Wen-Sheng
Wen-Sheng Chan, Jhubei City TW
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20080310008 | METHOD OF PATTERNING MECHANICAL LAYER FOR MEMS STRUCTURES - A method of making a microelectromechanical system (MEMS) device is disclosed. The method includes forming a stationary layer over a substrate. A sacrificial layer is formed over the stationary layer. The sacrificial layer is formed of a first material. A mechanical layer is formed over the sacrificial layer. A hard mask layer is formed over the mechanical layer. The hard mask layer is formed of a second material. The first and second materials are etchable by a single etchant which is substantially selective for etching the first and second materials relative to the mechanical layer. The hard mask layer is patterned after forming the hard mask layer. Subsequently, the mechanical layer is etched through the patterned hard mask layer. The patterned hard mask layer is removed simultaneously with the sacrificial layer after etching the mechanical layer. | 12-18-2008 |
Wen-Sheng Chang, Hsinchu City TW
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20130247823 | METHOD AND APPARATUS OF GROWING A THIN FILM - A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly. | 09-26-2013 |
Wen-Sheng Chang, Pingtung City TW
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20090298679 | PHOTO-ENERGY TRANSFORMATION CATALYSTS AND METHODS FOR FABRICATING THE SAME - Photo energy transformation catalysts and methods for fabricating the same are provided. The method includes mixing a solution containing a positive valence element of Group IB, a solution containing a positive valence element of Group IIIA, and a solution containing a negative valence element of Group VIA to obtain a composition and forming a film from the composition by liquid phase deposition, wherein the film contains compounds including the elements of Group IB, Group IIIA, and Group VIA. | 12-03-2009 |
20150162620 | AIR BATTERY AND AIR ELECTRODE THEREOF - The disclosure provides an air battery which includes a metallic electrode, an air electrode, a battery box and an electrolyte. The metallic electrode, the air electrode and the electrolyte are disposed in the battery box. The air electrode includes a current collector and a catalytic layer. The composition of the current collector contains nickel, chromium and iron. The catalytic layer is loaded on the current collector. The material of the catalytic layer contains α-MnO | 06-11-2015 |
Wen-Sheng Chang, Taipei City TW
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20140012943 | METHOD AND STORAGE APPARATUS FOR SWITCHING DATA TRANSMISSION PATH TO TRANSMIT DATA - A method and a storage apparatus for switching a data transmission path to transmit data are provided. The storage apparatus comprises a storage element, an interface connector, a connector control interface connected with the storage element and the interface connector, a wireless transmission module, and an apparatus controller connected with the storage element and the wireless transmission module. In the method, the apparatus controller receives a connection request from a remote apparatus by using the wireless transmission module, and accordingly transmits an inquiry message to the remote apparatus to ask whether to establish a wireless data transmission path. When a confirmation message returned from the remote apparatus is received, the apparatus controller closes the connector control interface and establishes a wireless data transmission path to provide the remote apparatus to access the data in the storage element. | 01-09-2014 |
Wen-Sheng Chen, Shenzhen CN
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20140161573 | FEEDING DEVICE - A feeding device includes a support assembly, a holding plate rotatably mounted on the support assembly, a guiding member mounted on the holding plate, a pushing mechanism, and a first unloading mechanism. The holding plate defines an unloading groove. The guiding member defines an outlet corresponding to the unloading groove. The pushing mechanism includes a first driver and a pushing member connected to the first driver. The pushing member is positioned above the holding plate. The first driver drives the pushing member to move towards the unloading groove. The first unloading mechanism includes a blocking member for blocking the unloading groove, and a second driver connected to the blocking member. The second driver drives the blocking member to move away from the unloading groove. | 06-12-2014 |
Wen-Sheng Chen, Taipei TW
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20090175055 | Power supplying device - A power supplying device includes: an output transformer including first and second output coils for generating first intermediate voltages from an input voltage; a voltage adjusting transformer including primary and secondary coils; a first rectifying-and-filtering circuit connected to the first output coil for generating a first output voltage from the first intermediate voltage obtained from the first output coil; the primary coil being connected in parallel to the first output coil, the secondary coil being connected in series to the second output coil and being coupled to the primary coil for generating a second intermediate voltage from the first intermediate voltage obtained from the first output coil; and a second rectifying-and-filtering circuit connected to the secondary coil for generating a second output voltage from a combined voltage combining the second intermediate voltage obtained from the secondary coil with the first intermediate voltage obtained from the second output coil. | 07-09-2009 |
20100109561 | POWER SUPPLY APPARATUS - A power supply apparatus includes an open loop power switcher, a power isolation transformer, a backlight driving circuit, and a power circuit. The open loop power switcher converts a direct current (DC) power into an alternating current (AC) input voltage. The power isolation transformer is coupled to the open loop power switcher and includes a primary-side winding, a first winding, and a second winding, wherein the first and second windings are disposed at the secondary-side of the power isolation transformer, and the first winding is employed for generating a first voltage signal according to the AC input voltage. The backlight driving circuit is employed for driving a backlight module according to the first voltage signal. The power circuit is employed for receiving a second voltage signal generated from the second winding according to the AC input voltage, in order to generate an output power signal. | 05-06-2010 |
20150228250 | LCD SYSTEM, AND AC ADAPTER AND BACKLIGHT DRIVING MODULE FOR THE SAME - A liquid crystal display (LCD) system includes an LCD device and an alternating current (AC) adapter. The LCD device includes a video processing module and a light emitting diode (LED) backlight module. The AC adapter includes a backlight driving module and an AC-to-DC (direct current) converting module. The backlight driving module generates a backlight driving signal, and outputs the backlight driving signal to drive the LED backlight module of the LCD device . The AC-to-DC converting module is adapted to convert an AC line voltage into first and second DC voltages, and outputs the first and second DC voltages to power the video processing module of the LCD device and the backlight driving module, respectively. | 08-13-2015 |
Wen-Sheng Chen, Taipei City TW
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20110260645 | LED BACKLIGHT DRIVING MODULE - The instant disclosure relates to a LED backlight driving module. The driving module utilizes a plurality of second power isolation transformers interconnected to each other in series and connected to a secondary winding of a first power isolation transformer in parallel to produce a plurality of second driving signals with uniform current, and driving corresponding LED light bars with uniform brightness. Optionally, a base voltage circuit can be used to provide a base voltage with negative voltage level on the other end of LED light bars, so as to lower the positive voltage level of the second driving signals. Thus, it is beneficial that the LED backlight driving module provides higher power conversion efficiency and has lower design cost. | 10-27-2011 |
Wen-Sheng Cheng, Taipei TW
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20130121388 | LOW COMPLEXITY FREQUENCY SELECTIVE IQ MISMATCH DIGITAL RX BALANCER AND TX INVERSE BALANCER FOR NON-IDEAL RF FRONT-END - A system for reducing a mismatch between an in-phase (I) signal and a quadrature phase (Q) signal is disclosed. The system includes a phase compensation block comprising an infinite impulse response (IIR) filter configured to reduce a first portion of a mismatch between an I signal and a Q signal, wherein the first portion includes frequency selective phase mismatch. The system further includes a gain compensation block comprising a finite impulse response (FIR) filter configured to reduce a second portion of the mismatch, wherein the second portion includes frequency selective gain mismatch. The phase compensation block and the gain compensation block are calibrated at least in part based on a loopback signal, wherein the loopback signal is routed from a transmitting portion of a radio frequency (RF) circuitry back to a receiving portion of the RF circuitry. | 05-16-2013 |
Wen-Sheng Hsiao, New Taipei City TW
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20130080076 | EXAMINATION SYSTEM FOR CRYSTALLINE SILICON SOLAR CELL - The examination system contains a vibration device, a signal generation device, an audio collection device, and a processing device. A crystalline silicon solar cell is placed on the vibration device. The signal generation device drives the vibration device to vibrate and the crystalline silicon solar cell is synchronously vibrated at a high speed. The audio collection device collects sound from the vibration and the processing device analyzes the sound to determine if the crystalline silicon solar cell has internal cracks or not. | 03-28-2013 |
Wen-Sheng Hsiao, Guishan Township TW
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20130000879 | ROAD LAMP COOLING MANAGEMENT DEVICE - The present invention relates to a road lamp cooling management device including a plurality of cooling pipes installed into fins of an LED light source coupled to the large road lamp, and an open end of each of cooling pipes is inserted and fixed directly into a fixing hole base of an upper lamp casing, such that high heat generated by the LED light source can be cooled by the fins as a first-stage cooling and circulated and cooled by the plurality of cooling pipes as a second-stage cooling. | 01-03-2013 |
Wen-Sheng Huang, Taipei City TW
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20110038796 | Method of Nuclear Medical Photography Using Dual-Isotopes - A method of single photon emission computed tomography (SPECT) using dual-isotopes of [ | 02-17-2011 |
Wen-Sheng Huang, Tunghsiao Town TW
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20100056003 | Surfboard antislip pad structure - A surfboard antislip pad structure including a main body composed of an upper pad and a lower pad. The upper and lower pads together define an air chamber in the main body. The upper pad has a top face and a bottom face. At least multiple bosses are formed on the top face of the upper pad. Each boss has a surface with roughened face or wrinkled texture for increasing friction. Multiple ribs are arranged on an inner face of the upper pad to enhance supporting force thereof. The lower pad is configured as a flat material and sealedly disposed under the bottom face of the upper pad for holding air in the air chamber so as to achieve a soft, comfortable and resilient antislip pad. | 03-04-2010 |
Wen-Sheng Huang, Ta-Li City TW
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20110232338 | Pick resistant handcuffs having central rail - Pick-resistant handcuffs having two fixed, arc-shaped hooks and one pivotable, arc-shaped hook. The two fixed ring hooks engage each other to form an accommodation chamber for receiving the pivoting hook penetrating into an open side of the accommodation chamber. Central channels are cut in the teeth outer periphery and accommodate a stop projecting part between the lateral edges of the teeth that inhibits unlocking the stop members of the ratchet attached to the two fixed hooks. Elastic members biased toward the teeth are disposed on either side of the stop projecting part act independently to provide ratchet stops to each tooth edge, and the stop projecting portion blocks insertion of a pick and unlock both of the two ratchets simultaneously. | 09-29-2011 |
Wen-Sheng Liao, San-Hsai Tow TW
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20080291010 | MOTHER-DAUGHTER SECURITY ALARM SYSTEM WITH DIRECTION INDICATION MEANS - A mother-daughter security alarm system in which the mother unit has multiple directional antennas arranged in different directions, and a display for displaying the moving direction of the daughter unit subject to the result of a comparison procedure to compare the value of the signal received from the daughter unit through one directional antenna with the value of the signal received from the daughter unit through another directional antenna so that the user of the mother unit can search the location of the daughter unit rapidly subject to the directional indication of the display. | 11-27-2008 |
Wen-Sheng Lin, Kaohsiung City TW
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20150289647 | TABLETOP LINKING DEVICE - A tabletop linking device for removably linking together a perimeter edge of a first table to an abutting perimeter edge of an adjacent second table. Each perimeter edge has a perimeter lip member extending away from a bottom surface of the corresponding tabletop. The second table includes a recess along an inner wall of the perimeter lip. A connection member is pivotally connected to a base member on the bottom surface of the first table. The connection member rotates between a stowed position and a latched position. In the latched position, the ridge engages the recess to removably link the perimeter edge of the first and second tables together. | 10-15-2015 |
Wen-Sheng Lin, Sinshih Township TW
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20110234198 | Differential Reference Voltage Generator - A differential reference voltage generator generates a first differential reference voltage and a second differential reference voltage. The differential reference voltage generator includes a first operational amplifier, a first transistor, a first resistor, and a second resistor. The first operational amplifier has a negative terminal adapted to receive a reference voltage. The first transistor has a source receiving a power supply voltage and has a gate electrically connected to an output terminal of the first operational amplifier. The first resistor has a first terminal electrically connected to a drain of the first transistor, and has a second terminal electrically connected to a positive terminal of the first operation amplifier. The second resistor has a first terminal electrically connected to the second terminal of the first resistor, and a second terminal electrically connect to a current mirror. | 09-29-2011 |
Wen-Sheng Lin, Toufen Township TW
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20110027615 | ELECTRODE STRUCTURE ADAPTED FOR HIGH APPLIED VOLTAGE AND FABRICATION METHOD THEREOF - An electrode structure adapted for high applied voltage is provided, which comprises a conductive plate substrate and a covering layer disposed thereon such that a covering percentage of the covering layer over the conductive plate substrate is more than 50%. Since area of the conductive plate substrate covered by the covering layer is larger than the area exposed, the possibility of arcing is reduced and the voltage applied to the electrode structure may be increased. | 02-03-2011 |
Wen-Sheng Lin, Hsinchu TW
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20090043521 | TRANSISTOR CIRCUIT WITH ESTIMATING PARAMETER ERROR AND TEMPERATURE SENSING APPARATUS USING THE SAME - A transistor circuit with estimating parameter error and temperature sensing apparatus using the same are provided. The temperature sensing apparatus measures and calculates a parameter error of transistor which is driven by different currents in advance. And the temperature sensing apparatus compensates an error occurred during temperature measurement using the acquired the parameter error so as to obtain an accurate environment temperature. | 02-12-2009 |
Wen-Sheng Liu, Hsinchu TW
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20090115128 | AUTOMATIC DOCUMENT FEEDER - An automatic document feeder includes a main body defining a passage for transporting a document. A feeding roller unit includes a feeding driving roller and a feeding idle roller coupling with the feeding driving roller. The feeding driving roller and the feeding idle roller are disposed at opposite sides of the passage. A drawing-out roller unit includes a drawing-out driving roller and a drawing-out idle roller coupling with the drawing-out driving roller. The drawing-out driving roller and the drawing-out idle roller are disposed at opposite sides of the passage. The drawing-out driving roller and the feeding driving roller are at the same side of the passage. And a belt is put around the feeding driving roller and the drawing-out driving roller to mate with the feeding idle roller and the drawing-out idle roller respectively for flatting and conveying the document into and out of the automatic document feeder. | 05-07-2009 |
20090185238 | OPTICAL SCANNING DEVICE - An optical scanning device with a dustproof function includes a shell defining a first receiving room and a second receiving room communicating with the first receiving room through an open window defined on the shell for scanning light beams passing therethrough. An optical scanning module is mounted in the first receiving room. A glass platform is located on the second receiving room at a position facing the open window for insulating the first receiving room from the outside of the shell. A correcting plate is stuck on the bottom of the glass platform. Such structure of the optical scanning device enables the glass platform to be firstly assembled with the shell in a dustless chamber, which prevents the suspending dust from falling in the first receiving room and attaching to the optical scanning module during the subsequent assembly process and ensures the scanning quality of the optical scanning device. | 07-23-2009 |
20090256306 | PAPER FEEDING DEVICE - A paper feeding device includes a pick roller, a spring element and a separator pad. The pick roller has a roller surface. The spring element is disposed above the pick roller. The spring element has two spring arms extending toward two ends of the pick roller. Free ends of the two spring arms extend to positions outside the two ends of the pick roller and below the roller surface so as to be contactless with the roller surface and are pushed forward and upward by papers and then transfer a press force to the pick roller. A separator pad is arranged in front of the spring element and contacts with the roller surface of the pick roller for cooperating with the pick roller to separate a lowermost one of the papers. Because the spring arms are contactless with the pick roller directly, so the spring arms do not rub the pick roller, which avoids the pick roller being abraded. | 10-15-2009 |
20090256307 | SHEET SEPARATING MECHANISM OF AN AUTO SHEET FEEDER AND AUTO SHEET FEEDER INCORPORATING THE SAME - An auto sheet feeder used for a device comprises an upper frame, a pick roller and a sheet separating mechanism secured on the upper frame. The sheet separating mechanism includes a bracket and a pair of arms disposed on the bracket and spring-biased toward the pick roller. A separator pad is disposed on the bracket and spring-biased toward the pick roller. A press plate is positioned on the bracket and presses against the separator pad. A torsion spring mounted above the press plate has at least two coil portions. Two adjacent ends of the coil portions extend toward the same side and then joint each other to form a contact portion which always props the upper frame. Two ends of the torsion spring have a retaining arm respectively. The two retaining arms are opposite each other and pivotally engage to two sides of the press plate respectively. The torsion spring is compressed by the press plate when the sheets push the separator pad and pushes the press plate and the separator pad to be reposition after the lowermost one of the sheets is separated. | 10-15-2009 |
20090284811 | OPTICAL SCANNING DEVICE - An optical scanning device with a dustproof function includes a shell defining a first receiving room and a second receiving room communicating with the first receiving room through an open window defined on the shell for scanning light beams passing therethrough. An optical scanning module is mounted in the first receiving room. A glass platform is located on the second receiving room at a position facing the open window for insulating the first receiving room from the outside of the shell. A correcting plate is stuck on the bottom of the glass platform. Such structure of the optical scanning device enables the glass platform to be firstly assembled with the shell in a dustless chamber, which prevents the suspending dust from falling in the first receiving room and attaching to the optical scanning module during the subsequent assembly process and ensures the scanning quality of the optical scanning device. | 11-19-2009 |
Wen-Sheng Liu, Hsinfeng TW
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20090309293 | SHEET FEEDING DEVICE - A sheet feeding device includes a pick roller and a resilient element disposed above the pick roller. The pick roller has a roller surface. The resilient element includes two side resilient arms and a center resilient arm located between the two side resilient arms. Free ends of the two side resilient arms are pushed forward by all sheets when the sheets arrive between the free ends of the two side resilient arms and the roller surface. A free end of the center resilient arm faces the roller surface of the pick roller and maintains a gap therebetween. When too many pieces of paper are drawn forward to the resilient element, the side resilient arms are pushed forward further more, the uppermost paper contacts the center resilient arm. The center resilient arm cooperates with the side resilient arms to provide the paper a pressure big enough to be conveyed forward. | 12-17-2009 |
Wen-Sheng Lu, Guangdong Province CN
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20150124441 | ROTARY LIGHTING FIXTURE HAVING SPEAKER WITH PLAYBACK FUNCTION - A rotary lighting fixture having a speaker with a playback function is revealed herein, comprising a shell having an opening, a speaker fitted inside the shell, and an annular LED module having plural LEDs fitted at the opening of the shell for illumination and playback functions. In addition, the lighting fixture also combines with a power supply base with a rotary function embedded in a ceiling and a wall for substantially saving space in use thereof, promoting interior designs by its aesthetic appearance and adjusting angles of incidence from the LEDs as desired. | 05-07-2015 |
20150125705 | DISPLAY REAR SHELL WITH WATERPROOF AND FIREPROOF PROPERTIES - The invention relates to a display rear shell with waterproof and fireproof properties comprising a main layer of a pulp made from hardwood in an amount from 80% to 90% by weight of the main layer, a pulp waterproof composition in an amount from 5% to 15% by weight of the main layer, and a flame retardant in an amount of a remaining weight percentage by weight of the main layer, a fireproof layer and a waterproof layer, in place of a traditional plastic display rear shell using plastic materials for characteristics as waterproof, fireproof and light weight. | 05-07-2015 |
20150201154 | DISPLAY CONNECTOR WITH 4K IMAGE RESOLUTION - The invention relates to a display connector with a 4K image resolution. It primarily comprises a first connector, a second connector and a third connector. The present invention is a connector for a display to support high specification images with quad full high definition (QFHD). The third connector is used to connect an existing video playback device merely having the playback function of full high definition (FHD). Then the FHD image data is upscaled through an electrically connected image upscaling module of the first connector, and QFHD image signals with an ultra-high definition resolution is displayed through an electronic display device. Accordingly, the QFHD image signals with the ultra-high definition resolution can be displayed without upgrading the hardware of the player or computer so as to dramatically reduce the required cost of upgrading the hardware. | 07-16-2015 |
20150234232 | LED DISPLAY DEVICE - The invention relates to a LED display device. Primarily, it comprises a liquid crystal display, a shell, a plurality of lighting modules and two reflective layers. The present invention is a liquid crystal display device which uses the light emitting diode to combine with polymethylmethacrylate (PMMA) as a lighting module. The secondary lens theory composed of different refractive index between air and PMMA and the angle of the reflective layers on the inner surface of the side planes are used to effectively increase the refracted angle of light emitted from the light emitting diode and the distance of the mixed light and to effectively reach the advantages of thinner liquid crystal display and lower power consumption. | 08-20-2015 |
Wen-Sheng Su, Taipei City TW
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20140147991 | METHOD OF MANUFACTURING A SEMICONDUCTOR TEMPLATE - A method for manufacturing a semiconductor template balanced between strains and defects is provided, the method including steps of: preparing a substrate, dividing the substrate into a plurality of first patterned zones and a plurality of second patterned zones, the second patterned zones applied to separate the first patterned zones; selecting a semiconductor with an ideal lattice of a semiconductor buffer layer to be deposited on the substrate; etching a plurality of first microstructures in the first patterned zones according to the semiconductor with the ideal lattice, the first microstructures and the semiconductor with the ideal lattice following a lattice-structure matching relationship, discovered by strain-traction experiments, making the substrate a multi-patterned substrate; and depositing the semiconductor buffer layer having the semiconductor with the ideal lattice on the multi-patterned substrate to manufacture a semiconductor template which is balanced between strains and defects. | 05-29-2014 |
Wen-Sheng Wang, Taoyuan County TW
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20120275148 | OPTICAL REFLECTIVE FILM AND LIGHT EMITTING DEVICE USING THE SAME - An optical reflective film and a light emitting device are provided. The optical reflective film includes a main body, organic particles, inorganic particles, and voids. The main body is made of polyolefin. A refractive index difference N of the optical reflective film is defined in the following equation, and its value ranges from 0.05 to 0.7: | 11-01-2012 |
20140306613 | LIGHT-EMITTING DIODE DRIVING APPARATUS - A light-emitting-diode (LED) driving apparatus including an AC-DC power conversion stage, a balance circuit and a pulse-width-modulation (PWM) control unit is provided. In the present invention, the LED driving apparatus balances currents flowing through all LED strings by using the balance circuit such that a purpose of current matching is achieved accordingly. In addition, the LED driving apparatus may control the PWM control unit according to an equation between an independent DC output voltage generated by the AC-DC power conversion stage and a control voltage provided by the balance circuit without adopting any boost converter so as to indirectly change a DC output voltage used for directly driving all LED strings and generated by the AC-DC power conversion stage. In this way, the purpose of low cost and high efficiency can be achieved accordingly. | 10-16-2014 |
Wen-Sheng Wang, Taichung City TW
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20150162206 | METHOD FOR ETCHING TARGET LAYER OF SEMICONDUCTOR DEVICE IN ETCHING APPARATUS - A method for etching a target layer of a semiconductor device in an etching apparatus is provided. To form an element, the method includes forming a photoresist pattern on the target layer of the semiconductor device, in which the photoresist pattern has an after-develop-inspection critical dimension (ADI CD). A target after-etch-inspection critical dimension (AEI CD) of the element is provided, as well as a trim time of the target layer. The etching apparatus is provided and a formation time of a protective layer on an inner wall of the etching apparatus is determined based on the ADI CD, the target AEI CD and the trim time. The protective layer for the predetermined formation time is formed to perform a trimming process on the target layer for the trim time by using the photoresist pattern as a mask, so as to form the element. | 06-11-2015 |
Wen-Sheng Wu, Hsinchu TW
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20160005915 | METHOD AND APPARATUS FOR INHIBITING LIGHT-INDUCED DEGRADATION OF PHOTOVOLTAIC DEVICE - A method for inhibiting light-induced degradation of a photovoltaic device includes steps of: a) subjecting the photovoltaic device to an illumination treatment using a light having a wavelength not less than 300 nm to heat the photovoltaic device in the absence of ambient light; and b) maintaining the temperature of the photovoltaic device above an annealing temperature of the photovoltaic device for at least 0.5 minute. An apparatus for inhibiting light-induced degradation of a photovoltaic device is also disclosed. | 01-07-2016 |
Wen-Sheng Wu, Hsin-Chu TW
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20130084657 | Plasma Density Control - A first embodiment is a method for semiconductor processing. The method comprises forming a component on a wafer in a chamber; determining a non-uniformity of the plasma in the chamber, the determining being based at least in part on the component on the wafer; and providing a material on a surface of the chamber corresponding to the non-uniformity. The forming the component includes using a plasma. The material can have various shapes, compositions, thicknesses, and/or placements on the surface of the chamber. Other embodiments include a chamber having a material on a surface to control a plasma uniformity. | 04-04-2013 |
20150155185 | Remote Plasma System and Method - A system and method for generating and using plasma is provided. An embodiment comprises a plasma generating unit that comprises beta-phase aluminum oxide. A precursor material is introduced to the plasma generating unit and a plasma is induced from the precursor material. The plasma may be used to deposit or etch materials on a semiconductor substrate. | 06-04-2015 |
Wen-Sheng Wu, Hsinchu City TW
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20100051581 | PLASMA CLEANING FOR PROCESS CHAMBER COMPONENT REFURBISHMENT - A method for cleaning and refurbishing a chamber component includes placing a chamber component having process deposits on an exterior surface in a plasma vapor deposition chamber. The chamber component is bombarded with a plasma comprising Argon for a period of time sufficient to remove the process deposits from the exterior surface of the chamber component. | 03-04-2010 |
20140141614 | Remote Plasma System and Method - A system and method for generating and using plasma is provided. An embodiment comprises a plasma generating unit that comprises beta-phase aluminum oxide. A precursor material is introduced to the plasma generating unit and a plasma is induced from the precursor material. The plasma may be used to deposit or etch materials on a semiconductor substrate. | 05-22-2014 |