Grimard
Dennis Grimard, Ann Arbor, MI US
Patent application number | Description | Published |
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20090086400 | ELECTROSTATIC CHUCK APPARATUS - An electrostatic chuck for holding a substrate has a circular dielectric member having a top surface configured to support the substrate, the top surface having a plurality of mesas consisting of n subsets, wherein mesas of each subset are distributed along one of a plurality of concentric bolt circles of increasing radii, and wherein all of the concentric bolt circles center about the center of the circular dielectric member. | 04-02-2009 |
20090086401 | ELECTROSTATIC CHUCK APPARATUS - An electrostatic chuck includes an angled conduit, or an angled laser drilled passage, through which a heat transfer gas is provided. A segment of the angled conduit and/or the angled laser drilled passage extends along an axis different from an axis of the electric field generated to hold a substrate to the chuck, thereby minimizing plasma arcing and backside gas ionization. A first plug may be inserted into the conduit, wherein a segment of a first exterior channel thereof extends along an axis different from an axis of the electric field. A first and second plug may be inserted into a ceramic sleeve which extends through at least one of the dielectric member and the electrode. Finally, the surface of the dielectric member may comprise embossments arranged at radial distances from the center of the dielectric member so as to improve heat transfer and gas distribution. | 04-02-2009 |
20100208409 | METHOD FOR OPTIMIZED REMOVAL OF WAFER FROM ELECTROSTATIC CHUCK - Systems and methods for optimally dechucking a wafer from an electrostatic chuck are described. The force on a lift-pin mechanism is monitored and a dechuck voltage is determined based on the force. The wafer is dechucked at the determined dechuck voltage. | 08-19-2010 |
20100326602 | ELECTROSTATIC CHUCK - An isolator for heat transfer gas conduits of an electrostatic chuck is described. The isolator includes a sleeve and a body positioned in the sleeve to form an annulus between the body and sleeve that allows for flow of the heat transfer gas. The body is positioned against the puck of the chuck, and may be supported in this position by a spring. A silicon seal may be provided between the sleeve and the puck to prevent plasma from forming in the conduits. | 12-30-2010 |
20120138230 | SYSTEMS AND METHODS FOR MOVING WEB ETCH, CVD, AND ION IMPLANT - Systems and methods for moving substrates through process chambers for photovoltaic (PV) or solar cell applications are disclosed. In particular, systems and methods for moving substrates through process chambers using a conveyor belt are disclosed. The conveyor belt can be used to move the substrates through etch chambers, chemical vapor deposition (CVD) chambers, and/or ion implant chambers, and the like. | 06-07-2012 |
Dennis S. Grimard US
Patent application number | Description | Published |
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20090097185 | Time-based wafer de-chucking from an electrostatic chuck having separate RF bias and DC chucking electrodes - An electrostatic chuck in a reactor chamber has a cathode electrode insulated from ground, a chucking electrode insulated from the cathode electrode and a dielectric layer overlying the chucking electrode that provides a workpiece support surface. A D.C. chucking voltage supply is coupled to the chucking electrode. An RF power generator is coupled to the cathode electrode. A voltage sensing apparatus is coupled to the chucking electrode and to the cathode electrode to monitor the voltage difference between them during discharge after removal of RF and DC power at the conclusion of processing. The reactor includes a controller programmed to raise the lift pins during electrode discharge as soon as the voltage sensing apparatus detects equal voltages simultaneously on the chucking and cathode electrodes. | 04-16-2009 |
Dennis Stanley Grimard, Ann Arbor, MI US
Patent application number | Description | Published |
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20130161305 | HIGH DEFINITION HEATER AND METHOD OF OPERATION - An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer. | 06-27-2013 |
20130220575 | HIGH DEFINITION HEATER SYSTEM HAVING A FLUID MEDIUM - An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer. | 08-29-2013 |
Guy Grimard, Ville Mont-Royal CA
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20110270132 | METHOD AND SYSTEM FOR KNEE JOINT EVALUATION AND DIAGNOSTIC AID IN NORMAL AND PATHOLOGIC STATE - The present document describes an apparatus and method for identifying and characterizing a problem of a knee joint. In accordance with an embodiment, the method comprises receiving biomechanical data from sensors and generating a biomechanical profile based on the biomechanical data, the biomechanical data being representative of a movement of the knee joint. The method also involves, in a processing device, classifying the biomechanical profile of the knee joint in one of multiple classes of knee joint problems by applying a pattern recognition technique to a normative biomechanical profile associated to the one of the multiple classes, each one of the multiple classes corresponding to at least one knee joint problem; based on the classifying, identifying the problem as comprising the at least one knee joint problem of the one of the multiple classes; and archiving the problem identified in a storing device to make the problem accessible during consultation. | 11-03-2011 |
20130185310 | METHOD AND SYSTEM FOR HUMAN JOINT TREATMENT PLAN AND PERSONALIZED SURGERY PLANNING USING 3-D KINEMATICS, FUSION IMAGING AND SIMULATION - The present document describes a method for producing a knee joint treatment plan and/or surgery plan for a patient, the method comprising: obtaining 3D kinematic data of the knee joint in movement; determining, from the 3D kinematic data, scores characterising the joint function of the patient, the one or more scores being relative to one or more criteria; and comparing the scores to data in a database which characterize a plurality of treatment plans and/or surgery plans to generate the list of one or more treatment plans and/or surgery plans which match the scores. | 07-18-2013 |
Jean-Christophe Grimard, Cellettes FR
Patent application number | Description | Published |
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20090277959 | INVASIVE SURGICAL INSTRUMENT EQUIPPED WITH A TRANSPONDER - The present invention concerns a read system ( | 11-12-2009 |
20110009962 | METHOD TO INTEGRATE AN RFID COMPONENT IN A PROSTHESIS OR IMPLANT SUBSTITUTE OR IN A SURGICAL INSTRUMENT IN POLYMER OR PLASTIC - One or more embodiments of the invention comprise of a method of integrating an RFID component in an implant or prosthesis substitute or in a surgical instrument. The method comprises at least a step to machine or bore the body of the substitute or of the surgical instrument to form a housing then a cavity intended to receive a cover for the housing. The method further comprises an ultrasonic welding step using a sonotrode to weld the cover to the body of the substitute or of the surgical instrument in polymer or plastic, so that the outer surface of the substitute or of the surgical instrument is bump-free and the weld obtained is sealed and durable. One or more embodiments of the invention also concerns the substitute or surgical instrument. | 01-13-2011 |
Jean-Pierre Grimard, Vif FR
Patent application number | Description | Published |
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20090159174 | METHOD OF IDENTIFYING A PLURALITY OF CONTAINERS AND/OR FINISHED ARTICLES OBTAINED FROM THE SAID CONTAINERS - The present invention relates to a method of identifying a batch of articles comprising the following step: (AA) a plurality of containers ( | 06-25-2009 |
20090159654 | Method of identifying a container and/or a finished article obtained from the said container, in particular for medical use - Method of identifying a container ( | 06-25-2009 |
20090318864 | Injection set and injection assistance device - The present invention relates to an injection assistance device ( | 12-24-2009 |
20110112486 | NEEDLE PROTECTION ASSEMBLY WITH LOCKING ELEMENT - The application relates to a needle protection assembly ( | 05-12-2011 |
20110245770 | Injection Set and Injection Assistance Device - The present invention relates to an injection assistance device ( | 10-06-2011 |
20140257184 | INJECTION SET AND INJECTION ASSISTANCE DEVICE - The present invention relates to an injection assistance device including a body with a needle, grasping arrangement and first elastic return arrangement to dampen limited movement of the grasping arrangement, in at least one of the two directions, respectively distal or proximal, during an injection phase, and to maintain the body in its insertion position and the needle at a constant insertion length during the injection step, when the user increases, respectively releases, a distal pressure on the grasping arrangement. The invention also relates to an injection set including an injection device and the assistance device. | 09-11-2014 |
Louise Grimard, Ste-Therese CA
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20130130741 | Tagging and identification system for luggage - An itinerary travel tag attached to a piece of luggage, the travel tag including a code; a mechanism for retrieving and sending the code electronically; an internet server connected electronically to the mechanism for receiving the code, and for providing a website including a webpage associated with the code and used to provide information pertaining to the piece of luggage, such that the piece of luggage can be tracked and the information used remotely to locate and retrieve the piece of luggage at any time and in any location. | 05-23-2013 |
Nicolas Grimard, Montreal CA
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20150316513 | METHOD AND APPARATUS FOR SCANNING A TEST OBJECT - The present disclosure relates to a method and an apparatus for scanning a test object. A reference object is scanned to build a gain correction map including gain values for scanning points on a surface of the reference object. The test object is also scanned to obtain measurements for scanning points on a surface of the test object. Amplitudes of the measurements obtained for the scanning points on the surface of the test object are normalized using the gain values of the gain correction map. The apparatus has a probe mounted on a mechanical scanner, and a controller controlling the scanning and normalizing operations. The method and apparatus can be used to create an image of the test object for non-destructive testing. | 11-05-2015 |