Entries |
Document | Title | Date |
20080237698 | METHOD OF MAKING THREE DIMENSIONAL NAND MEMORY - A monolithic, three dimensional NAND string includes a first memory cell located over a second memory cell. A semiconductor active region of the first memory cell is a first pillar having a square or rectangular cross section when viewed from above, the first pillar being a first conductivity type semiconductor region located between second conductivity type semiconductor regions. A semiconductor active region of the second memory cell is a second pillar having a square or rectangular cross section when viewed from above, the second pillar located under the first pillar, the second pillar being a first conductivity type semiconductor region located between second conductivity type semiconductor regions. One second conductivity type semiconductor region in the first pillar contacts one second conductivity type semiconductor region in the second pillar. | 10-02-2008 |
20080237699 | NONVOLATILE SEMICONDUCTOR MEMORY AND MANUFACTURING METHOD THEREOF - A nonvolatile semiconductor memory includes a source area and a drain area provided on a semiconductor substrate with a gap which serves as a channel area, a first insulating layer, a charge accumulating layer, a second insulating layer (block layer) and a control electrode, formed successively on the channel area, and the second insulating layer is formed by adding an appropriate amount of high valence substance into base material composed of substance having a sufficiently higher dielectric constant than the first insulating layer so as to accumulate a large amount of negative charges in the block layer by localized state capable of trapping electrons, so that the high dielectric constant of the block layer and the high electronic barrier are achieved at the same time. | 10-02-2008 |
20080237700 | Nonvolatile memory device having cell and peripheral regions and method of making the same - A nonvolatile memory device and method of making the same are provided. Memory cells may be provided in a cell area wherein each memory cell has an insulative structure including a tunnel insulating layer, a floating trap layer and a blocking layer, and a conductive structure including an energy barrier layer, a barrier metal layer and a low resistance gate electrode. A material having a lower resistivity may be used as the gate electrode so as to avoid problems associated with increased resistance and to allow the gate electrode to be made relatively thin. The memory device may further include transistors in the peripheral area, which may have a gate dielectric layer, a lower gate electrode of poly-silicon and an upper gate electrode made of metal silicide, allowing an improved interface with the lower gate electrode without diffusion or reaction while providing a lower resistance. | 10-02-2008 |
20080283904 | TWO-BIT FLASH MEMORY CELL AND METHOD FOR MANUFACTURING THE SAME - A two-bit flash memory cell includes a substrate, a gate oxide layer disposed on the substrate, a gate stacked on the gate oxide layer. A charge storage spacer stack is disposed at either side of the gate. The charge storage spacer stack includes a bottom charge storage layer and an upper spacer layer. An insulating layer is disposed between the charge storage spacer stack and the gate. A liner is disposed underneath the bottom charge storage layer. A source/drain region is disposed at one side of the bottom charge storage layer within the substrate. | 11-20-2008 |
20080283905 | Nonvolatile memory devices and methods of fabricating the same - Provided are nonvolatile memory devices and methods of fabricating the same which may prevent or reduce deterioration of device characteristics and deterioration of a breakdown voltage. The nonvolatile memory device may include a semiconductor substrate, a charge-trap insulation layer on the semiconductor substrate and having a first region and second regions having a lower density of charge-trap sites than the first region, and a gate electrode on the charge-trap insulation layer, wherein the first region is overlapped by the gate electrode and the second regions are outside of the first region. | 11-20-2008 |
20080296663 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device according to an embodiment of the present invention includes a first gate insulator, a first gate electrode, a second gate insulator, and a second gate electrode. Regarding the thickness of the second gate insulator, the thickness of the insulator, on a first edge of the first gate electrode in the word-line direction, and the thickness of the insulator, on a second edge of the first gate electrode in the word-line direction, are larger than, the thickness of the insulator, on the upper surface of the first gate electrode, the thickness of the insulator, on the first side of the first gate electrode in the word-line direction, and the thickness of the insulator, on the second side of the first gate electrode in the word-line direction. | 12-04-2008 |
20080296664 | INTEGRATION OF NON-VOLATILE CHARGE TRAP MEMORY DEVICES AND LOGIC CMOS DEVICES - A semiconductor structure and method to form the same. The semiconductor structure includes a substrate having a non-volatile charge trap memory device disposed on a first region and a logic device disposed on a second region. A charge trap dielectric stack may be formed subsequent to forming wells and channels of the logic device. HF pre-cleans and SC1 cleans may be avoided to improve the quality of a blocking layer of the non-volatile charge trap memory device. The blocking layer may be thermally reoxidized or nitridized during a thermal oxidation or nitridation of a logic MOS gate insulator layer to densify the blocking layer. A multi-layered liner may be utilized to first offset a source and drain implant in a high voltage logic device and also block silicidation of the nonvolatile charge trap memory device. | 12-04-2008 |
20080308860 | Method of forming a pattern for a semiconductor device, method of forming a charge storage pattern using the same method, non-volatile memory device and methods of manufacturing the same - A method of forming a semiconductor device pattern, a method of forming a charge storage pattern, a non-volatile memory device including a charge storage pattern and a method of manufacturing the same are provided. The method of forming the charge storage pattern including forming a trench on a substrate, and a device isolation pattern in the trench. The device isolation pattern protrudes from a surface of the substrate such that an opening exposing the substrate is formed. A tunnel oxide layer is formed on the substrate in the opening. A preliminary charge storage pattern is formed on the tunnel oxide layer and the device isolation pattern by selective deposition of conductive materials. The preliminary charge storage pattern may be removed from the device isolation pattern. The preliminary charge storage pattern remains only on the tunnel oxide layer to form the charge storage pattern on the substrate. | 12-18-2008 |
20080315296 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME - A non-volatile semiconductor storage device | 12-25-2008 |
20090001451 | NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME - A method of fabricating a semiconductor device includes forming a fin-shaped active region including opposing sidewalls and a surface therebetween protruding from a substrate, forming a gate structure on the surface of the active region, and performing an ion implantation process to form source/drain regions in the active region at opposite sides of the gate structure. The source/drain regions respectively include a first impurity region in the surface of the active region and second impurity regions in the opposing sidewalls of the active region. The first impurity region has a doping concentration that is greater than that of the second impurity regions. Related devices are also discussed. | 01-01-2009 |
20090001452 | Semiconductor device and manufacturing method thereof - The invention provides a semiconductor device and its manufacturing method in which a memory transistor and a plurality of thin film transistors that have gate insulating films with different thicknesses are fabricated over a substrate. The invention is characterized by the structural difference between the memory transistor and the plurality of thin film transistors. Specifically, the memory transistor and some of the plurality of thin film transistors are provided to have a bottom gate structure while the other thin film transistors are provided to have a top gate structure, which enables the reduction of characteristic defects of the transistor and simplification of its manufacturing process. | 01-01-2009 |
20090039417 | Nonvolatile Flash Memory Device and Method for Producing Dielectric Oxide Nanodots on Silicon Dioxide - A method of producing dielectric oxide nanodots ( | 02-12-2009 |
20090065852 | NONVOLATILE MEMORY DEVICE WITH NANOWIRE CHANNEL AND METHOD FOR FABRICATING THE SAME - A nonvolatile memory device with nanowire channel and a method for fabricating the same are proposed, in which side etching is used to shrink side walls of a side-gate to form a nanowire pattern, thereby fabricating a nanowire channel on the dielectric of the side walls of the side-gate. A nonvolatile memory device with nanowire channel and dual-gate control can thus be achieved. This nonvolatile memory device can enhance data writing and erasing efficiency, and also has the capability of low voltage operation. Moreover, through a process of low cost and easy steps, highly reproducible and mass producible fabrication of nanowire devices can be accomplished. | 03-12-2009 |
20090072298 | Semiconductor device and method of manufacturing the same - An embodiment of a semiconductor device includes a substrate including a cell region and a peripheral region; a cell gate pattern on the cell region; and a peripheral gate pattern on the peripheral region, wherein a first cell insulation layer, a second cell insulation layer, and a third cell insulation layer may be between the substrate and the cell gate pattern, a first peripheral insulation layer, a second peripheral insulation layer, and a third peripheral insulation layer may be between the substrate and the peripheral gate pattern, and the second cell insulation layer and the third cell insulation layer include the same material as the respective second peripheral insulation layer and third peripheral insulation layer. | 03-19-2009 |
20090078990 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - A nonvolatile semiconductor memory device includes a charge storage layer on a first insulating film, a second insulating film which is provided on the charge storage layer, formed of layers, and a control gate electrode on the second insulating film. The second insulating film includes a bottom layer (A) provided just above the charge storage layer, a top layer (C) provided just below the control gate electrode, and a middle layer (B) provided between the bottom layer (A) and the top layer (C). The middle layer (B) has higher barrier height and lower dielectric constant than both the bottom layer (A) and the top layer (C). The average coordination number of the middle layer (B) is smaller than both the average coordination number of the top layer (C) and the average coordination number of the bottom layer (A). | 03-26-2009 |
20090090963 | SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A plurality of memory cells each constituted of a memory cell transistor having a gate electrode in a laminated structure composed of a charge storage layer and a control gate layer and a select transistor having source/drain diffusion layers while one of the source/drain diffusion layers is shared by the memory cell transistor are arranged in and on a semiconductor substrate. The impurity concentration of the source/drain diffusion layer shared by the memory cell transistor and the select transistor in each of the plurality of memory cells is set lower than the impurity concentration of the other source/drain diffusion layers in each of the memory cells. | 04-09-2009 |
20090090964 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a device isolation insulating film which is buried in a semiconductor substrate, a gate insulation film which is provided on the semiconductor substrate, a gate electrode which is provided on the gate insulation film, a source region and a drain region which are provided in the semiconductor substrate and spaced apart from each other in a manner to sandwich the gate electrode, both end portions of each of the source region and the drain region being offset from the device isolation insulating film in a channel width direction by a predetermined distance, and first and second gate electrode extension portions which are provided in a manner to cover both end portions of each of the source region and the drain region in a channel length direction. | 04-09-2009 |
20090090965 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME - A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a memory columnar semiconductor extending in a direction perpendicular to a substrate; a tunnel insulation layer contacting the memory columnar semiconductor; a charge accumulation layer contacting the tunnel insulation layer and accumulating charges; a block insulation layer contacting the charge accumulation layer; and a plurality of memory conductive layers contacting the block insulation layer. The lower portion of the charge accumulation layer is covered by the tunnel insulation layer and the block insulation layer. | 04-09-2009 |
20090101967 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes an insulating layer, a channel structure, an insulating structure and a gate. The channel structure includes a channel bridge for connecting two platforms. The bottom of the channel bridge is separated from the insulating layer by a distance, and the channel bridge has a plurality of separated doping regions. The insulating structure wraps around the channel bridge, and the gate wraps around the insulating structure. | 04-23-2009 |
20090108334 | Charge Trap Device and Method for Fabricating the Same - A charge trapping device includes a plurality of isolation layers, a plurality of charge trapping layers, a blocking layer, and a control gate electrode. The isolation layers define active regions, and the isolation layers and active regions extend as respective stripes along a first direction on a semiconductor substrate. The charge trapping layers are disposed on the active regions in island forms where the charge trapping layers are separated from each other in the first direction and disposed on the respective active regions between the isolation layers in a second direction perpendicular to the first direction. The blocking layer is disposed on the isolation layers and the charge trapping layers. The control gate electrode is disposed on the charge trapping layer. | 04-30-2009 |
20090114977 | NONVOLATILE MEMORY DEVICE HAVING CHARGE TRAPPING LAYER AND METHOD FOR FABRICATING THE SAME - Disclosed herein is a nonvolatile memory device having a charge trapping layer and a method of making the same. The nonvolatile memory device includes a substrate, a tunneling layer disposed on the substrate, a charge trapping layer disposed on the tunneling layer, a first blocking layer disposed on the charge trapping layer, a second blocking layer disposed on the first blocking layer, and a control gate electrode disposed on the second blocking layer. A first band gap between the first blocking layer and the charge trapping layer is larger than a second band gap between the second blocking layer and the charge trapping layer. | 05-07-2009 |
20090134453 | Non-Volatile Memory Device with Improved Immunity to Erase Saturation and Method for Manufacturing Same - A non-volatile memory device having a control gate on top of the second dielectric (interpoly or blocking dielectric), at least a bottom layer of the control gate in contact with the second dielectric being constructed in a material having a predefined high work-function and showing a tendency to reduce its work-function when in contact with a group of certain high-k materials after full device fabrication. At least a top layer of the second dielectric, separating the bottom layer of the control gate from the rest of the second dielectric, is constructed in a predetermined high-k material, chosen outside the group for avoiding a reduction in the work-function of the material of the bottom layer of the control gate. In the manufacturing method, the top layer is created in the second dielectric before applying the control gate. | 05-28-2009 |
20090146207 | Nonvolatile Memory Devices Including Common Source - Provided is a nonvolatile memory device including a common source. The device includes a first active region crossing a second active region, a common source disposed in the second active region, and a source conductive line disposed on the common source in parallel to the common source. The source conductive line is electrically connected to the common source. | 06-11-2009 |
20090146208 | Independently controlled, double gate nanowire memory cell with self-aligned contacts - A double gate, dynamic storage device and method of fabrication are disclosed. A back (bias gate) surrounds three sides of a semiconductor body with a front gate disposed on the remaining surface. Two different gate insulators and gate materials may be used. | 06-11-2009 |
20090159962 | Non-Volatile Memory Devices - Non-volatile memory devices are provided including a control gate electrode on a substrate; a charge storage insulation layer between the control gate electrode and the substrate; a tunnel insulation layer between the charge storage insulation layer and the substrate; a blocking insulation layer between the charge storage insulation layer and the control gate electrode; and a material layer between the tunnel insulation layer and the blocking insulation layer, the material layer having an energy level constituting a bottom of a potential well. | 06-25-2009 |
20090179256 | MEMORY HAVING SEPARATED CHARGE TRAP SPACERS AND METHOD OF FORMING THE SAME - A silicon-oxide-nitride-oxide-silicon (SONOS) memory and the corresponding forming method are disclosed. The memory includes a plurality of select gate structures arranged in an array, a plurality of charge trap spacers that do not contact each other, and a plurality of word lines. The word lines can directly contact the select gates' surfaces of the select gate structures. All of the select gate structures disposed in one line can share two charge trap spacers, and the two charge trap spacers are disposed on the opposed sidewalls of these select gate structures. | 07-16-2009 |
20090179257 | NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A non-volatile semiconductor memory device includes a first columnar semiconductor layer and a plurality of first conductive layers formed such that a charge storage layer for storing charges is sandwiched between the first conductive layers and the first columnar semiconductor layer. Also, the non-volatile semiconductor memory device includes a second columnar semiconductor layer and a second conductive layer formed such that an insulating layer is sandwiched between the second conductive layer and the second columnar semiconductor layer, the second conductive layer being repeatedly provided in a line form by providing a certain interval in a first direction perpendicular to a laminating direction. A first sidewall conductive layer being in contact with the second conductive layer and extending in the first direction is formed on a sidewall along a longitudinal direction of the second conductive layer. | 07-16-2009 |
20090184364 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME - A non-volatile semiconductor storage device includes device regions and device isolation regions that are formed on a semiconductor substrate, with a first direction defined as their longitudinal direction. The non-volatile semiconductor storage device also includes memory cells having a cell transistor formed on the device regions and a selection transistor to select the cell transistor. Each of gate electrode wires provides a common connection between a plurality of memory cells arranged in a line in a second direction, and is arranged to extend in the second direction. Each of the gate electrode wires has a first width on the device regions and a second width larger than the first width on the device isolation regions. | 07-23-2009 |
20090184365 | SEMICONDUCTOR MEMORY DEVICE USING SILICON NITRIDE FILM AS CHARGE STORAGE LAYER OF STORAGE TRANSISTOR AND MANUFACTURING METHOD THEREOF - A semiconductor memory device includes a tunnel insulating film, charge storage layer, block insulating film and control gate electrode stacked and formed on the surface of a semiconductor substrate. The charge storage layer is formed of an insulating film containing nitrogen. A dopant that reduces the trap density of charges moved in and out of an internal portion of the charge storage layer via the tunnel insulating film is doped into a region of the charge storage layer on the interface side with the tunnel insulating film or a dopant is doped into the above region with higher concentration in comparison with that of another region. | 07-23-2009 |
20090184366 | SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor memory device has a substrate having a semiconductor layer, an n-type semiconductor region formed beneath a main surface of the semiconductor layer, a plurality of cell gates being aligned at a space from each other and including a gate insulating film formed on the main surface of the semiconductor layer, a charge storage layer formed on the gate insulating film, a charge block layer formed on the charge storage layer and a control gate electrode formed on the charge block layer, an insulating film between cells formed on the main surface of the semiconductor layer between the cell gates, and a carbon accumulation region formed in the insulating film between the cells and has a maximum concentration of a carbon element in a region within 2 nm from an interface between the semiconductor layer and the insulating film between the cells. | 07-23-2009 |
20090194810 | SEMICONDUCTOR DEVICE USING ELEMENT ISOLATION REGION OF TRENCH ISOLATION STRUCTURE AND MANUFACTURING METHOD THEREOF - A stacked film including a gate dielectric film and electrode film of each memory cell of a flash memory is formed on a semiconductor substrate. The stacked film is patterned by reactive ion etching to form an isolation trench for formation of an element isolation region and the surface of the semiconductor substrate is exposed to the internal portion of the isolation trench. An O | 08-06-2009 |
20090200603 | High density vertical structure nitride flash memory - A charge trap type of memory having a memory channel with vertical and possibly horizontal components is described. The invention includes a new operation method of simultaneous hole and electron injection operation for high speed and high reliability non-volatile memories, as well as high-density non-volatile memories. Array implementations for high-density memory arrays and high-speed memory arrays and their fabrication methods are also described. | 08-13-2009 |
20090206393 | NONVOLATILE MEMORY ELEMENT AND METHOD OF MANUFACTURING THE SAME - A nonvolatile memory element includes a semiconductor region, a source region and a drain region provided in the semiconductor region, a tunnel insulating layer provided on the semiconductor region between the source region and the drain region, a charge storage layer provided on the tunnel insulating layer, a block insulating layer provided on the charge storage layer, and a control gate electrode provided on the block insulating layer. The charge storage layer includes one of an oxide, a nitride and an oxynitride, which contains at least one material selected from the group consisting of Hf, Al, Zr, Ti and a rare-earth metal, and is entirely or partially crystallized. The block insulating layer includes one of an oxide, an oxynitride, a silicate and an aluminate, which contains at least one rare-earth metal. | 08-20-2009 |
20090218615 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device according to an embodiment of the present invention has a bit line and a word line. The device includes a substrate, a first gate insulation film formed on the substrate, a charge storage layer formed on the first gate insulation film, a second gate insulation film formed on the charge storage layer, and a gate electrode formed on the second gate insulation film, the width between side surfaces of the second gate insulation film in the bit line direction being smaller than the width between side surfaces of the gate electrode in the bit line direction. | 09-03-2009 |
20090230462 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME - Each of the memory strings includes: a first columnar semiconductor layer extending in a vertical direction to a substrate; a plurality of first conductive layers formed to sandwich an insulation layer with a charge trap layer and expand in a two-dimensional manner; a second columnar semiconductor layer formed in contact with the top surface of the first columnar semiconductor layer and extending in a vertical direction to the substrate; and a plurality of second conductive layers formed to sandwich an insulation layer with the second columnar semiconductor layer and formed in a stripe pattern extending in a first direction orthogonal to the vertical direction. Respective ends of the plurality of first conductive layers in the first direction are formed in a stepwise manner in relation to each other, entirety of the plurality of the second conductive layers are formed in an area immediately above the top layer of the first conductive layers, and the plurality of first conductive layers and the plurality of second conductive layers are covered with a protection insulation layer that is formed continuously with the plurality of first conductive layers and the second conductive layers. | 09-17-2009 |
20090242970 | SEMICONDUCTOR DEVICE, CAPACITOR, AND FIELD EFFECT TRANSISTOR - It is made possible to provide a semiconductor device that has the effective work function of the connected metal optimized at the interface between a semiconductor and the metal. A semiconductor device includes: a semiconductor film; an oxide film formed on the semiconductor film, the oxide film including at least one of Hf and Zr, and at least one element selected from the group consisting of V, Cr, Mn, Nb, Mo, Tc, W, and Re being added to the oxide film; and a metal film formed on the oxide film. | 10-01-2009 |
20090250747 | NON-VOLATILE MEMORY DEVICES HAVING A MULTI-LAYERED CHARGE STORAGE LAYER - A non-volatile memory device includes a substrate having a first region and a second region. A first gate electrode is disposed on the first region. A multi-layered charge storage layer is interposed between the first gate electrode and the substrate, the multi-layered charge storage including a tunnel insulation, a trap insulation, and a blocking insulation layer which are sequentially stacked. A second gate electrode is placed on the substrate of the second region, the second gate electrode including a lower gate and an upper gate connected to a region of an upper surface of the lower gate. A gate insulation layer is interposed between the second gate electrode and the substrate. The first gate electrode and the upper gate of the second gate electrode comprise a same material. | 10-08-2009 |
20090267138 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A charge trap type non-volatile memory device has memory cells formed on a silicon substrate at a predetermined interval via an element isolation trench along a first direction in which word lines extend. Each of the memory cells has a tunnel insulating film formed on the silicon substrate, a charge film formed on the tunnel insulating film, and a common block film formed on the charge film. The common block film is formed in common with the memory cells along first direction. An element isolation insulating film buried in the element isolation trench has an upper portion of a side wall of the element isolation insulating film which contacts with a side wall of the charge film in each of the memory cells and a top portion of the element isolation insulating film which contacts with the common block film. A control electrode film is formed on the common block film. | 10-29-2009 |
20090267139 | THREE DIMENSIONAL STACKED NONVOLATILE SEMICONDUCTOR MEMORY - A three dimensional stacked nonvolatile semiconductor memory according to examples of the present invention includes a memory cell array comprised of first and second blocks disposed side by side and a driver disposed between the first and second blocks. At least two conductive layers having the same structure as that of the at least two conductive layers in the first and second blocks are disposed on the driver, and select gate lines in the first and second blocks are connected to the driver through the at least two conductive layers on the driver. | 10-29-2009 |
20090273021 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes a semiconductor substrate, a tunnel insulating film on the semiconductor substrate, a charge storage layer on the tunnel insulating film, a block insulating film on the charge storage layer, and a control gate electrode on the block insulating film, the charge storage layer including a plurality of layers including first and second charge storage layers, the second charge storage layer being provided on a nearest side of the block insulating film, the first charge storage layer being provided between the tunnel insulating film and the second charge storage layer, the second charge storage layer having a higher trap density than the first charge storage layer, the second charge storage layer having a smaller band gap than the first charge storage layer, and the second charge storage layer having a higher permittivity than the first charge storage layer and a silicon nitride film. | 11-05-2009 |
20090278195 | SEMICONDUCTOR MEMORY DEVICE PROVIDED WITH STACKED LAYER GATE INCLUDING CHARGE ACCUMULATION LAYER AND CONTROL GATE, AND MANUFACTURING METHOD THEREOF - A semiconductor memory device includes a memory cell transistor and a first MOS transistor. The memory cell transistor includes a first insulating film, a second insulating film, a control gate electrode, and a first diffusion layer. The first insulating film formed on the first active region. The second insulating film formed on the first insulating film. The control gate electrode formed so as to include a first metal film formed on the second insulating film and a first conductive film formed on the first metal film. The first MOS transistor includes a second conductive film, a second metal film, a third conductive film, and a second diffusion layer. The second conductive film formed on a second active region. The second metal film formed on the second conductive film. The third conductive film formed on a second metal film. | 11-12-2009 |
20090294838 | NON-VOLATILE SEMICONDUCTOR MEMORY DEVICES - A non-volatile memory device includes a tunneling insulating layer on a semiconductor substrate, a charge storage layer, a blocking insulating layer, and a gate electrode. The charge storage layer is on the tunnel insulating layer and has a smaller band gap than the tunnel insulating layer and has a greater band gap than the semiconductor substrate. The blocking insulating layer is on the charge storage layer and has a greater band gap than the charge storage layer and has a smaller band gap than the tunnel insulating layer. The gate electrode is on the blocking insulating layer. | 12-03-2009 |
20090321816 | Vertical-type non-volatile memory device - In a vertical-type non-volatile memory device, first and second single-crystalline semiconductor pillars are arranged to face each other on a substrate. Each of the first and second single-crystalline semiconductor pillars has a rectangular parallelepiped shape with first, second, third and fourth sidewalls. A first tunnel oxide layer, a first charge storage layer and a first blocking dielectric layer are sequentially stacked on the entire surface of the first sidewall of the first single-crystalline semiconductor pillar. A second tunnel oxide layer, a second charge storage layer and a second blocking dielectric layer are sequentially stacked on the entire surface of the first sidewall of the second single-crystalline semiconductor pillar. A word line makes contact with surfaces of both the first and second blocking dielectric layers. The word line is used in common for the first and second single-crystalline semiconductor pillars. | 12-31-2009 |
20100006924 | ONE-TIME PROGRAMMABLE READ-ONLY MEMORY - A one-time programmable read-only memory (OTP-ROM) including a substrate, a first doped region, a second doped region, a third doped region, a first dielectric layer, a select gate, a second dielectric layer, a first channel, a second channel and a silicide layer is provided. The first doped region, the second doped region and the third doped region are disposed apart in a substrate. The first dielectric layer is disposed on the substrate between the first doped region and the second doped region. The select gate is disposed on the first dielectric layer. The second dielectric layer is disposed on the substrate between the second doped region and the third doped region. The silicide layer is disposed on the first doped region, the second doped region and the third doped region. The OTP-ROM stores data by a punch-through effect occurring between the second doped region and the third doped region. | 01-14-2010 |
20100006925 | NON-VOLATILE TWO TRANSISTOR MEMORY CELL AND METHOD FOR PRODUCING THE SAME - The invention relates to a nonvolatile two-transistor semiconductor memory cell and an associated fabrication method, source and drain regions ( | 01-14-2010 |
20100013002 | NONVOLATILE STORAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME - Provided is an excellent nonvolatile storage device having advantageous in miniaturization and less variation in initial threshold value, and exhibiting a high writing efficiency, without an erasing failure and a retention failure. The nonvolatile storage device is characterized by including a film stack extending from between a semiconductor substrate and a gate electrode onto at least a surface of the gate electrode lying on a first impurity diffusion region side, the film stack including a charge accumulating layer and a tunnel insulating film sequentially from a gate electrode side. | 01-21-2010 |
20100013003 | NON-VOLATILE MEMORY CELL WITH A HYBRID ACCESS TRANSISTOR - An integrated circuit (IC) is disclosed. The IC comprises a substrate with a cell region defined thereon. The cell region comprises a thin gate doped well tailored for transistors with thin gate dielectric layers. The IC also includes a non-volatile memory cell in the cell region. The non-volatile memory cell has an access transistor and a storage transistor. The access transistor includes an access gate with an access gate dielectric comprising a thick gate dielectric layer on the thin gate doped well. Wells for transistors with thick gate dielectric layers have a lower dopant concentration than the thin gate doped well. | 01-21-2010 |
20100019311 | SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - This semiconductor memory device comprises a semiconductor substrate, a plurality of tunnel insulator films formed on the semiconductor substrate along a first direction and a second direction orthogonal to the first direction with certain spaces in each directions, a plurality of charge accumulation layers formed on the plurality of tunnel insulator films, respectively, a plurality of element isolation regions formed on the semiconductor substrate, the plurality of element isolation regions including a plurality of trenches formed along the first direction between the plurality of tunnel insulator films, a plurality of element isolation films filled in the plurality of trenches, a plurality of inter poly insulator films formed over the plurality of element isolation regions and on the upper surface and side surfaces of the plurality of charge accumulation layer along the second direction in a stripe shape, a plurality of air gaps formed between the plurality of element isolation films filled in the plurality of trenches and the plurality of inter poly insulator films and a plurality of control gate electrodes formed on the plurality of inter poly insulator films. | 01-28-2010 |
20100019312 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes a semiconductor region, a tunnel insulating film formed on a surface of the semiconductor region, a charge-storage insulating film formed on a surface of the tunnel insulating film and containing silicon and nitrogen, a block insulating film formed on a surface of the charge-storage insulating film, and a control gate electrode formed on a surface of the block insulating film, wherein the tunnel insulating film has a first insulating film formed on the surface of the semiconductor region and containing silicon and oxygen, a second insulating film formed on a surface of the first insulating film, and a third insulating film formed on a surface of the second insulating film and containing silicon and oxygen, and a charge trap state in the second insulating film has a lower density than that in the charge-storage insulating film. | 01-28-2010 |
20100025754 | SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME - To improve characteristics of a semiconductor device having a nonvolatile memory. | 02-04-2010 |
20100025755 | SEMICONDUCTOR DEVICE - In the trap type memory chip the withstanding voltage is raised up, and then the electric current for reading out is increased. There are formed on the p-type semiconductor substrate | 02-04-2010 |
20100032747 | SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor memory device includes a plurality of memory cell transistors each having a gate electrode section including a charge accumulation layer formed on a semiconductor substrate via a gate insulating film, a first insulating film formed using a material with a higher dielectric constant than the gate insulating film, a control gate, an impurity diffusion layer functioning as a source or a drain, and a plurality of barrier films formed on a side surface of the gate electrode section so as to cover a side surface of at least the first insulating film and formed between the first insulating film and the control gate. The device further includes a plurality of second insulating films formed on the semiconductor substrate and each formed between the gate electrode sections of adjacent ones of the plurality of memory cell transistors. | 02-11-2010 |
20100038703 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE - A memory string has a semiconductor layer with a joining portion that is formed to join a plurality of columnar portions extending in a vertical direction with respect to a substrate and lower ends of the plurality of columnar portions. First conductive layers are formed in a laminated fashion to surround side surfaces of the columnar portions and an electric charge storage layer, and function as control electrodes of memory cells. A second conductive layer is formed around the plurality of columnar portions via a gate insulation film, and functions as control electrodes of selection transistors. Bit lines are formed to be connected to the plurality of columnar portions, respectively, with a second direction orthogonal to a first direction taken as a longitudinal direction. | 02-18-2010 |
20100038704 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE SUPPRESSING FLUCTUATION IN THRESHOLD VOLTAGE - First and second memory cell transistors are isolated by an element isolation insulating film. A barrier insulating film covers the element isolation insulating film. The first memory cell transistor includes a first tunnel insulating film, a first charge storage layer made of an insulating film, a first block insulating film, and a first gate electrode. The second memory cell transistor includes a second tunnel insulating film, a second charge storage layer made of an insulating film, a second block insulating film, and a second gate electrode. The barrier insulating film is in contact with the first and second charge storage layers, and has a film thickness smaller than that of the first and second charge storage layers. | 02-18-2010 |
20100044777 | RECONFIGURABLE SEMICONDUCTOR DEVICE - A reconfigurable semiconductor device is disclosed. The semiconductor device includes a substrate, a first insulating material formed on the substrate, two channels having different polarities, a plurality of terminal electrodes formed on the insulating material and coupled in common with the channels at their opposite ends, a second insulating material formed on the terminal electrodes, and a control gate formed on the second insulating material. The channels have different polarity and a charge storage layer is formed inside the second insulating material. The control gate is applied with a forward bias or a reverse bias and then the bias is cut off. The voltage-current characteristics of the semiconductor device are changed according to an electrical charge created in the charge storage layer. | 02-25-2010 |
20100044778 | Non-volatile memory device and method of manufacturing same - A non-volatile memory device and a method of manufacturing the non-volatile memory device are provided. At least one first semiconductor layer and at least one second semiconductor layer are disposed. At least one control gate electrode is disposed between the at least one first semiconductor layer and the at least one second semiconductor layer. At least one first layer selection line is capacitively coupled to the at least one first semiconductor layer. At least one second layer selection line is capacitively coupled to the at least one second semiconductor layer. | 02-25-2010 |
20100044779 | Memory devices capable of reducing lateral movement of charges - Memory devices is provided, the memory devices include a tunneling insulating layer disposed on a substrate, a charge storage layer disposed on the tunneling insulating layer, a blocking insulating layer disposed on the charge storage layer and a control gate electrode disposed on the blocking insulating layer. The control gate electrode may have an edge portion spaced farther apart from the blocking insulating layer than a central portion of the control gate electrode to concentrate charge density distribution on a central portion of a memory cell. | 02-25-2010 |
20100059813 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR - A gate electrode of a select gate transistor includes a gate insulating film that is formed on a semiconductor substrate, a lower gate electrode that is formed on the gate insulating film and that has a tapered portion in which a side surface on a side of a gate electrode of a memory cell transistor is in a tapered shape, a first oxide film, a silicon nitride film, a second oxide film, and a conductive film that are sequentially formed on the tapered portion, and an upper gate electrode that is connected to the conductive film and the lower gate electrode. | 03-11-2010 |
20100065902 | SCALABLE HIGH DENSITY NON-VOLATILE MEMORY CELLS IN A CONTACTLESS MEMORY ARRAY - A plurality of mesas are formed in the substrate. Each pair of mesas forms a trench. A plurality of diffusion areas are formed in the substrate. A mesa diffusion area is formed in each mesa top and a trench diffusion area is formed under each trench. A vertical, non-volatile memory cell is formed on each sidewall of the trench. Each memory cell is comprised of a fixed threshold element located vertically between a pair of non-volatile gate insulator stacks. In one embodiment, each gate insulator stack is comprised of a tunnel insulator formed over the sidewall, a deep trapping layer, and a charge blocking layer. In another embodiment, an injector silicon rich nitride layer is formed between the deep trapping layer and the charge blocking layer. | 03-18-2010 |
20100072538 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A nonvolatile semiconductor memory device includes a plurality of memory strings, each of which has a plurality of electrically rewritable memory cells connected in series; and select transistors, one of which is connected to each of ends of each of the memory strings. Each of the memory strings is provided with a first semiconductor layer having a pair of columnar portions extending in a perpendicular direction with respect to a substrate, and a joining portion formed so as to join lower ends of the pair of columnar portions; a charge storage layer formed so as to surround a side surface of the columnar portions; and a first conductive layer formed so as to surround the side surface of the columnar portions and the charge storage layer, and configured to function as a control electrode of the memory cells. Each of the select transistors is provided with a second semiconductor layer extending upwardly from an upper surface of the columnar portions; and a second conductive layer formed so as to surround a side surface of the second semiconductor layer with a gap interposed, and configured to function as a control electrode of the select transistors. | 03-25-2010 |
20100072539 | MEMORY CELL OF NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - A memory cell of a nonvolatile semiconductor memory device according to an embodiment of the invention has a MONOS structure. The charge storage layer of the memory cell includes insulating material layers. The relationship between the conduction band edge energy and valance band edge energy of the insulating material layers either increases gradually or decreases gradually from the tunnel insulating film toward the block insulating film. Furthermore, when the relative permittivity of the block insulating film is expresses as ∈ | 03-25-2010 |
20100078706 | Nonvolatile semiconductor memory device and method of manufacturing nonvolatile semiconductor memory device - A nonvolatile semiconductor memory device (and method of forming same) includes a word gate provided above a channel region of a semiconductor substrate via an insulating layer, a control gate provided at a side of the word gate, and a charge storage layer provided by an ONO film between the channel region and the control gate, and between the word gate and the control gate. The control gate includes a silicide layer including silicide containing nickel, and a non-silicide layer provided between the silicide layer and the charge storage layer. | 04-01-2010 |
20100084703 | SEMICONDUCTOR MEMORY DEVICE INCLUDING A STACKED GATE HAVING A CHARGE STORAGE LAYER AND A CONTROL GATE, AND METHOD OF MANUFACTURING THE SAME - A semiconductor memory device includes a source region, a drain region, a channel region, a charge storage layer, and a control gate electrode. The source region and drain region are formed separately from each other in a surface of a semiconductor substrate. The channel region is formed in the semiconductor substrate and located between the source region and the drain region. The charge storage layer is formed on the channel region with a first insulating film interposed therebetween. The control gate electrode is formed on the charge storage layer with a second insulating film interposed therebetween. The control gate has an upper corner portion rounded with a radius of curvature of 5 nm or more. | 04-08-2010 |
20100109075 | SEMICONDUCTOR DEVICE HAVING AN EXPANDED STORAGE NODE CONTACT AND METHOD FOR FABRICATING THE SAME - A semiconductor device is disclosed that stably ensures an area of a storage node contact connected to a junction region in an active region of the semiconductor device and is thus able to improve the electrical properties of the semiconductor device and enhance a yield, and a method for fabricating the same. The semiconductor device includes a semiconductor substrate having an active region including a gate, a storage node contact region, and an isolation region that defines the active region. A passing gate and an isolation structure surrounding the passing gate are formed in the isolation region. A silicon epitaxial layer is selectively formed over an upper portion of the passing gate to expand the storage node contact region. | 05-06-2010 |
20100117141 | Memory cell transistors having limited charge spreading, non-volatile memory devices including such transistors, and methods of formation thereof - In one aspect, a transistor comprises: a substrate body; a tunnel oxide layer on the body; a charge trapping layer on the tunnel oxide layer; a blocking layer on the charge trapping layer; a control gate on the blocking layer, the control gate having first and second sidewalls, the first and second sidewalls being spaced apart from each other by a first distance; and charge confinement features on the body, the charge confinement features being spaced apart from each other by a second distance that is greater than or substantially equal to the first distance, the charge confinement features suppressing or preventing migration of charge present in the charge trapping layer. | 05-13-2010 |
20100123184 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - In a nonvolatile semiconductor memory device provided with memory cell transistors arranged in a direction and a select transistor to select the memory cell transistors, each of the memory cell transistors of a charge trap type are at least composed of a first insulating layer and a first gate electrode respectively, and the select transistor is at least composed of a second insulating layer and a second gate electrode. The first gate electrode is provided with a first silicide layer of a first width formed on the first insulating layer. The second gate electrode is provided with an impurity-doped silicon layer formed on the second insulating layer and with a second silicide layer of a second width formed on the impurity-doped silicon layer. The second silicide has the same composition as the first silicide. The second width is larger than the first width. | 05-20-2010 |
20100127320 | NONVOLATILE SEMICONDUCTOR MEMORY - Two diffusion layers are provided in an element area. A tunnel insulating film is provided on the surface of the element area between the two diffusion layers. A charge storage layer is provided on the tunnel insulating film. A first insulator provided on the upper surface of the charge storage layer. An inter-electrode insulating film provided on the first insulator, on the side surface of the charge storage layer in a first direction and on the isolation insulating film. And a control gate electrode extends in the first direction and covers the charge storage layer via the first insulator and the inter-electrode insulating film. The first insulator is thicker than the inter-electrode insulating film, and the inter-electrode insulating film has a first slit on the first insulator. | 05-27-2010 |
20100148242 | SEMICONDUCTOR DEVICE - A semiconductor device suppresses short-circuit failure between a selection gate electrode and a control gate electrode while shortening the distance between the upper portions of the selection gate electrode and the control gate electrode. The device includes an impurity region formed on both sides of a channel region of a semiconductor substrate; a selection gate electrode on the channel region via a gate insulating film; a control gate electrode in the shape of sidewall via a gate isolation insulating film on both side surfaces of the selection gate electrode and on the surface of the channel region; a protective insulating film covering the sidewall of the control gate electrode; and a silicide layer on the selection gate electrode. The protective insulating film is a two-layer structure of a silicon nitride film covering the sidewall of the control gate electrode and a silicon oxide film covering the silicon nitride film. | 06-17-2010 |
20100155826 | Non-volatile memory device and method of fabricating the same - Provided are a non-volatile memory device and a method of fabricating the same. The non-volatile memory device may include a substrate and a plurality of semiconductor pillars on the substrate. A plurality of control gate electrodes may be stacked on the substrate and intersecting the plurality of semiconductor pillars. A plurality of dummy electrodes may be stacked adjacent to the plurality of control gate electrodes on the substrate, the plurality of dummy electrodes being spaced apart from the plurality of control gate electrodes. A plurality of via plugs may be connected to the plurality of control gate electrodes. A plurality of wordlines may be on the plurality of via plugs. Each of the plurality of via plugs may penetrate a corresponding one of the plurality of control gate electrodes and at least one of the plurality of dummy electrodes. | 06-24-2010 |
20100163969 | FLASH MEMORY DEVICE AND MANUFACTURING METHOD THE SAME - A flash memory device and a method of manufacturing a flash memory device. A flash memory device may include an isolation layer and/or an active area over a semiconductor substrate, a memory gate formed over an active area, a control gate formed over a semiconductor substrate including a memory gate, and/or a common source line contact formed over a semiconductor substrate including a control gate. A flash memory device may include a source plate having substantially the same interval as an interval of an active area of a bit line. A source plate may include an active area in which a common source line contact may be formed. A common source line contact may include a long butting contact extending in a direction traversing an active area. | 07-01-2010 |
20100200908 | Nonvolatile memory device and method of fabricating the same - Provided are a nonvolatile memory device having a vertical folding structure and a method of manufacturing the nonvolatile memory device. A semiconductor structure includes first and second portions that are substantially vertical. A plurality of memory cells are arranged along the first and second portions of the semiconductor structure and are serially connected. | 08-12-2010 |
20100200909 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - To provide a technique capable of improving reliability of a semiconductor device having a nonvolatile memory cell by suppressing the reduction of the drive force. | 08-12-2010 |
20100207195 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME - A non-volatile semiconductor storage device has a plurality of memory strings to each of which a plurality of electrically rewritable memory cells are connected in series. Each of the memory strings includes first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple the lower ends of the pair of columnar portions; a charge storage layer formed to surround the side surfaces of the columnar portions; and first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer. The first conductive layers functions as gate electrodes of the memory cells. | 08-19-2010 |
20100213537 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A memory string comprises: a pair of columnar portions; a first insulating layer surrounding a side surface of the columnar portions; a charge storage layer surrounding a side surface of the first insulating layer; a second insulating layer surrounding a side surface of the charge storage layer; and a first conductive layer surrounding a side surface of the second insulating layer. A select transistor comprises: a second semiconductor layer extending from an upper surface of the columnar portions; a third insulating layer surrounding a side surface of the second semiconductor layer; a fourth insulating layer surrounding a side surface of the third insulating layer; and a second conductive layer surrounding a side surface of the fourth insulating layer. The first semiconductor layer is formed continuously in an integrated manner with the second semiconductor layer. The first insulating layer is formed continuously in an integrated manner with the third insulating layer. | 08-26-2010 |
20100213538 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A memory string comprises: a first semiconductor layer having a plurality of columnar portions extending in a perpendicular direction with respect to a substrate, and joining portions joining lower ends of the plurality of columnar portions; a charge storage layer surrounding a side surface of the first semiconductor layer; and a first conductive layer surrounding a side surface of the charge storage layer and functioning as a control electrode of memory cells. A select transistor comprises: a second semiconductor layer extending upwardly from an upper surface of the columnar portions; an insulating layer surrounding a side surface of the second semiconductor layer; a second conductive layer surrounding a side surface of the insulating layer and functioning as a control electrode of the select transistors; and a third semiconductor layer formed on an upper surface of the second semiconductor layer and including silicon germanium. | 08-26-2010 |
20100237404 | SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME - A semiconductor device having a non-volatile memory is disclosed, whose disturb defect can be diminished or prevented. A memory cell of the non-volatile memory has a memory gate electrode formed over a main surface of a semiconductor substrate through an insulating film for charge storage. A first side wall is formed on a side face of the memory gate electrode, and at a side face of the first side wall, a second side wall is formed. On an upper surface of an n | 09-23-2010 |
20100244122 | MEMORY UTILIZING OXIDE NANOLAMINATES - Structures, systems and methods for transistors utilizing oxide nanolaminates are provided. One transistor embodiment includes a first source/drain region, a second source/drain region, and a channel region therebetween. A gate is separated from the channel region by a gate insulator. The gate insulator includes oxide insulator nanolaminate layers with charge trapping in potential wells formed by different electron affinities of the insulator nanolaminate layers. | 09-30-2010 |
20100264483 | SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING SAME - A semiconductor storage device and method of manufacturing same at a lower cost by without forming a photolithographic resist. Second impurity regions are arranged in such a manner that second impurity regions adjacent along the column direction are joined together. A select gate electrode is arranged into a ring shape so as to surround the second impurity regions, and is electrically connected to a word line. A first control gate electrode is arranged into a ring shape on the outer peripheral side of the select gate electrode, and a second control gate electrode is arranged into a ring shape on the inner peripheral side of the select gate electrode. A pair of first and second bit lines corresponding to every row are placed on the memory cells of the device, a first bit line is electrically connected to one of first impurity regions that are adjacent along the row direction, and a second bit line is electrically connected to the other of the first impurity regions that are adjacent along the row direction. | 10-21-2010 |
20100270610 | NROM FLASH MEMORY DEVICES ON ULTRATHIN SILICON - An NROM flash memory cell is implemented in an ultra-thin silicon-on-insulator structure. In a planar device, the channel between the source/drain areas is normally fully depleted. An oxide layer provides an insulation layer between the source/drain areas and the gate insulator layer on top. A control gate is formed on top of the gate insulator layer. In a vertical device, an oxide pillar extends from the substrate with a source/drain area on either side of the pillar side. Epitaxial regrowth is used to form ultra-thin silicon body regions along the sidewalls of the oxide pillar. Second source/drain areas are formed on top of this structure. The gate insulator and control gate are formed on top. | 10-28-2010 |
20100327341 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE HAVING CHARGE STORAGE LAYERS AND MANUFACTURING METHOD THEREOF - A nonvolatile semiconductor memory device includes first electrodes, a second and a third electrode, a first film, a first inter layer film, a second inter layer film, and a second film. The first electrodes each have a charge storage and a control electrode. The second and the third electrodes are formed above the semiconductor substrate. The first film is formed on each sidewall of the second and third electrodes and formed on the surface of the semiconductor substrate. The first inter layer film filled in a gap between the second and third electrodes. The second inter layer film filled in a gap between the first and second electrode. The second film is formed on the first to third gate electrodes, the first film and the first inter layer film, and a second inter layer insulating film to suppress diffusion of hydrogen atoms included in the first inter layer film. | 12-30-2010 |
20110024826 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR - A nonvolatile semiconductor memory device includes a first columnar protrusion and a second columnar protrusion formed to be spaced out on a surface of a semiconductor substrate, and the first and the second columnar protrusions each include a split gate nonvolatile memory cell in which a first source/drain region and a second source/drain region are formed at a surrounding part and an extremity, and in which a first layered structure, in which a charge accumulating film and a memory gate line are layered, and a second layered structure, in which a gate oxide film and a control gate line are layered, are formed on a surface of a sidewall between the surrounding part and the extremity. The first layered structure is also formed between the first and second columnar protrusions, whereby the memory gate line of the first columnar protrusion and the second columnar protrusion is connected each other. | 02-03-2011 |
20110024827 | NONVOLATILE SEMICONDUCTOR MEMORY - A nonvolatile semiconductor memory according to an aspect of the invention comprises a semiconductor substrate which has an SOI region and an epitaxial region at its surface, a buried oxide film arranged on the semiconductor substrate in the SOI region, an SOI layer arranged on the buried oxide film, a plurality of memory cells arranged on the SOI layer, an epitaxial layer arranged in the epitaxial region, and a select gate transistor arranged on the epitaxial layer, wherein the SOI layer is made of a microcrystalline layer. | 02-03-2011 |
20110049611 | NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD OF NONVOLATILE SEMICONDUCTOR STORAGE DEVICE - In a memory cell portion, a stacked structure, in which dielectric layers and semiconductor layers are alternately stacked, is arranged in a fin shape on a semiconductor substrate, and in a peripheral circuit portion, a gate electrode is arranged on the semiconductor substrate via a gate dielectric film so that a height of an upper surface of the gate electrode is set to be substantially equal to a height of an upper surface of the stacked structure in which the dielectric layers and the semiconductor layers are alternately stacked. | 03-03-2011 |
20110049612 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - According to one embodiment, a nonvolatile semiconductor memory device including a semiconductor layer with a main surface, a first insulating layer formed on the main surface of the semiconductor layer, a charge storage layer formed on the first insulating layer, a second insulating layer formed on the charge storage layer, and a control gate electrode formed on the second insulating layer. At least one inelastic scattering film that reduces energy of electrons by scattering is contained in at least one of the charge storage layer and second insulating layer. | 03-03-2011 |
20110073937 | Method for Fabricating a Charge Trapping Memory Device - A method for fabricating a charge trapping memory device includes providing a substrate; forming a first oxide layer on the substrate; forming a number of BD regions in the substrate; nitridizing the interface of the first oxide layer and the substrate via a process; forming a charge trapping layer on the first oxide layer; and forming a second oxide layer on the charge trapping layer. | 03-31-2011 |
20110121382 | SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD THEREOF - Over the top of a semiconductor substrate, a lamination pattern having a control gate electrode, a first insulation film thereover, and a second insulation film thereover is formed. Over the top of the semiconductor substrate, a memory gate electrode adjacent to the lamination pattern is formed. Between the control gate electrode and the semiconductor substrate, a third insulation film for gate insulation film is formed. Between the memory gate electrode and the semiconductor substrate, and between the lamination pattern and the memory gate electrode, a fourth insulation film including a lamination film of a silicon oxide film, a silicon nitride film, and another silicon oxide film is formed. At the sidewall on the side of the lamination pattern adjacent to the memory gate electrode, the first insulation film is retreated from the control gate electrode and the second insulation film, and the upper end corner portion of the control gate electrode is rounded. | 05-26-2011 |
20110127600 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device and a method of fabricating thereof, including preparing a substrate including a first and second region; forming first and second conductive lines on the first and second region, respectively, the first conductive lines being spaced apart at a first interval and the second conductive lines being spaced apart at a second interval wider than the first interval; forming a dielectric layer in spaces between the first and second conductive lines; etching the dielectric layer until a top surface thereof is lower than top surfaces of the first conductive lines and the second conductive lines; forming a spacer on the etched dielectric layer such that the spacer covers an entire top surface of the etched dielectric layer between the first conductive lines and exposes portions of the etched dielectric layer between the second conductive lines; and removing portions of the etched dielectric layer between the second conductive lines. | 06-02-2011 |
20110147827 | Flash memory with partially removed blocking dielectric in the wordline direction - The present disclosure relates generally to the fabrication of non-volatile memory. In at least one embodiment, the present disclosure relates to forming a layered blocking dielectric which has a portion thereof removed in the wordline direction. | 06-23-2011 |
20110156132 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - A nonvolatile semiconductor memory device according to an embodiment includes memory strings which have a plurality of transistors including gate electrode films formed over sides of columnar semiconductor films on gate dielectric films in a height direction of the semiconductor films, and which are arranged in a matrix shape substantially perpendicularly above a substrate. The gate electrode films of the transistors at same height of the memory strings arranged in a first direction are connected to one another. A distance between the semiconductor films at least in a forming position of the transistor at an uppermost layer of the memory strings adjacent to each other in the first direction is smaller than double of thickness of the gate dielectric films. | 06-30-2011 |
20110169071 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING SAME - A memory string is formed to surround the side surface of a columnar portion and a charge storing layer, and includes plural first conductive layers functioning as gates of memory transistors, and a first protecting layer stacked to protect an upper portion of the plural first conductive layers. The plural first conductive layers constitute a first stairway portion formed stepwise such that their ends are located at different positions. Each first conductive layer constitutes a step of the first stairway portion. A top surface of a first portion of the first stairway portion is covered with the first protecting layer including a first number of layers, and A tope surface of a second portion of the first stairway portion located at a lower level than the first portion is covered with the first protecting layer including a second number of layers fewer than the first number of layers. | 07-14-2011 |
20110175159 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE - Each of the memory blocks includes: a first conductive layer expanding in parallel to the substrate over the first area, n layers of the first conductive layers being formed in a lamination direction and shared by the plurality of memory strings; a first semiconductor layer; and an electric charge accumulation layer. The memory strings are arranged with m columns in a second direction for each of the memory blocks. The wiring layers are arranged in the second direction, formed to extend to the vicinity of one end of the first conductive layer in the first direction from one side of the memory block, and connected via contact plugs to the first conductive layers. A relation represented by (Formula 1) is satisfied: (Formula 1) m>=n | 07-21-2011 |
20110193156 | ELECTRICALLY ERASABLE PROGRAMMABLE MEMORY AND ITS MANUFACTURING METHOD - The electrically erasable programmable memory and its manufacturing method of the present invention forms above the floating gate the polysilicon spacer regions that are extended from the central part of the source region; the insulating part between the polysilicon spacer region and the floating gate has a smaller thickness to increase the capacitance between the floating gate and the polysilicon spacer region and further increasing the voltage coupled to the floating gate. Therefore, the present invention can effectively increase the coupling capacitance at the drain terminal, and has an advantage of low cost and easy production. | 08-11-2011 |
20110198686 | NITRIDE READ ONLY MEMORY DEVICE WITH BURIED DIFFUSION SPACERS AND METHOD FOR MAKING THE SAME - A method for making a nitride read only memory device with buried diffusion spacers is disclosed. An oxide-nitride-oxide (ONO) layer is formed on top of a silicon substrate, and a polysilicon gate is formed over the ONO layer. The polysilicon gate is formed less than a length of the ONO layer. Two buried diffusion spacers are formed beside two sidewalls of the polysilicon gate and over the ONO layer. Two buried diffusion regions are implanted on the silicon substrate next to the two buried diffusion spacers. The two buried diffusion regions are then annealed such that the approximate interfaces of the buried diffusion regions are under the sidewalls of the polysilicon gate. The structure of a nitride read only memory device with buried diffusion spacers is also described. | 08-18-2011 |
20110198687 | HIGH-DENSITY FLASH MEMORY CELL STACK, CELL STACK STRING, AND FABRICATION METHOD THEREOF - Provided a flash memory cell stack, a flash memory cell stack string, a cell stack array, and a method of fabricating thereof. A flash memory cell stack includes a semiconductor substrate; a control electrode provided in a vertical pillar shape on a surface of the semiconductor substrate; an insulating film provided between the control electrode and the semiconductor substrate; a gate stack provided on a side surface of the control electrode; a plurality of first insulating films provided as layers on a side surface of the gate stack; a plurality of second doping semiconductor areas provided as layers on a side surface of the gate stack; and a first doping semiconductor area provided on side surfaces of the first insulating films and the second doping semiconductor areas, wherein the first insulating films and the second doping semiconductor areas are alternately provided as layers on the side surface of the gate stack. | 08-18-2011 |
20110204433 | NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME - A nonvolatile semiconductor storage device is disclosed. The nonvolatile semiconductor storage device includes a semiconductor substrate including a surface layer; an element isolation insulating film isolating the surface layer of the semiconductor device into a plurality of active regions; a first gate insulating film formed above the active regions; a charge storing layer formed above the first gate insulating film and including a silicon layer containing an upper layer selectively doped with carbon; a second gate insulating film formed above the charge storing layer; and a control gate electrode formed above the second gate insulating film. | 08-25-2011 |
20110210387 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - A nonvolatile semiconductor memory device includes a charge storage layer on a first insulating film, a second insulating film which is provided on the charge storage layer, formed of layers, and a control gate electrode on the second insulating film. The second insulating film includes a bottom layer (A) provided just above the charge storage layer, a top layer (C) provided just below the control gate electrode, and a middle layer (B) provided between the bottom layer (A) and the top layer (C). The middle layer (B) has higher barrier height and lower dielectric constant than both the bottom layer (A) and the top layer (C). The average coordination number of the middle layer (B) is smaller than both the average coordination number of the top layer (C) and the average coordination number of the bottom layer (A). | 09-01-2011 |
20110215395 | MULTI-TRANSISTOR MEMORY CELL - The invention relates to a multi-transistor, e.g. two-transistor memory cell arranged on a semiconductor substrate | 09-08-2011 |
20110248334 | MULTI-LEVEL CHARGE STORAGE TRANSISTORS AND ASSOCIATED METHODS - Methods of fabricating charge storage transistors are described, along with apparatus and systems that include them. In one such method, a pillar of epitaxial silicon is formed. At least first and second charge storage nodes (e.g., floating gates) are formed around the pillar of epitaxial silicon at different levels. A control gate is formed around each of the charge storage nodes. Additional embodiments are also described. | 10-13-2011 |
20110266612 | NAND-TYPE NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - The present invention provides a high-performance MONOS-type NAND-type nonvolatile semiconductor memory device using an aluminum oxide film as a part of gate insulating film in a select transistor and as a block insulating film in a memory transistor. The NAND-type nonvolatile semiconductor memory device has, on a semiconductor substrate, a plurality of memory cell transistors connected to each other in series and a select transistor. The memory cell transistor includes a first insulating film on the semiconductor substrate, a charge trapping layer, a second insulating film made of aluminum oxide,
| 11-03-2011 |
20110272757 | SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME - To improve characteristics of a semiconductor device having a nonvolatile memory. | 11-10-2011 |
20110291180 | ANGLED ION IMPLANTATION IN A SEMICONDUCTOR DEVICE - Angled ion implants are utilized to form doped regions in a semiconductor pillar formed in an opening of a mask. The pillar is formed to a height less than the height of the mask. Angled ion implantation can be used to form regions of a semiconductor device such as a body tie region, a halo region, or current terminal extension region of a semiconductor device implemented with the semiconductor pillar. | 12-01-2011 |
20110309434 | NONVOLATILE MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - A nonvolatile memory device and a manufacturing method thereof are provided. The manufacturing method includes the following steps. First, a substrate is provided. Then, a tunneling dielectric layer is formed on the substrate, and a dummy gate is form on the tunneling dielectric layer. Subsequently, an interlayer dielectric layer is formed around the dummy gate, and the dummy gate is removed to form an opening. Following that, a charge storage layer is formed on the inner side wall of the opening, and the charge storage layer covers the tunneling dielectric layer. Moreover, an inter-gate dielectric layer is formed on the charge storage layer, and a metal gate is formed on the inter-gate dielectric layer. Accordingly, a stacked gate structure of the nonvolatile memory device includes the tunneling dielectric layer, the charge storage layer, the inter-gate dielectric layer, and the metal gate. | 12-22-2011 |
20120012921 | MEMORY ARRAYS HAVING SUBSTANTIALLY VERTICAL, ADJACENT SEMICONDUCTOR STRUCTURES AND THE FORMATION THEREOF - Memory arrays and methods of their formation are disclosed. One such memory array has memory-cell strings are formed adjacent to separated substantially vertical, adjacent semiconductor structures, where the separated semiconductor structures couple the memory cells of the respective strings in series. For some embodiments, two dielectric pillars may be formed from a dielectric formed in a single opening, where each of the dielectric pillars has a pair of memory-cell strings adjacent thereto and where at least one memory cell of one of the strings on one of the pillars and at least one memory cell of one of the strings on the other pillar are commonly coupled to an access line. | 01-19-2012 |
20120080741 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a device isolation insulating film which is buried in a semiconductor substrate, a gate insulation film which is provided on the semiconductor substrate, a gate electrode which is provided on the gate insulation film, a source region and a drain region which are provided in the semiconductor substrate and spaced apart from each other in a manner to sandwich the gate electrode, both end portions of each of the source region and the drain region being offset from the device isolation insulating film in a channel width direction by a predetermined distance, and first and second gate electrode extension portions which are provided in a manner to cover both end portions of each of the source region and the drain region in a channel length direction. | 04-05-2012 |
20120126309 | INTEGRATED NON-VOLATILE MEMORY (NVM) AND METHOD THEREFOR - A feature is formed in the NVM isolation region during the patterning and etching of an NVM device and a logic device such that the feature is of substantially equal height to the logic device and is well-defined so that it does not cause defect signals. A first conductive layer is formed over a substrate. The first conductive layer is patterned to expose at least a portion of the substrate in an NVM region and at least a portion of an isolation region. An NVM dielectric stack is formed over the first conductive layer, the exposed substrate, and the exposed isolation region, and a second conductive layer is formed over the NVM dielectric stack. The first and second conductive layers and the NVM dielectric stack are patterned to form a first gate and a second gate of an NVM cell in the NVM region and a feature over the isolation region. The feature comprises a portion of the first conductive layer, a portion of the NVM dielectric stack adjacent a first sidewall of the portion of the first conductive layer, and a portion of the second conductive layer adjacent the portion of the NVM dielectric stack. | 05-24-2012 |
20120132985 | NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE - According to one embodiment, a plurality of memory cells are provided on a semiconductor substrate. In each memory cell, a control gate electrode is provided on a charge accumulation layer with an inter-electrode insulation film interposed between the control gate electrode and the charge accumulation layer, an air gap is provided between the charge accumulation layers adjacent to each other in a word line direction, and an insulation film disposed below the inter-electrode insulation film is divided into an upper part and a lower part by the air gap. | 05-31-2012 |
20120139030 | NONVOLATILE SEMICONDUCTOR MEMORY - According to one embodiment, a nonvolatile semiconductor memory includes first to n-th (n is a natural number not less than 2) semiconductor layers in a first direction and extend in a second direction, and the semiconductor layers having a stair case pattern in a first end of the second direction, a common semiconductor layer connected to the first to n-th semiconductor layers commonly in the first end of the second direction, first to n-th layer select transistors which are provided in order from the first electrode side between the first electrode and the first to n-th memory strings, and first to n-th impurity regions which make the i-th layer select transistor (i is one of 1 to n) a normally-on state in the first end of the second direction of the i-th semiconductor layer. | 06-07-2012 |
20120139031 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - In a nonvolatile semiconductor memory device provided with memory cell transistors arranged in a direction and a select transistor to select the memory cell transistors, each of the memory cell transistors of a charge trap type are at least composed of a first insulating layer and a first gate electrode respectively, and the select transistor is at least composed of a second insulating layer and a second gate electrode. The first gate electrode is provided with a first silicide layer of a first width formed on the first insulating layer. The second gate electrode is provided with an impurity-doped silicon layer formed on the second insulating layer and with a second silicide layer of a second width formed on the impurity-doped silicon layer. The second silicide has the same composition as the first silicide. The second width is larger than the first width. | 06-07-2012 |
20120139032 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - A memory device includes a semiconductor substrate, memory elements formed above the substrate in rows and columns, bit lines and word lines selectively connected with the memory elements in the respective columns and rows, each memory element including, a first gate insulator formed above the substrate, a charge accumulation layer formed on the first gate insulator, a second gate insulator formed on the charge accumulation layer, and a control electrode formed on the second gate insulator, wherein a ratio r/d is not smaller than 0.5, where r: a radius of curvature of an upper corner portion or surface roughness of the charge accumulation layer and d: an equivalent oxide thickness of the second gate insulator in a cross section along a direction vertical to the bit lines. | 06-07-2012 |
20120146128 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - In a nonvolatile semiconductor memory device provided with memory cell transistors arranged in a direction and a select transistor to select the memory cell transistors, each of the memory cell transistors of a charge trap type are at least composed of a first insulating layer and a first gate electrode respectively, and the select transistor is at least composed of a second insulating layer and a second gate electrode. The first gate electrode is provided with a first silicide layer of a first width formed on the first insulating layer. The second gate electrode is provided with an impurity-doped silicon layer formed on the second insulating layer and with a second silicide layer of a second width formed on the impurity-doped silicon layer. The second silicide has the same composition as the first silicide. The second width is larger than the first width. | 06-14-2012 |
20120181602 | SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a semiconductor memory device includes a semiconductor substrate, memory cell array portion, single-crystal semiconductor layer, and circuit portion. The memory cell array portion is formed on the semiconductor substrate, and includes memory cells. The semiconductor layer is formed on the memory cell array portion, and connected to the semiconductor substrate by being formed in a hole extending through the memory cell array portion. | 07-19-2012 |
20120199898 | ULTRAHIGH DENSITY VERTICAL NAND MEMORY DEVICE AND METHOD OF MAKING THEREOF - Monolithic, three dimensional NAND strings include a semiconductor channel, at least one end portion of the semiconductor channel extending substantially perpendicular to a major surface of a substrate, a plurality of control gate electrodes having a strip shape extending substantially parallel to the major surface of the substrate, the blocking dielectric comprising a plurality of blocking dielectric segments, a plurality of discrete charge storage segments, and a tunnel dielectric located between each one of the plurality of the discrete charge storage segments and the semiconductor channel. | 08-09-2012 |
20120211823 | SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor memory device includes a lower select transistor formed within a semiconductor substrate, memory cells stacked over the lower select transistors, and an upper select transistor formed over the memory cells. | 08-23-2012 |
20120217573 | NON-VOLATILE MEMORY (NVM) CELL FOR ENDURANCE AND METHOD OF MAKING - A first dielectric is formed over a semiconductor layer, a first gate layer over the first dielectric, a second dielectric over the first gate layer, and a third dielectric over the second dielectric. An etch is performed to form a first sidewall of the first gate layer. A second etch is performed to remove portions of the first dielectric between the semiconductor layer and the first gate layer to expose a bottom corner of the first gate layer and to remove portions of the second dielectric between the first gate layer and the third dielectric layer to expose a top corner of the first gate layer. An oxide is grown on the first sidewall and around the top and bottom corners to round the corners. The oxide is then removed. A charge storage layer and second gate layer is formed over the third dielectric layer and overlapping the first sidewall. | 08-30-2012 |
20120235226 | NONVOLATILE SEMICONDUCTOR MEMORY - A nonvolatile semiconductor memory of an aspect of the present invention includes a memory cell including, a charge storage layer on a gate insulating film, a multilayer insulator on the charge storage layer, and a control gate electrode on the multilayer insulator, the gate insulating film including a first tunnel film, a first high-dielectric-constant film on the first tunnel film and offering a greater dielectric constant than the first tunnel film, and a second tunnel film on the first high-dielectric-constant film and having the same configuration as that of the first tunnel film, the multilayer insulator including a first insulating film, a second high-dielectric-constant film on the first insulating film and offering a greater dielectric constant than the first insulating film, and a second insulating film on the second high-dielectric-constant film and having the same configuration as that of the first insulating film. | 09-20-2012 |
20120241846 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a nonvolatile semiconductor memory device comprises a first conductive layer, a second conductive layer, a first inter-electrode insulating film, and a third conductive layer stacked above the first conductive layer, a memory film, a semiconductor layer, an insulating member, and a silicide layer. The memory film and the semiconductor layer is formed on the inner surface of through hole provided in the second conductive layer, the first inter-electrode insulating film, and the third conductive layer. The insulating member is buried in a slit dividing the second conductive layer, the first inter-electrode insulating film, and the third conductive layer. The silicide layer is formed on surfaces of the second conductive layer and the third conductive layer in the slit. The distance between the second conductive layer and the third conductive layer along the inner surface of the slit is longer than that of along the stacking direction. | 09-27-2012 |
20120261743 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD OF MANUFACTURING THE SAME - A semiconductor device having plural memory cell regions featuring nonvolatile memory cells, each nonvolatile memory cell including a first insulating film formed over a semiconductor substrate, a control electrode formed over the first insulating film, the first insulating film acting as a gate insulator for the control gate electrode, a second insulating film formed over the semiconductor substrate, and a memory gate electrode formed over the second insulating film and arranged adjacent with the control gate electrode through the second gate insulating film, the second insulating film acting as a gate insulator for the memory gate electrode and featuring a non-conductive charge trap film, wherein each of the nonvolatile memory cells of a first memory cell region and each of the nonvolatile memory cells of a second memory cell region are formed adjacent to one another such that a drain region is shared between them. | 10-18-2012 |
20120299087 | NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME - A non-volatile memory device includes gate structures including first insulation layers that are alternately stacked with control gate layers over a substrate, wherein the gate structures extend in a first direction, channel lines that each extend over the gate structures in a second direction different from the first direction, a memory layer formed between the gate structures and the channel lines and arranged to trap charges by electrically insulating the gate structures from the channel lines, bit line contacts forming rows that each extend in the first direction and contacting top surfaces of the channel lines, source lines that each extend in the first direction and contact the top surfaces of the channel lines, wherein the source lines alternate with the rows of bit line contacts, and bit lines that are each formed over the bit line contacts and extend in the second direction. | 11-29-2012 |
20120326225 | NON-VOLATILE MEMORY DEVICE - A non-volatile memory device includes a substrate having an active region defined by a device isolation region that has a trench and an air gap, a device isolation pattern positioned at a lower portion of the trench, a memory cell layer including a tunnel insulation layer, a trap insulation layer and a blocking insulation layer that are sequentially stacked on the active region and one of which extends from the active region toward the device isolation region encloses top of the air gap whose bottom is defined by a layer other than that of the top, and a control gate electrode positioned on the cell structure. The one of the insulation layer extending includes a recess at a region corresponding to the center of the air gap. | 12-27-2012 |
20130062686 | NON-VOLATILE SEMICONDUCTOR MEMORY USING CHARGE-ACCUMULATION INSULATING FILM - There is provided a non-volatile semiconductor memory having a charge accumulation layer of a configuration where a metal oxide with a dielectric constant sufficiently higher than a silicon nitride, e.g., a Ti oxide, a Zr oxide, or a Hf oxide, is used as a base material and an appropriate amount of a high-valence substance whose valence is increased two levels or more (a VI-valence) is added to produce a trap level that enables entrance and exit of electrons with respect to the base material. | 03-14-2013 |
20130069142 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes an element isolation region having an element isolation insulating film therein; an active region delineated by the element isolation region; agate insulating film formed in the active region; a charge storage layer above the gate insulating film; and an interelectrode insulating film. The interelectrode insulating film is formed in a first region above an upper surface of the element isolation insulating film, a second region along a sidewall of the charge storage layer, and a third region above an upper surface of the charge storage layer. The interelectrode insulating film includes a stack of a first silicon oxide film, a first silicon nitride film, a second silicon oxide film, and a second silicon nitride film. A control electrode layer is formed above the interelectrode insulating film. The second silicon oxide film is thinner in the first region than in the third region. | 03-21-2013 |
20130092999 | NONVOLATILE STORAGE DEVICE - A nonvolatile storage device includes a tunnel insulating film disposed on a surface of a semiconductor substrate and a charge trap layer disposed in contact with an upper surface of the tunnel insulating film. The charge trap layer includes a second charge trap film disposed in contact with the upper surface of the tunnel insulating film and a first charge trap film disposed in contact with an upper surface of the second charge trap film. | 04-18-2013 |
20130119458 | NOR FLASH MEMORY CELL AND STRUCTURE THEREOF - The present invention provides a NOR flash memory cell. The NOR flash memory cell includes a a substrate, an active area, a first gate structure, a second gate structure and at least one third gate structure. The first gate structure covers a first partial region of the active area and is formed by a silicon-rich nitride material. The second gate structure covers a second partial region of the active area. The third gate structure covers a third partial region between a first opening and the first gate structure. The active area has the first opening, the first opening disposed on a first side of the first gate structure and the first side is not neighbor to the second gate structure. The NOR flash memory cell further comprises a first conducting structure for covering the first opening to form a bit line signal receiving terminal. | 05-16-2013 |
20130234236 | SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF - In a non-volatile memory in which writing/erasing is performed by changing a total charge amount by injecting electrons and holes into a silicon nitride film serving as a charge accumulation layer, in order to realize a high efficiency of a hole injection from a gate electrode, the gate electrode of a memory cell comprises a laminated structure made of a plurality of polysilicon films with different impurity concentrations, for example, a two-layered structure comprising a p-type polysilicon film with a low impurity concentration and a p | 09-12-2013 |
20130240978 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE - According to one embodiment, a nonvolatile semiconductor memory device has a semiconductor substrate, a first insulating film formed on the semiconductor substrate, a charge storage film formed on the first insulating film, a second insulating film formed on the charge storage film, and a control electrode formed on the second insulating film. In the nonvolatile semiconductor memory device, the second insulating film has a laminated structure that has a first silicon oxide film, a first silicon nitride film, and a second silicon oxide film, a first atom is provided at an interface between the first silicon oxide film and the first silicon nitride film, and/or at an interface between the second silicon oxide film and the first silicon nitride film, and the first atom is selected from the group consisting of aluminum, boron, and alkaline earth metals. | 09-19-2013 |
20130248977 | NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD OF THE SAME - A non-volatile semiconductor storage device according to one embodiment of the present application has a memory cell array that includes at least one memory string, a first select transistor, and a second select transistor on a substrate in a lattice form. The first select transistor is electrically connected to a first end of the memory string. The second select transistor is electrically connected to a second end of the memory string. The memory string includes a columnar portion. Multiple memory cells are formed in the columnar portion by multiple conductive layers, multiple insulating layers, a first insulating layer, a charge accumulation layer, a second insulating layer, and a memory channel layer, and are serially connected. The memory channel layer comprises silicon germanium doped with phosphorus. | 09-26-2013 |
20130248978 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - According to an embodiment, a semiconductor device includes a plurality of first semiconductor regions that extend in a first direction and are arranged in a direction intersecting the first direction, and each element separation region that is provided between the plurality of first semiconductor regions. The element separation region includes a first element separation portion that is formed to a first depth from an upper surface of the first semiconductor region and a second element separation portion that is formed from the first depth to a second depth more than the first depth and electrically insulates between adjacent elements. | 09-26-2013 |
20130264633 | LOGIC TRANSISTOR AND NON-VOLATILE MEMORY CELL INTEGRATION - A first conductive layer and an underlying charge storage layer are patterned to form a control gate in an NVM region. A first dielectric layer and barrier layer are formed over the control gate. A sacrificial layer is formed over the barrier layer and planarized. A first patterned masking layer is formed over the sacrificial layer and control gate in the NVM region which defines a select gate location laterally adjacent the control gate in the NVM region. A second masking layer is formed in the logic region which defines a logic gate location. Exposed portions of the sacrificial layer are removed such that a first portion remains at the select gate location. A second dielectric layer is formed over the first portion and planarized to expose the first portion. The first portion is removed to result in an opening at the select gate location which exposes the barrier layer. | 10-10-2013 |
20130264634 | LOGIC TRANSISTOR AND NON-VOLATILE MEMORY CELL INTEGRATION - A first conductive layer and an underlying charge storage layer are patterned to form a control gate in an NVM region. A first dielectric layer and barrier layer are formed over the control gate. A sacrificial layer is formed over the barrier layer and planarized. A first patterned masking layer is formed over the sacrificial layer and control gate in the NVM region which defines a select gate location laterally adjacent the control gate in the NVM region. A second masking layer is formed in the logic region which defines a logic gate location. Exposed portions of the sacrificial layer are removed such that a first portion remains at the select gate location. A second dielectric layer is formed over the first portion and planarized to expose the first portion. The first portion is removed to result in an opening at the select gate location which exposes the barrier layer. | 10-10-2013 |
20130270627 | FinFET NON-VOLATILE MEMORY AND METHOD OF FABRICATION - A method of manufacturing a FinFET non-volatile memory device and a FinFET non-volatile memory device structure. A substrate is provided and a layer of semiconductor material is deposited over the substrate. A hard mask is deposited over the semiconductor material and the structure is patterned to form fins. A charge storage layer is deposited over the structure, including the fins and the portions of it are damaged using an angled ion implantation process. The damaged portions are removed and gate structures are formed on either side of the fin, with only one side having a charge storage layer. | 10-17-2013 |
20130299894 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a memory device includes first and second fin type stacked structures each includes first to i-th memory strings (i is a natural number except 1) that are stacked in a first direction, the first and second fin type stacked structures which extend in a second direction and which are adjacent in a third direction, a first portion connected to one end in the second direction of the first fin type stacked structure, a width in the third direction of the first portion being greater than a width in the third direction of the first fin type stacked structure, and a second portion connected to one end in the second direction of the second fin type stacked structure, a width in the third direction of the second portion being greater than a width in the third direction of the second fin type stacked structure. | 11-14-2013 |
20130307054 | SEMICONDUCTOR INTEGRATED CIRCUIT - One embodiment provides a semiconductor integrated circuit, including: a substrate; a plurality of nonvolatile memory portions formed in the substrate, each including a first nonvolatile memory and a second nonvolatile memory; and a plurality of logic transistor portions formed in the substrate, each including at least one of logic transistor, wherein the logic transistors include: a first transistor which is directly connected to drains of the first and second nonvolatile memories at its gate; and a second transistor which is not directly connected to the drains of the first and second nonvolatile memories, and wherein a bottom surface of the gate of each of the logic transistors sandwiching the first and second nonvolatile memories is lower in height from a top surface of the substrate than a bottom surface of the control gate of each of the first and second nonvolatile memories. | 11-21-2013 |
20130313630 | SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD OF MANUFACTURING THE SAME - Semiconductor device including a memory cell featuring a first gate insulating film over a semiconductor substrate, a control gate electrode over the first gate insulating film, a second gate insulating film over the substrate and a side wall of the control gate electrode, a memory gate electrode over the second gate insulating film arranged adjacent with the control gate electrode through the second gate insulating film, first and second semiconductor regions in the substrate positioned on a control gate electrode side and a memory gate side, respectively, the second gate insulating film featuring a first film over the substrate, a charge storage film over the first film and a third film over the second film, the first film having a first portion between the substrate and memory gate electrode and a thickness greater than that of a second portion between the control gate electrode and the memory gate electrode. | 11-28-2013 |
20130320426 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME - According to one embodiment, a nonvolatile semiconductor memory device includes a semiconductor region, a tunnel insulator provided above the semiconductor region, a charge storage insulator provided above the tunnel insulator, a block insulator provided above the charge storage insulator, a control gate electrode provided above the block insulator, and an interface region including a metal element, the interface region being provided at one interface selected from between the semiconductor region and the tunnel insulator, the tunnel insulator and the charge storage insulator, the charge storage insulator and the block insulator, and the block insulator and the control gate electrode. | 12-05-2013 |
20130334594 | RECESSED GATE MEMORY APPARATUSES AND METHODS - Some embodiments include a memory device and a method of forming the memory device. One such memory device includes a string of stacked memory cells. Each of the memory cells in the string includes a charge storage structure and a recessed control gate. The recessed control gate has a substantially smooth surface separated from the charge storage structure by dielectric material. One such method includes etching heavily boron doped polysilicon selective to oxide to form a recessed control gate having a surface with nubs. A smoothing solution is applied to the surface of the recessed control gate to smoothen the nubs. Additional apparatuses and methods are described. | 12-19-2013 |
20130341703 | SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME - According to one embodiment, the electrode films are provided on the substrate. The first insulating films are provided between the electrode films. The second insulating film is provided on an uppermost electrode film of the electrode films. The select gate is provided on the second insulating film. The channel body extends in a stacking direction in a stacked body. The memory film is provided between the channel body and the electrode films and includes a charge storage film. The memory film includes a block film, the charge storage film, and a tunnel film. The second insulating film includes at least the block film of the memory film. | 12-26-2013 |
20140035027 | SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD THEREOF - A lamination pattern having a control gate electrode, a first insulation film thereover, and a second insulation film thereover is formed over a semiconductor substrate. A memory gate electrode is formed adjacent to the lamination pattern. A gate insulation film is formed between the control gate and the semiconductor substrate. A fourth insulation film, including a lamination film of a silicon oxide film, a silicon nitride film, and another silicon oxide film, is formed between the memory gate electrode and the semiconductor substrate and between the lamination pattern and the memory gate electrode. At the sidewall on the side of the lamination pattern adjacent to the memory gate electrode, the first insulation film is retreated from the control gate electrode and the second insulation film, and the upper end corner portion of the control gate electrode is rounded. | 02-06-2014 |
20140035028 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - The invention provides a semiconductor device and its manufacturing method in which a memory transistor and a plurality of thin film transistors that have gate insulating films with different thicknesses are fabricated over a substrate. The invention is characterized by the structural difference between the memory transistor and the plurality of thin film transistors. Specifically, the memory transistor and some of the plurality of thin film transistors are provided to have a bottom gate structure while the other thin film transistors are provided to have a top gate structure, which enables the reduction of characteristic defects of the transistor and simplification of its manufacturing process. | 02-06-2014 |
20140061773 | SEMICONDUCTOR MEMORY DEVICE - According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a plurality of insulative separating films, a channel body, and a memory film. The stacked body includes a plurality of electrode layers and a plurality of insulating layers. The plurality of insulative separating films separates the stacked body into a plurality. The channel body extends in the stacking direction between the plurality of insulative separating films. A width of the electrode layer of a lower layer side between the insulative separating film and the memory film is greater than a width of the electrode layer of an upper layer side between the insulative separating film and the memory film. An electrical resistivity of the electrode layer is higher for the electrode layer of the lower layer side having the greater width than for the electrode layer of the upper layer side having the lesser width. | 03-06-2014 |
20140070304 | NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According to an embodiment, a nonvolatile memory device includes a memory cell string, a control gate, first and second insulating films. The memory cell string includes a semiconductor layer and a plurality of memory cells disposed on the semiconductor layer. The control gate is provided on each of the memory cells. The first insulating film covers each side surface of the memory cells, and a side surface of the control gate. The second insulating film covering an upper portion of the control gate is provided on each of two adjacent memory cells. A first air gap is disposed between the two adjacent memory cells and surround by the first insulating film and the second insulating film, and the semiconductor layer is exposed by the first gap, or thickness of an insulating film between the first gap and the semiconductor layer is thinner than the first insulating film. | 03-13-2014 |
20140070305 | NON-VOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According to an embodiment, a non-volatile memory device includes a memory cell including a semiconductor layer, a charge storage layer provided on the semiconductor layer, and a first insulating film provided between the semiconductor layer and the charge storage layer. The device also includes a first conductive layer provided on the charge storage layer, a second conductive layer provided between the charge storage layer and the first conductive layer, a second insulating film provided between the charge storage layer and the second conductive layer, and a third insulating film provided between the first conductive layer and the second conductive layer. | 03-13-2014 |
20140097486 | Semiconductor Constructions, NAND Unit Cells, Methods Of Forming Semiconductor Constructions, And Methods Of Forming NAND Unit Cells - Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells. | 04-10-2014 |
20140117434 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulating layer stacked on the selection gate electrode in the first direction; a first semiconductor pillar piercing the stacked structural unit, the selection gate electrode, and the insulating layer in the first direction, a first cross section of the first semiconductor pillar having an annular configuration, the first cross section being cut in a plane orthogonal to the first direction; a first core unit buried in an inner side of the first semiconductor pillar, the first core unit being recessed from an upper face of the insulating layer; and a first conducting layer of the first semiconductor pillar provided on the first core unit to contact the first core unit. | 05-01-2014 |
20140138761 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - According to one embodiment, a semiconductor device includes an active area that is formed on a semiconductor substrate, a trench that isolates the active area, a nitride film that is buried in the trench, an air gap that is formed above the nitride film along the trench, and a gate electrode that is formed on the active area to span the trench through the air gap. | 05-22-2014 |
20140167140 | Memory First Process Flow and Device - Semiconductor devices and methods of manufacturing such devices are described herein. According to embodiments, a semiconductor device includes a memory gate disposed in a first region of the semiconductor device. The memory gate may include a first gate conductor layer disposed over a charge trapping dielectric. A select gate may be disposed in the first region of the semiconductor device adjacent to a sidewall of the memory gate. A sidewall dielectric may be disposed between the sidewall of the memory gate and the select gate. Additionally, the device may include a logic gate disposed in a second region of the semiconductor device that comprises the first gate conductor layer. | 06-19-2014 |
20140167141 | Charge Trapping Split Gate Embedded Flash Memory and Associated Methods - Semiconductor devices and methods of manufacturing such devices are described herein. According to embodiments, the semiconductor device can be made by forming an dielectric layer at a first region and at a second region of a semiconductor substrate. A gate conductor layer is disposed over the dielectric formed in the first and the second regions of the semiconductor substrate, and the second region is masked. A split gate memory cell is formed in the first region of the semiconductor substrate with a first gate length. The first region is then masked, and the second region is etched to define a logic gate that has a second gate length. The first and second gate lengths can be different. | 06-19-2014 |
20140167142 | Use Disposable Gate Cap to Form Transistors, and Split Gate Charge Trapping Memory Cells - A semiconductor device and method of making such device is presented herein. The method includes disposing a gate layer over a dielectric layer on a substrate and further disposing a cap layer over the gate layer. A first transistor gate is defined having an initial thickness substantially equal to a combined thickness of the cap layer and the gate layer. A first doped region is formed in the substrate adjacent to the first transistor gate. The cap layer is subsequently removed and a second transistor gate is defined having a thickness substantially equal to the thickness of the gate layer. Afterwards, a second doped region is formed in the substrate adjacent to the second transistor gate. The first doped region extends deeper in the substrate than the second doped region, and a final thickness of the first transistor gate is substantially equal to the thickness of the second transistor gate. | 06-19-2014 |
20140175535 | MEMORY DEVICES CAPABLE OF REDUCING LATERAL MOVEMENT OF CHARGES - Memory devices are provided, the memory devices include a tunneling insulating layer disposed on a substrate, a charge storage layer disposed on the tunneling insulating layer, a blocking insulating layer disposed on the charge storage layer and a control gate electrode disposed on the blocking insulating layer. The control gate electrode may have an edge portion spaced farther apart from the blocking insulating layer than a central portion of the control gate electrode to concentrate charge density distribution on a central portion of a memory cell. | 06-26-2014 |
20140209996 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - A semiconductor device with a nonvolatile memory is provided which has improved characteristics. The semiconductor device includes a control gate electrode, a memory gate electrode disposed adjacent to the control gate electrode, a first insulating film, and a second insulating film including therein a charge storing portion. Among these components, the memory gate electrode is formed of a silicon film including a first silicon region positioned over the second insulating film, and a second silicon region positioned above the first silicon region. The second silicon region contains p-type impurities, and the concentration of p-type impurities of the first silicon region is lower than that of the p-type impurities of the second silicon region. | 07-31-2014 |
20140217494 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - First and second memory cells have first and second channels, first and second tunnel insulating films, first and second charge storage layers formed of an insulating film, first and second block insulating films, and first and second gate electrodes. A first select transistor has a third channel, a first gate insulating film, and a first gate electrode. The first channel includes a first-conductivity-type region and a second-conductivity-type region which is formed on at least a part of the first-conductivity-type region and whose conductivity type is opposite to the first conductivity type. The third channel includes the first-conductivity-type region and the second-conductivity-type region formed on the first-conductivity-type region. The number of data stored in the first memory cell is smaller than that of data stored in the second memory cell. | 08-07-2014 |
20140239380 | NAND FLASH MEMORY UNIT AND NAND FLASH MEMORY ARRAY - A NAND flash memory unit is described, including a string of memory cells connected in series, S/D regions coupled to two terminals of the string, at least one select transistor couple between a terminal of the string and an S/D region, and at least one erase transistor couple between the at least one select transistor and an S/D region. The select transistor is for selecting the string of memory cells. The erase transistor is for reducing Vt-shift of the select transistor. | 08-28-2014 |
20140264552 | NONVOLATILE MEMORY CELLS AND METHODS OF MAKING SUCH CELLS - A memory cell can include at least a first programmable section coupled between a supply node and a first data node; a volatile storage circuit coupled to the first data node; and the programmable section includes a programmable transistor having a first source/drain (S/D) region shared with a first transistor, and a second S/D region shared with a second transistor; wherein the first S/D region has a different dopant diffusion profile than the second S/D region, and the programmable transistor has a charge storage structure formed between its control gate and its channel. Methods of forming such a memory cell are also disclosed. | 09-18-2014 |
20140264553 | METHOD OF FABRICATING MONOS SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device is provided. The method includes forming a plurality of gate structures having asymmetric sidewalls including a tall side and a short side. Adjacent ones of the plurality of gate structures are separated by a tall side-tall side region and a short side-short side region. The method further comprises forming a spacer layer over the plurality of gate structures and a bottom surface of the tall side-tall side region and the short side-short side region, depositing an oxide layer over the spacer layer, etching the bottom surface portions of the oxide layer, and selectively etching the sidewall portions of the oxide layer in the tall side-tall side region. | 09-18-2014 |
20140264554 | BACK-GATED NON-VOLATILE MEMORY CELL - A memory device and a method of making the same are presented. The memory device includes a substrate and a memory cell formed on the substrate. The memory cell includes a single transistor. The single transistor includes a first gate on the substrate which functions as a control gate and a second gate embedded in the substrate which functions as a select gate. | 09-18-2014 |
20140284698 | SEMICONDUCTOR DEVICE - A semiconductor device includes a memory cell transistor that is formed via a first gate insulating film on an active region of a memory cell region and has a gate electrode including a first charge storage layer, a first interelectrode insulating film, and a first control gate electrode film. A transistor, which includes a second gate insulating film on the active region or a peripheral circuit region and a gate electrode including a second charge storage layer, a second interelectrode insulating film, and a second control gate electrode film, is also provided. A groove with a funnel shape is formed in a trap film of the second charge storage layer, and the second control gate electrode film and the polysilicon film of the second charge storage layer are interconnected via the groove. | 09-25-2014 |
20140284699 | SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a channel body, a memory film, first and second insulating separation films, a first and a second inter-layer insulating films, a selection gate, a conductive layer, and resistance elements. The substrate includes a memory cell array region and a peripheral region. The stacked body includes electrode films and insulating films. The channel body extends in a stacking direction. The memory film includes a charge storage film. The first insulating separation films divide the stacked body. The first and the second inter-layer insulating films are on the stacked body and on the conductive layer, respectively. The selection gate is on the first inter-layer insulating film. The conductive layer is on the peripheral region. The resistance elements are on the second inter-layer insulating film. The second insulating separation films divide the conductive layer. | 09-25-2014 |
20140319597 | Methods And Systems For Gate Dimension Control In Multi-Gate Structures For Semiconductor Devices - Methods and systems are disclosed for gate dimension control in multi-gate structures for integrated circuit devices. Processing steps for formation of one or more subsequent gate structures are adjusted based upon dimensions determined for one or more previously formed gate structures. In this way, one or more features of the resulting multi-gate structures can be controlled with greater accuracy, and variations between a plurality of multi-gate structures can be reduced. Example multi-gate features and/or dimensions that can be controlled include overall gate length, overlap of gate structures, and/or any other desired features and/or dimensions of the multi-gate structures. Example multi-gate structures include multi-gate NVM (non-volatile memory) cells for NVM systems, such as for example, split-gate NVM cells having select gates (SGs) and control gates (CGs). | 10-30-2014 |
20140327067 | Three-Dimensional Nonvolatile Memory Device - A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, and a plurality of gate electrodes. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicular to the semiconductor substrate. The gate electrodes include a first gate electrode and a second gate electrode. The first gate electrode is disposed on the memory cell region to intersect the active pillars. The second gate electrode is disposed on the contact region, connected to the first gate electrode and comprising metal material. | 11-06-2014 |
20140339624 | Charge-Retaining Transistor, Array Of Memory Cells, and Methods Of Forming A Charge-Retaining Transistor - A charge-retaining transistor includes a control gate and an inter-gate dielectric alongside the control gate. A charge-storage node of the transistor includes first semiconductor material alongside the inter-gate dielectric. Islands of charge-trapping material are alongside the first semiconductor material. An oxidation-protective material is alongside the islands. Second semiconductor material is alongside the oxidation-protective material, and is of some different composition from that of the oxidation-protective material. Tunnel dielectric is alongside the charge-storage node. Channel material is alongside the tunnel dielectric. Additional embodiments, including methods, are disclosed. | 11-20-2014 |
20140353739 | Semiconductor device and fabrication method thereof - A semiconductor device including a first gate structure and a second gate structure immediately adjacent to each other with a spacer therebetween. Line width of the top of the second gate structure is not less than that of the bottom thereof. A fabrication method thereof is also disclosed. A transient first gate structure and a temporary gate structure are formed by etching through a first hard mask. A second gate structure is formed between a first spacer and a second spacer opposite to each other and disposed respectively on the transient first gate structure and temporary gate structure. The second gate structure is covered with a second hard mask. An etch process is performed through a patterned photoresist layer to remove exposed first hard mask and temporary gate structure and to partially remove exposed portion of first hard mask and transient first gate structure to form the first gate structure. | 12-04-2014 |
20140353740 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - Improvements are achieved in the characteristics of a semiconductor device having a nonvolatile memory (MONOS). In a SOI substrate having a supporting substrate, an insulating layer formed thereover, and a silicon layer formed thereover, the MONOS is formed. The MONOS has a control gate electrode and a memory gate electrode formed so as to be adjacent to the control gate electrode above the semiconductor layer. The MONOS also has a first impurity region formed in the supporting substrate under the control gate electrode and a second impurity region formed in the supporting substrate under the memory gate electrode and having an effective carrier concentration lower than that of the first impurity region. By thus providing the first and second impurity regions for adjusting the respective thresholds of the control transistor and the memory transistor, variations in the thresholds of the individual transistors are reduced to reduce GiDL. | 12-04-2014 |
20140367767 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device according to the present embodiment includes a semiconductor substrate. An insulating film is provided on the semiconductor substrate. A gate electrode is provided on the insulating film. An SiOCN film covers side surfaces of the gate electrode. A silicon oxide film may be provided between the respective side surfaces of the gate electrode and the SiOCN film. | 12-18-2014 |
20140374814 | Embedded Memory and Methods of Forming the Same - An embedded flash memory device includes a gate stack, and source and drain regions in the semiconductor substrate. The first source and drain regions are on opposite sides of the gate stack. The gate stack includes a bottom dielectric layer over the semiconductor substrate, a charge trapping layer over the bottom dielectric layer, a top dielectric layer over the charge trapping layer, a high-k dielectric layer over the top dielectric layer, and a metal gate over the high-k dielectric layer. | 12-25-2014 |
20140374815 | Memory Devices with Floating Gate Embedded in Substrate - An embedded flash memory device includes a gate stack, which includes a bottom dielectric layer extending into a recess in a semiconductor substrate, and a charge storage layer over the bottom dielectric layer. The charge storage layer includes a portion in the recess. The gate stack further includes a top dielectric layer over the charge storage layer, and a metal gate over the top dielectric layer. Source and drain regions are in the semiconductor substrate, and are on opposite sides of the gate stack. | 12-25-2014 |
20140374816 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In a power feeding region of a memory cell (MC) in which a sidewall-shaped memory gate electrode (MG) of a memory nMIS (Qnm) is provided by self alignment on a side surface of a selection gate electrode (CG) of a selection nMIS (Qnc) via an insulating film, a plug (PM) which supplies a voltage to the memory gate electrode (MG) is embedded in a contact hole (CM) formed in an interlayer insulating film ( | 12-25-2014 |
20150008509 | METHOD FOR MANUFACTURING A DOUBLE-GATE ELECTRONIC MEMORY CELL AND ASSOCIATED MEMORY CELL - A method of manufacturing a double-gate electronic memory cell is presented. The cell includes a substrate; a first gate structure, with the first gate structure having a lateral flank; a stack including several layers and of which a layer is able to store electrical charges, the stack covering the lateral flank of the first gate structure and a portion of the substrate; and a second gate structure. The second gate structure includes a first portion formed from a first gate material; a second portion formed from a second gate material, with the first gate material able to be etched selectively in relation to the second gate material and with the second gate material able to be etched selectively in relation to the first gate material; a first zone of silicidation extending over the first portion of the second gate structure; and a second zone of silicidation extending over the second portion of the second gate structure. | 01-08-2015 |
20150048439 | SPLIT GATE EMBEDDED MEMORY TECHNOLOGY AND METHOD OF MANUFACTURING THEREOF - Semiconductor devices and methods for forming a semiconductor device are disclosed. The method includes providing a substrate prepared with a memory cell region. A first gate structure is formed on the memory cell region. An isolation layer is formed on the substrate and over the first gate structure. A second gate structure is formed adjacent to and separated from the first gate structure by the isolation layer. The first and second gate structures are processed to form at least one split gate structure with first and second adjacent gates. Asymmetrical source and drain regions are provided adjacent to first and second sides of the split gate structure. | 02-19-2015 |
20150048440 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a memory device includes first and second fin type stacked structures each includes first to i-th memory strings (i is a natural number except 1) that are stacked in a first direction, the first and second fin type stacked structures which extend in a second direction and which are adjacent in a third direction, a first portion connected to one end in the second direction of the first fin type stacked structure, a width in the third direction of the first portion being greater than a width in the third direction of the first fin type stacked structure, and a second portion connected to one end in the second direction of the second fin type stacked structure, a width in the third direction of the second portion being greater than a width in the third direction of the second fin type stacked structure. | 02-19-2015 |
20150060994 | NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According to one embodiment, a non-volatile semiconductor memory device, includes: peripheral transistors including a second element isolation insulating film, a gate electrode, and a diffusion layer region, the second element isolation insulating film being configured to divide the semiconductor layer into at least two second semiconductor regions, the diffusion layer region being formed in the second semiconductor regions to be provided on two sides of the gate electrode; and a sidewall film provided at a side surface of the gate electrode. The second element isolation insulating film has a first portion and a second portion, the second portion is provided on two sides of the first portion, a width of a bottom portion of the first portion in an extension direction of the gate electrode is not more than twice a thickness of the sidewall film at a lower end of the sidewall film. | 03-05-2015 |
20150060995 | NONVOLATILE SEMICONDUCTOR STORAGE DEVICE - Nonvolatile semiconductor storage device provided with first to fourth memory-cell unit each including a first select transistor, a second select transistor series connected to the first select transistor, a third select transistor, and memory-cell transistors series connected between the first and the second select transistors and the third select transistor. The memory-cell transistors have a stack structure including a charge storing layer and a control electrode above the charge storing layer via an insulating film. The first to third select transistors each has a stack structure substantially identical to the aforementioned stack structure. Threshold voltages of the first select transistors in the first and the fourth memory-cell unit and the second transistors in the second and third memory-cell unit differ from the threshold voltages of the second select transistors in the first and the fourth memory-cell unit and the first select transistors in the second and third memory-cell unit. | 03-05-2015 |
20150069499 | SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According to one embodiment, the stacked body includes a plurality of electrode layers and a plurality of insulating layers alternately stacked on the substrate. The plurality of contact parts are provided in a protruding shape on respective end parts of the plurality of electrode layers. The plurality of contact parts do not overlap each other in the stacking direction. The plurality of contact parts are displaced in a surface direction of the substrate. The plurality of plugs extends from the respective contact parts toward the respective circuit interconnections and electrically connects the respective contact parts with the respective circuit interconnections. | 03-12-2015 |
20150091079 | NON-VOLATILE MEMORY (NVM) AND HIGH-K AND METAL GATE INTEGRATION USING GATE-FIRST METHODOLOGY - A method of making a semiconductor structure includes forming a select gate over a substrate in an NVM portion and a first protection layer over a logic portion. A control gate and a storage layer are formed over the substrate in the NVM portion, wherein the control and select gates have coplanar top surfaces. The charge storage layer is under the control gate, along adjacent sidewalls of the select gate and control gate, and is partially over the top surface of the select gate. A second protection layer is formed over the NVM portion and the logic portion. The second protection layer and the first protection layer are removed from the logic portion leaving a portion of the second protection layer over the control gate and the select gate. A gate structure is formed over the logic portion comprising a high k dielectric and a metal gate. | 04-02-2015 |
20150091080 | Method of forming and structure of a non-volatile memory cell - A structure of a memory cell includes a substrate, a well, three source/drain doped regions, two bottom dielectric layers, two charge trapping layers, a blocking layer and two gates to form a storage transistor and a select transistor of the memory cell. A bottom dielectric layer and a charge trapping layer may be used to provide the dielectric of the gate of the select transistor with enough thickness but without any additional fabrication process. | 04-02-2015 |
20150115350 | THREE DIMENSIONAL STACKED NONVOLATILE SEMICONDUCTOR MEMORY - A three dimensional stacked nonvolatile semiconductor memory according to an example of the present invention includes a memory cell array comprised of first and second blocks disposed side by side in a first direction, and a driver disposed on one end of the memory cell array in a second direction orthogonal to the first direction. A source diffusion layer, which is common to the first and second blocks, is disposed in a semiconductor substrate, and a contact plug, which has a lower end connected to the source diffusion layer and an upper end connected to a source line disposed above at least three conductive layers, is interposed between the first and second blocks. | 04-30-2015 |
20150129952 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes a substrate, at least one split gate memory device, and at least one logic device. The split gate memory device is disposed on the substrate. The logic device is disposed on the substrate. A select gate or a main gate of the split gate memory device and a logic gate of the logic device are both made of metal, and the other gate of the split gate memory device is made of nonmetal. | 05-14-2015 |
20150129953 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - To provide a semiconductor device with nonvolatile memory, having improved performance. | 05-14-2015 |
20150137215 | Semiconductor Device - A semiconductor memory array includes a first nonvolatile memory cell having a first charge storage layer and a first gate electrode and a second nonvolatile memory cell, adjacent to the first memory cell in a first direction, having a second charge storage layer and a second gate electrode. The first and second electrodes extend in a second direction perpendicular to the first direction, the first electrode has a first contact section extending toward the second electrode in the first direction, and the second electrode has a second contact section extending toward the first electrode in the first direction. The first and second contact positions are shifted in the second direction, respectively, and the first electrode and the first contact section are electrically separated from the second electrode and the second contact section. | 05-21-2015 |
20150145022 | CMP FABRICATION SOLUTION FOR SPLIT GATE MEMORY EMBEDDED IN HK-MG PROCESS - A semiconductor device includes a substrate, at least one logic device and a split gate memory device. The at least one logic device is located on the substrate. The split gate memory device is located on the substrate and comprises a memory gate and a select gate. The memory gate and the select gate are adjacent to and electrically isolated with each other. A top of the select gate is higher than a top of the memory gate. | 05-28-2015 |
20150145023 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - To provide a semiconductor device having a nonvolatile memory improved in characteristics. In the semiconductor device, a nonvolatile memory has a high-k insulating film (high dielectric constant film) between a control gate electrode portion and a memory gate electrode portion and a transistor of a peripheral circuit region has a high-k/metal configuration. The high-k insulating film arranged between the control gate electrode portion and the memory gate electrode portion relaxes an electric field intensity at the end portion (corner portion) of the memory gate electrode portion on the side of the control gate electrode portion. This results in reduction in uneven distribution of charges in a charge accumulation portion (silicon nitride film) and improvement in erase accuracy. | 05-28-2015 |
20150145024 | INTEGRATED CIRCUITS HAVING IMPROVED SPLIT-GATE NONVOLATILE MEMORY DEVICES AND METHODS FOR FABRICATION OF SAME - Integrated circuits are provided. An exemplary integrated circuit includes a source/drain region in a semiconductor substrate. The integrated circuit includes a charge storage structure overlying the semiconductor substrate and having a first sidewall overlying the source/drain region. The integrated circuit also includes a control gate overlying the source/drain region. Further, the integrated circuit includes a first select gate overlying the semiconductor substrate and adjacent the first sidewall. A first memory cell is formed by the control gate and the first select gate. | 05-28-2015 |
20150311213 | METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE - A method of manufacturing a vertical type memory device includes stacking a first lower insulating layer, one layer of a lower sacrificial layer and a second lower insulating layer on a substrate, forming a stacking structure by stacking sacrificial layers and insulating layers, and etching an edge portion of the stacking structure to form a preliminary stepped shape pattern structure. The preliminary stepped shape pattern structure has a stepped shape edge portion. A pillar structure making contact with a surface of the substrate is formed. The preliminary stepped shape pattern structure, the lower sacrificial layer, and the first and second lower insulating layers are partially etched to form a first opening portion and a second opening portion to form a stepped shape pattern structure. The second opening portion cuts at least an edge portion of the lower sacrificial layer. | 10-29-2015 |
20150311214 | THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE - A three-dimensional (3D) semiconductor memory device and a method for fabricating the same, the device including insulating layers stacked on a substrate; horizontal structures between the insulating layers, the horizontal structures including gate electrodes, respectively; vertical structures penetrating the insulating layers and the horizontal structures, the vertical structures including semiconductor pillars, respectively; and epitaxial patterns, each of the epitaxial patterns being between the substrate and each of the vertical structures, wherein a minimum width of the epitaxial pattern is less than a width of a corresponding one of the vertical structures. | 10-29-2015 |
20150311300 | Uniformity Control for SI Dot Size in Flash Memory - Some embodiments of the present disclosure relate to a method for forming flash memory. In this method, a tunnel oxide is formed over a semiconductor substrate. A layer of silicon dot nucleates is formed on the tunnel oxide. The layer of silicon dots includes silicon dot nucleates having respective initial sizes which differ according to a first size distribution. An etching process is performed to reduce the initial sizes of the silicon dot nucleates so reduced-size silicon dot nucleates have respective reduced sizes which differ according to a second size distribution. The second size distribution has a smaller spread than the first size distribution. | 10-29-2015 |
20150333082 | DUAL SILICIDE FORMATION METHOD TO EMBED SPLIT GATE FLASHMEMORY IN HIGH-K METAL GATE (HKMG) TECHNOLOGY - The present disclosure relates to a structure and method for embedding a non-volatile memory (NVM) in a high-K metal gate (HKMG) integrated circuit that utilizes a replacement gate technology with low poly resistance and high program/erase speed. A silicide layer formed over top surfaces of the NVM device, after replacement gate process of the HKMG circuit prevents poly damage during contact formation and provides low gate resistance, thereby improving program/erase speed of the NVM device. | 11-19-2015 |
20150348987 | SEMICONDUCTOR DEVICE INCLUDING DIFFERENT ORIENTATIONS OF MEMORY CELL ARRAY AND PERIPHERAL CIRCUIT TRANSISTORS - A memory device includes a memory cell on a first region of a substrate. An active region is in a second region neighboring the first region of the substrate, and an extension direction of the active region has an acute angle with the <110> direction of the substrate. A transistor serving as a peripheral circuit is on the second region of the substrate. In the memory device, defects or failures due to a crystal defects or a dislocation of the substrate may decrease. | 12-03-2015 |
20150364478 | METHODS AND STRUCTURES FOR SPLIT GATE MEMORY CELL SCALING WITH MERGED CONTROL GATES - A memory device has first and second memory cells in and over a substrate. A first doped region is in a first active region. A top surface of the first active region is substantially coplanar with a top surface of the first doped region. A control gate is over the first doped region and extends over a first side of the first doped region and over a second side of the first doped region. A charge storage layer is between the first control gate and the first active region including between the first select gate and the first doped region. A first select gate is over the first active region on the first side of the first doped region and adjacent to the control gate. A second select gate is over the first active region on the second side of the first doped region and adjacent to the control gate. | 12-17-2015 |
20150371998 | BANDGAP-ENGINEERED MEMORY WITH MULTIPLE CHARGE TRAPPING LAYERS STORING CHARGE - A memory cell includes a gate, a channel material having a channel surface and a channel valence band edge, and a dielectric stack between the gate and the channel surface. The dielectric stack comprises a multi-layer tunneling structure on the channel surface, a first charge storage nitride layer on the multi-layer tunneling structure, a first blocking oxide layer on the first charge storage nitride layer, a second charge storage nitride layer on the first blocking dielectric layer, and a second blocking oxide layer on the second charge storage nitride layer. The multi-layer tunneling structure includes a first tunneling oxide layer, a first tunneling nitride layer on the first tunneling oxide layer, and a second tunneling oxide layer on the first tunneling nitride layer. | 12-24-2015 |
20150380418 | THREE DIMENSIONAL NAND DEVICE WITH CHANNEL CONTACTING CONDUCTIVE SOURCE LINE AND METHOD OF MAKING THEREOF - A NAND memory cell region of a NAND device includes a conductive source line that extends substantially parallel to a major surface of a substrate, a first semiconductor channel that extends substantially perpendicular to a major surface of the substrate, and a second semiconductor channel that extends substantially perpendicular to the major surface of the substrate. At least one of a bottom portion and a side portion of the first semiconductor channel contacts the conductive source line and at least one of a bottom portion and a side portion of the second semiconductor channel contacts the conductive source line. | 12-31-2015 |
20150380568 | Split Gate Flash Memory Structure with a Damage Free Select Gate and a Method of Making the Split Gate Flash Memory Structure - A method of manufacturing a semiconductor structure of a pair of split gate flash memory cells is provided. A pair of select gates spaced on a semiconductor substrate is formed, and a sacrificial spacer filling a central region between the select gates is formed. A charge trapping dielectric layer is formed conformally along sidewalls of the select gates and over top surfaces of the sacrificial spacer and the select gates, and a pair of memory gates corresponding to the pair of select gates is formed over and laterally abutting the charge trapping dielectric layer. The resulting semiconductor structure is also provided. | 12-31-2015 |
20160005756 | HKMG HIGH VOLTAGE CMOS FOR EMBEDDED NON-VOLATILE MEMORY - The present disclosure relates to a structure and method for embedding a non-volatile memory (NVM) in a HKMG (high-κ metal gate) integrated circuit which includes a high voltage (HV) HKMG transistor. NVM devices (e.g., flash memory) are operated at high voltages for its read and write operations and hence a HV device is necessary for integrated circuits involving non-volatile embedded memory and HKMG logic circuits. Forming a HV HKMG circuit along with the HKMG periphery circuit reduces the need for additional boundaries between the HV transistor and rest of the periphery circuit. This method further helps reduce divot issue and reduce cell size. | 01-07-2016 |
20160035576 | SPLIT-GATE SEMICONDUCTOR DEVICE WITH L-SHAPED GATE - A semiconductor device having a substrate, a dielectric layer over the substrate, a first gate conductor, an inter-gate dielectric structure and a second gate conductor is disclosed. A gate dielectric structure is disposed between the first gate conductor and the dielectric layer, and may include two or more dielectric films disposed in an alternating manner. The inter-gate dielectric structure may be disposed between the first gate conductor and the second gate conductor, and may include two or more dielectric films disposed in an alternating manner. The second gate conductor is formed in an L shape such that the second gate has a relatively low aspect ratio, which allows for a reduction in spacing between adjacent gates, while maintaining the required electrical isolation between the gates and contacts that may subsequently be formed. | 02-04-2016 |
20160056250 | Recessed Salicide Structure to Integrate a Flash Memory Device with a High K, Metal Gate Logic Device - Some embodiments of the present disclosure provide an integrated circuit (IC) for an embedded flash memory device. The IC includes a flash memory cell having a memory cell gate. A silicide contact pad is arranged in a recess of the memory cell gate. A top surface of the silicide contact pad is recessed relative to a top surface of the memory cell gate. Dielectric side-wall spacers extend along sidewalls of the recess from the top surface of the memory cell gate to the top surface of the silicide contact pad. | 02-25-2016 |
20160056251 | SEMICONDUCTOR SWITCHING DEVICE INCLUDING CHARGE STORAGE STRUCTURE - A semiconductor switching device includes a first load terminal electrically connected to source zones of transistor cells. The source zones form first pn junctions with body zones. A second load terminal is electrically connected to a drain construction that forms second pn junctions with the body zones. Control structures, which include a control electrode and charge storage structures, directly adjoin the body zones. The control electrode controls a load current through the body zones. The charge storage structures insulate the control electrode from the body zones and contain a control charge adapted to induce inversion channels in the body zones in the absence of a potential difference between the control electrode and the first load electrode. | 02-25-2016 |
20160079069 | SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME - According to one embodiment, a memory device includes: a first insulating film, a first electrode, a second insulating film, and a second electrode being stacked in a multilayer body, and an end of the first electrode extending outside a region directly under the second electrode in an end of the multilayer body; a pillar piercing the first electrode and the second electrode; a memory film between the first electrode and the pillar, between the second electrode and the pillar, and being capable of storing a charge; an insulating film on the end of the multilayer body; and a contact piercing the insulating film, and being connected to the end of the first electrode film. A first portion connected to the contact in the first electrode film includes a metal or a metal nitride. A second portion surrounding the memory film in the first electrode film includes silicon. | 03-17-2016 |
20160079250 | NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - This non-volatile semiconductor memory device includes a memory cell array including NAND cell units formed in a first direction vertical to a surface of a semiconductor substrate. A local source line is electrically coupled to one end of the NAND cell unit formed on the surface of the substrate. The memory cell array includes: a laminated body where plural conductive films, which are to be control gate lines of memory cells or selection gate lines of selection transistors, are laminated sandwiching interlayer insulating films; a semiconductor layer that extends in the first direction; and an electric charge accumulating layer sandwiched between: the semiconductor layer and the conductive film. The local source line includes a silicide layer. The electric charge accumulating layer is continuously formed from the memory cell array to cover a peripheral area of the silicide layer. | 03-17-2016 |
20160079365 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - According one embodiment, a memory device includes: a stacked body provided on a foundation layer, the stacked body including electrode layers stacked alternately with first insulating layers, at least one of the plurality of electrode layers including a first portion and a second portion, a first length between the first portion and the foundation layer being longer than a second length between the second portion and the foundation layer, difference between the first length and the second length increasing toward the foundation layer; a semiconductor member piercing the second portion, the semiconductor member extending in a direction of the stacking of the electrode layers and the first insulating layers, the semiconductor member including a region where maximum length of the semiconductor member cut perpendicularly to the direction decreases toward the foundation layer; and a memory film provided between the semiconductor member and each of the electrode layers. | 03-17-2016 |
20160086965 | Self-Aligned Split Gate Flash Memory - The present disclosure relates to a self-aligned split gate memory cell, and an associated method. The self-aligned split gate memory cell has cuboid shaped memory gate and select gate covered upper surfaces by some spacers. Thus the memory gate and select gate are protected from silicide. The memory gate and select gate are defined self-aligned by the said spacers. The memory gate and select gate are formed by etching back corresponding conductive materials not covered by the spacers instead of recess processes. Thus the memory gate and select gate have planar upper surfaces and are well defined. The disclosed device and method is also capable of further scaling since photolithography processes are reduced. | 03-24-2016 |
20160099153 | SPLIT-GATE NON-VOLATILE MEMORY (NVM) CELL AND METHOD THEREFOR - A split gate memory device includes a semiconductor substrate and a select gate over the substrate. The select gate has a bottom portion and a top portion over the bottom portion, wherein the top portion has a top sidewall and the bottom portion has a bottom sidewall, and wherein the bottom sidewall extends beyond the top sidewall. The devices also includes a control gate adjacent the select gate, a charge storage layer located between the select gate and the control gate and between the control gate and the substrate, and an isolation region over the bottom portion of the select gate and between the top sidewall of the select gate and the charge storage layer. The bottom sidewall of the bottom portion extends to the charge storage layer. | 04-07-2016 |
20160099253 | METHOD OF INTEGRATING A CHARGE-TRAPPING GATE STACK INTO A CMOS FLOW - A method of fabricating a memory device is described. Generally, the method includes: forming on a surface of a substrate a dielectric stack including a tunneling dielectric and a charge-trapping layer overlying the tunneling dielectric; forming a cap layer overlying the dielectric stack, wherein the cap layer comprises a multi-layer cap layer including at least a first cap layer overlying the charge-trapping layer, and a second cap layer overlying the first cap layer; patterning the cap layer and the dielectric stack to form a gate stack of a memory device; removing the second cap layer; and performing an oxidation process to oxidize the first cap layer to form a blocking oxide overlying the charge-trapping layer, wherein the oxidation process consumes the first cap layer. Other embodiments are also described. | 04-07-2016 |
20160111510 | SPLIT GATE FLASH MEMORY STRUCTURE WITH A DAMAGE FREE SELECT GATE AND A METHOD OF MAKING THE SPLIT GATE FLASH MEMORY STRUCTURE - A method of manufacturing a split gate flash memory cell is provided. A select gate is formed on a semiconductor substrate. A sacrificial spacer is formed laterally adjacent to the select gate and on a first side of the select gate. A charge trapping layer is formed lining upper surfaces of the select gate and the sacrificial spacer, and further lining a sidewall surface of the select gate on a second side of the select gate that is opposite the first side of the select gate. A memory gate is formed over the charge trapping layer and on the second side of the select gate. The sacrificial spacer is removed. The resulting semiconductor structure is also provided. | 04-21-2016 |
20160118393 | NAND MEMORY ARRAY WITH MISMATCHED CELL AND BITLINE PITCH - Embodiments of the present disclosure describe methods, apparatus, and system configurations for NAND memory arrays with mismatched cell and bitline pitch. Other embodiments may be described and claimed. | 04-28-2016 |
20160118402 | Semiconductor Constructions and NAND Unit Cells - Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells. | 04-28-2016 |
20160126327 | METHOD OF MAKING A SPLIT GATE MEMORY CELL - A method includes forming a first dielectric layer over a memory region and a second dielectric layer over a logic region. A first polysilicon layer is formed over the first and second dielectric layers. An opening is formed in the first polysilicon layer in the memory region. A charge storage layer is formed over the first polysilicon layer and in the opening. A second polysilicon layer is formed over the charge storage layer including in the opening. The second polysilicon layer is etched to remove the second polysilicon layer from over the first polysilicon layer and to leave a portion of the second polysilicon layer in the opening. The first polysilicon layer is etched to form a first gate in the logic region and the second polysilicon layer is etched in the opening to define a control gate of a first NVM cell and a control gate of a second NVM cell. | 05-05-2016 |
20160126328 | MEMORY DEVICES CAPABLE OF REDUCING LATERAL MOVEMENT OF CHARGES - Memory devices are provided, the memory devices include a tunneling insulating layer disposed on a substrate, a charge storage layer disposed on the tunneling insulating layer, a blocking insulating layer disposed on the charge storage layer and a control gate electrode disposed on the blocking insulating layer. The control gate electrode may have an edge portion spaced farther apart from the blocking insulating layer than a central portion of the control gate electrode to concentrate charge density distribution on a central portion of a memory cell. | 05-05-2016 |
20160149010 | VERTICAL CELL-TYPE SEMICONDUCTOR DEVICE HAVING PROTECTIVE PATTERN - According to example embodiments of inventive concepts, a semiconductor device includes: a substrate, and a stacked structure including interlayer insulating layers and gate electrodes alternately stacked on the substrate. The stacked structure defines a through-hole over the substrate. The gate electrodes each include a first portion between the through-hole and a second portion of the gate electrodes. A channel pattern may be in the through-hole. A tunneling layer may surround the channel pattern. A charge trap layer may surround the tunneling layer, and protective patterns may surround the first portions of the gate electrodes. The protective patterns may be between the first portions of the gate electrodes and the charge trap layer. | 05-26-2016 |
20160155751 | SEMICONDUCTOR DEVICE | 06-02-2016 |
20160155860 | SPLIT GATE EMBEDDED MEMORY TECHNOLOGY AND METHOD OF MANUFACTURING THEREOF | 06-02-2016 |
20160163735 | THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE - A three-dimensional semiconductor device includes a stacked structure including a plurality of conductive layers stacked on a substrate, a distance along a first direction between sidewalls of an upper conductive layer and a lower conductive layer being smaller than a distance along a second direction between sidewalls of the upper conductive layer and the lower conductive layer, the first and second directions crossing each other and defining a plane parallel to a surface supporting the substrate, and vertical channel structures penetrating the stacked structure. | 06-09-2016 |
20160172509 | MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | 06-16-2016 |
20160181269 | THREE DIMENSIONAL STACKED SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME | 06-23-2016 |
20160190143 | INTERDIGITATED CAPACITOR TO INTEGRATE WITH FLASH MEMORY - Some embodiments relate to an integrated circuit (IC). The IC includes a semiconductor substrate including a flash memory region and a capacitor region. A flash memory cell is arranged over the flash memory region and includes a polysilicon select gate arranged between first and second source/drain regions of the flash memory cell. The flash memory cell also includes a control gate arranged alongside the select gate and separated from the select gate by a control gate dielectric layer. A capacitor is arranged over the capacitor region and includes: a polysilicon first capacitor plate and polysilicon second capacitor plate, which are inter-digitated with one another and separated from one another by a capacitor dielectric layer. The capacitor dielectric layer and control gate dielectric layer are made of the same material. | 06-30-2016 |
20160190152 | NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME - A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulating layer stacked on the selection gate electrode in the first direction; a first semiconductor pillar piercing the stacked structural unit, the selection gate electrode, and the insulating layer in the first direction, a first cross section of the first semiconductor pillar having an annular configuration, the first cross section being cut in a plane orthogonal to the first direction; a first core unit buried in an inner side of the first semiconductor pillar, the first core unit being recessed from an upper face of the insulating layer; and a first conducting layer of the first semiconductor pillar provided on the first core unit to contact the first core unit. | 06-30-2016 |
20160190350 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - In a power feeding region of a memory cell (MC) in which a sidewall-shaped memory gate electrode (MG) of a memory nMIS (Qnm) is provided by self alignment on a side surface of a selection gate electrode (CG) of a selection nMIS (Qnc) via an insulating film, a plug (PM) which supplies a voltage to the memory gate electrode (MG) is embedded in a contact hole (CM) formed in an interlayer insulating film ( | 06-30-2016 |
20160197086 | SEMICONDUCTOR DEVICE | 07-07-2016 |
20160197091 | FABRICATION METHOD AND STRUCTURE OF SEMICONDUCTOR NON-VOLATILE MEMORY DEVICE | 07-07-2016 |
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20180026045 | SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME | 01-25-2018 |
20190148295 | THREE-DIMENSIONAL SEMICONDUCTOR DEVICE | 05-16-2019 |
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