Class / Patent application number | Description | Number of patent applications / Date published |
392399000 | Flash chamber | 6 |
20100124410 | SYSTEM FOR SUPPLYING WATER VAPOR IN SEMICONDUCTOR WAFER TREATMENT - A system for supplying water vapor in a process for treatment of a semiconductor wafer, comprising a treatment chamber having an interior for receiving at least one semiconductor wafer and a water vapor dispenser. The water vapor dispenser comprises
| 05-20-2010 |
20110116775 | Super heated steam generator with slack accommodating heating tanks - A multi-stage, superheated steam generator for crude oil recovery comprises a plurality of radially spaced-apart first stage electric heating tanks that peripherally surround an inner, second stage electric steam tank. The steam tanks are secured within casing by a slack accommodating mounting comprising a downwardly projecting stub received within a rigid, tubular expansion sockets secured beneath each steam tank. A plurality of serpentine, electric resistive heating elements abut each steam tank. The elements have loop portions proximate the bottoms of each steam tank and vertical portions abutting each tank periphery. First stage tanks output steam to a manifold system that outputs to the second stage heater. | 05-19-2011 |
20120230660 | METHOD AND DEVICE FOR GENERATING A HEATING MEDIUM - Provided are a method and device for generating a steam heating medium, the method involving generating, from a nozzle, Aqua-gas or low-temperature superheated steam that is a steam heating medium by operating an electrothermal-type generator or a steam-type generator. The method comprises the step of generating Aqua-gas by increasing a water supply amount in such a manner that an internal nozzle pressure takes on a constant value exceeding a saturated water vapor pressure of water at each internal nozzle pressure set temperature; or generating low-temperature superheated steam by reducing the water supply amount in such a manner that the internal nozzle pressure does not exceed the saturated water vapor pressure of water at each internal nozzle pressure set temperature, in a relational expression relating to a flow rate of water vapor sprayed from the nozzle, and given by Expression 1 or Expression 2, as prescribed in the present invention. | 09-13-2012 |
20160084495 | CONTINUOUS ULTRAPURE STEAM GENERATOR - A generator of ultrapure steam and a corresponding steam generating method uses a heated, fritted refractory glass plate as a water-to-steam interface dividing a first chamber, with water on one side of the plate and steam on the other. Water is continuously injected into interstices of the plate, held fixed in the chamber, where the water evaporates and migrates upwardly to where a steam cloud is formed that exits the chamber and into a second chamber that is a saturation housing where an air stream removes steam from the exit, preventing steam condensation, and delivering a steam jet out of the housing through a port. | 03-24-2016 |
20160161107 | APPARATUS FOR GENERATING STEAM - The present application relates to apparatus for generating steam. The apparatus comprises an evaporation surface ( | 06-09-2016 |
20160161108 | APPARATUS FOR GENERATING STEAM - Apparatus for generating steam is disclosed. It comprises a water inlet ( | 06-09-2016 |