Tobe, JP
Akiko Tobe, Kanagawa JP
Patent application number | Description | Published |
---|---|---|
20110265099 | EVENT QUEUE MANAGING DEVICE AND EVENT QUEUE MANAGING METHOD - An event queue managing module that prevents unnecessary events from continuously executing applications when an application execution environment resumes from a suspended state, and including: a queue managing unit for storing event objects reported from an event detector of a basic software unit into an event queue in order of occurrence of events and managing their queue; an event classification detection unit for detecting the event classification and parameter of the event objects whose queue is managed by the queue managing unit; a stop state detection unit for detecting a stop state of an application execution environment; and an event deletion unit for deleting an unnecessary event from the event objects stored in the event queue when the application execution environment is in the stop state. | 10-27-2011 |
20110283291 | MOBILE DEVICE AND APPLICATION SWITCHING METHOD - An object is to switch executions of applications appropriately from one to another when a plurality of applications use a limited resource. A mobile device ( | 11-17-2011 |
Akiko Tobe, Yokosuka-Shi JP
Patent application number | Description | Published |
---|---|---|
20100103034 | POSITIONING CONTROL DEVICE AND POSITIONING CONTROL METHOD - A positioning control device includes a GPS hardware control unit that makes GPS determine a current location at different positioning accuracies, and a positioning request management unit that makes the GPS hardware control unit carry out positioning in response to a positioning request from an application according to a positioning accuracy specified in the positioning request, acquires the positioning result, and returns the acquired positioning result to the application of the request origin. In a case where a positioning accuracy of a new positioning request is equal to or less than a positioning accuracy of a latest positioning result, the positioning request management unit reuses the latest positioning result and returns the latest positioning result in response to the new positioning request. | 04-29-2010 |
20100107216 | INFORMATION PROCESSING DEVICE AND MEMORY MANAGEMENT METHOD - It is an object of the present invention to provide an information processing device and a memory management method that enable execution of memory management processing for simultaneously starting up two types of applications. During execution of an application in the form of a Java application, the application starts up another an application in the form of Flash data, and then a native software in the form of a Flash Player causes a memory management unit to secures a prescribed memory area from a memory area for the native software. A native software then starts up the other application using the secured memory area. | 04-29-2010 |
Akiyoshi Tobe, Oamishirasato JP
Patent application number | Description | Published |
---|---|---|
20120320310 | LIGHTING DEVICE, DISPLAY DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE - A lighting device includes a light source | 12-20-2012 |
Akiyoshi Tobe, Mobara JP
Patent application number | Description | Published |
---|---|---|
20090009688 | Liquid Crystal Display Device - The present invention provides a liquid crystal display device which can largely enhance a property of focusing light from a backlight. The backlight arranged on a back surface of a liquid crystal panel includes a light guide plate, a light source, a first asymmetrical prism sheet, and a second asymmetrical prism sheet. A reflection surface having an inclination of 2° or less for guiding light from the light source toward the liquid crystal display panel is formed on a back surface of the light guide plate. The first asymmetrical prism sheet and the second asymmetrical prism sheet respectively include projecting portions which extend in the arrangement direction of the light source and are arranged in parallel to each other in the direction which intersects the arrangement direction of the light source. | 01-08-2009 |
20090059621 | LIQUID CRYSTAL DISPLAY DEVICE - In a backlight which arranges light emitting diodes on a side surface of a light guide plate, irregularities of radiation light from the backlight can be decreased. In a liquid crystal display device having a backlight which radiates light to a liquid crystal panel, LEDs which constitute a light emitting element are mounted on a light guide plate formed on the backlight, and teardrop-shaped lenses are formed on a light radiation surface of the light guide plate. By changing the advancing directions of lights radiated from the light emitting element using the teardrop-shaped lenses, it is possible to decrease irregularities of a planar light source by scattering the radiation lights from the light guide plate. | 03-05-2009 |
20090122415 | Display device - The present invention provides a display device having a large-area display region which is capable of performing an image display of high quality by making, even when two display panels abut on each other, an abutting portion becomes inconspicuous. Two optical path changing lenses LPL | 05-14-2009 |
20090284688 | LIQUID CRYSTAL DISPLAY DEVICE - A liquid crystal display device which can make the surface brightness of an edge-light-type backlight uniform is provided. The liquid crystal display device includes a liquid crystal display panel and a backlight which radiates light to the liquid crystal display panel. The backlight includes a light guide plate which is arranged on a back side of the liquid crystal display panel, a light source arranged on an outer peripheral portion of a first main surface of the light guide plate which faces the liquid crystal display panel in an opposed manner, and a reflection sheet which is arranged on a back side of the light guide plate as viewed from the liquid crystal display panel. The light guide plate is made of a transparent resin having a refractive index of 1.53 or less. On a surface of the light guide plate opposite to the first main surface, a second main surface which is substantially parallel to the first main surface and a plurality of inclined surfaces which are inclined at a preset angle with respect to the second main surface are formed. An angle of the inclined surface positioned near a position at which light from the light source is incident and an angle of the inclined surface positioned remote from the position at which the light from the light source from the light source is incident differ from each other. | 11-19-2009 |
20100182542 | LIQUID CRYSTAL DISPLAY DEVICE - Provided is a liquid crystal display device including: an, optical switching member; a light guide panel; and a light source, the light guide panel including, on at least one of a front surface and a back surface thereof, a plurality of surface structures including: a first raised surface extending outward being formed as a free surface; a first light reflection surface entering inside from the first raised surface; a second light reflection surface extending outside from the first light reflection surface; and a second raised surface which continues from the second light reflection surface and is formed as a free surface, whereby a liquid crystal display device may be obtained, which includes a thin light guide panel with a thickness of, for example, 1 mm or less. | 07-22-2010 |
20100328581 | Liquid Crystal Display Device - A liquid crystal display device includes a display panel, a backlight which radiates light to the display panel, a light emitting element which is mounted on the backlight, and a light guide plate on which light from the light emitting element is incident. The light guide plate has an upper surface and a bottom surface. The bottom surface has grooves formed therein delimited by at least one surface which extends at a slant with respect to the bottom surface. A reflection sheet is provided which reflects the light radiated from the bottom surface. The grooves are formed to produce a first light which is reflected on the grooves and a second light which is radiated from the grooves and is reflected on the reflection sheet, and an asymmetric prism sheet is arranged on the light guide plate. | 12-30-2010 |
20120195064 | DISPLAY DEVICE - Provided is a display device including: a light guide plate arranged so that an edge surface thereof is opposed to a light source, the light guide plate being configured to internally reflect light entering from the edge surface to cause planar light emission from a front surface of the light guide plate; and a reflective sheet arranged so as to be opposed to a rear surface of the light guide plate. Irregularities are formed on the front surface. The irregularities are formed to have a shape of a combination of first convex portions and second convex portions, each of the first convex portions including a first ridge line which continuously extends along a first direction corresponding to a light traveling direction, each of the second convex portions including a second ridge line which continuously extends along a second direction intersecting the first direction. | 08-02-2012 |
Hayato Tobe, Tokyo JP
Patent application number | Description | Published |
---|---|---|
20150247793 | SPECTROPHOTOMETER - A spectrophotometer includes: a sample-chamber lid capable of opening and closing an opening portion of a sample chamber for setting a sample and a reference sample; and sample-chamber lid opening-closing detecting means for detecting an opening-closing state of the sample-chamber lid, and the spectrophotometer is capable of controlling a measurement of a xenon flash tube as a light source, a spectroscope, a detector, an amplifier, an AD converter, a processor, a storage device, and a data display part. In the spectrophotometer, the light source is turned on after a state of the lid changing from an opening state to a closing state is detected in a sample-setting instruction state by the sample-chamber lid opening-closing detecting means; absorbancy, transmissivity, reflectivity, a sample-side energy value, or a reference-side energy value is measured; and a measurement result is displayed on the data display part. | 09-03-2015 |
Hayato Tobe, Mito JP
Patent application number | Description | Published |
---|---|---|
20120307240 | SPECTROPHOTOMETER AND METHOD FOR DETERMINING PERFORMANCE THEREOF - Provided are a spectrophotometer using a xenon flash lamp and which can compare with data stored in the past, and a method for determining the performance of the spectrophotometer. In normal times, spectroscopic analysis is performed by employing a bundle of light rays emitted from the xenon flash lamp, spectrally separating the bundle of light rays into arbitrarily-defined wavelengths with a spectroscope through a concave mirror, and detecting the bundle of light rays having passed through a sample with a photodetector. When the performance is to be determined, a low-pressure mercury lamp is arranged in a path of the bundle of light rays between the xenon flash lamp and the spectroscope, a light-shield plate which constitutes a shutter mechanism is operated to shield the light and allow the light to pass through, and the intensity of the light is detected, to thereby determine the “wavelength accuracy” or the “resolution” by employing the bright-line spectrum of the low-pressure mercury lamp. Thus, spectroscopic analysis can be performed while allowing to compare with data stored in the past to be made. | 12-06-2012 |
Junko Tobe, Tsukubamirai-Shi JP
Patent application number | Description | Published |
---|---|---|
20100136204 | METHOD FOR PRODUCTION OF WATER-SOLUBLE POLYSACCHARIDE - Disclosed is a novel water-soluble soybean polysaccharide which is produced by imparting a function of stabilizing a protein in a pH range around the isoelectric point of the protein to a water-soluble soybean polysaccharide. Also disclosed is a novel dispersion stabilizer which enables to stabilize the dispersion of a protein in a pH range around the isoelectric point of the protein. Further, disclosed is a acidic protein food/beverage comprising the dispersion stabilizer. A crosslinked product of a water-soluble soybean polysaccharide extracted from a soybean seed raw material can improve the dispersion stability of a milk protein in a pH range around the isoelectric point of the protein. By using the water-soluble soybean polysaccharide, an acidic protein food/beverage having a low viscosity can be produced. | 06-03-2010 |
20140134310 | PECTIC POLYSACCHARIDE AND METHOD FOR PRODUCING SAME - The present invention provides a pectic polysaccharide, wherein a degree of methyl esterification of constituent galacturonic acid is 45% or less, a structure of a single molecule observed with an atomic force microscope comprises a star structure, and a diameter of the molecule is more than 100 nm and equal to or less than 200 nm. | 05-15-2014 |
20150017316 | METHOD FOR PRODUCING CARROT PECTIN - Disclosed is a method for producing carrot pectin wherein carrot is extracted with water at a temperature of below 100° C. under conditions with a pH of between 2 and 5, inclusive. The carrot pectin obtained by this production method exhibits excellent dispersion stability for proteins in a wide pH range. | 01-15-2015 |
Junko Tobe, Tsukubamirai-Shi, Ibaraki JP
Patent application number | Description | Published |
---|---|---|
20150342200 | Water Soluble Pea Polysaccharide-Containing Physical Property Improvement Agent for Wheat-Based Food - In the present invention, it has been an object to obtain a physical property improvement agent for improving the various physical properties of wheat-based food such as bread, wheat-flour baked sweets, and noodles. By using a water-soluble pea polysaccharide, it is possible to obtain a physical property-improving effect in wheat-based food such as bread, wheat-flour baked sweets, and noodles. In bread and wheat-flour baked sweets, while changes in the mouthfeel caused by aging of starch are suppressed, the workability is enhanced by improving the spreadability of the dough, furthermore, the volume after baking is increased, and mouthfeel with good crispness and meltability in the mouth is obtained. In noodles, it is possible to suppress aging when braised noodles are stored at room temperature or with refrigerating. | 12-03-2015 |
Katsutoshi Tobe, Chiba JP
Patent application number | Description | Published |
---|---|---|
20100278969 | PROCESS FOR PRODUCING SOY SAUCE USING GELATINIZED BROWN RICE AS STARCH MATERIAL - It is an object of the present invention to provide soy sauce characterized by a low turbidity in the raw soy sauce state, reduced formation of pasteurized sediment in the soy sauce pasteurization step, and a light color. The present invention relates to soy sauce produced by koji production, fermentation and aging with the use of a protein material and a starch material as starting materials, wherein the starch material is gelatinized brown rice having a moisture content of 1% (w/w) or less, a degree of gelatinization of 40% or more, and no burnt odor. | 11-04-2010 |
Kumiko Tobe, Tokyo JP
Patent application number | Description | Published |
---|---|---|
20110151554 | METHOD FOR CULTURING AND SUBCULTURING PRIMATE EMBRYONIC STEM CELL, AS WELL AS METHOD FOR INDUCING DIFFERENTIATION THEREOF - The present invention provides a method for subculturing primate embryonic stem cells, and a method for inducing differentiation of the same cell into a vascular endothelial cell and a blood cell. The present invention provides a method comprising culturing primate embryonic stem cells in a medium containing a protein component without using feeder cells and cytokines in a container coated with an extracellular matrix, detaching colonies of the resulting embryonic stem cells in the presence of a cytodetachment agent, and plating the colonies in the similar medium, and a method comprising culturing primate embryonic stem cells in a serum-containing or not containing medium in the presence of cytokine, adhesion-culturing the resulting embryoid body or embroyid body-analogous cellular aggregate in the presence of a cytokine to obtain specific precursor cells, and separating non-adherent cells and adherent cells from the specific precursor cells to obtain blood cells and vascular endothelial precursor cells. | 06-23-2011 |
Kuniharu Tobe, Tokyo JP
Patent application number | Description | Published |
---|---|---|
20120252343 | AIR INTAKE DUCT AND METHOD FOR PRODUCING SAME - An air intake duct | 10-04-2012 |
20130152520 | LATCH PROTECTION STRUCTURE FOR VEHICLE-MOUNTED OBJECT | 06-20-2013 |
Masanori Tobe, Osaka-Shi JP
Patent application number | Description | Published |
---|---|---|
20120178743 | NOVEL ADENINE COMPOUND AND USE THEREOF - An antiallergic agent for topical administration containing an adenine compound of general formula (1): | 07-12-2012 |
Masanori Tobe, Suita-Shi JP
Patent application number | Description | Published |
---|---|---|
20140179670 | URACIL DERIVATIVE AND USE THEREOF FOR MEDICAL PURPOSES - The present invention provides: an uracil derivative represented by general formula (I) or a physiologically acceptable salt thereof (in the formula, R | 06-26-2014 |
Ryuzo Tobe, Gunma JP
Patent application number | Description | Published |
---|---|---|
20090325280 | CULTURE OBSERVATION SYSTEM - There is provided a culture observation system by which even a culture other than an observation target culture can be cultured and observation can be properly performed by a microscope during culturing of the culture. A culture observation system S includes a culturing cabinet | 12-31-2009 |
Ryuzo Tobe, Osaka JP
Patent application number | Description | Published |
---|---|---|
20100326109 | REFRIGERATING APPARATUS - A refrigerating apparatus for keeping an inside of a storage at a predetermined low-temperature state includes first and second refrigerant circuits including compressors, condensers, decompressors, and evaporators, connected circularly with pipings to form refrigerating cycles, the circuit having a first or second refrigerant sealed therein as a working refrigerant, a first sensor which detects a temperature of a cascade condenser constituted by integrating the evaporator of the first refrigerant circuit and the condenser of the second refrigerant circuit in a heat exchangeable manner, first and second controllers which control operation performances of the first and second compressors in a variable manner based on first and second sensor detected temperatures in order that the first and second sensor detected temperatures are first and second temperatures, respectively, and a second sensor which detects a temperature inside the storage. | 12-30-2010 |
20110030402 | REFRIGERATING APPARATUS - A refrigerating apparatus includes first and second refrigerant circuits including respective first and second compressors, condensers, pressure reducers, and evaporators, connected circularly with first and second refrigerant pipes, respectively, refrigerants discharged from the first and second compressors being respectively condensed at the first and second condensers and thereafter respectively evaporated at the first and second evaporators to acquire a cooling effect; a temperature sensor that detects a temperature of an internal portion of a cold storage cabinet, the first and second evaporators being disposed to cool the internal portion simultaneously; and a first control device that controls the first and second compressors such that both of them are operated each time a temperature detected by the temperature sensor reaches a first temperature, and the first and second compressors are alternately operated each time a temperature detected by the temperature sensor reaches a second temperature lower than the first temperature. | 02-10-2011 |
20140060098 | REFRIGERATING APPARATUS - A refrigerating apparatus includes first and second refrigerant circuits including respective first and second compressors, condensers, pressure reducers, and evaporators, connected circularly with first and second refrigerant pipes, respectively, refrigerants discharged from the first and second compressors being respectively condensed at the first and second condensers and thereafter respectively evaporated at the first and second evaporators to acquire a cooling effect; a temperature sensor that detects a temperature of an internal portion of a cold storage cabinet, the first and second evaporators being disposed to cool the internal portion simultaneously; and a first control device that controls the first and second compressors such that the first compressor and the second compressor start being alternately operated each time a temperature detected by the temperature sensor reaches a first temperature, and are continuously operated until the detected temperature reaches a second temperature lower than the first temperature. | 03-06-2014 |
Satoshi Tobe, Gunma JP
Patent application number | Description | Published |
---|---|---|
20100171195 | THIN FILM SILICON WAFER AND METHOD FOR MANUFACTURING THE SAME - Provided are a thin film silicon wafer having high gettering capability, a manufacturing method therefor, a multi-layered silicon wafer formed by laminating the thin film silicon wafers, and a manufacturing method therefor. The thin film silicon wafer is manufactured by: forming one or more gettering layers immediately below a device layer which is formed in a vicinity of a front surface of a semiconductor silicon wafer; fabricating a device in the device layer of the semiconductor silicon wafer; and after the device has been fabricated, removing part of the semiconductor silicon wafer from a rear surface thereof to immediately below the gettering layers so as to leave at least one of the gettering layers in place. As a result, the thin film silicon wafer is allowed to have gettering capability even after having been reduced in thickness to be in a thin film form. | 07-08-2010 |
Satoshi Tobe, Annaka JP
Patent application number | Description | Published |
---|---|---|
20110033958 | METHOD FOR FORMING OXIDE FILM ON SILICON WAFER - The present invention provides a method for forming an oxide film on a silicon wafer, comprising: measuring surface roughness of the silicon wafer and/or crystallinity in a surface layer portion of the silicon wafer in advance; adjusting oxidizing conditions for the silicon wafer based on the measurement value; and forming the oxide film on the silicon wafer under the adjusted oxidizing conditions. As a result, there can be provided the method for forming an oxide film by which the oxidizing conditions can be adjusted based on a state of the surface and/or the surface layer of the silicon wafer before forming the oxide film and even an ultrathin oxide film can be thereby accurately formed. | 02-10-2011 |
Sumito Tobe, Tokyo JP
Patent application number | Description | Published |
---|---|---|
20140122051 | CONVERSION METHOD, PROGRAM AND SYSTEM OF POWER SYSTEM DATA MODELS - A power system data model conversion method, a power system data model conversion system and a power system data model conversion program which are to perform a fast power system analysis and used for a power system analysis capable of reducing inconsistency with another information system, wherein all instances used for the power system analysis are read out from a CIM database server which is commonly used on a power system information system, and a connected relation between instances is constructed while performing recursive retrieval. And, conversion processing of the data model is performed to integrate information necessary for the power system analysis and dispersed to extend over the plural classes of a CIM data model into one class. | 05-01-2014 |
Takahiko Tobe, Tokyo JP
Patent application number | Description | Published |
---|---|---|
20090203741 | CRYSTALS OF BENZOXADIAZOLE DERIVATIVE - Object Provided are β-form crystal, γ-form crystal, and α-form crystal of a benzoxadiazole derivative, wherein a uniform crystal having sufficient qualities can be obtained with high reproducibility, and they can be anytime supplied as crystals of drug substance for use in producing pharmaceuticals, are particularly suitable for mass synthesis in industrial production, hardly exhibit hygroscopicity and have particularly excellent photo-resistance. | 08-13-2009 |
20100267695 | FUSED INDANE COMPOUND - [Problems] To provide a compound which is useful as an NMDA receptor antagonist. | 10-21-2010 |
20140315963 | HETEROCYCLIC ACETAMIDE COMPOUND - [Problem] A compound which is useful as a dopamine D1 receptor positive allosteric modulator (D1 PAM) is provided. | 10-23-2014 |
20150045402 | HETEROCYCLIC ACETAMIDE COMPOUND - A compound which is useful as a dopamine D1 receptor positive allosteric modulator (D1 PAM) is provided. The present inventors have studied a compound which has a dopamine D1 receptor positive allosteric modulating activity and is useful as an active ingredient of a pharmaceutical composition for preventing and/or treating cognitive impairment, negative symptoms of schizophrenia, Parkinson's disease, Alzheimer's disease, Huntington's disease, drug addictions, or the like, and they have thus found that a heterocyclic acetamide compound has a dopamine D1 receptor positive allosteric modulating activity, thereby completing the present invention. The heterocyclic acetamide compound of the present invention has a dopamine D1 receptor positive allosteric modulating activity and can be used as an agent for preventing and/or treating cognitive impairment, negative symptoms of schizophrenia, Parkinson's disease, Alzheimer's disease, Huntington's disease, drug addictions, or the like. | 02-12-2015 |
Takahisa Tobe, Isesaki-Shi JP
Patent application number | Description | Published |
---|---|---|
20140105762 | Suction Muffler For Compressor - To prevent oil from being drawn into a suction muffler of a compressor, a suction muffler | 04-17-2014 |
Takeo Tobe, Tokyo JP
Patent application number | Description | Published |
---|---|---|
20100278397 | Authentication Device And Authentication Method - An authentication can be carried out with high accuracy even when there is a change in an amount of incident light, the air temperature, the body temperature, or a manner to place a finger on a scanner. | 11-04-2010 |
Tatsuya Tobe, Saitama JP
Patent application number | Description | Published |
---|---|---|
20130120409 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND PROGRAM - An information processing apparatus includes a first graphics chip having a first drawing processing capacity and being capable of producing a first image signal; a second graphics chip having a second drawing processing capacity higher than the first drawing processing capacity and being capable of producing a second image signal; an output changeover section capable of selectively outputting one of the first or second image signals; an inputting section configured to input a user operation to select one of the first graphics chip or the second graphics chip; and a control section configured to control the output of the output changeover section in response to the inputted user operation. | 05-16-2013 |
Yasuhiro Tobe, Tokyo JP
Patent application number | Description | Published |
---|---|---|
20090246941 | DEPOSITION APPARATUS, DEPOSITION SYSTEM AND DEPOSITION METHOD - A deposition system is provided to avoid cross contamination in each layer formed in a manufacturing process of organic electroluminescent device, etc., and also provided to reduce footprint. Provided is an apparatus | 10-01-2009 |
20100043712 | SUBSTRATE PROCESSING APPARATUS - A processing apparatus for processing a substrate G includes a processing chamber for processing the substrate; a depressurizing mechanism reducing an internal pressure of the processing chamber; and a transfer mechanism disposed in the processing chamber to transfer the substrate, wherein the transfer mechanism includes: a guide member; a stage for holding the substrate; a driving member for moving the stage; and a movable member supporting the stage and moving along the guide member. The guide member and the movable member are maintained so as not to contact each other by a repulsive force of magnets. | 02-25-2010 |
Yasuhiro Tobe, Miyagi JP
Patent application number | Description | Published |
---|---|---|
20100089871 | PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE MEDIUM - Provided is a plasma processing apparatus including a processing vessel accommodating a target object; a microwave generator configured to generate a microwave; a waveguide configured to induce the microwave to the processing vessel; a planar antenna having a plurality of microwave radiation holes through which the microwave induced to the waveguide is radiated toward the processing vessel; a microwave transmission plate configured to serve as a ceiling wall of the processing vessel and transmit the microwave passed from the microwave radiation holes of the planar antenna; a processing gas inlet unit configured to introduce a processing gas into the processing vessel; and a magnetic field generating unit positioned above the planar antenna and configured to generate a magnetic field within the processing vessel and control a property of plasma of the processing gas by the magnetic field, the plasma being generated by the microwave within the processing vessel. | 04-15-2010 |
20110076119 | VACUUM PROCESSING APPARATUS - An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section ( | 03-31-2011 |
20110240223 | SUBSTRATE PROCESSING SYSTEM - There is provided a substrate processing system having high maintainability by widening a gap between various processing apparatuses connected with side surfaces of transfer modules and capable of achieving sufficient productivity by avoiding deterioration in throughput. The substrate processing system for manufacturing an organic EL device by forming a multiple number of layers including, e.g., an organic layer on a substrate includes at least one transfer module configured to be evacuable and arranged along a straight transfer route. Within the transfer module, a multiple number of loading/unloading areas for loading/unloading the substrate with respect to a processing apparatus and at least one stocking area positioned between the loading/unloading areas are alternately arranged along the transfer route in series, and the processing apparatus is connected with a side surface of the transfer module at a position facing each of the loading/unloading areas. | 10-06-2011 |
Yasuhiro Tobe, Sendai City JP
Patent application number | Description | Published |
---|---|---|
20100032095 | SUBSTRATE PROCESSING APPARATUS - The processing device includes a processing chamber which receives the substrate, a depressurization mechanism which depressurizes the interior of the processing chamber, a stage which holds the substrate and is arranged in the processing chamber, a linear movement mechanism which linearly moves the stage and is arranged in the processing chamber, and a parallel link mechanism which prevents the rotation of the stage and is arranged in the processing chamber. A space portion isolated from the internal atmosphere of the processing chamber is formed in the stage. An air communication path that allows the space portion to communicate with the external atmosphere of the processing chamber is formed in the parallel link mechanism. | 02-11-2010 |