Patent application title: Dynamic Film Thickness Control System/Method and its Utilization
Inventors:
Kow-Je Ling (Taipei, TW)
Jiunn-Shiuh Juang (Minshiung Shiang, TW)
IPC8 Class: AB05C1100FI
USPC Class:
118708
Class name: Coating apparatus condition responsive control
Publication date: 2010-07-08
Patent application number: 20100170437
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