Patent application number | Description | Published |
20130178979 | TRANSFER SYSTEM - A transfer system according to an embodiment includes a plurality of robot hands, a storage unit, and an instructing part. The robot hands are operable to hold a thin sheet-like workpiece. The storage unit stores therein speed information that represents a temperature of the workpiece associated with a specified speed of a robot hand that holds the workpiece. The instructing part extracts the specified speed for each robot hand from the speed information and instructs to move all of the robot hands at or lower than a representative speed determined based on a set of extracted specified speed data. | 07-11-2013 |
20130190924 | ROBOT SYSTEM - A robot system according to the embodiments includes a robot that includes a hand including a gripping mechanism that grips a thin plate-shaped work and an arm that moves the hand, and a robot control apparatus that controls the robot. The robot control apparatus, when causing the robot to transfer the work at a predetermined work transfer position by controlling the robot, performs a presence/absence confirmation of the work by operating the gripping mechanism while causing the hand to retract after the hand reaches the work transfer position. | 07-25-2013 |
20130195584 | CONVEYING SYSTEM - A conveying system according to an embodiment includes a robot and a controller. The controller includes a switching unit. The robot includes an arm unit formed of a hand and a plurality of arms connected rotatably with respect to one another, and a base unit. An arm on a rear end side is connected to the base unit rotatably about a rotation axis, and the hand is rotatably connected to an arm on a front end side. The switching unit switches cylindrical coordinate control for controlling the arm unit such that a trajectory of the hand overlaps with any one of lines radiating from the rotation axis and rectangular coordinate control for controlling the arm unit such that the trajectory of the hand overlaps with none of the lines at a predetermined timing. | 08-01-2013 |
20130195601 | TRANSFER SYSTEM - A transfer system according to an embodiment includes a transfer room, a robot, a trajectory generator, a determination unit, and an output unit. The transfer room has an exclusive area defined by a predetermined distance. The robot has an arm unit that is equipped with a robot hand transferring a thin plate-like workpiece and that operates in horizontal directions. The robot is installed in the transfer room so that a minimum turning area of the arm unit overlaps with a part of the exclusive area. The transfer system generates a trajectory of the robot hand, then determines, based on the generated trajectory, whether a part of the arm unit is included in the exclusive area, and outputs a predetermined signal. | 08-01-2013 |
20140133942 | SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE PROCESSING SYSTEM - A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus comprising an opening. The substrate transfer robot includes a hand and an arm. The hand is configured to support a substrate. The arm is configured to move the hand. The arm and the hand supporting the substrate are configured to rotate on a horizontal surface within a minimal rotation area of the substrate transfer robot such that an outer periphery of the minimal rotation area overlaps an inside of the second apparatus through the opening so as to transfer the substrate from a first position in the first apparatus to a second position in the second apparatus through the opening. | 05-15-2014 |
20140350714 | SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER SYSTEM, AND METHOD FOR TRANSFERRING SUBSTRATE - A substrate transfer robot includes a hand to approach a substrate storage on which a substrate is placed, and to hold the substrate. An arm moves the hand. A controller controls a position and orientation of the hand. When in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line. The hand center line is oriented from a base to a distal end of the hand. The access straight line is perpendicular to a front surface of the substrate storage and associated with the hand approaching the substrate storage. | 11-27-2014 |
20150174763 | DETECTION SYSTEM AND DETECTION METHOD - A detection system includes: a rotator that causes a mounting base where a circular substrate is to be mounted to rotate around a rotation axis; a detector that detects presence or absence of an outer peripheral portion of the rotating substrate at a plurality of respective detecting positions having different distances from the rotation axis; and a determiner that determines an eccentric state of the substrate based on detection information, the detection information being a combination of a phase of the mounting base when the presence or absence of the outer peripheral portion is switched and the detecting positions. | 06-25-2015 |
20150179491 | ROBOTIC SYSTEM AND DETECTION METHOD - A robotic system includes: an arm configured to carry a substrate to a mounting base; a hand disposed at a tip portion of the arm, the hand being configured to hold the substrate when the substrate is carried; a detector disposed on the hand, the detector being configured to detect the substrate; and an acquirer configured to recognize heights of the detector when the substrate is detected at a first position and a second position by the detector as heights of the substrate at respective positions and acquire a mounted-state of the substrate mounted on the mounting base based on the height of the substrate at the first position and the height of the substrate at the second position. | 06-25-2015 |