RUHR-UNIVERSITAT
RUHR-UNIVERSITAT Patent applications | ||
Patent application number | Title | Published |
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20110248634 | METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS - A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component. | 10-13-2011 |