IN-PLANE AND OUT-OF-PLANE MOTION ACTUATOR

Abstract

A near-eye light field display for use with a head mounted display unit with enhanced resolution and color depth. A display for each eye is connected to one or more actuators to scan each display, increasing the resolution of each display by a factor proportional to the number of scan points utilized. In this way, the resolution of near-eye light field displays is enhanced without increasing the size of the displays.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of U.S. Provisional Application Ser. No. 62/152,893, filed Apr. 26, 2015, which is hereby incorporated herein by reference in its entirety.

TECHNICAL FIELD

[0002] The disclosed technology relates generally to actuators, and more particularly, some embodiments relate to micro-electrical-mechanical-system (MEMS) actuators configured to move a device in-plane and out-of-plane.

DESCRIPTION OF THE RELATED ART

[0003] Actuators may be used to convert electronic signals into mechanical motion. In many applications, it may be beneficial for miniature actuators to fit within the specific size, power, reliability, and cost constraints of the application.

[0004] MEMS is a miniaturization technology that uses processes such as photolithography and etching of silicon wafers to form highly precise mechanical structures with electronic functionality. MEMS actuators generally function in a similar fashion to conventional actuators but offer some beneficial features over conventional actuators, and are formed using MEMS processes.

BRIEF SUMMARY OF EMBODIMENTS

[0005] According to various embodiments of the disclosed technology, an out-of-plane MEMS actuator is provided, comprising a first frame and a second frame. The second frame is connected to the first frame by a hinge, the hinge being flexible. A comb drive is disposed between the first frame and the second frame. When a voltage is applied to the comb drive, the attractive force causes the first or the second frame to rotate around a center of rotation of the MEMs actuator, bending the hinge such that vertical motion is achieved. In some embodiments, a second comb drive may be disposed on the other side of the second frame.

[0006] According to various embodiments of the disclosed technology, a dual-plane motion actuator is provided, enabling both in-plane and out-of-plane motion. The dual-plane motion actuator includes an in-plane motion portion and an out-of-plane motion portion. The in-plane motion portion includes one or more comb drive actuators in various embodiments, providing a linear force in a lateral direction. The out-of-plane portion is disposed on a first end of the in-plane motion portion, the out-of-plane motion portion comprising a first frame and a second frame connected by a hinge. A comb drive may be disposed in an interior space defined by the first frame, second frame, and the hinge.

[0007] According to various embodiments of the disclosed technology, a multi-degree of freedom actuator is provided. The multi-degree of freedom actuator includes a central frame, in some embodiments having a plurality of spokes. A plurality of dual-plane motion actuators are connected to the central frame. A motion flexure is attached to each of the dual-plane motion actuators at one end, and connected to a movable frame at the other end. Motion of the dual-plane actuators is transferred to the movable frame in the direction of the length of the associated motion flexure.

[0008] Other features and aspects of the disclosed technology will become apparent from the following detailed description, taken in conjunction with the accompanying drawings, which illustrate, by way of example, the features in accordance with embodiments of the disclosed technology. The summary is not intended to limit the scope of any inventions described herein, which are defined solely by the claims attached hereto.

BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The technology disclosed herein, in accordance with one or more various embodiments, is described in detail with reference to the following figures. The drawings are provided for purposes of illustration only and merely depict typical or example embodiments of the disclosed technology. These drawings are provided to facilitate the reader's understanding of the disclosed technology and shall not be considered limiting of the breadth, scope, or applicability thereof. It should be noted that for clarity and ease of illustration these drawings are not necessarily made to scale.

[0010] FIG. 1 illustrates a plan view of a comb drive in accordance with embodiments of the technology described herein.

[0011] FIG. 2 illustrates a plan view of a comb drive actuator in accordance with embodiments of the technology disclosed herein.

[0012] FIGS. 3A and 3B is an example configuration of a comb drive for out-of-plane motion in accordance with embodiments of the technology disclosed herein.

[0013] FIG. 4 is a perspective view of an example out-of-plane actuator in accordance with embodiments of the technology disclosed herein.

[0014] FIGS. 5A and 5B illustrate an example configuration of a comb drive for out-of-plane motion, designed to account for gravitational sag, in accordance with embodiments of the technology disclosed herein.

[0015] FIG. 6 is a perspective view of an example bi-directional out-of-plane actuator in accordance with embodiments of the technology disclosed herein.

[0016] FIG. 7 illustrates an example dual-plane motion actuator in accordance with embodiments of the technology disclosed herein.

[0017] FIG. 8 is an example multi-degree of freedom actuator in accordance with embodiments of the technology disclosed herein.

[0018] The figures are not intended to be exhaustive or to limit the invention to the precise form disclosed. It should be understood that the invention can be practiced with modification and alteration, and that the disclosed technology be limited only by the claims and the equivalents thereof.

DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The present disclosure is directed to various embodiments of systems, methods, and apparatuses for providing out-of-plane (vertical) motion of electrical devices disposed on MEMS actuators and, in some embodiments, both out-of-plane and in-plane (horizontal) motion. The details of some example embodiments of the systems, method, and apparatuses of the present disclosure are set forth in the description below. Other features, objects, and advantages of the disclosure will be apparent to one of skill in the art upon examination of the present description, figures, examples, and claims. It is intended that all such additional systems, methods, apparatuses, features, and advantages, etc., including modifications thereto, be included within this description, be within the scope of the present disclosure, and be protected by one or more of the accompanying claims.

[0020] In accordance with embodiments further described herein, various actuators are provided. These actuators, including the packaging thereof, may be used in a range of different environments, for example, for moving displays, image sensors, or other types of electro-optic devices in head mounted displays or cameras. The features of the disclosed actuators generally allow for a high degree of precision in moving or positioning a platform in multiple degrees of freedom within these various environments, while achieving low power consumption and being highly compact. Accordingly, the disclosed embodiments provide significant benefits, for example, for achieving higher resolution of head mounted displays over conventional solutions, or achieving focusing.

[0021] In various embodiments, comb drives are used to provide the linear force utilized to generate the in-plane and out-of-plane motion. FIG. 1 illustrates a plane view of an example comb drive 10 in accordance with embodiments of the technology disclosed herein. Comb drive 10 may include comb finger arrays 15 and 16, which may be fabricated on silicon using MEMS processes, such as photolithography and etching.

[0022] As shown in FIG. 1, comb finger array 16 includes comb fingers 11 and spine 12 that connects comb fingers 11 to one another. Similarly, comb finger array 15 includes comb fingers 13 and spine 14 that connects comb fingers 13 to one another. Comb fingers 11 and 13 may be inter-digitated, such that comb fingers 11 substantially line up with spaces 17 between comb fingers 13, and comb fingers 13 substantially line up with the spaces 18 between comb fingers 13.

[0023] When a voltage is applied between comb fingers 11 and comb fingers 13, comb finger array 16 and comb finger array 15 are attracted to each other with an electrostatic force proportional to the square of the applied voltage. This electrostatic force may cause comb finger arrays 15 and 16 to move toward one another. Additionally, the speed with which comb finger arrays 15 and 16 move with respect to one another may depend on the electrostatic force applied. Typically, the design of comb drive 10 is such that comb fingers 11 and 13 may be pulled into an overlapping state by the electrostatic force between comb finger array 15 and comb finger array 16. When comb finger arrays 15 and 16 overlap, comb fingers 11 reside at least partially within space 17 of comb finger array 15, and comb fingers 13 reside at least partially within space 18 of comb finger array 16. The electrostatic force pulls comb fingers 11 comb fingers 13 together. They are kept from touching by a flexure mechanism that prevents this. How the comb fingers 11 move with respect to comb fingers 13 is controlled by the flexure mechanism that joins comb finger array 15 and comb finger array 16, which is not shown in the figure.

[0024] MEMS actuators providing different types of in-plane motion utilizing comb drives similar to the comb drive 10 discussed with respect to FIG. 1 are known in the art. FIG. 2 illustrates an example comb drive actuator 20 providing in-plane motion. Various embodiments of in-plane actuators are disclosed in U.S. patent application Ser. No. 14/818,086, filed Aug. 4, 2015. One of ordinary skill in the art would appreciate that such in-plane actuators, as well as other in-plane actuators, are applicable to embodiments of the technology disclosed herein.

[0025] As illustrated in FIG. 2, a comb drive 10 is disposed between a first frame piece 22a and a second frame piece 22b. In the illustrated example, spine 14 of comb finger array 15 is attached to second frame piece 22b, and spine 12 of comb finger array 16 is attached to first frame piece 22a. The comb fingers extend substantially perpendicularly from each spine 12, 14. When comb finger arrays 15, 16 are attracted to one another such that movement occurs, first and second frame pieces 22a/b may likewise be caused to move (e.g., from left to right or vice versa in FIG. 2). The direction of motion will depend on the configuration of the comb drive 10. For example, assuming comb finger array 15 is fixed relative to comb finger array 16, if a voltage is applied to comb finger array 16 relative to comb finger array 15 (or vice versa), comb finger array 16 may be attracted to comb finger array 15, such that comb finger array 16 may be induced to move toward comb finger array 15. This in turn may cause first frame piece 22a to move toward the side of comb drive 10 where comb finger array 15 resides (i.e., to the left in the plane of comb drive actuator 20 in FIG. 2).

[0026] The movement of first and/or second frame pieces 22a/b and of comb finger arrays 15 and/or 16 may be directed and/or controlled to some extent by first and second flexures 24a/b. The first and second flexures 24a/b may be substantially flexible or soft in the horizontal direction (i.e., in the direction of the comb fingers of comb finger arrays 15, 16) and may be substantially stiff or rigid in the vertical direction (i.e., in the direction of the spines of the comb finger arrays 15, 16). In this way, the first and second flexures 24a/b allow comb drive 10 to effect movement horizontally (i.e., in the left/right, or east/west, direction in FIG. 2), while substantially restricting movement in the vertical direction (i.e., in the top/bottom, or north/south, direction in FIG. 2). In other in-plane motion actuators, flexures 24a/b may be omitted and/or replaced by various other motion control means known in the art.

[0027] Other example actuators providing translational and/or rotational motion within the same plane as the actuator surface are discussed in detail in U.S. patent application Ser. No. 14/630,437, filed Feb. 24, 2015, and U.S. patent application Ser. No. 14/692,662, filed Apr. 21, 2015.

[0028] Actuators similar to the in-plane actuator discussed above provide motion within the same plane as the actuator, and may be configured to enable rotation within the same plane as well. In some implementations, however, out-of-plane motion is desired. That is, motion in either direction perpendicular to the surface of the actuator is desired. FIGS. 3A and 3B illustrates an example configuration of a comb drive for out-of-plane motion in accordance with embodiments of the technology disclosed herein. For in-plane motion, the comb drive usually has a single spine with comb fingers extending therefrom, the spine being configured to allow translational motion in response to a voltage difference across the combs. As illustrated in FIG. 3A, instead of configuring the comb drive for translational motion, a hinge 301 is disposed on top of a fixed spine 302 and a movable frame 303. As illustrated in FIG. 3B, when a voltage is applied to either the fixed spine 302 or the movable frame 303 and the comb fingers are attracted to each other, the hinge 301 prevents in-plane translational motion (i.e., hinge 301 is substantially rigid in the horizontal (left/right direction of FIG. 3B)) but allows for the moving frame 303 to rotate in the downward direction (i.e., hinge 301 is substantially flexible in the vertical direction (top/bottom direction of FIG. 3B)). For example, if the comb drive is 150 micrometers deep, a 75 micrometer overlap of the comb fingers at the bottom (as shown by the dotted line in the figure) results in a 30 degree bend on the hinge. In such an example, a 300 micrometer motion of the tip of the moving frame 303 is obtained (assuming the moving frame is 600 micrometer long).

[0029] FIG. 4 illustrates a perspective view of an example out-of-plane actuator 400 in accordance with embodiments of the technology disclosed herein. Although not illustrated, the out-of-plane actuator 400 would be fabricated in a silicon wafer using standard MEMS fabrication techniques in some embodiments. As shown, the out-of-plane actuator 400 includes hinges 401 connecting the fixed spine 402 and the moving frame 403, similar to the configuration illustrated and discussed with respect to FIGS. 3A and 3B. Each hinge 401 is a flexible member that deforms to enable the rotation to occur (i.e., bends in the direction of motion). Each hinge 401 is disposed on a top surface of each of the fixed spine 402 and the moving frame 403, such that there is clearance space 406 below the hinge 401, separating the fixed spine 402 and the moving frame 403. The clearance space 406 provides clearance for the moving frame 403 to rotate around the rotation axis 405 without coming into contact with the fixed spine 402.

[0030] Although the clearance space 406 is illustrated such that there is a clear gap between the fixed spine 402 and the moving frame 430, other embodiments may omit the clearance space 406. In such embodiments, the hinges 401 may be disposed on top of fixed spine 402 and moving frame 403, such as discussed with respect to FIGS. 3A and 3B. In such embodiments, fixed spine 402 and moving frame 403 may be designed such that the moving frame 403 may rotate, resulting in an overlap region as discussed with respect to FIG. 3B.

[0031] In the space defined by the fixed spine 402, the moving frame 403, and the hinges 401 are disposed comb fingers 404, similar to the comb finger arrangement discussed above with respect to FIG. 1. In various embodiments, the comb fingers 404 may be interweaved with some overlap, as illustrated in FIG. 4. The amount of overlap may vary in different embodiments. In some embodiments, each finger may overlap is 0 to 20 um. In some embodiments, the fingers do not overlap but their tips are close to each other. In some embodiments, the distance between comb finger tips is 0 to 5 um. When a voltage is applied across the fixed frame (or the moving frame), the attraction of the comb fingers 404 causes the moving frame to rotate around the axis of rotation 405, in as illustrated in FIG. 3B. In some embodiments, a single hinge 401 may be used. In some embodiments, three, four, or more hinges 401 may be used.

[0032] To counter gravitational sag and enable full travel of moving frame in the intended direction, a second comb drive may be included on the moving side of the moving frame. FIGS. 5A and 5B illustrate such an example configuration in accordance with embodiments of the technology disclosed herein. Similar to the example configuration shown in FIG. 3A, the example configuration in FIG. 5A includes a hinge 501 connecting a fixed spine 502 with comb fingers and a moving frame 503 with comb fingers. In addition, an additional comb drive 504 is disposed on the opposite side of the moving frame 503 from where the hinge 501 is located. The additional comb drive 504 rigidly connects to the fixed spine 502. When a voltage is applied across the fixed spine 502 and the moving frame 503, the interaction of the comb fingers between the fixed spine 502 and the moving frame 503 causes a similar out-of-plane motion as discussed with respect to FIG. 3B. As shown in the figure, the overlap between the comb fingers on the moving frame 503 and on the additional comb drive 504 is decreased as the moving frame 503 is attracted towards the fixed spine 502. When a voltage is applied between the comb fingers on the moving frame 503 and the comb fingers on the additional comb drive 504, the moving frame 503 will be attracted towards the additional comb drive 504. From this description, it should be understood that the force between the comb fingers on the fixed spine 502 and the moving frame 503 is opposite to and counteracts the force between the comb fingers on the moving frame 503 and the additional comb drive 504. In other words, when the moving frame 503 is in the position illustrated in FIG. 5B, the force between the comb fingers on the moving frame 503 and the additional comb drive 504 are in the same direction as the spring restoring force coming from the bent hinge 501. If the moving frame 503 is in this position due to gravitational sag, applying a voltage between the comb fingers on the moving frame 503 and the additional comb drive 504 can be used to bring the moving frame 503 back in-plane with the fixed spine 502 and the additional comb drive 504, as illustrated in FIG. 5A.

[0033] FIG. 6 illustrates a prospective view of another example out-of-plane actuator 600 in accordance with embodiments of the technology disclosed herein. The out-of-plane actuator 600 provides bi-directional out-of-plane motion. That is, the moving frame 603 is capable of rotation around the axis of rotation 605 both above and below the horizontal plane of the actuator. The fixed spine 602 has a C-shape, having an opening on one side. The moving frame 603 has a T-shape, having a free member 603a extending from a base member 603b. The free member 603a sits within the opening of the fixed spine 602, enabling the moving frame 603 to rotate around the axis of rotation 605. Hinges 601 are disposed on each end of the base member 603b to connect the moving frame 603 to the fixed spine 602, similar to the hinges 401 discussed with respect to FIG. 4. Two comb drives 604a, 604b are included. In the illustrated embodiment of FIG. 6, the second comb drive 604b is shown as being separated into two sections, one on each side of the free member 603a. Voltage may be applied to comb drive 604a (between the comb fingers on the fixed spine 602 and the comb fingers on the moving frame 603), comb drive 604b, or both to rotate the moving frame 603 about the axis of rotation 605. When voltage is applied to comb drive 604a, the free end of the moving frame 603a will move downwards. When voltage is applied to comb drive 604b, the free end of the moving frame 603a will move upwards.

[0034] Although discussed with respect to the configuration illustrated in FIG. 6, out-of-plane bi-directional actuators in accordance with embodiments of the technology disclosed herein may include other shapes and configurations. For example, in some embodiments, the moving frame may not extend through an opening in the fixed frame. In such embodiments, the fixed frame may omit any opening. For example, the fixed spine 602 may have an "O" shape and the moving frame 603 will not have a free end 604b. The comb drive 604b will then extend the full length of the moving frame 603, mirroring the comb drive 604a. As the comb drives 604a and 604b are activated, the moving frame 603 can be positioned to a desired tilt about the axis of rotation 605. In one embodiment, this bidirectional rotation actuator is connected to the device it is moving by attaching (e.g. with epoxy or bonding) a separate piece (not shown) to the top or bottom of the moving frame 603.

[0035] FIG. 7 illustrates an example dual-plane motion actuator 700 in accordance with embodiments of the technology disclosed herein. The dual-plane motion actuator 700. In the illustrated embodiment, first frame 730, second frame 740, one or more comb drives 720, and flexures 710a, 710b comprise the in-plane motion section of the dual-plane motion actuator 700. The configuration of the in-plane motion section of the dual-plane motion actuator 700 may be similar to the configuration discussed above with respect to FIG. 2. In other embodiments, other in-plane motion actuator configurations may be utilized. Flexures 710a, 710b allow the one or more comb drives 720 to effect movement horizontally (i.e., in the left/right, or east/west, direction in FIG. 7), while substantially restricting movement in the vertical direction (i.e., in the top/bottom, or north/south, direction in FIG. 7).

[0036] In the illustrated embodiment, second frame 740, third frame 750, comb drive 770, and hinges 760a, 760b comprise the out-of-plane motion section of the dual-plane motion actuator 700. The configuration of the out-of-plane motion section of the dual-plane motion actuator 700 may be similar to the configuration discussed above with respect to FIG. 4. In other embodiments, other out-of-plane motion actuator configurations may be utilized, such as, for example, actuators similar to the example bi-directional out-of-plane actuator discussed with respect to FIG. 6. Referring back to FIG. 7, the second frame 740 may comprise the moving frame of the out-of-plane motion section. In this way, when the out-of-plane actuator is operated as discussed above with respect to FIG. 4, the in-plane motion section of the dual-plane motion actuator 700 may be translated in the vertical direction (i.e., out-of-plane). This combination results in 2 degrees of freedom motion (in-plane and out-of-plane).

[0037] FIG. 8 illustrates an example multi-degree of freedom (MDOF) actuator 800 in accordance with embodiments of the technology disclosed herein. The MDOF actuator 800 comprises four dual-plane motion actuators 810a, 810b, 810c, 810d, such as the dual-plane motion actuator discussed with respect to FIG. 7. A rigid central frame include spokes 820a, 820b, 820c, 820d, configured to, in essence, create four quadrants, with each dual-plane motion actuator 810a, 810b, 810c, 810d disposed within one of the quadrants. Each dual-plane motion actuator 810a, 810b, 810c, 810d may be rotated 90.degree. from each other in various embodiments, such that each diagonal dual-plane actuator is substantially the mirror image of each other (as illustrated in FIG. 8). Each dual-plane actuator 810a, 810b, 810c, 810d in various embodiments may be capable of in-plane motion in one direction (e.g., the positive X-axis direction), and capable of out-of-plane motion in another direction (e.g., the positive Z-axis direction). In some embodiments, the out of plane motion is not completely linear and may be accompanied by a rotation. In some embodiments, the in-plane motion is not completely linear and may be accompanied by a rotation. In other embodiments, bi-directional horizontal (in-plane) actuators and/or bi-directional vertical (out-of-plane) actuators may comprise the dual-plane motion actuators. In-plane flexures 840a, 840b, 840c, 840d serve to control the in-plane motion of the movable frame 830 with respect to the central frame 820a-d. Each in-plane flexure 840a-d is rigid in the direction of its length, but is substantially flexible in the direction perpendicular to its length. Each in-plane flexure 840a-d is also rigid in the out-of-plane direction, but substantially flexible to twist along its length. In various embodiments, this is accomplished by designing in-plane flexures 840a-d that have a small width and large thickness, relative to the length of the flexure 840a-d. Various embodiments may have in-plane motion flexures having a length 5 times longer than the thickness of the flexure, and a thickness that is 2 times larger than the width of the flexure. In some embodiments, the width of the flexures 840a-d may be 5 .mu.m to 50 .mu.m. In some embodiments, the thickness may be 100 .mu.m to 1 mm. In some embodiments, the flexures 840a-d may have lengths of 1 mm to 10 mm.

[0038] This choice of flexures 840a-d allows coupling the motion of each actuator 810a-d to the movable frame 830 for multiple degree of freedom motion control of the movable frame 830. For example, flexure 840a acts as a rigid connector between the in-plane portion of the actuator 810a and the movable frame 830 for in-plane motion as shown by the double sided arrow while being largely insensitive to any residual rotational motion or in-plane motion orthogonal to the double sided arrow. In addition, flexure 840a acts as a rigid connector between the out-of-plane portion of the actuator 810a and the movable frame 830. As a result, actuator 810a controls the right-left and out-of-plane movement of the top-left portion of the movable frame 830 where the flexure 840a connects to the movable frame 830. Similarly, actuator 810b controls the up-down and out-of-plane movement of the bottom-right portion of the movable frame 830, actuator 810c controls the right-left and out-of-plane movement of the bottom-left portion of the movable frame 830, and actuator 810d controls the up-down and out-of-plane movement of the top-left portion of the movable frame 830. By controlling the position of the movable frame 830 in two degrees of freedom at four points, we have a total of eight degrees of freedom of control on the movable frame. In some embodiments, the movable frame 830 is substantially rigid or a substantially rigid load (not shown) is attached to the movable frame 830 to make it rigid, so that only six degrees of freedom of control are required. Three linear degrees of freedom: in-plane up-down, in-plane left-right, out-of-plane; and three rotational degrees of freedom: pitch, yaw and roll. In these cases, there are some redundant degrees of freedom and the extra actuator is only used to apply additional force. In some embodiments, the central frame 820a-d is mounted to the package and is fixed while the moving load is mounted onto the moving frame 830 with a sufficient gap as to not interfere with any portion of the actuator. In some embodiments, there are three dual-plane actuators connected with the moving frame through three flexures, central frame 820a-d connecting to each dual-plane actuator are at 120 degrees with respect to each other. In some embodiments, there are more than four actuators. In some embodiments, there are more than four flexures.

[0039] While various embodiments of the disclosed technology have been described above, it should be understood that they have been presented by way of example only, and not of limitation. Likewise, the various diagrams may depict an example architectural or other configuration for the disclosed technology, which is done to aid in understanding the features and functionality that can be included in the disclosed technology. The disclosed technology is not restricted to the illustrated example architectures or configurations, but the desired features can be implemented using a variety of alternative architectures and configurations. Indeed, it will be apparent to one of skill in the art how alternative functional, logical or physical partitioning and configurations can be implemented to implement the desired features of the technology disclosed herein. Also, a multitude of different constituent module names other than those depicted herein can be applied to the various partitions. Additionally, with regard to flow diagrams, operational descriptions and method claims, the order in which the steps are presented herein shall not mandate that various embodiments be implemented to perform the recited functionality in the same order unless the context dictates otherwise.

[0040] Although the disclosed technology is described above in terms of various exemplary embodiments and implementations, it should be understood that the various features, aspects and functionality described in one or more of the individual embodiments are not limited in their applicability to the particular embodiment with which they are described, but instead can be applied, alone or in various combinations, to one or more of the other embodiments of the disclosed technology, whether or not such embodiments are described and whether or not such features are presented as being a part of a described embodiment. Thus, the breadth and scope of the technology disclosed herein should not be limited by any of the above-described exemplary embodiments.

[0041] Terms and phrases used in this document, and variations thereof, unless otherwise expressly stated, should be construed as open ended as opposed to limiting. As examples of the foregoing: the term "including" should be read as meaning "including, without limitation" or the like; the term "example" is used to provide exemplary instances of the item in discussion, not an exhaustive or limiting list thereof; the terms "a" or "an" should be read as meaning "at least one," "one or more" or the like; and adjectives such as "conventional," "traditional," "normal," "standard," "known" and terms of similar meaning should not be construed as limiting the item described to a given time period or to an item available as of a given time, but instead should be read to encompass conventional, traditional, normal, or standard technologies that may be available or known now or at any time in the future. Likewise, where this document refers to technologies that would be apparent or known to one of ordinary skill in the art, such technologies encompass those apparent or known to the skilled artisan now or at any time in the future.

[0042] The presence of broadening words and phrases such as "one or more," "at least," "but not limited to" or other like phrases in some instances shall not be read to mean that the narrower case is intended or required in instances where such broadening phrases may be absent. The use of the term "component" does not imply that the elements or functionality described or claimed as part of the component are all configured in a common package. Indeed, any or all of the various elements of a component, whether control logic or other elements, can be combined in a single package or separately maintained and can further be distributed in multiple groupings or packages or across multiple locations.

[0043] Additionally, the various embodiments set forth herein are described in terms of exemplary block diagrams, flow charts and other illustrations. As will become apparent to one of ordinary skill in the art after reading this document, the illustrated embodiments and their various alternatives can be implemented without confinement to the illustrated examples. For example, block diagrams and their accompanying description should not be construed as mandating a particular architecture or configuration.

Claims

1. An out-of-plane MEMS actuator, comprising: a first frame; a second frame connected to the first frame by a hinge, the hinge disposed on a top surface of the first frame and a top surface of the second frame, and defining a clearance space below the hinge which separates the second frame and the first frame; and a comb drive disposed within an interior space defined by the first frame, the second frame, and the hinge.

2. The out-of-plane MEMS actuator of claim 1, wherein the second frame rotates in a first direction around an axis of rotation that cuts through the middle of the hinge when a voltage is applied to the first frame.

3. The out-of-plane MEMS actuator of claim 1, wherein the second frame rotates in a first direction around an axis of rotation that cuts through the middle of the hinge when a voltage is applied to the second frame.

4. The out-of-plane MEMS actuator of claim 1, comprising two hinges, a first hinge connecting a first end of the first frame and a first end of the second frame, and a second hinge connecting a second end of the first frame and a second end of the second frame.

5. The out-of-plane MEMS actuator of claim 1, further comprising a second comb drive disposed on a side of the second frame opposite the comb drive disposed within the interior space.

6. An out-of-plane MEMS actuator, comprising: a first frame; a second frame connected to the first frame by a hinge, the second frame having a first side and a second side; and a first comb drive disposed within an interior space defined by the first frame, the first side of the second frame, and the hinge; and a second comb drive disposed within an interior space defined by the first frame, the second side of the second frame, and the hinge;. wherein the second frame rotates in a first direction around an axis of rotation that cuts through the middle of the hinge when a voltage is applied to the first frame, the second frame, or a combination thereof.

7. The out-of-plane MEMS actuator of claim 6, wherein the hinge disposed on a top surface of the first frame and a top surface of the second frame.

8. The out-of-plane MEMS actuator of claim 6, the first frame further comprising a C-shape with an opening on one side, and the second frame comprising a base member and a free member, the free member extending from the base member and being disposed within the opening of the first frame.

9. The out-of-plane MEMS actuator of claim 8, wherein the second frame rotates in a first direction around an axis of rotation that cuts through the middle of the hinge, through the opening in the first frame, when a voltage is applied to the first frame.

10. The out-of-plane MEMS actuator of claim 8, wherein the second frame rotates in a first direction around an axis of rotation that cuts through the middle of the hinge, through the opening in the first frame, when a voltage is applied to the second frame.

11. The out-of-plane MEMS actuator of claim 8, comprising two hinges, a first hinge connecting a first end of the base member of the second frame to the fixed frame, and a second hinge connecting a second end of the base member of the second frame to the fixed frame.

12. A dual-plane motion actuator, comprising: an in-plane motion portion, comprising one or more comb drive actuators configured to provide a linear force in a lateral direction; and an out-of-plane motion portion disposed on a first end of the in-plane motion portion, the out-of-plane motion portion comprising: a first frame; a second frame connected to the first frame by a hinge, the hinge disposed on a top surface of the first frame and a top surface of the second frame, and defining a clearance space below the hinge which separates the second frame and the first frame; and a comb drive disposed within an interior space defined by the first frame, the second frame, and the hinge.

13. The dual-plane motion actuator of claim 12, wherein the second frame rotates in a first direction around an axis of rotation that cuts through the middle of the hinge when a voltage is applied to the first frame.

14. The dual-plane motion actuator of claim 12, wherein the second frame rotates in a first direction around an axis of rotation that cuts through the middle of the hinge when a voltage is applied to the second frame.

15. The dual-plane motion actuator of claim 12, the out-of-plane motion portion further comprising two hinges, a first hinge connecting a first end of the first frame and a first end of the second frame, and a second hinge connecting a second end of the first frame and a second end of the second frame.

16. The dual-plane motion actuator of claim 12, the out-of-plane motion portion further comprising a second comb drive disposed on a side of the second frame opposite the comb drive disposed within the interior space.

17. A multi-degree of freedom actuator, comprising: a central frame; a plurality of dual-plane motion actuators connected to the central frame; a movable frame disposed around the plurality of dual-plane actuators; and a plurality of motion flexures, a first end of each motion flexure connected to one of the plurality of dual-plane motion actuators, and a second end of each motion flexure connected to the movable frame.

18. The multi-degree of freedom actuator of claim 17, wherein each motion flexure of the plurality of motion flexures have a length in a direction of in-plane motion associated with the one of the plurality of dual-plane motion actuators to which the motion flexure is connected.

19. The multi-degree of freedom actuator of claim 17, wherein each motion flexure of the plurality of motion flexures has a length, a width, and a thickness, the length being over five times longer than the thickness, and the thickness being over two times larger than the width.

20. The multi-degree of freedom actuator of claim 17, the central frame further comprising a plurality of spokes, and wherein each dual-plane motion actuator is affixed to one or the plurality of spokes.