant by the holes in the cap layer. At such time, the mask can protect the first portion of the cap layer and the metal lines from being attacked by the etchant. | 08-11-2011 |
| 20110198754 | Semiconductor device including porous layer covered by poreseal layer - A method of forming a semiconductor device includes forming a trench on a porous insulating film, placing a chemical material including a structure comprising —Si—O— including vinyl group on a surface of the porous insulating film or in the porous insulating film, and performing polymerization of the chemical material to provide a dielectric film having a density higher than that of porous insulating film on the surface of the trench. The structure may be a structure defined by a formula 1. | 08-18-2011 |
| 20110204516 | SINGLE CHIP SEMICONDUCTOR COATING STRUCTURE AND MANUFACTURING METHOD THEREOF - A manufacturing method of a single chip semiconductor coating structure includes following steps. Step 1 is providing a single chip semiconductor which has a plurality of surfaces, and two opposite surfaces selected from the plurality of surfaces are manufacturing surfaces and have a conductive area with a pad thereon, respectively. Step 2 is providing a tool to cover one of the conductive areas with the pad. Step 3 is providing a coating step to form an insulating layer on the single chip semiconductor. Step 4 is providing a removing step to remove the insulating layer for exposing the covered conductive area and the pad. Step 5 is forming two electrodes and each of the two electrodes covers the conductive area with the pad. | 08-25-2011 |
| 20110241207 | DUMMY SHOULDER STRUCTURE FOR LINE STRESS REDUCTION - Semiconductor integrated circuit line structures for improving a process window in the vicinity of dense-to-isolated pattern transition areas and a technique to implement the line structures in the layout process are described in this disclosure. The disclosed structure includes a semiconductor substrate, and a material layer above the substrate. The material layer has a closely spaced dense line structure, an isolated line structure next to the dense line structure, and a dummy line shoulder structure formed in the vicinity of the dense line and the isolated line structures. One end of the dummy line shoulder structure connects to the isolated line structure and another end extends away from the isolated line structure in an orientation substantially perpendicular to the isolated line structure. | 10-06-2011 |
| 20110241208 | MICROELECTRONIC PACKAGE CONTAINING SILICON CONNECTING REGION FOR HIGH DENSITY INTERCONNECTS, AND METHOD OF MANUFACTURING SAME - A microelectronic package comprises a substrate ( | 10-06-2011 |
| 20110248401 | NANOTUBE-BASED ELECTRODES - Transparent electrodes are manufactured. In accordance with various example embodiments, a transparent electrode is manufactured by generating a solution including a composite material having nanotubes and a conjugated polymer, in which the nanotubes constitute a majority of the composite material by weight. The conjugated polymer is used to disperse the nanotubes in the solution, and the solution is coated onto a substrate to form an electrode including a network of the carbon nanotubes. | 10-13-2011 |
| 20110254163 | SLEEVE INSULATORS AND SEMICONDUCTOR DEVICE INCLUDING THE SAME - A method and structure are disclosed that are advantageous for aligning a contact plug within a bit line contact corridor (BLCC) to an active area of a DRAM that utilizes an insulated sleeve structure. A sleeve insulator layer is deposited in an opening to protect one or more conductor layers from conductive contacts formed in the opening. The sleeve insulator layer electrically insulates a conductive plug from the conductor layer and self-aligns the BLCC so as to improve contact plug alignment tolerances between the BLCC and the capacitor or conductive components. | 10-20-2011 |
| 20110266673 | INTEGRATED CIRCUIT PACKAGE STRUCTURE AND METHOD - An integrated circuit package structure includes an integrated circuit (IC) module, a plastic encapsulation, and input/output pins. The IC includes a substrate configured with signal lines and input/output ports disposed at edges of the substrate, chips, and wires. The chips are mounted on surfaces of the substrate, and the wires connect the chips to the signals lines and the input/output ports. The plastic encapsulation encapsulates the IC module to form an encapsulation body including an upper surface, a lower surface, and side surfaces, and the input/output ports are exposed out of the encapsulation body. The input/output pins are disposed on the side surfaces and at least one of the upper surface and the lower surface of the encapsulation body, and correspondingly leads the input/output ports to the at least one of the upper surface and the lower surface of the encapsulation body. | 11-03-2011 |
| 20110272808 | SEMICONDUCTOR PROCESS AND STRUCTURE - A semiconductor process includes the following steps. Firstly, a conductive substrate is provided. Then, at least one insulating pattern is formed on the conductive substrate. Thereafter at least one metal pattern is formed on the insulating pattern. After that, a passivation layer is formed on the conductive substrate to cover the metal pattern by an electroplating process. | 11-10-2011 |
| 20110272809 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF - A semiconductor structure and a manufacturing method thereof are provided. The method includes the following steps. Firstly, a semiconductor substrate having an active surface and a back surface is provided. The active surface is opposite to the back surface, and the semiconductor substrate includes at least one grounding pad disposed on the active surface. Secondly, at least one through silicon via is formed through the semiconductor substrate from the back surface to the active surface thus exposing the grounding pad. Then, a conductive layer is formed on the back surface of the semiconductor substrate and filled into the through silicon via to electrically connect to the grounding pad and the semiconductor substrate. | 11-10-2011 |
| 20110272810 | STRUCTURE AND METHOD FOR AIR GAP INTERCONNECT INTEGRATION - Methods for producing air gap-containing metal-insulator interconnect structures for VLSI and ULSI devices using a photo-patternable low k material as well as the air gap-containing interconnect structure that is formed are disclosed. More particularly, the methods described herein provide interconnect structures built in a photo-patternable low k material in which air gaps are defined by photolithography in the photo-patternable low k material. In the methods of the present invention, no etch step is required to form the air gaps. Since no etch step is required in forming the air gaps within the photo-patternable low k material, the methods disclosed in this invention provide highly reliable interconnect structures. | 11-10-2011 |
| 20110285019 | TRANSPARENT CONDUCTORS COMPRISING METAL NANOWIRES - A transparent conductor including a conductive layer coated on a substrate is described. More specifically, the conductive layer comprises a network of nanowires which may be embedded in a matrix. The conductive layer is optically transparent and flexible. It can be coated or laminated onto a variety of substrates, including flexible and rigid substrates. | 11-24-2011 |
| 20110285020 | MICROELECTRONIC ASSEMBLY WITH JOINED BOND ELEMENTS HAVING LOWERED INDUCTANCE - A microelectronic assembly includes a semiconductor chip having chip contacts exposed at a first face and a substrate juxtaposed with a face of the chip. A conductive bond element can electrically connect a first chip contact with a first substrate contact of the substrate, and a second conductive bond element can electrically connect the first chip contact with a second substrate contact. The first bond element can have a first end metallurgically joined to the first chip contact and a second end metallurgically joined to the first substrate contact. A first end of the second bond element can be metallurgically joined to the first bond element. The second bond element may or may not touch the first chip contact or the substrate contact. A third bond element can be joined to ends of first and second bond elements which are joined to substrate contacts or to chip contacts. In one embodiment, a bond element can have a looped connection, having first and second ends joined at a first contact and a middle portion joined to a second contact. | 11-24-2011 |
| 20110291276 | MAGNETICALLY SINTERED CONDUCTIVE VIA - The present disclosure relates to the field of fabricating microelectronic packages, wherein microelectronic components of the microelectronic packages may have sintered conductive vias comprising sintered metal and magnetic particles. | 12-01-2011 |
| 20110298131 | Yttrium contacts for germanium semiconductor radiation detectors - A germanium semiconductor radiation detector contact made of yttrium metal. A thin (˜1000 Å) deposited layer of yttrium metal forms a thin hole-barrier and/or electron-barrier contact on both p- and n-type germanium semiconductor radiation detectors. Yttrium contacts provide a sufficiently high hole barrier to prevent measurable contact leakage current below ˜120 K. The yttrium contacts can be conveniently segmented into multiple electrically independent electrodes having inter-electrode resistances greater than 10 GΩ. Germanium semiconductor radiation detector diodes fabricated with yttrium contacts provide good gamma-ray spectroscopy data. | 12-08-2011 |
| 20110309506 | CONDUCTIVE INTERCONNECT STRUCTURES AND FORMATION METHODS USING SUPERCRITICAL FLUIDS - Conductive interconnect structures and formation methods using supercritical fluids are disclosed. A method in accordance with one embodiment of the invention includes forming a via in a substrate, with the via having a width and a length generally transverse to the width, and with a length being approximately 100 microns or more. The method can further include disposing a conductive material in the via while the via is exposed to a supercritical fluid. For example, copper can be disposed in the via by introducing a copper-containing precursor into the supercritical fluid and precipitating the copper from the supercritical fluid. Interconnect structures can be formed using this technique in a single generally continuous process, and can produce conductive structures having a generally uniform grain structure across the width of the via. | 12-22-2011 |
| 20110316158 | METHOD AND SYSTEM FOR THIN MULTI CHIP STACK PACKAGE WITH FILM ON WIRE AND COPPER WIRE - A system and method for a thin multi chip stack package with film on wire and copper wire. The package comprises a substrate and a first die overlying the substrate. Copper wires electrically connect the first die to the substrate. A film overlies the first die and a portion of the copper wires. In addition, the film adheres a second die to the first die. The film also electrically insulates the copper wires from the second die. | 12-29-2011 |
| 20110316159 | CHIP STACK PACKAGE - A chip stack package includes a plurality of chips that are stacked by using adhesive layers as intermediary media, and a through via electrode formed through the chips to electrically couple the chips. The through via electrode is classified as a power supply through via electrode, a ground through via electrode, or a signal transfer through via electrode. The power supply through via electrode and the ground through via electrode are formed of a first material such as copper, and the signal transfer through via electrode is formed of second material such as polycrystalline silicon doped with impurities. The signal transfer through via electrode may have a diametrically smaller cross section than that of each of the power supply through via electrode and the ground through via electrode regardless of their resistivities. | 12-29-2011 |
| 20120038046 | SEMI-CONDUCTOR CHIP WITH COMPRESSIBLE CONTACT STRUCTURE AND ELECTRONIC PACKAGE UTILIZING SAME - A method of forming a compressible contact structure on a semi-conductor chip which comprises bonding a compressible polymer layer to the chip's surface, forming a plurality of openings within the layer, depositing electrically conductive material within the openings to form electrical connections with the chip's contacts, forming a plurality of electrically conductive line elements on the polymer layer extending from a respective opening and each including an end portion, and forming a plurality of contact members each on a respective one of the line segment end portions. The compressible polymer layer allows the contact members to deflect toward (compress) the chip when the contact members are engaged by an external force or forces. A semi-conductor chip including such a compressible contact structure is also provided. | 02-16-2012 |
| 20120038047 | Semiconductor Device and Method of Forming B-Stage Conductive Polymer Over Contact Pads of Semiconductor Die in FO-WLCSP - A semiconductor wafer contains a plurality of semiconductor die with bumps formed over contact pads on an active surface of the semiconductor die. A b-stage conductive polymer is deposited over the contact pads on the semiconductor wafer. The semiconductor wafer is singulated to separate the die. An insulating layer is formed over a carrier with openings formed in the insulating layer. The die is mounted to the carrier with the conductive polymer disposed in the openings of the insulating layer. The conductive polymer is heated to a glass transition temperature to liquefy the conductive polymer to an electrically conductive state. An encapsulant is deposited over the die and insulating layer. The carrier is removed to expose the conductive polymer. An interconnect structure is formed over the die, encapsulant, and conductive polymer. The interconnect structure is electrically connected through the conductive polymer to the contact pads on the die. | 02-16-2012 |
| 20120038048 | STABILIZED NICKEL SILICIDE INTERCONNECTS - A method of forming nickel monosilicide is provided that includes providing a silicon-containing surface, and ion implanting carbon into the silicon-containing surface. | 02-16-2012 |
| 20120061836 | SPRAY PYROLYSIS OF Y-DOPED ZnO - One example embodiment includes a method for applying a transparent conducting oxide. The method includes providing a solution, where the solution includes a solvent, a zinc precursor and an yttrium precursor. The method also includes spraying the solution on a heated substrate, where the heated substrate turns the solution into an yttrium-doped zinc oxide film. The method further includes annealing the film on the substrate in a controlled environment. | 03-15-2012 |
| 20120061837 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - In a method of manufacturing a semiconductor device according to an embodiment, an etching stopper, an oxide film and a mask material are formed. A trench pattern is formed in the mask material. The oxide film is etched to form the trench pattern therein by using the mask material having the trench pattern formed therein as a mask. The etching stopper is etched until the etching stopper is penetrated to form the trench pattern therein, by using the oxide film having the trench pattern formed therein as a mask. A Cu film is formed to be filled in the trench pattern formed in the etching stopper and the oxide film and to cover the top surface of the oxide film. CMP is performed on the Cu film and the oxide film until the top surface of the etching stopper serving as a stopper is exposed. | 03-15-2012 |
| 20120074568 | METHOD AND SYSTEM FOR MINIMIZING CARRIER STRESS OF A SEMICONDUCTOR DEVICE - A method and a system for minimizing carrier stress of a semiconductor device are provided. In one embodiment, a semiconductor device is provided comprising a carrier comprising a mesh coated with a metallic material, and a semiconductor chip disposed over the carrier. | 03-29-2012 |
| 20120074569 | SEMICONDUCTOR DEVICE - A semiconductor device includes a substrate having external connection terminals, and a semiconductor chip mounted over a semiconductor-chip mounting portion of the substrate. The external connection terminals are formed by sequentially forming an electroless nickel plating layer, an electroless gold plating layer, and an electrolytic gold plating layer on a terminal portion formed on a surface of the substrate. | 03-29-2012 |
| 20120091586 | CONFORMAL COATING OF HIGHLY STRUCTURED SURFACES - Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface. | 04-19-2012 |
| 20120091587 | METHOD FOR FABRICATION OF A SEMICONDUCTOR DEVICE AND STRUCTURE - A 3D IC based system comprising a first semiconductor layer comprising first transistors, wherein the first transistors are interconnected by at least one metal layer comprising aluminum or copper; a second mono-crystallized semiconductor layer comprising second transistors and overlaying the metal layer; wherein the second mono-crystallized semiconductor layer thickness is less than 150 nm, and wherein at least one of the second transistors is an N-type transistor and at least one of the second transistors is a P-type transistor. | 04-19-2012 |
| 20120098131 | Nickel Silicide Film - A nickel alloy sputtering target and a nickel silicide film formed with such a target are provided and enable the formation of a thermally stable silicide (NiSi) film, scarcely causing the aggregation of films or excessive formation of silicides, having low generation of particles upon forming the sputtered film, having favorable uniformity and superior plastic workability to the target, and which is particularly effective for the manufacture of a gate electrode material (thin film). The nickel alloy sputtering target contains 22 to 46 wt % of platinum and 5 to 100 wtppm of one or more components selected from iridium, palladium, and ruthenium, and remainder is nickel and inevitable impurities. | 04-26-2012 |
| 20120104609 | DISCRETE CIRCUIT COMPONENT HAVING COPPER BLOCK ELECTRODES AND METHOD OF FABRICATION - A discrete circuit component has copper block electrodes and that utilizes a simple copper substrate as the basis for the component. The component is made by providing an electrode separation hole preformed in the main substrate. The electrode separation hole results in a simple fabrication for the construction of the discrete component product. With the presence of the electrode separation hole, two solid blocks of copper automatically come into shape for each fabricated device at the final phase of production when each device is cut loose from the main production matrix. | 05-03-2012 |
| 20120126408 | INTEGRATED CIRCUIT MANUFACTURING METHOD AND INTEGRATED CIRCUIT - The present invention discloses an integrated circuit (IC) comprising a bond pad ( | 05-24-2012 |
| 20120139111 | ELECTRONIC COMPONENT - An electronic component has a substrate, a die bonding pad provided on an upper surface of the substrate, a semiconductor element bonded onto the die bonding pad by a die bonding resin, a conductive pattern disposed adjacent to the die bonding pad, and a coating member covering the conductive pattern. At least an outer peripheral portion of a surface of the die bonding pad is made of an inorganic material. The inorganic material of the outer peripheral portion is exposed. The die bonding pad and the conductive pattern are separated by an air gap such that the coating member does not come into contact with the die bonding pad. | 06-07-2012 |
| 20120146220 | SEMICONDUCTOR INTEGRATED-CIRCUIT DEVICE AND METHOD OF PRODUCING THE SAME - A semiconductor integrated-circuit device using the copper wiring having increased electromigration resistance, low resistivity, and a line width of 70 nm or less, is provided. The present invention is characterized by the annealing treatment wherein a copper wiring having a line width of 70 nm or less is heated with a heating rate of 1 K to 10 K per second, and then the temperature is constantly maintained for a prescribed time duration. | 06-14-2012 |
| 20120146221 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH SIDE CONTACT - A semiconductor device includes an active region having a side contact region in a sidewall thereof, wherein the side contact has a bulb shape, an ohmic contact region formed over a surface of the side contact region, and a bitline connected to the active region through the ohmic contact. | 06-14-2012 |
| 20120146222 | Circuit Structures and Electronic Systems - The invention includes methods of forming layers conformally over undulating surface topographies associated with semiconductor substrates. The undulating surface topographies can first be exposed to one or more of titanium oxide, neodymium oxide, yttrium oxide, zirconium oxide and vanadium oxide to treat the surfaces, and can be subsequently exposed to a material that forms a layer conformally along the treated surfaces. The material can, for example, comprise one or both of aluminum silane and aluminum silazane. The invention also includes semiconductor constructions having conformal layers formed over liners containing one or more of titanium oxide, yttrium oxide, zirconium oxide and vanadium oxide. | 06-14-2012 |
| 20120153474 | INTEGRATED CIRCUIT SYSTEM WITH REDUCED POLYSILICON RESIDUE AND METHOD OF MANUFACTURE THEREOF - A method of manufacturing an integrated circuit system includes: providing a substrate; forming a polysilicon layer over the substrate; forming an anti-reflective coating layer over the polysilicon layer; etching an anti-reflective coating pattern into the anti-reflective coating layer leaving an anti-reflective coating residue over the polysilicon layer; and etching the anti-reflective coating residue with an etchant gas mixture comprising hydrogen bromide, chlorine, and oxygen to remove the anti-reflective coating residue for mitigating the formation of a polysilicon protrusion. | 06-21-2012 |
| 20120153475 | METHOD OF ASSEMBLING TWO INTEGRATED CIRCUITS AND CORRESPONDING STRUCTURE - A semiconductor device includes an assembly of two integrated circuits. The assembly has a layer of photoresist filling the space between the two integrated circuits, and at least one electrically conducting pillar within the resist and electrically coupling the two integrated circuits. | 06-21-2012 |
| 20120193792 | SEMICONDUCTOR DEVICE CONDUCTIVE PATTERN STRUCTURES INCLUDING DUMMY CONDUCTIVE PATTERNS, AND METHODS OF MANUFACTURING THE SAME - Methods of forming conductive pattern structures form an insulating interlayer on a substrate that is partially etched to form a first trench extending to both end portions of a cell block. The insulating interlayer is also partially etched to form a second trench adjacent to the first trench, and a third trench extending to the both end portions of the cell block. The second trench has a disconnected shape at a middle portion of the cell block. A seed copper layer is formed on the insulating interlayer. Inner portions of the first, second and third trenches are electroplated with a copper layer. The copper layer is polished to expose the insulating interlayer to form first and second conductive patterns in the first and second trenches, respectively, and a first dummy conductive pattern in the third trench. Related conductive pattern structures are also described. | 08-02-2012 |
| 20120199975 | ENHANCED ELECTROMIGRATION RESISTANCE IN TSV STRUCTURE AND DESIGN - The embodiments provide a method for reducing electromigration in a circuit containing a through-silicon via (TSV) and the resulting novel structure for the TSV. A TSV is formed through a semiconductor substrate. A first end of the TSV connects to a first metallization layer on a device side of the semiconductor substrate. A second end of the TSV connects to a second metallization layer on a grind side of the semiconductor substrate. A first flat edge is created on the first end of the TSV at the intersection of the first end of the TSV and the first metallization layer. A second flat edge is created on the second end of the TSV at the intersection of the second end of the TSV and the second metallization layer. On top of the first end a metal contact grid is placed, having less than eighty percent metal coverage. | 08-09-2012 |
| 20120217638 | WIRING CONNECTION METHOD AND FUNCTIONAL DEVICE - By forming a metal layer | 08-30-2012 |
| 20120241958 | Increasing reliability of copper-based metallization structures in a microstructure device by using aluminum nitride - By forming an aluminum nitride layer by a self-limiting process sequence, the interface characteristics of a copper-based metallization layer may be significantly enhanced while nevertheless maintaining the overall permittivity of the layer stack at a lower level. | 09-27-2012 |
| 20120241959 | MAGNETIC INTEGRATION DOUBLE-ENDED CONVERTER - The present invention relates to a method of bonding a chip to an external electric circuit. The conductors of the external electric circuit for connection to the chip are formed with physical extensions and the chip is directly bonded to these extensions. The invention also relates to an electric device comprising at least one chip and an external electric circuit. The chip is directly bonded to physical extensions of conductors of the external electric circuit. | 09-27-2012 |
| 20120248606 | INTEGRATED CIRCUIT DEVICE - An integrated circuit device including a substrate, a first internal bonding pad, a second internal bonding pad, an external bonding pad and a bonding wire is provided. A first circuit, a second circuit, at least one interconnect line and an electrostatic discharge protection circuit are embedded in the substrate. The first internal bonding pad is disposed on a surface of the substrate and electrically connected to the first circuit. The second internal bonding pad is disposed on the surface of the substrate and electrically connected to the second circuit. The first internal bonding pad is electrically connected to the second internal bonding pad via the bonding wire. The first internal bonding pad is electrically connected to the electrostatic discharge protection circuit via the interconnect line. The electrostatic discharge protection circuit is electrically connected to the external bonding pad which is used for electrically connecting an external package lead. | 10-04-2012 |
| 20120261822 | Out-of-Plane Spacer Defined Electrode - In one embodiment, a method of forming an out-of-plane electrode includes providing an oxide layer above an upper surface of a device layer, providing a first cap layer portion above an upper surface of the oxide layer, etching a first electrode perimeter defining trench extending through the first cap layer portion and stopping at the oxide layer, depositing a first material portion within the first electrode perimeter defining trench, depositing a second cap layer portion above the first material portion, vapor releasing a portion of the oxide layer, depositing a third cap layer portion above the second cap layer portion, etching a second electrode perimeter defining trench extending through the second cap layer portion and the third cap layer portion, and depositing a second material portion within the second electrode perimeter defining trench, such that a spacer including the first material portion and the second material portion define out-of-plane electrode. | 10-18-2012 |
| 20120292764 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A method of manufacturing a semiconductor device includes forming a plurality of dummy line patterns arranged at a first pitch on an underlying region, forming first mask patterns having predetermined mask portions formed on long sides of the dummy line patterns, each of the first mask patterns having a closed-loop shape and surrounding each of the dummy line patterns, removing the dummy line patterns, forming a second mask pattern having a first pattern portion which covers end portions of the first mask patterns and inter-end portions each located between adjacent ones of the end portions, etching the underlying region using the first mask patterns and the second mask pattern as a mask to form trenches each located between adjacent ones of the predetermined mask portions, and filling the trenches with a predetermined material. | 11-22-2012 |
| 20120292765 | SEMICONDUCTOR DEVICE HAVING WIRING LAYER - Provided is a semiconductor device having a wiring layer formed of damascene wiring. The semiconductor device includes: a first wiring having a width equal to or larger than 0.5 μm; a second wiring adjacent to the first wiring and arranged with a space less than 0.5 μm from the first wiring; and a third wiring adjacent to the second wiring and arranged with a space equal to or smaller than 0.5 μm from the first wiring. In the semiconductor device, the second wiring and the third wiring are structured to have the same electric potential. | 11-22-2012 |
| 20120306079 | SEMICONDUCTOR DEVICE - A semiconductor device includes a substrate, a surface electrode of aluminum-containing material formed on the substrate, a metal film of solderable material formed on the surface electrode, and an end-securing film securing an end of the metal film and having a portion on the surface electrode and also having an overlapping portion which is formed integrally with the portion on the surface electrode and which overlaps the end of the metal film. | 12-06-2012 |
| 20120326309 | OPTIMIZED ANNULAR COPPER TSV - The present disclosure provides a thermo-mechanically reliable copper TSV and a technique to form such TSV during BEOL processing. The TSV constitutes an annular trench which extends through the semiconductor substrate. The substrate defines the inner and outer sidewalls of the trench, which sidewalls are separated by a distance within the range of 5 to 10 microns. A conductive path comprising copper or a copper alloy extends within said trench from an upper surface of said first dielectric layer through said substrate. The substrate thickness can be 60 microns or less. A dielectric layer having interconnect metallization conductively connected to the conductive path is formed directly over said annular trench. | 12-27-2012 |
| 20130001781 | STRUCTURES AND METHODS FOR PHOTO-PATTERNABLE LOW-k (PPLK) INTEGRATION - An interconnect structure is provided which includes at least one patterned and cured low-k material located directly on a surface of a substrate; and at least one least one conductively filled region embedded within an interconnect pattern located within the at least one patterned and cured low-k material, wherein the at least one conductively filled region has an inflection point at a lower region of the interconnect pattern that is in proximity to an upper surface of the substrate and the interconnect region having an upper region that has substantially straight sidewalls. | 01-03-2013 |
| 20130009309 | CONDUCTIVE CHIP DISPOSED ON LEAD SEMICONDUCTOR PACKAGE AND METHODS OF MAKING THE SAME - In one implementation, an apparatus includes a semiconductor die, a lead, a non-conductive epoxy, and a conductive epoxy. The semiconductor die includes an upper surface and a lower surface opposite the upper surface. The lead is electrically coupled to the upper surface of the semiconductor die. The non-conductive epoxy is disposed on a first portion of the lower surface of the semiconductor die. The conductive epoxy is disposed on a second portion of the lower surface of the semiconductor die. In some implementations, a conductive wire extends from the lead to the upper surface of the semiconductor die to electrically couple the lead to the upper surface of the semiconductor die. | 01-10-2013 |
| 20130020704 | BONDING SURFACES FOR DIRECT BONDING OF SEMICONDUCTOR STRUCTURES - Methods of directly bonding a first semiconductor structure to a second semiconductor structure include directly bonding at least one device structure of a first semiconductor structure to at least one device structure of a second semiconductor structure in a conductive material-to-conductive material direct bonding process. In some embodiments, at least one device structure of the first semiconductor structure may be caused to project a distance beyond an adjacent dielectric material on the first semiconductor structure prior to the bonding process. In some embodiments, one or more of the device structures may include a plurality of integral protrusions that extend from a base structure. Bonded semiconductor structures are fabricated using such methods. | 01-24-2013 |
| 20130020705 | METHOD TO FORM UNIFORM SILICIDE BY SELECTIVE IMPLANTATION - Methods form an integrated circuit structure by forming at least a portion of a plurality of devices within and/or on a substrate and patterning trenches in an inter-layer dielectric layer on the substrate adjacent the devices. The patterning forms relatively narrow trenches and relatively wide trenches. The methods then perform an angled implant of a compensating material into the trenches. The angle of the angled implant implants a greater concentration of the compensating material in the regions of the substrate at the bottom of the wider trenches relative to an amount of compensating material implanted in the regions of the substrate at the bottom of the narrower trenches. The methods then deposit a metallic material within the trenches and heat the metallic material to form silicide from the metallic material. | 01-24-2013 |
| 20130020706 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - In accordance with an embodiment, a semiconductor device includes a substrate, a line-and-space structure, a first film and a second film. The line-and-space structure includes line patterns arranged on the substrate parallel to one another at a predetermined distance. The first film is formed on side surfaces and bottom surfaces of the line patterns by an insulating film material. The second film is formed on the line-and-space structure across a space between the line patterns by a material showing low wettability to the first film. Space between the line patterns includes an air gap in which at least a bottom surface of the first film is totally exposed. | 01-24-2013 |
| 20130020707 | NOVEL SEMICONDUCTOR SYSTEM AND DEVICE - A 3D IC based system including: a first semiconductor layer including first alignment marks and first transistors, wherein the first transistors are interconnected by at least one metal layer including aluminum or copper; a second mono-crystallized semiconductor layer including second transistors and overlaying the at least one metal layer, wherein the at least one metal layer is in-between the first semiconductor layer and the second mono-crystallized semiconductor layer; and wherein the second transistors include a plurality of N-type transistors and P-type transistors, and wherein the second mono-crystallized semiconductor layer is transferred from a reusable donor wafer. | 01-24-2013 |
| 20130043589 | Methods of Forming a Non-Planar Cap Layer Above Conductive Lines on a Semiconductor Device - Disclosed herein are various methods of forming methods of forming a non-planar cap layer above a conductive line on a semiconductor device, and to devices incorporating such a non-planar cap layer. In one illustrative example, the method includes forming a conductive structure in a layer of insulating material, recessing an upper surface of the conductive structure relative to an upper surface of the layer of insulating material such that the recessed upper surface of the conductive structure and the upper surface of the layer of insulating material are positioned in different planes and, after recessing the upper surface of the conductive structure, forming a first cap layer on the conductive structure and the layer of insulating material. In another example, the device includes a conductive structure positioned in a layer of insulating material and a first cap layer formed on the layer of insulating material and the conductive structure, wherein a first interface between the first cap layer and the layer of insulating material is located in a first plane and a second interface between the first cap layer and the conductive structure is located in a second plane that is different from the first plane. | 02-21-2013 |
| 20130043590 | SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING - The present application discloses a method of manufacturing a semiconductor structure. According to at least one embodiment, a first etch stop layer is formed over a conductive feature and a substrate, and the conductive feature is positioned over the substrate. A second etch stop layer is formed over the first etch stop layer. A first etch is performed to form an opening in the second etch stop layer, and the opening exposes a portion of the first etch stop layer. A second etch is performed to extend the opening downwardly by removing a portion of the exposed first etch stop layer, and the extended opening exposes a portion of the conductive feature. | 02-21-2013 |
| 20130062767 | VIA STRUCTURE AND VIA ETCHING PROCESS OF FORMING THE SAME - An integrated circuit structure includes a semiconductor substrate and a hard mask layer formed on the semiconductor substrate. The integrated circuit structure further includes at least a conductive layer formed in the hard mask layer and a via extending from the hard mask layer to at least a portion of the semiconductor substrate, wherein the via has a round corner and a tapered sidewall. | 03-14-2013 |
| 20130069232 | DAMASCENE PROCESS FOR ALIGNING AND BONDING THROUGH-SILICON-VIA BASED 3D INTEGRATED CIRCUIT STACKS - Through-silicon-via (TSV) based 3D integrated circuit (3D IC) stacks are aligned, bonded and electrically interconnected using a transparent alignment material in the TSVs until the wafers are bonded. Embodiments include providing a first wafer having a first device layer and at least one first TSV filled with a conductive material, providing a second wafer having a second device layer, forming at least one second TSV in the second wafer, filling each second TSV with an alignment material, thinning the second wafer until the transparent material extends all the way through the wafer, aligning the first and second wafers, bonding the first and second wafers, removing the alignment material from the second wafer, and filling each second TSV in the second wafer with a conductive material. | 03-21-2013 |
| 20130075907 | Interconnection Between Integrated Circuit and Package - In order to achieve finer bump interconnect pitch for integrated circuit packaging, while relieving pressure-induced delamination of upper layer dielectric films, the under bump metallurgy of the present invention provides a pressure distribution pedestal upon which a narrower copper pillar is disposed. A solder mini-bump is disposed on the upper exposed portion of the copper pillar, wherein the solder is softer than the copper pillar. The radius of the copper pillars is selected such that lateral deformation of the solder mini-bumps during final assembly does not form undesired conductive bridges between adjacent pillars. | 03-28-2013 |
| 20130105975 | SEMICONDUCTOR CHIP DEVICE WITH THERMAL INTERFACE MATERIAL FRAME | 05-02-2013 |
| 20130105976 | METHOD TO ALIGN MASK PATTERNS | 05-02-2013 |
| 20130113100 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF - A semiconductor structure and a manufacturing method thereof are provided. The method includes the following steps. Firstly, a semiconductor substrate having an active surface and a back surface is provided. The active surface is opposite to the back surface, and the semiconductor substrate includes at least one grounding pad disposed on the active surface. Secondly, at least one through silicon via is formed through the semiconductor substrate from the back surface to the active surface thus exposing the grounding pad. Then, a conductive layer is formed on the back surface of the semiconductor substrate and filled into the through silicon via to electrically connect to the grounding pad and the semiconductor substrate. | 05-09-2013 |
| 20130119543 | THROUGH SILICON VIA FOR STACKED WAFER CONNECTIONS - Stacked wafer connections are enhanced by forming a though silicon via including a first via portion formed in an upper portion of a via hole and a second via portion in a lower portion of the via hole. Embodiments include forming a via hole in a first surface of a substrate; partially filling the via hole with a dielectric material; filling the remainder of the via hole with a first conductive material; removing a portion of a second surface of the substrate to expose the dielectric material; removing the dielectric material from the via hole; and filling a the via hole with a second conductive material electrically conductively connected to the first conductive material. | 05-16-2013 |
| 20130119544 | MICROELECTRONIC PACKAGE AND METHOD OF MANUFACTURING SAME - A microelectronic package includes a substrate ( | 05-16-2013 |
| 20130134589 | CHIP-PACKAGE AND A METHOD FOR FORMING A CHIP-PACKAGE - A chip-package includes a chip-carrier configured to carry a chip, the chip arranged over a chip-carrier side, wherein the chip-carrier side is configured in electrical connection with a chip back side; an insulation material including: a first insulation portion formed over a first chip lateral side; a second insulation portion formed over a second chip lateral side, wherein the first chip lateral side and the second chip lateral side each abuts opposite edges of the chip back side; and a third insulation portion formed over at least part of a chip front side, the chip front side including one or more electrical contacts formed within the chip front side; wherein at least part of the first insulation portion is arranged over the chip-carrier side and wherein the first insulation portion is configured to extend in a direction perpendicular to the first chip lateral side further than the chip-carrier. | 05-30-2013 |
| 20130134590 | FORMATION OF AIR GAP WITH PROTECTION OF METAL LINES - A microelectronic substrate which includes a dielectric layer overlying a semiconductor region of a substrate, the dielectric layer having an exposed top surface; a plurality of metal lines of a first metal disposed within the dielectric layer, each metal line having edges and a surface exposed at the top surface of the dielectric layer; a dielectric cap layer having a first portion overlying the surfaces of the metal lines and a second portion overlying the dielectric layer between the metal lines, the first portion has a first height above the surface of the dielectric layer, and the second portion has a second height above the surface of the dielectric layer, the second height being greater than the first height; and an air gap disposed between the metal lines, the air gap underlying the second portion of the cap layer. | 05-30-2013 |
| 20130147045 | Flash Memory Having Multi-Level Architecture - Subject matter disclosed herein relates to a multi-level flash memory and a process flow to form same. | 06-13-2013 |
| 20130161817 | TECHNIQUES FOR WAFER-LEVEL PROCESSING OF QFN PACKAGES - Semiconductor package device, such as wafer-level package semiconductor devices, are described that have pillars for providing electrical interconnectivity. In an implementation, the wafer-level package devices include an integrated circuit chip having at least one pillar formed over the integrated circuit chip. The pillar is configured to provide electrical interconnectivity with the integrated circuit chip. The wafer-level package device also includes an encapsulation structure configured to support the pillar. | 06-27-2013 |
| 20130168860 | Semiconductor Package with Ultra-Thin Interposer Without Through-Semiconductor Vias - There are disclosed herein various implementations of semiconductor packages including an interposer without through-semiconductor vias (TSVs). One exemplary implementation includes a first active die situated over an interposer. The interposer includes an interposer dielectric having intra-interposer routing traces. The first active die communicates electrical signals to a package substrate situated below the interposer utilizing the intra-interposer routing traces and without utilizing TSVs. In one implementation, the semiconductor package includes a second active die situated over the interposer, the second active die communicating electrical signals to the package substrate utilizing the intra-interposer routing traces and without utilizing TSVs. Moreover, in one implementation, the first active die and the second active die communicate chip-to-chip signals through the interposer. | 07-04-2013 |
| 20130181349 | SEMICONDUCTOR DEVICE HAVING THROUGH-SUBSTRATE VIA - According to an embodiment, a semiconductor device includes a first circuit block, a first through-substrate via, and a back surface wiring. The first circuit block is provided on a surface side of a semiconductor substrate. The first through-substrate via is provided along a circumference of the first circuit block so as to separate the first circuit block from other circuit blocks. The first circuit block is provided so as to penetrate the surface of the semiconductor substrate. The first circuit block is isolated from the surroundings. The first circuit block has conductivity. The back surface wiring is provided on the back surface side of the semiconductor substrate. The back surface wiring is connected to the first through-substrate via. The back surface wiring connects the first through-substrate via to a power supply terminal or a shield potential terminal. | 07-18-2013 |
| 20130193573 | METHODS OF STRESS BALANCING IN GALLIUM ARSENIDE WAFER PROCESSING - Systems, apparatuses, and methods related to the design, fabrication, and manufacture of gallium arsenide (GaAs) integrated circuits are disclosed. Copper can be used as the contact material for a GaAs integrated circuit. Metallization of the wafer and through-wafer vias can be achieved through copper plating processes disclosed herein. To avoid warpage, the tensile stress of a conductive layer deposited onto a GaAs substrate can be offset by depositing a compensating layer having negative stress over the GaAs substrate. GaAs integrated circuits can be singulated, packaged, and incorporated into various electronic devices. | 08-01-2013 |
| 20130193574 | 3D CHIP STACK HAVING ENCAPSULATED CHIP-IN-CHIP - A method of forming a three-dimensional (3D) chip is provided in which a second chip is present embedded within a first chip. In one embodiment, the method includes forming a first chip including first electrical devices and forming a recess extending from a surface of the first chip. A second chip is formed having second electrical devices. The second chip is then encapsulated within the recess of the first chip. Interconnects are then formed through the first chip into electrical communication with at least one of the second devices on the second chip. A three-dimensional (3D) chip is also provided in which a second chip is embedded within a first chip. | 08-01-2013 |
| 20130200517 | INTERPOSER FRAME AND METHOD OF MANUFACTURING THE SAME - The mechanisms of using an interposer frame to form a PoP package are provided in the disclosure. The interposer frame is formed by using a substrate with one or more additives to adjust the properties of the substrate. The interposer frame has openings lined with conductive layer to form through substrate vias (TSVs) with solder balls on adjacent packages. The interposer frame enables the reduction of pitch of TSVs, mismatch of coefficients of thermal expansion (CTEs), shorting, and delamination of solder joints, and improve mechanical strength of the package. | 08-08-2013 |
| 20130207264 | Stress Reduction Apparatus - A stress reduction apparatus comprises a metal structure formed over a substrate, an inter metal dielectric layer formed over the substrate, wherein a lower portion of the metal structure is embedded in the inter metal dielectric layer and an inverted cup shaped stress reduction layer formed over the metal structure, wherein an upper portion of the metal structure is embedded in the inverted cup shaped stress reduction layer. | 08-15-2013 |
| 20130207265 | STRUCTURE AND METHOD OF MAKING THE SAME - A structure includes a substrate, a first supporting member over the substrate, a second supporting member over the substrate, and a layer of material over the substrate and covering the first supporting member and the second supporting member. The first supporting member has a first width, and the second supporting member has a second width. The first supporting member and the second supporting member are separated by a gap region. The first width is at least 10 times the second width, and a gap width of the gap region ranges from 5 to 30 times the second width. | 08-15-2013 |
| 20130214411 | METAL INTERCONNECT OF SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - Provided is a method of manufacturing a metal interconnect of a semiconductor device including: forming a interconnect hole by patterning an interlayer insulating film formed on a substrate; performing a nitriding treatment on a surface of the interlayer insulating film by injecting a gas including nitrogen into a deposition apparatus in which the substrate is disposed; forming a diffusion preventing film by injecting the gas including nitrogen and a metal source gas into the deposition apparatus together; filling the interconnect hole with a metal; and removing the metal formed on a part other than the interconnect hole by a chemical mechanical polishing (CMP) process. Accordingly, the mechanical strength of the interlayer insulating film is increased, thereby preventing scratches or defects that are generated during the chemical mechanical polishing process. | 08-22-2013 |
| 20130214412 | METHOD OF FORMING THIN FILM INTERCONNECT AND THIN FILM INTERCONNECT - A method of forming a thin film interconnect in which a film is formed by sputtering method using a Cu—Ca alloy target and a thin film interconnect formed by the method, the method comprising: forming a Cu—Ca alloy film by sputtering method using a Cu—Ca alloy target that contains 0.5 atomic % or more and less than 5 atomic % of Ca, and the balance consisting of Cu and unavoidable impurities; and performing heat treatment of the Cu—Ca alloy film at a temperature of 300 to 700° C. in an inert gas atmosphere containing trace amount of oxygen defined by oxygen partial pressure in the range of 10 | 08-22-2013 |
| 20130214413 | CONDUCTIVE LINE STRUCTURES AND METHODS OF FORMING THE SAME - Conductive line structures, and methods of forming the same, include first and second pattern structures, insulation layer patterns and an insulating interlayer. The first pattern structure includes a conductive line pattern and a hard mask stacked, and extends in a first direction. The second pattern structure includes a second conductive line pattern and another hard mask stacked, and at least a portion of the pattern structure extends in the first direction. The insulation layer patterns contact end portions of the pattern structures. The first pattern structure and an insulation layer pattern form a closed curve shape in plan view, and the second pattern structure and another insulation layer pattern form another closed curve shape in plan view. The insulating interlayer covers upper portions of the pattern structures and the insulation layer patterns, an air gap between the pattern structures, and another air gap between the insulation layer patterns. | 08-22-2013 |
| 20130221524 | INTEGRATED CIRCUITS WITH IMPROVED INTERCONNECT RELIABILITY USING AN INSULATING MONOLAYER AND METHODS FOR FABRICATING SAME - Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, an integrated circuit includes an interlayer dielectric material having a top surface and overlying semiconductor devices formed on a semiconductor substrate. The integrated circuit includes a metal interconnect formed in the interlayer dielectric material. The metal interconnect includes an upper surface to which an insulating monolayer is bonded. The integrated circuit further includes a dielectric cap that overlies the top surface of the interlayer dielectric material and encapsulates the insulating monolayer. | 08-29-2013 |
| 20130234330 | Semiconductor Packages and Methods of Formation Thereof - In one embodiment, a method of forming a semiconductor package includes applying a film layer having through openings over a carrier and attaching a back side of a semiconductor chip to the film layer. The semiconductor chip has contacts on a front side. The method includes using a first common deposition and patterning step to form a conductive material within the openings. The conductive material contacts the contacts of the semiconductor chip. A reconfigured wafer is formed by encapsulating the semiconductor chip, the film layer, and the conductive material in an encapsulant using a second common deposition and patterning step. The reconfigured wafer is singulated to form a plurality of packages. | 09-12-2013 |
| 20130241060 | METHOD AND COMPOSITION FOR ELECTRODEPOSITION OF COPPER IN MICROELECTRONICS WITH DIPYRIDYL-BASED LEVELERS - A method and composition for metallizing a via feature in a semiconductor integrated circuit device substrate, using a leveler compound which is a dipyridyl compound. | 09-19-2013 |
| 20130241061 | SEMICONDUCTOR ELEMENT AND METHOD OF MANUFACTURING SAME - A method of manufacturing a semiconductor element includes forming a first bonding layer containing a metal, which forms a eutectic crystal with Au, on a first substrate to provide a first laminated body. The method also includes forming an element structure layer having a semiconductor layer on a second substrate. The method also includes forming a second bonding layer on the element structure layer to provide a second laminated body. The second bonding layer has a metal underlayer containing a metal, which forms a eutectic crystal with Au. The second bonding layer also has a surface layer that contains Au. The method also includes performing heating pressure-bonding on the first and second laminated bodies with the first and second bonding layers facing each other. The heating temperature of the second substrate in the heating pressure-bonding is higher than the heating temperature of the first substrate. | 09-19-2013 |
| 20130241062 | INTEGRATED CIRCUITS AND METHODS FOR PROCESSING INTEGRATED CIRCUITS WITH EMBEDDED FEATURES - Integrated circuits, a process for recessing an embedded copper feature within a substrate, and a process for recessing an embedded copper interconnect within an interlayer dielectric substrate of an integrated circuit are provided. In an embodiment, a process for recessing an embedded copper feature, such as an embedded copper interconnect, within a substrate, such as an interlayer dielectric substrate, includes providing a substrate having an embedded copper feature disposed therein. The embedded copper feature has an exposed surface and the substrate has a substrate surface adjacent to the exposed surface of the embedded copper feature. The exposed surface of the embedded copper feature is nitrided to form a layer of copper nitride in the embedded copper feature. Copper nitride is selectively etched from the embedded copper feature to recess the embedded copper feature within the substrate. | 09-19-2013 |
| 20130249093 | CONDUCTIVE FILM AND SEMICONDUCTOR DEVICE - A conductive film of an embodiment includes: a fine catalytic metal particle as a junction and a graphene extending in a network form from the junction. | 09-26-2013 |
| 20130256888 | INTERCONNECT STRUCTURE AND METHOD FOR FORMING THE SAME - A interconnect structure includes a first etch stop layer over a substrate, a dielectric layer over the first etch stop layer, a conductor in the dielectric layer, and a second etch stop layer over the dielectric layer. The dielectric layer contains carbon and has a top portion and a bottom potion. A difference of C content in the top portion and the bottom potion is less than 2 at %. An oxygen content in a surface of the conductor is less than about 1 at %. | 10-03-2013 |
| 20130256889 | SUBSTRATE AND SEMICONDUCTOR DEVICE - A substrate includes a base member having a predetermined thickness, and an electrode array provided in one surface in a thickness direction of the base member and having a plurality of electrodes arranged two-dimensionally in a plan view, and the electrode array includes a central portion and an incremental region provided around the central portion in the planar view and is formed so that a height of the electrodes in the incremental region gradually increase as approaching toward the central portion. | 10-03-2013 |
| 20130264710 | SEMICONDUCTOR DEVICE - Provided is a semiconductor device characterized by that first to fourth semiconductor chips are mounted on first to fourth electrodes formed by plating, respectively; the surface of the first semiconductor chip and the upper surface of a fifth electrode, the surface of the second semiconductor chip and the upper surface of the first electrode, the surface of the third semiconductor chip and the upper surface of the fourth electrode, the surface of the fourth semiconductor chip and the upper surface of the fifth electrode, and the upper surface of the second electrode and the upper surface of the third electrode are coupled to each other by first to fifth conductive members, respectively; and the back surfaces of the first to fifth electrodes are exposed from a resin molding. The invention makes it possible to reduce the size and the thickness of a semiconductor device configuring a diode bridge circuit. | 10-10-2013 |
| 20130277841 | Rigid Interconnect Structures in Package-on-Package Assemblies - System and method are disclosed for creating a rigid interconnect between two substrate mounted packages to create a package-on-package assembly. A solid interconnect may have a predetermined length configured to provide a predetermined package separation, may be cylindrical, conical or stepped, may be formed by extrusion, casting, drawing or milling and may have an anti-oxidation coating. The interconnect may be attached to mounting pads on the top and bottom packages via an electrically conductive adhesive, including, but not limited to solder and solder paste. A solder preservative or other anti-oxidation coating may be applied to the mounting pad. A package-on-package assembly with solid interconnects may have a top package configured to accept at least one electronic device, with the solid interconnects mounted between the top package and a bottom package to rigidly hold the package about parallel to each other. | 10-24-2013 |
| 20130285243 | EASILY ASSEMBLED CHIP ASSEMBLY AND CHIP ASSEMBLING METHOD - A chip assembly includes a PCB, a connecting pad fixed on the PCB, and a chip. The connecting pad defines a through hole. The chip is received in the through hole and fixed on the PCB by an adhesive distributed in the through hole. A thickness of the adhesive is less than that of the connecting pad. | 10-31-2013 |
| 20130292835 | CONFORMAL LOW TEMPERATURE HERMETIC DIELECTRIC DIFFUSION BARRIERS - Conformal hermetic dielectric films suitable as dielectric diffusion barriers over 3D topography. In embodiments, the dielectric diffusion barrier includes a dielectric layer, such as a metal oxide, which can be deposited by atomic layer deposition (ALD) techniques with a conformality and density greater than can be achieved in a conventional silicon dioxide-based film deposited by a PECVD process for a thinner contiguous hermetic diffusion barrier. In further embodiments, the diffusion barrier is a multi-layered film including a high-k dielectric layer and a low-k or intermediate-k dielectric layer (e.g., a bi-layer) to reduce the dielectric constant of the diffusion barrier. In other embodiments a silicate of a high-k dielectric layer (e.g., a metal silicate) is formed to lower the k-value of the diffusion barrier by adjusting the silicon content of the silicate while maintaining high film conformality and density. | 11-07-2013 |
| 20130299985 | PROCESS FOR FABRICATING GALLIUM ARSENIDE DEVICES WITH COPPER CONTACT LAYER - Systems, apparatuses, and methods related to the design, fabrication, and manufacture of gallium arsenide (GaAs) integrated circuits are disclosed. Copper can be used as the contact material for a GaAs integrated circuit. Metallization of the wafer and through-wafer vias can be achieved through copper plating processes disclosed herein. Various protocols can be employed during processing to avoid cross-contamination between copper-plated and non-copper-plated wafers. GaAs integrated circuits can be singulated, packaged, and incorporated into various electronic devices. | 11-14-2013 |
| 20130299986 | METHODS FOR FORMING SEMICONDUCTOR DEVICE PACKAGES WITH PHOTOIMAGEABLE DIELECTRIC ADHESIVE MATERIAL, AND RELATED SEMICONDUCTOR DEVICE PACKAGES - Methods for forming semiconductor device packages include applying a photoimageable dielectric adhesive material to a major surface of a semiconductor die and at least partially over conductive elements on the semiconductor die. The photoimageable dielectric adhesive material may be removed from over the conductive elements. The conductive elements are aligned with and bonded to bond pads of a substrate, and the semiconductor die and the substrate are adhered with the photoimageable dielectric adhesive material. A semiconductor device package includes at least one semiconductor die including conductive structures thereon, a substrate including bond pads thereon that are physically and electrically connected to the conductive structures, and a developed photoimageable dielectric adhesive material disposed between the semiconductor die and the substrate around and between adjacent conductive structures. | 11-14-2013 |
| 20130299987 | SEMICONDUCTOR STRUCTURE HAVING ETCH STOP LAYER - A semiconductor structure includes a substrate, a conductive feature over the substrate, a conductive plug structure contacting a portion of an upper surface of the conductive feature, a first etch stop layer over another portion of the upper surface of the conductive feature, and a second etch stop layer over the first etch stop layer. The first etch stop layer is a doped etch stop layer. The first etch stop layer is to function as an etch stop layer during a predetermined etching process for etching the second etch stop layer. | 11-14-2013 |
| 20130307150 | COPPER INTERCONNECT STRUCTURE AND ITS FORMATION - A structure with improved electromigration resistance and methods for making the same. A structure having improved electromigration resistance includes a bulk interconnect having a dual layer cap and a dielectric capping layer. The dual layer cap includes a bottom metallic portion and a top metal oxide portion. Preferably the metal oxide portion is MnO or MnSiO and the metallic portion is Mn or CuMn. The structure is created by doping the interconnect with an impurity (Mn in the preferred embodiment), and then creating lattice defects at a top portion of the interconnect. The defects drive increased impurity migration to the top surface of the interconnect. When the dielectric capping layer is formed, a portion reacts with the segregated impurities, thus forming the dual layer cap on the interconnect. Lattice defects at the Cu surface can be created by plasma treatment, ion implantation, a compressive film, or other means. | 11-21-2013 |
| 20130328195 | UTILIZATION OF A METALLIZATION SCHEME AS AN ETCHING MASK - The various aspects comprise methods and devices for processing a wafer. | 12-12-2013 |
| 20130334686 | CARRIER-FREE LAND GRID ARRAY IC CHIP PACKAGE AND PREPARATION METHOD THEREOF - A carrier-free land grid array (LGA) Integrated Circuit (IC) chip package and a preparation method thereof are provided. The IC chip package includes: an inner pin, an IC chip, a pad, a bonding wire, and a mold cap. The inner pin is designed to be a multi-row matrix form at a front side of the package, and is designed to be an exposed multi-row approximate square-shaped circular gold-plated contacts at a back side; the IC chip is provided on the inner pin, the inner pin is adhered to the IC chip with an adhesive film sheet, the pad on the IC chip is connected to the inner pin by the bonding wire, and the mold cap encircles the adhesive film sheet, the IC chip, the bonding wire, and edges of the inner pin, so as to form a whole circuit. The present invention adopts approximate square-shaped spherical array contacts, thereby having a simple and flexible structure, and achieving a desirable heat-dissipation effect. A cooper lead frame (L/F) has a high yield, and reduces the material cost. The L/F is used to replace a ceramic substrate, PCB substrate, or BT substrate, thereby saving the complicated layout design, shortening the designing and manufacturing cycle, accelerating the trial production course, and enabling the product to be early listed to obtain market opportunities. | 12-19-2013 |
| 20130334687 | SEMICONDUCTOR DEVICE - A semiconductor device includes a semiconductor element, a lead, and a wire including a first bonding portion bonded to the semiconductor element and a second bonding portion bonded to the lead. The semiconductor element includes a first bonding surface which faces to a first side in a first direction and to which the first bonding portion is bonded. The lead includes a second bonding surface and a third bonding surface both facing to the first side in the first direction and forming an angle larger than 180° on the first side in the first direction. The semiconductor device further includes a ball bump extending onto both the second bonding surface and the third bonding surface. The second bonding portion is bonded to the lead via the ball bump. | 12-19-2013 |
| 20130334688 | MULTI-ELEMENTS-DOPED ZINC OXIDE FILM, MANUFACTURING METHOD AND APPLICATION THEREOF - The invention relates to the semiconductor material manufacturing technical field. A multi-elements-doped zinc oxide film as well as manufacturing method and application in photo-electric devices thereof are provided. The manufacturing method comprises the following steps: (1) mixing the powder of Ga | 12-19-2013 |
| 20130341792 | METHOD FOR PRODUCING GRAPHENE, GRAPHENE PRODUCED ON SUBSTRATE, AND GRAPHENE ON SUBSTRATE - A production method for producing graphene on a substrate, and the like are provided. According to the method, in a forming step heating is conducted to a solid solution temperature at which a solid solution of carbon dissolved in a metal is able to be formed, and a solid solution layer ( | 12-26-2013 |
| 20140001633 | COPPER INTERCONNECT STRUCTURE AND METHOD FOR FABRICATING THEREOF | 01-02-2014 |
| 20140015135 | SELF-ALIGNED VIA INTERCONNECT USING RELAXED PATTERNING EXPOSURE - Self-aligned via interconnects using relaxed patterning exposure. In accordance with a first method embodiment, a method for controlling a computer-aided design (CAD) system for designing physical features of an integrated circuit includes accessing a first pattern for first metal traces on a first metal layer, accessing a second pattern for second metal traces on a second metal layer, vertically adjacent to the first metal layer and accessing a precise pattern of intended interconnections between the first and second metal traces. The precise pattern of intended interconnections is operated on to form an imprecise via pattern that indicates a plurality of general areas in which vias are allowed. The imprecise via pattern is for use in an integrated circuit manufacturing process to form, in conjunction with operations to form the first and second metal layers, a plurality of self-aligned vias for interconnecting the intended interconnections. | 01-16-2014 |
| 20140021610 | CHIP PACKAGE AND A METHOD FOR MANUFACTURING A CHIP PACKAGE - A chip package is provided, the chip package including: first encapsulation structure; first passivation layer formed over first encapsulation structure and first electrically conductive layer formed over first passivation layer; at least one chip arranged over first electrically conductive layer and passivation layer wherein at least one chip contact pad contacts first electrically conductive layer; at least one cavity formed in first encapsulation structure, wherein at least one cavity exposes a portion of first passivation layer covering at least one chip contact pad; second encapsulation structure disposed over first encapsulation structure and covering at least one cavity, wherein a chamber region over at least one chip contact pad is defined by at least one cavity and second encapsulation structure; wherein second encapsulation structure includes an inlet and outlet connected to chamber region, wherein inlet and outlet control an inflow and outflow of heat dissipating material to and from chamber region. | 01-23-2014 |
| 20140042624 | Power MOSFET Having Selectively Silvered Pads for Clip and Bond Wire Attach - A packaged power field effect transistor device includes a power field effect transistor die, a DBA substrate, a clip, a wire bond, leads, and an amount of plastic encapsulant. The top of the DBA has a plurality of metal plate islands. A sintered silver feature is disposed on one of the islands. A silvered backside of the die is directly bonded to the sintered silver structure of the DBA. The upper surface of the die includes a first aluminum pad (a source pad) and a second aluminum pad (a gate pad). A sintered silver structure is disposed on the first aluminum pad, but there is no sintered silver structure disposed on the second aluminum pad. A high current clip is attached via soft solder to the sintered silver structure on the first aluminum pad (the source pad). A bond wire is ultrasonically welded to the second aluminum pad (gate pad). | 02-13-2014 |
| 20140048935 | INTEGRATED CIRCUIT DEVICE - An integrated circuit device including a substrate, a first internal bonding pad, a second internal bonding pad, an external bonding pad and a bonding wire is provided. A first circuit and a second circuit are embedded in the substrate. The first internal bonding pad is disposed on a surface of the substrate and electrically coupled to the first circuit. The second internal bonding pad is disposed on the surface of the substrate and electrically coupled to the second circuit. The second internal bonding pad is electrically coupled to the first internal bonding pad via the bonding wire. The external bonding pad is electrically coupled to the first internal bonding pad. | 02-20-2014 |
| 20140061909 | Pre-Sintered Semiconductor Die Structure - A sintered connection is formed by pressing a semiconductor die against a substrate with a dried sintering material interposed between the substrate and the semiconductor die, the dried sintering material having sintering particles and a solvent. The substrate is heated to a temperature below a sintering temperature of the dried sintering material while the semiconductor die is pressed against the substrate to form local sinter connections between adjacent ones of the sintering particles. The local sinter connections collectively provide a stable joint that fixes the semiconductor die to the substrate prior to sintering. A sintered connection is then formed between the semiconductor die and the substrate from the dried sintering material, after the stable joint is formed. | 03-06-2014 |
| 20140061910 | SEMICONDUCTOR DEVICE STRUCTURES AND METHODS FOR COPPER BOND PADS - A method of making a semiconductor device can comprise forming a copper bond pad on an integrated circuit device; forming a first passivation layer on the integrated circuit device and the copper bond pad; forming a second passivation layer on the first passivation layer; forming a mask over the first and second passivation layers around the copper bond pad; etching the second passivation layer over the copper bond pad; and cleaning the first passivation layer over the copper bond pad. At least a portion of the first passivation layer remains over the copper bond pad after the etching the second passivation layer. A thickness of the first passivation layer over the copper bond pad is selected to protect the copper bond pad from oxidation and to allow wire bonding to the copper bond pad through the first passivation layer. | 03-06-2014 |
| 20140061911 | SELF-ALIGNING HYBRIDIZATION METHOD - A self-aligning hybridization method enabling small pixel pitch hybridizations with self-alignment and run-out protection. The method requires providing a first IC, the surface of which includes at least one electrical contact for connection to a mating IC, depositing an insulating layer on the IC's surface, patterning and etching the insulating layer to provide recesses in the insulating layer above each of the electrical contacts, and depositing a deformable conductive material in each of the recesses. A mating IC is provided which includes conductive pins, preferably comprising nickel, positioned to align with the deformable conductive material in respective ones of the recesses on the first chip. The first and mating ICs are then hybridized by bringing the conductive pins into contact with the deformable conductive material in the recesses, such that the conductive material deforms and the pins make electrical contact with the first IC's electrical contacts. | 03-06-2014 |
| 20140070414 | Semiconductor plural gate lengths - Gate structures with different gate lengths and methods of manufacture are disclosed. The method includes forming a first gate structure with a first critical dimension, using a pattern of a mask. The method further includes forming a second gate structure with a second critical dimension, different than the first critical dimension of the first gate structure, using the pattern of the mask. | 03-13-2014 |
| 20140070415 | MICROELECTRONIC PACKAGES HAVING TRENCH VIAS AND METHODS FOR THE MANUFACTURE THEREOF - Embodiments of a microelectronic package including at least one trench via are provided, as are embodiments of a method for fabricating such a microelectronic package. In one embodiment, the method includes the step of depositing a dielectric layer over a first microelectronic device having a plurality of contact pads, which are covered by the dielectric layer. A trench via is formed in the dielectric layer to expose the plurality of contact pads therethrough. The trench via is formed to include opposing crenulated sidewalls having a plurality of recesses therein. The plurality of contact pads exposed through the trench via are then sputter etched. A plurality of interconnect lines is formed over the dielectric layer, each of which is electrically coupled to a different one of the plurality of contact pads. | 03-13-2014 |
| 20140070416 | GUARD RING STRUCTURE AND METHOD FOR FORMING THE SAME - A guard ring structure is provided, including a semiconductor substrate with a circuit region encircled by a first ring and a second ring. In one embodiment, the semiconductor substrate has a first dopant type, and the first and second ring respectively includes a plurality of separated first doping regions formed in a top portion of the semiconductor substrate, having a second dopant type opposite to the first conductivity type, and an interconnect element formed over the semiconductor substrate, covering the first doping regions. | 03-13-2014 |
| 20140077374 | Through Via Structure and Method - An apparatus comprises a through via formed in a substrate. The through via is coupled between a first side and a second side of the substrate. The through via comprises a bottom portion adjacent to the second side of the substrate, wherein the bottom portion is formed of a conductive material. The through via further comprises sidewall portions formed of the conductive material and a middle portion formed between the sidewall portions, wherein the middle portion is formed of a dielectric material. | 03-20-2014 |
| 20140077375 | SUBSTRATE STRUCTURE, METHOD OF MOUNTING SEMICONDUCTOR CHIP, AND SOLID STATE RELAY - This invention provides a substrate structure that can effectively prevent scattering of solder balls which are produced due to explosion attributable to evaporation of flux during reflow soldering, and spreading of molten solder to the surroundings. On a substrate, a semiconductor chip is mounted via solder paste. The substrate is provided with a groove portion which continuously or discontinuously surrounds the solder paste. | 03-20-2014 |
| 20140077376 | SEMICONDUCTOR CHIP, METHOD FOR PRODUCING A SEMICONDUCTOR CHIP AND METHOD FOR SOLDERING A SEMICONDUCTOR CHIP TO A CARRIER - A semiconductor chip includes a semiconductor body and a chip metallization applied on the semiconductor body. The chip metallization has an underside facing away from the semiconductor body. The chip further includes a layer stack applied to the underside of the chip metallization and having a number N1≧1 or N1≧2 of first partial layers and a number N2≧2 of second partial layers. The first partial layers and the second partial layers are arranged alternately and successively such that at least one of the second partial layers is arranged between the first partial layers of each first pair of the first partial layers and such that at least one of the first partial layers is arranged between the second partial layers of each second pair of the second partial layers. | 03-20-2014 |
| 20140084464 | Passivation Scheme - A method includes forming a passivation layer over an electrically conductive pad. A stress buffer layer is formed over the passivation layer. An opening is formed through the stress buffer layer over the electrically conductive pad wherein the opening does not reach the electrically conductive pad. The stress buffer layer is cured. The opening is extended through the passivation layer to reach the electrically conductive pad after the curing. | 03-27-2014 |
| 20140084465 | SYSTEM AND METHOD OF NOVEL MX TO MX-2 - A plurality of metal tracks are formed in an integrated circuit die in three metal layers stacked within the die. A protective dielectric layer is formed around metal tracks of an intermediate metal layer. The protective dielectric layer acts as a hard mask to define contact vias between metal tracks in the metal layers above and below the intermediate metal layer. | 03-27-2014 |
| 20140084466 | MANGANESE SILICATE FILM FORMING METHOD, PROCESSING SYSTEM, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE - According to an embodiment of present disclosure a manganese silicate film forming method for forming a manganese silicate film by transforming metal manganese to silicate. The method includes forming a metal manganese film on a silicon-containing base by using a manganese compound gas; annealing the metal manganese film in an oxidizing atmosphere after the formation of the metal manganese film; and forming a manganese silicate film by annealing the metal manganese film in a reducing atmosphere after the annealing of the metal manganese film in the oxidizing atmosphere. | 03-27-2014 |
| 20140084467 | FORMING FUNCTIONALIZED CARRIER STRUCTURES WITH CORELESS PACKAGES - Methods of forming a microelectronic packaging structure and associated structures formed thereby are described. Those methods may include attaching a die to a carrier material, wherein the carrier material comprises a top layer and a bottom layer separated by an etch stop layer; forming a dielectric material adjacent the die, forming a coreless substrate by building up layers on the dielectric material, and then removing the top layer carrier material and etch stop layer from the bottom layer carrier material. | 03-27-2014 |
| 20140091465 | LEADFRAME HAVING SLOPED METAL TERMINALS FOR WIREBONDING - A method of assembling semiconductor devices includes dispensing a metal paste including metal particles in a solvent onto a bonding area of a plurality of metal terminals of a leadframe. The dispensing provides a varying thickness over the bonding area. The solvent is evaporated to form a sloped metal coating including a first sloped top face and a second sloped top face. The first sloped top face is closer to the die pad compared to the second sloped top face, the second sloped top face increases in coating thickness with decreasing distance to the die pad, and the first sloped top face decreases in coating thickness with decreasing distance to the die pad. A bottom side of semiconductor die including a plurality of top side bond pads is attached to the die pad. Bond wires are connected between the bond pads and the second sloped top faces. | 04-03-2014 |
| 20140091466 | PITCH QUARTERING TO CREATE PITCH HALVED TRENCHES AND PITCH HALVED AIR GAPS - A silicon structure is fabricated determining a pattern for wire trenches and air gaps. The wire trenches are created, and certain trenches are used as air gaps. The remaining wire trenches are used for metallization of inter connecting wires. | 04-03-2014 |
| 20140097537 | THIN FILM COMPOSITIONS AND METHODS - Certain embodiments of the present invention include a versatile and scalable process, “patterned regrowth,” that allows for the spatially controlled synthesis of lateral junctions between electrically conductive graphene and insulating h-BN, as well as between intrinsic and substitutionally doped graphene. The resulting films form mechanically continuous sheets across these heterojunctions. These embodiments represent an element of developing atomically thin integrated circuitry and enable the fabrication of electrically isolated active and passive elements embedded in continuous, one atom thick sheets, which may be manipulated and stacked to form complex devices at the ultimate thickness limit. | 04-10-2014 |
| 20140131868 | Systems and Methods for Producing Low Work Function Electrodes - According to an exemplary embodiment of the invention, systems and methods are provided for producing low work function electrodes. According to an exemplary embodiment, a method is provided for reducing a work function of an electrode. The method includes applying, to at least a portion of the electrode, a solution comprising a Lewis basic oligomer or polymer; and based at least in part on applying the solution, forming an ultra-thin layer on a surface of the electrode, wherein the ultra-thin layer reduces the work function associated with the electrode by greater than 0.5 eV. According to another exemplary embodiment of the invention, a device is provided. The device includes a semiconductor; at least one electrode disposed adjacent to the semiconductor and configured to transport electrons in or out of the semiconductor. | 05-15-2014 |
| 20140131869 | Semiconductor Device and Method of Self-Confinement of Conductive Bump Material During Reflow Without Solder Mask - A semiconductor device has a semiconductor die with a die bump pad and substrate with a trace line and integrated bump pad. Conductive bump material is deposited on the substrate bump pad or die bump pad. The semiconductor die is mounted over the substrate so that the bump material is disposed between the die bump pad and substrate bump pad. The bump material is reflowed without a solder mask around the die bump pad or substrate bump pad to form an interconnect. The bump material is self-confined within a footprint of the die bump pad or substrate bump pad. The bump material can be immersed in a flux solution prior to reflow to increase wettability. Alternatively, the interconnect includes a non-fusible base and fusible cap. The volume of bump material is selected so that a surface tension maintains self-confinement of the bump material within the bump pads during reflow. | 05-15-2014 |
| 20140131870 | Multi-chip package and manufacturing method - Manufacturing method and a multi-chip package, which comprises a conductor pattern and insulation, and, inside the insulation, a first component, the contact terminals of which face towards the conductor pattern and are conductively connected to the conductor pattern. The multi-chip package also comprises inside the insulation a second semiconductor chip, the contact terminals of which face towards the same conductor pattern and are conductively connected through contact elements to this conductor pattern. The semiconductor chips are located in such a way that the first semiconductor chip is located between the second semiconductor chip and the conductor pattern. | 05-15-2014 |
| 20140151883 | METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT AND STRUCTURE THEREFOR - A semiconductor component having wettable leadframe lead surfaces and a method of manufacture. A leadframe having leadframe leads is embedded in a mold compound. A portion of at least one leadframe lead is exposed and an electrically conductive material is formed on the exposed portion. The mold compound is separated to form singulated semiconductor components. | 06-05-2014 |
| 20140159238 | PACKAGE HAVING THERMAL COMPRESSION FLIP CHIP (TCFC) AND CHIP WITH REFLOW BONDING ON LEAD - Some exemplary implementations of this disclosure pertain to an integrated circuit package that includes a substrate, a first die and a second die. The substrate includes a first set of traces and a second set of traces. The first set of traces has a first pitch. The second set of traces has a second pitch. The first pitch is less than the second pitch. In some implementations, a pitch of a set of traces defines a center to center distance between two neighboring traces, or bonding pads on a substrate. The first die is coupled to the substrate by a thermal compression bonding process. In some implementations, the first die is coupled to the first set of traces of the substrate. The second die is coupled to the substrate by a reflow bonding process. In some implementations, the second die is coupled to the second set of traces of the substrate. | 06-12-2014 |
| 20140159239 | METHODS OF SELECTIVELY REMOVING A SUBSTRATE MATERIAL AND RELATED SEMICONDUCTOR STRUCTURES - A method for selective removing material from a substrate without damage to copper filling a via and extending at least partially through the substrate. The method comprises oxidizing a semiconductor structure comprising a substrate and at least one copper feature and removing a portion of the substrate using an etchant comprising SF | 06-12-2014 |
| 20140167263 | Methods and Apparatus for Package with Interposers - Methods and apparatus for an interposer with dams used in packaging dies are disclosed. An interposer may comprise a metal layer above a substrate. A plurality of dams may be formed above the metal layer around each corner of the metal layer. Dams may be formed on both sides of the interposer substrate. A dam surrounds an area where connectors such as solder balls may be located to connect to other packages. A non-conductive dam may be formed above the dam. An underfill may be formed under the package connected to the connector, above the metal layer, and contained within the area surrounded by the dams at the corner, so that the connectors are well protected by the underfill. Such dams may be further formed on a printed circuit board as well. | 06-19-2014 |
| 20140167264 | INTEGRATED CIRCUITS AND METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH SILICIDE CONTACTS ON NON-PLANAR STRUCTURES - Integrated circuits and methods for fabricating integrated circuits are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate and forming fins over the semiconductor substrate. Each fin is formed with sidewalls. The method further includes conformally depositing a metal film stack on the sidewalls of each fin. In the method, the metal film stack is annealed to form a metal silicide film over the sidewalls of each fin. | 06-19-2014 |
| 20140167265 | METHODS OF FORMING A BI-LAYER CAP LAYER ON COPPER-BASED CONDUCTIVE STRUCTURES AND DEVICES WITH SUCH A CAP LAYER - One illustrative device disclosed herein includes a layer of insulating material, a copper-based conductive structure positioned in the layer of insulating material and a bi-layer cap layer comprised of a first layer of material positioned on the copper-based conductive structure and a second layer of material positioned on the first layer of material. One method disclosed herein includes forming a copper-based conductive structure in a first layer of insulating material, forming a first layer of a bi-layer cap layer on the copper-based conductive structure, the first layer being comprised of silicon carbon nitride, forming a second layer of the bi-layer cap layer on the first layer, the second layer being comprised of silicon nitride, and forming a second layer of insulating material above the second layer. | 06-19-2014 |
| 20140167266 | SEMICONDUCTOR DEVICE HAVING PERIPHERAL POLYMER STRUCTURES - A semiconductor device includes a semiconductor chip including a first main face and a second main face wherein the second main face is the backside of the semiconductor chip. Further, the semiconductor device includes an electrically conductive layer, in particular an electrically conductive layer, arranged on a first region of the second main face of the semiconductor chip. Further, the semiconductor device includes a polymer structure arranged on a second region of the second main face of the semiconductor chip, wherein the second region is a peripheral region of the second main face of the semiconductor chip and the first region is adjacent to the second region. | 06-19-2014 |
| 20140175649 | ELECTRONIC DEVICE INCLUDING ELECTRICALLY CONDUCTIVE VIAS HAVING DIFFERENT CROSS-SECTIONAL AREAS AND RELATED METHODS - An electronic device may include a bottom interconnect layer having a first electrically conductive via therein. The electronic device may also include an integrated circuit (IC) carried by said bottom interconnect layer, and an encapsulation material on the bottom interconnect layer and surrounding the IC. The encapsulation layer may have a second electrically conductive via therein aligned with the first electrically conductive via. The second electrically conductive via may have a cross-sectional area larger than a cross-sectional area of the first electrically conductive via. | 06-26-2014 |
| 20140183735 | SYSTEM AND METHOD OF COMBINING DAMASCENES AND SUBTRACT METAL ETCH FOR ADVANCED BACK END OF LINE INTERCONNECTIONS - Metal interconnections are formed in an integrated by combining damascene processes and subtractive metal etching. A wide trench is formed in a dielectric layer. A conductive material is deposited in the wide trench. Trenches are etched in the conductive material to delineate a plurality of metal plugs each contacting a respective metal track exposed by the wide trench. | 07-03-2014 |
| 20140183736 | GRAPHENE ELECTRODES FOR ELECTRONIC DEVICES - A laminated graphene device is demonstrated as a cathode. In one example the devices include organic photovoltaic devices. The measured properties demonstrate work-function matching via contact doping. Devices and method shown also provide increased power conversion efficiency due to transparency. These findings indicate that flexible, light-weight all carbon devices, such as solar cells, can be constructed using graphene as the cathode material. | 07-03-2014 |
| 20140203434 | Semiconductor Integrated Circuit and Fabricating the Same - A method of fabricating a semiconductor integrated circuit (IC) is disclosed. The method includes receiving a precursor. A decomposable polymer layer (DPL) is deposited between the conductive features of the precursor. The DPL is annealed to form an ordered periodic pattern of different types of polymer nanostructures. One type of polymer nanostructure is decomposed by a first selectively to form a trench. The trench is filled by a dielectric layer to form a dielectric block. The remaining types of polymer nanostructures are decomposed by a second selectively etching to form nano-air-gaps. | 07-24-2014 |
| 20140231995 | SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING DEVICE - A device including a first substrate in which a functional element and an electrode are formed; a second substrate in which a through electrode is formed; a joining material that joins the first substrate and the second substrate while reserving a predetermined space between the functional element and the second substrate; and a conductive material that electrically connects the electrode to the through electrode. Here, the joining material is harder than the conductive material, and the joining material is electrically less conductive than the conductive material. | 08-21-2014 |
| 20140239498 | SILICIDED TRENCH CONTACT TO BURIED CONDUCTIVE LAYER - A trench contact silicide is formed on an inner wall of a contact trench that reaches to a buried conductive layer in a semiconductor substrate to reduce parasitic resistance of a reachthrough structure. The trench contact silicide is formed at the bottom, on the sidewalls of the trench, and on a portion of the top surface of the semiconductor substrate. The trench is subsequently filled with a middle-of-line (MOL) dielectric. A contact via may be formed on the trench contact silicide. The trench contact silicide may be formed through a single silicidation reaction with a metal layer or through multiple silicidation reactions with multiple metal layers. | 08-28-2014 |
| 20140239499 | SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCTION OF SEMICONDUCTOR DEVICE - A semiconductor device with a connection pad in a substrate, the connection pad having an exposed surface made of a metallic material that diffuses less readily into a dielectric layer than does a metal of a wiring layer connected thereto. | 08-28-2014 |
| 20140252614 | Surface Treatment Method and Apparatus for Semiconductor Packaging - A surface treatment and an apparatus for semiconductor packaging are provided. In an embodiment, a surface of a conductive layer is treated to create a roughened surface. In one example, nanowires are formed on a surface of the conductive layer. In the case of a copper conductive layer, the nanowires may include a CuO layer. In another example, a complex compound is formed on a surface of the conductive layer. The complex compound may be formed using, for example, thiol and trimethyl phosphite. | 09-11-2014 |
| 20140252615 | SEMICONDUCTOR DEVICE USING CARBON NANOTUBE, AND MANUFACTURING METHOD THEREOF - According to one embodiment, a semiconductor device includes a wiring, a first insulation film, an underlayer deactivation layer, an underlayer, a catalyst layer and a carbon nanotube. The first insulation film is formed on the wiring and includes a hole which exposes the wiring. The underlayer deactivation layer is formed on the first insulation film at a side surface of the hole, and exposes the wiring at a bottom surface of the hole. The underlayer is formed on an exposed surface of the wiring at the bottom surface of the hole and on the underlayer deactivation layer at the side surface of the hole. The catalyst layer is formed on the underlayer at the bottom surface and the side surface of the hole. The carbon nanotube extends from the catalyst layer at the bottom surface of the hole, and fills the hole. | 09-11-2014 |
| 20140264860 | RECTIFIER DIODE - A rectifier diode includes a substrate defining an even number of through holes, one or a number of bare chip diodes placed on the top surface of the substrate with even number of conducting grooves thereof respectively kept in alignment with respective through holes of the substrate, and a conducting unit including a metal interface layer coated on exposed surfaces of each bare chip diode and the substrate using, a conductive metal thin film covered over the metal interface layer and defining an electroplating space within each through hole of the substrate and the corresponding conducting groove of one bare chip diode and a conducting medium coated in each electroplating space to form an electrode pin and a bond pad. | 09-18-2014 |
| 20140264861 | SPUTTER ETCH PROCESSING FOR HEAVY METAL PATTERNING IN INTEGRATED CIRCUITS - A method for fabricating one or more conductive lines in an integrated circuit includes providing a layer of copper containing conductive metal in a multi-layer structure fabricated upon a wafer, providing a first hard mask layer over the layer of copper containing conductive metal, performing a first sputter etch of first hard mask layer using a chlorine-based plasma or a sulfur fluoride-based plasma, and performing a second sputter etch of first hard mask layer using a second plasma, wherein a portion of the layer of copper containing conductive metal residing below a portion of the first hard mask layer that remains after the second sputter etch forms the one or more conductive lines. In one embodiment, the second plasma is a fluorocarbon-based plasma. | 09-18-2014 |
| 20140264862 | Interconnect Structure and Method - A semiconductor device comprises a first semiconductor chip including a first substrate and a plurality of first metal lines formed over the first substrate and a second semiconductor chip bonded on the first semiconductor chip, wherein the second semiconductor chip comprises a second substrate and a plurality of second metal lines formed over the second substrate. The semiconductor device further comprises a conductive plug coupled between the first metal lines and the second metal lines, wherein the conductive plug comprises a first portion formed over a first side of a hard mask layer, wherein the first portion is of a first width and a second portion formed over a second side of the hard mask layer, wherein the second portion is of a second width greater than or equal to the first width. | 09-18-2014 |
| 20140264863 | Conductive Line System and Process - A system and method for providing a conductive line is provided. In an embodiment the conductive line is formed by forming two passivation layers, wherein each passivation layer is independently patterned. Once formed, a seed layer is deposited into the two passivation layers, and a conductive material is deposited to fill and overfill the patterns within the two passivation layers. A planarization process such as a chemical mechanical polish may then be utilized in order to remove excess conductive material and form the conductive lines within the two passivation layers. | 09-18-2014 |
| 20140284797 | POWER SEMICONDUCTOR DEVICE FABRICATION METHOD, POWER SEMICONDUCTOR DEVICE - A method for fabricating a power semiconductor device that comprises a base substrate with a conductive layer on a surface of the base substrate and semiconductor components mounted on the base substrate includes forming a hardened layer on the surface of the conductive layer before mounting a semiconductor component on the base substrate. The forming of the hardened layer may optionally be performed using a peening process, for example, a shot peening process, a laser peening process, or an ultrasonic peening process. The conductive layer may comprise a metal such as, for example, aluminum or copper. | 09-25-2014 |
| 20140299987 | SEMICONDUCTOR DEVICE HAVING GROOVE-SHAPED VIA-HOLE - The semiconductor device has insulating films | 10-09-2014 |
| 20140312497 | Molding Material and Method for Packaging Semiconductor Chips - A method and apparatus for packaging a semiconductor chip is presented. A semiconductor device includes a chip, a lead, and an encapsulant. The encapsulant includes a stabilization layer, a laminate molding layer connected to the stabilization layer, and a conductive strip connected to the laminate molding layer. The conductive strip electrically connects the contact area of the chip to the lead. | 10-23-2014 |
| 20140312498 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - To provide a semiconductor device having improved reliability. | 10-23-2014 |
| 20140332958 | Method for Manufacturing Dummy Gate in Gate-Last Process and Dummy Gate in Gate-Last Process - A method for manufacturing a dummy gate in a gate-last process is provided. The method includes: providing a semiconductor substrate; growing a gate oxide layer on the semiconductor substrate; depositing bottom-layer amorphous silicon on the gate oxide layer; depositing an ONO structured hard mask on the bottom-layer amorphous silicon; depositing top-layer amorphous silicon on the ONO structured hard mask; depositing a hard mask layer on the top-layer amorphous silicon; forming photoresist lines having a width ranging from 32 nm to 45 nm on the hard mask layer; and etching the hard mask layer, the top-layer amorphous silicon, the ONO structured hard mask and the bottom-layer amorphous silicon in accordance with the photoresist lines, and removing the photoresist lines, the hard mask layer and the top-layer α-Si. Correspondingly, a dummy gate in a gate-last process is also provided. | 11-13-2014 |
| 20140346674 | GRAPHENE-METAL E-FUSE - A structure including an M | 11-27-2014 |
| 20140346675 | Semiconductor Integrated Circuit and Fabricating the Same - A semiconductor integrated circuit (IC) with a dielectric matrix is disclosed. The dielectric matrix is located between two conductive features. The matrix includes a first nano-scale dielectric block, a second nano-scale dielectric block, and a first nano-air-gap formed by a space between the first nano-scale dielectric block and the second nano-scale dielectric block. The matrix also includes third nano-scale dielectric block and a second nano-air-gap formed by a space between the second nano-scale dielectric block and the third nano-scale dielectric block. The nano-scale dielectric blocks share a first common width, and the nano-air-gaps share a second common width. An interconnect structure integrates the dielectric matrix with the conductive features. | 11-27-2014 |
| 20140353825 | Silicidation Blocking Process Using Optically Sensitive HSQ Resist and Organic Planarizing Layer - A silicidation blocking process is provided. In one aspect, a silicidation method is provided. The method includes the following steps. A wafer is provided having a semiconductor layer over an oxide layer. An organic planarizing layer (OPL)-blocking structure is formed on one or more regions of the semiconductor layer which will block the one or more regions of the semiconductor layer from silicidation. At least one silicide metal is deposited on the wafer. The wafer is annealed to react the at least one silicide metal with one or more exposed regions of the semiconductor layer. Unreacted silicide metal is removed. Any remaining portions of the OPL-blocking structure are removed. | 12-04-2014 |
| 20140367855 | Self-Aligned Via Interconnect Using Relaxed Patterning Exposure - Self-aligned via interconnects using relaxed patterning exposure. In accordance with a first method embodiment, a method for controlling a computer-aided design (CAD) system for designing physical features of an integrated circuit includes accessing a first pattern for first metal traces on a first metal layer, accessing a second pattern for second metal traces on a second metal layer, vertically adjacent to the first metal layer and accessing a precise pattern of intended interconnections between the first and second metal traces. The precise pattern of intended interconnections is operated on to form an imprecise via pattern that indicates a plurality of general areas in which vias are allowed. The imprecise via pattern is for use in an integrated circuit manufacturing process to form, in conjunction with operations to form the first and second metal layers, a plurality of self-aligned vias for interconnecting the intended interconnections. | 12-18-2014 |
| 20140367856 | SEMICONDUCTOR MANUFACTURING PROCESS AND STRUCTURE THEREOF - A semiconductor manufacturing process includes the following steps of providing a silicon substrate having at least one connection pad and a protection layer, forming a first seed layer having at least one first section and at least one second section, forming a first photoresist layer, forming a first buffer layer having a coupling portion and a cladding portion, removing the first photoresist layer, removing the second section of the first seed layer to form a first under bump metallurgy layer, forming a support layer on the protection layer and the first buffer layer, the first under bump metallurgy layer has a first ring wall, the first buffer layer has a second ring wall, wherein the first ring wall, the second ring wall and the cladding portion are cladded by the support layer, and forming a connection portion and covering the coupling portion with the connection portion. | 12-18-2014 |
| 20140374904 | SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS - The present disclosure provides a semiconductor device, including: an insulation layer and a wiring line layer, the wiring line layer including a wiring line having a line width and a line height, at least one of which is 15 nm or less, and containing Ni or Co as a main component thereof. In another embodiment, there is provided a semiconductor device manufacturing method for manufacturing a semiconductor device including an insulation layer and a wiring line layer, including: forming the wiring line layer on the insulation layer, the wiring line layer including a wiring line having a line width and a line height, at least one of which is 15 nm or less, and containing Ni or Co as a main component thereof. | 12-25-2014 |
| 20150028482 | DEVICE LAYOUT FOR REDUCING THROUGH-SILICON-VIA STRESS - Approaches for reducing through-silicon via (TSV) stress are provided. Specifically, provided is a device comprising a substrate and a TSV formed in the substrate, the TSV having an element patterned therein. The TSV further comprises a set of openings adjacent the element that are subsequently filled with a TSV fill material. The element may be patterned according to any number of shapes (e.g., circle, oval, rectangle, etc.) to optimize the stress distribution for the TSV. The element is patterned and provided within the TSV in order to reduce or compensate for stress forces caused by a change in volume of the conductive fill materials of the openings of the TSV. These approaches apply to both single TSVs and a plurality of TSVs (e.g., arranged as a matrix). | 01-29-2015 |
| 20150035149 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - According to one embodiment, a semiconductor device includes a semiconductor substrate provided with a lower interconnect layer formed thereon, and having a device region and a mark formation region, a CNT via structure formed in the device region such that it contacts the lower interconnect layer, a first mark formed in the mark formation region, formed by embedding carbon nanotubes, and formed in the same layer as the CNT via structure, a second mark formed in the mark formation region of the semiconductor substrate, formed with no carbon nanotubes, and formed in the same layer as the CNT via structure and the first mark, and an interconnect layer formed on the CNT via structure and the first and second marks, and electrically connected to the CNT via structure. | 02-05-2015 |
| 20150054156 | SEMICONDUCTOR STRUCTURES AND FABRICATION METHOD THEREOF - A method is provided for fabricating a semiconductor structure. The method includes providing a substrate; and forming a conductive layer in one surface of the substrate. The method also includes forming a dielectric layer on the surface of the substrate; and forming an opening exposing a portion of the conductive layer in the dielectric layer. Further, the method includes forming a passivation layer for protecting the portion of the conductive layer on a surface of the portion of the conductive layer on the bottom of the opening using a passivation solution; and cleaning inner surface of the opening using a cleaning solution not reacting with the passivation layer. Further, the method also includes removing the passivation layer; and forming a metal layer connecting with the conductive layer in the opening. | 02-26-2015 |
| 20150054157 | ELECTRONIC CIRCUIT UNIT AND METHOD OF MANUFACTURING ELECTRONIC CIRCUIT UNIT - An electronic circuit unit includes a circuit substrate having a rectangular shape and is obtained by cutting an integral substrate along a vertical cut line and a horizontal cut line to be separated; a copper foil land soldered to components; and a substrate outer edge, which is formed by cutting, of two sides orthogonal to each other. The copper foil land and the substrate outer edge are positioned in the vicinity of a corner of the circuit substrate. Solder resist is provided around the copper foil land. A plurality of substrate exposure portions without the solder resist is provided in the vicinity of the substrate outer edge. | 02-26-2015 |
| 20150061131 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a semiconductor device in which CNTs are used for a contact via comprises a substrate includes a contact via groove, a catalyst layer for CNT growth which is formed at the bottom of the groove, and a CNT via formed by filling the CNTs into the groove in which the catalyst layer is formed. Each of the CNTs is formed by stacking a plurality of graphene layers in a state in which they are inclined depthwise with respect to the groove, and formed such that ends of the graphene layers are exposed on a sidewall of the CNT. Further, the CNT is doped with at least one element from the sidewall of the CNT. | 03-05-2015 |
| 20150061132 | CONDUCTIVE LINE STRUCTURES AND METHODS OF FORMING THE SAME - Conductive line structures, and methods of forming the same, include first and second pattern structures, insulation layer patterns and an insulating interlayer. The first pattern structure includes a conductive line pattern and a hard mask stacked, and extends in a first direction. The second pattern structure includes a second conductive line pattern and another hard mask stacked, and at least a portion of the pattern structure extends in the first direction. The insulation layer patterns contact end portions of the pattern structures. The first pattern structure and an insulation layer pattern form a closed curve shape in plan view, and the second pattern structure and another insulation layer pattern form another closed curve shape in plan view. The insulating interlayer covers upper portions of the pattern structures and the insulation layer patterns, an air gap between the pattern structures, and another air gap between the insulation layer patterns. | 03-05-2015 |
| 20150069608 | THROUGH-SILICON VIA STRUCTURE AND METHOD FOR IMPROVING BEOL DIELECTRIC PERFORMANCE - An improved through-silicon via (TSV) and method of fabrication are disclosed. A back-end-of-line (BEOL) stack is formed on a semiconductor substrate. A TSV cavity is formed in the BEOL stack and semiconductor substrate. A conformal protective layer is disposed on the interior surface of the TSV cavity, along the BEOL stack and partway into the semiconductor substrate. The conformal protective layer serves to protect the dielectric layers within the BEOL stack during subsequent processing, improving the integrated circuit quality and product yield. | 03-12-2015 |
| 20150069609 | 3D CHIP CRACKSTOP - Embodiments of the present invention provide a crackstop and seal ring for 3D chip stacked wafers. A continuous through-silicon trench (TST) spans multiple wafers of a 3D chip stacked wafer, and forms a closed shape around a functional circuit or die, protecting the chip during subsequent fabrication such as dicing and packaging. | 03-12-2015 |
| 20150069610 | ELECTRODE CONTACT STRUCTURE FOR SEMICONDUCTOR DEVICE - In one embodiment, a method for forming a semiconductor device having a shield electrode includes forming first and second shield electrode contact portions within a contact trench. The first shield electrode contact portion can be formed recessed within the contact trench and includes a flat portion. The second shield electrode contact portion can be formed within the contact trench and makes contact to the first shield electrode contact portion along the flat portion. | 03-12-2015 |
| 20150076693 | SEMICONDUCTOR DEVICE WITH DAMASCENE BIT LINE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a substrate having a plurality of contact surfaces, an interlayer dielectric layer formed over the substrate and having a first open portion which exposes a part of the contact surfaces and a second open portion which exposes the other contact surfaces, a storage node contact (SNC) plug filling the first open portion, and a damascene structure filing the second open portion and including a bit line, a spacer formed on both sidewalls of the bit line, a capping layer formed over the bit line and the spacer, and an air gap formed between the bit line and the spacer. The bit line includes a conductive material of which the volume is contracted by a heat treatment to form the air gap. | 03-19-2015 |
| 20150084193 | EMBEDDED ON-CHIP SECURITY - Embodiments of the invention include a semiconductor structure containing a back end of line randomly patterned interconnect structure for implementing a physical unclonable function (PUF), a method for forming the semiconductor device, and a circuit for enabling the interconnect structure to implement the physical unclonable function. The method includes forming a semiconductor substrate and a dielectric layer on the substrate. The randomly patterned interconnect structure is formed in the dielectric layer. The random pattern of the interconnect structure is used to implement the physical unclonable function and is a result of defect occurrences during the manufacturing of the semiconductor structure. The circuit includes n-channel and p-channel metal oxide semiconductor field effect transistors (MOSFETs) and the randomly patterned interconnect structure, which acts as electrical connections between the MOSFETs. The random electrical connections between MOSFETs are utilized for generation of unique keys for purposes such as authentication or identification. | 03-26-2015 |
| 20150084194 | PACKAGE VIAS FOR RADIO FREQUENCY ANTENNA CONNECTIONS - Via are described for radio frequency antenna connections related to a package. In one example, a package has a package substrate, a die attached to the package substrate, and a conductive via from the package substrate to an external surface of the package to make a radio frequency connection between the antenna and the package substrate. | 03-26-2015 |
| 20150091171 | Metal Redistribution Layer for Molded Substrates - Integrated circuits are packaged by placing a plurality of semiconductor dies on a support substrate, each one of the semiconductor dies having a plurality of terminals at a side facing the support substrate and covering the semiconductor dies with a molding compound to form a molded structure. The support substrate is then removed from the molded structure to expose the side of the semiconductor dies with the terminals, and a metal redistribution layer is formed on the molded structure and in direct contact with the terminals of the semiconductor dies and the molding compound. The redistribution layer is formed without first forming a dielectric layer on a side of the molded structure with the terminals of the semiconductor dies. A corresponding molded substrate and individual molded semiconductor packages are also disclosed. | 04-02-2015 |
| 20150091172 | PORE SEALING TECHNIQUES FOR POROUS LOW-K DIELECTRIC INTERCONNECT - The present disclosure relates to a method of forming pore sealing layer for porous low-k dielectric interconnects. The method is performed by removing hard mask layer before pore sealing and/or applying pore sealing layer before etching etch stop layer (ESL). These methods at least have advantages that aspect ratio is improved, line distortion introduced by the hard mask layer is avoided, and critical dimension is less affected by pore sealing layer. | 04-02-2015 |
| 20150097288 | High Density Dielectric Etch Stop Layer - A method of manufacturing an integrated circuit device includes forming an inter-level dielectric layer over a semiconductor substrate, forming a transformative layer over the inter-level dielectric layer, forming a protective layer over the transformative layer without allowing the transformative layer to undergo a substantive transformation, and after forming the protective layer, causing the transformative layer to undergo a volume-increasing transformation. The volume-increasing transformation produces a high density material that provides an effective etch stop. | 04-09-2015 |
| 20150115444 | WAFER ARRANGEMENT, A METHOD FOR TESTING A WAFER, AND A METHOD FOR PROCESSING A WAFER - According to various embodiments, a wafer arrangement may be provided, the wafer arrangement may include: a wafer including at least one electronic component having at least one electronic contact exposed on a surface of the wafer; an adhesive layer structure disposed over the surface of the wafer, the adhesive layer structure covering the at least one electronic contact; and a carrier adhered to the wafer via the adhesive layer structure, wherein the carrier may include a contact structure at a surface of the carrier aligned with the at least one electronic contact so that by pressing the wafer in direction of the carrier, the contact structure can be brought into electrical contact with the at least one electronic contact of the at least one electronic component. | 04-30-2015 |
| 20150115445 | DEVICES, SYSTEMS AND METHODS FOR MANUFACTURING THROUGH-SUBSTRATE VIAS AND FRONT-SIDE STRUCTURES - Methods of manufacturing semiconductor devices and semiconductor devices with through-substrate vias (TSVs). One embodiment of a method of manufacturing a semiconductor device includes forming an opening through a dielectric structure and at least a portion of a semiconductor substrate, and forming a dielectric liner material having a first portion lining the opening and a second portion on an outer surface of the dielectric structure laterally outside of the opening. The method further includes removing the conductive material such that the second portion of the dielectric liner material is exposed, and forming a damascene conductive line in the second portion of the dielectric liner material that is electrically coupled to the TSV. | 04-30-2015 |
| 20150130062 | Method for Manufacturing Germanide Interconnect Structures and Corresponding Interconnect Structures - Method for forming an interconnect structure, comprising the steps of: forming a recessed structure in a dielectric material on a substrate; at least partially filling said recessed structure with a metal chosen from the group consisting of copper, nickel and cobalt; introducing the substrate in a CVD reactor; bringing the substrate in the CVD reactor to a soak temperature and subsequently performing a soak treatment by supplying a germanium precursor gas to the CVD reactor at the soak temperature, thereby substantially completely converting the metal in the recessed structure to a germanide. | 05-14-2015 |
| 20150137367 | METHOD FOR FORMING TRANSPARENT ELECTRODE AND SEMICONDUCTOR DEVICE MANUFACTURED USING SAME - Provided are a method for forming a transparent electrode and a semiconductor device where the transparent electrode is formed by using the method. The method for forming a transparent electrode includes: forming a transparent electrode by using a transparent material of which resistance state is to be changed from a high resistance state into a low resistance state according to an applied electric field; and performing a forming process of changing the resistance state of the transparent electrode into the low resistance state by applying a voltage to the transparent electrode, so that the transparent electrode has conductivity. Accordingly, it is possible to form the transparent electrode having good ohmic characteristic with respect to the semiconductor layer formed above or below the transparent electrode and high transmittance with respect to the light having a short wavelength in a UV wavelength range as well as the light in visible wavelength range. | 05-21-2015 |
| 20150137368 | LANDING STRUCTURE FOR THROUGH-SILICON VIA - Embodiments of the present disclosure describe techniques and configurations associated with forming a landing structure for a through-silicon via (TSV) using interconnect structures of interconnect layers. In one embodiment, an apparatus includes a semiconductor substrate having a first surface and a second surface opposite to the first surface, a device layer disposed on the first surface of the semiconductor substrate, the device layer including one or more transistor devices, interconnect layers disposed on the device layer, the interconnect layers including a plurality of interconnect structures and one or more through-silicon vias disposed between the first surface and the second surface, wherein the plurality of interconnect structures include interconnect structures that are electrically coupled with the one or more TSVs and configured to provide one or more corresponding landing structures of the one or more TSVs. Other embodiments may be described and/or claimed. | 05-21-2015 |
| 20150137369 | METHOD OF OPTICAL PROXIMITY CORRECTION FOR MODIFYING LINE PATTERNS AND INTEGRATED CIRCUITS WITH LINE PATTERNS MODIFIED BY THE SAME - A method of optical proximity correction executed by a computer system for modifying line patterns includes the following steps. First, providing an integrated circuit layout with parallel line patterns and interconnect patterns disposed corresponding to the parallel line patterns. Then, using the computer to modify the integrated circuit layout based on a position of the interconnect patterns so as to generate a convex portion and a concave portion respectively on two sides of each of the parallel line patterns. Portions of the line pattern in front of and behind the convex portion and the concave portion are straight lines and have an identical critical dimension. | 05-21-2015 |
| 20150294905 | SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF - A semiconductor arrangement and method of formation are provided. The semiconductor arrangement includes a first metal trace having a first metal trace width between about 30 nm to about 60 nm and a first metal trace length. A second metal trace has a second metal trace width between about 10 nm to about 20 nm and a second metal trace length, the first metal trace length different than the second metal trace length. A dielectric layer is between the first metal trace and the second metal trace. The dielectric layer has a dielectric layer width between the first metal trace and the second metal trace between about 10 nm to about 20 nm. The semiconductor arrangement is formed in a manner that allows metal traces having small dimensions to be formed where the metal traces have different dimensions from one another. | 10-15-2015 |
| 20150294938 | CONDUCTIVE VIA STRUCTURE AND FABRICATION METHOD THEREOF - A method for fabricating a conductive via structure is provided, which includes the steps of: forming in an encapsulant a plurality of openings penetrating therethrough; forming a dielectric layer on the encapsulant and in the openings of the encapsulant; forming a plurality of vias in the dielectric layer in the openings of the encapsulant; and forming a conductive material in the vias to thereby form conductive vias. Therefore, by filling the openings having rough wall surfaces with the dielectric layer so as to form the vias having even wall surfaces, the present invention improves the quality of the conductive vias. | 10-15-2015 |
| 20150303101 | FLUORINE-CONTAINING CONDUCTIVE FILMS - An atomic layer deposition (ALD) process for depositing a fluorine-containing thin film on a substrate can include a plurality of super-cycles. Each super-cycle may include a metal fluoride sub-cycle and a reducing sub-cycle. The metal fluoride sub-cycle may include contacting the substrate with a metal fluoride. The reducing sub-cycle may include alternately and sequentially contacting the substrate with a reducing agent and a nitrogen reactant. | 10-22-2015 |
| 20150325522 | INTERCONNECT STRUCTURE AND MANUFACTURING METHOD THEREOF - A method for manufacturing a semiconductor comprises: providing a substrate; forming an opening in a dielectric layer disposed over the substrate; providing a target with a first type atoms; ionizing the first type atoms provided from the target; providing a bias to the substrate for controlling the moving paths of the ionized first type atoms thereby directing the ionized first type atoms in the opening; and forming a first conductive structure from bottom of the opening with the ionized first type atoms under a pre-determined frequency and a pre-determined pressure. | 11-12-2015 |
| 20150333002 | Conductive Line Patterning - A conductive line structure includes two conductive lines in a layout. The two cut lines are over at least a part of the two conductive lines in the layout. The cut lines designate cut sections of the two conductive lines and the cut lines are spaced from each other within a fabrication process limit. The two cut lines are connected in the layout. The two conductive lines are patterned over a substrate in a physical integrated circuit using the two connected parallel cut lines. The two conductive lines are electrically conductive. | 11-19-2015 |
| 20150340639 | Electrolytic Copper Foil and Electronic Device - Provided is an electrolytic copper foil significantly useful as electrodes for electronic devices. The electrolytic copper foil used for an electronic device according to the present invention includes copper or copper alloy, the electrolytic copper foil having a 0.2% proof stress of 250 N/mm2 or more after heat treatment at 200° C. for 60 min in a nitrogen atmosphere, wherein at least one of the surfaces of the electrolytic copper foil has a concave-dominant surface profile having a Pv/Pp ratio of 1.2 or more, the Pv/Pp ratio being a ratio of a maximum profile valley depth Pv to a maximum profile peak height Pp as determined in a rectangular area of 181 μm by 136 μm in accordance with JIS B 0601-2001. | 11-26-2015 |
| 20150349068 | CONTACT RESISTANCE OPTIMIZATION VIA EPI GROWTH ENGINEERING - A transistor contact structure and methods of making the same. The method includes forming a first semiconductor layer in a source/drain opening of a substrate, the first layer having a non-planar top surface; forming a second semiconductor layer directly on the first layer, the second layer having a defect density greater than the first layer; and forming a silicide region formed with the second layer, the silicide region having a non-planar interface with the first layer. A portion of the silicide interface may be higher than a top surface of the substrate and another portion may be below. | 12-03-2015 |
| 20150362769 | CHIP ON FILM SUBSTRATE, METHOD FOR MANUFACTURING THE SAME AND DISPLAY DEVICE - A chip-on-film (COF) substrate is provided, comprising: a substrate; bonding leads disposed on a surface of the substrate; a protection layer disposed on a predetermined position of the bonding leads; a metal thin film protective layer disposed on an area of the bonding leads without coating with the protection layer. The time of the corrosion of the copper is delayed and the rate of the corrosion of the copper is slowed down though coating the active metal thin film protective layer on a portion of the bonding leads of the COF substrate exposed to the air, reducing the risk of the bonding lead of the COF substrate being corroded and cracking. | 12-17-2015 |
| 20150364561 | IMPROVED LOW RESISTANCE CONTACTS FOR SEMICONDUCTOR DEVICES - The invention provides a method of forming at least one Metal Germanide contact on a substrate for providing a semiconducting device ( | 12-17-2015 |
| 20150371977 | DISPLAY PANEL AND MANUFACTURING METHOD THEREOF - A display panel including an array substrate and a COF substrate is provided. The COF is provided with a plurality of welded lead lines. The array substrate includes a metal layer disposed on a surface of the substrate, a silicon nitride layer disposed on a surface of the metal layer, and a plurality of terminal wires disposed in a spaced arrangement in a welding region on a surface of the second silicon nitride layer. The welding region between the adjacent terminal wires is provided with through holes, which expose the metal layer. The risk of corrosion and breakage of the welded lead lines on the COF substrate is effectively reduced. | 12-24-2015 |
| 20150380356 | EMBEDDED SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THEREOF - A package structure includes a dielectric layer, at least one semiconductor device attached to the dielectric layer, one or more dielectric sheets applied to the dielectric layer and about the semiconductor device(s) to embed the semiconductor device(s) therein, and a plurality of vias formed to the semiconductor device(s) that are formed in at least one of the dielectric layer and the one or more dielectric sheets. The package structure also includes metal interconnects formed in the vias and on one or more outward facing surfaces of the package structure to form electrical interconnections to the semiconductor device(s). The dielectric layer is composed of a material that does not flow during a lamination process and each of the one or more dielectric sheets is composed of a curable material configured to melt and flow when cured during the lamination process so as to fill-in any air gaps around the semiconductor device(s). | 12-31-2015 |
| 20150380367 | SEMICONDUCTOR CHIP AND METHOD OF MANUFACTURING THE SAME - A chip includes a substrate and a dielectric layer disposed on the substrate. The dielectric layer includes a first dielectric region and a second dielectric region surrounding an outer periphery of the first dielectric region. A top surface of the first dielectric region is disposed below a top surface of the second dielectric region. The chip further includes a metal pad disposed in a through-hole in the first dielectric region and contacting a portion of the substrate. | 12-31-2015 |
| 20150380368 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR DEVICE - A semiconductor device has a module structure in which a semiconductor element and a circuit layer are electrically connected to each other by a wire. A front metal layer is formed on a surface of a top side electrode of the semiconductor element and the wire is bonded to the front metal layer by wire bonding. The front metal layer has a higher hardness than the top side electrode or the wire. A bonding interface of the wire with the metal film has a recrystallization temperature that is equal to or higher than 175° C. According to this structure, it is possible to improve the power cycle resistance of the semiconductor device. | 12-31-2015 |
| 20160013127 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME | 01-14-2016 |
| 20160027729 | INVERTED-T SHAPED VIA FOR REDUCING ADVERSE STRESS-MIGRATION EFFECTS - A semiconductor interconnect structure is formed as a via with an inverted-T shape to increase the reliability of the interface between the interconnect structure and an underlying electrically conductive, e.g., copper (Cu), layer of material. The inverted-T shape effectively increases a bottom critical dimension of the via, thereby reducing and/or eliminating via degradation of the interconnect structure caused by voids in the electrically conductive layer introduced during high-temperature or stress-migration baking. | 01-28-2016 |
| 20160027759 | Process for Connecting Joining Parts - A method is provided for connecting parts to be joined. A first layer sequence is applied to a first part to be joined. The first layer sequence contains silver. A second layer sequence is applied to a second part to be joined. The second layer sequence contains indium and bismuth. The first layer sequence and the second layer sequence are pressed together at their end faces respectively remote from the first part to be joined and the second part to be joined through application of a joining pressure at a joining temperature which amounts to at most 120° C. for a predetermined joining time. The first layer sequence and the second layer sequence fuse together to form a bonding layer which directly adjoins the first part to be joined and the second part to be joined and the melting temperature of which amounts to at least 260° C. | 01-28-2016 |
| 20160027760 | 4D DEVICE, PROCESS AND STRUCTURE - A 4D device comprises a 2D multi-core logic and a 3D memory stack connected through the memory stack sidewall using a fine pitch T&J connection. The 3D memory in the stack is thinned from the original wafer thickness to no remaining Si. A tongue and groove device at the memory wafer top and bottom surfaces allows an accurate stack alignment. The memory stack also has micro-channels on the backside to allow fluid cooling. The memory stack is further diced at the fixed clock-cycle distance and is flipped on its side and re-assembled on to a template into a pseudo-wafer format. The top side wall of the assembly is polished and built with BEOL to fan-out and use the T&J fine pitch connection to join to the 2D logic wafer. The other side of the memory stack is polished, fanned-out, and bumped with C4 solder. The invention also comprises a process for manufacturing the device. In another aspect, the invention comprises a 4D process and device for over 50× greater than 2D memory density per die and an ultra high density memory. | 01-28-2016 |
| 20160043056 | DIE ASSEMBLY ON THIN DIELECTRIC SHEET - A die assembly formed on a thin dielectric sheet is described. In one example, a first and a second die have interconnect areas. A dielectric sheet is over the interconnect areas of the first and the second die. Conductive vias in the dielectric sheet connect with pads of the interconnect areas. A build-up layer over the dielectric sheet includes routing to connect pads of the first die interconnect area to pads of the second die interconnect area through the conductive vias. The dies are mounted to a package substrate through the build-up layers, and a package cover is over the dies, the dielectric sheet, and the build-up layer. | 02-11-2016 |
| 20160049294 | Mixed Lithography Approach for E-Beam and Optical Exposure Using HSQ - In one aspect, a method of forming a wiring layer on a wafer is provided which includes: depositing a HSQ layer onto the wafer; cross-linking a first portion(s) of the HSQ layer using e-beam lithography; depositing a hardmask material onto the HSQ layer; patterning the hardmask using optical lithography, wherein the patterned hardmask covers a second portion(s) of the HSQ layer; patterning the HSQ layer using the patterned hardmask in a manner such that i) the first portion(s) of the HSQ layer remain and ii) the second portion(s) of the HSQ layer covered by the patterned hardmask remain, wherein by way of the patterning step trenches are formed in the HSQ layer; and filling the trenches with a conductive material to form the wiring layer on the wafer. | 02-18-2016 |
| 20160049370 | METHODS OF FORMING MIS CONTACT STRUCTURES FOR SEMICONDUCTOR DEVICES BY SELECTIVE DEPOSITION OF INSULATING MATERIAL AND THE RESULTING DEVICES - One method disclosed herein includes, among other things, forming at least one layer of insulating material above a semiconductor layer, performing at least one contact opening etching process to form a contact opening in the at least one layer of insulating material that exposes a portion of the semiconductor layer, selectively depositing a metal-oxide insulating material through the contact opening on the exposed surface of the semiconductor layer, and forming a conductive contact in the contact opening that contacts the metal-oxide insulating material. | 02-18-2016 |
| 20160056104 | SELF-ALIGNED BACK END OF LINE CUT - Embodiments of the present invention provide a method for self-aligned metal cuts in a back end of line structure. Sacrificial Mx+1 lines are formed above metal Mx lines. Spacers are formed on each Mx+1 sacrificial line. The gap between the spacers is used to determine the location and thickness of cuts to the Mx metal lines. This ensures that the Mx metal line cuts do not encroach on vias that interconnect the Mx and Mx+1 levels. It also allows for reduced limits in terms of via enclosure rules, which enables increased circuit density. | 02-25-2016 |
| 20160056136 | ELECTRICAL INTERCONNECT STRUCTURE FOR AN EMBEDDED SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THEREOF - An electronics package includes a first dielectric substrate having a first plurality of vias formed through a thickness thereof, a metalized contact layer coupled to a top surface of the first dielectric substrate, and a first die positioned within a first die opening formed through the thickness of the first dielectric substrate. Metalized interconnects are formed on a bottom surface of the first dielectric substrate and extend through the first plurality of vias to contact the metalized contact layer. A second dielectric substrate is coupled to the first dielectric substrate and has a second plurality of vias formed through a thickness thereof. Metalized interconnects extend through the second plurality of vias to contact the first plurality of metalized interconnects and contact pads of the first die. A first conductive element electrically couples the first die to the metalized contact layer. | 02-25-2016 |
| 20160056256 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - According to one embodiment, a semiconductor device is disclosed. The device includes a foundation layer including first and second layers being different from each other in material, and the foundation layer including a surface on which a boundary of the first and second layers is presented, a catalyst layer on the surface of the foundation layer, and the catalyst layer including a protruding area. The device further includes a graphene layer being in contact with the protruding area. | 02-25-2016 |
| 20160093573 | OVERLAY MARK AND METHOD FOR FORMING THE SAME - An overlay mark applied to a LELE-type double patterning lithography (DPL) process including a first lithography step, a first etching step, a second lithography step and a second etching step in sequence is described. The overlay mark includes a first x-directional pattern and a first y-directional pattern of a previous layer, second x-directional and y-directional patterns of a current layer defined by the first lithography step, and third x-directional and y-directional patterns of the current layer defined by the second lithography step. The second x-directional patterns and the third x-directional patterns are arranged alternately beside the first x-directional pattern. The second y-directional patterns and the third y-directional patterns are arranged alternately beside the first y-directional pattern. | 03-31-2016 |
| 20160099233 | HETEROGENEOUS ANNEALING METHOD AND DEVICE - A method of integrating a first substrate having a first surface with a first insulating material and a first contact structure with a second substrate having a second surface with a second insulating material and a second contact structure. The first insulating material is directly bonded to the second insulating material. A portion of the first substrate is removed to leave a remaining portion. A third substrate having a coefficient of thermal expansion (CTE) substantially the same as a CTE of the first substrate is bonded to the remaining portion. The bonded substrates are heated to facilitate electrical contact between the first and second contact structures. The third substrate is removed after heating to provided a bonded structure with reliable electrical contacts. | 04-07-2016 |
| 20160104674 | INTEGRATED CIRCUIT WITH ELONGATED COUPLING - An integrated circuit comprises a first layer on a first level. The first layer comprises a set of first lines. The first lines each have a length and a width. The length of each of the first lines is greater than the width. The integrated circuit also comprises a second layer on a second level different from the first level. The second layer comprises a set of second lines. The second lines each have a length and a width. The length of each of the second lines is greater than the width. The integrated circuit further comprises a coupling configured to connect at least one first line of the set of first lines with at least one second line of the set of second lines. The coupling has a length and a width. The set of second lines has a pitch measured between the lines of the set of second lines in the first direction. The length of the first coupling is greater than or equal to the pitch. | 04-14-2016 |
| 20160111363 | Electrical Connections for Chip Scale Packaging - Electrical connections for chip scale packaging are disclosed. In one embodiment, a semiconductor device includes a post-passivation layer disposed over a substrate, the substrate having a first direction of coefficient of thermal expansion mismatch. The semiconductor device includes a first opening through the post-passivation layer, the first opening comprising a plurality of elongated apertures. A longest of the plurality of elongated apertures comprises a first dimension, wherein the first dimension is aligned substantially perpendicular to the first direction of coefficient of thermal expansion mismatch. | 04-21-2016 |
| 20160111386 | BOND PAD STRUCTURE FOR LOW TEMPERATURE FLIP CHIP BONDING - Methods for preparing 3D integrated semiconductor devices and the resulting devices are disclosed. Embodiments include forming a first and a second bond pad on a first and a second semiconductor device, respectively, the first and the second bond pads each having plural metal segments, the metal segments of the first bond pad having a configuration different from a configuration of the metal segments of the second bond pad or having the same configuration as a configuration of the metal segments of the second bond pad but rotated with respect to the second bond pad; and bonding the first and second semiconductor devices together through the first and second bond pads. | 04-21-2016 |
| 20160111429 | LC MODULE LAYOUT ARRANGEMENT FOR CONTACT OPENING ETCH WINDOWS - A lay-out arrangement for LC modules in | 04-21-2016 |
| 20160126161 | SEMICONDUCTOR PACKAGE - A semiconductor package includes a packaging substrate having a first surface and a second surface opposite to the first surface; and a semiconductor die assembled on the first surface of the packaging substrate. The semiconductor die includes a plurality of first bump pads and second bump pads on an active surface of the semiconductor die, a plurality of first copper pillars on the first bump pads, and a plurality of second copper pillars on the second bump pads. The first copper pillars have a diameter that is smaller than that of the second copper pillars. | 05-05-2016 |
| 20160133564 | SEMICONDUCTOR DEVICE WITH DAMASCENE BIT LINE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a substrate having a plurality of contact surfaces, an interlayer dielectric layer formed over the substrate and having a first open portion which exposes a part of the contact surfaces and a second open portion which exposes the other contact surfaces, a storage node contact (SNC) plug filling the first open portion, and a damascene structure filing the second open portion and including a bit line, a spacer formed on both sidewalls of the bit line, a capping layer formed over the bit line and the spacer, and an air gap formed between the bit line and the spacer. The bit line includes a conductive material of which the volume is contracted by a heat treatment to form the air gap. | 05-12-2016 |
| 20160149011 | POLY SANDWICH FOR DEEP TRENCH FILL - A semiconductor device is formed by forming a deep trench in a substrate and a dielectric liner on sidewalls of the deep trench. A first undoped polysilicon layer is formed on the semiconductor device, extending into the deep trench on the dielectric liner, but not filling the deep trench. Dopants are implanted into the first polysilicon layer. A second layer of polysilicon is formed on the first layer of polysilicon. A thermal drive anneal activates and diffuses the dopants. In one version, the dielectric liner is removed at the bottom of the deep trench before the first polysilicon layer is formed, so that the polysilicon in the deep trench provides a contact to the substrate. In another version, the polysilicon in the deep trench is isolated from the substrate by the dielectric liner. | 05-26-2016 |
| 20160149012 | VERY HIGH ASPECT RATIO CONTACT - A semiconductor device with a very high aspect ratio contact has a deep trench in the substrate. A dielectric liner is formed on sidewalls and a bottom of the deep trench. A contact opening is formed through the dielectric liner at the bottom of the deep trench to expose the substrate, leaving the dielectric liner on the sidewalls. Electrically conductive material is formed in the deep trench to provide the very high aspect ratio contact to the substrate through the contact opening. | 05-26-2016 |
| 20160172303 | Contact Critical Dimension Control | 06-16-2016 |
| 20160172305 | CONDUCTIVE STRUCTURE AND MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF | 06-16-2016 |
| 20160172308 | OVERLAY MARK | 06-16-2016 |
| 20160181197 | RELIABLE PASSIVATION LAYERS FOR SEMICONDUCTOR DEVICES | 06-23-2016 |
| 20160190042 | DEVICES, SYSTEMS AND METHODS FOR MANUFACTURING THROUGH-SUBSTRATE VIAS AND FRONT-SIDE STRUCTURES - Methods of manufacturing semiconductor devices and semiconductor devices with through-substrate vias (TSVs). One embodiment of a method of manufacturing a semiconductor device includes forming an opening through a dielectric structure and at least a portion of a semiconductor substrate, and forming a dielectric liner material having a first portion lining the opening and a second portion on an outer surface of the dielectric structure laterally outside of the opening. The method further includes removing the conductive material such that the second portion of the dielectric liner material is exposed, and forming a damascene conductive line in the second portion of the dielectric liner material that is electrically coupled to the TSV. | 06-30-2016 |
| 20160190052 | FEEDTHROUGH ASSEMBLIES AND METHODS OF FORMING SAME - Various embodiments of a feedthrough assembly and methods of forming such assemblies are disclosed. In one or more embodiments, the feedthrough assembly can include a non-conductive substrate and a feedthrough. The feedthrough can include a via from an outer surface to an inner surface of the non-conductive substrate, a conductive material disposed in the via, and an external contact disposed over the via on the outer surface of the non-conductive substrate. The external contact can be electrically coupled to the conductive material disposed in the via. And the external contact can be hermetically sealed to the outer surface of the non-conductive substrate by a bond surrounding the via. In one or more embodiments, the bond can be a laser bond. | 06-30-2016 |
| 20160190068 | CONTACT STRUCTURE AND FORMATION THEREOF - A semiconductor device and methods of formation are provided. A semiconductor device includes an annealed cobalt plug over a silicide in a first opening of the semiconductor device, wherein the annealed cobalt plug has a repaired lattice structure. The annealed cobalt plug is formed by annealing a cobalt plug at a first temperature for a first duration, while exposing the cobalt plug to a first gas. The repaired lattice structure of the annealed cobalt plug is more regular or homogenized as compared to a cobalt plug that is not so annealed, such that the annealed cobalt plug has a relatively increased conductivity or reduced resistivity. | 06-30-2016 |
| 20170233615 | INKJET ADHESIVE, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, AND ELECTRONIC COMPONENT | 08-17-2017 |
| 20190143434 | Semiconductor Device and Method of Manufacturing Semiconductor Device | 05-16-2019 |
| 20190148165 | SEMICONDUCTOR DEVICE HAVING ONE OR MORE TITANIUM INTERLAYERS AND METHOD OF MAKING THE SAME | 05-16-2019 |
| 20190148268 | UNDERFILL MATERIAL FLOW CONTROL FOR REDUCED DIE-TO-DIE SPACING IN SEMICONDUCTOR PACKAGES | 05-16-2019 |
