C/O GIGAPHOTON INC. Patent applications |
Patent application number | Title | Published |
20150351208 | LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM - There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light. | 12-03-2015 |
20150340838 | LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM - There may be included: a master oscillator configured to output pulsed laser light; two or more power amplifiers disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and an optical isolator provided between adjacent two of the power amplifiers in the optical path of the pulsed laser light, and configured to suppress transmission of light traveling from the power amplifiers to a side where the master oscillator is provided. | 11-26-2015 |