| Entries |
| Document | Title | Date |
|---|
| 20080227280 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - According to the present invention, it is provided a method of manufacturing a semiconductor device comprising a PMOS transistor and an NMOS transistor, wherein the method facilitates obtaining a full silicide phase of a suitable composition for the NMOS transistor and the PMOS transistor respectively, with fewer mask layers and through a fewer number of manufacturing steps. | 09-18-2008 |
| 20080242070 | INTEGRATION SCHEMES FOR FABRICATING POLYSILICON GATE MOSFET AND HIGH-K DIELECTRIC METAL GATE MOSFET - Multiple integration schemes for manufacturing dual gate semiconductor structures are disclosed. By employing the novel integration schemes, polysilicon gate MOSFETs and high-k dielectric metal gate MOSFETs are formed on the same semiconductor substrate despite differences in the composition of the gate stack and resulting differences in the etch rates. A thin polysilicon layer is used for one type of gate electrodes and a silicon-containing layer are used for the other type of gate electrodes in these integration schemes to balance the different etch rates and to enable etching of the two different gate stacks. | 10-02-2008 |
| 20080268630 | METHOD TO OBTAIN MULTIPLE GATE THICKNESSES USING IN-SITU GATE ETCH MASK APPROACH - Making gates having multiple thicknesses on the same substrate in a given process flow is provided. For example, a method of making a semiconductor structure having at least two gates of different thickness involves forming a first gate layer having a first thickness; patterning a first hard mask over a portion of the first gate layer to define a first gate underneath the first hard mask having a first gate thickness; forming a second gate layer having a second thickness over the first gate layer and the first hard mask; patterning a second hard mask over a portion of the second gate layer to define a second gate underneath the second hard mask having a second gate thickness; removing portions of the first gate layer and the second gate layer that are not under the first hard mask and the second hard mask; and removing the first hard mask and the second hard mask to provide two gates of different thicknesses. | 10-30-2008 |
| 20080305623 | Semiconductor device manufacturing methods - Methods for manufacturing semiconductor devices are disclosed. In a preferred embodiment, a method of processing a semiconductor device includes providing a workpiece, the workpiece comprising a material layer to be patterned disposed thereon. A hard mask is formed over the material layer. A first pattern is formed in the hard mask and an upper portion of the material layer using a first etch process. A second pattern is formed in the hard mask and the upper portion of the material layer using a second etch process, the second pattern being different than the first pattern. The first pattern and the second pattern are formed in a lower portion of the material layer using a third etch process and using the hard mask as a mask. | 12-11-2008 |
| 20090111254 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device includes forming an insulation layer over a substrate including a pattern for forming a multi-plane channel, forming a columnar polysilicon layer over the insulation layer and filling in the pattern, and performing a thermal treatment process. | 04-30-2009 |
| 20090137108 | Semiconductor device, semiconductor wafer, and methods of producing the same device and wafer - A method of forming a multi-layered insulation film includes forming a first insulation layer using a first feed gas, the first insulation layer including methyl silsesquioxane (MSQ), forming a second insulation layer using a second feed gas, the second insulation layer including a polysiloxane compound having an Si—H group such that the second insulation layer is in contact with a top of the first insulation layer, and forming a third insulation layer including an inorganic material such that the third insulation layer is in contact with a top of the second insulation layer. | 05-28-2009 |
| 20090137109 | COMPRESSIVE NITRIDE FILM AND METHOD OF MANUFACTURING THEREOF - Embodiments of the invention provide a method of forming a compressive stress nitride film overlying a plurality of p-type field effect transistor gate structures produced on a substrate through a high-density plasma deposition process. Embodiments include generating an environment filled with high-density plasma using source gases of at least silane, argon and nitrogen; biasing the substrate to a high frequency power of varying density, in a range between 0.8 W/cm | 05-28-2009 |
| 20090163009 | Composite Charge Storage Structure Formation In Non-Volatile Memory Using Etch Stop Technologies - Semiconductor-based non-volatile memory that includes memory cells with composite charge storage elements is fabricated using an etch stop layer during formation of at least a portion of the storage element. One composite charge storage element suitable for memory applications includes a first charge storage region having a larger gate length or dimension in a column direction than a second charge storage region. While not required, the different regions can be formed of the same or similar materials, such as polysilicon. Etching a second charge storage layer selectively with respect to a first charge storage layer can be performed using an interleaving etch-stop layer. The first charge storage layer is protected from overetching or damage during etching of the second charge storage layer. Consistency in the dimensions of the individual memory cells can be increased. | 06-25-2009 |
| 20090163010 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device includes forming a plurality of gate patterns including a tungsten electrode over a substrate, performing a plasma oxidation process to form a capping layer on the surfaces of the gate patterns, forming an etch barrier layer over the substrate where the capping layer is formed, forming an interlayer dielectric layer to fill gap between the gate patterns, and etching the interlayer dielectric layer between the gate patterns to form a contact hole. | 06-25-2009 |
| 20090221138 | Method of manufacturing semiconductor device - A method of manufacturing a semiconductor device, including forming a plurality of gate structures on a substrate, the gate structures each including a hard mask pattern stacked on a gate conductive pattern, forming an insulating layer pattern between the gate structures at least partially exposing a top surface of the hard mask pattern, forming a trench that exposes at least a top surface of the gate conductive pattern by selectively removing the hard mask pattern, and forming a silicide layer on the exposed gate conductive pattern. | 09-03-2009 |
| 20090239365 | NONVOLATILE SEMICONDUCTOR MEMORY AND FABRICATION METHOD FOR THE SAME - A nonvolatile semiconductor memory that allows simultaneous implementation of high performance transistors in a low-voltage circuit region and transistors with high withstand voltages in a high-voltage circuit region. The nonvolatile semiconductor memory includes a cell array region that comprises aligned memory cell transistors, each including a control gate electrode, which includes a metal silicide film, an inter-gate insulating film below the control gate electrode, a floating gate electrode below the inter-gate insulating film, and a tunnel insulating film under the floating gate electrode; a high-voltage circuit region arranged in a periphery of the cell array region and including a high voltage transistor, which includes a first gate insulating film thicker than the tunnel insulating film; and a low-voltage circuit region that is arranged in a different position than the high-voltage circuit region arranged in the periphery of the cell array region and that includes a low-voltage transistor, which includes a gate electrode and a second gate insulating film thinner than the first gate insulating film below the gate electrode. | 09-24-2009 |
| 20090253256 | METHODS OF FABRICATING SEMICONDUCTOR DEVICES HAVING TRANSISTORS WITH DIFFERENT GATE STRUCTURES - A semiconductor device has two transistors of different structure from each other. One of transistors is P-type and the other is N-type. One of the transistors includes a gate structure in which a polysilicon layer contacts a gate insulation film while the other transistor includes a gate structure in which a metal layer contacts a gate insulation film. | 10-08-2009 |
| 20090269916 | METHODS FOR FABRICATING MEMORY CELLS HAVING FIN STRUCTURES WITH SEMICIRCULAR TOP SURFACES AND ROUNDED TOP CORNERS AND EDGES - Methods for fabricating a FIN structure with a semicircular top surface and rounded top surface corners and edges are disclosed. As a part of a disclosed method, a FIN structure is formed in a semiconductor substrate. The FIN structure includes a top surface having corners and edges. The FIN structure is annealed where the annealing causes the top surface to have a semicircular shape and the top surface corners and edges to be rounded. | 10-29-2009 |
| 20090298272 | SINGLE POLY CMOS IMAGER - More complete charge transfer is achieved in a CMOS or CCD imager by reducing the spacing in the gaps between gates in each pixel cell, and/or by providing a lightly doped region between adjacent gates in each pixel cell, and particularly at least between the charge collecting gate and the gate downstream to the charge collecting gate. To reduce the gaps between gates, an insulator cap with spacers on its sidewalls is formed for each gate over a conductive layer. The gates are then etched from the conductive layer using the insulator caps and spacers as hard masks, enabling the gates to be formed significantly closer together than previously possible, which, in turn increases charge transfer efficiency. By providing a lightly doped region on between adjacent gates, a more complete charge transfer is effected from the charge collecting gate. | 12-03-2009 |
| 20090305491 | NONVOLATILE SEMICONDUCTOR MEMORY AND METHOD OF FABRICATING THE SAME - A nonvolatile semiconductor memory fabrication method including forming a first insulating film and a floating gate electrode material on a semiconductor substrate; forming a gate insulating film and a floating gate electrode by etching the first insulating film and the floating gate electrode material, respectively, and forming a groove for an element isolation region by etching the semiconductor substrate; and forming an element region and the element isolation region by burying a second insulating film in the groove and planarizing the second insulating film. | 12-10-2009 |
| 20090311855 | METHOD OF FABRICATING A GATE STRUCTURE - A method of fabricating a gate structure in a metal oxide semiconductor field effect transistor (MOSFET) and the structure thereof is provided. The MOSFET may be n-doped or p-doped. The gate structure, disposed on a substrate, includes a plurality of gates. Each of the plurality of gates is separated by a vertical space from an adjacent gate. The method deposits at least one dual-layer liner over the gate structure filling each vertical space. The dual-layer liner includes at least two thin high density plasma (HDP) films. The deposition of both HDP films occurs in a single HDP chemical vapor deposition (CVD) process. The dual-layer liner has properties conducive for coupling with plasma enhanced chemical vapor deposition (PECVD) films to form tri-layer or quadric-layer film stacks in the gate structure. | 12-17-2009 |
| 20100068875 | DOUBLE TREATMENT ON HARD MASK FOR GATE N/P PATTERNING - The present disclosure provides a method that includes providing a semiconductor substrate having a first region and a second region, forming first and second gate stacks over the first and second regions, respectively, the first and second gate stacks each including a dummy gate electrode, removing the dummy gate electrodes from the first and second gate stacks, respectively, thereby forming trenches, forming a metal layer to partially fill the trenches, forming an oxide layer over the metal layer filling a remaining portion of the trenches, applying a first treatment to the oxide layer, forming a patterned photoresist layer on the oxide layer overlying the first region, applying a second treatment to the oxide layer overlying the second region, etching the oxide layer overlying the second region, etching the first metal layer overlying the second region, removing the patterned photoresist layer, and removing the oxide layer overlying the first region. | 03-18-2010 |
| 20100093165 | Method of fabricating integrated circuit semiconductor device having gate metal silicide layer - Provided is a method of fabricating an integrated circuit semiconductor device. The method may include forming a plurality of gate patterns spaced apart from each other on a semiconductor substrate, the plurality of gate patterns including gate electrodes and gate capping patterns. After an interlayer insulating layer is formed to insulate the gate patterns, the interlayer insulating layer and the gate capping patterns may be planarized by etching until top surfaces of the gate electrodes are exposed. Gate metal silicide layers may be selectively formed on the gate electrodes. | 04-15-2010 |
| 20100112797 | METHOD FOR FORMING A MEMORY ARRAY - The invention is directed to a method for forming a memory array. The method comprises steps of providing a substrate having a charge trapping structure formed thereon. A patterned material layer is formed over the substrate and the patterned material layer having a plurality of trenches expose a portion of the charge trapping structure. Furthermore, a plurality of conductive spacers are formed on the sidewalls of the trenches of the patterned material layer respectively and a portion of the charge trapping structure at the bottom of the trenches is exposed by the conductive spacers. An insulating layer is formed over the substrate to fill up the trenches of the patterned material layer. Moreover, a planarization process is performed to remove a portion of the insulating layer until a top surface of the patterned material layer and a top surface of each of the conductive spacers are exposed. | 05-06-2010 |
| 20100136778 | Semiconductor Memory Device and a Method of Manufacturing the Same, A Method of Manufacturing a Vertical MISFET and a Vertical MISFET, and a Method of Manufacturing a Semiconductor Device and a Semiconductor Device - Vertical MISFETs are formed over drive MISFETs and transfer MISFETs. The vertical MISFETs comprise rectangular pillar laminated bodies each formed by laminating a lower semiconductor layer (drain), an intermediate semiconductor layer, and an upper semiconductor layer (source), and gate electrodes formed on corresponding side walls of the laminated bodies with gate insulating films interposed therebetween. In each vertical MISFET, the lower semiconductor layer constitutes a drain, the intermediate semiconductor layer constitutes a substrate (channel region), and the upper semiconductor layer constitutes a source. The lower semiconductor layer, the intermediate semiconductor layer and the upper semiconductor layer are each comprised of a silicon film. The lower semiconductor layer and the upper semiconductor layer are doped with a p type and constituted of a p type silicon film. | 06-03-2010 |
| 20100151668 | METHOD OF FABRICATING INSULATION LAYER AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME - A method for fabricating an insulation layer includes forming an insulation layer over a nitride layer using a silicon source and a phosphorus source, wherein the insulation layer includes a first insulation layer contacting the nitride layer and a second insulation layer formed on the first insulation layer, wherein the first insulation layer is formed using a higher flow rate of the silicon source and a lower flow rate of the phosphorus source than used with the second insulation layer. | 06-17-2010 |
| 20100159685 | Eliminating Poly Uni-Direction Line-End Shortening Using Second Cut - A method of forming an integrated circuit structure includes providing a substrate including a first active region and a second active region; forming a gate electrode layer over the substrate; and etching the gate electrode layer. The remaining portions of the gate electrode layer include a first gate strip and a second gate strip substantially parallel to each other; and a sacrificial strip unparallel to, and interconnecting, the first gate strip and the second gate strip. The sacrificial strip is between the first active region and the second active region. The method further includes forming a mask layer covering portions of the first gate strip and the second gate strip, wherein the sacrificial strip and portions of the first gate strip and the second gate strip are exposed through an opening in the mask layer; and etching the sacrificial strip and the portions of the first gate strip and the second gate strip through the opening. | 06-24-2010 |
| 20100167514 | POST METAL GATE VT ADJUST ETCH CLEAN - A method for fabricating a CMOS integrated circuit (IC) includes providing a substrate having a semiconductor surface, wherein the semiconductor surface has PMOS regions for PMOS devices and NMOS regions for NMOS devices. A gate dielectric layer is formed on the semiconductor surface followed by forming at least a first metal including layer on the gate dielectric layer. A polysilicon or amorphous silicon layer is formed on the first metal including layer to form an intermediate gate electrode stack. A masking pattern is formed on the intermediate gate electrode stack. The polysilicon or amorphous silicon layer is dry etched using the masking pattern to define a patterned intermediate gate electrode stack over the NMOS or PMOS regions, wherein the dry etching stops on a portion of the first metal comprising layer. The masking pattern is removed using a first post etch clean for stripping the masking pattern. A multi-step solution cleaning sequence is used after the removing step and includes a first wet clean including sulfuric acid and a fluoride, and a second wet clean after the first wet clean including a fluoride. Fabrication of the IC is then completed. | 07-01-2010 |
| 20100167515 | METHOD FOR FABRICATING FLASH MEMORY DEVICE - A method of forming a flash memory device includes forming a plurality of memory gates over a semiconductor substrate, forming an oxide film over the uppermost surface and sidewalls of the memory gates and then forming a plurality of selective gates on sidewalls of each of the memory gates. | 07-01-2010 |
| 20100190329 | METHOD AND STRUCTURE FOR PERFORMING A CHEMICAL MECHANICAL POLISHING PROCESS - A method for fabricating flash memory devices, e.g., NAND, NOR, is provided. The method includes providing a semiconductor substrate. The method includes forming a second polysilicon layer overlying a plurality of floating gate structures to cause formation of an upper surface provided on the second polysilicon layer. The upper surface has a first recessed region and a second recessed region. The method includes depositing a doped dielectric material overlying the upper surface to fill the first recessed region and the second recessed region to form a second upper surface region and cover a first elevated region, a second elevated region, and a third elevated region. The method subjects the second upper surface region to a chemical mechanical polishing process to remove the first elevated region, the second elevated region, and the third elevated region to cause formation of a substantially planarized second polysilicon layer free from the fill material. | 07-29-2010 |
| 20100203715 | THIN FILM TRANSISTOR ARRAY PANEL AND FABRICATION - The present invention provides a manufacturing method of a thin film transistor array panel, which includes forming a gate line on a substrate; forming a gate insulating layer, a semiconductor layer, and an ohmic contact on the gate line; forming a first conducting film including Mo, a second conducting film including Al, and a third conducting film including Mo on the ohmic contact; forming a first photoresist pattern on the third conducting film; etching the first, second, and third conducting films, the ohmic contact, and the semiconductor layer using the first photoresist pattern as a mask; removing the first photoresist pattern by a predetermined thickness to form a second photoresist pattern; etching the first, second, and third conducting films using the second photoresist pattern as a mask to expose a portion of the ohmic contact; and etching the exposed ohmic contact using a Cl-containing gas and a F-containing gas. | 08-12-2010 |
| 20100227464 | METHOD AND STRUCTURE FOIR PERFORMING A CHEMICAL MECHANICAL POLISHING PROCESS - A method for fabricating flash memory devices, e.g., NAND, NOR, is provided. The method includes providing a semiconductor substrate. The method includes forming a second polysilicon layer overlying a plurality of floating gate structures to cause formation of an upper surface provided on the second polysilicon layer. The upper surface has a first recessed region and a second recessed region. The method includes depositing a dielectric material overlying the upper surface to fill the first recessed region and the second recessed region to form a second upper surface region and cover a first elevated region, a second elevated region, and a third elevated region. The method subjects the second upper surface region to a chemical mechanical polishing process to remove the first elevated region, the second elevated region, and the third elevated region to cause formation of a substantially planarized second polysilicon layer free from the fill material. | 09-09-2010 |
| 20100227465 | METHOD AND STRUCTURE FOR PERFORMING A CHEMICAL MECHANICAL POLISHING PROCESS - A method for fabricating flash memory devices, e.g., NAND, NOR, is provided. The method includes providing a semiconductor substrate. The method includes forming a second polysilicon layer overlying a plurality of floating gate structures to cause formation of an upper surface provided on the second polysilicon layer. The upper surface has a first recessed region and a second recessed region. The method includes depositing a dielectric material overlying the upper surface to fill the first recessed region and the second recessed region to form a second upper surface region and cover a first elevated region, a second elevated region, and a third elevated region. The method forms at least one dielectric spacer within the first recessed region and at least one dielectric spacer within the second recessed region to form a resulting surface region, and subjects the resulting surface region to a chemical mechanical polishing process to cause formation of a substantially planarized second polysilicon layer free from the dielectric material. | 09-09-2010 |
| 20100311231 | METHOD FOR A GATE LAST PROCESS - A method for fabricating a semiconductor device is disclosed. The method includes providing a substrate; forming one or more gate structures over the substrate; forming a buffer layer over the substrate, including over the one or more gate structures; forming an etch stop layer over the buffer layer; forming a interlevel dielectric (ILD) layer over the etch stop layer; and removing a portion of the buffer layer, a portion of the etch stop layer, and a portion of the ILD layer over the one or more gate structures. | 12-09-2010 |
| 20110034017 | SEMICONDUCTOR MEMORY DEVICE AND A METHOD OF MANUFACTURING THE SAME - A memory cell of an SRAM has two drive MISFETs and two vertical MISFETs. The p channel vertical MISFETs are formed above the n channel drive MISFETs. The vertical MISFETs respectively mainly include a laminate formed of a lower semiconductor layer, intermediate semiconductor layer and upper semiconductor layer laminated in this sequence, a gate insulating film of silicon oxide formed on the surface of the side wall of the laminate, and a gate electrode formed so as to cover the side wall of the laminate. The vertical MISFETs are perfect depletion type MISFETs. | 02-10-2011 |
| 20110039404 | Methods of Forming a Plurality of Transistor Gates, and Methods of Forming a Plurality of Transistor Gates Having at Least Two Different Work Functions - A method of forming a plurality of transistor gates having at least two different work functions includes forming first and second transistor gates over a substrate having different widths, with the first width being narrower than the second width. A material is deposited over the substrate including over the first and second gates. Within an etch chamber, the material is etched from over both the first and second gates to expose conductive material of the first gate and to reduce thickness of the material received over the second gate yet leave the second gate covered by the material. In situ within the etch chamber after the etching, the substrate is subjected to a plasma comprising a metal at a substrate temperature of at least 300° C. to diffuse said metal into the first gate to modify work function of the first gate as compared to work function of the second gate. | 02-17-2011 |
| 20110045666 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device, including forming gate patterns over a substrate, forming conductive layer covering top and sidewalls of each gate pattern, forming a metal layer for a silicidation process over the conductive layer, and silicifying the conductive layer and the gate patterns using the metal layer. | 02-24-2011 |
| 20110092061 | Methods of Forming Silicon Oxides and Methods of Forming Interlevel Dielectrics - A method of forming silicon oxide includes depositing a silicon nitride-comprising material over a substrate. The silicon nitride-comprising material has an elevationally outermost silicon nitride-comprising surface. Such surface is treated with a fluid that is at least 99.5% H | 04-21-2011 |
| 20110129992 | METHOD FOR FABRICATING VERTICAL CHANNEL TYPE NON-VOLATILE MEMORY DEVICE - A method for fabricating a vertical channel type non-volatile memory device includes repeatedly forming stacks of conductive layers and inter-layer insulation layers over a substrate, and performing an etch process using an etch gas which etches both the conductive layers and the inter-layer insulation layers to form a contact hole exposing the substrate, wherein the etch gas maintains a selectivity between the inter-layer insulation layers and the conductive layers with a ratio of different etching rates ranging from approximately 0.1 to approximately 2. | 06-02-2011 |
| 20110136330 | Nonvolatile Semiconductor Memory Device and Manufacturing Method Thereof - A memory device includes a semiconductor substrate, memory elements formed above the substrate in rows and columns, bit lines and word lines selectively connected with the memory elements in the respective columns and rows, each memory element including, a first gate insulator formed above the substrate, a charge accumulation layer formed on the first gate insulator, a second gate insulator formed on the charge accumulation layer, and a control electrode formed on the second gate insulator, wherein a ratio r/d is not smaller than 0.5, where r: a radius of curvature of an upper corner portion or surface roughness of the charge accumulation layer and d: an equivalent oxide thickness of the second gate insulator in a cross section along a direction vertical to the bit lines. | 06-09-2011 |
| 20110159678 | METHOD TO FORM A SEMICONDUCTOR DEVICE HAVING GATE DIELECTRIC LAYERS OF VARYING THICKNESSES - A method for fabricating an integrated circuit device is disclosed. An exemplary method can include providing a substrate having a first region, a second region, and a third region; and forming a first gate structure in the first region, a second gate structure in the second region, and a third gate structure in the third region, wherein the first, second, and third gate structures include a gate dielectric layer, the gate dielectric layer being a first thickness in the first gate structure, a second thickness in the second gate structure, and a third thickness in the third gate structure. Forming the gate dielectric layer of the first, second, and third thicknesses can include forming an etching barrier layer over the gate dielectric layer in at least one of the first, second, or third regions while forming the first, second, and third gate structures, and/or prior to forming the gate dielectric layer in at least one of the first, second, or third regions, performing an implantation process on the at least one region. | 06-30-2011 |
| 20110183506 | Eliminating Poly Uni-Direction Line-End Shortening Using Second Cut - A method of forming an integrated circuit structure includes providing a substrate including a first active region and a second active region; forming a gate electrode layer over the substrate; and etching the gate electrode layer. The remaining portions of the gate electrode layer include a first gate strip and a second gate strip substantially parallel to each other; and a sacrificial strip unparallel to, and interconnecting, the first gate strip and the second gate strip. The sacrificial strip is between the first active region and the second active region. The method further includes forming a mask layer covering portions of the first gate strip and the second gate strip, wherein the sacrificial strip and portions of the first gate strip and the second gate strip are exposed through an opening in the mask layer; and etching the sacrificial strip and the portions of the first gate strip and the second gate strip through the opening. | 07-28-2011 |
| 20110230041 | SEMICONDUCTOR MEMORY DEVICE AND A METHOD OF MANUFACTURING THE SAME, A METHOD OF MANUFACTURING A VERTICAL MISFET AND A VERTICAL MISFET, AND A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DEVICE - Vertical MISFETs are formed over drive MISFETs and transfer MISFETs. The vertical MISFETs comprise rectangular pillar laminated bodies each formed by laminating a lower semiconductor layer (drain), an intermediate semiconductor layer, and an upper semiconductor layer (source), and gate electrodes formed on corresponding side walls of the laminated bodies with gate insulating films interposed therebetween. In each vertical MISFET, the lower semiconductor layer constitutes a drain, the intermediate semiconductor layer constitutes a substrate (channel region), and the upper semiconductor layer constitutes a source. The lower semiconductor layer, the intermediate semiconductor layer and the upper semiconductor layer are each comprised of a silicon film. The lower semiconductor layer and the upper semiconductor layer are doped with a p type and constituted of a p type silicon film. | 09-22-2011 |
| 20110281427 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE - Example embodiments herein relate to a method of fabricating a semiconductor device. The method may include forming a liner insulating layer on a surface of a gate pattern to have a first thickness. Subsequently, a gap fill layer may be formed on the liner insulating layer by flowable chemical vapor deposition (FCVD) or spin-on-glass (SOG). The liner insulating layer and the gap fill layer may be recessed such that the liner insulating layer has a second thickness, which is smaller than the first thickness, in the region in which a metal silicide will be formed. Metal silicide may be formed on the plurality of gate patterns to have a relatively uniform thickness using the difference in thickness of the liner insulating layer. | 11-17-2011 |
| 20110294286 | REVERSE PLANARIZATION METHOD - A method for fabricating an integrated circuit device is disclosed. The method includes providing a substrate; forming a semiconductor feature over the substrate; forming a first photoresist layer over the substrate; performing a lithography process on the first photoresist layer, such the first photoresist layer includes an opening therein that exposes the semiconductor feature; performing a stabilization process on the first photoresist layer; forming a second photoresist layer over the first photoresist layer, wherein the second photoresist layer fills the opening; and etching back the first and second photoresist layers until the semiconductor feature is exposed. | 12-01-2011 |
| 20110312171 | Methods Of Forming Integrated Circuitry Comprising Charge Storage Transistors - Methods include forming a charge storage transistor gate stack over semiconductive material. One such stack includes a tunnel dielectric, charge storage material over the tunnel dielectric, a high-k dielectric over the charge storage material, and conductive control gate material over the high-k dielectric. The stack is etched at least to the tunnel dielectric to form a plurality of charge storage transistor gate lines over the semiconductive material. Individual of the gate lines have laterally projecting feet which include the high-k dielectric. After etching the stack to form the gate lines, ions are implanted into an implant region which includes the high-k dielectric of the laterally projecting feet. The ions are chemically inert to the high-k dielectric. The ion implanted high-k dielectric of the projecting feet is etched selectively relative to portions of the high-k dielectric outside of the implant region. | 12-22-2011 |
| 20110318914 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device, in which an interference effect between word lines is substantially reduced or eliminated, includes forming a plurality of gate patterns on a substrate; forming a first insulating layer between the gate patterns, the first insulating layer filling a region between the gate patterns; etching the first insulating layer to remove a portion of the first insulating layer to a predetermined depth; and forming a second insulating layer on the gate patterns and the first insulating layer. A low-dielectric-constant material is formed between the gate patterns. | 12-29-2011 |
| 20120190184 | PROCESSES AND APPARATUS HAVING A SEMICONDUCTOR FIN - A process may include forming a mask directly on and above a region selected as an initial semiconductor fin on a substrate and reducing the initial semiconductor fin forming a semiconductor fin that is laterally thinned from the initial semiconductor fin. The process may be carried out causing the mask to recede to a greater degree in the lateral direction than the vertical direction. In various embodiments, the process may include removing material from the fin semiconductor to achieve a thinned semiconductor fin, which has receded beneath the shadow of the laterally receded mask. Electronic devices may include the thinned semiconductor fin as part of a semiconductor device. | 07-26-2012 |
| 20120214298 | METHOD OF MANUFACTURING NON-VOLATILE MEMORY DEVICES - A method of manufacturing non-volatile memory devices includes forming a gate insulating layer and a first conductive layer over a semiconductor substrate, etching the first conductive layer and the gate insulating layer to expose part of the semiconductor substrate, forming trenches at a target depth of the semiconductor substrate by repeatedly performing a dry etch process for etching the exposed semiconductor substrate and a cleaning process for removing residues generated in the dry etch process, forming isolation layers within the trenches, forming a dielectric layer on a surface of the entire structure in which the isolation layers are formed, and forming a second conductive layer on the dielectric layer. | 08-23-2012 |
| 20120309182 | Method of Forming Sidewall Spacers Having Different Widths Using a Non-Conformal Deposition Process - Disclosed herein is a method of forming sidewall spacers for a semiconductor device. In one example, the method comprises forming a gate electrode structure above a semiconducting substrate. performing a non-conformal deposition process to deposit a layer of spacer material above the gate electrode structure and performing an anisotropic etching process on the layer of spacer material to define a first sidewall spacer proximate a first side of the gate electrode structure and a second sidewall spacer proximate a second side of the gate electrode structure, wherein the first and second sidewall spacers have different widths. | 12-06-2012 |
| 20130034953 | CMOS SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A CMOS semiconductor device having an n-type MOSFET and a p-type MOSFET, comprising: a gate electrode of the n-type MOSFET having a first insulation layer composed of a high-k material, and a first metal layer provided on the first insulation layer and composed of a metal material; and a gate electrode of the p-type MOSFET having a second insulation layer composed of a high-k material, and a second metal layer provided on the second insulation layer and composed of a metal material, wherein the first insulation layer and the second insulation layer are composed of the different high-k materials, and the first metal layer and the second metal layer are composed of the same metal material. | 02-07-2013 |
| 20130143397 | USE OF AN ORGANIC PLANARIZING MASK FOR CUTTING A PLURALITY OF GATE LINES - An organic planarizing layer (OPL) is formed atop a semiconductor substrate which includes a plurality of gate lines thereon. Each gate line includes at least a high k gate dielectric and a metal gate. A patterned photoresist having at least one pattern formed therein is then positioned atop the OPL. The at least one pattern in the photoresist is perpendicular to each of the gate lines. The pattern is then transferred by etching into the OPL and portions of each of the underlying gate lines to provide a plurality of gate stacks each including at least a high k gate dielectric portion and a metal gate portion. The patterned photoresist and the remaining OPL layer are then removed utilizing a sequence of steps including first contacting with a first acid, second contacting with an aqueous cerium-containing solution, and third contacting with a second acid. | 06-06-2013 |
| 20130149854 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - An improvement is achieved in the manufacturing yield of a semiconductor device including a plurality of field effect transistors having different characteristics over the same substrate. By combining anisotropic dry etching with isotropic wet etching or isotropic dry etching, three types of sidewalls having different sidewall lengths are formed. By reducing the number of anisotropic dry etching steps, in a third n-type MISFET region and a third p-type MISFET region where layout densities are high, it is possible to prevent a semiconductor substrate from being partially cut between n-type gate electrodes adjacent to each other, between the n-type gate electrode and a p-type gate electrode adjacent to each other, and the p-type gate electrodes adjacent to each other. | 06-13-2013 |
| 20130157451 | METHODS OF FORMING GATE STRUCTURES FOR REDUCED LEAKAGE - Integrated circuits containing transistors are provided. A transistor may include a gate structure formed over an associated well region. The well region may be actively biased and may serve as a body terminal. The well region of one transistor may be formed adjacent to a gate structure of a neighboring transistor. If the gate structure of the neighboring transistor and the well region of the one transistor are both actively biased and are placed close to one another, substantial leakage may be generated. Computer-aided design tools may be used to identify actively driven gate terminals and well regions and may be used to determine whether each gate-well pair is spaced sufficiently far from one another. If a gate-well pair is too close, the design tools may locate an existing gate cut layer and extend the existing gate cut layer to cut the actively driven gate structure. | 06-20-2013 |
| 20130164925 | METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY DEVICE - A method of manufacturing a semiconductor memory device comprises forming a plurality of gate lines on a semiconductor substrate, forming an insulating layer on the gate lines, and performing a cleaning process using a surfactant-free cleaning solution having a viscosity of lower than 2 cP and an acidity of lower than 3 pH to remove residue from the surface of the insulating layer. | 06-27-2013 |
| 20130237044 | METHOD OF MANUFACTURING METAL GATES - A method of manufacturing metal gates comprises the steps of: forming a plurality of parallel trenches on a substrate; forming sequentially a conductive layer and a protective layer on the surfaces of the substrate and trenches; removing the protective layer and conductive layer on the surface of the substrate and the protective layer on the bottom walls of the trenches through anisotropic etching to retain only the protective layer and conductive layer on the side walls; and finally removing the conductive layer not covered by the protective layer through isotropic etching to retain only the protective layer and conductive layer on the side walls so that two insulating gates are respectively formed on the side walls. Thus no isolation material is needed to be disposed at the bottom of the trenches, and the problem of excessive etching to the trenches that results in undesirable insulation can be averted. | 09-12-2013 |
| 20130288472 | METHODS OF FABRICATING SEMICONDUCTOR DEVICES HAVING BURIED CHANNEL ARRAY - A method of fabricating a semiconductor device comprises forming a first and a second parallel field regions in a substrate, the parallel field regions are extended in a first direction, forming a first and a second gate capping layer in a first and a second gate trench formed in the substrate respectively, removing the gate capping layers partially so that a first landing pad hole is expanded to overlap the gate capping layers buried in the substrate partially, forming a landing pad material layer in the first space, and forming a bit line contact landing pad by planarizing the landing pad material layer to the level of top surfaces of the capping layers. | 10-31-2013 |
| 20130309856 | ETCH RESISTANT BARRIER FOR REPLACEMENT GATE INTEGRATION - Semiconductor devices and methods of their fabrication are disclosed. One method includes forming a semiconductor device structure including a plurality of dummy gates and a dielectric gap filling material with a pre-determined aspect ratio that is between the dummy gates. An etch resistant nitride layer is applied above the dielectric gap filling material to maintain the aspect ratio of the gap filling material. In addition, the dummy gates are removed by implementing an etching process. Further, replacement gates are formed in regions of the device structure previously occupied by the dummy gates. | 11-21-2013 |
| 20140017886 | SPACER STRUCTURES OF A SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device includes forming a first set of gate electrodes over a substrate, adjacent gate electrodes of the first set of gate electrodes being separated by a first gap width, and having a first gate width. The method includes forming a second set of gate electrodes over the substrate, adjacent gate electrodes of the second set of gate electrodes being separated by a second gap width less than the first gap width, and having a second gate width greater than the first gate width. The method further includes forming a first set of spacer structures on sidewalls of the first and second sets of gate electrodes. The method further includes forming a second set of spacer structures abutting the first set of spacer structures and removing a subset of the second set of spacer structures over the sidewalls of the second set of gate electrodes. | 01-16-2014 |
| 20140073124 | EDGE DEVICES LAYOUT FOR IMPROVED PERFORMANCE - A method includes forming a first plurality of fingers over an active area of a semiconductor substrate. Each of the first plurality of fingers has a respective length that extends in a direction that is parallel to width direction of the active area. The first plurality of fingers form at least one gate of at least one transistor having a source and a drain formed by a portion of the active area. A first dummy polysilicon structure is formed over a portion of the active area between an outer one of the first plurality of fingers and a first edge of the semiconductor substrate. A second dummy polysilicon structure is over the semiconductor substrate between the first dummy polysilicon structure and the first edge of the semiconductor substrate. | 03-13-2014 |
| 20140087551 | ETCHING POLYSILICON - Methods and compositions for etching polysilicon including aqueous compositions containing nitric acid and ammonium fluoride, and apparatus formed thereby. | 03-27-2014 |
| 20140127892 | SEMICONDUCTOR DEVICE HAVING METAL GATE AND MANUFACTURING METHOD THEREOF - A method of manufacturing a semiconductor device having metal gate includes providing a substrate having a first transistor and a second transistor formed thereon, the first transistor having a first gate trench formed therein, forming a first work function metal layer in the first gate trench, forming a sacrificial masking layer in the first gate trench, removing a portion of the sacrificial masking layer to expose a portion of the first work function metal layer, removing the exposed first function metal layer to form a U-shaped work function metal layer in the first gate trench, and removing the sacrificial masking layer. The first transistor includes a first conductivity type and the second transistor includes a second conductivity type. The first conductivity type and the second conductivity type are complementary. | 05-08-2014 |
| 20140170844 | STRUCTURE AND METHOD OF Tinv SCALING FOR HIGH k METAL GATE TECHNOLOGY - A complementary metal oxide semiconductor (CMOS) structure including a scaled n-channel field effect transistor (nFET) and a scaled p-channel field transistor (pFET) is provided. Such a structure is provided by forming a plasma nitrided, nFET threshold voltage adjusted high k gate dielectric layer portion within an nFET gate stack, and forming at least a pFET threshold voltage adjusted high k gate dielectric layer portion within a pFET gate stack. The pFET threshold voltage adjusted high k gate dielectric layer portion in the pFET gate stack may also plasma nitrided. The plasma nitrided, nFET threshold voltage adjusted high k gate dielectric layer portion includes up to 15 atomic % N | 06-19-2014 |
| 20140187030 | SEMICONDUCTOR DEVICE WITH DUAL WORK FUNCTION GATE STACKS AND METHOD FOR FABRICATING THE SAME - A method for fabricating a semiconductor device includes forming a gate dielectric layer over a substrate; forming a metal containing layer, containing an effective work function adjust species, over the gate dielectric layer; forming an anti-reaction layer over the metal containing layer; increasing an amount of the effective work function adjust species contained in the metal containing layer; and forming, on the substrate, a gate stack by etching the anti-reaction layer, the metal containing layer, and the gate dielectric layer. | 07-03-2014 |
| 20140199827 | Device and Methods for Small Trench Patterning - A semiconductor device and methods for small trench patterning are disclosed. The device includes a plurality of gate structures and sidewall spacers, and an etch buffer layer disposed over the sidewall spacers. The etch buffer layer includes an overhang component disposed on the upper portion of the sidewall spacers with an edge that extends laterally. The width between the edges of adjacent overhang components is narrower than the width between adjacent sidewall spacers. | 07-17-2014 |
| 20140329380 | FORMATION OF SEMICONDUCTOR STRUCTURES WITH VARIABLE GATE LENGTHS - A plurality of doped sacrificial semiconductor material portions of a first width and a plurality of doped sacrificial semiconductor material portions of a second width, which is different from the first width, are provided on a sacrificial gate dielectric material. Exposed portions of the sacrificial dielectric material are removed. A dielectric material is formed adjacent each doped sacrificial semiconductor material portion such that an upper surface of each doped sacrificial semiconductor material portion is exposed. Each doped sacrificial semiconductor material portion is removed providing a first set of gate cavities having the first width and a second set of gate cavities having the second width. Each gate cavity is filled with a gate structure. The gate structures formed in the first set of gate cavities have the first width, while the gate structure formed in the second set of gate cavities have the second width. | 11-06-2014 |
| 20140349471 | PROFILE PRE-SHAPING FOR REPLACEMENT POLY GATE INTERLAYER DIELECTRIC - Some embodiments relate to an integrated circuit (IC). The IC includes a semiconductor substrate having an upper surface with a source region and drain region proximate thereto. A channel region is disposed in the substrate between the source region and the drain region. A gate electrode is disposed over the channel region and separated from the channel region by a gate dielectric. Sidewall spacers are formed about opposing sidewalls of the gate electrode. Upper outer edges of the sidewall spacers extend outward beyond corresponding lower outer edges of the sidewall spacers. A liner is disposed about opposing sidewalls of the sidewall spacers and has a first thickness at an upper portion of liner and a second thickness at a lower portion of the liner. The first thickness is less than the second thickness. Other embodiments are also disclosed. | 11-27-2014 |
| 20140357071 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING DOPED LAYER - A method of manufacturing a semiconductor device having a doped layer may be provided. The method includes providing a substrate having a first region and a second region, forming a gate dielectric layer on the substrate, forming a first gate electrode layer on the gate dielectric layer, forming a first doped layer on the first gate electrode layer, forming a first capping layer on the first doped layer, forming a mask pattern on the first capping layer in the first region, the mask pattern exposing the first capping layer in the second region, removing the first capping layer and the first doped layer in the second region, removing the mask pattern, and forming a second doped layer on the first capping layer in the first region and the first gate electrode layer in the second region. | 12-04-2014 |
| 20140370697 | REMOVAL OF NITRIDE BUMP IN OPENING REPLACEMENT GATE STRUCTURE - Methods for opening polysilicon NFET and PFET gates for a replacement gate process are disclosed. Embodiments include providing a polysilicon gate with a nitride cap; defining PFET and NFET regions of the polysilicon gate, creating a nitride bump on the nitride cap; covering the nitride cap to a top of the nitride bump with a PMD; performing a 1:1 dry etch of the PMD and the nitride bump; and performing a second dry etch, selective to the nitride cap, down to the top surface of the polysilicon gate. Other embodiments include, after creating a nitride bump on the nitride cap, recessing the PMD to expose the nitride cap; covering the nitride cap and the nitride bump with a nitride fill, forming a planar nitride surface; and removing the nitride fill, nitride bump, and nitride cap down to the polysilicon gate. | 12-18-2014 |
| 20140370698 | Non-Volatile Finfet Memory Array and Manufacturing Method Thereof - An electronic device includes a substrate with a semiconducting surface having a plurality of fin-type projections coextending in a first direction through a memory cell region and select gate regions. The electronic device further includes a dielectric isolation material disposed in spaces between the projections. In the electronic device. the dielectric isolation material in the memory cell regions have a height less than a height of the projections in the memory cell regions, and the dielectric isolation material in the select gate regions have a height greater than or equal to than a height of the projections in the select gate regions. The electronic device further includes gate features disposed on the substrate within the memory cell region and the select gate regions over the projections and the dielectric isolation material, where the gate features coextend in a second direction transverse to the first direction. | 12-18-2014 |
| 20140370699 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device includes forming an interlayer insulating layer on a substrate, the interlayer insulating layer including a first trench and a second trench, forming a first conductive layer along sidewall surfaces and bottom surface of the first trench and forming a second conductive layer along sidewall surfaces and bottom surface of the second trench, forming a mask pattern on the second conductive layer, the mask pattern filling the second trench and being a bottom anti-reflective coating (BARC), and removing the first conductive layer using the mask pattern. | 12-18-2014 |
| 20150050802 | METHOD OF MANUFACTURING A NONVOLATILE MEMORY DEVICE - A method of manufacturing a nonvolatile memory device comprises forming a gate insulating layer and a first conductive layer over a semiconductor substrate that defines a first area in which selection lines will be formed and a second area in which word lines will be formed, performing an etch process to lower a height of the first conductive layer in the first area, forming a dielectric layer and a second conductive layer over the first conductive layer with a height that is different from the height of the first conductive layer, and performing a gate patterning process to form the selection lines and the word lines. | 02-19-2015 |
| 20150064895 | METHOD OF FORMING A SEMICONDUCTOR DEVICE - Provided is a method of manufacturing a semiconductor device. One exemplary embodiment involves forming a protective layer over first and second electrodes of a semiconductor device; forming a compensation film on the protective layer and between the first and second electrodes; removing the compensation film from being on the protective layer; and removing the protective layer from over the first electrode and second electrodes. | 03-05-2015 |
| 20150079775 | CHEMICAL DIELECTRIC FORMATION FOR SEMICONDUCTOR DEVICE FABRICATION - Systems and methods are provided for fabricating semiconductor devices. For example, a substrate is provided. A polymer layer is formed on the substrate. An oxygen-based plasma is applied to remove the polymer layer. An oxidizing solution is applied to generate a dielectric layer. A conductive layer is formed on the dielectric layer for fabricating semiconductor devices. | 03-19-2015 |
| 20150093888 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE HAVING DUAL GATE - A method of fabricating a semiconductor device having a dual gate allows for the gates to have a wide variety of threshold voltages. The method includes forming a gate insulation layer, a first capping layer, and a barrier layer in the foregoing sequence across a first region and a second region on a substrate, exposing the gate insulation layer on the first region by removing the first capping layer and the barrier layer from the first region, forming a second capping layer on the gate insulation layer in the first region and on the barrier layer in the second region, and thermally processing the substrate on which the second capping layer is formed. The thermal processing causes material of the second capping layer to spread into the gate insulation layer in the first region and material of the first capping layer to spread into the gate insulation layer in the second region. Thus, devices having different threshold voltages can be formed in the first and second regions. | 04-02-2015 |
| 20150104934 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a substrate including an active region, an insulation layer formed over the substrate, a plurality of openings formed in the insulation layer, a plurality of contact plugs filling the plurality of openings, a silicide layer formed over the substrate and between the substrate and each contact plug of the contact plugs in order to cover a bottom of each contact plug. The semiconductor device may decrease contact resistance by forming a silicide layer before the formation of openings regardless of the linewidth and aspect ratio of the openings. Also, because it does not have to consider step coverage based on the aspect ratio of openings, there is no limitation in the method of depositing a metal layer. Therefore, productivity may be improved. | 04-16-2015 |
| 20150104935 | REPLACEMENT METAL GATES TO ENHANCE TRANSISTOR STRAIN - Some embodiments of the present invention include apparatuses and methods relating to NMOS and PMOS transistor strain. | 04-16-2015 |
| 20150132936 | SEMICONDUCTOR DEVICE WITH SELF-ALIGNED AIR GAP AND METHOD FOR FABRICATING THE SAME - A method for fabricating a semiconductor device includes forming a plurality of semiconductor structures over a substrate, forming an interlayer dielectric layer over the semiconductor structures, etching the interlayer dielectric layer, and defining open parts between the semiconductor structures to expose a surface of the substrate, forming sacrificial spacers on sidewalls of the open parts, forming conductive layer patterns in the open parts, and causing the conductive layer patterns and the sacrificial spacers to reach each other, and defining air gaps on the sidewalls of the open parts. | 05-14-2015 |
| 20150311311 | STATIC MEMORY CELL AND FORMATION METHOD THEREOF - The present disclosure provides a static memory cell and fabrication method. A first fin part is formed on a semiconductor substrate. An isolation layer is formed to cover a lower portion of sidewalls of the first fin part. A first dummy gate structure is formed across the first fin part. A dielectric layer is formed on the isolation layer. A mask layer is formed on the dielectric layer with a first opening to expose the top surface of the first dummy gate structure. The first dummy gate structure is removed through the first opening to form a first trench exposing the first fin part. A portion of the isolation layer is removed through the first opening to form a second trench exposing a portion of sidewalls of the first fin part below the top surface of the isolation layer. A first gate structure is formed by filling up the first and the second trenches. | 10-29-2015 |
| 20150348850 | MASK SET AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE BY USING THE SAME - A mask set includes a first mask and a second mask. The first mask includes geometric patterns. The second mask includes at least a strip-shaped pattern with a first edge and a second edge opposite to the first edge. The strip-shaped pattern has a centerline along a long axis of the strip-shaped pattern. The first edge includes inwardly displaced segments shifting towards the centerline and each of the inwardly displaced segments overlaps each of the geometric patterns. | 12-03-2015 |
| 20150357434 | REPLACEMENT METAL GATE INCLUDING DIELECTRIC GATE MATERIAL - A method of fabricating a semiconductor device includes forming at least one semiconductor fin on a semiconductor substrate. A plurality of gate formation layers is formed on an etch stop layer disposed on the fin. The plurality of gate formation layers include a dummy gate layer formed from a dielectric material. The plurality of gate formation layers is patterned to form a plurality of dummy gate elements on the etch stop layer. Each dummy gate element is formed from the dielectric material. A spacer layer formed on the dummy gate elements is etched to form a spacer on each sidewall of dummy gate elements. A portion of the etch stop layer located between each dummy gate element is etched to expose a portion the semiconductor fin. A semiconductor material is epitaxially grown from the exposed portion of the semiconductor fin to form source/drain regions. | 12-10-2015 |
| 20150364328 | Methods of Fabricating Semiconductor Devices and Structures Thereof - Methods of fabricating semiconductor devices and structures thereof are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes forming a gate material stack over a substrate having a first region and a second region. The gate material stack includes a semiconductive gate material. A thickness is altered or a substance is introduced to the semiconductive gate material in the first region or the second region of the substrate. The gate material stack is patterned in the first region and the second region resulting in a first transistor in the first region of the substrate comprising an NMOS FET of a CMOS device and a second transistor in the second region of the substrate comprising an NMOS FET of the CMOS device. The first transistor has a first threshold voltage and the second transistor has a second threshold voltage different than the first threshold voltage. | 12-17-2015 |
| 20160064236 | METHODS OF PATTERNING FEATURES HAVING DIFFERING WIDTHS - A method includes forming a layer of material above a semiconductor substrate and performing a first sidewall image transfer process to form a first plurality of spacers and a second plurality of spacers above the layer of material, wherein the first and second pluralities of spacers are positioned above respective first and second regions of the semiconductor substrate and have a same initial width and a same pitch spacing. A masking layer is formed above the layer of material so as to cover the first plurality of spacers and expose the second plurality of spacers, and a first etching process is performed through the masking layer on the exposed second plurality of spacers so as to form a plurality of reduced-width spacers having a width that is less than the initial width, wherein the first plurality of spacers and the plurality of reduced-width spacers define an etch mask. | 03-03-2016 |
| 20160064241 | Method for Planarizing Semiconductor Device - A method for planarizing a semiconductor device is provided. The method includes steps hereinafter. A substrate is provided with a first dielectric layer covering at least one electrode structure formed thereon. A chemical-mechanical polishing (CMP) process is performed on the first dielectric layer until the at least one electrode structure is exposed. A second dielectric layer is deposited covering the at least one electrode structure and the first dielectric layer. An etching-back process is performed on the second dielectric layer until the at least one electrode structure is exposed. | 03-03-2016 |
| 20160111291 | SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - The present disclosure relates to a semiconductor memory, device and a method of forming a semiconductor memory device. The method of manufacturing a semiconductor memory device, includes forming a tunnel insulation layer and a floating gate on a semiconductor substrate of an active region, forming a trench in the semiconductor substrate of an isolation region, forming, in the trench, a sacrificial layer having an upper surface positioned higher than a surface of the semiconductor substrate, forming a capping layer over the sacrificial layer, and forming an air gap by removing the sacrificial layer without removing the capping layer. | 04-21-2016 |
| 20160148808 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device is provided. A plurality of target patterns is formed on a substrate. The plurality of target patterns is extended in parallel to each other along a first direction. A first mask pattern extending in the first direction and including a plurality of first openings is formed. A second mask pattern extending in a second direction crossing the first direction and including a plurality of second openings is formed. Each second opening overlaps each first opening to form an overlapped opening region. A region of the plurality of target patterns is etched through the overlapped opening region using the first mask pattern and the second mask pattern as a etch mask. The region of the plurality of target patterns is overlapped with the overlapped opening region. | 05-26-2016 |
| 20160155824 | Method of Making a FinFET Device | 06-02-2016 |
| 20160163555 | METHODS OF FORMING FEATURES HAVING DIFFERING PITCH SPACING AND CRITICAL DIMENSIONS - Methods of forming features having differing pitch spacing and critical dimensions are disclosed herein. One method includes forming an underlying layer of material above a semiconductor substrate. The method further includes forming a masking layer above the underlying layer of material. The masking layer includes features positioned above a first region of the substrate and features positioned above a second region of the substrate. The features have different pitch spacing and critical dimensions. The method further includes performing at least one etching process on the underlying layer of material through the masking layer. | 06-09-2016 |
| 20160190014 | FABRICATION METHODS FOR MULTI-LAYER SEMICONDUCTOR STRUCTURES - Methods are provided for fabricating multi-layer semiconductor structures. The methods include, for example: providing a first layer and a second layer over a substrate, the first layer including a first metal and the second layer including a second metal, where the second layer is disposed over the first layer and the first metal and second metal are different metals; and annealing the first layer, the second layer, and the substrate to react at least a portion of the first metal of the first layer to form a first reacted layer and at least a portion of the second metal of the second layer to form a second reacted layer, where at least one of the first reacted layer or the second reacted layer includes at least one of a first metal silicide of the first metal or a second metal silicide of the second metal. | 06-30-2016 |
| 20160379890 | FINFET DEVICES WITH MULTIPLE CHANNEL LENGTHS - A method including patterning a continuous fin having a first segment and a second segment in a semiconductor layer, the first segment is arranged at an angle relative to the second segment, and forming a first gate and a second gate substantially parallel to each other, the first gate substantially covering sides and a top of a portion of the first segment of the continuous fin, the second gate substantially covering sides and a top of a portion of the second segment of the continuous fin. | 12-29-2016 |
| 20160380084 | METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device is provided. A plurality of target patterns is formed on a substrate. The plurality of target patterns is extended in parallel to each other along a first direction. A first mask pattern extending in the first direction and including a plurality of first openings is formed. A second mask pattern extending in a second direction crossing the first direction and including a plurality of second openings is formed. Each second opening overlaps each first opening to form an overlapped opening region. A region of the plurality of target patterns is etched through the overlapped opening region using the first mask pattern and the second mask pattern as a etch mask. The region of the plurality of target patterns is overlapped with the overlapped opening region. | 12-29-2016 |
| 20190148236 | Isolation Components for Transistors Formed on Fin Features of Semiconductor Substrates | 05-16-2019 |
