Patent application number | Description | Published |
20090315820 | METHOD FOR APPLYING VOLTAGE TO PHOTO-ADDRESSABLE TYPE DISPLAY ELEMENT, POWER SUPPLY DEVICE AND DRIVING DEVICE FOR PHOTO-ADDRESSABLE TYPE DISPLAY ELEMENT - A method for applying a voltage to a photo-addressable type display element includes: switching between +V volt and −V volt by a switching circuit to synthesize a rectangular wave pulse of ±V volt; and applying the rectangular wave pulse of ±V volt to the photo-addressable type display element as a bias voltage. When the rectangular wave pulse is to be switched from one of +V volt and −V volt to the other, (i) the rectangular wave is grounded in the course of the switching from the one of +V volt and −V volt to the other, (ii) an output voltage of an output converter, which is not selected after the switching of the rectangular pulse, is changed to about 0 volt, and then, (iii) the rectangular wave pulse is changed to the other of +V volt and −V volt. | 12-24-2009 |
20100223507 | INFORMATION PROCESSING APPARATUS, METHOD AND COMPUTER READABLE MEDIUM - The invention provides an information processing apparatus including: a plurality of abnormality detection sections provided in each of a plurality of detection target portions, that detect an abnormality caused by high temperature at a predetermined first frequency; an indication detecting section that detects an indication that the abnormality will occur; and a controller that controls to set the detection frequency of the plurality of abnormality detection sections to a second frequency which is higher than the first frequency, when the number of times that the indication is detected within a predetermined period is more than a predetermined number of times. | 09-02-2010 |
20110320842 | POWER SUPPLY CONTROL DEVICE, IMAGE PROCESSING DEVICE, POWER SUPPLY CONTROL METHOD, AND COMPUTER READABLE MEDIUM - A power supply control device including a mode switching controller, a first power supply section, a second power supply section, a third power supply section, a wiring system opening and closing unit and a controller. During the sleep mode, the first power supply section continues to supply power to a specific control system, the second power supply section shuts off its supply of power, and the third power supply section supplies power to the specific control system by a separate system to the specific control system. The wiring system opening/closing unit sets a power supply wiring system of the commercial power source to an open state or a closed state. When the third power supply section is supplying power during the sleep mode, the controller controls the wiring system opening and closing unit and sets the power supply wiring system of the commercial power supply to the open state. | 12-29-2011 |
20120127518 | POWER-SUPPLY MONITORING DEVICE AND IMAGE PROCESSING APPARATUS - A power-supply monitoring device includes a power-supply control section, a detection section, a determination section, a control section, and an attachment section. The power-supply control section receives supply of power from a mains power source section, and selectively sets a power supply mode and a power saving mode. The detection section detects, in a predetermined region, a body capable of movement including a user who intends to use a processing section. When the body capable of movement is detected, the determination section determines whether switching from the power saving mode to the power supply mode is to be performed to obtain a result. The control section controls the power-supply control section on the basis of the result. The attachment section is attached to the detection section so that a detection region including a position or having an area for identifying the user is adjustable. | 05-24-2012 |
20120127538 | POWER-SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, POWER-SUPPLY CONTROL METHOD, AND COMPUTER READABLE MEDIUM - A power-supply control device includes a power-supply control section, a first detection section that detects whether or not a body capable of movement is moving, a second detection section that detects whether or not the body capable of movement exists, and an instruction section. The power-supply control section receives supply of power from a mains power source section, and selectively sets a power supply mode, in which power is supplied to a processing section, and a power saving mode, in which supply of power to the processing section is stopped. The first and second detection sections and the instruction section are caused to operate at least in the power saving mode. The instruction section provides, for the power-supply control section, an instruction for switching between the power supply mode and the power saving mode. | 05-24-2012 |
20120137154 | POWER SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, POWER SUPPLY CONTROL METHOD AND COMPUTER READABLE MEDIUM FOR CONTROLLING POWER SUPPLY - A power supply control device includes a power supply controller that selectively performs a power supply mode and a power saving mode, a detector that detects a moving body in a predetermined range in the vicinity of the processor, a power supply mode change instruction unit that changes an operation mode from the power saving mode to the power supply mode when the detector detects the moving body, an information history unit that acquires information related to an operation for the processor in the power supply mode, and a sensitivity adjusting unit that adjusts a detection sensitivity of the detector for the moving body on the basis of the information acquired by the information history unit for a period from a change of the operation mode from the power saving mode to the power supply mode to a change of the operation mode to a next power saving mode. | 05-31-2012 |
20120204046 | POWER-SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, POWER-SUPPLY CONTROL METHOD, AND COMPUTER READABLE MEDIUM - A power-supply control device includes a power-supply-state transition control section, body-capable-of-movement detection sections, and an instruction section. The power-supply-state transition control section shifts a state of an operation target section from one state to another state among power-supply states and a non-power-supply state. The body-capable-of-movement detection sections detect a body capable of movement in a region. The instruction section provides, on the basis of results of detection of the body capable of movement by the body-capable-of-movement detection sections, at least an instruction for shifting between one of the power-supply states and the non-power-supply state, among instructions for shifting the state of the operation target section from one state to another state with the power-supply-state transition control section. | 08-09-2012 |
20120229831 | POWER-SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, POWER-SUPPLY CONTROL METHOD, AND COMPUTER READABLE MEDIUM - A power-supply control device includes a power-supply-state transition control section, body-capable-of-movement detection sections, a time measuring section, a transition-instruction section, and an instruction-provision-time postponement section. The power-supply-state transition control section shifts a state of an operation target section from one state to another state among power-supply states and a non-power-supply state. The body-capable-of-movement detection sections detect a body capable of movement in a region. The time measuring section measures a time over which the operation target section in one of the power-supply states is not used. The transition-instruction section provides, for the power-supply-state transition control section, an instruction for shifting to the non-power-supply state. The instruction-provision-time postponement section postpones an instruction-provision time at which the instruction is provided by the transition-instruction section. | 09-13-2012 |
20130010335 | POWER SUPPLY CONTROL DEVICE AND METHOD THEREOF, IMAGE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER READABLE MEDIUM STORING POWER SUPPLY CONTROL PROGRAM - There is disclosed a power supply control device including a load that executes a predetermined process and operates when power is supplied; a power supply state transition controlling unit that allows at least the load to be transitioned to a power supply state, or a power interruption state; plural detection units that can operate within respective power-consumption ranges, and detects information related to the execution of the load; a power supply control unit for detection unit, which supplies power continuously to a minimum power-consumption type detection unit, and which supplies power to a detection unit having a relatively large power-consumption based on a detection result of a detection unit having a relatively small power-consumption; and a transition time determining unit that is executed when power is supplied with respect to a maximum power-consumption type detection unit, and that determines a transition time by the power supply state transition controlling unit. | 01-10-2013 |
20130057894 | POWER SUPPLY CONTROL APPARATUS, IMAGE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER READABLE MEDIUM STORING POWER SUPPLY CONTROL PROGRAM - Disclosed is a power supply control apparatus including plural processing units, a mobile body detection unit, a determination unit, a transition unit, a mobile body confirmation unit, and a controller that controls the transition unit such that states of all of the processing units transit to the powered-off state when a result of confirmation in the mobile body confirmation unit represents absence and controls the transition unit such that the states of the plural processing units selectively and individually transit to the powered-off state when a result of confirmation in the mobile body confirmation unit represents presence. | 03-07-2013 |
20130120779 | IMAGE FORMING APPARATUS, OPERATION DEVICE, AND HUMAN DETECTING DEVICE - An image forming apparatus includes an image forming section that forms an image on a recording material; an operating section that is operated by a person; a first detecting portion that detects a person in a predetermined first area; a second detecting portion that detects the person in a second area that is smaller than the first area, the second area being separated from the first area or a portion of the second area overlapping the first area when viewed from above; and a switching unit that switches between a first condition in which the image forming apparatus consumes a first amount of electric power and a second condition in which the image forming apparatus consumes a second amount of electric power. | 05-16-2013 |
20130219198 | POWER SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE MEDIUM STORING POWER SUPPLY CONTROL PROGRAM, AND IMAGE PROCESSING CONTROL DRIVER - Provided is a power supply control device including a first power supply which is a power supply source of an operating unit and a main control unit, a second power supply which supplies minimum necessary power to create a power-saving state, a switching unit that switches to a power supply source selected from the first and second power supplies, a receiving unit that receives an external request signal, a determining unit that determines whether the external request signal is a switching request signal or a recovery request signal, a switching controller that switches the power supply source to the first power supply when a power-saving state is created, and the external request signal is the switching request signal, and a recovery unit that recovers at least the main control unit when the recovery request signal is received within a predetermined period after the power supply source is switched. | 08-22-2013 |
20130250372 | MOVING OBJECT DETECTING DEVICE, POWER SUPPLY CONTROL DEVICE, AND IMAGE PROCESSING APPARATUS - A moving object detecting device includes a detecting device body that includes a detection unit formed in a chassis covering the inside of an apparatus and disposed to correspond to a monitoring window of which at least an aperture area or an aperture size is restricted and which monitors a moving object approaching the apparatus and a circuit board unit controlling a signal output from the detection unit and is disposed so that some optical axes among optical axes having detection surfaces of plural infrared detecting elements included in the detection unit, as focal points passes through the monitoring window and the other optical axes are blocked by the chassis, and an optical member that is formed in an inner wall of the chassis and that deflects the other optical axes of the infrared detection elements to pass through the monitoring window. | 09-26-2013 |
20130258424 | POWER SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER READABLE MEDIUM STORING POWER SUPPLY CONTROL PROGRAM - A power supply control device includes a user interface unit including a touch panel unit that has a display function and an input function and a backlight unit, a control unit that controls the process of a processing apparatus body, at least two types of moving body detecting units that are capable of detecting a moving body and have at least relatively short and long detectable distances, a stepwise power supply unit that supplies power to the control unit when one moving body detecting unit with a short detection distance starts detection at the time when the other movement detecting unit with a long detection distance detects the moving body and detects the moving body, and an adjustment unit that, when the one moving body detecting unit does not detect the moving body, first adjusts the brightness of the backlight unit to predetermined brightness less than normal brightness. | 10-03-2013 |
20130300198 | POWER SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, AND POWER SUPPLY CONTROL METHOD - A power supply control device includes a moving object detecting unit and a power supply unit. The moving object detecting unit is attached to a processing apparatus body including power supply targets and a controller, and is capable of detecting a moving object moving in the vicinity of the processing apparatus body. The moving object detecting unit has a lower detection range for detecting a part of a moving object that is substantially in contact with the floor, and an upper detection range for detecting a top part of a moving object. The power supply unit is included in the controller and is always supplied with power to monitor approach of a moving object with the moving object detecting unit. The power supply unit supplies, upon the moving object detecting unit detecting a moving object, power to a power supply target that includes a part of the controller. | 11-14-2013 |
20140092417 | POWER SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, POWER SUPPLY CONTROL METHOD, AND COMPUTER READABLE MEDIUM - A power supply control device includes a monitoring controller, a moving body detector, and a power supply controller. The monitoring controller controls a processor, an interface part, and an identification information acquisition part. The moving body detector detects whether or not a moving body including a user who intends to use the processor exists within a specific region. The power supply controller individually allows objects to be controlled including the processor, the interface part, the identification information acquisition part, and the monitoring controller to enter a power supply state or a power interruption state in an independent manner, in accordance with detection information by the moving body detector, and first controls the identification information acquisition part to be shifted from the power interruption state to the power supply state in a case where all the objects to be controlled are in the power interruption state. | 04-03-2014 |
20140093266 | IMAGE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER READABLE MEDIUM, AND IMAGE PROCESSING METHOD - An image processing apparatus includes an image forming section that includes a fixing device, a power supply controller that controls the fixing device to a power supply state in which power is supplied or a power shut-off state, a switching section that switches a fixing mode to one of a first mode that focuses on temperature, and a second mode that focuses on productivity, and a processing controller that controls an image forming process, by selecting the first mode as initial processing when the fixing device recovers from the power shut-off state to the power supply state upon an instruction to execute a job, and selecting, as continued processing after the initial processing, the first mode or the second mode on a basis of a total processing volume of the job acquired after the instruction to execute the job is made. | 04-03-2014 |
20140313536 | PROCESSING CONTROL APPARATUS, IMAGE PROCESSING APPARATUS, AND PROCESSING CONTROL METHOD - A processing control apparatus includes a processor, a setting unit, and a delay unit. The processor operates by using power supplied from a main power supply, and executes a process on the basis of received information. The setting unit restricts power supply from the main power supply to the processor, and sets a restricted period in which a process is prohibited from being executed in the processor. In the case where a specific process which is being executed when the restricted period is to start will be completed within a predetermined allowed time period, the delay unit delays the time when the restricted period is start at least until the specific process is completed. | 10-23-2014 |
20140333949 | POWER-SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, POWER-SUPPLY CONTROL METHOD, AND COMPUTER READABLE MEDIUM - A power-supply control device includes a power-supply control section, a first detection section that detects whether or not a body capable of movement is moving, a second detection section that detects whether or not the body capable of movement exists, and an instruction section. The power-supply control section receives supply of power from a mains power source section, and selectively sets a power supply mode, in which power is supplied to a processing section, and a power saving mode, in which supply of power to the processing section is stopped. The first and second detection sections and the instruction section are caused to operate at least in the power saving mode. The instruction section provides, for the power-supply control section, an instruction for switching between the power supply mode and the power saving mode. | 11-13-2014 |
20140355020 | DISPLAY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, AND RECORDING MEDIUM - A display control device includes a display device, a detector, and a prohibiting unit. The display device displays a consumed power value indicating power consumed by a processing section that operates on power supplied from a principal power source section. The detector operates on power from an auxiliary power source section that is different from the principal power source section to detect presence or absence of a mobile body within an area determined in advance. The prohibiting unit prohibits the display device from displaying the consumed power value for a period for which the detector is not detecting a mobile body or a part of the period. | 12-04-2014 |
20150022837 | INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND IMAGE PROCESSING DEVICE - An information processing device includes a computing unit and a display unit. The computing unit computes a power consumption per a predetermined time during a power saving mode that reduces power consumption, on the basis of a count per type of an interrupt signal produced during the power saving mode, and a power consumption pre-estimated per type of the interrupt signal. The display unit displays a power consumption computed by the computing unit using generated or stored electric power. | 01-22-2015 |
20150146223 | POWER SUPPLY CONTROL DEVICE AND IMAGE PROCESSING APPARATUS - A power supply control device includes a first power supply unit, a second power supply unit, and a mode controller. The first power supply unit receives electric power supplied from a commercial power source. The second power supply unit receives electric power supplied from an accumulative power source. The mode controller controls a power-supplied object to one of a group of modes, which at least include a first mode in which the electric power is supplied from the first power supply unit and the second power supply unit and a second mode in which the electric power is supplied from the second power supply unit, and sets the power-supplied object in the first mode and subsequently causes the power-supplied object to transition to the second mode. | 05-28-2015 |
20150256699 | POWER-SUPPLY CONTROL DEVICE, IMAGE PROCESSING APPARATUS, POWER-SUPPLY CONTROL METHOD, AND COMPUTER READABLE MEDIUM - A power-supply control device includes a power-supply control section, a first detection section that detects whether or not a body capable of movement is moving, a second detection section that detects whether or not the body capable of movement exists, and an instruction section. The power-supply control section receives supply of power from a mains power source section, and selectively sets a power supply mode, in which power is supplied to a processing section, and a power saving mode, in which supply of power to the processing section is stopped. The first and second detection sections and the instruction section are caused to operate at least in the power saving mode. The instruction section provides, for the power-supply control section, an instruction for switching between the power supply mode and the power saving mode. | 09-10-2015 |
Patent application number | Description | Published |
20090208650 | Ti-BASED FILM FORMING METHOD AND STORAGE MEDIUM - A Ti-based film forming method includes a step (step | 08-20-2009 |
20100216304 | METHOD FOR FORMING TI FILM AND TIN FILM, CONTACT STRUCTURE, COMPUTER READABLE STORAGE MEDIUM AND COMPUTER PROGRAM - A cleaning process is performed on the surface of a nickel silicide film serving as an underlayer. Then, a Ti film is formed to have a film thickness of not less than 2 nm but less than 10 nm by CVD using a Ti compound gas. Then, the Ti film is nitrided. Then, a TiN film is formed on the Ti film thus nitrided, by CVD using a Ti compound gas and a gas containing N and H. | 08-26-2010 |
20100240216 | FILM FORMATION METHOD AND APPARATUS UTILIZING PLASMA CVD - A film formation method to form a predetermined thin film on a target substrate includes first and second steps alternately performed each at least once. The first step is arranged to generate first plasma within a process chamber that accommodates the substrate while supplying a compound gas containing a component of the thin film and a reducing gas into the process chamber. The second step is arranged to generate second plasma within the process chamber while supplying the reducing gas into the process chamber, subsequently to the first step. | 09-23-2010 |
20110061432 | SURFACE TREATMENT METHOD, SHOWER HEAD, PROCESSING CONTAINER, AND PROCESSING APPARATUS USING THEM - The method of the present invention includes: a first blasting step of carrying out blasting of the surface of a metal base material, such as a shower head or a processing container, by using a blasting material composed of a non-sublimable material (e.g. alumina); and a second blasting step of carrying out blasting of the surface of the metal base material, which has undergone the first blasting step, by using a blasting material composed of a sublimable material (e.g. dry ice). The first blasting step properly roughens the surface of the metal base material so that a film, which adheres to the surface during film-forming processing, hardly peels off. In addition, the second blasting step almost fully removes the residual non-sublimable blasting material adhering to the surface of the metal base material, thereby preventing the generation of particles deriving from the residual non-sublimable blasting material falling off the metal base material. | 03-17-2011 |
20110237076 | FILM-FORMING METHOD AND FILM-FORMING APPARATUS - A film forming method includes arranging a target substrate to be processed in a chamber; supplying a processing gas including a chlorine containing gas through a supply path to the chamber in which the target substrate is arranged; and arranging a Ti containing unit in the supply path of the processing gas and making a reaction between the chlorine containing gas of the processing gas and Ti of the Ti containing unit by bringing the chlorine containing gas into contact with the Ti containing unit, when the processing gas is supplied to the chamber. The method further includes depositing Ti on a surface of the target substrate by a thermal reaction by supplying to the target substrate a Ti precursor gas produced by the reaction between the chlorine containing gas and Ti of the Ti containing unit while heating the target substrate provided in the chamber. | 09-29-2011 |
20120034793 | METHOD FOR FORMING METAL NITRIDE FILM - A wafer serving as a target substrate to be processed is loaded into a chamber, and an inside of the chamber is maintained under a vacuum level. Then, a TiN film is formed on the wafer by alternately supplying TiCl | 02-09-2012 |
20120115400 | SURFACE TREATMENT METHOD, SHOWER HEAD, PROCESSING CONTAINER, AND PROCESSING APPARATUS USING THEM - The method of the present invention includes: a first blasting step of carrying out blasting of the surface of a metal base material, such as a shower head or a processing container, by using a blasting material composed of a non-sublimable material (e.g. alumina); and a second blasting step of carrying out blasting of the surface of the metal base material, which has undergone the first blasting step, by using a blasting material composed of a sublimable material (e.g. dry ice). The first blasting step properly roughens the surface of the metal base material so that a film, which adheres to the surface during film-forming processing, hardly peels off. In addition, the second blasting step almost fully removes the residual non-sublimable blasting material adhering to the surface of the metal base material, thereby preventing the generation of particles deriving from the residual non-sublimable blasting material falling off the metal base material. | 05-10-2012 |
Patent application number | Description | Published |
20090325393 | HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS - Disclosed is a heat treatment method including a step of placing a wafer W provided with a low-k film and a metal layer in a heat treatment furnace | 12-31-2009 |
20100099254 | SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, STORAGE MEDIUM AND COMPUTER PROGRAM - A semiconductor manufacturing apparatus, when a barrier film and a copper film are formed along a recess in an insulating film by using an alloy layer of copper and addictive metal, e.g., Mn, and copper wiring is embedded therein, reduces Mn in the copper film to suppress an increase in wiring resistance. A vacuum transfer module is connected, through a load lock chamber, to a loader module for transferring a wafer with respect to a carrier. A formic acid treatment module supplying formic acid vapor as an organic acid to the wafer and a module forming a film of Cu, e.g., by CVD are connected to the vacuum transfer module to configure an apparatus manufacturing a semiconductor. The wafer W subjected to alloy layer formation and then, e.g., to annealing is transferred into the apparatus, and treatment with formic acid is performed followed by Cu film formation. | 04-22-2010 |
20120125889 | CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD - A cluster beam generating apparatus that generates a cluster beam includes a mixer that mixes a gas source material and a liquid source material; a nozzle that supplies a cluster beam including clusters originating from the gas source material and the liquid source material that are mixed in the mixer; and a temperature adjusting portion that adjusts a temperature of the nozzle, thereby controlling a ratio of the clusters originating from the gas source material and the clusters originating from the liquid source material in the cluster beam. | 05-24-2012 |
20120128892 | SURFACE PROCESSING METHOD AND SURFACE PROCESSING APPARATUS - A disclosed surface processing method includes a first processing step, wherein a gas cluster beam is generated from a source material that does not contain nitrogen, and irradiated to a member to be processed, and a second processing step, wherein a nitrogen gas cluster beam is generated and irradiated to the member to be processed. | 05-24-2012 |
20130040459 | SUBSTRATE WIRING METHOD AND SEMICONDUCTOR MANUFACTURING DEVICE - In a substrate wiring method, copper is embedded all the way to the lowest parts of a wiring pattern formed on a substrate. The method is used to wire a substrate in a processing chamber kept in a vacuum state, the substrate having a wiring pattern formed thereon. The method includes a preprocessing step in which the wiring pattern on the substrate is cleaned using a desired cleaning gas and an embedding step in which, after the preprocessing step, metal nanoparticles are embedded in the wiring pattern using a clustered metal gas. | 02-14-2013 |
20130056024 | SUBSTRATE CLEANING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS - A substrate cleaning method for cleaning a substrate on which a film is formed with a pattern in a vacuum-state processing chamber includes a preprocessing step where the film formed on the substrate on which the pattern has been formed by an etching process is cleaned by using a cleaning gas; and a consecutive step including an oxidation step where residues attached on a surface of the pattern are oxidized by using an oxidizing gas and a reduction step where the oxidized residues are reduced by using a reducing gas, which are consecutively carried out posterior to the preprocessing step. The gases used in the preprocessing step and the consecutive step are clustered by ejecting the gases into the processing chamber from a gas nozzle whose internal pressure P | 03-07-2013 |
20130295751 | THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD - This thin film forming method for a solar cell forms a thin film that contains a plurality of elements on the surface of an object to be processed. A raw material solution that contains the elements is dispersed in a processing space and microparticles by an electric field, and the microparticles that are dispersed form a thin film that adheres to the surface of the object to be processed. Thus, a thin film for a solar cell element with preferable crystallinity can be formed even in an atmosphere at atmospheric pressure. | 11-07-2013 |
20140083976 | CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD - A cluster beam generating method that generates a cluster beam includes steps of mixing a gas source material and a liquid source material in a mixer; supplying a cluster beam including clusters originating from the gas source material and clusters originating from the liquid source material that are mixed in the mixer from a nozzle; and adjusting a temperature of the nozzle using a temperature adjusting portion that adjusts a temperature of the nozzle, thereby controlling a ratio of the clusters originating from the gas source material and the clusters originating from the liquid source material in the cluster beam. | 03-27-2014 |
Patent application number | Description | Published |
20080239583 | Thin film magnetic head, head gimbal assembly, head arm assembly, magnetic disk device and method of forming thin film magnetic head - The thin film magnetic head includes a main magnetic pole layer conducting a magnetic flux to the recording medium so that the recording medium an be magnetized in a direction orthogonal to a surface thereof; a return yoke layer disposed on a trailing side of the main magnetic pole layer; an intermediate protective layer partially disposed on a magnetic shield layer; and a thermal expansion suppressing layer having an edge located on the intermediate protective layer and being in contact with the return yoke layer in an area where the intermediate protective layer is not formed. If the thin film magnetic head is affected by ambient temperature environment, the thermal expansion suppressing layer suppresses the shift of the main magnetic pole layer and the return yoke layer toward the air bearing surface. This suppresses thermal protrusion from occurring on the thin film magnetic head due to ambient temperature environment. | 10-02-2008 |
20080253032 | Thin film magnetic head, head gimbal assembly, head arm assembly, magnetic disk device and method of forming thin film magnetic head - A thin film magnetic head is provided, in which thermal protrusion can be suppressed. The thin film magnetic head includes a main magnetic pole layer which conducts a magnetic flux into the recording medium so that the recording medium is magnetized in a direction perpendicular to a surface of the recording medium, a first return yoke layer provided in a trailing side of the main magnetic pole layer, and has a recess in a top surface, a second return yoke layer provided so as to fill at least the recess of the first return yoke layer, and a thermal expansion suppression layer provided in a trailing side of the second return yoke layer. Thus, since the thermal expansion suppression layer can be provided on a surface having no recess, a possibility of a crack in the thermal expansion suppression layer can be eliminated. | 10-16-2008 |
20080253034 | Perpendicular magnetic write head, method of manufacturing the same, and magnetic write system - The present invention is directed to providing a perpendicular magnetic write head which can suppress unintended erasure of information written on a write medium at a non-writing time by optimizing a magnetic domain structure of main component elements that are engaged in writing operation. In the perpendicular magnetic write head, an auxiliary magnetic pole layer is disposed on a trailing or leading side of a main magnetic pole layer, the auxiliary magnetic pole layer being recessed from the main magnetic pole layer. When the main magnetic pole layer has a tensile stress as its internal stress, a nonmagnetic layer disposed in a layer same as the auxiliary magnetic pole layer and in an area in front of the auxiliary magnetic pole layer, also has a tensile stress as its internal stress. | 10-16-2008 |
20100084262 | MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING HEAD - The present invention relates to a method for manufacturing a perpendicular recording magnetic head. The method for manufacturing a perpendicular recording magnetic head according to the present invention includes first to third steps. At the first step, a main magnetic pole layer is formed on a foundation layer. At the second step, a main magnetic pole forming mask whose recording-medium-facing surface is of an inverted trapezoidal shape is formed on the main magnetic pole layer. At the third step, a main magnetic pole whose recording-medium-facing surface is of an inverted trapezoidal shape is formed by performing ion milling on a laminated structure including the foundation layer and the main magnetic pole layer from a direction which makes a given angle with a lamination direction according to a bevel angle of the inverted trapezoidal shape. | 04-08-2010 |
20100172054 | Perpendicular magnetic write head, method of manufacturing the same and method of forming magnetic layer pattern - In a perpendicular magnetic write head manufacturing method a magnetic layer is formed on a substrate. On the magnetic layer, first and second nonmagnetic layers are formed with different materials. A mask pattern is formed on the second nonmagnetic layer, and the second nonmagnetic layer in a region not covered with the mask pattern is removed Thereby, the patterned second nonmagnetic layer is formed while leaving the first nonmagnetic layer. The mask pattern is removed and a milling process is selectively performed on the first nonmagnetic layer and the magnetic layer with the patterned second nonmagnetic layer as a mask to remove all of the first nonmagnetic layer in an exposed region and to dig down the magnetic layer in the exposed region, thereby forming a main magnetic pole layer having an inclined part whose thickness decreases with distance from an edge position of the patterned second nonmagnetic layer. | 07-08-2010 |
20110090595 | Magnetic head for perpendicular magnetic recording and method of manufacturing same - A main magnetic pole includes a first part extending from a medium facing surface to a point at a predetermined distance from the medium facing surface, and a second part other than the first part. An accommodation part for accommodating the main magnetic pole includes: a first layer having a groove; a second layer lying between the first layer and the main magnetic pole in the first layer's groove; and a third layer interposed in part between the second layer and the main magnetic pole in the first layer's groove. The second layer is formed of a metal material different from a material used to form the first layer. The third layer is formed of an inorganic insulating material. The second and third layers lie between the first layer and the first part. The second layer lies between the bottom of the first layer's groove and the second part, but the third layer does not. The distance between the bottom of the first layer's groove and the second part is smaller than that between the bottom and the first part. | 04-21-2011 |
20120026629 | MAGNETIC HEAD, MANUFACTURING METHOD THEREFOR, HEAD ASSEMBLY, AND MAGNETIC RECORDING/REPRODUCING APPARATUS - The present invention relates to a magnetic head, a manufacturing method therefor, a head assembly, and a magnetic recording/reproducing apparatus. According to the present invention, it includes a magnetic pole layer, a non-magnetic layer, a trailing gap layer, and a trailing shield layer. The magnetic pole layer has a pole tip exposed on a magnetic medium-facing surface. The non-magnetic layer is laid on the magnetic pole layer. The trailing shield layer is exposed on the magnetic medium-facing surface and laid over the magnetic pole layer and the non-magnetic layer with the trailing gap layer between. The magnetic pole layer and the non-magnetic layer have a continuous tapered face opposed to a lower side of the trailing shield layer. Moreover, the tapered face extends from a trailing edge of the pole tip at a constant inclination angle. | 02-02-2012 |