Patent application number | Description | Published |
20110222044 | LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD - A level sensor configured to measure a height level of a substrate arranged in a measurement position is disclosed. The level sensor comprises a projection unit to project multiple measurement beams on multiple measurement locations on the substrate, a detection unit to receive the measurement beams after reflection on the substrate, and a processing unit to calculate a height level on the basis of the reflected measurement beams received by the detection unit, wherein the projection unit and the detection unit are arranged next to the substrate, when the substrate is arranged in the measurement position. | 09-15-2011 |
20120242969 | LITHOGRAPHIC APPARATUS - A lithographic apparatus including a substrate table position measurement system and a projection system position measurement system to measure a position of the substrate table and the projection system, respectively. The substrate table position measurement system includes a substrate table reference element mounted on the substrate table and a first sensor head. The substrate table reference element extends in a measurement plane substantially parallel to the holding plane of a substrate on substrate table. The holding plane is arranged at one side of the measurement plane and the first sensor head is arranged at an opposite side of the measurement plane. The projection system position measurement system includes one or more projection system reference elements and a sensor assembly. The sensor head and the sensor assembly or the associated projection system measurement elements are mounted on a sensor frame. | 09-27-2012 |
20140022527 | LITHOGRAPHIC APPARATUS - A lithographic apparatus including a substrate table position measurement system and a projection system position measurement system to measure a position of the substrate table and the projection system, respectively. The substrate table position measurement system includes a substrate table reference element mounted on the substrate table and a first sensor head. The substrate table reference element extends in a measurement plane substantially parallel to the holding plane of a substrate on substrate table. The holding plane is arranged at one side of the measurement plane and the first sensor head is arranged at an opposite side of the measurement plane. The projection system position measurement system includes one or more projection system reference elements and a sensor assembly. The sensor head and the sensor assembly or the associated projection system measurement elements are mounted on a sensor frame. | 01-23-2014 |
Patent application number | Description | Published |
20100071777 | Methods and Apparatuses for Dispensing Fluids - A fluid dispensing system can be used with a container comprising at least one camming surface. In various embodiments, the fluid dispensing system can have a housing which can accept at least a portion of the container in a fixed orientation and a track which can be engaged with the housing. In at least one embodiment, the housing can be slidably movable along the track at least between a first position and a second position. In various embodiments, the fluid dispensing system can have a tube which can be engaged with at least a portion of the container to withdraw fluid therefrom when the housing is in the second position and can also have a fluid system in fluid communication with the tube. | 03-25-2010 |
20130000781 | METHODS AND APPARATUSES FOR DISPENSING FLUIDS - A liquid dispensing system for an appliance may generally comprise a housing comprising a compartment for receiving a cartridge comprising a unit dose, a door slidably connected to the housing movable between an open position, a first actuated position, a second actuated position, and a closed position, a first cutting member connected to the compartment for rupturing a first portion of the cartridge when the door is in the first actuated position, a second cutting member connected to the compartment for rupturing a second portion of the cartridge when the door is in the second actuated position, and a reservoir in fluid communication with the compartment configured to establish a gravity flow from the compartment to the reservoir. Methods of making and using the liquid dispensing system are also described. | 01-03-2013 |
20150090735 | METHODS AND APPARATUSES FOR DISPENSING FLUIDS - A fluid dispensing system can be used with a container comprising at least one camming surface. In various embodiments, the fluid dispensing system can have a housing which can accept at least a portion of the container in a fixed orientation and a track which can be engaged with the housing. In at least one embodiment, the housing can be slidably movable along the track at least between a first position and a second position. In various embodiments, the fluid dispensing system can have a tube which can be engaged with at least a portion of the container to withdraw fluid therefrom when the housing is in the second position and can also have a fluid system in fluid communication with the tube. | 04-02-2015 |