| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 073514290 | Having a vibrating element | 51 |
| 20090095079 | BULK ACOUSTIC WAVE ACCELEROMETERS - Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant K | 04-16-2009 |
| 20090241665 | VIBRATING BEAM ACCELEROMETER WITH IMPROVED PERFORMANCE IN VIBRATION ENVIRONMENTS - An accelerometer that has a cross coupling coefficient due to pendulum droop of the proof mass that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator nonlinearity. The accelerometer includes a proof mass, a housing having at least two opposing interior walls, and one or more flexures for flexibly connecting the proof mass at a first end to a first one of the opposing walls of the housing. A first resonator is connected to a first surface of the proof mass at an end of the proof mass opposite the first end and to the housing wall that is not attached to the flexure. A second resonator is connected to a second surface of the proof mass and the housing wall that receives the first resonator. The second surface is on an opposite side of the proof mass as the first surface. | 10-01-2009 |
| 20090301195 | Piezoelectric quartz accelerometer - A piezoelectric quartz accelerometer comprises a sensitive element, a signal processing circuit, a base, an outer case, and a socket, wherein said sensitive element comprising two round piezoelectric quartz wafers, and a supporting frame wherein said two round piezoelectric quartz wafers are symmetrically mounted on both sides of the centre axial line of said supporting frame; said sensitive element further comprises an axial shock buffer unit and a transverse retaining unit for protecting overload of said two round piezoelectric quartz wafers; said signal processing circuit comprises an oscillation circuit for obtaining frequency signal, frequency differential forming circuit for extracting signal, phase lock and times frequency circuit for amplifying signal, compensating zero phase, compensating non-linearization and compensating temperature, and output circuit. | 12-10-2009 |
| 20090320595 | MICROMACHINED SENSOR FOR MEASURING VIBRATION - There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field. | 12-31-2009 |
| 20100000323 | RESONANT-BEAM ACCELEROMETER WITH ROTATING ARTICULATED LEVER ARM - The invention relates to a micromachined accelerometer using a movable seismic mass suspended in relation to the substrate by elastic connections only allowing translation in its own plane along a sensitive axis (Oy). The mass acts on at least one elongate resonator by means of a force amplification structure associated with this resonator. The amplification structure comprises a rigid lever arm, a first end of which is connected to the seismic mass by a connection having, in the plane of the mass, a high stiffness in the direction of the sensitive axis (Oy) and a low stiffness in the perpendicular direction, and a second end is connected to an anchor point on the substrate. The second end of the lever arm is a rigid head piece surrounding the anchor point and connected to this anchor point by a rotational connection about a center of rotation. The resonator has one end fixed to the rigid head piece at a point such that the longitudinal axis of the resonator passes a distance h, small in relation to the length L of the lever arm but nonzero, from the center of rotation of the rotational connection. | 01-07-2010 |
| 20100024552 | SYSTEMS AND METHODS FOR DETECTING OUT-OF-PLANE LINEAR ACCELERATION WITH A CLOSED LOOP LINEAR DRIVE ACCELEROMETER - Systems and methods sense out-of-plane linear accelerations. In an exemplary embodiment, the out-of plane linear accelerometer is accelerated in an out-of-plane direction, wherein the acceleration generates a rotational torque to an unbalanced proof mass. A rebalancing force is applied to at least one plurality of interleaved rotor comb tines and stator comb tines, wherein the rebalancing force opposes the rotational torque, wherein the rotor comb tines are disposed at an end of the unbalanced proof mass, and wherein the stator comb tines are disposed on a stator adjacent to the end of the unbalanced proof mass. An amount of acceleration is then determined based upon the applied rebalancing force. | 02-04-2010 |
| 20100043552 | 3-AXIAL ACCELEROMETER - The invention provides an accelerometer comprised entirely in a single component of a piezoelectric or piezoresistive material. The accelerometer comprises three electrode regions each being adapted to provide a specific electrical pattern for specific acceleration directions. The invention further provides a method of determining acceleration. | 02-25-2010 |
| 20100126274 | SYSTEM AND METHOD OF IDENTIFYING THE ORIENTATION OF A TRI-AXIAL ACCELEROMETER - A system and method for analyzing a device that includes a mass configured for motion. The system includes a tri-axial accelerometer disposed to detect acceleration vectors of the device and to output three channels of acceleration data, and a user interface receiving the three channels of acceleration data. The user interface is configured to correlate the three channels of acceleration data with a reference frame defined by three orthogonal axes intersecting at a vertex, and includes a display and a selector. The display shows sets of options that represent dispositions of the device with respect to gravity, placements of the tri-axial accelerometer with respect to the device, and orientations of the tri-axial accelerometer with respect to the device. The selector selects one device disposition option, one tri-axial accelerometer placement option, and one tri-axial accelerometer orientation option. | 05-27-2010 |
| 20100162813 | SENSOR ASSEMBLY - A sensor assembly includes a sound sensor, an image sensor, an acceleration sensor, and a gyroscope sensor. The sound sensor includes a substrate defining a first cavity, a diaphragm positioned on the substrate and covering the first cavity, a back plate covering the diaphragm and positioned on the substrate, and a capacitance. A first electrode layer is coated on the diaphragm and faces the first cavity. A second cavity is defined between the diaphragm and the back plate. A second electrode layer is coated on the back plate and faces the second cavity. The capacitance is electrically connected between the first and second electrode layers. The image sensor, the acceleration sensor, and the gyroscope sensor are positioned on the substrate. | 07-01-2010 |
| 20100175473 | SENSOR SYSTEM - A sensor system having a substrate, that has a main plane of extension, and a seismic mass, the seismic mass being developed movably about a torsional axis that is parallel to the main plane of extension; and the seismic mass having an asymmetrical mass distribution with respect to the torsional axis; and furthermore an area of the seismic mass facing the substrate is developed symmetrically with respect to the torsional axis. | 07-15-2010 |
| 20100186509 | METHOD FOR MEASURING AN ACCELERATION USING A PIEZOELECTRIC VIBRATING ACCELEROMETER, AND CORRESPONDING MEASUREMENT DEVICE - The invention provides a method of measuring an acceleration by means of a vibrating accelerometer including a piezoelectric vibrating cell, the method having the steps: of exciting the vibration cell by means of an excitation signal at a resonant frequency of the vibrating cell; of calculating an acceleration value from a detection signal that results from the excitation signal; of exciting the vibrating cell with a correction excitation signal at a correction frequency that is different from the resonant frequency; of extracting a correction signal from the detection signal, the correction being representative of an electrical characteristic that is to be corrected; and of combining the correction signal with the detection signal so as to reduce the electrical characteristic that is to be corrected. | 07-29-2010 |
| 20100186510 | INERTIAL OR RESONATING SENSOR IN SURFACE TECHNOLOGY, WITH OUT OF PLANE DETECTION BY STRAIN GAUGE - The invention involves a surface type MEMS sensor, characterized by that fact that it has:
| 07-29-2010 |
| 20100307247 | MICROMECHANICAL ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN ACCELERATION SENSOR - A micromechanical acceleration sensor for a transport device, in particular a motor vehicle, having a seismic mass. The seismic mass includes an auxiliary mass, and the auxiliary mass is composed of a different material than the seismic mass. Also described is a method for manufacturing an acceleration sensor for a transport device, in particular a motor vehicle, having a seismic mass, an auxiliary mass being provided on/in the seismic mass when forming the seismic mass. Also described is an assembly, apparatus, or device, in particular for a motor vehicle. The assembly, apparatus, or device has a micromechanical acceleration sensor as described, or an acceleration sensor manufactured as described. | 12-09-2010 |
| 20100326191 | BIDIRECTIONAL, OUT-OF-PLANE, COMB DRIVE ACCELEROMETER - A bi-directional, out-of-plane electrostatic comb drive apparatus including two electrically independent sets of stator comb tines; and a method for fabricating an out-of-plane comb drive with stacked sets of stator comb tines. A first set of stator comb tines is offset from a second set of stator comb tines. A set of rotor comb tines interleaves with both sets of stator comb tines. A first voltage applied to the first set of stator comb tines operates to pull the rotor tines toward the first set of stator comb tines. A second voltage applied to the second set of stator comb tines operates to pull the rotor tines toward the second set of stator comb tines, enabling bi-directional operation. A fabrication method is disclosed that enables fabrication of the first and second sets of stator comb tines that are mechanically and electrically independent and interleaved by the rotor comb tines. | 12-30-2010 |
| 20110005317 | TRANSLATIONAL MASS IN-PLANE MEMS ACCELEROMETER - An in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane. The device also includes a substrate, a proof mass, a hinge element that flexibly connects the proof mass to the substrate, the major plane corresponds to a major surface of the proof mass, a plurality of conductive leads located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive leads, and a plurality of anchor pads connected to the substrate and one of the conductive springs. Isolation trenches directly connect to outer edges of the leads that are adjacent to other leads or proof mass material. The leads and springs include a plurality of slots. | 01-13-2011 |
| 20110016973 | ACCELERATION SENSOR DEVICE AND SENSOR NETWORK SYSTEM - To provide an acceleration sensor and a sensor network system having a construction in which the consumption of power to be consumed can be reduced and the sensor itself can be miniaturized without using any piezoelectric sensor or piezoelectric bimorph. | 01-27-2011 |
| 20110041609 | Offset Detection and Compensation for Micromachined Inertial Sensors - Error sources relating to the drive signal applied to the resonator of an inertial sensor, such as in-phase offset errors relating to the drive signal and/or electronic pass-through of the drive signal to accelerometer sense electronics, are detected by modulating the drive signal and sensing accelerometer signals that are induced by the modulated drive signal. Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing accelerometer signals that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources. | 02-24-2011 |
| 20110056294 | MEMS RESONANT ACCELEROMETER HAVING IMPROVED ELECTRICAL CHARACTERISTICS - A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation. | 03-10-2011 |
| 20110100125 | ACCELERATION SENSOR - An acceleration sensor includes: a sensitive element having a vibrating beam, base ends located at both ends of the vibrating beam, and excitation electrodes which are formed on a surface of the vibrating beam; a supporting section connected to each of the base ends in order to support the sensitive element; a connecting section which is provided between one of the base ends and the supporting section so as to extend from the one base end in the opposite direction to the one base end on the same axis as the vibrating beam and which has a thin section formed along the longitudinal direction of the vibrating beam; and a spindle section which is disposed at both sides of the sensitive element in the width direction in a state of being connected to the one base end and extends toward the other base end side along the longitudinal direction. | 05-05-2011 |
| 20110132088 | FLEXURE ASSEMBLIES AND METHODS FOR MANUFACTURING AND USING THE SAME - In one embodiment, an accelerometer includes a suspension frame, a proof mass, and a plurality of flexures suspending the proof mass from the suspension frame. The flexures allow the proof mass to deflect in response to an acceleration along a sensitive axis of the accelerometer. Each flexure exhibits an initial spring rate along the sensitive axis of substantially zero. | 06-09-2011 |
| 20110219875 | FORCE SENSOR WITH REDUCED NOISE - A MEMS or NEMS device for detecting a force following a given direction, comprising a support ( | 09-15-2011 |
| 20110259101 | VIBRATION-TYPE FORCE DETECTION SENSOR AND VIBRATION-TYPE FORCE DETECTION DEVICE - A vibration-type force detection sensor includes: a piezoelectric resonator element provided with a vibration portion and a support portion connected to one end of the vibration portion; and a base which is provided with one main surface which is connected to the support portion and the piezoelectric resonator element is arranged, wherein the piezoelectric resonator element is in a state where the other end side of the vibration portion can oscillate so that the size of a gap between the vibration portion and the one main surface changes when a force acts in a direction which is orthogonal with the one main surface of the base, and is supported in parallel with the one main surface of the base so that an electric equivalent resistance of the vibration portion changes according to the change in the size of the gap. | 10-27-2011 |
| 20120024063 | System And Method Of Correlating The Orientation Of A Tri-Axial Accelerometer - A system and method for analyzing a device that includes a mass configured for motion. The system includes a tri-axial accelerometer disposed to detect acceleration vectors of the device and to output three channels of acceleration data, and a user interface receiving the three channels of acceleration data. The user interface is configured to correlate the three channels of acceleration data with a reference frame defined by three orthogonal axes intersecting at a vertex, and includes a display and a selector. The display shows sets of options that represent dispositions of the device with respect to gravity, placements of the tri-axial accelerometer with respect to the device, and orientations of the tri-axial accelerometer with respect to the device. The selector selects one device disposition option, one tri-axial accelerometer placement option, and one tri-axial accelerometer orientation option. | 02-02-2012 |
| 20120079882 | SENSOR DEVICE, MOTION SENSOR, AND ELECTRONIC DEVICE - A sensor device includes a first electrode disposed on active surface side of a silicon substrate, an external connecting terminal electrically connected to the first electrode, at least one stress relaxation layer disposed between the silicon substrate and the external connecting terminal, a connecting terminal disposed on the active surface side of the silicon substrate, and a vibration gyro element having weight sections as mass adjustment sections, the vibration gyro element is held by the silicon substrate due to connection between the connection electrode and the external connecting terminal, and a meltage protection layer formed in an area where the stress relaxation layer and the mass adjustment section overlap each other in a plan view is provided. | 04-05-2012 |
| 20120103094 | SYSTEM AND METHOD FOR ACCELERATING A DEVICE - An acceleration device includes an actuator configured to displace a mass in a reciprocating motion at a desired frequency, a mount configured to hold a device, such as an accelerometer device, and at least one spring connecting the mount to the mass. The actuator is used to apply a force to achieve resonance. The actuator may comprise a voice coil motor, wherein the voice coil motor includes a permanent magnet and an armature and wherein said armature comprises part of said mass. The actuator applies a periodic force to the mass. The periodic force may be a sinusoidal force. Preferably, the applied force is aligned with a resulting velocity of the mass. The mount may include a test socket to which the device is electrically connected. The spring may comprises one or more flexure elements. The acceleration device may be used with a handler device to connect and disconnect the device to and from the mount. Optionally, the handler device includes an environmental chamber surrounding the mount. | 05-03-2012 |
| 20120132003 | MEMS BIAXIAL RESONANT ACCELEROMETER - A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by elastic elements to be suspended above the substrate. The elastic elements enabling inertial movements of the inertial mass along a first axis of detection and a second axis of detection that belong to a plane of main extension of said inertial mass, in response to respective linear external accelerations. At least one first resonant element and one second resonant element have a respective longitudinal extension, respectively along the first axis of detection and the second axis of detection, and are mechanically coupled to the inertial mass through a respective one of the elastic elements to undergo a respective axial stress when the inertial mass moves respectively along the first axis of detection and the second axis of detection. | 05-31-2012 |
| 20120174670 | Inertia Sensors With Multi-Directional Shock Protection - A sensor including: a base; at least one component which moves relative to the base; and one or more locking mechanisms for locking the at least one component in a predetermined stationary position in response to external stimuli exceeding predetermined thresholds in at least first and second directions, where the first direction is different from the second direction. | 07-12-2012 |
| 20120210792 | IN-PLANE PIEZORESISTIVE DETECTION SENSOR - An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured. | 08-23-2012 |
| 20120234094 | METHODS AND APPARATUS FOR IMPROVING PERFORMANCE OF AN ACCELEROMETER - An accelerometer for reducing undesired attraction or repulsion forces between a proof mass and a cover. An exemplary accelerometer includes a proof mass, a base, a flexure that flexibly attaches the proof mass to the base, at least one double-ended tuning fork (DETF) attached at one end to the proof mass and at another end to the base, and a housing structure that encloses the proof mass within a cavity. A layer of graphene is located on at least a portion of the nonconductive surfaces within the housing structure. The nonconductive surfaces include a surface on the proof mass, the housing structure, the base, the flexure, or the DETF. The layer of graphene is attached to a heat sink and/or to an electrical charge dissipation component. | 09-20-2012 |
| 20120297877 | ACCELERATION SENSOR AND ACCELERATION DETECTION APPARATUS - An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge. | 11-29-2012 |
| 20120297878 | Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration - A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed. | 11-29-2012 |
| 20130068022 | MICRO ELECTRO MECHANICAL SYSTEMS COMPONENT - Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane | 03-21-2013 |
| 20130160548 | INERTIAL FORCE SENSOR - An inertial force sensor includes a substrate, a transducer disposed on the substrate, and a wiring trace disposed on the substrate and connected with the transducer. The wiring trace includes a lower electrode layer on the substrate, a piezoelectric layer on the lower electrode layer, a capacitance-reducing layer on the piezoelectric layer, and an upper electrode layer on the capacitance-reducing layer. The capacitance-reducing layer has a relative dielectric constant smaller than that of the first piezoelectric layer. This inertial force sensor can improve a noise level. | 06-27-2013 |
| 20140060186 | Detection and Mitigation of Aerodynamic Error Sources for Micromachined Inertial Sensors - Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing modulated error signals in the accelerometer that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources. | 03-06-2014 |
| 20140076051 | ACCELEROMETER AND METHOD OF MAKING SAME - An accelerometer includes a mass, suspended by a beam, and associated conductive paths. Each conductive path is subjected to a magnetic field, such that, when a time varying signal is applied to the conductive paths, a characteristic resonant frequency is produced, and when the mass experiences an acceleration, a respective change in the resonant frequency is produced that may be interpreted as acceleration data. Embodiments include methods of manufacturing an accelerometer and systems and devices incorporating the accelerometer. | 03-20-2014 |
| 20140090471 | Three-Axis Nano-Resonator Accelerometer Device and Method - An inertial measurement device and method for measuring acceleration in three axes. Three orthogonally disposed accelerometers are defined on a common planar substrate. At least one of the accelerometers is provided with a proof mass coupled to a nano-resonator element. The nano-resonator element is oscillated at a first predetermined frequency, which may be a first resonant frequency, and is altered to oscillate at a second frequency, which may be a second resonant frequency, in response to a resultant force produced by the acceleration of the proof mass. The degree of change in nano-resonator element output frequency is sensed and processed using suitable processing circuitry as a change in acceleration on the active axis. | 04-03-2014 |
| 20140102197 | BULK ACOUSTIC WAVE ACCELEROMETERS - Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant K | 04-17-2014 |
| 20140182377 | METHOD, APPARATUS AND SYSTEM FOR PROVIDING METERING OF ACCELERATION - Techniques and mechanisms to provide for metering acceleration. In an embodiment, a microelectromechanical accelerometer includes a magnet, a mass, and a first support beam portion and second support beam portion for suspension of the mass. Resonance frequency characteristics of the first support beam portion and second support beam portion, based on the magnet and a current conducted by the first support beam portion and second support beam portion, are indicative of acceleration of the mass. In another embodiment, the accelerometer further includes a first wire portion and a second wire portion which are each coupled to the mass and further coupled to a respective anchor for exchanging a signal with the first wire portion and the second wire portion. The first wire portion and the second wire portion provide for biasing of the mass. | 07-03-2014 |
| 20140182378 | ENERGY HARVESTER POWERED ACCELEROMETER - A sensor may include a base, a resonator centered over the base, and an accelerometer disposed in a base of the resonator. The resonator may be configured to harvest energy from vibratory motion of a host device and includes a slot disposed on a center rectangular plane of the sensor. The sensor may include a circuit arrangement disposed on the accelerometer and in the slot on the center rectangular plane of the sensor. A piezoelectric element may be mounted on the resonator and electrically coupled with the circuit arrangement. The piezoelectric element may be configured to convert vibratory energy of the resonator to electrical energy. An optional antenna may be coupled with the circuit arrangement and configured to wirelessly transmit data from the sensor to a receiving station. | 07-03-2014 |
| 20140238132 | MEMS RESONANT ACCELEROMETER - Provided is a micro electro mechanical system (MEMS) resonating accelerometer. The MEMS resonating accelerometer according to the present invention comprises: a first inertial mass; a second inertial mass which is spaced at a predetermined distance from the first inertial mass on a first axis; an elastic body which is provided between the first and second inertial masses so as to apply elasticity; and a tuning fork which is connected to the elastic body and measures the change of frequency according to acceleration, wherein the longitudinal direction of the tuning fork is parallel to a second axis which is perpendicular to the first axis, the elastic body has an opening portion being in a circular shape with a portion thereof removed, and one end of the tuning fork penetrates the opening portion and is connected to the inner surface of the elastic body. | 08-28-2014 |
| 20140260615 | LEVER MECHANISMS FOR ANTI-PHASE MODE ISOLATION IN MEMS TUNING-FORK STRUCTURES - A MEMS resonator includes two resonating masses having an anti-phase and in-phase resonance mode, each mode having a resonance frequency, and an anti-phase resonance levering system coupled to the two resonating masses to stiffen and/or dampen the in-phase resonance mode while leaving the anti-phase resonance mode compliant. This effectively raises the in-phase resonance frequency above the anti-phase resonance frequency, and potentially creates a large frequency separation between the two resonance modes. This reduces the energy transfer between the two modes, allowing for robustness to external acceleration, because the in-phase mode is of a higher frequency. The anti-phase resonance levering system is disposed between the two resonating masses as an internal levering mechanism, or is disposed around the two resonating masses as an external levering mechanism. | 09-18-2014 |
| 20150013456 | ACCELERATION SENSOR - An acceleration sensor includes a fixation member, a weight member including a plate with two opposing sides parallel or substantially parallel to an X-direction and two opposing sides parallel to a Y-axis direction in a plan view, the weight member including a cutout extending in a direction about 45° relative to the X and Y axis directions, a vibrating beam linearly extending in the direction about 45° relative to the X and Y axis directions in the plan view, and one end portion is connected to the fixation member and the other end portion is connected to the weight member, the vibrating beam is partly arranged within the cutout and supporting the weight member to be displaceable in a Z-axis direction, a driver disposed on the vibrating beam and vibrating the vibrating beam, and a detector disposed on the vibrating beam and outputting a detection signal that is changed depending on deformation of the vibrating beam. | 01-15-2015 |
| 20150013457 | ACCELERATION SENSOR - A weight member includes two sides opposite to each other in an X-axis direction when looked at in a plan view. A vibrating beam includes one end portion connected at one location to a fixation member and the other end portion connected at one location to one of the two sides of the weight member in the X-axis direction when looked at in a plan view. The vibrating beam supports the weight member to be displaceable in the X-axis direction. A holding beam includes one end portion connected at one location to the fixation member and the other end portion connected at one location to the other of the two sides of the weight member opposing to each other in the X-axis direction when looked at in a plan view. The holding beam supports the weight member to be displaceable in the X-axis direction. A driver is disposed on the vibrating beam and vibrates the vibrating beam. A detector is disposed on the vibrating beam and configured to output a detection signal changes according to deformation of the vibrating beam. | 01-15-2015 |
| 20150101409 | VIBRATORY RING STRUCTURE - A method of tuning a vibratory ring structure is described which comprises determining an angular spacing for a pair of fine tuning holes ( | 04-16-2015 |
| 20150355216 | VIBRATION-SENSING FIELD UNIT - A vibration-sensing field unit includes a base with at least one accelerometer, and a body mounted to the base. The base is composed essentially of a first material, while the body is composed essentially of a second material that is more flexible than the first material to reduce a vibration at the accelerometer caused by a mass supported by the body. In another embodiment, a vibration-sensing field unit includes at least one accelerometer and at least one ultrasonic transducer. | 12-10-2015 |
| 20150355217 | MICROMECHANICAL ACCELERATION SENSOR - A micromechanical acceleration sensor is provided, including
| 12-10-2015 |
| 20150355221 | IN-PLANE PIEZORESISTIVE DETECTION SENSOR - An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured. | 12-10-2015 |
| 20150362522 | MEMS RESONANT ACCELEROMETER HAVING IMPROVED ELECTRICAL CHARACTERISTICS - A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation. | 12-17-2015 |
| 20160061857 | RESONANT SENSOR - A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter. | 03-03-2016 |
| 20160139170 | ACCELEROMETER WITH STRAIN COMPENSATION - In some examples, a device comprises a proof mass and a support base configured to support the proof mass, wherein the proof mass is configured to displace in response to an acceleration of the device. The device also comprises a flexure configured to flexibly connect the proof mass to the support base. The device also comprises a strain-monitoring device configured to measure an amount of strain on the support base. | 05-19-2016 |
| 20160139171 | IN-PLANE VIBRATING BEAM ACCELEROMETER - A device is described that includes a pendulous proof mass, a support base, a flexure, and at least two resonators. The support base defines a plane and supports the pendulous proof mass. The flexure flexibly connects the pendulous proof mass to the support base, suspends the pendulous proof mass within the support base, and in response to an acceleration of the device, the pendulous proof mass rotates about the flexure in the plane defined by the support base. The at least two resonators flexibly connect the pendulous proof mass to the support base and flex based on the rotation of the pendulous proof mass about the flexure, wherein each of the at least two resonators resonate at a respective resonant frequency. | 05-19-2016 |
