Patent application number | Description | Published |
20100141147 | CAPACITIVELY COUPLED PLASMA (CCP) GENERATOR WITH TWO INPUT PORTS - A capacitively coupled plasma (CCP) generator with two input ports, which is especially used as a large-area capacitively coupled plasma (CCP) generator. In the inventive CCP generator, only a RF power supply is required to provide the two input ports with RF power. The input impedance at each of the input ports is adjustable so that the standing wave between two rectangular electrodes can be eliminated to achieve plasma uniformity. | 06-10-2010 |
20100164381 | LONG LINEAR-TYPE MICROWAVE PLASMA SOURCE USING VARIABLY-REDUCED-HEIGHT RECTANGULAR WAVEGUIDE AS PLASMA REACTOR - A long linear-type microwave plasma source using a variably-reduced-height rectangular waveguide as the plasma reactor has been developed. Microwave power is fed from the both sides of the waveguide and is coupled into plasma through a long slot cut on the broad side of the waveguide. The reduced height of the waveguide is variable in order to control the coupling between microwave and plasma so that the plasma uniformity can remain a high quality when extending the length of the linear-type plasma source. | 07-01-2010 |
20110136269 | METHOD FOR DEPOSITING MICROCRYSTALLINE SILICON AND MONITOR DEVICE OF PLASMA ENHANCED DEPOSITION - A method for depositing a microcrystalline silicon film is disclosed, including performing an open loop and close loop plasma enhanced deposition process without and with modulating process parameters, respectively. A film is deposited by the open loop plasma enhanced deposition process till a required film crystallinity and then performing a closed loop plasma enhanced deposition process which monitors species plasma spectrum intensities SiH* and Hα and modulates process parameters of the plasma enhanced deposition process resulting in the species concentration stabilization which controls the intensities variation of SiH* and Hα within an allowed range of a target value for improving film depositing rate. | 06-09-2011 |
20120070590 | PLASMA ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND THE CONTROLLING METHOD THEREOF - This prevent disclosure provides a plasma enhanced atomic layer deposition apparatus and the controlling method thereof. The plasma enhanced atomic layer deposition apparatus includes: a plurality of reaction chambers, each of the reaction chambers having a first reaction space and a second reaction space; an adjustable partition unit controlled to separate or communicate the first and the second reaction spaces; and a plurality of heating carriers respectively disposed in the plurality of reaction chambers. The method manipulates the movement of the partition plate, leading to separation or communication between the first and second reaction spaces, so as to avoid the interference or inter-reaction between process gases and the resultant particles contaminating the substrates. | 03-22-2012 |
Patent application number | Description | Published |
20080237254 | REFILLABLE SHEET DISPENSER WITH FLEXIBILITY IN ACCOMMODATING STACKED NOTE SHEETS - A refillable sheet dispenser includes: a supporting base having two opposite first lateral sides and two opposite second lateral sides, each of which extends from one of the first lateral sides to the other of the first lateral sides; at least one stack of note sheets supported on the supporting base within the first and second lateral sides of the supporting base, each of the note sheets having two opposite lateral edges, each of which is disposed adjacent to a respective one of the second lateral sides of the supporting base and each of which extends between the first lateral sides of the supporting base; and a binding unit having a pair of elastically stretchable strips held tensely on the supporting base and extending from one of the second lateral sides to the other of the second lateral sides of the supporting base in such a manner to traverse the stack of the note sheets. | 10-02-2008 |
20090123685 | Memo Pad Including Memo Sheets that Can Present a Three-Dimensional Appearance - A memo pad includes a stack of memo sheets, each memo sheet including an inscribing portion, a pair of supporting portions, a pair of adhering portions, and a pair of adhesive layers. The adhesive layers are applied to the bottom side of the adhering portions such that an upper one of the memo sheets is adhered releasably to a lower one in the stack. When a memo sheet is removed from the memo pad, and the adhesive layers are used to attach the adhering portions to a supporting surface, the supporting portions are disposed to support the inscribing portion such that the inscribing portion is raised relative to the supporting surface, thereby configuring the memo sheet to present a three-dimensional appearance. | 05-14-2009 |
20110156381 | STICKY NOTE PAD - A sticky note pad includes at least two stacks of sticky note sheets. Each sticky note sheet has a note-writing region, an index tab region projecting from a right lateral edge thereof, and a removable pressure sensitive adhesive layer provided on a bottom face thereof in proximity to a left lateral edge thereof. The index tab regions of the sticky note sheets of one of the stacks are staggered with respect to the index tab regions of the sticky note sheets of the other stack in a top-to-bottom direction, and are aligned to the same in a direction parallel to the lateral edges of the sticky note sheets. A glue layer binds the left lateral edges of the sticky note sheets of all the stacks. A partition sheet is adhered to the bottom face of a lowermost sticky note sheet of an upper stack. | 06-30-2011 |
20120015174 | NOTE PAD CONTAINING CARBONLESS COLOR-DEVELOPING MATERIAL - A note pad includes: a stack of carbonless note sheets each of which includes: a substrate; and a color-developing coating layer formed on an upper surface of the substrate, and including a plurality of microcapsules and a carbonless color-developing material, each of the microcapsules encapsulating a reactive dye and being breakable, when subjected to a pressure, to release the reactive dye to react with the carbonless color-developing material for color development. | 01-19-2012 |