Class / Patent application number | Description | Number of patent applications / Date published |
073514310 | Inductive or magnetic sensor (e.g., Hall effect sensor) | 21 |
20080202241 | Device with a Sensor Arrangement | 08-28-2008 |
20080271534 | SENSOR GAP BALANCER - An assembly for positioning a torque sensor having a receiver and a transmitter is provided. The assembly includes a first annular member, wherein the receiver is coupled to the first annular member. A second annular member is disposed proximate the first annular member. A bearing assembly is disposed between the first annular member and the second annular member. The bearing assembly includes a first race formed to the first annular member, a second race formed to the second annular member, and a bearing disposed between the first race and the second race for allowing the first race and the second race to rotate relative to one another. A radially extending member is coupled to the second race. The receiver is radially displaced from the bearing assembly and the transmitter is mounted to a mounting surface of the radially extending member opposite the receiver at a predefined axial distance. | 11-06-2008 |
20090205424 | FLEXURE TYPE ACCELEROMETER AND METHOD OF MAKING SAME - A proof mass for flexure type, magnetic and capacitance circuit accelerometer includes one or more standoff pads integrally formed on a fused silica paddle, such as being etched or patterned on the fused silica paddle. Further, the standoff pads have a thickness sufficient to locate at least a portion of one active coil in proximity to or even within a linear flux region of a magnetic circuit of the accelerometer. As such, the proof mass is configured to function with the magnetic circuit in a consistent and stable manner over a selected operational life of the accelerometer. | 08-20-2009 |
20100077860 | SYSTEMS AND METHODS FOR INTEGRATED ISOLATOR AND TRANSDUCER COMPONENTS IN AN INERTIAL SENSOR - The present invention generally relates to systems and methods for determining precision vehicle orientation information. The system includes an inertial measurement unit having a chassis with a first interior surface, an inertial sensor assembly disposed within the chassis and having a first exterior surface, and integrated suspension elements mounted to the first interior surface and the first exterior surface. The integrated suspension elements include a first sensor that senses a displacement measurement of the inertial sensor assembly with respect to the chassis. The displacement measurement is used to determine an angular deflection. | 04-01-2010 |
20100083759 | MEMS FORCE BALANCE ACCELEROMETER - Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil. | 04-08-2010 |
20100083760 | MEMS ACCELEROMETER - Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the poof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil. | 04-08-2010 |
20100083761 | D'ARSONVAL MOVEMENT MEMS ACCELEROMETER - Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, and a torsional magnetic rebalancing component. In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass about the at least one torsional flexure and at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil. | 04-08-2010 |
20100095773 | Host System and Method for Determining an Attitude of a Device Undergoing Dynamic Acceleration - A system and a method for determining an attitude of a device undergoing dynamic acceleration is presented. A first attitude measurement is calculated based on a magnetic field measurement received from a magnetometer of the device and a first acceleration measurement received from a first accelerometer of the device. A second attitude measurement is calculated based on the magnetic field measurement received from the magnetometer of the device and a second acceleration measurement received from a second accelerometer of the device. A correction factor is calculated based at least in part on a difference of the first attitude measurement and the second attitude measurement. The correction factor is then applied to the first attitude measurement to produce a corrected attitude measurement for the device. | 04-22-2010 |
20100132465 | MINIATURE ACCELERATION SENSOR - The invention relates to a miniature sensor for detecting acceleration and deceleration processes, which is characterized—in that it comprises at least one bar-like spring element which is formed by a nanowire ( | 06-03-2010 |
20100170341 | MEMS ACCELEROMETER HAVING A FLUX CONCENTRATOR BETWEEN PARALLEL MAGNETS - Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. An example MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass, at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass, at least one pole piece located outside the coil, and at least one magnetic flux concentrator located inside the coil opposite the at least one of the at least one pole pieces. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil between the magnetic flux concentrator and the pole piece. | 07-08-2010 |
20100242601 | USING POLE PIECES TO GUIDE MAGNETIC FLUX THROUGH A MEMS DEVICE AND METHOD OF MAKING - A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device with precisely formed pole pieces to guide magnetic flux through a coil in a MEMS device layer. An example device includes a device layer, a magnetic return path component attached to a first side of the device layer, and a magnet unit attached to a second side of the device layer. The device layer includes a proof mass with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts. | 09-30-2010 |
20110005318 | METHOD FOR SENSING ACCELERATION USING A TRANSLATIONAL MASS IN-PLANE MEMS ACCELEROMETER - An in-plane, closed-loop Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane of the device. The device includes substrates, a proof mass, spring elements that flexibly connect the proof mass to the substrate and constrain the proof mass to translate within the major plane of the device which corresponds to a major surface of the proof mass, a plurality of conductive traces located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive traces, and a plurality of anchor pads connected to the substrate and one of the conductive springs. | 01-13-2011 |
20120073371 | MICROELECTROMECHANICAL SENSOR - In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator. | 03-29-2012 |
20120255357 | SENSOR PACKAGE HAVING INTEGRATED ACCELEROMETER AND MAGNETOMETER - A sensor package has integrated magnetic and acceleration sensor package structures, where a first wafer is bonded to a second wafer with a cavity defined between them. The magnetic sensor is bonded to the bottom of the first wafer and the acceleration sensor is provided within the cavity. Circuitry to drive the accelerometer and interface with the magnetic sensor is provided on the first wafer. | 10-11-2012 |
20130255381 | MAGNETIC INERTIAL SENSOR AND METHOD FOR OPERATING THE SAME - An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis. | 10-03-2013 |
20140150553 | PACKAGING SYSTEM AND PROCESS FOR INERTIAL SENSOR MODULES USING MOVING-GATE TRANSDUCERS - A sensor device includes a first CMOS chip and a second CMOS chip with a first moving-gate transducer formed in the first CMOS chip for implementing a first 3-axis inertial sensor and a second moving-gate transducer formed in the second CMOS chip for implementing a second 3-axis inertial sensor. An ASIC for evaluating the outputs of the first 3-axis inertial sensor and the second 3-axis inertial sensor is distributed between the first CMOS chip and the second CMOS chip. | 06-05-2014 |
20150082886 | INERTIAL SENSOR - According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer. | 03-26-2015 |
20150122023 | MICROMECHANICAL SENSOR DEVICE - A micromechanical sensor device, having a first unhoused sensor unit, and at least one second unhoused sensor unit, the sensor units being functionally connected to one another, the sensor units being essentially vertically configured one over the other so that a sensor unit having a larger footprint completely covers a sensor unit having a smaller footprint. | 05-07-2015 |
20160084871 | DUAL-FUNCTIONAL RESONANT MAGNETIC FIELD SENSOR - Disclosed is a dual-functional resonant based magnetic field sensor that functions as magnetic field sensor and accelerometer, respectively, comprising a sensor structure including a mass block and motion sensor electrodes, capacitance to voltage converter and amplifier to convert sensing signals of the sensor electrodes into voltage, as output signals of the magnetic field sensor, a driving circuit to provide the output signals to the mass block in the form of current, to drive the mass block to vibrate, and a selection circuit to select measurement of magnetic field or acceleration. The driving circuit may be a comparator. The selection circuit may be replaced by a filter to select frequency bands of the output signals of the converter, for simultaneously providing signals representing magnetic field and acceleration, respectively. | 03-24-2016 |
20160178655 | THIN FILM SUPERCONDUCTING ACCELERATION MEASURING APPARATUS | 06-23-2016 |
20160195568 | ACCELERATION SENSOR, ESPECIALLY DUPLEX ACCELERATION SENSOR, ARRANGEMENT AND METHOD FOR DETECTING A LOSS OF ADHESION OF A VEHICLE TIRE | 07-07-2016 |