Class / Patent application number | Description | Number of patent applications / Date published |
219446100 | Having sensor | 51 |
20080283515 | TEMPERATURE CONTROL FOR PERFORMING HEAT PROCESS IN COATING/DEVELOPING SYSTEM FOR RESIST FILM - A temperature control method is used for controlling a temperature of a hot plate, so that a measured temperature of the hot plate conforms to a target temperature thereof, in a heat processing apparatus for performing a heat process on a substrate placed on the hot plate, which is used in a coating/developing system for applying a resist coating onto the substrate to form a resist film and then performing development on the resist film after light exposure. The method includes acquiring adjustment data necessary for adjusting a reaching time defined by a time period for increasing the temperature of the substrate from a first temperature around an initial temperature to a second temperature around the target temperature; and adjusting the target temperature by use of the adjustment data thus acquired, after starting the process on the substrate. | 11-20-2008 |
20090032522 | ZONE CONTROL HEATER PLATE FOR TRACK LITHOGRAPHY SYSTEMS - A substrate heater comprising a bake plate having an upper surface, a lower surface and a peripheral side surface extending between the upper and lower surfaces, the bake plate including at least one heating element, at least one temperature sensor and a plurality of wires including at least one wire coupled to the heating element and at least one wire coupled to the temperature sensor; a shield spaced apart from and generally surrounding the lower and peripheral side surfaces of the bake plate, the shield having an interior upper surface facing the lower surface of the bake plate, an interior side surface facing the peripheral side surface of the bake plate and a lower surface opposite the interior upper surface; a patterned signal layer formed on the lower surface of the shield, wherein the plurality of wires are electrically coupled to a corresponding plurality of signal traces formed in the patterned signal layer; and a connector, electrically coupled to the plurality of signal traces in the patterned signal layer, adapted to facilitate electrical connections to the plurality of wires. | 02-05-2009 |
20090173730 | HOB AND METHOD FOR OPERATING A HOB - In order in the case of a hob ( | 07-09-2009 |
20110174799 | MICRO-HOTPLATES - A micro-hotplate is provided in the form of a device comprising a sensor and one or more resistive heaters within the micro-hotplate arranged to heat the sensor. Furthermore a controller is provided for applying a bidirectional drive current to at least one of the heaters to reduce electromigration. The controller also serves to drive the heater at a substantially constant temperature. Such an arrangement is advantageous over an arrangement in which a unidirectional DC drive current is applied to the heater. This is because the unidirectional drive current causes electromigration which results in an increase in resistance over time. This is undesirable because it can lead to failure of the micro-hotplate. In contrast, the application of the bidirectional current reduces electromigration and as a result there is insignificant change in the resistance of the heater over time and under high temperature. This in turn improves the reliability of the micro-hotplate and therefore helps to improve the lifetime of the sensor | 07-21-2011 |
20110174800 | METHOD OF DETECTING ABNORMAL PLACEMENT OF SUBSTRATE, SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND SUBSTRATE PROCESSING APPARATUS - A method of detecting an abnormal placement of a substrate W, which is carried out when a substrate W placed on a substrate table | 07-21-2011 |
20120097661 | METHODS OF FAULT DETECTION FOR MULTIPLEXED HEATER ARRAY - Described herein is a method of detecting fault conditions in a multiplexed multi-heater-zone heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus. | 04-26-2012 |
20120234822 | Capacitance Sensing Switch Module - A capacitance sensing switch module is provided. The capacitance sensing switch module for controlling a cooktop includes a plate, at least one key, an insulating pad, a circuit board and at least one foil. The plate is disposed in a side of the cooktop and has at least one hole passing through the plate. The key is disposed in the hole. The insulating pad is disposed between the key and the plate. The key and the plate are separated by the insulating pad. The circuit board is disposed under the plate. The foil is disposed on the circuit board and on the position corresponding to the key. There is an insulation gap between the foil and the key. | 09-20-2012 |
20130334199 | THIN HEATED SUBSTRATE SUPPORT - Embodiments of the present invention provide an apparatus heating and supporting a substrate in a processing chamber. One embodiment of the present invention provides a substrate support assembly. The substrate support assembly includes a heated plate having a substrate supporting surface on a front side and a cantilever arm extending from a backside of the heated plate. The heated plate is configured to support and heat a substrate on the substrate supporting surface. The cantilever arm has a first end attached to the heated plate near a central axis of the heated plate, and a second end extending radially outwards from the central axis. | 12-19-2013 |
20140083993 | PRINTED CIRCUIT BOARD FOR A DOMESTIC APPLIANCE, DOMESTIC APPLIANCE, AND A METHOD FOR OPERATING A DOMESTIC APPLIANCE - A printed circuit board for a domestic appliance includes at least one conductive path which is provided on at least one of two sides of the printed board and adapted for supply with a load current. The printed circuit board has at least one magnetic field sensor which is configured and disposed to read a magnetic field that can be generated by the load current. The load current flowing through the at least one conductive path of the printed circuit board can be detected by contactless reading of the magnetic field generated by the load current through the at least one conductive path. | 03-27-2014 |
20140263275 | ROTATION ENABLED MULTIFUNCTIONAL HEATER-CHILLER PEDESTAL - Embodiments of the present disclosure provide apparatus and methods for improving process uniformity. Particularly, embodiments of the present disclosure provide a rotatable temperature controlled substrate support for a semiconductor processing chamber. The rotatable temperature controlled substrate support includes one or more heating elements, one or more temperature sensors and cooling channels for circulating a cooling/heating fluid in the rotatable temperature controlled substrate support. One embodiment of the present disclosure includes a thermocouple extension assembly for extending cold junctions of the thermocouple in the substrate support away from the substrate support. The thermocouple extension assembly includes extension cords formed from materials matching with the materials of thermocouple. | 09-18-2014 |
20150323192 | COOKTOP WITH WINDOW AND END PLATE, COOKING APPLIANCE, AND METHOD FOR MANUFACTURING THE COOKTOP - A cooktop for a fixed or mobile cooking appliance, including a base plate, at least a part, or all, of a peripheral outer edge of a window not being in the plane of a peripheral outer edge of the base plate, at least one end plate which is made of different material than that of a seal and is disposed above or on the seal, at least a part of an outer surface of the seal which is located between the outer surface of the base plate and the outer surface of the window being covered by the end plate. | 11-12-2015 |
219447100 | Responsive to presence of material (e.g., food, a cooking vessel, etc.) | 8 |
20080237215 | Method for controlling heating cooking apparatus - A method for controlling a heating cooking apparatus, in which an operation of a heating unit is appropriately controlled according to presence/absence or kinds of a load applied to a plate. When no load is applied to the plate, the duty cycle of a heat source is reduced, thereby preventing unnecessary operation of the heat source. Accordingly, power consumption is reduced. On the other hand, when a load is applied to the plate, the duty cycle of the heat source is increased. Speedy cooking may be possible with this control method. | 10-02-2008 |
20090127245 | Cooking Appliance - A cooking appliance, particularly an elevated-mounted cooking appliance, comprising: at least one muffle, which delimits a cooking compartment and whose muffle opening is surrounded by a muffle frame; a door for closing the muffle opening, and; a drive device, which is controlled by a control device and which serves to displace the door. A speed measuring device for determining the displacement speed of the door is provided that enables a pinching in the door to be detected by monitoring the displacement speed. | 05-21-2009 |
20100018961 | COOKING APPARATUS - Provided are a cooking apparatus and a method for controlling the same. The cooking apparatus senses the size of a cooking vessel, or more specifically, the undersurface area of the cooking vessel, and selectively operates heaters accordingly. Therefore, food can be more efficiently cooked. | 01-28-2010 |
20100133257 | Rapid Thermal Processing Chamber With Micro-Positioning System - Methods and apparatus for rapid thermal processing of a planar substrate including axially aligning the substrate with a substrate support or with an empirically determined position are described. The methods and apparatus include a sensor system that determines the relative orientations of the substrate and the substrate support. | 06-03-2010 |
20130175254 | COOK TOP APPLIANCE HAVING SPILL AND BOIL-OVER DETECTION AND RESPONSE - A cook top appliance that can detect a food deposit on the cook top surface from a spill or boil-over is provided. A sensor zone that surrounds a heating source is used to detect the food deposit. Based on the detection of the food deposit, the cook top appliance can take one or more remedial actions to e.g., notify the user and/or modify the operation of the heating source. A variety of configurations of the sensor zone are described. | 07-11-2013 |
20130240501 | SELF REGULATED FOOD WARMER - A self-regulated food warmer that blows hot air onto food whenever a weight is placed on its food shelf. The self-regulated food warmer conserves energy by powering down when not in use, utilizes hot air to keep food warm, eliminates the costs of replacing heat lamps, and eliminates dangerously hot plates. | 09-19-2013 |
20160037589 | INDUCTION COOKTOP - The present disclosure relates to an induction cooktop. The induction cooktop comprises a ceramic cooking surface in connection with a housing. A plurality of inductors is disposed in the housing and each of the inductors is in communication with an automatic control system. The automatic control system is configured to check for the presence of a cooking pan on the cooktop in order to prevent the inductors from activating in the absence of the cooking pan. The automatic control system is activated upon receiving an activation command. | 02-04-2016 |
20160084507 | STOVE TOP HAVING A COOKING ZONE AND A REDUCED SYMBOL DEPICTION IN THE COOKING ZONE IN A DISPLAY UNIT AND METHOD FOR OPERATING A STOVE TOP - A stove top includes a stove top plate having at least one area-connected cooking zone for placement of an item of cookware in variable positions. Formed on the stove top plate is a display unit for displaying information about a position of the item of cookware on the cooking zone. The display unit has a first display field in which a plurality of separate display regions are fixedly arranged adjacent to one another, with each display region displaying a reduced symbol depiction of the entire cooking zone. Lighting devices are assigned to the symbol depictions of the display regions, respectively, to illuminate the symbol depictions in at least a plurality of partial areas having different surfaces and/or different surface-areas. | 03-24-2016 |
219448110 | Responsive to temperature | 32 |
20080217318 | Dynamic temperature sensor device - Temperature sensor device inserted into a radiant heater ( | 09-11-2008 |
20090242546 | COOKING APPARATUS WITH THERMALLY SHIELDED TEMPERATURE SENSOR - A cooking apparatus includes a heating element and a cooking plate arranged and configured to be heated by the heating element, the cooking plate having a first surface facing the heating element and a cooking surface opposite the first surface. A thermostat is located proximate the first surface and associated with a heating element control. An insulating heat shield arrangement partially surrounds the thermostat and shields a shielded portion of the first surface adjacent the thermostat from direct heating by the heating element. The insulating heat shield arrangement is configured to provide a thermal resistance R | 10-01-2009 |
20090294432 | COOKTOP, HEATER SUPPORT DEVICE OF COOKTOP, AND HEATER SUPPORT SPRING OF COOKTOP - A cooktop is provided. The cooktop includes, a main machine, at least one heater disposed inside the main machine, a temperature sensor for measuring a temperature of the heater, a fixing member formed in the main machine, a top glass disposed on the upper side of the main machine, and a heater support spring for supporting the heater. The heater is provided with a bracket. The heater support spring is fixed to the main machine using the fixing member, caught and supported at the heater by the bracket to seat and elastically support the heater, and limit rotation of the heater. | 12-03-2009 |
20100051603 | EGG COOKING UTENSIL - A utensil for cooking eggs without shells which has separate egg cooking and steam generation zones, a lid and direct heat in co-ordination with controls so that at least one cooking cycle can be repeated. | 03-04-2010 |
20120111852 | METHOD AND APPARATUS FOR TEMPERATURE MONITORING OF A COOK TOP - A method and apparatus for monitoring the temperature of a cook top is provided. Overhead sensors are used for temperature sensing of a heating element, cooking utensil, and/or food located on the cook top. The resulting temperature information is then communicated to the cook top. Features associated with use of the temperature information such as various notifications to the operator and/or regulation of the heating elements can be also provided. | 05-10-2012 |
20120211484 | METHODS AND APPARATUS FOR A MULTI-ZONE PEDESTAL HEATER - The present invention provides systems, methods and apparatus for manufacturing a multi-zone pedestal heater. A multi-zone pedestal heater includes a heater plate which includes a first zone including a first heating element and a first thermocouple for sensing the temperature of the first zone wherein the first zone is disposed in the center of the heater plate; and a second zone including a second heating element and a first embedded thermocouple for sensing the temperature of the second zone wherein the first embedded thermocouple includes a first longitudinal piece that extends from a center of the heater plate to the second zone and the first longitudinal piece is entirely encased within the heater plate. Numerous additional aspects are disclosed. | 08-23-2012 |
20130068751 | COOKING APPLIANCE WITH DETACHABLE POWER AND THERMOSTAT UNIT - The invention involves a detachable powerplug connector and plug seat connection of an electric griddle. A thermostat is in a plug control box, to which external power input connector is connected. A temperature control knob is fixed on the plug control box, and a socket with plug through-hole is installed at the front end of the plug control box. A heat transfer inserting hole is in the thermostat and received a heat transfer rod extending from the pan body between the plugs in a flexible way, and the end will get in touch with the thermostat, which enables the pan body to transfer heat directly to the thermostat in the plug control box via the heat transfer rod. The plug control box is equipped with an independent adjustable temperature control knob connected to the thermostat, which will facilitate temperature adjustment for the users. | 03-21-2013 |
20130146582 | Heating Device, Cooking Field and Method for Operating a Heating Device - A heating device for a cooking field is arranged beneath a cooking field plate, wherein the heating device comprises a temperature sensor and a wire heating element for generating heating power. The temperature sensor is provided between the heating element and the cooking field plate and has a longitudinal and rod-like sensing part. The heating element is arranged directly beneath and aligned with the sensing part such that the sensing part is exposed to heating power from the heating element. The heating power ranges in power from 0.5 W up to 2.5 W per centimeter of length of the sensing part. This serves for a faster activation of a residual heat indicator by the temperature sensor. | 06-13-2013 |
20140197151 | SUBSTRATE SUPPORT WITH SWITCHABLE MULTIZONE HEATER - Embodiments of substrate supports with a heater are provided herein. In some embodiments, a substrate support may include a first member to distribute heat to a substrate when present above a first planar surface of the first member, a second member disposed beneath the first member, the second member including a plurality of resistive heating elements, wherein the plurality of resistive heating elements provide local temperature compensation to the first member to heat the substrate when present, a third member disposed beneath the second member, the third member including one or more base heating zones to provide a base temperature profile to the first member, and a fourth member disposed beneath the third member, the fourth member including a first set of electrical conductors coupled to each of the resistive heating elements. | 07-17-2014 |
20150048076 | HEATING DEVICE AND METHOD FOR OPERATING A HEATING DEVICE - A heating device for a cooking point in a hob has three independent and separate long heating elements which are arranged on a support of the heating device along concentric circles. The support has a central region around the centre point, an outer region adjoining an outer edge, and an intermediate region between the central region and outer region. A rod-type thermostat engages over the heating device for the purpose of temperature detection. The first and the third heating element are connected to an energy supply over the rod-type thermostat. A second heating element is connected to an energy supply without interconnection of the rod-type thermostat, wherein the second heating element is arranged on the support in the central region, in the intermediate region and in the outer region. | 02-19-2015 |
20150114948 | SUBSTRATE SUPPORT WITH QUADRANTS - The present invention generally relates to a substrate support for use in a processing chamber. The substrate support is divided into quadrants with each quadrant capable of heating independent of the other quadrants. The independent heating permits the substrate support to provide different heating to either different substrate simultaneously disposed on the substrate support or to different areas of a common substrate. Thus, the substrate heating may be tailored to ensure desired processing of the substrate or substrates occurs. | 04-30-2015 |
20160011134 | HEATER STRUCTURE FOR A SENSOR DEVICE | 01-14-2016 |
20160255678 | TEMPERATURE CONTROLLER | 09-01-2016 |
219448120 | Having microprocessor to control output of the heating device | 9 |
20080217319 | Method and Device for the Thermal Treatment of Substrates - This invention relates to a method and a device for the thermal treatment of substrates in which the substrates are held in contact with or a small distance away from a heating plate, which is heated by a plurality of separately controllable heating elements on the side of the heating plate facing away from the substrate, the heating plate being surrounded, at least in its plane, by a frame spaced apart therefrom, and gas being conveyed, in a controlled manner, through a gap between the frame and at least one edge of the heating plate. | 09-11-2008 |
20080245783 | FOOD HEATING WARMER - A food heating warmer includes a placing section divided into a plurality of divided sub-sections in a warming compartment so that food is placed on the placing section, a plurality of constant temperature heating units located so as to correspond to the divided sub-sections of the placing section, each unit including a heater for heating the divided sub-section, a divided section temperature sensor detecting a temperature in each divided sub-section, and a switching element turning the heater on and off according to the temperature detected by the divided sub-section temperature sensor, a failure detecting unit which detects failures of the constant temperature heating units provided for the respective divided sub-sections of the placing section, and a notifying unit which specifies and notifies the constant temperature. heating unit for which failure has been detected by the failure detecting unit. | 10-09-2008 |
20100282733 | THERMAL PROCESSING APPARATUS - A thermal processing apparatus includes a chamber for accommodating a semiconductor wafer and a radiant fitting. The radiant fitting includes a plurality of first radiant sources having a first reflectivity positioned in a center region of the radiant fitting and a plurality of second radiant sources having a second reflectivity. The second reflectivity is larger than the first reflectivity. | 11-11-2010 |
20120279955 | TEMPERATURE CONTROL METHOD OF HEAT PROCESSING PLATE, COMPUTER STORAGE MEDIUM, AND TEMPERATURE CONTROL APPARATUS OF HEAT PROCESSING PLATE - In the present invention, temperature drop amounts of heating plate regions when the substrate is mounted on a heating plate are detected to detect a warped state of the substrate. From the temperature drop amounts of the heating plate regions, correction values for set temperatures of the heating plate regions are calculated. The calculation of the correction values for the set temperatures of the heating plate regions is performed by estimating steady temperatures within the substrate to be heat-processed on the heating plate from the temperature drop amounts of the heating plate regions using a correlation obtained in advance. From the estimated steady temperatures within the substrate and the temperature drop amounts of the heating regions, the correction values for the set temperatures of the heating plate regions are calculated. Based on the correction values for the set temperatures, the set temperatures of the heating plate regions are changed. | 11-08-2012 |
20130140292 | STOVETOP INTERFACE, SYSTEM AND METHODS OF TEMPERATURE CONTROL OF COOKWARE, AND METHODS OF COOKING USING NUMERICAL TEMPERATURE CONTROL - A temperature control interface for a stove top is provided. The temperature control interface includes a numerical temperature setting to which a temperature of an object heated on the stovetop will be regulated for a predetermined period of time. A method of cooking on a stovetop is provided in which a recipe includes a numerical temperature to which a cookware object should be regulated during cooking for a predetermined period of time. | 06-06-2013 |
20130270252 | METHODS AND APPARATUS FOR CONTROLLING TEMPERATURE OF A MULTI-ZONE HEATER IN A PROCESS CHAMBER - Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination. | 10-17-2013 |
20130292370 | METHOD AND DEVICE FOR MEASURING TEMPERATURE OF SUBSTRATE IN VACUUM PROCESSING APPARATUS - A method and device for determining temperature of a substrate in a vacuum processing apparatus during a process of the substrate are disclosed, the substrate to be measured is placed on a susceptor in the vacuum processing apparatus for a manufacture process, and the method includes: selecting i wavelengths from radiance emitted from the susceptor through a substrate, where i is a natural number greater than 1; obtaining at least i pieces of radiance corresponding to the selected i wavelengths; and calculating the temperature of the substrate based on the i pieces of radiance and the i wavelengths, by using a mathematical equation: E(λ | 11-07-2013 |
20140305928 | APPARATUS, SYSTEM, AND METHOD FOR A HEATING SURFACE HAVING A SELECTABLE SHAPE, SIZE, LOCATION, AND HEAT INTENSITY - A heating appliance includes a heating structure having a lower surface and a flat upper surface for supporting and imparting heat into an object, such a pot or pan used to cook food. The heating structure includes an array of heating elements arranged on the lower surface of the heating structure in an m×n array having m columns and n rows. Each element is thermally coupled to a region of the structure for heating its respective region of the structure independently of other regions of the structure associated with the other heating elements. | 10-16-2014 |
20160205725 | SYSTEM AND METHOD FOR MONITORING TEMPERATURES OF AND CONTROLLING MULTIPLEXED HEATER ARRAY | 07-14-2016 |
219448130 | Of material (e.g., food, a cooking vessel, etc.) | 6 |
20090145891 | Ceramic Hob - A ceramic hob for a cooking appliance provided with a control device for controlling and/or adjusting a real temperature value on at least one part of a cooking plate arranged in a container for cooking by means of an associated heating device. The inventive ceramic hob comprises at least one temperature sensor for determining the real temperature value of a heatable part and at least one control element used for setting said temperature to a desired value, wherein a desired temperature value of the heatable part is assigned thereto. According to said invention several desired values can be assigned to one control element. | 06-11-2009 |
20090255921 | Apparatus Including Heating Source Reflective Filter For Pyrometry - Methods and apparatus for processing substrates and measuring the temperature using radiation pyrometry are disclosed. A reflective layer is provided on a window of a processing chamber. A radiation source providing radiation in a first range of wavelengths heats the substrate, the substrate being transparent to radiation in a second range of wavelengths within the first range of wavelengths for a predetermined temperature range. Radiation within the second range of wavelength is reflected by the reflective layer. | 10-15-2009 |
20110042368 | ELECTRICAL HEATING ARRANGEMENT - An electrical heating arrangement ( | 02-24-2011 |
20110062141 | GRILLING DEVICE FOR PROPERLY AND UNIFORMLY COOKING FOODSTUFFS - A cooking device comprises a base and a heating element supported by the base. A cooking plate is heated by the heating element and includes at least a first cavity for receiving an item being cooked. At least a first temperature probe is disposed in the first cavity for piercing the item being cooked. | 03-17-2011 |
20150108110 | TEMPERATURE CONTROLLED HEATING UNIT - A heating apparatus including a first heating plate configured to contact a first side of an object to heat the object and a second heating plate configured to contact a second side of the object opposite the first side to heat the object. The heating apparatus includes a controller configured to determine a temperature of the object based on sensor data received from a temperature sensor and to control a position of the first heating plate based on the determined temperature of the object. | 04-23-2015 |
20150312964 | WIRELESSLY OPERABLE COOKING APPLIANCE - A wirelessly operable cooking appliance for cooking food products includes a wireless communication device. A computing device, such as a smartphone, can wirelessly communicate with the cooking appliance to control and monitor the cooking appliance. | 10-29-2015 |
219448170 | Of the exposed horizontal planar support surface | 4 |
20080302782 | Electric Range - The present invention relates to an electric range comprising a body ( | 12-11-2008 |
20110049127 | NON-CONCENTRIC SURFACE HEATING ELEMENT SWITCH - A cooking appliance has a cooktop including a plurality of separately controlled cooking areas. A first heating element and a second heating element are positioned below one of the separately controlled cooking areas. A control switch is coupled to the first heating element and the second heating element and is operable to selectively energize the first heating element and the second heating element. | 03-03-2011 |
20150076135 | HEATED SUBSTRATE SUPPORT WITH TEMPERATURE PROFILE CONTROL - Methods and apparatus of substrate supports having temperature profile control are provided herein. In some embodiments, a substrate support includes: a plate having a substrate receiving surface and an opposite bottom surface; and a shaft having a first end comprising a shaft heater and a second end, wherein the first end is coupled to the bottom surface. Methods of making a substrate support having temperature profile control are also provided. | 03-19-2015 |
20160174299 | RADIANT HEATER FOR A COOKTOP | 06-16-2016 |