Patent application number | Description | Published |
20090044910 | Plasma Processing Apparatus - This application discloses a practical plasma processing apparatus capable of plasma confinement without plasma-density non-uniformity and electric power loss. The apparatus comprises a plasma shield that surrounds a plasma generation region to prevent plasma from diffusing. The shield has at least one opening. The apparatus comprises a diffusion prevention electrode for preventing the plasma from diffusing through the opening of the plasma shield. The surface of the plasma shield exposed to the plasma is made of insulator. The diffusion prevention electrode is located where electrons diffusing toward the opening or having diffused through the opening from the plasma flow into itself. | 02-19-2009 |
20100044340 | METHOD OF FABRICATING MAGNETIC DEVICE - A magnetic device is fabricated by etching a magnetic film in an atmosphere of plasma using a non-organic film as a mask. An atmosphere of plasma is generated by using at least one kind of gasifying compound selected from a gasifying compound group consisting of ethers, aldehydes, carboxylic acids, esters and diones; and by using a non-organic material mask, etching a magnetic film or diamagnetic film which includes at least one kind of metal selected from a metal group consisting of VIII group, IX group and X group elements in a periodic table. As a gas in the atmosphere of plasma, at least one kind of gas selected from a gas group consisting of oxygen, ozone, nitrogen, H | 02-25-2010 |
20110021000 | METHOD FOR MANUFACTURING RESISTANCE CHANGE ELEMENT - The present invention provides a method for manufacturing a resistance change element that can reduce occurrence of corrosion without increasing a substrate temperature. A laminate film that includes a high melting-point metal film and a metal oxide film, is etched using a mask under a plasma atmosphere formed using any one of a mixture gas formed by adding at least one gas selected from the group consisting of Ar, He, Xe, Ne, Kr, O | 01-27-2011 |
20110308544 | CLEANING METHOD OF PROCESSING CHAMBER OF MAGNETIC FILM, MANUFACTURING METHOD OF MAGNETIC DEVICE, AND SUBSTRATE TREATMENT APPARATUS - The present invention provides a manufacturing method of a multilayer film, a manufacturing method of a magnetoresistance effect device, and a substrate treatment apparatus, capable of shortening the time of a cleaning step. In one embodiment of the present invention, the inside of an etching apparatus is cleaned by plasma of a mixed gas containing H | 12-22-2011 |
Patent application number | Description | Published |
20080217289 | MAGNETORESISTANCE EFFECT DEVICE AND METHOD OF PRODUCTION THEREOF - A method of production of a magnetoresistance effect device is able to prevent or minimize a drop in the MR ratio and maintain the high performance of the magnetoresistance effect device even if forming an oxide layer as a surface-most layer constituting a protective layer by the oxidation process inevitably included in the process of production of microprocessing by dry etching performed in a vacuum. Two mask layers used for microprocessing are doubly piled up. This method of production of a magnetoresistivity effect device including a magnetic multilayer film including at least two magnetic layers includes a step of providing under a first mask material that is a nonorganic material a second mask material able to react with other atoms to form a conductive substance, and a device made according to the method. | 09-11-2008 |
20090078569 | INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS - An inductively coupled plasma processing apparatus according to the present invention prevents debris formed through a sputter etching operation from forming a film on an inner face of a side wall part | 03-26-2009 |
20090314740 | MAGNETORESISTIVE EFFECT ELEMENT MANUFACTURING METHOD AND MULTI-CHAMBER APPARATUS FOR MANUFACTURING MAGNETORESISTIVE EFFECT ELEMENT - A magnetoresistive effect element manufacturing method includes a first step of preparing a magnetoresistive effect element including a magnetic film and a substrate, a second step of etching a predetermined region of the magnetic film by a reactive ion etching method, and a third step of exposing the magnetic film having undergone the second step to a plasma at an ion current density of 4×10 | 12-24-2009 |
20140014269 | PROCESSING APPARATUS - A processing apparatus includes a substrate supporting unit that supports a substrate in a processing space in which the substrate is processed, a first partitioning member that includes a ceiling portion having an opening and partitions the processing space from an outer space, and a second partitioning member that is attached to the first partitioning member so as to close the opening and partition the processing space from the outer space together with the first partitioning member. The second partitioning member is attached to the first partitioning member so that the second partitioning member is removable from the first partitioning member by moving the second partitioning member toward a space which a lower surface of the ceiling portion faces. | 01-16-2014 |
20140020833 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus for processing a substrate with plasma including: a container including a first container member that forms a processing space in which the substrate is processed, and a second container member that forms a plasma generation space in which plasma is generated a gas introduction unit for introducing gas into the container; a plasma generation unit including an antenna that is provided in an external space of the container and configured to excite the gas in the plasma generation space with an electric field that is generated by a high-frequency voltage fed from a power supply; and a substrate holding unit that is capable of holding the substrate. A coating film that contains a semiconductor material is formed on a surface of the second container member that is arranged close to the antenna. | 01-23-2014 |
Patent application number | Description | Published |
20090204606 | FILE MANAGEMENT SYSTEM, FILE MANAGEMENT METHOD, AND STORAGE MEDIUM - A file management apparatus which makes it possible to cache a file registered in a file server from an initial stage of registration thereof. When a file is newly registered in the file server, the file server extracts the feature elements of the file, and searches for an registered file having a high degree of similarity to the file being registered in response to the current registration request. The search is performed based on the feature elements and an access log. Then, the file server searches for a domain from which access has been made to the file a not smaller number of times than a predetermined number of times, and copies and registers the newly registered file also in a cache server of the domain. | 08-13-2009 |
20090284791 | IMAGE PROCESSING SYSTEM, IMAGE PROCESSING APPARATUS AND METHOD FOR CONTROLLING THE SAME - An image processing system includes a first image processing apparatus and a plurality of other image processing apparatuses that are connected with each other via a network. The image processing system includes a sharing unit included in at least the plurality of other image processing apparatuses and configured to store information stored in a storage unit of the first image processing unit to share the information, a determination unit configured to determine an image processing apparatus to use the information to be shared from the plurality of other image processing apparatuses when the first image processing apparatus is not available, and an alternative operation unit configured to perform an alternative operation for a function of the first image processing apparatus using the information shared by the sharing unit of the image processing apparatus determined by the determination unit. | 11-19-2009 |
20110279871 | IMAGE FORMING APPARATUS AND METHOD OF CONTROLLING THE APPARATUS, AND PROGRAM - It is determined whether or not there is an available area to store composite image data, in addition to inputted image data, in a storage device for storage of image data. When it is determined that there is an available area, the composite image data obtained by combining is stored in addition to the input image data. When it is determined that there is no available area, the input image data is stored into the storage device. Upon image formation, when composite image data is stored in the storage device, an image is formed in accordance with the composite image data. When it is determined that composite image data is not stored, an image is formed by generating composite image data based on image data read from the storage device. | 11-17-2011 |
20120287444 | IMAGE FORMING APPARATUS, CONTROL METHOD THEREOF, AND STORAGE MEDIUM - A document image is read at as high resolution as possible if printing is being executed. A control method for controlling an image forming apparatus includes reading a document image conveyed by a document feeding unit with a reading unit, printing the read document image on a sheet with a printing unit, and performing control so that, when the printing unit is not executing printing, the document image is read by the reading unit at a first resolution, and when the printing unit is executing printing, the document image is read by the reading unit at a second resolution that is higher than the first resolution. | 11-15-2012 |
20140140747 | PRINTING APPARATUS, METHOD FOR CONTROLLING PRINTING APPARATUS, INFORMATION PROCESSING APPARATUS, METHOD FOR CONTROLLING INFORMATION PROCESSING APPARATUS, AND STORAGE MEDIUM - A printing apparatus includes an input unit, a specifying unit, a storing unit, a printing unit, a receiving unit, and a control unit. The specifying unit specifies a number of sheets for printing image data pieces of a plurality of pages. The receiving unit receives a binding process execution instruction. When the sheets are printed in the reverse order and the printed sheets are bound, the printing unit had started the reverse order printing after all the image data pieces were stored. When (i) the sheets are to be printed in the reverse order and the binding process is set to be executed and (ii) it is determined, while the storing unit is storing the image data pieces, that the specified number of sheets exceeds the number of sheets that can be bound, the printing unit starts printing in the page order before all the image data pieces are stored. | 05-22-2014 |
20140348519 | PRINTING APPARATUS, METHOD FOR CONTROLLING PRINTING APPARATUS, AND STORAGE MEDIUM - In a printing apparatus, registration of a particular type of sheet in a particular sheet storage unit can prevent reduction in convenience. A printing apparatus configured to feed a sheet from any one of a plurality of sheet storage units includes a setting unit configured to set a sheet storage unit included in the plurality of sheet storage units as a particular sheet storage unit to be used when a sheet storage unit to be used for a job has not been specified, a specifying unit configured to specify a type of sheet to be stored in a sheet storage unit included in the plurality of sheet storage units, and a control unit configured to perform control so that the specifying unit does not specify a particular type in the sheet storage unit set by the setting unit. | 11-27-2014 |
20150070729 | IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, AND PROGRAM - An image processing apparatus includes a determination unit configured to determine whether image data obtained by reading an input original is a blank sheet, a designation unit configured to designate a page position of the image data to designate a page position in which an insertion sheet is inserted in a printed matter obtained as a result of printing the image data, and a control unit configured to perform control so that image data printed in a sheet of a page next to an insertion sheet inserted in the page position designated by the designation unit in a case where blank-sheet skip printing is instructed, and image data printed in a sheet of a page next to the insertion sheet inserted in the page position designated by the designation unit in a case where the blank-sheet skip printing is not instructed, are the same image data. | 03-12-2015 |