Patent application number | Description | Published |
20090032190 | Plasma processing apparatus of batch type - A plasma processing apparatus of the batch type includes a tubular process container having a closed end and an open end opposite to each other, and a process field for accommodating target substrates, the process container including a tubular insulating body. The apparatus further includes a holder configured to hold the target substrates at intervals, a loading mechanism configured to load and unload the holder into and from the process container, and a lid member connected to the loading mechanism and configured to airtightly close the open end. A first electrode is disposed at the closed end of the process container, and a second electrode is disposed at the lid member, to constitute a pair of parallel-plate electrodes. An RF power supply is connected to one of the first and second electrodes and configured to apply an RF power for plasma generation. | 02-05-2009 |
20090056877 | Plasma processing apparatus - A vertical plasma processing apparatus for performing a plasma process on a plurality of target objects together at a time includes an activation mechanism configured to turn a process gas into plasma. The activation mechanism includes a vertically elongated plasma generation box attached to a process container at a position corresponding to a process field to form a plasma generation area airtightly communicating with the process field, an ICP electrode provided to the plasma generation box, and an RF power supply connected to the electrode. | 03-05-2009 |
20090078201 | VERTICAL PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS - A vertical plasma processing apparatus for a semiconductor process includes an airtight auxiliary chamber defined by a casing having an insulative inner surface and integrated with a process container. The auxiliary chamber includes a plasma generation area extending over a length corresponding to a plurality of target substrates in a vertical direction. A partition plate having an insulative surface is located between a process field and the plasma generation. The partition plate includes a gas passage disposed over a length corresponding to the plurality of target substrates in a vertical direction. A process gas is exited while passing through the plasma generation area, and is then supplied through the gas passage to the process field. | 03-26-2009 |
20090181548 | VERTICAL PLASMA PROCESSING APPARATUS AND METHOD FOR SEMICONDUCTOR PROCESS - A vertical plasma processing apparatus for a semiconductor process includes a process container having a process field configured to accommodate a plurality of target substrates at intervals in a vertical direction, and a marginal space out of the process field. In processing the target substrates, a control section simultaneously performs supply of a process gas to the process field from a process gas supply circuit and supply of a blocking gas to the marginal space from a blocking gas supply circuit to inhibit the process gas from flowing into the marginal space. | 07-16-2009 |
20090184109 | Processing apparatus and process method - A processing apparatus subjects an object to be processed W to a heat process. The processing apparatus comprises: a processing vessel | 07-23-2009 |
20100186898 | PLASMA PROCESSING APPARATUS - A vertical plasma processing apparatus for performing a plasma process on a plurality of target objects together at a time includes an activation mechanism configured to turn a process gas into plasma. The activation mechanism includes a vertically elongated plasma generation box attached to a process container at a position corresponding to a process field and confining a plasma generation area airtightly communicating with the process field, an ICP electrode disposed outside the plasma generation box and extending in a longitudinal direction of the plasma generation box, and an RF power supply connected to the ICP electrode. The ICP electrode includes a separated portion separated from a wall surface of the plasma generation box by a predetermined distance. | 07-29-2010 |
20120103525 | PLASMA PROCESSING APPARATUS - A vertical plasma processing apparatus for performing a plasma process on a plurality of target objects together at a time includes an activation mechanism configured to turn a process gas into plasma. The activation mechanism includes a vertically elongated plasma generation box attached to a process container at a position corresponding to a process field to form a plasma generation area airtightly communicating with the process field, an ICP electrode provided to the plasma generation box, and an RF power supply connected to the electrode. | 05-03-2012 |
Patent application number | Description | Published |
20120299548 | Battery System - There is provided a battery system having a plurality of storage batteries capable of charging and discharging, and at least two or more of the storage batteries are connected in series. The battery system includes a connecting terminal capable of connecting a storage battery in parallel with any one of the other storage batteries. The battery system is capable of replacing the storage battery without restricting the configuration to be serial connection or parallel connection, while avoiding decline of the output power. | 11-29-2012 |
20130257440 | Relay Welding Detector of Battery System and Battery System Which Uses the Detector - Provided is a battery system which can ensure high safety even when the battery system is constructed using a mechanical relay. The battery system includes: a battery module where a plurality of battery cells are connected to each other in series; a switching circuit which is connected to the battery module in series; a control unit which controls the switching circuit; and a welding diagnosis circuit which diagnoses welding of the switching circuit, wherein the switching circuit is constituted by connecting a first relay switch and a second relay switch in series, and the welding diagnosis circuit includes a voltage measuring device which measures a voltage between the first relay switch and the second relay switch. | 10-03-2013 |
20130260191 | Battery Pack and Battery System - A battery pack in which an increase in size is restrained even if the battery pack includes plural battery modules with fuses is to be provided. In order to solve the foregoing problem, a battery pack according to the invention includes at least two or more battery modules, each battery module having a battery cell and a first fuse connected in series with the battery cell, the battery cell and the first fuse being housed in a casing. A positive electrode terminal provided in one battery module and a negative electrode terminal provided in another battery module are connected to each other via a second fuse. The second fuse has a higher rated voltage than the first fuse. | 10-03-2013 |
20130260196 | Battery System - Provided is a battery system which can easily identify a portion where a fuse is blown when the fuse is blown even in a large-scale battery system where a plurality of batteries are connected in series. The battery system includes a battery pack including a series circuit where a plurality of battery modules are connected to each other in series, the battery module including a fuse which is connected in series to a battery cell, and a light emitting diode which is connected in parallel to the fuse and has an anode thereof connected to a positive pole side of the battery cell; and a switching element which is connected in parallel to the series circuit. | 10-03-2013 |
20130260213 | Battery System - Provided is a battery system including battery modules each having a plurality of batteries and a battery module control unit for controlling the plurality of batteries, and battery pack control units for controlling a plurality of the battery module control units, wherein the plurality of the battery module control units are connected in serial by wires between modules, wherein each battery module control unit includes a first input/output terminal for inputting or outputting information to or from a battery module control unit of one adjacent battery module and a second input/output terminal for inputting or outputting information to or from a battery module control unit of another adjacent battery module, and wherein an input impedance of the first input/output terminal is smaller than an input impedance of the second input/output terminal. | 10-03-2013 |
20140117762 | Battery System - An objective of the invention is to deal with difference of the internal resistance of batteries. | 05-01-2014 |
20140301000 | Battery System and Ground Fault Detecting Device - A first battery pack ( | 10-09-2014 |