Patent application number | Description | Published |
20080304031 | EXPOSURE APPARATUS - An exposure apparatus exposes a substrate using light from a light source having a wavelength of 20 nm or smaller, and includes plural optical elements, each of which is configured to reflect the light, plural vacuum chambers, each of which houses one or more of the plural optical elements, and a gas supplier configured to supply to each vacuum chamber independently a gas used to inhibit contaminations that could occur on the optical element housed in each vacuum chamber, wherein the gas supplier supplies different types of gases to the plural vacuum chambers according to an illuminance of an illumined region on the optical element housed in each vacuum chamber. | 12-11-2008 |
20100141911 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD - An exposure apparatus, exposing a substrate via liquid so as to transfer a pattern of a mask onto the substrate, includes a stage configured to move while holding the substrate. The stage includes a substrate supporting portion on which the substrate is disposed, a supporting surface disposed outside the substrate supporting portion configured to support the liquid together with the substrate, and a frame portion formed so as to surround the supporting surface. The frame portion includes a depression and a member whose top surface is located in a plane including the supporting surface. | 06-10-2010 |
20110262866 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD - An exposure apparatus which projects exposure light from a pattern of an illuminated original onto a substrate, comprises a projection system including an optical element and configured to project the exposure light onto the substrate, an enclosure configured to enclose the projection system, and a cleaning mechanism configured to clean the optical element by irradiating the optical element with ultraviolet light under an environment in which oxygen is present within the enclosure, the cleaning mechanism including a light source configured to generate ultraviolet light, a tubular member including an exit window and configured to partially enclose an optical path between the light source and the optical element, and a regulating device configured to regulate an environment of a space inside the tubular member so that a partial pressure of oxygen becomes lower in the space inside the tubular member than in a space which is outside the tubular member. | 10-27-2011 |
20130057839 | LITHOGRAPHY SYSTEM AND MANUFACTURING METHOD OF COMMODITIES - The present invention provides a lithography system including an obtaining unit which obtains a transfer function describing a relationship between first vibration generated in one lithography apparatus of two lithography apparatuses among at least three lithography apparatuses, and second vibration generated in the other lithography apparatus upon transmission of the first vibration to the other lithography apparatus, and a calculator which calculates, based on the transfer function, an amount of vibration of a first lithography apparatus among the at least three lithography apparatuses due to vibration of lithography apparatuses, other than the first lithography apparatus, and a controller which controls the lithography apparatuses other than the first lithography apparatus, so that the amount of vibration calculated falls below a tolerance. | 03-07-2013 |
20150014876 | IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD - Provided is an imprint apparatus that applies a resin to several locations on a substrate, brings the resin and a mold into contact, and transfers a contoured pattern formed in the mold to the resin, comprising: a controller that sets a principal axis direction according to the contoured pattern and determines the application positions of the resin based on the principal axis direction that has been set such that the distances between resin drops that have been applied so as to be separated in the principal axis direction is larger than the distances between resin drops that have been applied so as to be separated in a direction that is perpendicular to the principal axis direction; and a dispenser that applies the resin based on the application position that has been determined. | 01-15-2015 |
20150014877 | IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD - Provided is an imprint apparatus that applies a resin (drops) dispersed, at a plurality of locations on a substrate, brings the resin and a mold into contact, and transfers the contoured pattern that is formed in the mold to the resin comprising: a controller that sets a principal axis direction according to the contoured pattern and an array direction in which a plurality of resin drops are aligned, and determines application positions for the resin such that the array direction is angled with respect to the principal axis direction; and a dispenser that applies the resin based on the application positions that have been determined. | 01-15-2015 |
Patent application number | Description | Published |
20100070130 | APPARATUS AND SYSTEM FOR DIAGNOSING DEVICES INCLUDED IN WORKING MACHINE - A device diagnostic apparatus ( | 03-18-2010 |
20130035824 | DISPLAY DEVICE FOR CONSTRUCTION MACHINE - Disclosed is a display device that includes a display unit provided in a cabin of a construction machine, an operating unit with a switch for operating the display unit, and a monitor controller for controlling the display unit and the operating unit, wherein: upon some kind of abnormality being detected by abnormality detection means for detecting abnormalities in mechanisms equipped in/on the construction machine, a warning logo corresponding to the kind of abnormality is displayed on the display unit, and a warning item for displaying information inclusive of details of the abnormality is added to a menu in a list format that contains items, each for executing a previously assigned specific function. Thus, the device improves in a degree of freedom of its configuration and enhances efficiency of information display | 02-07-2013 |
20130176120 | DISPLAY SYSTEM FOR WORKING MACHINE - A display system for a working machine displays basic information at all times and, in case of an abnormality, displays the details of the warning in addition to the basic information to enable an operator to reliably recognize details of the warning. For example, a first warning display function, upon receiving an abnormality information signal relating to a charge warning, displays an appropriate warning icon in a warning icon display region. A simplified basic-information display function, then displays simplified basic-information images and a second warning display function displays, in a free area of the display, a second warning message inclusive of a “Charge warning” message as display details of the warning icon, and of character information relating to a simplified remedial action. The operator can then reliably recognize the “Charge warning” and understand its details as well, by viewing the second warning message in addition to the warning icon. | 07-11-2013 |
20130312616 | EXHAUST PURIFICATION SYSTEM FOR WORKING MACHINE - An exhaust purification system for a working machine reliably issues filter regeneration warnings to the operator, prompting manual regeneration, so that damage to the DPF device can be avoided. When a PM estimate becomes higher than a given value, a screen displays a warning message prompting manual regeneration. If the warning message fails to prompt the operator to perform manual regeneration and reference time t | 11-28-2013 |
20150149047 | Work Machine Management Device - A work machine management device includes: a receiving unit that receives, from a work machine, sensor data indicating states of various sections of the work machine, and alarm data indicating that the work machine has determined that an abnormality has occurred in the work machine; and an operating level classifying unit that, based on the sensor data received by the receiving unit, classifies an operating state of the work machine as being any one of a plurality of predetermined operating levels. | 05-28-2015 |
Patent application number | Description | Published |
20100036050 | CURABLE RESIN AND CURABLE COMPOSITION - Provided are a vinyl monomer-grafted alkoxysilane-modified oxyalkylene resin which is useful as a raw material for a modified silicone based elastic adhesive and excellent in storage stability and adhesiveness and furthermore, cures with moisture excellently within a short time period, a production method for the resin, and a curable composition containing the resin. Specifically disclosed is a vinyl monomer-grafted alkoxysilane-modified oxyalkylene resin, which is produced by a method including grafting of a vinyl monomer by using an oxyalkylene based polymer as a raw material, in which the vinyl monomer includes a vinyl monomer containing 50 wt % or more of one or more of kinds of (meth)acrylic monomers, and the vinyl monomer is subjected to a graft reaction by using an alkyl peroxide as a radical reaction initiator. | 02-11-2010 |
20110120278 | METHOD OF CUTTING THIN-WALLED MATERIAL - A method is provided to cut a thin-walled member without causing chattering vibration, without using a chattering vibration preventing retainer, that performs the following: (A) preparing a material having much stock for obtaining a thin-walled material, (B) while rotating the material about a center axis, cutting the inner round surface of the material within a predetermined range by feeding a cutting tool relative to material by the desired distance from one end side to the other end side of the material along the center axis, (C) while rotating the material about the center axis, cutting the outer round surface of the material within a predetermined range by feeding the cutting tool relative to the material by the desired distance from the one end side to the other end side of the material along the center axis, and (D) alternately repeating (B) and (C) to finish cutting the material. | 05-26-2011 |
20120004371 | CURABLE COMPOSITION - Provided is a curable composition which realizes compatibility between curability and toughness, shows rapid curability and excellent storage stability, and does not require any tin catalyst. The curable composition comprises: (A) a vinyl-based resin obtained by causing a compound (I) represented by the following general formula (1) and a compound (II) represented by the following general formula (2) to react with each other; (B) a urethane-based resin obtained by causing a hydroxyl group-containing organic polymer, a polyisocyanate compound, a compound (III) represented by the following general formula (3), and an amine compound to react with one another; and (C) a curing catalyst. | 01-05-2012 |
20120310594 | INCLINATION ANGLE CALCULATION DEVICE - An inclination angle calculation device comprises a motion detector for detecting motions of a traveling object during travel, in two directions included in a cross-section surface of the traveling object, the two directions being orthogonal with each other; and an arithmetic unit for calculating an inclination angle of the traveling object during travel in the cross-section surface, using a frequency of the motion in one of the two directions and a rolling frequency in the other direction of the two directions. | 12-06-2012 |
20130132025 | CENTER-OF-GRAVITY DETECTING SYSTEM - A center-of-gravity detecting system includes a motion detector for detecting a vertical motion of a travelling object and a horizontal motion of the travelling object and an arithmetic unit that calculates a center-of-gravity location of the travelling object using the frequency of a vertical motion of the travelling object, a frequency of the horizontal motion of the travelling object, a central angle of the horizontal motion of the travelling object, and the width of the traveling object. The arithmetic unit calculates a center-of-gravity location, using the frequency of the vertical motion, a frequency of the horizontal motion, the center-of-gravity location, and the length of the travelling object in the travel direction. | 05-23-2013 |
20140260569 | CENTER-OF-GRAVITY DETECTING SYSTEM - There is provided a highly versatile center-of-gravity detecting system which can accurately detect the center of gravity of not only a container cargo vehicle but also various detection objects. | 09-18-2014 |
20140331748 | LATERAL ROLLOVER LIMIT DETECTION SYSTEM - Provided is a lateral rollover limit detection system which can determine the lateral rollover danger of a structure for which the weight or the weight distribution has not been clarified. A placement board, springs, and detection object are provided as a structure in which the placement board is supported with springs on both sides of an oscillation central axis with an acceleration sensor for detecting the reciprocating motion in an up-down direction of the placement board, and an arithmetic part which, on the basis of the inclination angle of the placement board in a direction of rotation around the oscillation central axis with respect to the horizontal plane in a standstill state of the detection object and the detection result by the acceleration sensor, calculates a limit center-of-gravity height beyond which the detection object is rolled over for a center-of-gravity location on the placement board of the structure being provided. | 11-13-2014 |
20150134293 | CAPSIZE RISK LEVEL CALCULATION SYSTEM - Provided is a capsize risk level calculation system which can calculate a capsize risk level providing an index of the capsize risk on an oscillation of hull without using hull information. This system includes an acceleration sensor detecting a reciprocating motion in an up-down direction of a vessel as an oscillation in an up-down direction of a virtual oscillation center axis; an angular velocity sensor detecting a simple pendulum motion in a rolling direction around the vessel center axis as a simple pendulum motion of the vessel COG around the oscillation center axis; and an arithmetic part calculating a capsize risk level from an oscillation radius connecting between the oscillation center axis and the vessel COG, and a capsize limit oscillation radius connecting between the oscillation center axis and the vessel metacenter, which are obtained on the results of detection by the acceleration sensor and the angular velocity sensor. | 05-14-2015 |
Patent application number | Description | Published |
20090248916 | Storage system and control method of storage system - The storage system includes a first storage subsystem having a first logical volume to be accessed by a host computer, and a second storage subsystem connected to the first storage subsystem and having a second logical volume to be mapped to the first logical volume. The first storage subsystem includes a memory having definition information for defining a plurality of logical paths that transfer, to the second logical volume, I/O from the host computer to the first logical volume, and a transfer mode of the I/O to the plurality of logical paths. At least two or more logical paths among the plurality of logical paths are defined as active, and the controller transfers the I/O to the at least two or more logical paths set as active. | 10-01-2009 |
20120072623 | Storage control device and raid group extension method - The storage system includes a first storage subsystem having a first logical volume to be accessed by a host computer, and a second storage subsystem connected to the first storage subsystem and having a second logical volume to be mapped to the first logical volume. The first storage subsystem includes a memory having definition information for defining a plurality of logical paths that transfer, to the second logical volume, I/O from the host computer to the first logical volume, and a transfer mode of the I/O to the plurality of logical paths. At least two or more logical paths among the plurality of logical paths are defined as active, and the controller transfers the I/O to the at least two or more logical paths set as active. | 03-22-2012 |
20120124309 | COMPUTER SYSTEM AND STORAGE MIGRATION METHOD - Proposed are a computer system and a storage migration method capable of simplifying the migration process of a storage apparatus while avoiding the performance degradation of the overall system. | 05-17-2012 |
Patent application number | Description | Published |
20110157704 | ANTIREFLECTIVE FILM AND PRODUCTION METHOD THEREOF - It is aimed at finding out a surface pattern and physical properties required for an antireflective film having an excellent antireflective property for light, a light transmissivity, and the like, and at providing an antireflective film having such a specific surface pattern and physical properties, and a production method of the antireflective film; and provided for this object, is an antireflective film, obtained by: processing a surface of an aluminum material, by mechanical polishing, chemical polishing and/or electrolytic polishing; subsequently producing a pattern of mold having taper-shaped pores on the surface of the aluminum material, by combining a formation of an anodic oxide coating based on anodic oxidation of the surface of the aluminum material, with etching of the anodic oxide coating; and transferring the pattern of mold onto an antireflective film-forming material; wherein the antireflective film has, on a surface thereof, convexities having an average height between 100 nm inclusive and 1,000 nm inclusive, or concavities having an average depth between 100 nm inclusive and 1,000 nm inclusive, and the convexities or concavities are present at an average period between 50 nm inclusive and 400 nm inclusive, at least in a certain single direction; and wherein the antireflective film has a haze of 15% or less. | 06-30-2011 |