| Class / Patent application number | Description | Number of patent applications / Date published |
|---|
| 073514170 | Rebalance | 15 |
| 20100180681 | SYSTEM AND METHOD FOR INCREASED FLUX DENSITY D'ARSONVAL MEMS ACCELEROMETER - An increased flux density D'Arsonval Micro-Electro-Mechanical Systems (MEMS) device increases flux density. The increased flux density D'Arsonval Micro-Electro-Mechanical Systems (MEMS) device includes a housing, a proof mass suspended within the housing by at least one torsional flexure, a second torsional rebalancing magnet, and a current coil disposed on the proof mass. A portion of the current coil is disposed between the first torsional rebalancing magnet and the second torsional rebalancing magnet. A field generated in response to a current in the current coil interacts with a magnetic field generated by the first torsional rebalancing magnet and the second torsional rebalancing magnet. The magnetic field generates a rebalancing force that stabilizes a position of the proof mass. | 07-22-2010 |
| 073514180 | Electrostatic restoring means | 5 |
| 20080196500 | Accelerometer With Reducted Extraneous Vibrations Owing To Improved Electrode Shape - The invention relates to an accelerometer comprising a moving mass ( | 08-21-2008 |
| 20080295597 | System and Method for Mitigating Errors in Electrostatic Force Balanced Instrument - System and method for mitigating errors in electrostatic force balanced instrument is provided. The system and method mitigate errors in measurement readings caused by charge buildup in force balanced instruments that employ charge pulses to generate an electrostatic force to null an inertial proof mass disposed between opposing electrodes. The system and method mitigate charge buildup by applying charge pulses to each opposing electrode of a sensing element for a given charge cycle time period in a normal polarity configuration followed by charge pulses to each opposing electrode of the sensing element for a second given charge cycle time period in a reverse polarity conjuration. | 12-04-2008 |
| 20120090393 | UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER - The systems and methods described herein address deficiencies in the prior art by enabling the fabrication and use of accelerometers, whether MEMS-based, NEMS-based, or CMOS-MEMS based, in the same integrated circuit die as a CMOS chip. In one embodiment, the accelerometer is fabricated on the same integrated circuit die as a CMOS chip using a typical CMOS manufacturing process. | 04-19-2012 |
| 20130233077 | ELECTROSTATIC FORCE GENERATOR AND FORCE MEASUREMENT SYSTEM AND ACCELEROMETER HAVING THE SAME - An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module. | 09-12-2013 |
| 20160061858 | PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY - A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section. | 03-03-2016 |
| 073514210 | Pendulum or beam | 4 |
| 20090145227 | PENDULOUS ACCELEROMETER AND METHOD FOR THE MANUFACTURE THEREOF - The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate. | 06-11-2009 |
| 20100192691 | Servo Accelerometer - A servo accelerometer has a pair of housings having a tubular part, one end opened and the other end closed with a closing part. A frame that supports a pendulum is held between the housings. A permanent magnet is attached to each of the closing parts with a bottom pole piece interposed therebetween. Coils arranged in annular magnetic gaps are attached to the pendulum. The closing part has a recess, and the bottom pole piece is disposed in the recess. The outer circumference of the bottom pole piece faces the inner circumference of the recess with a predetermined gap interposed therebetween. | 08-05-2010 |
| 20110209545 | Servo Accelerometer - Canister-shaped magnetic reinforcing elements | 09-01-2011 |
| 073514230 | Including a flexure support | 1 |
| 20090235745 | METHODS AND SYSTEMS FOR MINIMIZING VIBRATION RECTIFICATION ERROR IN MAGNETIC CIRCUIT ACCELEROMETERS - Systems and methods for minimizing vibration rectification error in magnetic circuit accelerometers. The systems include an accelerometer with an excitation ring that has a top piece with a lower portion inner diameter and a bottom piece having a diameter smaller than the lower portion inner diameter of the top piece. The accelerometer also includes a proof mass, a magnet mounted to the bottom piece of the excitation ring, a pole piece mounted to the magnet, and a coil attached to the proof mass that extends into a gap between the top piece of the excitation ring and the pole piece. The methods include placing a pole piece in a pole piece to lap surface fixture, placing an excitation ring top piece on an outer portion of the pole piece to lap surface fixture, and placing an excitation ring bottom piece in a lower portion of the excitation ring top piece. | 09-24-2009 |
| 073514240 | Including an elastic support for an inertial element (e.g., spring) | 5 |
| 20090090184 | OUT-OF-PLANE SENSING DEVICE - An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the proof mass to make the proof mass move back to its equilibrium position when the proof mass moves perpendicularly to the substrate. An electrode extends from the proof mass toward the frame. A counter electrode extends from the frame toward the proof mass, wherein the projection of the electrode onto the substrate overlaps with that of the counter electrode onto the substrate. | 04-09-2009 |
| 20100107762 | ACCELERATION SENSOR AND METHOD FOR ITS MANUFACTURE - An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer. | 05-06-2010 |
| 20110067495 | MICROMACHINED ACCELEROMETER WITH MONOLITHIC ELECTRODES AND METHOD OF MAKING THE SAME - A capacitive accelerometer having one or more micromachined acceleration sensor assembly is disclosed. The acceleration sensor assembly comprises a spring-mass-support structure, a top cap and a bottom cap. The proof mass plate of the spring-mass-support structure has cutout spaces and is supported by a pair of branched torsional beams which are substantially located in the cutout spaces. The torsional axis of the proof mass plate is offset from the mass center in direction perpendicular to the proof mass plate. The acceleration sensor assembly further comprises multiple coplanar electrodes for differential capacitive sensing and electrostatic forcing. The capacitive accelerometer according to the present invention may comprise one, two or six micromachined acceleration sensor assemblies with electronic signal detection, conditioning and control circuits in different configurations and applications to detect and measure linear and angular accelerations. Methods to fabricate the micromachined acceleration sensor assembly are disclosed. | 03-24-2011 |
| 20110314913 | MEMS Tunneling Accelerometer - A tunneling accelerometer includes a proof mass that moves laterally with respect to a cap wafer. Either the proof mass or the cap wafer includes a plurality of tunneling tips such that the remaining one of proof mass and the cap wafer includes a corresponding plurality of counter electrodes. The tunneling current flowing between the tunneling tips and the counter electrodes will thus vary as the proof mass laterally displaces in response to an applied acceleration. | 12-29-2011 |
| 20190146003 | MICROMECHANICAL INERTIAL SENSOR | 05-16-2019 |
