Patent application number | Description | Published |
20130167878 | Methods and systems for cleaning for cyclic nucleation transport (CNX) - A dynamic cyclic nucleation transport (D-CNX) process is disclosed, including cyclically changing the volume of a process chamber, for example, through a piston or bellows. A D-CNX process and system can include a dynamic chamber volume that can instantly change from vacuum to pressure conditions and eliminates vacuum pumps. | 07-04-2013 |
20130167879 | Methods and systems for cleaning for cyclic nucleation transport (CNX) - Methods are disclosed to create and employ the use of non-vapor, non-condensable gas bubbles inside a process chamber. These non-vapor gas bubbles may be rapidly expanded and compressed in pressure-controlled cycles and can assist in the transport of fluids, particles, and by-products to and from surfaces. The gas bubbles can be generated from dissolved gas to the liquid medium, by mixing two liquids that can react with each other to generate gaseous by-products, or by using a liquid medium that can react with the surface of the object to generate gaseous by-products. The gaseous generation can be used with cyclic nucleation transport (CNX) process, such as vacuum CNX, hyperbaric CNX, or dynamic CNX. | 07-04-2013 |
20130167880 | Methods and systems for cleaning for cyclic nucleation transport (CNX) - A hyperbaric cyclic nucleation transport (H-CNX) process is disclosed, including pressure cycling liquid and/or vapor from pressure higher than atmospheric pressure or vapor across the boiling point of the liquid. The higher pressure can be accompanied by higher temperature, which provides additional benefits of more efficient cleaning and cheaper liquid medium. | 07-04-2013 |
Patent application number | Description | Published |
20130276819 | Dynamic chamber for cycle nucleation technology - A dynamic cyclic nucleation transport (D-CNX) process can be used to wet process an object, such as cleaning or etching. In the D-CNX process, the chamber volume is cyclically enlarged and reduced, effectively reducing and increasing the chamber pressure, respectively. During the pressure reduction phase, bubbles can be generated, which can be terminated or travel to the liquid surface during the pressure increment phase. The generation and termination of bubbles can clean or etch the object, even in hard to reach places. | 10-24-2013 |
20130276822 | Hyperbaric methods and systems for rinsing and drying granular materials - Polysilicon granules can be cleaned, rinsed and dried by hyperbaric superheated liquid and superheated steam. The superheated liquid can be used to rinse and heating the polysilicon granules. A slow drain can be open to remove the superheated liquid. A fast drain then can be open, preferably to atmosphere, to allow steam to vent through bottom. The fast drain can function as a drying process, vaporizing water droplets down the drain with the escaping steam. | 10-24-2013 |
20130276823 | Hyperbaric CNX for Post-Wafer-Saw Integrated Clean, De-Glue, and Dry Apparatus & Process - Silicon plates can be cleaned, rinsed and dried by hyperbaric superheated liquid and superheated steam. The superheated liquid can be used to clean and rinse the silicon plates after being saw from a silicon block. A slow drain can be open to remove the superheated liquid. A fast drain then can be open, preferably to atmosphere, to allow steam to vent through bottom. The fast drain can function as a drying process, vaporizing water droplets down the drain with the escaping steam. | 10-24-2013 |
20130291901 | Hyperbaric Methods and Systems for Surface Treatment, Cleaning, and Drying - Objects with complex surface profiles can be cleaned effectively using hyperbaric pressure. After partially submerging an object in a superheated liquid, the pressure of the vapor portion of the superheated liquid can be cycled. For example, a valve connected to the vapor portion of the superheated liquid can be opened to an ambient, such as atmospheric ambient to release the chamber pressure. The chamber pressure then can increased, for example, by re-equilibrium or by introducing superheated vapor or heated vapor or gas. During the release of pressure, bubbles can formed on the surface of the object. During the increase of the pressure, the bubbles can be collapsed. The cycling of the bubbles can clean the object surface. | 11-07-2013 |
20130291902 | Hyperbaric Methods and Systems for Surface Treatment, Cleaning, and Drying - Objects can be dried by a quick release of superheated vapor. After providing a superheated vapor to a chamber, the superheated vapor can be released. During the release of pressure, liquid droplets can be evaporated, drying the object. | 11-07-2013 |
20140083462 | Gas Expansion Displacement CNX Concept, Methods and Apparatus - A cyclic bubble generation and termination process can be used to effectively clean objects in a liquid. The bubbles can be generated from dissolved gas in the liquid during a pressurizing phase of the cyclic bubble process. Alternatively, the bubbles can be generated from as a by-product in a chemical reaction between chemicals in the liquid and material or chemicals at the surface of a part being processed. A vacuum process or a hyperbaric process can be used for cycling the pressure. | 03-27-2014 |
20140299162 | Hyperbaric Methods and Systems for Surface Treatment, Cleaning, and Drying: Thin Liquid H-CNX - Objects with complex surface profiles can be cleaned effectively using hyperbaric pressures. A high temperature high pressure liquid or vapor can be introduced to a sealed chamber containing an object to be cleaned, forming a thin liquid layer on the object. The pressure in the sealed chamber can be quickly reduced, evaporating the thin liquid layer, which can remove surface contaminants from the object. The process can be repeated until the object is cleaned. | 10-09-2014 |