Patent application number | Description | Published |
20100043189 | Method for Manufacturing Surface Acoustic Wave Apparatus - Provided is a method for manufacturing a surface acoustic wave apparatus that can reduce degradation of electric characteristics and also reduce the number of manufacturing processes. The method for manufacturing a surface acoustic wave apparatus includes the steps of: forming an IDT electrode on an upper surface of a piezoelectric substrate, forming a frame member surrounding a formation area in which the IDT electrode is formed on the piezoelectric substrate, and mounting a film-shaped lid member on the upper surface of the frame member so as to be joined to the frame member so that a protective cover, used for covering the formation area and for providing a tightly-closed space between it and the formation area, is formed. | 02-25-2010 |
20100225202 | Acoustic Wave Device - Provided is a highly reliable acoustic wave device wherein deterioration of electrical characteristics due to deformation of a protective cover is suppressed. A method for manufacturing such acoustic wave device is also provided. The acoustic wave device has a piezoelectric substrate | 09-09-2010 |
20100244625 | Surface Acoustic Wave Device and Method for Production of Same - A method for fabricating a small and low-profile surface acoustic wave device which can be formed collectively by a wafer process without causing deterioration in characteristics is provided. The surface acoustic wave device has a piezoelectric substrate | 09-30-2010 |
20100277037 | Surface Acoustic Wave Device and Method of Manufacturing the Same - A surface acoustic wave device excellent in reliability and a method of manufacturing the same are provided. The surface acoustic wave device comprises a piezoelectric substrate ( | 11-04-2010 |
20110234055 | Acoustic Wave Device and Method for Manufacturing Same - An SAW device ( | 09-29-2011 |
20140368084 | Acoustic Wave Device and Method for Manufacturing Same - An SAW device ( | 12-18-2014 |
20150162893 | ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING SAME - An SAW device ( | 06-11-2015 |
20150236665 | METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE APPARATUS - Provided is a method for manufacturing a surface acoustic wave apparatus that can reduce degradation of electric characteristics and also reduce the number of manufacturing processes. The method for manufacturing a surface acoustic wave apparatus includes the steps of: forming an IDT electrode on an upper surface of a piezoelectric substrate, forming a frame member surrounding a formation area in which the IDT electrode is formed on the piezoelectric substrate, and mounting a film-shaped lid member on the upper surface of the frame member so as to be joined to the frame member so that a protective cover, used for covering the formation area and for providing a tightly-closed space between it and the formation area, is formed. | 08-20-2015 |