Class / Patent application number | Description | Number of patent applications / Date published |
062550500 | LOW PRESSURE COLD TRAP PROCESS AND APPARATUS | 74 |
20080209920 | METHOD OF OPERATING AN ADSORPTION REFRIGERATION SYSTEM - A method is provided of operating an adsorption refrigeration system. The system comprises a primary adsorption pump which is arranged in communication with a primary chamber containing coolant, a secondary adsorption pump and a high fluid impedance conduit which places the secondary adsorption pump and primary chamber into communication. The method comprises saturating the primary and secondary adsorption pumps with coolant whilst each pump is at its respective operational temperature. The pumps are then heated above their operational temperatures to desorb the coolant such that the coolant pressure in the primary chamber and the secondary adsorption pump substantially equalises through the conduit whilst the primary chamber is cooled. The secondary adsorption pump is then cooled causing coolant gas to be adsorbed and therefore a reduction in temperature and pressure of the coolant in the primary chamber is effected. The primary adsorption pump is then cooled to an operational temperature causing adsorption of the coolant and therefore a reduction in temperature and pressure of the coolant in the primary chamber. | 09-04-2008 |
20080282710 | Integral facet cryopump, water vapor pump, or high vacuum pump - A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock. | 11-20-2008 |
20090007574 | Integration of Automated Cryopump Safety Purge - A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user. | 01-08-2009 |
20090038319 | Cryopanel and Cryopump Using the Cryopanel - A cryopanel used for a cryopump, the cryopump including a vacuum chamber having a gas flow-in opening; a stage provided in the vacuum chamber; and a cryocooler configured to cool the stage, the cryopump being configured to solidify or absorb a molecule flowing from the gas flow-in opening into the vacuum chamber, the cryopanel includes a first panel held and cooled by the stage, the first panel having a surface facing toward the gas flow-in opening; and a second panel held by the first panel and extending from the first panel in an upstream direction of a gas flow-in, the second panel having a surface where an absorption material layer is formed. | 02-12-2009 |
20090056346 | CONDUIT TRAP AND CONDENSATION RECOVERY DEVICE - The present invention provides a conduit trap, which can also operate as condensation recovery device when installed in a refrigeration system drainage line. The conduit trap is generally a hollow body defining a fluid path that includes an upper conduit | 03-05-2009 |
20090107154 | COOLING TRAP UNIT - A cooling trap unit including a vacuum vessel with a drain port, a refrigerator connected to the vacuum vessel such that an endothermic unit is located on a vacuum side, and a cooling panel which is fixed to the endothermic unit to be in tight contact with it and condenses or solidifies gas, includes a water reservoir unit capable of storing liquefied liquid in the vacuum vessel, when liquefying the gas condensed or solidified by the cooling panel and discharging the liquid outside the vacuum vessel, such that the liquefied liquid is in contact with the cooling panel, and a detection unit for discharging the liquid stored in the water reserving unit through the drain port based on a detection signal which is obtained by detecting a change in temperature of the liquid and indicates that the temperature reaches a predetermined value | 04-30-2009 |
20090126374 | CRYOPUMP APPARATUS AND OPERATION METHOD THEREFOR - A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining the connection state between the controller and the cryopump, and a display device which displays an abnormal point for the cryopump estimated from the determination result obtained by the controller. | 05-21-2009 |
20090165469 | Cryopump and evacuation method - A cryopump includes: a cryopump chamber having an inlet port through which a gas to be pumped is introduced; a refrigerator provided with a second cooling stage provided in the cryopump chamber; an intermediate member thermally coupled to the second cooling stage; and a cryopanel having a connecting part connected to the intermediate member at a position farther from the inlet port in the direction in which the gas is introduced than the second cooling stage, and extending from the connecting part toward the inlet port. For example, a cryopump having a suspended panel structure is provided. | 07-02-2009 |
20090165470 | CRYOPUMP, CRYOPUMP UNIT, VACUUM PROCESSING APPARATUS INCLUDING CRYOPUMP UNIT, AND CRYOPUMP REGENERATION METHOD - A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump vessel has reached a set pressure higher than the water vapor pressure at 0° C., a pressure rise test step of stopping the evacuation and performing a pressure rise test, and an observation step of observing residual water based on the internal pressure of the pump vessel. | 07-02-2009 |
20090249801 | COLD TRAP TO INCREASE GAS RESIDENCE TIME TO INCREASE CONDENSATION OF VAPOR MOLECULES - A cold trap is disclosed with a chamber having partitions or surfaces that direct the incoming wet vapor to substantially all of the cold inner surfaces of the cold trap. Typically, the cold inner surfaces are the inner walls of the chamber. The interaction of the wet vapor and the cold surfaces condense the molecules. The wet vapor minus the condensed molecules may be heated and returned to the source of the wet vapor for reuse. One example of the partitions or surfaces is a spiral inclined plane where the wet vapor flows along the spiral plane that acts to drive the wet vapor toward the cold inner walls of the chamber. | 10-08-2009 |
20090266088 | Cold trap and cold trap regeneration method - A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a controller configured, in a regeneration process for evaporating a gas frozen on the surface of the cold panel and discharging the gas outside using the vacuum pump, to control the refrigerator so as to raise the temperature of the cold panel to a temperature exceeding a non-liquefaction temperature range and to adjust a pressure in the pumping path at the temperature so that the gas frozen on the surface of the cold panel is evaporated without being melted, the non-liquefaction temperature range being a range in which it is guaranteed that a gas frozen on the surface of the cold trap is evaporated without being melted. | 10-29-2009 |
20090282841 | Cryopump - A cryopump includes: a refrigerator having a first cooling stage and a second cooling stage cooled to a temperature lower than that of the first cooling stage; a radiation shield on side surface of which is formed an opening, in which the refrigerator is inserted through the opening such that the first cooling stage is arranged outside and the second cooling stage is arranged inside, and which is thermally connected to the first cooling stage; and a refrigerator cover thermally connected to the second cooling stage, which extends through the opening from the inside to the outside of the radiation shield, and which is spaced apart from the radiation shield at the opening. | 11-19-2009 |
20100000235 | Cryopump - A cryopump includes a radiation shield provided with a main inlet at one end thereof and a sub-inlet in a side thereof; and a cryopanel assembly cooled to a temperature lower than that of the radiation shield. The cryopanel assembly includes an upper structure having at least one cryopanel and a lower structure having at least one cryopanel. The upper and lower structures are arranged inside the radiation shield along a direction away from the main inlet. A frost accommodating space connected to the sub-inlet may be arranged between the upper and lower structures such that an amount of captured gas on an upper end cryopanel of the lower structure is greater than an amount of captured gas on a lower end cryopanel of the upper structure. | 01-07-2010 |
20100011783 | CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP - A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body | 01-21-2010 |
20100011784 | CRYOPUMP LOUVER EXTENSION - A standard size cryopump adapted to be mounted behind a nonstandard gate valve by extending the inlet array to a larger diameter. A standard size cryopump adapted to be mounted behind a nonstandard gate valve by using an extension attached to flanges, where the flanges correspond to the diameter of the nonstandard gate valve. | 01-21-2010 |
20100077771 | Cryopump - A cryopump includes a second-stage cryopanel, a radiation shield that surrounds the second-stage cryopanel and has a shield opening, and a first-stage cryopanel provided in the shield opening. The first-stage cryopanel includes a first panel provided with opening regions thereon in a first distribution, and a second panel arranged closer to the second-stage cryopanel than the first panel and provided with opening regions thereon in a second distribution different from the first distribution when viewed in an arrangement direction of the first and second panels. | 04-01-2010 |
20100115971 | CRYOPUMP - A cryogenic refrigerator of a cryopump generates cryogenic cooling in an expansion volume by reciprocally moving a displacer in a cylinder. A cryopanel and a cup-shaped shield are received in a vacuum chamber of the cryopump and are cooled by the cryogenic cooling. The shield protects the cryopanel from radiant heat of the vacuum chamber. A louver is provided at an upper opening of the shield. A hole is formed at a bottom or side of the cup-shaped shield defining a storage part. Molecules in the vacuum chamber are solidified at or absorbed by the cryopanel and the shield. During regeneration, temperature of the cryopanel and the shield is increased. Water molecules desorbed and liquefied from the louver, the shield or the cryopanel are accumulated during regeneration at the storage part that has enough volume to store the water molecules. | 05-13-2010 |
20100186427 | Exhaust system - An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a high-pressure gas supply pipe, and a first sub-compressor which is driven at a predetermined driving frequency to supply compressed gas at a first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe. In addition, a second sub-compressor is driven at a predetermined driving frequency to supply compressed gas at a second gas volume larger than the first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe, and a controller monitors a driving frequency of the master compressor and controls driving or a stop of the first sub-compressor and driving or a stop of the second sub-compressor, based on the driving frequency. | 07-29-2010 |
20110016890 | Cryopump and method of monitoring cryopump - A cryopump pumps gas from a vacuum chamber in a vacuum apparatus performing vacuum processing. The cryopump comprises: a refrigerator; a cryopanel cooled by the refrigerator; and a controller configured to control an operating cycle of the refrigerator such that the cryopanel is controlled so as to have a target temperature. When an operating cycle of the refrigerator has reached a first determination reference, the controller monitors the operating cycle for a first determination period of time, and when the operating cycle has reached a second determination reference, which corresponds to a higher load than the first determination reference, the controller monitors a temperature of the cryopanel for a second determination period of time, which is shorter the first determination period of time. | 01-27-2011 |
20110016891 | Cryopump Network - A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices. | 01-27-2011 |
20110030392 | EXPANDER SPEED CONTROL - Apparatus and method for controlling the speed for a GM type expander includes relays that interrupt power when the current in the line is zero. The speed controller apparatus limits the maximum speed providing the expander with sufficient gas to meet its cooling requirements. | 02-10-2011 |
20110162391 | Method and Apparatus for Providing Temperature Control to a Cryopump - Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating. | 07-07-2011 |
20110225989 | Cold trap and vacuum evacuation apparatus - A cold trap includes a refrigerator and a cold panel that is thermally connected with the refrigerator to be cooled. A rough surface is formed on the cold panel. The cold trap is arranged, for example, in an evacuation channel for connecting a vacuum chamber with a turbo-molecular pump in order to freeze and capture, on a surface thereof, part of a gas that is to be sucked and pumped into the turbo-molecular pump from the vacuum chamber through the evacuation channel. | 09-22-2011 |
20110265495 | Cold trap and cold trap regeneration method - A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a controller configured, in a regeneration process for evaporating a gas frozen on the surface of the cold panel and discharging the gas outside using the vacuum pump, to control the refrigerator so as to raise the temperature of the cold panel to a temperature exceeding a non-liquefaction temperature range and to adjust a pressure in the pumping path at the temperature so that the gas frozen on the surface of the cold panel is evaporated without being melted, the non-liquefaction temperature range being a range in which it is guaranteed that a gas frozen on the surface of the cold trap is evaporated without being melted. | 11-03-2011 |
20110265496 | PROCESS CHAMBER WITH INTEGRATED PUMPING - A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber. | 11-03-2011 |
20120060518 | Cryopump and filter device - A cryopump includes: a cryopump housing arranged to define an inner space of the cryopump from an outer environment; an exhaust duct arranged to connect with the cryopump housing so as to exhaust fluid from the inner space of the cryopump to the outer environment; and a filter structure. The filter structure includes: a filter arranged to remove a foreign body from fluid exhausted through the exhaust duct; and a filter mounting member arranged to mount the filter to the exhaust duct, wherein at least a part of a bypass flow passage that diverts fluid from the filter is formed in the filter mounting member. | 03-15-2012 |
20120060519 | Cryopump and cryogenic refrigerator - A refrigerator includes a displacer coupling structure, wherein one of two coupled displacers protrudes into the other of the two coupled displacers to the extent that an end of a regenerator built in the one of the two coupled displacers positions itself inside of the other of the two coupled displacers. A cryopump includes: a low temperature cryopanel; a high temperature cryopanel arranged to be cooled to a temperature higher than that of the low temperature cryopanel; and the refrigerator. | 03-15-2012 |
20120067065 | Cryopump system and method for controlling the cryopump system - A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized. | 03-22-2012 |
20120180503 | CRYOPUMP AND VACUUM VALVE DEVICE - A cryopump includes: a vent valve provided with a cryopump housing to discharge a gas pumped on a cryopanel to the outside of the cryopump housing; and a control unit configured to determine, based on the pressure measured by a pressure sensor, whether a positive pressure is generated in the cryopump housing relative to the external pressure of the cryopump housing, and configured to open the vent valve when it is determined that the positive pressure is generated, and configured to close the vent valve when it is determined that the positive pressure is not been generated. The valve-closing force of the vent valve is arranged such that, when the vent valve is closed by the control unit, the vent valve can be mechanically opened by being subjected to the differential pressure between the internal pressure and the external pressure of the cryopump housing. | 07-19-2012 |
20120222431 | Cryopump and Vacuum Pumping Method - A cryopump | 09-06-2012 |
20120255314 | CRYOPUMP SYSTEM, COMPRESSOR, AND METHOD FOR REGENERATING CRYOPUMPS - A cryopump system includes: a cryopump including a refrigerator for executing cooling operation for cooling a cryopanel and heating operation for regenerating the cryopanel; and a compressor for supplying operating gas to the refrigerator. The cryopump system raises the temperature of operating gas in the compressor during the heating operation than the temperature thereof during the cooling operation. The compressor may include a heat exchanger for cooling operating gas to be supplied to the refrigerator, and a bypass passage that circumvents the heat exchanger. The control unit may switch, in accordance with the operation status of the refrigerator, between a flow passage that passes through the heat exchanger and a flow passage that passes through the bypass flow passage. | 10-11-2012 |
20120260675 | CRYOPUMP AND EVACUATION METHOD - A cryopump includes a refrigerator which cools a cryopanel and a controller which receives a control signal representing an operation mode from a beam irradiating apparatus and controls the refrigerator based on the control signal. The operation mode includes an irradiation mode for irradiating a beam to a target and an idle mode for diverting the beam from the target or keeping the beam with a level weaker than that of the irradiation mode. The controller controls the refrigerator such that the cryopanel is cooled in both the irradiation mode and the idle mode to a cooling temperature at which gas molecules are held and allows the cooling temperature in at least a part of the period of the idle mode to be higher than that of the irradiation mode. | 10-18-2012 |
20120285182 | CRYOPUMP SYSTEM AND METHOD FOR REGENERATING CRYOPUMPS - A cryopump system includes: a plurality of cryopumps connected to a common roughing pump and provided with a plurality of rough valves, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves. | 11-15-2012 |
20120304669 | CRYOPUMP CONTROL APPARATUS, CRYOPUMP SYSTEM, AND METHOD FOR EVALUATING VACUUM RETENTION OF CRYOPUMPS - A cryopump control apparatus controls an evacuation process of a cryopump that includes a cryopanel which cools and thus condenses or adsorbs gas, and a pump housing which contains the cryopanel. The cryopump control apparatus includes a pressure control unit and a vacuum retention evaluation unit. The pressure control unit stops pumping when detecting that a pressure in the pump housing decreases to a reference pressure. The vacuum retention evaluation unit determines whether a difference between pressure values in the pump housing measured at first measurement time and at second measurement time is within an allowable range of pressure change. The first measurement time is determined by adding correction time relating to an operating delay of pumping to a time point when the pressure in the pump housing is detected to be decreased to the reference pressure. | 12-06-2012 |
20120317999 | CRYOPUMP CONTROL APPARATUS, CRYOPUMP SYSTEM, AND METHOD FOR MONITORING CRYOPUMP - A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optional purge process that is executed additionally if required. The optional purge process includes one or more gas purge steps. In a cryopump control apparatus that controls the cryopump, a deterioration evaluation unit determines whether a re-purge number, which is the total number of gas purge steps that are required to be executed in one regeneration process, reaches a deterioration evaluation criteria number. | 12-20-2012 |
20130008189 | Cryopump and Method of Manufacturing the Same - A cryopump includes an array of a plurality of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the plurality of cryosorption panels includes a panel end which protrudes toward the radiation shield in the cryopump inner open space, and the panel end has a region from which an adsorbent is absent. | 01-10-2013 |
20130008190 | GAS BALANCED BRAYTON CYCLE COLD WATER VAPOR CRYOPUMP - The primary invention is to cool a water vapor cryopump using a Gas Balanced Brayton cycle refrigerator. The refrigerator is comprised of a compressor, a gas balanced reciprocating engine and a counterflow heat exchanger. It is connected to the cryopump through insulated transfer lines. Options include a gas storage volume with valves that can adjust system pressures, a variable speed engine, gas lines between the compressor and cryopanel that by-pass the engine, and a gas line that by-passes the heat exchanger. This system can cool down and warm up rapidly, rapidly warm and cool the cryopanel without warming the engine, and reduce power input when the cryopanel heat load is reduced. | 01-10-2013 |
20130061609 | CRYOPUMP AND METHOD OF MANUFACTURING THE SAME - A cryopump includes an array of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the cryosorption panels includes a front panel surface divided into an adsorption region of a non-condensable gas and a condensation region of a condensable gas. | 03-14-2013 |
20130091871 | CONTAMINANT COLD TRAP FOR A VAPOR-COMPRESSION REFRIGERATION APPARATUS - Apparatuses and methods are provided for facilitating cooling of an electronic component. The apparatus includes a vapor-compression refrigeration system. The vapor-compression refrigeration system includes an expansion component, an evaporator and a compressor coupled in fluid communication via a refrigerant flow path. The evaporator is coupled to and cools the electronic component. The apparatus further includes a contaminant cold trap coupled in fluid communication with the refrigerant flow path. The cold trap includes a refrigerant cold filter and a coolant-cooled structure. At least a portion of refrigerant passing through the refrigerant flow path passes through the refrigerant cold filter, and the coolant-cooled structure provides cooling to the refrigerant cold filter to cool refrigerant passing through the filter. By cooling refrigerant passing through the filter, contaminants solidify from the refrigerant, and are deposited in the refrigerant cold filter. | 04-18-2013 |
20130104571 | CRYOGENIC PUMP WITH A DEVICE FOR PREVENTING THE MEMORY EFFECT | 05-02-2013 |
20130125564 | System and Method for Trapping and Collecting Volatile Compounds - A system and method for trapping and collecting volatile compounds is described. The system and method generally include a trapping column including adsorption materials positioned within a lumen of the trapping column, an oven for heating the trapping column, and a cold-trap condenser. When a sample containing a volatile compound is passed through the lumen of the trapping column, the volatile compound is captured on or in the adsorption material. The captured volatile compound is subsequently released from the trapping column by simultaneously heating the column in the oven while a gas is pushed through the lumen of the column, and the released volatile compound is collected in the cold-trap condenser. | 05-23-2013 |
20130192276 | CRYOPUMP AND METHOD FOR REPAIRING CRYOPUMPS - A cryopump includes a housing, an electrical control unit which controls the cryopump, a purge valve provided on a passage between an external purge gas source and the inside of the housing, a rough valve provided on a passage between an external pump and the inside of the housing, a vent valve provided on a passage between the inside and the outside of the housing, and a Pirani gauge which measures a pressure inside the housing. The electrical control unit is connected to each of the purge valve, rough valve, vent valve, and Pirani gauge via a wire. Each of the wires is provided with a connector on the component side and a connector on the electrical control unit side. The connector on the component side is configured to be attachable to and detachable from the connector on the electrical control unit side. | 08-01-2013 |
20130192277 | COLD TRAP AND METHOD OF CONTROLLING COLD TRAP - A cold trap includes two individually controllable cooling units. The cold trap is provided in an evacuation path for connecting a vacuum chamber to a turbomolecular pump, The first cooling unit includes a first panel unit provided in the evacuation path such that the panel is exposed, and a first refrigerator thermally coupled to the first panel unit so as to cool the first panel unit. The second cooling unit includes a second panel unit provided in the evacuation path such that the panel is exposed, and a second refrigerator thermally coupled to the second panel unit so as to cool the second panel unit. The first panel unit is spaced apart from the second panel unit. | 08-01-2013 |
20130199210 | CRYOPUMP - A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an extension panel extending outward. The housing includes an inlet flange surrounding the extension panel. | 08-08-2013 |
20130205805 | MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP - A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators. | 08-15-2013 |
20130219924 | CRYOPUMP, METHOD OF REGENERATING CRYOPUMP, AND CONTROL DEVICE FOR CRYOPUMP - A cryopump includes: a first panel to be cooled by a first stage of a refrigerator; a second panel to be cooled by a second stage of the refrigerator; a panel temperature sensor provided with the first panel and/or the second panel; a stage temperature sensor provided with the first stage and/or the second stage; and a control unit that controls vacuum pumping based on the temperature measured by the stage temperature sensor. The control unit controls regeneration including a heating process of a cryopanel, and uses the temperature measured by the panel temperature sensor exclusively in the regeneration. The control unit completes the heating process based on the temperature measured by the panel temperature sensor. | 08-29-2013 |
20130227968 | CRYOPUMP AND METHOD FOR REGENERATING THE CRYOPUMP - A method for regenerating a cryopump includes stopping a pressure sensor for the cryopump, starting to heat a cryogenic surface for adsorbing gas molecules, starting the rough evacuation of the cryopump while the pressure sensor is stopped, and terminating the rough evacuation while the pressure sensor is stopped. This method may include activating the pressure sensor after the rough evacuation has been terminated. | 09-05-2013 |
20130232999 | CRYOPUMP SYSTEM, AND METHOD OF OPERATING THE SAME, AND COMPRESSOR UNIT - A cryopump system includes a cryopump configured to perform a preparatory operation including a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature, a compressor unit of a working gas for the cryopump, a gas line connecting the cryopump and the compressor unit, a gas volume adjuster configured to increase a quantity of the working gas in the gas line during the vacuum pumping operation in comparison with that during the preparatory operation, and a control device configured to control the compressor unit so as to provide a pressure control for the gas line. | 09-12-2013 |
20130239593 | CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE - A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump. | 09-19-2013 |
20130276466 | LOW PROFILE CRYOPUMP - Faster cool down time is achieved in a low profile cryopump by having heat transferred directly from the inlet louver to the first stage heat station through one or more tapered thermal busses, and by obviating the need of a thermal shield over the second stage cylinder of the expander by having second stage cryopanels that form a nested tent like structure, at least one of which, extends over the cylinder. | 10-24-2013 |
20130276467 | CRYOPUMP DRAIN AND VENT - A means of rapidly melting a large quantity of type II cryogen in a cryopump that is configured to contain the liquid in the warm cryopanel with the inlet to the cryopump facing up or sideways, and venting the liquid and gas in a controlled way. Rapid melting is preferably accomplished by flowing a purge gas that will condense on the cryodeposit. By not allowing the liquid to drain onto the vacuum housing the evaporation rate is limited and the maximum pressure in the cryopump can be controlled by the purge gas flow rate. | 10-24-2013 |
20130312431 | Cryopump - A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array. | 11-28-2013 |
20140130523 | CRYOPUMP, CRYOPANEL STRUCTURE, AND VACUUM EVACUATION METHOD - A cryopump includes a nested array of cryopanels. A hydrogen molecule incident into a clearance in the nested array of cryopanels is reflected by a cryopanel. The reflected hydrogen molecule is adsorbed by another cryopanel. Each of the cryopanels may have an inverted frustum shape. | 05-15-2014 |
20140174108 | COLD TRAP AND MOUNTING STRUCTURE OF COLD TRAP - A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange is arranged at a distance from the inlet flange in the extending direction of the duct. The inlet flange has an outer diameter larger than an outer diameter of the outlet flange. | 06-26-2014 |
20140230461 | CRYOPUMP AND METHOD OF OPERATING THE CRYOPUMP - A cryopump includes a high-temperature cryopanel, a low-temperature cryopanel, and a cooling system. The cooling system has: a refrigerator provided with a first stage for cooling the high-temperature cryopanel and a second stage for cooling the low-temperature cryopanel; and a control unit configured to control a cool-down operation in which the first stage and the second stage are cooled in order to initiate a vacuum pumping operation of the cryopump. The cooling system may be configured to selectively provide a cooling relief effect to the first stage at least temporarily in the cool-down operation. | 08-21-2014 |
20140230462 | CRYOPUMP AND CRYOPUMP MOUNTING STRUCTURE - A cryopump for evacuating a vacuum chamber is provided with a radiation shield provided with a shield opening end surrounding a shield opening for receiving a gas and a lid member having a connection opening narrower than a shield opening for connecting the shield opening to the vacuum chamber. The lid member is provided with a first mounting flange for mounting the cryopump on a mating flange provided with the vacuum chamber. The first mounting flange surrounds the connection opening on a vacuum chamber side of the lid member. | 08-21-2014 |
20140250923 | CRYOPUMP - A cryopump includes: a cryopanel assembly including a plurality of cryopanels each having an adsorption area on both surfaces thereof; a radiation shield forming a gas receiving space that surrounds the cryopanel assembly; and a radiation cover disposed in a cryopump inlet. The radiation cover includes a main plate located at a position in the cryopanel inlet that corresponds to the cryopanel assembly and a louver portion located at a position in the cryopanel inlet that corresponds to the gas receiving space. The radiation cover may not include the louver portion. | 09-11-2014 |
20140260338 | CRYOPUMP AND METHOD FOR REGENERATING THE CRYOPUMP - A method of regenerating a cryopump includes a first discharging process that includes alternately evacuating a cryopump housing and supplying a purge gas in a first pressure range, and a second discharging process that includes evacuating the cryopump housing to a low pressure region below the first pressure range. The second discharging process includes making a determination at least once in the low pressure range as to whether the second discharging process should be terminated, and supplying the purge gas to the cryopump housing prior to a first-time determination as to whether the second discharging process should be terminated. | 09-18-2014 |
20140260339 | CRYOPUMP SYSTEM, METHOD OF OPERATING THE SAME, AND COMPRESSOR UNIT - A cryopump system includes a cryopump, a compressor of a working gas for the cryopump, a control device configured to control an operation frequency of the compressor, a gas line connecting the cryopump and the compressor, and a gas quantity adjustment unit configured to switch a working gas quantity of the gas line between at least a first gas quantity and a second gas quantity. When the gas line has the first gas quantity, a controllable range of the operation frequency provides a first flow rate range of the working gas. When the gas line has the second gas quantity, the controllable range provides a second flow rate range of the working gas. The second flow rate range has a non-overlapping portion with the first flow rate range. | 09-18-2014 |
20140283531 | CRYOPUMP AND METHOD FOR VACUUM PUMPING NON-CONDENSABLE GAS - A cryopump includes: a radiation shield that includes a shield front end that defines a shield opening, a shield bottom portion, and a shield side portion that extends between the shield front end and the shield bottom portion; and a cryopanel assembly that is cooled to a lower temperature than that of the radiation shield. The cryopanel assembly includes a first panel arrangement including a plurality of first adsorption panels and a plurality of second panel arrangements each including a plurality of second adsorption panels. The first panel arrangement forms a multitude of adsorption sections arranged in a lattice-shaped pattern in cooperation with the plurality of second panel arrangements, each of the adsorption sections being exposed to the shield side portion. | 09-25-2014 |
20140283532 | CRYOPUMP AND VACUUM PUMPING METHOD - A cryopump includes a first cryopanel including a radiation shield and a plate member across a shield opening and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The plate member includes a plate main portion and a plate peripheral portion adapted to attach the plate main portion to the radiation shield. The plate main portion includes a gas passing region having a multitude of pores through which gases pass to be condensed on the second cryopanel and a gas shielding region formed at a different position in the plate main portion from that of the gas passing region. | 09-25-2014 |
20140290282 | REFRIGERATOR AND COLD TRAP - This invention provides a cold trap using a Stirling refrigerator. A refrigerator includes a drive piston configured to drive a free piston so as to reciprocally move a working medium between a heat dissipation portion and a heat absorption portion, a vibration sensor configured to measure a vibration of a case, a dynamic vibration absorber configured to reduce the vibration of the case when the drive piston is driven, and a frequency adjustment device configured to adjust a driving frequency to reduce the vibration of the case when the drive piston is driven in a state in which the case is connected to a vacuum device. | 10-02-2014 |
20140326001 | SYSTEMS AND METHODS FOR CRYOGENIC REFRIGERATION - Systems and methods for improving the performance of dilution refrigeration systems include cryocondensation traps employed in the helium circuit of a dilution refrigerator may be modified to improve performance. A cryocondensation trap employs a cryocondensation surface having at least one temperature that preferably matches the temperature at which at least one contaminant freezes into a solid form from a gaseous form. A single trap with at least one continuous cryocondensation surface formed in a generally helical or spiral-like fashion with each region having a different temperature may be employed to trap a specific contaminant or set of contaminants. A single trap with multiple cryocondensation surfaces where each surface has a different temperature may be alternatively employed for the same purpose. To provide a temperature gradient in the cryocondensation trap, at least one region of the cryocondensation trap may be thermally coupled to a cold surface and/or a transfer tube. | 11-06-2014 |
20140345300 | CRYOPUMP AND VACUUM PUMPING METHOD - A cryopump includes an adsorption cryopanel including a front surface configured to receive incidence of a non-condensable gas and a back surface having an adsorption region of the non-condensable gas, and a reflection cryopanel including a reflection surface of the non-condensable gas facing the back surface. The adsorption cryopanel may have a multitude of through holes penetrating from the front surface to the back surface. The adsorption cryopanel has a passage probability of the non-condensable gas selected from a range of 10% to 70%. | 11-27-2014 |
20140366562 | CRYOPUMP - A cryopump includes a cryopump including: a refrigerator; a first cryopanel including a radiation shield; and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The radiation shield includes an attaching pedestal located lateral to the second cryopanel for attachment of the refrigerator to the radiation shield, and a shield portion adjacent to the attaching pedestal and enclosing the second cryopanel. A lateral gap is formed between the second cryopanel and the attaching pedestal. A gap part continuing into the lateral gap is formed between the second cryopanel and the shield portion. The second cryopanel is shaped and/or located such that the lateral gap is comparable in width to the gap part. | 12-18-2014 |
20140373558 | NANO-MATERIALS FOR ADHESIVE-FREE ADSORBERS FOR BAKABLE EXTREME HIGH VACUUM CRYOPUMP SURFACES - A cryosorber panel having nanomaterials used for the cryosorption material, with nanomaterial either grown directly on the cryopanel or freestanding nanomaterials attached to the cryopanel mechanically without the use of adhesives. Such nanomaterial cryosorber materials can be used in place of conventional charcoals that are attached to cryosorber panels with special low outgassing, low temperature capable adhesives. Carbon nanotubes and other nanomaterials could serve the same purpose as conventional charcoal cryosorbers, providing a large surface area for cryosorption without the need for adhesive since the nanomaterials can be grown directly on a metallic substrate or mechanically attached. The nanomaterials would be capable of being fully baked by heating above 100° C., thereby eliminating water vapor from the system, eliminating adhesives from the system, and allowing a full bake of the system to reduce hydrogen outgas sing, with the goal of obtaining extreme high vacuum where the pump can produce pressures below 1×10 | 12-25-2014 |
20150107273 | Ultra High Vacuum Cryogenic Pumping Apparatus with Nanostructure Material - Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps. | 04-23-2015 |
20150121907 | CRYOPUMP SYSTEM - A cryopump system includes: a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in the rough line, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves. The controller applies the delay time uniformly upon closing of each of the rough valves. | 05-07-2015 |
20150135735 | CRYOPUMP SYSTEM AND METHOD OF OPERATING CRYOPUMP SYSTEM - A cryopump system includes at least one cryopump including a refrigerator including a low temperature cooling stage and a high temperature cooling stage, a low temperature cryopanel cooled by the low temperature cooling stage, and a high temperature cryopanel cooled by the high temperature cooling stage. A compressor unit includes a compressor main body that compresses a working gas supplied to the refrigerator, an operating frequency of the compressor main body being variable. The compressor unit is operated such that a pressure ratio between high pressure and low pressure of the compressor main body is in a range between 1.6 and 2.5. | 05-21-2015 |
20160069339 | Method And Apparatus For Providing Temperature Control To A Cryopump - Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating. | 03-10-2016 |
20160097380 | CRYOPUMP - A cryopump includes: a cryopump vessel that defines an inlet; a refrigerator including a first stage and a second stage housed in the cryopump vessel, the second stage being cooled to a lower temperature than that of the first stage; a first cryopanel thermally connected to the first stage and surrounded by the cryopump vessel; and a second cryopanel thermally connected to the second stage and surrounded by the first cryopanel. The first cryopanel includes a plate member having an inlet aperture at the inlet. The inlet aperture is formed in the plate member such that a ratio of a conductance of the plate member with respect to an aperture conductance of the inlet is 6% or less. | 04-07-2016 |
20160146200 | Cryopump - A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array. | 05-26-2016 |
20160177934 | CRYOPUMP, CONTROL METHOD OF CRYOPUMP, AND CRYOCOOLER | 06-23-2016 |
20160177935 | COLD TRAP AND CONTROL METHOD OF COLD TRAP | 06-23-2016 |