Entries |
Document | Title | Date |
20080232936 | DISK PROCESSING APPARATUS - A disk processing apparatus having a plurality of processing units, a plurality of feed stackers, and a plurality of discharge stackers. The plurality of processing units subject label sides of disks to printing, or the like. A disk is fed from a first prior-to-being-printed stacker to the processing unit, and a processed disk is discharged to a first processed stacker. A disk is fed from a second prior-to-being-printed stacker to the other processing unit, and a processed disk is discharged to a second processed stacker. When the other processing unit is anomalous, the disk is fed from the second prior-to-being-printed stacker to the processing unit, and a processed disk is discharged to the second processed stacker, thereby performing substitute processing. | 09-25-2008 |
20080232937 | Substrate transfer apparatus, substrate transfer method, and storage medium - A substrate transfer apparatus | 09-25-2008 |
20080267745 | Positioning Device and Method for Transferring Electronic Components - There is described a positioning apparatus for transferring at least one electronic component ( | 10-30-2008 |
20080273948 | Plate Material Carry-Out Device and Plate Material Carry-Out Method - The present invention provides a plate material carry-out device that can efficiently carry out a plurality of product plate materials cut from a raw plate material by a plate material processing machine, to a plate material carry-out section located outside the plate material processing machine. The plate material carry-out device includes tracks | 11-06-2008 |
20080279660 | POSTAL WEIGHING PLATFORM WITH INTEGRATED FEEDING AND DESKEWING FUNCTIONS - The present invention includes apparatus and methods for handling mailpieces. A mailpiece handling device includes a substantially horizontal deck for receiving a mailpiece. The device also includes a substantially vertical registration wall that extends upwardly from an edge of the deck. The device further includes a disk mounted for rotation in a circular opening in the deck adjacent the registration wall. The disk has a substantially horizontal surface. In addition, the device includes an arm mounted above the disk so as to be pivotable in a horizontal direction. Also, the device includes a steering member mounted at a free end of the arm. The steering member is for applying downward pressure to a mailpiece that is in contact with the disk. | 11-13-2008 |
20080286077 | APPARATUS FOR PROCESSING SEALANT OF AN INSULATING GLASS UNIT - A method and apparatus for heating and/or pressing sealant of an insulating glass unit. The apparatus may include an oven and a press. The oven includes a detector that detects an optical property of the insulating glass unit. The detected optical property is used to regulate the amount of energy applied to the insulating glass unit to adjust the amount of energy applied to the sealant. The press may include a displacement transducer that detects a pre-pressed thickness of the insulating glass unit. The measured pre-pressed thickness is used to automatically select a press thickness from a set of pressed IGU thicknesses. | 11-20-2008 |
20080310939 | SYSTEM AND METHOD FOR USE IN A LITHOGRAPHY TOOL - A system for use in semiconductor manufacture including a process tool for processing wafers; a buffer coupled to the process tool for holding wafer waiting to be processed by the process tool; an input load port coupled to the buffer for feeding in wafers ready for processing from a load-in container; an output load port coupled to the process tool for feeding out wafers that have been processed by the process tool to a load-out container; and a track module for transporting the wafers between the buffer, the process tool, and the input and output load ports. | 12-18-2008 |
20080317565 | Segregating Wafer Carrier Types In Semiconductor Storage Devices - A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation is disclosed. The system comprises a stocker that accepts wafer carriers via one or more input ports. The present invention provides a means for detecting the presence of a wafer carrier at the input port, means for identifying the type of the wafer carrier, and means for executing an action sequence if the stocker is not compatible with those wafer carriers. Upon detecting an erroneous condition, an action sequence is executed which may include prevention entry of the wafer carrier, and notifying an operator. | 12-25-2008 |
20090016858 | SYSTEM FOR CONVEYING GROUPS OF PARTIALLY OVERLAPPING POSTAL OBJECTS - Conveying system, wherein a conveying device that is mobile with respect to an accumulation device is designed to convey a group of postal objects received at input from a flow-forming device designed to generate at output the group of postal objects aligned in a reference direction, partially overlapping one another and arranged with their own front edges spaced apart from one another. The accumulation device is provided with a plurality of cells, each of which is designed to contain at least one group of postal objects fed to the accumulation device by the translating-lifting device. | 01-15-2009 |
20090041563 | Wafer Transferring Apparatus, Polishing Apparatus, and Wafer Receiving Method - A wafer transferring apparatus includes a top ring ( | 02-12-2009 |
20090053021 | Semiconductor manufacturing apparatus - A semiconductor manufacturing apparatus comprises a substrate transfer device for transferring a substrate, a substrate detector unit including a light emitter unit for emitting light onto the substrate and a light receiver unit for receiving the light to detect the substrate transferred by the substrate transfer device, and a controller for receiving data on the received light quantity from the light receiver unit. Multiple mutually non-overlapping light quantity ranges are pre-registered in the controller, and when light emitted from the light emitter unit reaches the light receiver unit by way of the substrate, the controller identifies which of the pre-registered light quantity ranges is the received light quantity, and outputs a command according to the identified light quantity range. | 02-26-2009 |
20090060691 | SUBSTRATE RECEIVING APPARATUS AND SUBSTRATE RECEIVING METHOD - A substrate receiving apparatus is capable of reducing the size of a substrate processing system. The substrate receiving apparatus is connected to a vacuum processing apparatus. The vacuum processing apparatus performs processing on a substrate. A connecting portion of the substrate receiving apparatus is connected to a container. The container houses a holding member holding a plurality of the substrates. A communication control portion controls a communication between an internal space in the substrate receiving apparatus and the interior of the container, and isolates the internal space from the interior. A holding member transferring-in portion takes the holding member out of the container and transfers the holding member into the internal space. A pressure control portion changes the internal space between an atmospheric pressure and a vacuum by controlling the pressure in the internal space isolated from the interior of the container. | 03-05-2009 |
20090060692 | SUBSTRATE POSITIONAL MISALIGNMENT DETECTION SYSTEM - A substrate positional misalignment detection system capable of detecting positional misalignment of a substrate without moving a detector in the case of using a bottom opening pod having a main body, a lid and a cassette holding wafers. A recursive reflection type sensor adapted to emit and receive light in an upward/downward direction is provided in a supporting unit adapted to support the lid and move up and down the lid together with the cassette. A recursive reflection plate adapted to reflect the emitted light is provided on the ceiling portion of the main body. A light transmitting window is provided in the lid. The recursive reflection type sensor, the light transmitting window, and the recursive reflection plate are aligned linearly in the upward/downward direction. The light emitted by the recursive reflection type sensor is not blocked by the substrate held in a predetermined storage position by the cassette. | 03-05-2009 |
20090060693 | Working Device and Working Method with Robot - Provided is a working device wherein an operator is not required to enter a working area (K) of a robot ( | 03-05-2009 |
20090081006 | DEPLOYMENT APPARATUS AND METHOD - A deployment apparatus ( | 03-26-2009 |
20090081007 | Transfer mechanism with multiple wafer handling capability - An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system. | 03-26-2009 |
20090087288 | SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM - A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration. | 04-02-2009 |
20090123257 | WAFFLE PACK - An arrangement is described that includes a compartmentalized structure having a multiplicity of compartments defined by associated links and each having a bottom surface. The arrangement also includes a multiplicity of fiducials. The fiducials are positioned at top surfaces of the links that surround each compartment such that each compartment includes at least one associated fiducial at the top surface of an adjacent link that defines the compartment. The arrangement further includes an adhesive layer positioned on the bottom surface of each compartment. The at least one fiducial that surrounds each compartment is suitable for use by a vision system to identify the location of the associated compartment. | 05-14-2009 |
20090142168 | Substrate processing apparatus - Substrate processing with return processing is carried out efficiently by a substrate processing apparatus that continuously processes a plurality of substrates. The apparatus is equipped with a conveyor chamber constituting a substrate convey space, a plurality of process chambers in which substrate processing is carried out, a substrate conveying device provided in the conveyor chamber having a function of conveying substrates, and a substrate convey control device that controls the process of substrate conveyance by the substrate conveying device so that in a case in which after a substrate is continuously processed by two or more process chambers, the substrate is re-conveyed from the last process chamber to any of the two or more process chambers other than the last and return processing is implemented. In re-conveyance, the substrate is conveyed to any of the process chambers after being temporarily retracted to a place other than a process chamber. | 06-04-2009 |
20090142169 | Vacuum Assisted Manipulation of Objects - A disk drive handling apparatus includes a manifold, one or more vacuum suction elements in fluid communication with the manifold, and one or more tips. Each tip is coupled to an end of a corresponding one of the vacuum suction elements. Each tip is compliant in one or more axes of motion. | 06-04-2009 |
20090148257 | Test Handler - A test handler is disclosed in the present invention. The test handler may include a test tray on which a plurality of inserts are arrayed for loading at least one semiconductor device, at least one opening unit for simultaneously opening one part of the plurality of inserts which are arrayed on one part of the test tray, and a test tray transfer apparatus for allowing the opening unit to simultaneously open other parts of the plurality of inserts which are arrayed on another part of the test tray as the test tray is transferred. Therefore, although semiconductor devices to be tested change their sizes, the replaced parts of the test handler are reduced in number, thereby reducing manufacturing cost and replacement work time. The inventive test handler reduces semiconductor devices loading time, reduces jamming, increases teaching efficiency and improves space utilization efficiency. Furthermore, the test handler can be applied to various types of testers. | 06-11-2009 |
20090155026 | Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus - A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available thereto. First, the substrate is provided on the first substrate holder. Subsequently, a position error of the substrate is measured, and positioning adjustment data are calculated based on the position error as measured. Then, the second substrate holder is moved relative to a reference position thereof in accordance with the positioning adjustment data. Finally, the substrate is transferred by means of the transfer unit from the first substrate holder to the second substrate holder in accordance with the transfer data, and placed on the second substrate holder as moved. | 06-18-2009 |
20090175708 | Device and a method for stabilizing a steel sheet - A device for stabilizing an elongated steel sheet when continuously transporting the steel sheet in a transport direction along a predetermined transport path. The device includes at least a first pair, a second pair and a third pair of electromagnets with at least one electromagnet on each side of the steel sheet. The electromagnets are adapted to stabilize the steel sheet with respect to the predetermined transport path. The first and second electromagnets are elongated in a direction essentially perpendicular to the transport direction. The first and second electromagnets are substantially arranged on each side of a longitudinal center line for the steel sheet. The center line is essentially parallel to the transport direction. The third electromagnet is arranged adjacent to the center line. | 07-09-2009 |
20090175709 | CONTAINED OBJECT TRANSFER SYSTEM - A so-called transfer chamber in a semiconductor processing apparatus in which an FIMS system is secured is separated into a second chamber in which a transfer robot is disposed and a first chamber that is minute and includes a door capable of holding a cap of a pod as the FIMS system. In the second chamber, higher pressure than in the first chamber is maintained by a minute amount of nitrogen. In the first chamber, usually, a down flow of clean air is used via the FFU. When the wafer is transferred, a down flow of nitrogen is used. Thus, oxidation gas in the transfer chamber and released substances caused the FFU can be decreased. | 07-09-2009 |
20090196717 | Apparatus for Handling a Substrate and a Method Thereof - An apparatus and method of handling substrates is disclosed. A detecting system, capable of determining whether a substrate is tilted in relation to the platen, is positioned proximate to the substrate. In some embodiments, the detecting system is a distance measuring system. In other embodiments, it is an angle sensor. The detecting system is in communication with a controller, which, in turn, is in communication with a substrate handling robot. If, based on information received from the detecting system, the controller determines that the substrate is tilted beyond an acceptable range, it is assumed that the substrate has remained attached to the platen. In such a case, the substrate handling robot does not attempt to remove it from the platen. In this way, the substrate is not damaged. | 08-06-2009 |
20090208313 | TRANSPORT SYSTEM AND TRANSPORT METHOD - A transport scenario composed of a basic transport (From) from a transport starting point to, e.g., a buffer near the transport destination point and a basic transport (To) from the buffer to the transport destination point is created in response to a transport request of a production controller for transport whose loading times at the transport starting point and at the transport destination point are specified. The buffer is reserved so as to perform the basic transport (From) and the basic transport (To), transport vehicles are allocated, the travel time to the transport starting point or the buffer and the travel time from the transport starting point or the buffer are estimated, and transport instructions are given to the transport vehicles. The possibility that the loading times are out of the specified period is evaluated. If the possibility is larger, the impossibility of a just-in-time transport is notified to the production controller. | 08-20-2009 |
20090238664 | STORING APPARATUS AND TRANSPORTING SYSTEM WITH STORAGE - Each storage provided for an storing apparatus is provided with: a driving device capable of reciprocating the load in a horizontal one direction and in a vertical direction; and a rack having a plurality of rack portions at a plurality of stages in the vertical direction, each stage including one or a plurality of rack portions in the horizontal one direction, the rack portion capable of accommodating or putting thereon the load to be displaced by the driving device. The storing apparatus is provided with a plurality of controllers, which control the loading and unloading in respective groups, each group comprising at least one or a plurality of storages of the plurality of the storages, and which can perform complementary control with each other. | 09-24-2009 |
20090245980 | Stage device - The vibrations of a second table supported on a first table that is movable in one horizontal direction can be controlled. A stage device includes an XY axis table movable in the X-direction, a Z-axis table supported by a support portion on the XY axis table, a pair of scales that are arranged apart from each other in the X-direction and detect the Z-direction velocity on the Z-axis table, a pair of motors that are arranged apart from each other in the X-direction and drive the Z-axis table in a vertical direction on the Z-axis-table, and a controller controls the drives of the motors based on the Z-direction velocity detected, in which the behavior of pitching vibrations in the Z-axis table is determined by detecting the Z-direction velocity with the scales, and the motors are driven and then the Z-axis table is rotated in a pitching direction so that the pitching vibrations are cancelled. | 10-01-2009 |
20090245981 | CLOSED CONTAINER, LID OPENING AND CLOSING SYSTEM FOR CLOSED CONTAINER, WAFER TRANSFER SYSTEM, AND LID CLOSING METHOD FOR CLOSED CONTAINER - A plurality of detection marks that can be detected from outside are provided on a lid of a pod. Whether the lid is appropriately fixed on the pod main body is determined by detecting the presence of the marks at predetermined positions. Thus, whether the lid is appropriately fixed on the pod is detected in the operation of closing the pod opening with the lid in a FIMS system. | 10-01-2009 |
20090252580 | WAFER PROCESSING APPARATUS WITH WAFER ALIGNMENT DEVICE - A semiconductor-processing apparatus includes: a wafer handling chamber; a wafer processing chamber; a wafer handling device; a first photosensor disposed in the wafer handling chamber in front of the wafer processing chamber at a position where the wafer partially blocks light received by the first photosensor at a ready-to-load position and substantially entirely blocks light received by the first photosensor when the wafer moves from the ready-to-load position toward the wafer processing chamber in the x-axis direction; and a second photosensor disposed in the wafer handling chamber in front of the wafer processing chamber at a position where the wafer does not block light received by the second photosensor at the ready-to-load position and partially blocks light received by the second photosensor when the wafer moves from the ready-to-load position toward the wafer processing chamber in the x-axis direction. | 10-08-2009 |
20090263216 | Method and Device for Removing Pollution From a Confined Environment - The subject of the present invention is a method for removing pollution from a confined environment containing an interior space bounded by a wall, involving the following steps:
| 10-22-2009 |
20090317216 | METHOD AND APPARATUS FOR DETERMINING WEAR OF A CONTINUOUS CHAIN - A system for detecting wear in a gripper chain of a chain conveyor is provided. The system includes an optical sensing system having a detection path located vertically beneath a portion of the gripper chain at a predetermined location. The detection path is located such that, when the gripper chain becomes elongated and droops a predetermined amount due to wear of the gripper chain, the sensing system senses the presence of the gripper chain in the detection path. | 12-24-2009 |
20090324370 | DEVICE FOR FEEDING SAMPLE CONTAINERS WITH AN ANALYSIS SAMPLE TO A TREATING APPARATUS - The invention provides a device ( | 12-31-2009 |
20100021274 | WORKPIECE TRANSFER APPARATUS, CONTROL METHOD FOR WORKPIECE TRANSFER APPARATUS, AND PRESS LINE - By adopting a workpiece transfer apparatus, which grips a workpiece by use of a predetermined grip device and transfers the workpiece between press apparatuses each of which drives a die, including a transfer control device for controlling a position of the grip device based on a resultant target value obtained by combining a die position of a press apparatus located on an upstream side of a workpiece transfer direction (an upstream side die position) and a die position of a press apparatus located on a downstream side of a workpiece transfer direction (a downstream side die position), in which the transfer control device sets a resultant target value so that the grip device moves smoothly, it becomes possible to suppress vibration in a workpiece transfer apparatus in a press line. | 01-28-2010 |
20100034623 | PICKOFF MECHANISM FOR MAIL FEEDER - A pickoff system for removal of mail pieces one at a time from the end of a stack includes a pickoff belt mechanism, a sensor positioned to determine mail piece movement speed, and a measurement device determines belt movement speed during operation of the pickoff belt mechanism. A vacuum system includes a vacuum pump and a vacuum manifold positioned to apply suction to the mail piece in a direction that tends to hold the mail piece against the belt of the pickoff belt mechanism. A controller is configured to compare the belt movement speed and the mail piece movement speed during operation, and when mail piece movement speed is slower than belt movement speed, indicating slipping of the mail piece relative to the belt of the pickoff belt mechanism, the controller temporarily increases suction force applied to a mail piece being transported by the pickoff belt mechanism. | 02-11-2010 |
20100061829 | SYSTEM AND APPARATUS FOR PROGRESSIVE ROBOTIC TRUSS ASSEMBLY - A truss assembly station may include a jigging table for assembling a truss thereon and a truss assembler. The truss assembler is disposed at a mobile gantry suspended a predetermined distance from a surface of the jigging table. The mobile gantry is configured to move relative to the surface. The truss assembler is configured to enable assembly of a truss from truss members by providing an automatic sequential placement of the truss members based at least in part upon a planned location of pre-plated truss members within an assembled truss. | 03-11-2010 |
20100074717 | AUTOMATIC TRANSPORT SYSTEM AND CONTROL METHOD THEREOF - An automatic transport system includes: an overhead rail module having a plurality of transport rail sets, the transport rail sets each defining a bay; a plurality of overhead hoist transport vehicles movably disposed in the overhead rail module; and a control module electrically connected to the overhead hoist transport vehicles, the control module being used to control the number of the overhead hoist transport vehicles in the bays. Via this arrangement, the control module keeps some overhead hoist transport vehicles staying in each bay, thereby preventing one of the bays from having no overhead hoist transport vehicle to immediately use. This invention further provides a control method of the automatic transport system. | 03-25-2010 |
20100074718 | AUTOMATIC WAFER STORAGE SYSTEM AND A METHOD FOR CONTROLLING THE SYSTEM - An automatic wafer storage system and a method of controlling the system are disclosed. The automatic wafer storage system includes an analysis module and a storage unit. The analysis module estimates the locations between an idle equipment, a transport tool, and the storage unit, so as to control the storage unit and the transport tool to move to the best location for the transport tool to receive wafers from the storage unit. After that, the transport tool carries the wafers to the idle equipment for processing. | 03-25-2010 |
20100143082 | PORTABLE STOCKER AND METHOD OF USING SAME - A system comprising a conveyor. A semiconductor processing tool has a lifter port. The tool is positioned near the conveyor, such that the lifter port is configured to transport a Front Opening Unified Pod (FOUP) between the conveyor and the lifter port. An upstream stocker and a downstream stocker are both co-located with the conveyor and the tool. The upstream and downstream stockers each have a respective storage space for the FOUP and a respective robotic device configured to transport the FOUP between its respective storage space and the conveyor. The upstream stocker is configured to receive the FOUP from an overhead transport (OHT) and deliver the FOUP to the conveyor. The downstream stocker is configured to receive the FOUP from the conveyor and deliver the FOUP to the OHT. | 06-10-2010 |
20100158644 | SEMICONDUCTOR-PROCESSING APPARATUS EQUIPPED WITH ROBOT DIAGNOSTIC MODULE - A semiconductor-processing apparatus includes: a wafer transfer chamber provided with a wafer transfer robot having an end effector therein, at least one reactor connected to the wafer transfer chamber, and a robot diagnostic module connected to the wafer transfer chamber for diagnosing the transfer robot. The robot diagnostic module includes at least one sensor for detecting a position of the end effector when the end effector is located inside the robot diagnostic module. | 06-24-2010 |
20100202861 | TRANSFER SYSTEM - A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle. | 08-12-2010 |
20100209219 | ELECTRONIC DEVICE SORTER COMPRISING DUAL BUFFERS - A device handler for testing and sorting electronic devices has a testing station operative to test the electronic devices and to classify them according to different binning characteristics. A buffer assembly receives electronic devices which have been classified at the testing station, and the buffer assembly further comprises a first loading region having a plurality of receptacles and a second loading region having a plurality of receptacles. An output station is operative to unload electronic devices according to their different binning characteristics from either one of the first or second loading region of the buffer assembly for storage while electronic devices are being loaded onto the other loading region. | 08-19-2010 |
20100209220 | ROTARY ACTUATOR POSITION SENSOR - A rotary actuator position sensor comprises a target with a target surface coupled to a rotatable shaft and a sensor positioned to face the target surface. The target surface is configured to vary the distance between the target surface and the position sensor as the shaft is shifted from one rotational position to another. The sensor provides an analog output signal that corresponds to distance to the target and therefore to the rotational position of the shaft. A controller processes a signal corresponding to the sensor output signal to determine the rotational position. The controller can control the rotation of the shaft from one rotational position to another. The position sensor can be used in a wafer processing system with the controller also controlling movement of a wafer cassette holder into and out of wet tanks and between tanks. The controller can also control an optional agitator and front to back and back to front movement of the shaft. | 08-19-2010 |
20100232914 | METHOD AND APPARATUS FOR ROUTING WAFER PODS TO ALLOW PARALLEL PROCESSING - A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer pod. The first wafer pod is routed to a first tool, and at least a first operation is performed on the wafers in the first subset using the first tool. The second wafer pod is routed to a second tool, and the first operation is performed on the wafers in the second subset using the second tool. The wafers in the first and second subsets are consolidated following the performing of the first operation. | 09-16-2010 |
20100239397 | SUBSTRATE TRANSPORT APPARATUS AND CONTROL METHOD FOR SUBSTRATE TRANSPORT APPARATUS - This invention provides a substrate transport apparatus ( | 09-23-2010 |
20100254788 | METHOD AND DEVICE FOR ALIGNING COMPONENTS - Method and apparatus for aligning a small-size component with vacuum pick-up nozzles within turrets used with electronic components or assembly equipments. The method comprises the steps of picking-up the component with a pick-up nozzle; measuring a position of the component in respect to a defined value; bringing the component held by the pick-up nozzle in contact with a aligning device; holding the component with the aligning device and; moving the aligning device in order to align the component based on the position measurement. | 10-07-2010 |
20110033269 | CONTAINER-HANDLING PLANT WITH RETROACTIVE CORRECTION CAPABILITY AND METHOD FOR RETROACTIVELY CORRECTING FAULTS OCCURRING WITHIN A CONTAINER-HANDLING PLANT - A device and a method for the handling of containers with a plurality of handling units. A defective state in a handling element situated downstream can be recognized and as a reaction to this recognition a specified container conveyed upstream can be separated out, namely preferably that container which in the further operating sequence would arrive at the handling element known to be operating defectively. | 02-10-2011 |
20110158774 | SUBSTRATE PROCESSING APPARATUS AND METHOD - A substrate processing apparatus includes mounting units for mounting transfer containers, a substrate transfer unit for unloading substrates from a transfer container, processing unit for processing the substrates from the transfer container, an image pickup unit for capturing at one time an image of the entire substrate accommodating region of the transfer container before the substrate transfer unit unloads the substrates from the transfer container and a moving unit for moving the image pickup unit horizontally along one direction. The apparatus further includes an information acquiring unit for acquiring information on vertical positions of the substrates based on the image obtained by the image pickup unit and a control unit for controlling the substrate transfer unit to unload the substrates accommodated in the transfer container based on the information on the vertical positions of the substrates. The image pickup unit is provided in common for at least two of the transfer containers. | 06-30-2011 |
20110206486 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - Even when a module constituting a multi-module becomes an unavailable module, transfer of substrates can be promptly performed, while restricting generation of inferior products. When a destination module of a multi-module becomes unavailable before a substrate is transferred to the destination module, a destination of the substrate is changed to a module to which a substrate subsequent to the substrate is to be loaded. Upon generation of an unavailable module, before the transfer unit accesses the module on an upstream end of the transfer cycle, the transfer cycle proceeds until a precedent substrate becomes ready to be unloaded from the changed destination module. Alternatively, upon generation of an unavailable module, when the transfer unit is located on an upstream side of the unavailable module in the transfer cycle, the transfer operation of the transfer unit is made standby until a precedent substrate becomes ready to be unloaded in the changed destination module. | 08-25-2011 |
20110262251 | WORKPIECE CONVEYING SYSTEM - A workpiece conveying system includes at least three workpiece storage chambers arranged in a predetermined arrangement direction. A conveyance chamber is provided adjacent to the workpiece storage chambers. A workpiece processing chamber is provided adjacent to the conveyance chamber on the side opposite the workpiece storage chambers. First and second workpiece conveying robots are disposed in the conveyance chamber. The workpiece conveying robots are controlled by a controller and convey workpieces between the workpiece processing chamber and the workpiece storage chambers. The first and second workpiece conveying robots are spaced from each other in the arrangement direction. Each workpiece conveying robot conveys a workpiece into and out of at least two of the workpiece storage chambers. | 10-27-2011 |
20110274521 | CARRIER SYSTEM AND METHOD FOR HANDLING CARRIED OBJECT USING THE SAME - A processing equipment unit performs a predetermined process to a carried object. A case accommodates the carried object. A carrier carries the carried object in the case. An opener is configured to enable the carrier to mount the case on the opener. The opener includes an opener control unit configured to exchange a signal with the carrier to control elevation of the case. The carrier is configured to exchange a signal with the opener control unit thereby to mount the case on the opener. The opener is equipped to the processing equipment unit. | 11-10-2011 |
20110286819 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - A substrate processing apparatus includes a reactor; at least two boat conveying devices configured to convey at least two boats; at least one boat support table configured to support the at least two boats, the boat support table being movable to a position below the reactor; and a control unit configured to control the boat conveying devices such that when a first boat of the at least two boats supported by a first boat conveying device of the plurality of boat conveying devices holds a processed substrate processed by the reactor and is moved back to a position spaced apart from the reactor, a second boat of the at least two boats holding an unprocessed substrate is loaded into the reactor using a second boat conveying device of the at least two boat conveying devices. | 11-24-2011 |
20110286820 | DEVICE FOR POSITIONING A PLATE ELEMENT IN AN INFEED STATION OF A PROCESSING MACHINE - A device for positioning a plate element ( | 11-24-2011 |
20120003065 | CONVEYING DEVICE, CONVEYING METHOD AND MICROSCOPE SYSTEM - A conveying device including: a storage unit storing two or more sheets of slide glasses to be subjected to a predetermined treatment; a stage holding only one sheet of slide glass to be subjected to the treatment; a supply arm by which one sheet of slide glass to be subjected to the treatment is picked up from the storage unit and supplied onto the stage; a discharge arm by which the slide glass mounted on the stage is picked up and discharged in the storage unit; a moving unit operable to move the supply arm and the discharge arm in an integral manner so as to bring the supply arm or the discharge arm into proximity to each of the storage unit and the stage; and a control unit operable to control the supply arm, the discharge arm and the moving unit. | 01-05-2012 |
20120027545 | Apparatus for teaching a gripping device - An apparatus for teaching a gripping device is disclosed. The gripping device includes an arm. The arm has a free end that can be freely moved in an operating region and includes a gripper. The gripper includes at least one, preferably two pairs of spaced apart gripping tongs consisting of an electrically conductive material. A control unit is included electrically connected to the tongs or a measuring body. A detecting means detects current in a control line. The apparatus uses a reference component having three reference surfaces to determine a reference coordinate system. By pre-specifying several points on the reference component that are to be approached, an automated determination of the position and alignment of a chuck or pallet can be utilized. A highly accurate analysis of a current signal is used by the apparatus for teaching the gripping device. | 02-02-2012 |
20120034052 | COMPONENT TRANSFERRING APPARATUS AND IC HANDLER - An apparatus includes: a retainer moving between a shuttle and a socket; a presser holding a component; an adjuster moving the presser; a socket mark near the socket; a hand mark near the socket mark when the retainer is at a component mounting position; a first camera photographing a first image including the component and hand mark; a second camera photographing a second image including the socket mark and socket, and a third image including the socket mark and hand mark; a first calculator obtaining a first relative position between the socket mark and socket from the second image; a second calculator obtaining a second relative position between the socket mark and hand mark from the third image; and a third calculator obtaining a third relative position between the hand mark and component from the first image. The adjuster corrects the component's position based on the relative positions. | 02-09-2012 |
20120128451 | METHOD AND APPARATUS FOR EFFECTING TRANSFER OF REACTION RECEPTACLES IN AN INSTRUMENT FOR MULTI-STEP ANALYTICAL PROCEDURES - Systems for effecting transfer of reaction receptacles between modules of an instrument for performing multi-step analytical procedures and for adjusting for variations in the positions of such modules includes a receptacle carrier supported on a track on which the carrier translates between different modules located adjacent to the track. The carrier includes a receptacle distribution head supported on a receptacle carrier carriage. The distribution head includes a receptacle moving mechanism adapted to move receptacles into and out of the distribution head and into and out of a module. The carriage is engaged with the track and adapted for translation along the track. Drive systems effect powered translation of the carriage, powered elevation and rotation of the distribution head, and powered movement of receptacles into and out of the distribution head. A transfer position locating system automatically determines a receptacle transfer position of the receptacle carrier with respect to each module. | 05-24-2012 |
20120207566 | DEVICE AND METHOD FOR LOADING A FOOD PROCESSING MACHINE, IN PARTICULAR A FILLING MACHINE OR A CUTTER, WITH FOOD - A device and a method for loading a food processing machine, in particular a filling machine or a cutter, with food, including a container for receiving the food, a lifting means by which the container can be driven upwards, a drive for the lifting means, and a measuring means for detecting the amount of food in the container. | 08-16-2012 |
20120237321 | LIBRARY APPARATUS AND CONTROL METHOD THEREOF - A library apparatus includes a housing that has a magazine loading opening, the magazine storing a plurality of cartridges; a reader that reads an identifier provided on each cartridge stored in the magazine, the reader reading the identifiers while the magazine is being inserted through the magazine loading opening and pulled to a preset loading completion position; a transportation mechanism that is movable, the transportation mechanism including a removal mechanism that selectively removes one of the cartridges, and a connection member to be connected to the magazine inserted; and a controller that controls the transportation mechanism, wherein the transportation mechanism transports the removed cartridge to a cartridge processing unit, wherein the controller controls the transportation mechanism to stand by on the magazine loading opening side when the magazine is not loaded, and pull the magazine to the loading completion position when the controller detects that the magazine is inserted. | 09-20-2012 |
20120275885 | METHOD FOR OPERATING AN AUTOMATED SAMPLE WORKCELL - A method of operating the automated sample workcell for processing one or more biological samples is presented. The method comprises receiving one or more biological samples. Each biological sample is contained in a sample tube. Each sample tube is a tube type. If a test order was received for at least one of the biological samples, the test order being indicative of one or more first processing steps, the workcell can automatically execute the one or more first processing steps. If the test order was not received, one or more second processing steps can be determined based on the tube type of the sample tube that contains the at least one biological sample and the one or more second processing steps can then be executed. | 11-01-2012 |
20130004269 | System and Method for Picking and Placement of Chip Dies - According to an aspect of the invention, there is provided a chip die | 01-03-2013 |
20130017040 | Frame Feeding System and Frame Feeding MethodAANM OHKUBO; TatsuyukiAACI KumagayaAACO JPAAGP OHKUBO; Tatsuyuki Kumagaya JPAANM Yoda; MitsuoAACI KumagayaAACO JPAAGP Yoda; Mitsuo Kumagaya JP - In recent years, frames have gotten larger in size and thinner, and warping of the frames has posed a problem. If a warp of a frame is large, there is a high possibility that fetching the frame may fail. If fetching the frame fails, that is, if the frame cannot be fetched, the lead time of mounting gets longer. Further, the frame that cannot be fetched has to be manually removed by an operator. Therefore, a man-hour increases. According to the present invention, before a loader feeder fetches a frame from a frame magazine, a loader lifter is moved in a Y direction. Thereafter, the loader feeder fetches the frame from the frame magazine. | 01-17-2013 |
20130084148 | EFFICIENT PRODUCTION LINE FOR AEROSOL CANS - A production line with processing stations processing products with a production speed in products per unit time, the production line comprising a temporarily discontinuously operating processing station; a production line section connected upstream of the temporarily discontinuously operating processing station; a production line section connected downstream from the temporarily discontinuously operating processing station; a first product buffer arranged between the upstream production line section and the temporarily discontinuously operating processing station; and a second product buffer arranged between the temporarily discontinuously operating processing station and the downstream production line section. | 04-04-2013 |
20130202388 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM - There is provided a technique which can prevent poor processing of successive substrates in the event of a failure of a module or a transport mechanism for transporting a substrate between modules. A substrate processing apparatus includes: a plurality of modules from which a substrate holder of a substrate transport mechanism receives a substrate; a sensor section for detecting a displacement of the holding position of a substrate, held by the substrate holder, from a reference position preset in the substrate holder; and a storage section for storing the displacement, detected when the substrate holder receives a substrate from each of the modules, in a chronological manner for each module. A failure of one of the modules or the substrate transport mechanism is estimated based on the chronological data on the displacement for each module, stored in the storage section. This enables an early detection of a failure or abnormality. | 08-08-2013 |
20130330154 | SUPPORT FOR SEMICONDUCTOR SUBSTRATE - A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself. | 12-12-2013 |
20140050552 | INLINE SYSTEM - An inline system including a first apparatus having a first processing unit for processing a workpiece and an unloading area for unloading the workpiece processed by the first processing unit, a second apparatus having a loading area for loading the workpiece unloaded from the unloading area and a second processing unit for processing the workpiece loaded to the loading area, a transfer unit for transferring the workpiece from the unloading area to the loading area, and a position detecting unit for imaging the unloading area to detect the position of the unloading area and also imaging the loading area to detect the position of the loading area. The transfer unit transfers the workpiece from the unloading area to the loading area according to the position of the unloading area and the position of the loading area detected by the position detecting unit. | 02-20-2014 |
20140212246 | APPARATUS FOR PICKING, PLACING AND PRESSING SEMICONDUCTOR COMPONENTS - An apparatus for picking and placing or for picking and transferring or for picking, placing and pressing semiconductor components ( | 07-31-2014 |
20140271057 | TEMPERATURE CONTROL SYSTEMS AND METHODS FOR SMALL BATCH SUBSTRATE HANDLING SYSTEMS - Embodiments of substrate handling systems capable of heating and/or cooling batches of substrates being transferred into and out of various substrate processing chambers are provided. Methods of substrate handling are also provided, as are numerous other aspects. | 09-18-2014 |
20140294542 | POSITIONING DEVICE AND POSITIONING METHOD FOR POLARIZATION PLATE - The present disclosure provides a positioning device for a polarization plate. The positioning device is disposed adjacent to a transferring roller for receiving the polarization plate transferred from the transferring roller and further roughly positioning the polarization plate. The positioning device includes a positioning platform, a driving mechanism; and a conveying mechanism located under the positioning platform and connected to the driving mechanism. The conveying mechanism is capable of being driven to move upwards relative to the positioning platform by the driving mechanism to be partly exposed above the positioning platform. The positioning device of the present disclosure ensures that the whole polarization plate can enter the positioning platform from the transferring roller and be transferred to the target position. | 10-02-2014 |
20140369792 | DEVICE AND METHOD FOR COMBINING CARDS AND CARD SUPPORTS, FOR HANDLING CARDS AND/OR FOR SORTING CARDS - A device for combining cards and card supports in an application area, in which cards and card supports are united via an industrial manipulator, includes a card supplying element for supplying cards to the application area and a card support channel for supplying card supports to the application area, the device being designed as compact as possible. At least one card processing station, a measuring station and/or a reversible temporary storage area are arranged in the range of the manipulator. | 12-18-2014 |
20140369793 | LOAD PORT MODULE - A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame. | 12-18-2014 |
20150030417 | DEVICE FOR PROVIDING CONSUMABLE MATERIALS - The invention relates to a device ( | 01-29-2015 |
20150056045 | PROCESS STATION FOR A MACHINE AS WELL AS CONTROL DEVICE AND CONTROL METHOD FOR CONTROLLING A MOVEMENT IN A PROCESS OF A MACHINE - A process station for a machine includes a conveying system, where the conveying system includes a carrier, a driving device; and a first control unit and the conveying system can convey a load in a specific conveying direction by magnetic force provided by the driving device. The first control unit can control the driving device. The process station further includes a robot configured to handle or pick and place the load conveyed by the carrier. The process station further includes a second control unit configured to control movement of the robot in a moving direction different from the specific conveying direction. | 02-26-2015 |
20150110583 | AUTOMATIC TRANSPORT APPARATUS FOR PACKAGE MANUFACTURING - An apparatus comprises a stacker configured to stack planar workpieces into stacks, and a cutter configured to cut preforms out of planar workpieces. The cutter is located downstream of said stacker on a manufacturing line, and a conveyor exists between said stacker and cutter. The apparatus comprises a conveyor controller, which is configured to, after transferring a stack from said conveyor to a feeder section of said cutter; rewind the conveyor to place a foremost free location after existing stacks on the conveyor to a position where it is ready to receive a stack from said stacker. | 04-23-2015 |
20150110584 | SUBSTRATE PROCESSING APPARATUS - A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane. | 04-23-2015 |
20150117987 | SUBSTRATE TREATING APPARATUS, DRIVE ASSEMBLY, AND DRIVE MEMBER CONTROLLING METHOD - Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston. | 04-30-2015 |
20150139758 | SUBSTRATE CONVEYANCE METHOD, AND SUBSTRATE CONVEYANCE DEVICE - The purpose of the present invention is to accurately deal with a variety of processing conditions and variations thereof, and to improve total throughput by efficiently operating a conveyance arm device in accordance with the processing conditions, even during cleaning. When a first wafer is loaded on a load-lock chamber, a conveyance-sequence category for operating each of a number of steps for a conveyance arm device capable of operating during cleaning is selected in accordance with processing conditions of the wafer, and a plurality of operation patterns are selected, combined and scheduled. The conveyance arm device is controlled in accordance with the scheduled conveyance sequence to control substrate conveyance. | 05-21-2015 |
20150303083 | SUBSTRATE PROCESSING DEVICE AND SUBSTRATE TRANSFER METHOD - Provided is a substrate processing device capable of improving throughput without increasing the operation speed of a drive device. Vacuum processing chambers which house a wafer for plasma processing of the wafer are respectively provided with gate valves for opening and closing a wafer inlet/outlet port, and wafer detection sensors for detecting the wafer moving forward or backward through the wafer inlet/outlet port, and a scara robot for making extending/retracting motion and rotating motion transfers the wafer. At this time, the scara robot starts the rotating motion to transfer the wafer picked up from the vacuum processing chamber in response to a trigger signal transmitted from the wafer detection sensor. The trigger signal indicates that the wafer has passed through the wafer inlet/outlet port and has arrived at a point where the gate valve and the wafer inlet/outlet port no longer interfere with the wafer. | 10-22-2015 |
20150306773 | WORKPIECE CONVEYING DEVICE HAVING POSITIONING STRUCTURE - A workpiece conveying device capable of correctly positioning and conveying a workpiece that has a burr having an indefinite shape by means of a robot. A robot hand has first and second claws configured to move toward and away from each other. The first claw has a first contacting portion configured to come into contact with a lower surface of the burr, and a first clamping portion arranged at a front end of the first contacting portion and configured to come into contact with a main body of the workpiece. The second claw has a second contacting portion configured to come into contact with the lower surface of the burr, and a second clamping portion arranged at a front end of the second contacting portion and configured to come into contact with the main body. The first and second clamping portions cooperatively position and clamp the main body. | 10-29-2015 |
20150318197 | CONVEYANCE BASE AND CONVEYANCE SYSTEM - Provided is a conveyance system that adjusts the position of a conveyed substrate, prevents damage resulting from the heat of another apparatus in a conveyance base, prevents insufficient electrical power of another apparatus in the conveyance base, and can move the conveyance base smoothly. A substrate processing system is provided with a conveyance chamber and a sliding box moving within the conveyance chamber. A plurality of processing modules are connected, and the sliding box is provided with: a conveyance arm that moves wafers; a servo motor that moves the conveyance arm; and a servo motor driver that controls the electrical power supplied to the servo motor. A servo motor controller that controls the servo motor driver is disposed outside a transfer module, and the servo motor driver and servo motor controller perform optical communication. | 11-05-2015 |
20150318198 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - One or plurality of correction information corresponding to one or plurality of spin chucks are acquired in advance for adjustment of a position of a substrate by an aligner and are stored in a memory. Each correction information indicates a position to be adjusted by the aligner when the substrate is transported from the aligner to each spin chuck by a transport mechanism in order for a center of the transported substrate to coincide with a rotational center of the spin chuck. The position of the substrate is adjusted by the aligner based on the correction information, corresponding to the spin chuck, stored in the memory before the substrate is transported to any one of the spin chucks from the aligner during processing for the substrate. | 11-05-2015 |
20150336339 | Method and Apparatus For Transferring Objects Between Two Consecutive Processing Stations Being Operated With Different Cycle Speeds - A method for transferring objects such as ophthalmic lenses or contact lenses between two consecutive processing stations, particularly processing stations having differing cycle times or cycle speeds is disclosed, including removing the objects from a preceding processing station, in which the objects are advanced with a first cycle speed, transporting the removed objects to a subsequent processing station including a plurality of consecutively arranged receptacles ( | 11-26-2015 |
20150380289 | SMALL PRODUCTION DEVICE AND PRODUCTION SYSTEM USING THE SAME - [Problem to be Solved] | 12-31-2015 |
20160020125 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - During a teaching operation regarding a transport mechanism, a hand of the transport mechanism is moved to a tentative target position in a substrate supporter, and a substrate supported at a reference position in the substrate supporter is received by the hand. A positional relationship between the substrate held by the hand and the hand is detected. A deviation between the tentative target position and the reference position is acquired as correction information based on the detected positional relationship. During the teaching operation or during substrate processing, the tentative target position is corrected to a true target position to coincide with the reference position based on the acquired correction information. During the substrate processing, the hand is moved to the true target position, so that the substrate is transferred to the substrate supporter by the hand, or the substrate is received from the substrate supporter by the hand. | 01-21-2016 |
20160024638 | Shadow Mask Alignment Using Variable Pitch Coded Apertures - In a shadow mask-substrate alignment method, a substrate and a shadow mask each include a grate having a plurality of bars in spaced relation, wherein for each grate, each pair of spaced bars of each grate is separated by a gap. The spacing between at least three adjacent gaps is different or not of constant pitch, and at least one grate includes a gap that extends therethrough. The grate of the substrate and the grate of the shadow mask are positioned in a light path. Thereafter, the orientation of the substrate, the shadow mask, or both are caused to be adjusted to position the grate of the substrate, the grate of the shadow mask, or both until a predetermined amount of light or range of an amount of light on the light path passing through one or both of the grates is received by a light receiver. | 01-28-2016 |
20160071754 | TRANSPORT SYSTEM AND TRANSPORT METHOD - In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer. | 03-10-2016 |
20160091306 | SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHODS - In a state of mapping sensors having been advanced into a carrier by a sensor advance/withdraw mover, a sensor lifting and lowering device moves the mapping sensors up and down. With this movement, the mapping sensors detect presence or absence of substrates in a horizontal direction crossing a fore-and-aft direction in which the substrates are moved into and out of the carrier, and a height sensor detects heights of the mapping sensors. Consequently, substrate heights are detected in two different locations in the fore-and-aft direction. Based on the substrate heights, a substrate condition acquiring unit acquires a tilt of each substrate relative to the horizontal in the fore-and-aft direction. The tilt of each substrate inside the carrier is acquired in advance, thereby to be able to prevent substrate damage due to contact between a hand of a substrate transport mechanism and the substrates. | 03-31-2016 |
20160124006 | METHOD FOR HANDLING A SAMPLE TUBE AND HANDLING DEVICE - A method and a device for handling sample tubes are presented. A position of the sample tube is identified and the sample tube is handled depending thereon. | 05-05-2016 |
20160126128 | WAFER ALIGNER - A semiconductor wafer transport apparatus includes a frame, a transport arm movably mounted to the frame and having at least one end effector movably mounted to the arm so the at least one end effector traverses, with the arm as a unit, in a first direction relative to the frame, and traverses linearly, relative to the transport arm, in a second direction, and an edge detection sensor mounted to the transport arm so the edge detection sensor moves with the transport arm as a unit relative to the frame, the edge detection sensor being a common sensor effecting edge detection of each wafer simultaneously supported by the end effector, wherein the edge detection sensor is configured so the edge detection of each wafer is effected by and coincident with the traverse in the second direction of each end effector on the transport arm. | 05-05-2016 |
20160184945 | MACHINING DEVICE WITH VISUAL SENSOR FOR LOCATING CONTAMINANTS - A machining device is provided with a machine tool, a pallet to which a workpiece is secured, a pallet changer configured to move and change the pallet, and a workpiece attaching unit configured to attach and detach the workpiece to and from the pallet. Further, the machining device is provided with a visual sensor configured to capture an image of the pallet, and contaminants that may possibly cause jamming as the workpiece is supplied to the pallet are detected from the image captured by the visual sensor. A workpiece supply operation for the pallet is suspended if the contaminants are detected. | 06-30-2016 |
20160192546 | FEEDER AUTOMATIC DISTRIBUTION CONTROL DEVICE AND FEEDER AUTOMATIC DISTRIBUTION CONTROL METHOD - A feeder automatic distribution control device includes a feeder replenishment section that sequentially replenishes feeders for replenishment, which mounting modules are to be replenished with, a feeder recovery section that sequentially recovers feeders for recovery, which are to be recovered from the mounting modules, a transport lane that transports the feeders for replenishment and the feeders for recovery between each of the feeder replenishment section, the feeder recovery section and the mounting modules, and a control section that controls replenishment and recovery of the feeders for replenishment and the feeders for recovery that are transported in the transport lane, and the control section performs control so that the replenishment of the feeders for replenishment and the recovery of the feeders for recovery are concurrently performed in a sequential manner from mounting modules that are on either an upstream side or a downstream side of the component mounting line. | 06-30-2016 |