Patent application number | Description | Published |
20120231243 | CERAMIC MATERIAL, LAMINATE, MEMBER FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND SPUTTERING TARGET MEMBER - A ceramic material mainly contains magnesium, aluminum, oxygen, and nitrogen, in which the ceramic material has a magnesium-aluminum oxynitride phase serving as a main phase, wherein XRD peaks of the magnesium-aluminum oxynitride phase measured with CuKα radiation appear at at least 2θ=47 to 50°. | 09-13-2012 |
20120231945 | CERAMIC MATERIAL, MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, SPUTTERING TARGET MEMBER AND METHOD FOR PRODUCING CERAMIC MATERIAL - A ceramic material according to the present invention mainly contains magnesium, aluminum, oxygen, and nitrogen, the ceramic material has the crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved in magnesium oxide, the crystal phase serving as a main phase. Preferably, XRD peaks corresponding to the (200) and (220) planes of the MgO—AlN solid solution measured with CuKα radiation appear at 2θ=42.9 to 44.8° and 62.3 to 65.2°, respectively, the XRD peaks being located between peaks of cubic magnesium oxide and peaks of cubic aluminum nitride. More preferably, the XRD peak corresponding to the (111) plane appears at 2θ=36.9 to 39°, the XRD peak being located between a peak of cubic magnesium oxide and a peak of cubic aluminum nitride. | 09-13-2012 |
20120240538 | HONEYCOMB FILTER AND MANUFACTURING METHOD OF THE SAME - There is provided a honeycomb filter including: a honeycomb base material; plugged portions; and a porous collecting layer disposed on the surface of the partition wall parent material in at least the remaining cells. The collecting layer has a constitution in which a plurality of particles combine or intertwine with one another, and the collecting layer includes flat plate-like particles as the plurality of particles. The plurality of particles are particles in which an average long diameter is 0.2 μm or larger and smaller than 10 μm, an average value of ratios (long diameters/short diameters) of the long diameters to the short diameters of the respective particles is smaller than 3, and an average value of ratios (the long diameters/thicknesses) of the long diameters to thicknesses of the respective particles is 3 or larger. An open area ratio of the surface of the collecting layer is 10% or larger. | 09-27-2012 |
20120240541 | HONEYCOMB FILTER AND MANUFACTURING METHOD OF THE SAME - There is provided a honeycomb filter including: a honeycomb base material; plugged portions; and a porous collecting layer disposed on the surface of the partition wall parent material in at least the remaining cells. The collecting layer has a constitution in which a plurality of particles combine or intertwine with one another, and the collecting layer includes fibrous fiber particles as the plurality of particles, and includes the particles having an average fiber diameter of 0.1 to 15 μm and an average aspect ratio of 3 or larger. An open area ratio of the surface of the collecting layer is 20% or larger. | 09-27-2012 |
20130015134 | CARBON MEMBRANE AND METHOD FOR PERVAPORATION SEPARATION - There is provided a carbon membrane formed by carbonizing a phenol resin having at least one kind of atomic groups selected from the group consisting of a methylene bond, a dimethylene ether bond, and a methylol group, wherein the total mole content rate of the atomic groups is 100 to 180% with respect to the phenolic nuclei. | 01-17-2013 |
20130220988 | HEATING DEVICE - A heating apparatus includes a susceptor having a heating face of heating a semiconductor and a supporting part joined with a back face of the susceptor. The susceptor comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray. | 08-29-2013 |
20130228565 | HEATING DEVICE - A heating apparatus | 09-05-2013 |
20130228566 | HEATING DEVICE - A heating apparatus | 09-05-2013 |
20130229746 | ELECTROSTATIC CHUCK - An electrostatic chuck | 09-05-2013 |
20130235507 | ELECTROSTATIC CHUCK - Electrostatic chucks ( | 09-12-2013 |
20140199478 | METHOD FOR PRODUCING CARBON MEMBRANE - Provided is a method of producing a carbon membrane including dipping a porous support in a suspension of a phenolic resin or a suspension of a phenolic resin precursor, drying the resulting support to form a membrane made of the phenolic resin or the phenolic resin precursor, and heat treating and thereby carbonizing the resulting membrane into a carbon membrane. | 07-17-2014 |