| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 438570000 | FORMING SCHOTTKY JUNCTION (I.E., SEMICONDUCTOR-CONDUCTOR RECTIFYING JUNCTION CONTACT) | 43 |
| 20110263112 | METHOD FOR FORMING A SCHOTTKY DIODE HAVING A METAL-SEMICONDUCTOR SCHOTTKY CONTACT - A method for forming a metal-semiconductor Schottky contact in a well region is provided. The method includes forming a first insulating layer overlying a shallow trench isolation in the well region; and removing a portion of the first insulating layer such that only the well region and a portion of the shallow trench isolation is covered by a remaining portion of the first insulating layer. The method further includes forming a second insulating layer overlying the remaining portion of the first insulating layer and using a contact mask, forming a contact opening in the second insulating layer and the remaining portion of the first insulating layer to expose a portion of the well region. The method further includes forming the metal-semiconductor Schottky contact in the exposed portion of the well region by forming a metal layer in the contact opening and annealing the metal layer. | 10-27-2011 |
| 20120115319 | CONTACT PAD - The present disclosure relates to forming multi-layered contact pads for a semiconductor device, wherein the various layers of the contact pad are formed using one or more thin-film deposition processes, such as an evaporation process. Each contact pad includes an adhesion layer, which is formed over the device structure for the semiconductor device; a titanium nitride (TiN) barrier layer, which is formed over the adhesion layer; and an overlay layer, which is formed over the barrier layer. At least the titanium nitride (TiN) barrier layer is formed using an evaporation process. | 05-10-2012 |
| 20120122307 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES - A method of manufacturing a semiconductor device is disclosed. The method includes forming a first trench and a second trench in an n-type substrate surface, the first trenches being spaced apart from each other, the second trench surrounding the first trenches, the second trench being wider than the first trench. The method also includes forming a gate oxide film on the inner surfaces of the first and second trenches, and depositing an electrically conductive material to the thickness a half or more as large as the first trench width. The method further includes removing the electrically conductive material using the gate oxide film as a stopper layer, forming an insulator film thicker than the gate oxide film, and polishing the insulator film by CMP for exposing the n-type substrate and the electrically conductive material in the first trench. | 05-17-2012 |
| 20120149183 | SCHOTTKY DIODE SWITCH AND MEMORY UNITS CONTAINING THE SAME - A switching element that includes a first semiconductor layer, the first semiconductor layer having a first portion and a second portion; a second semiconductor layer, the second semiconductor layer having a first portion and a second portion; an insulating layer disposed between the first semiconductor layer and the second semiconductor layer; a first metal contact in contact with the first portion of the first semiconductor layer forming a first junction and in contact with the first portion of the second semiconductor layer forming a second junction; a second metal contact in contact with the second portion of the first semiconductor layer forming a third junction and in contact with the second portion of the second semiconductor layer forming a fourth junction, wherein the first junction and the fourth junction are Schottky contacts, and the second junction and the third junction are ohmic contacts. | 06-14-2012 |
| 20130217216 | Unguarded Schottky Barrier Diodes with Dielectric Underetch at Silicide Interface - One embodiment of the invention relates to an unguarded Schottky barrier diode. The diode includes a cathode that has a recessed region and a dielectric interface surface that laterally extends around a perimeter of the recessed region. The diode further includes an anode that conforms to the recessed region. A dielectric layer extends over the dielectric interface surface of the cathode and further extends over a portion of the anode near the perimeter. Other devices and methods are also disclosed. | 08-22-2013 |
| 20130252408 | METHOD FOR FABRICATING SCHOTTKY DEVICE - A method for fabricating a Schottky device includes the following sequences. First, a substrate with a first conductivity type is provided and an epitaxial layer with the first conductivity type is grown on the substrate. Then, a patterned dielectric layer is formed on the epitaxial layer, and a metal silicide layer is formed on a surface of the epitaxial layer. A dopant source layer with a second conductivity type is formed on the metal silicide layer, followed by applying a thermal drive-in process to diffuse the dopants inside the dopant source layer into the epitaxial layer. Finally, a conductive layer is formed on the metal silicide layer. | 09-26-2013 |
| 20140349470 | SCHOTTKY DIODE AND METHOD FOR FABRICATING THE SAME - A Schottky diode includes a deep well formed in a substrate, an isolation layer formed in the substrate, a first conductive type guard ring formed in the deep well along an outer sidewall of the isolation layer and located at a left side of the isolation layer, a second conductive type well formed in the deep well along the outer sidewall of the isolation layer and located at a right side of the isolation layer, an anode electrode formed over the substrate and coupled to the deep well and the guard ring, and a cathode electrode formed over the substrate and coupled to the well. A part of the guard ring overlaps the isolation layer. | 11-27-2014 |
| 20150132932 | SEMICONDUCTOR DEVICE WITH SELECTIVELY ETCHED SURFACE PASSIVATION - A semiconductor device includes a semiconductor substrate configured to include a channel, a gate supported by the semiconductor substrate to control current flow through the channel, a first dielectric layer supported by the semiconductor substrate and including an opening in which the gate is disposed, and a second dielectric layer disposed between the first dielectric layer and a surface of the semiconductor substrate in a first area over the channel. The second dielectric layer is patterned such that the first dielectric layer is disposed on the surface of the semiconductor substrate in a second area over the channel. | 05-14-2015 |
| 20160071936 | METHOD FOR PRODUCING A SCHOTTKY DIODE ON A DIAMOND SUBSTRATE - A method for producing a Schottky diode, including the following steps: oxygenating the surface of a semiconductive layer of monocrystalline diamond, in such a way as to replace hydrogen surface terminations of the semiconductive layer with oxygen surface terminations; and forming, by physical vapour deposition, a first conductive layer of zirconium or indium-tin oxide on the surface of the semiconductive layer. | 03-10-2016 |
| 438571000 | Combined with formation of ohmic contact to semiconductor region | 14 |
| 20080299751 | SCHOTTKY DIODE AND METHOD THEREFOR - In one embodiment, a Schottky diode is formed on a semiconductor substrate with other semiconductor devices and is also formed with a high breakdown voltage and a low forward resistance. | 12-04-2008 |
| 20110177684 | METHOD OF MANUFACTURING A JUNCTION BARRIER SCHOTTKY DIODE WITH DUAL SILICIDES - An integrated circuit, including a junction barrier Schottky diode, has an N type well, a P-type anode region in the surface of the well, and an N-type Schottky region in the surface of the well and horizontally abutting the anode region. A first silicide layer is on and makes a Schottky contact to the Schottky region and is on an adjoining anode region. A second silicide layer of a different material than the first silicide is on the anode region. An ohmic contact is made to the second silicide on the anode region and to the well. | 07-21-2011 |
| 20110256699 | METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE - Provided is a method for manufacturing a silicon carbide semiconductor device which is capable of obtaining the silicon carbide semiconductor device having a high forward current and a low reverse leakage current by a simple method. The method for manufacturing a silicon carbide semiconductor device includes the steps of: forming a film made of a first electrode material on one surface of a silicon carbide substrate, and forming an ohmic electrode by performing heat treatment at a temperature range of 930 to 950° C.; and forming a film made of a second electrode material on the other surface of the silicon carbide substrate, and forming a Schottky electrode by performing heat treatment. | 10-20-2011 |
| 20120122308 | METHOD OF MANUFACTURING JUNCTION BARRIER SCHOTTKY DIODE WITH DUAL SILICIDES - An integrated circuit, including a junction barrier Schottky diode, has an N type well, a P-type anode region in the surface of the well, and an N-type Schottky region in the surface of the well and horizontally abutting the anode region. A first silicide layer is on and makes a Schottky contact to the Schottky region and is on an adjoining anode region. A second silicide layer of a different material than the first silicide is on the anode region. An ohmic contact is made to the second silicide on the anode region and to the well. | 05-17-2012 |
| 20120302051 | MANUFACTURING METHOD OF SILICON CARBIDE SEMICONDUCTOR DEVICE - A silicon oxide film is formed on an epitaxial layer by dry thermal oxidation, an ohmic electrode is formed on a back surface of a SiC substrate, an ohmic junction is formed between the ohmic electrode and the back surface of the SiC substrate by annealing the SiC substrate, the silicon oxide film is removed, and a Schottky electrode is formed on the epitaxial layer. Then, a sintering treatment is performed to form a Schottky junction between the Schottky electrode and the epitaxial layer. | 11-29-2012 |
| 20130122696 | METHOD OF MANUFACTURING SCHOTTKY BARRIER DIODE - A silicon carbide substrate having a main face is prepared. By applying thermal oxidation to the main face of the silicon carbide substrate at a first temperature, an oxide film is formed on the main face. After the oxide film is formed, heat treatment is applied to the silicon carbide substrate at a second temperature higher than the first temperature. An opening exposing a portion of the main face is formed at the oxide film. A Schottky electrode is formed on the main face exposed by the opening. | 05-16-2013 |
| 20140038397 | MANUFACTURING METHOD OF SILICON CARBIDE SEMICONDUCTOR DEVICE - A silicon oxide film is formed on an epitaxial layer by dry thermal oxidation, an ohmic electrode is formed on a back surface of a SiC substrate, an ohmic junction is formed between the ohmic electrode and the back surface of the SiC substrate by annealing the SiC substrate, the silicon oxide film is removed, and a Schottky electrode is formed on the epitaxial layer. Then, a sintering treatment is performed to form a Schottky junction between the Schottky electrode and the epitaxial layer. | 02-06-2014 |
| 20140087550 | METHODS OF MAKING SEMICONDUCTOR DEVICES WITH LOW LEAKAGE SCHOTKYCONTACTS - Embodiments include methods of making semiconductor devices with low leakage Schottky contacts. An embodiment includes providing a partially completed semiconductor device including a substrate, a semiconductor on the substrate, and a passivation layer on the semiconductor, and using a first mask, locally etching the passivation layer to expose a portion of the semiconductor. Without removing the first mask, a Schottky contact is formed of a first material on the exposed portion of the semiconductor, and the mask is removed. Using a further mask, a step-gate conductor of a second material electrically coupled to the Schottky contact is formed overlying parts of the passivation layer adjacent to the Schottky contact. By minimizing the process steps between opening the Schottky contact window in the passivation layer and forming the Schottky contact material in this window, the gate leakage of a resulting field effect device having a Schottky gate may be substantially reduced. | 03-27-2014 |
| 20140370695 | METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE - The present invention relates to a method for fabricating a semiconductor structure comprising a semiconductor layer and a metallic layer, to improve the breakdown voltage properties of the device and reduce leakage currents, the method comprises the steps of a) providing a semiconductor layer comprising defects and/or dislocations; b) removing material at one or more locations of the defects and/or dislocations thereby forming pits in the semiconductor layer, c) passivating the pits, and c) providing the metallic layer over the semiconductor layer. The invention also relates to a corresponding semiconductor structure. | 12-18-2014 |
| 20150024581 | METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device in which an electrode structure is formed on a silicon carbide semiconductor substrate, includes forming a Schottky layer including a metal selected from the group titanium, tungsten, molybdenum, and chrome on a front surface of the silicon carbide semiconductor substrate; heating the Schottky layer to form a Schottky electrode which has a Schottky contact with the silicon carbide semiconductor substrate; and forming a surface electrode composed of aluminum or aluminum including silicon on a surface of the Schottky electrode, while heating at a temperature range effective for the surface electrode to closely cover any uneven portion of the Schottky electrode, and provide a surface electrode having a predetermined reflectance or less that is suitable for use in an automatic wire bonding apparatus for image recognition such as positioning. | 01-22-2015 |
| 20150056794 | Method for Forming a Semiconductor Device with an Integrated Poly-Diode - A method for forming a field effect power semiconductor device includes providing a semiconductor body comprising a main horizontal surface and a conductive region arranged next to the main horizontal surface, forming an insulating layer on the main horizontal surface, and etching a narrow trench through the insulating layer so that a portion of the conductive region is exposed, the narrow trench comprising, in a given vertical cross-section, a maximum horizontal extension. The method further includes forming a vertical poly-diode structure comprising a horizontally extending pn-junction. Forming the vertical poly-diode structure includes depositing a polycrystalline semiconductor layer comprising a minimum vertical thickness of at least half of the maximum horizontal extension and maskless back-etching of the polycrystalline semiconductor layer to form a polycrystalline region in the narrow trench. | 02-26-2015 |
| 20150325675 | METHOD FOR YIELD IMPROVEMENT OF TMBS DEVICES - A method for yield improvement of trench MOS barrier Schottky (TMBS) devices includes: forming a plurality of trenches in a substrate; forming a gate dielectric layer over a surface of the substrate and inner surfaces of the trenches; forming gates in the trenches; forming a first barrier dielectric layer, a second barrier dielectric layer and an intermediate dielectric layer over the trenches; etching the intermediate dielectric layer with the second barrier dielectric layer serving as an etch stop layer to form a window for forming contact holes; etching a portion of the second barrier dielectric layer within the window using the first barrier dielectric layer as an etch stop layer; and etching in the window to remove a portion of the first barrier dielectric layer overlying the gates and a portion of the gate dielectric layer overlying the substrate. | 11-12-2015 |
| 20160043198 | SCHOTTKY DIODE WITH BURIED LAYER IN GAN MATERIALS - A semiconductor structure includes a III-nitride substrate characterized by a first conductivity type and having a first side and a second side opposing the first side, a III-nitride epitaxial layer of the first conductivity type coupled to the first side of the III-nitride substrate, and a plurality of III-nitride epitaxial structures of a second conductivity type coupled to the III-nitride epitaxial layer. The semiconductor structure further includes a III-nitride epitaxial formation of the first conductivity type coupled to the plurality of III-nitride epitaxial structures, and a metallic structure forming a Schottky contact with the III-nitride epitaxial formation and coupled to at least one of the plurality of III-nitride epitaxial structures. | 02-11-2016 |
| 20160163822 | SEMICONDUCTOR DEVICE AND METHOD OF MAKING INCLUDING CAP LAYER AND NITRIDE SEMICONDUCTOR LAYER - To enhance the reliability of the semiconductor device using a nitride semiconductor. A channel layer is formed over a substrate, a barrier layer is formed over the channel layer, a cap layer is formed over the barrier layer, and a gate electrode is formed over the cap layer. In addition, a nitride semiconductor layer is formed in a region where the cap layer over the barrier layer is not formed, and a source electrode and a drain electrode are formed over the nitride semiconductor layer. The cap layer is a p-type semiconductor layer, and the nitride semiconductor layer includes the same type of material as the cap layer and is in an intrinsic state or an n-type state. | 06-09-2016 |
| 438572000 | Compound semiconductor | 13 |
| 20080220599 | Method of fabricating short-gate-length electrodes for integrated III-V compound semiconductor devices - A method of fabricating short-gate-length electrodes for integrated III-V compound semiconductor devices, particularly for integrated HBT/HEMT devices on a common substrate is disclosed. The method is based on dual-resist processes, wherein a first thin photo-resist layer is utilized for defining the gate dimension, while a second thicker photo-resist layer is used to obtain a better coverage on the surface for facilitating gate metal lift-off. The dual-resist method not only reduces the final gate length, but also mitigates the gate recess undercuts, as compared with those fabricated by the conventional single-resist processes. Furthermore, the dual-resist method of the present invention is also beneficial for the fabrication of multi-gate device with good gate-length uniformity. | 09-11-2008 |
| 20090035926 | Methods of Fabricating Silicon Carbide Devices Incorporating Multiple Floating Guard Ring Edge Terminations - Edge termination for silicon carbide devices has a plurality of concentric floating guard rings in a silicon carbide layer that are adjacent and spaced apart from a silicon carbide-based semiconductor junction. An insulating layer, such as an oxide, is provided on the floating guard rings and a silicon carbide surface charge compensation region is provided between the floating guard rings and is adjacent the insulating layer. Methods of fabricating such edge termination are also provided. | 02-05-2009 |
| 20090098719 | METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE - An object of the invention is to provide a method for manufacturing a silicon carbide semiconductor device having constant characteristics with reduced variations in forward characteristics. The method for manufacturing the silicon carbide semiconductor device according to the invention includes the steps of: (a) preparing a silicon carbide substrate; (b) forming an epitaxial layer on a first main surface of the silicon carbide substrate; (c) forming a protective film on the epitaxial layer; (d) forming a first metal layer on a second main surface of the silicon carbide substrate; (e) applying heat treatment to the silicon carbide substrate at a predetermined temperature to form an ohmic junction between the first metal layer and the second main surface of the silicon carbide substrate; (f) removing the protective film; (g) forming a second metal layer on the epitaxial layer; and (h) applying heat treatment to the silicon carbide substrate at a temperature from 400° C. to 600° C. to form a Schottky junction of desired characteristics between the second metal layer and the epitaxial layer. | 04-16-2009 |
| 20110081772 | METHODS OF FABRICATING SILICON CARBIDE DEVICES INCORPORATING MULTIPLE FLOATING GUARD RING EDGE TERMINATIONS - Edge termination for silicon carbide devices has a plurality of concentric floating guard rings in a silicon carbide layer that are adjacent and spaced apart from a silicon carbide-based semiconductor junction. An insulating layer, such as an oxide, is provided on the floating guard rings and a silicon carbide surface charge compensation region is provided between the floating guard rings and is adjacent the insulating layer. Methods of fabricating such edge termination are also provided. | 04-07-2011 |
| 20130196494 | METHOD OF MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE - A target made of a metal material is sputtered to form a metal film on a silicon carbide wafer. At this time, the metal film is formed under a condition that an incident energy of incidence, on the silicon carbide wafer, of the metal material sputtered from the target and a sputtering gas flowed in through a gas inlet port is lower than a binding energy of silicon carbide, and more specifically lower than 4.8 eV. For example, the metal film is formed while a high-frequency voltage applied between a cathode and an anode is set to be equal to or higher than 20V and equal to or lower than 300V. | 08-01-2013 |
| 20130267085 | METHODS FOR FABRICATING A METAL STRUCTURE FOR A SEMICONDUCTOR DEVICE - A method for fabricating a metal structure for a semiconductor device is disclosed. The method begins with providing a wafer with a current input contact and current output contact. Remaining steps include loading the wafer into a deposition apparatus, depositing a layer of metal onto a predefined metal region, removing the wafer from the deposition apparatus, and performing an ex-situ passivation process. If additional layers are to be deposited and passivated, the steps are repeated until a predetermined number of layers of metal are deposited onto the predefined metal region. The predefined metal region is a gate metal opening if the metal structure is a gate contact for a field effect transistor. The ex-situ passivation process is achievable through oxidation or nitridation of the wafer using either oxygen plasma or a nitrogen plasma, respectively. Alternately, oxidation is also achievable through exposing the wafer to air at an elevated temperature. | 10-10-2013 |
| 20160133475 | PREPARATION METHOD OF A GERMANIUM-BASED SCHOTTKY JUNCTION - The present invention discloses a preparation method of a germanium-based Schottky junction, comprising, cleaning a surface of N-type germanium-based substrate, then depositing a layer of CeO | 05-12-2016 |
| 438573000 | Multilayer electrode | 3 |
| 20110008953 | METHOD FOR MAKING SEMICONDUCTOR INSULATED-GATE FIELD-EFFECT TRANSISTOR HAVING MULTILAYER DEPOSITED METAL SOURCE(S) AND/OR DRAIN(S) - A metal source/drain field effect transistor is fabricated such that the source/drain regions are deposited, multilayer structures, with at least a second metal deposited on exposed surfaces of a first metal. | 01-13-2011 |
| 20160020296 | HETEROJUNCTION SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD - Disclosed is a semiconductor device comprising a group 13 nitride heterojunction comprising a first layer having a first bandgap and a second layer having a second bandgap, wherein the first layer is located between a substrate and the second layer; and a Schottky electrode and a first further electrode each conductively coupled to a different area of the heterojunction, said Schottky electrode comprising a central region and an edge region, wherein the element comprises a conductive barrier portion located underneath said edge region only of the Schottky electrode for locally increasing the Schottky barrier of the Schottky electrode. A method of manufacturing such a semiconductor device is also disclosed. | 01-21-2016 |
| 438574000 | T-shaped electrode | 1 |
| 20140273422 | METHOD FOR MAKING SEMICONDUCTOR DIODES WITH LOW REVERSE BIAS CURRENTS - A diode is described with a III-N material structure, an electrically conductive channel in the III-N material structure, two terminals, wherein a first terminal is an anode adjacent to the III-N material structure and a second terminal is a cathode in ohmic contact with the electrically conductive channel, and a dielectric layer over at least a portion of the anode. The anode comprises a first metal layer adjacent to the III-N material structure, a second metal layer, and an intermediary electrically conductive structure between the first metal layer and the second metal layer. The intermediary electrically conductive structure reduces a shift in an on-voltage or reduces a shift in reverse bias current of the diode resulting from the inclusion of the dielectric layer. The diode can be a high voltage device and can have low reverse bias currents. | 09-18-2014 |
| 438576000 | Into grooved or recessed semiconductor region | 3 |
| 20090111253 | METHOD FOR PRODUCING A TRANSISTOR GATE WITH SUB-PHOTOLITHOGRAPHIC DIMENSIONS - Methods of fabricating compound semiconductor devices are described. | 04-30-2009 |
| 438578000 | Forming electrode of specified shape (e.g., slanted, etc.) | 2 |
| 20090317965 | ELECTRICAL CONTACT FOR TERMINATING A COAXIAL CABLE - An electrical contact is provided for terminating an electrical conductor of a coaxial cable. The electrical contact includes a body having a first element extending between a cable receiving end portion and a contact portion. The first element includes a first surface configured to engage the electrical conductor. A second element extends from the cable receiving end portion of the first element. The second element includes a second surface configured to engage the electrical conductor. The first and second elements are configured to hold a portion of the electrical conductor therebetween such that the coaxial cable extends outwardly from the cable receiving end portion of the first element. | 12-24-2009 |
| 438579000 | T-shaped electrode | 1 |
| 20090075463 | METHOD OF FABRICATING T-GATE - A method of fabricating a T-gate is provided. The method includes the steps of: forming a photoresist layer on a substrate; patterning the photoresist layer formed on the substrate and forming a first opening; forming a first insulating layer on the photoresist layer and the substrate; removing the first insulating layer and forming a second opening to expose the substrate; forming a second insulating layer on the first insulating layer; removing the second insulating layer and forming a third opening to expose the substrate; forming a metal layer on the second insulating layer on which the photoresist layer and the third opening are formed; and removing the metal layer formed on the photoresist layer. Accordingly, a uniform and elaborate opening defining the length of a gate may be formed by deposition of the insulating layer and a blanket dry etching process, and thus a more elaborate micro T-gate electrode may be fabricated. | 03-19-2009 |
| 438580000 | Using platinum group metal (i.e., platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), iridium (Ir), osmium (Os), or alloy thereof) | 4 |
| 20130115765 | SEMICONDUCTOR DEVICE WITH BUFFER LAYER - A semiconductor device in one embodiment includes a depletion junction, a peripheral region adjacent the depletion junction, and a buffer layer. The buffer layer is adapted to reduce localization of avalanche breakdown proximate the interface between the depletion junction and the peripheral region. | 05-09-2013 |
| 438581000 | Silicide | 3 |
| 20110159675 | PROCESS FOR FORMING SCHOTTKY RECTIFIER WITH PtNi SILICIDE SCHOTTKY BARRIER - A process for forming a Schottky barrier to silicon to a bather height selected at a value between 640 meV and 840 meV employs the deposition of a platinum or nickel film atop the silicon surface followed by the deposition of the other of a platinum or nickel film atop the first film. The two films are then exposed to anneal steps at suitable temperatures to cause their interdiffusion and a ultimate formation of Ni | 06-30-2011 |
| 20120009771 | Implantless Dopant Segregation for Silicide Contacts - A method for formation of a segregated interfacial dopant layer at a junction between a semiconductor material and a silicide layer includes depositing a doped metal layer over the semiconductor material; annealing the doped metal layer and the semiconductor material, wherein the anneal causes a portion of the doped metal layer and a portion of the semiconductor material to react to form the silicide layer on the semiconductor material, and wherein the anneal further causes the segregated interfacial dopant layer to form between the semiconductor material and the silicide layer, the segregated interfacial dopant layer comprising dopants from the doped metal layer; and removing an unreacted portion of the doped metal layer from the silicide layer. | 01-12-2012 |
| 20130130485 | METHOD FOR FABRICATING SCHOTTKY DEVICE - A method for fabricating a Schottky device includes the following sequences. First, a substrate with a first conductivity type is provided and an epitaxial layer with the first conductivity type is grown on the substrate. Then, a patterned dielectric layer is formed on the epitaxial layer, and a metal silicide layer is formed on a surface of the epitaxial layer. A dopant source layer with a second conductivity type is formed on the metal silicide layer, followed by applying a thermal drive-in process to diffuse the dopants inside the dopant source layer into the epitaxial layer. Finally, a conductive layer is formed on the metal silicide layer. | 05-23-2013 |
| 438582000 | Using refractory group metal (i.e., titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), or alloy thereof) | 3 |
| 20120129328 | MULTIPLE LAYER BARRIER METAL FOR DEVICE COMPONENT FORMED IN CONTACT TRENCH - A semiconductor device formed on a semiconductor substrate may include a component formed in a contact trench located in an active cell region. The component may comprise a barrier metal deposited on a bottom and portions of sidewalls of the contact trench and a tungsten plug deposited in a remaining portion of the contact trench. The barrier metal may comprise first and second metal layers. The first metal layer may be proximate to the sidewall and the bottom of the contact trench. The first metal layer may include a nitride. The second metal layer may be between the first metal layer and the tungsten plug and between the tungsten plug and the sidewall. The second metal layer covers portions of the sidewalls of not covered by the first metal layer. | 05-24-2012 |
| 20130149850 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A method for manufacturing a semiconductor device includes the steps of preparing a substrate made of silicon carbide and having an n type region formed to include a main surface, forming a p type region in a region including the main surface, forming an oxide film on the main surface across the n type region and the p type region, by heating the substrate having the p type region formed therein at a temperature of 1250° C. or more, removing the oxide film to expose at least a part of the main surface, and forming a Schottky electrode in contact with the main surface that has been exposed by removing the oxide film. | 06-13-2013 |
| 438583000 | Silicide | 1 |
| 20090163005 | Schottky barrier source/drain N-MOSFET using ytterbium silicide - A method of fabricating an N-type Schottky barrier Source/Drain Transistor (N-SSDT) with ytterbium silicide (YbSi | 06-25-2009 |
