Patent application title: COMPOSITION FOR FILM FORMATION, FILM, PRODUCTION METHOD OF PATTERNED SUBSTRATE, AND COMPOUND
Inventors:
IPC8 Class: AH01L21308FI
USPC Class:
1 1
Class name:
Publication date: 2018-04-26
Patent application number: 20180114698
Abstract:
A composition comprises a compound comprising a partial structure
represented by formula (1) and comprising an intermolecular bond-forming
group; and a solvent. X.sup.1 and X.sup.2 each independently represent a
substituted or unsubstituted ring structure having 4 to 10 ring atoms
constituted taken together with a spiro carbon atom and carbon atoms of
an aromatic ring. R.sup.1 and R.sup.2 each independently represent a
halogen atom, a hydroxy group, a nitro group or a monovalent organic
group. a1 and a2 are each independently an integer of 0 to 8. n1 and n2
are each independently an integer of 0 to 2; k1 and k2 are each
independently an integer of 0 to 8. A sum of k1 and k2 is no less than 1,
and a sum of a1 and k1. A sum of a2 and k2 are no greater than 8.
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