Entries |
Document | Title | Date |
20080197752 | Stress sensitive element - A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected. | 08-21-2008 |
20080238252 | Piezoelectric resonant power generator - A power generation system includes a piezoelectric component, a resilient stress inducer in operable communication with the piezoelectric component, and an actuator in operable communication with the resilient stress inducer to energize and release the resilient stress inducer and method for generating power. | 10-02-2008 |
20080246368 | Integration of dissimilar materials for advanced multfunctional devices - A device including a layered heterostructure with an oxygen-containing material, with a carbon layer and an amorphous oxygen diffusion barrier protecting the carbon layer from etching by oxygen. One or more of a metal, a carbide or an oxide may be in contact with the amorphous oxygen diffusion barrier that has the lowest free energy of oxide formation in the device. Various devices are disclosed as are varieties of carbon allotropes. Methods of protecting carbon, such as diamond from the oxygen etching in processes such as device manufacture are also disclosed. | 10-09-2008 |
20080284283 | Piezo Stack With Novel Passivation - An electrical passivation of surfaces of an electronic component which have electrodes is intended to be carried out in simple and effective fashion and also to be stable in chemically and thermally unfavourable environments. For the passivation, a plastic film, for example made of epoxy, is laminated onto the surface. Applications are in fuel injection systems, for example. | 11-20-2008 |
20090058226 | TUNING FORK OSCILLATING PIECE, TUNING FORK OSCILLATOR, AND ACCELERATION SENSOR - A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section. The absolute value of the piezoelectric g constant of the detection piezoelectric section is larger than the absolute value of the piezoelectric g constant of the drive piezoelectric section. | 03-05-2009 |
20090152987 | PIEZOELECTRIC RESONATOR IN A SMALL-SIZED PACKAGE - The packaged piezoelectric resonator comprises a case ( | 06-18-2009 |
20090174286 | METHODS FOR ADJUSTING FREQUENCY OF PIEZOELECTRIC VIBRATING PIECES, PIEZOELECTRIC DEVICES, AND TUNING-FORK TYPE PIEZOELECTRIC OSCILLATORS - A piezoelectric frame includes a tuning-fork type piezoelectric vibrating piece having excitation electrodes on each of at least two vibrating arms extending in a first direction from one end of a base portion thereof. Respective supporting arms extend in a first direction from respective external edges of the vibrating arms. An outer frame portion surrounds the tuning-fork type piezoelectric vibrating piece. The connecting portions have designated widths and connect the respective supporting arms to the outer frame portion. During manufacture, the designated widths are trimmed (e.g., by a pulsed laser) until the desired vibration frequency is obtained. | 07-09-2009 |
20090200896 | ENERGY CONVERTERS AND ASSOCIATED METHODS - Energy converters and associated methods are disclosed herein. In one embodiment, an energy converter includes a first structural member spaced apart from a second structure member, a first piezoelectric element and a second piezoelectric element individually coupled to the first structural member and the second structural member, and a deflection member tensionally suspended between the first and second piezoelectric elements. The deflection member is substantially rigid. | 08-13-2009 |
20090218912 | Bulk Acoustic Wave Device with a Semiconductor Layer - A bulk acoustic wave device includes a first electrode, a second electrode, a piezoelectric layer arranged between the first and second electrodes and a semiconductor layer arranged between the first and second electrodes. The semiconductor layer is electrically isolated from the first electrode. | 09-03-2009 |
20090284102 | System and Method for Resonance Frequency Tuning of Resonant Devices - Tunable vibration energy scavengers and methods of operating the same are disclosed. The disclosed energy scavengers comprise a beam with a main body, wherein the beam comprises at least one flap and means for changing a shape of the at least one flap, wherein the at least one flap is physically attached to the main body along a longitudinal side of the main body. The disclosed methods comprise tuning the shape of the at least one flap, thereby tuning the stiffness of the structure. | 11-19-2009 |
20100201223 | RESONATOR ELEMENT AND RESONATOR - A resonator element includes: three or more resonating arms, each of the resonating arms including; a lower electrode provided on a first surface of the resonating arm, a piezoelectric film formed on the lower electrode, an upper electrode formed on the piezoelectric film, a first wiring line coupled to the lower electrode, and a second wiring line coupled to the upper electrode; and a base to which the resonating arms are connected. In the resonator element, the resonating arm vibrates in a thickness direction of the resonating arm. The resonating arms adjacent to each other vibrate in opposite directions from each other. The first surface is opposed to a second surface in the thickness direction. The second wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm. | 08-12-2010 |
20100314969 | MECHANICAL RESONATING STRUCTURES AND METHODS - Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described. | 12-16-2010 |
20110127882 | PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATOR, METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE - There are provided a piezoelectric vibrating reed which can be reliably bonded ultrasonically and which can be efficiently manufactured, a piezoelectric vibrator, a method of manufacturing a piezoelectric vibrator, an oscillator, an electronic apparatus, and a radio-controlled timepiece. A piezoelectric vibrating reed includes: a piezoelectric plate having vibrating portions and a base portion adjacent to the vibrating portions; excitation electrodes formed in the vibrating portions; mount electrodes formed in the base portion; lead-out electrodes for making the excitation electrodes and the mount electrodes electrically connected to each other; and a passivation film which is formed of an electrically insulating material and covers the excitation electrodes and the lead-out electrodes. These electrodes disposed on one surface of the base portion are formed only in a region covered by the passivation film. | 06-02-2011 |
20110127883 | METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATING REED, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO-CONTROLLED TIMEPIECE - There are provided a method of manufacturing a piezoelectric vibrating reed capable of improving the reliability of a product by sorting out a defective product correctly, a piezoelectric vibrating reed, a piezoelectric vibrator having a piezoelectric vibrating reed, an oscillator, an electronic apparatus, and a radio-controlled timepiece. In a resist pattern forming step, a resist pattern is formed by performing contact exposure on a photoresist film in a state where a photomask is in close contact with the photoresist film. Before the resist pattern forming step, a photomask treatment step is included in which when a defect is found in an outer shape equivalent region equivalent to the outer pattern in the photomask, a part of a light shielding film pattern is removed to change the shape of the outer shape equivalent region where damage is present. | 06-02-2011 |
20110148252 | MEMS VIBRATING STRUCTURE USING A SINGLE-CRYSTAL PIEZOELECTRIC THIN-FILM LAYER HAVING DOMAIN INVERSIONS - The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer having domain inversions, which determine certain vibrational characteristics of the MEMS vibrating structure. The MEMS vibrating structure may have dominant lateral vibrations or dominant thickness vibrations. The single-crystal piezoelectric thin-film layer may include Lithium Tantalate or Lithium Niobate, and may provide MEMS vibrating structures with precise sizes and shapes, which may provide high accuracy and enable fabrication of multiple resonators having different resonant frequencies on a single substrate. | 06-23-2011 |
20110248604 | METHOD FOR MANUFACTURING AT LEAST ONE MECHANICAL-ELECTRICAL ENERGY CONVERSION SYSTEM, AND MECHANICAL-ELECTRICAL ENERGY CONVERSION SYSTEM - In a method for manufacturing at least one mechanical-electrical energy conversion system including multiple individual parts, and a mechanical-electrical energy conversion, multiple different individual parts are positioned in an assembly device and joined in joining areas assigned to the individual parts in the assembly device, the individual parts including at least one piezoelectric element, one support structure and one seismic mass. | 10-13-2011 |
20120194035 | CONDUCTIVE ADHESIVE BOND ASSEMBLY AND SYSTEM FOR THE SAME - An arrangement consisting of a piezoactuator and a printed circuit board that are connected by at least one adhesive connection, with at least one electrical connection created by an electrically conductive adhesive between a first connection contact on the printed circuit board and between a second connection contact on the piezoactuator, whereby the connection contacts face in the same direction and the adhesive connection takes place through an opening in one of the components. | 08-02-2012 |
20120293042 | PIEZOELECTRIC GENERATOR - A piezoelectric generator includes a fixing part; a cantilever formed at a front edge of the fixing part; a weight part formed at a front end of the cantilever; a centroid adjustment part by which a position of a centroid of the weight part is adjusted; and a piezoelectric generating cell formed on top of the cantilever. | 11-22-2012 |
20120319530 | BULK ACOUSTIC RESONATOR COMPRISING NON-PIEZOELECTRIC LAYER - In a representative embodiment, a bulk acoustic wave (BAW) resonator structure comprises: a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode; a second electrode disposed over the first piezoelectric layer, wherein c-axis orientations of crystals of the first piezoelectric layer are substantially aligned with one another; a second piezoelectric layer disposed over the second electrode; a non-piezoelectric layer; and a third electrode disposed over the second piezoelectric layer. | 12-20-2012 |
20130062996 | MEMS DEVICE FABRICATED WITH INTEGRATED CIRCUIT - A planar integrated MEMS device has a piezoelectric element on a dielectric isolation layer over a flexible element attached to a proof mass. The piezoelectric element contains a ferroelectric element with a perovskite structure formed over an isolation dielectric. At least two electrodes are formed on the ferroelectric element. An upper hydrogen barrier is formed over the piezoelectric element. Front side singulation trenches are formed at a periphery of the MEMS device extending into the semiconductor substrate. A DRIE process removes material from the bottom side of the substrate to form the flexible element, removes material from the substrate under the front side singulation trenches, and forms the proof mass from substrate material. The piezoelectric element overlaps the flexible element. | 03-14-2013 |
20130162102 | TUNABLE ULTRASOUND TRANSDUCERS - A variety of micromachined structures are disclosed for use in DC-tunable ultrasound transducers. | 06-27-2013 |
20130207515 | ACOUSTIC WAVE DEVICE - An acoustic wave device includes: a piezoelectric thin film resonator including: a substrate; a lower electrode formed on the substrate; at least two piezoelectric films formed on the lower electrode; an insulating film sandwiched by the at least two piezoelectric films; and an upper electrode formed on the at least two piezoelectric films, wherein an area of the insulating film within a resonance region, in which the lower electrode and the upper electrode face each other across the at least two piezoelectric films, is different from an area of the resonance region. | 08-15-2013 |
20130234559 | PIEZOELECTRIC RESONATOR - An apparatus ( | 09-12-2013 |
20130334929 | RESONATOR ELECTRODES AND RELATED METHODS AND APPARATUS - Resonator structures and electrodes are described, as well as methods for manufacturing the same. Resonator electrodes may be formed using two or more photolithographic steps and masks, with different masks being used to define different features of the electrodes. The masks may create self-aligned electrodes, which can be aligned with one or more anchors of the resonator. | 12-19-2013 |
20140028152 | OSCILLATION STRUCTURE OF MICRO ACTUATOR - An oscillation structure of micro actuator is described. In the oscillation structure, a pair of torsion bars is disposed along a first axis perpendicular to a second axis. The first frame is connected to the pair of torsion bars wherein the torsion bars are disposed on the outer periphery of a first frame along the first axis and a second frame is disposed inside the first frame. Each of the first connection members connects the first frame to the second frame therebetween, and each of the second connection members connects the second frame to the oscillation body therebetween such that the first frame, the second frame and the oscillation body are allowed to rotate about the first axis by the torsion bars as a structure assemblies at an identical angle. The oscillation structure effectively reduces the dynamic deformation of micro actuator. | 01-30-2014 |
20140152148 | APPARATUS FOR GENERATING VIBRATIONS - There is provided an apparatus for generating vibrations including: a housing having an internal space; a direction changing member installed in the housing so as to be disposed in the internal space; a piezoelectric actuator including a piezoelectric element fixed to the direction changing member such that a horizontal deformation thereof is restrained, and deforming the direction changing member by a horizontal deformation thereof; and a vibrator fixed to the direction changing member and vertically displaced in a vertical direction according to a vertical deformation of the piezoelectric actuator. | 06-05-2014 |
20140175945 | PIEZOELECTRIC BULK WAVE DEVICE, AND METHOD OF MANUFACTURING THE PIEZOELECTRIC BULK WAVE DEVICE - A piezoelectric bulk wave device that includes a piezoelectric thin plate that is made of LiTaO | 06-26-2014 |
20140265728 | ACOUSTIC LENS FOR MICROMACHINED ULTRASOUND TRANSDUCERS - Matching layers configured for use with ultrasound transducers are disclosed herein. In one embodiment, a transducer stack can include a capacitive micromachined ultrasound transducer (CMUT), an acoustic lens, and a matching layer therebetween. The matching layer can be made from a compliant material (e.g. an elastomer and/or an liquid) and configured for use with CMUTs. The matching layer can include a bottom surface overlying a top surface of the transducer and a top surface underlying a bottom surface of the lens. | 09-18-2014 |
20140327339 | PIEZOELECTRIC RESONATOR - A piezoelectric resonator including a base part, a first support part fixed to the base part, a beam part fixed to the first support part, a weight part fixed to the beam part, a drive unit provided on the beam part, and an adjusting magnet movable on a main surface of the base part. Furthermore, the weight part is formed of a magnet or a magnetic body, and the beam part extends in a direction along the main surface of the base part. With this configuration, displacement of the resonance frequency generated due to variation in a manufacturing process can be adjusted easily. Even when the resonance frequency is displaced from desired resonance frequency due to variation in the manufacturing process of a power generating element, the displacement can be easily adjusted and maximum efficiency can be obtained. | 11-06-2014 |
20140333177 | PROTECTED RESONATOR - A bulk acoustic wave resonator structure that isolates the core resonator from both environmental effects and aging effects. The structure has a piezoelectric layer at least partially disposed between two electrodes. The structure is protected against contamination, package leaks, and changes to the piezoelectric material due to external effects while still providing inertial resistance. The structure has one or more protective elements that limit aging effects to at or below a specified threshold. The resonator behavior is stabilized across the entire bandwidth of the resonance, not just at the series resonance. Examples of protective elements include a collar of material around the core resonator so that perimeter and edge-related environmental and aging phenomena are kept away from the core resonator, a Bragg reflector formed above or below the piezoelectric layer and a cap formed over the piezoelectric layer. The resonator structure is suspended in a cavity in a cap structure. | 11-13-2014 |
20150035410 | PIEZOELECTRIC VIBRATING PIECE, METHOD FOR FABRICATING THE PIEZOELECTRIC VIBRATING PIECE, PIEZOELECTRIC DEVICE, AND METHOD FOR FABRICATING THE PIEZOELECTRIC DEVICE - A piezoelectric vibrating piece includes a vibrator, a framing portion that surrounds the vibrator, and a connecting portion that connects the vibrator and the framing portion together. At least one of a front surface and a back surface of the connecting portion is formed at a depth of 5 μm to 15 μm with respect to the framing portion. | 02-05-2015 |
20150042208 | RESONANT TRANSDUCER, MANUFACTURING METHOD THEREFOR, AND MULTI-LAYER STRUCTURE FOR RESONANT TRANSDUCER - A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap. | 02-12-2015 |
20150145375 | PIEZOELECTRIC POWER GENERATION APPARATUS - A piezoelectric power generation apparatus that includes a first vibrating portion having a fixed end and a free end, a first weight portion bonded to the free end of the first vibrating portion, a second vibrating portion having a fixed end bonded to the first weight portion and a free end, and including a vibrating plate and a piezoelectric element provided on the vibrating plate. A second weight portion is bonded to the free end of the second weight portion. In a state where the piezoelectric power generation apparatus is arranged on a vibration surface and is still, a position of the free end of the first vibrating portion and a position of the fixed end of the second vibrating portion in an axial direction perpendicular to the vibration surface are different from each other. | 05-28-2015 |
20150295556 | TEMPERATURE COMPENSATED BULK ACOUSTIC WAVE RESONATOR WITH A HIGH COUPLING COEFFICIENT - The dominant frequency of a solidly mounted resonator ( | 10-15-2015 |
20150318463 | VIBRATOR - A vibrator includes: a housing having an interior space; a vibrating member installed within the housing; a piezoelectric element installed on a top surface of the vibrating member; and space forming parts disposed to face side surfaces of the piezoelectric element, respectively, and forming a space in which a filler is provided, together with the side surfaces of the piezoelectric element. | 11-05-2015 |
20150318838 | ENHANCED MEMS VIBRATING DEVICE - A MEMS vibrating device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a first piezoelectric thin-film layer, a second piezoelectric thin-film layer over the first piezoelectric thin-film layer, and an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer. Embedding the inter-digital transducer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer may result in enhanced vibrational characteristics of the MEMS vibrating device, thereby increasing the performance thereof. | 11-05-2015 |
20150333730 | Wide-band acoustically coupled thin-film BAW filter - In a bulk acoustic wave (BAW) filter based on laterally acoustically coupled resonators on piezoelectric thin films, one can utilize two distinct acoustic plate wave modes of different nature, for example the thickness extensional (longitudinal) TE | 11-19-2015 |
20150357993 | INTEGRATED CIRCUIT CONFIGURED WITH TWO OR MORE SINGLE CRYSTAL ACOUSTIC RESONATOR DEVICES - A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 10 | 12-10-2015 |
20160028367 | SINGLE CRYSTAL ACOUSTIC RESONATOR AND BULK ACOUSTIC WAVE FILTER - A method of wafer scale packaging acoustic resonator devices and an apparatus therefor. The method including providing a partially completed semiconductor substrate comprising a plurality of single crystal acoustic resonator devices provided on a silicon and carbide bearing material, each having a first electrode member, a second electrode member, and an overlying passivation material. At least one of the devices to be configured with an external connection, a repassivation material overlying the passivation material, an under metal material overlying the repassivation material. Copper pillar interconnect structures are then configured overlying the electrode members, and solder bump structures are form overlying the copper pillar interconnect structures. | 01-28-2016 |
20160079954 | RESONATOR DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A resonator device includes a base including a fixed section and a movable section connected to the fixed section, a resonator element including a first base section, a second base section, and a vibration arm, one end of which is connected to the first base section and the other end of which is connected to the second base section, the first base section being fixed to the fixed section and the second base section being fixed to the movable section, a weight section connected onto the movable section, and a stress relaxing section provided between a connection region of the weight section and the vibration arm. | 03-17-2016 |
20160079955 | PIEZOELECTRIC VIBRATION MEMBER, METHOD OF MANUFACTURING THE SAME, AND PIEZOELECTRIC VIBRATOR - There is provided a piezoelectric vibration member including: a vibration substrate including a vibrating portion and a surrounding portion which is thinner than the vibrating portion; and vibrating electrodes disposed on one surface and the other surface of the vibrating portion in a thickness direction, wherein the vibrating portion includes protrusion portions protruding in relation to one surface and the other surface of the surrounding portion in the thickness direction, and at least one side surface of the protrusion portion has two or more crystal planes. | 03-17-2016 |
20160099401 | RESONATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOBILE OBJECT - A resonator includes a resonator element including a substrate gradually increasing in thickness from an outer edge toward a center, excitation electrodes respectively disposed on both principal surfaces of the substrate, and a pair of electrode pads electrically connected to the excitation electrodes, disposed on at least one of the both principal surfaces, and disposed on one end side of the substrate, and a second substrate as a base, the pair of electrode pads are bonded to the second substrate via respective first bonding members, two places of the other end of the substrate on the opposite side to the one end are bonded to the second substrate via respective second bonding members, and a distance S | 04-07-2016 |
20160099704 | Temperature compensated plate resonator - The invention relates to a microelectromechanical resonator device comprising a support structure and a semiconductor resonator plate doped to a doping concentration with an n-type doping agent and being capable of resonating in a width-extensional resonance mode. In addition, there is at least one anchor suspending the resonator plate to the support structure and an actuator for exciting the width-extensional resonance mode into the resonator plate. According to the invention, the resonator plate is doped to a doping concentration of 1.2*10 | 04-07-2016 |
20160099705 | ACOUSTIC WAVE DEVICE - An acoustic wave device includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; a silicon oxide film located at an opposite side of at least one of the lower electrode and the upper electrode from the piezoelectric film; a non-oxygen-containing insulating film located between the at least one of the lower electrode and the upper electrode and the silicon oxide film; and an additional film located at an opposite side of the silicon oxide film from the non-oxygen-containing insulating film and made of a material different from a material of the silicon oxide film. | 04-07-2016 |
20160144403 | VIBRATOR EQUIPPED WITH PIEZOELECTRIC ELEMENT - A vibrator equipped with a piezoelectric element comprises: a case of which an upper or lower surface is coupled to an object to be vibrated; a vibrating part which is disposed in the case; a piezoelectric element which is coupled to the vibrating part so as to be deformed, thereby vibrating the vibrating part up and down; and a power supply part which supplies power to the piezoelectric element. The vibrating part is formed with a hooking protrusion which is protruded laterally, and the case is formed with a hooking groove which restricts an up/down and lateral moving distance of the hooking protrusion. | 05-26-2016 |
20160156332 | PIEZOELECTRIC RESONATOR AND METHOD FOR MANUFACTURING THE SAME | 06-02-2016 |
20160163956 | CRYSTAL VIBRATOR PACKAGE - The crystal vibrator package includes a base substrate, a crystal piece, and a reinforcing patter. The base substrate includes first and second electrode pads formed on an upper surface of the base substrate. The crystal piece includes exciting electrodes formed on upper and lower surfaces thereof and electrically connected to the first and second electrode pads, respectively, at one side of the crystal piece. The reinforcing pattern is formed at corner portions of the crystal piece. | 06-09-2016 |