| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 378089000 | Thickness or density analysis | 12 |
| 20080219409 | Inspection method for thin film stack - An X-ray reflectivity measuring method is provided to measure and inspect, with higher accuracy, film thickness of a thin film stack as a sample where a thick film is provided on the thin film stack. This X-ray reflectivity measuring method can measure X-ray reflectivity of the thin film stack embedded within a thick film by applying the X-ray focused to ⅓ or less the thickness of a thick film on the thin film stack to an end surface of the thick film, transmitting the X-ray through the thick film, thereafter applying the X-ray to the thin film stack, transmitting again the reflected X-ray to the thick film, and then extracting the reflection X-ray from the end surface in the opposite side of the incident surface and also can inspect film thickness of the thin film stack embedded in the thick film with the Fourier transformation method and the minimum square analysis method with the theoretical curve. | 09-11-2008 |
| 20090274275 | NUCLEAR GAUGES AND RELATED METHODS OF ASSEMBLY - Nuclear gauges, their components and method for assembly and adjustment of the same are provided. The nuclear gauges are used in measuring the density and/or moisture of construction-related materials. The nuclear gauge can include a gauge housing having a vertical cavity therethrough and at least one radiation detector located within the housing. The nuclear gauge can include a vertically moveable source rod and a radiation source operatively positioned within a distal end of the source rod. | 11-05-2009 |
| 20090274276 | HIGH VOLTAGE X-RAY GENERATOR AND RELATED OIL WELL FORMATION ANALYSIS - An apparatus and method for determining the density and other properties of a formation surrounding a borehole using a high voltage x-ray generator. One embodiment comprises a stable compact x-ray generator capable of providing radiation with energy of 250 keV and higher while operating at temperatures equal to or greater than 125° C. In another embodiment, radiation is passed from an x-ray generator into the formation; reflected radiation is detected by a short spaced radiation detector and a long spaced radiation detector. The output of these detectors is then used to determine the density of the formation. In one embodiment, a reference radiation detector monitors a filtered radiation signal. The output of this detector is used to control at least one of the acceleration voltage and beam current of the x-ray generator. | 11-05-2009 |
| 20100215148 | SPECIMEN COLLECTING METHOD AND BLADE TEMPERATURE ESTIMATING METHOD - In a specimen collecting method according to the present invention, a specimen is collected from a surface ( | 08-26-2010 |
| 20100316191 | Estimating strengths of wooden supports by detecting backscattered gamma rays - A method of estimating the strength of a wooden support wherein gamma rays ( | 12-16-2010 |
| 20110135062 | SUBSTRATE MEASURING METHOD AND APPARATUS - According to one embodiment of a substrate measuring method, a shape of a unit structure is measured by making an electromagnetic wave incident on a periodical structure and detecting a scattered electromagnetic wave. Measurement conditions are determined through calculation of a scattering profile representing the distribution of scattering intensities of the electromagnetic wave and optimization corresponding to a comparison result obtained by comparing the scattering profile every time a value of a parameter of attention is changed. | 06-09-2011 |
| 20120033792 | OPTIMAL DETECTOR POSITION FOR GAMMA BACKSCATTER - A method for determining the density of a fluid that includes disposing a gamma-ray source proximate to a vessel containing the fluid is provided. The optimal position of a gamma-ray detector with respect to the gamma-ray source is determined. A gamma-ray detector is position at the optimal position, and the density of the fluid is measured. | 02-09-2012 |
| 20140119513 | METHOD AND APPARATUS FOR MEASURING THIN FILM THICKNESS USING X-RAY - Provided is an apparatus and method for measuring for measuring a thickness of thin film using x-ray where a thickness of a thin film of nanometer(nm)-level can be accurately measured without destructing an target sample, through determination of thickness of thin film of the target sample, by determining a calibration curve by comparing a difference of intensities of signals scattered by a special component included in a base layer of the reference sample having a base layer and a base layer formed with the thin film layer with a thickness of the thin film layer, and determining the thickness of thin film layer of the target sample by comparing a difference of intensities of signals scattered by the special component included in the base layer of the target sample having the base layer formed with the thin film layer with the reference sample having the base layer with the calibration curve. | 05-01-2014 |
| 20150055757 | METHOD AND SYSTEM FOR NON-DESTRUCTIVELY EVALUATING A HIDDEN WORKPIECE - A method and system are provided for non-destructively evaluating a workpiece hidden by an overlying structure. In the context of a method, a workpiece is interrogated with radiation, such as x-ray radiation, that also propagates through the overlying structure. The method further includes collecting data representative of radiation backscattered from the workpiece. Based upon a thickness and material of the overlying structure, the method compares the data that has been collected from the workpiece with reference data representative of radiation backscattered from a standard that includes different respective material loss indicators hidden by an overlying structure of the same thickness and material. Each material loss indicator is a physical representation of a different amount of material loss. As a result of the comparison, the method estimates the material loss of the workpiece. | 02-26-2015 |
| 20150369759 | X-RAY SCATTEROMETRY APPARATUS - Apparatus, including a sample-support that retains a sample in a plane having an axis, the plane defining first and second regions separated by the plane. A source-mount in the first region rotates about the axis, and an X-ray source on the source-mount directs first and second incident beams of X-rays to impinge on the sample at first and second angles along beam axes that are orthogonal to the axis. A detector-mount in the second region moves in a plane orthogonal to the axis and an X-ray detector on the detector-mount receives first and second diffracted beams of X-rays transmitted through the sample in response to the first and second incident beams, and outputs first and second signals, respectively, in response to the received first and second diffracted beams. A processor analyzes the first and the second signals so as to determine a profile of a surface of the sample. | 12-24-2015 |
| 20160077025 | MULTI-FUNCTION X-RAY METROLOGY TOOL FOR PRODUCTION INSPECTION/MONITORING OF THIN FILMS AND MULTIDIMENSIONAL STRUCTURES - An apparatus for integrating metrology and method for using the same are disclosed. The apparatus includes a multi-chamber system having a transfer chamber, a deposition chamber, an etch chamber and a metrology chamber, and a robot configured to transfer a substrate between the deposition chamber or etch chamber and the metrology chamber. | 03-17-2016 |
| 378090000 | Plural diverse X-ray analysis | 1 |
| 20090028294 | SYSTEMS AND METHODS FOR IDENTIFYING A SUBSTANCE - A method for identifying a substance is described. The method includes detecting, by a first scatter detector, a first set of scattered radiation, generating a first effective atomic number from the first set of scattered radiation, detecting, by a second scatter detector, a second set of scattered radiation, generating a second effective atomic number from the second set of scattered radiation, and determining whether the first effective atomic number is within a limit of the second effective atomic number. | 01-29-2009 |
