| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 310323210 | Detector (e.g., sensor) | 16 |
| 20090212663 | ELECTRONIC TONGUE SENSOR - Embodiments of an electronic tongue sensor, as well as test results, are discussed. | 08-27-2009 |
| 20100033058 | Physical/Biochemical Sensor Using Piezoelectric Microcantilever And Manufacturing Method Thereof - The present invention discloses a physical/biochemical sensor using a multisized piezoelectric microcantilever resonator array which enables to quantitatively and simultaneously analyze a mass loading effect and a surface stress change effect and a manufacturing method thereof. In the physical/biochemical sensor using the multisized piezoelectric microcantilever resonator array, a plurality of piezoelectric micro-cantilever resonators having different sizes is arrayed so as to quantitatively and discriminately analyze a surface stress change as well as a sensor surface mass change induced by an adsorbed sensing-target material occurring in a sensing process. Thus, the mass loading effect and the surface stress change effect can be quantitatively and simultaneously analyzed. | 02-11-2010 |
| 20100038997 | COATING FOR HARSH ENVIRONMENTS AND SENSORS USING SAME - A coating providing high abrasion and chemical resistance composed of a barrier layer from vanadium, molybdenum, niobium, tantalum and the like, and an outer layer of diamond-like carbon. The coating is especially applicable for acoustic wave device (AWD) based sensors, and for passivating an electrode such as an electrode deposited on the AWD sensing area. The coating provides excellent mechanical and acoustical characteristics for coating acoustic wave devices allowing the sensor to operate in harsh environments. | 02-18-2010 |
| 20100072859 | DEVICE FOR CONVERTING MECHANICAL IMPACT ENERGY INTO ELECTRICAL ENERGY WITH OPTIMISED EFFICIENCY - Device for converting mechanical energy from the impact of objects into electrical energy, comprising a frame, a membrane suspended on said frame by at least a first and second longitudinal end, said membrane being intended to be impacted by said objects in a direction substantially transverse to a mid-plane of the membrane, said membrane comprising a core made from material for transducing mechanical energy into electrical energy, extending from the first longitudinal end to the second longitudinal end, and at least one electrode on a first face of the core and at least one electrode on a second face of the core, said electrodes extending from the first to the second longitudinal end. | 03-25-2010 |
| 20100127600 | PIEZOELECTRIC SENSOR ARRANGEMENT COMPRISING A THIN LAYER SHEAR WAVE RESONATOR BASED ON EPITACTICALLY GROWN PIEZOELECTRIC LAYERS - The invention relates to piezoelectric sensor arrangements, especially sensor arrangements that can be operated in a measuring fluid, in order to be able to detect, for example, elastic properties of the measuring fluid itself or the presence and/or concentration of analyte molecules in the fluid. According to the invention, the sensor arrangement comprises an acoustic resonator which has a sensitive region and is arranged such that a resonance frequency of the sensor arrangement varies according to properties of the measuring fluid. The acoustic resonator is formed by a piezoelectric thin layer resonator and the sensitive region is produced by means of epitaxy, such that transversally polarised vibration modes can be induced. | 05-27-2010 |
| 20110089786 | ARRANGEMENT OF A PIEZOACOUSTIC RESONATOR ON AN ACOUSTIC MIRROR OF A SUBSTRATE, METHOD FOR PRODUCING THE ARRANGEMENT AND USE OF THE ARRANGEMENT - In an arrangement of at least one piezoacoustic resonator on a substrate surface, the resonator has an piezoelectric layer, an electrode and a further electrode arranged such that activation of the electrodes leads to a resonance oscillation, the substrate surface is formed by an acoustic mirror integrated in the substrate for acoustically insulating substrate and resonator, and with a resonance frequency evaluation device being connected to the electrodes by tracks being routed through a mirror opening. The acoustic mirror has a Bragg reflector having λ/4-thick layers of different acoustic impedance. The topmost layer is made of silicon dioxide acting as an insulation layer in the mirror opening for electrically insulating the conductor track and the electrically conductive Bragg reflector layers. The arrangement is used as a physical transducer of a device for detecting a substance of a fluid, in particular of a fluid in the form of a liquid (biosensor). | 04-21-2011 |
| 20110140575 | VIBRATING REED, VIBRATOR, PHYSICAL QUANTITY SENSOR, AND ELECTRONIC EQUIPMENT - A resonator element includes: a base part; plural vibrating arms extended from the base part, each having a first principal surface and a second principal surface opposed to each other and a first side surface and a second side surface connecting the first principal surface and the second principal surface and opposed to each other, the first side surface of at least one vibrating arm of the plural vibrating arms having a first step part provided from the first principal surface side and a second step part provided from the second principal surface side; a first electrode provided on the second side surface of the vibrating arm; a second electrode provided in a position opposed to the first electrode of the first step part; and a third electrode provided in a position opposed to the first electrode of the second step part. | 06-16-2011 |
| 20110221306 | PIEZOELECTRIC ELEMENT, PIEZOELECTRIC SENSOR, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT - A piezoelectric element includes a support body having a displacing part capable of undergoing displacement, a lower electrode layer having a lower main electrode body and a lower electrode wire part with the lower main electrode body being formed on the support body and provided within the displacing part in a plan view and the lower electrode wire part being connected to the lower main electrode body and provided across an interior and an exterior of the displacing part, a first piezoelectric layer provided on the lower main electrode body, an upper electrode layer provided across the interior and exterior of the displacing part with at least a part of the upper electrode layer being layered on the first piezoelectric layer and insulated from the lower electrode layer, and a second piezoelectric layer provided on the support body to cover at least a part of the lower electrode wire part. | 09-15-2011 |
| 20110260581 | Flexible Phased Array Sensor - A sensor includes a film, at least one piezoelectric strip disposed on the film, a first conductive line disposed on the film, the first conductive line electrically connected to a first portion of the at least one piezoelectric strip, a second conductive line disposed on the film, the second conductive line electrically connected to a second portion of the at least one piezoelectric strip, and a dampening member disposed on the at least one piezoelectric strip. | 10-27-2011 |
| 20130221804 | Sensor Element, Sensor Device, And Electronic Apparatus - A sensor element includes a base, vibrating arms for detection extended from the base, and first to fourth detecting sections provided in the vibrating arms for detection. The first to fourth detecting sections respectively include lower electrode layers, upper electrode layers, and piezoelectric layers. The lower electrode layers of the first and second detecting sections are electrically connected to each other. The lower electrodes of the third and fourth detecting sections are electrically connected to each other. | 08-29-2013 |
| 20130241353 | SENSOR ELEMENT, SENSOR DEVICE, AND ELECTRONIC APPARATUS - A sensor element includes a base part, a detection vibrating arm extended from the base part, and detection parts that are provided on the detection vibrating arm and detect flexural vibration of the detection vibrating arm, the detection parts each have a first electrode layer, a second electrode layer provided at an opposite side to the detection vibrating arm with respect to the first electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, and the detection parts have parts provided over boundary parts between the detection vibrating arm and the base part and the parts bend or curve to extend in a direction including a direction component orthogonal to an extension direction of the detection vibrating arm along side surfaces of the detection vibrating arm and the base part. | 09-19-2013 |
| 20130285508 | VIBRATING ELEMENT, SENSOR UNIT AND ELECTRONIC APPARATUS - A vibrating element includes a base, drive vibrating arms, detection vibrating arms, and adjustment vibrating arms. The drive vibrating arms are driven to make bending vibration in a predetermined plane. The following expressions (1) and (2) are satisfied: | 10-31-2013 |
| 20140062258 | EXTERNAL FORCE DETECTION EQUIPMENT AND EXTERNAL FORCE DETECTION SENSOR - External force detection equipment according to the present disclosure includes a container, a supporting portion, one excitation electrode, another excitation electrode, an oscillation circuit, a movable electrode, a fixed electrode, a frequency information detecting unit, and a conductor. An oscillation loop is formed from the oscillation circuit to pass through the one excitation electrode, the other excitation electrode, the movable electrode, and the fixed electrode, and return to the oscillation circuit. The frequency information detected by the frequency information detecting unit is used for estimating an external force acting on the piezoelectric plate. | 03-06-2014 |
| 20150300894 | PIEZOELECTRIC ACTUATOR AND PROCESS FOR MANUFACTURING SAME - A sensor for measuring a parameter of a fluid includes a housing defining a fluid-proof chamber and an area of reduced thickness defining a membrane separating the chamber from the fluid. An actuating/detecting element is positioned within the chamber and mechanically coupled with the membrane. The actuating/detecting element includes a multilayer structure, having a metallic material member having a first metallized layer, and a piezoelectric material member having a second metallized layer connected to the first metallized layer via a sintered silver joint. A resonating element is mechanically coupled with the membrane and extends from the membrane, the resonating element being sized and dimensioned to transfer mechanical vibrations to and from the actuating/detecting element. | 10-22-2015 |
| 20160069926 | ACCELERATION SENSOR AND METHOD OF MANUFACTURING THE SAME - There is provided an acceleration sensor in which outer surfaces of a plurality of beams in which piezo-resistive elements are provided and upper portions of a mass body and a support body connected to the plurality of beams may be enclosed by a protective layer to prevent electrical disturbances from being transferred from an external environment to the piezo-resistive elements. | 03-10-2016 |
| 20160111625 | Method of Fabricating Piezoelectric MEMS Devices - A single photo mask can be used to define the three critical layers for the piezoelectric MEMS device, specifically the top electrode layer, the piezoelectric material layer, and the bottom electrode layer. Using a single photo mask removes the misalignment source caused by using multiple photo masks. Furthermore, in certain exemplary embodiments, all electrical interconnects use underpass interconnect. This simplifies the process for defining the device electrodes and the process sequence for achieving self-alignment between the piezoelectric element and the top and bottom electrodes. This self-alignment is achieved by using an oxide hard mask to etch the critical region of the top electrode, the piezoelectric material, and the bottom electrode with one mask and different etch chemistries depending on the layer being etched. | 04-21-2016 |
