Jingchun
Jingchun Tang, Tianjin CN
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20150104855 | Enhanced combination method for phytoremediation of petroleum contaminated soil by Impatiens balsamina L. associated with the indigenous microorganisms - A plant-microorganism combined method for phhytoremediation of organic contaminated soil; i.e., an ornamental plant ( | 04-16-2015 |
Jingchun Zhang, Shanghai CN
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20130138415 | METHOD AND MODEL FOR MONITORING PRETREATMENT PROCESS OF LOW-K BLOCK LAYER - The present invention provides a method and model for monitoring the pretreatment process of a low-k block layer. The method comprises measuring film parameters of the film formed on the silicon substrate after applying the pretreatment process for different time periods; creating a statistical process control curve according to the film parameters; setting a SPC control limit; determining the pretreatment process normal when the data point of measurement in the SPC curve is within the control limit while determining the pretreatment process abnormal when the data point of measurement in the SPC curve exceeds the control limit. According to the present invention, the failure of the pretreatment process can be prevented to improve the product reliability and stability. | 05-30-2013 |
Jingchun Zhang, San Jose, CA US
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20140179111 | SELECTIVE TITANIUM NITRIDE ETCHING - Methods of etching exposed titanium nitride with respect to other materials on patterned heterogeneous structures are described, and may include a remote plasma etch formed from a fluorine-containing precursor. Precursor combinations including plasma effluents from the remote plasma are flowed into a substrate processing region to etch the patterned structures with high titanium nitride selectivity under a variety of operating conditions. The methods may be used to remove titanium nitride at faster rates than a variety of metal, nitride, and oxide compounds. | 06-26-2014 |