Patent application number | Description | Published |
20090065144 | PROTECTIVE TAPE SEPARATION METHOD AND PROTECTIVE TAPE SEPARATION APPARATUS - A surface height of a protective tape joined to a wafer mounted and held on a separation table is detected, an operation amount of approaching a joining member to the protective tape until a separation tape wound around the joining member contacts the protective tape based on detected information, the joining member is operation controlled to approach the protective tape based on the calculated operation amount, the joining member and the separation table are relatively moved along a direction of a surface of the protective tape in a state of maintaining the height of the joining member to join the separation tape to the protective tape, and the separation tape is separated from the surface of the wafer integrally with the protective tape. | 03-12-2009 |
20090090451 | PROTECTIVE TAPE SEPARATION METHOD AND APPARATUS USING THE SAME - A surface height of a protective tape joined to a wafer mounted and held on a separation table is detected, a lowering operation distance of a needle is calculated based on such detected information, and a lowering operation amount for approaching a joining member to the protective tape until the separation tape winded around the joining member contacts the protective tape is calculated. A separating site is formed in the protective tape and the protective tape is separated while controlling a height of each member based on the calculated lowering operation amount. | 04-09-2009 |
20090211710 | ADHESIVE TAPE JOINING APPARATUS - An adhesive tape joining apparatus of this invention adopts an inverted âTâ-shaped layout configured with a rectangular section that extends laterally when being viewed in a plane and a protrusion section that is coupled on a center of the rectangular section. An adhesive tape joining part is disposed in the protrusion section and joins an adhesive tape to a ring frame and a wafer. A transport mechanism is disposed in the rectangular section and transports the wafer, the ring frame, and the wafer held by the ring frame. An electronic substrate processing unit is disposed in at least one of two regions adjoining to the rectangular section with the protrusion section being interposed therebetween, and is coupled to the transport mechanism. | 08-27-2009 |
20110045234 | METHOD AND CONFIGURATION FOR REINFORCING PLATE MATERIAL - A joining roller rolls while pressing on a separator on a surface of a double-faced adhesive tape with through holes in rectangular shapes regularly formed therein in a longitudinal tape direction, and the double-faced adhesive tape is joined to a building panel. Thereafter, the separator is separated and the reinforcing member is joined to an adhesive layer of the double-faced adhesive tape while being pressed with the reinforcing member being kept parallel to the double-faced adhesive tape. | 02-24-2011 |
20110048609 | ADHESIVE TAPE JOINING METHOD AND ADHESIVE TAPE JOINING APPARATUS - A joint detector detects a joint in an adhesive tape supplied from a tape supply section, and a computing unit determines a suitable cutting position of the adhesive tape for removing the joint in accordance with the detected results. A controller controls each mechanism to operate so as to satisfy the determined results by the computing unit. Thereafter, the adhesive tape including the joint is cut and removed. | 03-03-2011 |
20110056615 | ADHESIVE TAPE JOINING METHOD AND ADHESIVE TAPE JOINING APPARATUS - A nipper formed of a pair of nip blocks in an open state suction-holds on nip surfaces thereof a front end of the adhesive tape that is folded back with an edge member and separated from a separator. Then, the nip block on a front end side pivots to unite the nip surfaces of the nip blocks to each other. As a result, the adhesive tape is bent inwardly and adhesive layers thereof are adhered to each other to form a tab. The nip block on a rear end side suction-holds a rear end of the cut adhesive tape. Then, the nip block on the rear end side pivots to bend the adhesive tape inwardly for forming a tab. | 03-10-2011 |
20110232841 | SEMICONDUCTOR WAFER MOUNTING METHOD AND SEMICONDUCTOR WAFER MOUNTING APPARATUS - An elastic body approximately throughout a holding region of a semiconductor wafer is provided in a recess at a center of a holding table that holds the semiconductor wafer. An adhesive tape is joined over a rear face of the semiconductor wafer and a ring frame by rolling a joining roller while the elastic body receives and supports a surface of the semiconductor wafer as a circuit surface. | 09-29-2011 |
20120160397 | MOUNTED WAFER MANUFACTURING METHOD - A liquid adhesive is applied to a circuit surface of a semiconductor wafer. A carrier is joined to a surface of the semiconductor wafer coated with the adhesive. A rear face of the semiconductor wafer is ground while the carrier is held. The semiconductor wafer is supported on a ring frame via a support adhesive tape. The carrier is removed from the semiconductor wafer. The adhesive tape is separated integrally with the film-like adhesive from the semiconductor wafer through joining a separation tape having a width larger than a diameter of the semiconductor wafer to the adhesive on the semiconductor wafer and then separating the separation tape. | 06-28-2012 |