EUGENE TECHNOLOGY CO., LTD.
|EUGENE TECHNOLOGY CO., LTD. Patent applications|
|Patent application number||Title||Published|
|20150252476||SUBSTRATE PROCESSING APPARATUS - Provided is a substrate processing apparatus. The substrate processing apparatus in which a process with respect to a substrate is performed includes a main chamber having an opened upper portion, the main chamber having a passage that is defined in a sidewall thereof so that a substrate is accessible, a chamber cover disposed on the opened upper portion of the main chamber to provide a process space, which is sealed from the outside, in which the process is performed, a susceptor plate on which the substrate is placed, the susceptor plate having an inner space with an opened lower portion, and a main heater rotatably disposed in the inner space, the main heater being spaced apart from the susceptor plate to heat the susceptor plate.||09-10-2015|
Patent applications by EUGENE TECHNOLOGY CO., LTD.