Patent application number | Description | Published |
20090095423 | APPARATUS AND METHOD FOR PLASMA ETCHING - A plasma processing apparatus for performing plasma processing on an object to be processed, including: a processing chamber for performing plasma etching on an object to be processed; a first gas inlet provided at an upper portion of the processing chamber for supplying gas to a center portion in the processing chamber; a plurality of second gas inlets placed on an outer circumference of the first gas inlet for supplying gas to an outer circumference portion in the processing chamber; two lines of gas supply systems for supplying processing gases to the first gas inlet and the second gas inlets, respectively; an evacuation means for reducing the pressure in the processing chamber; an electrode on which the object to be processed is placed disposed in the processing chamber opposed to the first gas inlet and the second gas inlets; a high frequency power supply for generating plasma; and additional gas supply systems provided to the two lines of gas supply systems, respectively, for adding a gas for generating a depositional reaction product as additional gas via gas flow rate regulators at a given flow rate ratio. | 04-16-2009 |
20090223633 | Apparatus And Method For Plasma Etching - A plasma etching apparatus capable of performing processing with excellent in-plane uniformity on an object to be processed having a large diameter is provided. The present invention provides a plasma etching apparatus including a processing chamber | 09-10-2009 |
20100078130 | Plasma Processing Apparatus - A plasma processing apparatus including a processing chamber for subjecting an object to plasma processing, a gas inlet, an evacuation device, a sample stage for the object, a power supply, and at least one induction coil. The at least one induction coil enables generation of the plasma in the processing chamber and is formed by connecting a plurality of identical coil elements in a parallel circuit-like arrangement so that current flows in each of the plurality of identical coil elements in a same direction when viewed from the sample stage. | 04-01-2010 |
20100263796 | Plasma Processing Apparatus - A plasma processing apparatus includes a processing chamber, a sample stage for mounting an object to be processed, a power supply, and at least one induction coil connected to the power supply. The induction coil is formed by connecting at least two identical coil elements in a parallel circuit-like arrangement so that current flows in each of the plurality of identical coil elements in a same direction when viewed from the sample stage. The induction coil is positioned so that a center thereof corresponds to a center of the object, and input ends of the coil elements are displaced circumferentially at equal angular intervals calculated by dividing 360° by the number of identical coil elements. | 10-21-2010 |
Patent application number | Description | Published |
20080223122 | SCANNING PROBE MICROSCOPE - A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution. | 09-18-2008 |
20090158828 | Scanning Probe Microscope - In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion. | 06-25-2009 |
20130193892 | HYBRID CONSTRUCTION MACHINE - In a hybrid construction machine, there is provided a drive control device which realizes in, as a simple a structure as possible, control means of a motor generator, which is capable of preventing rapid decreases in the state of charge. The control means, which calculates a motor torque command value to be output to the motor generator, is characterized by calculating the motor torque command value, based on a difference between an actual state-of-charge and a prescribed target state-of-charge and a torque margin obtained by a difference between a maximum torque of an engine determined based on an actual rotational speed of the engine and an actual torque of the engine. | 08-01-2013 |
20130195597 | CONSTRUCTION MACHINE HAVING SWING BODY - Disclosed is a hybrid-type construction machine equipped with a swing hydraulic motor | 08-01-2013 |
20130325269 | HYBRID-TYPE CONSTRUCTION MACHINE - A hybrid-type construction machine is provided which permits swing operation without a sense of awkwardness compared with conventional construction machines and which allows the amount of stored electricity in an electrical storage device to be controlled within an appropriate range of use in consideration of the service life of the electrical storage device without enlarging its capacity. | 12-05-2013 |
20140103874 | CONSTRUCTION MACHINE - Construction machine capable of incorporating an engine and using an external power source. The construction machine includes an electrical storage device performing a charge with the external power source, uses the electrical storage device to provide assist when the power of the engine is insufficient, uses an electrical charge in the electrical storage device systematically in accordance with work time, and efficiently uses the electrical storage device by controlling its discharge amount in accordance with load status. The construction machine includes the engine, accessory loads connected to the engine, an assist electric motor driven by the engine, electrical power converters for converting an AC current, which is the output current of the assist electric motor, to a DC current, and the electrical storage device connected to the DC side of each electrical power converter. The electrical storage device becomes charged through a charging device from the external power source. | 04-17-2014 |
20140147238 | CONSTRUCTION MACHINE - An object of the present invention is to provide a construction machine that is capable of effectively charging electrical power into the capacitor in consideration of the drive of a swing section and hydraulic work device. To achieve the object, the present invention grasps the status of the construction machine ( | 05-29-2014 |
20140199148 | HYBRID CONSTRUCTION MACHINE - In hybrid construction machine employing a hydraulic motor and an electric motor for the driving of the swing structure, satisfactory operability of a combined operation of the swing structure and other actuators is secured irrespective of the operating status of the electric motor. | 07-17-2014 |
20140298548 | SCANNING PROBE MICROSCOPE - A scanning probe microscope is provided for scanning a sample surface with a probe formed on a cantilever and detecting an interaction acting between the probe and the sample surface to measure a physical property including a surface shape of the sample. The microscope includes an arrangement for detecting torsion of the cantilever and for correcting a profile error caused by deflection of the probe and torsion of the cantilever based on the amount of torsion which is detected. | 10-02-2014 |
Patent application number | Description | Published |
20120240581 | HYBRID CONSTRUCTION MACHINE - A hybrid construction machine drives the upper swing structure using a hydraulic motor and an electric motor together and is capable of regenerating the energy of the upper swing structure in deceleration or stopping into electric power and using the regenerated electric power for assisting the hydraulic motor for driving the upper swing structure. The opening area characteristics of a meter-out restrictor and a bleed-off restrictor of a swing directional control valve are set to become larger than for construction machines driving the upper swing structure with the hydraulic motor alone. Torque of the electric motor is controlled so that the total sum of the actual torque occurring in the hydraulic and electric motors in deceleration or acceleration of the hydraulic motor equals the torque occurring when the opening area of the meter-out restrictor or the bleed-off restrictor is set at the prescribed opening area. | 09-27-2012 |
20130011233 | CONSTRUCTION MACHINE - A construction machine has a hydraulic pump driven by a prime mover, a hydraulic motor, an electric motor, a storage device for delivering and receiving electric power to and from the electric motor, and a controller for exercising drive control of the electric motor. A speed reduction mechanism for transmitting drive forces of the electric motor and hydraulic motor to a swing structure is also provided. The controller includes inductive voltage waveform detecting means for detecting an inductive voltage waveform of the electric motor, and magnetic pole position computing means for, in a state where the swing structure is driven only by the torque of the hydraulic motor, taking in the inductive voltage waveform from the inductive voltage detecting means and computing a magnetic pole position of a rotor of the electric motor on the basis of the inductive voltage waveform and not via a rotation position sensor. | 01-10-2013 |
20130058750 | HYBRID CONSTRUCTION MACHINE - A hybrid construction machine is capable of performing satisfactory operations even when trouble occurs that disables the electric motor from outputting torque. The hybrid construction has both a hydraulic motor and an electric motor driving the swing structure and a controller for switching between a hydraulic/electric hybrid swing mode (using both the hydraulic motor and the electric motor) and a hydraulic-alone swing mode (using only the hydraulic motor). The switching is executed while achieving satisfactory operability and performance in each mode. Normally, an energy saving operation is performed in the hydraulic/electric hybrid swing mode. When the electric amount of an electricity storage device has gone out of a prescribed range or an abnormality has occurred in an electric system (e.g., failure of an inverter), the swing mode is switched to the hydraulic-alone swing mode so that driving with normal braking torque is possible by the hydraulic motor alone. | 03-07-2013 |
20130174556 | HYBRID CONSTRUCTION MACHINE - A hybrid construction machine has an electric motor for driving the swing structure, and the electric motor is prevented from becoming incapable of generating torque due to a low energy state or an overcharged state of an electricity storage device. A swing-mode selector switch | 07-11-2013 |
20130243557 | HYBRID CONSTRUCTION MACHINE - Provided is a hybrid construction machine capable of letting the operator immediately stop the swing structure by performing a stopping operation for ordinary construction machines even when the swing structure moves differently from the operator's will for some reason. The hybrid construction machine comprises: an inverter controller which outputs a PWM signal to an inverter and thereby controls the revolution speed of an electric motor; a first electric circuit including blocking means which blocks the PWM signal outputted from the inverter controller to the inverter in response to either an immobilization selection inputted through a gate lock lever switch or an OFF selection inputted through an ignition switch; and a second electric circuit including a swing brake solenoid valve which activates a swing brake in response to either the immobilization selection inputted through the gate lock lever switch or the OFF selection inputted through the ignition switch. | 09-19-2013 |
20130298544 | CONSTRUCTION MACHINE HAVING REVOLVING STRUCTURE - To provide a hybrid type construction machine in which work can be kept on even if the amount of electricity stored in an electric storage device is out of an appropriate value. | 11-14-2013 |
20130311052 | HYBRID CONSTRUCTION MACHINE AND AUXILIARY CONTROL DEVICE USED THEREIN - Disclosed is a hybrid construction machine that includes a control device and an auxiliary control device. The control device switches between a hydraulic/electric complex swing mode in which both the electric motor and the hydraulic motor are driven to drive the swing structure by using the sum of the torque of the electric motor and the torque of the hydraulic motor; and a hydraulic-only swing mode in which only the hydraulic motor is driven to drive the swing structure by using only the torque of the hydraulic motor. The auxiliary control device includes a monitoring controller that is connected to the control device and to the electric motor to monitor the temperature or electrical leakage in the electric motor as a substitute controller for the power control unit or the electrical storage device when the power control unit or the electrical storage device is removed due to a fault. | 11-21-2013 |
20140002091 | CONSTRUCTION MACHINE | 01-02-2014 |
20140165548 | WORK MACHINE - A work machine includes a swing hydraulic motor and a swing electric motor for driving an upper swing structure. A capacitor supplies electricity to the swing electric motor and an operating device outputs through one operation, an operating signal for concurrently operating the swing hydraulic motor and the swing electric motor. A main controller switches between a hydraulic-alone drive mode and an electric-alone drive mode, the hydraulic-alone drive mode being a mode to drive only the swing hydraulic motor selected from the swing hydraulic motor and the swing electric motor when the operating device is operated, the electric-alone drive mode being a mode to drive only the swing electric motor selected from the swing hydraulic motor and the swing electric motor when the operating is operated. Therefore, the actuator that malfunctions can easily be specified among the plurality of mounted actuators. | 06-19-2014 |