Patent application number | Description | Published |
20090061090 | VAPOR DEPOSITION APPARATUS FOR AN ORGANIC VAPOR DEPOSITION MATERIAL AND A METHOD FOR PRODUCING AN ORGANIC FILM - A vapor deposition apparatus is provided, which does not cause changes in composition, decomposition and quality change of an organic vapor deposition material. The organic vapor deposition material is placed on a conveying unit by an amount for a single substrate, and conveyed into a vapor deposition vessel preliminarily heated. Since a small amount of the organic vapor deposition material is heated and exhausted through generation of an organic material vapor under heating condition for each substrate, neither decomposition nor quality change with moisture occurs because heating time is short. Even though different organic compounds are mixed, no change in composition occurs so that an organic vapor deposition material in which a base material is mixed with a coloring substance can be pooled in a pooling tank and then placed in the conveying unit. | 03-05-2009 |
20100013385 | DISPLAY DEVICE, APPARATUS FOR PRODUCING DISPLAY DEVICE, AND METHOD FOR PRODUCING DISPLAY DEVICE - A display device free from a deterioration in luminescence efficiency is provided. In the display device of the present invention, since an inorganic film is formed after concave parts in which luminescence portions are positioned are filled with a filling film, no crack is formed in the inorganic film. Since the inorganic film is made of a material having high gas tightness and heat conductivity (such as, diamond-like carbon or AlN), water and oxygen will hardly penetrate the luminescence portions, and heat of the luminescence portions will be conducted to the inorganic film, so that the luminescence portions do not reach high temperatures. Further, since a gap between first and second panels is filled with a resin film, the atmosphere does not enter from the outside. Because the luminescence portions are free from damage from water, oxygen and heat, the display device of the present invention has a prolonged life. | 01-21-2010 |
20100013387 | ORGANIC EL DEVICE AND AN ORGANIC EL DEVICE PRODUCING METHOD - A technology is provided, which obtains an organic EL device free from any reduction in the luminescent efficiency, even if an electrode layer is formed on a surface of a charge injection layer by a sputtering method. An organic EL device of the present invention includes a first charge injection layer, a first organic layer, and a second charge injection layer. The second charge injection layer is formed as a mixed layer in which a matrix organic material and a charge injectable metallic material are mixed. Even when the electrode layer is formed on a surface of this second charge injection layer by the sputtering method, the luminescent efficiency does not decrease. | 01-21-2010 |
20100015324 | VAPOR DEPOSITION SOURCE, VAPOR DEPOSITION APPARATUS, AND FILM-FORMING METHOD - A vapor deposition apparatus capable of forming an organic thin film having a good film quality is provided. In the vapor deposition apparatus of the present invention, a tray is disposed in an evaporation chamber, and a feed device feeds a vapor deposition material onto the tray. The tray is placed on a mass meter, which measures the mass of the vapor deposition material disposed on the tray, and a controller compares the measured value with a reference value in order to make the feed device feed the vapor deposition material in a necessary amount. Since the vapor deposition material is replenished when needed, the vapor deposition material does not run short during the film formation, or a large amount of the vapor deposition material is not heated for a long time. Thus, the vapor deposition material does not change in quality. | 01-21-2010 |
20100015361 | VAPOR DEPOSITION SOURCE, A VAPOR DEPOSITION APPARATUS AND A METHOD FOR FORMING AN ORGANIC THIN FILM - A vapor deposition apparatus capable of forming an organic thin film having a good film quality is provided. The vapor deposition apparatus of the present invention possesses an evaporating chamber and a vapor deposition case; and the vapor deposition case is connected with the evaporating chamber by a small hole. Since a vapor deposition material is fed into the evaporating chamber based on an amount necessary for each substrate, a large amount of the vapor deposition material is not heated for a long time period. Since the vapor deposition material is evaporated in the evaporating chamber, no liquid drops reach a substrate even during bumping. When the vapor deposition material is evaporated by irradiation with a laser beam, the vapor deposition material can be less chemically denatured. | 01-21-2010 |
20100170439 | VAPOR DEPOSITION APPARATUS - Contamination of organic EL device is prevented. After a colored layer of the first color is formed, a positioning device moves relatively a substrate and a mask inside the same vacuum chamber, and an opening of the mask is moved to a position above the region where a colored layer of the next color is to be formed. As a result, since the colored layers of two or more colors can be formed without changing the mask and the moving distance of the substrate during deposition becomes short, dust is not generated and contamination of the organic EL device is prevented. | 07-08-2010 |
20100170444 | ORGANIC MATERIAL VAPOR GENERATOR, FILM FORMING SOURCE, AND FILM FORMING APPARATUS - A thin film having a uniform film thickness is formed without increasing the film deposition rate. When an organic material is supplied from a supply unit to an evaporation chamber and evaporated on an evaporation surface of an evaporation device, a heating filter provided in advance is heated, and a carrier gas is made to flow therein to be heated and is introduced into the evaporation chamber. Organic material vapor thus produced and the carrier gas are mixed; and the mixed gas is introduced into a discharger. Whereas a molecular flow is formed in the discharger in a case that only the organic material vapor is introduced into the discharger, the pressure inside the discharger is raised by the carrier gas so that a viscous flow is formed. Thus, the mixed gas is filled in the discharger and uniformly discharged. It is preferable that the organic material be supplied by a small amount so as not to make the film deposition rate too high. | 07-08-2010 |
20100176391 | ORGANIC EL ELEMENT AND A METHOD FOR MANUFACTURING THE ORGANIC EL ELEMENT - A dense cathode electrode layer having a step coverage is to be formed on an electron injection layer. The electron injection layer in which fine particles of an electron injection material is dispersed in an organic thin film having an electron transport property is formed by vapor co-depositing the electron transport material and the electron injection material; and a cathode electrode layer made of an alloy layer of MgAg is formed by a sputtering method. Since lower portions of the fine particles of the electron injection material dispersed in the surface of the organic thin film are buried in the organic thin film, the electron injection particles are not peeled off even if sputtering particles collide with the electron injection particles, and the upper portions are in contact with the cathode electrode layer formed by sputtering particles. | 07-15-2010 |
20100178424 | METHOD OF MANUFACTURING ORGANIC THIN FILM - A thin film of a uniform film thickness is formed even without increasing the film deposition rate. The temperature of an evaporation device disposed in an evaporation chamber is raised in advance, and an organic material is dropped from a supply unit onto an evaporation surface of the evaporation device; and when the organic material is evaporated, a heated carrier gas is introduced into the evaporation chamber, and is mixed in the evaporation chamber and is introduced into a discharger. While a molecular flow is formed in the discharger in a case that only the organic material vapor is introduced into the discharger, the pressure within the discharger is raised due to the carrier gas, so that a viscous flow is formed and the mixed gas is filled in the discharger and is uniformly discharged. The organic material may be supplied by a small amount and the film deposition rate may not become too high. | 07-15-2010 |
20100209609 | VAPOR EMISSION DEVICE, ORGANIC THIN FILM VAPOR DEPOSITION APPARATUS, AND METHOD FOR DEPOSITING ORGANIC THIN FILM - A technology for organic material vapor deposition is provided, which can enhance efficiency in the evaporation material, prevent time-degradation of the evaporation material, and surely prevent any mask deformation by heat during vapor deposition. An organic material evaporation source including: a shower-plate shape emission part having a plurality of emission orifices arranged within a plane thereof; a feeding pipe provided inside the emission part for feeding the vapor of introduced organic evaporation material into the emission part via the blowout orifices by emitting the vapor toward the bottom part of the emission part; and a cooling means provided at least in a position on the emission orifice side of the emission part. The cooling means is formed by, for example, covering the entire emission part, and has vapor passage holes for allowing the organic evaporation material vapor to pass in positions corresponding to the emission orifice of the emission part. | 08-19-2010 |
20110008539 | VAPOR GENERATOR AND VAPOR DEPOSITION APPARATUS - An organic thin film having excellent film quality is formed. A vapor generator of the present invention has an evaporation chamber, a dispense head and a tank. A vapor deposition material is in the liquid state, stored in the tank, and fed to the dispense head from the tank. The dispense head dispenses the vapor deposition material fed inside thereof from a dispense orifice and disposes the vapor deposition material on a heating member inside the evaporation chamber. The dispense head accurately feeds the vapor deposition material by a required amount. Because only the required amount of the vapor deposition material is heated, an organic thin film excellent in film quality is formed without deterioration. | 01-13-2011 |
20110042208 | FILM FORMING SOURCE, VAPOR DEPOSITION APPARATUS, AND APPARATUS FOR MANUFACTURING AN ORGANIC EL ELEMENT - A film forming source capable of forming a thin film having a good film quality is provided. Since each switch valve becomes a closed state when a blocking member closely contacts a melted metal, a gas blocking performance in the closed state is high, and no dust is generated. When vapors of different vapor deposition materials are generated in a plurality of vapor generating units, the vapor generated in a selected vapor generating unit is not mixed with the vapor from another vapor deposition apparatus. Therefore, a vapor deposition material not to be film-formed is not mixed in, and contamination due to dust generation does not occur. Consequently, a thin film having good film quality can be obtained. | 02-24-2011 |
20110048563 | SWITCH VALVE - A switch valve having a long span of life is provided. The switch valve | 03-03-2011 |
20110069473 | Display device, apparatus for producing display device, and method for producing display device - A display device free from a deterioration in luminescence efficiency is provided. In the display device of the present invention, since an inorganic film is formed after concave parts in which luminescence portions are positioned are filled with a filling film, no crack is formed in the inorganic film. Since the inorganic film is made of a material having high gas tightness and heat conductivity (such as, diamond-like carbon or AlN), water and oxygen will hardly penetrate the luminescence portions, and heat of the luminescence portions will be conducted to the inorganic film, so that the luminescence portions do not reach high temperatures. Further, since a gap between first and second panels is filled with a resin film, the atmosphere does not enter from the outside. Because the luminescence portions are free from damage from water, oxygen and heat, the display device of the present invention has a prolonged life. | 03-24-2011 |