Patent application number | Description | Published |
20090135389 | METHOD OF MEASURING FOCUS OF A LITHOGRAPHIC PROJECTION APPARATUS - A method of measuring focus of a lithographic projection apparatus includes exposure of a photoresist covered test substrate with a plurality of verification fields. Each of the verification fields includes a plurality of verification markers, and the verification fields are exposed using a predetermined focus offset FO. After developing, an alignment offset for each of the verification markers is measured and translated into defocus data using a transposed focal curve. The method according to an embodiment of the invention may result in a focus-versus alignment shift sensitivity up to 50 times higher (typically dX,Y/dZ=20) than conventional approaches. | 05-28-2009 |
20120013875 | Calibration Method and Inspection Apparatus - A method of calibrating an inspection apparatus. Obtaining a surface level measurements (LS) at respective level sensing locations LS(x,y). Determining focus settings (LP | 01-19-2012 |
20130003031 | METHOD OF MEASURING FOCUS OF A LITHOGRAPHIC PROJECTION APPARATUS - A method of measuring focus of a lithographic projection apparatus includes exposure of a photoresist covered test substrate with a plurality of verification fields. Each of the verification fields includes a plurality of verification markers, and the verification fields are exposed using a predetermined focus offset. After developing, an alignment offset for each of the verification markers is measured and translated into defocus data using a transposed focal curve. | 01-03-2013 |
20140313496 | Lithographic Apparatus and Method - A lithographic apparatus comprising a support structure constructed to support a patterning device, the patterning device being capable of imparting an EUV radiation beam with a grating in its cross-section to form a patterned EUV radiation beam, and a projection system configured to project the patterned EUV radiation beam onto a target portion of the substrate, wherein the support structure is provided with a grating comprising a series of first reflective portions which alternates with a series of second reflective portions, the second reflective portions having a reflectivity which is less than the reflectivity of at least part of the first reflective portions and which is greater than zero. | 10-23-2014 |
Patent application number | Description | Published |
20100202864 | SYSTEM FOR CONVEYING BIOMASS FOR COLLECTION, TRANSPORT, OR PROCESSING - A system for conveying biomass is disclosed. The system is configured to convey biomass for collection, transport, or processing. The system comprises a housing comprising an opening configured for the entry of biomass, at least one shoe skid configured to offset the housing in a vertical orientation, an apparatus at least partially within the housing comprising at least one rotating blade assembly, and a conduit configured to discharge biomass from the housing so that biomass entering into the housing can be projected by the apparatus through the conduit for collection or transport. The system may comprise conduit that is extendable and has articulation segments for vertical movement. The system may comprise a housing that comprises a member to dislodge the biomass from a pile to flow into the opening. The system may comprise at least one shoe skid that comprises a large surface area and projects forward of the housing. | 08-12-2010 |
20130292231 | SYSTEM FOR CONVEYING BIOMASS FOR COLLECTION, TRANSPORT, OR PROCESSING - A system for conveying biomass is disclosed. The system is configured to convey biomass for collection, transport, or processing. The system comprises a housing comprising an opening configured for the entry of biomass, at least one shoe skid configured to offset the housing in a vertical orientation, an apparatus at least partially within the housing comprising at least one rotating blade assembly, and a conduit configured to discharge biomass from the housing so that biomass entering into the housing can be projected by the apparatus through the conduit for collection or transport. The system may comprise conduit that is extendable and has articulation segments for vertical movement. The system may comprise a housing that comprises a member to dislodge the biomass from a pile to flow into the opening. The system may comprise at least one shoe skid that comprises a large surface area and projects forward of the housing. | 11-07-2013 |
20140353124 | SYSTEM FOR CONVEYING BIOMASS FOR COLLECTION, TRANSPORT, OR PROCESSING - A system for conveying biomass is disclosed. The system is configured to convey biomass for collection, transport, or processing. The system contains a housing comprising an opening configured for the entry of biomass, at least one shoe skid configured to offset the housing in a vertical orientation, an apparatus at least partially within the housing comprising at least one rotating blade assembly, and a conduit configured to discharge biomass from the housing so that biomass entering into the housing can be projected by the apparatus through the conduit for collection or transport. | 12-04-2014 |