Patent application number | Description | Published |
20080239006 | DROPLET EJECTION HEAD, DROPLET EJECTION DEVICE, AND METHOD OF FORMING ELECTRODE SUBSTRATE - A droplet ejection head includes: a nozzle substrate provided with a plurality of nozzle holes for ejecting a droplet; a cavity substrate provided with a plurality of ejection cavities each having a diaphragm as a bottom wall functioning as an electrode; and an electrode substrate including: a plurality of individual electrodes each formed in a first groove, opposed to the diaphragm with a gap, and for driving the diaphragm; a driver IC for controlling driving of the plurality of individual electrodes; and input wiring formed in a second grooves, and for inputting one of power and a signal for driving the drover IC from the outside. The second grooves of the electrode substrate are formed deeper than the first grooves, and a thickness of a conductive material of the input wiring is greater than a thickness of the individual electrodes. | 10-02-2008 |
20100128076 | DROPLET JET HEAD AND DROPLET JET APPARATUS - A droplet jet head includes a nozzle substrate having a plurality of nozzle holes; a cavity substrate having recesses whose bottoms serve as diaphragms, and the recesses serving as ejection chambers; an electrode substrate having separate electrodes opposed to the diaphragms; a reservoir substrate having a recess serving as a common droplet chamber for supplying droplets to the ejection chambers, through holes for transferring the droplets from the common droplet chamber to the ejection chambers, and nozzle communicating holes for transferring the droplets from the ejection chambers to the nozzle holes; and a driver IC that supplies a driving signal to the separate electrodes. The cavity substrate has a first hole, and the reservoir substrate has a second hole. The first hole and the second hole communicate with each other to form a housing. The driver IC is housed in the housing. | 05-27-2010 |
20110176128 | OPTICAL FILTER, ANALYTICAL INSTRUMENT, OPTICAL DEVICE, AND CHARACTERISTIC MEASUREMENT METHOD - An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first reflecting film provided to the first substrate, a second reflecting film provided to the second substrate, and opposed to the first reflecting film, a first electrode provided to the first substrate, a second electrode provided to the second substrate, and opposed to the first electrode, and a voltage control section adapted to control an electrical potential difference between the first electrode and a second electrode, and when switching a wavelength of a light beam to be dispersed by switching the electrical potential difference between the first electrode and the second electrode, and measuring an intensity of the light beam dispersed, the voltage control section switches the electrical potential difference from a first electrical potential difference to a second electrical potential difference larger than the first electrical potential difference. | 07-21-2011 |
20120044491 | OPTICAL FILTER, OPTICAL FILTER MODULE, SPECTROMETRIC INSTRUMENT, AND OPTICAL APPARATUS - An optical filter includes a first substrate, a second substrate facing the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and facing the first optical film, and at least one of the first optical film and the second optical film has a metal film having a reflecting property and transmissibility of a light in a desired wavelength band, and a surface and an edge portion of the metal film is covered by a dielectric film. It is also possible to provide a tilted surface to an edge portion of the metal film. Further, it is also possible to form a step-like bump between the metal film and a dielectric film as another optical film formed under the metal film. | 02-23-2012 |
20120132349 | METHOD FOR PRODUCING TUNABLE INTERFERENCE FILTER - A method for producing a tunable interference filter including a first substrate, a second substrate, a first reflection coating, a second reflection coating, and a gap changing section having a first gap changing section and a second first gap changing section, the method comprising a first substrate production process of forming the first substrate and forming the first reflection coating and the first gap changing section on the first substrate, a second substrate production process of forming the second substrate and forming the second reflection coating and the second gap changing section on the second substrate, and a bonding process of bonding the first substrate and the second substrate in a state in which temperature of the first substrate is higher than temperature of the second substrate after the first substrate production process and the second substrate production process. | 05-31-2012 |
20120147380 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals. | 06-14-2012 |
20120188646 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror. | 07-26-2012 |
20120257280 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface. | 10-11-2012 |
20120300208 | OPTICAL FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER - An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential. | 11-29-2012 |
20130027707 | TUNABLE INTERFERENCE FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER - A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part. | 01-31-2013 |
20130075596 | OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - An optical filter device includes a variable wavelength interference filter having a stationary substrate, a movable substrate, a stationary reflecting film, and a movable reflecting film, and a housing adapted to house the variable wavelength interference filter therein. The housing has a base substrate, a lid bonded to the base substrate, and forming an internal space between the base substrate and the lid, and a lid-side glass substrate adapted to block a light passage hole provided to the lid. Further, the lid-side glass substrate has a substrate edge located outside the outer peripheral edge of the light passage hole, and is bonded to the lid in an area extending from the outer peripheral edge of the light passage hole to the substrate edge. | 03-28-2013 |
20130083398 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is k | 04-04-2013 |
20130083400 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING THE WAVELENGTH VARIABLE INTERFERENCE FILTER - A wavelength variable interference filter includes a fixed substrate including a fixed reflective film, a movable substrate including a movable reflective film, and a bonding section configured to bond the fixed substrate and the movable substrate. The movable substrate includes a movable section, a holding section, and a substrate outer circumferential section. The holding section includes a flat section having a uniform thickness dimension and a curved surface section provided on the outer circumferential side of the flat section, a thickness dimension of the curved surface section increasing toward the substrate outer circumferential section. The bonding section is provided in an outer circumferential region extending along substrate outer circumferential edges on surfaces opposed to each other of the fixed substrate and the movable substrate. The inner circumferential edge of the bonding section is provided further on the inner side than the outer circumferential edge of the curved surface section. | 04-04-2013 |
20130208359 | OPTICAL FILTER DEVICE AND MANUFACTURING METHOD FOR THE OPTICAL FILTER DEVICE - An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided. | 08-15-2013 |
20140204461 | OPTICAL DEVICE STORAGE PACKAGE, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A optical device storage package includes a storage portion configured to store an optical device, a base portion which constitutes a bottom portion of the storage portion, a side wall portion which is integrally molded with the base portion and which constitutes a side surface portion of the storage portion, and a first lid portion joined to the side wall portion so as to cover the storage portion, constituting a top portion opposing the bottom portion of the storage portion and hermetically sealing the top portion, wherein the first lid portion is formed of a light-transmissive member. | 07-24-2014 |
20140218802 | OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - An optical filter device has a light interference filter and a casing. The light interference filter has a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflection film provided on the fixed substrate, and a movable reflection film provided on the movable substrate. The casing has a base substrate and a lid that forms an internal space with the base substrate. The movable substrate has a holding portion provided on a surface opposite to the fixed substrate, outside a light interference region, as viewed in a plan view. The base substrate has a light transmission hole corresponding to a light transmission region. An outer peripheral edge of the light transmission hole faces the holding portion. The surface opposite to the fixed substrate of the movable substrate is joined to the base substrate. | 08-07-2014 |
20140285895 | OPTICAL FILTER DEVICE, OPTICAL MODULE AND ELECTRONIC APPARATUS - An optical filter device includes a wavelength variable interference filter provided with a movable substrate on which respective electrode pads are provided; a base substrate on which the wavelength variable interference filter is mounted, facing the movable substrate; and a fixing member that is disposed between the movable substrate and the base substrate and fixes the movable substrate and the base substrate. The fixing member is disposed at a position that overlaps the respective electrode pads, in a filter plan view. | 09-25-2014 |
20150062708 | OPTICAL DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, OPTICAL HOUSING, AND METHOD OF MANUFACTURING OPTICAL HOUSING - An optical filter device includes a wavelength tunable interference filter, a lid having a second opening, a base that forms a receiving space together with the lid, a second glass member that covers the second opening and is bonded to the lid through low melting point glass, and a metal layer provided on the lid. The metal layer is provided outside a line that is separated from the outer peripheral edge of the second glass member by a predetermined distance toward a side away from the second opening and is disposed along the outer peripheral edge of the second glass member in plan view when the lid is viewed from a normal direction with respect to the opening surface of the second opening. | 03-05-2015 |