Entries |
Document | Title | Date |
20090086301 | DISPLAY ELEMENT HAVING FILTER MATERIAL DIFFUSED IN A SUBSTRATE OF THE DISPLAY ELEMENT - Optical filter functionality is incorporated into a substrate of a display element thereby decreasing the need for a separate thin film filter and, accordingly, reducing a total thickness of a filtered display element. Filter functionality may be provided by any filter material, such as pigment materials, photoluminescent materials, and opaque material, for example. The filter material may be incorporated in the substrate at the time of creating the substrate or may be selectively diffused in the substrate through a process of masking the substrate, exposing the substrate to the filter material, and heating the substrate in order to diffuse the filter material in the substrate. | 04-02-2009 |
20090153936 | FIBER BASED MEMS - MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be controlled by adjusting the linkage between multiple fibers with weak coupling (e.g. base, tip, in-between). Driving mechanisms include base-forcing (magnetics, piezo, electrostatics) or tip forcing (magnetics). Mirrors may be formed on free ends of cantilevers to form optical scanners. | 06-18-2009 |
20090185254 | Optical scanning element, optical scanning device, optical scanning display device, and retinal scanning display - An optical scanning element includes: a first member which is constituted of a mirror portion, a mirror supporting portion and a frame portion; a second member which fixes and holds the frame portion of the first member thereon; and a piezoelectric body. The frame portion includes a beam portion and fixing portions which are positioned at both ends of the beam portion, the mirror supporting portion is connected to the beam portion at a connection point, and the piezoelectric body is fixedly mounted on the frame portion in a state that the piezoelectric body extends toward the connection point of the beam portion from the fixing portion to a position not over the connection point thus extending over the beam portion and the fixing portion. Due to such constitution, a swinging angle of the mirror portion can be increased thus enlarging a scanning angle. | 07-23-2009 |
20090190197 | Device control method and apparatus - A method of controlling an element of an array of individually controllable elements. The method includes varying a frequency of a driving voltage with which the element is driven. | 07-30-2009 |
20090219599 | CHANGEABLE APPARATUS FOR SINGLE OR RASTER SCANNING USING POLYGON MIRROR - A changeable apparatus for scanning a symbol is disclosed wherein by selectively changing the position of a bending mirror ( | 09-03-2009 |
20090237766 | SURFACE LIGHT EMITTING APPARATUS EMITTING LASER LIGHT - A surface light emitting apparatus capable of providing uniform illumination while efficiently using a laser light. The apparatus comprises a light source section that includes at least one light source which emits laser beam; an optical element section that includes at least one diffractive optical element section that modifies a wavefront of the laser beam emitted from the light source section by diffraction action; and an optical guiding section that guides from an incidence surface of the optical guiding section the laser beam emitted from the diffraction optical section and emits the laser beam from a radiation surface of the optical guiding section. | 09-24-2009 |
20090251756 | MOVABLE BODY APPARATUS AND OPTICAL DEFLECTOR USING THE MOVABLE BODY APPARATUS - A movable body apparatus includes a vibratory system, a vibration detecting portion, a driving portion, and a controlling portion. The vibratory system has a resonance frequency and a movable body capable of being reciprocally and rotatably vibrated. The vibration detecting portion detects a vibration condition of the movable body. The driving portion drives the vibratory system with a drive signal. The controlling portion regulates the drive signal supplied to the driving portion. The controlling portion regulates a driving frequency of the drive signal so that a delay phase difference between the drive phase of the drive signal and the vibration phase of the vibratory system obtained from detection result of the vibration detecting portion, both obtained when the vibratory system is vibrated at a predetermined frequency, is maintained. | 10-08-2009 |
20090279157 | OPTICAL DEVICE, IMAGE READING APPARATUS AND ADJUSTING METHOD FOR OPTICAL DEVICE - An optical device equipped with a mirror which reflects light, include a plurality of first receiving parts that touch one face of one of ends in a lengthwise direction of the mirror; a plurality of first pressing parts that touch a face opposing to the face to which the first receiving parts touch, and press the mirror with elastic force toward the first receiving parts | 11-12-2009 |
20090296180 | Mirror drive apparatus and imaging apparatus - A mirror drive apparatus includes: a movable unit including a mirror used to switch an optical path in an imaging apparatus; and a drive mechanism that switches the attitude of the movable unit from a first attitude to a second attitude by relatively moving a specific member along a predetermined section defined by an edge of the movable unit from a start point to an end point of the predetermined section, wherein the movable unit includes a protrusion that protrudes from an extension line toward the specific member, the extension line obtained by extending the predetermined section beyond the end point. | 12-03-2009 |
20090310203 | LIGHT SCANNING UNIT AND IMAGE FORMING APPARATUS COMPRISING THE SAME - A light scanning unit includes: a light source unit; a polygon mirror for deflecting and scanning light emitted from the light source unit, in a main scanning direction, and having a plurality of deflection surfaces and a plurality of edges at which adjacent deflection surfaces meet one another; an image forming optical system for condensing the deflected light; and a synchronization detection optical system for detecting a portion of light that is divided and reflected at an edge of the polygon mirror. The light scanning unit may be incorporated into an image forming apparatus. | 12-17-2009 |
20100027092 | Magnetic mirror air bearing for Michelson interferometer with lateral motion - The invention claimed is a novel magnetic mirror air bearing for a Michelson interferometer with lateral motion. A precise kinematic mount is used in combination with magnetic fields wherein current can be applied on a centerline to move a piston and mirror laterally without pitch and yaw so as to effect accurate light beam reflection regardless of distance of lateral movement within a defined space. The assembly is able to operate across extended temperature ranges by utilizing materials which expand and contract at similar rates, and contains a thermalizing cavity which will thermalize the gas to avoid temperature induced artifacts. | 02-04-2010 |
20100060967 | LIGHT SCANNING UNIT, IMAGE FORMING APPARATUS HAVING THE SAME, AND SYNCHRONIZING SIGNAL CALIBRATING METHOD OF THE LIGHT SCANNING UNIT - A light scanning unit includes: a light source; a beam deflector to form forward direction and reverse direction scanning lines on an image section and first and second non-image sections respectively disposed at opposite sides of the image section; a reflecting member to reflect the light beam input from the beam deflector; a light detector to receive a first light beam directly input from the beam deflector and a second light beam input via the reflecting member; a control unit to determine whether the scanning line is a forward direction scanning line or a reverse direction scanning line based on signals respectively corresponding to the first and second light beams detected in the light detector, and to control the light source so that a light beam including image information corresponding to a scanning direction of the scanning line can be emitted; and a synchronization adjusting unit to correct an alignment error between the forward direction scanning line and the reverse direction scanning line due to at least one of respective disposition tolerances of the light detector and the reflecting member and a resonance frequency change of the beam deflector correlating to a surrounding environment change. | 03-11-2010 |
20100079836 | Scanning Mirror Control Having Least Mean Square Tone Adder - A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system includes least mean square (LMS) tone adders that determine harmonically related signals that when combined produce a scanning mirror drive signal. An inner loop of the control system compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonically related signals. | 04-01-2010 |
20100103493 | Optical switch controller and movable body controller - In an optical switch controller, in order that residual vibration at movement control of a movable body such as a tilt mirror can be reduced and controlled with high accuracy, a processing unit outputs a driving signal for controlling the angle of the tilt mirror, the driving signal is D/A converted by a D/A converter and then is changed to a high-voltage signal by a high-voltage amplifier to be supplied to the tilt mirror, the electrostatic capacity of the tilt mirror changes corresponding to angle change of the tilt mirror, a mirror-angle detecting unit detects the electrostatic capacity and feeds back it as a correction value to a processing unit, and the processing unit corrects the driving signal using a correction value obtained when the angle of the tilt mirror is actually changed. | 04-29-2010 |
20100142022 | Methods and apparatuses for increasing available power in optical systems - A diffractive optical element (DOE) is included in an apparatus for combining a plurality of laser beams. The DOE combines the plurality of laser beams to generate a plurality of spatially distributed laser beams. The DOE is one of movable or stationary. The spatially distributed laser beams are usable to pattern a workpiece. | 06-10-2010 |
20100149615 | Vibrating Mirror Element - This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view. | 06-17-2010 |
20100172006 | OSCILLATOR DEVICE AND OPTICAL DEFLECTOR USING THE SAME - An oscillator device includes at least one movable element supported for oscillatory motion around a rotational axis, and a damper member for applying a damping function to the oscillatory motion of the movable element, the damper member being provided along at least a portion of a locus plane defined by an edge of the movable element during oscillatory motion thereof, so that, based on a viscosity of a fluid which is present between the edge of the movable element and a portion of the damper member opposed to the edge of the movable element, the damping function is applied to applied to the oscillatory motion of the movable element. | 07-08-2010 |
20100202031 | MOTION-COMPENSATED LIGHT-EMITTING APPARATUS - A light-emitting apparatus, for enabling a beam of light to be projected on a desired target located a distance away to project the beam on the desired target without any or substantially any undesired movement. The apparatus may include a housing, a light generating device located within the housing and operable to generate a beam of light, a sensing device or devices for sensing an undesired action of the housing, a control circuit operable to provide a control signal corresponding to the sensed undesired action, and a drive device operable to counter act all or at least some of the undesired action of said housing in accordance with said control signal. The sensing device or devices may be one or more gyroscopes, accelerometers or other such devices. | 08-12-2010 |
20100208322 | Flexure Actuator - Implementations of actuators that use flexures to provide support to the actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. | 08-19-2010 |
20100238533 | OPTICAL DEVICE, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS - An optical device includes: an axis member including a plate-shaped attachment portion and an elastic support portion that swingably supports the attachment portion around a predetermined axis; a rigid member attached to one side of the attachment portion; and a light reflecting member attached to the other side of the attachment portion and having an area larger than that of the attachment portion. | 09-23-2010 |
20100245964 | MICRO-STRUCTURE - A micro-structure produced by utilizing a MEMS technology or the like includes: a frame including a portion having a first layer and a portion having a second layer on the lower side of the first layer; a movable body including a portion having the first layer and a portion having the second layer; and at least one swing supporting portion which is having the first layer, and connects the portion having the first layer in the frame and the portion having the first layer in the movable body, to support the movable body to be capable of swinging. A frame side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the frame, and a movable body side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the movable body. | 09-30-2010 |
20100296145 | OPTICAL SCANNER - A pair of substrate portions each being tabular-shaped has side portions located closer to a mirror portion and connected, at both ends thereof in the oscillation axis direction, by a pair of supporting beam portions, and also has outer side portions fixed to a fixing member. An excitation device is formed on at least one substrate portion. The pair of substrate portions is disposed symmetrically in the direction perpendicular to the oscillation axis. A pair of torsion beam portions extends outward from two opposite sides of the mirror portion on the oscillation axis, and each is connected to the center of each supporting beam portion in a longitudinal direction. An edge of the piezoelectric element on an outer side thereof in the direction perpendicular to the oscillation axis is spaced from an outer side portion of the at least one substrate portion in a direction closer to the mirror portion. | 11-25-2010 |
20110085222 | WAVELENGTH SELECTIVE SWITCH AND OPTICAL TRANSFER DEVICE - A wavelength selective switch includes a polarization controller to control a polarization controller configured to control a polarization plane of a first optical signal as wavelength-multiplexed light input through a first input port, and control a polarization plane of a second optical signal as wavelength-multiplexed light input through a second input port such that the polarization plane of the second optical signal is aligned in a direction perpendicular to the polarization plane of the first optical signal, a demultiplexer to demultiplex optical signals multiplexed in the first and the second optical signals, a polarization separator to separate, an optical collector to collect the optical signals separated by the polarization separator, an optical signal reflector to reflect each of the optical signals collected by the optical collector; and a reflection controller to control the optical signal reflector in accordance with an incident position of the optical signal. | 04-14-2011 |
20110096384 | METHOD AND APPARATUS FOR COMMUNICATING RADIATION PRESSURE PROVIDED BY A LIGHT WAVE - In one aspect of the present invention, a method is provided for communicating radiation pressure provided by a light wave. The method entails positioning a reflective prism ( | 04-28-2011 |
20110141537 | LIGHT SCANNING APPARATUS - In the light scanning apparatus, flatness of a mirror section can be improved. The light scanning apparatus comprises: a substrate having an opening part; a mirror section being located in the opening part of the substrate, the mirror section having side parts, which are held by a beam; and a vibration source being provided on the substrate, the vibration source bending the substrate so as to swing the mirror section on the beam which acts as a pivot shaft. The mirror section swung by the vibration source reflects an irradiated light for scanning operation. The mirror section is constituted by a metal base plate and a mirror surface member, which is bonded to the metal base plate by an elastic adhesive. | 06-16-2011 |
20110222136 | WAVELENGTH SELECTIVE SWITCH - A wavelength selective switch according to the present invention includes at least one input port for inputting wavelength-multiplexed light, a dispersive element which receives the light from the input port, and disperses the received light, a light converging element which converges dispersed light which has been dispersed for each wavelength, a light deflecting member having a plurality of reflecting optical elements which are capable of independently deflecting each dispersed light from the light converging element, and at least one output port which receives light which has been deflected by the light deflecting member. An area having a reflectivity higher than a central area of the reflecting surface is formed in at least a part of an end portion of the reflecting surface in the dispersive direction by the dispersive element. | 09-15-2011 |
20110292482 | WAVELENGTH SELECTIVE SWITCH - A wavelength selective switch includes a light input output portion having an input port and an output port for a wavelength-multiplexed light, which are arranged in an array form in a first direction, a light dispersive unit which separates the wavelength-multiplexed light which has been input from the input port, into respective signal wavelengths, a condenser element which condenses light which has been separated into the signal wavelengths, and a light deflective element array which deflects the signal light in the first direction such that, respective signal wavelength light which has been condensed by the condenser element is switched to a desired output port. In such wavelength selective switch, when m is let to be an integer, the light input output portion is divided into m number of groups, and the light deflective element array is arranged in m number of rows in the first direction to correspond with the m number of groups of the light input output portion, and the light dispersive unit is in common for the m number of groups of the light input output portion. | 12-01-2011 |
20120236383 | ACTUATOR, METHOD FOR MANUFACTURING ACTUATOR, AND OPTICAL SCANNER - An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion. | 09-20-2012 |
20120300277 | LASER SPECKLE REDUCTION FOR IMAGING SYSTEMS - A speckle reduction system includes an optical system and one or more beam steerers for directing light to successive off-axis areas around a diffuser and for reorienting and recentering distributions of the light from each of the successive off-axis areas of the diffuser along a common axis. | 11-29-2012 |
20130016414 | LASER SYSTEM FOR CREATING A LASER MARKING ON A SUBSTRATEAANM Dang; Lieu-KimAACI GamsAACO CHAAGP Dang; Lieu-Kim Gams CHAANM Wuersch; ChristophAACI WerdenbergAACO CHAAGP Wuersch; Christoph Werdenberg CH - A laser system ( | 01-17-2013 |
20130148184 | CONFOCAL OPTICAL SCANNER AND CONFOCAL MICROSCOPE - A confocal optical scanner includes: a plurality of condenser elements each configured to concentrate illumination light to be applied on a sample to produce fluorescence from the sample; a plurality of optical scanning units including a plurality of openings each configured to allow the illumination light concentrated by the condenser element to pass the opening, the optical scanning units each configured to scan the sample with the illumination light that has passed through the opening; a moving mechanism configured to move the optical scanning units to select one of the optical scanning units; and an incident-angle adjusting part configured to adjust the incident angle of the illumination light incident on the optical scanning unit selected from the optical scanning units according to the selected optical scanning unit. | 06-13-2013 |
20130286457 | Device for Forming an Interference Grating on a Sample - The invention relates to a device for forming an interference grating on a sample, the device comprising a laser emitting a light beam of wavelength λ, a beam splitter plate splitting the beam emitted by the laser into first and second beams ( | 10-31-2013 |
20140071511 | WAVELENGTH SELECTIVE SWITCH - In a wavelength selective switch, respective values are set to satisfy an expression (θ | 03-13-2014 |
20140078567 | CORRECTION OF OPTICAL ELEMENTS BY CORRECTION LIGHT IRRADIATED IN A FLAT MANNER - The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°. | 03-20-2014 |
20140133003 | MICRO OPTICAL SWITCH DEVICE, IMAGE DISPLAY APPARATUS INCLUDING THE SAME, AND METHOD OF MANUFACTURING THE MICRO OPTICAL SWITCH DEVICE - A micro optical switch device, an image display apparatus including the same, and a method of manufacturing the micro optical switch device are provided. The micro optical switch device includes a substrate; a first electrode disposed on the substrate and having a plurality of openings; a second electrode disposed above and spaced apart from the first electrode, and having a plurality of openings; and support units disposed on the substrate and configured to support the second electrode, wherein the support units include deformation preventing portions protruding beyond a top surface of the second electrode | 05-15-2014 |
20140168739 | OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - The invention relates to an optical system of a microlithographic projection exposure apparatus, comprising a mirror arrangement having a plurality of mirror elements which are adjustable independently of one another for the purpose of changing an angular distribution of the light reflected by the mirror arrangement, a polarization-influencing optical arrangement having at least one polarization-influencing component, wherein, by displacing the polarization-influencing component, a degree of overlap between the polarization-influencing component and the mirror arrangement can be set in a variable manner, and a deflection device having a respective reflection surface upstream and downstream of the mirror arrangement relative to the light propagation direction. | 06-19-2014 |
20140204439 | Fiber Stabilization of Optical Path Differences (OPD) Over a Wide Bandwidth Frequency Range for Extended Periods of Time - The disclosed method for fiber stabilization of optical path differences involves splitting a laser produced optical beam into a first and second optical beam. Further, the method involves circulating the first optical beam to an adjustable optical telescope, and circulating the second optical beam to a reference optical telescope. Also, the method involves splitting the first circulated beam into the first optical beam and the adjustable optical telescope beam, and splitting the second circulated beam into the second optical beam and the reference optical telescope beam. Additionally, the method involves inputting, into an interferometer, the first and second optical beams; and outputting, from the interferometer, a sinusoidal signal. Also, the method comprises filtering the sinusoidal signal to form a high frequency and low frequency signal. Further, the method involves controlling a translation stage by using the low frequency signal, and controlling a fiber stretcher by using the high frequency signal. | 07-24-2014 |
20140355094 | MICROMECHANICAL STRUCTURE AND CORESPONDING MANUFACTURING METHOD - A micromechanical structure includes a substrate having an upper side and a lower side, the substrate having a first region and a second region adjacent thereto, the upper side being fashioned in the first region as a mirror region that reflects light. In the second region on the upper side of the substrate, a network-type structure and/or a web-type structure is fashioned, such that the second region is essentially non-light-reflective. | 12-04-2014 |
20150022872 | METHOD OF MANUFACTURING A MEMS MICRO-MIRROR ASSEMBLY - According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly ( | 01-22-2015 |
20150029572 | ADJUSTABLE GRID TRACKING TRANSMITTERS AND RECEIVERS - Optical telecommunication receivers and transmitters are described comprising dispersive elements and adjustable beam steering elements that are combined to provide optical grid tracking to adjust with very low power consumption to variations in the optical grid due to various changes, such as temperature fluctuations, age or other environmental or design changes. Thus, high bandwidth transmitters or receivers can be provides with low power consumption and/or low cost designs. | 01-29-2015 |
20150062682 | CORRECTION OF OPTICAL ELEMENTS BY CORRECTION LIGHT IRRADIATED IN A FLAT MANNER - The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°. | 03-05-2015 |
20150070741 | Color Dependent Aperture Stop - Optical systems are provided that include illumination sources, micro-mirror array optical modulators, and an optical element. The micro-mirror array optical modulators can selectively modulate light beams, redirect light by diffraction and reflection, and provide an output modulated light beam that exhibits a diffraction handedness dependent on the spectral bandwidth of the light incident thereupon. The optical element has a color dependent aperture that defines portions of output modulated light beams that are transmitted and remaining portions that are blocked. An efficiency and contrast of each the output modulated light beams acquired by the optical element can be independently determined by a narrow spectral bandwidth of each of the light beams, the spectral characteristics of the color dependent aperture, and the diffraction handedness of the micro-mirror array optical modulators for the associated spectral bandwidth. | 03-12-2015 |
20150309304 | LASER BEAM DIRECTING SYSTEM AND METHOD FOR ORIENTING OPTICAL COMPONENTS OF THE LASER BEAM DIRECTING SYSTEM - A laser beam directing system including a first deflection mirror which is connected with an elevation axis of the laser beam directing system; a primary laser which is coupleable into telescope optics by the first deflection mirror; a first auxiliary laser that is oriented in parallel to an azimuth rotation axis of the laser beam directing system; a second auxiliary laser that is oriented parallel to an elevation rotation axis of the laser beam directing system; and a first detector, wherein the first auxiliary laser, the second auxiliary laser and the first detector are arranged and oriented in the laser beam directing system so that the first deflection mirror is alignable by comparing beams of the first auxiliary laser and the second auxiliary laser impacting the first detector so that a beam from the primary laser is coupleable into the telescope optics parallel to the elevation rotation axis. | 10-29-2015 |
20150323793 | HEAD-UP DISPLAY DEVICE - A head-up display device is for projecting display light onto a projection member. The head-up display device includes a display, a reflecting member, an outside light prevention portion, and a state controller. The display emits the display light. The reflecting member reflects the display light emitted from the display in a reflection direction to project the display light onto the projection member. The outside light prevention portion changes between an entering state in which outside light is able to enter the display and a preventing state in which outside light is prevented from entering the display. The state controller controls the outside light prevention portion to be (i) in the entering state when the display light is projected onto the projection member and (ii) in the preventing state when the display light is not projected onto the projection member. | 11-12-2015 |
20150355469 | LIGHT OPERATION DEVICE - A light operation device includes: an light input and output port; an light-operating element reflecting a light input from any one of the ports of the light input and output port and outputting the reflected light to any one of the ports of the light input and output port; a condensing lens system disposed between the light input and output port and the light-operating element and optically-coupling the light input and output port with the light-operating element; an anamorphic optical system disposed between the light input and output port and the condensing lens system and expanding a beam diameter of the light input from a side of the light input and output port in a beam-diameter-expanding direction. In the condensing lens system, a first focal distance in the beam-diameter-expanding direction and a second focal distance in a direction perpendicular to the beam-diameter-expanding direction differ from each other. | 12-10-2015 |
20160004074 | PUPIL SHAPING OPTICAL SYSTEM FOR LITHOGRAPHY MACHINE AND METHOD FOR GENERATING OFF-AXIS ILLUMINATION MODES - A lithography pupil shaping optical system and method for generating off-axis illumination mode. The invention is composed of illumination mode generation unit, rotatable wave plate, polarization beam splitter unit, ring I generation unit and ring II generation unit. Through selecting corresponding diffractive optical element and appropriate adjustment, this invention can generate various illumination modes including single ring illumination mode and double ring illumination mode. The intensity at pupil plane and the inner and outer diameters of the off-axis illumination mode can be adjusted continuously. | 01-07-2016 |
20160033760 | Electro-Optical Device, Manufacturing Method for Electro-Optical Device, and Electronic Apparatus - An electro-optical device includes a substrate, a mirror support pillar extending in a direction in which the pillar intersects with a surface of the substrate, and a mirror that is so disposed as to be distanced from the substrate and to be capable of being displaced with respect to the mirror support pillar. The mirror has a reflective metal film, and a reflection enhancing lamination film that covers a portion including a surface and a side surface of the reflective metal film. | 02-04-2016 |