Patent application number | Description | Published |
20130192388 | Flow Sensor and Manufacturing Method of the Same and Flow Sensor Module and Manufacturing Method of the Same - Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS | 08-01-2013 |
20140109691 | Flow Sensor and Manufacturing Method of the Same and Flow Sensor Module and Manufacturing Method of the Same - Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS | 04-24-2014 |
20140190273 | Flow Sensor and Manufacturing Method of the Same and Flow Sensor Module and Manufacturing Method of the Same - Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS | 07-10-2014 |
20140352424 | AIRFLOW MEASURING APPARATUS - Airflow measuring apparatus compring: sub-passage that takes in part of flow of fluid flowing through an intake pipe; sensor element that is disposed in the sub-passage to measure the flow of fluid; a circuit part that converts the flow of fluid detected by the sensor element into an electric signal; connector part connected to the circuit part to output a signal externally; and casing that supports the sensor element and the circuit part, the sensor element being disposed in the intake pipe. The sensor element includes a cavity disposed at a semiconductor substrate, a diaphragm including a thin film part that covers the cavity. The sensor element on a lead frame have surfaces that are mold-packaged with resin so that a diaphragm of the sensor element and part of the lead frame are exposed. One hole is disposed at the lead frame for communication between the cavity and exterior. | 12-04-2014 |
20150107353 | Flow Sensor and Method for Manufacturing the Same - A technique capable of suppressing performance variation of every flow sensor and achieving performance improvement is provided. For example, in an arbitrary cross-sectional surface in parallel to a moving direction of a gas flowing on an exposed flow detecting unit FDU which is formed in a semiconductor chip CHP | 04-23-2015 |
20150122010 | Thermal Flow Meter - To obtain a thermal flow meter capable of alleviating stress in an axial direction that acts on a lead according to a temperature difference between a proximal end side and a leading end portion side of a measuring portion. An air flow sensing portion | 05-07-2015 |
20150122011 | Thermal Flow Meter - Provided is a thermal flow meter through which a measurement with high accuracy and has a discharge function. In a thermal flow meter | 05-07-2015 |
20150122012 | Thermal Flow Meter - The present invention has been made to improve measurement accuracy of a thermal flow meter. In the thermal flowmeter according to the invention, a circuit package ( | 05-07-2015 |
20150122050 | FLOW SENSOR - Technology capable of suppressing performance variation for each flow sensor and enhancing the performance is provided. According to a flow sensor of an embodiment, a local cavity CAV is provided on an upper surface SUR (MR) of a resin MR to generate an eddying current in a counterclockwise direction, so that an advancing direction of gas (air) that collided to an exposed side surface of a semiconductor chip CHP | 05-07-2015 |