Patent application number | Description | Published |
20090070946 | APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE - A cleaning processing part including an edge cleaning processing unit for cleaning an edge of a substrate is provided in an indexer block. An indexer robot provided in the indexer block transports an unprocessed substrate taken out of a cassette to the cleaning processing part before transporting the unprocessed substrate to an anti-reflection film processing block serving as a processor. The cleaning processing part cleans an edge and a back surface of a substrate. | 03-19-2009 |
20090071940 | MULTI-SPEED SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - After a development liquid on a substrate is washed away with a rinse liquid, the rotational speed of the substrate is reduced, so that a liquid layer of the rinse liquid is formed over a top surface of the substrate. Thereafter, the rotational speed of the substrate is increased. The increase in the rotational speed of the substrate causes a centrifugal force to be slightly greater than tension, thereby causing the liquid layer to be held on the substrate with the thickness thereof in its peripheral portion increased and the thickness thereof at the center thereof decreased. Then, gas is discharged toward the center of the liquid layer from a gas supply nozzle, so that a hole is formed at the center of the liquid layer. This causes tension that is balanced with a centrifugal force exerted on the peripheral portion of the liquid layer to disappear. Furthermore, the rotational speed of the substrate is further increased while the gas is discharged. Thus, the liquid layer moves outward from the substrate. | 03-19-2009 |
20090073394 | SUBSTRATE PROCESSING APPARATUS WITH MULTI-SPEED DRYING - After a substrate is cleaned, a liquid supply nozzle moves outward from above the center of the substrate while discharging a rinse liquid with the substrate rotated. In this case, a drying region where no rinse liquid exists expands on the substrate. When the liquid supply nozzle moves to above a peripheral portion of the substrate, the rotational speed of the substrate is reduced. The movement speed of the liquid supply nozzle is maintained as it is. Thereafter, the discharge of the rinse liquid is stopped while the liquid supply nozzle moves outward from the substrate. Thus, the drying region spreads over the whole substrate so that the substrate is dried. | 03-19-2009 |
20090074402 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - After a substrate is cleaned, a liquid layer of a rinse liquid is formed so as to cover one surface of the substrate. Then, a liquid supply nozzle moves outward from above the center of the substrate. The liquid supply nozzle is stopped once at the time point where it moves by a predetermined distance from above the center of the substrate. In this time period, the liquid layer is divided within a thin layer region by a centrifugal force, so that a drying core is formed at the center of the liquid layer. Thereafter, the liquid supply nozzle moves outward again, so that a drying region where no rinse liquid exists expands on the substrate with the drying core as its starting point. | 03-19-2009 |
20090269936 | Substrate Processing Apparatus - A thermal processing unit of a thermal processor for anti-reflection films includes: a covering nozzle for covering a substrate from above supported by a thermal processing plate and discharging an adhesion enhancing agent to a periphery of a substrate supported by the thermal processing plate; and a vaporization processor for supplying an adhesion enhancing agent in the vapor phase to the covering nozzle. While a substrate placed over the thermal processing plate is being subjected to thermal process, a control part causes the covering nozzle to discharge an adhesion enhancing agent in the vapor phase onto a periphery of a substrate to realize adhesion enhancement process. Thus, the adhesion between a resist coating film and a substrate surface in the periphery of a substrate is enhanced. Further, parallel implementation of thermal process and adhesion enhancement process exerts no influence on throughput. | 10-29-2009 |
20100126532 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - A processing solution supply nozzle is moved relatively from one end to the opposite end of a semiconductor wafer having undergone a developing operation while discharging an anti-static processing solution in a discharge width equal to or greater than the width of the semiconductor wafer. The anti-static processing solution is thereby supplied onto the semiconductor wafer. The prevention of charging of the substrate avoids the occurrence of defects. The processing solution supplied almost uniformly on the entire surface of the substrate also avoids the occurrence of defects. | 05-27-2010 |
20110070479 | BATTERY MANUFACTURING METHOD AND BATTERY - A negative-electrode active material layer having an uneven pattern is formed on a surface of a copper foil as a negative-electrode current collector by applying an application liquid by a nozzle-scan coating method. Subsequently, an application liquid containing a polymer electrolyte material is applied by a spin coating method, thereby forming a solid electrolyte layer in conformity with the uneven pattern. Subsequently, an application liquid is applied by a doctor blade method, thereby forming a positive-electrode active material layer whose lower surface conforms to the unevenness and whose upper surface is substantially flat. A thin and high-performance all-solid-state battery can be produced by laminating an aluminum foil as a positive-electrode current collector before the application liquid is cured. | 03-24-2011 |
20110225815 | ELECTRODE FORMING METHOD AND ELECTRODE FORMING APPARATUS - The invention aims at reducing unevenness at the intersections of mutually crossing electrodes with a method of and an apparatus for forming electrodes on a substrate. After forming a number of finger electrodes on a substrate, wide bus electrodes intersecting them are formed by application of an application liquid. Upon applying the application liquid which contains an electrode material and a photo-curing resin to the substrate, the application liquid is irradiated with UV light after a predetermined time and the application liquid is thus made to harden. A time difference since applying until light irradiation is set based on the result of measurement on changes of the height of the application liquid experimentally applied. | 09-22-2011 |
20110300440 | BATTERY, VEHICLE, ELECTRONIC DEVICE AND BATTERY MANUFACTURING METHOD - A negative-electrode active material layer formed between a negative-electrode current collector and a solid electrolyte layer has a line-and-space structure in which a plurality of stripe-shaped pattern elements extending in a Y direction are arranged while being separated from each other. A gradient at each contact point where the stripe-shaped pattern element, the negative-electrode current collector and the solid electrolyte layer are in contact with each other is made smaller than 90°. | 12-08-2011 |
20120002359 | BATTERY MANUFACTURING METHOD, BATTERY MANUFACTURED BY SUCH METHOD, VEHICLE AND ELECTRONIC DEVICE - A negative-electrode active material layer having a line-and-space structure is formed by applying an application liquid containing a negative-electrode active material in stripes on a surface of a negative-electrode current collector using a nozzle-scan coating method and drying the application liquid (Steps S | 01-05-2012 |
20120015253 | BATTERY MANUFACTURING METHOD, BATTERY, VEHICLE AND ELECTRONIC DEVICE - Stripe-shaped pattern elements | 01-19-2012 |
20120076949 | PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS - In applying an application liquid onto a substrate and forming a line-like pattern, discharging of the application liquid is initiated from an inward position X | 03-29-2012 |
20120077093 | LITHIUM-ION SECONDARY BATTERY, VEHICLE, ELECTRONIC DEVICE AND MANUFACTURING METHOD OF LITHIUM-ION SECONDARY BATTERY - A negative-electrode active material layer | 03-29-2012 |
20120242008 | PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS - A nozzle N which moves in a scan direction Ds along a surface Wf of a substrate W discharges an application liquid which contains a photo-curing material, and a light emitter E moving as if to follow the nozzle N irradiates light (UV light for instance) upon the application liquid. Arriving at an application end position, the nozzle N stops discharging the application liquid and retracts in a direction away from the substrate surface Wf. Meanwhile, the light emitter E keeps moving in the scan direction Ds, thereby irradiating even the terminating end of the application liquid with the light without fail. | 09-27-2012 |
20120244284 | PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD - A pattern forming apparatus includes a first nozzle part | 09-27-2012 |
20130047919 | PATTERN FORMING APPARATUS - A tip section of a discharge nozzle | 02-28-2013 |
20130065119 | LITHIUM ION SECONDARY BATTERY AND PREPARATION PROCESS OF SAME - A separator-type lithium ion secondary battery having large capacity and charge-discharge performance not destroying the separator, even with an active material layer having concavo-convex structure of high aspect ratio. The battery comprises a first electrode comprising a first current collector, and a first active material layer formed by plural convex first active material parts provided on the first current collector, a second electrode comprising a second current collector, and a second active material layer formed by plural convex second active material parts provided on the second current collector, and a separator provided between the first electrode and the second electrode, wherein the first electrode and the second electrode are integrated so that the convex first active material part is faced between the adjacent convex second active material parts, and the convex first active material part does not enter between the convex second active material parts. | 03-14-2013 |
20130067729 | BATTERY ELECTRODE MANUFACTURING METHOD AND BATTERY MANUFACTURING METHOD - In a technology for manufacturing a battery electrode by applying an application liquid containing an active material, stripe-shaped pattern elements are formed at narrower intervals than before while contact between the pattern elements is avoided. An application liquid containing an active material is applied onto a base material 11, which will become a current collector, by a nozzle-scan coating method, thereby forming stripe-shaped active material pattern elements P1, P3, P5, . . . parallel to each other and extending in a Y-direction. After liquid components are volatilized from the application liquid and spread base parts of the pattern elements are shrunk, pattern elements P2, P4, P6, . . . are formed by applying the application liquid in stripes between the already formed pattern elements. In this way, it can be prevented that the base parts approach each other and the pattern elements touch each other when the adjacent patterns are simultaneously formed. | 03-21-2013 |
20130071552 | BATTERY ELECTRODE MANUFACTURING METHOD AND BATTERY MANUFACTURING METHOD - In a technology for manufacturing a battery electrode by applying an application liquid containing an active material, stripe-shaped pattern elements are formed at narrower intervals than before while contact between the pattern elements is avoided. While a nozzle | 03-21-2013 |
20140050977 | METHOD OF AND APPARATUS FOR MANUFACTURING ELECTRODE FOR LITHIUM-ION SECONDARY BATTERY AND ELECTRODE FOR LITHIUM-ION SECONDARY BATTERY - An electrode for lithium-ion secondary battery comprises: a base member which functions as a current collector; and an active material layer formed in a surface of the base member as a stripe-like pattern including a plurality of active material lines which contain silicon or a silicon compound as an active material, which are spaced apart from each other and which protrude beyond the surface of the base member. | 02-20-2014 |
20140242459 | ELECTRODE FOR BATTERY, BATTERY, AND METHOD OF AND APPARATUS FOR MANUFACTURING ELECTRODE FOR BATTERY - An electrode | 08-28-2014 |