Patent application number | Description | Published |
20080218835 | PROJECTION APPARATUS FOR SCANNINGLY PROJECTION - A projection apparatus for scanningly projecting an image onto an image field by means of a radiation beam includes a modulator for modulating an intensity of the radiation beam such that the intensity of the radiation beam changes in a time interval during which a scan point to which the radiation beam is directed sweeps a pixel of the image field. | 09-11-2008 |
20080242049 | METHOD FOR GENERATING A MICROMECHANICAL STRUCTURE - In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state. | 10-02-2008 |
20080284078 | Micromechanical Element Which Can be Deflected - The invention relates to deflectable micromechanical elements which can preferably be deflected in translation and optionally also in an oscillatory manner. With respect to known solutions, it is the object of the invention to enable larger deflections with a simultaneously improved resistance toward lateral forces and torques. In this connection, a suspension having at least one spring system is present at elements in accordance with the invention. Levers pivotally connected to torsion spring elements are present at spring systems. Torsion spring elements of a spring system are aligned in a common axis and/or a plurality of axes arranged parallel to one another and at least one torsion spring element is fixedly clamped. | 11-20-2008 |
20090097087 | MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENT AND METHOD FOR THE PRODUCTION OF MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENTS - The invention relates to a micromechanical sensor- or actuator component with an optical function and to a production method. A substrate thereby has electrodes and electrical contactings, an optical, electrically actuated element which can be deflected relative to the substrate. A transparent cover is likewise present. The object of the invention is to produce a micromechanical sensor- or actuator component with an optical function and a method for the production of such components with which to reduce or even avoid reflections which might impair the function of the micromechanical sensor- or actuator component. According to the invention, the optical main axis of the cover is thereby orientated non-perpendicular to the surface of the substrate. | 04-16-2009 |
20090250853 | TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED - The invention relates to torsion spring elements for the suspension of deflectable micromechanical elements such as reflecting elements pivotable around a rotational axis. It is therefore the object of the invention to provide torsion spring elements for suspensions of deflectable micromechanical elements which can achieve improved properties in operation with respect to known spring elements. Torsion spring elements in accordance with the invention are made so that they have a changing geometrical design in the direction of their longitudinal axis and thereby have non-linear spring characteristics. The longitudinal axis is in this respect aligned between a clamping or support and the deflectable micromechanical element which is held by at least one torsion spring element. In this respect, a torsion spring element in accordance with the invention can have a straight-line region, which is aligned in the direction of the longitudinal axis, and a fork/branching at at least one end face into which the straight-line region merges. | 10-08-2009 |
20090302960 | Oscillating, deflectable micromechanical element and method for use thereof - The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection. | 12-10-2009 |
20100295066 | SEMICONDUCTOR SUBSTRATE AND METHODS FOR THE PRODUCTION THEREOF - The invention relates to semiconductor substrates and methods for producing such semiconductor substrates. In this connection, it is the object of the invention to provide semiconductor substrates which can be produced more cost-effectively and with which a high arrangement density as well as good electrical conductivity and closed surfaces can be achieved. In accordance with the invention, an electrically conductive connection is guided from its front side through the substrate up to the rear side. The electrically conductive connection is completely surrounded from the outside. The insulator is formed by an opening which is filled with material. The inner wall is provided with a dielectric coating and/or filled with an electrically insulating or conductive material. The electrically conductive connection is formed with a further opening which is filled with an electrically conductive material and is arranged in the interior of the insulator. The openings are formed with step-free inner walls aligned orthogonally to the front side or tapering continuously in the direction of the rear side. | 11-25-2010 |
20120033214 | Micro-optical Electromagnetic Radiation Diffraction Grating and Method for Manufacture - The invention relates to electromagnetic radiation microoptical diffraction gratings and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can be used as microspectrometers in the form of scanning microgratings. The microgratings are provided with a surface structure and are able to be manufactured cost effectively and in high volumes. The surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged substantially equidistantly and aligned substantially parallel to one another. At least part of the surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in a wave-shape (sinusoidal) manner and having alternating arranged wave peaks and wave troughs. A reflective layer can additionally be applied to increase the intensity of reflected radiation. | 02-09-2012 |