| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 359224100 | Reflective element moved by deformable support | 49 |
| 20090059340 | Deformable mirror - An optoelectric device including a deformable membrane with an outer reflecting surface and an inner surface whereon a plurality of permanent magnets are fixed, and having a bottom surface entirely coated with a continuous layer of a flexible material; and a support including a plurality of electromagnets placed opposite the permanent magnets to exert an electromagnetic force thereon, locally displacing a zone corresponding to the deformable membrane. | 03-05-2009 |
| 20090122380 | MICROACTUATOR, OPTICAL APPARATUS, AND OPTICAL SWITCH - A microactuator has a fixed portion and a movable portion that is provided in such a way as to be movable relative to the fixed portion between a first position at which it is in contact with a predetermined portion of the fixed portion and a second position away from the first position. The fixed portion has a first electrode portion, the movable portion has a second electrode portion that can produce an electrostatic force between it and the first electrode portion by a voltage between it and the first electrode portion, and the first and second electrode portions are arranged in such a way that a first force that biases the movable portion in a direction toward the first position according to the electrostatic force created when the voltage is constant reaches a peak when the movable portion is at a third position between the first position and the second position. | 05-14-2009 |
| 20090122381 | MICROACTUATOR, OPTICAL DEVICE AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms. | 05-14-2009 |
| 20090296181 | Micro electro mechanical device having an opening between a fixing portion and a torsion bar - A micro electro mechanical device includes an inner frame provided with a movable part and an outer frame provided in a circumference of the inner frame. The outer frame has a fixing part fixed by a joining material. A first torsion bar is provided between the outer frame and the inner frame so as to swingablly support the inner frame on the outer frame. A first opening is formed in the outer frame in a vicinity of the first torsion bar. The first opening is positioned between the fixing part of the outer frame and the first torsion bar. | 12-03-2009 |
| 20090316245 | TRANSDUCER-MIRROR STRUCTURE - An approach for obtaining a transducer mirror structure made from silicon. The structure may have a center portion and a perimeter portion that have an attachment between them which is made flexible after certain etching between the two portions. The attachment may be a web of links or legs. A force applied to the center portion at one end of the structure may cause the center portion to move relative to the perimeter portion. A piezo electric transducer or actuator may be attached to apply the force. An oxide layer, a thin layer of silicon and a mirror may be formed on the other end of the structure. The web of links or legs between the center and the perimeter portions may be established with an RIE etch of gaps through the structure to the oxide layer and an undercutting of the gaps with a KOH etch. | 12-24-2009 |
| 20100002279 | MOVABLE BODY APPARATUS, OPTICAL DEFLECTOR, OPTICAL INSTRUMENT USING THE OPTICAL DEFLECTOR, AND RESONANCE FREQUENCY DETECTING METHOD - A movable body apparatus includes an oscillatory system, a driving portion for driving the oscillatory system with a driving signal, a detecting portion for detecting an oscillating condition of the movable body, a storing portion, and an obtaining portion. The oscillatory system includes at least a movable body, and an elastic support portion for supporting the movable body in a swingingly rotatable manner. The storing portion stores data of frequency characteristics of maximum angular displacement based on maximum angular displacements of the movable body corresponding to plural driving frequencies, detected by the detecting portion. The obtaining portion obtains a resonance frequency of the oscillatory system by fitting to the data of frequency characteristics of maximum angular displacement stored in the storing portion, using a least squares method. | 01-07-2010 |
| 20100007936 | DIELECTRIC MICROSTRUCTURE FOR USE IN MICROELECTROMECHANICAL SYSTEMS - Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems. | 01-14-2010 |
| 20100014142 | OPTICAL SCANNING DEVICE - An optical scanning device of the invention includes: a substrate; a torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, the drive source is provided on a portion of the substrate at a distance from a connected portion where the substrate is connected to the torsion bar portion, and a substrate shape control device which controls the shape of the substrate itself is provided on the substrate. | 01-21-2010 |
| 20100014143 | Vibrating Mirror Element - A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film. | 01-21-2010 |
| 20100020379 | GIMBALED SCANNING MICRO-MIRROR ACTUATION SCHEME AND ARCHITECTURE - A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF. | 01-28-2010 |
| 20100033796 | Optical module, optical control method by optical module, optical switch, and optical switching method - An optical module includes a mirror which reflects input light and which outputs output light; and a mirror control section which is opposite to the mirror and which controls, at the time of the input light being reflected from a reflecting surface of the mirror, the reflecting surface by distorting the reflecting surface according to voltage applied to the mirror so as to output the output light an optical coupling characteristic of which changes. By using this optical module, the optical coupling characteristic of the output light changes. | 02-11-2010 |
| 20100053716 | METHOD OF FABRICATING A STRUCTURE BY ANISOTROPIC ETCHING, AND SILICON SUBSTRATE WITH AN ETCHING MASK - In a fabrication method of fabricating a structure, a basic etching mask corresponding a target shape with a convex corner, and a correction etching mask with a first portion, a second portion and an opening portion are formed on a single-crystal silicon substrate with a (100) principal face, and the silicon substrate with the basic etching mask and the correction etching mask formed thereon is subjected to an anisotropic etching to form the silicon substrate having the target shape. The first portion extends in a <110> direction, respective ends of the first portion are connected to the basic etching mask, and at least one end of the first portion is connected to the convex corner of the basic etching mask. The second portion is connected to a side of the first portion extending in the <110> direction, the second portion includes at least one convex corner, and the opening portion extends straddling a boundary between the first portion and the second portion. | 03-04-2010 |
| 20100079837 | OPTICAL SCANNING DEVICE - An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion. | 04-01-2010 |
| 20100128335 | Mirror device - A mirror device comprises: an electrode which is covered with a protective film made of a material containing a semiconductor material and is placed on a substrate; a mirror placed above the electrode; and an electrically conductive hinge placed between the mirror and the electrode, wherein an opening part is formed in a part of the protective film, and the hinge penetrates the protective film in the opening part thereof. | 05-27-2010 |
| 20100142023 | Vibrating Mirror Element - This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions. | 06-10-2010 |
| 20100245965 | REAL-TIME OPTICAL COMPENSATION OF ORBIT INDUCED DISTORTION EFFECTS IN LONG INTEGRATION TIME IMAGERS - An apparatus and method for effecting and changing optical distortions is disclosed. The apparatus includes a beam imaging apparatus including a first deformable mirror, a second deformable mirror, and a beam-steering apparatus. The beam-steering apparatus includes a plurality of planar tiltable mirrors arranged to define a radiation beam path therebetween, wherein the plurality of planar tiltable mirrors comprises at least three tiltable mirrors. A mirror drive system is configured to tilt each respective planar mirror about its respective axis of rotation or axes of rotation and a controller is configured to control deformation of a reflective surface of the first and the second deformable mirrors. | 09-30-2010 |
| 20100245966 | ACTUATOR DEVICE FOR OPTICAL DEFLECTOR - An actuator device for optical deflector includes a base for mounting an optical deflector deflecting a light beam from a light source, at least one piezoelectric actuator translating and vibrating said base; and a supporting body supporting said piezoelectric actuator. | 09-30-2010 |
| 20100296146 | MEMS SCANNING MICROMIRROR - A MEMS scanning micromirror including a mirror body | 11-25-2010 |
| 20100296147 | OPTICAL REFLECTION ELEMENT - An optical reflection device includes a mirror having a reflection surface configured to reflect light, a first support beam connected to the mirror, a tuning fork vibrator connected to the first support beam, a second support beam connected to the tuning fork vibrator, and a supporter connected to the second support beam. The first support beam has a first end connected to the mirror and a second end located on an opposite side to the first end, and extends along a center axis. The tuning fork vibrator includes a joining portion connected to the second end of the first support beam, a first arm extending from the first joining portion while separated from the first center axis, and a second arm extending from the first joining portion symmetrically to the first arm about the first center axis. The second support beam has a third end connected to the joining portion of the tuning fork vibrator and a fourth end located on an opposite side to the third end, and extends along the first center axis. | 11-25-2010 |
| 20110080627 | Translating and Rotation Micro Mechanism - A translation and rotation mechanism is disclosed, which comprises of one or more bi-directional electrostatic actuators. Each bi-directional electrostatic actuator comprising of fixed electrodes and movable electrodes, where the fixed electrodes of each actuator being attached onto a base. The movable electrodes of each actuator are connected to the translating and rotation unit through a spring system. The movable elements of each said actuator being able to rotate with respect to the base plane by applying voltage signals to the actuator and by controlling the voltage signals applied to each said actuator independently, said translating and rotation unit being able to translate, rotate, or translate and rotate simultaneously. | 04-07-2011 |
| 20110141538 | DRIVE DEVICE - It is aimed to provide a drive device capable of realizing appropriate rotation of a driven body about a plurality of drive axes by a drive element while preventing the drive device from requiring higher performance and becoming intricate, and thus leading to higher power consumption and higher cost. In order to achieve the above-mentioned object, the drive device includes: a drive element including first and second signal input sections and driving a driven body about first and second drive axes upon a voltage being applied between the first signal input section, and the second signal input section; and a signal supply section supplying the first signal input section with a first drive signal for driving the driven body about the first drive axis and supplying the second signal input section with a second drive signal for driving the driven body about the second drive axis. | 06-16-2011 |
| 20110170157 | MOVING STRUCTURE AND MICRO-MIRROR DEVICE USING THE SAME - In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units. | 07-14-2011 |
| 20110181932 | LOW COST LONG-LIFE COMPACT LOW WOBBLE WIDE SCAN ANGLE TAUT-BAND RESONANT SCANNERS WITH MATCHED COEFFICIENTS OF THERMAL EXPANSION AND INTERCHANGEABLE MIRRORS - A taut-band resonant scanner is disclosed that includes an elongated band and a sub-assembly. The elongated band has a length in an elongated direction, a width in a width direction that is orthogonal to the elongated direction, and a thickness in a thickness direction that is orthogonal to both the width direction and the elongated direction, wherein the thickness is substantially smaller than the width and wherein the width direction and elongated direction define a band width/length plane. The sub-assembly is attached to a portion of the band, and includes at least one mounting structure. | 07-28-2011 |
| 20110181933 | OPTICAL SCANNER - An optical scanner capable of preventing breakage of a shaft section due to stress concentration is provided. A mirror frame | 07-28-2011 |
| 20110286069 | CONNECTING STRUCTURE FOR MICROMECHANICAL OSCILLATING DEVICES - A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion. | 11-24-2011 |
| 20120026567 | Vibrating Mirror Element and Optical Scanner - This vibrating mirror element includes a mirror portion swingable on a first axis, a driving portion, including a free end and a fixed end, for swinging the mirror portion by deformation and a shaft portion provided between the mirror portion and the driving portion to extend along the first axis. The free end of the driving portion is connected to the shaft portion, while the fixed end of the driving portion is fixed on a side of the driving portion closer to the mirror portion and in the vicinity of the shaft portion. | 02-02-2012 |
| 20120038963 | MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE - A protrusion formation hole is provided so as to pierce a support substrate. A polysilicon film as an electrical conducting material is embedded in the protrusion formation hole through an oxide silicon film. The polysilicon film partially bulges out of the protrusion formation hole toward a movable section to form a protruding section. In other words, the polysilicon film bulges out of the protrusion formation hole toward the movable section to form the protruding section. Thereby, a movable section included in MEMS can be prevented from sticking to other members. | 02-16-2012 |
| 20120140303 | MICROMECHANICAL ELEMENT MOBILE ALONG AT LEAST ONE AXIS OF ROTATION - The invention concerns a micromechanical element ( | 06-07-2012 |
| 20120320440 | Vibrating Mirror Element and Method for Manufacturing Vibrating mirror Element - There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element ( | 12-20-2012 |
| 20120320441 | Vibrating Mirror Element - This vibrating mirror element ( | 12-20-2012 |
| 20120327495 | TWO-DIMENSIONAL OPTICAL DEFLECTOR INCLUDING PIEZOELECTRIC SENSOR ON MOVABLE FRAME - In a two-dimensional optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator connected between the movable frame and the mirror and adapted to rock the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator connected between the support body and the movable frame and adapted to rock the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided on the movable frame and adapted to sense rocking vibrations of the mirror caused by the first and second piezoelectric actuators. | 12-27-2012 |
| 20130083381 | OPTICAL DEFLECTOR APPARATUS INCLUDING OPTICAL DEFLECTOR CHIP SANDWICHED BY TWO SUBSTRATES - In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and connected to the actuator. A first substrate includes second pads on a back surface of the first substrate, and an opening is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate. | 04-04-2013 |
| 20130083382 | ACTUATOR AND OPTICAL SCANNING APPARATUS - An actuator includes a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode. The insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring. | 04-04-2013 |
| 20130100515 | SEMICONDUCTOR DEVICE - Provided is technique for a semiconductor device including a substrate and a tilting plate which is tiltable relatively to the substrate, the technique being capable of effectively suppressing warpage of the tilting plate. The semiconductor device of the present specification includes a substrate and a tilting plate which is tiltable relatively to the substrate. In the semiconductor device, a rib formed of wavelike portions where a plate thickness is substantially uniform is formed on the tilting plate. | 04-25-2013 |
| 20130120819 | Scanning Projector with Non-Rectangular Display - A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the fast-scan axis is controlled by a fast-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. A fast-scan drive signal is generated that causes the scanning mirror to oscillate at a resonant frequency with a varying amplitude. | 05-16-2013 |
| 20130141769 | MICRO STRUCTURE, MICRO ACTUATORS, METHOD OF FABRICATING MICRO STRUCTURE AND MICRO ACTUATORS - A method for fabricating a micro-structure is provided, which can simply and easily fabricate the micro-structure by a batch process of directly forming a highly aligned nano-material array on a micro-structure to be used as an adhesive material during plastic deformation of the micro-structure without the use of existing complicated fabrication process. | 06-06-2013 |
| 20130163061 | Vibrating Mirror Element - A vibrating mirror element including a detection electrode to detect driving and capable of being easily manufactured is provided. This vibrating mirror element includes a mirror portion and a driving portion driving the mirror portion, and the driving portion has a drive electrode to deform the driving portion by application of a voltage to drive the driving portion and a detection electrode to detect the amount of deformation of the driving portion, both arranged therein. | 06-27-2013 |
| 20130176607 | OPTICAL SCANNING DEVICE - An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion. | 07-11-2013 |
| 20130176608 | ELECTOACTIVE POLYMER ACTUATOR - An actuator comprises an electroactive polymer layer ( | 07-11-2013 |
| 20130301103 | OPTICAL DEFLECTOR INCLUDING PIEZOELECTRIC SENSOR INCORPORATED INTO OUTERMOST PIEZOELECTRIC CANTILEVER - In an optical deflector including a mirror, a movable frame supporting the mirror, a first piezoelectric actuator for rocking the mirror with respect to a first axis of the mirror, a support body supporting the movable frame, and a second piezoelectric actuator for rocking the mirror through the movable frame with respect to a second axis of the mirror, at least one piezoelectric sensor is provided for sensing rocking vibrations of the mirror caused by the first and second piezoelectric actuators. The second piezoelectric actuator includes a pair of meander-type pieoelectric actuators opposite to each other with respect to the first axis. Each of the second meander-type piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every cantilever and connected from the support body to the movable frame in parallel with the first axis. The piezoelectric sensor is incorporated into an outermost one of the piezoelectric cantilevers. | 11-14-2013 |
| 20140016171 | DIELECTRIC MICROSTRUCTURE FOR USE IN MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES AND METHOD OF FORMING SAME - Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems. | 01-16-2014 |
| 20140071512 | OPTICAL DEFLECTOR INCLUDING MIRROR WITH RECESSED RIB ON ITS REAR SURFACE - In an optical deflector including a mirror, a rib formed at an outer circumference of the mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror and coupled between the support frame and the mirror, and a pair of actuators arranged between the support frame and the torsion bar, a recess opposing the torsion bar is formed within the rib. | 03-13-2014 |
| 20140126034 | VARIABLE SHAPE MIRROR AND METHOD OF MANUFACTURING THE SAME - In the method of manufacturing a micro structure including a membrane in a first substrate, a movable portion, a movable comb electrode, a suppressing unit, a support portion, and a fixed comb electrode are formed, and the movable portion of the first substrate and a second substrate are bonded. Then, the bonded second substrate is processed to form a membrane such as a reflecting portion. The movable comb electrode is supported by the movable portion and extends in a direction parallel to the membrane surface. The suppressing unit suppresses displacement of the movable comb electrode and the movable portion in a direction other than a direction normal to the membrane surface. The fixed comb electrode is supported by the support portion and extends in the direction parallel to the membrane surface. The fixed comb electrode is alternately arranged with respect to the movable comb electrode with a gap therebetween. | 05-08-2014 |
| 20140268271 | OPTICAL DEFLECTOR INCLUDING MEANDER-TYPE PIEZOELECTRIC ACTUATORS COUPLED BY CROSSING BARS THEREBETWEEN - In an optical deflector including a mirror, a fixed frame surrounding the mirror, and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to the mirror, for rocking the mirror around an axis on a plane of the fixed frame, the first piezoelectric actuator includes a plurality of first piezoelectric cantilevers folded at first folded portions and coupled to the fixed frame, and the second piezoelectric actuator includes a plurality of second piezoelectric cantilevers folded at second folded portions and coupled to the fixed frame. The optical deflector further includes at least one first crossing bar coupled between one of the first folded portions and one of the second folded portions symmetrically located with respect to the mirror. | 09-18-2014 |
| 20140340726 | DEVICE COMPRISING A VIBRATABLY SUSPENDED OPTICAL ELEMENT - The underlying invention presents a device which connects a vibratably suspended optical element to at least two actuators mounted fixedly on one side via curved spring elements, wherein the actuators are implemented to cause the vibratably suspended optical element to vibrate via the curved spring elements. Both the actuators and the entire system may be implemented to be more robust and be operated more reliably due to the curved shaping of the spring elements. | 11-20-2014 |
| 20150062683 | OPTICAL DEFLECTION DEVICE AND IMAGE FORMING APPARATUS - An optical deflection device includes a mirror having a reflection face for deflecting light that enters the reflection face; and a support member to support the mirror including a torsion bar having one end being continuously connected to the mirror; a beam being continuously connected to another end of the torsion bar; and a plurality of piezoelectric elements disposed on the beam including a first piezoelectric element and a second piezoelectric element. | 03-05-2015 |
| 20150062684 | CONTROLLER FOR ACTUATING A MICROMECHANICAL ACTUATOR, ACTUATING SYSTEM FOR ACTUATING A MICROMECHANICAL ACTUATOR, MICRO-MIRROR SYSTEM AND METHOD FOR ACTUATING A MICROMECHANICAL ACTUATOR - A controller for actuating a micromechanical actuator, including a first signal input which is designed to receive a reference signal, a second signal input which is designed to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, a first controller element which is designed to filter and/or to attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered and/or attenuated reference signal, a second controller element which is designed to modify the received measuring signal in order to minimize the quality of the first mode of the received measuring signal and to output a modified measuring signal, a third controller element which is designed to minimize the deviation between the filtered and/or attenuated reference signal and the received measuring signal and to output a minimized reference signal, a fourth controller element which is designed to modify the bandwidth of the received measuring signal and to subtract it from the minimized reference signal, which makes up the control signal. Furthermore, a corresponding actuating system, a corresponding micro-mirror system and a corresponding method are described. | 03-05-2015 |
| 20150077824 | OPTICAL DEFLECTING MIRROR DEVICE HAVING FIGURE "8"-SHAPED RIB AND OPTICAL DEFLECTOR - An optical deflecting mirror device includes a circular or elliptical mirror with a reflective front surface, and a figure “8”-shaped reinforcement rib provided on a rear surface of the mirror symmetrically along a rocking axis of the mirror. The figure “8”-shaped reinforcement rib includes two ring-shaped reinforcement ribs coupled to each other along the rocking axis. | 03-19-2015 |
| 20150109650 | ACTUATOR FOR MOVING A MICRO MECHANICAL ELEMENT - The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as minor, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator. | 04-23-2015 |
