Entries |
Document | Title | Date |
20080251736 | Charged Particle Gun - An electron gun ( | 10-16-2008 |
20080308743 | CHARGED PARTICLE BEAM APPLICATION APPARATUS - An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is an electrostatic chuck, a master flat plane part surrounding a specimen of the largest size of specimen sizes, and an opening surrounding a specimen size except for the largest specimen size are included at an outer peripheral portion of the electrostatic chuck, a dummy specimen attachable to and detachable from the electrostatic chuck is included, and at a time of switching the specimen size, a dummy specimen is selected (or may be prevented from being used). | 12-18-2008 |
20090065708 | MOON GRID FOR TRANSMISSION ELECTRON MICROSCOPY TOMOGRAPHY AND METHOD OF FABRICATING THE SAME - Disclosed is a moon grid for transmission electron microscopy tomography, including a mesh sheet for protecting an upper objects and a support film formed on the mesh sheet and having nanoparticles dispersed throughout, in which the nanoparticles dispersed throughout the support film are used as reference points in the reconstruction of two-dimensional transmission electron microscopy images into a three-dimensional image, thus omitting a process of attaching markers in the course of preparation of a sample and easily forming reference points even on a sample to which it is impossible to attach markers. A method of fabricating such a moon grid is also provided. | 03-12-2009 |
20090212233 | MALDI CHIP HOLDER - The invention relates to a holder for a MALDI chip, having a broken corner contour, comprising a first and second respectively accessible bearing surface and a moveable fixing means which interacts with the broken corner contour and which pre-tenses the MALDI chip against the bearing surfaces. The invention also relates to a MALDI chip and a system consisting of the holder and the MALDI chip. | 08-27-2009 |
20090242794 | Charged particle beam equipment - Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications. | 10-01-2009 |
20100038557 | ADDRESSABLE TRANSMISSION ELECTRON MICROSCOPE GRID - A planar substrate for electrochemical experimentation provides multiple isolated electrical conductors sandwiched between insulating layers of ultrananocrystaline diamond. The isolated electrical conductors may attach to conductive pads at the periphery of the substrate and exposed at apertures in the central region of the substrate for a variety of experimental purposes. | 02-18-2010 |
20100102248 | Transmission Electron Microscope Sample Holder with Optical Features - A sample holder for holding a sample to be observed for research purposes, particularly in a transmission electron microscope (TEM), generally includes an external alignment part for directing a light beam in a predetermined beam direction, a sample holder body in optical communication with the external alignment part and a sample support member disposed at a distal end of the sample holder body opposite the external alignment part for holding a sample to be analyzed. The sample holder body defines an internal conduit for the light beam and the sample support member includes a light beam positioner for directing the light beam between the sample holder body and the sample held by the sample support member. | 04-29-2010 |
20100140497 | MEMBRANE SUPPORTS WITH REINFORCEMENT FEATURES - A sample support structure with integrated support features and methods of making and using the reinforced membrane. The sample support structures are useful for supporting samples for analysis using microscopic techniques, such as electron microscopy, optical microscopy, x-ray microscopy, UV-VIS spectroscopy and nuclear magnetic resonance (NMR) techniques. | 06-10-2010 |
20100155620 | TEM GRIDS FOR DETERMINATION OF STRUCTURE-PROPERTY RELATIONSHIPS IN NANOTECHNOLOGY - Silicon grids with electron-transparent SiO | 06-24-2010 |
20100276607 | Method of depositing protective structures - A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activating a surface area portion of the substrate, and a second phase of electron beam assisted deposition of the protective strip on the activated surface area portion from the gas phase. | 11-04-2010 |
20110017921 | Carbon nanotube film composite structure, transmission electron microscope grid using the same, and method for making the same - The present invention relates to a transmission electron microscope grid including graphene sheet-carbon nanotube film composite. The graphene sheet-carbon nanotube film composite structure includes at least one carbon nanotube film structure and at least one graphene sheet. The carbon nanotube film structure includes at least one pore. The pore is covered by the graphene sheet. | 01-27-2011 |
20110192987 | TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID - A transmission electron microscope (TEM) micro-grid includes a base and a plurality of electron transmission portions. The base includes a plurality of first carbon nanotubes and the first carbon nanotubes have a first density. Each electron transmission portions includes a hole defined in the base and a plurality of second carbon nanotubes located in the hole. The second carbon nanotubes have a second density. The second density is less than the first density. The base and the electron transmission portions form the TEM micro-grid for observation of a sample using a TEM microscope. | 08-11-2011 |
20110192988 | TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID AND METHOD FOR MANUFACTURING THE SAME - A transmission electron microscope (TEM) micro-grid includes a pure carbon grid having a plurality of holes defined therein and at least one carbon nanotube film covering the holes. A method for manufacturing a TEM micro-grid includes following steps. A pure carbon grid precursor and at least one carbon nanotube film are first provided. The at least one carbon nanotube film is disposed on a surface of the pure carbon grid precursor. The pure carbon grid precursor and the at least one carbon nanotube film are then cut to form the TEM micro-grid in desired shape. | 08-11-2011 |
20110226960 | CARBON NANOTUBE FILM COMPOSITE STRUCTURE, TRANSMISSION ELECTRON MICROSCOPE GRID USING THE SAME, AND METHOD FOR MAKING THE SAME - The present disclosure relates to a transmission electron microscope grid including graphene sheet-carbon nanotube film composite. The graphene sheet-carbon nanotube film composite structure includes at least one carbon nanotube film structure and at least one functionalized graphene sheet. The carbon nanotube film structure includes at least one pore. The pore is covered by the functionalized graphene sheet. | 09-22-2011 |
20120132828 | HOLDER FOR AN ELECTRON MICROSCOPY SAMPLE CARRIER | 05-31-2012 |
20120261588 | TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID - A transmission electron microscope (TEM) micro-grid includes a grid and a carbon nanotube composite film covered thereon. The carbon nanotube composite film includes a carbon nanotube film and a layer of nano-materials coated thereon. The carbon nanotube composite film covers a surface of the grid. The nano-material layer is coated on a surface of each of the plurality of carbon nanotubes. | 10-18-2012 |
20120298883 | Flow Cells for Electron Microscope Imaging With Multiple Flow Streams - Provided are flow cell devices—referred to as nanoaquariums—that are microfabricated devices featuring a sample chamber having a controllable height in the range of nanometers to micrometers. The cells are sealed so as to withstand the vacuum environment of an electron microscope without fluid loss. The cells allow for the concurrent flow of multiple sample streams and may be equipped with electrodes, heaters, and thermistors for measurement and other analysis devices. | 11-29-2012 |
20130009071 | SPECIMEN BOX FOR ELECTRON MICROSCOPE - The present invention relates to a specimen box for an electron microscope, comprising a first substrate, a second substrate, one or more photoelectric elements, and a metal adhesion layer. The first substrate has a first surface, a second surface, a first concave, and one or more first through holes, wherein the first through holes penetrate through the first substrate. The second substrate has a third surface, a forth surface, and a second concave. The photoelectric element is disposed between the first substrate and the second substrate. In addition, the metal adhesion layer is disposed between the first substrate and the second substrate to form a space for a specimen contained therein. Besides, the present specimen box further comprises one or more plugs. When the plugs are assembled into the first through holes to seal the specimen box, the in-situ observation can be accomplished by using the electron microscope. | 01-10-2013 |
20130009072 | SPECIMEN BOX FOR ELECTRON MICROSCOPE - The present invention relates to a specimen box for an electron microscope, which comprises a first substrate, a second substrate, and a metal adhesion layer. The first substrate has a first surface, a second surface, a first concave, and one or more first through holes, wherein the first through hole penetrates through the first substrate. The second substrate has a third surface, a forth surface, and a second concave. Besides, the metal adhesion layer is disposed between the first substrate and the second substrate to form a space for a specimen placed therein. In addition, the specimen box of the present invention further comprises one or more plugs. When the plug is assembled into the first through hole to seal the specimen box, the in-situ observation can be accomplished by using an electron microscope. | 01-10-2013 |
20130099134 | MANIPULATOR CARRIER FOR ELECTRON MICROSCOPES - The present invention relates to a carrier device for transporting one or more manipulators into a vacuum specimen chamber of an electron microscope, characterized in that the carrier device comprises: (i) a platform having securing means for detachably securing the one or more manipulators to the platform, and (ii) electrical connectors secured to the platform for the electrical connection of the one or more manipulators. The present invention also relates to a method for transporting the carrier device into the vacuum specimen chamber of the electron microscope without altering the vacuum of the vacuum specimen chamber comprising transporting the carrier device of the invention through the specimen exchange chamber of the electron microscope and into the vacuum specimen chamber. | 04-25-2013 |
20130146784 | SPECIMEN HOLDER USED FOR MOUNTING SAMPLES IN ELECTRON MICROSCOPES - A novel specimen holder for specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices. | 06-13-2013 |
20130228701 | CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH-CONTRAST OBSERVATION - A lower pole piece of an electromagnetic superposition type objective lens is divided into an upper magnetic path and a lower magnetic path. A voltage nearly equal to a retarding voltage is applied to the lower magnetic path. An objective lens capable of acquiring an image with a higher resolution and a higher contrast than a conventional image is provided. An electromagnetic superposition type objective lens includes a magnetic path that encloses a coil, a cylindrical or conical booster magnetic path that surrounds an electron beam, a control magnetic path that is interposed between the coil and sample, an accelerating electric field control unit that accelerates the electron beam using a booster power supply, a decelerating electric field control unit that decelerates the electron beam using a stage power supply, and a suppression unit that suppresses electric discharge of the sample using a control magnetic path power supply. | 09-05-2013 |
20130256558 | APPARATUS FOR CONTAMINANTS BEING DEPOSITED THEREON - An apparatus for contaminants being deposited thereon in a particle beam device, and also the particle beam device including the apparatus, are provided. This apparatus may be an anticontaminator. The apparatus according to the system described herein may include at least one cooling unit. The cooling unit may provide at least one cooled surface on which contaminants in a particle beam device are deposited. The apparatus according to the system described herein may further include at least one aperture unit. The aperture unit may be arranged at a motion device for moving the aperture unit relative to the cooling unit. Furthermore, the aperture unit may have at least one aperture opening. The cooling unit may be connected to the aperture unit by at least one first flexible thermal conductor. | 10-03-2013 |
20130277572 | SAMPLE HOLDER PROVIDING INTERFACE TO SEMICONDUCTOR DEVICE WITH HIGH DENSITY CONNECTIONS - A novel specimen holder for specimen support specimen support devices for insertion in electron microscopes is provided. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices. | 10-24-2013 |
20130277573 | FUNCTIONALIZED CARBON MEMBRANES - Embodiments provide electron-conducting, electron-transparent substrates that are chemically derivatized (e.g., functionalized) to enhance and facilitate the deposition of nanoscale materials thereupon, including both hard and soft nanoscale materials. In various embodiments, the substrates may include an electron-conducting mesh support, for example, a carbon, copper, nickel, molybdenum, beryllium, gold, silicon, GaAs, or oxide (e.g., SiO | 10-24-2013 |
20140103225 | BEAM PULSING DEVICE FOR USE IN CHARGED-PARTICLE MICROSCOPY - The invention relates to a charged-particle microscope comprising
| 04-17-2014 |
20140117251 | STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE - In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected. | 05-01-2014 |
20140319370 | ION BEAM DEVICE - An ion beam device according to the present invention includes a gas field ion source ( | 10-30-2014 |
20140326897 | GAS FIELD IONIZATION ION SOURCE AND ION BEAM DEVICE - Provided is a gas field ionization ion source capable of emitting heavy ions with high brightness which are suitable for processing a sample. The gas field ionization ion source according to the present invention includes a temperature controller individually controlling the temperature of the tip end of an emitter electrode ( | 11-06-2014 |
20140361194 | SAMPLE HOLDER FOR ELECTRON MICROSCOPY FOR LOW-CURRENT, LOW-NOISE ANALYSIS - A novel specimen holder for insertion in electron microscopes, wherein the novel specimen holder is designed to minimize electrical noise so that signal integrity can be maintained during in situ electron microscopy. | 12-11-2014 |
20150028225 | METHOD FOR MANUFACTURING A TEM-LAMELLA AND ASSEMBLY HAVING A TEM-LAMELLA PROTECTIVE STRUCTURE - A method for manufacturing a TEM-lamella is disclosed. The method includes: disposing a self-supporting protective structure on a surface of a substrate; bonding the protective structure to the substrate; cutting out a lamella from the substrate using a particle beam so that the lamella remains bonded to at least a portion of the protective structure; fastening a first tool to the lamella; and moving away the lamella from a residual portion of the substrate by moving the first tool relative to the substrate. | 01-29-2015 |
20150060694 | CHARGED PARTICLE BEAM DEVICE - A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber (for example, based on vacuum exhaust time in the exchange chamber when the specimen is in the exchange chamber or a variation of the degree of vacuum of the exchange chamber for a predetermined time interval when the specimen is in the exchange chamber). | 03-05-2015 |
20150076362 | CHARGED PARTICLE BEAM APPARATUS - In order to provide a charged particle beam apparatus enabling reduction of deflecting coma aberration in cases such as where wide field-of-view scanning is carried out, a charged particle beam apparatus is provided with an electromagnetic objective lens and a stage on which a sample is placed, wherein the electromagnetic objective lens is provided with the following: a plurality of magnetic paths; an objective lens coil; an opening disposed so as to face the sample; an inner lens deflector disposed more on the objective lens coil side than the end of the opening. | 03-19-2015 |
20150097123 | CHARGED PARTICLE BEAM APPARATUS - An object of the present invention is to provide a charged particle beam apparatus that effectively removes electrical charges from an electrostatic chuck. | 04-09-2015 |
20150294835 | ANALYTICAL CELL - An analytical cell includes first and second holders. The first and second holders each contain a substrate having a through-hole and a transmission membrane with an electron beam permeability so as to cover the through-hole. The first and second holders are stacked to form an overlapping portion such that the transmission membranes face each other. The through-holes face each other across the transmission membranes to form an observation window. Negative and positive electrode active materials are separated from each other and contact the electrolytic solution in the observation window. The negative and positive electrode active materials are electrically connected to negative and positive electrode collectors, respectively, in the overlapping portion. At least one of the negative and positive electrode collectors has an electrically insulating isolation membrane for avoiding contact with the electrolytic solution. | 10-15-2015 |
20150325402 | Method and System for Inspecting an EUV Mask - A structure for grounding an extreme ultraviolet mask (EUV mask) is provided to discharge the EUV mask during the inspection by an electron beam inspection tool. The structure for grounding an EUV mask includes at least one grounding pin to contact conductive areas on the EUV mask, wherein the EUV mask may have further conductive layer on sidewalls or/and back side. The inspection quality of the EUV mask is enhanced by using the electron beam inspection system because the accumulated charging on the EUV mask is grounded. The reflective surface of the EUV mask on a continuously moving stage is scanned by using the electron beam simultaneously. The moving direction of the stage is perpendicular to the scanning direction of the electron beam. | 11-12-2015 |
20150364294 | TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID - A transmission electron microscope micro-grid includes a carbon nanotube layer sandwiched between a first metal layer and a second metal layer. The carbon nanotube layer includes a first surface and a second surface opposite to each other, and the carbon nanotube layer comprises a number of carbon nanotubes. The first metal layer is attached on the first surface. The second metal layer is attached on the second surface. The first metal layer and the second metal layer are bonded with the carbon nanotube layer via a number of dangling bonds on the number of carbon nanotubes, the first metal layer defines a number of first through holes, the second metal layer defines a number of second through holes, and the carbon nanotube layer is exposed through the number of first through holes and the number of second through holes. | 12-17-2015 |
20160013010 | Charged Particle Beam Apparatus | 01-14-2016 |
20160020067 | Radiation Analyzer - A radiation analyzer includes a primary ray source that generates primary rays, an optical system applies the primary rays emitted from the primary ray source to a sample, an energy-dispersive radiation detector that detects radiation that has been generated from the sample when the primary rays have been applied to the sample, and a support that supports the radiation detector so that the tilt of the center axis (C) of the radiation detector with respect to the optical axis (Z) of the optical system can be changed. | 01-21-2016 |
20160035540 | TOTAL RELEASE METHOD FOR SAMPLE EXTRACTION IN AN ENERGETIC-BEAM INSTRUMENT - A substrate located in an energetic-beam instrument has a region of interest to be extracted as a sample for further analysis. Cuts are made in the substrate to define a sample, and a stress-buffer layer is formed over the region of interest or adjacent to it. An isolating cut is made to separate the portion of the substrate containing the region of interest from the bulk substrate; however, the isolated area remains attached to the stress-buffer layer. An end-effector, such as the probe of a nano-manipulator, is attached to the stress-buffer layer, and the stress-buffer layer is cut to free the sample. The sample may then be attached to a holder by attachment of the stress-buffer layer thereto. Thus the sample is never at the same time connected directly and rigidly to two different objects that may move relatively to one another, creating undesirable stresses in the sample. | 02-04-2016 |
20160042912 | LIQUID FLOW CELLS HAVING GRAPHENE ON NITRIDE FOR MICROSCOPY - This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports. | 02-11-2016 |
20160056013 | ANALYTICAL CELL - An analytical cell includes a first holder and a second holder. The first holder and the second holder each contain a substrate including a through-hole and a transmission membrane having an electron beam permeability. The through-hole is covered with the transmission membrane. The first holder and the second holder are stacked to form an overlapping portion such that the transmission membranes face toward each other. A negative electrode active material and a positive electrode active material, which are arranged at a distance from each other and are in contact, respectively, with an electrolytic solution, are connected electrically to a negative electrode collector and a positive electrode collector, respectively, in the overlapping portion. A lyophobic part having no affinity for the electrolytic solution is formed on at least one of the negative electrode collector and the positive electrode collector. | 02-25-2016 |
20160056015 | Radiation Sensor, and its Application in a Charged-Particle Microscope - A pixelated CMOS radiation sensor (e.g. in a 4T pinned photodiode device) that comprises a layered structure including:
| 02-25-2016 |
20160071688 | Sample Observation Device - Provided is a sample observation apparatus including a charged particle optical column that, irradiates a sample including an observation target portion that is a concave portion with a charged particle beam at an acceleration voltage, an image generation section that acquires an image including the observation target portion from a signal acquired with irradiation of the charged particle beam, a storage section that stores information representing a relationship between a brightness ratio of a concave portion and its neighboring portion of a reference sample that is irradiated with the charged particle beam at the acceleration voltage and a value that represents a structure of the concave portions of the reference sample in advance, a calculation section that acquires a brightness ratio of the concave portion and its neighboring portion of the image, and a determination section that determines whether or not a defect occurs in the observation target portion based on the information that represents the relationship and the brightness ratio of the image. | 03-10-2016 |
20170236680 | Charged Particle Beam System | 08-17-2017 |
20170236685 | MICROREACTOR FOR USE IN MICROSCOPY | 08-17-2017 |