| Entries |
| Document | Title | Date |
|---|
| 20080203426 | HETEROJUNCTION SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING - A metamorphic buffer layer is formed on a semi-insulating substrate by an epitaxial growth method, a collector layer, a base layer, an emitter layer and an emitter cap layer are sequentially laminated on the metamorphic buffer layer, and a collector electrode is provided in contact with an upper layer of the metamorphic buffer layer. The metamorphic buffer layer is doped with an impurity, in a concentration equivalent to or higher than that in a conventional sub-collector layer, by an impurity doping process during crystal growth so that the metamorphic buffer layer will be able to play the role of guiding the collector current to the collector electrode. Since the sub-collector layer, which is often formed of a ternary mixed crystal or the like having a high thermal resistance, can be omitted, the heat generated in the semiconductor device can be rapidly released into the substrate. | 08-28-2008 |
| 20080203427 | SEMICONDUCTOR DEVICE HAVING A STRAINED SEMICONDUCTOR ALLOY CONCENTRATION PROFILE - A new technique enables providing a stress-inducing alloy having a highly stress-inducing region and a region which is processable by standard processing steps suitable for use in a commercial high volume semiconductor device manufacturing environment. The regions may be formed by a growth process with a varying composition of the growing material or by other methods such as ion implantation. The highly stress-inducing region near the channel region of a transistor may be covered with an appropriate cover. | 08-28-2008 |
| 20080203428 | MOS TRANSISTORS HAVING RECESSED CHANNEL REGIONS AND METHODS OF FABRICATING THE SAME - A MOS transistor having a recessed channel region is provided. A MOS transistor includes a source region and a drain region disposed in an active region of a semiconductor substrate and spaced apart from each other. A gate trench structure is disposed in the active region between the source and drain regions. A gate electrode is disposed in the gate trench structure. A gate dielectric layer is interposed between the gate trench structure and the gate electrode. A semiconductor region is disposed between the gate trench structure and the gate dielectric layer. The semiconductor region is formed of a different material from the active region. A method of fabricating the MOS transistor having a recessed channel region is also provided. | 08-28-2008 |
| 20080203429 | Semiconductor Device and a Method of Manufacturing the Same - In a semiconductor device with a shared contact, a gate electrode is formed via a gate insulating film on a semiconductor substrate and a sidewall insulating film is formed on both side faces of the gate electrode. At least one of the surface parts of the semiconductor substrate adjacent to both sides of the gate electrode is removed beyond the lower part of the sidewall insulating film and to the underside of the gate electrode. Then, the gate insulating film exposed in the remove part is removed. An impurity-doped semiconductor layer is formed in the part where the semiconductor substrate and the gate insulating film have been removed. | 08-28-2008 |
| 20080210975 | METHOD OF FABRICATING HETEROEPITAXIAL MICROSTRUCTURES - An efficient method of fabricating a high-quality heteroepitaxial microstructure having a smooth surface. The method includes detaching a layer from a base structure to provide a carrier substrate having a detached surface, and then forming a heteroepitaxial microstructure on the detached surface of the carrier substrate by depositing an epitaxial layer on the detached surface of a carrier substrate. Also included is a heteroepitaxial microstructure fabricated from such method. | 09-04-2008 |
| 20080210976 | Semiconductor Device Having an Implanted Precipitate Region and a Method of Manufacture Therefor - The present invention provides a semiconductor device, a method of manufacture therefor and an integrated circuit including the same. The semiconductor device | 09-04-2008 |
| 20080217652 | Growth of AsSb-Based Semiconductor Structures on InP Substrates Using Sb-Containing Buffer Layers - This invention provides high quality and low defect density Sb-containing alloys on lattice-mismatched substrates using Sb-containing buffer layers. More specifically, provided is a method of forming an epitaxial semiconductor alloy on a substrate, comprising: providing a substrate (such as InP); growing an Sb-containing buffer layer on the substrate; and growing a layer of As/Sb-containing semiconductor alloy on the buffer layer. | 09-11-2008 |
| 20080217653 | Method of Manufacturing a Semiconductor Device with an Isolation Region and a Device Manufactured by the Method - A method of manufacturing a semiconductor device includes forming trench isolation structures, exposing some of the trench isolation structures | 09-11-2008 |
| 20080217654 | Semiconductor device and method of fabricating the same - A semiconductor device includes an element isolation film having an inclined portion and a flat portion, a protective film formed not on the inclined portion but on the flat portion of the element isolation film, and an outer base layer formed to extend from on a surface of an active region surrounded by the element isolation film to on the protective film. | 09-11-2008 |
| 20080230802 | Semiconductor Device Comprising a Heterojunction - A semiconductor device with a heterojunction. The device comprises a substrate and at least one nanostructure. The substrate and nanostructure is of different materials. The substrate may e.g. be of a group IV semiconductor material, whereas the nanostructure may be of a group III-V semiconductor material. The nanostructure is supported by and in epitaxial relationship with the substrate. A nanostructure may be the functional component of an electronic device such as a gate-around-transistor device. In an embodiment of a gate-around-transistor, a nanowire ( | 09-25-2008 |
| 20080230803 | Integrated Contact Interface Layer - A semiconductor device that is fabricated by metamorphic epitaxial growth processes, and includes a combined graded base and active layer having a thickness less than 5000 Å. In one non-limiting embodiment, the semiconductor device is an HBT device that includes a combined doped graded buffer and sub-collector layer having a thickness less than 5000 Å, and a concentration of indium of about 86% at a top of the combined layer. | 09-25-2008 |
| 20080230804 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD OF SAME - A semiconductor device having an electrode with reduced electrical contact resistance even where either electrons or holes are majority carriers is disclosed. This device has an n-type diffusion layer and a p-type diffusion layer in a top surface of a semiconductor substrate. The device also has first and second metal wires patterned to overlie the n-type and p-type diffusion layers, respectively, with a dielectric layer interposed therebetween, a first contact electrode for electrical connection between the n-type diffusion layer and the first metal wire, and a second contact electrode for connection between the p-type diffusion layer and the second metal wire. The first contact electrode's portion in contact with the n-type diffusion layer and the second contact electrode's portion contacted with the p-type diffusion layer are each formed of a first conductor that contains a metal and a second conductor containing a rare earth metal. | 09-25-2008 |
| 20080230805 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - In one aspect of the present invention, a semiconductor device may include a Si substrate, a gate electrode provided on the semiconductor via a gate dielectric layer, a first epitaxially grown layer provided on the Si substrate, a channel region provided in the Si substrate below the gate electrode, a source/drain region provided in the first epitaxially grown layer sandwiching the channel region, and having a first conductivity type impurity, a second epitaxially grown layer provided between the channel region and the first epitaxially grown layer, and provided below the gate electrode, and having a second conductivity type impurity opposite to the first conductivity type. | 09-25-2008 |
| 20080237634 | CRYSTALLOGRAPHIC RECESS ETCH FOR EMBEDDED SEMICONDUCTOR REGION - Source and drain regions of an FET are etched by a crystallographic anisotropic etch to form a cavity surrounded by crystallographic facets. The exposure of the sidewalls of shallow trench isolation (STI) is avoided or reduced compared to the prior art. The crystallographic anisotropic etch may be combined with an isotropic etch or a recess etch to create undercuts beneath gate spacers and/or a pegging line beneath a top surface of the STI. The at least one cavity is then filled with a lattice-mismatched embedded material so that stress is applied to the channel of the FET. The resulting structure has increased containment of the embedded semiconductor region by shallow trench isolation. A reduction in stress due to the unconstrained sidewall area and an increase in the junction current due to the recessing of the pegging line are eliminated or alleviated. | 10-02-2008 |
| 20080237635 | STRUCTURE AND METHOD FOR STRAINED TRANSISTOR DIRECTLY ON INSULATOR - A semiconductor device ( | 10-02-2008 |
| 20080237636 | Transistor having tensile strained channel and system including same - A transistor structure and a system including the transistor structure. The transistor structure comprises: a substrate including a first layer comprising a first crystalline material; a tensile strained channel formed on a surface of the first layer and comprising a second crystalline material having a lattice spacing that is smaller than a lattice spacing of the first crystalline material; a metal gate on the substrate; a pair of sidewall spacers on opposite sides of the metal gate; and a source region and a drain region on opposite sides of the metal gate adjacent a corresponding one of the sidewall spacers. | 10-02-2008 |
| 20080237637 | ULTRA SCALABLE HIGH SPEED HETEROJUNCTION VERTICAL n-CHANNEL MISFETS AND METHODS THEREOF - A method for forming and the structure of a strained vertical channel of a field effect transistor, a field effect transistor and CMOS circuitry is described incorporating a drain, body and source region on a sidewall of a vertical single crystal semiconductor structure wherein a hetero-junction is formed between the source and body of the transistor, wherein the source region and channel are independently lattice strained with respect to the body region and wherein the drain region contains a carbon doped region to prevent the diffusion of dopants (boron) into the body. The invention reduces the problem of leakage current from the source region via the hetero-junction and lattice strain while independently permitting lattice strain in the channel region for increased mobility via choice of the semiconductor materials. | 10-02-2008 |
| 20080246056 | SILICIDE FORMATION FOR eSiGe USING SPACER OVERLAPPING eSiGe AND SILICON CHANNEL INTERFACE AND RELATED PFET - Methods of forming a suicide in an embedded silicon germanium (eSiGe) source/drain region using a suicide prevention spacer overlapping an interface between the eSiGe and the silicon channel, and a related PFET with an eSiGe source/drain region and a compressive stress liner in close proximity to a silicon channel thereof, are disclosed. In one embodiment, a method includes providing a gate having a nitrogen-containing spacer adjacent thereto and an epitaxially grown silicon germanium (eSiGe) region adjacent to a silicon channel of the gate; removing the nitrogen-containing spacer that does not extend over the interface between the eSiGe source/drain region and the silicon channel; forming a single silicide prevention spacer about the gate, the single silicide prevention spacer overlapping the interface; and forming the silicide in the eSiGe source/drain region using the single silicide prevention spacer to prevent the silicide from forming in at least an extension area of the silicon channel. | 10-09-2008 |
| 20080246057 | Silicon layer for stopping dislocation propagation - A composite semiconductor structure and method of forming the same are provided. The composite semiconductor structure includes a first silicon-containing compound layer comprising an element selected from the group consisting essentially of germanium and carbon; a silicon layer on the first silicon-containing compound layer, wherein the silicon layer comprises substantially pure silicon; and a second silicon-containing compound layer comprising the element on the silicon layer. The first and the second silicon-containing compound layers have substantially lower silicon concentrations than the silicon layer. The composite semiconductor structure may be formed as source/drain regions of metal-oxide-semiconductor (MOS) devices. | 10-09-2008 |
| 20080251813 | HETERO-INTEGRATED STRAINED SILICON n- AND p- MOSFETS - The present invention provides semiconductor structures and a method of fabricating such structures for application of MOSFET devices. The semiconductor structures are fabricated in such a way so that the layer structure in the regions of the wafer where n-MOSFETs are fabricated is different from the layer structure in regions of the wafers where p-MOSFETs are fabricated. The structures are fabricated by first forming a damaged region with a surface of a Si-containing substrate by ion implanting of a light atom such as He. A strained SiGe alloy is then formed on the Si-containing substrate containing the damaged region. An annealing step is then employed to cause substantial relaxation of the strained SiGe alloy via a defect initiated strain relaxation. Next, a strained semiconductor cap such as strained Si is formed on the relaxed SiGe alloy. | 10-16-2008 |
| 20080258175 | STRESSED MOS DEVICE - A stressed MOS device is provided that includes a silicon substrate, a gate electrode and an epitaxial layer of stress inducing monocrystalline semiconductor material. The silicon substrate is characterized by a monocrystalline silicon lattice constant. The gate electrode overlies a silicon channel region at the surface of the silicon substrate. The epitaxial layer of stress inducing monocrystalline semiconductor material is grown in the silicon substrate. The epitaxial layer of stress inducing monocrystalline semiconductor material has a lattice constant greater than the monocrystalline silicon lattice constant, and extends under the silicon channel region. | 10-23-2008 |
| 20080265279 | SEMICONDUCTOR DEVICE AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE - A semiconductor device is disclosed. In one embodiment, the semiconductor device includes a channel formation region formed on a side wall and includes a mixture of a first semiconductor material, having a first lattice constant and a second semiconductor material with a second lattice constant differing from the first lattice constant, wherein a proportion of the second semiconductor material increases with increasing distance from the side wall. | 10-30-2008 |
| 20080265280 | HYBRID FIN FIELD-EFFECT TRANSISTOR STRUCTURES AND RELATED METHODS - Abstract Semiconductor-on-insulator structures facilitate the fabrication of devices, including MOSFETs that are at least partially depleted during operation and FinFETs including bilayer fins and/or crystalline oxide. | 10-30-2008 |
| 20080265281 | EMBEDDED SILICON GERMANIUM USING A DOUBLE BURIED OXIDE SILICON-ON-INSULATOR WAFER - Disclosed is a p-type field effect transistor (pFET) structure and method of forming the pFET. The pFET comprises embedded silicon germanium in the source/drain regions to increase longitudinal stress on the p-channel and, thereby, enhance transistor performance. Increased stress is achieved by increasing the depth of the source/drain regions and, thereby, the volume of the embedded silicon germanium. The greater depth (e.g., up to 100 nm) of the stressed silicon germanium source/drain regions is achieved by using a double BOX SOI wafer. Trenches are etched through a first silicon layer and first buried oxide layer and then the stressed silicon germanium is epitaxially grown from a second silicon layer. A second buried oxide layer isolates the pFET. | 10-30-2008 |
| 20080272393 | SEMICONDUCTOR DEVICE HAVING STRAIN-INDUCING SUBSTRATE AND FABRICATION METHODS THEREOF - A semiconductor device includes a semiconductor substrate that includes a substrate layer having a first composition of semiconductor material. A source region, drain region, and a channel region are formed in the substrate, with the drain region spaced apart from the source region and the gate region abutting the channel region. The channel region includes a channel layer having a second composition of semiconductor material. Additionally, the substrate layer abuts the channel layer and applies a stress to the channel region along a boundary between the substrate layer and the channel layer. | 11-06-2008 |
| 20080272394 | JUNCTION FIELD EFFECT TRANSISTORS IN GERMANIUM AND SILICON-GERMANIUM ALLOYS AND METHOD FOR MAKING AND USING - Junction field effect transistors (JFET) formed in substrates containing germanium. JFETs having polycrystalline semiconductor surface contacts with self-aligned silicide formed thereon and self-aligned source, drain and gate regions formed by thermal drive-in of impurities from surface contacts into the substrate, and implanted link regions. Others have a polycrystalline semiconductor gate surface contact and metal back gate, source and drain contacts and a metal surface contact to the gate surface contact with implanted source and drains and a self-aligned gate region. JFETs having a polycrystalline semiconductor gate surface contact and metal back gate, source and drain contacts and a metal surface contact to the gate surface contact with implanted source and drains and a self-aligned gate region and silicide formed on the top of the source, drain and back gate contacts and on top of the gate polycrystalline semiconductor gate contact to which the metal surface contacts make electrical contact. | 11-06-2008 |
| 20080272395 | ENHANCED HOLE MOBILITY P-TYPE JFET AND FABRICATION METHOD THEREFOR - Enhanced hole mobility p-type JFET and fabrication methods. A p-type junction field effect transistor including a substrate of n-type, a source region and a drain region formed in the substrate; wherein the source region and the drain region are p-type doped and at least one of the source region and the drain region is formed with silicon-germanium compound (Si | 11-06-2008 |
| 20080272396 | Simplified Method of Producing an Epitaxially Grown Structure - Method to produce a structure consisting of depositing a material by columnar epitaxy on a crystalline face of a substrate ( | 11-06-2008 |
| 20080277690 | STRAINED SILICON-ON-INSULATOR BY ANODIZATION OF A BURIED p+ SILICON GERMANIUM LAYER - A cost efficient and manufacturable method of fabricating strained semiconductor-on-insulator (SSOI) substrates is provided that avoids wafer bonding. The method includes growing various epitaxial semiconductor layers on a substrate, wherein at least one of the semiconductor layers is a doped and relaxed semiconductor layer underneath a strained semiconductor layer; converting the doped and relaxed semiconductor layer into a porous semiconductor via an electrolytic anodization process, and oxidizing to convert the porous semiconductor layer into a buried oxide layer. The method provides a SSOI substrate that includes a relaxed semiconductor layer on a substrate; a high-quality buried oxide layer on the relaxed semiconductor layer; and a strained semiconductor layer on the high-quality buried oxide layer. In accordance with the present invention, the relaxed semiconductor layer and the strained semiconductor layer have identical crystallographic orientations. | 11-13-2008 |
| 20080283869 | METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE - A method for manufacturing a semiconductor light emitting device, which is capable of providing high characteristic homogeneity and reproducibility, is disclosed. The disclosed method includes forming a buffer layer over a substrate, selectively growing a nitride crystal layer on the buffer layer, forming a nitride semiconductor layer having a multilayer structure over the nitride crystal layer, forming a first electrode on the nitride semiconductor layer, attaching an auxiliary substrate to the first electrode, separating the substrate from the nitride crystal layer, forming a second electrode on the nitride crystal layer exposed in accordance with the separation of the substrate, and removing the auxiliary substrate from the first electrode. | 11-20-2008 |
| 20080296614 | Mis-Type Field-Effect Transistor - A strained Si layer | 12-04-2008 |
| 20080296615 | FABRICATION OF STRAINED HETEROJUNCTION STRUCTURES - Growth of multilayer films is carried out in a manner which allows close control of the strain in the grown layers and complete release of the grown films to allow mounting of the released multilayer structures on selected substrates. A layer of material, such as silicon-germanium, is grown onto a template layer, such as silicon, of a substrate having a sacrificial layer on which the template layer is formed. The grown layer has a lattice mismatch with the template layer so that it is strained as deposited. A top layer of crystalline material, such as silicon, is grown on the alloy layer to form a multilayer structure with the grown layer and the template layer. The sacrificial layer is preferentially etched away to release the multilayer structure from the sacrificial layer, relaxing the grown layer and straining the crystalline layers interfaced with it. | 12-04-2008 |
| 20080296616 | Gallium nitride-on-silicon nanoscale patterned interface - A method is provided for forming a matching thermal expansion interface between silicon (Si) and gallium nitride (GaN) films. The method provides a (111) Si substrate that is heated to a temperature in a range of about 300 to 800° C., and a first film is formed in compression overlying the Si substrate. The first film material may be InP, SiGe, GaP, GaAs, AlN, AlGaN, an AlN/graded AlGaN (Al | 12-04-2008 |
| 20080296617 | METHOD USING LOW TEMPERATURE WAFER BONDING TO FABRICATE TRANSISTORS WITH HETEROJUNCTIONS OF Si(Ge) TO III-N MATERIALS - A method for fabricating an electronic device, comprising wafer bonding a first semiconductor material to a III-nitride semiconductor, at a temperature below 550° C., to form a device quality heterojunction between the first semiconductor material and the III-nitride semiconductor, wherein the first semiconductor material is different from the III-nitride semiconductor and is selected for superior properties, or preferred integration or fabrication characteristics in the injector region as compared to the III-nitride semiconductor. | 12-04-2008 |
| 20080296618 | P-GaN/AlGaN/AlN/GaN ENHANCEMENT-MODE FIELD EFFECT TRANSISTOR - An enhancement mode High Electron Mobility Transistor (HEMT) comprising a p-type nitride layer between the gate and a channel of the HEMT, for reducing an electron population under the gate. The HEMT may also comprise an Aluminum Nitride (AlN) layer between an AlGaN layer and buffer layer of the HEMT to reduce an on resistance of a channel. | 12-04-2008 |
| 20080296619 | ADHESIVE BONDING WITH LOW TEMPERATURE GROWN AMORPHOUS OR POLYCRYSTALLINE COMPOUND SEMICONDUCTORS - Amorphous and polycrystalline III-V semiconductor including (Ga,As), (Al,As), (In,As), (Ga,N), and (Ga,P) materials were grown at low temperatures on semiconductor substrates. After growth, different substrates containing the low temperature grown material were pressed together in a pressure jig before being annealed. The annealing temperatures ranged from about 300° C. to 800° C. for annealing times between 30 minutes and 10 hours, depending on the bonding materials. The structures remained pressed together throughout the course of the annealing. Strong bonds were obtained for bonding layers between different substrates that were as thin as 3 nm and as thick as 600 nm. The bonds were ohmic with a relatively small resistance, optically transparent, and independent of the orientation of the underlying structures. | 12-04-2008 |
| 20080296620 | ELECTRONIC DEVICE INCLUDING A SEMICONDUCTOR FIN AND A PROCESS FOR FORMING THE ELECTRONIC DEVICE - An electronic device can include a semiconductor fin overlying an insulating layer. The electronic device can also include a semiconductor layer overlying the semiconductor fin. The semiconductor layer can have a first portion and a second portion that are spaced-apart from each other. In one aspect, the electronic device can include a conductive member that lies between and spaced-apart from the first and second portions of the semiconductor layer. The electronic device can also include a metal-semiconductor layer overlying the semiconductor layer. In another aspect, the semiconductor layer can abut the semiconductor fin and include a dopant. In a further aspect, a process of forming the electronic device can include reacting a metal-containing layer and a semiconductor layer to form a metal-semiconductor layer. In another aspect, a process can include forming a semiconductor layer, including a dopant, abutting a wall surface of a semiconductor fin. | 12-04-2008 |
| 20080303060 | Semiconductor devices and methods of manufacturing thereof - Semiconductor devices and methods of manufacturing thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming a first material on the semiconductor wafer, and affecting the semiconductor wafer with a manufacturing process. The manufacturing process inadvertently causes a portion of the first material to be removed. The portion of the first material is replaced with a second material. | 12-11-2008 |
| 20080303061 | Substrate Production Method and Substrate - A process for the manufacture of a substrate having a top layer of a first material and an underlying layer of a second material whose lattice parameter is different from that of the first material. The process includes the steps of conducting an amorphization of the top layer to create an amorphous region in the top layer lying between an exposed surface and an amorphization interface, with that portion of the top layer below the interface being shielded from the amorphization and remaining as a crystalline structure; recrystallizing the amorphous region while also creating a network of defects at the interface, wherein the network forms a boundary for dislocations from the crystalline structure of the top layer, and containing the dislocations in the portion of the top layer that is located below the interface. Also, the substrates obtained by the method. | 12-11-2008 |
| 20080303062 | SEMICONDUCTOR DEVICE WITH STRAIN IN CHANNEL REGION AND ITS MANUFACTURE METHOD - A first film made of SiGe is formed over a support substrate whose surface layer is made of Si. A gate electrode is formed over a partial area of the first film, and source and drain regions are formed in the surface layer of the support substrate on both sides of the gate electrode. The gate electrode and source and drain regions constitute a first field effect transistor. A first stressor internally containing compressive strain or tensile strain is formed over the first film on both sides of the gate electrode of the first field effect transistor. The first stressor forms strain in a channel region. | 12-11-2008 |
| 20080308841 | Semiconductor Substrate, Semiconductor Device and Method of Manufacturing a Semiconductor Substrate - A semiconductor substrate ( | 12-18-2008 |
| 20080308842 | Forming silicides with reduced tailing on silicon germanium and silicon - A semiconductor structure includes a semiconductor substrate; a gate stack on the semiconductor substrate; an epitaxial region having at least a portion in the semiconductor substrate and adjacent to the gate stack, wherein the epitaxial region comprises an impurity of a first conductivity type; a first portion of the semiconductor substrate adjoining the epitaxial region, wherein the first portion of the semiconductor substrate is of the first conductivity type; and a second portion of the semiconductor substrate adjoining the first portion. The second portion of the semiconductor substrate is of a second conductivity type opposite the first conductivity type. A silicide region is formed on the epitaxial region and the first and the second portions of the semiconductor substrate. | 12-18-2008 |
| 20080315253 | FRONT AND BACKSIDE PROCESSED THIN FILM ELECTRONIC DEVICES - This invention provides methods for fabricating thin film electronic devices with both front- and backside processing capabilities. Using these methods, high temperature processing steps may be carried out during both frontside and backside processing. The methods are well-suited for fabricating back-gate and double-gate field effect transistors, double-sided bipolar transistors and 3D integrated circuits. | 12-25-2008 |
| 20080315254 | SEMICONDUCTOR DEVICE FABRICATION METHOD, SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR LAYER FORMATION METHOD - A semiconductor device fabrication method and a semiconductor layer formation method for making a semiconductor layer having excellent morphology selectively epitaxial-grow over a semiconductor, and a semiconductor device. When a recessed source/drain pMOSFET is fabricated, a gate electrode is formed over a Si substrate in which STIs are formed with a gate insulating film therebetween (step S | 12-25-2008 |
| 20080315255 | Thermal Expansion Transition Buffer Layer for Gallium Nitride on Silicon - A method is provided for forming a matching thermal expansion interface between silicon (Si) and gallium nitride (GaN) films. The method provides a (111) Si substrate with a first thermal expansion coefficient (TEC), and forms a silicon-germanium (SiGe) film overlying the Si substrate. A buffer layer is deposited overlying the SiGe film. The buffer layer may be aluminum nitride (AlN) or aluminum-gallium nitride (AlGaN). A GaN film is deposited overlying the buffer layer having a second TEC, greater than the first TEC. The SiGe film has a third TEC, with a value in between the first and second TECs. In one aspect, a graded SiGe film may be formed having a Ge content ratio in a range of about 0% to 50%, where the Ge content increases with the graded SiGe film thickness. | 12-25-2008 |
| 20090001413 | METHOD OF DOPING FIELD-EFFECT-TRANSISTORS (FETs) WITH REDUCED STRESS/STRAIN RELAXATION AND RESULTING FET DEVICES - A method for fabricating a FET transistor for an integrated circuit by the steps of forming recesses in a substrate on both sides of a gate on the substrate, halo/extension ion implanting into the recesses, and filling the recesses with embedded strained layers comprising dopants for in-situ doping of the source and drain of the transistor. The stress/strain relaxation of the resulting transistor is reduced. | 01-01-2009 |
| 20090001414 | STRUCTURES AND METHODS OF FORMING SIGE AND SIGEC BURIED LAYER FOR SOI/SIGE TECHNOLOGY - Semiconductor structures and methods of forming semiconductor structures, and more particularly to structures and methods of forming SiGe and/or SiGeC buried layers for SOI/SiGe devices. An integrated structure includes discontinuous, buried layers having alternating Si and SiGe or SiGeC regions. The structure further includes isolation structures at an interface between the Si and SiGe or SiGeC regions to reduce defects between the alternating regions. Devices are associated with the Si and SiGe or SiGeC regions. | 01-01-2009 |
| 20090001415 | MULTI-GATE TRANSISTOR WITH STRAINED BODY - A semiconductor device comprises a semiconductor body having a top surface and laterally opposite sidewalls formed on a substrate, wherein the semiconductor body comprises a silicon alloy core having a top surface and laterally opposite sidewalls formed on a silicon fin structure, and a silicon shell layer formed on the top surface and the laterally opposite sidewalls of the silicon alloy core, wherein the silicon alloy core imparts a strain on the silicon shell layer. The semiconductor device further comprises a gate dielectric layer formed on the top surface and the laterally opposite sidewalls of the semiconductor body and a gate electrode formed on the gate dielectric layer. | 01-01-2009 |
| 20090001416 | Growth of indium gallium nitride (InGaN) on porous gallium nitride (GaN) template by metal-organic chemical vapor deposition (MOCVD) - Si-doped porous GaN is fabricated by UV-enhanced Pt-assisted electrochemical etching and together with a low-temperature grown buffer layer are utilized as the template for InGaN growth. The porous network in GaN shows nanostructures formed on the surface. Subsequent growth of InGaN shows that it is relaxed on these nanostructures as the area on which the growth takes place is very small. The strain relaxation favors higher indium incorporation. Besides, this porous network creates a relatively rough surface of GaN to modify the surface energy which can enhance the nucleation of impinging indium atoms thereby increasing indium incorporation. It shifts the luminescence from 445 nm for a conventionally grown InGaN structure to 575 nm and enhances the intensity by more than two-fold for the growth technique in the present invention under the same growth conditions. There is also a spectral broadening of the output extending from 480 nm to 720 nm. | 01-01-2009 |
| 20090001417 | STRUCTURES AND METHODS OF FORMING SIGE AND SIGEC BURIED LAYER FOR SOI/SIGE TECHNOLOGY - Semiconductor structures and methods of forming semiconductor structures, and more particularly to structures and methods of forming SiGe and/or SiGeC buried layers for SOI/SiGe devices. An integrated structure includes discontinuous, buried layers having alternating Si and SiGe or SiGeC regions. The structure further includes isolation structures at an interface between the Si and SiGe or SiGeC regions to reduce defects between the alternating regions. Devices are associated with the Si and SiGe or SiGeC regions. The invention is also directed to a design structure on which a circuit resides. | 01-01-2009 |
| 20090001418 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating a transistor, the method includes forming a gate over a substrate to form a first resultant structure, forming a gate spacer at first and second sidewalls of the gate, etching portions of the substrate proximate to the gate spacer to form a recess in a source/drain region of the substrate, forming a first epitaxial layer including germanium to fill the recess, and performing a high temperature oxidation process to form a second epitaxial layer including germanium over an interfacial layer between the substrate and the first epitaxial layer, the second epitaxial layer having a germanium concentration that is higher than a germanium concentration of the first epitaxial SiGe layer, thereby forming a second resultant structure. | 01-01-2009 |
| 20090001419 | Non-Volatile Memory Devices and Methods of Fabricating the Same - Provided are non-volatile memory devices that may realize high integration and have high reliability. A plurality of first semiconductor layers are stacked on a substrate. A plurality of second semiconductor layers are interposed between the plurality of first semiconductor layers, respectively, and are recessed from one end of each of the plurality of first semiconductor layers to define a plurality of first trenches between the plurality of first semiconductor layers. A plurality of first storage nodes are provided on surfaces of the second semiconductor layers inside the plurality of first trenches. Devices may include a plurality of first control gate electrodes that are formed on the plurality of first storage nodes to fill the plurality of first trenches. | 01-01-2009 |
| 20090001420 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A semiconductor device includes a gate electrode disposed on a semiconductor substrate and source/drain regions disposed at both sides of the gate electrode, the source/drain regions being formed by implanting impurities. The source/drain regions include an epitaxial layer formed by epitaxially growing a semiconductor material having a different lattice constant from that of the semiconductor substrate in a recessed position at a side of the gate electrode, and a diffusion layer disposed in a surface layer of the semiconductor substrate. | 01-01-2009 |
| 20090014755 | DIRECT BOND SUBSTRATE OF IMPROVED BONDED INTERFACE HEAT RESISTANCE - A direct bond substrate formed by bonding semiconductor substrates together, a semiconductor device using the direct bond substrate and a manufacturing method thereof are disclosed. A nitride film, oxynitride film, carbide film or an oxide film containing carbon is provided on the bonded interface of the semiconductor substrates in the direct bond substrate. | 01-15-2009 |
| 20090020783 | TRANSISTOR WITH DIFFERENTLY DOPED STRAINED CURRENT ELECTRODE REGION - A transistor is formed by providing a semiconductor layer and forming a control electrode overlying the semiconductor layer. A portion of the semiconductor layer is removed lateral to the control electrode to form a first recess and a second recess on opposing sides of the control electrode. A first stressor is formed within the first recess and has a first doping profile. A second stressor is formed within the second recess and has the first doping profile. A third stressor is formed overlying the first stressor. The third stressor has a second doping profile that has a higher electrode current doping concentration than the first profile. A fourth stressor overlying the second stressor is formed and has the second doping profile. A first current electrode and a second current electrode of the transistor include at least a portion of the third stressor and the fourth stressor, respectively. | 01-22-2009 |
| 20090026495 | LAYER TRANSFER OF LOW DEFECT SiGe USING AN ETCH-BACK PROCESS - A method for forming strained Si or SiGe on relaxed SiGe on insulator (SGOI) or a SiGe on Si heterostructure is described incorporating growing epitaxial Si | 01-29-2009 |
| 20090026496 | METHODS OF MAKING SUBSTITUTIONALLY CARBON-DOPED CRYSTALLINE SI-CONTAINING MATERIALS BY CHEMICAL VAPOR DEPOSITION - Methods of making Si-containing films that contain relatively high levels of substitutional dopants involve chemical vapor deposition using trisilane and a dopant precursor. Extremely high levels of substitutional incorporation may be obtained, including crystalline silicon films that contain 2.4 atomic % or greater substitutional carbon. Substitutionally doped Si-containing films may be selectively deposited onto the crystalline surfaces of mixed substrates by introducing an etchant gas during deposition. | 01-29-2009 |
| 20090032840 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE - A semiconductor device and method of manufacture and, more particularly, a semiconductor device having strain films and a method of manufacture. The device includes an embedded SiGeC layer in source and drain regions of an NFET device and an embedded SiGe layer in source and drain regions of a PFET device. The PFET device is subject to compressive strain. The method includes embedding SiGe in source and drain regions of an NFET device and implanting carbon in the embedded SiGe forming an SiGeC layer in the source and drain regions of the NFET device. The SiGeC is melt laser annealed to uniformly distribute the carbon in the SiGeC layer, thereby counteracting a strain generated by the embedded SiGe. | 02-05-2009 |
| 20090032841 | Semiconductor Devices and Methods of Manufacture Thereof - Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming a gate dielectric over the semiconductor wafer, and forming a gate over the gate dielectric. At least one recess is formed in the semiconductor wafer proximate the gate and the gate dielectric, at least a portion of the at least one recess extending beneath the gate. The at least one recess in the semiconductor wafer is filled with a semiconductive material. | 02-05-2009 |
| 20090032842 | NANOMEMBRANE STRUCTURES HAVING MIXED CRYSTALLINE ORIENTATIONS AND COMPOSITIONS - The present nanomembrane structures include a multilayer film comprising a single-crystalline layer of semiconductor material disposed between two other single-crystalline layers of semiconductor material. A plurality of holes extending through the nanomembrane are at least partially, and preferably entirely, filled with a filler material which is also a semiconductor, but which differs from the nanomembrane semiconductor materials in composition, crystal orientation, or both. | 02-05-2009 |
| 20090032843 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A semiconductor device includes a semiconductor substrate, and a MIS type FET provided on the semiconductor substrate, the MIS type FET includes a gate insulating film provide on the semiconductor substrate, a gate electrode provided on the gate insulating film, a channel region provided in the semiconductor substrate and being isolated from the gate electrode by the gate insulating film, source/drain layers sandwiching the channel region, the source/drain layers including semiconductor layers having lattice spacing which is different from that of the semiconductor substrate and having uniform height, and a metal silicide layer provided on a region including a top surfaces of the source/drain layers and failing to provide on the channel region. | 02-05-2009 |
| 20090032844 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A method of manufacturing a semiconductor device has forming a transistor including a source and a drain, forming a mixed crystal layer over the source and the drain, forming a silicide layer over the mixed crystal layer, forming a first insulating film and a second insulating film over the silicide layer, forming a contact hole, performing an oxygen plasma treatment, and forming a conductive plug in the contact hole. | 02-05-2009 |
| 20090039388 | INTEGRATED CIRCUIT SYSTEM EMPLOYING A CONDENSATION PROCESS - An integrated circuit system that includes: providing a PFET device including a PFET gate and a PFET gate dielectric; forming a source/drain extension from a first epitaxial layer aligned to a first PFET gate sidewall spacer; and forming a source/drain from a second epitaxial layer aligned to a second PFET gate sidewall spacer. | 02-12-2009 |
| 20090039389 | Method of fabricating metal oxide semiconductor transistor - The present invention provides a method for fabricating a metal oxide semiconductor transistor. First, a semiconductor substrate is provided and at least a gate is formed on the semiconductor substrate. A protective layer is then formed on the semiconductor substrate and the gate. Subsequently, at least a recess is formed in the semiconductor substrate adjacent to the gate, and then an epitaxial layer is formed in the recess. A lightly doped region is formed in the semiconductor substrate adjacent to the gate. Finally, a spacer is formed on the sidewall of the gate. | 02-12-2009 |
| 20090039390 | CMOS TRANSISTOR JUNCTION REGIONS FORMED BY A CVD ETCHING AND DEPOSITION SEQUENCE - This invention adds to the art of replacement source-drain cMOS transistors. Processes may involve etching a recess in the substrate material using one equipment set, then performing deposition in another. Disclosed is a method to perform the etch and subsequent deposition in the same reactor without atmospheric exposure. In-situ etching of the source-drain recess for replacement source-drain applications provides several advantages over state of the art ex-situ etching. Transistor drive current is improved by: (1) Eliminating contamination of the silicon-epilayer interface when the as-etched surface is exposed to atmosphere and (2) Precise control over the shape of the etch recess. Deposition may be done by a variety of techniques including selective and non-selective methods. In the case of blanket deposition, a measure to avoid amorphous deposition in performance critical regions is also presented. | 02-12-2009 |
| 20090039391 | Semiconductor device and method for fabricating the same - On an insulation layer | 02-12-2009 |
| 20090045437 | METHOD AND APPARATUS FOR FORMING A SEMI-INSULATING TRANSITION INTERFACE - The disclosure relates to a method for forming an intermediate lattice transition buffer layer. The method includes: (a) depositing a first graded InAlAs layer on a substrate at a first constant temperature, the first graded InAlAs layer having an In/AI composition ratio which increases across the buffer layer from a first level to a second level; (b) annealing at least the first graded InAlAs layer; (c) depositing the second graded InAlAs layer on the first graded InAlAs layer at the first constant temperature, the second graded InAlAs layer having an In/Al composition ratio which increases across the buffer layer from the second level to a third level; and (d) annealing at least the second graded InAlAs layer; the buffer layer being formed under Groups III/V overpressure. | 02-19-2009 |
| 20090050935 | Silicon-Germanium Hydrides and Methods for Making and Using Same - The present invention provides silicon-germanium hydride compounds, methods for their synthesis, methods for their deposition, and semiconductor structures made using the compounds. The compounds are defined by formula: SiHnI (GeHn2)y, wherein y is 2, 3, or 4 wherein n | 02-26-2009 |
| 20090065804 | BIPOLAR TRANSISTOR WITH LOW RESISTANCE BASE CONTACT AND METHOD OF MAKING THE SAME - Embodiments of the present invention provide a bipolar transistor with low resistance base contact and method of manufacturing the same. The bipolar transistor includes an emitter, a collector, and an intrinsic base between the emitter and the collector. The intrinsic base extends laterally to an extrinsic base. The extrinsic base further includes a first semiconductor material with a first bandgap and a second semiconductor material with a second bandgap that is smaller than the first bandgap. | 03-12-2009 |
| 20090065805 | Method and structure using a pure silicon dioxide hardmask for gate pattering for strained silicon MOS transistors - A structure using pure silicon dioxide hard marsk for gate pattern. In an embodiment, the present invention provides a partially completed semiconductor integrated circuit device. The device has a semiconductor substrate and a dielectric layer overlying the semiconductor substrate. The device has a gate structure including edges and a substantially pure silicon dioxide mask structure overlying the gate structure. A thickness ranging from about 400 to about 600 Angstroms of the substantially pure silicon dioxide mask structure is included. The device has a dielectric layer forming sidewall spacers on the edges of the gate structure to protect the gate structure including the edges and an exposed portion of the pure silicon dioxide mask structure overlying the gate structure. The device has an epitaxially grown fill material in an etched source region and an etched drain region. | 03-12-2009 |
| 20090065806 | MOS TRANSISTOR AND FABRICATION METHOD THEREOF - A MOS transistor and a fabrication method thereof are disclosed. The mobility of electrons or holes serving as charge carriers of the MOS transistor can be improved by forming a lattice stress-causing material in source/drain regions of a MOS transistor or by forming a gapping layer having a tensile stress in the MOS transistor. As a result, a driving current of the MOS transistor may be reduced. | 03-12-2009 |
| 20090065807 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD FOR THE SAME - The semiconductor device includes: a first MIS transistor formed on a first region of a first conductivity type in a semiconductor substrate; and a second MIS transistor formed on a second region of a second conductivity type in the semiconductor substrate. The first MIS transistor has a first gate insulating film and a first gate electrode formed on the first region, first sidewalls formed on the side faces of the first gate electrode, and first source/drain regions made of silicon formed in portions of the first region. The second MIS transistor has a second gate insulating film and a second gate electrode formed on the second region, second sidewalls formed on the side faces of the second gate electrode, and second source/drain regions including silicon germanium formed in portions of the second region. The second sidewalls are smaller in height than the first sidewalls. | 03-12-2009 |
| 20090065808 | SEMICONDUCTOR TRANSISTOR HAVING A STRESSED CHANNEL - A process is described for manufacturing an improved PMOS semiconductor transistor. Recesses are etched into a layer of epitaxial silicon. Source and drain films are deposited in the recesses. The source and drain films are made of an alloy of silicon and germanium. The alloy is epitaxially deposited on the layer of silicon. The alloy thus has a lattice having the same structure as the structure of the lattice of the layer of silicon. However, due to the inclusion of the germanium, the lattice of the alloy has a larger spacing than the spacing of the lattice of the layer of silicon. The larger spacing creates a stress in a channel of the transistor between the source and drain films. The stress increases I | 03-12-2009 |
| 20090065809 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A semiconductor device is provided in which a stress can be effectively applied from a semiconductor layer having a different lattice constant from a semiconductor substrate to a channel part, whereby carrier mobility can be improved and higher functionality can be achieved. In a semiconductor device | 03-12-2009 |
| 20090072270 | Low voltage transistors - The invention provides a transistor having a substrate, a structure supported by the substrate including a source, drain, gate, and channel, wherein the source and the channel are made of different materials, and a tunnel junction formed between the source and the channel, whereby the tunnel junction is configured for injecting carriers from the source to the channel. | 03-19-2009 |
| 20090072271 | EPITAXIAL GROWTH OF THIN SMOOTH GERMANIUM (Ge) ON SILICON (Si) UTILIZING AN INTERFACIAL SILICON GERMANIUM (SiGe) PULSE GROWTH METHOD - Disclosed is a method of growing thin and smooth germanium (Ge) on a strained or relaxed silicon (Si) layer comprising the steps of: (a) treating surface of the strained or relaxed Si layer to gaseous precursors of both Si (e.g., silane) and Ge (e.g., germane) for a predetermined short time duration Δt, where 1≦Δt≦30 seconds; and (b) depositing a thin Ge film on top of said treated Si layer, wherein said treatment step of (a) reduces growth time and surface roughness of the thin Ge film (e.g., sub-5 nm or sub-20 nm thick) deposited on the Si layer. The treatment step (a) can be conducted at a steady predetermined temperature T, where 450≦T≦900° C. The predetermined short time duration Δt can be chosen such that less than 10 A of SiGe is deposited. | 03-19-2009 |
| 20090085062 | METHOD TO INTRODUCE UNIAXIAL STRAIN IN MULTIGATE NANOSCALE TRANSISTORS BY SELF ALIGNED SI TO SIGE CONVERSION PROCESSES AND STRUCTURES FORMED THEREBY - Methods of forming a microelectronic structure are described. Embodiments of those methods may include providing a gate electrode comprising a top surface and first and second laterally opposite sidewalls, wherein a hard mask is disposed on the top surface, a source drain region disposed on opposite sides of the gate electrode, and a spacer disposed on the first and second laterally opposed sidewalls of the gate electrode, forming a silicon germanium layer on exposed portions of the top surface and the first and second laterally opposite sidewalls of the source drain region and then oxidizing a portion of the silicon germanium layer, wherein a germanium portion of the silicon germanium layer is forced down into the source drain region to convert a silicon portion of the source drain region into a silicon germanium portion of the source drain region. | 04-02-2009 |
| 20090090933 | METHOD OF PRODUCING STRAINED Si-SOI SUBSTRATE AND STRAINED Si-SOI SUBSTRATE PRODUCED BY THE SAME - A strained Si-SOI substrate, and a method for producing the same are provided, wherein the method includes the steps of growing a SiGe mixed crystal layer | 04-09-2009 |
| 20090090934 | Field Effect Transistor and Method for Manufacturing the Same - A method for manufacturing a field effect transistor, includes: forming a mask of an insulating film on a semiconductor layer containing Si formed on a semiconductor substrate; forming the semiconductor layer into a mesa structure by performing etching with the use of the mask, the mesa structure extending in a direction parallel to an upper face of the semiconductor substrate; narrowing a distance between two sidewalls of the mesa structure and flattening the sidewalls by performing a heat treatment in a hydrogen atmosphere, the two sidewalls extending in the direction and facing each other; forming a gate insulating film covering the mesa structure having the sidewalls flattened; forming a gate electrode covering the gate insulating film; and forming source and drain regions at portions of the mesa structure, the portions being located on two sides of the gate electrode. | 04-09-2009 |
| 20090090935 | High Performance CMOS Device Design - A semiconductor device includes a gate, which comprises a gate electrode and a gate dielectric underlying the gate electrode, a spacer formed on a sidewall of the gate electrode and the gate dielectric, a buffer layer having a first portion underlying the gate dielectric and the spacer and a second portion adjacent the spacer wherein the top surface of the second portion of the buffer layer is recessed below the top surface of the first portion of the buffer layer, and a source/drain region substantially aligned with the spacer. The buffer layer preferably has a greater lattice constant than an underlying semiconductor substrate. The semiconductor device may further include a semiconductor-capping layer between the buffer layer and the gate dielectric, wherein the semiconductor-capping layer has a smaller lattice constant then the buffer layer. | 04-09-2009 |
| 20090095980 | Reducing Resistance in Source and Drain Regions of FinFETs - A semiconductor structure includes a semiconductor fin on a top surface of a substrate, wherein the semiconductor fin includes a middle section having a first width; and a first and a second end section connected to opposite ends of the middle section, wherein the first and the second end sections each comprises at least a top portion having a second width greater than the first width. The semiconductor structure further includes a gate dielectric layer on a top surface and sidewalls of the middle section of the semiconductor fin; and a gate electrode on the gate dielectric layer. | 04-16-2009 |
| 20090095981 | Complementary metal oxide semiconductor device and method of manufacturing the same - Provided are a complementary metal oxide semiconductor (CMOS) device and a method of manufacturing the same. The CMOS device comprises an epi-layer that may be formed on a substrate; a first semiconductor layer and a second semiconductor layer that may be formed on different regions of the epi-layer, respectively; and a PMOS transistor and a NMOS transistor that may be formed on the first and second semiconductor layers, respectively. | 04-16-2009 |
| 20090095982 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device to which a stress technique is applied and in which a leakage current caused by silicidation can be suppressed. A gate electrode is formed over an element region defined by an isolation region formed in a semiconductor substrate with a gate insulating film between. Extension regions and source/drain regions are formed in the element region on both sides of the gate electrode. In addition, a semiconductor layer which differs from the semiconductor substrate in lattice constant is formed apart from at least part of the isolation region. By doing so, the formation of a spike near the isolation region is suppressed even if a silicide layer is formed. Accordingly, a leakage current caused by such a spike can be suppressed. | 04-16-2009 |
| 20090108290 | Source/Drain Strained Layers - A semiconductor device and method of manufacture thereof wherein a PMOS source/drain region of a transistor within the substrate includes a first strained layer in the PMOS source/drain region and a first capping layer in contact with the first strained layer. Further, the semiconductor device and method provide for an NMOS source/drain region of a transistor within the substrate including a second strained layer in the NMOS source/drain region and a second capping layer in contact with the second strained layer. | 04-30-2009 |
| 20090108291 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device including a gate structure, two doped regions, and two buffer layers is provided. The gate structure is disposed on a substrate. The two doped regions are made of boron doped silicon germanium (SiGeB) and are disposed in the substrate at both sides of the gate structure. The two buffer layers are made of carbon doped silicon germanium (SiGeC) and are respectively disposed between the two doped regions and the substrate. | 04-30-2009 |
| 20090108292 | Floating Body Field-Effect Transistors, and Methods of Forming Floating Body Field-Effect Transistors - In one embodiment, a floating body field-effect transistor includes a pair of source/drain regions having a floating body channel region received therebetween. The source/drain regions and the floating body channel region are received over an insulator. A gate electrode is proximate the floating body channel region. A gate dielectric is received between the gate electrode and the floating body channel region. The floating body channel region has a semiconductor Si | 04-30-2009 |
| 20090108293 | Method for Suppressing Lattice Defects in a Semiconductor Substrate - A method for suppressing the formation of leakage-promoting defects in a crystal lattice following dopant implantation in the lattice. The process provides a compressive layer of atoms, these atoms having a size greater than that of the lattice member atoms. The lattice is then annealed for a time sufficient for interstitial defect atoms to be emitted from the compressive layer, and in that manner energetically stable defects are formed in the lattice at a distance from the compressive layer. | 04-30-2009 |
| 20090108294 | SCALABLE HIGH-K DIELECTRIC GATE STACK - A stack comprising a dielectric interface layer, a high-k gate dielectric layer, a group IIA/IIIB element layer is formed in that order on a semiconductor substrate. A metal aluminum nitride layer and, optionally, a semiconductor layer are formed on the stack. The stack is annealed at a raised temperature, e.g., at about 1,000° C. so that the materials in the stack are mixed to form a mixed high-k gate dielectric layer. The mixed high-k gate dielectric layer is doped with a group IIA/IIIB element and aluminum, and has a lower effective oxide thickness (EOT) than a conventional gate stack containing no aluminum. The inventive mixed high-k gate dielectric layer is amenable to EOT scaling due to the absence of a dielectric interface layer, which is caused by scavenging, i.e. consumption of any dielectric interface layer, by the IIA/IIB elements and aluminum. | 04-30-2009 |
| 20090108295 | DOPANT PROFILE TUNING FOR MOS DEVICES BY ADAPTING A SPACER WIDTH PRIOR TO IMPLANTATION - By selectively modifying the spacer width, for instance, by reducing the spacer width on the basis of implantation masks, an individual adaptation of dopant profiles may be achieved without unduly contributing to the overall process complexity. For example, in sophisticated integrated circuits, the performance of transistors of the same or different conductivity type may be individually adjusted by providing different sidewall spacer widths on the basis of an appropriate masking regime. | 04-30-2009 |
| 20090114949 | HIGH-MOBILITY TRENCH MOSFETS - High-mobility vertical trench DMOSFETs and methods for manufacturing are disclosed. A source region, a drain region or a channel region of a high-mobility vertical trench DMOSFET may comprise silicon germanium (SiGe) that increases the mobility of the charge carriers in the channel region. In some embodiments the channel region may be strained to increase channel charge carriers mobility. | 05-07-2009 |
| 20090121256 | SEMICONDUCTOR DEVICE WITH IMPROVED SHORT CHANNEL EFFECT OF A PMOS AND STABILIZED CURRENT OF AN NMOS AND METHOD FOR MANUFACTURING THE SAME - The present invention relates to a semiconductor device which is capable of simultaneously improving a short channel effect of a PMOS and the current of an NMOS and a method for manufacturing the same. The semiconductor device includes first and second gates formed over first and second areas of a semiconductor substrate, respectively; and first and second junction areas formed in a portion of the semiconductor substrate corresponding to both sides of the first gate and a portion of the semiconductor substrate corresponding to both sides of the second gate, and including a projection, respectively, wherein the projection of the first junction area has a height higher than the height of the projection of the second junction area, and the second junction area is formed such that it has a depth from the surface of the semiconductor substrate deeper than the depth of the first junction area. | 05-14-2009 |
| 20090121257 | SEMICONDUCTOR SUPERJUNCTION STRUCTURE - Embodiments of semiconductor structures are provided for a semiconductor device employing a superjunction structure. The device includes interleaved regions of first and second semiconductor materials of, respectively, first and second conductivity types and first and second mobilities. The second conductivity type is opposite the first conductivity type and the second mobility exceeds the first mobility for a first carrier type. The first and second semiconductor materials are separated by substantially parallel PN junctions and form a superjunction structure. The device also includes electrical contacts coupled to the first and second materials so that, in response to applied signals, a principal current of the first carrier type flows through the second material. | 05-14-2009 |
| 20090127583 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - Provided is a semiconductor device containing a silicon single crystal substrate | 05-21-2009 |
| 20090140292 | INTEGRATED CIRCUIT AND METHOD OF FABRICATION THEREOF - A method of forming an integrated circuit structure comprising the steps of forming a first and second device region on a surface of a wafer, forming a spacer of a first width on a sidewall of a first gate stack in the first device region, forming a spacer of a second width on a sidewall of a second gate stack in the second device region, with the first width being different from the second width. | 06-04-2009 |
| 20090146180 | LDMOS WITH CHANNEL STRESS - A method of forming a metal oxide semiconductor (MOS) device comprises defining an active area in an unstrained semiconductor layer structure, depositing a hard mask overlying the active area and a region outside of the active area, patterning the hard mask to expose the active area, selectively growing a strained semiconductor layer overlying the exposed active area, and forming a remainder of the MOS device. The active area includes a first doped region of first conductivity type and a second doped region of second conductivity type. The strained semiconductor layer provides a biaxially strained channel for the MOS device. During a portion of forming the remainder of the MOS device, dopant of the first conductivity type of the first doped region of the active area and dopant of the second conductivity type of the second doped region of the active area diffuses into overlying portions of the strained semiconductor layer to create a correspondingly doped strained semiconductor layer, thereby providing corresponding doping for the biaxially strained channel. | 06-11-2009 |
| 20090146181 | INTEGRATED CIRCUIT SYSTEM EMPLOYING DIFFUSED SOURCE/DRAIN EXTENSIONS - An integrated circuit system that includes: providing a PFET device including a doped epitaxial layer; and forming a source/drain extension by employing an energy source to diffuse a dopant from the doped epitaxial layer. | 06-11-2009 |
| 20090146182 | NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A nitride semiconductor device includes: first through third nitride semiconductor layers formed in sequence over a substrate. The second nitride semiconductor layer has a band gap energy larger than that of the first nitride semiconductor layer. The third nitride semiconductor layer has an opening. A p-type fourth nitride semiconductor layer is formed so that the opening is filled therewith. A gate electrode is formed on the fourth nitride semiconductor layer. | 06-11-2009 |
| 20090152589 | Systems And Methods To Increase Uniaxial Compressive Stress In Tri-Gate Transistors - A transistor structure that increases uniaxial compressive stress on the channel region of a tri-gate transistor comprises at least two semiconductor bodies formed on a substrate, each semiconductor body having a pair of laterally opposite sidewalls and a top surface, a common source region formed on one end of the semiconductor bodies, wherein the common source region is coupled to all of the at least two semiconductor bodies, a common drain region formed on another end of the semiconductor bodies, wherein the common drain region is coupled to all of the at least two semiconductor bodies, and a common gate electrode formed over the at least two semiconductor bodies, wherein the common gate electrode provides a gate electrode for each of the at least two semiconductor bodies and wherein the common gate electrode has a pair of laterally opposite sidewalls that are substantially perpendicular to the sidewalls of the semiconductor bodies. | 06-18-2009 |
| 20090166675 | STRAIN ENGINEERING IN SEMICONDUCTOR COMPONENTS - This disclosure relates to strain engineering to improve the performance of semiconductor components that include a strained region of the semiconductor substrate. The disclosure involves the amorphization of the target region and the recrystallization of the atomic lattice whilst imposing a strain on the region. The region so formed will form a strained lattice, wherein the strain is uniformly distributed throughout the region, and which retains the intrinsic strain even if the source of the mechanical strain is removed. The disclosure includes methods for forming semiconductor substrates having strained regions (such as semiconductor components having a strained channel region) and semiconductor components formed thereby, as well as variations having various properties and advantages. | 07-02-2009 |
| 20090173967 | STRAINED-CHANNEL FET COMPRISING TWIST-BONDED SEMICONDUCTOR LAYER - This invention provides a strained-channel field effect transistor (FET) in which the semiconductor of the channel of the FET is formed in a compliant substrate layer disposed over a twist-bonded semiconductor interface. This FET geometry increases the efficacy of local stress elements such as stress liners and embedded lattice-mismatched source/drain regions by mechanically decoupling the semiconductor of the channel region from the underlying rigid substrate. These strained-channel FETs may be incorporated into complementary metal oxide semiconductor (CMOS) circuits in various combinations. In one embodiment of this invention, both pFETs and nFETs are in a twist-bonded (001) silicon layer on a (001) silicon base layer. In another embodiment, pFETs are in a twist-bonded (011) silicon layer on a (001) silicon base layer and nFETs are in a conventional, non-twist-bonded (001) silicon base layer. This invention also provides a twist-bonded semiconductor layer on a polycrystalline base layer, as well as methods for fabricating the aforementioned FETs. | 07-09-2009 |
| 20090184341 | Elimination of STI recess and facet growth in embedded silicon-germanium (eSiGe) module - A method (and semiconductor device) of fabricating a semiconductor device eliminates shallow trench isolation (STI) recess in embedded SiGe p-type field effect transistor (pFET) structures. This increases device performance by improving isolation and decreasing leakage current caused by SiGe facet growth and silicide encroachment at the STI. A mask is selectively formed over the STI and adjacent nFET regions to protect them during formation (e.g., reactive ion etching (RIE)) of the embedded source/drain (S/D) regions of the pFET. The mask also extends over the STI edge by a predetermined distance to cover a portion of the embedded S/D region disposed between the STI and gate structure. This helps protect or isolate the STI region during SiGe layer formation in the defined embedded S/D regions. | 07-23-2009 |
| 20090194788 | STRAINED CHANNEL TRANSISTOR STRUCTURE AND METHOD - A transistor device structure comprising: a substrate portion formed from a first material; and a source region, a drain region and a channel region formed in said substrate, the source and drain regions comprising a plurality of islands of a second material different from the first material, the islands being arranged to induce a strain in said channel region of the substrate. | 08-06-2009 |
| 20090194789 | METHOD OF CREATING A STRAINED CHANNEL REGION IN A TRANSISTOR BY DEEP IMPLANTATION OF STRAIN-INDUCING SPECIES BELOW THE CHANNEL REGION - By incorporating a carbon species below the channel region of a P-channel transistor prior to the formation of the gate electrode structure, an efficient strain-inducing mechanism may provided, thereby enhancing performance of P-channel transistors. The position and size of the strain-inducing region may be determined on the basis of an implantation mask and respective implantation parameters, thereby providing a high degree of compatibility with conventional techniques, since the strain-inducing region may be incorporated at an early manufacturing stage, directly to respective “large area” contact elements. | 08-06-2009 |
| 20090218596 | Buffer layers for device isolation of devices grown on silicon - Various embodiments provide a buffer layer that is grown over a silicon substrate that provides desirable device isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate. | 09-03-2009 |
| 20090230427 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. The structure includes a gate stack comprising an oxide layer, a polysilicon layer and sidewalls with adjacent spacers. The structure further includes an epitaxially grown straining material directly on the polysilicon layer and between portions of the sidewalls. The epitaxially grown straining material, in a relaxed state, strains the polysilicon layer. | 09-17-2009 |
| 20090236632 | FET HAVING HIGH-K, VT MODIFYING CHANNEL AND GATE EXTENSION DEVOID OF HIGH-K AND/OR VT MODIFYING MATERIAL, AND DESIGN STRUCTURE - A field effect transistor (FET) including a high dielectric constant (high-k), threshold voltage (Vt) modifying channel and a gate extension devoid of the high-k and/or Vt modifying material, and a related design structure, are disclosed. In one embodiment, a FET may include a gate having a channel region thereunder including a gate insulator portion of a high dielectric constant (high-k) material and a threshold voltage (Vt) modifying portion (e.g., of SiGe); and a gate extension having a region thereunder devoid of at least one of the high-k material or the Vt modifying portion. | 09-24-2009 |
| 20090236633 | SRAM Devices Utilizing Strained-Channel Transistors and Methods of Manufacture - A novel SRAM memory cell structure and method of making the same are provided. The SRAM memory cell structure comprises strained PMOS transistors formed in a semiconductor substrate. The PMOS transistors comprise epitaxial grown source/drain regions that result in significant PMOS transistor drive current increase. An insulation layer is formed atop an STI that is used to electrically isolate adjacent PMOS transistors. The insulation layer is substantially elevated from the semiconductor substrate surface. The elevated insulation layer facilitates the formation of desirable thick epitaxial source/drain regions, and prevents the bridging between adjacent epitaxial layers due to the epitaxial layer lateral extension during the process of growing epitaxial sour/drain regions. The processing steps of forming the elevated insulation layer are compatible with a conventional CMOS process flow. | 09-24-2009 |
| 20090236634 | Nitride semiconductor epitaxial wafer and nitride semiconductor device - A nitride semiconductor epitaxial wafer includes a growth substrate including a surface for growing a nitride semiconductor thereon, a first structure layer formed on the growth substrate, a dislocation propagation direction changing layer formed on the first structure layer for changing a propagation direction of a dislocation propagated in the first structure layer into a lateral direction, a second structure layer formed on the dislocation propagation direction changing layer, and a buffer layer formed on the second structure layer for changing a propagation direction of a dislocation propagated in the second structure layer. | 09-24-2009 |
| 20090242936 | STRAINED ULTRA-THIN SOI TRANSISTOR FORMED BY REPLACEMENT GATE - A semiconductor structure is described. The structure includes a transistor formed in a semiconductor substrate, the semiconductor substrate having a semiconductor-on-insulator (SOI) layer; a channel associated with the transistor and formed on a first portion of the SOI layer; and a source/drain region associated with the transistor and formed in a second portion of the SOI layer and in a recess at each end of the channel, where the second portion of the SOI layer is substantially thicker than the first portion of the SOI layer. A method of fabricating the semiconductor structure is also described. The method includes forming a dummy gate in a semiconductor substrate; performing a SIMOX process to form a SOI layer such that a first portion of the SOI layer under the dummy gate is substantially thinner than a second portion of the SOI layer; forming a source/drain extension in the SOI layer; and recessing the source/drain extension for forming a source/drain region; epitaxially growing the second portion of the SOI layer; forming an insulating layer over the epitaxial growth; removing the dummy gate for forming a gate opening; and filling the gate opening with a gate dielectric material and a gate conductor material. | 10-01-2009 |
| 20090256173 | COMPLEMENTARY FIELD EFFECT TRANSISTORS HAVING EMBEDDED SILICON SOURCE AND DRAIN REGIONS - A method is provided of fabricating complementary stressed semiconductor devices, e.g., an NFET having a tensile stressed channel and a PFET having a compressive stressed channel. In such method, a first semiconductor region having a lattice constant larger than silicon can be epitaxially grown on an underlying semiconductor region of a substrate. The first semiconductor region can be grown laterally adjacent to a second semiconductor region which has a lattice constant smaller than that of silicon. Layers consisting essentially of silicon can be grown epitaxially onto exposed major surfaces of the first and second semiconductor regions after which gates can be formed which overlie the epitaxially grown silicon layers. Portions of the first and second semiconductor regions adjacent to the gates can be removed to form recesses. Regions consisting essentially of silicon can be grown within the recesses to form embedded silicon regions. Source and drain regions then can be formed in the embedded silicon regions. The difference between the lattice constant of silicon and that of the underlying first and second regions results in tensile stressed silicon over the first semiconductor region and compressive stressed silicon over the second semiconductor region. | 10-15-2009 |
| 20090256174 | DEVICE STRUCTURES FOR A HIGH VOLTAGE JUNCTION FIELD EFFECT TRANSISTOR MANUFACTURED USING A HYBRID ORIENTATION TECHNOLOGY WAFER AND DESIGN STRUCTURES FOR A HIGH VOLTAGE INTEGRATED CIRCUIT - Device structures for a high voltage junction field effect transistor and design structures for a high voltage integrated circuit. The device structure is manufactured using a hybrid orientation technology wafer with a first semiconductor layer with a first crystalline orientation, a second semiconductor layer with a second crystalline orientation, and an insulating layer between the first and second semiconductor layers. The device structure includes an epitaxial semiconductor region having the second crystalline orientation and first and second p-n junctions in the epitaxial semiconductor region. The epitaxial semiconductor region extends from the second semiconductor layer through the insulating layer and the first semiconductor layer toward a top surface of the first semiconductor layer. The first and second p-n junctions are arranged in depth within the epitaxial semiconductor region between the second semiconductor layer and the top surface of the first semiconductor layer. | 10-15-2009 |
| 20090261380 | TRANSISTORS HAVING ASYMETRIC STRAINED SOURCE/DRAIN PORTIONS - A semiconductor structure. The structure includes (a) a fin region having (i) a first source/drain portion having a first surface and a third surface, wherein the first and third surfaces are (A) parallel to each other and (B) not coplanar, (ii) a second source/drain portion having a second surface and a fourth surface, wherein the second and fourth surfaces are (A) parallel to each other and (B) not coplanar, and (iii) a channel region; (b) a gate dielectric layer; (c) a gate electrode region, wherein the gate dielectric layer (i) is sandwiched between, and (ii) electrically insulates the gate electrode region and the channel region; and (d) first second strain creating regions on the third and fourth surfaces, respectively, wherein the first and second strain creating regions comprise a strain creating material. | 10-22-2009 |
| 20090261381 | CMOS transistor using germanium condensation and method of fabricating the same - Provided is a CMOS transistor formed using Ge condensation and a method of fabricating the same. The CMOS transistor may include an insulating layer, a silicon layer on the insulating layer and including a p-MOS transistor region and an n-MOS transistor region, a first gate insulating layer and a first gate on a channel region of the p-MOS transistor region, and a second gate insulating layer and a second gate on a channel region of the n-MOS transistor region, wherein a source region and a drain region of the p-MOS transistor region may be tensile-strained due to Ge condensation, and the channel region of the n-MOS transistor region may be tensile-strained due to the Ge condensation. | 10-22-2009 |
| 20090261382 | Compound Semiconductor Substrate For a Field Effect Transistor - A III-V field effect transistor comprising
| 10-22-2009 |
| 20090278170 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A method for manufacturing a semiconductor device includes providing a substrate having at least a gate structure formed thereon, forming LDDs in the substrate respectively at two side of the gate structure and a spacer at sidewalls of the gate structure, forming a source/drain in the substrate at two side of the gate structure, performing ant etching process to form recesses respectively in the source/drain, forming a barrier layer in the recesses; and performing a salicide process. | 11-12-2009 |
| 20090283801 | BIPOLAR TRANSISTOR WITH LOW RESISTANCE BASE CONTACT AND METHOD OF MAKING THE SAME - Embodiments of the present invention provide a bipolar transistor with low resistance base contact and method of manufacturing the same. The bipolar transistor includes an emitter, a collector, and an intrinsic base between the emitter and the collector. The intrinsic base extends laterally to an extrinsic base. The extrinsic base further includes a first semiconductor material with a first bandgap and a second semiconductor material with a second bandgap that is smaller than the first bandgap. | 11-19-2009 |
| 20090289279 | METHOD AND APPARATUS FOR BURIED-CHANNEL SEMICONDUCTOR DEVICE - Methods and apparatus of integrating a buried-channel PMOS into a BiCMOS process. The apparatus comprises at least one bipolar transistor and at least one MOS device coupled to the at least one bipolar transistor, such that a gate of the at least one MOS device may be coupled to an emitter of the at least one bipolar transistor. The MOS device comprises a buried channel having mobility means, such as strained silicon for promoting hole mobility in the buried channel, and confinement means, such as a cap layer disposed proximate to the buried channel for limiting leakage of holes from the buried channel. The apparatus may be formed by exposing a substrate in a PMOS, forming a SiGe layer on the substrate, forming an oxide layer on the SiGe layer, masking the PMOS, and removing at least some of the oxide and at least some of the SiGe layer. | 11-26-2009 |
| 20090289280 | Method for Making Transistors and the Device Thereof - A semiconductor process and apparatus includes forming <100> channel orientation PMOS transistors ( | 11-26-2009 |
| 20090302348 | STRESS ENHANCED TRANSISTOR DEVICES AND METHODS OF MAKING - Stress enhanced transistor devices and methods of fabricating the same are provided. In one embodiment, a transistor device comprises: a gate conductor disposed above a semiconductor substrate between a pair of dielectric spacers, wherein the semiconductor substrate comprises a channel region underneath the gate conductor and recessed regions on opposite sides of the channel region, wherein the recessed regions undercut the dielectric spacers to form undercut areas of the channel region; and epitaxial source and drain regions disposed in the recessed regions of the semiconductor substrate and extending laterally underneath the dielectric spacers into the undercut areas of the channel region. | 12-10-2009 |
| 20090309133 | MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - A manufacturing method for semiconductor device includes: forming an opening, in a surface of a semiconductor substrate being composed of first atom, the opening having an opening ratio y to an area of the surface of the semiconductor substrate ranging from 5 to 30%; forming an epitaxial layer in the opening, the epitaxial layer being made of a mixed crystal containing a second atom in a concentration ranging from 15 to 25%, and the second atom having a lattice constant different from a lattice constant of the first atom; implanting impurity ion into the epitaxial layer; and performing activation annealing at a predetermined temperature T, the predetermined temperature T being equal to or higher than 1150° C. and satisfies a relationship of y≦1E-5exp(21541/T). | 12-17-2009 |
| 20090315074 | Process for Fabricating Silicon-on-Nothing MOSFETs - A semiconductor device includes a gate stack; an air-gap under the gate stack; a semiconductor layer vertically between the gate stack and the air-gap; and a first dielectric layer underlying and adjoining the semiconductor layer. The first dielectric layer is exposed to the air-gap. | 12-24-2009 |
| 20100006893 | STRAINED LAYERS WITHIN SEMICONDUCTOR BUFFER STRUCTURES - A semiconductor workpiece including a substrate, a relaxed buffer layer including a graded portion formed on the substrate, and at least one strained transitional layer within the graded portion of the relaxed buffer layer and method of manufacturing the same. The at least one strained transitional layer reduces an amount of workpiece bow due to differential coefficient of thermal expansion (CTE) contraction of the relaxed buffer layer relative to CTE contraction of the substrate | 01-14-2010 |
| 20100012975 | TRANSISTOR DEVICE HAVING ASYMMETRIC EMBEDDED STRAIN ELEMENTS AND RELATED MANUFACTURING METHOD - Semiconductor transistor devices and related fabrication methods are provided. An exemplary transistor device includes a layer of semiconductor material having a channel region defined therein and a gate structure overlying the channel region. Recesses are formed in the layer of semiconductor material adjacent to the channel region, such that the recesses extend asymmetrically toward the channel region. The transistor device also includes stress-inducing semiconductor material formed in the recesses. The asymmetric profile of the stress-inducing semiconductor material enhances carrier mobility in a manner that does not exacerbate the short channel effect. | 01-21-2010 |
| 20100012976 | POLISHING OF SMALL COMPOSITE SEMICONDUCTOR MATERIALS - A device includes a crystalline material within an area confined by an insulator. A surface of the crystalline material has a reduced roughness. One example includes obtaining a surface with reduced roughness by using a planarization process configured with a selectivity of the crystalline material to the insulator greater than one. In a preferred embodiment, the planarization process uses a composition including abrasive spherical silica, H | 01-21-2010 |
| 20100019276 | ALL AROUND GATE TYPE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - An all around gate type semiconductor device improves mobility of electrons and holes by using a silicon germanium pillar and a silicon layer surrounding the silicon germanium pillar as a vertical channel. A gate electrode is formed to surround the vertical channel. When a semiconductor device is used as a nMOSFET, the silicon layer strained by silicon germanium is used as the channel to increase electron mobility. When the semiconductor device is used as a pMOSFET, the silicon germanium pillar is used as the channel to increase hole mobility. Thus, the semiconductor device can enhance current supply capacity regardless of transistor type. | 01-28-2010 |
| 20100019277 | EPITAXIAL SUBSTRATE FOR FIELD EFFECT TRANSISTOR - The present invention provides an epitaxial substrate for field effect transistor. In the epitaxial substrate for field effect transistor, a nitride-based Group III-V semiconductor epitaxial crystal containing Ga is interposed between the ground layer and the operating layer, and the nitride-based Group III-V semiconductor epitaxial crystal comprises the following (i), (ii) and (iii). (i) a first buffer layer containing Ga or Al and containing a high resistivity crystal layer having added thereto compensation impurity element present in the same period as Ga in the periodic table and having small atomic number; (ii) a second buffer layer containing Ga or Al, laminated on the operating layer side of the first buffer layer; and (iii) a high purity epitaxial crystal layer containing acceptor impurities in a slight amount such that non-addition or depletion state can be maintained, provided between the high resistivity layer and the operating layer. | 01-28-2010 |
| 20100019278 | Multilayer Structure Comprising A Substrate and A Layer Of Silicon and Germanium Deposited Heteroepitaxially Thereon, and A Process For Producing It - A multilayer structure, comprises a substrate and a layer of silicon and germanium (SiGe layer) deposited heteroepitaxially thereon having the composition Si | 01-28-2010 |
| 20100025728 | RELAXATION AND TRANSFER OF STRAINED LAYERS - The invention relates to a process for fabricating a heterostructure. This process is noteworthy in that it comprises the following steps: a) a strained crystalline thin film is deposited on, or transferred onto, an intermediate substrate; b) a strain relaxation layer, made of crystalline material capable of being plastically deformed by a heat treatment at a relaxation temperature, at which the material constituting the thin film deforms by elastic deformation is deposited on the thin film; c) the thin film and the relaxation layer are transferred onto a substrate; and d) a thermal budget is applied at at least the relaxation temperature, so as to cause the plastic deformation of the relaxation layer and the at least partial relaxation of the thin film by elastic deformation, and thus to obtain the final heterostructure. | 02-04-2010 |
| 20100032715 | MOS TRANSISTOR AND METHOD FOR FABRICATING THE SAME - A method for fabricating a MOS transistor is disclosed. First, a semiconductor substrate having a gate thereon is provided. A spacer is then formed on the sidewall of the gate, and two recesses are formed adjacent to the spacer and within the semiconductor substrate. Next, the spacer is thinned, and epitaxial layer is grown in each of the two recesses. By thinning the spacer before the epitaxial layer is formed, the present invention could stop the epitaxial layer to grow against the sidewall of the spacer, thereby preventing problem such as Ion degradation. | 02-11-2010 |
| 20100038679 | FINFET WITH LONGITUDINAL STRESS IN A CHANNEL - At least one gate dielectric, a gate electrode, and a gate cap dielectric are formed over at least one channel region of at least one semiconductor fin. A gate spacer is formed on the sidewalls of the gate electrode, exposing end portions of the fin on both sides of the gate electrode. The exposed portions of the semiconductor fin are vertically and laterally etched, thereby reducing the height and width of the at least one semiconductor fin in the end portions. Exposed portions of the insulator layer may also be recessed. A lattice-mismatched semiconductor material is grown on the remaining end portions of the at least one semiconductor fin by selective epitaxy with epitaxial registry with the at least one semiconductor fin. The lattice-mismatched material applies longitudinal stress along the channel of the finFET formed on the at least one semiconductor fin. | 02-18-2010 |
| 20100038680 | III-NITRIDE SEMICONDUCTOR FIELD EFFECT TRANSISTOR - Provided is a semiconductor device that can reduce the contact resistance, has a small current collapse, and can improve the pinch-off characteristic upon a high-frequency operation. A field effect transistor using a wurtzite (having (0001) as the main plane) type III-nitride semiconductor includes: a substrate ( | 02-18-2010 |
| 20100072515 | FABRICATION AND STRUCTURES OF CRYSTALLINE MATERIAL - A surface of the first semiconductor crystalline material has a reduced roughness. A semiconductor device includes a low defect, strained second semiconductor crystalline material over the surface of the first crystalline material. A surface of the strained second semiconductor crystalline material has a reduced roughness. One example includes obtaining a surface with reduced roughness by creating process parameters that reduce impurities at an interfacial boundary between the first and second semiconductor crystalline materials. In one embodiment, the first semiconductor crystalline material can be confined by an opening in an insulator having an aspect ratio sufficient to trap defects using Aspect Ratio Trapping techniques. | 03-25-2010 |
| 20100090249 | Compound Semiconductor Lamination, Method for Manufacturing the same, and Semiconductor Device - The present invention relates to a compound semiconductor lamination that enables an InSb film to be formed on an Si substrate and enables development of applications to magnetic sensors, such as Hall elements, magneto-resistance elements, etc., optical devices, such as infrared sensors, etc., and electronic devices, such as transistors, etc., to be provided industrially, and a method for manufacturing the compound semiconductor lamination. An active layer, which is a compound semiconductor that does not contain As, is directly formed on an Si substrate. As is present at an interface of the active layer and a single crystal layer of the Si substrate. The compound semiconductor contains at least nitrogen. The compound semiconductor is a single crystal thin film. The Si substrate is a bulk single crystal substrate or a thin film substrate with an uppermost layer being Si. | 04-15-2010 |
| 20100096666 | LAMINAR STRUCTURE ON A SEMICONDUCTOR SUBSTRATE - An object of the present invention is to provide a ferroelectric element having excellent properties, which includes a monocrystalline film of γ-Al | 04-22-2010 |
| 20100102356 | Semiconductor transistor having a stressed channel - A process is described for manufacturing an improved PMOS semiconductor transistor. Recesses are etched into a layer of epitaxial silicon. Source and drain films are deposited in the recesses. The source and drain films are made of an alloy of silicon and germanium. The alloy is epitaxially deposited on the layer of silicon. The alloy thus has a lattice having the same structure as the structure of the lattice of the layer of silicon. However, due to the inclusion of the germanium, the lattice of the alloy has a larger spacing than the spacing of the lattice of the layer of silicon. The larger spacing creates a stress in a channel of the transistor between the source and drain films. The stress increases I | 04-29-2010 |
| 20100109044 | Optimized Compressive SiGe Channel PMOS Transistor with Engineered Ge Profile and Optimized Silicon Cap Layer - A semiconductor process and apparatus includes forming PMOS transistors ( | 05-06-2010 |
| 20100109045 | INTEGRATED CIRCUIT SYSTEM EMPLOYING STRESS-ENGINEERED LAYERS - An integrated circuit system that includes: providing a substrate including an active device; forming a trench within the substrate adjacent the active device; forming a first layer with a first lattice constant within the trench; and forming a second layer with a second lattice constant over the first layer, the second lattice constant differing from the first lattice constant. | 05-06-2010 |
| 20100109046 | Methods of forming low interface resistance contacts and structures formed thereby - Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a tapered contact opening in an ILD disposed on a substrate, wherein a source/drain contact area is exposed, preamorphizing a portion of a source drain region of the substrate, implanting boron into the source/drain region through the tapered contact opening, forming a metal layer on the source/drain contact area, and then annealing the metal layer to form a metal silicide. | 05-06-2010 |
| 20100109047 | Multijunction rare earth solar cell - Examples of device structures utilizing layers of rare earth oxides to perform the tasks of strain engineering in transitioning between semiconductor layers of different composition and/or lattice orientation and size are given. A structure comprising a plurality of semiconductor layers separated by transition layer(s) comprising two or more rare earth compounds operable as a sink for structural defects is disclosed. | 05-06-2010 |
| 20100109048 | METHOD AND STRUCTURE FOR FORMING STRAINED SI FOR CMOS DEVICES - A semiconductor device includes a semiconductor substrate having at least one gap, extending under a portion of the semiconductor substrate. A gate stack is on the semiconductor substrate. A strain layer is formed in at least a portion of the at least one gap. The strain layer is formed only under at least one of a source region and a drain region of the semiconductor device. | 05-06-2010 |
| 20100109049 | PATTERNED STRAINED SEMICONDUCTOR SUBSTRATE AND DEVICE - A device that includes a pattern of strained material and relaxed material on a substrate, a strained device in the strained material, and a non-strained device in the relaxed material. The strained material may be silicon (Si) in either a tensile or compressive state, and the relaxed material is Si in a normal state. A buffer layer of silicon germanium (SiGe), silicon carbon (SiC), or similar material is formed on the substrate and has a lattice constant/structure mis-match with the substrate. A relaxed layer of SiGe, SiC, or similar material is formed on the buffer layer and places the strained material in the tensile or compressive state. Carbon-doped silicon or germanium-doped silicon may be used to form the strained material. The structure includes a multi-layered substrate having strained and non-strained materials patterned thereon. | 05-06-2010 |
| 20100117118 | High electron mobility heterojunction device - A method for providing a periodic table group III nitrides materials based heterojunction device comprising growing all layers therein by molecular beam epitaxy to result having a crystal defects concentration sufficiently small to allow electron mobilities in the sheet charge region to exceed 1100 cm2/volt-second. The invention includes the heterojunction device provided by this method. | 05-13-2010 |
| 20100155778 | METHOD FOR ENHANCING GROWTH OF SEMIPOLAR (AL,IN,GA,B)N VIA METALORGANIC CHEMICAL VAPOR DEPOSITION - A method for enhancing growth of device-quality planar semipolar nitride semiconductor thin films via metalorganic chemical vapor deposition (MOCVD) by using an (Al, In, Ga)N nucleation layer containing at least some indium. Specifically, the method comprises loading a substrate into a reactor, heating the substrate under a flow of nitrogen and/or hydrogen and/or ammonia, depositing an In | 06-24-2010 |
| 20100163926 | MODULATION-DOPED MULTI-GATE DEVICES - Modulation-doped multi-gate devices are generally described. In one example, an apparatus includes a semiconductor substrate having a surface, one or more buffer films coupled to the surface of the semiconductor substrate, a first barrier film coupled to the one or more buffer films, a multi-gate fin coupled to the first barrier film, the multi-gate fin comprising a source region, a drain region, and a channel region of a multi-gate device wherein the channel region is disposed between the source region and the drain region, a spacer film coupled to the multi-gate fin, and a doped film coupled to the spacer film. | 07-01-2010 |
| 20100181598 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCER DEVICE - Etch block layers having an etching rate smaller than that of a first semiconductor forming a semiconductor substrate are formed on the sidewalls of device isolation grooves by applying oblique ion implantation of Ox, N, or C to the semiconductor substrate including the first semiconductor. Embedded layers including a second semiconductor are selectively formed in recesses by epitaxial-growing the second semiconductor having a lattice constant larger than that of the first semiconductor in the recesses. | 07-22-2010 |
| 20100181599 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a substrate, a gate formed over the substrate, a gate spacer provided against first and second sidewalls of the gate, and a source/drain region formed in the substrate proximate to the gate spacer. The source/drain region includes first and second epitaxial layers including Ge, wherein the second epitaxial layer which is formed over an interfacial layer between the first epitaxial layer and the substrate has a higher germanium concentration than that of the first epitaxial layer | 07-22-2010 |
| 20100187568 | EPITAXIAL METHODS AND STRUCTURES FOR FORMING SEMICONDUCTOR MATERIALS - Methods and structures for producing semiconductor materials, substrates and devices with improved characteristics are disclosed. Structures and methods for forming reduced strain structures include forming a plurality of substantially strain-relaxed island structures and utilizing such island structures for subsequent further growth of strain-relaxed substantial continuous layers of semiconductor material. | 07-29-2010 |
| 20100187569 | HETERO-STRUCTURE FIELD EFFECT TRANSISTOR, INTEGRATED CIRCUIT INCLUDING A HETERO-STRUCTURE FIELD EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING A HETERO-STRUCTURE FIELD EFFECT TRANSISTOR - A hetero-structure field effect transistor (HFET). The HFET may include a first contact and a second contact and a hetero-junction structure. The hetero-junction structure may include a first layer made from a first semiconductor material and a second layer made from a second semiconductor material. An interface at which the first layer and the second layer are in contact with each other may be provided, along which a two dimensional electron gas (2DEG) is formed in a part of the first layer directly adjacent to the interface, for propagating of electrical signals from the first contact to the second contact or vice versa. The transistor may further include a gate structure for controlling a conductance of the channel; a substrate layer made from a substrate semiconductor material, and a dielectric layer separating the first layer from the substrate layer. The second contact may include an electrical connection between the substrate layer and the first layer. The electrical connection may include a passage through the dielectric layer filled with an electrically conducting material which is electrically connected to the first layer. | 07-29-2010 |
| 20100193838 | EPITAXIAL SEMICONDUCTOR LAYER AND METHOD - A method for epitaxially forming a first semiconductor structure attached to a second semiconductor structure is provided. Devices and methods described include advantages such as reduced lattice mismatch at an epitaxial interface between two different semiconductor materials. One advantageous application of such an interface includes an electrical-optical communication structure. Methods such as deposition of layers at an elevated temperature provide easy formation of semiconductor structures with a modified lattice constant that permits an improved epitaxial interface. | 08-05-2010 |
| 20100213511 | Lattice-Mismatched Semiconductor Structures and Related Methods for Device Fabrication - Lattice-mismatched materials having configurations that trap defects within sidewall-containing structures. | 08-26-2010 |
| 20100237387 | SEMICONDUCTOR WAFER, SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD THEREOF - A semiconductor wafer includes a substrate, a buffer region formed on one main surface of the substrate and formed from a compound semiconductor, and a main semiconductor region formed in the buffer region and formed from a compound semiconductor, wherein the buffer region includes a first multi-layer structured buffer region and a second multi-layer structured buffer region stacked with a plurality of alternating first layers and second layers, and a single layer structured buffer region arranged between the first multi-layer structured buffer region and the second multi-layer structured buffer region, the first layer is formed from a compound semiconductor which has a lattice constant smaller than a lattice constant of a material which forms the substrate, the second layer is formed from a compound semiconductor which has a lattice constant between a lattice constant of a material which forms the substrate and a lattice constant of a material which forms the first layer, and wherein the single layer structured buffer region is thicker than the first layer and the second layer, and is formed from a compound semiconductor which has a lattice constant between a lattice constant of a material which forms the first layer and a lattice constant of a material which forms the second layer. | 09-23-2010 |
| 20100244096 | SEMICONDUCTOR DEVICE - A device includes a substrate; a buffer layer; and a device formation layer, wherein the buffer layer is formed by sequentially stacking, a plurality of times, a first nitride-based semiconductor layer made of a material having a lattice constant lower than a lattice constant of a material of the substrate; a first composition graded layer made of a material having a lattice constant gradually higher than the lattice constant of the first nitride-based semiconductor layer in a thickness direction; a second nitride-based semiconductor layer made of a material having a lattice constant higher than the lattice constant of the first nitride-based semiconductor layer; and a second composition graded layer made of a material having a lattice constant gradually lower than the lattice constant of the second nitride-based semiconductor layer in the thickness direction, and the second composition graded layer is thicker than the first composition graded layer. | 09-30-2010 |
| 20100264460 | THICK PSEUDOMORPHIC NITRIDE EPITAXIAL LAYERS - In various embodiments, a semiconductor device includes an aluminum nitride single-crystal substrate, a pseudomorphic strained layer disposed thereover that comprises at least one of AlN, GaN, InN, or an alloy thereof, and, disposed over the strained layer, a semiconductor layer that is lattice-mismatched to the substrate and substantially relaxed. | 10-21-2010 |
| 20100270590 | ALD OF SILICON FILMS ON GERMANIUM - The use of atomic layer deposition (ALD) to form a semiconductor structure of a silicon film on a germanium substrate is disclosed. An example embodiment includes a tantalum nitride gate electrode on a hafnium dioxide gate dielectric on the silicon film (TaN/HfO | 10-28-2010 |
| 20100301390 | Gradient Ternary or Quaternary Multiple-Gate Transistor - An integrated circuit structure includes a semiconductor substrate; insulation regions over the semiconductor substrate; and an epitaxy region over the semiconductor substrate and having at least a portion in a space between the insulation regions. The epitaxy region includes a III-V compound semiconductor material. The epitaxy region also includes a lower portion and an upper portion over the lower portion. The lower portion and the semiconductor substrate have a first lattice mismatch. The upper portion and the semiconductor substrate have a second lattice mismatch different from the first lattice mismatch. | 12-02-2010 |
| 20100301391 | Tri-Gate Field-Effect Transistors Formed By Aspect Ratio Trapping - Semiconductor structures include a trench formed proximate a substrate including a first semiconductor material. A crystalline material including a second semiconductor material lattice mismatched to the first semiconductor material is formed in the trench. Process embodiments include removing a portion of the dielectric layer to expose a side portion of the crystalline material and defining a gate thereover. Defects are reduced by using an aspect ratio trapping approach | 12-02-2010 |
| 20100314662 | SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING A SEMICONDUCTOR STRUCTURE - A semiconductor structure is formed of nitrides of group III metals having wurtzite crystal structure and grown in vapor phase on a (0001) oriented semiconductor substrate. The structure comprises a bottom cladding layer, a top cladding layer, and a diffusion region positioned between the cladding layers for diffusing light propagating within the semiconductor structure. The diffuse region has refractive index different from those of the cladding layers and non-flat surfaces for providing light diffusing interfaces between the diffusion region and the cladding layers. According to the invention, the diffusion region comprises a plurality of diffusion layers, compositions and thicknesses of said diffusion layers having been chosen to avoid formation of strain-induced dislocations in the diffusion region, and adjacent diffusion layers having different refractive indices in order to further enhance the diffusion efficiency. | 12-16-2010 |
| 20100320503 | STRAINED CHANNEL TRANSISTOR AND METHOD OF FABRICATION THEREOF - The present invention relates to semiconductor integrated circuits. More particularly, but not exclusively, the invention relates to strained channel complimentary metal oxide semiconductor (CMOS) transistor structures and fabrication methods thereof. A strained channel CMOS transistor structure comprises a source stressor region comprising a source extension stressor region; and a drain stressor region comprising a drain extension stressor region; wherein a strained channel region is formed between the source extension stressor region and the drain extension stressor region, a width of said channel region being defined by adjacent ends of said extension stressor regions. | 12-23-2010 |
| 20100327316 | Method for Manufacturing an III-V Engineered Substrate and the III-V Engineered Substrate Thereof - Manufacturing an III-V engineered substrate involves providing a base substrate comprising an upper layer made of a first III-V compound with a <110> or a <111> crystal orientation, forming an intermediate layer comprising at least a buffer layer of a second III-V compound, wherein the intermediate layer is overlying and in contact with the upper layer of the base substrate. Then a pseudomorphic passivation layer made of a group IV semiconductor material is grown so as to be overlying and in contact with the intermediate layer. This can enable an unpinned interface. The substrate surface can be smoother, implying fewer problems from surface stress. It can be used in electronic devices such as metal-oxide-semiconductor field effect transistors (MOSFETs), high electron mobility transistors (HEMTs), tunneling field effect transistors (TFETs), and optoelectronic devices. | 12-30-2010 |
| 20110006344 | Method for improving transistor performance through reducing the salicide interface resistance - An embodiment of the invention reduces the external resistance of a transistor by utilizing a silicon germanium alloy for the source and drain regions and a nickel silicon germanium self-aligned silicide (i.e., salicide) layer to form the contact surface of the source and drain regions. The interface of the silicon germanium and the nickel silicon germanium silicide has a lower specific contact resistivity based on a decreased metal-semiconductor work function between the silicon germanium and the silicide and the increased carrier mobility in silicon germanium versus silicon. The silicon germanium may be doped to further tune its electrical properties. A reduction of the external resistance of a transistor equates to increased transistor performance both in switching speed and power consumption. | 01-13-2011 |
| 20110012172 | Semiconductor Heterostructures Having Reduced Dislocation Pile-Ups and Related Methods - Dislocation pile-ups in compositionally graded semiconductor layers are reduced or eliminated, thereby leading to increased semiconductor device yield and manufacturability. This is accomplished by introducing a semiconductor layer having a plurality of threading dislocations distributed substantially uniformly across its surface as a starting layer and/or at least one intermediate layer during growth and relaxation of the compositionally graded layer. The semiconductor layer may include a seed layer disposed proximal to the surface of the semiconductor layer and having the threading dislocations uniformly distributed therein. | 01-20-2011 |
| 20110018030 | SEMICONDUCTOR WAFER, SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND ELECTRONIC DEVICE - A high-quality GaAs-type crystal thin film using an inexpensive Si water with good thermal release characteristics is achieved. Provided is a semiconductor wafer comprising an Si wafer; an inhibiting layer that is formed on the wafer and that inhibits crystal growth, the inhibiting layer including a covering region that covers a portion of the wafer and an open region that does not cover a portion of the wafer within the covering region; a Ge layer that is crystal-grown in the open region; a buffer layer that is crystal-grown on the Ge layer and is a group 3-5 compound semiconductor layer containing P; and a functional layer that is crystal-grown on the buffer layer. The Ge layer may be formed by annealing with a temperature and duration that enables movement of crystal defects. | 01-27-2011 |
| 20110024794 | FIN STRUCTURE FOR HIGH MOBILITY MULTIPLE-GATE TRANSISTOR - A vertical fin structure for a semiconductor transistor includes a semiconductor substrate, a fin layer on top of the substrate, a capping layer overlaying the fin layer, wherein the substrate comprises group IV semiconductor material, the fin layer comprises group IV semiconductor material, the capping layer comprises semiconductor compound from group III-V. The fin layer can comprise Ge, SiGe, SiC, or any combinations thereof. The semiconductor substrate can comprise Si, Ge, SiGe, or SiC. The capping layer can comprise GaAs, InGaAs, InAs, InSb, GaSb, GaN, InP, or any combinations thereof. The capping layer can provide more than a 4 percent lattice mismatch with the semiconductor substrate. The fin layer can be located in between shallow trench insulation (STI) layers that provide isolation from adjacent devices. The vertical fin structure can further include a high-k dielectric layer overlaying the capping layer and a metal gate layer overlaying the high-k dielectric layer. | 02-03-2011 |
| 20110037098 | Substrate structures and methods of manufacturing the same - Substrate structures and methods of manufacturing the substrate structures. A substrate structure is manufactured by forming a protrusion area of a substrate under a buffer layer, and forming a semiconductor layer on the buffer layer, thereby separating the substrate from the buffer layer except in an area where the protrusion is formed. The semiconductor layer on the buffer layer not contacting the substrate has freestanding characteristics, and dislocation or cracks may be reduced and/or prevented. | 02-17-2011 |
| 20110037099 | SEMICONDUCTOR WAFER, SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND ELECTRONIC DEVICE - A high-quality GaAs-type crystal thin film using an inexpensive Si wafer with good thermal release characteristics is achieved. Provided is a semiconductor wafer comprising an Si wafer; a Ge layer that is crystal-grown on the wafer and shaped as an isolated island; a butler layer that is crystal-grown on the Ge layer and is a group 3-5 compound semiconductor layer containing P; and a functional layer that is crystal-grown on the buffer layer. The Ge layer may be shaped as an island having a size that does not exceed double a distance moved by crystal defects as a result of annealing the Ge layer at a certain temperature for a certain time. The Ge layer may be shaped as an island having a size for which stress due to a difference relative to a thermal expansion coefficient of Si, which is material of the wafer, does not cause crystal defects when the Ge layer is annealed at a certain temperature. | 02-17-2011 |
| 20110037100 | NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A nitride semiconductor device includes: first through third nitride semiconductor layers formed in sequence over a substrate. The second nitride semiconductor layer has a band gap energy larger than that of the first nitride semiconductor layer. The third nitride semiconductor layer has an opening. A p-type fourth nitride semiconductor layer is formed so that the opening is filled therewith. A gate electrode is formed on the fourth nitride semiconductor layer. | 02-17-2011 |
| 20110042718 | NITRIDE SEMICONDUCTOR LAYER-CONTAINING STRUCTURE, NITRIDE SEMICONDUCTOR LAYER-CONTAINING COMPOSITE SUBSTRATE AND PRODUCTION METHODS OF THESE - A nitride semiconductor layer-containing structure having a configuration in which: the structure includes a laminated structure based on at least two nitride semiconductor layers; the structure includes between the two nitride semiconductor layers in the laminated structure a plurality of voids surrounded by the faces of the walls inclusive of the inner walls of the recessed portions of the asperity pattern formed on the nitride semiconductor layer that is the lower layer of the two nitride semiconductor layers; and crystallinity defect-containing portions to suppress the lateral growth of the nitride semiconductor layer are formed on at least part of the inner walls of the recessed portions to form the voids. | 02-24-2011 |
| 20110042719 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE - It is an objective of the present invention to increase channel current density while allowing a GaN field effect transistor to perform normally-off operation. | 02-24-2011 |
| 20110049567 | BOTTLE-NECK RECESS IN A SEMICONDUCTOR DEVICE - The present disclosure provides a method for fabricating a semiconductor device that includes providing a silicon substrate, forming a gate stack over the silicon substrate, performing a biased dry etching process to the substrate to remove a portion of the silicon substrate, thereby forming a recess region in the silicon substrate, performing a non-biased etching process to the recess region in the silicon substrate, thereby forming a bottle-neck shaped recess region in the silicon substrate, and epi-growing a semiconductor material in the bottle-neck shaped recess region in the silicon substrate. An embodiment may include a biased dry etching process including adding HeO2 gas and HBr gas. An embodiment may include performing a first biased dry etching process including N2 gas and performing a second biased dry etching process not including N2 gas. An embodiment may include performing an oxidation process to the recess region in the silicon substrate by adding oxygen gas to form silicon oxide on a portion of the recess region in the silicon substrate. As such, these processes form polymer protection to help form the bottle-neck shaped recess. | 03-03-2011 |
| 20110049568 | Lattice-Mismatched Semiconductor Structures with Reduced Dislocation Defect Densities and Related Methods for Device Fabrication - Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures. | 03-03-2011 |
| 20110062492 | High-Quality Hetero-Epitaxy by Using Nano-Scale Epitaxy Technology - An integrated circuit structure includes a semiconductor substrate formed of a first semiconductor material; two insulators in the semiconductor substrate; and a semiconductor region between and adjoining sidewalls of the two insulators. The semiconductor region is formed of a second semiconductor material different from the first semiconductor material, and has a width less than about 50 nm. | 03-17-2011 |
| 20110062493 | EPITAXIAL SUBSTRATE FOR SEMICONDUCTOR DEVICE, SCHOTTKY JUNCTION STRUCTURE, AND LEAKAGE CURRENT SUPPRESSION METHOD FOR SCHOTTKY JUNCTION STRUCTURE - Provided is an epitaxial substrate for semiconductor device that is capable of achieving a semiconductor device having high reliability in reverse characteristics of schottky junction. An epitaxial substrate for semiconductor device obtained by forming, on a base substrate, a group of group III nitride layers by lamination such that a (0001) crystal plane of each layer is approximately parallel to a substrate surface includes: a channel layer formed of a first group III nitride having a composition of In | 03-17-2011 |
| 20110073907 | INTEGRATED CIRCUIT STRUCTURES CONTAINING A STRAIN-COMPENSATED COMPOUND SEMICONDUCTOR LAYER AND METHODS AND SYSTEMS RELATED THERETO - A method for pseudomorphic growth and integration of an in-situ doped, strain-compensated metastable compound base into an electronic device, such as, for example, a SiGe NPN HBT, by substitutional placement of strain-compensating atomic species. The invention also applies to strained layers in other electronic devices such as strained SiGe, Si in MOS applications, vertical thin film transistors (VTFT), and a variety of other electronic device types. Devices formed from compound semiconductors other than SiGe, such as, for example, GaAs, InP, and AlGaAs are also amenable to beneficial processes described herein. | 03-31-2011 |
| 20110073908 | III-V Semiconductor Device Structures - The benefits of strained semiconductors are combined with silicon-on-insulator approaches to substrate and device fabrication. | 03-31-2011 |
| 20110079820 | DEVICE WITH SELF ALIGNED STRESSOR AND METHOD OF MAKING SAME - A method includes providing a substrate comprising a substrate material, a gate dielectric film above the substrate, and a first spacer adjacent the gate dielectric film. The spacer has a first portion in contact with a surface of the substrate and a second portion in contact with a side of the gate dielectric film. A recess is formed in a region of the substrate adjacent to the spacer. The recess is defined by a first sidewall of the substrate material. At least a portion of the first sidewall underlies at least a portion of the spacer. The substrate material beneath the first portion of the spacer is reflowed, so that a top portion of the first sidewall of the substrate material defining the recess is substantially aligned with a boundary between the gate dielectric film and the spacer. The recess is filled with a stressor material. | 04-07-2011 |
| 20110084308 | SEMICONDUCTOR ARRANGEMENT AND A METHOD FOR MANUFACTURING THE SAME - A method for manufacturing a semiconductor arrangement is disclosed. The method comprises forming at least one trench in a dielectric layer, thereby exposing a portion of a semiconductor substrate, forming a silicon-germanium buffer layer at least on the bottom of the at least one trench, forming a germanium seed layer on the silicon-germanium buffer layer and forming a germanium layer on the germanium seed layer. A semiconductor arrangement is also disclosed. The semiconductor arrangement comprises a semiconductor substrate, a dielectric layer disposed above the semiconductor substrate, at least one trench in the dielectric layer exposing a portion of the semiconductor substrate, a silicon-germanium buffer layer disposed above at least the bottom of the at least one trench, a germanium seed layer disposed above the silicon-germanium buffer layer and a germanium layer disposed above the germanium seed layer. | 04-14-2011 |
| 20110095335 | NITRIDE SEMICONDUCTOR DEVICE - A high breakdown voltage GaN-based transistor is provided on a silicon substrate. A nitride semiconductor device including: a silicon substrate, a SiO | 04-28-2011 |
| 20110101418 | Method for improving transistor performance through reducing the salicide interface resistance - An embodiment of the invention reduces the external resistance of a transistor by utilizing a silicon germanium alloy for the source and drain regions and a nickel silicon germanium self-aligned silicide (i.e., salicide) layer to form the contact surface of the source and drain regions. The interface of the silicon germanium and the nickel silicon germanium silicide has a lower specific contact resistivity based on a decreased metal-semiconductor work function between the silicon germanium and the silicide and the increased carrier mobility in silicon germanium versus silicon. The silicon germanium may be doped to further tune its electrical properties. A reduction of the external resistance of a transistor equates to increased transistor performance both in switching speed and power consumption. | 05-05-2011 |
| 20110101419 | SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND OPTICAL APPARATUS - This semiconductor device includes a substrate, an underlayer formed on a main surface of the substrate, a first semiconductor layer and a second semiconductor layer. Unstrained lattice constants of the underlayer and the second semiconductor layer in a second direction are larger than a lattice constant of the substrate in the second direction in an unstrained state. Lattice constants of the underlayer and the second semiconductor layer in the second direction in a state of being formed on the main surface are larger than the lattice constant of the substrate in the second direction. | 05-05-2011 |
| 20110121362 | RF Circuits Including Transistors Having Strained Material Layers - Circuits for processing radio frequency (“RF”) and microwave signals are fabricated using field effect transistors (“FETs”) that have one or more strained channel layers disposed on one or more planarized substrate layers. FETs having such a configuration exhibit improved values for, for example, transconductance and noise figure. RF circuits such as, for example, voltage controlled oscillators (“VCOs”), low noise amplifiers (“LNAs”), and phase locked loops (“PLLs”) built using these FETs also exhibit enhanced performance. | 05-26-2011 |
| 20110121363 | STRAINED ULTRA-THIN SOI TRANSISTOR FORMED BY REPLACEMENT GATE - A semiconductor structure is described. The structure includes a transistor formed in a semiconductor substrate, the semiconductor substrate having a semiconductor-on-insulator (SOI) layer; a channel associated with the transistor and formed on a first portion of the SOI layer; and a source/drain region associated with the transistor and formed in a second portion of the SOI layer and in a recess at each end of the channel, where the second portion of the SOI layer is substantially thicker than the first portion of the SOI layer. A method of fabricating the semiconductor structure is also described. The method includes forming a dummy gate in a semiconductor substrate; performing a SIMOX process to form a SOI layer such that a first portion of the SOI layer under the dummy gate is substantially thinner than a second portion of the SOI layer; forming a source/drain extension in the SOI layer; and recessing the source/drain extension for forming a source/drain region; epitaxially growing the second portion of the SOI layer; forming an insulating layer over the epitaxial growth; removing the dummy gate for forming a gate opening; and filling the gate opening with a gate dielectric material and a gate conductor material. | 05-26-2011 |
| 20110127578 | Manufacturing method for semiconductor device and semiconductor device - A manufacturing method for semiconductor device includes: forming an opening, in a surface of a semiconductor substrate being composed of first atom, the opening having an opening ratio y to an area of the surface of the semiconductor substrate ranging from 5 to 30%; forming an epitaxial layer in the opening, the epitaxial layer being made of a mixed crystal containing a second atom in a concentration ranging from 15 to 25%, and the second atom having a lattice constant different from a lattice constant of the first atom; implanting impurity ion into the epitaxial layer; and performing activation annealing at a predetermined temperature T, the predetermined temperature T being equal to or higher than 1150° C. and satisfies a relationship of y≦1E-5exp (21541/T). | 06-02-2011 |
| 20110156098 | BUFFER STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABRICATION - Embodiments of the present invention describe a semiconductor device having an buffer structure and methods of fabricating the buffer structure. The buffer structure is formed between a substrate and a quantum well layer to prevent defects in the substrate and quantum well layer due to lattice mismatch. The buffer structure comprises a first buffer layer formed on the substrate, a plurality of blocking members formed on the first buffer layer, and second buffer formed on the plurality of blocking members. The plurality of blocking members prevent the second buffer layer from being deposited directly onto the entire first buffer layer so as to minimize lattice mismatch and prevent defects in the first and second buffer layers. | 06-30-2011 |
| 20110169049 | Method for Doping Semiconductor Structures and the Semiconductor Device Thereof - A method for introducing species into a strained semiconductor layer comprising: providing a substrate comprising a first region comprising an exposed strained semiconductor layer, loading the substrate in a reaction chamber, then forming a conformal first species containing-layer by vapor phase deposition (VPD) at least on the exposed strained semiconductor layer, and thereafter performing a thermal treatment, thereby diffusing at least part of the first species from the first species-containing layer into the strained semiconductor layer and activating at least part of the diffused first species in the strained semiconductor layer. | 07-14-2011 |
| 20110169050 | METHOD USING LOW TEMPERATURE WAFER BONDING TO FABRICATE TRANSISTORS WITH HETEROJUNCTIONS OF Si(Ge) TO III-N MATERIALS - A method for fabricating an electronic device, comprising wafer bonding a first semiconductor material to a III-nitride semiconductor, at a temperature below 550° C., to form a device quality heterojunction between the first semiconductor material and the III-nitride semiconductor, wherein the first semiconductor material is different from the III-nitride semiconductor and is selected for superior properties, or preferred integration or fabrication characteristics in the injector region as compared to the III-nitride semiconductor. | 07-14-2011 |
| 20110175140 | METHODS FOR FORMING NMOS EPI LAYERS - NMOS transistors having controlled channel strain and junction resistance and methods for the fabrication of same are provided herein. In some embodiments, a method for forming an NMOS transistor may include (a) providing a substrate having a p-type silicon region; (b) depositing a silicon seed layer atop the p-type silicon region; (c) depositing a silicon-containing bulk layer comprising silicon, silicon and a lattice adjusting element or silicon and an n-type dopant atop the silicon seed layer; (d) implanting at least one of the lattice adjusting element or the n-type dopant which is absent from the silicon-containing bulk layer deposited in (c) into the silicon-containing bulk layer; and (e) annealing the silicon-containing bulk layer with an energy beam after implantation in (d). In some embodiments, the substrate may comprise a partially fabricated NMOS transistor device having a source/drain region defined therein. | 07-21-2011 |
| 20110180846 | Method for Forming Antimony-Based FETs Monolithically - An integrated circuit structure includes a substrate and a first and a second plurality of III-V semiconductor layers. The first plurality of III-V semiconductor layers includes a first bottom barrier over the substrate; a first channel layer over the first bottom barrier; and a first top barrier over the first channel layer. A first field-effect transistor (FET) includes a first channel region, which includes a portion of the first channel layer. The second plurality of III-V semiconductor layers is over the first plurality of III-V semiconductor layers and includes a second bottom barrier; a second channel layer over the second bottom barrier; and a second top barrier over the second channel layer. A second FET includes a second channel region, which includes a portion of the second channel layer. | 07-28-2011 |
| 20110180847 | SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF - According to one embodiment, a semiconductor device having a Ge- or SiGe-fin structure includes a convex-shaped active area formed along one direction on the surface region of a Si substrate, a buffer layer of Si | 07-28-2011 |
| 20110180848 | HIGH PERFORMANCE SiGe:C HBT WITH PHOSPHOROUS ATOMIC LAYER DOPING - A base structure for high performance Silicon Germanium:Carbon (SiGe:C) based heterojunction bipolar transistors (HBTs) with phosphorus atomic layer doping (ALD) is disclosed. The ALD process subjects the base substrate to nitrogen gas (in ambient temperature approximately equal to 500 degrees Celsius) and provides an additional SiGe:C spacer layer. During the ALD process, the percent concentrations of Germanium (Ge) and carbon (C) are substantially matched and phosphorus is a preferred dopant. The improved SiGe:C HBT is less sensitive to process temperature and exposure times, and exhibits lower dopant segregation and sharper base profiles. | 07-28-2011 |
| 20110180849 | SEMICONDUCTOR SUBSTRATE, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE - There is provided a semiconductor wafer having a base wafer, an insulating layer, and a Si | 07-28-2011 |
| 20110186910 | METHODS OF PREPARING FLEXIBLE PHOTOVOLTAIC DEVICES USING EPITAXIAL LIFTOFF, AND PRESERVING THE INTEGRITY OF GROWTH SUBSTRATES USED IN EPITAXIAL GROWTH - There is disclosed methods of making photosensitive devices, such as flexible photovoltaic (PV) devices, through the use of epitaxial liftoff. Also described herein are methods of preparing flexible PV devices comprising a structure having a growth substrate, wherein the selective etching of protective layers yields a smooth growth substrate that us suitable for reuse. | 08-04-2011 |
| 20110186911 | SEMICONDUCTOR SUBSTRATE, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE - There is provided a semiconductor wafer including a base wafer, an insulating layer, and a Si crystal layer in the stated order. Here, the semiconductor wafer includes a seed crystal disposed on the Si crystal layer where the seed crystal has been subjected to annealing, and a compound semiconductor that has a lattice match or a pseudo lattice match with the seed crystal. There is provided an electronic device including a substrate, an insulating layer disposed on the substrate, a Si crystal layer disposed on the insulating layer, a seed crystal disposed on the Si crystal layer where the seed crystal has been subjected to annealing, a compound semiconductor that has a lattice match or a pseudo lattice match with the seed crystal, and a semiconductor device formed using the compound semiconductor. | 08-04-2011 |
| 20110204417 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE - A semiconductor device according to the present invention including: a substrate; a compound semiconductor layer formed on the substrate; an element forming area provided in the compound semiconductor layer; and at least one semiconductor element, which includes a first main electrode and a main second electrode, wherein the at least one semiconductor element is formed in the element forming area, wherein the compound semiconductor layer includes: a first compound growth layer, which is formed on the substrate and includes the element forming area; and a second compound growth layer formed on the substrate to surround the element forming area when viewed from a plane, wherein the second compound growth layer has a crystallinity lower than a crystallinity of the first compound growth layer | 08-25-2011 |
| 20110210373 | Semiconductor Structure with Coincident Lattice Interlayer - A semiconductor structure consistent with certain implementations has a crystalline substrate oriented with a {111} plane surface that is within 10 degrees of surface normal. An epitaxially grown electrically insulating interlayer overlays the crystalline substrate and establishes a coincident lattice that mates with the surface symmetry of the {111} plane surface. An atomically stable two dimensional crystalline film resides on the epitaxial insulating layer with a coincident lattice match to the insulating interlayer. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract. | 09-01-2011 |
| 20110210374 | Tri-Gate Field-Effect Transistors Formed by Aspect Ratio Trapping - Semiconductor structures include a trench formed proximate a substrate including a first semiconductor material. A crystalline material including a second semiconductor material lattice mismatched to the first semiconductor material is formed in the trench. Process embodiments include removing a portion of the dielectric layer to expose a side portion of the crystalline material and defining a gate thereover. Defects are reduced by using an aspect ratio trapping approach | 09-01-2011 |
| 20110215375 | MULTI-COMPONENT STRAIN-INDUCING SEMICONDUCTOR REGIONS - A multi-component strain-inducing semiconductor region is described. In an embodiment, formation of such a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a strained crystalline substrate. In one embodiment, the multi-component strain-inducing material region comprises a first portion and a second portion which are separated by an interface. In a specific embodiment, the concentration of charge-carrier dopant impurity atoms of the two portions are different from one another at the interface. | 09-08-2011 |
| 20110241071 | Semiconductor Devices Having Field Effect Transistors With Epitaxial Patterns in Recessed Regions - A semiconductor device includes a device isolation pattern, a gate line, and an epitaxial pattern. The device isolation pattern is disposed in a semiconductor substrate to define an active area. The gate line intersects the active area. The epitaxial pattern fills a recess region in the active area at one side of the gate line and includes a different constituent semiconductor element than the semiconductor substrate. The recess region includes a first inner sidewall that is adjacent to the device isolation pattern and extends in the lengthwise direction of the gate, and a second inner sidewall that extends in the direction perpendicular to the lengthwise direction of the gate line. The active area forms the first inner sidewall of the recess, while the device isolation layer forms at least a portion of the second inner sidewall of the recess. The epitaxial pattern contacts the first inner sidewall and the second inner sidewall of the recess region. | 10-06-2011 |
| 20110241072 | SEMICONDUCTOR STRUCTURE HAVING AN ELOG ON A THERMALLY AND ELECTRICALLY CONDUCTIVE MASK - A semiconductor structure includes a substrate, a thermally and electrically conductive mask positioned upon the substrate, and an epitaxial lateral over growth (ELOG) material positioned upon the thermally and electrically conductive mask. | 10-06-2011 |
| 20110254052 | Hybrid Group IV/III-V Semiconductor Structures - Described herein are semiconductor structures comprising (i) a Si substrate; (ii) a buffer region formed directly over the Si substrate, wherein the buffer region comprises (a) a Ge layer having a threading dislocation density below about 10 | 10-20-2011 |
| 20110260213 | MONOLAYER DOPANT EMBEDDED STRESSOR FOR ADVANCED CMOS - Semiconductor structures are disclosed that have embedded stressor elements therein. The disclosed structures include at least one FET gate stack located on an upper surface of a semiconductor substrate. The at least one FET gate stack includes source and drain extension regions located within the semiconductor substrate at a footprint of the at least one FET gate stack. A device channel is also present between the source and drain extension regions and beneath the at least one gate stack. The structure further includes embedded stressor elements located on opposite sides of the at least one FET gate stack and within the semiconductor substrate. Each of the embedded stressor elements includes a lower layer of a first epitaxy doped semiconductor material having a lattice constant that is different from a lattice constant of the semiconductor substrate and imparts a strain in the device channel, and an upper layer of a second epitaxy doped semiconductor material located atop the lower layer. The lower layer of the first epitaxy doped semiconductor material has a lower content of dopant as compared to the upper layer of the second epitaxy doped semiconductor material. The structure further includes at least one monolayer of dopant located within the upper layer of each of the embedded stressor elements. The at least one monolayer of dopant is in direct contact with an edge of either the source extension region or the drain extension region. | 10-27-2011 |
| 20110266595 | SEMICONDUCTOR SUBSTRATE, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE - There is provided a semiconductor wafer including a base wafer, an insulating layer, and a Si crystal layer in the stated order. The semiconductor wafer further includes an inhibition layer that is provided on the Si crystal layer and has an opening penetrating therethrough to reach the Si crystal layer. The inhibition layer inhibiting crystal growth of a compound semiconductor. Furthermore, a seed crystal is provided within the opening, and a compound semiconductor has a lattice match or a pseudo lattice match with the seed crystal. There is also provided an electronic device includes a substrate, an insulating layer that is provided on the substrate, a Si crystal layer that is provided on the insulating layer, an inhibition layer that is provided on the Si crystal layer and has an opening penetrating therethrough to reach the Si crystal layer, where the inhibition layer inhibits crystal growth of a compound semiconductor, a seed crystal that is provided within the opening, a compound semiconductor that has a lattice match or a pseudo lattice match with the seed crystal, and a semiconductor device that is formed using the compound semiconductor. | 11-03-2011 |
| 20110272738 | Semiconductor Devices Including Fin Shaped Semiconductor Regions and Stress Inducing Layers - A semiconductor device may include a substrate, an active semiconductor region of the substrate, and a gate electrode. The active semiconductor region may include a channel region between first and second junction regions. The channel region may include a first semiconductor material, the first and second junction regions may include a second semiconductor material, and the first and second semiconductor materials may be different. The gate electrode may be on the channel region with portions of the first and second junction regions being free of the gate electrode. | 11-10-2011 |
| 20110278644 | GROUP III-NITRIDE ENHANCEMENT MODE FIELD EFFECT DEVICES AND FABRICATION METHODS - Structures and fabrication processes are described for group III-nitride enhancement mode field effect devices in which a two-dimensional electron gas is present at or near the interface between a pair of active layers that include a group III-nitride barrier layer and a group III-nitride semiconductor layer. The barrier layer has a band gap wider than the band gap of the adjacent underlying semiconductor layer. The two-dimensional electron gas is induced by providing one or more layers disposed over the barrier layer. A gate electrode is in direct contact with the barrier layer. Ohmic contacts for source and drain electrodes are in direct contact either with the barrier layer or with a semiconductor nitride layer disposed over the barrier layer. | 11-17-2011 |
| 20110278645 | STRAIN-DIRECT-ON-INSULATOR (SDOI) SUBSTRATE AND METHOD OF FORMING - Methods (and semiconductor substrates produced therefrom) of fabricating (n−1) SDOI substrates using n wafers is described. A donor substrate (e.g., silicon) includes a buffer layer (e.g., SiGe) and a plurality of multi-layer stacks formed thereon having alternating stress (e.g., relaxed SiGe) and strain (e.g., silicon) layers. An insulator is disposed adjacent an outermost strained silicon layer. The outermost strained silicon layer and underlying relaxed SiGe layer is transferred to a handle substrate by conventional or known bonding and separation methods. The handle substrate is processed to remove the relaxed SiGe layer thereby producing an SDOI substrate for further use. The remaining donor substrate is processed to remove one or more layers to expose another strained silicon layer. Various processing steps are repeated to produce another SDOI substrate as well as a remaining donor substrate, and the steps may be repeated to produce n−1 SDOI substrates. | 11-17-2011 |
| 20110298008 | SELF-ALIGNED EMBEDDED SiGe STRUCTURE AND METHOD OF MANUFACTURING THE SAME - A low energy surface is formed by a high temperature anneal of the surfaces of trenches on each side of a gate stack. The material of the semiconductor layer reflows during the high temperature anneal such that the low energy surface is a crystallographic surface that is at a non-orthogonal angle with the surface normal of the semiconductor layer. A lattice mismatched semiconductor material is selectively grown on the semiconductor layer to fill the trenches, thereby forming embedded lattice mismatched semiconductor material portions in source and drain regions of a transistor. The embedded lattice mismatched semiconductor material portions can be in-situ doped without increasing punch-through. Alternately, a combination of intrinsic selective epitaxy and ion implantation can be employed to form deep source and drain regions. | 12-08-2011 |
| 20110298009 | EPITAXIAL SUBSTRATE FOR ELECTRONIC DEVICE AND METHOD OF PRODUCING THE SAME - An object of the present invention is to provide an epitaxial substrate for an electronic device, in which a lateral direction of the substrate is defined as a main current conducting direction and a warp configuration of the epitaxial substrate is adequately controlled, as well as a method of producing the epitaxial substrate. Specifically, the epitaxial substrate for an electron device, including: a Si single crystal substrate; and a Group III nitride laminated body formed by epitaxially growing plural Group III nitride layers on the Si single crystal substrate, wherein a lateral direction of the epitaxial substrate is defined as a main current conducting direction, is characterized in that the Si single crystal substrate is a p-type substrate having a specific resistance value of not larger than 0.01 Ω·cm. | 12-08-2011 |
| 20110316044 | DELTA MONOLAYER DOPANTS EPITAXY FOR EMBEDDED SOURCE/DRAIN SILICIDE - Semiconductor structures are disclosed that have embedded stressor elements therein. The disclosed structures include at least one FET gate stack located on an upper surface of a semiconductor substrate. The at least one FET gate stack includes source and drain extension regions located within the semiconductor substrate at a footprint of the at least one FET gate stack. A device channel is also present between the source and drain extension regions and beneath the at least one gate stack. The structure further includes embedded stressor elements located on opposite sides of the at least one FET gate stack and within the semiconductor substrate. Each of the embedded stressor elements includes, from bottom to top, a first layer of a first epitaxy doped semiconductor material having a lattice constant that is different from a lattice constant of the semiconductor substrate and imparts a strain in the device channel, a second layer of a second epitaxy doped semiconductor material located atop the first layer, and a delta monolayer of dopant located on an upper surface of the second layer. The structure further includes a metal semiconductor alloy contact located directly on an upper surface of the delta monolayer. | 12-29-2011 |
| 20120001228 | METHOD TO CONTROL SOURCE/DRAIN STRESSOR PROFILES FOR STRESS ENGINEERING - An example embodiment of a strained channel transistor structure comprises the following: a strained channel region comprising a first semiconductor material with a first natural lattice constant; a gate dielectric layer overlying the strained channel region; a gate electrode overlying the gate dielectric layer; and a source region and drain region oppositely adjacent to the strained channel region, one or both of the source region and drain region are comprised of a stressor region comprised of a second semiconductor material with a second natural lattice constant different from the first natural lattice constant; the stressor region has a graded concentration of a dopant impurity and/or of a stress inducing molecule. Another example embodiment is a process to form the graded impurity or stress inducing molecule stressor embedded S/D region, whereby the location/profile of the S/D stressor is not defined by the recess depth/profile. | 01-05-2012 |
| 20120007143 | SUBSTRATE STRUCTURE AND METHOD OF MANUFACTURING THE SAME - A substrate structure and method of manufacturing the same are disclosed. The substrate structure may includes a substrate on which a plurality of protrusions are formed on one surface thereof and a plurality of buffer layers formed according to a predetermined pattern and formed spaced apart from each other on the plurality of protrusions. | 01-12-2012 |
| 20120025266 | Transistors Comprising High-K Metal Gate Electrode Structures and Embedded Strain-Inducing Semiconductor Alloys Formed in a Late Stage - In sophisticated semiconductor devices, replacement gate approaches may be applied in combination with a process strategy for implementing a strain-inducing semiconductor material, wherein superior proximity of the strain-inducing semiconductor material and/or superior robustness of the replacement gate approach may be achieved by forming the initial gate electrode structures with superior uniformity and providing at least one cavity for implementing the strained channel regions in a very advanced manufacturing stage, i.e., after completing the basic transistor configuration. | 02-02-2012 |
| 20120032229 | Silicon Wafer And Production Method Thereof - A silicon wafer contains: a silicon substrate; a first epitaxial layer on the silicon wafer, wherein the absolute value of the difference between donor and acceptor concentrations is ≧1×10 | 02-09-2012 |
| 20120056244 | Growth of multi-layer group III-nitride buffers on large-area silicon Substrates and other substrates - A method includes forming a first epitaxial layer over a semiconductor substrate and etching the first epitaxial layer to form multiple separated first epitaxial regions. The method also includes forming a second epitaxial layer over the etched first epitaxial layer. Each epitaxial layer includes at least one Group III-nitride, and the epitaxial layers collectively form a buffer. The method further includes forming a device layer over the buffer and fabricating a semiconductor device using the device layer. The second epitaxial layer could include second epitaxial regions substantially only on the first epitaxial regions. The second epitaxial layer could also cover the first epitaxial regions and the substrate, and the second epitaxial layer may or may not be etched. The device layer could be formed during the same operation used to form the second epitaxial layer. | 03-08-2012 |
| 20120068226 | Formation of Devices by Epitaxial Layer Overgrowth - Methods and structures are provided for formation of devices on substrates including, e.g., lattice-mismatched materials, by the use of aspect ratio trapping and epitaxial layer overgrowth. A method includes forming an opening in a masking layer disposed over a substrate that includes a first semiconductor material. A first layer, which includes a second semiconductor material lattice-mismatched to the first semiconductor material, is formed within the opening. The first layer has a thickness sufficient to extend above a top surface of the masking layer. A second layer, which includes the second semiconductor material, is formed on the first layer and over at least a portion of the masking layer. A vertical growth rate of the first layer is greater than a lateral growth rate of the first layer and a lateral growth rate of the second layer is greater than a vertical growth rate of the second layer. | 03-22-2012 |
| 20120074464 | Non-planar device having uniaxially strained semiconductor body and method of making same - A method and a device made according to the method. The method comprises providing a substrate including a first material, and providing a fin including a second material, the fin being disposed on the substrate and having a device active portion, the first material and the second material presenting a lattice mismatch between respective crystalline structures thereof. Providing the fin includes providing a biaxially strained film including the second material on the substrate; and removing parts of the biaxially strained film to form a substantially uniaxially strained fin therefrom. | 03-29-2012 |
| 20120080720 | METHOD OF FORMING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE - A method of forming a semiconductor device comprises forming a control electrode over a portion of a semiconductor layer, forming recesses extending into the semiconductor layer on opposing sides of the control electrode, and forming doped regions in the semiconductor layer through the recesses. The doped regions form current electrode regions of the semiconductor device and each doped region extends into the semiconductor layer from at least a base of a recess. The method further comprises forming, after forming the doped regions, strained semiconductor regions in the recesses, wherein a junction between each doped region and the semiconductor layer is formed below an interface between a strained semiconductor region and the semiconductor layer. | 04-05-2012 |
| 20120086046 | SELF ALIGNED DEVICE WITH ENHANCED STRESS AND METHODS OF MANUFACTURE - A method includes forming a stressed Si layer in a trench formed in a stress layer deposited on a substrate. The stressed Si layer forms an active channel region of a device. The method further includes forming a gate structure in the active channel region formed from the stressed Si layer. | 04-12-2012 |
| 20120086047 | Semiconductor Structures Employing Strained Material Layers with Defined Impurity Gradients and Methods for Fabricating Same - Semiconductor structures and devices including strained material layers having impurity-free zones, and methods for fabricating same. Certain regions of the strained material layers are kept free of impurities that can interdiffuse from adjacent portions of the semiconductor. When impurities are present in certain regions of the strained material layers, there is degradation in device performance. By employing semiconductor structures and devices (e.g., field effect transistors or “FETs”) that have the features described, or are fabricated in accordance with the steps described, device operation is enhanced. | 04-12-2012 |
| 20120091505 | SEMICONDUCTOR DEVICE - A semiconductor device according to one embodiment includes an element isolation insulating film formed on a substrate, an element region and a dummy pattern region demarcated by the element isolation insulating film on the substrate, a first epitaxial crystal layer formed on the substrate within the element region, and a second epitaxial crystal layer formed on the substrate within the dummy pattern region. The first epitaxial crystal layer is made up of crystals that have a different lattice constant from that of the crystals that constitute the substrate. The second epitaxial crystal layer is made up of the same crystals as the first epitaxial crystal layer. The (111) plane of the substrate that includes any points on the interface between the second epitaxial crystal layer and the substrate is surrounded by the element isolation insulating film in a deeper region than the second epitaxial crystal layer. | 04-19-2012 |
| 20120098033 | HETEROSTRUCTURES COMPRISING CRYSTALLINE STRAIN RELAXATION LAYERS - The invention relates to a process for fabricating a heterostructure. This process is noteworthy in that it comprises the following steps: a) a strained crystalline thin film is deposited on, or transferred onto, an intermediate substrate; b) a strain relaxation layer, made of crystalline material capable of being plastically deformed by a heat treatment at a relaxation temperature at which the material constituting the thin film deforms by elastic deformation is deposited on the thin film; c) the thin film and the relaxation layer are transferred onto a substrate; and d) a thermal budget is applied at at least the relaxation temperature, so as to cause the plastic deformation of the relaxation layer and the at least partial relaxation of the thin film by elastic deformation, and thus to obtain the final heterostructure. | 04-26-2012 |
| 20120098034 | Epitaxial Growth of Crystalline Material - A device includes an epitaxially grown crystalline material within an area confined by an insulator. A surface of the crystalline material has a reduced roughness. One example includes obtaining a surface with reduced roughness by creating process parameters which result in the dominant growth component of the crystal to be supplied laterally from side walls of the insulator. In a preferred embodiment, the area confined by the insulator is an opening in the insulator having an aspect ratio sufficient to trap defects using an ART technique. | 04-26-2012 |
| 20120104461 | Semiconductor Heterostructures Having Reduced Dislocation Pile-Ups and Related Methods - Dislocation pile-ups in compositionally graded semiconductor layers are reduced or eliminated, thereby leading to increased semiconductor device yield and manufacturability. This is accomplished by introducing a semiconductor layer having a plurality of threading dislocations distributed substantially uniformly across its surface as a starting layer and/or at least one intermediate layer during growth and relaxation of the compositionally graded layer. The semiconductor layer may include a seed layer disposed proximal to the surface of the semiconductor layer and having the threading dislocations uniformly distributed therein. | 05-03-2012 |
| 20120112242 | Semiconductor body with strained region - A semiconductor body comprised of a semiconductor material includes a first monocrystalline region of the semiconductor material having a first lattice constant along a reference direction, a second monocrystalline region of the semiconductor material having a second lattice constant, which is different than the first, along the reference direction, and a third, strained monocrystalline region between the first region and the second region. | 05-10-2012 |
| 20120119259 | SEMICONDUCTOR DEVICE SUBSTRATE WITH EMBEDDED STRESS REGION, AND RELATED FABRICATION METHODS - A semiconductor device substrate is presented here. The semiconductor device substrate includes a layer of first semiconductor material having a first lattice constant, a region of second semiconductor material located in the layer of first semiconductor material, and a layer of epitaxially grown third semiconductor material overlying the layer of first semiconductor material and overlying the region of second semiconductor material. The second semiconductor material has a second lattice constant that is different than the first lattice constant. Moreover, the layer of epitaxially grown third semiconductor material exhibits a stressed zone overlying the region of second semiconductor material. The stressed zone has a third lattice constant that is different than the first lattice constant. | 05-17-2012 |
| 20120146092 | STRUCTURE AND METHOD FOR MOBILITY ENHANCED MOSFETS WITH UNALLOYED SILICIDE - While embedded silicon germanium alloy and silicon carbon alloy provide many useful applications, especially for enhancing the mobility of MOSFETs through stress engineering, formation of alloyed silicide on these surfaces degrades device performance. The present invention provides structures and methods for providing unalloyed silicide on such silicon alloy surfaces placed on semiconductor substrates. This enables the formation of low resistance contacts for both mobility enhanced PFETs with embedded SiGe and mobility enhanced NFETs with embedded Si:C on the same semiconductor substrate. Furthermore, this invention provides methods for thick epitaxial silicon alloy, especially thick epitaxial Si:C alloy, above the level of the gate dielectric to increase the stress on the channel on the transistor devices. | 06-14-2012 |
| 20120153350 | SEMICONDUCTOR DEVICES AND METHODS FOR FABRICATING THE SAME - Embodiments of semiconductor devices and methods for fabricating the semiconductor devices are provided. The method includes forming a cavity in a semiconductor region laterally adjacent to a gate electrode structure of a transistor. The gate electrode structure is disposed on a channel region of a first silicon-germanium alloy. A strain-inducing silicon-germanium alloy is formed in the cavity and in contact with the first silicon-germanium alloy. The strain-inducing silicon-germanium alloy includes carbon and has a composition different from the first silicon-germanium alloy. | 06-21-2012 |
| 20120168818 | METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE AND SEMICONDUCTOR DEVICE - Disclosed are a method which improves the performance of a semiconductor element, and a semiconductor element with improved performance. The method for forming a semiconductor element structure includes a heterojunction forming step in which a heterojunction is formed between a strained semiconductor layer ( | 07-05-2012 |
| 20120181577 | SEMICONDUCTOR WAFER AND SEMICONDUCTOR DEVICE HAVING MULTILAYERED NITRIDE SEMICONDUCTOR LAYER - A semiconductor wafer includes a multilayered film having a structure in which nondoped first nitride semiconductor layers and nondoped second nitride semiconductor layers with a larger lattice constant than the first nitride semiconductor layer are laminated alternately, and a nondoped third nitride semiconductor layer which is located on the multilayered film and has a larger lattice constant than the first nitride semiconductor layer, wherein the semiconductor wafer has conductivity in a film-thickness direction. | 07-19-2012 |
| 20120193677 | III-N Device Structures and Methods - A III-N device is described with a III-N layer, an electrode thereon, a passivation layer adjacent the III-N layer and electrode, a thick insulating layer adjacent the passivation layer and electrode, a high thermal conductivity carrier capable of transferring substantial heat away from the III-N device, and a bonding layer between the thick insulating layer and the carrier. The bonding layer attaches the thick insulating layer to the carrier. The thick insulating layer can have a precisely controlled thickness and be thermally conductive. | 08-02-2012 |
| 20120199876 | Defect Reduction Using Aspect Ratio Trapping - Lattice-mismatched epitaxial films formed proximate non-crystalline sidewalls. Embodiments of the invention include formation of facets that direct dislocations in the films to the sidewalls. | 08-09-2012 |
| 20120205715 | METHOD OF MANUFACTURING STRAINED SOURCE/DRAIN STRUCTURES - An integrated circuit device and method for manufacturing the integrated circuit device is disclosed. The disclosed method provides a processing for forming improved lightly doped source/drain features and source/drain features in the semiconductor device. Semiconductor device with the improved lightly doped source/drain features and source/drain features may prevent or reduce defects and achieve high strain effect. In at least one embodiment, the lightly doped source/drain features and source/drain features comprises the same semiconductor material formed by epitaxial growth. | 08-16-2012 |
| 20120217543 | COMPOUND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - At least one kind of impurity selected from, for example, Fe, C, B, Ti, Cr is introduced into at least a buffer layer of a compound semiconductor layered structure from a rear surface of the compound semiconductor layered structure to make a resistance value of the buffer layer high. | 08-30-2012 |
| 20120223362 | Compound Semiconductor Device on Virtual Substrate - A method of fabrication of barrier diode based infrared detectors, utilizing the growth of unstrained, not relaxed III-V compound semiconductor material layers having a lattice constant over 6 Angstrom, is provided. The growth is performed by the means of Molecular Beam Epitaxy (MBE) or Metal-Organic Vapor Phase Epitaxy (MOVPE). The method comprises the use of bulk crystalline substrates and the growth of a transitional layer of GaInAsSb with graded composition, followed by an optional thick layer of GaInAsSb of constant composition, lattice matched to the said III-V compound semiconductor material layers, the said optional layer of GaInAsSb of constant composition serving as a virtual substrate. The method provides high crystalline quality layers suitable for semiconductor device fabrication that can effectively interact with electromagnetic radiation of the mid-infrared spectral range with a wavelength between about 2 micrometers to about 16 micrometers. | 09-06-2012 |
| 20120223363 | TRANSISTOR WITH AN EMBEDDED STRAIN-INDUCING MATERIAL HAVING A GRADUALLY SHAPED CONFIGURATION - In a transistor, a strain-inducing semiconductor alloy, such as silicon/germanium, silicon/carbon and the like, may be positioned very close to the channel region by providing gradually shaped cavities which may then be filled with the strain-inducing semiconductor alloy. For this purpose, two or more “disposable” spacer elements of different etch behavior may be used in order to define different lateral offsets at different depths of the corresponding cavities. Consequently, enhanced uniformity and, thus, reduced transistor variability may be accomplished, even for sophisticated semiconductor devices. | 09-06-2012 |
| 20120241815 | SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME - A method of fabricating one or more semiconductor devices includes forming a trench in a semiconductor substrate, performing a cycling process to remove contaminants from the trench, and forming an epitaxial layer on the trench. The cycling process includes sequentially supplying a first reaction gas containing germane, hydrogen chloride and hydrogen and a second reaction gas containing hydrogen chloride and hydrogen onto the semiconductor substrate. | 09-27-2012 |
| 20120256232 | Multilayer Rare Earth Device - Examples of device structures utilizing layers of rare earth oxides to perform the tasks of strain engineering in transitioning between semiconductor layers of different composition and/or lattice orientation and size are given. A structure comprising a plurality of semiconductor layers separated by transition layer(s) comprising two or more rare earth compounds operable as a sink for structural defects is disclosed. | 10-11-2012 |
| 20120261716 | SEMICONDUCTOR DEVICE - A semiconductor device includes a substrate, a buffer layer, and a compound semiconductor layer. The buffer layer is configured by laminating two or more pairs of a first buffer and a second buffer. The first buffer is formed by laminating one or more pairs of an AlN layer and a GaN layer. The second buffer is formed of a GaN layer. A total Al composition of a pair of the first buffer and the second buffer on the compound semiconductor layer side is higher than that of a pair of the first buffer and the second buffer on the substrate side. | 10-18-2012 |
| 20120261717 | MONOLAYER DOPANT EMBEDDED STRESSOR FOR ADVANCED CMOS - Semiconductor structures are disclosed that include at least one FET gate stack located on a semiconductor substrate. The at least one FET gate stack includes source and drain extension regions located within the semiconductor substrate. A device channel is also present between the source and drain extension regions and beneath the at least one gate stack. Embedded stressor elements are located on opposite sides of the at least one FET gate stack and within the semiconductor substrate. Each stressor element includes a lower layer of a first epitaxy doped semiconductor material having a lattice constant that is different from a lattice constant of the semiconductor substrate and imparts a strain in the device channel, and an upper layer of a second epitaxy doped semiconductor material. At least one monolayer of dopant is located within the upper layer of each of the embedded stressor elements. | 10-18-2012 |
| 20120273839 | SEMICONDUCTOR WAFER, METHOD FOR PRODUCING SEMICONDUCTOR WAFER, AND METHOD FOR PRODUCING PHOTO-ELECTRIC CONVERSION DEVICE - A semiconductor wafer includes a base wafer, a sacrificial layer that is lattice-matched or pseudo lattice-matched to the base wafer, a first crystal layer that is formed on the sacrificial layer and made of an epitaxial crystal of Si | 11-01-2012 |
| 20120280276 | Single Crystal Ge On Si - A single crystal germanium-on-silicon structure includes a single crystal silicon substrate. A single crystal layer of gadolinium oxide is epitaxially grown on the substrate. The gadolinium oxide has a cubic crystal structure and a lattice spacing approximately equal to the lattice spacing or a multiple of the single crystal silicon. A single crystal layer of lanthanum oxide is epitaxially grown on the gadolinium oxide with a thickness of approximately 12 nm or less. The lanthanum oxide has a lattice spacing approximately equal to the lattice spacing or a multiple of single crystal germanium and a cubic crystal structure approximately similar to the cubic crystal structure of the gadolinium oxide. A single crystal layer of germanium with a (111) crystal orientation is epitaxially grown on the layer of lanthanum oxide. | 11-08-2012 |
| 20120280277 | SHORT CHANNEL TRANSISTOR WITH REDUCED LENGTH VARIATION BY USING AMORPHOUS ELECTRODE MATERIAL DURING IMPLANTATION - In sophisticated transistor elements, enhanced profile uniformity along the transistor width direction may be accomplished by using a gate material in an amorphous state, thereby reducing channeling effects and line edge roughness. In sophisticated high-k metal gate approaches, an appropriate sequence may be applied to avoid a change of the amorphous state prior to performing the critical implantation processes for forming drain and source extension regions and halo regions. | 11-08-2012 |
| 20120286329 | SOI FET with embedded stressor block - A method and a structure are disclosed relating to strained body UTSOI FET devices. The method includes forming voids in the source/drain regions that penetrate down into the substrate below the insulating layer. The voids are epitaxially filled with a semiconductor material of a differing lattice constant than the one of the SOI layer, thus becoming a stressor block, and imparts a strain onto the FET device body. | 11-15-2012 |
| 20120286330 | PLANAR MOSFET WITH TEXTURED CHANNEL AND GATE - A semiconductor device is disclosed that includes a semiconductor substrate having a channel region and respective source and drain regions formed on opposite sides of the channel region. The channel region includes at least one pore. A gate is formed on the semiconductor substrate between the source and drain regions and includes at least one pin received by respective ones of the at least one pore. A dielectric layer is disposed between the gate and the semiconductor substrate. | 11-15-2012 |
| 20120292663 | Structure and Method for Monolithically Fabrication Sb-Based E/D Mode MISFETs - The invention provides two Sb-based n- or p-channel layer structures as a template for MISFET and complementary MISFET development. Four types of MISFET devices and two types of complementary MISFET circuit devices can be developed based on the invented layer structures. Also, the layer structures can accommodate more than one complementary MISFETs and more than one single active MISFETs to be integrated on the same substrate monolithically. | 11-22-2012 |
| 20120299058 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device comprising a silicon substrate, a gate structure and a heteroatom-containing epitaxial structure is provided. The gate structure is disposed on a surface of the silicon substrate. The heteroatom-containing epitaxial structure is disposed adjacent to the gate structure and has a major portion and an extension portion, wherein the major portion virtual vertically extends downwards into the silicon substrate from the surface; and the extension portion further extends downwards into the silicon substrate with a tapered cross-section continuing with the major portion. | 11-29-2012 |
| 20120299059 | TRANSISTOR AND METHOD FOR MANUFACTURING SAME - The transistor includes an underlying layer | 11-29-2012 |
| 20120299060 | NITRIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A nitride semiconductor device includes: a silicon substrate; a buffer layer formed on the silicon substrate and comprised of a nitride semiconductor; and an active layer formed on the buffer layer and comprised of a nitride semiconductor. The buffer layer includes a first layer formed in contact with the silicon substrate, and a second layer formed in contact with the first layer and the active layer. The carbon concentration at an interface between the first layer and the second layer is in the range of 1×10 | 11-29-2012 |
| 20120299061 | METHOD FOR MANUFACTURING EPITAXIAL CRYSTAL SUBSTRATE, EPITAXIAL CRYSTAL SUBSTRATE AND SEMICONDUCTOR DEVICE - Disclosed is a technology of manufacturing, at low cost, an epitaxial crystal substrate provided with a high-quality and uniform epitaxial layer, said technology being useful in the case of growing the epitaxial layer composed of a semiconductor having a lattice constant different from that of the substrate. The substrate, which is composed of a first compound semiconductor, and which has a step-terrace structure on the surface, is used, and on the surface of the substrate, a composition modulation layer composed of a second compound semiconductor is grown by step-flow, while changing the composition in the same terrace. Then, the epitaxial crystal substrate is manufactured by growing, on the composition modulation layer, the epitaxial layer composed of the third compound semiconductor having the lattice constant different from that of the first compound semiconductor. | 11-29-2012 |
| 20120319165 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME - Object of the invention is to reduce the on resistance between source and drain of a nitride semiconductor device. Between a nitride semiconductor layer lying between source and drain regions and a nitride semiconductor layer serving as an underlying layer, formed is a material having an electron affinity greater than that of these nitride semiconductor layers and having a lattice constant greater than that of the nitride semiconductor layer serving as an underlying layer. As a result, an electron density distribution of a channel formed below a gate insulating film and that of a two-dimensional electron gas formed in a region other than the gate portion, when a gate voltage is applied, can be made closer in the depth direction, leading to reduction in on resistance. | 12-20-2012 |
| 20120326210 | METHOD OF MAKING SEMICONDUCTOR MATERIALS AND DEVICES ON SILICON SUBSTRATE - A crystalline structure comprising a substrate, which has a surface. The surface has one or more wells formed therein defining one or more growing area and at least one layer of dissimilar crystalline material epitaxially grown on the growing area. A method of making a crystalline structure having a low threading dislocation density comprising the steps of (a) patterning a surface of a substrate material such that one or more wells defining a growing area is formed therein; and (b) epitaxially growing at least one strained layer of dissimilar crystalline material on the growing area of the surface of the substrate material, such that the threading dislocation density of the at least one strained layer is reduced by the one or more wells. | 12-27-2012 |
| 20130001644 | Nitride Semiconductor Epitaxial Substrate and Nitride Semiconductor Device - There is provided a nitride semiconductor epitaxial substrate having a group III nitride semiconductor layer with C-plane as a surface, grown on a substrate via a buffer layer of the group III nitride semiconductor containing Al, wherein the buffer layer has an inversion domain on the surface. | 01-03-2013 |
| 20130001645 | SEMICONDUCTOR EPITAXIAL SUBSTRATE - Provided is a semiconductor epitaxial substrate which has low semiconductor layer mosaicity and is suitable for the production of a semiconductor device. Specifically provided is a semiconductor epitaxial substrate formed by epitaxially growing a graded buffer layer which is compositionally graded such that the lattice constant increases in stages within a range from a first lattice constant to a second lattice constant larger than the first lattice constant, and a semiconductor layer produced from a semiconductor crystal having the second lattice constant on a semiconductor substrate having the first lattice constant. The angle formed by the (mnn) plane (m and n are integers except m=n=0) of the semiconductor layer and the (mnn) plane of the semiconductor substrate is set to +0.05° or more when the direction that rotates clockwise from the [100] direction to the [011] direction is positive. | 01-03-2013 |
| 20130015497 | SOURCE/DRAIN REGION, CONTACT HOLE AND METHOD FOR FORMING THE SAMEAANM Yin; HaizhouAACI PoughkeepsieAAST NYAACO USAAGP Yin; Haizhou Poughkeepsie NY USAANM Zhu; HuilongAACI PoughkeepsieAAST NYAACO USAAGP Zhu; Huilong Poughkeepsie NY USAANM Luo; ZhijiongAACI PoughkeepsieAAST NYAACO USAAGP Luo; Zhijiong Poughkeepsie NY US - An S/D region including a first region and a second region is provided. The first region is located, with at least a partial thickness, in the substrate. The second region is formed on the first region and made of a material different from that of the first region. A method for forming an S/D region is further provided, and the method includes: forming trenches at both sides of a gate stack structure in a substrate; forming a first semiconductor layer, wherein at least a part of the first semiconductor layer is filled into the trenches; and forming a second semiconductor layer on the first semiconductor layer, wherein the second semiconductor layer is made of a material different from that of the first semiconductor layer. A contact hole and a forming method thereof are also provided which may increase the contact area between a contact hole and a contact region, and reduce the contact resistance. | 01-17-2013 |
| 20130020612 | Re-growing Source/Drain Regions from Un-Relaxed Silicon Layer - A method of forming an n-type metal-oxide-semiconductor (NMOS) field-effect transistor (FET) includes forming a silicon germanium layer, and forming a silicon layer over the silicon germanium layer. A gate stack is formed over the silicon layer. The silicon layer is recessed to form a recess adjacent the gate stack. A silicon-containing semiconductor region is epitaxially grown in the recess to form a source/drain stressor, wherein the silicon-containing semiconductor region forms a source/drain region the NMOS FET. | 01-24-2013 |
| 20130026538 | SEMICONDUCTOR DEVICE HAVING EPITAXIAL STRUCTURES - A semiconductor device having epitaxial structures includes a gate structure positioned on a substrate, epitaxial structures formed in the substrate at two sides of the gate structure, and an undoped cap layer formed on the epitaxial structures. The epitaxial structures include a dopant, a first semiconductor material having a first lattice constant, and a second semiconductor material having a second lattice constant, and the second lattice constant is larger than the first lattice constant. The undoped cap layer also includes the first semiconductor material and the second semiconductor material. The second semiconductor material in the epitaxial structures includes a first concentration, the second semiconductor material in the undoped cap layer includes at least a first concentration, and the second concentration is lower than the first concentration. | 01-31-2013 |
| 20130032858 | RARE EARTH OXY-NITRIDE BUFFERED III-N ON SILICON - Rare earth oxy-nitride buffered III-N on silicon includes a silicon substrate with a rare earth oxide (REO) structure, including several REO layers, is deposited on the silicon substrate. A layer of single crystal rare earth oxy-nitride is deposited on the REO structure. The REO structure is stress engineered to approximately crystal lattice match the layer of rare earth oxy-nitride so as to provide a predetermined amount of stress in the layer of rare earth oxy-nitride. A III oxy-nitride structure, including several layers of single crystal rare earth oxy-nitride, is deposited on the layer of rare earth oxy-nitride. A layer of single crystal III-N nitride is deposited on the III oxy-nitride structure. The III oxy-nitride structure is chemically engineered to approximately crystal lattice match the layer of III-N nitride and to transfer the predetermined amount of stress in the layer of rare earth oxy-nitride to the layer of III-N nitride. | 02-07-2013 |
| 20130037856 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - This invention relates to a semiconductor device and a manufacturing method therefor for reducing stacking faults caused by high content of Ge in an embedded SiGe structure. The semiconductor device comprises a Si substrate with a recess formed therein. A SiGe seed layer is formed on sidewalls of the recess, and a first SiGe layer having a Ge content gradually increased from bottom to top is formed on the recess bottom. A second SiGe layer having a constant content of Ge is formed on the first SiGe layer. The thickness of the first SiGe layer is less than the depth of the recess. The Ge content in the SiGe seed layer is less than the Ge content in the second SiGe layer, and the Ge content at the upper surface of the first SiGe layer is less than or equal to the Ge content in the second SiGe layer. | 02-14-2013 |
| 20130037857 | DISLOCATION AND STRESS MANAGEMENT BY MASK-LESS PROCESSES USING SUBSTRATE PATTERNING AND METHODS FOR DEVICE FABRICATION - Structures and methods for producing active layer stacks of lattice matched, lattice mismatched and thermally mismatched semiconductor materials, with low threading dislocation densities, no layer cracking and minimized wafer bowing, by using epitaxial growth onto elevated substrate regions in a mask-less process. | 02-14-2013 |
| 20130056794 | SEMICONDUCTOR WAFER, METHOD OF PRODUCING SEMICONDUCTOR WAFER, ELECTRONIC DEVICE, AND METHOD OF PRODUCING ELECTRONIC DEVICE - A semiconductor wafer includes a base wafer, a first semiconductor portion that is formed on the base wafer and includes a first channel layer containing a majority carrier of a first conductivity type, a separation layer that is formed over the first semiconductor portion and contains an impurity to create an impurity level deeper than the impurity level of the first semiconductor portion, and a second semiconductor portion that is formed over the separation layer and includes a second channel layer containing a majority carrier of a second conductivity type opposite to the first conductivity type. | 03-07-2013 |
| 20130062664 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE - A semiconductor device includes: a channel layer made of a compound semiconductor; a barrier layer provided above the channel layer and made of a compound semiconductor in which an energy band on a carrier travel side in a junction with respect to the channel layer is farther from an intrinsic Fermi level in the channel layer than in the channel layer; a low-resistance region provided in a surface layer of the barrier layer, in which resistance is kept lower than portions around by containing impurity; a source electrode and a drain electrode connected to the barrier layer at positions sandwiching the low-resistance region; a gate insulating layer provided on the low-resistance region; and a gate electrode provided above the low-resistance region through the gate insulating layer. | 03-14-2013 |
| 20130062665 | METHOD FOR PRODUCING A III/V SI TEMPLATE - A method for producing a monolithic template comprises a Si wafer with a layer of a III/V semiconductor epitaxially applied to its surface. The III/V semiconductor has a lattice constant differing by less than 10% from that of Si. The method includes epitaxially growing a layer of a III/V semiconductor on the surface of the Si wafer at a wafer temperature from 350 to 650° C., a growth rate from 0.1 to 2 μm/h, and a layer thickness from 1 to 100 nm. A layer of another III/V semiconductor, identical to or different from the previously applied III/V semiconductor, is epitaxially grown on the III/V semiconductor layer at a wafer temperature from 500 to 800° C., a growth rate from 0.1 to 10 μm/h, and a layer thickness from 10 to 150 nm. | 03-14-2013 |
| 20130087831 | Selective Epitaxial Growth of Semiconductor Materials with Reduced Defects - A semiconductor device includes a substrate formed of a first semiconductor material; two insulators on the substrate; and a semiconductor region having a portion between the two insulators and over the substrate. The semiconductor region has a bottom surface contacting the substrate and having sloped sidewalls. The semiconductor region is formed of a second semiconductor material different from the first semiconductor material. | 04-11-2013 |
| 20130099281 | POST-GATE SHALLOW TRENCH ISOLATION STRUCTURE FORMATION - Doped wells, gate stacks, and embedded source and drain regions are formed on, or in, a semiconductor substrate, followed by formation of shallow trenches in the semiconductor substrate. The shallow trenches can be formed by forming a planarized material layer over the doped wells, the gate stacks, and the embedded source and drain regions; patterning the planarized material layer; and transferring the pattern in the planarized material layer into the gate stacks, embedded source and drain regions, and the doped wells. The shallow trenches are filled with a dielectric material to form shallow trench isolation structures. Alternately, the shallow trenches can be formed by applying a photoresist over the doped wells, the gate stacks, and the embedded source and drain regions, and subsequently etching exposed portions of the underlying structures. After removal of the photoresist, shallow trench isolation structures can be formed by filling the shallow trenches. | 04-25-2013 |
| 20130099282 | FinFET Device And Method Of Manufacturing Same - A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a first dielectric layer disposed over the substrate. The semiconductor device further includes a buffer layer disposed over the substrate and between first and second walls of a trench of the dielectric layer. The semiconductor device further includes an insulator layer disposed over the buffer layer and between the first and second wall of the trench of the dielectric layer. The semiconductor device also includes a second dielectric layer disposed over the first dielectric layer and the insulator layer. Further, the semiconductor device includes a fin structure disposed over the insulator layer and between first and second walls of a trench of the second dielectric layer. | 04-25-2013 |
| 20130099283 | III-V Multi-Channel FinFETs - A device includes insulation regions over portions of a semiconductor substrate, and a III-V compound semiconductor region over top surfaces of the insulation regions, wherein the III-V compound semiconductor region overlaps a region between opposite sidewalls of the insulation regions. The III-V compound semiconductor region includes a first and a second III-V compound semiconductor layer formed of a first III-V compound semiconductor material having a first band gap, and a third III-V compound semiconductor layer formed of a second III-V compound semiconductor material between the first and the second III-V compound semiconductor layers. The second III-V compound semiconductor material has a second band gap lower than the first band gap. A gate dielectric is formed on a sidewall and a top surface of the III-V compound semiconductor region. A gate electrode is formed over the gate dielectric. | 04-25-2013 |
| 20130105859 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME | 05-02-2013 |
| 20130105860 | Lattice-Mismatched Semiconductor Structures with Reduced Dislocation Defect Densities and Related Methods for Device Fabrication | 05-02-2013 |
| 20130113018 | FIELD EFFECT TRANSISTOR - A first group III nitride semiconductor layer has a low carbon concentration region having a carbon concentration of less than 1×10 | 05-09-2013 |
| 20130146942 | Method for Making FinFETs and Semiconductor Structures Formed Therefrom - A method for making FinFETs and semiconductor structures formed therefrom is disclosed, comprising: providing a SiGe layer on a Si semiconductor substrate and a Si layer on the SiGe layer, wherein the lattice constant of the SiGe layer matches that of the substrate; patterning the Si layer and the SiGe layer to form a Fin structure; forming a gate stack on top and both sides of the Fin structure and a spacer surrounding the gate stack; removing a portion of the Si layer which is outside the spacer with the spacer as a mask, while keeping a portion of the Si layer which is inside the spacer; removing a portion of the SiGe layer which is kept after the patterning, to form a void; forming an insulator in the void; and epitaxially growing stressed source and drain regions on both sides of the Fin structure and the insulator. | 06-13-2013 |
| 20130153963 | GATED III-V SEMICONDUCTOR STRUCTURE AND METHOD - A gated III-V semiconductor structure and a method for fabricating the gated III-V semiconductor structure includes a threshold modifying dopant region within a III-V semiconductor barrier layer at the base of an aperture through a passivation layer that otherwise passivates the III-V semiconductor barrier layer. The passivation layer, which may comprise an aluminum-silicon nitride material, has particular bandgap and permittivity properties that provide for enhanced performance of a III-V semiconductor device that derives from the III-V semiconductor structure absent a field plate. The threshold modifying dopant region provides the possibility for forming both an enhancement mode gated III-V semiconductor structure and a depletion mode III-V semiconductor structure on the same substrate. The threshold modifying dopant region when comprising a magnesium (Mg) threshold modifying dopant may be incorporated into the gates III-V semiconductor structure using a dicyclopentadienyl magnesium (Cp2Mg) vapor diffusion method or a magnesium-silicon nitride (MgSiN) solid state diffusion method. | 06-20-2013 |
| 20130168733 | SEMICONDUCTOR-STACKED SUBSTRATE, SEMICONDUCTOR CHIP, AND METHOD FOR PRODUCING SEMICONDUCTOR-STACKED SUBSTRATE - Disclosed is a semiconductor-stacked substrate having a substrate, and a plurality of semiconductor layers which are different in thermal expansion coefficient from the substrate, and are formed in a plurality of regions of a surface of the substrate, respectively. Each semiconductor layer has a growth plane that is a nonpolar plane or a semi-polar plane, and has different thermal expansion coefficients between along a first axis and a second axis orthogonal to each other and parallel to the surface of the substrate. The following mathematical formula 1 is satisfied. D | 07-04-2013 |
| 20130168734 | EPITAXIAL SUBSTRATE FOR SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING EPITAXIAL SUBSTRATE FOR SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - Provided is a semiconductor device of normally-off operation type having a low on-resistance. An epitaxial substrate for it includes: a base substrate; a channel layer made of a first group-III nitride having a composition of In | 07-04-2013 |
| 20130168735 | SEMICONDUCTOR WAFER AND INSULATED GATE FIELD EFFECT TRANSISTOR - Provided is a technique capable of realizing an insulated gate (MIS-type) P-HEMT structure with good transistor characteristics such as an improved carrier mobility of a channel layer and a reduced influence from interface states. A semiconductor wafer includes a base wafer, a first crystalline layer, and an insulating layer. The base wafer, the first crystalline layer, and the insulating layer are stacked in the order of the base wafer, the first crystalline layer, and the insulating layer. The first crystalline layer is made of In | 07-04-2013 |
| 20130175577 | NFET Device with Tensile Stressed Channel Region and Methods of Forming Same - Disclosed herein is an NFET device with a tensile stressed channel region and various methods of making such an NFET device. In one example, the NFET transistor includes a semiconducting substrate, a first layer of semiconductor material positioned above the substrate, a second capping layer of semiconductor material positioned above the first layer of semiconductor material and a gate electrode structure positioned above the second capping layer of semiconductor material. | 07-11-2013 |
| 20130181255 | SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING THE SAME - There is provided a vertical GaN-based semiconductor device in which the on-resistance can be decreased while the breakdown voltage characteristics are improved using a p-type GaN barrier layer. The semiconductor device includes a regrown layer | 07-18-2013 |
| 20130200433 | STRAINED CHANNEL FOR DEPLETED CHANNEL SEMICONDUCTOR DEVICES - A planar semiconductor device including a semiconductor on insulator (SOI) substrate with source and drain portions having a thickness of less than 10 nm that are separated by a multi-layered strained channel. The multi-layer strained channel of the SOI layer includes a first layer with a first lattice dimension that is present on the buried dielectric layer of the SOI substrate, and a second layer of a second lattice dimension that is in direct contact with the first layer of the multi-layer strained channel portion. A functional gate structure is present on the multi-layer strained channel portion of the SOI substrate. The semiconductor device having the multi-layered channel may also be a finFET semiconductor device. | 08-08-2013 |
| 20130207161 | SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME - A semiconductor device and a method for forming the same are provided. The semiconductor device comprises: a substrate ( | 08-15-2013 |
| 20130228825 | Method of Forming EPI Film in Substrate Trench - The present disclosure provides a method of fabricating a semiconductor device that includes providing a semiconductor substrate, forming a trench in the substrate, where a bottom surface of the trench has a first crystal plane orientation and a side surface of the trench has a second crystal plane orientation, and epitaxially (epi) growing a semiconductor material in the trench. The epi process utilizes an etch component. A first growth rate on the first crystal plane orientation is different from a second growth rate on the second crystal plane orientation. | 09-05-2013 |
| 20130234203 | Semiconductor Devices and Methods of Manufacture Thereof - Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes forming a channel region in a workpiece, and forming a source or drain region proximate the channel region. The source or drain region includes a contact resistance-lowering material layer comprising SiP, SiAs, or a silicide. The source or drain region also includes a channel-stressing material layer comprising SiCP or SiCAs. | 09-12-2013 |
| 20130234204 | FIN FIELD EFFECT TRANSISTORS INCLUDING MULTIPLE LATTICE CONSTANTS AND METHODS OF FABRICATING THE SAME - A Field Effect Transistor (FET) structure may include a fin on a substrate having a first lattice constant and at least two different lattice constant layers on respective different axially oriented surfaces of the fin, wherein the at least two different lattice constant layers each comprise lattice constants that are different than the first lattice constant and each other. | 09-12-2013 |
| 20130240949 | COMPOUND SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - An AlGaN/GaN HEMT includes a compound semiconductor laminated structure, a gate electrode formed above the compound semiconductor laminated structure, and a p-type semiconductor layer formed between the compound semiconductor laminated structure and the gate electrode, and the p-type semiconductor layer has tensile strain in a direction parallel to a surface of the compound semiconductor laminated structure. | 09-19-2013 |
| 20130240950 | SEMICONDUCTOR DEVICE HAVING TIPLESS EPITAXIAL SOURCE/DRAIN REGIONS - A semiconductor device having tipless epitaxial source/drain regions and a method for its formation are described. In an embodiment, the semiconductor device comprises a gate stack on a substrate. The gate stack is comprised of a gate electrode above a gate dielectric layer and is above a channel region in the substrate. The semiconductor device also comprises a pair of source/drain regions in the substrate on either side of the channel region. The pair of source/drain regions is in direct contact with the gate dielectric layer and the lattice constant of the pair of source/drain regions is different than the lattice constant of the channel region. In one embodiment, the semiconductor device is formed by using a dielectric gate stack placeholder. | 09-19-2013 |
| 20130248927 | CONTACT STRUCTURE OF SEMICONDUCTOR DEVICE - A contact structure for a semiconductor device includes a substrate comprising a major surface and a cavity. A bottom surface of the cavity is lower than the major surface. The contact structure also includes a strained material in the cavity, and a lattice constant of the strained material is different from lattice constant of the substrate. The contact structure also includes a first metal layer over the strained material, a dielectric layer over the first metal layer, and a second metal layer over the dielectric layer. The dielectric layer has a thickness ranging from 1 nm to 10 nm. | 09-26-2013 |
| 20130256751 | METHODS OF PRODUCING FREE-STANDING SEMICONDUCTORS USING SACRIFICIAL BUFFER LAYERS AND RECYCLABLE SUBSTRATES - A method of producing semiconductor materials and devices that incorporate the semiconductor materials are provided. In particular, a method is provided of producing a semiconductor material, such as a III-V semiconductor, on a spinel substrate using a sacrificial buffer layer, and devices such as photovoltaic cells that incorporate the semiconductor materials. The sacrificial buffer material and semiconductor materials may be deposited using lattice-matching epitaxy or coincident site lattice-matching epitaxy, resulting in a close degree of lattice matching between the substrate material and deposited material for a wide variety of material compositions. The sacrificial buffer layer may be dissolved using an epitaxial liftoff technique in order to separate the semiconductor device from the spinel substrate, and the spinel substrate may be reused in the subsequent fabrication of other semiconductor devices. The low-defect density semiconductor materials produced using this method result in the enhanced performance of the semiconductor devices that incorporate the semiconductor materials. | 10-03-2013 |
| 20130277713 | As/Sb Compound Semiconductors Grown on Si or Ge Substrate - An As(arsenic)/Sb(antimony) compound semiconductor is grown on a Si(silicon) or Ge (germanium) substrate. With the present invention, island-like growth on the Si or Ge substrate owing to lattice constant mismatch is prevented. Bad electrical isolation owing to diffusion of Ge is also prohibited. The present invention could obtain a high quality metamorphic buffer which is suitable for integrating a Si or Ge substrate with an electronic or optoelectronic device of a III/V group semiconductor. | 10-24-2013 |
| 20130277714 | STRAIN COMPENSATION IN TRANSISTORS - Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires. | 10-24-2013 |
| 20130285115 | EPTAXIAL STRUCTURE - An epitaxial structure includes a substrate having an epitaxial growth surface, a first epitaxial layer, a graphene layer and a second epitaxial layer. The first epitaxial layer is stacked on the epitaxial growth surface. The graphene layer is coated on the first epitaxial layer. The second epitaxial layer is located on the first epitaxial layer and covers the graphene layer. | 10-31-2013 |
| 20130285116 | Lattice-Mismatched Semiconductor Structures with Reduced Dislocation Defect Densities and Related Methods for Device Fabrication - Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures. | 10-31-2013 |
| 20130307021 | CMOS Device and Method of Forming the Same - A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a first region and a second region. The semiconductor device further includes a first buffer layer formed over the substrate and between first and second isolation regions in the first region and a second buffer layer formed over the substrate and between first and second isolation regions in the second region. The semiconductor device further includes a first fin structure formed over the first buffer layer and between the first and second isolation regions in the first region and a second fin structure formed over the second buffer layer and between the first and second isolation regions in the second region. The first buffer layer includes a top surface different from a top surface of the second buffer layer. | 11-21-2013 |
| 20130307022 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - A semiconductor device includes a buffer layer formed with a semiconductor adapted to produce piezoelectric polarization, and a channel layer stacked on the buffer layer, wherein a two-dimensional hole gas, generated in the channel layer by piezoelectric polarization of the buffer layer, is used as a carrier of the channel layer. On a complementary semiconductor device, the semiconductor device described above and an n-type field effect transistor are formed on the same compound semiconductor substrate. Also, a level shift circuit is manufactured by using the semiconductor device. Further, a semiconductor device manufacturing method includes forming a compound semiconductor base portion, forming a buffer layer on the base portion, forming a channel layer on the buffer layer, forming a gate on the channel layer, and forming a drain and source with the gate therebetween on the channel layer. | 11-21-2013 |
| 20130307023 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - Provided is a semiconductor device that has a buffer layer with which a dislocation density is decreased. The semiconductor device includes a substrate, a buffer region formed over the substrate, an active layer formed on the buffer region, and at least two electrodes formed on the active layer. The buffer region includes at least one composite layer in which a first semiconductor layer having a first lattice constant, a second semiconductor layer having a second lattice constant that is different from the first lattice constant and formed in contact with the first semiconductor layer, and a third semiconductor layer having a third lattice constant that is between the first lattice constant and the second lattice constant are sequentially laminated. | 11-21-2013 |
| 20130307024 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - Provided is a semiconductor device that includes a substrate, a first buffer region formed over the substrate, a second buffer region formed on the first buffer region, an active layer formed on the second buffer region, and at least two electrodes formed on the active layer. The first buffer region includes at least one composite layer in which a first semiconductor layer and a second semiconductor layer are sequentially stacked. The second buffer region in includes at least one composite layer in which a third semiconductor layer, a fourth semiconductor layer, and a fifth semiconductor layer are sequentially stacked. The fourth lattice constant has a value between the third lattice constant and the fifth lattice constant. | 11-21-2013 |
| 20130320399 | EMBEDDED PLANAR SOURCE/DRAIN STRESSORS FOR A FINFET INCLUDING A PLURALITY OF FINS - Fin-defining mask structures are formed over a semiconductor material layer having a first semiconductor material and a disposable gate structure is formed thereupon. A gate spacer is formed around the disposable gate structure and physically exposed portions of the fin-defining mask structures are subsequently removed. The semiconductor material layer is recessed employing the disposable gate structure and the gate spacer as an etch mask to form recessed semiconductor material portions. Embedded planar source/drain stressors are formed on the recessed semiconductor material portions by selective deposition of a second semiconductor material having a different lattice constant than the first semiconductor material. After formation of a planarization dielectric layer, the disposable gate structure is removed. A plurality of semiconductor fins are formed employing the fin-defining mask structures as an etch mask. A replacement gate structure is formed on the plurality of semiconductor fins. | 12-05-2013 |
| 20130328106 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - Provided are a nitride-based semiconductor element with reduced leak current, and a manufacturing method thereof. The semiconductor element comprises a substrate; a buffer region that is formed above the substrate; an active layer that is formed on the buffer region; and at least two electrodes that are formed on the active layer. The buffer region includes a plurality of semiconductor layers having different lattice constants, and there is a substantially constant electrostatic capacitance between a bottom surface of the substrate and a top surface of the buffer region when a potential that is less than a potential of the bottom surface of the substrate is applied to the top surface of the buffer region and a voltage between the bottom surface of the substrate and the top surface of the buffer region is changed within a range corresponding to thickness of the buffer region. | 12-12-2013 |
| 20130334568 | MULTILAYER SUBSTRATE STRUCTURE AND METHOD OF MANUFACTURING THE SAME - A multilayer substrate structure comprises a substrate, a thermal matching layer formed on the substrate and a lattice matching layer above the thermal matching layer. The thermal matching layer includes at least one of molybdenum, molybdenum-copper, mullite, sapphire, graphite, aluminum-oxynitrides, silicon, silicon carbide, zinc oxides, and rare earth oxides. The lattice matching layer includes a first chemical element and a second chemical element to form an alloy. The first and second chemical element has similar crystal structures and chemical properties. The coefficient of thermal expansion of the thermal matching layer and the lattice parameter of the lattice matching layer are both approximately equal to that of a member of group III-V compound semiconductors. The lattice constant of the lattice matching layer is approximately equal to that of a member of group III-V compound semiconductor. | 12-19-2013 |
| 20130334569 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACUTRING THE SAME - A semiconductor structure comprises a substrate, a gate stack, a base area, and a source/drain region, wherein the gate stack is located on the base area, the source/drain region is located in the base area, and the base area is located on the substrate. A supporting isolated structure is provided between the base area and the substrate, wherein part of the supporting structure is connected to the substrate; a cavity is provided between the base area and the substrate, wherein the cavity is composed of the base area, the substrate and the supporting isolated structure. A stressed material layer is provided on both sides of the gate stack, the base area and the supporting isolated structure. Correspondingly, a method is provided for manufacturing such a semiconductor structure, which inhibits the short channel effect, reduces the parasitic capacitance and leakage current, and enhances the steepness of the source/drain region. | 12-19-2013 |
| 20140001514 | Semiconductor Device and Method for Producing a Doped Semiconductor Layer | 01-02-2014 |
| 20140042491 | GATE ELECTRODE OF FIELD EFFECT TRANSISTOR - This description relates to a gate electrode of a field effect transistor. An exemplary structure for a field effect transistor includes a substrate; a gate electrode over the substrate including a first top surface and a sidewall; a source/drain (S/D) region at least partially disposed in the substrate on one side of the gate electrode; a spacer on the sidewall distributed between the gate electrode and the S/D region; and a contact etch stop layer (CESL) adjacent to the spacer and further comprising a portion extending over the S/D region, wherein the portion has a second top surface substantially coplanar with the first top surface. | 02-13-2014 |
| 20140042492 | SEMICONDUCTOR BUFFER STRUCTURE, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE USING THE SEMICONDUCTOR BUFFER STRUCTURE - A semiconductor buffer structure may include a silicon substrate and a buffer layer that is formed on the silicon substrate. The buffer layer may include a first layer, a second layer formed on the first layer, and a third layer formed on the second layer. The first layer may include Al | 02-13-2014 |
| 20140042493 | SEMICONDUCTOR SUBSTRATE AND METHOD OF FABRICATING THE SAME - Disclosed are a flat and thin semiconductor substrate, which is formed on a heterogeneous substrate to be easily lifted-off from the heterogeneous substrate, a semiconductor device including the same, and a method of fabricating the same. The semiconductor substrate includes a substrate having a plurality of semispherical protrusions arranged at a predetermined interval on a first plane, and a first semiconductor layer formed on the first plane of the substrate. | 02-13-2014 |
| 20140048848 | LAYERED SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING IT - A layered semiconductor substrate has a monocrystalline first layer based on silicon, having a first thickness and a first lattice constant a | 02-20-2014 |
| 20140054646 | Apparatus and Method for Multiple Gate Transistors - An apparatus comprises a substrate having a first crystal orientation and an active region, wherein an upper portion of the active region is of a second crystal orientation and the upper portion of the active region is wrapped by a gate structure around two sides. The apparatus further comprises a trench surrounded by isolation regions, wherein the upper portion of the active region is over top surfaces of the isolation regions. | 02-27-2014 |
| 20140054647 | HIGH ELECTRON MOBILITY BIPOLAR TRANSISTOR - A high electron mobility bipolar transistor including a substrate, a pseudomorphic high electron mobility transistor (pHEMT) sub structure, a sub collector/separating layer and a heterojunction bipolar transistor (HBT) sub structure sequentially stacked from bottom to top is disclosed. The sub collector/separating layer and the pHEMT sub structure are combined to form a pHEMT, and the sub collector/separating layer and the HBT sub structure are combined to form an HBT. The carbon concentration in the sub collector/separating layer is within 5×10 | 02-27-2014 |
| 20140070273 | Non-Planar Device Having Uniaxially Strained Semiconductor Body and Method of Making Same - A method and a device made according to the method. The method comprises providing a substrate including a first material, and providing a fin including a second material, the fin being disposed on the substrate and having a device active portion, the first material and the second material presenting a lattice mismatch between respective crystalline structures thereof. Providing the fin includes providing a biaxially strained film including the second material on the substrate; and removing parts of the biaxially strained film to form a substantially uniaxially strained fin therefrom. | 03-13-2014 |
| 20140070274 | POST-GATE SHALLOW TRENCH ISOLATION STRUCTURE FORMATION - Doped wells, gate stacks, and embedded source and drain regions are formed on, or in, a semiconductor substrate, followed by formation of shallow trenches in the semiconductor substrate. The shallow trenches can be formed by forming a planarized material layer over the doped wells, the gate stacks, and the embedded source and drain regions; patterning the planarized material layer; and transferring the pattern in the planarized material layer into the gate stacks, embedded source and drain regions, and the doped wells. The shallow trenches are filled with a dielectric material to form shallow trench isolation structures. Alternately, the shallow trenches can be formed by applying a photoresist over the doped wells, the gate stacks, and the embedded source and drain regions, and subsequently etching exposed portions of the underlying structures. After removal of the photoresist, shallow trench isolation structures can be formed by filling the shallow trenches. | 03-13-2014 |
| 20140084340 | Contact Structure Of Semiconductor Device - The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a dielectric layer coating the sidewalls and bottom of the opening, wherein the dielectric layer has a thickness ranging from 1 nm to 10 nm; and a metal layer filling a coated opening of the dielectric layer. | 03-27-2014 |
| 20140084341 | STRUCTURES AND DEVICES INCLUDING A TENSILE-STRESSED SILICON ARSENIC LAYER AND METHODS OF FORMING SAME - Structures including a tensile-stressed silicon arsenic layer, devices including the structures, and methods of forming the devices and structures are disclosed. Exemplary tensile-stressed silicon arsenic layer have an arsenic doping level of greater than 5 E+20 arsenic atoms per cubic centimeter. The structures can be used to form metal oxide semiconductor devices. | 03-27-2014 |
| 20140091360 | TRENCH CONFINED EPITAXIALLY GROWN DEVICE LAYER(S) - Trench-confined selective epitaxial growth process in which epitaxial growth of a semiconductor device layer proceeds within the confines of a trench. In embodiments, a trench is fabricated to include a pristine, planar semiconductor seeding surface disposed at the bottom of the trench. Semiconductor regions around the seeding surface may be recessed relative to the seeding surface with Isolation dielectric disposed there on to surround the semiconductor seeding layer and form the trench. In embodiments to form the trench, a sacrificial hardmask fin may be covered in dielectric which is then planarized to expose the hardmask fin, which is then removed to expose the seeding surface. A semiconductor device layer is formed from the seeding surface through selective heteroepitaxy. In embodiments, non-planar devices are formed from the semiconductor device layer by recessing a top surface of the isolation dielectric. In embodiments, non-planar devices CMOS devices having high carrier mobility may be made from the semiconductor device layer. | 04-03-2014 |
| 20140091361 | METHODS OF CONTAINING DEFECTS FOR NON-SILICON DEVICE ENGINEERING - An apparatus including a device including a channel material having a first lattice structure on a well of a well material having a matched lattice structure in a buffer material having a second lattice structure that is different than the first lattice structure. A method including forming a trench in a buffer material; forming an n-type well material in the trench, the n-type well material having a lattice structure that is different than a lattice structure of the buffer material; and forming an n-type transistor. A system including a computer including a processor including complimentary metal oxide semiconductor circuitry including an n-type transistor including a channel material, the channel material having a first lattice structure on a well disposed in a buffer material having a second lattice structure that is different than the first lattice structure, the n-type transistor coupled to a p-type transistor. | 04-03-2014 |
| 20140091362 | INTEGRATED CIRCUIT TRANSISTOR STRUCTURE WITH HIGH GERMANIUM CONCENTRATION SiGe STRESSOR - An integrated circuit transistor structure includes a semiconductor substrate, a first SiGe layer in at least one of a source area or a drain area on the semiconductor substrate, and a channel between the source area and the drain area. The first SiGe layer has a Ge concentration of 50 percent or more. | 04-03-2014 |
| 20140097467 | COMPRESSIVELY STRAINED SOI SUBSTRATE - A method of forming a strained silicon-on-insulator includes forming a first wafer having a compressively strained active semiconductor layer, forming a second wafer having an insulation layer formed above a bulk semiconductor layer, and bonding the compressively strained active semiconductor layer of the first wafer to the insulation layer of the second wafer. | 04-10-2014 |
| 20140103394 | Reduction of Edge Effects from Aspect Ratio Trapping - A device includes a crystalline material within an area confined by an insulator. In one embodiment, the area confined by the insulator is an opening in the insulator having an aspect ratio sufficient to trap defects using an ART technique. Method and apparatus embodiments of the invention can reduce edge effects in semiconductor devices. Embodiments of the invention can provide a planar surface over a buffer layer between a plurality of uncoalesced ART structures. | 04-17-2014 |
| 20140110754 | Epitaxy Technique for Growing Semiconductor Compounds - A solution for fabricating a semiconductor structure is provided. The semiconductor structure includes a plurality of semiconductor layers grown over a substrate using a set of epitaxial growth periods. During each epitaxial growth period, a first semiconductor layer having one of: a tensile stress or a compressive stress is grown followed by growth of a second semiconductor layer having the other of: the tensile stress or the compressive stress directly on the first semiconductor layer. | 04-24-2014 |
| 20140124833 | NITRIDE SEMICONDUCTOR STRUCTURE - A nitride semiconductor structure including a silicon substrate, a nucleation layer, a discontinuous defect blocking layer, a buffer layer and a nitride semiconductor layer is provided. The nucleation layer disposed on the silicon substrate, wherein the nucleation layer has a defect density d | 05-08-2014 |
| 20140124834 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE - A method of fabricating a semiconductor device is disclosed comprising the steps of: providing a substrate having a first region, a second region and a plurality of gate electrodes which are formed on the first and second regions of the substrate; forming a mask film to expose the first region of the substrate while covering the second region of the substrate, such that the mask film has a negative lateral profile at a boundary between the first and second regions of the substrate; forming sigma trenches in the first region of the substrate by etching the first region of the substrate using the mask film and the gate electrodes as a mask; and forming an epitaxial layer in each of the sigma trenches. | 05-08-2014 |
| 20140124835 | SEMICONDUCTOR STRUCTURE - A semiconductor structure includes agate structure, an epitaxial layer and a carbon-containing silicon germanium cap layer. The gate structure is located on a substrate. The epitaxial layer is located in the substrate beside the gate structure. The carbon-containing silicon germanium cap layer is located on the epitaxial layer. Otherwise, semiconductor processes for forming said semiconductor structure are also provided. | 05-08-2014 |
| 20140131769 | SILICON-COMPATIBLE COMPOUND JUNCTIONLESS FIELD EFFECT TRANSISTOR - The present invention provides a silicon-compatible compound junctionless field effect transistor enabled to be compatible to a bulk silicon substrate for substituting an expensive SOI substrate, to form a blocking semiconductor layer between a silicon substrate and an active layer by a semiconductor material having a specific difference of energy bandgap from that of the active layer to substitute a prior buried oxide for blocking a leakage current at an off-operation time and to form the active layer by a semiconductor layer having electron or hole mobility higher than that of silicon, and to operate perfectly as a junctionless device though the dopant concentration of the active layer is much lower than the prior junctionless device. | 05-15-2014 |
| 20140138741 | SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME - A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises: a Si substrate ( | 05-22-2014 |
| 20140138742 | Device Having Source/Drain Regions Regrown from Un-Relaxed Silicon Layer - A device including a silicon substrate, a silicon germanium layer, a silicon layer, a gate stack, and silicon-containing stressors is provided. In an embodiment, the silicon germanium layer is disposed over a silicon substrate and relaxed while the silicon layer is disposed over the silicon germanium layer and un-relaxed. The silicon layer may be free from germanium. The gate stack is of an n-type metal-oxide-semiconductor (NMOS) field-effect transistor (FET) and disposed over the silicon layer and the silicon germanium layer. A portion of the silicon layer forms a channel region of the NMOS FET. The silicon-containing stressors are formed in recesses in the silicon layer and have a lattice constant smaller than a lattice constant of the silicon germanium layer. | 05-22-2014 |
| 20140138743 | FIELD EFFECT TRANSISTOR - The following layers are deposited above the upper surface of a base substrate in this order with a lattice relaxation layer therebetween: a lower barrier layer made of Al | 05-22-2014 |
| 20140159112 | METHOD FOR FORMING GROUP III/V CONFORMAL LAYERS ON SILICON SUBSTRATES - A method for forming a conformal group III/V layer on a silicon substrate and the resulting substrate with the group III/V layers formed thereon. The method includes removing the native oxide from the substrate, positioning a substrate within a processing chamber, heating the substrate to a first temperature, cooling the substrate to a second temperature, flowing a group III precursor into the processing chamber, maintaining the second temperature while flowing a group III precursor and a group V precursor into the processing chamber until a conformal layer is formed, heating the processing chamber to an annealing temperature, while stopping the flow of the group III precursor, and cooling the processing chamber to the second temperature. Deposition of the III/V layer may be made selective through the use of halide gas etching which preferentially etches dielectric regions. | 06-12-2014 |
| 20140159113 | IMPLANT DAMAGE CONTROL BY IN-SITU C DOPING DURING SIGE EPITAXY FOR DEVICE APPLICATIONS - Some example embodiments of the invention comprise methods for and semiconductor structures comprised of: a MOS transistor comprised of source/drain regions, a gate dielectric, a gate electrode, channel region; a carbon doped SiGe region that applies a stress on the channel region whereby the carbon doped SiGe region retains stress/strain on the channel region after subsequent heat processing. | 06-12-2014 |
| 20140167108 | SEMICONDUCTOR DEVICES WITH GERMANIUM-RICH ACTIVE LAYERS & DOPED TRANSITION LAYERS - Semiconductor device stacks and devices made there from having Ge-rich device layers. A Ge-rich device layer is disposed above a substrate, with a p-type doped Ge etch suppression layer (e.g., p-type SiGe) disposed there between to suppress etch of the Ge-rich device layer during removal of a sacrificial semiconductor layer richer in Si than the device layer. Rates of dissolution of Ge in wet etchants, such as aqueous hydroxide chemistries, may be dramatically decreased with the introduction of a buried p-type doped semiconductor layer into a semiconductor film stack, improving selectivity of etchant to the Ge-rich device layers. | 06-19-2014 |
| 20140167109 | CONTINUOUS METAL SEMICONDUCTOR ALLOY VIA FOR INTERCONNECTS - A contact structure is disclosed in which a continuous metal semiconductor alloy is located within a via contained within a dielectric material. The continuous semiconductor metal alloy is in direct contact with an upper metal line of a first metal level located atop the continuous semiconductor metal alloy and at least a surface of each source and drain diffusion region located beneath the continuous metal semiconductor alloy. The continuous metal semiconductor alloy includes a lower portion that is contained within an upper surface of each source and drain region, and a vertical pillar portion extending upward from the lower portion. | 06-19-2014 |
| 20140175512 | Defect Transferred and Lattice Mismatched Epitaxial Film - An embodiment uses a very thin layer nanostructure (e.g., a Si or SiGe fin) as a template to grow a crystalline, non-lattice matched, epitaxial (EPI) layer. In one embodiment the volume ratio between the nanostructure and EPI layer is such that the EPI layer is thicker than the nanostructure. In some embodiments a very thin bridge layer is included between the nanostructure and EPI. An embodiment includes a CMOS device where EPI layers covering fins (or that once covered fins) are oppositely polarized from one another. An embodiment includes a CMOS device where an EPI layer covering a fin (or that once covered a fin) is oppositely polarized from a bridge layer covering a fin (or that once covered a fin). Thus, various embodiments are disclosed from transferring defects from an EPI layer to a nanostructure (that is left present or removed). Other embodiments are described herein. | 06-26-2014 |
| 20140183597 | METAL ALLOY WITH AN ABRUPT INTERFACE TO III-V SEMICONDUCTOR - Semiconductor structures having a first layer including an n-type III-V semiconductor material and a second layer including an M(InP)(InGaAs) alloy, wherein M is selected from Ni, Pt, Pd, Co, Ti, Zr, Y, Mo, Ru, Ir, Sb, In, Dy, Tb, Er, Yb, and Te, and combinations thereof, are disclosed. The semiconductor structures have a substantially planar interface between the first and second layers. Methods of fabricating semiconductor structures, and methods of reducing interface roughness and/or sheet resistance of a contact are also disclosed. | 07-03-2014 |
| 20140183598 | HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD OF FORMING THE SAME - A semiconductor structure includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A dielectric passivation layer is disposed on the second III-V compound layer. A source feature and a drain feature are disposed on the second III-V compound layer, and extend through the dielectric passivation layer. A gate electrode is disposed over the second III-V compound layer between the source feature and the drain feature. The gate electrode has an exterior surface. An oxygen containing region is embedded at least in the second III-V compound layer under the gate electrode. A gate dielectric layer has a first portion and a second portion. The first portion is under the gate electrode and on the oxygen containing region. The second portion is on a portion of the exterior surface of the gate electrode. | 07-03-2014 |
| 20140183599 | Field Effect Transistor - Field effect transistors are provided. An active region protrudes from a substrate and a gate electrode is provided on the active region. Source/drain regions are provided at both sides of the active region under the gate electrode, respectively. A width of a lower portion of the gate electrode is greater than a width of an upper portion of the gate electrode. | 07-03-2014 |
| 20140191283 | GROUP III NITRIDES ON NANOPATTERNED SUBSTRATES - A patterned substrate is provided having at least two mesa surface portions, and a recessed surface located beneath and positioned between the at least two mesa surface portions. A Group III nitride material is grown atop the mesa surface portions of the patterned substrate and atop the recessed surface. Growth of the Group III nitride material is continued merging the Group III nitride material that is grown atop the mesa surface portions. When the Group III nitride material located atop the mesa surface portions merge, the Group III nitride material growth on the recessed surface ceases. The merged Group III nitride material forms a first Group III nitride material structure, and the Group III nitride material formed in the recessed surface forms a second material structure. The first and second material structures are disjoined from each other and are separated by an air gap. | 07-10-2014 |
| 20140191284 | GROUP III NITRIDES ON NANOPATTERNED SUBSTRATES - A patterned substrate is provided having at least two mesa surface portions, and a recessed surface located beneath and positioned between the at least two mesa surface portions. A Group III nitride material is grown atop the mesa surface portions of the patterned substrate and atop the recessed surface. Growth of the Group III nitride material is continued merging the Group III nitride material that is grown atop the mesa surface portions. When the Group III nitride material located atop the mesa surface portions merge, the Group III nitride material growth on the recessed surface ceases. The merged Group III nitride material forms a first Group III nitride material structure, and the Group III nitride material formed in the recessed surface forms a second material structure. The first and second material structures are disjoined from each other and are separated by an air gap. | 07-10-2014 |
| 20140191285 | SEMICONDUCTOR DEVICE HAVING EPITAXIAL STRUCTURES - A semiconductor device having epitaxial structures includes a gate structure positioned on a substrate, epitaxial structures formed in the substrate at two sides of the gate structure, and an undoped cap layer formed on the epitaxial structures. The epitaxial structures include a dopant. The epitaxial structures and the undoped cap layer include a first semiconductor material having a first lattice constant and a second semiconductor material having a second lattice constant. The second lattice constant is larger than the first lattice constant. The second semiconductor material in the epitaxial structure includes a first concentration and the second semiconductor material in the undoped cap layer includes a second concentration. The second concentration is lower than the first concentration, and is upwardly decreased. | 07-10-2014 |
| 20140203326 | METHODS OF FORMING HETERO-LAYERS WITH REDUCED SURFACE ROUGHNESS AND BULK DEFECT DENSITY ON NON-NATIVE SURFACES AND THE STRUCTURES FORMED THEREBY - Methods of forming hetero-layers with reduced surface roughness and bulk defect density on non-native surfaces and the devices formed thereby are described. In one embodiment, the method includes providing a substrate having a top surface with a lattice constant and depositing a first layer on the top surface of the substrate. The first layer has a top surface with a lattice constant that is different from the first lattice constant of the top surface of the substrate. The first layer is annealed and polished to form a polished surface. A second layer is then deposited above the polished surface. | 07-24-2014 |
| 20140209975 | SEMICONDUCTOR DEVICE - A semiconductor device includes: a first buffer layer formed on a substrate; a second buffer layer formed on a portion of the first buffer layer; a third buffer layer formed on the first buffer layer and the second buffer layer; a first semiconductor layer formed on the third buffer layer; a second semiconductor layer formed on the first semiconductor layer; and a gate electrode, a source electrode, and a drain electrode that are formed on the second semiconductor layer, wherein the second buffer layer is composed of a material with higher resistivity than the first semiconductor layer; and the second buffer layer is formed in a region immediately below and between the gate electrode and the drain electrode. | 07-31-2014 |
| 20140209976 | TRANSISTORS AND METHODS OF MANUFACTURING THE SAME - A transistor and a method of manufacturing the same are disclosed. The transistor includes a first epitaxial layer, a channel layer, a gate structure and an impurity region. The first epitaxial layer on a substrate includes a silicon-germanium-tin (Si | 07-31-2014 |
| 20140231871 | METHODS OF CONTAINING DEFECTS FOR NON-SILICON DEVICE ENGINEERING - An apparatus including a device including a channel material having a first lattice structure on a well of a well material having a matched lattice structure in a buffer material having a second lattice structure that is different than the first lattice structure. A method including forming a trench in a buffer material; forming an n-type well material in the trench, the n-type well material having a lattice structure that is different than a lattice structure of the buffer material; and forming an n-type transistor. A system including a computer including a processor including complimentary metal oxide semiconductor circuitry including an n-type transistor including a channel material, the channel material having a first lattice structure on a well disposed in a buffer material having a second lattice structure that is different than the first lattice structure, the n-type transistor coupled to a p-type transistor. | 08-21-2014 |
| 20140239345 | STRAINED TRANSISTOR INTEGRATION FOR CMOS - Various embodiments of the invention relate to a CMOS device having (1) an NMOS channel of silicon material selectively deposited on a first area of a graded silicon germanium substrate such that the selectively deposited silicon material experiences a tensile strain caused by the lattice spacing of the silicon material being smaller than the lattice spacing of the graded silicon germanium substrate material at the first area, and (2) a PMOS channel of silicon germanium material selectively deposited on a second area of the substrate such that the selectively deposited silicon germanium material experiences a compressive strain caused by the lattice spacing of the selectively deposited silicon germanium material being larger than the lattice spacing of the graded silicon germanium substrate material at the second area. | 08-28-2014 |
| 20140246695 | ISOLATION STRUCTURE OF SEMICONDUCTOR DEVICE - The invention relates to an isolation structure of a semiconductor device. An exemplary isolation structure for a semiconductor device comprises a substrate comprising a trench; a strained material in the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; an oxide layer of the strained material over the strained material; a high-k dielectric layer over the oxide layer; and a dielectric layer over the high-k dielectric layer filling the trench. | 09-04-2014 |
| 20140246696 | TRANSISTOR WITH EMBEDDED STRAIN-INDUCING MATERIAL FORMED IN CAVITIES FORMED IN A SILICON/GERMANIUM SUBSTRATE - When forming sophisticated semiconductor devices including N-channel transistors with strain-inducing embedded source and drain semiconductor regions, N-channel transistor performance may be enhanced by selectively growing embedded pure silicon source and drain regions in cavities exposing the silicon/germanium layer of a Si/SiGe-substrate, wherein the silicon layer of the Si/SiGe-substrate may exhibit a strong bi-axial tensile strain. The bi-axial tensile strain may improve both electron and hole mobility. | 09-04-2014 |
| 20140264438 | Heterostructures for Semiconductor Devices and Methods of Forming the Same - Various heterostructures and methods of forming heterostructures are disclosed. A structure includes a substrate, a template layer, a barrier layer, and a device layer. The substrate comprises a first crystalline material. The template layer comprises a second crystalline material, and the second crystalline material is lattice mismatched to the first crystalline material. The template layer is over and adjoins the first crystalline material, and the template layer is at least partially disposed in an opening of a dielectric material. The barrier layer comprises a third crystalline material, and the third crystalline material is a binary III-V compound semiconductor. The barrier layer is over the template layer. The device layer comprises a fourth crystalline material, and the device layer is over the barrier layer. | 09-18-2014 |
| 20140264439 | SEMICONDUCTOR STRUCTURE - A semiconductor structure is provided. The semiconductor structure includes a substrate, at least a first N-type germanium (Ge) structure and at least a first P-type Ge structure. The first N-type Ge structure is formed on the substrate and has two end parts and at least a first central part bonded between the two end parts thereof. The first central part is floated over the substrate, and a side surface of the first central part is a {111} Ge crystallographic surface. The first P-type Ge structure is formed on the substrate and has two end parts and at least a second central part bonded between the two end parts thereof. The side surface of the second central part is a {110} Ge crystallographic surface. | 09-18-2014 |
| 20140264440 | V-SHAPED SIGE RECESS VOLUME TRIM FOR IMPROVED DEVICE PERFORMANCE AND LAYOUT DEPENDENCE - Some embodiments of the present disclosure relates to a method and a device to achieve a strained channel. A volume of a source or drain recess is controlled by a performing an etch of a substrate to produce a recess. An anisotropic etch stop layer is then formed by doping a bottom surface of the recess with a boron-containing dopant, which distorts the crystalline structure of the bottom surface. An anisotropic etch of the recess is then performed. The anisotropic etch stop layer resists anisotropic etching such that the recess comprises a substantially flat bottom surface after the anisotropic etch. The source or drain recess is then filled with a stress-inducing material to produce a strained channel. | 09-18-2014 |
| 20140264441 | SEMICONDUCTOR DEVICE - The semiconductor device has a barrier layer formed on a channel layer, an n type diffusion preventing layer formed on the barrier layer and containing aluminum, and a source electrode and a drain electrode formed on the diffusion preventing layer. The semiconductor device further has a p type cap layer formed on the diffusion preventing layer sandwiched between the source electrode and the drain electrode and a gate electrode formed on the cap layer. The diffusion preventing layer has an aluminum composition ratio greater than the aluminum composition ratio of the barrier layer. | 09-18-2014 |
| 20140264442 | Method for Fabricating a Semiconductor Device - A method for fabricating a semiconductor device is disclosed. The method includes forming a gate stack over a substrate, forming spacers adjoining opposite sidewalls of the gate stack, forming a sacrificial layer adjoining the spacers, removing a portion of the sacrificial layer, removing a portion of the spacers to form a recess cavity below the left spacers. Then, a strain feature is formed in the recess cavity. The disclosed method provides an improved method by providing a space between the spacer and the substrate for forming the strained feature, therefore, to enhance carrier mobility and upgrade the device performance. | 09-18-2014 |
| 20140284660 | METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER, AND SEMICONDUCTOR WAFER - A method for manufacturing a semiconductor wafer includes the steps of forming, on a first principal surface of a substrate, a compound semiconductor layer different in kind from the substrate, and removing, by etching, a part of the compound semiconductor layer. The part of the compound semiconductor layer is formed on an outer peripheral portion of the first principal surface of the substrate. | 09-25-2014 |
| 20140291725 | COMPOUND SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A compound semiconductor device includes: a substrate; and a compound semiconductor lamination structure formed over the substrate, the compound semiconductor lamination structure including a buffer layer containing an impurity, and an active layer formed over the buffer layer. | 10-02-2014 |
| 20140291726 | TRENCH CONFINED EPITAXIALLY GROWN DEVICE LAYER(S) - Trench-confined selective epitaxial growth process in which epitaxial growth of a semiconductor device layer proceeds within the confines of a trench. In embodiments, a trench is fabricated to include a pristine, planar semiconductor seeding surface disposed at the bottom of the trench. Semiconductor regions around the seeding surface may be recessed relative to the seeding surface with Isolation dielectric disposed there on to surround the semiconductor seeding layer and form the trench. In embodiments to form the trench, a sacrificial hardmask fin may be covered in dielectric which is then planarized to expose the hardmask fin, which is then removed to expose the seeding surface. A semiconductor device layer is formed from the seeding surface through selective heteroepitaxy. In embodiments, non-planar devices are formed from the semiconductor device layer by recessing a top surface of the isolation dielectric. In embodiments, non-planar devices CMOS devices having high carrier mobility may be made from the semiconductor device layer. | 10-02-2014 |
| 20140327043 | HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD OF MANUFACTURING THE SAME - Provided are a high electron mobility transistor (HEMT) and a method of manufacturing the HEMT. The HEMT includes: a channel layer comprising a first semiconductor material; a channel supply layer comprising a second semiconductor material and generating two-dimensional electron gas (2DEG) in the channel layer; a source electrode and a drain electrode separated from each other in the channel supply layer; at least one depletion forming unit that is formed on the channel supply layer and forms a depletion region in the 2DEG; at least one gate electrode that is formed on the at least one depletion forming unit; at least one bridge that connects the at least one depletion forming unit and the source electrode; and a contact portion that extends from the at least one bridge under the source electrode. | 11-06-2014 |
| 20140332849 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a silicon substrate, an initial buffer layer disposed on the silicon substrate and including aluminum nitride (AlN), and a semiconductor device layer disposed on the initial buffer layer and including a semiconductor compound. There is no SiN between the initial buffer layer and the silicon substrate, and a silicon lattice of the silicon substrate directly contacts a lattice of the initial buffer layer. | 11-13-2014 |
| 20140332850 | Epitaxial Growth of Crystalline Material - A device includes an epitaxially grown crystalline material within an area confined by an insulator. A surface of the crystalline material has a reduced roughness. One example includes obtaining a surface with reduced roughness by creating process parameters which result in the dominant growth component of the crystal to be supplied laterally from side walls of the insulator. In a preferred embodiment, the area confined by the insulator is an opening in the insulator having an aspect ratio sufficient to trap defects using an ART technique. | 11-13-2014 |
| 20140339604 | STRAIN ENHANCEMENT IN TRANSISTORS COMPRISING AN EMBEDDED STRAIN-INDUCING SEMICONDUCTOR ALLOY BY CREATING A PATTERNING NON-UNIFORMITY AT THE BOTTOM OF THE GATE ELECTRODE - A semiconductor device includes a gate electrode structure of a transistor, the gate electrode structure being positioned above a semiconductor region and having a gate insulation layer that includes a high-k dielectric material, a metal-containing cap material positioned above the gate insulation layer, and a gate electrode material positioned above the metal-containing cap material. A bottom portion of the gate electrode structure has a first length and an upper portion of the gate electrode structure has a second length that is different than the first length, wherein the first length is approximately 50 nm or less. A strain-inducing semiconductor alloy is embedded in the semiconductor region laterally adjacent to the bottom portion of the gate electrode structure, and drain and source regions are at least partially positioned in the strain-inducing semiconductor alloy. | 11-20-2014 |
| 20140346564 | Multi-Threshold Voltage FETs - A multi-threshold voltage (V | 11-27-2014 |
| 20140346565 | MOS TRANSISTORS AND FABRICATION METHODS THEREOF - A method is provided for fabricating MOS transistors. The method includes providing a semiconductor substrate having at least a first region and a second region; and forming first transistors on the semiconductor substrate. Wherein source/drain regions of the first transistors are configured as SiGe growth regions; and a first density of SiGe growth regions in the first region is smaller than a second density of SiGe growth regions in the second region. The method also includes forming dummy SiGe growth regions in the first region to increase the first density such that the total density of SiGe growth regions in the first region is in a range similar to the second density; and forming trenches in the first region and the second region and the dummy SiGe growth region. Further, the method includes forming embedded source/drain regions of the first transistors and dummy SiGe regions. | 11-27-2014 |
| 20140353714 | METHODS FOR MAKING A SEMICONDUCTOR DEVICE WITH SHAPED SOURCE AND DRAIN RECESSES AND RELATED DEVICES - A method for making a semiconductor device includes forming at least one gate stack on a layer comprising a first semiconductor material and etching source and drain recesses adjacent the at least one gate stack. The method further includes shaping the source and drain recesses to have a vertical side extending upwardly from a bottom to an inclined extension adjacent the at least one gate stack. | 12-04-2014 |
| 20140353715 | FINFET DEVICE AND FABRICATION METHOD THEREOF - A transistor device may include a substrate that has a well portion. The transistor device may further include a source member and a drain member. The transistor device may further include a fin bar. The fin bar may be formed of a first semiconductor material, may be disposed between the source member and the drain member, and may overlap the well portion. The transistor device may further include a fin layer. The fin layer may be formed of a second semiconductor material, may be disposed between the source member and the drain member, and may contact the fin bar. | 12-04-2014 |
| 20140361335 | DEVICE INCLUDING A TRANSISTOR HAVING A STRESSED CHANNEL REGION AND METHOD FOR THE FORMATION THEREOF - A device includes a substrate, a P-channel transistor and an N-channel transistor. The substrate includes a first layer of a first semiconductor material and a second layer of a second semiconductor material. The first and second semiconductor materials have different crystal lattice constants. The P-channel transistor includes a channel region having a compressive stress in a first portion of the substrate. The channel region of the P-channel transistor includes a portion of the first layer of the first semiconductor material and a portion of the second layer of the second semiconductor material. The N-channel transistor includes a channel region having a tensile stress formed in a second portion of the substrate. The channel region of the N-channel transistor includes a portion of the first layer of the first semiconductor material and a portion of the second layer of the second semiconductor material. Methods of forming the device are also disclosed. | 12-11-2014 |
| 20140361336 | Fin Structure of Semiconductor Device - The disclosure relates to a fin structure of a semiconductor device. An exemplary fin structure for a semiconductor device comprises a lower portion protruding from a major surface of a substrate, wherein the lower portion comprises a first semiconductor material having a first lattice constant; an upper portion having an interface with the lower portion, wherein the upper portion comprises a second semiconductor material having a second lattice constant different from the first lattice constant; a first pair of notches lower than the interface and extending into opposite sides of the lower portion, wherein each first notch have a first width; and a second pair of notches extending into opposite sides of the interface, wherein each second notch have a second width greater than the first width. | 12-11-2014 |
| 20140361337 | Semiconductor Device and Method for Manufacturing Semiconductor Device - Provided is a lattice-matched HEMT device, which is a HEMT device having high reverse breakdown voltage while securing two-dimensional electron gas concentration in a practical range. In producing a semiconductor device by forming a channel layer made of GaN on a base substrate such as an AlN template substrate or a substrate that includes a Si single crystal base material as a base, forming a barrier layer made of a group-III nitride having a composition of In | 12-11-2014 |
| 20140367741 | SEMICONDUCTOR DEVICE - Provided is a semiconductor device comprising a substrate including a first area and a second area, first through third crystalline layers sequentially stacked on the first area and having first through third lattice constants, respectively, a first gate electrode formed on the third crystalline layer, fourth and fifth crystalline layers sequentially stacked on the second area and having fourth and fifth lattice constants, respectively, and a second gate electrode formed on the fifth crystalline layer, wherein the third lattice constant is greater than the second lattice constant, the second lattice constant is greater than the first lattice constant, and the fifth lattice constant is smaller than the fourth lattice constant. | 12-18-2014 |
| 20140374796 | SEMICONDUCTOR STRUCTURE WITH ASPECT RATIO TRAPPING CAPABILITIES - A semiconductor structure includes a first semiconductor region. The first semiconductor region includes a first semiconductor layer composed of a group IV semiconductor material having a top surface and a back surface. The first semiconductor layer has an opening in the top surface to at least a depth greater than an aspect ratio trapping (ART) distance. The first semiconductor region also has a second semiconductor layer composed of a group III/V semiconductor compound deposited within the opening and on the top surface of the first semiconductor layer. The second semiconductor layer forms an ART region from the bottom of the opening to the ART distance. | 12-25-2014 |
| 20140374797 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a substrate, a compound semiconductor layer, and first and second semiconductor patterns. The substrate includes first and second regions. The first semiconductor pattern is on the compound semiconductor layer of the first region and includes an element semiconductor. The second semiconductor pattern is on the compound semiconductor layer of the second region and includes a Group III-V semiconductor material. | 12-25-2014 |
| 20140374798 | Lattice-Mismatched Semiconductor Structures with Reduced Dislocation Defect Densities and Related Methods for Device Fabrication - Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures. | 12-25-2014 |
| 20150008483 | Fin Structure of Semiconductor Device - The disclosure relates to a fin field effect transistor (FinFET). An exemplary FinFET comprises a substrate comprising a major surface; a fin structure protruding from the major surface comprising a lower portion comprising a first semiconductor material having a first lattice constant; an upper portion comprising the first semiconductor material having the first lattice constant; a middle portion between the lower portion and upper portion, wherein the middle portion comprises a second semiconductor material having a second lattice constant different from the first lattice constant; and a pair of notches extending into opposite sides of the middle portion; and an isolation structure surrounding the fin structure, wherein a top surface of the isolation structure is higher than a top surface of the pair of notches. | 01-08-2015 |
| 20150014745 | Strained InGaAs Quantum Wells for Complementary Transistors - An InGaAs n-channel quantum well heterostructure for use in a complementary transistor having a Sb-based p-channel. The heterostructure includes a buffer layer having a lattice constant intermediate that of the n- and p-channel materials and which is configured to accommodate the strain produced by a lattice-constant mismatch between the n-channel and p-channel materials. | 01-15-2015 |
| 20150021660 | TRANSISTOR HAVING A BACK-BARRIER LAYER AND METHOD OF MAKING THE SAME - A transistor includes a substrate and a buffer layer on the substrate, wherein the buffer layer comprises p-type dopants. The transistor further includes a channel layer on the buffer layer and a back-barrier layer between a first portion of the channel layer and a second portion of the channel layer. The back-barrier layer has a band gap discontinuity with the channel layer. The transistor further includes an active layer on the second portion of the channel layer, wherein the active layer has a band gap discontinuity with the second portion of the channel layer. The transistor further includes a two dimensional electron gas (2-DEG) in the channel layer adjacent an interface between the channel layer and the active layer. | 01-22-2015 |
| 20150021661 | TRANSISTOR HAVING HIGH BREAKDOWN VOLTAGE AND METHOD OF MAKING THE SAME - A transistor includes a substrate and a graded layer on the substrate, wherein the graded layer is doped with p-type dopants. The transistor further includes a superlattice layer (SLS) on the graded layer, wherein the SLS has a p-type dopant concentration equal to or greater than 1×10 | 01-22-2015 |
| 20150035008 | FINFET DEVICES INCLUDING HIGH MOBILITY CHANNEL MATERIALS WITH MATERIALS OF GRADED COMPOSITION IN RECESSED SOURCE/DRAIN REGIONS AND METHODS OF FORMING THE SAME - A finFET device can include a high mobility semiconductor material in a fin structure that can provide a channel region for the finFET device. A source/drain recess can be adjacent to the fin structure and a graded composition epi-grown semiconductor alloy material, that includes a component of the high mobility semiconductor material, can be located in the source/drain recess. | 02-05-2015 |
| 20150035009 | FIN FIELD EFFECT TRANSISTOR, SEMICONDUCTOR DEVICE INCLUDING THE SAME AND METHOD OF FORMING THE SEMICONDUCTOR DEVICE - A fin field effect transistor includes a first fin structure and a second fin structures both protruding from a substrate, first and second gate electrodes on the first and second fin structures, respectively, and a gate dielectric layer between each of the first and second fin structures and the first and second gate electrodes, respectively. Each of the first and second fin structures includes a buffer pattern on the substrate, a channel pattern on the buffer pattern, and an etch stop pattern provided between the channel pattern and the substrate. The etch stop pattern includes a material having an etch resistivity greater than that of the buffer pattern. | 02-05-2015 |
| 20150041852 | Modulating Germanium Percentage in MOS Devices - An integrated circuit structure includes a gate stack over a semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A first silicon germanium region is disposed in the opening, wherein the first silicon germanium region has a first germanium percentage. A second silicon germanium region is overlying the first silicon germanium region, wherein the second silicon germanium region has a second germanium percentage higher than the first germanium percentage. A metal silicide region is over and in contact with the second silicon germanium region. | 02-12-2015 |
| 20150041853 | BONDED EPITAXIAL OXIDE STRUCTURES FOR COMPOUND SEMICONDUCTOR ON SILICON SUBSTRATES - A structure including a compound semiconductor layer epitaxially grown on an epitaxial oxide layer is provided wherein the lattice constant of the epitaxial oxide layer may be different from the semiconductor substrate on which it is grown. Fabrication of one structure includes growing a graded semiconductor layer stack to engineer a desired lattice parameter on a semiconductor substrate or layer. The desired compound semiconductor layer is formed on the graded layer. The epitaxial oxide layer is grown on and lattice matched to the desired layer. Fabrication of an alternative structure includes growing a layer of desired compound semiconductor material directly on a germanium substrate or a germanium layer formed on a silicon substrate and growing an epitaxial oxide layer on the layer of the desired material. Following implantation of a cleavage layer and wafer bonding to a handle wafer, the layer of desired compound semiconductor material is fractured along the cleavage layer and the residual portion thereof removed. A layer of the desired compound semiconductor material is then regrown on the epitaxial oxide layer. | 02-12-2015 |
| 20150041854 | FinFET Low Resistivity Contact Formation Method - The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate, and wherein a surface of the strained material has received a passivation treatment; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a dielectric layer coating the sidewalls and bottom of the opening, wherein the dielectric layer has a thickness ranging from 1 nm to 10 nm; a metal barrier coating an opening of the dielectric layer; and a metal layer filling a coated opening of the dielectric layer. | 02-12-2015 |
| 20150048417 | Germanium Barrier Embedded in MOS Devices - An integrated circuit structure includes a gate stack over a semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A first silicon germanium region is in the opening, wherein the first silicon germanium region has a first germanium percentage. A second silicon germanium region is over the first silicon germanium region, wherein the second silicon germanium region has a second germanium percentage higher than the first germanium percentage. A third silicon germanium region is over the second silicon germanium region, wherein the third silicon germanium region has a third germanium percentage lower than the second germanium percentage. | 02-19-2015 |
| 20150048418 | SEMICONDUCTOR POWER DEVICE - A semiconductor power device, comprising: a substrate; a first semiconductor layer with a first lattice constant formed on the substrate, wherein the first semiconductor layer comprises a first group III element; a first grading layer formed on the first semiconductor layer and comprising a first portion; a second semiconductor layer with a second lattice constant formed on the first grading layer, wherein the second semiconductor layer comprises a second group III element; and a first interlayer formed in the first grading layer and adjacent to the first portion of the first grading layer, wherein a composition of the first interlayer is different from that of the first portion, and the first grading layer comprises the first group III element and the second group III element, and concentrations of both the first group III element and the second group III element in the first grading layer are gradually changed. | 02-19-2015 |
| 20150054028 | SEMICONDUCTOR DEVICES HAVING TENSILE AND/OR COMPRESSIVE STRESS AND METHODS OF MANUFACTURING - Semiconductor devices are provided which have a tensile and/or compressive strain applied thereto and methods of manufacturing. The structure includes a gate stack comprising an oxide layer, a polysilicon layer and sidewalls with adjacent spacers. The structure further includes an epitaxially grown straining material directly on the polysilicon layer and between portions of the sidewalls. The epitaxially grown straining material, in a relaxed state, strains the polysilicon layer. | 02-26-2015 |
| 20150054029 | Metal Gate Stack Having TaAlCN Layer - An integrated circuit device includes a semiconductor substrate; and a gate stack disposed over the semiconductor substrate. The gate stack further includes a gate dielectric layer disposed over the semiconductor substrate; a multi-function blocking/wetting layer disposed over the gate dielectric layer, wherein the multi-function blocking/wetting layer comprises tantalum aluminum carbon nitride (TaAlCN); a work function layer disposed over the multi-function blocking/wetting layer; and a conductive layer disposed over the work function layer. | 02-26-2015 |
| 20150054030 | Defect-Free SiGe Source/Drain Formation by Epitaxy-Free Process - MOSFET transistors having localized stressors for improving carrier mobility are provided. Embodiments of the invention comprise a gate electrode formed over a substrate, a carrier channel region in the substrate under the gate electrode, and source/drain regions on either side of the carrier channel region. The source/drain regions include an embedded stressor having a lattice constant different from the substrate. In a preferred embodiment, the substrate is silicon and the embedded stressor is SiGe. Implanting a portion of the source/drain regions with Ge forms the embedded stressor. Implanting carbon into the source/drain regions and annealing the substrate after implanting the carbon suppresses dislocation formation, thereby improving device performance. | 02-26-2015 |
| 20150060942 | SEMICONDUCTOR DEVICE - Sometimes to warp a group III nitride semiconductor and a silicon by the stress of the group III nitride semiconductor acting on the silicon. A semiconductor device includes a substrate, a buffer layer, and a semiconductor layer. A trench is formed on a sixth face of the semiconductor layer. The trench passes through the semiconductor layer and the buffer layer. The bottom of the trench reaches at least the inside of the substrate. | 03-05-2015 |
| 20150069465 | HIGH PERCENTAGE SILICON GERMANIUM ALLOY FIN FORMATION - A layer of a silicon germanium alloy containing 30 atomic percent or greater germanium and containing substitutional carbon is grown on a surface of a semiconductor layer. The presence of the substitutional carbon in the layer of silicon germanium alloy compensates the strain of the silicon germanium alloy, and suppresses defect formation. Placeholder semiconductor fins are then formed to a desired dimension within the layer of silicon germanium alloy and the semiconductor layer. The placeholder semiconductor fins will relax for the most part, while maintaining strain in a lengthwise direction. An anneal is then performed which may either remove the substitutional carbon from each placeholder semiconductor fin or move the substitutional carbon into interstitial sites within the lattice of the silicon germanium alloy. Free-standing permanent semiconductor fins containing 30 atomic percent or greater germanium, and strain in the lengthwise direction are provided. | 03-12-2015 |
| 20150076558 | SEMICONDUCTOR STRUCTURE AND THE MANUFACTURING METHOD THEREOF - The present disclosure provides a FinFET. The FinFET includes a silicon-on-insulator (SOI) with an insulator; a plurality of fin structures on the insulator; an isolation on the insulator, and between two adjacent fin structures in the plurality of fin structures; and an oxide layer between each of the plurality of fin structures and the insulator, wherein the insulator comprises silicon germanium oxide. A method for manufacturing the FinFET includes forming a plurality of fin structures on a layer having a larger lattice constant than that of the fin structure by a patterning operation; oxidizing the fin structure and the layer to transform the layer into a first oxide layer; filling insulating material between adjacent fin structures; and etching the insulating material to expose a top surface and at least a portion of a sidewall of the fin structure. | 03-19-2015 |
| 20150076559 | INTEGRATED CIRCUITS WITH STRAINED SILICON AND METHODS FOR FABRICATING SUCH CIRCUITS - Integrated circuits with strained silicon and methods for fabricating such integrated circuits are provided. An integrated circuit includes a stack with a surface layer, an intermediate layer, and a base layer, where the surface layer overlies the intermediate layer, and the intermediate layer overlies the base layer. The surface layer and the base layer include strained silicon, where the silicon atoms are stretched beyond a normal crystalline silicon interatomic distance. The intermediate layer includes crystalline silicon germanium. | 03-19-2015 |
| 20150076560 | INTEGRATED CIRCUITS INCLUDING EPITAXIALLY GROWN STRAIN-INDUCING FILLS DOPED WITH BORON FOR IMPROVED ROBUSTNESS FROM DELIMINATION AND METHODS FOR FABRICATING THE SAME - Integrated circuits and methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a cavity in a semiconductor region laterally adjacent to a gate electrode structure. An EPI strain-inducing fill is deposited into the cavity. The EPI strain-inducing fill includes a main SiGe layer and a Si cap that overlies the main SiGe layer. The EPI strain-inducing fill is doped with boron and has a first peak boron content in an upper portion of the EPI strain-inducing fill of about 2.5 times or greater than an average boron content in an intermediate portion of the main SiGe layer. | 03-19-2015 |
| 20150091057 | SEMICONDUCTOR STRUCTURE AND DEVICE AND METHODS OF FORMING SAME USING SELECTIVE EPITAXIAL PROCESS - Semiconductor structures, devices, and methods of forming the structures and device are disclosed. Exemplary structures include multi-gate or FinFET structures that can include both re-channel MOS (NMOS) and p-channel MOS (PMOS) devices to form CMOS structures and devices on a substrate. The devices can be formed using selective epitaxy and shallow trench isolation techniques. | 04-02-2015 |
| 20150102385 | HYBRID SILICON GERMANIUM SUBSTRATE FOR DEVICE FABRICATION - Systems and methods are provided for fabricating a semiconductor device structure. An example semiconductor device structure includes a first buffer layer, a second buffer layer, a n-type transistor structure, and a p-type transistor structure. The first buffer layer having a first germanium concentration is formed on a substrate. The second buffer layer having a second germanium concentration is formed on the substrate, the second germanium concentration being larger than the first germanium concentration. The n-type transistor structure is formed on the first buffer layer, and the p-type transistor structure is formed on the second buffer layer. | 04-16-2015 |
| 20150108543 | Source/Drain Structure of Semiconductor Device - The disclosure relates to a semiconductor device. An exemplary structure for a field effect transistor comprises a substrate comprising a major surface and a cavity below the major surface; a gate stack on the major surface of the substrate; a spacer adjoining one side of the gate stack; a shallow trench isolations (STI) region disposed on the side of the gate stack, wherein the STI region is within the substrate; and a source/drain (S/D) structure distributed between the gate stack and STI region, wherein the S/D structure comprises a strained material in the cavity, wherein a lattice constant of the strained material is different from a lattice constant of the substrate; and a S/D extension disposed between the substrate and strained material, wherein the S/D extension comprises a portion extending below the spacer and substantially vertical to the major surface. | 04-23-2015 |
| 20150115320 | Lattice-Mismatched Semiconductor Structures and Related Methods for Device Fabrication - Lattice-mismatched materials having configurations that trap defects within sidewall-containing structures. | 04-30-2015 |
| 20150115321 | SUBSTRATE STRUCTURE, COMPLEMENTARY METAL OXIDE SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING COMPLEMENTARY METAL OXIDE SEMICONDUCTOR DEVICE - A substrate structure, a complementary metal oxide semiconductor (CMOS) device including the substrate structure, and a method of manufacturing the CMOS device are disclosed, where the substrate structure includes: a substrate, at least one seed layer on the substrate formed of a material including boron (B) and/or phosphorus (P), and a buffer layer on the seed layer. This substrate structure makes it possible to reduce the thickness of the buffer layer and also improve the performance characteristics of a semiconductor device formed with the substrate structure. | 04-30-2015 |
| 20150129931 | TRANSISTOR, METHOD FOR FABRICATING THE SAME, AND ELECTRONIC DEVICE INCLUDING THE SAME - A semiconductor device includes a stressed substrate stressed by a first stress, a first stressed channel formed in the substrate and having the first stress, and a first strained gate electrode strained by a first strain generating element. A first strained gate electrode is formed over the first stressed channel, the first strained gate electrode including a first lattice-mismatched layer to induce a second stress to the first stressed channel. | 05-14-2015 |
| 20150137179 | POWER DEVICE - A power device disclosed herein comprises a substrate, a first semiconductor layer formed on the substrate, a second semiconductor layer formed on the first semiconductor layer and comprising a first element of group III, a third semiconductor layer formed on the second semiconductor layer and a plurality of first interlayers formed in the third semiconductor layer and comprising a second element of III group. The first element of III group and the second element of III group are the same. The second semiconductor layer and the plurality of first interlayers are doped with carbon. | 05-21-2015 |
| 20150137180 | FinFET with Bottom SiGe Layer in Source/Drain - A FinFET includes a substrate, a fin structure on the substrate, a source in the fin structure, a drain in the fin structure, a channel in the fin structure between the source and the drain, a gate dielectric layer over the channel, and a gate over the gate dielectric layer. At least one of the source and the drain includes a bottom SiGe layer. | 05-21-2015 |
| 20150144998 | Fin Structure of Semiconductor Device - A fin structure of a semiconductor device, such as a fin field effect transistor (FinFET), and a method of manufacture, is provided. In an embodiment, trenches are formed in a substrate, and a liner is formed along sidewalls of the trenches, wherein a region between adjacent trenches define a fin. A dielectric material is formed in the trenches. Portions of the semiconductor material of the fin are replaced with a second semiconductor material and a third semiconductor material, the second semiconductor material having a different lattice constant than the substrate and the third semiconductor material having a different lattice constant than the second semiconductor material. Portions of the second semiconductor material are oxidized. | 05-28-2015 |
| 20150144999 | Structure and Method For FinFET Device With Buried Sige Oxide - The present disclosure provides a semiconductor device that includes a substrate of a first semiconductor material; a fin feature having a first portion, a second portion and a third portion stacked on the substrate; an isolation feature formed on the substrate and disposed on sides of the fin feature; semiconductor oxide features including a second semiconductor material, disposed on recessed sidewalls of the second portion, defining dented voids overlying the semiconductor oxide features and underlying the third portion; and a gate stack disposed on the fin feature and the isolation feature. The gate stack includes a gate dielectric layer extended into and filling in the dented voids. The first and third portions include the first semiconductor material having a first lattice constant. The second portion includes the second semiconductor material having a second lattice constant different from the first lattice constant. | 05-28-2015 |
| 20150145000 | INTEGRATED CIRCUITS WITH SHALLOW TRENCH ISOLATIONS, AND METHODS FOR PRODUCING THE SAME - Integrated circuits with electrical components near shallow trench isolations and methods for producing such integrated circuits are provided. The method includes forming a trench is a substrate, where the trench has a trench surface. A barrier layer including silicon and germanium is formed overlying the trench surface. A shallow trench isolation is then formed with a core overlying the barrier layer, where the core includes a shallow trench isolation insulator. | 05-28-2015 |
| 20150145001 | SELECTIVE NANOSCALE GROWTH OF LATTICE MISMATCHED MATERIALS - Exemplary embodiments provide materials and methods of forming high-quality semiconductor devices using lattice-mismatched materials. In one embodiment, a composite film including one or more substantially-single-particle-thick nanoparticle layers can be deposited over a substrate as a nanoscale selective growth mask for epitaxially growing lattice-mismatched materials over the substrate. | 05-28-2015 |
| 20150295047 | DEFECT-FREE RELAXED COVERING LAYER ON SEMICONDUCTOR SUBSTRATE WITH LATTICE MISMATCH - A defect-free, relaxed semiconductor covering layer (e.g., epitaxial SiGe) over a semiconductor substrate (e.g., Si) is provided having a strain relaxation degree above about 80% and a non-zero threading dislocation density of less than about 100/cm | 10-15-2015 |
| 20150311292 | UTILIZATION OF ANGLED TRENCH FOR EFFECTIVE ASPECT RATIO TRAPPING OF DEFECTS IN STRAIN-RELAXED HETEROEPITAXY OF SEMICONDUCTOR FILMS - Embodiments of the present disclosure relate to reducing dislocation density in a heteroepitaxial growth film and devices including heteroepitaxial films with reduced dislocation density. According to embodiments of the present disclosure, sidewalls of high aspect ratio trenches may be tilted or angled to allow defects in crystalline material formed in the high aspect ratio trenches to be terminated in the tilted sidewalls, including defects propagating along the length of the high aspect ratio trenches. Embodiments of the present disclosure may be used to reduce defects in heteroepitaxial growth on silicon (Si) for microelectronic applications, such as high mobility channels using Group III-V elements in field effect transistors. | 10-29-2015 |
| 20150311341 | SEMICONDUCTOR DEVICE HAVING FIN-TYPE FIELD EFFECT TRANSISTOR AND METHOD OF MANUFACTURING THE SAME - A semiconductor device includes a substrate having a first region and a second region, a first MOS transistor including a first fin structure and a first gate electrode in the first region, the first fin structure having a first buffer pattern, a second buffer pattern, and a first channel pattern which are sequentially stacked on the substrate, and a second MOS transistor including a second fin structure and a second gate electrode in the second region, the second fin structure having a third buffer pattern and a second channel pattern which are sequentially stacked on the substrate. Related fabrication methods are also discussed. | 10-29-2015 |
| 20150311342 | FINFET WITH ESD PROTECTION - In some embodiments, a field effect transistor structure includes a substrate, a fin structure and a gate structure. The fin structure is formed over the substrate. The fin structure includes a first channel region, a first source or drain region and a second source or drain region. The first source or drain region and the second source or drain region are formed on opposite ends of the first channel region, respectively. The well region is formed of the same conductivity type as the second source or drain region, connected to the second source or drain region, and extended to the substrate. The first gate structure wraps around the first channel region in the fin structure. | 10-29-2015 |
| 20150340302 | Passivation Structure of Fin Field Effect Transistor - A FinFET comprises a substrate comprising a major surface; a fin structure protruding from the major surface comprising a lower fin portion comprising a first semiconductor material having a first lattice constant; an upper fin portion comprising a second semiconductor material having a second lattice constant greater than the first lattice constant; a middle fin portion comprising a third semiconductor material having a third lattice constant between the first lattice constant and the second lattice constant; and a passivation structure surrounding the fin structure comprising a lower passivation portion surrounding the lower fin portion comprising a first oxynitride of the first semiconductor material; an upper passivation portion surrounding the upper fin portion comprising a second oxynitride of the second semiconductor material; and a middle passivation portion surrounding the middle fin portion comprising a third oxynitride of the third semiconductor material. | 11-26-2015 |
| 20150340429 | INTEGRATED RF FRONT END SYSTEM - Systems and methods are disclosed for integrating functional components of front-end modules for wireless radios. Front-end modules disclosed may be dual-band front-end modules for use in 802.11ac-compliant devices. In certain embodiments, integration of front-end module components on a single die is achieved by implementing a high-resistivity layer or substrate directly underneath, adjacent to, and/or supporting SiGe BiCMOS technology elements. | 11-26-2015 |
| 20150340466 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND DEVICE - A method for manufacturing a semiconductor device includes: forming a temporary gate electrode and a first dummy gate electrode located on a first side of the temporary gate electrode, on a semiconductor region with a first lattice constant; forming a first semiconductor layer with a second lattice constant different from the first lattice constant, between the temporary gate electrode and the first dummy gate electrode; removing the temporary gate electrode while leaving the first dummy gate electrode intact; and forming a gate electrode in a region from which the temporary gate electrode is removed. | 11-26-2015 |
| 20150340498 | METAL OXIDE SEMICONDUCTOR HAVING EPITAXIAL SOURCE DRAIN REGIONS AND A METHOD OF MANUFACTURING SAME USING DUMMY GATE PROCESS - A semiconductor device in which sufficient stress can be applied to a channel region due to lattice constant differences. | 11-26-2015 |
| 20150340500 | SEMICONDUCTOR STRUCTURE WITH SELF-ALIGNED WELLS AND MULTIPLE CHANNEL MATERIALS - Embodiments of the present invention provide a semiconductor structure having a strain relaxed buffer, and method of fabrication. A strain relaxed buffer is disposed on a semiconductor substrate. A silicon region and silicon germanium region are disposed adjacent to each other on the strain relaxed buffer. An additional region of silicon or silicon germanium provides quantum well isolation. | 11-26-2015 |
| 20150349077 | DEEP GATE-ALL-AROUND SEMICONDUCTOR DEVICE HAVING GERMANIUM OR GROUP III-V ACTIVE LAYER - Deep gate-all-around semiconductor devices having germanium or group III-V active layers are described. For example, a non-planar semiconductor device includes a hetero-structure disposed above a substrate. The hetero-structure includes a hetero-junction between an upper layer and a lower layer of differing composition. An active layer is disposed above the hetero-structure and has a composition different from the upper and lower layers of the hetero-structure. A gate electrode stack is disposed on and completely surrounds a channel region of the active layer, and is disposed in a trench in the upper layer and at least partially in the lower layer of the hetero-structure. Source and drain regions are disposed in the active layer and in the upper layer, but not in the lower layer, on either side of the gate electrode stack. | 12-03-2015 |
| 20150357436 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a gate structure on the substrate; performing a first dry etching process to form a recess in the substrate adjacent to the gate structure; and performing a second dry etching process to expand the recess. | 12-10-2015 |
| 20150357443 | Semiconductor Liner of Semiconductor Device - The disclosure relates to a fin field effect transistor (FinFET) formed in and on a substrate having a major surface. The FinFET includes a fin structure protruding from the major surface, which fin includes a lower portion, an upper portion, and a middle portion between the lower portion and upper portion, wherein the fin structure includes a first semiconductor material having a first lattice constant; a pair of notches extending into opposite sides of the middle portion; and a semiconductor liner adjoining the lower portion. The semiconductor liner is a second semiconductor material having a second lattice constant greater than the first lattice constant. | 12-10-2015 |
| 20150364602 | Device with Engineered Epitaxial Region and Methods of Making Same - A device includes a substrate and a recess in the substrate. The recess has a bottom and sidewalls. The device also includes a first epitaxial layer over the bottom of the recess, and a second epitaxial layer over the first epitaxial layer and over the sidewalls of the recess, the second epitaxial layer having a different lattice constant than the substrate. The device further includes a third epitaxial layer over the second epitaxial layer and filling the recess. | 12-17-2015 |
| 20150371928 | Connecting Through Vias to Devices - Methods and devices for connecting a through via and a terminal of a transistor formed of a strained silicon material are provided. The terminal, which can be a source or a drain of a NMOS or a PMOS transistor, is formed within a substrate. A first contact within a first inter-layer dielectric (ILD) layer over the substrate is formed over and connected to the terminal. A through via extends through the first ILD layer into the substrate. A second contact is formed over and connected to the first contact and the through via within a second ILD layer and a contact etch stop layer (CESL). The second ILD layer is over the CESL, and the CESL is over the first ILD layer, which are all below a first inter-metal dielectric (IMD) layer and the first metal layer of the transistor. | 12-24-2015 |
| 20150372140 | FINFETS HAVING STRAINED CHANNELS, AND METHODS OF FABRICATING FINFETS HAVING STRAINED CHANNELS - Techniques and structures for controlling etch-back of a finFET fin are described. One or more layers may be deposited over the fin and etched. Etch-back of a planarization layer may be used to determine a self-limited etch height of one or more layers adjacent the fin and a self-limited etch height of the fin. Strain-inducing material may be formed at regions of the etched fin to induce strain in the channel of a finFET. | 12-24-2015 |
| 20150380414 | Strained Channel Dynamic Random Access Memory Devices - DRAM trench capacitors formed by, inter alia, deposition of conductive material into a trench or doping the semiconductor region in which the trench is defined. | 12-31-2015 |
| 20150380495 | NITRIDE SEMICONDUCTOR LAYER, NITRIDE SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR LAYER - According to one embodiment, a nitride semiconductor layer spreading along a first surface is provided. The nitride semiconductor layer includes a first region and a second region. A length of the first region in a first direction parallel to the first surface is longer than a length of the first region in a second direction parallel to the first surface and perpendicular to the first direction. The second region is arranged with the first region in the second direction. A length of the second region in the first direction is longer than a length of the second region in the second direction. A c-axis being is tilted with respect to the second direction for the first region and the second region. The c-axis intersects a third direction perpendicular to the first surface. | 12-31-2015 |
| 20150380553 | SEMICONDUCTOR DEVICES INCLUDING SOURCE/DRAIN REGIONS HAVING MULTIPLE EPITAXIAL PATTERNS - A semiconductor device includes an active pattern protruding from a substrate, a gate structure crossing over the active pattern, and source/drain regions disposed on the active pattern at opposite sides of the gate structure. Each of the source/drain regions includes a first epitaxial pattern contacting the active pattern and a second epitaxial pattern on the, first epitaxial pattern. The first epitaxial pattern comprises a material having a lattice constant which is the same as that of the substrate, and the second epitaxial pattern comprises a material having a lattice constant greater than that of the first epitaxial pattern. | 12-31-2015 |
| 20150380557 | STAIN COMPENSATION IN TRANSISTORS - Transistor structures having channel regions comprising alternating layers of compressively and tensilely strained epitaxial materials are provided. The alternating epitaxial layers can form channel regions in single and multigate transistor structures. In alternate embodiments, one of the two alternating layers is selectively etched away to form nanoribbons or nanowires of the remaining material. The resulting strained nanoribbons or nanowires form the channel regions of transistor structures. Also provided are computing devices comprising transistors comprising channel regions comprised of alternating compressively and tensilely strained epitaxial layers and computing devices comprising transistors comprising channel regions comprised of strained nanoribbons or nanowires. | 12-31-2015 |
| 20160005841 | HETEROJUNCTION BIPOLAR TRANSISTOR - A heterojunction bipolar transistor includes a collector layer composed of a semiconductor containing GaAs as a main component; a base layer including a first base layer and a second base layer the first base layer forming a heterojunction with the collector layer and being composed of a semiconductor containing a material as a main component, the material being lattice-mismatched to the main component of the collector layer, the first base layer having a film thickness less than a critical thickness at which a misfit dislocation is introduced, the second base layer being joined to the first base layer and composed of a semiconductor containing a material as a main component, and the material being lattice-matched to the main component of the collector layer; and an emitter layer that forms a heterojunction with the second base layer. | 01-07-2016 |
| 20160005863 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF - Some embodiments of the present disclosure provide a semiconductor structure, including a substrate and a regrowth region. The substrate is made of a first material with a first lattice constant, and the regrowth region is made of the first material and a second material, having a lattice constant different from the first lattice constant. The regrowth region is partially positioned in the substrate. The regrowth region has a “tip depth” measured vertically from a surface of the substrate to a widest vertex of the regrowth region, and the tip depth being less than 10 nm. The regrowth region further includes a top layer substantially made of the first material, and the top layer has substantially the first lattice constant. | 01-07-2016 |
| 20160005864 | FIELD EFFECT TRANSISTOR AND METHOD OF FABRICATING THE SAME - A MOSFET may be formed with a strain-inducing mismatch of lattice constants that improves carrier mobility. In exemplary embodiments a MOSFET includes a strain-inducing lattice constant mismatch that is not undermined by a recessing step. In some embodiments a source/drain pattern is grown without a recessing step, thereby avoiding problems associated with a recessing step. Alternatively, a recessing process may be performed in a way that does not expose top surfaces of a strain-relaxed buffer layer. A MOSFET device layer, such as a strain-relaxed buffer layer or a device isolation layer, is unaffected by a recessing step and, as a result, strain may be applied to a channel region without jeopardizing subsequent formation steps. | 01-07-2016 |
| 20160013316 | SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF | 01-14-2016 |
| 20160027779 | METHOD FOR PROVIDING AN NMOS DEVICE AND A PMOS DEVICE ON A SILICON SUBSTRATE AND SILICON SUBSTRATE COMPRISING AN NMOS DEVICE AND A PMOS DEVICE - The disclosed technology generally relates to complementary metal-oxide-silicon (CMOS) devices, and more particularly to an n-channel metal-oxide-silicon (nMOS) device and a p-channel metal-oxide-silicon (pMOS) device that are under different types of strains. In one aspect, a method comprises providing trenches in a dielectric layer on a semiconductor substrate, where at least a first trench defines an nMOS region and a second trench defines a pMOS region, and where the trenches extend through the dielectric layer and abut a surface of the substrate. The method additionally includes growing a first seed layer in the first trench on the surface and growing a common strain-relaxed buffer layer in the first trench and the second trench, where the common strain-relaxed buffer layer comprises silicon germanium (SiGe). The method further includes growing a common channel layer comprising germanium (Ge) in the first and second trenches and on the common strain-relaxed buffer layer. The properties of the first seed layer and the common strained relaxed buffer layer are predetermined such that the common channel layer is under a tensile strain or is unstrained in the nMOS region and is under a compressive strain in the pMOS region. Aspects also include devices formed using the method. | 01-28-2016 |
| 20160027780 | METHOD FOR FORMING A GERMANIUM CHANNEL LAYER FOR AN NMOS TRANSISTOR DEVICE, NMOS TRANSISTOR DEVICE AND CMOS DEVICE - The disclosed technology generally relates to complementary metal-oxide-silicon (CMOS) devices, and more particularly to a transistor device comprising a germanium channel layer, such as an n-channel metal-oxide-silicon (NMOS) transistor device. In one aspect, a method of forming a germanium channel layer for an NMOS transistor device comprises providing a trench having sidewalls defined by a dielectric material structure and abutting on a silicon substrate's surface, and growing a seed layer in the trench on the surface, where the seed layer has a front surface comprising facets having a (111) orientation. The method additionally includes growing a strain-relaxed buffer layer in the trench on the seed layer, where the strain-relaxed buffer layer comprises silicon germanium. The method further includes growing a channel layer comprising germanium (Ge) on the strain-relaxed buffer layer. In other aspects, devices, e.g., an NMOS transistor device and a CMOS device, includes features fabricated using the method. | 01-28-2016 |
| 20160027938 | Tetradymite Layer Assisted Heteroepitaxial Growth And Applications - A multilayer stack including a substrate, an active layer, and a tetradymite buffer layer positioned between the substrate and the active layer is disclosed. A method for fabricating a multilayer stack including a substrate, a tetradymite buffer layer and an active layer is also disclosed. Use of such stacks may be in photovoltaics, solar cells, light emitting diodes, and night vision arrays, among other applications. | 01-28-2016 |
| 20160035726 | FIN SIDEWALL REMOVAL TO ENLARGE EPITAXIAL SOURCE/DRAIN VOLUME - A FinFET device includes a dielectric layer formed over a semiconductor substrate and having an upper dielectric layer surface. A fin of semiconductor material extends upwards from the substrate through an opening in the dielectric layer. A base portion of the fin, which is recessed below the upper dielectric layer surface, includes a base channel region that separates first and second base source/drain regions. An upper channel region extends upwards from the base channel region and terminates in an upper fin surface disposed above the upper dielectric layer surface. A gate electrode straddles the upper channel region and is separated from the upper channel region by a gate dielectric. First and second epitaxial source/drain regions meet the first and second base source/drain regions, respectively, at first and second interfaces, respectively. The first and second interfaces are recessed in the opening and arranged below the upper dielectric layer surface. | 02-04-2016 |
| 20160035839 | COMPOUND SEMICONDUCTOR STACK AND SEMICONDUCTOR DEVICE - There is provided a compound semiconductor stack including a substrate ( | 02-04-2016 |
| 20160049512 | SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME - A method of fabricating one or more semiconductor devices includes forming a trench in a semiconductor substrate, performing a cycling process to remove contaminants from the trench, and forming an epitaxial layer on the trench. The cycling process includes sequentially supplying a first reaction gas containing germane, hydrogen chloride and hydrogen and a second reaction gas containing hydrogen chloride and hydrogen onto the semiconductor substrate. | 02-18-2016 |
| 20160064492 | Lattice-Mismatched Semiconductor Structures with Reduced Dislocation Defect Densities and Related Methods for Device Fabrication - A method of forming a semiconductor structure includes forming an opening in a dielectric layer, forming a recess in an exposed part of a substrate, and forming a lattice-mismatched crystalline semiconductor material in the recess and opening. | 03-03-2016 |
| 20160064564 | Semiconductor Devices and Methods of Manufacture Thereof - Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming a gate dielectric over the semiconductor wafer, and forming a gate over the gate dielectric. At least one recess is formed in the semiconductor wafer proximate the gate and the gate dielectric, at least a portion of the at least one recess extending beneath the gate. The at least one recess in the semiconductor wafer is filled with a semiconductive material. | 03-03-2016 |
| 20160071921 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - According to one embodiment, a semiconductor device includes a semiconductor layer including Ge; and a metal Ge compound region provided in a surface portion of the semiconductor layer. Sn is included in an interface portion between the semiconductor layer and the metal Ge compound region. A lattice plane of the semiconductor layer matches with a lattice plane of the metal Ge compound region. | 03-10-2016 |
| 20160071966 | SEMICONDUCTOR DEVICE AND FORMATION THEREOF - A semiconductor devices and method of formation are provided herein. A semiconductor device includes a gate structure over a channel and an active region adjacent the channel. The active region includes a repaired doped region and a growth region over the repaired doped region. The repaired doped region includes a first dopant and a second dopant, where the second dopant is from the growth region. A method of forming a semiconductor device includes increasing a temperature during exposure to at least one of dopant(s) or agent(s) to form an active region adjacent a channel, where the active region includes a repaired doped region and a growth region over the repaired doped region. | 03-10-2016 |
| 20160071978 | PERFORMANCE ENHANCEMENT IN TRANSISTORS BY PROVIDING AN EMBEDDED STRAIN-INDUCING SEMICONDUCTOR MATERIAL ON THE BASIS OF A SEED LAYER - A semiconductor device includes drain and source regions positioned in an active region of a transistor and a channel region positioned laterally between the drain and source regions that includes a semiconductor base material and a threshold voltage adjusting semiconductor material positioned on the semiconductor base material. A gate electrode structure is positioned on the threshold voltage adjusting semiconductor material, and a strain-inducing semiconductor alloy including a first semiconductor material and a second semiconductor material positioned above the first semiconductor material is embedded in the semiconductor base material of the active region. A crystalline buffer layer of a third semiconductor material surrounds the embedded strain-inducing semiconductor alloy, wherein an upper portion of the crystalline buffer layer laterally confines the channel region including the sidewalls of the threshold voltage adjusting semiconductor material and is positioned between the second semiconductor material and the threshold voltage adjusting semiconductor material. | 03-10-2016 |
| 20160087099 | FINFET WITH HETEROJUNCTION AND IMPROVED CHANNEL CONTROL - Roughly described, a computer program product describes a transistor with a fin, a fin support, a gate, and a gate dielectric. The fin includes a first crystalline semiconductor material which includes a channel region of the transistor between a source region of the first transistor and a drain region of the transistor. The fin is on a fin support. The fin support includes a second crystalline semiconductor material different from the first crystalline semiconductor material. The first crystalline semiconductor material of the fin and the second crystalline semiconductor material of the fin support form a first heterojunction in between. A gate, gate dielectric, and/or isolation dielectric can be positioned to improve control within the channel. | 03-24-2016 |
| 20160087102 | SEMICONDUCTOR DEVICE HAVING A STRAIN FEATURE IN A GATE SPACER AND METHODS OF MANUFACTURE THEREOF - A device may include a substrate having a channel region therein, the channel region having a first lattice constant; a gate stack formed over the channel region; a spacer lining a sidewall of the gate stack, the spacer having a recess therein, the recess extending over a lateral portion of the channel region; and a source region having a second lattice constant different from the first lattice constant, the source region extending continuously from a first portion laterally adjacent to the channel region to a second portion extending into the recess and over the channel region. | 03-24-2016 |
| 20160093700 | DOUBLE ASPECT RATIO TRAPPING - A semiconductor structure is provided by a process in which two aspect ratio trapping processes are employed. The structure includes a semiconductor substrate portion of a first semiconductor material having a first lattice constant. A plurality of first semiconductor-containing pillar structures of a second semiconductor material having a second lattice constant that is greater than the first lattice constant extend upwards from a surface of the semiconductor substrate portion. A plurality of second semiconductor-containing pillar structures of a third semiconductor material having a third lattice constant that is greater than the first lattice constant extend upwards from another surface of the semiconductor substrate portion. A spacer separates each first semiconductor-containing pillar structure from each second semiconductor-containing pillar structure. Each second semiconductor-containing pillar structure has a width that is different from a width of each first semiconductor-containing pillar structure. | 03-31-2016 |
| 20160099380 | EPITAXIAL STRUCTURE - An epitaxial structure including an epitaxial substrate, a first buffer layer, a first pattern mask layer, a second buffer layer and a second pattern mask layer. The first buffer layer is disposed on the epitaxial substrate. The first pattern mask layer is disposed on the first buffer layer. The second buffer layer is disposed on the first pattern mask layer and a part of the first buffer layer. The second pattern mask layer is disposed on the second buffer layer. A projection of the first pattern mask layer projected on the first buffer layer and a projection of the second pattern mask layer projected on the first buffer layer cover at least 70% of the total area of the first buffer layer. | 04-07-2016 |
| 20160104775 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a buffer layer on a semiconductor substrate including first and second regions, a first channel layer on the buffer layer of the first region, a second channel layer on the buffer layer of the second region, and a spacer layer between the second channel layer and the buffer layer. The buffer layer, the first and second channel layers, and the spacer layer are formed of semiconductor materials including germanium. A germanium concentration difference between the first and second channel layers is greater than a germanium concentration difference between the buffer layer and the second channel layer. The spacer layer has a germanium concentration gradient. | 04-14-2016 |
| 20160111334 | FINFET FORMATION PROCESS AND STRUCTURE - A FinFET and methods for forming a FinFET are disclosed. In a method, first trenches are formed in a substrate. First isolation regions are then formed in the first trenches. An epitaxial region is epitaxially grown between the first isolation regions. A second trench is formed by etching in the epitaxial region, forming a plurality of fins. A second isolation region is formed in the second trench. A structure includes a substrate, a first fin on the substrate, a gate dielectric over the first fin, and a gate electrode over the gate dielectric. The first fin comprises an epitaxial layer having a stacking fault defect density less than 1*10 | 04-21-2016 |
| 20160118497 | METHOD TO FORM STRAINED CHANNEL IN THIN BOX SOI STRUCTURES BY ELASTIC STRAIN RELAXATION OF THE SUBSTRATE - Methods and structures for forming strained-channel FETs are described. A strain-inducing layer may be formed under stress in a silicon-on-insulator substrate below the insulator. Stress-relief cuts may be formed in the strain-inducing layer to relieve stress in the strain-inducing layer. The relief of stress can impart strain to an adjacent semiconductor layer. Strained-channel, fully-depleted SOI FETs and strained-channel finFETs may be formed from the adjacent semiconductor layer. The amount and type of strain may be controlled by etch depths and geometries of the stress-relief cuts and choice of materials for the strain-inducing layer. | 04-28-2016 |
| 20160126316 | TRANSISTOR STRUCTURES AND FABRICATION METHODS THEREOF - Transistor structures and methods of fabricating transistor structures are provided. The methods include: fabricating a transistor structure at least partially within a substrate, the fabricating including: providing a cavity within the substrate; and forming a first portion and a second portion of the transistor structure at least partially within the cavity, the first portion being disposed at least partially between the substrate and the second portion, where the first portion inhibits diffusion of material from the second portion into the substrate. In one embodiment, the transistor structure is a field-effect transistor structure, and the first portion and the second portion include one of a source region or a drain region of the field-effect transistor structure. In another embodiment, the transistor structure is a bipolar junction transistor structure. | 05-05-2016 |
| 20160126322 | METHOD AND STRUCTURE TO IMPROVE FILM STACK WITH SENSITIVE AND REACTIVE LAYERS - Embodiments of the present disclosure generally relate to a film stack including layers of group III-V semiconductor materials. The film stack includes a phosphorous containing layer deposited over a silicon substrate, a GaAs containing layer deposited on the phosphorous containing layer, and an aluminum containing layer deposited on the GaAs containing layer. The GaAs containing layer between the phosphorous containing layer and the aluminum containing layer improves the surface smoothness of the aluminum containing layer. | 05-05-2016 |
| 20160126351 | SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A semiconductor device includes a substrate including a first active region, a second active region and a field region between the first and second active regions, and a gate structure formed on the substrate to cross the first active region, the second active region and the field region. The gate structure includes a p type metal gate electrode and an n-type metal gate electrode directly contacting each other, the p-type metal gate electrode extends from the first active region less than half way toward the second active region. | 05-05-2016 |
| 20160126352 | HYBRID ORIENTATION FIN FIELD EFFECT TRANSISTOR AND PLANAR FIELD EFFECT TRANSISTOR - A substrate including a handle substrate, a lower insulator layer, a buried semiconductor layer, an upper insulator layer, and a top semiconductor layer is provided. Semiconductor fins can be formed by patterning a portion of the buried semiconductor layer after removal of the upper insulator layer and the top semiconductor layer in a fin region, while a planar device region is protected by an etch mask. A disposable fill material portion is formed in the fin region, and a shallow trench isolation structure can be formed in the planar device region. The disposable fill material portion is removed, and gate stacks for a planar field effect transistor and a fin field effect transistor can be simultaneously formed. Alternately, disposable gate structures and a planarization dielectric layer can be formed, and replacement gate stacks can be subsequently formed. | 05-05-2016 |
| 20160133628 | SEMICONDUCTOR STRUCTURE AND DEVICE AND METHODS OF FORMING SAME USING SELECTIVE EPITAXIAL PROCESS - Semiconductor structures, devices, and methods of forming the structures and device are disclosed. Exemplary structures include multi-gate or FinFET structures that can include both n-channel MOS (NMOS) and p-channel MOS (PMOS) devices to form CMOS structures and devices on a substrate. The devices can be formed using selective epitaxy and shallow trench isolation techniques. | 05-12-2016 |
| 20160133747 | SEMICONDUCTOR TRANSISTOR HAVING A STRESSED CHANNEL - A process is described for manufacturing an improved PMOS semiconductor transistor. Recesses are etched into a layer of epitaxial silicon. Source and drain films are deposited in the recesses. The source and drain films are made of an alloy of silicon and germanium. The alloy is epitaxially deposited on the layer of silicon. The alloy thus has a lattice having the same structure as the structure of the lattice of the layer of silicon. However, due to the inclusion of the germanium, the lattice of the alloy has a larger spacing than the spacing of the lattice of the layer of silicon. The larger spacing creates a stress in a channel of the transistor between the source and drain films. The stress increases I | 05-12-2016 |
| 20160133749 | SEMICONDUCTOR DEVICE HAVING TIPLESS EPITAXIAL SOURCE/DRAIN REGIONS - A semiconductor device having tipless epitaxial source/drain regions and a method for its formation are described. In an embodiment, the semiconductor device comprises a gate stack on a substrate. The gate stack is comprised of a gate electrode above a gate dielectric layer and is above a channel region in the substrate. The semiconductor device also comprises a pair of source/drain regions in the substrate on either side of the channel region. The pair of source/drain regions is in direct contact with the gate dielectric layer and the lattice constant of the pair of source/drain regions is different than the lattice constant of the channel region. In one embodiment, the semiconductor device is formed by using a dielectric gate stack placeholder. | 05-12-2016 |
| 20160155846 | Passivated and Faceted for Fin Field Effect Transistor | 06-02-2016 |
| 20160163704 | SEMICONDUCTOR DEVICE HAVING HETEROGENEOUS STRUCTURE AND METHOD FORMING THE SAME - A semiconductor device is provided as follows. A first buffer layer is disposed on a substrate including NMOS and PMOS regions. A first drain and a first source are disposed on the first buffer layer and have heterogeneous structures. A first channel is disposed between the first drain and the first source. A first gate electrode is disposed on the first channel. A second drain and a second source are disposed on the first buffer layer. A second channel is disposed between the second drain and the second source. The second channel includes a different material from the first channel. A second gate electrode is disposed on the second channel. The first drain, the first source, the first channel and the first gate electrode are disposed in the NMOS region. The second drain, the second source, the second channel and the second gate electrode are disposed in the PMOS region. | 06-09-2016 |
| 20160172478 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE | 06-16-2016 |
| 20160172496 | FINFET TRANSISTOR WITH EPITAXIAL STRUCTURES | 06-16-2016 |
| 20160181099 | METHODS AND STRUCTURES TO PREVENT SIDEWALL DEFECTS DURING SELECTIVE EPITAXY | 06-23-2016 |
| 20160190136 | ASYMMETRIC SOURCE/DRAIN DEPTHS - A semiconductor device includes a substrate having a first region and a second region, an n-type transistor in the first region, the n-type transistor comprising a first set of source/drain features, and a p-type transistor in the second region, the p-type transistor comprising a second set of source/drain features. The second set of source/drain features extend deeper than the first set of source/drain features. | 06-30-2016 |
| 20160190318 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor device includes a substrate, first strain-inducing source and drain structures, a first gate structure, a first channel region, second strain-inducing source and drain structures, a second gate structure, and a second channel region. At least one of the first strain-inducing source and drain structures has a first proximity to the first channel region. At least one of the second strain-inducing source and drain structures has a second proximity to the second channel region. The second proximity is different from the first proximity. | 06-30-2016 |
| 20160190319 | Non-Planar Semiconductor Devices having Multi-Layered Compliant Substrates - Non-planar semiconductor devices having multi-layered compliant substrates and methods of fabricating such non-planar semiconductor devices are described. For example, a semiconductor device includes a semiconductor fin disposed above a semiconductor substrate. The semiconductor fin has a lower portion composed of a first semiconductor material with a first lattice constant (L1), and has an upper portion composed of a second semiconductor material with a second lattice constant (L2). A cladding layer is disposed on the upper portion, but not on the lower portion, of the semiconductor fin. The cladding layer is composed of a third semiconductor material with a third lattice constant (L3), wherein L3>L2>L1. A gate stack is disposed on a channel region of the cladding layer. Source/drain regions are disposed on either side of the channel region. | 06-30-2016 |
| 20160190321 | FinFET Low Resistivity Contact Formation Method - The invention relates to a contact structure of a semiconductor device. An exemplary structure for a contact structure for a semiconductor device comprises a substrate comprising a major surface and a trench below the major surface; a strained material filling the trench, wherein a lattice constant of the strained material is different from a lattice constant of the substrate, and wherein a surface of the strained material has received a passivation treatment; an inter-layer dielectric (ILD) layer having an opening over the strained material, wherein the opening comprises dielectric sidewalls and a strained material bottom; a dielectric layer coating the sidewalls and bottom of the opening, wherein the dielectric layer has a thickness ranging from 1 nm to 10 nm; a metal barrier coating an opening of the dielectric layer; and a metal layer filling a coated opening of the dielectric layer. | 06-30-2016 |
| 20160204198 | HIGH MOBILITY TRANSISTORS | 07-14-2016 |
| 20160204199 | MOSFET STRUCTURE AND MANUFACTURING METHOD THEREOF | 07-14-2016 |
| 20160204208 | SELECTIVE EPITAXIALLY GROWN III-V MATERIALS BASED DEVICES | 07-14-2016 |
| 20160204253 | III-V MOSFET WITH STRAINED CHANNEL AND SEMI-INSULATING BOTTOM BARRIER | 07-14-2016 |
| 20160254152 | Reduction of Edge Effects from Aspect Ratio Trapping | 09-01-2016 |
| 20160254383 | CONTACT STRUCTURE OF SEMICONDUCTOR DEVICE | 09-01-2016 |
| 20160380075 | SEMICONDUCTOR DEVICE - A semiconductor device includes a fin-type pattern including a first short side and a second short side opposed to each other, a first trench in contact with the first short side, a second trench in contact with the second short side, a first field insulating film in the first trench, the first field insulating film including a first portion and a second portion arranged sequentially from the first short side, and a height of the first portion being different from a height of the second portion, a second field insulating film in the second trench, and a first dummy gate on the first portion of the first field insulating film. | 12-29-2016 |
| 20160380102 | DIFFUSED TIP EXTENSION TRANSISTOR - A method including forming an opening in a junction region of a fin on and extending from a substrate; introducing a doped semiconductor material in the opening; and thermal processing the doped semiconductor material. A method including forming a gate electrode on a fin extending from a substrate; forming openings in the fin adjacent opposite sides of the gate electrode; introducing a doped semiconductor material in the openings; and thermally processing the doped semiconductor material sufficient to induce the diffusion of a dopant in the doped semiconductor material. An apparatus including a gate electrode transversing a fin extending from a substrate; and semiconductor material filled openings in junction regions of the fin adjacent opposite sides of the gate electrode, wherein the semiconductor material comprises a dopant. | 12-29-2016 |
| 20170236921 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME | 08-17-2017 |
| 20180026137 | FIN-TYPE FIELD-EFFECT TRANSISTORS WITH STRAINED CHANNELS | 01-25-2018 |
| 20190148230 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME | 05-16-2019 |
| 20190148244 | FINFET DEVICES AND METHODS OF FORMING | 05-16-2019 |
| 20190148549 | SUBSTANTIALLY DEFECT FREE RELAXED HETEROGENEOUS SEMICONDUCTOR FINS ON BULK SUBSTRATES | 05-16-2019 |
| 20220140143 | DEVICE ISOLATION - Disclosed herein are structures and techniques for device isolation in integrated circuit (IC) assemblies. In some embodiments, an IC assembly may include multiple transistors spaced apart by an isolation region. The isolation region may include a doped semiconductor body whose dopant concentration is greatest at one or more surfaces, or may include a material that is lattice-mismatched with material of the transistors, for example. | 05-05-2022 |
| 20220140150 | SEMICONDUCTOR DEVICE - A semiconductor device includes a first transistor, a second transistor and a third transistor provided on a substrate, the first to third transistors respectively including source and drain regions spaced apart from each other, a gate structure extending in a first direction on the substrate and interposed between the source and drain regions, and a channel region connecting the source and drain regions to each other. A channel region of the second transistor and a channel region of the third transistor respectively include a plurality of channel portions, the plurality of channel portions spaced apart from each other in a second direction, perpendicular to an upper surface of the substrate, and connected to the source and drain regions, respectively. A width of a channel portion of the third transistor in the first direction is greater than a width of a channel portion of the second transistor in the first direction. | 05-05-2022 |
