Patent application number | Description | Published |
20100119353 | Systems For Improved Fluid Flows Through A Turbine - A system for installing and extracting a flowing water turbine below the surface of the water includes a flow inducer assembly for improving the conversation of the kinetic energy of a waterway to mechanical energy. The flow inducer assembly includes a nozzle that may be shaped as a cowling and a outlet diffuser. The system may be useful in a number of settings, including, but not limited to, streams, rivers, dams, ocean currents, or tidal areas that have continuous or semi-continuous water flow rates and windy environments. | 05-13-2010 |
20100119362 | Shrouded Turbine Assembly - A turbine that allows for the conversion of the kinetic energy of waterway to mechanical power for use in an energy accepting apparatus is described. The turbine has complimentary components that improve the power efficiency of the turbine. The turbine may include a blade shroud and a plurality of blades that are connected to the blade shroud. On the external surface of the blade shroud, a drive mechanism and/or a brake mechanism may be disposed. An inlet nozzle and outlet diffuser may be used in combination with the turbine. The turbine may be useful in a number of settings, including, but not limited to, streams, rivers, dams, ocean currents, or tidal areas that have continuous or semi-continuous water flow rates and windy environments. | 05-13-2010 |
20120011857 | High-Flow-Capacity Centrifugal Hydrogen Gas Compression Systems, Methods and Components Therefor - Hydrogen gas compression systems that each include a multistage centrifugal compressor in which each stage has an inlet-to-outlet pressure rise ratio of about 1.20 or greater. In one embodiment, the multistage compressor includes six high-speed centrifugal compressors driven at a speed of about 60,000 rpm. The compressor has an output of more than 200,000 kg/day at a pressure of more than 1,000 psig. The compressors for the compression stages are distributed on both sides of a common gear-box, which has gearing that allows axial thrusts from the compressors to be handled effectively. Each stage's compressor has a unique impeller, which is secured to a support shaft using a tension-rod-based attachment system. In another embodiment, the multistage compressor is driven by a combustion turbine and one or more intercoolers are provided between compression stages. Each intercooler is cooled by coolant from an absorption chiller utilizing exhaust gas from the combustion turbine. | 01-19-2012 |
20130145753 | Turbomachinery Having Self-Articulating Blades, Shutter Valve, Partial-Admission Shutters, and/or Variable-Pitch Inlet Nozzles - An axial-flow turbine assembly that includes one or more features for enhancing the efficiency of the turbine's operation. In one embodiment, the turbine assembly includes a turbine rotor having blades that adjust their pitch angle in direct response to working fluid pressure on the blades themselves or other part(s) of the rotor. In other embodiments, the turbine assembly is deployable in an application, such as an oscillating water column system, in which the flow of working fluid varies over time, for example, as pressure driving the flow changes. In a first of these embodiments, the turbine assembly includes a valve that allows the pressure to build so that the flow is optimized for the turbine's operating parameters. In a second of these embodiments, one or more variable-admission nozzle and shutter assemblies are provided to control the flow through the turbine to optimize the flow relative to the turbine's operating parameters. | 06-13-2013 |
20150037136 | Overhung Turbine and Generator System With Turbine Cartridge - A turbine-generator device for use in electricity generation using heat from industrial processes, renewable energy sources and other sources. The generator may be cooled by introducing into the gap between the rotor and stator liquid that is vaporized or atomized prior to introduction, which liquid is condensed from gases exhausted from the turbine. The turbine has a universal design and so may be relatively easily modified for use in connection with generators having a rated power output in the range of 50 KW to 5 MW. Such modifications are achieved, in part, through use of a modular turbine cartridge built up of discrete rotor and stator plates sized for the desired application with turbine brush seals chosen to accommodate radial rotor movements from the supported generator. The cartridge may be installed and removed from the turbine relatively easily for maintenance or rebuilding. The rotor housing is designed to be relatively easily machined to dimensions that meet desired operating parameters. | 02-05-2015 |
Patent application number | Description | Published |
20100166955 | SYSTEM AND METHOD FOR THIN FILM DEPOSITION - A reaction chamber assembly suitable for forming thin film deposition layers onto solid substrates includes a reaction chamber and an input plenum for receiving source material from gas source containers and delivering a flow of source material into the reaction chamber uniformly distributed across a substrate support width. An output plenum connected between the reaction chamber and a vacuum pump uniformly removes an outflow of material from the reaction chamber across the substrate support width. The input plenum is configured to expand a volume of the source material and deliver the source material to the substrate support area with uniform source material flow distribution across the substrate support width. The output plenum is configured to remove the outflow material across the entire substrate support width and to compress the volume of outflow material prior to the outflow material exiting the output plenum. The resulting source material flow over substrates supported in the substrate support area is uniformly distributed across the substrate support width and unidirectional with a uniform flow velocity. The configuration of the reaction chamber assembly reduces pump down times. | 07-01-2010 |
20100183825 | PLASMA ATOMIC LAYER DEPOSITION SYSTEM AND METHOD - An improved gas deposition chamber includes a hollow gas deposition volume formed with a volume expanding top portion and a substantially constant volume cylindrical middle portion. The hollow gas deposition volume may include a volume reducing lower portion. An aerodynamically shaped substrate support chuck is disposed inside gas deposition chamber with a substrate support surface positioned in the constant volume cylindrical middle portion. The volume expanding top portion reduces gas flow velocity between gas input ports and the substrate support surface. The aerodynamic shape of the substrate support chuck reduces drag and helps to promote laminar flow over the substrate support surface. The volume reducing lower portion helps to increase gas flow velocity after the gas has past the substrate support surface. The improved gas deposition chamber is configurable to 200 mm diameter semiconductor wafers using ALD and or PALD coating cycles. An improved coating method includes expanding process gases inside the deposition chamber prior to the process gas reaching surfaces of a substrate being coated. The method further includes compressing the process gases inside the deposition chamber after the process gas has flowed past surfaces of the substrate being coated. | 07-22-2010 |
20100247763 | REACTION CHAMBER WITH REMOVABLE LINER - A reaction chamber assembly for thin film deposition processes or the like includes an outer wall assembly for enclosing an outer volume and a removable liner installed into the outer volume through an outer aperture for preventing precursors or reactants from coming into contact with internal surfaces of the outer wall assembly and forming thin film layers thereon. The removable liner encloses a reaction chamber and includes substrate support trays or the like for supporting substrates being coated. Thin film layers are formed onto internal surfaces of the removable liner instead of onto surfaces of the outer wall assembly. The removable liner may be disposable or may comprise stainless steel, which can be removed when contaminated, cleaned by abrasive blasting such as bead blasting, and replaced. Two removable liners can be used to periodically swap removable liners and clean one of the liners while the other is in service with minimal disruption to production coating schedules. Other removable cleanable elements such as input and output plenums, door liners and conduits comprising stainless steel can be periodically removed and cleaned by abrasive blasting. | 09-30-2010 |
20120070581 | VAPOR DEPOSITION SYSTEMS AND METHODS - Vapor deposition systems and methods associated with the same are provided. The systems may be designed to include features that can promote high quality deposition; simplify manufacture, modification and use; as well as, reduce the footprint of the system, amongst other advantages. | 03-22-2012 |
20130122328 | VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SILICON DIOXIDE - Metal silicates or phosphates are deposited on a heated substrate by the reaction of vapors of alkoxysilanols or alkylphosphates along with reactive metal amides, alkyls or alkoxides. For example, vapors of tris(tert-butoxy)silanol react with vapors of tetrakis(ethylmethylamido)hafnium to deposit hafnium silicate on surfaces heated to 300° C. The product film has a very uniform stoichiometry throughout the reactor. Similarly, vapors of diisopropylphosphate react with vapors of lithium bis(ethyldimethylsilyl)amide to deposit lithium phosphate films on substrates heated to 250° C. Supplying the vapors in alternating pulses produces these same compositions with a very uniform distribution of thickness and excellent step coverage. | 05-16-2013 |
Patent application number | Description | Published |
20100193472 | MULTIPLE NOZZLE GAS CLUSTER ION BEAM PROCESSING SYSTEM AND METHOD OF OPERATING - A gas cluster ion beam (GCIB) processing system using multiple nozzles for forming and emitting at least one GCIB and methods of operating thereof are described. The GCIB processing system may be configured to treat a substrate, including, but not limited to, doping, growing, depositing, etching, smoothing, amorphizing, or modifying a layer thereupon. Furthermore, the GCIB processing system may be operated to produce a first GCIB and a second GCIB, and to irradiate a substrate simultaneously and/or sequentially with the first GCIB and second GCIB. | 08-05-2010 |
20100193701 | MULTIPLE NOZZLE GAS CLUSTER ION BEAM SYSTEM - Disclosed is a multi-nozzle and skimmer assembly for introducing a process gas mixture, or multiple process gases mixtures, in a gas cluster ion beam (GCIB) system, and associated methods of operation to grow, modify, deposit, or dope a layer upon a substrate. The multiple nozzle and skimmer assembly includes at least two nozzles arranged in mutual close proximity to at least partially coalesce the gas cluster beams emitted therefrom into a single gas cluster beam and/or angled to converge each beam toward a single intersecting point to form a set of intersecting gas cluster beams, and to direct the single and/or intersecting gas cluster beam into a gas skimmer. | 08-05-2010 |
20100193708 | METHOD OF FORMING TRENCH ISOLATION USING A MULTIPLE NOZZLE GAS CLUSTER ION BEAM PROCESS - Disclosed are methods of operation to grow, modify, deposit, or dope a layer upon a substrate using a multi-nozzle and skimmer assembly for introducing a process gas mixture, or multiple process gases mixtures, in a gas cluster ion beam (GCIB) system. Also disclosed is a method of forming a shallow trench isolation (STI) structure on a substrate, for example, an SiO | 08-05-2010 |
20100243913 | PRE-ALIGNED NOZZLE/SKIMMER - The pre-aligned nozzle/skimmer module includes an internal pre-aligned nozzle assembly and internal pre-aligned skimmer cartridge assembly to more accurately control the formation of the Gas Cluster Ion Beam (GCIB). The nozzle/skimmer module can be pre-aligned to more accurately position the GCIB. The pre-aligned nozzle/skimmer module more accurately controls the formation of the gas clusters of a pre-aligned Gas Cluster Ion Beam (GCIB). | 09-30-2010 |
20110240602 | HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM - The invention includes a high-voltage gas cluster ion beam (GCIB) processing system for treating a workpiece using a gas cluster ion beam. The high-voltage GCIB processing system includes a high-voltage (HV) source system that includes a high-voltage (HV) source chamber having a high-voltage (HV) nozzle subassembly, a nozzle element, and a high-voltage (HV) skimmer subassembly therein. The high-voltage gas cluster ion beam (GCIB) processing system includes a high-voltage (HV) power supply coupled to the HV nozzle subassembly and the HV skimmer subassembly. A high-voltage (HV) ionization chamber can be coupled to the HV source chamber and can include an ionizer coupled to the chamber wall by an isolation structure. In addition, a grounded GCIB processing chamber can be coupled to the HV ionization chamber by an isolation structure and can include a scanable workpiece holder. | 10-06-2011 |
20110272594 | GAS CLUSTER ION BEAM SYSTEM WITH RAPID GAS SWITCHING APPARATUS - A processing system is provided for irradiating a substrate with a gas cluster ion beam (GCIB). The system includes a nozzle for forming and emitting gas cluster beams through a nozzle outlet, and a stagnation chamber that is located upstream of and adjacent the nozzle. The stagnation chamber has an inlet, and the nozzle is configured to direct a single gas cluster beam toward the substrate. An ionizer is positioned downstream of the outlet and is configured to ionize the gas cluster beam to form the GCIB. The system also includes a gas supply that is in fluid communication with the inlet of the stagnation chamber, and which includes a gas source and a valve located between the gas source and the nozzle for controlling flow of a gas between the gas source and the nozzle. | 11-10-2011 |
20130082189 | PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE - A pre-aligned multi-output nozzle/skimmer (PMNS) module includes a pre-aligned nozzle assembly having at least two nozzles and a pre-aligned skimmer subassembly. The PMNS module can be pre-aligned to more accurately position a Multi-Beam Gas Cluster Ion Beam (MBGCIB), and to more accurately control the formation of the multi-beam gas clusters of a pre-aligned MBGCIB. | 04-04-2013 |
20140123457 | PRE-ALIGNED NOZZLE/SKIMMER - A method of assembling a nozzle/skimmer module includes coupling a nozzle assembly and skimmer cartridge assembly in a rigid tandem configuration to more accurately control the formation of the Gas Cluster Ion Beam (GCIB). The nozzle/skimmer module is pre-aligned before installation in a production GCIB processing system to more accurately position the GCIB. | 05-08-2014 |
Patent application number | Description | Published |
20130325870 | USING CONTENT - Among other things, the ability of people and entities to produce, distribute, and use text, images, video, and other items of digital content is enhanced by providing software tools that enable them to (a) clip items of the digital content on any platform that is capable of presenting the digital content, (b) store copies of the clipped items along with copies of items clipped by other people or entities, in a common storage place controlled by a host, (c) form and store meshes of tags to represent their mindsets about items of content. The tags include primary tags that express their direct observations about the content and secondary tags that express their observations about the primary tags and the secondary tags. Meshes of the tags are made available to the people who formed them and, if permitted by them, to other people and entities for use in understanding their mindsets and in producing, delivering, and using digital content. | 12-05-2013 |
20140278986 | TAGGING AND RANKING CONTENT - Among other things, information is received that represents tags and tag relationships associated by users of content with items of content, and rankings of items of content are derived based on the tags and tag relationships. | 09-18-2014 |