HSEB Dresden GmbH Patent applications |
Patent application number | Title | Published |
20150317783 | Inspection Apparatus - An apparatus for inspecting flat objects, in particular wafers, containing an object holder, a camera arrangement having a camera for recording an image of at least one part of the object; and a drive arrangement for producing a relative movement between the camera arrangement and the object from a first recording position to at least one further recording position; is characterized in that the camera arrangement has at least one further camera; the object areas imaged in different cameras are at least partially different, wherein all cameras together simultaneously record only part of the total inspection area of the object; and each object point of the entire inspection area can be imaged at least once in one of the cameras as a result of the relative movement between the camera arrangement and the object, as produced with the drive arrangement. | 11-05-2015 |
20120114220 | INSPECTION METHOD - A Method for inspecting flat objects , especially wafers, with an object surface, comprises the steps of: scanning a digital image with a plurality of image points of said object surface with color- or grey values for each of said image points; detecting defects on said object surface by comparing said scanned digital image to a digital reference image; defining and selecting corresponding portions in said scanned digital image and in the digital reference image; determining a representative color- or grey value for each of said selected portions; calculating a compare value from said representative color- or grey value of said scanned digital image of a portion and a representative color- or grey value of said digital reference image of the same portion; and correcting each image point of said scanned digital image with a correction value determined from said compare value of step (e). | 05-10-2012 |
20120113243 | INSPECTION SYSTEM - An inspection system for flat objects, especially wafers and dies, comprising: a handling system for loading objects into the inspection system; a sensor assembly for receiving images or measuring values of the object surface or parts of the object surface; a driving assembly for generating a relative movement between the objects and the sensor assembly, where a movement is effected between objects relative to the sensor assembly along a first trajectory; wherein at least one further sensor assembly is provided, and the driving assembly is adapted to generate a further relative movement, where a movement of different objects relative to the sensor assembly can be generated on at least a second trajectory in order to allow at least two objects to be treated simultaneously. | 05-10-2012 |