Class / Patent application number | Description | Number of patent applications / Date published |
438533000 | And contact formation (i.e., metallization) | 9 |
20080261387 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A Schottky junction is formed at the connection between an SOI layer and a contact (namely, under an element isolation insulating film) without forming a P | 10-23-2008 |
20090170299 | FORMING A METAL CONTACT IN A SEMICONDUCTOR DEVICE - Methods for forming a metal contact in a semiconductor device. In one example embodiment, a method for forming a metal contact in a semiconductor device includes various steps. First, an interlayer insulating film is formed over a silicon substrate. Next, an insulating film is formed over the interlayer insulating film. Then, a photoresist pattern is formed on the insulating film. Next, the insulating film, the interlayer insulating film, and the silicon substrate are selectively etched using the photoresist pattern as an etch mask in order to form a contact trench. Then, the photoresist pattern is removed. Next, impurity ions are implanted into a region beneath the contact trench using the selectively-etched insulating film as a mask. Then, the selectively-etched insulating film and the contact trench are isotropically etched. Next, the contact trench is filled with a metal material. | 07-02-2009 |
20090269912 | EDGE SEAL FOR A SEMICONDUCTOR DEVICE AND METHOD THEREFOR - In one embodiment, an edge seal region of a semiconductor die is formed by forming a first dielectric layer on a surface of a semiconductor substrate near an edge of the semiconductor die and extending across into a scribe grid region of the semiconductor substrate. Another dielectric layer is formed overlying the first dielectric layer. An opening is formed through the first and second dielectric layers. The second dielectric layer is used as a mask for forming a doped region on the semiconductor substrate through the opening. A metal is formed that electrically contacts the doped region and an exterior edge of the first dielectric layer within the opening. | 10-29-2009 |
20100240202 | SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD THEREOF - The present invention provides a semiconductor apparatus for improving a switching speed and a withstand voltage, and a manufacturing method of the semiconductor apparatus. The semiconductor apparatus of the invention including a first conductive type semiconductor substrate, a first conductive type first semiconductor region with an impurity concentration lower than that of the semiconductor substrate and formed on a first principal surface of the semiconductor substrate, a second conductive type second semiconductor region formed in a surface region of the first semiconductor region and which forms a PN junction with the first semiconductor region, a contact region including a part of the first semiconductor region and a part of the second semiconductor region, an insulating layer having an opening part through which at least the contact region are exposed, a first electrode formed so as to be in contact with at least the contact region and a second electrode formed on a second principal surface of the semiconductor substrate, wherein the second semiconductor region, viewed from a direction perpendicular to the first principal surface includes a first region in which a plurality of islands of the second semiconductor are aligned with intervals and a second region which connects each end of the islands of the first region each other. | 09-23-2010 |
20110318911 | NONVOLATILE MEMORY CELL COMPRISING A REDUCED HEIGHT VERTICAL DIODE - A method for forming a nonvolatile memory cell is provided that includes: (1) forming a rail-shaped first conductor above a substrate, (2) forming a rail-shaped second conductor above the first conductor, and (3) forming a substantially vertical first pillar disposed between the first conductor and the second conductor. The first pillar includes a vertically oriented p-i-n diode, and the p-i-n diode includes: (a) a bottom heavily doped region having a first conductivity type, (b) a middle intrinsic or lightly doped region, and (c) a top heavily doped region having a second conductivity type opposite the first conductivity type. The bottom heavily doped region is doped by implantation of arsenic ions and the top heavily doped region is doped by implantation of BF | 12-29-2011 |
20120070970 | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device includes; exposing a resist layer | 03-22-2012 |
20120329258 | METHODS OF FORMING SEMICONDUCTOR DEVICES HAVING DIFFUSION REGIONS OF REDUCED WIDTH - Semiconductor devices and methods for forming semiconductor devices are provided, including semiconductor devices that comprise one or more diffusion region in a semiconductor, the one or more diffusion regions being adjacent to a gate formed adjacent to a surface of the semiconductor (e.g., a semiconductor substrate). The one or more diffusion regions comprise a first width at a depth below the surface of the semiconductor and a second width near the surface of the semiconductor, the second width of the one or more diffusion regions being less than about 40% greater than the first width. | 12-27-2012 |
20140087548 | METHOD OF SHIELDING THROUGH SILICON VIAS IN A PASSIVE INTERPOSER - A method of shielding through silicon vias (TSVs) in a passive interposer includes doping a substrate with positive ions, and implanting positive ions in an upper portion of the substrate, such that the substrate has at least a p-doped portion and a heavily p-doped upper portion. The method further includes forming an interlayer dielectric (ILD) above the heavily p-doped upper portion. The method further includes forming a plurality of through silicon vias (TSVs) through the ILD and the substrate, such that the passive interposer is configured to electrically couple at least one structure above and below the passive interposer. The method further includes forming, between pairs of TSVs of the plurality of TSVs, a plurality of shielding lines through the interlayer dielectric, the shielding lines configured to electrically couple the heavily p-doped upper portion of the substrate and at least one interconnect structure above the ILD. | 03-27-2014 |
438534000 | Rectifying contact (i.e., Schottky contact) | 1 |
20090035925 | Gallium Nitride Semiconductor Device - A gallium nitride based semiconductor Schottky diode fabricated from a n+ doped GaN layer having a thickness between one and six microns disposed on a sapphire substrate; an n− doped GaN layer having a thickness greater than one micron disposed on said n+ GaN layer patterned into a plurality of elongated fingers and a metal layer disposed on the n− doped GaN layer and forming a Schottky junction therewith. The layer thicknesses and the length and width of the elongated fingers are optimized to achieve a device with breakdown voltage of greater than 500 volts, current capacity in excess of one ampere, and a forward voltage of less than three volts. | 02-05-2009 |